JP5622082B2 - Electrostatic actuator - Google Patents

Description

  The present invention relates to an electrostatic actuator.

  2. Description of the Related Art Conventionally, there has been known an electrostatic actuator including a stator provided with electrodes, and a movable element disposed on the stator and having a resin substrate and a resistor film provided on the resin substrate. It has been.

  In such a conventional electrostatic actuator, for example, a display sheet (moving element) disposed only on one surface (outer surface) of the endless track body (stator) is provided on the endless track body (stator). Some move on one surface (see, for example, Patent Document 1).

  In addition, other conventional electrostatic actuators include, for example, a cylindrical stator and a cylindrical movable element arranged outside the stator, and the stator and the movable element are coaxial. Some are arranged (for example, refer to Patent Document 2). The mover rotates along the circumferential direction of the stator.

  However, in the above two conventional electrostatic actuators, the mover moves only on one surface of the stator.

  Therefore, in the above two conventional electrostatic actuators, for example, in an application such as an advertisement in which one side of the moving element is intentionally shown, the visible part is only one side of the stator, and the visibility as an advertisement is low. There's a problem.

JP-A-11-249598 JP-A-7-20389

  The present invention has been made in consideration of such points, and provides an electrostatic actuator capable of improving visibility by operating a moving element on both sides of a stator.

An electrostatic actuator according to an aspect of the present invention is provided.
A strip-shaped first substrate having one end and the other end, an electrode provided on one surface of the first substrate, and a cover provided on the one surface of the first substrate so as to cover the electrode A stator having a layer, and
A mover disposed on the stator, and
The stator is an electrostatic actuator configured by twisting the one end of the first substrate at an odd number of times at 180 ° and connecting to the other end.

In the electrostatic actuator,
The mover includes a pair of movers having a second substrate and a charging layer,
One moving element is disposed on one surface of the cover layer,
The other mover is disposed on the other surface of the first substrate,
The distance from the charging surface of the charging layer of the one moving element to the electrode may be substantially the same as the distance from the charging surface of the charging layer of the other moving element to the electrode.

An electrostatic actuator according to another aspect of the present invention includes:
A strip-shaped first substrate having one end and the other end, an electrode provided on one surface of the first substrate, and a cover provided on the one surface of the first substrate so as to cover the electrode A stator having a layer, and
A mover disposed on the stator, and
The electrostatic actuator is characterized in that the distance from the other surface of the first substrate to the electrode and the distance from the surface of the cover layer on the side where the moving element is disposed to the electrode are the same. .

In the electrostatic actuator,
The mover includes a pair of movers having a second substrate and a charging layer,
One moving element is disposed on one surface of the cover layer,
The other mover is disposed on the other surface of the first substrate,
The distance from the charging surface of the charging layer of the one moving element to the electrode may be substantially the same as the distance from the charging surface of the charging layer of the other moving element to the electrode.

In the electrostatic actuator,
The stator may be configured by twisting the one end of the first substrate at an odd number of times at 180 ° and connecting it to the other end of the first substrate.

An electrostatic actuator according to still another aspect of the present invention is:
A stator having an annular substrate and an electrode provided in the substrate;
A mover disposed on the stator, and
In the stator, the substrate is twisted and one surface of the substrate is continuous with the other surface of the substrate.

  An electrostatic actuator according to the present invention includes a belt-like substrate having one end and the other end, an electrode provided on one surface of the substrate, and a cover layer provided on one surface of the substrate so as to cover the electrode. , And a mover disposed on the stator.

  The stator is configured by twisting one end of the substrate 102 at an odd number of times at 180 ° and connecting it to the other end. Further, the thickness of the substrate and the cover layer is substantially the same, and the movable element is movable on any plane of the substrate and the cover layer.

  Thereby, the mover can move in a Mobius ring shape on both sides of the stator. That is, the electrostatic actuator can improve the visibility by operating the mover on both sides of the stator.

It is a perspective view which shows an example of a structure of the electrostatic actuator by this invention. FIG. 2 is a top view schematically showing the electrostatic actuator shown in FIG. 1. It is sectional drawing which shows the cross section of the electrostatic actuator along the AA line of FIG. It is a figure which shows an example of a structure of the electrostatic actuator by which the board | substrate was connected to the ring shape of Mobius. It is a wave form diagram which shows an example of the waveform of the signal applied to a linear electrode.

  Embodiments of an electrostatic actuator according to the present invention will be described below with reference to the drawings.

  FIG. 1 is a perspective view showing an example of the configuration of an electrostatic actuator 100 according to the present invention. FIG. 2 is a top view schematically showing the electrostatic actuator 100 shown in FIG. 3 is a cross-sectional view showing a cross section of the electrostatic actuator 100 along the line AA in FIG.

  For simplicity, in FIG. 2, the cover film 103, the sliding structure films 104 and 105, and the movable element 2 disposed on the surface of the substrate 102 are omitted.

  As shown in FIGS. 1 to 3, the electrostatic actuator 100 includes a belt-like substrate 102 having one surface 102 x and another surface 102 y, one end 102 a and the other end 102 b, and one surface 102 x of the substrate 102. Are provided independently on each other, and are provided on one surface 102x of the substrate 102 so as to cover the plurality of linear electrodes 1a to 1d and the plurality of linear electrodes 1a to 1d arranged at equal intervals in parallel with each other. A stator 1 having a strip-shaped cover film (cover layer) 103 and sliding structure films 104 and 105, a linearly placed electrode 1a to 1d of the stator 1, and a resin substrate. And a pair of movers 2 having a resistor film (charged layer) 2b.

  Signals a to d for driving the mover 2 are input to the 4-wire electrostatic actuator 100 from a drive circuit (not shown). At this time, the signals a to d are respectively applied to the linear electrodes 1a to 1d via the bus lines 101a to 101d, the through-hole wirings 1b2 and 1d2, and the pad electrodes 1b1 and 1d1.

  Hereinafter, the stator 1 will be described in more detail. As described above, the stator 1 covers the substrate 102, the plurality of linear electrodes 1a to 1d having conductivity provided on one surface 102x of the substrate 102, and the plurality of linear electrodes 1a to 1d. A belt-like cover film (cover layer) 103 provided on one surface 102x of the substrate 102.

  Furthermore, it extends to one side of the plurality of linear electrodes 1a to 1d (left side in FIG. 2) in a direction orthogonal to the plurality of linear electrodes 1a to 1d, and is respectively provided to the linear electrode 1a and the linear electrode 1b. The first bus line 101a and the second bus line 101b to be connected are provided in parallel to each other.

  Furthermore, it extends in the direction orthogonal to the plurality of linear electrodes 1a to 1d on the other side of the plurality of linear electrodes 1a to 1d (right side in FIG. 2) and is connected to the linear electrodes 1c and 1d, respectively. The third bus line 101c and the fourth bus line 101d are provided in parallel to each other.

  Further, a cover film 103 is provided so as to cover the plurality of linear electrodes 1 a to 1 d provided on one surface 102 x of the substrate 102, and a sliding structure film 104 is provided so as to cover the cover film 103.

  By the way, the substrate 102 has a thickness of, for example, 25 μm. Examples of the material used for the substrate 102 include polyimide, glass epoxy resin, phenol resin, PET (polyethylene terephthalate), PET-G (terephthalic acid-cyclohexanedimethanol-ethylene glycol copolymer), and PEN (polyethylene naphthalate). ), PP (polypropylene), PE (polyethylene), PC (polycarbonate), PA (polyamide), PPS (polyphenylene sulfide), polyvinyl chloride, vinyl chloride-vinyl acetate copolymer, cellulose diacetate, cellulose triacetate, polystyrene System, ABS, polyacrylate, polyethylene, polyurethane, etc. are selected. In particular, polyimide and PEN are preferable because of their high heat resistance and high strength.

  Further, as described above, the plurality of linear electrodes 1a to 1d are independently provided on the one surface 102x of the substrate 102, and are repeatedly arranged in a comb-like shape at equal intervals in parallel with each other. For example, the wiring electrodes 1a to 1d have a wiring pitch set to 0.3 mm or less, and the linear electrodes 1a to 1d have a thickness of, for example, when Cu is used as an electrode material on a polyimide substrate. In the case of forming ITO (indium tin oxide) as an electrode material on a PET substrate, the thickness is about 1,500 mm (see FIGS. 2 and 3).

  Further, the two first and second bus lines 101a and 101b each have a band shape, and are provided on one side (left side in FIG. 2) of the linear electrodes 1a to 1d as described above.

  Among these, the first bus line 101a is provided on one surface (upper surface) 102x of the substrate 102, and the first bus line 101a is electrically connected to the linear electrode 1a.

  The second bus line 101b is provided on the other surface (lower surface) 102y of the substrate 102, and is electrically connected to the linear electrode 1b. The substrate 102 is provided with through-hole wiring 1b2 that penetrates the substrate 102 and is connected to the second bus line 101b provided on the other surface 102y of the substrate 102. Further, a pad electrode 1b1 for connecting one side of the linear electrode 1b and the through-hole wiring 1b2 is provided on one surface 102x of the substrate 102.

  As a result, the second bus line 101b is electrically connected to the linear electrode 1b.

  Further, the two third and fourth bus lines 101c and 101d each have a strip shape, and are provided on the other side (right side in FIG. 2) of the linear electrodes 1a to 1d as described above.

  The third bus line 101c is provided on one surface (upper surface) 102x of the substrate 102 and is electrically connected to the linear electrode 1c.

  The fourth bus line 101d is provided on the other surface (lower surface) 102y of the substrate 102 and is electrically connected to the linear electrode 1d. Here, the substrate 102 is provided with through-hole wiring 1 d 2 that penetrates the substrate 102 and is connected to the fourth bus line 101 d provided on the other surface 102 y of the substrate 102. A pad electrode 1d1 that connects one side of the linear electrode 1d and the through-hole wiring 1d2 is provided on one surface (upper surface) 102x of the substrate 102.

  Thereby, the fourth bus line 101d is electrically connected to the linear electrode 1d.

  Next, the cover film 103 and the sliding structure films 104 and 105 of the stator 1 will be described in detail with reference to FIG. As shown in FIG. 3, the cover film 103 is provided on the substrate 102 so as to cover the plurality of linear electrodes 1 a to 1 d. For example, the cover film 103 has a thickness of 12.5 μm. As a material used for the cover film 103, for example, polyimide is selected.

  The sliding structure film 104 is provided on the cover film 103. The sliding structure film 104 has slidability with respect to the one moving element 2 (a resin substrate 2a described later). The sliding structure film 104 has a thickness of several nm, for example. For example, silicon is selected as the material used for the sliding structure film 104.

  The sliding structure film 105 is provided on the other surface 102 y of the substrate 102. This sliding structure film 105 has slidability with respect to the other moving element 2 (a resin substrate 2a described later). The sliding structure film 105 has a thickness of several nm, for example. For example, silicon is selected as the material used for the sliding structure film 105.

  The distances D1 and D2 from the linear electrodes (drive electrodes) 1a to 1d to the charging surface of the resistor film 2b are set to, for example, 30 μm or more and 150 μm or less.

  When the distance from the other surface 102y of the substrate 102 to the linear electrodes 1a to 1d and the distance from the one surface 103x of the cover film (cover layer) 103 to the linear electrodes 1a to 1d are the same, the stator Since the front and back of 1 have a symmetrical structure, the front and back of the stator 1 can be used in the same manner.

  Next, the moving element 2 will be described in detail with reference to FIGS. As shown in FIGS. 1 to 3, the pair of movers 2 are arranged on the stator 1. That is, one movable element 2 is disposed on one surface of cover film (cover layer) 103 (on one surface 1x of stator 1), and the other movable element 2 is disposed on the other surface of substrate 102 (of stator 1). On the other surface 1y).

  As shown in FIG. 3, the mover 2 includes a resin substrate 2a provided to face the stator 1, and a resistor film (charged layer) 2b provided on the resin substrate 2a. .

  Among these, the resin substrate 2 a is disposed so as to face and contact the stator 1. The resin substrate 2a has a thickness of about 50 μm, for example.

  Examples of the material used for the resin substrate 2a include PET (polyethylene terephthalate), PET-G (terephthalic acid-cyclohexanedimethanol-ethylene glycol copolymer), PEN (polyethylene naphthalate), PP (polypropylene), and PE. (Polyethylene), PC (polycarbonate), PA (polyamide), PPS (polyphenylene sulfide), polyvinyl chloride, vinyl chloride-vinyl acetate copolymer, cellulose diacetate, cellulose triacetate, polystyrene, ABS, polyacrylic ester Polyethylene, polyurethane, etc. are selected. In particular, PET is preferable because it is inexpensive and PEN has high heat resistance and high strength.

As described above, the resistor film 2b is provided on the resin substrate 2a, and the resistor film 2b has a thickness of about 1 μm, for example. The resistor film 2b has a surface resistance value in the range of 10 ¹¹ to 10 ¹³ Ω / □, for example.

  Here, as shown in FIG. 3, the distance D1 from the charging surface of the resistor film (charged layer) 2b of the one moving element 2 to the linear electrodes 1a to 1d, and the resistor of the other moving element 2 The distance D2 from the charged surface of the film (charged layer) 2b to the linear electrodes 1a to 1d is substantially the same.

  Thereby, the characteristics of the electric field are the same between the case where the movable element 2 is positioned on the one surface 1x of the stator 1 and the case where the movable element 2 is positioned on the other surface 1y of the stator 1. That is, the movable element 2 can operate in the same manner on the one surface 1x and the other surface 1y of the stator 1.

  In this way, the movable element 2 is movable on any plane of the substrate 102 and the cover film (cover layer) 103.

  Next, in the electrostatic actuator 100 having the above configuration, for example, an example of a configuration in which the substrate 102 of the stator 1 is connected in a Mobius ring shape in order to improve the visibility as an advertisement will be described.

  FIG. 4 is a diagram illustrating an example of the configuration of the electrostatic actuator 100 in which the substrates are connected in a Mobius ring shape.

  As shown in FIG. 4, the stator 1 includes one end 102 a of the substrate 102 (that is, one end 100 a of the stator 1) and the other end 102 b of the substrate 102 (that is, the other end 100 b of the stator 1). Are connected to form a Mobius ring. Here, the “Moebius ring” is a figure (curved surface) formed by twisting one end of a strip-shaped rectangle 180 ° and pasting it on the other end. The number of twists is not limited to one, but may be an odd number of 180 ° twists. Accordingly, in the stator 1, the stator 1 is twisted and the one surface 1 x of the stator 1 is continuous with the other surface 1 y of the stator 1.

  Instead of connecting the one end 100a and the other end 100b of the stator 1, the stator 1 may be formed in a Mobius ring by integral molding. In this case, an annular annular substrate corresponding to the substrate 102 and the cover film (cover layer) 103 is formed by integral molding. At this time, for example, the linear electrodes 1a to 1d, the pad electrodes 1b1, 1d1, and the through-hole wiring 1b2 1d2 and bus lines 101a to 101d are also formed. That is, the stator 1 includes an annular substrate formed integrally and electrodes (linear electrodes 1a to 1d, pad electrodes 1b1, 1d1, through-hole wirings 1b2, 1d2, and bus lines 101a provided in the annular substrate. ˜101d). In the stator 1, the annular substrate is twisted so that one surface of the annular substrate is continuous with the other surface of the annular substrate.

  As described above, the movable element 2 can move in a Mobius ring shape on both surfaces of the stator 1. That is, the electrostatic actuator 100 can improve the visibility as an advertisement by operating the mover on both surfaces of the stator 1.

  In addition, in the part where one end 102a of the substrate 102 (that is, one end 100a of the stator 1) and the other end 102b of the substrate 102 (that is, the other end 100b of the stator 1) are connected, each linear electrode, Wirings such as bus lines are insulated by a cover film (cover layer) 103, an adhesive (not shown) or the like so as not to contact. If there is no problem with the difficulty in connecting the bus lines and the noise generated by connecting in a ring shape, the bus lines and the respective linear electrodes may be connected.

  Next, the operation of the present embodiment having the above configuration, that is, the operation of the electrostatic actuator 100 will be described.

  First, as shown in FIG. 2, the signals a to d are input to the electrostatic actuator 100 from a drive circuit (not shown). At this time, the signals a to d are respectively applied to the linear electrodes 1a to 1d via the bus lines 101a to 101d, the through-hole wirings 1b2 and 1d2, and the pad electrodes 1b1 and 1d1.

  Here, FIG. 5 is a waveform diagram showing an example of waveforms of signals a to d applied to the linear electrodes 1 a to 1 d. Although FIG. 5 shows the case where the signals a to d are rectangular waves, the same phase relationship is obtained when the signals a to d are sine waves.

  As shown in FIG. 5, the two signals a and b input to the adjacent linear electrodes 1a and 1b are shifted by a quarter period. Similarly, the two signals b and c input to the adjacent linear electrodes 1b and 1c are shifted by a quarter period. Similarly, the two signals c and d input to the adjacent linear electrodes 1c and 1d are shifted by a quarter period.

  Thereby, the signals a and c whose phases are shifted by a half cycle are input to the linear electrode 1a and the linear electrode 1c, respectively. In addition, signals b and d whose phases are shifted by a half cycle are input to the linear electrode 1b and the linear electrode 1d, respectively.

  In this case, the resistor film 2b of the mover 2 is charged according to the signals a to d applied to the linear electrodes 1a to 1d. Then, as the voltages of the signals a to d change, before the charged portion of the mover 2 is discharged, the mover 2 moves on both sides of the stator 1 in the direction Z perpendicular to the linear electrodes 1a to 1d. , Move (FIGS. 1, 2, and 4).

  As described above, according to the electrostatic actuator according to the present embodiment, visibility can be improved by operating the mover on both sides of the stator.

  In particular, since the electrostatic actuator 100 can use the front and back of the stator 1 in the same way, the advertisement efficiency is high, such as posting advertisements on both sides of the stator 1.

  In addition, the electrostatic actuator 100 has a higher eye-catching effect due to a mysterious feeling that the moving element 2 that is visible on the first round of the Mobius ring-shaped substrate 1 is not visible on the second round, and the function as an advertisement is improved. can do.

  Further, in the electrostatic actuator 100, when the stator 1 has a Mobius ring shape, since one movable element 2 moves on both surfaces of the stator 1, using one movable element on which an advertisement is posted, The advertisement can be shown to a plurality of people located on both sides of the electrostatic actuator 100.

  Further, in the electrostatic actuator 100, when the stator 1 has a Mobius ring shape, the shape of the twisted stator 1 is unusual, so that the eye-catching effect is enhanced and the function as an advertisement can be improved. .

DESCRIPTION OF SYMBOLS 1 Stator 1a-1d Linear electrode 1b1, 1d1 Pad electrode 1b2, 1d2 Through-hole wiring 1x One surface 1y Other surface 2 Mover 2a Resin substrate 2b Resistor film 100 Electrostatic actuator 100a One end of stator 100b The other end of the stator 101a first bus line 101b second bus line 101c third bus line 101d fourth bus line 102 substrate 102a substrate one end 102b substrate other end 102x substrate one surface 102y substrate other surface 103 cover film 103x cover film One surface 104 Sliding structure film a to d Signal Z direction

Claims (2)

A strip-shaped first substrate having one end and the other end, an electrode provided on one surface of the first substrate, and a cover provided on the one surface of the first substrate so as to cover the electrode A stator having a layer, and
A mover disposed on the stator, and
The stator is configured by twisting the one end of the first substrate an odd number of times at 180 ° and connecting to the other end ,
The mover includes a pair of movers having a second substrate and a charging layer,
One moving element is disposed on one surface of the cover layer,
The other mover is disposed on the other surface of the first substrate,
The electrostatic actuator characterized in that the distance from the charging surface of the charging layer of the one moving element to the electrode is substantially the same as the distance from the charging surface of the charging layer of the other moving element to the electrode. . A strip-shaped first substrate having one end and the other end, an electrode provided on one surface of the first substrate, and a cover provided on the one surface of the first substrate so as to cover the electrode A stator having a layer, and
A mover disposed on the stator, and
The same der the distance to the electrode from the surface of the side where the mover is disposed in the cover layer and the distance to the electrodes from the other surface of the first substrate is,
The mover includes a pair of movers having a second substrate and a charging layer,
One moving element is disposed on one surface of the cover layer,
The other mover is disposed on the other surface of the first substrate,
The distance from the charging surface of the charging layer of the one moving element to the electrode and the distance from the charging surface of the charging layer of the other moving element to the electrode are substantially the same,
The stator is configured by twisting the one end of the first board at an odd number of times at 180 degrees and connecting it to the other end of the first board .

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