JP5754281B2 - Irradiation device - Google Patents

Description

  The present invention relates to an irradiation apparatus that irradiates with uniform illuminance, and particularly relates to a technique for realizing high illuminance.

Conventionally, a pseudo solar device that emits light having substantially the same spectral characteristics as sunlight (hereinafter referred to as “pseudo-sunlight”) is known. It is widely used for the evaluation of the characteristics and the light resistance test of various devices (see, for example, Patent Document 1).
Incidentally, in the field of solar cells, dye-sensitized solar cells are known as a kind of solar cells (see, for example, B. O'Regan and M. gratzel: Nature 353 (1991) 737). Dye-sensitized solar cells have lower photoelectric conversion efficiency than Si solar cells, but they can be manufactured at low cost because they do not require large-scale equipment such as semiconductor manufacturing equipment required for Si solar cells, and the structure is simple. Since it is easily mass-produced, it is used as a power source for devices with low power consumption.

JP 2009-264991 A

By the way, since the dye-sensitized solar cell can obtain high conversion efficiency under an indoor light source or under low illuminance as compared with an existing silicon solar cell, it is being applied to equipment used indoors.
Therefore, in order to evaluate and test the characteristics of this dye-sensitized solar cell, if an irradiation device that irradiates light of a light amount suitable for the dye-sensitized solar cell is configured, this irradiation device uses outdoor sunlight. The amount of light is too low to test a power generating Si solar cell. Therefore, in order to increase the amount of light, it is necessary to replace the lamp as the light source and increase the output.Accordingly, in order to eliminate unevenness in illuminance, complicated work such as readjustment of the arrangement position of the optical system is required. Necessary.

  This invention is made | formed in view of the situation mentioned above, and aims at providing the irradiation apparatus which can raise illumination intensity easily.

In order to achieve the above object, the present invention provides a light source that emits light, an integrator optical system that uniformly outputs the light from the light source, and an optical element that projects light emitted from the integrator optical system onto a test object. And an optical system for high illuminance that is installed when obtaining high illuminance and can be removed when not needed, between the optical element and the test object, and the high illuminance The optical system includes a close-up lens, and a diffusion plate that is diffused so that a focal position of light that has passed through the close-up lens spreads along the optical axis in front of the close-up lens. .
Moreover, the present invention is characterized in that, in the irradiation apparatus, a diffusion angle of the diffusion plate is set to 10 degrees or less.

  According to the present invention, since the close-up lens is provided between the optical element for projecting the emitted light of the integrator optical system onto the test object and the test object, the high illuminance and illuminance unevenness obtained by the close-up lens are eliminated. The object can be irradiated with light.

It is a figure which shows schematic structure of the irradiation apparatus which concerns on embodiment of this invention. It is the figure which looked at the irradiation stand from diagonally upward. (A) is a perspective view which shows the light-receiving part of an illuminance meter with a light-receiving part holder, (B) is the sectional side view. (A) is a figure which shows the state which mounted | wore the irradiation stand with the light-receiving part, (B) is the sectional side view. It is a front side perspective view of a light modulation apparatus. It is a figure which shows the structure of a light modulation apparatus, (A) is a front view, (B) is a rear view, (C) is a top view, (D) is a side view. It is a figure which shows typically the optical system for high illumination intensity with a periphery structure. It is a figure which shows the comparative example at the time of comprising the high illumination optical system only with a close-up lens. It is the figure which further described other emitted light of the said comparative example.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a diagram illustrating a schematic configuration of an irradiation apparatus 1 according to the present embodiment.
The irradiation device 1 is a device used as a light source for a characteristic evaluation test of a Si solar cell, a compound solar cell, an organic thin film solar cell, and a dye-sensitized solar cell. Irradiate with sunlight, and irradiate with illumination light when the evaluation object is a dye-sensitized solar cell. This illumination light is light imitating the light of the light source of the indoor lighting lamp. In the present embodiment, the light from the fluorescent lamp, the light from the white LED, and the light from the halogen lamp can be selectively irradiated as the light emitted from the light source of the indoor lighting fixture. Of course, a light source other than those described above may be used as the light source of the indoor lighting lamp or the indoor lighting light source, and the light simulating the light of the outdoor lighting lamp such as a street lamp may be used as the illumination light.

The irradiation apparatus 1 includes a box-shaped housing 2 as shown in FIG. The housing 2 has a device light source 4, a sample stage 6 on which a sample to be tested (in this embodiment, a Si solar cell or a dye-sensitized solar cell) 14 is mounted, and the light from the device light source 4 is sampled. A light guide optical system 8 that leads to the table 6 and irradiates the test object is provided, and a light control device 70 is disposed between the device light source 4 and the light guide optical system 8. A high illuminance optical system 80 for obtaining high illuminance is disposed between the light guiding optical system 8 and the sample stage 6.
The high-illuminance optical system 80 is configured to be detachable from the irradiation apparatus 1 and can be installed from outside when the measurer needs it, and can be removed when not needed. In addition, an operation touch panel 71 is disposed outside the housing 2. This operation touch panel 71 is connected via a PLC (programmable logic controller) control device 72 to turn on / off the lamp 10 of the device 1 or the device light source 4, display illuminance at the time of installing the illuminometer, dimming operation, dimming rate Display and error display. The same operation can be performed with an external PC (personal computer) 75 described later.
The device light source 4 includes a lamp 10 and a reflecting mirror 12 that condenses the emitted light of the lamp 10 and is configured to output light upward (vertically upward direction). The lamp 10 has a broad spectral characteristic in the entire wavelength range, and for example, a xenon lamp or a halogen lamp can be used, but the halogen lamp has other spectral components on the short wavelength side (wavelength of about 400 to 500 nm or less). Since it is smaller than the wavelength region, a xenon lamp is used in this embodiment.

  Here, in the present embodiment, the wavelength band indicated by the entire wavelength band is a band including each band necessary for each of various tests performed in the irradiation apparatus 1. For example, in the evaluation of solar cell characteristics, when a Si crystal solar cell is used as a test target, light in the band of 400 nm to 1100 nm is required as pseudo-sunlight, and a Si amorphous solar cell is tested. In the case of a target, light in a band of 350 nm to 750 nm is required as pseudo-sunlight, and further, in the case of a dye-sensitized solar cell, light in a band of 400 nm to 900 nm is required as irradiation light. Therefore, when these tests are performed by the irradiation apparatus 1, the wavelength band of 350 nm to 1100 nm corresponds to the entire wavelength band, and the apparatus light source 4 emits light having a broad spectrum characteristic in the entire wavelength band.

The sample table 6 includes a flat irradiation table 6A on which the sample 14 is placed, and a pedestal 6C that supports the irradiation table 6A via a column part 6B. Immediately above the sample stage 6, a light exit opening 16 is provided at a position approximately 650 mm away from the sample stage 6 at the maximum, and light that sequentially spreads from the exit opening 16 is irradiated onto the sample stage 6. The sample stage 6 is supported by the elevating mechanism 7 so that the height position thereof can be adjusted toward the emission opening 16, whereby the irradiation range of light irradiation on the sample stage 6 can be adjusted.
The raising / lowering mechanism 7 is driven by the raising / lowering drive part 7A comprised with an electric motor etc., and raises / lowers the base 6C of the sample stand 6. FIG. In the present embodiment, the elevating drive unit 7A is controlled by the external PC 75 via the PLC control device 72 provided inside the device. Further, the external PC 75 includes an illuminance meter (in FIG. 1, reference numeral 7B indicates a light receiving portion of the illuminance meter and reference numeral 7C indicates an illuminance meter main body) that measures the illuminance of light from the emission opening 16. 72. The external PC 75 sets the target illuminance according to the sample 14 or the test content, and adjusts the illuminance of the sample 14 to the target illuminance by feedback control of the elevating drive unit 7A so that the measured illuminance of the illuminometer becomes the target illuminance. To do. Note that the same operation (elevating operation of the sample stage 6) may be enabled by operating the operation touch panel 71.
The irradiation table 6A is configured to be removable. For example, when confirming the illuminance distribution in the irradiation area, the measurer can easily locate the light receiving portion 7B of the illuminometer with a measurement point (for example, 25 points in the plane) and a groove with which the measurement height can be positioned. This is to make it possible to replace the stand.

FIG. 2 is a view of the irradiation stand 6A as viewed obliquely from above, FIG. 3A is a perspective view showing the light receiving portion 7B of the illuminometer together with the light receiving portion holder 5, and FIG. 3B is a side sectional view thereof. It is. 4A is a view showing a state where the light receiving portion 7B is mounted on the irradiation stand 6A, and FIG. 4B is a side sectional view thereof.
As shown in FIG. 2, a through hole H1 penetrating vertically is provided at the center of the irradiation part of the irradiation stand 6A. The through hole H1 includes a long groove H2 extending linearly and a length of the long groove H2. A circular hole H3 provided in the center of the direction. The light receiving unit 7B of the illuminometer is fixed to a dedicated light receiving unit holder 5 (see FIGS. 3A and 3B). As shown in FIGS. 3A and 3B, the light receiving unit holder 5 includes a cylindrical member 5A that surrounds the periphery of the light receiving unit 7B, and a pressing member 5B that holds the light receiving unit 7B in the cylindrical member 5A from below. The illuminometer cable 5C connected to the light receiving portion 7B is pulled out from the side of the light receiving portion holder 5.

The outer shape of the light-receiving unit holder 5 is a shape that fits into the circular hole H3 of the irradiation table 6A, whereby the light-receiving unit 7B passes through the light-receiving unit holder 5 to the irradiation unit central surface (irradiation table) of the sample table 6. It is fitted so as to be buried in the center surface of the irradiated portion of 6A. With this configuration, the sensor surface provided on the upper surface of the light receiving unit 7B has substantially the same height as the surface of the sample table 6, and the illuminance on the surface of the sample table 6 can be detected with high accuracy.
In this case, the illuminometer cable 5C pulled out from the light receiving unit holder 5 to the side is easily pulled out from the sample stage 6 by passing through the long groove H2 of the through hole H1. In addition, an annular seal member 5D is mounted on the outer periphery of the cylindrical member 5A of the light receiving unit holder 5, and the gap between the light receiving unit holder 5 and the irradiation table 6A is closed and received by the seal member 5D. The part holder 5 is prevented from coming off. Note that the light receiving unit 7B of the illuminometer is not limited to being completely buried, but a part of the sensor surface protrudes from the sample stage 6 so that the sensor surface is substantially the same as the surface of the sample 14 placed on the sample stage 6. May be. In this case, the illuminance meter can accurately detect the illuminance on the surface of the sample 14. The light receiving unit holder 5 to which the light receiving unit 7B of the illuminometer is fixed is configured to be detachable from the irradiation table 6A, and can be used only when it is desired to measure the central illuminance.

  In addition, the irradiation apparatus 1 includes a probe P that is electrically connected to a solar cell as a sample 14 by touching it. This probe P extends from an electrical measuring instrument 76 provided below the sample stage 6 through a cable wiring hole 77, and after passing through a small diameter hole 6D in a base 6C located on the back side of the irradiation stage 6A, irradiation measurement is performed. Enter into the space. In this case, the probe P is configured as a movable probe that is routed around the irradiation table 6A after passing through the hole 6D of the base 6C and contacts the sample 14 located on the front side of the irradiation table 6A. Yes. The small-diameter hole 6D is located on the back side of the irradiation table 6A and is formed to a minimum size necessary for the probe P to pass therethrough. In this way, by allowing the probe P to enter from the minimum necessary hole 6D on the back side of the irradiation table 6A, the light outside the apparatus does not affect the cells of the solar battery as the sample 14.

The light guide optical system 8 is one of integrator optical elements that makes the illuminance distribution and color distribution of the light from the apparatus light source 4 uniform to suppress the occurrence of illuminance unevenness and color unevenness on the irradiated surface. A glass rod (rod integrator) 18 and a lens unit 20 are provided, and these are arranged on the same optical axis. A mirror 22 is disposed on the optical axis K1 of the apparatus light source 4 to change the traveling direction of the light of the apparatus light source 4 to the horizontal direction, and the reflected light from the mirror 22 enters the incident end face 18A of the glass rod 18. The
The glass rod 18 constitutes an integrator optical system that uniformizes and outputs the light from the device light source 4, and outputs light with no unevenness of illumination from the exit end face 18 </ b> B to enter the lens unit 20. The lens unit 20 constitutes an optical element that projects the emitted light having a uniform illuminance distribution on the exit surface of the glass rod 18 onto the sample 14 that is a test object, and outputs an enlarged beam diameter of incident light. The lens unit 20 is carried by a projection lens position adjustment mechanism 43. The projection lens position adjustment mechanism 43 moves the lens unit 20 in the direction of the optical axis K2 via a rail extending along the optical axis K2. Adjust.
On the optical axis K2 of the exit end 20A of the lens unit 20, a mirror 24 that changes the light traveling direction of the lens unit 20 to a direct downward direction is disposed. The sample stage 6 is positioned on the optical axis K3 of the reflected light of the mirror 24, whereby light is guided and irradiated on the sample stage 6 installed immediately below the mirror 24. The light control device 70 and the high illumination optical system 80 will be described later.

Next, the structure of the housing 2 will be described. The interior of the housing 2 is roughly divided into an electrical component chamber 30 that houses various electrical circuits such as an electrical circuit that lights the device light source 4, and the device light source 4. An apparatus containing a light source chamber 32, an optical system chamber 34 containing a light guide optical system 8, a sample installation chamber 36 containing a sample stage 6, a PLC control device 72, an electric measuring instrument 76, and an illuminometer main body 7C. It is partitioned into a chamber 37.
The electrical component chamber 30 and the light source chamber 32 are stacked one above the other, and a sample installation chamber 36 is disposed side by side and adjacent to them, and above the light source chamber 32 and the sample installation chamber 36 from these light source chambers 32. An optical system chamber 34 is provided across the sample installation chamber 36. In such a configuration, since the device light source 4, the light guide optical system 8, and the sample stage 6 are arranged in a gate shape (lower U-shape), a small device that suppresses the width of the irradiation device 1 and Become.
Maintenance doors 40A to 40C are installed in the electrical component chamber 30, the light source chamber 32, and the optical system chamber 34, respectively. The electric parts chamber 30 is provided with a propeller fan 50 for internal cooling, the optical system chamber 34 is provided with a lamp cooling fan 52 and a filter cooling fan 53, and the sample installation chamber 36 is provided with a hood. An internal exhaust fan 54 is provided. The cooling air of the lamp cooling fan 52 is supplied toward the cathode base portion of the lamp 10 that needs to be cooled most through a tube and a nozzle (not shown) provided inside the apparatus.

  The light source chamber 32 is provided with an XYZ movable adjustment stage 42 that moves the apparatus light source 4 up and down along the optical axis K1 and moves the apparatus light source 4 in a direction perpendicular to the optical axis K1 so as to be positioned. In addition, a monitor unit 56 for positioning the lamp is disposed immediately above the light source chamber 32. The lamp positioning monitor 56 is for performing lamp positioning by visual observation or by a method using an illuminometer or the like. When the lamp 10 is replaced, the position of the apparatus light source 4 is adjusted by the XYZ movable adjustment stage 42 so that the optical axis K1 of the apparatus light source 4 is adjusted to a predetermined position.

FIG. 5 is a front perspective view of the light control device 70. 6A and 6B are diagrams showing the configuration of the light control device 70. FIG. 6A is a front view, FIG. 6B is a rear view, FIG. 6C is a top view, and FIG. FIG.
The light control device 70 is disposed on the optical axis K2 and adjusts incident light. In the present embodiment, the light control device 70 further has a function of changing spectral characteristics. That is, as shown in FIGS. 5 and 6, the light control device 70 includes a device substrate 187 having a notch 187A (see FIG. 6B) through which the irradiation light along the optical axis K2 passes. In 187, one metal dimming plate 164 and a plurality of (three in the illustrated example) filter holders 162 are stacked and disposed along the optical axis K2.

The metal light control plate 164 has a slit 182 (see FIG. 6A), and the light amount passing through the metal light control plate 164 is reduced by the slit 182. The filter holder 162 is a member that carries an optical filter. In this embodiment, the filter holder 162 has a plurality of (two) ND filter holders 162A that carry an ND filter (attenuating plate) 62 that adjusts the transmittance, and spectral characteristics. And a single correction filter holder 162B carrying the spectral correction filter 64 to be adjusted.
As shown in FIG. 6A, rails 186 extending in the horizontal direction (left-right direction) are arranged in parallel on the device substrate 187 at intervals in the vertical direction, and the movable support piece 188 is slidably movable on each rail 186. Attached to. The movable support piece 188 of each rail 186 holds each of the metal dimming plate 164 and the filter holders 162A and 162B, whereby the metal dimming plate 164 and the filter holders 162A and 162B are independently extended in the direction in which the rail 186 extends. Can slide in (left and right direction).

As shown in FIG. 6A, the slit 182 of the metal light control plate 164 is formed in a slit shape (a teardrop type slit in the illustrated example) in which the opening width in the vertical direction changes along the direction in which the rail 186 extends. The diaphragm amount is varied by sliding the metal light control plate 164.
In the ND filter holder 162A, a plurality of ND filters 62 having different transmittances are arranged at intervals in the direction in which the rail 186 extends, and the transmittance is varied by sliding movement of the ND filter holder 162A.
In addition, a plurality of spectral correction filters 64 having different spectral characteristics are arranged in the correction filter holder 162B at intervals in the extending direction of the rail 186, and the spectral characteristics can be changed by sliding the correction filter holder 162B. To do.

  On the other hand, on the back side of the device substrate 187, a drive motor 189, a pulley 191, and a timing belt 190 spanning the drive motor 189 and the pulley 191 are provided for each movable support piece 188. A back side protruding piece 188A (see FIG. 6B) protruding to the back side of the movable support piece 188 is connected to the timing belt 190, and the movable support piece 188 slides by driving the timing belt 190 by the drive motor 189. Moved. That is, a slide moving mechanism 192 is configured including the movable support piece 188, the rail 186, the drive motor 189, the pulley 191, and the timing belt 190.

The operation touch panel 71 and the external PC 75 are provided with an operator for instructing increase / decrease in the amount of light and an operator (not shown) for instructing change in spectral characteristics, and based on the instruction for increase / decrease in the amount of light, the drive motor of the light control device 70 189 is driven, and the combination of the transmission ratio of the metal light control plate 164 and the ND filter 62 of the ND filter holder 162A is automatically changed to change the light transmittance and to control the light control, and to change the spectral characteristics Based on the above, the drive motor 189 is driven, and the spectrum correction filter 64 of the correction filter holder 162B is automatically changed to change the spectrum characteristics.
Thus, in this embodiment, between the apparatus light source 4 and the light guide optical system 8, the metal dimming plate 164, the ND filter holder 162A having a plurality of ND filters 62 having different transmittances, and the mutual By adjusting the position of the correction filter holder 162B having the spectral correction filter 64 having different spectral characteristics, it is possible to finely adjust various light amounts and spectral characteristics.

  In addition, the light adjustment plate 164 and the filter holders 162A and 162B are held on each of the plurality of rails 186 extending in parallel with each other, and these are independently slid along the rails 186, thereby adjusting the light amount and the spectral characteristics. Since the configuration is such that the metal dimming plate 164 and the filter holders 162A and 162B are not displaced in the vertical direction with respect to the optical axis K2, the metal dimming plate 164 and the filter holders 162A and 162B are only aligned in the sliding direction. Can be easily adjusted to the optical axis K2.

Next, the high illumination optical system 80 will be described.
FIG. 7 is a diagram schematically showing the high-illuminance optical system 80 together with the peripheral configuration.
The high-illuminance optical system 80 includes a close-up lens 81 and a diffusion plate 82 provided on the optical axis K3 (see FIG. 1) between the mirror 24 that turns back the emitted light from the lens unit 20 and the sample stage 6. Yes. The close-up lens 81 and the diffusing plate 82 are accommodated in a common housing 83. The housing 83 is detachable from the irradiation device 1, and is installed when the measurer needs it. Can be removed. Since the housing 83 is heavy, it is attached via a slide mechanism that slides the housing 83 so that the housing 83 can be easily moved and the housing 83 can be positioned and fixed during installation. It is configured.
The close-up lens 81 is used as an optical lens that enables photographing at a closer distance than a single lens by attaching it to a general lens in a conventional photographing camera. In the present embodiment, the light L1 that is made uniform by the glass rod 18 that is an integrator optical element and the beam diameter is enlarged by the lens unit 20 is projected toward the sample stage 6 via the close-up lens 81, High illuminance can be obtained at the focal position S0 of the close-up lens 81.

Here, FIGS. 8 and 9 show comparative examples in the case where the high-illuminance optical system 80 includes only the close-up lens 81. 7 to 9, a part of the light L1 is shown for easy understanding. 7 and 8 show light corresponding to the outgoing lights L2A, L2B, and L2C among the outgoing lights L2A to L2I of the close-up lens 81 shown in FIG. 9, and the other outgoing lights L2D to L2I are illustrated. Omitted.
As shown in FIGS. 8 and 9, when only the close-up lens 81 is used, high illuminance is obtained at the focal position S0, but when the lens is shifted back and forth from the focal position S0, there are relatively high and low illuminance portions. Occurs, which results in uneven illuminance and low uniformity. For this reason, in order to uniformly illuminate the sample 14 arranged on the sample stage 6 with high illuminance, the position of the sample 14 must be adjusted to the focal position S0 with high accuracy, and the alignment work becomes complicated.

On the other hand, in the present embodiment, as shown in FIG. 7, since the diffusion plate 82 is provided on the optical axis K <b> 3 at the front stage (incident side) of the close-up lens 81, the light L <b> 1 is diffused by the diffusion plate 82. After that, the light enters the close-up lens 81, and emitted light L2A, L2B, L2C, L2B1, L2B2, L2C1, L2C2 is emitted from the close-up lens 81.
Here, the outgoing lights L2B1, L2B2, L2C1, and L2C2 are light newly obtained by the diffused light. In FIG. 7, the position S0 indicates the focal position of the outgoing light L2A, and the position S1 is the outgoing light L2B1 of the diffused light. The position S2 indicates the focal position of the emitted light L2B2 of the diffused light. The light L2B1, L2B2, L2C1, and L2C2 obtained by the diffused light has an effect of averaging the unevenness of the illuminance, and thereby, the front and rear positions in the vicinity of the focal position S0 (for example, positions S1 to S1 shown in FIGS. 7 to 9). Illuminance unevenness within the range X of (S2 etc.) is suppressed.
That is, this range X corresponds to the depth of focus which is a range that can be regarded as being in focus, and in this embodiment, it is possible to ensure a long depth of focus of the close-up lens 81, high illuminance and high uniformity. A long range X can be secured.

  The diffusion plate 82 is set to a characteristic having a diffusion angle equal to or wider than the pitch of the unevenness of illuminance, thereby averaging the illuminance unevenness. However, if the diffusion angle of the diffusing plate 82 is too wide and wider than the width of the irradiation area, a characteristic that the amount of light decreases as it goes to the periphery of the diffusing plate 82 appears. It is difficult to ensure uniform brightness within the width of a wide irradiation area. Therefore, in this embodiment, by setting the diffusion angle of the diffusion plate 82 to 10 ° or less, uniform brightness is ensured while ensuring a diffusion angle equal to or wider than the pitch of the unevenness of the illuminance. I am doing so. The diffusion angle is a value obtained by displaying the half value of the central illuminance in full angle.

As described above, according to this embodiment, since the close-up lens 81 is provided between the lens unit 20 and the sample stage 6 on which the sample 14 is placed, the high illuminance and illuminance obtained by the close-up lens 81 can be obtained. The sample 14 can be irradiated with light without unevenness.
Further, according to the present embodiment, since the diffusion plate 82 is provided in front of the close-up lens 81, the high level obtained by the close-up lens 81 can be obtained without replacing the lamp 10 of the apparatus light source 4 and increasing the lamp light quantity. While irradiating the sample 14 with light having no illuminance and no illuminance unevenness, the range X in which the desired high illuminance and high uniformity can be obtained by the diffusion plate 82 can be widened to facilitate alignment of the sample 14.
In this case, the illuminance obtained in the above range X can be easily adjusted by adjusting the beam diameter of the light L1 incident on the close-up lens 81 by the lens unit 20. Specifically, if the beam diameter is decreased, the illuminance in the range X can be increased, and if the beam diameter is increased, the illuminance in the range X can be decreased.
Therefore, in this embodiment, characteristic evaluation is performed as in a Si solar cell or a dye-sensitized solar cell without requiring a complicated operation such as replacing the lamp 10 or finely adjusting the position of the sample 14. It becomes possible to irradiate the illumination light according to the device from which the suitable light source which should be irradiated in the case of a test etc. differs, and it can test each device.

In the present embodiment, since the diffusion angle of the diffusion plate 82 is 10 degrees or less, uniform brightness can be ensured in a desired irradiation area.
In the present embodiment, since the light control device 70 having a light control function is provided in the front stage of the lens unit 20, the illuminance obtained in the above range X can also be adjusted by the light control device 70. Is possible.

Each embodiment described above shows only one aspect of the present invention, and can be arbitrarily modified and applied without departing from the spirit of the present invention.
For example, in the above embodiment, the case where the diffusing plate 82 is provided in the front stage (incident side) of the close-up lens 81 is illustrated, but the present invention is not limited thereto, and the diffusing plate 82 is provided in the rear stage (outgoing side) of the close-up lens 81. You may do it. In addition, for example, a microlens array having a diffusion effect of 10 ° or less can be used instead of the diffusion plate.

1 Irradiation device 4 Device light source (light source)
6 Sample stage 8 Optical system for light guide 14 Sample (test object)
18 Glass rod (integrator optical element)
20 Lens unit (optical element)
70 Light control device 75 External PC
80 Optical system for high illumination 81 Close-up lens 82 Diffuser K1-K3 Optical axis

Claims (2)

In an irradiation apparatus comprising: a light source that emits light; an integrator optical system that uniformizes and outputs light from the light source; and an optical element that projects light emitted from the integrator optical system onto a test object.
Between the optical element and the test object, it is installed when obtaining high illuminance, and includes an optical system for high illuminance that can be removed when unnecessary.
The high intensity optical system includes a close-up lens, in front of the close-up lens, that focus position of the light passing through the close-up lens and a diffusion plate that diffuses so as to extend along the optical axis A characteristic irradiation device.   The irradiation apparatus according to claim 1, wherein a diffusion angle of the diffusion plate is 10 degrees or less.

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