JP5607423B2 - Wrapping carrier - Google Patents

Description

  The present invention relates to a wrapping carrier used for a lapping machine or a polishing machine for polishing the surface of a hard brittle material such as quartz, silicon crystal, ceramic, or special glass.

  In the lapping process for polishing hard brittle materials such as quartz and silicon crystal, the work material provided in the lapping carrier is loaded with the material to be polished, and the lower surface plate and the upper surface plate are pressed and sandwiched. This is done by rotating each surface plate in the reverse direction. Here, the wrapping carrier is configured to perform planetary motion due to the difference in the rotational speed between the internal gear and the sun gear, whereby the workpiece is lapped on both sides simultaneously.

  More specifically, a work force in the work hole is applied to the work piece in the work hole in the horizontal direction through the lapping carrier, and in addition, in the vertical direction, a pressure is applied to process the thickness. Is added. Then, since there is an appropriate gap between the work hole inner peripheral surface and the workpiece, the inner peripheral surface of the work hole and the outer peripheral surface of the workpiece are in contact with each other during processing, Moreover, the state which contacts and leaves | separates is repeated.

  Accordingly, a corresponding force is applied to the outer peripheral surface of the workpiece that comes into contact with the inner peripheral surface of the work hole, and stress is generated. In particular, in a situation where contact and separation are repeated, the generation of stress is intermittent and also a sudden impact. When the workpiece is a brittle material as described above, the stress causes microcracks (fine cracks) and large cracks. When a microcrack or the like occurs, the workpiece in the range where the microcrack occurs and the vicinity of the workpiece become defective parts, and the yield of the product deteriorates.

  As an improvement measure that does not cause defective parts such as microcracks in a brittle material, as shown in Patent Documents 1 and 2, an elastic resin is attached to the inner peripheral surface of a work hole formed on a metal wrapping carrier, Alternatively, the wrapping carrier itself is made of resin and used. These products are the result of thought to reduce the impact at the contact point between the work piece and the inner peripheral surface of the work hole, or to cause a gentle stress change.

Japanese Patent Laid-Open No. 61-209877 JP 2000-117621 A

  However, in the above-mentioned publicly known patent documents, there are few adhesion areas of the resin provided on the inner peripheral surface of the metal carrier body and the work hole, the influence of mechanical force such as pressure applied from the vertical direction during processing, etc. In other words, there is a problem that the life of the wrapping carrier is shortened due to these complex factors, such as physical failure that causes the resin to peel off and chemical failure that the adhesive part deteriorates and peels due to the chemical effect of lapping liquid or polishing liquid. It has occurred. Further, in the case where the resin is fixed to the inner peripheral surface of the work hole of the metal carrier with an adhesive, there is a problem that the hardness of the adhesive layer physically affects the workpiece through the resin.

  Therefore, the present invention provides a horizontal stress applied to a workpiece loaded in the work hole by drilling a hole around the work hole without providing an elastic body on the inner peripheral surface of the work hole. The purpose is to calm and suppress the occurrence of defects.

Wrapping the carrier according to the present invention, a plurality of through-holes of arc shape a plurality of workpieces hole is formed in a circular shape to the carrier body consists of two arcs having different diameters along the circumference direction of the workpiece hole By forming this through hole, a frame portion and a support body supporting this frame portion are provided inside, and this support body is located between adjacent arc-shaped through holes, and the length and width thereof are The angle between the extension line and the outer peripheral surface of the work hole is determined to be an acute angle (claim 1).

As a result, the remaining part becomes a frame part for loading the workpiece by the hole machining on the carrier body, and the angle formed between the extended line and the outer peripheral surface of the work hole by the plurality of supports supporting the frame part. By forming an acute angle , the support gives a spring action, and a function of relieving the horizontal stress on the workpiece can be obtained. For the above-described hole machining, general machining, machining such as laser, etching or the like is used.

  The frame portion may be a polygon such as a circle, a rectangle, a pentagon, or a hexagon suitable for loading a workpiece. (Claim 2).

  The support preferably has a spring action (Claim 3), and this spring action is obtained by thinning or lengthening the support by drilling a through hole with respect to the carrier body, so that the stress in the horizontal direction is obtained. Is responsible for alleviating

As described above, according to the present invention, the frame having a work hole is supported more by the support, but the support is formed so that the angle between the extension line and the outer peripheral surface of the work hole is an acute angle. Since the frame body is floated by the support body, the horizontal stress applied to the workpiece during processing can be relieved. Further, the support body has a spring action from its shape, and is effective for stress relaxation. Further, since it is formed on the carrier body, there is an effect that it is not necessary to add new parts if it is molded. Since the through hole is provided immediately next to the work hole, the machining fluid can be easily supplied to the work and the supply is abundant (Claim 1).

  The shape of the frame portion is arbitrary, and may be a polygon such as a circle, a quadrangle, a pentagon, and a hexagon (Claim 2).

  Since the support is thin and long, it has a spring action, so that an effect of promoting a stress relaxation action in the horizontal direction can be obtained.

It is a top view of the wrapping carrier of this invention. It is a front view same as the above. It is an enlarged view around a work hall same as the above. It is a partial enlarged view of a work hall same as the above. FIG. 4B is a cross-sectional view taken along the line BB. It is a top view with the linear support body which the work hole of this invention supports the frame in a circular hole. It is a top view which has the linear support body which the work hole of this invention supports the frame in a square hole. FIG. 3 is a plan view of a work hole according to the present invention having a linear support body that supports a frame body in a polygonal hole. It is a modification of the support body which supports the frame body of this invention, and is a top view with a linear support body. It is a top view with a bent support body in the modification of the support body which supports the frame of this invention. It is a modification of the support body which supports the frame body of this invention, and is a top view with one support body. It is a modification of the support body which supports the frame body of this invention, and is a top view which has an outline on the outer side of a support body.

  Embodiments of the present invention will be described below with reference to the drawings.

  1 to 5, a wrapping carrier made of metal or resin is shown. The wrapping carrier 1 is used for a lapping machine or the like, and is used for polishing the surface of a fragile material such as crystal, glass, or ceramic. These are loaded into the work hole 4 and used.

  First, a lapping machine in which the wrapping carrier 1 of the present invention is used will be described. A known structure (not shown) is provided with a pair of upper and lower surface plates, one lower surface plate having a recess, and an external gear at the center. The sun gear is provided with an internal gear that is concentric with the sun gear, and the lower surface plate and the sun gear are rotated concentrically with respect to the base.

  Then, the upper surface plate is provided so as to be movable up and down above the lower surface plate. The upper surface plate descends and the work piece loaded on the wrapping carrier is sandwiched between the lower surface plate and the work surface of the work piece. While applying pressure, it is rotated in the direction opposite to the rotation direction of the lower surface plate, the wrapping carrier is caused to perform planetary movement due to the difference in the rotation speed between the internal gear and the sun gear, and the workpiece is simultaneously coated on both sides. Polished.

  The wrapping carrier 1 is a disc and is manufactured from various metal plate materials having a thickness of more than 0.015 mm. A gear 3 that meshes with an internal gear and a sun gear is formed on the outer periphery of the wrapping carrier body 2. Yes. In this wrapping carrier main body 2, an appropriate number of work holes 4 for loading a workpiece from the flat surface to the back surface are formed, in this embodiment, four. For the processing of the work hole 4, general machining (cutting or grinding), laser processing, etching using a corrosive liquid, or the like is used. In this example, the wrapping carrier 1 is formed of a metal material as described above, but can also be manufactured of a non-metal material such as a resin material or ceramic.

  In the wrapping carrier main body 2, a plurality of elongated through holes 6 are formed along the periphery of the work hole 4, and in this embodiment, six are formed. The through hole 6 is also processed by machining or the like, similar to the work hole processing described above. In this example, the through hole 6 is formed of two circular arcs having different diameters, and six are arranged in a row, and a circular frame 7 is provided between the through hole 6 and the work hole 4. It has been.

  The frame body 7 corresponds to a suitable shape having a work hole 4 in which a workpiece is loaded, and has a circular shape suitable for a circular workpiece in the illustrated example. According to the shape, a polygonal shape such as a quadrangular shape or a pentagonal shape is used.

  The frame body 7 is supported by a thin and long support body 8 remaining between the through holes 6. These six supports 8 are formed. The thin and long support 8 has a length l of several centimeters and a thin width A of several millimeters, and the angle θ formed by the extension line and the outer peripheral surface of the work hole 4 is an acute angle ( (Shown in FIG. 4).

  The support 8 is given a function of a leaf spring because of its structure, and supports the frame 7 so as to float. That is, the frame body 7 into which the workpiece is loaded is given a cushioning action by the support body 8. Further, since the through-hole 6 is provided immediately beside the work hole 4, it is easy to supply the machining fluid to the work and a rich supply is performed.

  6 to 8, examples of the formation of the support 8 according to the shape of the work hole 4. In FIG. 6, the work hole 4 has a circular work hole 4, and five through holes 6 are formed. Five linear supports 8 are made between them, and the frame 7 is supported. In FIG. 7, a rectangular work hole 4 is provided, four through holes 6 are formed, and four linear supports 8 are formed between the through holes 6 to support the frame body 7. It has a structure. In FIG. 8, a pentagonal work hole 4 is provided, five through holes 6 are formed, and five linear support bodies 8 are formed between the through holes 6 to support the frame body 7. It has a structure.

  In FIG. 9, a rectangular work hole 4 is shown as a modification of the support 8 and is formed in a straight line parallel to one side of the work hole 4, and both ends thereof are bent, and the frame 7 and the wrapping carrier main body 2 are formed. It is connected to. For this reason, the through hole 6 is deformed corresponding to the shape of the support 8.

In FIG. 10, in a modified example of the support body 8, the shape is bent between the through holes 6. That is, the through hole 6 is also deformed corresponding to the bent shape of the support 8.
Thereby, the spring action of the support body 8 can be further relaxed, and the horizontal stress applied to the workpiece can be relaxed. In addition, although the example which made the work hole 4 circular is shown in figure, it is needless to say that it is applicable not only to this but to a rectangle and a polygon.

  In FIG. 11, as a modification of the support body 8, one through hole 6 is formed around the work hole 4, and one support body 8 is provided between the end portions of the through hole 6 to support the frame body 7. It is an example. Since there is one support 8, the frame 7 is arranged so as to float, so that it acts to relieve the horizontal stress on the workpiece. In addition, although the example which made the work hole 4 circular is shown in figure, it is needless to say that it is applicable not only to this but to a rectangle and a polygon.

  In FIG. 12, in the modified example of the support 8, in the embodiment shown so far, one end of the support 8 is connected to the frame body 7 and the other end is connected to the wrapping carrier main body 2. The other end of the support body 8 is surrounded by an outer shell 10, and the outer shell 10 is formed by two through holes 6 ′, thereby being supported by the two support bodies 8 ′ formed. Thereby, the relaxation of the horizontal stress applied to the workpiece during processing can be further promoted.

DESCRIPTION OF SYMBOLS 1 Lapping carrier 3 Gear 4 Work hole 6 Through hole 7 Frame body 8 Support body 10 Outline

Claims (3)

A plurality of work holes are formed in a circular shape in the carrier body, and a plurality of arc-shaped through holes formed of two arcs having different diameters along the peripheral radial direction of the work holes are formed. A frame portion and a support body that supports the frame portion are provided on the inner side, and the support body is located between adjacent arc-shaped through holes, the length and width of which are determined, and the extension line And a wrapping carrier formed so that an angle formed between the outer periphery of the work hole and the outer peripheral surface of the work hole is an acute angle .   The wrapping carrier according to claim 1, wherein the frame portion has a shape suitable for being loaded with a workpiece.   The wrapping carrier according to claim 1, wherein the support has a spring action.

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