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JP5704510B2 - Ultrasonic flow meter and flow measurement method - Google Patents
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JP5704510B2 - Ultrasonic flow meter and flow measurement method - Google Patents

Ultrasonic flow meter and flow measurement method Download PDF

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Publication number
JP5704510B2
JP5704510B2 JP2011082671A JP2011082671A JP5704510B2 JP 5704510 B2 JP5704510 B2 JP 5704510B2 JP 2011082671 A JP2011082671 A JP 2011082671A JP 2011082671 A JP2011082671 A JP 2011082671A JP 5704510 B2 JP5704510 B2 JP 5704510B2
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ultrasonic
transmission
ultrasonic transducer
reception
tube
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JP2012220197A (en
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耕平 伊津
耕平 伊津
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Yokogawa Electric Corp
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Yokogawa Electric Corp
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Description

この発明は、超音波の指向性変位を利用して被測定流体の大流速を測定可能とした流量
計に適用して好適な超音波流量計及び流量測定方法に関するものである。
The present invention relates to an ultrasonic flowmeter and a flow rate measuring method that are suitable for application to a flowmeter that can measure a large flow velocity of a fluid to be measured by using a directional displacement of ultrasonic waves.

従来から、電気や、機械、化学工場等のプラントにおいて、配管内を流れる流体の速度
を計測して流量を表示する超音波流量計が使用される場合が多い。このような超音波流量
計は、配管の上流側と下流側とに超音波受信器を兼ねたトランスデューサが取り付けられ
る。超音波流量計によれば、上流側から下流側へ流体中を横切って、下流側から上流側へ
流体中を横切って、超音波を交互に送信し、到達した時間差から被測定流体の流速が求め
られる。
2. Description of the Related Art Conventionally, an ultrasonic flowmeter that measures the velocity of a fluid flowing in a pipe and displays the flow rate is often used in plants such as electricity, machinery, and chemical factories. In such an ultrasonic flowmeter, transducers that also serve as ultrasonic receivers are attached to the upstream side and the downstream side of the pipe. According to the ultrasonic flowmeter, ultrasonic waves are alternately transmitted across the fluid from the upstream side to the downstream side and across the fluid from the downstream side to the upstream side. Desired.

図11は、従来例に係る超音波流量計10の内部構成例を示す説明図である。図11に
示す超音波流量計10は、超音波受信器を兼ねた1対のトランスデューサ(以下超音波ト
ランスデューサ1,2という)を備えて構成される。超音波トランスデューサ1は、測定
管3の上流側であって、当該測定管3の外周部の一方の側において、測定管3に対して傾
斜姿勢を保持するために、所定の形状を有した台座15と組み合わせて取り付けられる。
超音波トランスデューサ2は、測定管3の下流側であって、当該測定管3の外周部の他方
の側において、測定管3に対して傾斜姿勢を保持するために、所定の形状を有した台座1
9と組み合わせて取り付けられる。
FIG. 11 is an explanatory diagram showing an internal configuration example of the ultrasonic flowmeter 10 according to the conventional example. An ultrasonic flow meter 10 shown in FIG. 11 includes a pair of transducers (hereinafter referred to as ultrasonic transducers 1 and 2) that also serve as an ultrasonic receiver. The ultrasonic transducer 1 is a pedestal having a predetermined shape in order to maintain an inclined posture with respect to the measurement tube 3 on the upstream side of the measurement tube 3 and on one side of the outer peripheral portion of the measurement tube 3. 15 is attached in combination.
The ultrasonic transducer 2 is a pedestal having a predetermined shape in order to maintain an inclined posture with respect to the measurement tube 3 on the other side of the outer peripheral portion of the measurement tube 3 on the downstream side of the measurement tube 3. 1
9 is attached in combination.

超音波流量計10によれば、流速測定時、上流側の超音波トランスデューサ1が下流側
の超音波トランスデューサ2に向けて超音波を送信する。超音波トランスデューサ2は、
超音波トランスデューサ1からの超音波を受信する。更に、下流側の超音波トランスデュ
ーサ2は、上流側の超音波トランスデューサ1に向けて超音波を送信する。超音波トラン
スデューサ1は、超音波トランスデューサ2から超音波を受信する。
According to the ultrasonic flow meter 10, the ultrasonic transducer 1 on the upstream side transmits ultrasonic waves toward the ultrasonic transducer 2 on the downstream side when measuring the flow velocity. The ultrasonic transducer 2 is
The ultrasonic wave from the ultrasonic transducer 1 is received. Further, the ultrasonic transducer 2 on the downstream side transmits ultrasonic waves toward the ultrasonic transducer 1 on the upstream side. The ultrasonic transducer 1 receives ultrasonic waves from the ultrasonic transducer 2.

これらの送受信を交互に繰り返し、上流側の超音波トランスデューサ1から下流側の超
音波トランスデューサ2へ至る超音波の到達時間をT1とし、下流側の超音波トランスデ
ューサ2から上流側の超音波トランスデューサ1へ至る超音波の到達時間をT2としたと
き、超音波トランスデューサ1から超音波トランスデューサ2へ至る超音波は順方向、す
なわち、超音波が流れに乗るため、到達時間T1が早くなる。
These transmissions and receptions are alternately repeated, and the arrival time of the ultrasonic wave from the upstream ultrasonic transducer 1 to the downstream ultrasonic transducer 2 is T1, and the downstream ultrasonic transducer 2 goes to the upstream ultrasonic transducer 1. When the arrival time of the reaching ultrasonic wave is T2, since the ultrasonic wave from the ultrasonic transducer 1 to the ultrasonic transducer 2 is forward, that is, the ultrasonic wave is on the flow, the arrival time T1 is accelerated.

反対に超音波トランスデューサ2から超音波トランスデューサ1へ至る超音波は逆方向
、すなわち、超音波が流れに逆行するため、到達時間T2が遅くなる。ここで測定管3の
管軸方向における超音波トランスデューサ1と超音波トランスデューサ2との間の距離を
Lとし、超音波トランスデューサ1(又は2)と測定管3との間を成す傾斜角をφとし、
被測定流体の流速をVとしたとき、次式、すなわち、
V=(L/2cosφ)・{(1/T1)−(1/T2)}
を演算するようになされる(通過時間差法)。
On the other hand, since the ultrasonic wave from the ultrasonic transducer 2 to the ultrasonic transducer 1 is in the reverse direction, that is, the ultrasonic wave is reverse to the flow, the arrival time T2 is delayed. Here, the distance between the ultrasonic transducer 1 and the ultrasonic transducer 2 in the tube axis direction of the measuring tube 3 is L, and the inclination angle between the ultrasonic transducer 1 (or 2) and the measuring tube 3 is φ. ,
When the flow velocity of the fluid to be measured is V, the following equation:
V = (L / 2cosφ) · {(1 / T1) − (1 / T2)}
Is calculated (passing time difference method).

この種の超音波流量計に関して、特許文献1には、測定管内に流れる被測定流体の流量
を超音波を利用して計測する超音波流量計が開示されている。この超音波流量計によれば
、複数の第1及び第2の送受信超音波振動子を備えて構成される。第1の送受信超音波振
動子は、測定管の外周面であって、当該測定管の管軸方向に所定間隔を保って配置される
。第1の送受信超音波振動子は、一対の振動子で形成され、これらの振動子は向き合った
方向であって、管軸斜め方向内部に向けて超音波が発射できるように配置されている。
Regarding this type of ultrasonic flow meter, Patent Document 1 discloses an ultrasonic flow meter that measures the flow rate of a fluid to be measured flowing in a measurement tube using ultrasonic waves. According to this ultrasonic flowmeter, the ultrasonic flowmeter includes a plurality of first and second transmission / reception ultrasonic transducers. The first transmitting / receiving ultrasonic transducer is disposed on the outer peripheral surface of the measurement tube at a predetermined interval in the tube axis direction of the measurement tube. The first transmission / reception ultrasonic transducer is formed of a pair of transducers, and these transducers are arranged so as to be able to emit ultrasonic waves toward the inside in the oblique direction of the tube axis.

第2の送受信超音波振動子は、測定管の外周面であって、当該測定管の管断面方向の対
向する位置に配置されている。第2の送受信超音波振動子は、一対の振動子で形成され、
これらの振動子は向き合った方向であって、管断面方向に向けて超音波が発射できるよう
に配置されている。これを前提にして、第1の送受信超音波振動子で計測した流速成分か
ら第2の送受信超音波振動子で計測した流速成分を除去して、被測定流体の流量を算出す
るようにした。このように超音波流量計を構成すると、被測定流体の流速成分に含まれる
偏流等の流速成分が除去された管軸方向の流速のみを測定できるというものである。
The second transmitting / receiving ultrasonic transducer is disposed on the outer peripheral surface of the measurement tube at a position facing the measurement tube in the tube cross-sectional direction. The second transmitting / receiving ultrasonic transducer is formed of a pair of transducers,
These vibrators are arranged to face each other and emit ultrasonic waves in the tube cross-sectional direction. Based on this assumption, the flow rate component measured by the second transmission / reception ultrasonic transducer is removed from the flow rate component measured by the first transmission / reception ultrasonic transducer, and the flow rate of the fluid to be measured is calculated. When the ultrasonic flowmeter is configured in this way, only the flow velocity in the tube axis direction from which the flow velocity component such as the drift included in the flow velocity component of the fluid to be measured is removed can be measured.

また、特許文献2には、第1及び第2の超音波トランスデューサ、超音波反射体、流量
補正係数決定手段及び流量算出手段を備えた超音波流量計が開示されている。第1の超音
波トランスデューサは、測定管の一方の側の管外周部に取り付けられて、当該測定管の管
軸方向とある角度を成す方向であって、測定管の他方の側の管外周部に配置された超音波
反射体へ超音波を送信し、交互に超音波反射体の側からの超音波を受信する。
Patent Document 2 discloses an ultrasonic flowmeter including first and second ultrasonic transducers, an ultrasonic reflector, a flow rate correction coefficient determining unit, and a flow rate calculating unit. The first ultrasonic transducer is attached to a tube outer peripheral portion on one side of the measurement tube and forms a certain angle with the tube axis direction of the measurement tube, and the tube outer peripheral portion on the other side of the measurement tube The ultrasonic wave is transmitted to the ultrasonic wave reflector disposed on the side, and the ultrasonic wave is alternately received from the ultrasonic wave reflector side.

第2の超音波トランスデューサは、第1の超音波トランスデューサに対して測定管の管
軸方向に所定の距離を保って、当該測定管の同一の側の管外周部に取り付けられ、測定管
の管軸方向とある角度を成す方向であって、上記超音波反射体へ超音波を送信し、交互に
超音波反射体の側からの超音波を受信する。
The second ultrasonic transducer is attached to the outer periphery of the tube on the same side of the measurement tube at a predetermined distance in the tube axis direction of the measurement tube with respect to the first ultrasonic transducer. It is a direction that forms an angle with the axial direction, transmits ultrasonic waves to the ultrasonic reflector, and alternately receives ultrasonic waves from the side of the ultrasonic reflector.

特許文献2の超音波流量計によれば、一方の超音波トランスデューサから他方の超音波
トランスデューサへ測定管内の被測定流体を伝搬した超音波信号の第1相関値、または、
この伝搬した超音波信号の強度に応じて、第1相関値に基づく被測定流体の第1流速の測
定または超音波反射体によって反射された超音波信号の第2相関値に基づく第2流速の測
定のいずれか一方が行われる。
According to the ultrasonic flowmeter of Patent Document 2, the first correlation value of the ultrasonic signal propagated through the fluid to be measured in the measurement tube from one ultrasonic transducer to the other ultrasonic transducer, or
Depending on the intensity of the propagated ultrasonic signal, the measurement of the first flow velocity of the fluid to be measured based on the first correlation value or the second flow velocity based on the second correlation value of the ultrasonic signal reflected by the ultrasonic reflector. One of the measurements is made.

流量補正係数決定手段は、測定された第1および第2流速の比率に基づく測定管の面粗
さ係数から流量補正係数を求める。これを前提にして、流量算出手段が、流量補正係数決
定手段の流量補正係数と第1流速とを用いて被測定流体の流量を求めるようにした。この
ように超音波流量計を構成すると、面粗さに対応した、より正確な流量補正係数が求めら
れ、これを用いた高精度な流量測定を実行できるというものである。
The flow rate correction coefficient determining means obtains a flow rate correction coefficient from the surface roughness coefficient of the measuring tube based on the ratio between the measured first and second flow velocities. On the premise of this, the flow rate calculation means obtains the flow rate of the fluid to be measured using the flow rate correction coefficient of the flow rate correction coefficient determination means and the first flow velocity. When the ultrasonic flow meter is configured in this way, a more accurate flow rate correction coefficient corresponding to the surface roughness is obtained, and high-accuracy flow rate measurement using this can be performed.

特開2005−172547号公報(第4頁 図1)Japanese Patent Laying-Open No. 2005-172547 (page 4 FIG. 1) 特開2010−101767号公報(第5頁 図1)Japanese Patent Laying-Open No. 2010-101767 (FIG. 1 on page 5)

ところで、従来例に係る超音波流量計によれば、次のような問題がある。
i.図11に示した斜めに音波を入射させる超音波流量計10によれば、2つの超音波
トランスデューサ1,2間で超音波のパルス経路を精度良く位置合わせすることができる
が、被測定流体の流速Vが大流速となると、超音波トランスデューサ1,2の間の超音波
のパルス経路(指向特性)が変化するため、各々の超音波トランスデューサ1,2で受信
される信号が小さくなり、流速測定が困難となる。因みに市販の製品によれば、配管寸法
や超音波トランスデューサ1,2の寸法にもよるが、大流速の測定は30m/s程度が限
界となることが知られている。
Incidentally, the ultrasonic flowmeter according to the conventional example has the following problems.
i. According to the ultrasonic flowmeter 10 that injects sound waves obliquely as shown in FIG. 11, the pulse path of the ultrasonic waves can be accurately aligned between the two ultrasonic transducers 1 and 2. When the flow velocity V becomes a large flow velocity, the ultrasonic pulse path (directivity characteristic) between the ultrasonic transducers 1 and 2 changes, so that the signals received by the ultrasonic transducers 1 and 2 become smaller, and the flow velocity measurement is performed. It becomes difficult. Incidentally, it is known that a commercially available product has a limit of about 30 m / s for measurement of a large flow velocity, although it depends on the dimensions of the pipe and the ultrasonic transducers 1 and 2.

ii.特許文献1に見られるような超音波流量計によれば、第1の送受信超音波振動子で
計測した流速成分から第2の送受信超音波振動子で計測した流速成分を除去する方法が採
られるが、被測定流体の流速Vが大流速となると、第1、第2の送受信超音波振動子の間
の超音波のパルス経路(指向特性)が変化するため、各々の送受信超音波振動子間で受信
される信号が小さくなり、より正確な被測定流体の流量を算出することが困難となるとい
う問題がある。
ii. According to the ultrasonic flow meter as found in Patent Document 1, a method of removing the flow velocity component measured by the second transmission / reception ultrasonic transducer from the flow velocity component measured by the first transmission / reception ultrasonic transducer is adopted. However, when the flow velocity V of the fluid to be measured becomes a large flow velocity, the ultrasonic pulse path (directional characteristic) between the first and second transmission / reception ultrasonic transducers changes. There is a problem in that the signal received at 1 becomes smaller and it becomes difficult to calculate the flow rate of the fluid to be measured more accurately.

iii.特許文献2に見られるような超音波流量計によれば、測定管の一方の側の管外周
部に取り付けられた第1の超音波トランスデューサから、当該測定管の管軸方向とある角
度を成す方向であって、測定管の他方の側の管外周部に配置された超音波反射体へ超音波
を送信し、交互に超音波反射体の側からの超音波を受信し、この第1の超音波トランスデ
ューサに対して測定管の管軸方向に所定の距離を保って、当該測定管の同一の側の管外周
部に取り付けられた第2の超音波トランスデューサから、測定管の管軸方向とある角度を
成す方向であって、超音波反射体へ超音波を送信し、交互に超音波反射体の側からの超音
波を受信する方法が採られる。この方法であっても、被測定流体の流速Vが大流速となる
と、超音波トランスデューサ1,2の間の超音波のパルス経路(指向特性)が変化するた
め、各々の超音波トランスデューサ1,2で受信される信号が小さくなり、流速測定が困
難となるという問題がある。
iii. According to the ultrasonic flow meter as found in Patent Document 2, an angle is formed with the tube axis direction of the measurement tube from the first ultrasonic transducer attached to the outer periphery of the tube on one side of the measurement tube. Direction, the ultrasonic wave is transmitted to the ultrasonic reflector disposed on the outer circumference of the tube on the other side of the measurement tube, and the ultrasonic wave is alternately received from the ultrasonic reflector side. A predetermined distance is maintained in the tube axis direction of the measurement tube with respect to the ultrasonic transducer, and the second ultrasonic transducer attached to the outer periphery of the tube on the same side of the measurement tube A method is adopted in which an ultrasonic wave is transmitted to an ultrasonic reflector in a direction forming an angle, and an ultrasonic wave is alternately received from the ultrasonic reflector side. Even in this method, when the flow velocity V of the fluid to be measured becomes a large flow velocity, the ultrasonic pulse path (directional characteristic) between the ultrasonic transducers 1 and 2 changes. There is a problem in that the signal received at 1 becomes smaller and the flow velocity measurement becomes difficult.

そこで、この発明は上述した課題を解決したものであって、被測定流体の流速測定原理
を工夫し、被測定流体の流が速くて超音波のパルス経路が変わってしまう場合であっても
、流速を測定できるようにした超音波流量計及び流量測定方法を提供することを目的とす
る。
Therefore, the present invention solves the above-described problem, devised the principle of measuring the flow velocity of the fluid to be measured, even if the flow of the fluid to be measured is fast and the pulse path of the ultrasonic wave changes, An object of the present invention is to provide an ultrasonic flowmeter and a flow rate measuring method capable of measuring a flow velocity.

上記課題を解決するために、請求項1に係る超音波流量計は、測定管の直線部分を流れる被測定流体の流量を計測する超音波流量計であって、
前記測定管の一方の側の管外周部に取り付けられて、当該測定管の管軸方向と略直交する方向に超音波を送信し、他方の側からの超音波を受信する第1の送受信超音波振動子と、
前記第1の送受信超音波振動子に対して前記測定管の管軸方向に所定の距離を保って、当該測定管の他方の側の管外周部に取り付けられ、前記測定管の管軸方向と略直交する方向に超音波を送信し、他方の側からの超音波を受信する第2の送受信超音波振動子と、
前記第1の送受信超音波振動子から超音波を送信したときに前記第2の送受信超音波振動子で受信される第1の超音波検出信号の強度を測定するとともに、前記第2の送受信超音波振動子から超音波を送信したときに前記第1の送受信超音波振動子で受信される第2の超音波検出信号の強度を測定する測定手段と、
前記測定手段により測定される前記第1の超音波検出信号の強度および前記第2の超音波検出信号の強度から前記被測定流体の流速を演算する演算手段とを備え
前記演算手段は、
前記第1の送受信超音波振動子の取り付け位置を前記第2の送受信超音波振動子の取り付け位置よりも上流側とし、前記被測定流体が上流側から下流側へ測定管内を流れる場合であって、
前記測定管の管軸方向における前記第1の送受信超音波振動子と第2の送受信超音波振動子との間の距離をLとし、前記測定管の内径をDとし、前記被測定流体の流速「0」時の超音波の指向角度をθとし、前記超音波の流体音速をCとし、前記被測定流体の流速をVとして、当該流速Vの測定時の前記第1の送受信超音波振動子から送信される超音波の放射方向を示す角度をθ1とし、前記被測定流体の任意の流速測定時の前記第2の送受信超音波振動子から送信される超音波の放射方向を示す角度をθ2としたとき、(1)乃至(3)式、すなわち、
θ=tan -1 (L/D) ・・・・(1)
θ1=tan -1 (L−D/cos(θ)/C×V)/D ・・・・(2)
θ2=tan -1 (L+D/cos(θ)/C×V)/D ・・・・(3)
を演算し、
θ1の値は、前記第1の超音波検出信号の強度とθ1の値とを対応付けたテーブルに基づいて定められ、
θ2の値は、前記第2の超音波検出信号の強度とθ2の値とを対応付けたテーブルに基づいて定められることを特徴とするものである。
In order to solve the above problem, an ultrasonic flowmeter according to claim 1 is an ultrasonic flowmeter that measures a flow rate of a fluid to be measured that flows through a straight portion of a measurement tube,
Wherein mounted on the pipe outer peripheral portion of one side of the measuring tube, first transceiver that transmits ultrasound in a direction substantially perpendicular to the tube axis direction of the measuring tube, receives the ultrasonic wave from the side of the other lateral An ultrasonic transducer,
A predetermined distance is maintained in the tube axis direction of the measurement tube with respect to the first transmission / reception ultrasonic transducer, and the tube is attached to the outer periphery of the tube on the other side of the measurement tube. transmitting ultrasonic waves in a direction substantially orthogonal, and the second transmitter ultrasonic transducer for receiving ultrasonic waves from the side of the other hand,
When the ultrasonic wave is transmitted from the first transmission / reception ultrasonic transducer, the intensity of the first ultrasonic detection signal received by the second transmission / reception ultrasonic transducer is measured, and the second transmission / reception ultrasonic transducer is measured. Measuring means for measuring the intensity of the second ultrasonic detection signal received by the first transmission / reception ultrasonic transducer when transmitting ultrasonic waves from the ultrasonic transducer;
Calculating means for calculating the flow velocity of the fluid under measurement from the intensity of the first ultrasonic detection signal and the intensity of the second ultrasonic detection signal measured by the measuring means ;
The computing means is
The mounting position of the first transmission / reception ultrasonic transducer is the upstream side of the mounting position of the second transmission / reception ultrasonic transducer, and the fluid to be measured flows in the measuring tube from the upstream side to the downstream side. ,
The distance between the first transmission / reception ultrasonic transducer and the second transmission / reception ultrasonic transducer in the tube axis direction of the measurement tube is L, the inner diameter of the measurement tube is D, and the flow velocity of the fluid to be measured The first transmitting / receiving ultrasonic transducer at the time of measurement of the flow velocity V, where θ is the directivity angle of the ultrasonic wave at “0”, C is the fluid sound velocity of the ultrasonic wave, and V is the flow velocity of the fluid to be measured. An angle indicating the radiation direction of the ultrasonic waves transmitted from the second transmitting / receiving ultrasonic transducer at the time of measuring an arbitrary flow velocity of the fluid to be measured is θ 2. (1) to (3), that is,
θ = tan −1 (L / D) (1)
θ1 = tan −1 ( LD / cos (θ) / C × V) / D (2)
θ2 = tan −1 (L + D / cos (θ) / C × V) / D (3)
And
The value of θ1 is determined based on a table in which the intensity of the first ultrasonic detection signal is associated with the value of θ1.
The value of θ2 is determined based on a table in which the intensity of the second ultrasonic detection signal is associated with the value of θ2 .

本発明に係る超音波流量計によれば、測定管の直線部分に流れる被測定流体の流量を超
音波の指向性変位を利用して計測する場合に、第1の送受信超音波振動子は、測定管の一
方の側の管外周部に取り付けられて、当該測定管の管軸方向と略直交する方向に超音波を
送信し、交互に他方の側からの超音波を受信する。第2の送受信超音波振動子は、第1の
送受信超音波振動子に対して測定管の管軸方向に所定の距離を保って、当該測定管の他方
の側の管外周部に取り付けられ、測定管の管軸方向と略直交する方向に超音波を送信し、
交互に他方の側からの超音波を受信する。これを前提にして、演算手段が第1及び第2の
送受信超音波振動子から交互に得られる指向性変位成分を含む超音波検出信号を入力し、
超音波検出信号の受信強度から被測定流体の流速を演算するようになる。
According to the ultrasonic flowmeter of the present invention, when measuring the flow rate of the fluid to be measured flowing in the straight portion of the measurement tube using the ultrasonic directional displacement, the first transmission / reception ultrasonic transducer includes: It is attached to the outer periphery of the tube on one side of the measurement tube, transmits ultrasonic waves in a direction substantially orthogonal to the tube axis direction of the measurement tube, and alternately receives ultrasonic waves from the other side. The second transmission / reception ultrasonic transducer is attached to the outer peripheral portion of the tube on the other side of the measurement tube while maintaining a predetermined distance in the tube axis direction of the measurement tube with respect to the first transmission / reception ultrasonic transducer. Send ultrasonic waves in a direction substantially perpendicular to the tube axis direction of the measurement tube,
The ultrasonic waves from the other side are received alternately. On the premise of this, the calculation means inputs an ultrasonic detection signal including a directional displacement component obtained alternately from the first and second transmission / reception ultrasonic transducers,
The flow velocity of the fluid to be measured is calculated from the received intensity of the ultrasonic detection signal.

この演算によって、第1及び第2の送受信超音波振動子から各々送信される超音波の指
向性変位を利用して被測定流体の流速を測定できるようになる。しかも、第1及び第2の
送受信超音波振動子の設置時、2つの送受信超音波振動子間における超音波のパルス経路
の位置合わせを省略できる。
By this calculation, the flow velocity of the fluid to be measured can be measured using the directional displacements of the ultrasonic waves transmitted from the first and second transmission / reception ultrasonic transducers. In addition, when the first and second transmission / reception ultrasonic transducers are installed, alignment of the ultrasonic pulse path between the two transmission / reception ultrasonic transducers can be omitted.

請求項に記載の超音波流量計は、請求項において、前記流体音速C又は前記第1の送受信超音波振動子と第2の送受信超音波振動子との距離Lをパラメータとして、前記第1及び第2の超音波検出信号の間の強度比に対応する前記被測定流体の流速Vとの関係を参照テーブルとして記憶する記憶部を備え、
前記演算手段は、前記第1の送受信超音波振動子の超音波の指向性変位成分を含む第2の超音波検出信号を前記第2の送受信超音波振動子から入力し、交互に前記第2の送受信超音波振動子の超音波の指向性変位成分を含む第1の超音波検出信号を前記第1の送受信超音波振動子から入力し、前記第1及び第2の超音波検出信号の間の強度比を演算し、前記第1及び第2の超音波検出信号の間の強度比に対応する前記被測定流体の流速Vを前記記憶部から読み出すことを特徴とするものである。
The ultrasonic flowmeter according to claim 2 is the ultrasonic flowmeter according to claim 1 , wherein the fluid sound velocity C or a distance L between the first transmission / reception ultrasonic transducer and the second transmission / reception ultrasonic transducer is used as a parameter. A storage unit that stores a relationship with the flow velocity V of the fluid to be measured corresponding to the intensity ratio between the first and second ultrasonic detection signals as a reference table;
The calculation means inputs a second ultrasonic detection signal including a directional displacement component of ultrasonic waves of the first transmission / reception ultrasonic transducer from the second transmission / reception ultrasonic transducer, and alternately performs the second transmission / reception ultrasonic transducer. A first ultrasonic detection signal including a directional displacement component of ultrasonic waves of the transmission / reception ultrasonic transducer is input from the first transmission / reception ultrasonic transducer, and between the first and second ultrasonic detection signals. Is calculated, and the flow velocity V of the fluid to be measured corresponding to the intensity ratio between the first and second ultrasonic detection signals is read out from the storage unit.

請求項に係る流量測定方法は、測定管の直線部分に流れる被測定流体の流量を超音波の指向性変位を利用して計測する流量測定方法であって、
前記測定管の一方の側の管外周部に取り付けられて、当該測定管の管軸方向と略直交する方向に超音波を送信し、他方の側からの超音波を受信する第1の送受信超音波振動子と、前記第1の送受信超音波振動子に対して前記測定管の管軸方向に所定の距離を保って、当該測定管の他方の側の管外周部に取り付けられ、前記測定管の管軸方向と略直交する方向に超音波を送信し、他方の側からの超音波を受信する第2の送受信超音波振動子と、
を用い、
前記第1の送受信超音波振動子から超音波を送信したときに前記第2の送受信超音波振動子で受信される第1の超音波検出信号の強度を測定するとともに、前記第2の送受信超音波振動子から超音波を送信したときに前記第1の送受信超音波振動子で受信される第2の超音波検出信号の強度を測定する測定ステップと、
前記測定ステップにより測定される前記第1の超音波検出信号の強度および前記第2の超音波検出信号の強度から前記被測定流体の流速を演算する演算ステップとを実行し、
前記演算ステップでは、
前記第1の送受信超音波振動子の取り付け位置を前記第2の送受信超音波振動子の取り付け位置よりも上流側とし、前記被測定流体が上流側から下流側へ測定管内を流れる場合であって、
前記測定管の管軸方向における前記第1の送受信超音波振動子と第2の送受信超音波振動子との間の距離をLとし、前記測定管の内径をDとし、前記被測定流体の流速「0」時の超音波の指向角度をθとし、前記超音波の流体音速をCとし、前記被測定流体の流速をVとして、当該流速Vの測定時の前記第1の送受信超音波振動子から送信される超音波の放射方向を示す角度をθ1とし、前記被測定流体の任意の流速測定時の前記第2の送受信超音波振動子から送信される超音波の放射方向を示す角度をθ2としたとき、(1)乃至(3)式、すなわち、
θ=tan -1 (L/D) ・・・・(1)
θ1=tan -1 (L−D/cos(θ)/C×V)/D ・・・・(2)
θ2=tan -1 (L+D/cos(θ)/C×V)/D ・・・・(3)
を演算し、
θ1の値は、前記第1の超音波検出信号の強度とθ1の値とを対応付けたテーブルに基づいて定められ、
θ2の値は、前記第2の超音波検出信号の強度とθ2の値とを対応付けたテーブルに基づいて定められることを特徴とするものである。
A flow rate measuring method according to claim 3 is a flow rate measuring method for measuring a flow rate of a fluid to be measured flowing in a straight portion of a measurement tube by using a directional displacement of an ultrasonic wave,
Wherein mounted on the pipe outer peripheral portion of one side of the measuring tube, first transceiver that transmits ultrasound in a direction substantially perpendicular to the tube axis direction of the measuring tube, receives the ultrasonic wave from the side of the other lateral The ultrasonic transducer and the first transmitting / receiving ultrasonic transducer are attached to a pipe outer peripheral portion on the other side of the measurement tube at a predetermined distance in the tube axis direction of the measurement tube , and the measurement A second transmitting / receiving ultrasonic transducer that transmits ultrasonic waves in a direction substantially orthogonal to the tube axis direction of the tube and receives ultrasonic waves from the other side ;
Use
When the ultrasonic wave is transmitted from the first transmission / reception ultrasonic transducer, the intensity of the first ultrasonic detection signal received by the second transmission / reception ultrasonic transducer is measured, and the second transmission / reception ultrasonic transducer is measured. A measurement step of measuring the intensity of a second ultrasonic detection signal received by the first transmitting / receiving ultrasonic transducer when transmitting ultrasonic waves from the ultrasonic transducer;
A calculation step of calculating the flow velocity of the fluid under measurement from the intensity of the first ultrasonic detection signal and the intensity of the second ultrasonic detection signal measured by the measurement step ;
In the calculation step,
The mounting position of the first transmission / reception ultrasonic transducer is the upstream side of the mounting position of the second transmission / reception ultrasonic transducer, and the fluid to be measured flows in the measuring tube from the upstream side to the downstream side. ,
The distance between the first transmission / reception ultrasonic transducer and the second transmission / reception ultrasonic transducer in the tube axis direction of the measurement tube is L, the inner diameter of the measurement tube is D, and the flow velocity of the fluid to be measured The first transmitting / receiving ultrasonic transducer at the time of measurement of the flow velocity V, where θ is the directivity angle of the ultrasonic wave at “0”, C is the fluid sound velocity of the ultrasonic wave, and V is the flow velocity of the fluid to be measured. An angle indicating the radiation direction of the ultrasonic waves transmitted from the second transmitting / receiving ultrasonic transducer at the time of measuring an arbitrary flow velocity of the fluid to be measured is θ 2. (1) to (3), that is,
θ = tan −1 (L / D) (1)
θ1 = tan −1 ( LD / cos (θ) / C × V) / D (2)
θ2 = tan −1 (L + D / cos (θ) / C × V) / D (3)
And
The value of θ1 is determined based on a table in which the intensity of the first ultrasonic detection signal is associated with the value of θ1.
The value of θ2 is determined based on a table in which the intensity of the second ultrasonic detection signal is associated with the value of θ2 .

本発明に係る超音波流量計及び流量測定方法によれば、測定管の管軸方向と略直交する
方向から超音波を各々送信する第1及び第2の送受信超音波振動子を備え、これらの送受
信超音波振動子に接続された演算手段が当該送受信超音波振動子から交互に得られる指向
性変位成分を含む超音波検出信号を入力し、超音波検出信号の受信強度から被測定流体の
流速を演算するものである。
According to the ultrasonic flowmeter and the flow measurement method according to the present invention, the ultrasonic flowmeter and the flow measurement method include the first and second transmission / reception ultrasonic transducers that respectively transmit ultrasonic waves from directions substantially orthogonal to the tube axis direction of the measurement tube. The calculation means connected to the transmission / reception ultrasonic transducer inputs an ultrasonic detection signal including a directional displacement component obtained alternately from the transmission / reception ultrasonic transducer, and the flow velocity of the fluid to be measured is determined from the reception intensity of the ultrasonic detection signal. Is calculated.

この構成によって、第1及び第2の送受信超音波振動子から各々送信される超音波の指
向性変位を利用して被測定流体の大流速を測定できるようになる。因みに配管寸法や検出
器の寸法にもよるが、市販の製品(30m/s程度)の約2倍程度の大流速が測定できる
ようになる。しかも、第1及び第2の送受信超音波振動子の設置時、2つの送受信超音波
振動子間で超音波のパルス経路の位置合わせを省略できる。また、斜めに音波を入射させ
る超音波流量計に比べて、測定管の管軸方向と略直交する方向から超音波を各々送信する
ので、送受信超音波振動子の寸法の影響を受けることがなくなる。これにより、超音波の
指向性変位を利用して被測定流体の大流速を測定可能な超音波流量計を提供できるように
なる。
With this configuration, it is possible to measure the large flow velocity of the fluid to be measured using the directional displacement of the ultrasonic waves transmitted from the first and second transmission / reception ultrasonic transducers. Incidentally, although depending on the dimensions of the pipe and the detector, it is possible to measure a large flow velocity about twice as large as that of a commercially available product (about 30 m / s). In addition, when the first and second transmission / reception ultrasonic transducers are installed, the alignment of the ultrasonic pulse path between the two transmission / reception ultrasonic transducers can be omitted. Also, compared to an ultrasonic flowmeter that makes sound waves enter obliquely, since ultrasonic waves are transmitted from directions substantially perpendicular to the tube axis direction of the measurement tube, they are not affected by the dimensions of the transmission / reception ultrasonic transducer. . As a result, it is possible to provide an ultrasonic flowmeter that can measure a large flow velocity of the fluid to be measured using the directional displacement of the ultrasonic wave.

本発明に係る実施形態としての超音波流量計100の構成例を示す説明図である。It is explanatory drawing which shows the structural example of the ultrasonic flowmeter 100 as embodiment which concerns on this invention. (A)及び(B)は、放射角θx及び、指向特性(放射強度角度分布)の測定例を示す説明図である。(A) And (B) is explanatory drawing which shows the example of a measurement of radiation angle (theta) x and directivity (radiation intensity angle distribution). 超音波流量計100における大流速測定時の動作例を示す説明図である。It is explanatory drawing which shows the operation example at the time of the large flow rate measurement in the ultrasonic flowmeter. 第1の実施例としての超音波流量計100の制御系の構成例を示すブロック図である。It is a block diagram which shows the structural example of the control system of the ultrasonic flowmeter 100 as a 1st Example. その制御部36の内部構成例を示すブロック図である。3 is a block diagram showing an example of the internal configuration of the control unit 36. FIG. 超音波流量計100における動作例を示すフローチャートである。3 is a flowchart showing an operation example in the ultrasonic flowmeter 100. 第2の実施例としての制御部36’の内部構成例を示すブロック図である。It is a block diagram which shows the example of an internal structure of the control part 36 'as a 2nd Example. 指向角10°における流速音速をパラメータとしたI2(θ1)/I1(θ2)と流速Vとの間の関係例を示すグラフ図である。It is a graph which shows the example of a relationship between I2 ((theta) 1) / I1 ((theta) 2) and the flow velocity V which made the parameter the sound velocity of the flow velocity in the directivity angle of 10 degrees. 指向角10°における検出器#1,#2間の距離をパラメータとしたI2(θ1)/I1(θ2)と流速Vとの間の関係例を示すグラフ図である。It is a graph which shows the example of a relationship between I2 ((theta) 1) / I1 ((theta) 2) and the flow velocity V which made the parameter the distance between detector # 1, # 2 in a directivity angle of 10 degrees. 第2の実施例に係る超音波流量計100における動作例を示すフローチャートである。It is a flowchart which shows the operation example in the ultrasonic flowmeter 100 which concerns on a 2nd Example. 従来例に係る超音波流量計10の構成例を示す説明図である。It is explanatory drawing which shows the structural example of the ultrasonic flowmeter 10 which concerns on a prior art example.

以下、図面を参照しながら、この発明の実施の形態に係る超音波流量計及び流量測定方
法について説明をする。図1に示す超音波流量計100は、測定管の直線部分に流れる被
測定流体(液体・気体・ガス等)の流速を演算すると共にその流量を計測するものである
。超音波流量計100は、第1の送受信超音波振動子(以下単に検出器#1という)、第
2の送受信超音波振動子(以下単に検出器#2という)及び演算手段30を有して構成さ
れる。
Hereinafter, an ultrasonic flowmeter and a flow rate measuring method according to an embodiment of the present invention will be described with reference to the drawings. The ultrasonic flowmeter 100 shown in FIG. 1 calculates the flow rate of the fluid to be measured (liquid, gas, gas, etc.) flowing through the straight portion of the measurement tube and measures the flow rate. The ultrasonic flowmeter 100 includes a first transmission / reception ultrasonic transducer (hereinafter simply referred to as detector # 1), a second transmission / reception ultrasonic transducer (hereinafter simply referred to as detector # 2), and a calculation means 30. Composed.

この例で、被測定流体が測定管内に流れ込む側を上流側とし、被測定流体が測定管内か
ら流れ出る側を下流側としたとき、検出器#1は上流側であって、測定管3の一方の側の
管外周部に取り付けられる。
検出器#1は例えば管バンド(図示せず)を用いて測定管3に固定される。測定管3は所
定の肉厚を有すると共に内径Dを有している。
In this example, when the fluid to be measured flows into the measurement tube is the upstream side, and the side from which the fluid to be measured flows out from the measurement tube is the downstream side, detector # 1 is the upstream side and one of the measurement tubes 3 It is attached to the outer periphery of the tube on the side.
The detector # 1 is fixed to the measurement tube 3 using a tube band (not shown), for example. The measuring tube 3 has a predetermined thickness and an inner diameter D.

検出器#2は、検出器#1の下流側であって、当該検出器#1に対して測定管3の管軸
方向に所定の距離Lを保って、当該測定管3の他方の側の管外周部に取り付けられる。距
離Lは、検出器#1と検出器#2との配置間距離である。例えば、検出器#1の超音波送
受信窓部の中心点から検出器#2の超音波送受信窓部の中心点に至る距離である。検出器
#2も管バンドを用いて測定管3に固定される。
Detector # 2 is downstream of detector # 1 and maintains a predetermined distance L in the tube axis direction of measurement tube 3 with respect to detector # 1 and on the other side of measurement tube 3. Attached to the outer periphery of the tube. The distance L is a distance between the arrangement of the detector # 1 and the detector # 2. For example, the distance from the center point of the ultrasonic transmission / reception window part of the detector # 1 to the center point of the ultrasonic transmission / reception window part of the detector # 2. Detector # 2 is also fixed to measuring tube 3 using a tube band.

この例で、検出器#1には、振動子11及び音響整合材12を有した超音波トランスデ
ューサが使用される。検出器#2には、振動子21及び音響整合材22を有した超音波ト
ランスデューサが使用される。振動子11,21にはピエゾ素子(PZT)等の圧電素子
が使用される。検出器#1及び検出器#2には演算手段30が接続される。
In this example, an ultrasonic transducer having the transducer 11 and the acoustic matching material 12 is used for the detector # 1. For the detector # 2, an ultrasonic transducer having the vibrator 21 and the acoustic matching material 22 is used. Piezoelectric elements such as piezo elements (PZT) are used for the vibrators 11 and 21. The calculation means 30 is connected to the detector # 1 and the detector # 2.

この超音波流量計100によれば、測定管3の直線部分に流れる被測定流体の流量を超
音波の指向性変位を利用して計測する場合に、検出器#1は、測定管3の管軸方向と略直
交する方向であって、下方に向けて超音波を送信し、交互に他方の側からの超音波を受信
して、超音波検出信号I1(θ2)を発生する。
According to this ultrasonic flowmeter 100, when measuring the flow rate of the fluid to be measured flowing in the straight portion of the measurement tube 3 using the directional displacement of the ultrasonic wave, the detector # 1 is the tube of the measurement tube 3. An ultrasonic wave is transmitted in the direction substantially perpendicular to the axial direction and is received downward, and ultrasonic waves from the other side are alternately received to generate an ultrasonic detection signal I1 (θ2).

検出器#2は、測定管3の管軸方向と略直交する方向であって、上方に向けて超音波を
送信し、交互に他方の側からの超音波を受信して、超音波検出信号I2(θ1)を発生す
る。演算手段30では、検出器#1及び検出器#2から交互に得られる指向性変位成分を
含む超音波検出信号I1(θ2),I2(θ1)を入力し、当該超音波検出信号I1(θ
2),I2(θ1)の受信強度から被測定流体の流速Vを演算するようになる。なお、演
算手段30の内部構成例については、図4で説明する。
Detector # 2 is a direction substantially orthogonal to the tube axis direction of measurement tube 3, transmits ultrasonic waves upward, and alternately receives ultrasonic waves from the other side to detect ultrasonic detection signals. I2 (θ1) is generated. The calculation means 30 receives ultrasonic detection signals I1 (θ2) and I2 (θ1) including directional displacement components obtained alternately from the detector # 1 and the detector # 2, and inputs the ultrasonic detection signal I1 (θ
2) The flow velocity V of the fluid to be measured is calculated from the received intensity of I2 (θ1). An example of the internal configuration of the computing means 30 will be described with reference to FIG.

図中、破線に示す楕円Idは、被測定流体の流速「0」時の検出器#1による超音波の
流体中の指向特性(directional characteristics)である。同図、破線に示す楕円IIdは
、同様にして検出器#2による超音波の流体中の指向特性である。指向特性は、検出器#
1や検出器#2等の寸法と、音響整合材12,22の長さと、振動子11,21等の発振
周波数f0とによって決まる。同図、実線に示す双方向の矢印IIIは超音波の流体中の経
路である。
In the figure, an ellipse Id indicated by a broken line is directional characteristics of the ultrasonic wave in the fluid by the detector # 1 when the flow rate of the fluid to be measured is “0”. In the same figure, an ellipse IId indicated by a broken line is the directivity characteristic in the ultrasonic fluid by the detector # 2 in the same manner. Directional characteristics detector #
1 and detector # 2 and the like, the length of the acoustic matching materials 12 and 22, and the oscillation frequency f0 of the vibrators 11 and 21 and the like. In the figure, a bidirectional arrow III shown by a solid line is a path in the ultrasonic fluid.

また、図中に示すθは指向角(directional angle)である。ここに指向角θとは、検出
器#1,#2の配置によって定まる角度であって、指向中心線L1(又はL2)と経路最
短線L12との間を成す角度である。指向中心線L1は、検出器#1の振動子11(発振源
)の中心点から垂直(鉛直)方向に延在する線分であって、検出器#1における超音波の
指向特性(directional characteristics)を左右に2分する線である。
Further, θ shown in the figure is a directional angle. Here, the directivity angle θ is an angle determined by the arrangement of the detectors # 1 and # 2, and is an angle formed between the directivity center line L1 (or L2) and the shortest path line L12. The directional center line L1 is a line segment extending in the vertical (vertical) direction from the center point of the transducer 11 (oscillation source) of the detector # 1, and is an ultrasonic directional characteristic (directional characteristics) in the detector # 1. ) Is a line that bisects left and right.

指向中心線L2は、検出器#2の振動子21の中心点から垂直(鉛直)方向に延在する
線分であって、検出器#2における超音波の指向特性を左右に2分する線である。この例
で、経路最短線L12は、検出器#1の振動子11の中心点と検出器#2の振動子21の中
心点を結ぶ線分であって、超音波の最短経路を構成する線分である。
The directivity center line L2 is a line segment extending in the vertical (vertical) direction from the center point of the transducer 21 of the detector # 2, and is a line that bisects the ultrasonic directivity characteristics in the detector # 2 to the left and right. It is. In this example, the shortest path line L12 is a line segment connecting the center point of the transducer 11 of the detector # 1 and the center point of the transducer 21 of the detector # 2, and constitutes the shortest path of ultrasonic waves. Minutes.

ここで、図2A及びBを参照して、放射角θx及び、指向特性(放射強度角度分布)の
測定例について説明する。図2Aは検出器#2の例であり、検出器#1についても同様に
定義される。図2Aにおいて、Lxは、上述の検出器#2の中心点から任意の一の方向に
延在する線分であって、当該指向特性における超音波の放射方向を示す線(以下放射方向
線という)である。ここで、指向中心線L1と放射方向線Lxとの間の成す角度を放射角
θxと定義する。この例では、放射方向線Lxが経路最短線L12と等しくなる、放射角θ
x=θを特に指向角(directional angle)といい、指向角θが10°に設定されている(
図1参照)。
Here, with reference to FIGS. 2A and 2B, measurement examples of the radiation angle θx and the directivity (radiation intensity angle distribution) will be described. FIG. 2A is an example of the detector # 2, and the detector # 1 is similarly defined. In FIG. 2A, Lx is a line segment extending in an arbitrary direction from the center point of the detector # 2 described above, and is a line indicating the radiation direction of ultrasonic waves in the directional characteristic (hereinafter referred to as a radiation direction line). ). Here, an angle formed between the directional center line L1 and the radiation direction line Lx is defined as a radiation angle θx. In this example, the radiation angle θ at which the radial line Lx becomes equal to the shortest path line L12.
x = θ is particularly called a directional angle, and the directional angle θ is set to 10 ° (
(See FIG. 1).

この例で、指向角θを10°に設定したのは、指向角θが大きいと、超音波検出信号I
1(θ2)及びI2(θ1)の受信強度が小さくなるので、内径Dに比べて距離Lが小さ
い方が望ましい。しかし、指向角θが0°に近いと、超音波検出信号I1(θ2)及びI
2(θ1)の値が近接してくるので、超音波の放射角θx=角度θ1,θ2を精度良く求
めるのが難しくなる。そこで、指向角θが10°程度になるように、検出器#1と検出器
#2とを設置するようにした。
In this example, the directivity angle θ is set to 10 ° when the directivity angle θ is large.
Since the received intensity of 1 (θ2) and I2 (θ1) is small, it is desirable that the distance L is smaller than the inner diameter D. However, when the directivity angle θ is close to 0 °, the ultrasonic detection signals I1 (θ2) and I
Since the value of 2 (θ1) is close, it is difficult to accurately obtain the ultrasonic radiation angle θx = angles θ1 and θ2. Therefore, the detector # 1 and the detector # 2 are installed so that the directivity angle θ is about 10 °.

また、図2Bに示す指向特性を得るための放射強度角度分布の測定例によれば、上述の
検出器#2の中心点から半径Rの半円周上に、例えば、角度θs(=約12°)置きに、
計15個の音響受信器24が配置される。音響受信器24にはアコースティックエミッシ
ョンセンサ(AEセンサ)等が使用される。
Further, according to the measurement example of the radiation intensity angle distribution for obtaining the directivity characteristic shown in FIG. 2B, for example, an angle θs (= about 12) on the semicircular circumference of the radius R from the center point of the detector # 2. °)
A total of 15 acoustic receivers 24 are arranged. For the acoustic receiver 24, an acoustic emission sensor (AE sensor) or the like is used.

検出器#2で超音波を発生させ、放射角θxに対応する角度6°,18°,30°,4
2°,54°,66°,78°,90°,102°,114°,126°,138°,1
50°,162°,174°の各々位置で、超音波を受信して超音波検出信号I1(θ2
)を測定する。ここで測定される15箇所の超音波検出信号I1(θ2)は角度に依存し
た受信強度(放射強度)を示す。
An ultrasonic wave is generated by the detector # 2, and angles 6 °, 18 °, 30 °, 4 corresponding to the radiation angle θx are generated.
2 °, 54 °, 66 °, 78 °, 90 °, 102 °, 114 °, 126 °, 138 °, 1
Ultrasonic waves are received at positions of 50 °, 162 °, and 174 °, and an ultrasonic detection signal I1 (θ2
). The 15 ultrasonic detection signals I1 (θ2) measured here indicate the reception intensity (radiation intensity) depending on the angle.

この角度について、検出器#2の中心点を基準にして、超音波検出信号I1(θ2)の
放射強度をプロットすると、図2Aに示した検出器#2における超音波の指向特性が得ら
れる。なお、放射強度の角度依存性は媒質流体によらない。指向特性は、検出器#1や検
出器#2等の寸法と、音響整合材12,22の長さと、振動子11,21等の発振周波数
f0とによって決まるが、特定の流体(例えば、水)中で予め測定して置くとよい。
When the radiation intensity of the ultrasonic detection signal I1 (θ2) is plotted with respect to this angle with respect to the center point of the detector # 2, the directivity characteristic of the ultrasonic wave in the detector # 2 shown in FIG. 2A is obtained. The angle dependency of the radiation intensity does not depend on the medium fluid. The directivity is determined by the dimensions of the detector # 1, the detector # 2, etc., the lengths of the acoustic matching members 12, 22, and the oscillation frequencies f0 of the vibrators 11, 21, etc., but a specific fluid (for example, water ) Should be measured in advance.

上述の測定を検出器#1についても同様にして行う。これらの測定から15個の角度6
°,18°,30°,42°,54°,66°,78°,90°,102°,114°,
126°,138°,150°,162°,174°に対応する15個の超音波検出信号
I1(θ2)や、各々に対応する15個の超音波検出信号I2(θ1)等を取得できるの
で、これらをA/D変換した後の超音波検出データDIN=I1(θ2),I2(θ1)に
基づいて超音波検出データDIN対放射角θxの参照(ルックアップ)テーブルを作成でき
るようになる。
The above measurement is performed in the same manner for the detector # 1. 15 angles from these measurements 6
°, 18 °, 30 °, 42 °, 54 °, 66 °, 78 °, 90 °, 102 °, 114 °,
Since 15 ultrasonic detection signals I1 (θ2) corresponding to 126 °, 138 °, 150 °, 162 °, and 174 °, 15 ultrasonic detection signals I2 (θ1) corresponding to each, etc. can be acquired. Based on the ultrasonic detection data DIN = I1 (θ2) and I2 (θ1) after A / D conversion of these, a reference (lookup) table of the ultrasonic detection data DIN versus the radiation angle θx can be created. .

続いて、図3を参照して、超音波流量計100における大流速測定時の指向特性の状態
例を説明する。被測定流体は紙面の左側から右側に流れる。図3に示す超音波流量計10
0における指向特性の状態例によれば、流速Vが図1に示した流速=「0」時に比べて大
きくなると、超音波の指向特性が変化することが確認された。例えば、大流速測定時の検
出器#1,#2の各々の指向特性は、超音波が上流側から下流側へ流される現象により、
上流側から下流側へ傾斜することが見出された。
Next, with reference to FIG. 3, a state example of directivity characteristics at the time of measuring a large flow rate in the ultrasonic flowmeter 100 will be described. The fluid to be measured flows from the left side to the right side of the page. Ultrasonic flow meter 10 shown in FIG.
According to the state example of the directivity characteristic at 0, it was confirmed that the directivity characteristic of the ultrasonic wave changes when the flow velocity V becomes larger than that at the time of the flow velocity = “0” shown in FIG. For example, the directivity characteristics of the detectors # 1 and # 2 at the time of measuring a large flow velocity are due to a phenomenon in which ultrasonic waves flow from the upstream side to the downstream side.
It was found that it slopes from the upstream side to the downstream side.

この例では、検出器#1における流速=「0」時の指向中心線L1に対して、大流速測
定(100m/s等)時には、検出器#1の指向特性がその中心点を基準にして指向中心線
L1’に移行するように傾斜する。指向中心線L1’は上流側から下流側へ倒れる。指向
中心線L1と指向中心線L1’との間を成す角度はθaである。
In this example, with respect to the directional center line L1 when the flow velocity at the detector # 1 is “0”, the directional characteristic of the detector # 1 is based on the center point when measuring a large flow velocity (100 m / s, etc.). It inclines so that it may shift to directional center line L1 '. The pointing center line L1 ′ falls from the upstream side to the downstream side. The angle formed between the directional center line L1 and the directional center line L1 ′ is θa.

同様にして、検出器#2における流速=「0」時の指向中心線L2に対して、大流速測
定時には、検出器#2の指向特性がその中心点を基準にして指向中心線L2’に移行する
ように傾斜する。指向中心線L2’も上流側から下流側へ倒れる。指向中心線L2と指向
中心線L2’との間を成す角度はθbである。以下でθa,θbを指向変位角という。
Similarly, with respect to the directional center line L2 when the flow velocity at the detector # 2 is “0”, the directional characteristic of the detector # 2 is changed to the directional center line L2 ′ with reference to the center point when measuring a large flow velocity. Tilt to transition. The pointing center line L2 ′ also falls from the upstream side to the downstream side. The angle formed between the directional center line L2 and the directional center line L2 ′ is θb. Hereinafter, θa and θb are referred to as directional displacement angles.

一方、検出器#1が受信する超音波は、検出器#2から図2に示す放射角θx=角度θ
2(θ2>θ)の方向に発せられた成分のものである。角度θ2は指向角θ+指向変位角
θbである。また、検出器#1から距離Lだけ離れた位置(指向角θ)に配設された検出
器#2が受信する超音波は、検出器#1から図3に示す放射角θx=角度θ1(θ1<θ
)の方向に発せられた成分のものである。角度θ1は指向角θ−指向変位角θaである。
On the other hand, the ultrasonic wave received by the detector # 1 is emitted from the detector # 2 at the radiation angle θx = angle θ shown in FIG.
2 (θ2> θ). The angle θ2 is the directivity angle θ + directive displacement angle θb. Further, the ultrasonic wave received by the detector # 2 disposed at a position (directivity angle θ) separated from the detector # 1 by the distance L is the radiation angle θx = angle θ1 (see FIG. 3) from the detector # 1. θ1 <θ
) Of the component emitted in the direction of The angle θ1 is a directivity angle θ−directive displacement angle θa.

従って、大流速測定時に、検出器#1から出力される超音波検出信号I1(θ2)と、
検出器#2から出力される超音波検出信号I2(θ1)との間には、I2(θ1)>I1
(θ2)なる関係がある。演算手段30では、検出器#1及び検出器#2から交互に得ら
れる指向性変位成分を含む超音波検出信号I1(θ2),I2(θ1)を入力し、当該超
音波検出信号I1(θ2),I2(θ1)の受信強度の差又は、これらの比から被測定流
体の流速Vを演算できるようになる。
Therefore, the ultrasonic detection signal I1 (θ2) output from the detector # 1 at the time of measuring the large flow velocity,
Between the ultrasonic detection signal I2 (θ1) output from the detector # 2, I2 (θ1)> I1
There is a relationship (θ2). The calculation means 30 receives ultrasonic detection signals I1 (θ2) and I2 (θ1) including directional displacement components obtained alternately from the detector # 1 and the detector # 2, and inputs the ultrasonic detection signal I1 (θ2 ), I2 (θ1), or the flow velocity V of the fluid to be measured can be calculated from the difference in the received intensity or the ratio thereof.

続いて、図4及び図5を参照して、第1の実施例としての超音波流量計100の制御系
の内部構成例について説明する。図4において、演算手段30は、発振器31、送信部3
2、送受信切換部33、受信部34、アナログ・ディジタル(以下A/Dという)変換部
35及び制御部36を有して構成される。送信部32は2つの入力in1,in2及び1個の
出力out1を有している。発振器31の出力は送信部32の入力in1に接続される。制御
部36は、2つの入力in1,in2及び3個の出力O1〜O3を有している。送信部32の
入力in2には制御部36の出力O1が接続される。
Next, an example of the internal configuration of the control system of the ultrasonic flowmeter 100 according to the first embodiment will be described with reference to FIGS. 4 and 5. In FIG. 4, the calculation means 30 includes an oscillator 31 and a transmission unit 3.
2, a transmission / reception switching unit 33, a reception unit 34, an analog / digital (hereinafter referred to as A / D) conversion unit 35, and a control unit 36. The transmission unit 32 has two inputs in1, in2 and one output out1. The output of the oscillator 31 is connected to the input in1 of the transmission unit 32. The control unit 36 has two inputs in1, in2 and three outputs O1-O3. The output O1 of the control unit 36 is connected to the input in2 of the transmission unit 32.

送受信切換部33は1組の2回路1選択用のスイッチSW1,SW2及び制御用の端子
Cinを有して構成され、スイッチSW1,SW2は検出器#1、検出器#2、送信部32
、受信部34及び制御部36に接続されている。スイッチSW1は接点a1、接点b1及
び中点c1を有しており、スイッチSW2は接点a2、接点b2及び中点c2を有してい
る。端子Cinには、制御部36の出力O2が接続される。
The transmission / reception switching unit 33 includes a set of switches SW1 and SW2 for selecting two circuits 1 and a control terminal Cin. The switches SW1 and SW2 are detector # 1, detector # 2, and transmission unit 32.
The receiver 34 and the controller 36 are connected. The switch SW1 has a contact point a1, a contact point b1, and a middle point c1, and the switch SW2 has a contact point a2, a contact b2, and a middle point c2. An output O2 of the control unit 36 is connected to the terminal Cin.

接点a1は接点a2に接続されて検出器#1に接続される。接点b1は接点b2に接続
されて検出器#2に接続される。中点c1は送信部32の出力out1に接続される。中点
c2は受信部34の入力inに接続される。受信部34の出力outはA/D変換部35の入
力inに接続される。A/D変換部35の出力outは制御部36の入力in1に接続される。
この例で、制御部36の入力in2には操作部14が接続され、その出力O3には表示部1
8が接続されている。
The contact a1 is connected to the contact a2 and connected to the detector # 1. The contact b1 is connected to the contact b2 and connected to the detector # 2. The midpoint c1 is connected to the output out1 of the transmission unit 32. The midpoint c2 is connected to the input in of the receiving unit 34. The output “out” of the receiver 34 is connected to the input “in” of the A / D converter 35. The output “out” of the A / D converter 35 is connected to the input “in1” of the controller 36.
In this example, the operation unit 14 is connected to the input in2 of the control unit 36, and the display unit 1 is connected to the output O3.
8 is connected.

制御部36は、例えば、図5に示す信号角度変換部61、演算部62及びメモリ部63
を有して構成される。信号角度変換部61は演算部62に接続される。信号角度変換部6
1には例えば、超音波検出データDIN対放射角θxを参照テーブル化した読み出し専用メ
モリ(ROM)等が用いられる。演算部62にはCPU(Central Processing Unit)
や、DSP(Digital Signal Processor)等が用いられる。演算部62の出力はメモリ
部63に接続される。メモリ部63にはRAM(Random Access Memory)等のワーク用
の汎用メモリが用いられる。信号角度変換部61は、図2に示したA/D変換部35に接
続される。これらにより、超音波流量計100を構成する。
The control unit 36 includes, for example, a signal angle conversion unit 61, a calculation unit 62, and a memory unit 63 illustrated in FIG.
It is comprised. The signal angle conversion unit 61 is connected to the calculation unit 62. Signal angle converter 6
For example, a read-only memory (ROM) in which the ultrasonic detection data DIN vs. the radiation angle θx is converted into a reference table is used for 1. The arithmetic unit 62 includes a CPU (Central Processing Unit).
Alternatively, a DSP (Digital Signal Processor) or the like is used. The output of the calculation unit 62 is connected to the memory unit 63. For the memory unit 63, a general-purpose memory for work such as RAM (Random Access Memory) is used. The signal angle converter 61 is connected to the A / D converter 35 shown in FIG. These constitute the ultrasonic flowmeter 100.

続いて、図6を参照して、本発明に係る流量測定方法に関して、超音波流量計100に
おける大流速測定時の動作例について説明する。この例では、被測定流体が上流側から下
流側へ測定管3内を流れる場合であって、測定管3の一方の側の管外周部に検出器#1が
取り付けられ、検出器#1の下流側であって、当該検出器#1に対して測定管3の管軸方
向に所定の距離Lを保って、当該測定管3の他方の側の管外周部に検出器#2が取り付け
られている(指向角θ=10°)。
Next, with reference to FIG. 6, an example of operation at the time of measuring a large flow velocity in the ultrasonic flowmeter 100 will be described with respect to the flow rate measuring method according to the present invention. In this example, the fluid to be measured flows in the measurement tube 3 from the upstream side to the downstream side, and the detector # 1 is attached to the outer periphery of the tube on one side of the measurement tube 3, and the detector # 1 A detector # 2 is attached to the outer peripheral portion of the pipe on the other side of the measurement tube 3 at a downstream side, maintaining a predetermined distance L in the tube axis direction of the measurement tube 3 with respect to the detector # 1. (Directivity angle θ = 10 °).

超音波流量計100が測定管3内に流れる被測定流体の流量を超音波の指向性変位を利
用して計測する場合を前提とする。これを動作条件にして、超音波流量計100は、図6
に示すステップST1で、制御部36が測定命令を待機する。測定命令は例えば、測定開
始を指示する操作データD14が操作部14から制御部36へ出力されることで発行され
る。
It is assumed that the ultrasonic flowmeter 100 measures the flow rate of the fluid to be measured flowing in the measuring tube 3 by using the ultrasonic directional displacement. With this as an operating condition, the ultrasonic flowmeter 100 is shown in FIG.
In step ST1 shown in FIG. 2, the control unit 36 waits for a measurement command. The measurement command is issued by, for example, outputting operation data D14 instructing start of measurement from the operation unit 14 to the control unit 36.

制御部36は、操作データD14に基づいて送信許可信号S32及び送受信切換信号S
33等を発生する。測定命令が無い場合は、操作データD14の入力を待機する。測定命
令が有った場合は、超音波の送受信を開始する。このとき、発振器31は所定の周波数の
原信号Sfを発振する。送信部32は送信許可信号S32に基き、原信号Sfを増幅して
超音波信号SOUTを出力する。送信許可信号S32は制御部36から送信部32へ出力さ
れる。
The control unit 36 transmits the transmission permission signal S32 and the transmission / reception switching signal S based on the operation data D14.
33 etc. are generated. If there is no measurement command, the operation data D14 is awaited. When there is a measurement command, transmission / reception of ultrasonic waves is started. At this time, the oscillator 31 oscillates an original signal Sf having a predetermined frequency. Based on the transmission permission signal S32, the transmission unit 32 amplifies the original signal Sf and outputs an ultrasonic signal SOUT. The transmission permission signal S32 is output from the control unit 36 to the transmission unit 32.

ステップST2で制御部36は検出器#1及び#2の送受切り換え制御を実行する。こ
のとき、制御部36は、送受信切換部33を動作させるための送受信切換信号S33を供
給する。送受信切換部33は送受信切換信号S33に基づいてスイッチSW1及びSW2
における切り換え制御を実行する。
In step ST2, the control unit 36 performs transmission / reception switching control of the detectors # 1 and # 2. At this time, the control unit 36 supplies a transmission / reception switching signal S33 for operating the transmission / reception switching unit 33. The transmission / reception switching unit 33 switches the switches SW1 and SW2 based on the transmission / reception switching signal S33.
The switching control at is executed.

この切り換え制御では、検出器#1を最初に送信用に設定し、検出器#2を受信用に設
定するか、検出器#2を最初に送信用に設定し、検出器#1を受信用に設定するかが送受
信切換信号S33によって決定される。スイッチSW1は送受信切換信号S33に基づい
て接点a1又は接点b1を交互に選択して中点c1と接続する。スイッチSW2は送受信
切換信号S33に基づいて接点a2又は接点b2を交互に選択して中点c2と接続する。
In this switching control, detector # 1 is first set for transmission and detector # 2 is set for reception, or detector # 2 is first set for transmission and detector # 1 is set for reception. Is set by the transmission / reception switching signal S33. The switch SW1 alternately selects the contact a1 or the contact b1 based on the transmission / reception switching signal S33, and connects to the midpoint c1. The switch SW2 alternately selects the contact point a2 or the contact point b2 based on the transmission / reception switching signal S33 and connects to the midpoint c2.

送受信切換部33は、例えば、制御部36によって、最初、検出器#1を送信用の超音
波振動子として機能させ、検出器#2を受信用の超音波振動子として機能させる設定がな
されたときは、接点a1と中点c1とを接続するようにスイッチSW1を制御し、かつ、
接点b2と中点c2とを接続するようにスイッチSW2を制御する。この制御により、超
音波信号SOUTが検出器#1に出力される。
In the transmission / reception switching unit 33, for example, the control unit 36 is initially set so that the detector # 1 functions as an ultrasonic transducer for transmission and the detector # 2 functions as an ultrasonic transducer for reception. Control the switch SW1 to connect the contact point a1 and the midpoint c1, and
The switch SW2 is controlled so as to connect the contact point b2 and the midpoint c2. By this control, the ultrasonic signal SOUT is output to the detector # 1.

ステップST3で検出器#1は、測定管3の管軸方向と略直交する方向に超音波を送信
する。このとき、検出器#1では、超音波信号SOUTに基づいて振動子11が測定管3に
対して垂直方向から超音波を発振する。超音波は、音響整合材12を介して測定管3内に
伝播する。これにより、検出器#1から測定管3内へ超音波を垂直に入射できるようにな
る。
In step ST3, the detector # 1 transmits ultrasonic waves in a direction substantially orthogonal to the tube axis direction of the measurement tube 3. At this time, in the detector # 1, the transducer 11 oscillates ultrasonic waves from the vertical direction with respect to the measurement tube 3 based on the ultrasonic signal SOUT. The ultrasonic wave propagates into the measurement tube 3 through the acoustic matching material 12. As a result, ultrasonic waves can be vertically incident from the detector # 1 into the measuring tube 3.

ステップST4で検出器#2は、他方の側からの超音波を受信する。このとき、検出器
#2では、測定管3内を伝播してくる超音波が音響整合材22を介して拾い込まれ、振動
子21を介して超音波が受信され、超音波検出信号SINが出力される。これにより、検出
器#2から、例えば、超音波検出信号SIN=I2(θ1)が得られる。
In step ST4, the detector # 2 receives the ultrasonic wave from the other side. At this time, in the detector # 2, the ultrasonic wave propagating through the measurement tube 3 is picked up via the acoustic matching material 22, the ultrasonic wave is received via the vibrator 21, and the ultrasonic detection signal SIN is generated. Is output. Thereby, for example, the ultrasonic detection signal SIN = I2 (θ1) is obtained from the detector # 2.

ステップST5で制御部36は送受切り換え制御を実行する。このとき、制御部36は
、送受信切換信号S33を送受信切換部33に供給して、スイッチSW1及びSW2にお
ける切り換え制御を実行する。この例では、検出器#1を送信用から受信用に機能を切り
換えると共に、検出器#2を受信用から送信用に機能を切り換える。このとき、スイッチ
SW1は送受信切換信号S33に基づいて接点b1と中点c1とを接続する。スイッチS
W2は接点a2と中点c2とを接続する。これにより、超音波信号SOUTが検出器#2に
出力される。
In step ST5, the control unit 36 executes transmission / reception switching control. At this time, the control unit 36 supplies the transmission / reception switching signal S33 to the transmission / reception switching unit 33 to execute switching control in the switches SW1 and SW2. In this example, the function of the detector # 1 is switched from transmission to reception, and the function of the detector # 2 is switched from reception to transmission. At this time, the switch SW1 connects the contact b1 and the midpoint c1 based on the transmission / reception switching signal S33. Switch S
W2 connects the contact point a2 and the midpoint c2. Thereby, the ultrasonic signal SOUT is output to the detector # 2.

ステップST6で、検出器#2は、測定管3の管軸方向と略直交する方向に超音波を送
信する。このとき、検出器#2では、超音波信号SOUTに基づいて振動子21が測定管3
に対して垂直方向から超音波を発振する。超音波は、音響整合材22を介して測定管3内
に伝播する。これにより、検出器#2から測定管3内へ超音波を垂直に入射できるように
なる。
In step ST6, the detector # 2 transmits an ultrasonic wave in a direction substantially orthogonal to the tube axis direction of the measurement tube 3. At this time, in the detector # 2, the transducer 21 is connected to the measuring tube 3 based on the ultrasonic signal SOUT.
The ultrasonic wave is oscillated from the vertical direction. The ultrasonic wave propagates into the measurement tube 3 through the acoustic matching material 22. As a result, ultrasonic waves can be vertically incident from the detector # 2 into the measuring tube 3.

ステップST7で検出器#1は、他方の側からの超音波を受信する。このとき、検出器
#1では、測定管3内を伝播してくる超音波が音響整合材12を介して拾い込まれ、振動
子11を介して超音波が受信され、超音波検出信号SINが出力される。これにより、検出
器#1から、例えば、超音波検出信号SIN=I1(θ2)が得られる。なお、被測定流体
の流速Vが「0」のときは、超音波検出信号I1(θ2),I2(θ1)に差が無いが、
流速Vが大流速となると、超音波検出信号I1(θ2),I2(θ1)に差が発生するよ
うになる。
In step ST7, the detector # 1 receives the ultrasonic wave from the other side. At this time, in the detector # 1, the ultrasonic wave propagating through the measurement tube 3 is picked up via the acoustic matching material 12, the ultrasonic wave is received via the vibrator 11, and the ultrasonic detection signal SIN is generated. Is output. Thereby, for example, the ultrasonic detection signal SIN = I1 (θ2) is obtained from the detector # 1. When the flow velocity V of the fluid to be measured is “0”, there is no difference between the ultrasonic detection signals I1 (θ2) and I2 (θ1).
When the flow velocity V becomes a large flow velocity, a difference occurs between the ultrasonic detection signals I1 (θ2) and I2 (θ1).

この例では、ステップST13で、制御部36は測定終了命令が有るか否かに対応して
制御を分岐するが、測定終了命令が無い場合は、ステップST2に戻って制御部36は検
出器#1及び#2の送受切り換え制御を実行する。例えば、検出器#1を受信用から送信
用に機能を切り換えると共に、検出器#2を送信用から受信用に機能を切り換える。この
ように、検出器#1及び#2が、交互に、測定管3の管軸方向と略直交する方向に超音波
を送信し、検出器#1及び#2が交互に他方の側からの超音波を受信するようになる。
In this example, in step ST13, the control unit 36 branches control depending on whether or not there is a measurement end command. However, if there is no measurement end command, the control unit 36 returns to step ST2 and the control unit 36 detects the detector #. The transmission / reception switching control of 1 and # 2 is executed. For example, the function of the detector # 1 is switched from reception to transmission, and the function of the detector # 2 is switched from transmission to reception. In this way, the detectors # 1 and # 2 alternately transmit ultrasonic waves in a direction substantially perpendicular to the tube axis direction of the measurement tube 3, and the detectors # 1 and # 2 alternately transmit from the other side. Receive ultrasound.

この例では、以上の送受信動作と並行して流速演算動作が以下に実行される。すなわち
、ステップST8で受信部34は検出器#1及び検出器#2から交互に得られる指向性変
位成分を含む超音波検出信号SINを入力し、当該超音波検出信号SINを増幅してA/D変
換部35に出力する。
In this example, the flow velocity calculation operation is executed below in parallel with the above transmission / reception operation. That is, in step ST8, the receiving unit 34 inputs the ultrasonic detection signal SIN including the directional displacement component obtained alternately from the detector # 1 and the detector # 2, amplifies the ultrasonic detection signal SIN, and performs A / The data is output to the D converter 35.

ステップST9でA/D変換部35は、増幅後の超音波検出信号SINをアナログ・ディ
ジタル変換し、A/D変換後の超音波検出データDINを信号角度変換部61に出力する。
ステップST10で信号角度変換部61は、A/D変換部35から超音波検出データDIN
=I2(θ1)及び、超音波検出データDIN=I1(θ2)を交互に入力する。
In step ST9, the A / D conversion unit 35 performs analog / digital conversion on the amplified ultrasonic detection signal SIN, and outputs the ultrasonic detection data DIN after A / D conversion to the signal angle conversion unit 61.
In step ST10, the signal angle conversion unit 61 receives the ultrasonic detection data DIN from the A / D conversion unit 35.
= I2 (θ1) and ultrasonic detection data DIN = I1 (θ2) are alternately input.

信号角度変換部61では、例えば、ルックアップテーブルを参照して、当該超音波検出
データDIN=I2(θ1)を検出器#1の超音波の放射方向を示す放射角θx=θ1に変
換し、当該超音波検出データDIN=I1(θ2)を検出器#2の超音波の放射方向を示す
放射角θx=θ2に交互に変換する。
In the signal angle conversion unit 61, for example, referring to a lookup table, the ultrasonic detection data DIN = I2 (θ1) is converted into a radiation angle θx = θ1 indicating the ultrasonic radiation direction of the detector # 1, The ultrasonic detection data DIN = I1 (θ2) is alternately converted into a radiation angle θx = θ2 indicating the radiation direction of the ultrasonic wave of the detector # 2.

超音波検出データDIN=I2(θ1)には、検出器#1の超音波の指向性変位成分が含
まれ、超音波検出データDIN=I1(θ2)には検出器#2の超音波の指向性変位成分が
含まれている。ルックアップテーブルは、放射角θx=θ1と超音波検出データDIN=I
2(θ1)との間の関係及び、放射角θx=θ2と超音波検出データDIN=I1(θ2)
との間の関係とが予め求められ作成されている。
The ultrasonic detection data DIN = I2 (θ1) includes the ultrasonic directional displacement component of the detector # 1, and the ultrasonic detection data DIN = I1 (θ2) includes the ultrasonic directivity of the detector # 2. Sex displacement component is included. The look-up table includes a radiation angle θx = θ1 and ultrasonic detection data DIN = I.
2 (θ1), radiation angle θx = θ2 and ultrasonic detection data DIN = I1 (θ2)
The relationship between and is previously determined and created.

ステップST11で演算部62は信号角度変換部61から交互に出力される検出器#1
の超音波の放射方向を示す放射角θx=θ1及び、検出器#2の超音波の放射方向を示す
放射角θx=θ2を入力し、超音波検出信号SINの受信強度を示す放射角θx=θ1,θ
2から被測定流体の流速を演算(逆算)する。
In step ST11, the calculation unit 62 alternately outputs the detector # 1 from the signal angle conversion unit 61.
The radiation angle θx = θ1 indicating the radiation direction of the ultrasonic wave and the radiation angle θx = θ2 indicating the radiation direction of the ultrasonic wave of the detector # 2 are input, and the radiation angle θx = indicating the reception intensity of the ultrasonic detection signal SIN θ1, θ
2. Calculate (reverse calculation) the flow velocity of the fluid to be measured from 2.

例えば、演算部62は、被測定流体が上流側から下流側へ測定管3内を流れる場合であ
って、測定管3の管軸方向における検出器#1と検出器#2との距離をLとし、測定管3
の内径をDとし、被測定流体の流速「0」時の超音波の指向角をθとし、超音波の流体中
の音速(以下流体音速という)をCとし、被測定流体の流速をVとして、当該流速Vの測
定時の検出器#1から送信される超音波の放射方向を示す放射角をθ1とし、被測定流体
の任意の流速測定時の検出器#2から送信される超音波の放射方向を示す放射角をθ2と
したとき、(1)乃至(3)式、すなわち、
θ=tan-1(L/D) ・・・・(1)
θ1=tan-1(L−D/cos(θ)/C×V)/D ・・・・(2)
θ2=tan-1(L+D/cos(θ)/C×V)/D ・・・・(3)
を演算する。なお、距離L,内径D,指向角θ,流体音速Cが既知であり、tan10°の
三角比は0.176≒0.18である。演算部62は、放射角θx=θ1,θ2から流速
Vを逆算するようになされる(測定原理)。この演算によって、検出器#1及び検出器#
2から各々送信される超音波の指向性変位を利用して被測定流体の流速を測定できるよう
になる。しかも、検出器#1及び検出器#2の設置時、2つの送受信超音波振動子間にお
ける超音波のパルス経路の位置合わせを省略できる。
For example, the calculation unit 62 is a case where the fluid to be measured flows in the measurement tube 3 from the upstream side to the downstream side, and calculates the distance between the detector # 1 and the detector # 2 in the tube axis direction of the measurement tube 3 And measuring tube 3
Is defined as D, the directivity angle of the ultrasonic wave at the flow velocity “0” of the fluid to be measured is θ, the sound velocity in the ultrasonic fluid (hereinafter referred to as fluid sound velocity) is C, and the flow velocity of the fluid to be measured is V. The radiation angle indicating the radiation direction of the ultrasonic wave transmitted from the detector # 1 when measuring the flow velocity V is θ1, and the ultrasonic wave transmitted from the detector # 2 when measuring the arbitrary flow velocity of the fluid to be measured When the radiation angle indicating the radiation direction is θ2, the equations (1) to (3), that is,
θ = tan −1 (L / D) (1)
θ1 = tan −1 (LD / cos (θ) / C × V) / D (2)
θ2 = tan −1 (L + D / cos (θ) / C × V) / D (3)
Is calculated. The distance L, the inner diameter D, the directivity angle θ, and the fluid sound velocity C are known, and the triangular ratio of tan 10 ° is 0.176≈0.18. The calculator 62 is configured to back-calculate the flow velocity V from the radiation angles θx = θ1 and θ2 (measurement principle). By this calculation, detector # 1 and detector # 1
The flow velocity of the fluid to be measured can be measured using the directional displacements of the ultrasonic waves transmitted from 2 respectively. In addition, when the detector # 1 and the detector # 2 are installed, the alignment of the ultrasonic pulse path between the two transmission / reception ultrasonic transducers can be omitted.

そして、ステップST12で表示部18は表示データD18に基づいて流速Vや、流量
Q等を表示する。流量Qは、測定管3の管断面積をAとすると、Q=A・Vで計算される
。表示データD18は、流速Vや、流量Q等を表示するデータであって、制御部36から
表示部18に出力される。その後、ステップST13で、制御部36は測定終了命令が有
った場合は、超音波流量測定を終了する。
In step ST12, the display unit 18 displays the flow velocity V, the flow rate Q, and the like based on the display data D18. The flow rate Q is calculated as Q = A · V, where A is the cross-sectional area of the measuring tube 3. The display data D18 is data for displaying the flow velocity V, the flow rate Q, and the like, and is output from the control unit 36 to the display unit 18. Thereafter, in step ST13, when there is a measurement end command, the control unit 36 ends the ultrasonic flow rate measurement.

このようにして、第1の実施例としての超音波流量計100及び流量測定方法によれば
、測定管3の管軸方向と略直交する垂直方向から超音波を交互に送信する検出器#1,#
2を備え、この検出器#1,#2に接続された演算手段30が検出器#1,#2から交互
に得られる指向性変位成分を含む超音波検出信号SINを入力し、超音波検出信号SINの受
信強度から被測定流体の流速Vを演算(逆算)するものである。
Thus, according to the ultrasonic flowmeter 100 and the flow rate measuring method as the first embodiment, the detector # 1 that alternately transmits ultrasonic waves from the vertical direction substantially orthogonal to the tube axis direction of the measurement tube 3. , #
2 and an operation means 30 connected to the detectors # 1 and # 2 inputs an ultrasonic detection signal SIN including a directional displacement component obtained alternately from the detectors # 1 and # 2, and detects ultrasonic waves. The flow velocity V of the fluid to be measured is calculated (back calculated) from the received intensity of the signal SIN.

この演算によって、検出器#1,#2から交互に送信される超音波の指向性変位を利用
して被測定流体の流速Vや流量Qを測定できるようになる。しかも、検出器#1,#2の
設置時、2つの検出器#1,#2間で超音波のパルス経路の位置合わせを省略できる。ま
た、斜めに音波を入射させる超音波流量計に比べて、測定管3の管軸方向と略直交する垂
直方向から超音波を各々送信するので、検出器#1,#2の寸法の影響を受けることがな
くなる。
By this calculation, the flow velocity V and the flow rate Q of the fluid to be measured can be measured using the directional displacement of the ultrasonic waves transmitted alternately from the detectors # 1 and # 2. In addition, when the detectors # 1 and # 2 are installed, the alignment of the ultrasonic pulse path between the two detectors # 1 and # 2 can be omitted. In addition, compared with an ultrasonic flowmeter that injects sound waves obliquely, since the ultrasonic waves are transmitted from the vertical direction substantially orthogonal to the tube axis direction of the measurement tube 3, the influence of the dimensions of the detectors # 1 and # 2 is reduced. You will not receive it.

大流速のとき超音波のパルス経路が変化するが、この超音波経路の変化分は、指向性の
変位パラメータとして、超音波検出信号SINの受信強度に反映される。このため、大流速
時、超音波検出信号SINの受信強度に反映された指向性変位から大流速を演算できるよう
になる。因みに配管寸法や検出器#1,#2の寸法にもよるが、市販の製品(30m/s
程度)の約2倍程度の大流速が測定できるようになる。これにより、超音波の指向性変位
を利用して被測定流体の流速Vや流量Qを測定する超音波流量計100を提供できるよう
になる。
The pulse path of the ultrasonic wave changes at a high flow velocity, and the change amount of the ultrasonic wave path is reflected in the reception intensity of the ultrasonic wave detection signal SIN as a directional displacement parameter. For this reason, when the flow velocity is large, the large flow velocity can be calculated from the directional displacement reflected in the reception intensity of the ultrasonic detection signal SIN. Although it depends on the dimensions of the piping and detectors # 1 and # 2, it is a commercially available product (30 m / s
A large flow velocity about twice as large as that). Accordingly, it is possible to provide the ultrasonic flowmeter 100 that measures the flow velocity V and the flow rate Q of the fluid to be measured using the directional displacement of the ultrasonic waves.

なお、演算手段30については、上述した放射角θx=θ1,θ2から流速Vを逆算す
る機能を有した制御部36に限られることはなく、第2の実施例に示すような超音波検出
信号I2(θ1)及び超音波検出信号I1(θ2)の間の受信強度の比に対応して、被測
定流体の流速Vを演算するように制御部36を構成してもよい。
The calculating means 30 is not limited to the control unit 36 having the function of calculating the flow velocity V from the radiation angles θx = θ1 and θ2 described above, and an ultrasonic detection signal as shown in the second embodiment. The control unit 36 may be configured to calculate the flow velocity V of the fluid to be measured in accordance with the ratio of the received intensity between I2 (θ1) and the ultrasonic detection signal I1 (θ2).

続いて、図7〜図10を参照して、第2の実施例としての制御部36’の内部構成例に
ついて説明する。この例では、図4に示した演算手段30において、制御部36が制御部
36’に置き換わって適用されるものである。
Next, an example of the internal configuration of the control unit 36 ′ according to the second embodiment will be described with reference to FIGS. In this example, in the calculation means 30 shown in FIG. 4, the control unit 36 is applied in place of the control unit 36 ′.

図7に示す制御部36’は、演算部64及びメモリ部65を有して構成される。メモリ
部65(記憶部)は演算部64に接続される。演算部64にはCPUや、DSP等が用い
られる。メモリ部65には、流体音速C又は検出器#1と検出器#2との間の距離Lをパ
ラメータとして、超音波検出信号I2θ1)と超音波検出信号I1(θ2)との間の強度
比に対応する被測定流体の流速Vとの関係が参照テーブルとして記憶されている。メモリ
部65には例えば、読み出し専用メモリ(ROM)等が用いられる。
The control unit 36 ′ illustrated in FIG. 7 includes an arithmetic unit 64 and a memory unit 65. The memory unit 65 (storage unit) is connected to the calculation unit 64. For the calculation unit 64, a CPU, a DSP, or the like is used. In the memory unit 65, the intensity ratio between the ultrasonic detection signal I2θ1) and the ultrasonic detection signal I1 (θ2) using the fluid sound velocity C or the distance L between the detector # 1 and the detector # 2 as a parameter. The relationship with the flow velocity V of the fluid to be measured corresponding to is stored as a reference table. For example, a read-only memory (ROM) or the like is used for the memory unit 65.

ここで、図8を参照して、指向角10°のときの超音波検出信号I2(θ1),I1(
θ2)の受信強度比I2(θ1)/I1(θ2)と流速Vとの関係例について説明する。
図8において、縦軸は被測定流体の流速V[m/s]である。流速Vは片対数目盛りで示
している。横軸は、超音波検出信号I2(θ1),I1(θ2)の受信強度比I2(θ1
)/I1(θ2)である。受信強度比I2(θ1)/I1(θ2)は等分目盛りで示して
いる。
Here, referring to FIG. 8, ultrasonic detection signals I2 (θ1) and I1 (
An example of the relationship between the received intensity ratio I2 (θ1) / I1 (θ2) of θ2) and the flow velocity V will be described.
In FIG. 8, the vertical axis represents the flow velocity V [m / s] of the fluid to be measured. The flow velocity V is shown on a semi-log scale. The horizontal axis represents the reception intensity ratio I2 (θ1) of the ultrasonic detection signals I2 (θ1) and I1 (θ2).
) / I1 (θ2). The received intensity ratio I2 (θ1) / I1 (θ2) is shown on an equally divided scale.

実線に黒塗り菱形印は指向角10°、内径D=1[m]、距離L=0.18[m]であ
って、流体音速が500[m/s]時の流速V対受信強度比I2(θ1)/I1(θ2)
の関係曲線である。実線に黒塗り四角形印は指向角10°、内径D=1[m]、距離L=
0.18[m]の場合であって、流体音速が1480[m/s]時の流速V対受信強度比
I2(θ1)/I1(θ2)の関係曲線である。なお、温度が変わると流体音速Cが変わ
る。水0℃〜100℃において、流体音速Cは7%程度変化する。温度上昇で流体音速C
が早くなる。油は1桁異なる。
The solid rhombus mark on the solid line is the directivity angle 10 °, the inner diameter D = 1 [m], the distance L = 0.18 [m], and the flow velocity V vs. received intensity ratio when the fluid sound velocity is 500 [m / s]. I2 (θ1) / I1 (θ2)
It is a relationship curve. The solid squares with black squares indicate a directivity angle of 10 °, an inner diameter D = 1 [m], and a distance L =
This is a relationship curve of the flow velocity V to the received intensity ratio I2 (θ1) / I1 (θ2) when the fluid sound velocity is 1480 [m / s] in the case of 0.18 [m]. When the temperature changes, the fluid sound speed C changes. In water 0 ° C. to 100 ° C., the fluid sound velocity C changes by about 7%. Fluid sound velocity C due to temperature rise
Becomes faster. Oil differs by an order of magnitude.

この例では、流体音速=500[m/s]時の流速V対受信強度比I2(θ1)/I1
(θ2)の関係曲線によれば、受信強度比I2(θ1)/I1(θ2)が1〜5の範囲内
で、流速Vが大きく変化している。グラフ図によれば、I2(θ1)/I1(θ2)が”
1”で流速Vが2[m/s]であり、I2(θ1)/I1(θ2)が”1.2”で流速V
が10[m/s]であり、I2(θ1)/I1(θ2)が”1.4”で流速Vが20[m
/s]であり、I2(θ1)/I1(θ2)が”2.05”で流速Vが50[m/s]で
あり、I2(θ1)/I1(θ2)が”4.8”で流速Vが100[m/s]である。
In this example, the flow velocity V to the reception intensity ratio I2 (θ1) / I1 when the fluid sound velocity is 500 [m / s].
According to the relationship curve of (θ2), the flow velocity V changes greatly when the reception intensity ratio I2 (θ1) / I1 (θ2) is in the range of 1 to 5. According to the graph, I2 (θ1) / I1 (θ2) is “
1 ”and the flow velocity V is 2 [m / s], and I2 (θ1) / I1 (θ2) is“ 1.2 ”and the flow velocity V.
Is 10 [m / s], I2 (θ1) / I1 (θ2) is “1.4”, and the flow velocity V is 20 [m
/ S], I2 (θ1) / I1 (θ2) is “2.05”, the flow velocity V is 50 [m / s], and I2 (θ1) / I1 (θ2) is “4.8”. The flow velocity V is 100 [m / s].

また、流体音速=1480[m/s]時の流速V対受信強度比I2(θ1)/I1(θ
2)の関係曲線によれば、受信強度比I2(θ1)/I1(θ2)が1〜2の範囲内で、
流速Vが大きく変化している。グラフ図によれば、I2(θ1)/I1(θ2)が”1”
で流速Vが1〜10[m/s]であり、I2(θ1)/I1(θ2)が”1.08”で流
速Vが20[m/s]であり、I2(θ1)/I1(θ2)が”1.6”で流速Vが50
[m/s]であり、I2(θ1)/I1(θ2)が”7.1”で流速Vが100[m/s
]である。このように、流速Vが大きくなれば、受信強度比I2(θ1)/I1(θ2)
も大きくなる特質を利用して、受信強度比I2(θ1)/I1(θ2)から流速Vを求め
るようになされる。
Further, when the fluid sound velocity = 1480 [m / s], the flow velocity V vs. received intensity ratio I2 (θ1) / I1 (θ
According to the relationship curve of 2), the received intensity ratio I2 (θ1) / I1 (θ2) is in the range of 1 to 2,
The flow velocity V has changed greatly. According to the graph, I2 (θ1) / I1 (θ2) is “1”.
The flow velocity V is 1 to 10 [m / s], I2 (θ1) / I1 (θ2) is “1.08”, the flow velocity V is 20 [m / s], and I2 (θ1) / I1 ( θ2) is “1.6” and the flow velocity V is 50.
[M / s], I2 (θ1) / I1 (θ2) is “7.1”, and the flow velocity V is 100 [m / s].
]. Thus, if the flow velocity V increases, the received intensity ratio I2 (θ1) / I1 (θ2)
The flow velocity V is obtained from the received intensity ratio I2 (θ1) / I1 (θ2) using the characteristic that becomes larger.

続いて、図9を参照して、指向角10°における検出器#1,#2間の距離Lをパラメ
ータとしたI(θ1)/I(θ2)と流速との間の関係例について説明する。図9におい
て、縦軸は被測定流体の流速V[m/s]である。流速Vは片対数目盛りで示している。
横軸は、超音波検出信号I2(θ1),I1(θ2)の受信強度比I2(θ1)/I1(
θ2)である。受信強度比I2(θ1)/I1(θ2)は等分目盛りで示している。実線
に黒塗り菱形印は、指向角10°、内径D=1[m]、流体音速=1480[m/s]、
距離L=0.18[m]時の流速V対受信強度比I2(θ1)/I1(θ2)の関係曲線
である。実線に黒塗り四角印は、指向角10°、内径D=1[m]、流体音速=1480
[m/s]、距離L=0.36[m]時の流速V対受信強度比I2(θ1)/I1(θ2
)の関係曲線である。実線に黒塗り三角印は、指向角10°、内径D=1[m]、流体音
速=1480[m/s]、距離L=0.58[m]時の流速V対受信強度比I2(θ1)
/I1(θ2)の関係曲線である。
Next, an example of the relationship between I (θ1) / I (θ2) and the flow velocity using the distance L between the detectors # 1 and # 2 at a directivity angle of 10 ° as a parameter will be described with reference to FIG. . In FIG. 9, the vertical axis represents the flow velocity V [m / s] of the fluid to be measured. The flow velocity V is shown on a semi-log scale.
The horizontal axis represents the received intensity ratio I2 (θ1) / I1 (I2 (θ1), I1 (θ2).
θ2). The received intensity ratio I2 (θ1) / I1 (θ2) is shown on an equally divided scale. The solid rhombus marks on the solid line indicate a directivity angle of 10 °, an inner diameter D = 1 [m], a fluid sound velocity = 1480 [m / s],
It is a relationship curve of the flow velocity V versus the reception intensity ratio I2 (θ1) / I1 (θ2) when the distance L = 0.18 [m]. The solid squares on the solid line indicate a directivity angle of 10 °, an inner diameter D = 1 [m], and a fluid sound velocity = 1480.
[M / s], distance L = 0.36 [m] Flow velocity V vs. received intensity ratio I2 (θ1) / I1 (θ2)
). A solid triangle indicates a solid angle with a directivity angle of 10 °, an inner diameter D = 1 [m], a fluid sound velocity = 1480 [m / s], a distance L = 0.58 [m], and a flow velocity V to reception intensity ratio I2 ( θ1)
It is a relationship curve of / I1 (θ2).

この例で、距離L=0.18[m]時の流速V対受信強度比I2(θ1)/I1(θ2
)の関係曲線によれば、受信強度比I2(θ1)/I1(θ2)が1〜2の範囲内で、流
速Vが大きく変化している。グラフ図によれば、I2(θ1)/I1(θ2)が”1”で
流速Vが1〜10[m/s]であり、I2(θ1)/I1(θ2)が”1.08”で流速
Vが20[m/s]であり、I2(θ1)/I1(θ2)が”2.8”で流速Vが50[
m/s]であり、I2(θ1)/I1(θ2)が”6.6”で流速Vが100[m/s]
である。
In this example, the flow velocity V vs. received intensity ratio I2 (θ1) / I1 (θ2) when the distance L = 0.18 [m].
According to the relationship curve), the flow velocity V changes greatly when the received intensity ratio I2 (θ1) / I1 (θ2) is in the range of 1 to 2. According to the graph, I2 (θ1) / I1 (θ2) is “1”, the flow velocity V is 1 to 10 [m / s], and I2 (θ1) / I1 (θ2) is “1.08”. The flow velocity V is 20 [m / s], I2 (θ1) / I1 (θ2) is “2.8”, and the flow velocity V is 50 [
m / s], I2 (θ1) / I1 (θ2) is “6.6”, and the flow velocity V is 100 [m / s].
It is.

また、距離L=0.36[m]時の流速V対受信強度比I2(θ1)/I1(θ2)の
関係曲線によれば、受信強度比I2(θ1)/I1(θ2)が1〜3の範囲内で、流速V
が大きく変化している。グラフ図によれば、I2(θ1)/I1(θ2)が”1”で流速
Vが1〜2[m/s]であり、I2(θ1)/I1(θ2)が”1.08”で流速Vが5
[m/s]であり、I2(θ1)/I1(θ2)が”1.5”で流速Vが10[m/s]
であり、I2(θ1)/I1(θ2)が”2.8”で流速Vが20[m/s]であり、I
2(θ1)/I1(θ2)が”3”で流速Vが100[m/s]である。
Further, according to the relationship curve of the flow velocity V to the reception intensity ratio I2 (θ1) / I1 (θ2) at the distance L = 0.36 [m], the reception intensity ratio I2 (θ1) / I1 (θ2) is 1 to 1. Within the range of 3, the flow velocity V
Has changed significantly. According to the graph, I2 (θ1) / I1 (θ2) is “1”, the flow velocity V is 1 to 2 [m / s], and I2 (θ1) / I1 (θ2) is “1.08”. Flow velocity V is 5
[M / s], I2 (θ1) / I1 (θ2) is “1.5”, and the flow velocity V is 10 [m / s].
I2 (θ1) / I1 (θ2) is “2.8” and the flow velocity V is 20 [m / s].
2 (θ1) / I1 (θ2) is “3” and the flow velocity V is 100 [m / s].

更に、距離L=0.58[m]時の流速V対受信強度比I2(θ1)/I1(θ2)の
関係曲線によれば、受信強度比I2(θ1)/I1(θ2)が1〜5の範囲内で、流速V
が大きく変化している。グラフ図によれば、I2(θ1)/I1(θ2)が”1”で流速
Vが1〜2[m/s]であり、I2(θ1)/I1(θ2)が”1.08”で流速Vが5
[m/s]であり、I2(θ1)/I1(θ2)が”1.5”で流速Vが10[m/s]
であり、I2(θ1)/I1(θ2)が”2.8”で流速Vが20[m/s]であり、I
2(θ1)/I1(θ2)が”3”で流速Vが100[m/s]である。
Further, according to the relationship curve of the flow velocity V to the reception intensity ratio I2 (θ1) / I1 (θ2) when the distance L = 0.58 [m], the reception intensity ratio I2 (θ1) / I1 (θ2) is 1 to 1. Within the range of 5, the flow velocity V
Has changed significantly. According to the graph, I2 (θ1) / I1 (θ2) is “1”, the flow velocity V is 1 to 2 [m / s], and I2 (θ1) / I1 (θ2) is “1.08”. Flow velocity V is 5
[M / s], I2 (θ1) / I1 (θ2) is “1.5”, and the flow velocity V is 10 [m / s].
I2 (θ1) / I1 (θ2) is “2.8” and the flow velocity V is 20 [m / s].
2 (θ1) / I1 (θ2) is “3” and the flow velocity V is 100 [m / s].

更に、距離L=0.58[m]時の流速V対受信強度比I2(θ1)/I1(θ2)の
関係曲線によれば、受信強度比I2(θ1)/I1(θ2)が1〜5の範囲内で、流速V
が大きく変化している。グラフ図によれば、I2(θ1)/I1(θ2)が”1”で流速
Vが1[m/s]であり、I2(θ1)/I1(θ2)が”1.5”で流速Vが5[m/
s]であり、I2(θ1)/I1(θ2)が”2.8”で流速Vが10[m/s]であり
、I2(θ1)/I1(θ2)が”4.8”で流速Vが20[m/s]であり、I2(θ
1)/I1(θ2)が”2.2”で流速Vが50[m/s]であり、I2(θ1)/I1
(θ2)が”5”で流速Vが100[m/s]である。
Further, according to the relationship curve of the flow velocity V to the reception intensity ratio I2 (θ1) / I1 (θ2) when the distance L = 0.58 [m], the reception intensity ratio I2 (θ1) / I1 (θ2) is 1 to 1. Within the range of 5, the flow velocity V
Has changed significantly. According to the graph, I2 (θ1) / I1 (θ2) is “1” and the flow velocity V is 1 [m / s], and I2 (θ1) / I1 (θ2) is “1.5” and the flow velocity V. Is 5 [m /
s], I2 (θ1) / I1 (θ2) is “2.8”, the flow velocity V is 10 [m / s], and I2 (θ1) / I1 (θ2) is “4.8”. V is 20 [m / s] and I2 (θ
1) / I1 (θ2) is “2.2”, the flow velocity V is 50 [m / s], and I2 (θ1) / I1
(Θ2) is “5” and the flow velocity V is 100 [m / s].

このように流速Vが大きくなれば、受信強度比I2(θ1)/I1(θ2)も大きくな
る特質を利用して、受信強度比I2(θ1)/I1(θ2)から流速Vを求めるようにな
される。
When the flow velocity V increases in this way, the flow velocity V is obtained from the reception intensity ratio I2 (θ1) / I1 (θ2) using the characteristic that the reception intensity ratio I2 (θ1) / I1 (θ2) also increases. Made.

続いて、図10を参照して、第2の実施例に係る超音波流量計100における動作例に
ついて説明する。この例では、図10に示すフローチャートのステップST10’及びS
T11’を、図6に示したフローチャートのステップST10及びST11に置き換えて
参照されたい。なお、他の動作は、第1の実施例と同様であるので、その説明を省略する
Subsequently, an operation example of the ultrasonic flowmeter 100 according to the second embodiment will be described with reference to FIG. In this example, steps ST10 ′ and S in the flowchart shown in FIG.
Refer to T11 ′ by replacing it with steps ST10 and ST11 in the flowchart shown in FIG. Since other operations are the same as those of the first embodiment, description thereof is omitted.

この例では、第1の実施例で説明したステップST9で、A/D変換部35が増幅後の
超音波検出信号SINをアナログ・ディジタル変換し、A/D変換後の超音波検出データD
INを図7に示した演算部64に出力する。
In this example, in step ST9 described in the first embodiment, the A / D converter 35 performs analog / digital conversion on the amplified ultrasonic detection signal SIN, and the ultrasonic detection data D after A / D conversion.
IN is output to the calculation unit 64 shown in FIG.

その後、ステップST10’で演算部64は、検出器#1の超音波の指向性変位成分を
含む超音波検出データDIN=I2(θ1)をA/D変換部35から入力し、交互に検出器
#2の超音波の指向性変位成分を含む超音波検出データDIN=I1(θ2)をA/D変換
部35から入力し、超音波検出データDIN=I2(θ1)及び超音波検出データDIN=I
1(θ2)の間の受信強度比I2(θ1)/I1(θ2)を演算する。
Thereafter, in step ST10 ′, the calculation unit 64 inputs ultrasonic detection data DIN = I2 (θ1) including the ultrasonic directional displacement component of the detector # 1 from the A / D conversion unit 35, and alternately detects the detectors. The ultrasonic detection data DIN = I1 (θ2) including the directional displacement component of the ultrasonic wave # 2 is input from the A / D converter 35, and the ultrasonic detection data DIN = I2 (θ1) and the ultrasonic detection data DIN = I
The reception intensity ratio I2 (θ1) / I1 (θ2) between 1 (θ2) is calculated.

そして、ステップST11’で演算部64は、超音波検出データDIN=I(θ1)及び
超音波検出データDIN=I(θ2)の間の強度比をアドレスにして、超音波検出データD
IN=I2(θ1)及び超音波検出データDIN=I1(θ2)の間の受信強度比I2(θ1
)/I1(θ2)に対応する被測定流体の流速Vをメモリ部65から読み出すようになさ
れる。メモリ部65には、図8又は図9に示した関係曲線を参照テーブル化したルックア
ップテーブルが格納されている。その後、第1の実施例で説明したステップST12で、
表示部18が表示データD18に基づいて流速Vや、流量Q等を表示する。
In step ST11 ′, the calculation unit 64 uses the intensity ratio between the ultrasonic detection data DIN = I (θ1) and the ultrasonic detection data DIN = I (θ2) as an address, and detects the ultrasonic detection data D.
Received intensity ratio I2 (θ1) between IN = I2 (θ1) and ultrasonic detection data DIN = I1 (θ2)
) / I1 (θ2), the flow velocity V of the fluid to be measured is read from the memory unit 65. The memory unit 65 stores a look-up table obtained by converting the relation curve shown in FIG. 8 or FIG. 9 into a reference table. Thereafter, in step ST12 described in the first embodiment,
The display unit 18 displays the flow velocity V, the flow rate Q, and the like based on the display data D18.

このように、第2の実施例としての超音波流量計100によれば、演算手段30に制御
部36’を備え、超音波検出データDIN=I2(θ1),I1(θ2)の間の受信強度比
I2(θ1)/I1(θ2)を演算し、図8及び図9に示した関係曲線から流速Vを読み
出すようにメモリ部65を制御する。
As described above, according to the ultrasonic flowmeter 100 as the second embodiment, the calculation unit 30 includes the control unit 36 ', and reception between the ultrasonic detection data DIN = I2 (θ1) and I1 (θ2). The intensity ratio I2 (θ1) / I1 (θ2) is calculated, and the memory unit 65 is controlled so as to read the flow velocity V from the relationship curves shown in FIGS.

この制御によって、検出器#1,#2から交互に送信される超音波の指向性変位を利用
して被測定流体の流速Vや流量Qを測定できるようになる。しかも、第1の実施例と同様
な効果に加えて、放射角θx=θ1、θ2の演算を省略できるようになる。
By this control, the flow velocity V and the flow rate Q of the fluid to be measured can be measured using the directional displacement of the ultrasonic waves transmitted alternately from the detectors # 1 and # 2. In addition to the same effects as those of the first embodiment, the calculation of the radiation angles θx = θ1 and θ2 can be omitted.

なお、流速Vが小さい(例えば、30m/s未満)ときは、従来技術のように通過時間差
法に切り換え、そのままの超音波検出データDIN=I2(θ1),I1(θ2)の入力波
形を使用して時間差を見て流速Vを求めるようにしてもよい。
When the flow velocity V is small (for example, less than 30 m / s), switch to the passing time difference method as in the prior art and use the input waveform of the ultrasonic detection data DIN = I2 (θ1), I1 (θ2) as they are. Then, the flow velocity V may be obtained by looking at the time difference.

この発明は、超音波の指向性変位を利用して被測定流体の大流速を測定可能とした流量
計に適用して極めて好適である。
The present invention is extremely suitable when applied to a flow meter that can measure a large flow velocity of a fluid to be measured by utilizing a directional displacement of ultrasonic waves.

#1 検出器(第1の送受信超音波振動子)
#2 検出器(第2の送受信超音波振動子)
3 測定管
11,21 振動子
12,22 音響整合材
14 操作部
18 表示部
30 演算手段
31 発振器
32 送信部
33 送受信切換部
34 受信部
35 A/D変換部
36,36’制御部
61 信号角度変換部
62,64 演算部
63,65 メモリ部(記憶部)
100 超音波流量計
# 1 detector (first transmitting / receiving ultrasonic transducer)
# 2 Detector (second transmitting / receiving ultrasonic transducer)
DESCRIPTION OF SYMBOLS 3 Measuring tube 11, 21 Vibrator 12,22 Acoustic matching material 14 Operation part 18 Display part 30 Calculation means 31 Oscillator 32 Transmission part 33 Transmission / reception switching part 34 Reception part 35 A / D conversion part 36, 36 'Control part 61 Signal angle Conversion unit 62, 64 Calculation unit 63, 65 Memory unit (storage unit)
100 Ultrasonic flow meter

Claims (3)

測定管の直線部分を流れる被測定流体の流量を計測する超音波流量計であって、
前記測定管の一方の側の管外周部に取り付けられて、当該測定管の管軸方向と略直交する方向に超音波を送信し、他方の側からの超音波を受信する第1の送受信超音波振動子と、
前記第1の送受信超音波振動子に対して前記測定管の管軸方向に所定の距離を保って、当該測定管の他方の側の管外周部に取り付けられ、前記測定管の管軸方向と略直交する方向に超音波を送信し、他方の側からの超音波を受信する第2の送受信超音波振動子と、
前記第1の送受信超音波振動子から超音波を送信したときに前記第2の送受信超音波振動子で受信される第1の超音波検出信号の強度を測定するとともに、前記第2の送受信超音波振動子から超音波を送信したときに前記第1の送受信超音波振動子で受信される第2の超音波検出信号の強度を測定する測定手段と、
前記測定手段により測定される前記第1の超音波検出信号の強度および前記第2の超音波検出信号の強度から前記被測定流体の流速を演算する演算手段とを備え
前記演算手段は、
前記第1の送受信超音波振動子の取り付け位置を前記第2の送受信超音波振動子の取り付け位置よりも上流側とし、前記被測定流体が上流側から下流側へ測定管内を流れる場合であって、
前記測定管の管軸方向における前記第1の送受信超音波振動子と第2の送受信超音波振動子との間の距離をLとし、前記測定管の内径をDとし、前記被測定流体の流速「0」時の超音波の指向角度をθとし、前記超音波の流体音速をCとし、前記被測定流体の流速をVとして、当該流速Vの測定時の前記第1の送受信超音波振動子から送信される超音波の放射方向を示す角度をθ1とし、前記被測定流体の任意の流速測定時の前記第2の送受信超音波振動子から送信される超音波の放射方向を示す角度をθ2としたとき、(1)乃至(3)式、すなわち、
θ=tan -1 (L/D) ・・・・(1)
θ1=tan -1 (L−D/cos(θ)/C×V)/D ・・・・(2)
θ2=tan -1 (L+D/cos(θ)/C×V)/D ・・・・(3)
を演算し、
θ1の値は、前記第1の超音波検出信号の強度とθ1の値とを対応付けたテーブルに基づいて定められ、
θ2の値は、前記第2の超音波検出信号の強度とθ2の値とを対応付けたテーブルに基づいて定められることを特徴とする超音波流量計。
An ultrasonic flowmeter that measures the flow rate of a fluid to be measured flowing through a straight portion of a measurement tube,
Wherein mounted on the pipe outer peripheral portion of one side of the measuring tube, first transceiver that transmits ultrasound in a direction substantially perpendicular to the tube axis direction of the measuring tube, receives the ultrasonic wave from the side of the other lateral An ultrasonic transducer,
A predetermined distance is maintained in the tube axis direction of the measurement tube with respect to the first transmission / reception ultrasonic transducer, and the tube is attached to the outer periphery of the tube on the other side of the measurement tube. transmitting ultrasonic waves in a direction substantially orthogonal, and the second transmitter ultrasonic transducer for receiving ultrasonic waves from the side of the other hand,
When the ultrasonic wave is transmitted from the first transmission / reception ultrasonic transducer, the intensity of the first ultrasonic detection signal received by the second transmission / reception ultrasonic transducer is measured, and the second transmission / reception ultrasonic transducer is measured. Measuring means for measuring the intensity of the second ultrasonic detection signal received by the first transmission / reception ultrasonic transducer when transmitting ultrasonic waves from the ultrasonic transducer;
Calculating means for calculating the flow velocity of the fluid under measurement from the intensity of the first ultrasonic detection signal and the intensity of the second ultrasonic detection signal measured by the measuring means ;
The computing means is
The mounting position of the first transmission / reception ultrasonic transducer is the upstream side of the mounting position of the second transmission / reception ultrasonic transducer, and the fluid to be measured flows in the measuring tube from the upstream side to the downstream side. ,
The distance between the first transmission / reception ultrasonic transducer and the second transmission / reception ultrasonic transducer in the tube axis direction of the measurement tube is L, the inner diameter of the measurement tube is D, and the flow velocity of the fluid to be measured The first transmitting / receiving ultrasonic transducer at the time of measurement of the flow velocity V, where θ is the directivity angle of the ultrasonic wave at “0”, C is the fluid sound velocity of the ultrasonic wave, and V is the flow velocity of the fluid to be measured. An angle indicating the radiation direction of the ultrasonic waves transmitted from the second transmitting / receiving ultrasonic transducer at the time of measuring an arbitrary flow velocity of the fluid to be measured is θ 2. (1) to (3), that is,
θ = tan −1 (L / D) (1)
θ1 = tan −1 ( LD / cos (θ) / C × V) / D (2)
θ2 = tan −1 (L + D / cos (θ) / C × V) / D (3)
And
The value of θ1 is determined based on a table in which the intensity of the first ultrasonic detection signal is associated with the value of θ1.
The value of θ2 is determined based on a table in which the intensity of the second ultrasonic detection signal and the value of θ2 are associated with each other.
前記流体音速C又は前記第1の送受信超音波振動子と第2の送受信超音波振動子との距離Lをパラメータとして、前記第1及び第2の超音波検出信号の間の強度比に対応する前記被測定流体の流速Vとの関係を参照テーブルとして記憶する記憶部を備え、
前記演算手段は、前記第1の送受信超音波振動子の超音波の指向性変位成分を含む第2の超音波検出信号を前記第2の送受信超音波振動子から入力し、交互に前記第2の送受信超音波振動子の超音波の指向性変位成分を含む第1の超音波検出信号を前記第1の送受信超音波振動子から入力し、前記第1及び第2の超音波検出信号の間の強度比を演算し、前記第1及び第2の超音波検出信号の間の強度比に対応する前記被測定流体の流速Vを前記記憶部から読み出すことを特徴とする請求項に記載の超音波流量計。
Corresponding to the intensity ratio between the first and second ultrasonic detection signals with the fluid sound velocity C or the distance L between the first transmission / reception ultrasonic transducer and the second transmission / reception ultrasonic transducer as a parameter. A storage unit for storing a relationship with the flow velocity V of the fluid to be measured as a reference table;
The calculation means inputs a second ultrasonic detection signal including a directional displacement component of ultrasonic waves of the first transmission / reception ultrasonic transducer from the second transmission / reception ultrasonic transducer, and alternately performs the second transmission / reception ultrasonic transducer. A first ultrasonic detection signal including a directional displacement component of ultrasonic waves of the transmission / reception ultrasonic transducer is input from the first transmission / reception ultrasonic transducer, and between the first and second ultrasonic detection signals. of the intensity ratios calculated, according to the flow velocity V of the fluid to be measured that corresponds to the intensity ratio between the first and second ultrasonic detection signals to claim 1, characterized in that read from the storage unit Ultrasonic flow meter.
測定管の直線部分に流れる被測定流体の流量を超音波の指向性変位を利用して計測する流量測定方法であって、
前記測定管の一方の側の管外周部に取り付けられて、当該測定管の管軸方向と略直交する方向に超音波を送信し、他方の側からの超音波を受信する第1の送受信超音波振動子と、前記第1の送受信超音波振動子に対して前記測定管の管軸方向に所定の距離を保って、当該測定管の他方の側の管外周部に取り付けられ、前記測定管の管軸方向と略直交する方向に超音波を送信し、他方の側からの超音波を受信する第2の送受信超音波振動子と、
を用い、
前記第1の送受信超音波振動子から超音波を送信したときに前記第2の送受信超音波振動子で受信される第1の超音波検出信号の強度を測定するとともに、前記第2の送受信超音波振動子から超音波を送信したときに前記第1の送受信超音波振動子で受信される第2の超音波検出信号の強度を測定する測定ステップと、
前記測定ステップにより測定される前記第1の超音波検出信号の強度および前記第2の超音波検出信号の強度から前記被測定流体の流速を演算する演算ステップとを実行し、
前記演算ステップでは、
前記第1の送受信超音波振動子の取り付け位置を前記第2の送受信超音波振動子の取り付け位置よりも上流側とし、前記被測定流体が上流側から下流側へ測定管内を流れる場合であって、
前記測定管の管軸方向における前記第1の送受信超音波振動子と第2の送受信超音波振動子との間の距離をLとし、前記測定管の内径をDとし、前記被測定流体の流速「0」時の超音波の指向角度をθとし、前記超音波の流体音速をCとし、前記被測定流体の流速をVとして、当該流速Vの測定時の前記第1の送受信超音波振動子から送信される超音波の放射方向を示す角度をθ1とし、前記被測定流体の任意の流速測定時の前記第2の送受信超音波振動子から送信される超音波の放射方向を示す角度をθ2としたとき、(1)乃至(3)式、すなわち、
θ=tan -1 (L/D) ・・・・(1)
θ1=tan -1 (L−D/cos(θ)/C×V)/D ・・・・(2)
θ2=tan -1 (L+D/cos(θ)/C×V)/D ・・・・(3)
を演算し、
θ1の値は、前記第1の超音波検出信号の強度とθ1の値とを対応付けたテーブルに基づいて定められ、
θ2の値は、前記第2の超音波検出信号の強度とθ2の値とを対応付けたテーブルに基づいて定められることを特徴とする流量測定方法。
A flow rate measuring method for measuring a flow rate of a fluid to be measured flowing in a straight portion of a measurement tube using a directional displacement of an ultrasonic wave,
Wherein mounted on the pipe outer peripheral portion of one side of the measuring tube, first transceiver that transmits ultrasound in a direction substantially perpendicular to the tube axis direction of the measuring tube, receives the ultrasonic wave from the side of the other lateral The ultrasonic transducer and the first transmitting / receiving ultrasonic transducer are attached to a pipe outer peripheral portion on the other side of the measurement tube at a predetermined distance in the tube axis direction of the measurement tube , and the measurement A second transmitting / receiving ultrasonic transducer that transmits ultrasonic waves in a direction substantially orthogonal to the tube axis direction of the tube and receives ultrasonic waves from the other side ;
Use
When the ultrasonic wave is transmitted from the first transmission / reception ultrasonic transducer, the intensity of the first ultrasonic detection signal received by the second transmission / reception ultrasonic transducer is measured, and the second transmission / reception ultrasonic transducer is measured. A measurement step of measuring the intensity of a second ultrasonic detection signal received by the first transmitting / receiving ultrasonic transducer when transmitting ultrasonic waves from the ultrasonic transducer;
A calculation step of calculating the flow velocity of the fluid under measurement from the intensity of the first ultrasonic detection signal and the intensity of the second ultrasonic detection signal measured by the measurement step ;
In the calculation step,
The mounting position of the first transmission / reception ultrasonic transducer is the upstream side of the mounting position of the second transmission / reception ultrasonic transducer, and the fluid to be measured flows in the measuring tube from the upstream side to the downstream side. ,
The distance between the first transmission / reception ultrasonic transducer and the second transmission / reception ultrasonic transducer in the tube axis direction of the measurement tube is L, the inner diameter of the measurement tube is D, and the flow velocity of the fluid to be measured The first transmitting / receiving ultrasonic transducer at the time of measurement of the flow velocity V, where θ is the directivity angle of the ultrasonic wave at “0”, C is the fluid sound velocity of the ultrasonic wave, and V is the flow velocity of the fluid to be measured. An angle indicating the radiation direction of the ultrasonic waves transmitted from the second transmitting / receiving ultrasonic transducer at the time of measuring an arbitrary flow velocity of the fluid to be measured is θ 2. (1) to (3), that is,
θ = tan −1 (L / D) (1)
θ1 = tan −1 ( LD / cos (θ) / C × V) / D (2)
θ2 = tan −1 (L + D / cos (θ) / C × V) / D (3)
And
The value of θ1 is determined based on a table in which the intensity of the first ultrasonic detection signal is associated with the value of θ1.
The value of θ2 is determined based on a table in which the intensity of the second ultrasonic detection signal and the value of θ2 are associated with each other.
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