JP5645587B2 - Plating machine - Google Patents

Description

  The present invention relates to a plating processing machine used for plating a small workpiece such as a medal, and more particularly to a small and compact plating processing machine suitable for use in a DTF (desktop factory).

  Various types of plating processing apparatuses are known, but in general, a plurality of processing tanks that perform pretreatment such as cleaning and rinsing, plating tanks, and post-processing such as cleaning, rinsing, and drying are performed. It has a line configuration in which a plurality of treatment tanks are arranged, so that workpieces to be plated are conveyed along the line continuously or batchwise so that each treatment is sequentially performed on the workpieces. It has become. Such a plating apparatus is disclosed in Patent Documents 1 and 2 by the present applicant.

JP 2006-111371 A Pamphlet of International Publication WO2007 / 063817

  Here, it is desirable that the plating processing apparatus used for the test research and the plating processing apparatus used for the experiment in the school have a small and compact configuration that can be placed on a table. However, conventionally, no plating apparatus suitable for such a small and compact DTF has been proposed.

  In view of this point, an object of the present invention is to propose a plating processor having a small and compact configuration.

In order to solve the above-described problems, the present invention sequentially performs each process of workpiece loading, pre-cleaning, plating, post-cleaning, drying, and workpiece discharging, and these processes are completed for one workpiece. After that, a plating machine that starts processing for the next workpiece,
A processing machine stand having a machine room formed on the lower side of the horizontal support plate and a processing room formed on the upper side;
A plurality of processing stations disposed in the processing chamber;
A workpiece transfer mechanism disposed in the processing chamber for transferring workpieces one by one via the plurality of processing stations;
A control panel for driving and controlling each part,
The plurality of processing stations include a cleaning station, a rinsing station, and a plating station arranged from a workpiece receiving position formed on the front surface of the processing chamber toward a rear end of the processing chamber, Includes a drying station and an acid cleaning station arranged from the workpiece receiving position on the workpiece discharge side formed on the front surface toward the rear end of the processing chamber ,
Each processing station, a work for moving a processing tank, a raised position raised with for transferring the work, the received work from the lowered position and the processing bath in the processing tank above between the workpiece transfer mechanism A lifting unit,
The workpiece transfer mechanism is capable of linearly reciprocating linearly moving in the processing chamber width direction, horizontally reciprocating linearly moving in the front-rear direction of the processing chamber, and capable of moving up and down in the vertical direction of the processing chamber. With grippers,
The control panel includes a workpiece cleaning process at the cleaning station, a workpiece acid cleaning process at the acid cleaning station, a pre-cleaning process including a workpiece rinsing process at the rinse station, and a workpiece plating process at the plating station. By the workpiece transfer mechanism in the processing chamber width direction and the processing chamber front-rear direction so that the post-cleaning including the workpiece rinsing processing in the rinsing station and the workpiece drying processing in the drying station are performed in this order. It is characterized by controlling the movement of the workpiece and the movement of the workpiece by the workpiece lifting / lowering unit of each processing station.

  Here, the workpiece lifting unit is tilted so that the workpiece mounting table and the workpiece mounting table are inclined at an angle of 45 degrees or less from a horizontal posture in which the workpiece mounting surface is horizontal. It can be set as the structure provided with the attitude | position switching mechanism to be made.

  If the workpiece lifting / lowering unit having this configuration is used, in each of the cleaning, the acid cleaning, and the rinsing stations, the workpiece mounting table on which the workpiece is placed is switched from the horizontal posture to the inclined posture, and the processing is performed. The workpiece immersed in the liquid stored in the tank can be pulled up from the liquid.

  If it does in this way, since a work will be pulled up from a liquid in a tilting posture, and the liquid adhering to a work will flow along the work surface at the time of pulling up and will fall from a work, there is an advantage that liquid breakage is good. What is necessary is just to set appropriately the inclination angle of the workpiece | work at the time of raising according to a workpiece | work shape, the viscosity of a liquid, etc. For example, the inclination angle may be between 10 degrees and 20 degrees.

  Further, even in the case where the processing tank of the drying station is an air drying processing tank provided with an air blow nozzle, the work mounting table on which the work is placed is changed from a horizontal posture to an inclined posture at the time of air blowing from the air blow nozzle. It is desirable to switch. By tilting the workpiece, the droplets adhering to the workpiece surface can be quickly dropped from the workpiece surface, so that the workpiece can be efficiently dried.

  Next, if the workpiece lifting unit in each processing station is a common unit having the same configuration, the number of parts can be reduced, which is advantageous in reducing the manufacturing cost of the plating processing machine. In this case, in common, the unit frame, a lifting arm that is lifted and lowered by a lifting air cylinder mounted on the unit frame, and the workpiece mounting that is attached to the lifting arm so as to be pivotable about a horizontal axis. The mounting table and the posture switching mechanism for turning the workpiece mounting table to the horizontal posture and the inclined posture around the horizontal axis by a turning air cylinder mounted on the lifting arm can be provided. .

  Moreover, the said processing tank arrange | positioned at each station of the said washing | cleaning, the said acid washing | cleaning, and the said rinse can be comprised from a beaker. Use of a commercially available beaker is advantageous for reducing the manufacturing cost of the plating processor.

  On the other hand, when a plating machine is used in a laboratory, classroom, etc., the processing chamber and the machine room are substantially sealed chambers, and communication between the process chamber and the machine room formed on the support plate. It is desirable to communicate with each other through a hole, connect an exhaust pipe to an exhaust port formed in the processing chamber, and maintain the processing chamber in a predetermined negative pressure state through the exhaust pipe.

  In this way, it is possible to prevent the smell of acid cleaning solution, plating solution and the like from flowing into the laboratory and classroom, and to prevent deterioration of the indoor environment. Further, the exhaust sucked through the exhaust pipe may be deodorized through a filter or the like and released into the atmosphere.

  In the plating machine of the present invention, the work station is transferred by the work transfer mechanism so as to perform pre-processing and post-processing of the plating process by repeatedly using the cleaning station and the rinsing station arranged in the processing chamber before and after the plating process. doing. Therefore, each processing tank arranged along the line is transferred from one side to the other side sequentially, and each processing is compared with a general plating processing apparatus in which preprocessing, plating processing and postprocessing are performed. Since the number of tanks is small and the degree of freedom of arrangement of each processing tank is high, a plating processor suitable for a small and compact DTF can be realized.

It is a perspective view which shows the whole structure of the plating processing machine to which this invention is applied. It is explanatory drawing which shows the process chamber inside of the plating processor of FIG. It is explanatory drawing which takes out and shows the gripper of FIG. It is a perspective view which takes out and shows the washing | cleaning station and rinse station of the plating processor of FIG. It is a perspective view which takes out and shows the work raising / lowering unit arrange | positioned in each station, (a) shows the state of the inclination attitude | position in a descent | fall position, (b) shows the state of the horizontal attitude | position in a raise position. It is explanatory drawing which shows the plating station of the plating processing machine of FIG.

  Hereinafter, an embodiment of a plating machine to which the present invention is applied will be described with reference to the drawings.

  FIG. 1 is a perspective view showing the overall configuration of a plating machine according to an embodiment of the present invention. The plating processor 1 receives, for example, medal-shaped workpieces one by one and sequentially performs pre-cleaning, plating, post-cleaning, and drying processes. The pedestal 2 of the plating machine 1 is provided with a horizontal rectangular support plate 3 that is long in the front-rear direction at a predetermined height, a rectangular parallelepiped machine room 4 is formed on the lower side, and a rectangular parallelepiped-shaped machine room 4 is formed on the upper side. A processing chamber 5 is formed. The length of the processing chamber 5 in the front-rear direction is shorter than that of the machine chamber 4, and the portion of the support plate 3 on the front side of the processing chamber 5 serves as a workpiece input / discharge table 3a. Further, a control panel 6 for controlling each part is attached to the rear end portion of the outer surface of the processing chamber 5 as indicated by an imaginary line in FIG.

  The machine chamber 4 and the processing chamber 5 are composed of frame members 4a and 5a assembled in a rectangular parallelepiped shape, and transparent or opaque rectangular panels 4b and 5b attached thereto, and are substantially sealed chambers. The machine chamber 4 and the processing chamber 5 communicate with each other through a communication hole 3 b formed in the support plate 3. An exhaust port 5d is formed at the upper end portion of the rear surface of the processing chamber 5, and an exhaust pipe 7 is connected thereto. The other end of the exhaust pipe 7 communicates with the suction machine 8, and the inside of the processing chamber 5 and the machine chamber 4 is maintained at a negative pressure slightly lower than the atmospheric pressure during operation, and the odor leaks to the outside. There is no such thing. Exhaust air sucked into the suction device 8 is deodorized and filtered through a filter (not shown) and then released into the atmosphere. An opening / closing door 5c is attached to the rear surface of the processing chamber 5, through which maintenance and inspection work can be performed.

  FIG. 2 is a partial perspective view showing the inside of the processing chamber 5. Referring to FIGS. 1 and 2, a plurality of processing stations are mounted on the support plate 3 inside the processing chamber 5. In this example, a cleaning station 11, a rinsing station 12, an acid cleaning station 13, a plating station 14, a drying station 15, and an ultrasonic cleaning station 16 are mounted. Further, above these processing stations 11 to 16, a workpiece transfer mechanism 20 including a three-axis stage for transferring the workpiece w to each of the processing stations 11 to 16 is disposed. Furthermore, on the front portion of the processing chamber 5, a workpiece loading mechanism 30 for loading the workpiece w to be processed into the workpiece transfer mechanism 20 and a workpiece discharge mechanism 40 for receiving and discharging the processed workpiece w from the workpiece transfer mechanism 20. Is arranged.

  The workpiece transfer mechanism 20 includes a gate-shaped frame 21 erected on the support plate 3 at the rear end inside the processing chamber 5, and a horizontal rail extending horizontally in the width direction of the processing machine in the portal-shaped frame 21. A Z-axis stage 22 capable of reciprocating linearly in the width direction along the horizontal rail frame 21a is mounted on the frame 21a. The Z-axis stage 22 is equipped with a horizontal rail frame 22a that extends horizontally in front of the processor. An X-axis stage 23 is mounted on the horizontal rail frame 22a. The X-axis stage 23 can be moved back and forth linearly along the horizontal rail frame 22a. A vertical rail frame 23 a extending vertically is mounted on the X-axis stage 23. A Y-axis stage 24 that can be moved up and down along the vertical rail frame 23a is mounted on the vertical rail frame 23a. A gripper 25 is mounted on the Y-axis stage 24 in a vertically vertical posture.

  FIG. 3 is a partial perspective view when the gripper 25 shown in FIGS. 1 and 2 is viewed from the opposite side. The gripper 25 includes an air-driven actuator 25a arranged vertically, and three gripping claws 25b attached radially to the lower end of the actuator 25a at equal angular intervals. Each gripping claw 25b can be slid in a direction toward and away from each other by an actuator 25a. The medal-shaped workpiece w can be gripped by these gripping claws 25b and transferred to the processing stations 11-16.

  As shown in FIG. 2, the workpiece loading mechanism 30 that loads the workpiece w to be processed from the outside of the processing chamber 5 to the workpiece transfer mechanism 20 having this configuration includes an air-driven swivel actuator 31 arranged vertically, A horizontal swivel arm 32 that can be swung by the swivel actuator 31 is provided. The swivel arm 32 is located between a workpiece receiving position projecting out of the processing chamber 5 from the front surface of the processing chamber 5 and a workpiece delivery position projecting into the processing chamber 5 through a gap 5e having a constant width formed on the front surface of the processing chamber 5. Can be swiveled. The workpiece w is placed by the gripper 26 of the workpiece transfer mechanism 20 disposed inside the processing chamber 5 by placing the workpiece w on the tip of the turning arm 32 at the workpiece receiving position and turning the turning arm 32 to the workpiece delivery position. Can be gripped. The work discharge mechanism 40 has the same configuration, and includes a turning actuator 41 and a turning arm 42. The turning arm 42 projects from the front surface of the processing chamber 5 to the inside of the processing chamber 5 and the processing chamber 5 from the front surface to the outside. It is possible to turn to the workpiece discharge position that protrudes.

  Next, FIG. 4 is a view showing the cleaning station 11 and the rinsing station 12 taken out, and is a perspective view when viewed from the opposite side to FIGS. These processing stations 11 and 12 are disposed inside a rectangular parallelepiped cleaning liquid storage tank 51 that is open at the top. The cleaning station 11 includes a beaker 52 as a processing tank and a workpiece lifting / lowering unit 53 for immersing the workpiece w in the cleaning liquid stored in the beaker 52. Similarly, the rinsing station 12 includes a beaker 54 as a processing tank and a workpiece lifting / lowering unit 55 for immersing the workpiece in the rinsing liquid stored in the beaker 54. In this example, the work lifting / lowering units disposed in the processing stations 11 to 16 including the work lifting / lowering units 53 and 55 are common units having the same structure.

  A cleaning liquid, for example, cleaning water, is stored in the cleaning liquid storage tank 51 so as to be maintained at a predetermined water level. The beaker 52 of the cleaning station 11 communicates with the cleaning liquid storage tank 51 and stores cleaning water at the same water level. On the other hand, new washing water is supplied to the beaker 54 of the rinsing station 12 by a circulation pump (not shown) arranged on the machine room 4 side. An overflow hole 54 a is formed in a portion on the upper side of the side surface of the beaker 54, so that the overflowing cleaning water flows out to the cleaning liquid storage tank 51.

  FIGS. 5A and 5B are perspective views showing the workpiece lifting / lowering unit 53 arranged at the cleaning station 11, wherein FIG. 5A shows the state of the inclined posture at the lowered position, and FIG. 5B shows the horizontal posture at the raised position. Shows the state. Referring to FIGS. 4 and 5, the workpiece lifting / lowering unit 53 includes a unit frame 61 that is fixed vertically to the side surface of the cleaning liquid storage tank 51. The unit frame 61 incorporates a lifting air cylinder 62 upward, and a pair of left and right lifting arms 64 are provided at the upper ends of a pair of telescopic rods 63 that can be extended upward from the upper ends thereof by the lifting air cylinder 62. Is attached.

  The raising / lowering arm 64 has a generally U-shape that faces downward, and includes a vertical plate portion 64a attached to the telescopic rod 63, a horizontal plate portion 64b that is bent at a right angle from the upper end and extends horizontally, and A vertical plate portion 64c that is bent at a right angle from the tip of the horizontal plate portion 64b and extends downward. A horizontal support shaft 65 is attached to the lower end of the vertical plate portion 64c of the pair of lifting arms 64, and the horizontal support shaft 65 is pivotable up and down around the horizontal support shaft 65 (horizontal axis). A work mounting table 66 is attached. The work mounting table 66 is formed of a rectangular plate member. The workpiece mounting surface 66a of the workpiece mounting table 66 is formed with linear protrusions 66b extending radially at equal angular intervals, and a circular draining hole 66c is formed between the linear protrusions 66b. It extends through.

  Here, the lifting / lowering arm 64 is provided with a posture switching mechanism for the workpiece mounting table 66. This posture switching mechanism includes a turning air cylinder 67 attached horizontally to a horizontal plate portion 64 b of one lifting arm 64. The distal end of the telescopic rod 67a of the turning air cylinder 67 is rotatably connected to the upper end of an L-shaped link 68 attached to the lifting arm 64 so as to be turnable in the vertical direction via a connecting pin. The lower end of the L-shaped link 68 is rotatably connected to the upper end of the vertical connecting plate 69 via a connecting pin. The lower end of the vertical connecting plate 69 is rotatably connected to the long edge side of the workpiece mounting table 66 opposite to the horizontal support shaft 65 via a connecting pin.

  When the telescopic rod 67a of the turning air cylinder 67 is retracted, as shown in FIG. 5B, the workpiece mounting table 66 is maintained in a horizontal posture in which the workpiece mounting surface 66a is horizontal. When the telescopic rod 67a of the turning air cylinder 67 is extended, as shown in FIGS. 4 and 5A, the workpiece mounting table 66 is switched to an inclined posture in which the workpiece mounting surface 66a is inclined. Further, when the telescopic rod 63 of the elevating air cylinder 62 is extended, the workpiece mounting table 66 is lifted upward from the cleaning water stored in the beaker 52 as shown in FIG. Retained. When the telescopic rod 63 of the lifting / lowering air cylinder 62 is retracted, the workpiece mounting table 66 is held at the lowered position immersed in the cleaning water stored in the beaker 52, as shown in FIGS. The

  Next, FIG. 6 is an explanatory view showing the plating station 14 and the ultrasonic cleaning station 16. The plating station 14 includes a beaker 71 as a processing tank in which a plating processing solution is stored, an electrode plate 70 (see FIG. 2) immersed in the plating processing solution, a workpiece lifting unit 72, and a beaker 71. An ultrasonic vibrator 73 is provided. Since the workpiece lifting unit 72 has the same configuration as the workpiece lifting unit 53 described above, description thereof is omitted. The other processing station 16 is an ultrasonic cleaning station including, for example, a beaker 75, a work lifting / lowering unit 76, and an ultrasonic vibrator 77.

  On the other hand, the acid cleaning station 13 basically includes a beaker 81 and a work lifting / lowering unit 82 as in the cleaning station 11 (see FIG. 6). A sulfuric acid or hydrochloric acid solution is stored in the beaker 81 as a cleaning liquid, and the cleaning liquid can be supplied and recovered by a circulation mechanism (not shown). The drying station 15 includes a processing tank 91, a work lifting / lowering unit 92, and an air blow nozzle (not shown) for blowing drying air to the work w put in the processing tank 91. The workpiece lifting units 82 and 92 have the same configuration as the workpiece lifting unit 53.

  The control panel 6 of the plating machine 1 having this configuration includes, for example, a pre-cleaning process including a work cleaning process at the cleaning station 11, a work acid cleaning process at the acid cleaning station 13, and a work rinse process at the rinse station 12. The workpiece w by the workpiece transfer mechanism 20 is performed so that the post-cleaning process including the workpiece plating process at the plating station 14, the workpiece rinse process at the rinse station 12, and the workpiece drying process at the drying station 15 are performed in this order. And the movement of the workpieces by the workpiece lifting / lowering units 53, 55, 72, 76, 82 and 92 of the processing stations 11 to 15 are controlled.

  A series of operations of the plating process is as follows. First, the revolving arm 32 of the work loading mechanism 30 is revolved to a position protruding outside the room, the work w to be processed is placed thereon, and the revolving arm 32 is revolved indoors. The workpiece w put into the processing chamber is gripped by the gripper 25 of the workpiece transfer mechanism 20 and transferred directly above the beaker 52 of the cleaning station 11. The workpiece lifting / lowering unit 53 is driven, and the workpiece mounting table 66 at the lowered position immersed in the beaker 52 is pulled up to the raised position, and the state shown in FIG. The workpiece w is delivered from the gripper 25 to the workpiece mounting table 66 in a horizontal posture. After delivering the workpiece, the workpiece lifting / lowering unit 53 is driven to switch the workpiece mounting table 66 to the inclined posture, and then the workpiece mounting table 66 is lowered to the lowered position and immersed in the cleaning liquid for cleaning (cleaning process). After the cleaning, the workpiece mounting table 66 is pulled up again to the raised position, the workpiece mounting table 66 is returned to the horizontal posture, and the workpiece w is delivered to the gripper 25.

  Next, the workpiece w is transferred to the adjacent rinsing station 12 by the gripper 25, and the workpiece lifting / lowering unit 55 is operated similarly to rinse the workpiece w (rinsing process). Thereafter, the workpiece w is transferred to the acid cleaning station 13 to perform the acid cleaning of the workpiece w. After the acid cleaning, the workpiece is returned to the rinsing station 12 and the workpiece w is rinsed. After that, the workpiece w is transferred to the plating station 14 and plated. After the plated workpiece w is transferred to the rinsing station 12 and the workpiece w is rinsed, the workpiece is transferred to the drying station 15 and dried. The work after plating is discharged from the processing chamber 5 by placing the dried work on the swivel arm 42 of the discharge mechanism 40 and turning the swivel arm 42 outward. After these series of processes are completed, the operation of placing a new workpiece to be processed on the swivel arm 32 of the workpiece loading mechanism 30 and placing it in the processing chamber to perform the plating process is repeated.

  Note that the ultrasonic cleaning station 16 is not used in the above plating process, but the ultrasonic cleaning station 16 may be used in the cleaning process. Further, the above-described processing is an example, and various processing forms are appropriately employed for the number of times of washing, the number of times of rinsing, etc., depending on the shape and type of the workpiece. It is also possible to add alkali cleaning as a cleaning process.

DESCRIPTION OF SYMBOLS 1 Plating processing machine 2 Base 3 Support plate 3a Work input / discharge base 3b Communication hole 4 Machine room 4a, 5a Frame material 4b, 5b Panel 5 Processing room 5c Opening / closing door 5d Exhaust port 6 Control panel 7 Exhaust pipe 8 Suction machine 11 Cleaning Station 12 Rinsing station 13 Acid cleaning station 14 Plating station 15 Drying station 16 Ultrasonic cleaning station 20 Work transfer mechanism 21 Gate frame 21a Horizontal rail frame 22 Z-axis stage 22a Horizontal rail frame 23 X-axis stage 23a Vertical rail frame 24 Y-axis Stage 25 Gripper 25a Actuator 25b Grip claw 30 Work input mechanism 31 Rotating actuator 32 Rotating arm 40 Work discharging mechanism 41 Rotating actuator 42 Rotating arm 51 Cleaning liquid storage tanks 52, 54, 71, 75, 81 Beakers 53, 55, 72, 76, 82, 9 Work lifting unit 54a Overflow hole 61 Unit frame 62 Lifting air cylinder 63 Telescopic rod 64 Lifting arm 64a Vertical plate portion 64b Horizontal plate portion 64c Vertical plate portion 65 Horizontal support shaft 66 Work placement table 66a Work placement surface 66b Linear protrusion 66c Drain hole 67 Air cylinder 68 L-shaped link 69 Vertical connection arm 70 Electrode plate 73, 77 Ultrasonic vibrator 91 Treatment tank w Workpiece

Claims (8)

A plating process in which each process of workpiece loading, pre-cleaning, plating, post-cleaning, drying, and workpiece discharging is sequentially performed, and after the processing for one workpiece is completed, processing for the next workpiece is started. Machine,
A processing machine stand having a machine room formed on the lower side of the horizontal support plate and a processing room formed on the upper side;
A plurality of processing stations disposed in the processing chamber;
A workpiece transfer mechanism disposed in the processing chamber for transferring workpieces one by one via the plurality of processing stations;
A control panel for driving and controlling each part,
The plurality of processing stations include a cleaning station, a rinsing station, and a plating station arranged from a workpiece receiving position formed on the front surface of the processing chamber toward a rear end of the processing chamber, Includes a drying station and an acid cleaning station arranged from the workpiece receiving position on the workpiece discharge side formed on the front surface toward the rear end of the processing chamber ,
Each processing station, a work for moving a processing tank, a raised position raised with for transferring the work, the received work from the lowered position and the processing bath in the processing tank above between the workpiece transfer mechanism A lifting unit,
The workpiece transfer mechanism is capable of linearly reciprocating linearly moving in the processing chamber width direction, horizontally reciprocating linearly moving in the front-rear direction of the processing chamber, and capable of moving up and down in the vertical direction of the processing chamber. With grippers,
The control panel includes a workpiece cleaning process at the cleaning station, a workpiece acid cleaning process at the acid cleaning station, a pre-cleaning process including a workpiece rinsing process at the rinse station, and a workpiece plating process at the plating station. By the workpiece transfer mechanism in the processing chamber width direction and the processing chamber front-rear direction so that the post-cleaning including the workpiece rinsing processing in the rinsing station and the workpiece drying processing in the drying station are performed in this order. A plating machine characterized by controlling transfer of a workpiece and movement of the workpiece by a workpiece lifting / lowering unit of each processing station. In claim 1,
The workpiece lifting unit is
A workpiece mounting table;
Plating comprising a posture switching mechanism for tilting the workpiece mounting table so that the workpiece mounting table is inclined at an angle of 45 degrees or less from a horizontal posture in which the workpiece mounting surface is horizontal. Processing machine. In claim 2,
The workpiece lifting / lowering unit of each of the cleaning, acid cleaning, and rinsing stations is stored in the processing tank in a state in which the workpiece mounting table on which the workpiece is placed is switched from the horizontal posture to the inclined posture. A plating machine characterized in that a workpiece immersed in a liquid is pulled up from the liquid. In claim 2 or 3,
The treatment tank of the drying station is an air drying treatment tank equipped with an air blow nozzle,
In the drying station, when air is blown from the air blow nozzle, the work lifting unit switches the work placing table on which the work is placed from a horizontal posture to an inclined posture. In any one of claims 2 to 4,
The workpiece processing unit in each processing station is a common unit having the same configuration. In claim 5,
The common unit is
A unit frame,
A lifting arm that is lifted and lowered by a lifting air cylinder mounted on the unit frame,
The workpiece mounting table attached to the lifting arm so as to be able to turn around a horizontal axis,
A plating process comprising: a posture switching mechanism for turning the workpiece mounting table to the horizontal posture and the inclined posture around the horizontal axis by a turning air cylinder mounted on the lifting arm. Machine. In any one of claims 1 to 6,
The plating processing machine, wherein the processing tanks arranged in the cleaning, acid cleaning, and rinsing stations are configured by beakers. In any one of claims 1 to 7,
The processing chamber and the machine chamber are substantially sealed chambers;
The processing chamber and the machine chamber communicate with each other through a communication hole formed in the support plate.
An exhaust pipe is connected to the exhaust port formed in the processing chamber,
The plating processing machine, wherein the processing chamber is maintained in a predetermined negative pressure state through the exhaust pipe.