JP5693501B2 - Cutting blade manufacturing method and cutting blade - Google Patents

Description

  The present invention relates to a method for manufacturing a cutting blade used for precision cutting of hard and brittle materials such as aluminum oxide (alumina), quartz, glass, quartz, and the like, and a cutting blade manufactured thereby.

  Conventionally, grooving materials (a material to be cut) such as aluminum oxide, quartz, glass, and quartz used for semiconductor products are processed into grooves or cut into pieces (hereinafter referred to as these processes). High accuracy is required for cutting or cutting processing as a whole, and a cutting blade having a circular thin plate-like blade body is used for such cutting processing. Abrasive grains made of diamond or cBN (cubic boron nitride) are dispersed in the bond phase of the blade body (see, for example, Patent Documents 1 to 3 below).

  In particular, when cutting the hard and brittle materials that are prone to chipping, cracking, corner chipping, etc. (hereinafter abbreviated as chipping) as the material to be cut, the impact of the processing load on the material to be cut is reduced. Therefore, the chipping etc. are suppressed using the resin bond grindstone whose bond phase consists of an elastic resin binder phase (resin bond phase) (for example, refer to the following Patent Document 3).

JP 2008-49412 A JP 2003-300166 A JP-A-9-117863

  However, in the above-described conventional resin bond grindstone (cutting blade), since the blade body has elasticity (that is, the elastic modulus is low), it is difficult to cut into the material to be cut and the self-generated blade action. However, the cutting resistance was likely to be high. In addition, the chipping of the material to be cut tends to be large, and the cutting speed cannot be increased.

  The present invention has been made in view of such circumstances, and while using a resin bond phase in the blade body, the elastic modulus is increased to facilitate cutting into the material to be cut, and the self-generated blade action is achieved. It is an object of the present invention to provide a cutting blade manufacturing method and a cutting blade that can be sufficiently promoted to reduce cutting resistance, improve processing quality, and increase the cutting speed.

  In order to achieve the above object, the inventor of the present invention has conducted extensive research on such cutting blades, and as a result, the blade body is subjected to heat treatment in a predetermined temperature range and holding time, thereby The inventors have come to obtain the knowledge that the elastic modulus is increased, the sharpness is increased, and the blade body is moderately brittle to promote the spontaneous blade action.

The manufacturing method of the cutting blade according to the present invention is based on such knowledge, and is a circular thin blade in which abrasive grains are dispersed and held in a resin bond phase mainly composed of a phenol resin. The main body is heat-treated by being held in a temperature range of 350 to 500 ° C. for 1 to 10 hours.

In the method for manufacturing a cutting blade of the present invention, the blade body in which abrasive grains are dispersed and held in a resin bond phase mainly composed of a phenol resin is subjected to a heat treatment according to the above temperature range and holding time, It suppresses the elasticity of the blade body and increases the elastic modulus.
The blade body that has been subjected to such a heat treatment is sharp against the material to be cut by suppressing the abrasive grains of the cutting edge part that contacts the material to be cut from being elastically pushed back into the resin bond phase. It is cut and sharpness is enhanced. Further, the blade body is moderately brittle, and the abrasive grains are easily removed from the resin bond phase according to the wear state, and the self-generated blade action is sufficiently promoted.
Therefore, the cutting blade manufactured in this way can reduce the cutting resistance and improve the processing quality, thereby further increasing the cutting speed.

Here, if the heat treatment temperature is as low as below 250 ° C. or the heat treatment time is as short as less than 1 hour, the elastic modulus of the blade body cannot be increased to the extent that the above-described remarkable effects can be obtained, and is moderate. Brittleness cannot be obtained.
In addition, if the heat treatment temperature is higher as it exceeds 500 ° C. or the heat treatment time is longer as it exceeds 10 hours, the blade body may be carbonized and damaged during cutting, or the blade body may be deteriorated (improved elastic modulus). Heat energy and time may be wasted without making a contribution.

Specifically, conventionally, it has been considered that performing heat treatment at, for example, 220 ° C. or more on a resin bond grindstone may cause deterioration, and those skilled in the art have not performed it. On the other hand, the inventor of the present invention has found that the above-mentioned remarkable effect can be obtained by actively incorporating a predetermined heat treatment that cannot be easily conceived by those skilled in the art through repeated research. There is .

In the method for manufacturing a cutting blade according to the present invention, the blade body may be heat-treated in a temperature range of 400 to 500 ° C.
In the method for manufacturing a cutting blade according to the present invention, the blade body may be heat-treated while being held in the temperature range for 5 to 10 hours.

  In this case, the elastic modulus of the blade body after the heat treatment is reliably increased to, for example, about 105 to 180%, with the elastic modulus of the blade body before the heat treatment as a reference (100%). As a result, the blade body after the heat treatment can be appropriately brittle while ensuring its rigidity, and the above-described effects can be achieved more reliably.

  The cutting blade according to the present invention is manufactured by the above-described cutting blade manufacturing method, and the elastic modulus of the blade body after the heat treatment is 105% or more based on the elastic modulus of the blade body before the heat treatment. It is characterized by being.

  According to the method for manufacturing a cutting blade of the present invention and the cutting blade manufactured thereby, the resin bond phase is used in the blade body, the elastic modulus is increased, and the material is easily cut into the material to be cut. The cutting action is sufficiently promoted, cutting resistance can be reduced, processing quality is improved, and cutting speed can be further increased.

It is a side view which shows the outline of the cutting blade manufactured by one Embodiment of this invention. It is an AA cross section in FIG. It is an enlarged view of the B section in FIG.

Hereinafter, a cutting blade 10 according to an embodiment of the present invention will be described with reference to the drawings.
The cutting blade 10 of the present embodiment is made of a material to be cut, such as aluminum oxide (Al ₂ O ₃ ), silicon carbide (SiC), quartz, glass, crystal, or the like used for a semiconductor device (electronic material component). It is used for precision cutting. Specifically, the cutting blade 10 is suitable for a field where a groove processing is required at a strong pitch, such as an oscillator, or an electronic material manufacturing field in which a method of cutting into individual pieces is performed.

  As shown in FIG. 1, the cutting blade 10 has a blade body 1 having a circular thin plate shape centered on the axis O and having a thickness of about 0.05 to 0.5 mm. In addition, a mounting hole 4 is formed in the center of the blade body 1 so as to have a circular shape centering on the axis O of the blade body 1 and penetrate the blade body 1 in the thickness direction (left-right direction in FIG. 2). Therefore, strictly speaking, the blade body 1 has an annular thin plate shape.

  Although not shown in particular, the cutting blade 10 is attached to the main shaft of the cutting device through the flange and is sent around in the direction perpendicular to the axis O while being rotated around the axis O. In the main body 1, the material to be cut is cut at the outer peripheral edge (cutting edge) protruding radially outward from the flange.

  As shown in FIG. 3, the cutting edge of the blade body 1 includes an outer peripheral surface 1 </ b> A having a very small width equal to the thickness of the blade body 1 and outer peripheral edge portions on both side surfaces 1 </ b> B facing the axis O direction of the blade body 1. And an edge portion that is an intersecting ridge portion of the outer peripheral surface 1A and the side surface 1B.

  The blade body 1 includes a resin bond phase 2 containing a phenol resin as a main component and abrasive grains 3 dispersed and held in the resin bond phase 2. The abrasive grains 3 are composed of at least one of diamond abrasive grains and cBN abrasive grains, and the plurality of abrasive grains 3 in the resin bond phase 2 are dispersed so that the distance between them is uniform. Although not particularly illustrated, a filler made of WC (tungsten carbide) or the like is further dispersed in the resin bond phase 2 of the blade body 1.

Next, a method for manufacturing the cutting blade 10 of this embodiment will be described.
The cutting blade 10 is produced by a slurry forming step in which a solvent, abrasive grains 3 and a filler are mixed with a resin bond phase 2 material to form a slurry, and the slurry is formed into a sheet by a doctor blade method. The forming process of punching into the blade body 1 material, the compression process for hot pressing the blade body 1 material, and the blade body 1 material after the compression process are held at a temperature range of 250 to 500 ° C. for 1 to 10 hours. A heat treatment process for heat treatment and a finishing process for finishing the blade body 1 material to a predetermined size (for adjusting the shape).

[Slurry formation process]
First, a predetermined amount of a phenol resin (resin bond phase 2) material is weighed, and 10 ml of an IPA solvent is added to dissolve the phenol resin material. Next, a slurry is formed by adding and mixing the above-described abrasive grains 3 and powder filler to the dissolved resin solution. In addition, you may mix a silane coupling agent with the said resin solution.

[Molding process]
Next, the slurry is formed into a sheet having a thickness of 0.3 mm, for example, by a doctor blade method.
After the sheet is dried, a disk-shaped blade having a diameter of 70 mm is cut out from the sheet to form the blade body 1 material.

[Compression process]
Next, the blade body 1 material is compression molded by hot pressing. The molding conditions are, for example, a hot plate atmosphere of 200 ° C. and 180 ° C. for 30 minutes and a pressure of 10 ton.

[Heat treatment process]
Next, the blade body 1 material is housed in, for example, an electric furnace (oven) or the like, and is heat-treated by being held in a temperature range of 250 to 500 ° C. for 1 to 10 hours. This heat treatment is performed in an air atmosphere.
Here, the heat treatment is preferably performed in a temperature range of 300 to 500 ° C, and more preferably in a temperature range of 400 to 500 ° C. Moreover, it is preferable to heat-treat for 5 to 10 hours.

[Finishing process]
The blade 10 for cutting having a desired shape can be obtained by cutting or grinding the outer peripheral portion and the inner peripheral portion so that the blade body 1 is heat-treated so as to have a predetermined size.
In addition, the kind and name of material in each process mentioned above, a molding dimension, molding conditions, etc. are not limited to this embodiment.

  The cutting blade 10 manufactured by such a manufacturing method of the cutting blade 10 is based on the elastic modulus of the blade body 1 (material) before the heat treatment as a reference (100%), and the elastic modulus of the blade body 1 after the heat treatment. Is set to 105% or more, preferably 120% or more, desirably 160% or more, and 180% or less.

In the manufacturing method of the cutting blade 10 of the present embodiment described above, the blade body 1 (material) in which the abrasive grains 3 are dispersedly held in the resin bond phase 2 mainly composed of phenol resin is 250 to 500 ° C. By maintaining the temperature in the above temperature range for 1 to 10 hours and performing heat treatment, the elasticity of the blade body 1 is suppressed and the elastic modulus is increased.
The blade body 1 that has been subjected to such heat treatment is prevented from being elastically pushed back into the resin bond phase 2 by the abrasive grains 3 at the cutting edge portion that contacts the material to be cut. On the other hand, it is cut sharply and sharpness is enhanced. Further, the blade body 1 is moderately brittle, and the abrasive grains 3 are easily removed from the resin bond phase 2 according to the wear state, and the self-generated blade action is sufficiently promoted.
Therefore, the cutting blade 10 manufactured in this way can reduce the cutting resistance and improve the processing quality, thereby further increasing the cutting speed.

Here, if the heat treatment temperature is as low as below 250 ° C. or the heat treatment time is as short as less than 1 hour, the elastic modulus of the blade body 1 cannot be increased to the extent that the above-described remarkable effects can be obtained, Brittleness cannot be obtained.
Further, if the heat treatment temperature is higher as it exceeds 500 ° C. or the heat treatment time is longer as it exceeds 10 hours, the blade body 1 may be carbonized and damaged during cutting, or the blade body 1 may be altered (improved elastic modulus). The heating energy and time may be wasted without contributing to the above.

Specifically, conventionally, it has been considered that performing heat treatment at, for example, 220 ° C. or more on a resin bond grindstone may cause deterioration, and those skilled in the art have not performed it. On the other hand, the inventor of the present invention has found that the above-mentioned remarkable effect can be obtained by actively incorporating a predetermined heat treatment that cannot be easily conceived by those skilled in the art through repeated research. is there.
In order to achieve the above effect more reliably, it is preferable to heat-treat the blade body 1 in a temperature range of 300 ° C to 500 ° C.

  Further, in the above heat treatment step, when the blade body 1 is heat-treated in a temperature range of 400 to 500 ° C. or kept for 5 to 10 hours, the elastic modulus of the blade body 1 after the heat treatment is The elastic modulus of the blade body 1 before the heat treatment is reliably increased to, for example, about 105 to 180% based on the reference (100%). As a result, the blade body 1 after the heat treatment can be appropriately brittle while ensuring its rigidity, and the above-described effects can be achieved more reliably.

  The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

For example, in the above-described embodiment, one layer of the resin bond phase 2 in which the abrasive grains 3 and the filler are dispersed is provided as the blade body 1, but the blade body 1 in which a plurality of such resin bond phases 2 are laminated. It may be.
Further, the resin bond phase 2 may not have a filler dispersed therein.

Further, in the above-described embodiment, the cutting blade 10 is used for cutting hard and brittle materials such as aluminum oxide (Al ₂ O ₃ ), silicon carbide (SiC), quartz, glass, and quartz as a material to be cut. However, the material to be cut made of other electronic component materials may be cut.

  Hereinafter, the present invention will be specifically described by way of examples. However, the present invention is not limited to this embodiment.

First, the relationship between the conditions (temperature and time) in the heat treatment step and the elastic modulus of the blade body 1 by this heat treatment was confirmed.
Specifically, a strip sample of the blade body 1 made by hot pressing phenol resin is subjected to a heat treatment process (temperature and time are variously set), and a heat treatment process is not performed. (That is, the same as before heat treatment) was prepared as shown in Table 1 below. And the elastic modulus (unit: MPa) of these sample products was measured by three-point bending by a bending test.

As shown in Table 1, those that were not heat-treated (modulus of elasticity: 2546 MPa) and heat-treated for 1 to 10 hours in the temperature range of 250 to 500 ° C. all have high modulus of elasticity. It was. Among them, the ones that had been heat-treated while being held for 5 to 10 hours all had an elastic modulus of 105% or more, based on the one that had not been heat-treated (100%). In addition, all the heat-treated materials in the temperature range of 400 to 500 ° C. have a modulus of elasticity of 120% or more based on the non-heat-treated materials. The rate was 160% or more. When the temperature was 550 ° C., the blade body 1 was carbonized and could not be measured.
From the above, it was confirmed that the elastic modulus can be increased by subjecting the blade body 1 to the heat treatment having the temperature range and the holding time of the present invention.

Next, the relationship between the conditions (temperature / time) in the heat treatment step, chipping amount and corner chipping was confirmed.
Specifically, cutting with the blade composition (volume%) set to phenol resin: 61.25%, diamond abrasive grains: 12.5%, WC filler: 26.25% by the above-described cutting blade manufacturing method. A plurality of cutting blades were prepared, and among these cutting blades, those that were heat-treated and those that were not heat-treated were prepared. For those subjected to heat treatment, the temperatures were set as shown in Table 2 below, and the holding times were all 5 hours.

  The cutting conditions were as follows: Dicer used: A-WD10A (manufactured by Tokyo Seimitsu Co., Ltd.), work used (material to be cut): alumina 96%, spindle (main shaft) rotation speed: 21000 rpm, feed rate: 5 mm / s. Then, the maximum chipping amount and the presence or absence of corner chipping in the chip obtained by cutting were confirmed. The maximum chipping amount refers to the largest chipping amount (depth) of chippings that are not intended to be cut into the chip by cutting, and the presence or absence of the above-mentioned corner chipping. Means whether or not there is a break (chip) at any one or more of the four corners of the chip cut out in a rectangular shape.

As shown in Table 2, in the case where the heat treatment was performed, the maximum chipping amount was all reduced as compared with the case where the heat treatment was not performed, and no corner chipping was confirmed. In addition, what was heat-processed at the temperature of 550 degreeC cannot be measured because the blade body 1 was damaged.
From the above, it has been confirmed that the processing quality of cutting is improved by subjecting the blade body 1 to the heat treatment having the temperature range and holding time of the present invention.

1 Blade Body 2 Resin Bond Phase 3 Abrasive Grain 10 Cutting Blade

Claims (4)

A circular thin plate-like blade body in which abrasive grains are dispersed and held in a resin bond phase mainly composed of a phenol resin is heat-treated while being held at a temperature range of 350 to 500 ° C. for 1 to 10 hours. A method for manufacturing a cutting blade. It is a manufacturing method of the cutting blade according to claim 1,
A method for producing a cutting blade, wherein the blade body is heat-treated at a temperature range of 400 to 500 ° C. It is a manufacturing method of the cutting blade according to claim 1 or 2,
A method for manufacturing a cutting blade, characterized in that the blade body is heat-treated while being held in the temperature range for 5 to 10 hours. It is manufactured by the method for manufacturing a cutting blade according to any one of claims 1 to 3,
A cutting blade characterized in that an elastic modulus of the blade body after the heat treatment is 105% or more on the basis of an elastic modulus of the blade body before the heat treatment.

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