JP5698038B2 - Curing device in clean room - Google Patents

Description

  The present invention relates to a curing device in a clean room.

  Generally, in a space that requires a clean work environment such as a semiconductor factory, a clean room is formed, and a ceiling panel and a filter unit such as a HEPA filter are suspended from a building beam via a steel member for suspension. The inside of the double ceiling functions as a chamber.

  In the clean room, for example, when replacing the filter unit, if the filter unit is removed, the dust in the double ceiling is directly blown into the clean room and scattered, so the operation is performed. In advance, it is necessary to provide a partition at a portion where the filter unit to be exchanged in the clean room is disposed in advance and perform so-called curing to prevent dust from being scattered throughout the clean room. When carrying in production equipment, etc., if there is a possibility that dust will be scattered throughout the clean room, a partition is provided partially in the production equipment's carry-in route, etc. It may be cured.

  Conventionally, a vinyl sheet as an airtight curtain material having an antistatic function is used as a partition for performing the curing, and the vinyl sheet is bonded with a curing tape so as to be suspended from the ceiling.

  In addition, there exist patent document 1, 2 as what shows the general technical level relevant to the curing in the said clean room, for example.

Japanese Patent Laid-Open No. 10-245919 JP 2004-107986 A

  However, as described above, when the curing is performed by bonding the vinyl sheet with the curing tape so as to be suspended from the ceiling, there is a drawback that it takes much time and labor for the construction.

  In addition, the vinyl sheet bonded with the curing tape so as to hang from the ceiling is difficult to peel off the curing tape from the vinyl sheet after the work is finished and removed, and of course the vinyl sheet Since it was almost impossible to reuse, there was a problem that it was uneconomical and led to an increase in the cost of the entire work.

  In view of such circumstances, the present invention is intended to provide a curing device in a clean room that does not require labor and time for construction, can improve work efficiency, and can be reused to reduce the cost of the entire work. Is.

The present invention provides a curing device in a clean room in which a filter receiving frame for receiving a filter unit is arranged in a lattice shape on the ceiling.
A latch that can be hooked to the filter receiving frame so as to be hooked at both width ends thereof,
A mounting hole for detachably mounting the latch metal by a fastening member, and an airtight curtain material formed with a required interval along the upper edge ,
A clamping part that is in close contact with the surface of the upper edge of the airtight curtain material and in which a through hole of the fastening member is formed;
A horizontal portion that is bent from the upper end of the sandwiching portion and extends along the lower surface of the filter receiving frame;
A raised portion that is bent from the tip of the horizontal portion and extends along the side surface of the filter receiving frame;
Using two bending members that are bent from the upper end of the upright portion and have a claw portion that is hooked to the width end portion of the filter receiving frame,
The latch member is configured by arranging the two bending members so that the upper edge portion of the airtight curtain material is sandwiched by the sandwiching portion and the claw portions face each other. It is applied to a curing device in a clean room.

  According to the above means, the following operation can be obtained.

  In a clean room, when replacing a filter unit or carrying in a production device, the retaining bracket is attached to the mounting hole at the required location of the airtight curtain material with a fastening member, and the retaining bracket is filtered. When the receiving frame is hooked so as to be hooked at both width end portions thereof, the airtight curtain material is suspended from the ceiling portion, and thereby a part in which a filter unit to be replaced in a clean room is disposed or a production apparatus Curing can be carried out on the carry-in route, etc., and dust can be prevented from being scattered throughout the clean room.

  As a result, unlike the conventional method of curing by curing with a curing tape so that the vinyl sheet is suspended from the ceiling, the labor and time required for construction are greatly reduced, and the work can be carried out efficiently. It becomes possible.

  In addition, the airtight curtain material that is hooked on the filter receiving frame so as to be hooked to both ends of the filter receiving frame can be easily removed from the filter receiving frame simply by loosening the fastening member after the operation is completed. Since it can be used, it is economical and it is possible to suppress an increase in the cost of the entire work.

On the other hand, according to the present invention, a filter receiving frame for receiving a filter unit is arranged in a lattice shape on the ceiling, and the filter receiving frame has a closed cross-sectional shape and has a retaining groove recessed in the upper part of both side surfaces. In the device
A latch that can be latched so as to be hooked to both the retaining grooves with respect to the filter receiving frame,
An airtight curtain material in which a mounting hole for detachably mounting the latch metal with a fastening member is formed along the upper edge portion at a required interval;
With
A clamping part that is in close contact with the surface of the upper edge of the airtight curtain material and in which a through hole of the fastening member is formed;
A horizontal portion that is bent from the upper end of the sandwiching portion and extends along the lower surface of the filter receiving frame;
A raised portion that is bent from the tip of the horizontal portion and extends along the side surface of the filter receiving frame;
Using two bending members that are bent from the upper end of the upright portion and have a claw portion that is hooked into the locking groove of the filter receiving frame,
The two folding members, by facing to the upper edge is held and the pawl portion of the airtight curtain material facing each other at the nip portion, characterized by being configured the hooking bracket It is applied to a curing device in a clean room .

In the curing device in the clean room, the fastening member can be composed of a bolt inserted into the through hole of the bending member and the mounting hole of the airtight curtain material, and a wing nut screwed into the bolt. In this way, it is possible to attach / detach the latch to / from the mounting hole of the hermetic curtain material and to latch / release the latch to / from the filter receiving frame without using a special tool.

  According to the curing apparatus in the clean room of the present invention, it is possible to improve the work efficiency without taking time and effort for the construction, and it is possible to achieve the excellent effect that the work can be reused and the cost of the whole work can be reduced.

It is a whole outline top view showing an example of a curing device in a clean room of the present invention. It is a side view which shows the Example of the curing apparatus in the clean room of this invention. It is a principal part expanded sectional view which shows the Example of the curing apparatus in the clean room of this invention. It is a disassembled perspective view which shows the latch metal in the Example of the curing device in the clean room of this invention. It is a principal part expanded sectional view which shows the state which applied the Example of the curing apparatus in the clean room of this invention to the filter receiving frame of a format different from the filter receiving frame shown in FIG.

  Embodiments of the present invention will be described below with reference to the accompanying drawings.

  1 to 4 show an embodiment of a curing device in a clean room according to the present invention. As shown in FIG. 1, a filter receiving frame 4 for receiving a filter unit 3 such as a HEPA filter is latticed on the ceiling 2 of the clean room 1. 2 to 4, and a latch 5 that can be hooked to the filter receiving frame 4 so as to be hooked on both width ends 4 a thereof, and the latch 5 is a fastening member. A curing device in the clean room 1 is constituted by an airtight curtain material 8 in which a mounting hole 7 for detachably mounting by 6 is formed with a predetermined interval along the upper edge portion.

  Incidentally, as shown in FIG. 3, the filter receiving frame 4 has a cross-sectional shape similar to the shape in which the open end of the grooved steel faces upward, and a cross-shaped reinforcing portion 4b is integrally formed at the center thereof, The suspension part 4c is configured to rise upward from the reinforcing part 4b. The suspension part 4c is suspended from a structural material (not shown), and extends downward from the end of the filter unit 3. In addition to supporting the leg piece 3a projecting to the reinforcement portion 4b and filling the sealing material 9 inside the filter receiving frame 4 so as to bury the leg piece 3a, dust is introduced into the clean room 1 from the outside. Is to prevent intrusion.

  In the case of the present embodiment, as shown in FIGS. 3 and 4, the latch metal 5 is held in close contact with the upper edge surface of the hermetic curtain material 8 and the through hole 5 a of the fastening member 6 is drilled. A portion 5b, a horizontal portion 5c that is bent from the upper end of the clamping portion 5b and extends along the lower surface of the filter receiving frame 4, and a bent portion that is bent from the tip of the horizontal portion 5c and that extends along the side surface of the filter receiving frame 4. Two bending members 5A having a rising portion 5d extending in this manner and a claw portion 5e bent from the upper end of the rising portion 5d and hooked on the width end portion 4a of the filter receiving frame 4 are used. The member 5A has a configuration in which the upper edge portion of the airtight curtain material 8 is held by the holding portion 5b and the claw portions 5e face each other.

  And the said fastening member 6 is comprised from the volt | bolt 6a inserted by the through-hole 5a of the said bending member 5A and the attachment hole 7 of the airtight curtain material 8, and the wing nut 6b screwed together by this volt | bolt 6a. .

  Since the airtight curtain material 8 is a thin vinyl sheet having a thickness of about 0.1 [mm], the upper edge of the airtight curtain material 8 is formed as shown in FIGS. The belt member 8a made of vinyl is integrally welded and the eyelet 8b is attached to the attachment hole 7 to reinforce the upper edge of the airtight curtain material 8 and the attachment hole 7, while the airtight curtain material 8 is formed on both side edge portions and bottom edge portions, so that when an operator passes near the airtight curtain material 8, wind is generated, or in the clean room 1 during work Even if a change in atmospheric pressure occurs, the side edge portions and the bottom edge portion are less likely to flutter or turn over.

  Further, as shown in FIG. 4, the bolt 6a inserted through the through-hole 5a in the clamping portion 5b of the one bending member 5A has a tongue piece 10a that engages with a thread valley of the bolt 6a on the inner peripheral surface. By fitting the resin-made drop-off prevention ring 10 projecting from the bolt 6a, the bolt 6a is prevented from dropping from the holding portion 5b of the one bending member 5A.

  Next, the operation of the above embodiment will be described.

  When the filter unit 3 is exchanged or the production apparatus is carried in the clean room 1, first, the latch 5 is attached to the mounting hole 7 at a required location of the airtight curtain material 8 by the fastening member 6. .

  Here, in the stage before attaching the latch 5 to the mounting hole 7 at the required location of the hermetic curtain material 8, the fastening member 6 inserted through the through hole 5a in the clamping portion 5b of one bending member 5A. As shown in FIG. 4, the bolt 6a is fitted with a resin drop-off prevention ring 10 having a tongue piece 10a protruding from the inner peripheral surface of the bolt 6a. There is no fear that the bolt 6a falls off from the sandwiching portion 5b of the one bending member 5A, and the bolt 6a and the one bending member 5A are always integrated, which is effective in preventing the loss of the bolt 6a. It has become.

  Subsequently, the bolt 6a inserted through the through-hole 5a in the sandwiching portion 5b of the one folding member 5A is passed through the mounting hole 7 at a required location of the airtight curtain material 8, and the sandwiching portion of the other folding member 5A is inserted. By inserting through the through hole 5a in 5b, the two folding members 5A are arranged to face each other so that the upper edge portion of the hermetic curtain material 8 is held by the holding portion 5b and the claw portions 5e face each other. In the state, the wing nut 6b is screwed onto the bolt 6a.

  Without tightening the wing nut 6b, the claw portion 5e of the two bending members 5A can be opened and closed to some extent, and a horizontal portion 5c bent from the upper end of the clamping portion 5b is formed on the filter receiving frame 4. While extending along the lower surface, the raised portion 5d bent from the tip of the horizontal portion 5c extends along the side surface of the filter receiving frame 4, and the claw portion 5e bent from the upper end of the raised portion 5d is connected to the filter receiving frame 4. The wing nut 6b is tightened as shown in FIG.

  In this case, the fastening member 6 is composed of a bolt 6a that is inserted into the through hole 5a of the bending member 5A and the mounting hole 7 of the airtight curtain member 8, and a wing nut 6b that is screwed to the bolt 6a. Therefore, the attachment of the latch 5 to the mounting hole 7 of the airtight curtain member 8 and the latch of the latch 5 to the filter receiving frame 4 can be performed without using a special tool.

  For example, when the hatched filter unit 3 in FIG. 1 is to be replaced in the clean room 1, the airtight curtain material 8 is suspended from the ceiling portion 2 within a wide range as shown by a broken line in FIG. 1. Can be lowered. However, the range in which the airtight curtain material 8 is suspended from the ceiling 2 is, as indicated by the phantom line in FIG. 1, due to the restriction of the position where the retaining bracket 5 is engaged with the filter receiving frame 4. Needless to say, the shape is slightly twisted, but can be narrowed as necessary. Further, it is needless to say that the airtight curtain material 8 may be suspended from the ceiling portion 2 wider than the range indicated by the broken line in FIG.

  In this way, when the hook 5 is hooked to the filter receiving frame 4 so as to be hooked on the both width end portions 4a, the airtight curtain material 8 is suspended from the ceiling portion 2, whereby the inside of the clean room 1 is It is possible to cure the portion where the filter unit 3 to be replaced is disposed, the carry-in route of the production apparatus, and the like, and it is possible to prevent dust from being scattered throughout the clean room 1.

  As a result, unlike the conventional method of curing by curing with a curing tape so that the vinyl sheet is suspended from the ceiling, the labor and time required for construction are greatly reduced, and the work can be carried out efficiently. It becomes possible.

  Further, the airtight curtain material 8 in which the hooking metal fitting 5 is hooked to the filter receiving frame 4 so as to be hooked on both width end portions 4a can be obtained by simply loosening the wing nut 6b of the fastening member 6 after the operation is completed. Since it can be easily detached from the filter receiving frame 4 without using a tool and can be used repeatedly, it is economical and it is possible to suppress an increase in the cost of the entire operation. In addition, if the wing nut 6b of the fastening member 6 is loosened and removed from the bolt 6a, the latch 5 can be removed from the mounting hole 7 of the airtight curtain member 8 without using a special tool. .

  In addition, since the position of the latch 5 can be freely adjusted in accordance with the position of the filter receiving frame 4, it is possible to form a curing area in a desired shape while avoiding obstacles (such as a production device) on the floor. .

  Further, since the airtight curtain material 8 uses a thin vinyl sheet having a thickness of about 0.1 [mm], it is possible to reduce the weight of the curing device, facilitate handling, and work efficiency. It is effective in improving

  Thus, the construction does not take time and effort, the work efficiency can be improved, and the work can be reused to reduce the cost of the whole work.

  Incidentally, the filter receiving frame 4 is not limited to the shape shown in FIG. 3, but has, for example, a closed cross-sectional shape close to a rectangle as shown in FIG. The suspended portion 4c is suspended from a structural material (not shown), and the end of the filter unit 3 is placed on the filter receiving frame 4 via a seal plate 9 'such as a gasket. Accordingly, there is a type that prevents dust from entering the clean room 1 from the outside, but the curing device in the clean room 1 of the present embodiment can also be applied to the filter receiving frame 4 shown in FIG.

  In the case of the filter receiving frame 4 shown in FIG. 5, the filter receiving frame 4 is connected by a joint member (not shown) at a point where the filter receiving frames 4 intersect each other at right angles, and a locking projection (not shown) of the joint member is provided. Since the locking groove 4d for hooking is recessed in the upper part of both side surfaces of the filter receiving frame 4, the claw portion 5e of the bending member 5A may be hooked in the locking groove 4d.

  In addition, the curing device in the clean room of the present invention is not limited to the above-described embodiment, and it is needless to say that various modifications can be made without departing from the gist of the present invention.

DESCRIPTION OF SYMBOLS 1 Clean room 2 Ceiling part 3 Filter unit 4 Filter receiving frame 4a Width end part 4d Locking groove 5 Holding metal 5A Bending member 5a Through hole 5b Clamping part 5c Horizontal part 5d Upright part 5e Claw part 6 Fastening member 6a Bolt 6b Wing nut 7 Mounting hole 8 Airtight curtain material

Claims (3)

In the curing device in the clean room where the filter receiving frame for receiving the filter unit is arranged in a lattice shape on the ceiling,
A latch that can be hooked to the filter receiving frame so as to be hooked at both width ends thereof,
A mounting hole for detachably mounting the latch metal by a fastening member, and an airtight curtain material formed with a required interval along the upper edge ,
A clamping part that is in close contact with the surface of the upper edge of the airtight curtain material and in which a through hole of the fastening member is formed;
A horizontal portion that is bent from the upper end of the sandwiching portion and extends along the lower surface of the filter receiving frame;
A raised portion that is bent from the tip of the horizontal portion and extends along the side surface of the filter receiving frame;
Using two bending members that are bent from the upper end of the upright portion and have a claw portion that is hooked to the width end portion of the filter receiving frame,
The latch member is configured by arranging the two bending members so that the upper edge portion of the airtight curtain material is sandwiched by the sandwiching portion and the claw portions face each other. Curing equipment in a clean room. In the curing unit in the clean room, in which the filter receiving frame for receiving the filter unit is arranged in a lattice shape on the ceiling, and the filter receiving frame has a closed cross-sectional shape and the engaging grooves are recessed in the upper part of both sides.
A latch that can be latched so as to be hooked to both the retaining grooves with respect to the filter receiving frame,
An airtight curtain material in which a mounting hole for detachably mounting the latch metal with a fastening member is formed along the upper edge portion at a required interval;
With
A clamping part that is in close contact with the surface of the upper edge of the airtight curtain material and in which a through hole of the fastening member is formed;
A horizontal portion that is bent from the upper end of the sandwiching portion and extends along the lower surface of the filter receiving frame;
A raised portion that is bent from the tip of the horizontal portion and extends along the side surface of the filter receiving frame;
Using two bending members that are bent from the upper end of the upright portion and have a claw portion that is hooked into the locking groove of the filter receiving frame,
The two folding members, by facing to the upper edge is held and the pawl portion of the airtight curtain material facing each other at the nip portion, characterized by being configured the hooking bracket Curing equipment in a clean room. The curing device in a clean room according to claim 1 or 2 , wherein the fastening member comprises a bolt inserted into a through hole of the bending member and an attachment hole of an airtight curtain material, and a wing nut screwed to the bolt. .

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