JP5666208B2 - Leak detector - Google Patents

Description

  The present invention relates to a leak detection device.

  Conventionally, in a factory, there is a case where liquid leaks from a production line production apparatus or a pipe that supplies liquid to the production apparatus. The leakage from the manufacturing apparatus and piping may lead to damage to factory facilities and product defects. In particular, in semiconductor manufacturing lines and food processing lines, leakage from manufacturing equipment and piping is likely to cause damage to factory facilities and product defects. Therefore, conventionally, a manufacturing apparatus and piping in a factory are provided with a liquid leakage detection device that detects leakage from the manufacturing apparatus and piping (for example, see Patent Document 1).

  In order to prevent damage to factory facilities and product defects, this type of leakage detection device immediately stops the manufacturing device when a small amount of leakage from the manufacturing device is detected.

JP 2004-53560 A

  In the leak detection apparatus as described above, the production apparatus is immediately stopped only by detecting a small amount of leak from the production apparatus. However, when the amount of liquid leaked from the manufacturing apparatus is small, there is a case where the factory facility is not damaged or the product is defective even if the manufacturing apparatus is not immediately stopped. In this case, although it is not necessary to stop the manufacturing apparatus originally, the manufacturing apparatus is stopped, so that the manufacturing time of the product is shortened and the productivity of the manufacturing apparatus is reduced. In addition, when the manufacturing device monitored by the liquid leakage detection device is stopped in the middle of each manufacturing process, it is necessary to redo or discard the product that was in the middle of each manufacturing step. It will decrease.

  The present invention has been made to solve the above-described problems, and an object thereof is to provide a liquid leakage detection device capable of outputting a detection signal at a suitable timing.

  In order to solve the above-mentioned problems, in the invention according to claim 1, an introduction part for introducing a liquid leakage, a light projecting means for irradiating light toward the introduction part, and light introduced from the light projecting means A leakage detection unit including a light receiving unit that receives light through the unit and a detection unit that detects the leakage based on the amount of light received by the light receiving unit, and the leakage detection result of the leakage detection unit The leak detection device outputs a detection signal to the outside based on the leak detection device, the leak detection device is installed with a gap with respect to the floor surface, and the leak detection unit A first leak detector and a second leak detector provided at different positions on the lower surface; and on the line connecting the central portion and the peripheral portion of the lower surface of the leak detector more than the peripheral portion. The first liquid leakage detection unit is arranged such that the second liquid leakage detection unit is disposed closer to the center than the second liquid leakage detection unit. The detection unit is provided in a recess formed at a position away from the peripheral edge of the lower surface of the leak detection device, and the output control means detects the leak when the second leak detection unit detects the leak. The gist is to output the detection signal after a predetermined time when a signal is output and the first leakage detector detects the leakage.

  According to this configuration, the leak detection device can detect that the amount of leaked liquid is small when the first leak detection unit detects the leak. And if a 1st leak detection part detects a leak, a leak detection apparatus will output a detection signal outside after predetermined time progress, and can stop an external apparatus. Moreover, the leak detection apparatus can detect that the amount of leaked liquid is large when the second leak detection unit detects the leak. And if a 2nd leak detection part detects a leak, a leak detection apparatus can output a detection signal to the exterior immediately, and can stop an external apparatus. Therefore, when the external device is a manufacturing device, the leak detection device can delay the timing of stopping the manufacturing device when the amount of leaked liquid is small, thereby reducing the decrease in productivity of the manufacturing device. Can do.

  According to a second aspect of the present invention, in the liquid leakage detection device according to the first aspect of the present invention, the liquid leakage detection device further includes an input unit that inputs a synchronization signal from the outside. When the liquid is detected, the gist is to output the detection signal in synchronization with the synchronization signal input to the input means.

  According to this configuration, the leak detection device can transmit a detection signal to the outside based on the synchronization signal. Therefore, the leakage detection device can be stopped in synchronization with the operation of the external device when the amount of leakage is small. For example, when the external apparatus is a manufacturing apparatus, the manufacture of the product can be continued until the end of the operation of the manufacturing apparatus, and the reduction in productivity of the manufacturing apparatus can be further reduced.

  According to a third aspect of the present invention, in the liquid leakage detection device according to the first or second aspect, the introduction part of the second liquid leakage detection part is formed to protrude from the recess toward the floor surface. The first leakage detector is provided at a peripheral edge of the lower surface of the leakage detector, and the introduction portion of the first leakage detector is formed to be recessed upward from the lower surface. This is the gist.

  According to the same configuration, the leak detection device has a configuration in which the leaked liquid that flows into the gap between the lower surface and the floor surface flows into the gap between the peripheral portion of the lower surface and the floor surface, and then flows into the gap between the recessed portion and the floor surface. Can be. Therefore, the liquid leakage detection device can detect a small amount of liquid leakage from all directions only by providing at least one first liquid leakage detection unit at the peripheral edge of the lower surface. Furthermore, the liquid leakage detection device can detect a large amount of liquid leakage from all directions only by providing the second liquid leakage detection unit in the recess.

According to a fourth aspect of the present invention, there is provided the liquid leakage detection device according to the third aspect, wherein an air hole is communicated with the recess.
According to this configuration, the leak detection device can discharge the leaked air to the peripheral edge and the floor surface and discharge the air accumulated in the recess to the outside through the air hole, and flows the leak into the recess. be able to.

  According to a fifth aspect of the present invention, in the liquid leakage detection device according to any one of the first to third aspects, the liquid leakage is partly disposed around the introduction portion of the first liquid leakage detection unit. The gist of the present invention is that a guide step portion that protrudes from the lower surface of the detection device toward the floor surface is provided.

  According to this configuration, since the gap between the guide step portion and the floor surface is narrower than the gap between the lower surface of the leak detection device and the floor surface, the leakage is drawn into the gap between the guide step portion and the floor surface. Therefore, it is possible to easily draw the liquid leak into the introduction part of the first liquid leakage detection part adjacent to the guide step part, and as a result, it is possible to detect the liquid leak stably.

  According to a sixth aspect of the present invention, in the liquid leakage detection device according to the fifth aspect, the gist is that the guide step portion has a shape that becomes wider toward the lower surface of the liquid leakage detection device.

  According to this configuration, since the guide step portion has a shape that widens toward the lower surface of the leak detection device (a divergent shape), the leak can be more easily drawn, and as a result, the leak is more stable. Can be detected.

  According to a seventh aspect of the present invention, in the liquid leakage detection device according to the fifth or sixth aspect, a pair of the guide step portions are provided so as to sandwich the introduction portion of the first liquid leakage detection portion. The gist.

  According to this configuration, since a pair of guide step portions are provided so as to sandwich the introduction portion of the first leakage detection unit, it is possible to easily draw the leakage into the introduction portion, and as a result, the leakage is more stable. Can be detected.

  According to an eighth aspect of the present invention, in the liquid leakage detection device according to any one of the first to seventh aspects, a guide portion that protrudes toward the concave portion is provided on the lower surface of the liquid leakage detection device. The gist of the present invention is that it is provided at a position farthest from the first liquid leakage detector.

  According to this configuration, the leaked liquid that has entered between the floor surface and the lower surface of the leak detection device is likely to enter the recess from the guide portion that is provided farthest from the first leak detection unit. For this reason, it becomes possible to make it easy to produce the time lag from the leak detection in a 1st leak detection part to the leak detection in a 2nd leak detection part.

  Therefore, according to the above-described invention, it is possible to provide a liquid leakage detection device that can reduce a decrease in productivity of the manufacturing device.

It is a schematic block diagram of a leak detection apparatus. It is a side view of a leak detection apparatus. It is a bottom view of the leak detection device of a 1st embodiment. It is a front view of a leak detection apparatus. It is a schematic block diagram of the sensor main body of 1st Embodiment. It is a principle diagram of the leak detection in a 1st detection part. It is a principle diagram of the leak detection in a 1st detection part. It is a principle diagram of the leak detection in a 2nd detection part. It is a principle diagram of the leak detection in a 2nd detection part. It is a bottom view of the liquid leak detection apparatus of 2nd Embodiment. It is a schematic block diagram of the sensor main body of 2nd Embodiment. It is a bottom view of the base of 3rd Embodiment. (A) is a side view of the base of 3rd Embodiment, (b) is AA sectional drawing of the base of 3rd Embodiment. It is a front view of the liquid leak detection apparatus of 3rd Embodiment.

(First embodiment)
Hereinafter, the first embodiment will be described with reference to FIGS.
As shown in FIG. 1, the liquid leakage detection device 10 is attached to the floor 12 on which the production device 11 in the factory is installed with a bolt B, and detects the liquid leakage W from the production device 11. And if the leak detection apparatus 10 detects the leak W from the manufacturing apparatus 11, the stop signal St will be transmitted to the manufacturing apparatus 11 via the cable 13, and the manufacturing apparatus 11 will be stopped.

  2 is a side view of the leak detection device 10, FIG. 3 is a bottom view of the leak detection device 10, and FIG. 4 is a front view of the leak detection device 10. As shown in FIG. 2, the liquid leakage detection device 10 includes a sensor main body 15 that detects the liquid leakage W and a base portion 16 that fixes the sensor main body 15 to the floor surface 12.

The base portion 16 includes a fixed base 21 that is installed and fixed on the floor surface 12, and a base 20 that extends from the side surface of the fixed base 21 and supports the sensor body 15.
As shown in FIG. 3, the fixing base 21 has a substantially tapered shape, and has a bolt insertion hole 21a in the vertical direction (vertical direction in FIG. 2) at the center position of the tapered base end (right side in FIG. 3). It is formed through. The fixing base 21 is connected and fixed to the floor surface 12 by the bolt B in a state where the bolt B is inserted into the bolt insertion hole 21a formed through and the lower surface 21b thereof is in contact with the floor surface 12.

  As shown in FIG. 2, the fixed base 21 extends the base 20 from the side surface of the tip (left side in FIG. 2) so that a gap D <b> 1 is formed between the lower surface 20 a of the base 20 and the floor surface 12. Forming. The gap D1 between the lower surface 20a of the base 20 and the floor surface 12 is an interval at which capillary action occurs when the leaked liquid W flows into the gap D1 when the manufacturing apparatus 11 leaks.

  As shown in FIG. 3, the base 20 extended from the side surface of the fixed base 21 has a cylindrical shape, and its lower surface 20a is formed of a translucent resin. The base 20 has a circular recess 20b (hereinafter referred to as a circular recess) provided at the center of the lower surface 20a.

  With such a shape, when the manufacturing apparatus 11 leaks, when the leaked liquid W flows into the gap D1 between the lower surface 20a of the base 20 and the floor surface 12, first, the base that has an annular shape other than the recess 25 The liquid leakage W flows into the gap D1 between the lower surface 20 (hereinafter referred to as the annular lower surface) 20c and the floor surface 12, and then the liquid leakage W flows into the gap D1 between the circular recess 20b and the floor surface 12. Yes.

  Specifically, the leakage W that has flowed into the gap D1 between the annular lower surface 20c of the base 20 and the floor surface 12 is first supplied with a propulsive force of capillary action and a new leakage W, whereby the pressure in the inflow direction is increased. This occurs and spreads into the gap D1 between the annular lower surface 20c and the floor surface 12. That is, the pressure necessary for the leakage W to flow into the gap between the circular recess 20b and the floor 12 away from the annular lower surface 20c is caused by the surface tension of the annular lower surface 20c acting on the leakage W, thereby causing the annular lower surface 20c. And the pressure required for the leakage W to spread in the gap D1 between the floor 12 and the floor surface 12.

  Accordingly, first, the leaked liquid W that has flowed into the gap D1 between the annular lower surface 20c and the floor surface 12 of the base 20 does not flow into the gap between the circular recess 20b and the floor surface 12, but between the annular lower surface 20c and the floor surface 12. It spreads in the gap D1.

  Next, when the leaked liquid W spreads in all the gaps D1 between the annular lower surface 20c and the floor surface 12, the leaked W is further supplied and the pressure in the inflow direction becomes greater than the surface tension of the leaked W with the annular lower surface 20c. The liquid leakage W flows into the circular recess 20b.

  That is, when there is a small amount of liquid leakage W from the manufacturing apparatus 11, the liquid leakage detection apparatus 10 flows into the gap D1 between the annular lower surface 20c and the floor surface 12. On the other hand, when there is a large amount of liquid leakage W from the manufacturing apparatus 11, the liquid leakage detection apparatus 10 flows into the gap D1 between the annular lower surface 20c and the floor surface 12, and further flows into the circular recess 20b. It is like that.

  In the base 20, the first detection unit 25 is provided at a part for detecting the leaked liquid W flowing into the annular lower surface 20 c, and the second detection is performed at the part for detecting the leaked liquid W flowing into the circular recess 20 b. A portion 26 is provided. That is, the second detection unit 26 is provided at a position farther from the peripheral portion of the annular lower surface 20 c than the first detection unit 25.

  The 1st detection part 25 is provided in the anti-fixation stand 21 side (left side in FIG. 3) of the cyclic | annular lower surface 20c. The first detection unit 25 is provided with a recess 28 that is recessed in the radial direction on the annular lower surface 20c. The concave portion 28 has an inner bottom surface as a ceiling surface 28a, and inclined surfaces inclined in directions away from each other from both sides in the circumferential direction of the annular lower surface 20c on the ceiling surface 28a are first emission surfaces 28b, One incident surface 28c is used.

  The first detection unit 25 has a pair of first support bases 29 protruding from the annular lower surface 20 c with the recess 28 interposed therebetween. As shown in FIG. 2, the first support base 29 has an abutment surface 29 a that abuts against the floor surface 12, and is formed so that the annular lower surface 20 c abuts against the floor surface 12. Further, the first support base 29 has an inclined surface 29b that is inclined in a direction away from the contact surface 29a toward the circular recess 20b side (right side in FIG. 2) of the annular lower surface 20c.

  As shown in FIG. 3, the second detection unit 26 provided in the circular recess 20b has an air hole 26a penetratingly formed at the center position of the circular recess 20b, and a pair of second support bases facing each other across the air hole 26a. 30 is formed to protrude. The side surfaces facing each other, that is, the side surfaces on the air hole 26a side, of the pair of second support bases 30 are inclined inward to form the second exit surface 26b and the second entrance surface 26c, respectively.

  Thus, the base 20 is supported by the first and second support bases 29 and 30 in contact with and supported by the floor 12 in a state where the base 16 is installed on the floor 12. The wobbling of the direction (vertical direction in FIG. 2) is prevented.

  As shown in FIG. 2, the base 20 has air holes 34 on the outer peripheral surface thereof. The air hole 34 has a rectangular shape and is formed by penetrating the outer peripheral surface of the base 20. An air passage 35 that communicates the air hole 26 a and the air hole 34 of the circular recess 20 b is formed inside the base 20.

  That is, when the manufacturing apparatus 11 leaks, if the leaked liquid W flows into all the gaps D1 between the annular lower surface 20c and the floor surface 12, air accumulates in the circular recess 20b. Accordingly, the leak detection device 10 discharges the air from the air hole 26a of the circular recess 20b to the outside through the air passage 35 through the air hole 34 on the outer peripheral surface.

  The sensor main body 15 has a cylindrical shape and is fixed to the floor 12 by being connected to the base 20. FIG. 5 is a schematic configuration diagram of the sensor main body 15. As shown in FIG. 5, the sensor main body 15 includes a first light projecting means 40a, a first light receiving means 41a, a first detecting means 42a, and second and third liquid leaks as a first liquid leak detecting section. A second light projecting unit 40b, a second light receiving unit 41b, and a second detection unit 42b as a detection unit are incorporated, and an output control unit 43 is incorporated.

  As shown in FIGS. 2 and 3, the first light projecting unit 40 a and the first light receiving unit 41 a are provided inside the sensor body 15 of the first detection unit 25 on the annular lower surface 20 c when viewed from the lower surface of the liquid leakage detection device 10. Arranged in position. Then, the first light projecting means 40 a and the first light receiving means 41 a detect the liquid leakage W flowing into the gap D <b> 1 between the annular lower surface 20 c and the floor surface 12 in the first detection unit 25.

FIG. 6 is a principle diagram in which the leak detection device 10 detects the leak W from the manufacturing device 11 in the first detection unit 25.
The first light projecting means 40a emits outgoing light to the first outgoing surface 28b, transmits the outgoing light through the first outgoing surface 28b, and leaks the liquid W into the gap D1 between the annular lower surface 20c and the floor surface 12. If not, the light is refracted at a predetermined refraction angle and emitted as transmitted light to the first incident surface 28c.

  The first incident surface 28c transmits the transmitted light incident from the first emission surface 28b, and refracts at a predetermined refraction angle when the leaked liquid W does not flow into the gap D1 between the annular lower surface 20c and the floor surface 12. Then, the light is emitted as incident light to the first light receiving means 41 a provided inside the sensor body 15. Thereby, when the leaked liquid W does not flow into the gap D1 between the annular lower surface 20c and the floor surface 12, an optical path L1 from the first light projecting means 40a to the first light receiving means 41a is formed.

  On the other hand, as shown in FIG. 7, when the leaked liquid W flows into the gap D1 between the annular lower surface 20c and the floor surface 12, the refraction angle increases at the first emission surface 28b, and the transmitted light deviates from the optical path L1. Does not reach the first incident surface 28c.

  The first light receiving unit 41a receives incident light from the first incident surface 28c, and outputs a first light receiving signal Sr1 corresponding to the amount of incident light received to the first detecting unit 42a. Specifically, in the first light receiving means 41a, the amount of the leaked liquid W flowing into the gap D1 between the annular lower surface 20c and the floor surface 12 is small, and the voltage value of the first light receiving signal Sr1 increases as the amount of incident light received increases. Increase On the contrary, the first light receiving means 41a has a larger amount of the leaked liquid W flowing into the gap D1 between the annular lower surface 20c and the floor surface 12, and the smaller the amount of incident light received, the smaller the voltage value of the first light receiving signal Sr1. To do.

  The first detection unit 42a receives the first light reception signal Sr1 from the first light reception unit 41a. The first detection means 42a compares the first light reception signal Sr1 with a preset first reference voltage Vk1, and outputs a first detection signal Sd1 corresponding to the comparison result to the output control means 43.

  Specifically, when the first detection unit 42a receives the first light reception signal Sr1 that is equal to or higher than the first reference voltage Vk1, the first detection unit 42a assumes that the leakage W does not flow into the gap D1 between the annular lower surface 20c and the floor surface 12, and is at the L level. The first detection signal Sd1 in (non-detection mode) is output. On the other hand, when the first detection means 42a receives the first light reception signal Sr1 smaller than the first reference voltage Vk1, the first detection means 42a assumes that the leaked liquid W is flowing into the gap D1 between the annular lower surface 20c and the floor 12 (H level (detection). Mode) first detection signal Sd1 is output.

  As shown in FIGS. 2 and 3, the second light projecting means 40 b and the second light receiving means 41 b are provided inside the sensor body 15 of the second detection unit 26 in the circular recess 20 b when viewed from the bottom surface of the liquid leakage detection device 10. Arranged in position. And the 2nd light projection means 40b and the 2nd light-receiving means 41b detect the leaked liquid W which flows in in the circular recessed part 20b in the 2nd detection part 26. FIG.

FIGS. 8 and 9 are diagrams illustrating the principle in which the leak detection device 10 detects the leak W in the second detection unit 26.
The second light projecting unit 40b emits outgoing light to the second outgoing surface 26b, transmits the outgoing light through the second outgoing surface 26b, and is predetermined when the liquid leakage W does not flow into the circular recess 20b. The light is refracted at the refraction angle and is transmitted to the second incident surface 26c as transmitted light.

  The second incident surface 26c transmits the transmitted light incident from the second output surface 26b, and when the leaked liquid W does not flow into the circular concave portion 20b, the second incident surface 26c is refracted at a predetermined refraction angle to be inside the sensor body 15. It is emitted as incident light to the second light receiving means 41b provided in the above. Thereby, as shown in FIG. 8, when the leaked liquid W does not flow into the circular recess 20b, an optical path L2 from the second light projecting means 40b to the second light receiving means 41b is formed.

  On the other hand, as shown in FIG. 9, when the leaked liquid W flows into the circular recess 20b, the refraction angle becomes large at the second exit surface 26b, and the transmitted light deviates from the optical path L2 and the transmitted light enters the second entrance surface 26c. Not reach.

  The second light receiving unit 41b receives incident light from the second incident surface 26c and outputs a second light receiving signal Sr2 corresponding to the amount of received light to the second detecting unit 42b. Specifically, the second light receiving means 41b increases the voltage value of the second light receiving signal Sr2 as the amount of leakage W flowing into the circular recess 20b is smaller. On the other hand, the second light receiving means 41b decreases the voltage value of the second light receiving signal Sr2 as the amount of leakage W flowing into the circular recess 20b increases.

  The second detection unit 42b receives the second light reception signal Sr2 from the second light reception unit 41b. The second detection unit 42b compares the second light reception signal Sr2 with a preset second reference voltage Vk2, and outputs a second detection signal Sd2 corresponding to the comparison result to the output control unit 43.

  Specifically, when the second detection unit 42b receives the second light reception signal Sr2 that is equal to or higher than the second reference voltage Vk2, the second detection unit 42b assumes that the leaked liquid W does not flow into the circular recess 20b and is at the L level (non-detection mode). ) Of the second detection signal Sd2. On the other hand, when the second detection means 42b receives the second received light signal Sr2 smaller than the second reference voltage Vk2, the second detection at the H level (detection mode) is performed assuming that the liquid leakage W flows into the circular recess 20b. The signal Sd2 is output.

  The output control means 43 receives the first and second detection signals Sd1 and Sd2 from the first and second detection means 42a and 42b, and the synchronization signal Ss from the manufacturing apparatus 11. Here, the synchronization signal Ss is a signal for informing the work delimiter of the manufacturing apparatus 11 and becomes L level when the manufacturing apparatus 11 is working, and becomes H level for each predetermined time.

The output control means 43 outputs a stop signal St for stopping the manufacturing apparatus 11 to the manufacturing apparatus 11 in synchronization with the synchronization signal Ss according to the first and second detection signals Sd1 and Sd2.
Specifically, when there is no liquid leakage W from the manufacturing apparatus 11, the output control means 43 receives the first and second detection signals Sd1 and Sd2 of the L level (non-detection mode) and does not stop the manufacturing apparatus 11 A stop signal St of (operation mode) is output to the manufacturing apparatus 11.

  When the leakage W from the manufacturing apparatus 11 is small, the output control means 43 receives the first detection signal Sd1 at the H level (detection mode) and the second detection signal Sd2 at the L level (non-detection mode). Entered. Then, the output control means 43 outputs an H level (stop mode) stop signal St to the manufacturing apparatus 11 after the H level synchronization signal Ss is input for a predetermined time.

  That is, the output control means 43 receives the first detection signal Sd1 at the H level (detection mode) and the second detection signal Sd2 at the L level (non-detection mode), so that the annular lower surface 20c and the floor 12 It is recognized that the leaked liquid W from the manufacturing apparatus 11 flows into the gap D1 and the leaked liquid W from the manufacturing apparatus 11 does not flow into the circular recess 20b.

  And since the liquid leakage W from the manufacturing apparatus 11 has not flowed into the circular recessed part 20b, the output control means 43 judges that the liquid leakage W from the manufacturing apparatus 11 is a small amount. Next, the output control means 43, when the leakage W from the manufacturing apparatus 11 is small, does not immediately lead to damage to the factory facility or product failure. Therefore, after the work in progress is completed, the manufacturing apparatus 11 Is stopped (control stop).

  Furthermore, when there is a large amount of liquid leakage W from the manufacturing apparatus 11, the output control means 43 receives the first and second detection signals Sd1 and Sd2 of the H level (detection mode). Then, the output control means 43 immediately outputs an H level (stop mode) stop signal St to the manufacturing apparatus 11. In other words, the output control means 43 receives the first and second detection signals Sd1 and Sd2 of the H level (detection mode), thereby leaking liquid from the manufacturing apparatus 11 into the gap D1 between the annular lower surface 20c and the floor surface 12. It is recognized that W flows in and that the leaked liquid W from the manufacturing apparatus 11 also flows into the circular recess 20b.

  Then, the output control means 43 determines that the leakage W from the manufacturing apparatus 11 is large because the leakage W from the manufacturing apparatus 11 also flows into the circular recess 20b. Next, the output control means 43 immediately stops the manufacturing apparatus 11 even during the work in progress because there is a risk that the factory facility may be damaged or the product may be defective immediately if the leakage W from the manufacturing apparatus 11 is large. (Emergency stop).

As described above, according to the present embodiment, the following effects can be obtained.
(1) The liquid leakage detection device 10 includes a first detection unit 25 that detects a small amount of liquid leakage W from the manufacturing device 11 and a second detection unit 26 that detects a large amount of liquid leakage W from the manufacturing device 11. It was. And if the leak detection apparatus 10 detects the leak W in the 1st detection part 25, it will stop the manufacturing apparatus 11 after completion | finish of the work in process, and will detect the leak W in the 2nd detection part 26 Then, the manufacturing apparatus 11 was immediately stopped regardless of the work in progress.

  Accordingly, when a small amount of liquid leakage W from the manufacturing apparatus 11 is detected, the liquid leakage detection apparatus 10 stops the manufacturing apparatus 11 after the work in progress is completed, so that productivity can be increased without wasting the product and manufacturing time. Can be improved. In addition, when a large amount of liquid leakage W from the manufacturing apparatus 11 is detected, the liquid leakage detection apparatus 10 immediately stops the manufacturing apparatus 11, so that damage to factory facilities and product defects can be prevented. As a result, the liquid leakage detection apparatus 10 can reduce a decrease in productivity of the manufacturing apparatus 11 provided with the liquid leakage detection apparatus 10.

  (2) When the leak detection device 10 detects a small amount of leak W from the manufacturing device 11, the leak detection device 10 stops the manufacturing device 11 in synchronization with the synchronization signal Ss at the H level for a predetermined time input from the manufacturing device 11. I made it. Therefore, when the leakage detection device 10 detects a small amount of the leakage liquid W from the manufacturing device 11, the manufacturing device 11 can be stopped as soon as the work in progress of the manufacturing device 11 is completed. As a result, the leak detection device 10 can further reduce the decrease in productivity of the manufacturing apparatus 11 provided with the leak detection device 10.

(3) The liquid leakage detection device 10 has a circular recess 20b formed by recessing the center of the lower surface thereof. Accordingly, the liquid leakage detection device 10 can be easily provided by simply forming a recess on the lower surface, and the annular lower surface 20c that flows in when there is a small amount of liquid leakage W from the manufacturing device 11, and a large amount of liquid leakage from the manufacturing device 11. A circular recess 20b that flows in when W is present can be formed.
(Second Embodiment)
In the first embodiment, when the liquid leakage detection device 10 detects a small amount of liquid leakage W from the manufacturing device 11 by the first detection unit 25, the liquid leakage detection device 10 stops the manufacturing device 11 after the work in progress is finished, and the manufacturing device When the second detection unit 26 detects a large amount of liquid leakage W from 11, the manufacturing apparatus 11 is immediately stopped.

  In 2nd Embodiment, the leak detection apparatus 50 changes the timing which stops the manufacturing apparatus 11 according to the time difference which the two detection parts detect the leak W from the manufacturing apparatus 11. FIG.

  Hereinafter, in the case where the liquid leakage detection device 50 changes the timing for stopping the production device 11 according to the time difference between the two detection units detecting the leakage W from the production device 11, according to FIGS. The difference from the first embodiment will be mainly described. The same members as those shown in FIGS. 1 to 9 are denoted by the same reference numerals, and the description of these elements is omitted for convenience of description.

  Unlike the first embodiment, the base 20 of the liquid leakage detection device 50 is not provided with a lower surface 20a and is not provided with a second detection unit 26. The base 20 is provided with a third detector 51 at a symmetrical position sandwiching the center point of the first detector 25 and the base 20 on the lower surface 20a. Since the third detection unit 51 has the same configuration as the first detection unit 25, detailed description thereof is omitted. Further, as shown in FIG. 10, the third light projecting means 40 c and the third light receiving means 41 c are disposed in the sensor body 15 at the position of the third detection unit 51 when viewed from the lower surface of the liquid leakage detection device 10. ing.

  Accordingly, as shown in FIG. 11, the third detection unit 42c receives the third light reception signal Sr3 from the third light reception unit 41c, similarly to the first detection unit 42a. The third detection unit 42c compares the third light reception signal Sr3 with a preset first reference voltage Vk1, and outputs a third detection signal Sd3 corresponding to the comparison result to the output control unit 43.

  Specifically, when the third detection unit 42c receives the third light reception signal Sr3 that is equal to or higher than the first reference voltage Vk1, the third detection unit 42c regards that the leakage W does not flow into the gap between the third detection unit 51 and the floor surface 12. And outputs a third detection signal Sd3 of L level (non-detection mode). On the contrary, when the third detection unit 42c receives the third light reception signal Sr3 smaller than the first reference voltage Vk1, it is assumed that the leakage W is flowing into the gap between the third detection unit 51 and the floor surface 12 at the H level ( Detection mode) third detection signal Sd3 is output.

  That is, the first and third detection means 42a and 42c detect whether or not the leaked liquid W is flowing into the gap between the first and third detection units 25 and 51 and the floor surface 12, respectively. The corresponding first and third detection signals Sd1 and Sd3 are output to the time difference measuring means 52 and the output control means 43, respectively.

  The time difference measuring means 52 receives the first and third detection signals Sd1 and Sd3 from the first and third detection means 42a and 42c. The time difference measuring means 52 measures a time difference (hereinafter referred to as a detection time difference C1) when the first and third detection signals Sd1 and Sd3 are input, and outputs a delay control signal Sc corresponding to the detection time difference C1 to the output control means 43. Output.

  Specifically, the time difference measuring unit 52 decreases the voltage value of the delay control signal Sc as the detection time difference C1 is shorter and the leakage of the liquid W from the manufacturing apparatus 11 is faster. On the other hand, the time difference measuring means 52 increases the voltage value of the delay control signal Sc as the detection time difference C1 is longer and the leakage of the liquid W from the manufacturing apparatus 11 is slower.

  The output control means 43 receives the first and third detection signals Sd 1 and Sd 3 from the first and third detection means 42 a and 42 c and the delay control signal Sc from the time difference measurement means 52. The output control means 43 delays the stop signal St according to the delay control signal Sc and outputs it to the manufacturing apparatus 11 in a state where the first and third detection signals Sd1 and Sd3 of the H level (detection mode) are input. To do.

  Specifically, the output control unit 43 delays the H level (stop mode) stop signal St and outputs it to the manufacturing apparatus 11 as the voltage value of the delay control signal Sc decreases. Conversely, the output control means 43 delays the H level (stop mode) stop signal St longer and outputs it to the manufacturing apparatus 11 as the voltage value of the delay control signal Sc increases.

  That is, when the detection time difference C1 is short and the leakage of the leaked liquid W from the manufacturing apparatus 11 is early, the output control means 43 may immediately cause damage to the factory facility or a product defect, so that the manufacturing apparatus 11 is quickly stopped. I am doing so. On the contrary, when the detection time difference C1 is long and the outflow of the leaked liquid W from the manufacturing apparatus 11 is slow, the output control unit 43 immediately stops the manufacturing apparatus 11 because the factory facility is not damaged or the product is not defective. I have to.

As described above, according to the present embodiment, the following effects can be obtained.
(1) The liquid leakage detection device 50 includes the first and third detection units 25 and 51 on the lower surface 20a. And the liquid leak detection apparatus 50 stops the manufacturing apparatus 11 late, so that the time difference (detection time difference) C1 in which the 1st and 3rd detection parts 25 and 51 detect the liquid leakage W from the manufacturing apparatus 11 is long, and is opposite In addition, the production apparatus 11 is stopped earlier as the detection time difference C1 is shorter.

Therefore, the leak detector 50 can stop the manufacturing apparatus 11 late and prolong the manufacturing time, so that the outflow of the liquid W from the manufacturing apparatus 11 is late. As a result, compared to the first embodiment, when the leakage W from the manufacturing apparatus 11 is detected, the manufacturing apparatus 11 can be stopped late to increase the manufacturing time. The reduction in productivity can be further reduced.
(Third embodiment)
In the present embodiment, the shape of the first detection unit on the bottom surface of the base is different from that of the first embodiment. Therefore, in the following, the same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof is omitted.

  The base 60 of this embodiment is shown in FIG.12 and FIG.13 (a) (b). Further, FIG. 14 shows the liquid leakage detection device 10 including the base 60. As shown in FIGS. 12-14, the 1st detection part 61 (1st liquid leak detection part) provided in the cyclic | annular lower surface 20c of the base 60 is comprised in the same position as the 1st detection part 25 of the said embodiment. Has been. That is, the 1st detection part 61 is provided in the peripheral part 20d of the lower surface (annular lower surface 20c) of a leak detection apparatus. Further, the second detection unit 26 (second liquid leakage detection unit) is provided at a position farther from the peripheral portion 20d of the annular lower surface 20c than the first detection unit 61. Further, on the line connecting the center portion of the annular lower surface 20c and the peripheral portion 20d (point P on the peripheral portion 20d in FIG. 12), the first detection unit 61 is closer to the peripheral portion 20d and the second detection portion 26 is closer to the central portion. Are arranged respectively.

  An introduction part 62 is recessed in the center of the first detection part 61. The introduction portion 62 has an inner bottom surface as a ceiling surface 28a, and inclined surfaces inclined in directions away from each other from both sides in the circumferential direction of the annular lower surface 20c on the ceiling surface 28a are first emission surfaces 28b, The first incident surface 28c is used. Note that an air hole 62 a for venting is formed in the center of the introduction part 62 in the same manner as the air hole 26 a of the second detection part 26. The first detection unit 61 is provided with a pair of projections 63 formed to project from the annular lower surface 20 c so as to sandwich the introduction unit 62 in the width direction Y of the base 60. Each convex portion 63 is formed from the peripheral edge portion 20 d of the annular lower surface 20 c to the circular concave portion 20 b along the front-rear direction X of the base 60. Moreover, the opposing surface 63a with the floor surface 12 of each convex part 63 is formed so that it may become parallel to the floor surface 12 (refer FIG. 13a and FIG. 14).

  First and second guide convex portions 64 and 65 (guide step portions) that protrude toward the floor surface 12 are formed on both sides in the front-rear direction X of the introduction portion 62 of the first detection portion 61. The introduction portion 62 and the guide convex portions 64 and 65 are provided at positions adjacent to each other in the front-rear direction X. Further, the guide convex portions 64 and 65 are provided so as to sandwich the introduction portion 62 in the front-rear direction X. In addition, the direction connecting the place P closest to the center of the introduction portion 62 and the introduction portion 62 in the peripheral edge portion 20d of the annular lower surface 20c coincides with the front-rear direction X of the base 60.

  The first guide convex portion 64 is formed from the introduction portion 62 to the peripheral edge portion 20d of the annular lower surface 20c. The second guide convex portion 65 is formed from the introduction portion 62 to the circular concave portion 20b. Each guide convex portion 64, 65 has a facing surface 66 that faces the floor surface 12, and inclined surfaces 67 at both ends in the width direction Y of the facing surface 66. That is, each guide convex portion 64, 65 has a shape that widens toward the annular lower surface 20c when viewed from the front-rear direction X (see FIG. 14). Further, the inclined surface 67 of each guide convex portion 64, 65 is connected to the facing surface 63 a of the convex portion 63. That is, the first detection unit 61 has a two-step shape with the convex portion 63 and the guide convex portions 64 and 65. In addition, the surface on the introduction portion 62 side of each guide convex portion 64, 65 is also an inclined surface 68, whereby the introduction portion 62 has a shape that expands in the front-rear direction X and the width direction Y toward the floor surface 12. There is no. In addition, the space | interval of the floor surface 12 and the guide convex parts 64 and 65 is comprised so that it may become narrower than the space | interval of the floor surface 12 and the convex part 63. FIG.

  Three columnar pillars 71 project from the annular lower surface 20c. One support column 71 is provided on the side opposite to the first detection portion of the circular recess 20b, and is in contact with the outer edge of the circular recess 20b, and approximately about both sides from the center of the introduction portion 62 to the center of the base 60. One is provided at a position of 60 degrees. As shown in FIGS. 13B and 14, each support 71 is in contact with the floor 12, and the distance from the floor 12 to the annular lower surface 20 c is determined by the length of the support 71. The length of the support 71 (the distance from the floor 12 to the annular lower surface 20c) can be changed as appropriate. In addition, a pair of locking portions 72 that are locked to the sensor body 15 in the circumferential direction are formed on the upper surface of the base 60 (see FIG. 14). Further, a guide portion 73 protruding toward the circular concave portion 26b is formed on the side of the annular lower surface 20c opposite to the first detection portion.

  In such a liquid leakage detection device 10, the liquid leakage that has entered between the floor surface 12 and the annular lower surface 20 c moves between the floor surface 12 and the convex portion 63. Thereafter, the leaked liquid moves between the floor surface 12 and the guide convex portions 64 and 65 and enters into the introducing portion 62 with the momentum, and the leak detection is performed by the first detecting portion 61. Thereafter, the leaked liquid that has entered between the floor surface 12 and the annular lower surface 20 c passes through the guide portion 73 and enters the circular recess 20 b, and the second detector 26 detects the leak. That is, the leaked liquid that has entered between the floor surface 12 and the annular lower surface 20 c easily enters the circular recess 26 b from the guide portion 73 that is provided farthest from the first detection unit 61. For this reason, it is possible to easily cause a time lag from the leakage detection at the first detection unit 61 to the leakage detection at the second detection unit 26.

As described above, according to the present embodiment, the following effects can be obtained.
(1) The introduction part 62 of the first detection part 61 is formed so as to be recessed upward from the annular lower surface 20c, and guide convex parts 64 and 65 projecting toward the floor 12 are formed on the annular lower surface 20c. It is provided at a position adjacent to the introduction part 62. Thereby, since the gap between the guide convex portions 64 and 65 and the floor surface 12 is narrower than the gap between the annular lower surface 20 c and the floor surface 12, liquid leakage occurs in the gap between the guide convex portions 64 and 65 and the floor surface 12. Is attracted. For this reason, it is possible to easily draw the leakage into the introduction portion 62 adjacent to the guide convex portions 64 and 65, and as a result, it is possible to detect the leakage stably.

  (2) The guide convex portions 64 and 65 are the introduction portions in the direction (front-rear direction X) connecting the introduction portion 62 and the portion P closest to the introduction portion 62 of the first detection unit 61 in the peripheral portion 20d of the annular lower surface 20c. 62 to be adjacent to each other. Thereby, it can be made easy to draw in a leak from the direction side (width direction side) orthogonal to the direction adjacent to the guide convex parts 64 and 65 with respect to the introducing | transducing part 62, As a result, a leak is stabilized more stably. It becomes possible to detect.

  (3) When viewed from the direction adjacent to the introduction portion 62 (front-rear direction X), the guide convex portions 64, 65 have a shape (a divergent shape) that becomes wider toward the annular lower surface 20c of the leak detection device. For this reason, it is possible to make it easy to draw the liquid leakage from the front-rear direction X, and as a result, it is possible to detect the liquid leakage more stably.

  (4) Since the guide convex portions 64 and 65 are provided in a pair so as to sandwich the introduction portion 62 of the first detection portion 61, the leakage can be easily drawn into the introduction portion 62. As a result, the leakage is more stable. Can be detected.

In addition, you may implement the said embodiment in the following aspects.
In the present embodiment, the liquid leakage detection device 10 is formed in a cylindrical shape, but may be formed in a polygonal shape.

Even if it does in this way, the effect similar to said embodiment can be acquired.
-In 1st Embodiment, if the leak detection apparatus 10 detected the leak W in the 1st detection part 25, the manufacturing apparatus 11 was stopped after completion | finish of the work in progress. However, the liquid leakage detection device 10 is not particularly limited in the timing at which the first detection unit 25 detects the liquid leakage W and stops the manufacturing apparatus 11. For example, the leak detection device 10 may stop the manufacturing device 11 at any timing as long as the synchronization signal Ss at the H level for a predetermined time is input from the manufacturing device 11.

  In the first embodiment, the liquid leakage detection device 10 is provided with the first detection unit 25 on the annular lower surface 20c. However, the detection unit that detects the leakage W is provided on the annular lower surface 20c at equal intervals in the circumferential direction. May be. As a result, the distance between the location where the leaked liquid W flows into the gap D1 between the annular lower surface 20c and the floor surface 12 and the detection unit is reduced, and the leak detection device 10 quickly detects the leak W at the detection unit. be able to.

  In the first embodiment, the base 20 of the liquid leakage detection device 10 has a circular recess 20b formed by recessing the central portion of the lower surface 20a, and the second detection unit 26 is disposed in the circular recess 20b. It was. The liquid leakage detection device 10 is not limited to this, and the shape of the central portion of the lower surface 20a can be obtained by sandwiching a gap larger than the gap D1 between the annular lower surface 20c and the floor surface 12 between the first detection unit 25 and the second detection unit 26. Is not particularly limited.

  For example, the lower surface 20a of the base 20 may be formed with an annular groove by recessing the inner end of the annular lower surface 20c. Further, the lower surface 20a of the base 20 may be inclined so that the gap between the lower surface 20a and the floor surface 12 increases from the inner end of the annular lower surface 20c toward the center position.

Even if it does in this way, the effect similar to said embodiment can be acquired.
-In 1st Embodiment, if the liquid leak detection apparatus 10 detects the liquid leak W in the 1st detection part 25, it will detect that the small amount of liquid leak W leaked from the manufacturing apparatus 11, and it synchronizes with the synchronizing signal Ss. Then, the manufacturing apparatus 11 was stopped. Not only this but the leak detection apparatus 10 will output the warning signal which informs that the small amount of leak W leaked in the manufacturing apparatus 11 to the manufacturing apparatus 11, if the leak W is detected in the 1st detection part 25. May be. In this case, the leak detection device 10 informs the manufacturing apparatus 11 that the leak W has leaked from the manufacturing apparatus 11 when the leak W from the manufacturing apparatus 11 is small. In addition, when the second detection unit 26 detects the leakage W, the leakage detection device 10 detects that a large amount of leakage W has flowed out of the manufacturing device 11 and stops the manufacturing device 11.

Even if it does in this way, the effect similar to said embodiment can be acquired.
In the first embodiment, the leakage liquid W that has flowed into the gap D1 between the annular lower surface 20c and the floor surface 12 is caused to flow into the first detection unit 25 by capillary action. Not limited to this, an annular protrusion is provided on the annular lower surface 20c in the circumferential direction from the first detection unit 25, and the liquid leakage W flowing into the gap D1 between the annular lower surface 20c and the floor surface 12 is guided to the annular protrusion. You may make it flow into the 1st detection part 25. FIG.

Even if it does in this way, the effect similar to said embodiment can be acquired.
-In 2nd Embodiment, the liquid leak detection apparatus 50 is the manufacturing apparatus 11 based on the time difference (detection time difference) C1 in which the 1st and 3rd detection parts 25 and 51 detect the liquid leak W from the manufacturing apparatus 11. The timing to stop was changed. Not limited to this, the liquid leakage detection device 50 may stop the manufacturing device 11 in units of time required for a series of operations of the manufacturing device 11 based on the detection time difference C1.

  The leak detector 50 can stop the manufacturing apparatus 11 as soon as the work in progress of the manufacturing apparatus 11 is completed. As a result, the leak detection device 10 can further reduce the decrease in productivity of the manufacturing apparatus 11 provided with the leak detection device 10.

  Furthermore, if the detection time difference C1 is longer than the reference time, the leak detection device 50 stops controlling the manufacturing apparatus 11. Conversely, if the detection time difference C1 is shorter than the reference time, the leak detection apparatus 50 causes the manufacturing apparatus 11 to An emergency stop may be performed.

Thereby, the effect similar to 1st Embodiment can be acquired.
Furthermore, the liquid leakage detection device 50 receives the synchronization signal Ss from the manufacturing device 11, outputs a stop signal St in synchronization with the synchronization signal Ss based on the detection time difference C1, and stops the manufacturing device 11 Also good.

  Accordingly, the leak detection device 50 can stop the manufacturing device 11 every time work in progress of the manufacturing device 11 is completed. As a result, the liquid leakage detection device 50 can further reduce the decrease in productivity of the manufacturing apparatus 11 provided with the liquid leakage detection device 50.

  In the second embodiment, the base 20 of the liquid leakage detection device 50 is different from the first embodiment in that the lower surface 20a is not recessed and the second detection unit 26 is not provided. Not only this but the base 20 of the leak detection apparatus 50 may provide the 2nd detection part 26 with the lower surface 20a recessed, like 1st Embodiment.

Thereby, the liquid leak detection apparatus 50 can stop the manufacturing apparatus 11 immediately, if a liquid leak is detected in the 2nd detection part 26 similarly to 1st Embodiment.
-In 3rd Embodiment, although the two guide convex parts 64 and 65 were provided, it is not specifically limited to this, You may comprise only one.

-In the 1st detection part 61 of 3rd Embodiment, it is good also as a structure which abbreviate | omitted the convex part 63. FIG.
-In 3rd Embodiment, although the guide convex parts 64 and 65 were provided in the position adjacent to the front-back direction X, you may provide in the position adjacent to the width direction Y. FIG.

  -In 3rd Embodiment, although the guide convex part 64 was provided in the peripheral part 20d, you may provide in the position away from the peripheral part 20d.

  DESCRIPTION OF SYMBOLS 10,50 ... Liquid leak detection apparatus, 11 ... Manufacturing apparatus, 20b ... Recessed part, 26b, 26c, 28b, 28c ... Introduction part (1st and 2nd output surface, 1st and 2nd incident surface), 40a-40c ... Light projecting means (first to third light projecting means), 41a to 41c... Light receiving means (first to third light receiving means), 42a to 42c... Detection means (first to third detecting means), 43. Means (input means), 52 ... Time difference measuring means (time interval measuring means), Ss ... Synchronization signal, St ... Stop signal (detection signal), 61 ... First detector (first liquid leakage detector), 62 ... Introduction Part, 64, 65 ... guide convex part (guide step part), 73 ... guide part.

Claims (8)

An introduction section for introducing a liquid leak;
A light projecting means for irradiating light toward the introduction part;
A light receiving means for receiving light from the light projecting means through the introduction section;
A liquid leakage detection unit including a detection unit that detects the liquid leakage based on the amount of light received by the light reception unit;
A leak detection device that outputs a detection signal to the outside based on the leak detection result of the leak detection unit,
The liquid leakage detection device is installed with a gap with respect to the floor surface,
The leak detector is
A first leak detector and a second leak detector provided at different positions on the lower surface of the leak detector;
On the line connecting the central part and the peripheral part of the lower surface of the liquid leakage detection device, the first liquid leakage detection part is arranged from the peripheral part, and the second liquid leakage detection part is arranged from the central part, respectively.
The second leakage detector is provided in a recess that is recessed at a position away from the peripheral edge of the lower surface of the leakage detector.
The output control means is
When the second leak detection unit detects the leak, the detection signal is output,
When the first liquid leakage detection unit detects the liquid leakage, the liquid leakage detection device outputs the detection signal after a predetermined time. The liquid leakage detection device according to claim 1,
Having an input means for inputting a synchronization signal from the outside;
The output control means includes
When the first leakage detector detects the leakage, the leakage detection device outputs the detection signal in synchronization with the synchronization signal input to the input means. The liquid leakage detection device according to claim 1 or 2,
The introduction part of the second liquid leakage detection part is formed to protrude from the concave part toward the floor surface,
The first liquid leakage detection unit is provided at a peripheral edge of the lower surface of the liquid leakage detection device,
The liquid leakage detection device, wherein the introduction portion of the first liquid leakage detection portion is formed to be recessed upward from the lower surface. The liquid leakage detection device according to claim 3,
An air hole is communicated with the recess. In the liquid leakage detection apparatus of any one of Claims 1-3,
A liquid leakage detection device characterized in that a guide step portion protruding from a lower surface of the liquid leakage detection device toward the floor surface is provided in a part of the periphery of the introduction portion of the first liquid leakage detection portion. apparatus. In the liquid leakage detection apparatus according to claim 5,
The liquid leakage detection device, wherein the guide step portion has a shape that becomes wider toward the lower surface of the liquid leakage detection device. In the leak detection apparatus according to claim 5 or 6,
A pair of the guide step portions are provided so as to sandwich the introduction portion of the first leak detection portion. In the liquid leakage detection apparatus of any one of Claims 1-7,
The liquid leakage detection device according to claim 1, wherein a guide portion protruding toward the concave portion is provided on a lower surface of the liquid leakage detection device at a position farthest from the first liquid leakage detection portion in the concave portion.

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