JP5693541B2 - Light irradiation device - Google Patents

Description

  The present invention relates to a light irradiation apparatus that arranges a plurality of light sources in a predetermined direction and generates irradiation light having a uniform illuminance distribution spreading in a predetermined direction.

  In large-area bonding using an ultraviolet (UV) curable adhesive, such as a process for bonding liquid crystal panels, an irradiation device that generates irradiation light in a long and thin line shape is used. In Patent Document 1, UV light having a long irradiation area can be generated without using a very expensive long lens by arranging a plurality of pairs of line light guides and cylindrical lenses in the focal line direction of the cylindrical lens. An illumination device is disclosed.

  It is known that when a plurality of short cylindrical lenses are arranged, the illuminance distribution becomes nonuniform in the line direction due to the influence of a gap generated between the end surfaces of adjacent cylindrical lenses. This is because a part of the light (diverging light) emitted from the light source is reflected by the end surface of the cylindrical lens (the boundary surface between the lens substrate and the air layer). In particular, since light rays incident on the end face at an angle larger than the critical angle (Fresnel law) are totally reflected, the undulation of the illuminance distribution becomes prominent when the end face is placed near the principal ray.

  In the irradiation apparatus of Patent Document 1, the end surfaces of the cylindrical lenses are polished, the end surfaces are butted together, the angular characteristics of the light amounts generated by the light sources with respect to the butted surfaces of the end surfaces are symmetric, and the light beam is a cylindrical lens. By arranging the light source so as to be totally reflected at the end face of the lens, the influence of the joint of the cylindrical lens is eliminated.

JP 2001-174402 A

  In the configuration of the irradiation apparatus of Patent Document 1, it is necessary to use a dedicated cylindrical lens in which the end surface is formed with extremely high angular accuracy and surface accuracy, and further subjected to mirror polishing, and the cost of the lens is still very high. was there.

According to the embodiment of the present invention, a plurality of light sources arranged in one direction on the arrangement surface and arranged with the direction of the optical axis aligned in a direction orthogonal to the arrangement surface, and a plurality of transmissions connected in one direction An optical element module comprising an optical element module, wherein the optical element module is provided in parallel to the arrangement surface, and the transmissive optical element has an incident surface on which light from a light source is incident, An exit surface from which light incident on the entrance surface exits, and a connecting surface that is formed substantially in parallel with the optical axis and opposes adjacent transmission optical elements in one direction, the connecting surface being a mirror surface or A scattering surface, characterized in that the optical axis of at least one of the plurality of light sources passes through at least a part of any of the connecting surfaces or between any pair of the opposing connecting surfaces. Provided.

  According to each configuration, the light of the light source whose optical axis passes through the boundary part of the adjacent transmissive optical element of the optical element module (the part sandwiched between a pair of adjacent connecting surfaces (end faces)) is the boundary. Therefore, the fluctuation of the illuminance distribution caused by reflection at the boundary is suppressed, and a beam profile with excellent uniformity is realized. When it is difficult to clearly define the optical axis of the light source in a normal sense, for example, a light beam passing through the center of the beam profile (generally, the portion having the highest light intensity) may be used as the optical axis. In a light source having a wide light emitting surface, a wide optical axis having the same cross section as the light emitting surface of the optical element can be assumed. In this case, at least a part of the wide optical axis may pass through the boundary portion. It should be noted that the connecting surfaces are “closely opposed” means that the connecting surfaces are in close contact with each other, the connecting surfaces are completely non-contacting, or the connecting surfaces are partially in contact with each other. Including.

  In the light irradiation apparatus, the optical axis of any one of the light sources may be arranged between each pair of connecting surfaces facing each other or at least a part of each connecting surface of each pair.

  According to this configuration, it is possible to connect a large number of transmissive optical elements in one direction while suppressing reflection by the connecting surfaces, and supply irradiation light having a long and uniform intensity in this one direction.

  The light irradiation device may include a lens having a positive refractive power in at least one direction, which is disposed on the optical axes of the light sources between the light sources and the optical element module. .

  According to this configuration, the light emitted from the light source is prevented from being unevenly distributed by being reflected by the connecting surface at the boundary portion of the optical element module through which the optical axis of the light source does not pass.

  In the light irradiation apparatus, a pair of transmission optical elements adjacent in one direction may be in contact with each other on at least a part of the connecting surface.

  According to this configuration, the scattered light generated on the connecting surface is reduced, and irradiation light with a more uniform illuminance distribution can be obtained.

  In the light irradiation apparatus, a pair of transmission optical elements adjacent in one direction may be in contact with each other on at least a part of the connecting surface.

  The light irradiation apparatus includes first and second optical element modules that are two optical element modules arranged side by side in the direction of the optical axis, and the optical axis of at least one of the plurality of light sources is the first optical element module. In each of the first optical element module and the second optical element module, it may be configured to pass through at least a part of any of the connecting surfaces, or between any pair of opposing connecting surfaces.

  According to this configuration, since light in the vicinity of the optical axis does not continuously pass through the boundary between the two optical element modules, variation in illuminance distribution due to scattering or the like received when passing through the boundary between the optical element modules is accumulated. A flat illuminance distribution can be obtained.

  In the above-described light irradiation apparatus, the optical irradiation device includes first and second optical element modules that are two optical element modules arranged side by side in the direction of the optical axis, and the optical axis of at least one of the plurality of light sources is It is good also as a structure which passes between at least one part of any one of the connection surfaces in any one of a 1st and 2nd optical element module, or between any pair of the connection surfaces which oppose.

  According to this configuration, the number of optical axes that pass through the boundary portion of the transmissive optical element can be reduced, so that the region where the illuminance distribution fluctuates when light passes through the boundary portion can be localized.

  In the above light irradiation device, the connecting surface may be a surface perpendicular to one direction.

  According to this configuration, it becomes easy to mold the transmissive optical element and align the optical elements.

  In the light irradiation apparatus, the connecting surface may be a surface inclined with respect to the one direction.

  When using a light irradiation apparatus for mass production, the structure which arrange | positions a light irradiation apparatus around conveyance apparatuses, such as a conveyor, and irradiates irradiated light to the to-be-irradiated object which moves on a conveyance apparatus is generally employ | adopted. In this case, in order to take a wide irradiation area, the light irradiation device is installed with one direction facing a direction perpendicular to the transport direction. In addition, the spatial modulation of the illuminance distribution due to scattering or the like occurring at the boundary portion of the optical element module occurs approximately symmetrically with respect to the connecting surface. Accordingly, the connected object (that is, the boundary portion of the transmission optical element) is inclined with respect to one direction (in other words, with respect to the transport direction of the irradiated object), so that the irradiated object is received during irradiation. Spatial modulation of the illuminance distribution is averaged, and the influence of the joint surface can be mitigated.

  The light irradiation apparatus includes a plurality of first light sources and a plurality of second light sources, which are two sets of a plurality of light sources arranged on different straight lines on the arrangement surface. These light sources and a plurality of second light sources may be arranged in a direction parallel to the connecting surface.

  According to this structure, the irradiation apparatus which has the planar wide irradiation area excellent in flatness is implement | achieved.

  In the light irradiation apparatus, the transmission optical element may include at least one of a lens, a window plate, a wavelength filter, a phase plate, and a polarizing plate. That is, the present invention can be applied to all transmissive optical elements.

  In the light irradiation apparatus, the transmission optical element may be made of an optical resin material.

  According to this configuration, the connecting surface of the transmission optical element does not necessarily need to be mirror-polished, so that, for example, a transmission optical element injection-molded with an optical resin material can be used as an optical element module. The processing cost of the optical element module can be greatly reduced.

  In the above light irradiation apparatus, the light-transmitting optical element may be a cylindrical lens having a focal line extending in one direction, and may be configured to generate linear irradiation light that is long in one direction.

  According to said structure, it becomes possible to provide the line light irradiation apparatus with favorable flatness of illuminance distribution, without using the long transmissive optical element which is difficult to process and expensive.

  In the above light irradiation device, the light source may include an LED element.

According to the embodiment of the present invention, the first and second light irradiation modules are provided, the first light irradiation modules are arranged in one direction on the first arrangement surface, and the first arrangement surface and A plurality of first light sources arranged with the direction of the optical axis aligned in an orthogonal direction and a plurality of first transmission optical elements connected in one direction are provided in parallel to the first arrangement surface. A first optical element module, wherein the first transmissive optical element emits a first incident surface on which light from the first light source is incident and light incident on the first incident surface is emitted. includes a first light exit surface, is formed substantially parallel to the optical axis of the first light source, the first and articulating surface facing proximate the first transmissive optical elements adjacent in one direction, a first 1 articulating surface is specular or scattering surface, the optical axis of the at least one first light source, any one of the least of the first articulating surface Is configured to pass between any one of a pair of the first connecting surfaces facing each other, and the second light irradiation module is arranged in one direction on the second arrangement surface, A plurality of second light sources arranged with the direction of the optical axis aligned in a direction orthogonal to the arrangement surface, and a plurality of second transmission optical elements connected in one direction, and parallel to the second arrangement surface A second optical element module provided on the second optical element module, wherein the second transmissive optical element has a second incident surface on which light from the second light source is incident and light incident on the second incident surface And a second connecting surface that is formed substantially parallel to the optical axis of the second light source and that is adjacent to and faces the second transmissive optical element adjacent in one direction. with the second articulating surface is specular or scattering surface, the at least one second light source optical axis, one of the second articulating surface The optical axis of each of the first and second light sources passes through the irradiation region extending in one direction, and is configured to pass through at least a part or between any pair of the opposing second connecting surfaces. The first and second light irradiation modules may be arranged in a fan shape around the irradiation region, and the first connecting surface and the second connecting surface may be formed on different planes.

  According to this configuration, by superimposing the light of a plurality of light irradiation modules, it is possible to generate irradiation light having high flatness and strong irradiation intensity while having an irradiation region extending long in one direction. It becomes possible. Further, since the light passing through the boundary part of the optical element module of each light irradiation unit does not overlap, the fluctuation of the illuminance distribution due to scattering or the like received when passing through the boundary part of the optical element module does not intensify and is flat. Illuminance distribution can be obtained.

  In the light irradiation apparatus, the first and second transmission optical elements may be cylindrical lenses having a focal line extending in one direction. In addition, the light emitted from the first light source and the second light source may be condensed on the irradiation region by the first and second transmission optical elements that are cylindrical lenses. According to these configurations, it is possible to generate irradiation light having a higher irradiation intensity.

The light irradiation apparatus further includes a third light irradiation module, the third light irradiation module is arranged in one direction on the third arrangement surface, and has an optical axis in a direction perpendicular to the third arrangement surface. A third optical element provided with a plurality of third light sources arranged in the same direction and a plurality of third transmission optical elements connected in one direction and provided in parallel with the third arrangement surface A third transmissive optical element, a third incident surface on which light from the third light source is incident, and a third emission surface from which light incident on the third incident surface is emitted. A third connecting surface that is formed substantially in parallel with the optical axis of the third light source and faces the third transmissive optical element adjacent in one direction in proximity to the third connecting surface, a specular or scattering surface, the optical axis of at least one third light source, any one of at least a portion of the third articulating surface, Is configured to pass between any pair of opposing third connecting surfaces, and the third light irradiation module includes first and second optical axes so that the optical axes of the plurality of third light sources pass through the irradiation region. It is good also as a structure arrange | positioned in fan shape centering on an irradiation area | region with the 2nd light irradiation module, and the 1st, 2nd and 3rd connection surface being formed on a mutually different plane.

  According to this configuration, it is possible to generate irradiation light having a higher irradiation intensity while maintaining a flat illuminance distribution.

  In the light irradiation apparatus, the first, second, and third light irradiation units may be arranged around the irradiation region at equal angular intervals. According to this configuration, a flatter illuminance distribution can be obtained. In the above light irradiation apparatus, a plurality of first, second, and third light emitting elements may be arranged at equal intervals in the second direction. According to this configuration, a flatter illuminance distribution can be obtained.

  As described above, according to the configuration of the embodiment of the present invention, even when an optical element module including a plurality of transmissive optical elements connected in one direction is used, the reflection of light on the connected connecting surfaces is performed. Variations in the intensity distribution of the irradiating light as a cause are suppressed, and a uniform beam profile is realized.

FIG. 1 is an external view of a UV irradiation apparatus 1 according to an embodiment of the present invention. FIG. 2 is a partially exploded view of the UV irradiation apparatus 1 according to the embodiment of the present invention. FIG. 3 is a diagram showing an optical system of the UV irradiation apparatus 1 according to the first embodiment of the present invention. FIG. 4 is a beam profile of the emitted light of the UV irradiation apparatus 1 according to the embodiment of the present invention. FIG. 5 is a diagram showing an optical system according to the second embodiment of the present invention. FIG. 6 is a diagram showing an optical system according to the third embodiment of the present invention. FIG. 7 is a diagram showing an optical system according to the fourth embodiment of the present invention. FIG. 8 is a diagram showing an optical system according to a fifth embodiment of the present invention. FIG. 9 is a diagram showing an optical system according to the sixth embodiment of the present invention. FIG. 10 is a diagram illustrating an optical system of a reference example.

(First embodiment)
Hereinafter, the UV irradiation apparatus 1 according to the first embodiment of the present invention will be described with reference to the drawings. The UV irradiation apparatus 1 is an apparatus that generates UV irradiation light having a linear irradiation area, which is used for photocuring treatment of an ultraviolet curable adhesive or the like. FIG. 1 is an external view of the UV irradiation apparatus 1. The UV irradiation apparatus 1 includes a main unit 100 and a lens unit 200. FIG. 2 is a diagram illustrating a state in which the side plate 103 is removed from the UV irradiation apparatus 1, the main unit 100 and the lens unit 200 are separated, and the window plate 240 (glass plate) is further removed from the lens unit 200. FIG. 3 is a diagram showing an optical system (excluding the window plate 240) of the UV irradiation apparatus 1.

  The main unit 100 includes a plurality (12 in this embodiment) of LED elements 110 and a drive circuit (not shown) housed in the case 101. The LED element 110 receives supply of a drive current from the drive circuit and emits UV light having a curing wavelength (for example, 365 nm) of the ultraviolet curable adhesive. The LED elements 110 are arranged in a line at equal intervals and attached to the front panel 102 on the front surface of the case 101. In the following description, as shown in the coordinates of FIG. 2, the horizontal direction in which the LED elements 110 emit UV light is the X-axis direction, the arrangement direction of the LED elements 110 is the Y-axis direction, and the vertical direction is the Z-axis direction. .

  Next, the configuration of the lens unit 200 will be described. In the lens unit 200, a lens group for shaping the UV light emitted from the LED element 110 into a predetermined beam profile is accurately held in a predetermined arrangement relationship. As shown in FIG. 2, a lens holder 202 that holds each lens is accommodated in the case 201 of the lens unit 200. In the lens holder 202, the same number of spherical lenses 210 as the LED elements 110, a pair of first cylindrical lenses 220 a and 220 b (FIG. 3) constituting the first cylindrical lens module 220, and a pair of second cylindrical lens modules 230. The second cylindrical lenses 230a and 230b are held with high relative positional accuracy.

  The twelve spherical lenses 210 are held by the lens holder 202 so as to face the corresponding LED elements 110 when the lens unit 200 is attached to the main unit 100. By using the spherical lens 210, the divergence of the light emitted from the LED element 110 is reduced. Further, the intervals between the LED elements 110 and the spherical lens 210 are set such that the illuminance distribution in the Y-axis direction (the arrangement direction of the LED elements 110) is substantially uniform by overlapping the skirts of the LED light emitted from the adjacent LED elements 110. Is set (positive refractive power in the Y-axis direction). In the present embodiment, a spherical lens 210 (having two curvature directions) is used, and light is condensed in two directions of the Y axis and the Z axis (to suppress divergence). A cylindrical lens having a focal line in the Z-axis direction may be used to collect light only in the Y-axis direction.

  The first cylindrical lenses 220a and 220b and the second cylindrical lens modules 230a and 230b are formed by injection molding of silicone resin. The first cylindrical lens module 220 (second cylindrical lens module 230) abuts the flat end surfaces of the pair of first cylindrical lenses 220a and 220b (second cylindrical lenses 230a and 230b) in the focal line direction (contact or contact). It is formed by being held in a state of being close to each other. In addition, the pair of first cylindrical lenses 220a and 220b (second cylindrical lenses 230a and 230b) is such that each optical surface is substantially continuous at a boundary portion (abutting portion) (that is, a step or a large gap is generated in the optical surface). End faces are butted together. The first cylindrical lens module 220 and the second cylindrical lens module 230 are arranged in series with the focal line in the Y-axis direction (that is, aligned in the direction of the optical axis Pb), and UV light emitted from the LED element 110 is emitted. Are condensed in the Z-axis direction. In the present embodiment, the lens holder 202 is simply abutted between the end surfaces of the adjacent first cylindrical lenses 220a and 220b (second cylindrical lenses 230a and 230b) without being directly fixed with an adhesive or the like. To hold. In another embodiment, for example, the lens holder 202 may be held after the end surfaces of the lenses are directly fixed with an optical adhesive. Further, the gap between the end faces may be filled with a refractive index matching agent. In this embodiment, each lens that has been injection-molded is used as it is without polishing the end face, but it may be mirror-polished in advance before the end face of each lens is abutted. In the present embodiment, a predetermined pressing pressure is applied to the end surfaces in order to improve the adhesion between the end surfaces of each cylindrical lens to be abutted. In this embodiment, since a cylindrical lens made of silicone resin having elasticity is used, even if the lens holder 202 is loosened due to vibration, for example, the pressing pressure is stably maintained.

  FIG. 3A is a plan view of the optical system of the UV irradiation apparatus 1 in the vicinity of J1 and J2 between the boundary portions of each cylindrical lens (the portion sandwiched between the end surfaces of adjacent cylindrical lenses) in the Z-axis direction. FIG. 3B is a side view of the optical system of the UV irradiation apparatus 1 as viewed in the Y-axis direction. In the embodiment of the present invention, as shown in FIG. 3A, the optical axis Pb of the LED element 110b closest to the boundary portion J1 of the first cylindrical lens module 220 passes through the boundary portion J1. Further, the optical axis Pb further passes through the boundary portion J2 of the second cylindrical lens module 230. Therefore, the light emitted from the LED element 110b (including sub-light rays that do not pass through the optical axis Pb) can be transmitted through the cylindrical lens with low loss without being substantially reflected at the respective boundary portions J1 and J2.

  FIG. 4A shows the effect of the configuration of the embodiment of the present invention (optical arrangement in which the optical axis Pb closest to the boundary portions 1 and J2 passes through the boundary portions J1 and J2) on the flatness of the irradiation light. It is a graph (illuminance distribution map of illumination light in the Y-axis direction). The horizontal axis indicates the position in the Y-axis direction, and the position of the boundary portions J1 and J2 is the origin. The vertical axis represents the relative value of the irradiation intensity in the irradiation region (where Z = 0). The illuminance distribution curve As is a beam profile of the optical system of the present embodiment shown in FIG. An illuminance distribution curve Bs is a beam profile of the optical system (comparative example) shown in FIG. In the optical system of FIG. 10, boundary portions J1 and J2 parallel to the optical axes Pa and Pb are arranged at a substantially middle portion between the optical axes Pa and Pb of two adjacent LED elements 110a and 110b. In this case, the optical axes Pa and Pb do not pass through the boundary portions J1 and J2, but the sub-light Ps (the skirt portion of the LED light) enters the boundary portions J1 and J2 and is reflected.

  As shown in FIG. 4A, the illuminance distribution curve Bs of the comparative example has two large notches b in the vicinity of the boundary portions J1 and J2 (Y = 0). This is considered to be caused by the fact that the tails (sub-light rays Ps) of the LED light radiated from the LED elements 110a and 110b are reflected by the boundary portions J1 and J2 and the transmittance is lowered. On the other hand, the illuminance distribution curve As of this embodiment has only one notch a at the position of y = 0, and has a beam profile with higher flatness than the comparative example. The illuminance distribution curves As and Bs are beam profiles when the end surfaces of the cylindrical lenses constituting the boundary portions J1 and J2 are used as scattering surfaces. The notch a of the illuminance distribution curve As is considered to be caused by strong scattering received when light in the vicinity of the optical axis Pb (FIG. 3) propagates in the boundary portions J1 and J2.

  FIG. 4B shows a beam profile when the boundary portions J1 and J2 are mirror-polished. The illuminance distribution curve Am is obtained when the boundary portions J1 and J2 of the optical system of the present embodiment shown in FIG. 3 are formed as mirror surfaces, and the illuminance distribution curve Bm is the boundary portions J1 and J2 of the comparative example shown in FIG. This is a case where the end surfaces of the respective cylindrical lenses are formed as mirror surfaces. Similar to the illuminance distribution curve Bs, the illuminance distribution curve Bm has two large notches in the vicinity of the boundary portions J1 and J2 (Y = 0). On the other hand, the illuminance distribution curve Am has a notch at Y = 0 similarly to the illuminance distribution curve As, but the size of the notch is much smaller. That is, in the optical system of this embodiment (FIG. 3), notches caused by scattering at the boundary portions J1 and J2 appear in the illuminance distribution curve at the positions of the boundary portions J1 and J2 (Y = 0). This can be significantly reduced by making the boundary portions J1 and J2 mirror surfaces. On the other hand, in the optical system of the comparative example (FIG. 10), two large notches caused by reflection at the boundary portions J1 and J2 appear in the illuminance distribution curve, but this changes the roughness of the boundary portions J1 and J2. However, it cannot be reduced.

In the present embodiment (FIG. 3), out of the light emitted from the LED element 110c adjacent to the LED element 110b, the sub-light Ps in the outer portion of the skirt is less than the critical angle θ _{C at the} boundary portions J1 and J2. It is configured to enter at an incident angle θ _i . However, since the amount of the sub-light ray Ps incident on the boundary portions J1 and J2 is very small and the reflectance at the boundary portions J1 and J2 is low, the light emitted from the LED element 110c at the boundary portions J1 and J2 is low. The effect of reflection is almost negligible. Further, when the end surfaces of the cylindrical lenses constituting the boundary portions J1 and J2 are used as scattering surfaces, the relative intensity of the notch a in FIG. 4A is the optical axis Pb of the LED element 110b at the boundary portions J1 and J2. The ratio is approximately the same as the ratio of the power density at the bottom of the light of the LED element 110c to the power density in the vicinity. It is desirable that the ratio of the power density is approximately less than 10% (more desirably less than 5%).

(Second Embodiment)
The optical system of the first embodiment described above has a configuration in which cylindrical lenses are arranged in two stages in series. However, a configuration in which only one cylindrical lens is used, or a structure in which three or more stages of cylindrical lenses are arranged in series. It is good. The optical system according to the second embodiment of the present invention shown in FIG. 5 is an example in which the present invention is applied to an optical system using only the first cylindrical lens module 220. The configuration of the second embodiment is the same as the configuration of the first embodiment except that the second cylindrical lens module 230 is not provided. As in the first embodiment, the optical axis P closest to the boundary portion J of the first cylindrical lens module 220 has an optical arrangement passing through the boundary portion J, and reflection at the boundary portion J is suppressed. Similar to the illuminance distribution curves As and Am of No. 4, a beam profile with high flatness is obtained. In addition, since the cylindrical lenses are arranged in one stage, the number of boundary portions J that affect the flatness of the beam profile is reduced, and a beam profile having a higher flatness than that of the first embodiment can be obtained.

(Third embodiment)
The present invention can also be applied to a configuration that does not use the spherical lens 210. The optical system according to the third embodiment of the present invention shown in FIG. 6 is an example in which the present invention is applied to an optical system that does not use the spherical lens 210. The configuration of the second embodiment is the same as the configuration of the second embodiment except that the spherical lens 210 is not provided. As in the first and second embodiments, the optical axis P closest to the boundary portion J of the first cylindrical lens module 220 has an optical arrangement crossing the boundary portion J, and reflection at the boundary portion J is suppressed. Therefore, a beam profile with high flatness can be obtained in the same manner as the illuminance distribution curves As and Am in FIG.

(Fourth embodiment)
In the first to third embodiments described above, a configuration in which two cylindrical lenses are abutted at the end face is used. However, a plurality of transmissive optical elements other than the lenses (for example, a window plate, a transmissive wavelength filter, a phase) The present invention can also be applied to a configuration in which a plate, a polarizing plate, or the like) that is abutted at the end face is used. The optical system of the fourth embodiment of the present invention shown in FIG. 7 is one in which the present invention is applied to an optical system using two window plates 240a and 240b whose end faces are butted together. The optical system of the fourth embodiment includes a plurality of LED elements 110 arranged in a line at equal intervals in the Y-axis direction, and a pair of window plates 240a and 240b in which opposing end surfaces are abutted. Since the optical axis P of the LED element 110b closest to the boundary portion J of the window plates 240a and 240b passes through the boundary portion J, and reflection at the boundary portion J is suppressed, the illuminance distribution curve of FIG. Similar to As and Am, a beam profile with high flatness can be obtained.

(Fifth embodiment)
FIG. 8 shows an optical system according to a fifth embodiment of the present invention. The fifth embodiment includes a plurality of LED elements 110 two-dimensionally arranged in a hexagonal lattice shape and a window plate 240 formed by abutting end surfaces of five glass plates 240a to 240e. In the above-described fourth embodiment (FIG. 7), the window plate 240 is arranged with the longitudinal direction of the boundary portion J facing the Z-axis direction orthogonal to the arrangement direction (Y-axis direction) of the LED elements. Although only the optical axis P of the LED element 110b passes through the boundary portion J, in this embodiment, the optical axis P of each LED element 110 passes through any one of the boundary portions J. .

  Further, in the above-described fourth embodiment, the window plate 240 is disposed with the longitudinal direction of the boundary portion J oriented in the Z-axis direction orthogonal to the arrangement direction of the LED elements 110. However, in this embodiment, each boundary portion is arranged. The window plate 240 is arranged such that the longitudinal direction of J is inclined by approximately 30 ° with respect to the Z axis, for example. In general, when bonding a large area such as a liquid crystal panel using the UV irradiation device 1 having a linear irradiation region, the workpiece is slowly moved with respect to the UV irradiation device 1 using a transport device. Irradiation is performed. In the case of this embodiment, it is assumed that UV irradiation is performed while moving the workpiece in the direction of the arrow T shown in FIG. As can be seen from the illuminance distribution curve in FIG. 4, the spatial variation in illuminance due to scattering at the boundary J occurs in a direction perpendicular to the boundary J (the horizontal axis direction of the graph in FIG. 4). Therefore, when irradiation is performed while moving the workpiece in a direction parallel to the boundary portion J, the illuminance distribution of the irradiation light is transferred as it is as the irradiation amount distribution of the workpiece, resulting in non-uniform adhesion. As shown in FIG. 8, the irradiation dose distribution of the workpiece is averaged by performing the irradiation while moving the workpiece in the oblique direction T with respect to the boundary portion J (that is, the influence of the notch of the illuminance distribution). Is alleviated), and uniform adhesion becomes possible.

(Sixth embodiment)
FIG. 9 shows an optical system according to a sixth embodiment of the present invention. The optical system of the sixth embodiment includes three optical units 10, 10 ′, and 10 ″. The optical unit 10 (10 ′, 10 ″) includes five LED elements 110 (in a line in the Y-axis direction). 110 ′, 110 ″), five spherical lenses 210 (210 ′, 210 ″) disposed opposite to the emission surfaces of the corresponding LED elements 110 (110 ′, 110 ″), and cylindrical lens modules 220 (220). ', 220 "). The cylindrical lens module 220 (220 ′, 220 ″) has a lens holder (not shown) in a state in which the adjacent end surfaces of the two cylindrical lenses 220a (220a ′, 220a ″) and 220b (220b ′, 220b ″) face each other. The optical units 10, 10 ′, 10 ″ generate linear UV light having substantially the same illuminance distribution.

  The optical units 10, 10 ′, 10 ″ are arranged in a fan shape with a predetermined angular interval θ around the irradiation region R so that the linear irradiation regions R extending in the Y-axis direction overlap each other.

  The cylindrical lens module 220 of the optical unit 10 is formed by abutting end surfaces of two cylindrical lenses 220a and 220b having the same length. In addition, among the five LED elements 110 arranged in the Y-axis direction, the optical axis Pb of one LED element 110 b arranged at the center passes through the boundary portion J of the cylindrical lens module 220.

  The cylindrical lens module 220 ′ of the optical unit 10 ′ is obtained by abutting the end surfaces of two cylindrical lenses 220 a ′ and 220 b ′ having different lengths. The left cylindrical lens 220a ′ is longer than the right cylindrical lens 220b ′ in FIG. 9B, and the boundary portion J ′ is located on the right side of the center in the Y-axis direction of the cylindrical lens module 220 ′. . Of the five LED elements 110 ′ arranged in the Y-axis direction, the optical axis Pc ′ of the LED element 110 c ′ arranged next to the center (right adjacent in FIG. 9B) is the cylindrical lens module 220. It passes through 'Boundary J'.

  In addition, the cylindrical lens module 220 ″ of the optical unit 10 ″ is also formed by abutting two cylindrical lenses 220a ″ and 220b ″ having different lengths at the end surfaces. The right cylindrical lens 220b ″ is longer than the left cylindrical lens 220a ″ in FIG. 9B, and the boundary portion J ″ is located on the left side of the center in the Y-axis direction of the cylindrical lens module 220 ″. . Further, among the five LED elements 110 ″ arranged in the Y-axis direction, the optical axis Pc ″ of the LED element 110a ″ arranged next to the center (left adjacent in FIG. 9B) is the cylindrical lens module 220. It passes through “Boundary J”.

  The illuminance distribution of the light emitted from each optical unit 10, 10 ′, 10 ″ is substantially the same, but the positions of the abutting portions J, J ′, J ″ are different, so that the abutting portions J, J ′, J ″. The positions of notches generated in the beam profile due to the scattering of the optical unit differ depending on the optical units 10, 10 ′, 10 ″. When the positions of the abutting portions J, J ′, J ″ of the optical units 10, 10 ′, 10 ″ in the Y-axis direction are the same, the notch generated in the beam profile of the optical units 10, 10 ′, 10 ″ Therefore, when the light beams of the three optical units 10, 10 ′, and 10 ″ are overlapped, the intensity fluctuation of the notch is amplified, and the flatness of the combined beam profile is lowered. As in this embodiment, the positions of the abutting portions of the optical units 10, 10 ′, and 10 ″ are changed to mutually amplify the notches when the lights of the optical units 10, 10 ′, and 10 ″ are combined. Can be suppressed.

  The above is the description of an example of the embodiment of the present invention. However, the present invention is not limited to the configuration of the above embodiment, and is within the scope of the technical idea expressed by the description of the scope of claims. Various modifications are possible.

  For example, the above embodiment is an example in which the present invention is applied to an apparatus that generates ultraviolet irradiation light, but generates irradiation light in other wavelength ranges (eg, visible light such as white light, infrared light, etc.). The present invention can also be applied to an irradiation apparatus.

  In the first embodiment, the optical axis Pb of the LED element 110b passes through both the boundary portion J1 of the first cylindrical lens module 220 and the boundary portion J2 of the second cylindrical lens module 230. However, the optical axis Pb may be configured to pass only one of the boundary portions J1 and J2. The first embodiment is an example in which two stages of cylindrical lenses (transmission type optical elements) are arranged on the optical axis, but has a configuration in which three or more stages of transmission type optical elements having the boundary portion J are arranged. You can also Moreover, it can also be set as the structure which the optical axis of at least 1 light emitting element passes along each boundary part J. FIG. Moreover, when it has a some light emitting element, it is not necessary to set it as the structure by which the optical axis of all the light emitting elements passes through any boundary part J. FIG.

  In each of the above embodiments, a cylindrical lens formed by injection molding of a silicone resin is used. However, the material and forming method of the transmissive optical element are not limited to this. For example, various optical glass materials such as borosilicate crown glass, synthetic quartz glass and white plate glass, as well as transmissive optical elements formed from optical resins such as polycarbonate, polymethyl methacrylate, cyclic polyolefin, and polyester are used. can do.

DESCRIPTION OF SYMBOLS 1 UV irradiation apparatus 100 Main body unit 101 Case 102 Front panel 110 LED element 200 Lens unit 201 Case 202 Lens holder 210 Spherical lens 220 1st cylindrical lens module 230 2nd cylindrical lens module 240 Window board J Abutting surface T Irradiation object conveyance direction

Claims (15)

A plurality of light sources arranged in one direction on the arrangement surface and arranged with the direction of the optical axis aligned in a direction orthogonal to the arrangement surface;
An optical element module comprising a plurality of transmission optical elements connected in the one direction;
A light irradiation device comprising:
The optical element module is provided in parallel to the arrangement surface,
The transmissive optical element is
An incident surface on which light from the light source is incident;
An exit surface from which light incident on the entrance surface exits;
A connecting surface that is formed substantially parallel to the optical axis and that is adjacent to and faces the transmissive optical element adjacent in the one direction.
The connecting surface is a mirror surface or a scattering surface,
The light irradiation apparatus, wherein an optical axis of at least one of the plurality of light sources passes between at least a part of any of the connecting surfaces or any pair of the opposing connecting surfaces. The optical axis of any one of the light sources is disposed between each pair of the connecting surfaces facing each other or at least a part of the connecting surface of each pair.
The light irradiation apparatus according to claim 1. A lens having a positive refractive power in at least one direction, which is disposed on an optical axis of each of the plurality of light sources between the plurality of light sources and the optical element module;
The light irradiation apparatus according to claim 1, wherein the light irradiation apparatus is a light irradiation apparatus. A pair of the transmissive optical elements adjacent in the one direction are in contact with each other on at least a part of the connecting surface;
The light irradiation apparatus according to any one of claims 1 to 3, wherein Comprising first and second optical element modules that are two optical element modules arranged side by side in the direction of the optical axis;
The optical axis of at least one light source among the plurality of light sources is either at least a part of the connecting surface or the facing connecting surface in each of the first and second optical element modules. Pass between a pair,
Light irradiation apparatus according to any one of claims 1 to 4, characterized in that. Comprising first and second optical element modules which are two optical element modules arranged side by side in the direction of the optical axis;
The optical axis of at least one light source among the plurality of light sources is at least a part of any one of the connecting surfaces in one of the first and second optical element modules, or the opposing connecting surface. Pass between any pair,
Light irradiation apparatus according to any one of claims 1 to 4, characterized in that. The connecting surface is a surface perpendicular to the one direction;
Light irradiation apparatus according to any one of claims 1 to 6, characterized in that. The connecting surface is a surface inclined with respect to the one direction;
Light irradiation apparatus according to any one of claims 1 to 6, characterized in that. A plurality of first light sources that are two sets of the plurality of light sources arranged on different straight lines on the arrangement surface, and a plurality of second light sources,
The plurality of first light sources and the plurality of second light sources are arranged in a direction parallel to the connecting surface,
The light irradiation apparatus according to any one of claims 1 to 8 , wherein The transmissive optical element includes at least one of a lens, a window plate, a wavelength filter, a phase plate, and a polarizing plate,
Light irradiation apparatus according to any one of claims 1 to 9, characterized in that. The transmissive optical element is made of an optical resin material,
Light irradiation apparatus according to any one of claims 1 to 10, characterized in that. The transmissive optical element is a cylindrical lens having a focal line extending in the one direction;
Configured to generate a linear irradiation light long in the one direction,
Light irradiation apparatus according to any one of claims 1 to 11, characterized in that. The light source includes an LED element;
Light irradiation apparatus according to any one of claims 1 to 12, characterized in that. Comprising first and second light irradiation modules;
The first light irradiation module is
A plurality of first light sources arranged in one direction on the first arrangement surface and arranged with the direction of the optical axis aligned in a direction orthogonal to the first arrangement surface;
A plurality of first transmission optical elements connected in the one direction, and a first optical element module provided in parallel with the first arrangement surface,
The first transmissive optical element is
A first incident surface on which light from the first light source is incident;
A first exit surface from which light incident on the first entrance surface exits;
A first connecting surface that is formed substantially in parallel with the optical axis of the first light source and faces the first transmissive optical element adjacent in the one direction in proximity to the first connecting surface;
The first connecting surface is a mirror surface or a scattering surface;
An optical axis of at least one of the first light sources is configured to pass through at least a part of any one of the first connecting surfaces, or between any pair of the opposing first connecting surfaces;
The second light irradiation module is
A plurality of second light sources arranged in the one direction on a second arrangement surface and arranged with the direction of the optical axis aligned in a direction orthogonal to the second arrangement surface;
A plurality of second transmission optical elements connected in the one direction, and a second optical element module provided in parallel with the second arrangement surface,
The second transmissive optical element comprises:
A second incident surface on which light from the second light source is incident;
A second exit surface from which light incident on the second entrance surface exits;
A second connecting surface that is formed substantially parallel to the optical axis of the second light source and faces the second transmissive optical element adjacent in the one direction in close proximity,
The second connecting surface is a mirror surface or a scattering surface;
An optical axis of at least one second light source is configured to pass through at least a part of any one of the second connecting surfaces, or between any pair of the opposing second connecting surfaces;
The first and second light irradiation modules are arranged in a fan shape around the irradiation region so that the optical axes of the first and second light sources pass through the irradiation region extending in the one direction, respectively. And
The light irradiation apparatus, wherein the first connecting surface and the second connecting surface are formed on different planes. A third light irradiation module;
The third light irradiation module is
A plurality of third light sources arranged in the one direction on a third arrangement surface and arranged with the direction of the optical axis aligned in a direction orthogonal to the third arrangement surface;
A plurality of third transmissive optical elements connected in the one direction, and a third optical element module provided in parallel with the third arrangement surface,
The third transmissive optical element is
A third incident surface on which light from the third light source is incident;
A third exit surface from which light incident on the third entrance surface exits;
A third connecting surface that is formed substantially in parallel with the optical axis of the third light source and faces the third transmissive optical element adjacent in the one direction in close proximity, and
The third connecting surface is a mirror surface or a scattering surface;
An optical axis of at least one third light source is configured to pass through at least a part of any one of the third connecting surfaces, or between any pair of the opposing third connecting surfaces;
The third light irradiation module is arranged in a fan shape around the irradiation area together with the first and second light irradiation modules so that the optical axes of the plurality of third light sources pass through the irradiation area. ,
The first, second and third connecting surfaces are formed on different planes;
The light irradiation apparatus according to claim 14 .

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