JP5630741B2 - Film peeling device - Google Patents

Description

  The present invention relates to film peeling for peeling off a protective film attached to one or both sides of a plate-like member such as a substrate in the production process of the plate-like member such as a printed wiring board, a liquid crystal panel, or a semiconductor wafer. Relates to the device.

  In the production of printed circuit boards, after forming a photosensitive photoresist layer on the upper surface of a conductive layer made of copper foil or the like laminated on one or both sides of an insulating substrate body, a protective film is formed on the surface of the photoresist layer. Is attached to protect the photoresist layer before exposure.

  The protective film is unnecessary when the exposed photoresist layer is developed to form a mask pattern for etching, so that the wiring pattern image is exposed to the photoresist layer for a predetermined time so that it is peeled off. It has become.

  For the operation of peeling the protective film from the substrate, a film peeling device is used. As the film peeling device, for example, as shown in FIG. 9, the edge portion of the protective film adhered to one or both sides of the substrate. There is an edge peeling mechanism that peels off the substrate from the substrate, and the edge of the protective film peeled off by the edge peeling mechanism is used as a hook to peel the entire protective film sequentially from the substrate. (For example, Patent Document 1).

  In the conventional peeling mechanism 206, the gas jets arranged on the upper and lower surfaces of the substrate are sequentially transferred by the plate-like member transfer mechanism 207 while the substrate from which the edge portion of the protective film is peeled by the edge peeling mechanism 200 is transferred. Compressed air is sprayed between the edge of the protective film peeled off from the units 208 and 208 and the substrate surface, the protective film is peeled off by the air knife effect, and the peeled portions of the protective film are arranged opposite to each other. The entire protective film is peeled off from the substrate surface by entraining and lifting between the pair of endless belts 209 and 209.

JP-A-62-83974

  However, in the conventional technology as described above, since the compressed air is injected toward the substrate surface portion, the thin substrate is pressed by the injected compressed air and swollen together with the substrate, causing distortion in the vertical direction, Such deformation of the substrate may cause a stop or failure of the apparatus.

  Therefore, in view of such a conventional problem, the present invention provides a protective film adhered to one or both sides of a plate-like member without deforming the plate-like member even if the plate-like member such as a substrate is thin. It is made for the purpose of providing the film peeling apparatus which can make it peel suitably.

The feature of the invention according to claim 1 for solving the conventional problems as described above and achieving the intended purpose is that the protective film is formed from a plate-like member having protective films attached to one upper or lower surface or both upper and lower surfaces. An end peeling mechanism that forms a notched portion in which part or all of the end edge portion is peeled, and a plate-like member transfer direction downstream side of the end peeling mechanism, and the protection based on the notched portion A main peeling mechanism for sequentially peeling the entire film, the main peeling mechanism comprising: a plate-like member transferring means for transferring the plate-like member; and a protective film and a plate-like member surface peeled off from the notched portion. A peeling means having a gas injection unit for injecting a gas between and a film removing means for transferring the peeled protective film, while transferring the plate-like member by the plate-like member transferring means, Stripped from the notch In the film peeling apparatus in which the entire protective film is sequentially peeled by jetting gas from the gas jet unit between the protective film and the plate-like member, the peeling means is transported The gas injection unit and the film removing unit are arranged on the upper surface side and / or the lower surface side of the plate-like member, and are on the opposite side of the plate-like member from the gas injection unit and downstream of the film removing unit. to counteract the pressure by the gas comprises a plate-like member supporting part for supporting the opposite surface, said plate-like member is supported by the plate-like member supporting part is the injection of a portion for receiving the gas injection of the plate-like member It is in the film peeling device .

  According to a second aspect of the present invention, in addition to the configuration of the first aspect, the peeling means arranges the gas injection unit on the upper surface side of the plate-shaped member and the plate-shaped member support portion on the lower surface side of the plate-shaped member. The upper surface side peeling means arranged on the plate-like member and the lower surface side peeling means arranged on the plate-like member upper surface side while arranging the gas injection unit on the plate-like member lower surface side, The upper surface side peeling means and the lower surface side peeling means are arranged to be spaced from each other in the plate member transport direction.

  According to a third aspect of the present invention, in addition to the configuration of the first or second aspect, the plate-like member support portion includes a plurality of receiving rollers whose rotation shafts are directed in the plate-like member width direction. It is to be prepared in parallel arrangement with each other.

  According to a fourth aspect of the present invention, in addition to the configuration of the third aspect, the adjacent receiving rollers rotate in synchronization with each other.

As described above, the film peeling apparatus according to the present invention includes a notch portion in which a part or all of the edge portion of the protective film is peeled off from a plate-like member having a protective film attached to one or both upper and lower surfaces. An end peeling mechanism to be formed, and a main peeling mechanism that is arranged downstream of the end peeling mechanism in the plate-shaped member transfer direction and sequentially peels off the entire protective film from the notch. The mechanism includes a plate-like member transfer means for transferring the plate-like member, and a peeling unit having a gas injection unit that jets gas toward the surface of the plate-like member surface between the protective film peeled off with the notched portion as a base point. And a film removing means for transferring the peeled protective film, and the protective film and the plate-like shape peeled off from the notched portion while the plate-like member is transferred by the plate-like member transferring means Between members In the film peeling apparatus configured to sequentially peel the entire protective film by jetting gas from the gas jet unit, the peeling means is arranged on the upper surface side and / or the lower surface side of the transported plate-like member. The gas jet unit and the film removing means are arranged, and the opposite surface of the plate member opposite to the gas jet unit and receiving the gas jet of the plate member downstream from the film removing means. a plate-like member supporting part for supporting the, by the plate-like member is supported by the plate-like member supporting part was made to counteract the pressure applied by the injected gas, a thin plate-like member having a substrate, etc. Even if it exists, a deformation | transformation of the plate-shaped member by gas injection can be suppressed, and a protective film can be suitably peeled from a plate-shaped member.

  In the present invention, the peeling means includes the gas jet unit disposed on the upper surface side of the plate member and the upper surface side peeling means in which the plate member support portion is disposed on the lower surface side of the plate member. The unit is arranged on the lower surface side of the plate member and the lower surface side peeling means is arranged on the upper surface side of the plate member, and the upper surface side peeling means and the lower surface side peeling means, Are arranged at intervals from each other in the plate-like member transfer direction, so that the protective films attached to the upper and lower surfaces of the plate-like member can be peeled while suppressing deformation of the plate-like member.

  Further, in the present invention, the plate-like member support portion is provided with a plurality of receiving rollers whose rotation shafts are directed in the plate-like member width direction in parallel arrangement with each other in the plate-like member transport direction, so The plate-like member can be suitably transferred while suppressing deformation of the member.

  Furthermore, in the present invention, each of the receiving rollers adjacent to each other can rotate in synchronization with each other, so that a plate-like member such as a substrate can be suitably supported, and deformation of the plate-like member is suppressed. be able to.

It is a side view which shows schematically an example of the film peeling apparatus which concerns on this invention. It is a partial expanded side view which shows the outline of an example of the edge part peeling mechanism in FIG. It is a front view which shows the outline of a film edge part peeling means same as the above. It is a partial expanded side view which shows the state of this peeling operation | movement of the upper surface side protective film in this peeling mechanism in FIG. It is a partial expanded side view which shows the state of this peeling operation | movement of a lower surface side protective film same as the above. It is a side view which shows the outline of another example of the film peeling apparatus which concerns on this invention. FIG. 6 is a partially enlarged side view showing a state of the main peeling operation of the upper surface side protective film in the main peeling mechanism in FIG. 5. It is a partial expanded side view which shows the state of this peeling operation | movement of a lower surface side protective film same as the above. It is a side view which shows the outline of an example of the conventional film peeling apparatus.

  Next, an embodiment of the film peeling apparatus according to the present invention will be described based on the embodiment shown in FIGS. In the figure, symbol A is a substrate which is a plate-like member, and symbol 1 is a film peeling apparatus.

  Further, here, the plate-shaped member transfer direction refers to a direction in which the substrate A which is a plate-shaped member directed from the right side to the left side in FIG. 1 is transferred, and the plate-shaped member width direction refers to the plate-shaped member transfer direction. The direction intersecting in the horizontal direction shall be said.

  In the substrate A, a photosensitive photoresist layer is formed on the surface of a conductive layer made of copper foil or the like laminated on both surfaces of an insulating substrate body, and a protective film B is attached to the surface of the photoresist layer. ing.

  The film peeling apparatus 1 includes a plate-like member transfer mechanism 2 for transferring the substrate A, an end peeling mechanism 3 on the upstream side in the plate-like member transfer direction, and a main peeling mechanism 4 on the downstream side. The shaped member transfer mechanism 2, the end peeling mechanism 3 and the main peeling mechanism 4 are sequence-controlled based on a command from a control unit (not shown) and operate in synchronization.

  The plate-like member transfer mechanism 2 is provided with a plurality of guide rollers 5, 5... Whose rotation axes are directed in the plate-like member width direction and arranged at intervals in the plate-like member transfer direction. It is made to rotate with the drive means which consists of a motor etc. which do not.

  The plate-like member transfer mechanism 2 includes a support frame 8 that is supported by the apparatus frame 6 via an air cylinder 7 so as to be movable up and down, and a pinch roller 9 that is rotatably supported by the support frame 8. The cylinder 7 is operated so that the pinch roller 9 is brought into pressure contact with the surface of the substrate A, and the substrate A is sandwiched between the guide roller 5 and the pinch roller 9, whereby the power from the guide roller 5 is transmitted to the substrate A. It is transported in the direction in which the shaped member is transported.

  In this film peeling apparatus 1, the front end of the substrate A in the transfer direction is sent to the end peeling mechanism 3 by the plate-like member transfer mechanism 2, and the protection adhered to one side or both sides of the substrate A by this end peeling mechanism 3. Part or all of the edge portion Ba of the film B is peeled to form a notched portion, and the entire protective film B is sequentially peeled by the peeling mechanism 4 with the notched portion as a base point.

  As shown in FIGS. 2 and 3, the end peeling mechanism 3 peels the plate member fixing means 10 for fixing the substrate A in a predetermined position and the edge portion Ba of the protective film B from the substrate A. And an end portion of the substrate A fed by the plate-like member transfer mechanism 2 is fixed by the plate-like member fixing means 10, and the protective film B end edge portion Ba is fixed to the film end portion in this state. It is made to peel by the peeling means 11. FIG.

  The film edge peeling means 11 supports, for example, a standard pressure contact roller 15 having a rotation axis directed in the plate-like member transport direction and an inclined pressure contact roller 16 having the rotation axis inclined in the plate-like member width direction arranged in the plate-like member width direction. The upper and lower support members 20 and 21 are moved relative to each other between a position where the pressure contact rollers 15 and 16 are pressed against the surface of the substrate A and a position where they are separated from each other. By moving the roller unit 17 in the width direction of the plate-like member in a state in which both the pressure contact rollers 15 and 16 are in pressure contact with the surface of the substrate A, different forces are applied to the protective film edge Ba. Acts to separate from the substrate A.

  And the board | substrate A in which the edge part peeling mechanism 3 peeled a part or all of protective film edge part Ba and formed the notch part is transferred to the downstream main peeling mechanism 4 by the plate-shaped member transfer mechanism 2. Is done.

  The peeling mechanism 4 includes a plate-shaped member transferring means 40 for transferring the substrate A, a peeling means 41 for sequentially peeling the entire protective film B from the notch, that is, the protective film edge Ba, and a peeling means 41. Film removing means 42 and 43 for transferring the protective film B peeled off by the apparatus and removing it from the apparatus, while the substrate A is transferred by the plate-like member transferring means 40 and the whole protective film B is peeled off one by one by the peeling means 41. It is like that.

  The plate-like member transfer means 40 bears a part of the plate-like member transfer mechanism 2, and a plurality of guide rollers 5, 5... Whose rotation shafts are directed in the plate-like member width direction are spaced apart in the plate-like member transfer direction. The substrate A is provided in a parallel arrangement, and the guide rollers 5, 5... Are rotated by driving means such as a motor (not shown) so that the substrates A are sequentially transferred in the plate-like member transfer direction.

  The peeling means 41 includes an upper surface side peeling means 44 for peeling the protective film B on the upper surface side of the plate member, and a lower surface side peeling means 45 for peeling the protective film on the lower surface side of the plate member. The peeling means 44 for the lower surface side and the peeling means 45 for the lower surface side are arranged at an interval in the plate member transport direction. In this embodiment, the upper surface side peel device 44 is disposed on the upstream side in the plate member transport direction. The peeling means 45 is each arrange | positioned downstream.

  As shown in FIGS. 1, 4, and 5, the upper surface side peeling means 44 includes an upper surface peeling gas jet unit 46 disposed on the upper surface side of the plate member, that is, the upper surface side of the substrate A, and a plate member. And an upper surface peeling plate-like member support portion 47 disposed on the lower surface side (lower surface side of the substrate A) and on the ejection direction side of the upper surface peeling gas jet unit 46. The substrate A is attached to the upper surface side peeling means 44. By passing it in the plate-like member transfer direction, the protective film B on the plate-like member upper surface side is sequentially peeled from the front end side in the plate-like member transfer direction.

  The upper surface peeling gas injection unit 46 includes a cylindrical tubular member 48 whose longitudinal direction is directed to the plate-like member width direction, and a plurality of injection holes 49 spaced apart in the plate-like member width direction of the tubular member 48. Is arranged.

  Each air injection port 49, 49... Is disposed toward the upstream side of the plate-like member transfer direction and obliquely downward, and the protective film edge portion peeled off from the substrate A with the substrate A and the hooking portion as a base point Compressed air is jetted toward the boundary between the portion peeled off from the surface of the substrate A and the pasted portion between Ba and Ba.

  The cylindrical member 48 is supplied with compressed air through a supply hose 48a from a gas supply unit such as an air compressor (not shown).

  In addition, the cylindrical member 48 is provided with a plurality of rollers 50 so as to be rotatable at intervals in the plate-shaped member width direction.

  The upper surface peeling plate-like member support portion 47 includes a plurality of receiving rollers 51, 51... Whose rotation axes are directed in the plate-like member width direction, and each of the receiving rollers 51, 51. Are arranged parallel to each other and their upper ends are arranged side by side on a horizontal plane in the plate-like member transfer direction, and the adjacent receiving rollers 51, 51... Are arranged in contact with each other and rotate in synchronization with each other. It has become.

  The upper surface peeling plate-like member support portion 47 supports the lower surface of the substrate which is a plate-like member over the range affected by the gas injection pressure from the upper surface peeling gas injection unit 46, and this upper surface peeling plate-like member. The reaction force is applied to the support portion 47 so that the substrate A opposes the pressure caused by the gas injection. As a result, even when the substrate A passes through the upper surface side peeling means 44, it is possible to prevent the thin substrate A from being deformed by the pressure of the injected gas, that is, the substrate A from rising.

  On the other hand, the upper surface side film removing means 42 is disposed upstream of the upper surface side peeling means 44 in the plate-like member transport direction, and the protective film B peeled off by the upper surface side peeling means 44 is removed. Yes.

  As shown in FIG. 1, the upper surface side film removing means 42 includes an introduction upstream pulley 52 disposed on the upstream side portion of the upper surface peeling gas injection unit 46 so as to be close to the substrate upper surface, and an introduction upstream pulley 52. The upstream downstream pulley 53 arranged so as to be close to the upstream upstream pulley 52 in the upstream direction of the plate-shaped member transfer, and the discharge upstream of the upstream upstream pulley 52 in the direction of the plate-shaped member transfer. An upstream pulley 54, a discharge upstream pulley 54, and a discharge downstream pulley 55 that is disposed close to each other in the vertical direction and disposed on the rear end side in the plate-like member transfer direction of the introduction downstream pulley 53. An upstream endless belt 56 is disposed between the upstream pulley 52 and the discharge upstream pulley 54, and a downstream endless belt 56 is disposed between the introduction downstream pulley 53 and the discharge downstream pulley 55. Door 57 are each wound around toward the oblique direction.

  The introduction downstream pulley 53 receives the rotational force of the motor 59 via the timing belt 58 and rotates counterclockwise in the figure to operate the upper endless belt 57 in the direction of the arrow in FIG. .

  On the other hand, the upstream endless belt 56 is arranged so that the upstream pulleys 52 and 54 are disposed close to the downstream pulleys 53 and 55, so that the upstream endless belt 57 faces and closely contacts the downstream endless belt 57. It is designed to operate in synchronization with the operation.

  And in the upper surface side film removal means 42 comprised in this way, the protective film B peeled from between the introduction upstream pulley 52 and the introduction downstream pulley 53 is introduced between both endless belts 56 and 57, The introduced protective film B is sequentially conveyed in a state of being sandwiched between the endless belts 56 and 57, and the protective film B peeled off sequentially from the front end side in the plate-shaped member transfer direction by the upper surface side peeling means 41 is discharged from the introduction side. It is intended to be removed toward the.

  Reference numeral 60 in the figure denotes an air nozzle for guiding the peeled end portion of the protective film between the introduction upstream pulley 52 and the introduction downstream pulley 53, and the protection from which compressed air is peeled off from the air nozzle 60. By spraying on the lower surface side of the film B, the end of the protective film B is guided between the introduction upstream pulley 52 and the introduction downstream pulley 53.

  On the other hand, the lower surface side peeling means 45 includes a lower surface side gas injection unit 70 disposed on the lower surface side of the plate member, and a lower surface separating plate-like member support portion 71 disposed on the upper surface side of the plate member. By passing the substrate A through the lower surface side peeling means 45 in the plate member transfer direction, the entire protective film B on the lower surface side of the plate member is sequentially peeled from the front end side in the plate member transfer direction.

  The lower surface side gas injection unit 70 includes a cylindrical tubular member 72 whose longitudinal direction is directed to the plate-shaped member width direction, and a plurality of air injection ports 73 spaced from each other in the plate-shaped member width direction of the tubular member 72. Is arranged.

  Each of the air injection ports 73, 73... Is formed between the upstream side of the plate member transfer direction and obliquely upward, and is between the lower surface of the substrate A and the peeled protective film edge Ba to protect the air. Compressed air is jetted onto the boundary portion between the peeled portion and the pasted portion of the film.

  The cylindrical member 72 is supplied with compressed air through a supply hose 72a from a gas supply unit such as an air compressor (not shown).

  In addition, the cylindrical member 72 is provided with a plurality of rollers 74 so as to be rotatable at intervals in the plate-shaped member width direction.

  The lower surface peeling plate-like member support portion 71 includes a pair of receiving rollers 75 and 75 having a rotation axis directed in the width direction of the plate-like member, and both receiving rollers 75 and 75 are arranged in parallel with each other in the plate-like member transport direction. It has been.

  Adjacent both receiving rollers 75, 75 are provided in contact with each other and rotate in synchronization with each other.

  The lower surface peeling plate-like member support portion 71 supports the upper surface of the substrate which is a plate-like member over a range affected by the gas injection pressure from the lower surface peeling gas jetting unit 70, and the substrate A is used for lower surface peeling. A reaction force is applied to the plate-like member support portion 71 to counter the pressure caused by gas injection. Thereby, even when the substrate A passes through the lower surface side peeling means 45, it is possible to prevent the thin substrate A from being deformed by the pressure received from the injected gas, that is, the substrate is lifted.

  Further, the lower surface side film removing means 43 is disposed upstream of the lower surface side peeling means 45 in the plate-like member transport direction, and the protective film B peeled off by the lower surface side peeling means 45 is removed. Yes.

  As shown in FIG. 1, the lower surface side film removing means 43 includes an introduction upstream pulley 76 disposed so as to be close to the lower surface of the substrate on the upstream side of the lower surface peeling jet unit 70 in the plate member transport direction. An upstream downstream pulley 77 disposed downstream of the upstream pulley 76 in the plate-like member transfer direction and obliquely downstream of the upstream upstream pulley 76, and an upstream upstream discharge disposed below the upstream upstream pulley 76. A pulley 78, a discharge upstream pulley 78, and a discharge downstream pulley 79 disposed obliquely below and downstream of the plate-shaped member in the transport direction. The introduction upstream pulley 76 and the discharge upstream pulley 78 Between the upstream downstream endless belt 80 and the downstream downstream pulley 77, the downstream endless belt 81 is hooked in the vertical direction. It is.

  The downstream downstream pulley 77 receives the rotational force of the motor 59 via the timing belt 58, rotates counterclockwise in the figure, and operates the downstream endless belt 81 in the direction of the arrow in the figure. .

  On the other hand, the upstream endless belt 80 is arranged so that the upstream pulleys 76 and 78 are disposed in close proximity to the downstream pulleys 77 and 79, so that the upstream endless belt 81 faces and closely contacts the downstream endless belt 81. It is designed to operate in synchronization with the operation.

  And in the lower surface side film removal means 43 comprised in this way, the protective film B peeled from between the introduction upstream pulley 76 and the introduction downstream pulley 77 is introduced between both endless belts 80, 81, The introduced protective film B is sequentially conveyed in a state of being sandwiched between the endless belts 80 and 81, and the protective film B peeled off sequentially from the front end side in the plate member transport direction by the lower surface side peeling means 45 is discharged from the introduction side. It is intended to be removed toward the.

  Reference numeral 82 in the figure is an air nozzle for guiding the peeled end portion of the protective film B between the introduction upstream pulley 76 and the introduction downstream pulley 77, and compressed air is peeled off from the air nozzle 82. The end of the protective film is guided between the introduction upstream pulley 76 and the introduction downstream pulley 77 by spraying on the lower surface side of the protection film.

  In addition, the form of the film peeling apparatus according to the present invention is not limited to the configuration as in the above-described embodiment, and may be, for example, a structure as shown in FIGS. In addition, the same code | symbol is attached | subjected to the part similar to the above-mentioned Example, and description is abbreviate | omitted.

  This film peeling apparatus 90 includes an upper surface side peeling means 91 and a lower side peeling means 92 in place of the upper surface side peeling means 44 and the lower surface side peeling means 45 described above, and the lower peeling means 92 is transferred to a plate-like member. The upper surface side peeling means 91 is arranged on the downstream side in the upstream direction.

  The lower surface side peeling means 92 includes a lower surface peeling gas injection unit 70 disposed on the lower surface side of the plate member, and a lower surface peeling plate member supporting portion 93 disposed on the upper surface side of the plate member. As shown in FIG. 7, the peeling plate-like member support portion 93 uses the introduction upstream pulley 52 constituting the upper surface side film removing means 42 as a receiving roller, and the substrate A reacts against the introduction upstream pulley 52. Thus, the pressure of the compressed air injected from the lower surface peeling gas injection unit 70 is countered.

  On the other hand, the upper surface side peeling means 91 includes an upper surface peeling gas injection unit 46 disposed on the upper surface side of the plate member, and an upper surface peeling plate member support portion 94 disposed on the lower surface side of the plate member, By passing the substrate A through the upper surface side peeling means 91 in the plate member transport direction, the entire protective film on the plate member upper surface side is sequentially peeled from the front end side in the plate member transport direction.

  As shown in FIG. 8, the upper surface peeling plate-like member support portion 94 uses a plurality of guide rollers 5, 5... Constituting the plate-like member transfer mechanism 2 as receiving rollers, and the substrate A is this guide roller. The reaction force of 5, 5... Is taken to counter the pressure of the compressed air injected from the gas injection unit 46.

  In each of the above-described embodiments, an example has been described in which the peeling means includes the upper surface side peeling means and the lower surface side peeling means, and both the peeling means are arranged at intervals in the plate-like member transfer direction. Only one of the side peeling means or the lower surface side peeling means may be provided.

  Further, the form of the plate-like member support portion is not limited to that shown in the above-described embodiments, and may be constituted by, for example, a plate-like member.

  Furthermore, the plate-like member is not limited to the above-described substrate, and the apparatus of the present application is also applicable to a plate member such as a liquid crystal panel or a semiconductor wafer that has a protective film attached to one or both sides. Can do.

A substrate B protective film 1 film peeling apparatus 2 plate-like member transfer mechanism 3 edge peeling mechanism 4 peeling mechanism 4
DESCRIPTION OF SYMBOLS 5 Guide roller 6 Frame 7 Air cylinder 8 Support frame 9 Pinch roller 10 Plate-shaped member fixing means 11 Film edge part peeling means 15 Standard pressure-contact roller 16 Inclination pressure roller 17 Roller unit 20 Upper support member 21 Lower support member 40 Plate-shaped member Transfer means 41 Peeling means 42 Upper surface side film removing means 43 Lower surface side film removing means 44 Upper surface side peeling means 45 Lower surface side peeling means 46 Upper surface peeling gas jetting unit 47 Upper surface peeling plate-like member support 48 Cylindrical member 49 Ejection port 50 Roller 51 Support roller 52 Introduction upstream pulley 53 Introduction downstream pulley 54 Discharge upstream pulley 55 Discharge downstream pulley 56 Upstream endless belt 57 Downstream endless belt 58 Timing belt 59 Motor 60 Air nozzle 70 Lower surface side gas injection unit 71 Plate member support portion 72 Cylindrical member 73 Injection port 74 Roller 75 Support roller 76 Introduction upstream pulley 77 Introduction downstream pulley 78 Discharge upstream pulley 79 Discharge downstream pulley 80 Upstream endless belt 81 Downstream endless belt 82 Air nozzle 90 Film peeling device 91 Upper surface side peeling means 92 Lower surface side peeling means 93 Lower surface peeling plate-like member support portion 94 Upper surface peeling plate-like member support portion

Claims (4)

An end peeling mechanism for forming a hooked portion by peeling off a part or all of the edge portion of the protective film from a plate-like member having a protective film attached to one of the upper and lower surfaces or both upper and lower surfaces; and It is arranged on the downstream side of the plate-shaped member transfer direction, and includes a main peeling mechanism that sequentially peels the entire protective film from the notched portion as a base point,
The peeling mechanism includes a plate-like member transferring means for transferring the plate-like member, and a gas injection unit for injecting a gas between the protective film peeled off from the notch and the plate-like member surface. And a film removing means for transferring the peeled protective film, and the protective film peeled off from the notched portion while transferring the plate-like member by the plate-like member transferring means, In the film peeling apparatus configured to sequentially peel the entire protective film by jetting gas from the gas jet unit between the plate-like members,
The peeling means arranges the gas injection unit and the film removal means on the upper surface side and / or the lower surface side of the transported plate-like member, and on the opposite surface side of the plate-like member to the gas injection unit. there are the film removal means comprises a plate-like member supporting part for supporting the opposite surface of the portion which receives the gas jet of the plate-shaped member downstream of said plate-like member is the injection is supported by the plate-like member supporting portion A film peeling apparatus characterized in that it opposes the pressure caused by the generated gas.   The peeling means includes an upper surface side peeling means in which the gas injection unit is disposed on the upper surface side of the plate member and the plate member support portion is disposed on the lower surface side of the plate member, and the gas injection unit is disposed on the lower surface of the plate member. And a lower surface side peeling means in which the plate member supporting portion is arranged on the upper surface side of the plate member, and the upper surface side peeling means and the lower surface side peeling means are in the plate member transfer direction. The film peeling apparatus according to claim 1, wherein the film peeling apparatus is spaced apart from each other.   3. The film peeling apparatus according to claim 1, wherein the plate-like member support portion includes a plurality of receiving rollers whose rotation axes are oriented in the plate-like member width direction and arranged in parallel with each other in the plate-like member transfer direction.   The film peeling apparatus according to claim 3, wherein the adjacent receiving rollers rotate in synchronization with each other.

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