JP5669705B2 - Laser processing machine - Google Patents

Description

  The present invention relates to a laser beam machine.

  In Patent Document 1, in a numerical control device for a laser processing machine, a basic time constant setting unit sets a rising time constant and a falling time constant of a machining condition command, stores them in a basic time constant storage unit, and switches time constants. Describes that a time constant corresponding to the rising and falling of the machining condition command is selected from the basic time constant storage unit and output to the control data storage unit. Thereby, according to Patent Document 1, the machining condition data control unit outputs the machining condition data to the output control unit based on the execution time constant corresponding to the machining condition command stored in the control data storage unit. It is said that the rise time constant and fall time constant of the data can be freely adjusted, and the response timing can be changed smoothly according to the delay of the output detector.

Japanese Patent Laid-Open No. 3-155486

  Since the technique described in Patent Document 1 aims to smoothly change the processing condition data by matching the response timing to the delay of the output detector, the response time constant at the rise of the laser pulse is set to a relatively large value. This is presumed to be maintained.

  On the other hand, with the recent diversification of processing conditions, it may be required to increase or decrease the frequency of the laser pulse. In this case, if the response time constant at the rise of the laser pulse is maintained at a relatively large value (a value that slows down), the peak value of the pulse laser may be lowered when the frequency of the laser pulse is increased. When the peak value of the pulse laser decreases, the output power of the pulse laser decreases, and the processing efficiency by the laser processing machine may decrease.

  Conversely, if the response time constant at the rise of the laser pulse is maintained at a relatively small value (a value that becomes faster) and the laser pulse frequency decreases, overshoot and hunting (vibration) occur at the peak of the pulse laser. ) May occur and the peak value of the pulse laser may become unstable. If the peak value of the pulse laser becomes unstable, the output power of the pulse laser also becomes unstable, which may reduce the processing accuracy by the laser processing machine.

  The present invention has been made in view of the above, and an object of the present invention is to obtain a laser processing machine that can stabilize the peak value of a pulse laser and obtain a high peak laser output.

  In order to solve the above-described problems and achieve the object, a laser processing machine according to one aspect of the present invention includes a control unit that outputs a power control pulse in response to a frequency command that commands the frequency of a pulse laser; A power supply unit that generates and outputs a power pulse in response to the power control pulse; and a laser oscillator that oscillates and outputs a pulse laser in response to the power pulse, the control unit including the frequency command And a generation unit that determines a response time constant of the power control pulse, and a generation unit that generates and outputs the power control pulse according to the response time constant determined by the determination unit. To do.

  According to the present invention, the response time constant of the pulse can be made gentle when the repetition frequency of the laser pulse is low, and the response time constant of the pulse can be made steep when the repetition frequency of the laser pulse is high. It is possible to stabilize the peak value of the pulse laser in a wide repetition frequency region of the laser pulse, and to obtain a high peak laser output.

FIG. 1 is a diagram illustrating a configuration of a laser beam machine according to the first embodiment. FIG. 2 is a diagram showing a configuration of the determination table in the first embodiment. FIG. 3 is a diagram showing a configuration of the determination table in the modification of the first embodiment. FIG. 4 is a diagram showing a configuration of a determination table in another modification of the first embodiment. FIG. 5 is a diagram illustrating a configuration of a laser beam machine according to the second embodiment. FIG. 6 is a diagram illustrating the operation of the pulse output circuit according to the second embodiment. FIG. 7 is a diagram illustrating a configuration of a laser beam machine according to the third embodiment. FIG. 8 is a diagram illustrating a configuration of the determination unit according to the third embodiment. FIG. 9 is a diagram illustrating a configuration of a laser beam machine according to the fourth embodiment. FIG. 10 is a diagram illustrating the operation of the laser beam machine according to the comparative example.

  Embodiments of a laser beam machine according to the present invention will be described below in detail with reference to the drawings. Note that the present invention is not limited to the embodiments.

Embodiment 1 FIG.
The configuration of the laser beam machine 1 according to the first embodiment will be described with reference to FIG. FIG. 1 is a diagram showing a configuration of the laser processing machine 1.

  The laser processing machine 1 oscillates a pulse, outputs a pulse laser, and processes the workpiece by irradiating the workpiece (not shown) placed on the stage with the pulse laser. The laser processing machine 1 is, for example, a laser processing machine using a gas laser, but may be a laser processing machine using another type of laser. The laser processing machine 1 includes a control unit 10, a power supply unit (power supply unit) 20, and a laser resonator (laser oscillator) 30.

  A control parameter or a control program including the control parameter is input to the control unit 10 in advance. The control parameters include, for example, the frequency of the pulse laser, the pulse width of the pulse laser, and the peak value of the pulse of the pulse laser. The control unit 10 generates a power supply unit ON / OFF signal (power supply control pulse) according to the control parameter or a control program including the control parameter, and outputs it to the power supply unit 20. A specific configuration in the control unit 10 will be described later.

  The power supply unit 20 receives a power supply unit ON / OFF signal from the control unit 10. The power supply unit 20 generates and outputs power pulses in accordance with the power supply unit ON / OFF signal. The laser resonator 30 oscillates in response to the power pulse and outputs a pulse laser.

  Specifically, the laser resonator 30 is, for example, a gas laser oscillator, and a total reflection mirror 31 and a partial reflection mirror 32 that constitute an optical resonator with the electrode 34 in a housing filled with a laser medium (mixed gas). And are arranged. The electrode 34 is disposed facing the longitudinal direction of the housing. The total reflection mirror 31 is disposed on one end side (the step-up transformer 24 side) in the longitudinal direction of the electrode 34, and the partial reflection mirror 32 is disposed on the other end side (output end side) in the longitudinal direction of the electrode 34. A space between the counter electrodes 34 in the optical resonator is a discharge space 33.

  The power supply unit 20 includes an AC power supply 21, a rectifier circuit 22, an inverter circuit 23, and a step-up transformer 24. The rectifier circuit 22 full-wave rectifies the AC power from the AC power source 21 and converts it into DC power to form a DC power source for the inverter circuit 23. The inverter circuit 23 has a plurality of switching elements, performs an on / off operation based on a power supply unit ON / OFF signal from the control unit 10, and generates a power pulse from a DC power source presented by the rectifier circuit 22. The step-up transformer 24 boosts the power pulse generated by the inverter circuit 23 to a level at which discharge is possible in the discharge space 33 in the laser resonator 30 and applies it to the electrode 34 of the laser resonator 30. As a result, in the laser resonator 30, a pulse discharge is generated in the discharge space 33, and a pulse laser beam by laser oscillation (pulse oscillation) based on the discharge is amplified by the optical resonator, and the pulse laser beam is transmitted from the partial reflection mirror 32 to the outside. Is output.

  Next, a specific configuration within the control unit 10 will be described.

  The control unit 10 includes a command generation unit 44, a determination unit 41, and a generation unit 60 when viewed from a functional aspect. The generation unit 60 includes a pulse generation unit 42 and a switching unit 50. Note that, when viewed from the hardware side, the control unit 10 includes a control device 40 and a switching unit 50. The control device 40 and the switching unit 50 are connected via signal lines L1 and L2, for example. For example, the switching unit 50 and the power supply unit 20 are connected via a signal line L3. The command generation unit 44, the determination unit 41, and the pulse generation unit 42 in the functional configuration are included in the control device 40 in the hardware configuration. Below, it demonstrates centering on the structure at the time of seeing from a functional side.

  The command generation unit 44 generates a frequency command f for instructing the frequency of the pulse laser from the frequency of the pulse laser included in the control parameter. The command generation unit 44 generates a pulse width command d for instructing the pulse width of the pulse laser from the pulse width of the pulse laser included in the control parameter. The command generation unit 44 generates a peak value command p that commands the peak value of the pulse of the pulse laser from the peak value of the pulse of the pulse laser included in the control parameter. For example, the command generation unit 44 outputs the frequency command f to the determination unit 41 and outputs the frequency command f, the pulse width command d, and the peak value command p to the pulse generation unit 42.

  The determination unit 41 receives the frequency command f from the command generation unit 44. The determination unit 41 determines the response time constant RC of the power supply unit ON / OFF signal (power supply control pulse) according to the frequency command f. That is, the determination unit 41 determines the response time constant RC of the power supply unit ON / OFF signal so that the peak value of the pulse of the pulse laser approaches the target value according to the frequency command f. Specifically, the determination unit 41 has a determination table 43 acquired experimentally in advance so that the peak value of the pulse of the pulse laser approaches the target value. The determination unit 41 refers to the determination table 43 to determine the response time constant RC of the power supply unit ON / OFF signal corresponding to the frequency command f. Then, the determination unit 41 generates a time constant switching signal according to the determined response time constant RC and outputs the time constant switching signal to the switching unit 50 of the generation unit 60 via the signal line L1. Details of the time constant switching signal will be described later.

  The determination table 43 includes, for example, a frequency column 431 and a time constant column 432 as illustrated in FIG. In the frequency column 431, a plurality of frequencies f1, f2,. In the time constant column 432, a plurality of time constants RC1, RC2,... That are candidates for response time constants are recorded. At this time, for example, the relationship of the following formula 1 is established.

      f1 <f2, RC1> RC2 Formula 1

  For example, when the frequency commanded by the frequency command f is f1, the determination unit 41 refers to the determination table 43 as a value acquired in advance so that the pulse peak value of the pulse laser approaches the target value. The value of the response time constant RC of the power supply unit ON / OFF signal is determined as the time constant RC1.

  For example, when the frequency commanded by the frequency command f is f2 (> f1), the determination unit 41 refers to the determination table 43 so that the pulse peak value of the pulse laser approaches the target value in advance. The value of the response time constant RC of the power supply unit ON / OFF signal is determined as the time constant RC2 (<RC1).

  As described above, the determination unit 41 determines the response time constant RC of the power supply unit ON / OFF signal (power supply control pulse) as the first time constant when the frequency command f instructs the first frequency. When the frequency command f commands a second frequency higher than the first frequency, the response time constant RC of the power supply unit ON / OFF signal (power control pulse) is a second time constant smaller than the first time constant. To decide.

  The generation unit 60 generates and outputs a power supply unit ON / OFF signal according to the response time constant RC determined by the determination unit 41. Specifically, the pulse generation unit 42 of the generation unit 60 receives the frequency command f, the pulse width command d, and the peak value command p from the command generation unit 44. The pulse generator 42 generates a pulse output command (original pulse) to be a power supply unit ON / OFF signal (power control pulse) according to the frequency command f, the pulse width command d, and the peak value command p. The pulse output command is a pulse having a waveform corresponding to the power supply unit ON / OFF signal, and instructs to output the power supply unit ON / OFF signal in an analog manner. The pulse generation unit 42 outputs the generated pulse output command to the switching unit 50 of the generation unit 60.

  The switching unit 50 includes input nodes IN1 and IN2 and an output node OUT. The switching unit 50 receives a time constant switching signal from the determination unit 41 via the input node IN1, and receives a pulse output command from the pulse generation unit 42 via the input node IN2.

  The switching unit 50 includes a plurality of switchable circuit time constants RC-A and RC-B, and the plurality of circuit time constants RC-A and RC- according to the response time constant RC determined by the determination unit 41. Switch the circuit time constant between B. That is, the switching unit 50 switches the circuit time constant between the plurality of circuit time constants RC-A and RC-B in accordance with the time constant switching signal according to the response time constant RC determined by the determination unit 41. The switching unit 50 adjusts the response time constant RC of the pulse output command (original pulse) generated by the pulse generation unit 42 using the switched circuit time constant, and sends the adjusted pulse to the power supply unit ON / OFF signal ( As a power control pulse) to the power supply unit 20 via the output node OUT and the signal line L3.

  More specifically, the switching unit 50 includes a plurality of time constant circuits A and B and a plurality of switches SW1 and SW2. The plurality of time constant circuits A and B have different circuit time constants. The plurality of time constant circuits A and B have different circuit time constants. For example, when the circuit time constant of the time constant circuit A is RC-A and the circuit time constant of the time constant circuit B is RC-B, the following Expression 2 is established.

      (RC-A)> (RC-B) (2)

  The plurality of time constant circuits A and B are connected in series to a line between the input node IN2 and the output node OUT, for example.

  The plurality of switches SW1 and SW2 select a time constant circuit to be used from the plurality of time constant circuits A and B according to the response time constant RC determined by the determination unit 41. That is, the time constant circuit to be used is selected from the plurality of time constant circuits A and B in accordance with the time constant switching signal according to the response time constant RC determined by the determination unit 41. The plurality of switches SW1 and SW2 are provided corresponding to the plurality of time constant circuits A and B, for example. The switch SW1 is connected in parallel to the time constant circuit A, for example, with respect to the line between the input node IN2 and the output node OUT. For example, the switch SW2 is connected in parallel to the time constant circuit B with respect to the line between the input node IN2 and the output node OUT.

  For example, when the determination unit 41 determines the value of the response time constant RC to be RC1 shown in Equation 1, the determination unit 41 generates a time constant switching signal such that the time constant circuit A is selected from the plurality of time constant circuits A and B. Then, the signals are supplied to the plurality of switches SW1 and SW2 via the signal line L1. In response to this, the switch SW1 is turned off and the switch SW2 is turned on (becomes the state shown in FIG. 1), and the circuit time constant of the switching unit 50 is switched to RC-A shown in Formula 2. As a result, the pulse output command passes from the input node IN2 through the time constant circuit A, bypasses the time constant circuit B, passes through the switch SW2, and the power output unit ON / OFF in which the pulse output command is adjusted by the circuit time constant RC-A. A signal (power control pulse) is output from the output node OUT.

  For example, when the determination unit 41 determines the value of the response time constant RC to be RC2 shown in Formula 1, the determination unit 41 generates a time constant switching signal that selects the time constant circuit B from among the plurality of time constant circuits A and B. Then, the signals are supplied to the plurality of switches SW1 and SW2 via the signal line L1. In response to this, the switch SW1 is turned on and the switch SW2 is turned off, so that the circuit time constant of the switching unit 50 is switched to RC-B shown in Formula 2. Thereby, the pulse output command bypasses the time constant circuit A from the input node IN2 and passes through the switch SW1 and the time constant circuit B, and the power supply unit ON / OFF in which the pulse output command is adjusted by the circuit time constant RC-B. A signal (power control pulse) is output from the output node OUT.

  Here, suppose a case where the response time constant at the rising edge of the laser pulse is maintained at a relatively large value (a value that becomes slower). With the recent diversification of processing conditions, it may be required to increase or decrease the frequency of the laser pulse. In this case, when the frequency of the laser pulse is increased in a state where the response time constant at the rising edge of the laser pulse is maintained at a relatively large value (a value that slows down), as shown in FIG. There is a possibility that the peak value of. When the peak value of the pulse laser decreases, the output power of the pulse laser decreases, and the processing efficiency by the laser processing machine may decrease.

  Therefore, suppose a case where the response time constant at the rising edge of the laser pulse is maintained at a relatively small value (a value that becomes faster) in order to suppress a reduction in processing efficiency by the laser processing machine. With the recent diversification of processing conditions, it may be required to increase or decrease the frequency of the laser pulse. In this case, when the frequency of the laser pulse is lowered with the response time constant at the rising edge of the laser pulse maintained at a relatively small value (a value that becomes faster), as shown in FIG. There is a possibility that overshoot or hunting (vibration) occurs at the peak portion of the laser, and the peak value of the pulse laser becomes unstable. If the peak value of the pulse laser becomes unstable, the output power of the pulse laser also becomes unstable, which may reduce the processing accuracy by the laser processing machine.

  On the other hand, in the first embodiment, the determination unit 41 determines the response time constant RC of the power supply control pulse according to the frequency command f, and the generation unit 60 determines the response time constant RC determined by the determination unit 41. The power supply unit ON / OFF signal (power control pulse) is generated and output according to the above. As a result, the response time constant of the pulse can be made gentle when the repetition frequency of the laser pulse is low, and the response time constant of the pulse can be made steep when the repetition frequency of the laser pulse is high. In the pulse repetition frequency region, the peak value of the pulse laser can be stabilized, and a high peak laser output can be obtained.

  In the first embodiment, the determination unit 41 responds to the frequency command f so that the response time constant of the power unit ON / OFF signal (power control pulse) is such that the peak value of the pulse of the pulse laser approaches the target value. Determine RC. As a result, a pulse laser having a high peak can be stably obtained in a repetition frequency region of a wider laser pulse.

  Further, in the first embodiment, when the determining unit 41 instructs the first frequency as the frequency command f, the response time constant RC of the power unit ON / OFF signal (power control pulse) is set as the first time constant. When the frequency command f commands a second frequency higher than the first frequency, the response time constant RC of the power supply unit ON / OFF signal (power control pulse) is smaller than the first time constant. 2 time constant is determined. Thereby, according to the frequency command f, the response time constant of the power supply unit ON / OFF signal (power supply control pulse) can be determined so that the peak value of the pulse of the pulse laser approaches the target value.

  In the first embodiment, the pulse generation unit 42 generates a pulse output command (original pulse) to be a power supply unit ON / OFF signal (power supply control pulse), and the switching unit 50 is determined by the determination unit 41. In accordance with the response time constant, the circuit time constant is switched between a plurality of circuit time constants RC-A and RC-B, and the pulse output command (original pulse) generated by the pulse generation unit 42 is switched using the switched circuit time constant. ) Is adjusted, and the adjusted pulse is output as a power unit ON / OFF signal (power control pulse). Thereby, it is possible to adjust the response time constant according to the frequency command f with a simple configuration.

  In the first embodiment, the plurality of time constant circuits A and B have circuit time constants RC-A and RC-B different from each other, and the plurality of switches SW1 and SW2 are determined by the determination unit 41. A time constant circuit to be used is selected from a plurality of time constant circuits A and B according to a time constant switching signal according to the time constant. Thereby, it is possible to adjust the response time constant according to the frequency command f with a simple configuration.

  In the first embodiment, the case where the switching unit 50 selectively selects the time constant circuit to be used from the plurality of time constant circuits A and B has been described as an example. A plurality of constant circuits may be selected, or may be switched to a state in which no time constant circuit is selected.

  For example, the switching unit 50 turns off the plurality of switches SW1 and SW2 and selects all the plurality of time constant circuits A and B, thereby changing the circuit time constant of the switching unit 50 to the circuit time constant RC-A, You may switch to RC-AB synthesized with RC-B. Further, the switching unit 50 turns on the plurality of switches SW1 and SW2 and does not select all of the plurality of time constant circuits A and B, thereby changing the circuit time constant of the switching unit 50 to the circuit time constant RC-0. It may be switched. Thereby, the switching unit 50 can switch the circuit time constant with the number of stages larger than the number of the time constant circuits A and B.

  Alternatively, switching of the circuit time constant by the switching unit 50 is not limited to switching by a plurality of switches SW1 and SW2 as shown in FIG. For example, the circuit time constant may be switched continuously using a variable capacitor or a variable resistor.

  Further, the time constant switching signal in FIG. 1 is not necessarily output from the control device 40. For example, the determination unit 41 may be provided between the control device 40 and the switching unit 50.

  Alternatively, the determination unit 41 may have a function experimentally acquired in advance so that the peak value of the pulse of the pulse laser approaches the target value instead of the determination table 43. In this case, the determination unit 41 uses a function to calculate and determine the response time constant RC of the power supply unit ON / OFF signal corresponding to the frequency command f.

  Alternatively, the determination unit 41 may determine the response time constant RC of the power supply unit ON / OFF signal (power supply control pulse) according to the frequency command f and the pulse width command d. For example, the determination unit 41 refers to the determination table 43 to determine the response time constant RC of the power supply unit ON / OFF signal corresponding to the frequency command f and the pulse width command d.

  At this time, the determination table 43 includes, for example, a frequency column 431, a pulse width column 433, and a time constant column 432 as illustrated in FIG. In the pulse width column 433, a plurality of pulse widths d1, d2,... D1, d2,. At this time, for example, the relationship of the following formula 1 is established.

      f1 <f2, d1> d2, RC11> RC12> RC21> RC22 (3)

  For example, when the frequency commanded by the frequency command f is f1 and the pulse width commanded by the pulse width command d is d1, the determination unit 41 refers to the determination table 43 to determine the pulse laser pulse. The value of the response time constant RC of the power supply unit ON / OFF signal is determined as the time constant RC11 as a value acquired in advance so that the peak value approaches the target value.

  For example, when the frequency commanded by the frequency command f is f2 (> f1) and the pulse width commanded by the pulse width command d is d2 (<d1), the determination unit 41 refers to the determination table 43. Thus, the value of the response time constant RC of the power supply unit ON / OFF signal is determined to be the time constant RC22 (<RC11) as a value acquired in advance so that the peak value of the pulse of the pulse laser approaches the target value.

  Or the determination part 41 may determine the response time constant RC of a power supply unit ON / OFF signal (power supply control pulse) according to the frequency command f and the peak value command p. For example, the determination unit 41 refers to the determination table 43 to determine the response time constant RC of the power supply unit ON / OFF signal corresponding to the frequency command f and the peak value command p.

  At this time, the determination table 43 includes, for example, a frequency column 431, a peak value column 434, and a time constant column 432 as shown in FIG. In the peak value column 434, a plurality of peak values p1, p2,... P1, p2,. At this time, for example, the relationship of the following formula 1 is established.

f1 <f2, p1 <p2,
RC111>RC112>RC121> RC122 Formula 4

  For example, when the frequency commanded by the frequency command f is f1 and the peak value commanded by the peak value command p is p1, the determination unit 41 refers to the determination table 43 to determine the pulse of the pulse laser. The value of the response time constant RC of the power supply unit ON / OFF signal is determined as the time constant RC111 as a value acquired in advance so that the peak value approaches the target value.

  For example, when the frequency commanded by the frequency command f is f2 (> f1) and the peak value commanded by the peak value command p is p2 (> p1), the determination unit 41 refers to the determination table 43. Thus, the value of the response time constant RC of the power supply unit ON / OFF signal is determined as the time constant RC122 (<RC111) as a value acquired in advance so that the peak value of the pulse of the pulse laser approaches the target value.

  As described above, the peak value of the pulse laser can be freely controlled by adjusting the response time constant of the power supply unit ON / OFF signal. For example, it is necessary to reduce the peak value of the pulse laser when the laser processing machine 1 performs bonding processing using a pulse laser as compared with the case where the laser processing machine 1 performs cutting processing using a pulse laser. Even in such a case, the peak value of the pulse laser can be adjusted to the target value by adjusting the response time constant of the power supply unit ON / OFF signal.

Embodiment 2. FIG.
Next, the laser beam machine 100 according to the second embodiment will be described with reference to FIG. FIG. 5 is a diagram illustrating a configuration of the laser processing machine 100. Below, it demonstrates focusing on a different part from Embodiment 1. FIG.

  In the first embodiment, after generating a pulse output command (original pulse) in accordance with the frequency command f, the pulse width command d, and the peak value command p, the pulse output command is sent to the switching unit 50 that switches the circuit time constant. By passing, a power unit ON / OFF signal (power control pulse) with a response time constant adjusted is generated.

  On the other hand, in the second embodiment, a power supply unit ON / OFF signal (power control pulse) whose response time constant is adjusted is automatically generated based on the frequency command f, the pulse width command d, and the peak value command p. .

  Specifically, the control unit 110 of the laser beam machine 100 includes a command generation unit 144, a determination unit 171 and a generation unit 172 when viewed from a functional side. Note that when viewed from the hardware side, the control unit 110 includes a control device 140 and a pulse output circuit 170. For example, the control device 140 and the pulse output circuit 170 are connected via a signal line L12. For example, the pulse output circuit 170 and the power supply unit 20 are connected via a signal line L13. The command generation unit 144 having a functional configuration is included in the control device 140 having a hardware configuration. The determination unit 171 and the generation unit 172 in the functional configuration are included in the pulse output circuit 170 in the hardware configuration. The pulse output circuit 170 uses, for example, a microcomputer. Below, it demonstrates centering on the structure at the time of seeing from a functional side.

  The command generation unit 144 generates a pulse output command including a frequency command f, a pulse width command d, and a peak value command p. The pulse output command includes a plurality of parameters corresponding to the power supply unit ON / OFF signal, and instructs to output the power supply unit ON / OFF signal digitally. The command generation unit 144 outputs the generated pulse output command to the determination unit 171 and the generation unit 172 via the signal line L12.

  The determination unit 171 calculates the response time constant of the power supply unit ON / OFF signal (power supply control pulse) using the frequency command f, the pulse width command d, and the peak value command p generated by the command generation unit 144. Then, the determination unit 171 calculates the rising time of the waveform or the slope at the rising of the waveform according to the response time constant of the power supply unit ON / OFF signal.

  Specifically, the determination unit 171 has a function acquired experimentally in advance so that the peak value of the pulse of the pulse laser approaches the target value. Using the function, the determination unit 171 calculates a response time constant RC of the power supply unit ON / OFF signal corresponding to the frequency command f, and further calculates a waveform rise time corresponding to the response time constant RC. The determination unit 171 outputs the calculation result to the generation unit 172.

  For example, when the frequency commanded by the frequency command f is f1, the determination unit 171 calculates the value using a function as a value acquired in advance so that the peak value of the pulse of the pulse laser approaches the target value. The value of the response time constant RC of the power supply unit ON / OFF signal is determined as the time constant RC1. Furthermore, the determination unit 171 determines, for example, the value of the rise time of the waveform corresponding to the time constant RC1 as the time Δt1 (see FIG. 6A).

  For example, when the frequency commanded by the frequency command f is f2 (> f1), the determination unit 171 obtains in advance such that the peak value of the pulse of the pulse laser approaches the target value by calculating using a function. The value of the response time constant RC of the power supply unit ON / OFF signal is determined as the time constant RC2 (<RC1). Furthermore, the determination unit 171 determines, for example, the value of the rise time of the waveform corresponding to the time constant RC1 as time Δt2 (<Δt1) (see FIG. 6B).

  The generation unit 172 receives the frequency command f, the pulse width command d, and the peak value command p from the command generation unit 144 and receives the calculation result from the determination unit 171. The generation unit 172 generates a frequency command f, a pulse width command d, and a peak value command so that the response time constant RC of the power supply unit ON / OFF signal (power control pulse) becomes the response time constant calculated by the determination unit 171. A power supply unit ON / OFF signal according to p is generated and output. That is, the generation unit 172 generates the frequency command f, the pulse width command d, and the peak value so as to obtain the waveform rise time or the slope at the waveform rise time according to the response time constant calculated by the determination unit 171. A power supply unit ON / OFF signal according to the command p is generated and output.

  For example, when the response time constant RC1 calculated by the determination unit 171 and the value of the rise time of the waveform corresponding to the time constant RC1 is time Δt1, the generation unit 172, as shown in FIG. While satisfying the frequency command f, the pulse width command d, and the peak value command p, the power unit ON / OFF signal (power control pulse) is generated so that the rising time of the waveform becomes Δt1.

  For example, when the response time constant RC2 calculated by the determination unit 171 and the value of the rise time of the waveform corresponding to the time constant RC2 is time Δt2, the generation unit 172, as shown in FIG. While satisfying the frequency command f, the pulse width command d, and the peak value command p, the power supply unit ON / OFF signal (power control pulse) is generated so that the rising time of the waveform becomes Δt2.

  As described above, in the second embodiment, the determination unit 171 calculates the response time constant of the power supply unit ON / OFF signal (power supply control pulse) using the frequency command f, and the generation unit 172 The power supply unit ON / OFF according to the frequency command f, the pulse width command d, and the peak value command p so that the response time constant of the / OFF signal (power control pulse) becomes the response time constant calculated by the determination unit 171. A signal (power control pulse) is generated and output. As a result, the time from the generation of the command to the generation of the power supply unit ON / OFF signal (power supply control pulse) can be shortened, so that the responsiveness of the laser beam machine 100 can be improved when switching the processing conditions. it can.

Embodiment 3 FIG.
Next, a laser beam machine 200 according to the third embodiment will be described with reference to FIG. FIG. 7 is a diagram illustrating a configuration of the laser processing machine 200. Below, it demonstrates focusing on a different part from Embodiment 1. FIG.

  In the first embodiment, the response time constant of the power supply unit ON / OFF signal (power supply control pulse) is estimated so that the peak value of the pulse of the pulse laser approaches the target value according to the frequency commanded by the frequency command f, The response time constant of the power unit ON / OFF signal (power control pulse) is adjusted so that the estimated response time constant is obtained.

  On the other hand, in the third embodiment, the peak value of the pulse of the pulse laser is further monitored, and the response time constant is feedback-controlled so that the peak value of the monitored pulse approaches the commanded peak value.

  Specifically, the laser processing machine 200 further includes a partial reflection mirror 270 and a sensor 280. The partial reflection mirror 270 transmits a part of the pulse laser output from the laser resonator 30 and outputs it to the workpiece, and reflects the other part to guide the sensor 280. The sensor 280 detects the light intensity of the pulse laser output from the laser resonator 30 by detecting the light intensity of the pulse laser guided from the partial reflection mirror 270. The sensor 280 feeds back the detection result to the control unit 210 as a feedback signal.

  The determination unit 241 in the control device 240 of the control unit 210 receives a feedback signal from the sensor 280. The feedback signal is a signal indicating the light intensity of the pulse laser output from the laser resonator 30. The determination unit 241 determines the response time constant of the power supply unit ON / OFF signal (power supply control pulse) according to the frequency command f and the feedback signal.

  Specifically, the determination unit 241 determines the response time constant of the power supply unit ON / OFF signal according to the frequency command f in the first period, and the feedback signal in the second period following the first period. The response time constant of the power supply unit ON / OFF signal is determined so that the peak value of the pulse corresponding to 1 approaches the peak value of the pulse commanded by the peak value command p. That is, the determination unit 241 performs the same operation as that of the first embodiment in the first period, and performs an operation (feedback control) different from that of the first embodiment in the second period following the first period. That is, when the peak value of the pulse corresponding to the detection result (feedback signal) by the sensor 280 is lower than the peak value of the pulse commanded by the peak value command p in the second period, the determination unit 241 The response time constant of the OFF signal (power control pulse) is determined to be smaller than the current value, and the peak value of the pulse corresponding to the detection result (feedback signal) by the sensor 280 is commanded by the peak value command. If higher, the response time constant of the power unit ON / OFF signal (power control pulse) is determined to be larger than the current value.

  More specifically, the determination unit 241 includes an extraction unit 2411, a comparison unit 2412, and a time constant determination unit 2413 as shown in FIG. 8 in addition to the determination table 43 (see FIG. 2).

  The extraction unit 2411 receives a feedback signal from the sensor 280. The extraction unit 2411 extracts the peak value of the pulse of the pulse laser from the detection result (feedback signal) by the sensor 280 in the second period. For example, the extraction unit 2411 performs a predetermined calculation, estimates the original waveform of the pulse laser from the feedback signal, and estimates the peak value of the pulse of the pulse laser from the estimated waveform. Extract the peak value.

  The comparison unit 2412 receives the peak value of the extracted pulse laser pulse from the extraction unit 2411 and also receives the peak value command p from the command generation unit 44 (see FIG. 7). The comparison unit 2412 compares the peak value of the extracted pulse with the peak value of the pulse commanded by the peak value command p in the second period, and outputs the comparison result to the time constant determination unit 2413.

  The time constant determination unit 2413 receives the comparison result from the comparison unit 2412 and receives the frequency command f from the command generation unit 44 (see FIG. 7).

  In the first period, the time constant determination unit 2413 responds to the power supply unit ON / OFF signal (power control pulse) with reference to, for example, the determination table 43 according to the frequency command f, as in the first embodiment. A constant is determined, a time constant switching signal is generated according to the determined response time constant RC, and is output to the switching unit 50 of the generation unit 60 via the signal line L1.

  The time constant determination unit 2413 determines the response time constant of the power supply unit ON / OFF signal (power supply control pulse) according to the comparison result by the comparison unit 2412 in the second period. That is, the time constant determining unit 2413 determines that the power supply unit ON / OFF is obtained when the peak value of the extracted pulse laser pulse is lower than the peak value of the pulse commanded by the peak value command p. The response time constant RC of the signal (power control pulse) is determined to be smaller than the current value. Alternatively, the time constant determining unit 2413 may turn the power supply unit ON / OFF when the peak value of the extracted pulse laser pulse is higher than the peak value of the pulse commanded by the peak value command p. The response time constant RC of the signal (power control pulse) is determined to be larger than the current value. Then, the time constant determination unit 2413 generates a time constant switching signal according to the determined response time constant RC and outputs the time constant switching signal to the switching unit 50 of the generation unit 60 via the signal line L1.

  As described above, in the third embodiment, the sensor 280 detects the light intensity of the pulse laser output from the laser resonator 30, and the determination unit 241 determines the frequency command f and the detection result (feedback signal) by the sensor 280. ) To determine the response time constant of the power supply unit ON / OFF signal (power supply control pulse). Thereby, the peak value of the pulse laser can be more easily stabilized.

  In the third embodiment, the determination unit 241 determines the response time constant of the power supply unit ON / OFF signal (power control pulse) according to the frequency command f in the first period, and continues to the first period. In the second period, the power unit ON / OFF signal (power control pulse) is set so that the peak value of the pulse corresponding to the detection result (feedback signal) by the sensor 280 approaches the peak value of the pulse commanded by the peak value command. ) Response time constant is determined. Accordingly, the response time constant of the power supply unit ON / OFF signal (power supply control pulse) can be roughly adjusted in the first period, and the power supply unit can be controlled by performing feedback control in the second period following the first period. The response time constant of the ON / OFF signal (power control pulse) can be finely adjusted. Thereby, it is possible to further improve the accuracy of adjusting the response time constant such that the peak value of the pulse of the pulse laser approaches the target value.

  In the third embodiment, the extraction unit 2411 extracts the peak value of the pulse of the pulse laser from the detection result by the sensor 280, and the comparison unit 2412 instructs the peak value of the extracted pulse and the peak value command p. The time constant determination unit 2413 sets the response time constant of the power supply unit ON / OFF signal (power control pulse) according to the frequency command f and the comparison result by the comparison unit 2412. decide. Accordingly, it is possible to easily realize a configuration in which the response time constant can be roughly adjusted in the first period and the response time constant can be finely adjusted in the second period following the first period.

Embodiment 4 FIG.
Next, a laser beam machine 300 according to the fourth embodiment will be described with reference to FIG. FIG. 9 is a diagram illustrating a configuration of the laser processing machine 300. Below, it demonstrates centering on a different part from Embodiment 2. FIG.

  In the second embodiment, the response time constant of the power supply unit ON / OFF signal (power supply control pulse) is estimated so that the peak value of the pulse of the pulse laser approaches the target value according to the frequency commanded by the frequency command f, A power unit ON / OFF signal (power control pulse) is automatically generated so that the estimated response time constant is obtained.

  On the other hand, in the fourth embodiment, the peak value of the pulse of the pulse laser is further monitored, and the response time constant is feedback-controlled so that the peak value of the monitored pulse approaches the commanded peak value.

  Specifically, the laser processing machine 300 further includes a partial reflection mirror 270 and a sensor 280. The partial reflection mirror 270 transmits a part of the pulse laser output from the laser resonator 30 and outputs it to the workpiece, and reflects the other part to guide the sensor 280. The sensor 280 detects the light intensity of the pulse laser output from the laser resonator 30 by detecting the light intensity of the pulse laser guided from the partial reflection mirror 270. The sensor 280 feeds back the detection result to the control unit 310 as a feedback signal.

  The determination unit 371 in the pulse output circuit 370 of the control unit 310 receives a feedback signal from the sensor 280. The feedback signal is a signal indicating the light intensity of the pulse laser output from the laser resonator 30. The determination unit 371 determines a response time constant of the power supply unit ON / OFF signal (power supply control pulse) according to the frequency command f and the feedback signal.

  Specifically, the determination unit 371 determines the response time constant of the power supply unit ON / OFF signal according to the frequency command f in the first period, and the feedback signal in the second period following the first period. The response time constant of the power supply unit ON / OFF signal is determined so that the peak value of the pulse corresponding to 1 approaches the peak value of the pulse commanded by the peak value command p. That is, the determination unit 371 performs the same operation as that of the second embodiment in the first period, and performs an operation (feedback control) different from that of the second embodiment in the second period following the first period. That is, when the peak value of the pulse corresponding to the detection result (feedback signal) by the sensor 280 is lower than the peak value of the pulse commanded by the peak value command p in the second period, the determination unit 371 The response time constant of the OFF signal (power control pulse) is determined to be smaller than the current value, and the peak value of the pulse corresponding to the detection result (feedback signal) by the sensor 280 is commanded by the peak value command. If higher, the response time constant of the power unit ON / OFF signal (power control pulse) is determined to be larger than the current value.

  More specifically, the determination unit 371 includes an extraction unit 3711, a comparison unit 3712, and a time constant determination unit 3713 as illustrated in FIG.

  The extraction unit 3711 receives a feedback signal from the sensor 280. The extraction unit 3711 extracts the peak value of the pulse of the pulse laser from the detection result (feedback signal) by the sensor 280 in the second period. For example, the extraction unit 3711 performs a predetermined calculation, estimates the original waveform of the pulse laser from the feedback signal, and estimates the peak value of the pulse of the pulse laser from the estimated waveform. Extract the peak value.

  The comparison unit 3712 receives the peak value of the extracted pulse laser pulse from the extraction unit 3711 and receives the peak value command p from the command generation unit 144. The comparison unit 3712 compares the peak value of the extracted pulse with the peak value of the pulse commanded by the peak value command p in the second period, and outputs the comparison result to the time constant determination unit 3713.

  The time constant determination unit 3713 receives the comparison result from the comparison unit 3712 and receives the frequency command f from the command generation unit 144.

  In the first period, the time constant determination unit 3713 calculates a response time constant RC of the power supply unit ON / OFF signal corresponding to the frequency command f using, for example, a function, and further corresponds to the response time constant RC. For example, the rise time of the waveform is calculated. The time constant determination unit 3713 outputs the calculation result to the generation unit 172.

  The time constant determination unit 3713 determines the response time constant of the power supply unit ON / OFF signal (power supply control pulse) according to the comparison result by the comparison unit 3712 in the second period. In other words, the time constant determination unit 3713 determines that the extracted pulse laser pulse peak value is lower than the peak value of the pulse commanded by the peak value command p. The response time constant RC of the signal (power control pulse) is determined to be smaller than the current value. Alternatively, the time constant determination unit 3713 determines that the peak value of the extracted pulse laser pulse is higher than the peak value of the pulse commanded by the peak value command p. The response time constant RC of the signal (power control pulse) is determined to be larger than the current value. Then, the time constant determination unit 3713 calculates, for example, a waveform rise time corresponding to the determined response time constant RC. The time constant determination unit 3713 outputs the calculation result to the generation unit 172.

  As described above, in the fourth embodiment, the sensor 280 detects the light intensity of the pulse laser output from the laser resonator 30, and the determination unit 371 determines the frequency command f and the detection result (feedback signal) by the sensor 280. ) To determine the response time constant of the power supply unit ON / OFF signal (power supply control pulse). Thereby, the peak value of the pulse laser can be more easily stabilized.

  In the fourth embodiment, the determination unit 371 determines the response time constant of the power supply unit ON / OFF signal (power supply control pulse) according to the frequency command f in the first period, and continues to the first period. In the second period, the power unit ON / OFF signal (power control pulse) is set so that the peak value of the pulse corresponding to the detection result (feedback signal) by the sensor 280 approaches the peak value of the pulse commanded by the peak value command. ) Response time constant is determined. Accordingly, the response time constant of the power supply unit ON / OFF signal (power supply control pulse) can be roughly adjusted in the first period, and the power supply unit can be controlled by performing feedback control in the second period following the first period. The response time constant of the ON / OFF signal (power control pulse) can be finely adjusted. Thereby, it is possible to further improve the accuracy of adjusting the response time constant such that the peak value of the pulse of the pulse laser approaches the target value.

  In the fourth embodiment, the extraction unit 3711 extracts the pulse peak value of the pulse laser from the detection result of the sensor 280, and the comparison unit 3712 instructs the peak value of the extracted pulse and the peak value command p. The time constant determination unit 3713 sets the response time constant of the power unit ON / OFF signal (power control pulse) according to the frequency command f and the comparison result by the comparison unit 3712. decide. Accordingly, it is possible to easily realize a configuration in which the response time constant can be roughly adjusted in the first period and the response time constant can be finely adjusted in the second period following the first period.

  As described above, the laser processing machine according to the present invention is useful for a laser processing machine that pulsates and outputs a pulse laser.

DESCRIPTION OF SYMBOLS 1,100,200,300 Laser processing machine 10,110,210,310 Control part 20 Power supply unit 21 AC power supply 22 Rectifier circuit 23 Inverter circuit 24 Booster transformer 30 Laser resonator 31 Total reflection mirror 32 Partial reflection mirror 33 Discharge space 34 Electrodes 40, 140, 240 Controllers 41, 241 Determination unit 42 Pulse generation unit 43 Determination table 44, 144 Command generation unit 50 Switching unit 60 Generation unit 170, 370 Pulse output circuit 171, 371 Determination unit 172 Generation unit 270 Partial reflector 280 Sensor 2411 Extraction unit 2412 Comparison unit 2413 Time constant determination unit 3711 Extraction unit 3712 Comparison unit 3713 Time constant determination unit A, B Time constant circuit SW1, SW2 switch

Claims (10)

In accordance with a frequency command that commands the frequency of the pulse laser, a control unit that outputs a power control pulse,
A power supply unit that generates and outputs a power pulse in response to the power control pulse;
In response to the power pulse, a laser oscillator that pulsates and outputs a pulse laser; and
With
The controller is
In accordance with the frequency command, a determination unit that determines a response time constant of the power supply control pulse so that the peak value of the pulse of the pulse laser approaches a target value ;
According to the response time constant determined by the determination unit, a generation unit that generates and outputs the power control pulse,
A laser processing machine characterized by comprising: The determining unit determines a response time constant of the power supply control pulse as a first time constant when the frequency command instructs a first frequency, and the frequency command is higher than the first frequency. If that is issuing the second frequency, laser processing machine according to claim 1, characterized in that determining the time constant time constant smaller than the first response time constant of said first of said power supply control pulses. In accordance with a frequency command that commands the frequency of the pulse laser, a control unit that outputs a power control pulse,
A power supply unit that generates and outputs a power pulse in response to the power control pulse;
In response to the power pulse, a laser oscillator that pulsates and outputs a pulse laser; and
With
The controller is
A determining unit that determines a response time constant of the power control pulse in accordance with the frequency command;
According to the response time constant determined by the determination unit, a generation unit that generates and outputs the power control pulse,
Have
The generator is
A pulse generator for generating an original pulse to be the power control pulse;
A plurality of switchable circuit time constants are used, the response time constant of the original pulse generated by the pulse generator is adjusted using the switched circuit time constants, and the adjusted pulses are output as the power control pulses. A switching unit to
Have
The switching unit, according to the response time constant determined by the determination unit, wherein the, Relais chromatography The machine that switches the circuit time constant among the plurality of circuit time constant. The switching unit is
A plurality of time constant circuits having different circuit time constants;
A plurality of switches for selecting a time constant circuit from the plurality of time constant circuits;
The laser processing machine according to claim 3 , wherein: In accordance with a frequency command that commands the frequency of the pulse laser, a control unit that outputs a power control pulse,
A power supply unit that generates and outputs a power pulse in response to the power control pulse;
In response to the power pulse, a laser oscillator that pulsates and outputs a pulse laser; and
With
The controller is
Before Symbol frequency reference, and a determination unit in response to the pulse width command for commanding the width of the pulse laser pulses, determines a response time constant of the power control pulse,
According to the response time constant determined by the determination unit, a generation unit that generates and outputs the power control pulse,
Features and, Relais chromatography The machine that has a. In accordance with a frequency command that commands the frequency of the pulse laser, a control unit that outputs a power control pulse,
A power supply unit that generates and outputs a power pulse in response to the power control pulse;
In response to the power pulse, a laser oscillator that pulsates and outputs a pulse laser; and
With
The controller is
In accordance with the frequency command and a peak value command that commands a peak value of a pulse of a pulse laser, a determination unit that determines a response time constant of the power control pulse ;
According to the response time constant determined by the determination unit, a generation unit that generates and outputs the power control pulse,
Features and, Relais chromatography The machine that has a. A command generator for generating the frequency command, a pulse width command for commanding the pulse width of the pulse laser, and a peak value command for commanding the peak value of the pulse of the pulse laser;
The determination unit calculates a response time constant of the power control pulse using at least the frequency command generated by the command generation unit,
The generating unit generates the power control pulse according to the frequency command, the pulse width command, and the peak value command so that a response time constant of the power control pulse becomes the calculated response time constant. laser processing machine according to claim 5 or 6, characterized in that output Te. In accordance with a frequency command that commands the frequency of the pulse laser, a control unit that outputs a power control pulse,
A power supply unit that generates and outputs a power pulse in response to the power control pulse;
In response to the power pulse, a laser oscillator that pulsates and outputs a pulse laser; and
A detection unit for detecting the light intensity of the pulse laser output by the laser oscillator ;
Bei to give a,
The controller is
In the first period, a response time constant of the power supply control pulse is determined according to the frequency command, and in a second period following the first period, a peak value of a pulse corresponding to a detection result by the detection unit Determining a response time constant of the power control pulse so as to approach the peak value of the pulse commanded by the peak value command ;
According to the response time constant determined by the determination unit, a generation unit that generates and outputs the power control pulse,
Features and, Relais chromatography The machine that has a. The determination unit determines a response time constant of the power supply control pulse as a first time constant when the frequency command is commanding a first frequency in the first period, and the frequency command is When commanding a second frequency higher than the first frequency, the response time constant of the power control pulse is determined to be a second time constant smaller than the first time constant, and in the second period, When the peak value of the pulse corresponding to the detection result by the detection unit is lower than the peak value of the pulse commanded by the peak value command, the response time constant of the power control pulse is determined to be smaller than the current value, and the detection If the peak value of the pulse corresponding to the detection result by the unit is higher than the peak value of the pulse commanded by the peak value command, the response time constant of the power control pulse is determined to be larger than the current value. 9. The laser beam machine according to claim 8 , wherein The determination unit
An extraction unit for extracting the peak value of the pulse of the pulse laser from the detection result by the detection unit;
A comparison unit that compares the peak value of the extracted pulse with the peak value of the pulse commanded by the peak value command;
A time constant determining unit that determines a response time constant of the power control pulse according to the frequency command and a comparison result by the comparing unit;
The laser beam machine according to claim 8 or 9 , wherein:

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