JP5771111B2 - Jig for forming sensitive film and method for forming sensitive film - Google Patents

Description

  The present invention relates to a sensitive film forming jig used when a sensitive film is formed on an excitation electrode of a crystal resonator element, and a sensitive film forming method for forming a sensitive film using the sensitive film forming jig.

  A quartz resonator element in which a sensitive film is formed on an excitation electrode is used for a quartz crystal microbalance sensor capable of detecting a minute amount, for example, 1 μg.

Hereinafter, the quartz crystal microbalance is referred to as a QCM sensor.
Further, a crystal vibration element used for a QCM sensor and having a sensitive film formed on an excitation electrode of the crystal vibration element is referred to as a QCM sensor element, and the QCM sensor element includes a crystal vibration element and a sensitive film.

The quartz resonator element includes at least a quartz piece, an excitation electrode, and an extraction electrode.
As the crystal piece, a crystal member, which is a piezoelectric material, is used, and has a flat plate shape, for example.
The excitation electrodes are, for example, two pairs. One excitation electrode is provided on one main surface of the crystal piece, and the other excitation electrode is the other main surface of the crystal piece and is provided on one excitation electrode. It is provided at an opposing position.
For example, two pairs of extraction electrodes are provided. One extraction electrode has one end connected to one excitation electrode and the other end positioned at the end of the main surface of the crystal piece. The other extraction electrode has one end connected to the other excitation electrode, and the other end positioned at the end of the main surface of the crystal piece.
Such a crystal resonator element has a characteristic that when a voltage is applied to the extraction electrode, a voltage is applied to the excitation electrode and the crystal piece sandwiched between the excitation electrodes vibrates at a predetermined frequency.

The sensitive film has a property of reacting with a predetermined substance.
The sensitive film is formed by dropping a predetermined liquid material and curing or drying the liquid material.
Here, the sensitive film is formed by, for example, being dropped and cured on one excitation electrode of the quartz crystal vibration element. The liquid material is made of, for example, a polymer lipid.

Therefore, in the QCM sensor element, a sensitive film that reacts with a predetermined substance is formed on one excitation electrode of the quartz crystal vibration element. When the QCM sensor element is provided in an atmosphere containing the predetermined substance, the predetermined substance is quartz. It is configured to react and adhere to a sensitive film formed on one excitation electrode of the vibration element.
For this reason, according to the QCM sensor element, when a predetermined substance adheres to one excitation electrode, the frequency at which the crystal piece of the crystal vibrating element vibrates is changed by the weight of the predetermined substance. The weight of the predetermined substance to which the film has reacted and adhered can be calculated.
That is, the QCM sensor element is configured to be able to detect a predetermined substance that reacts with the sensitive film from the amount of change in frequency at which the sensitive film reacts and the quartz piece of the quartz crystal vibrating element vibrates (for example, Patent Documents). 1).

As a sensitive film forming method for forming a sensitive film on one excitation electrode of a crystal resonator element, for example, as disclosed in Patent Document 2, there is a method of forming a sensitive film using a spin coater device.
Specifically, such a sensitive film forming method includes a mounting process, an arrangement process, a dropping process, and a curing process.

(Installation process)
The mounting process is, for example, a process of mounting a crystal resonator element on a sensitive film forming jig.
The sensitive film forming jig includes, for example, a flat plate portion and a plurality of column portions, and the plurality of column portions are provided on one main surface of the flat plate portion.
In addition, the sensitive film forming jig is arranged in a state where the crystal resonator element is arranged so that the main surface of the crystal resonator element is in contact with one main surface of the flat plate portion while the side surface of the crystal resonator element is in contact with the side surface of the column portion. When the crystal resonator element is rotated in-plane on one main surface of the flat plate portion, the center of one main surface of the mounted crystal resonator element can continue to be located on the rotation axis of the flat plate portion, and It has become.

(Arrangement process)
For example, the placement step is a step of placing a sensitive film forming jig on which a crystal resonator element is mounted on a spin coater device.

(Drip process)
The dropping step is, for example, a step of dropping a liquid material that becomes a sensitive film toward one excitation electrode of a crystal resonator element rotated by a spin coater device.
Further, in the dropping step, since the liquid material is dropped while the crystal vibrating element is rotating, the liquid material is spread uniformly on the main surface of the crystal piece on which the liquid material is dropped. Therefore, when it is dropped on one main surface of the crystal piece, after the dropping step, the liquid material that becomes the sensitive film is dropped on the one excitation electrode and the extraction electrode.

(Curing process)
The curing step is a step of forming the sensitive film by curing the dropped liquid material with the sensitive film forming jig taken out from the spin coater.

  Therefore, the sensitive film forming method using the spin coater device is arranged in the spin coater device so as to rotate in-plane on one main surface of the crystal piece in a state where the crystal vibrating element is mounted on the sensitive film forming jig, Drop the liquid material on one main surface of the crystal resonator element while the crystal resonator element is rotating, remove the jig for forming the sensitive film from the spin coater, and then cure the dropped liquid material. Is forming. At this time, the sensitive film is formed on one whole main surface of the quartz crystal element. That is, in the sensitive film forming method using the spin coater device, the sensitive film is formed on one excitation electrode and the extraction electrode of the quartz crystal vibration element.

  In addition, when forming a sensitive film on both main surfaces of a crystal resonator element, the sensitive film formed by the method of forming a sensitive film using a spin coater is first used to form the sensitive film on the other main surface of the crystal resonator element. A sensitive film is formed on one main surface of the crystal resonator element by being mounted on the sensitive film forming jig in a state of facing one main surface side of the flat plate portion of the jig, and then one main surface of the crystal resonator element is The sensitive film forming jig is mounted on the sensitive film forming jig in a state where it faces one main surface side of the flat plate portion of the sensitive film forming jig, and a sensitive film is formed on the other main surface of the crystal resonator element.

Moreover, although the case where a spin coater apparatus was used as an example of the sensitive film formation method was demonstrated, as another example, a sensitive film may be formed using a pipette.
A sensitive film forming method using a pipette is often used, for example, when a crystal vibrating element is held by a holder.

The holder is composed of, for example, a base, two pairs of fixing portions, and two pairs of legs.
The base has, for example, a rectangular parallelepiped shape.
The two pairs of fixing portions extend in the same direction from a predetermined surface of the base portion, and can be fixed while being electrically connected to the extraction electrode of the crystal resonator element.
The two pairs of leg portions extend in a direction opposite to the fixing portion from another predetermined surface of the base portion facing the surface on which the fixing portion is provided, and are electrically connected to the fixing portion.

In the method for forming a sensitive film using a pipette, for example, in a state in which a crystal piece mounted on a holder is arranged as horizontal as possible, a liquid material is dropped onto one excitation electrode and then cured and the sensitive film is formed. Is formed.
Therefore, the sensitive film forming method using a pipette forms a sensitive film by dripping and curing a liquid material that becomes a sensitive film by curing or feeling towards the excitation electrode of the crystal resonator element.

JP 2002-243608 A JP 2010-71716 A

However, when the conventional sensitive film forming jig is used, the liquid material is vibrated in a state in which the sensitive film is mounted with a crystal vibrating element and rotated by the spin coater so as to rotate in-plane on the main surface of the crystal piece. Since it is formed by being dropped and cured on one main surface of the element, a sensitive film is formed on the excitation electrode and the extraction electrode provided on one main surface of the crystal vibrating element on which the liquid material is dropped. .
For this reason, when a predetermined substance is detected by a QCM sensor element in which a conventional sensitive film forming jig is used to form a sensitive film, the predetermined substance reacts even with the sensitive film on one extraction electrode, The detection accuracy for detecting a substance is reduced.

In addition, in the conventional jig for forming a sensitive film, when a sensitive film is formed on one main surface side of a crystal resonator element, the other main surface is directly formed on the other main surface while exposing one main surface of the crystal resonator element. Since the structure is mounted in contact with the jig, there is a risk that deposits such as dust may adhere to the other excitation electrode provided on the other main surface of the crystal resonator element.
For this reason, when a predetermined substance is detected by a QCM sensor element in which a conventional sensitive film forming jig is used to form a sensitive film, the frequency is changed due to an adhering substance adhering to the other excitation electrode. There is a risk that the detection accuracy for detecting the will decrease.

In addition, the conventional jig for forming a sensitive film has a crystal vibration so that the main surface of the crystal vibrating element facing the surface on which the sensitive film is formed is in contact with the main surface of the crystal vibrating element on which the sensitive film is formed exposed. Since it is structured to mount an element, when a sensitive film is formed on both main surfaces, a crystal resonator element is mounted so that one main surface of the crystal resonator element is exposed, and one main surface of the crystal resonator element is mounted. After forming the sensitive film, it is necessary to mount the crystal vibrating element again so that the other main surface of the crystal vibrating element is exposed, and to form the sensitive film on the other main surface of the crystal vibrating element.
For this reason, when a sensitive film is formed on both main surfaces using a conventional sensitive film forming jig, the sensitive film is formed on one main surface of the crystal resonator element and on the other main surface of the crystal resonator element. Since it is necessary to mount a crystal resonator element when each film is formed, it takes time and effort, and productivity may be reduced.

In the conventional method for forming a sensitive film, a liquid material that becomes a sensitive film is formed by dropping a curing material on a quartz vibrating element mounted on a holding jig with a target dropper and curing it. It is difficult to drop the liquid material at the position, and there is a possibility that the sensitive film cannot be formed on the excitation electrode at the predetermined position.
For this reason, when a predetermined substance is detected by a QCM sensor element on which a sensitive film is formed using a conventional sensitive film forming method, the sensitive film is not formed on the excitation electrode of the crystal resonator element, and the predetermined substance is detected. The detection accuracy may be reduced,

In addition, the conventional method for forming a sensitive film is such that a quartz vibrating element is mounted on a conventional jig for forming a sensitive film so that the main surface of the quartz vibrating element for forming the sensitive film is exposed, and the conventional sensitive film is formed by a spin coater device. A liquid material that becomes a sensitive film is dropped while the jig is rotated in-plane on the main surface of the quartz crystal vibration element, and the dropped liquid material is cured to form a sensitive film. A sensitive film is formed on the excitation electrode and the extraction electrode provided on the main surface of the quartz-crystal vibrating element exposed when mounted on the film-forming jig.
For this reason, when a predetermined substance is detected by the QCM sensor element on which the sensitive film is formed using the conventional sensitive film forming method, the predetermined substance reacts even with the sensitive film on one extraction electrode, and the predetermined substance is reacted. The detection accuracy for detecting a substance is reduced.

In addition, in the conventional method for forming a sensitive film, a liquid material that becomes a sensitive film is dropped on the main surface of the quartz resonator element on which the sensitive film is formed, and the liquid material that has been dropped is cured to form the sensitive film. The thickness of the sensitive film may vary depending on the position at which the liquid material is dropped and the timing at which the liquid material is dropped.
For this reason, in the conventional method for forming a sensitive film, the variation in the thickness of the sensitive film is increased, which may reduce the productivity.

  The present invention improves the detection accuracy of a QCM sensor element when used in a QCM sensor element, and a sensitive film forming jig that can easily form a sensitive film only on the excitation electrode of a crystal vibrating element. An object is to provide a method for forming a sensitive film with improved properties.

In order to solve the above problem, an extraction electrode is provided so that one end is connected to the excitation electrode provided on both main surfaces of the crystal piece and the other end is located at the end of the crystal piece, A holder comprising a base having a substantially rectangular parallelepiped shape, a fixed portion extending in the same direction from a predetermined surface of the base, and two pairs of legs extending in the opposite direction to the fixed portion; A sensitive film forming jig for use in forming a sensitive film on the excitation electrode of a crystal resonator element that is fixed while being electrically connected to the fixed part, and is formed in a flat plate shape, A first annular groove on the surface and a first recessed space and a leg space from the first recessed space to the side surface are formed on the inner edge side of the first annular groove, and the bottom surface of the first recessed space The first base storage space that can store the second recess space and a part of the base The first annular convex portion whose outer diameter is smaller than the size of the main surface of the quartz crystal piece and the opening is positioned on the inner edge side of the first annular convex portion and the opening has the same size as the excitation electrode A first jig having a first through hole formed on a bottom surface of the second recess space, and an outer diameter larger than an outer diameter of the excitation electrode and smaller than an outer diameter of the crystal piece, The first annular protrusion is disposed at a position in contact with the surface facing the inner edge of the first annular convex portion and the bottom surface of the second concave space, and is sandwiched between the bottom surface of the second concave space and the main surface of the crystal piece. And a cylindrical portion provided on one main surface of the flat plate portion and having the same shape as the first concave space, and a third concave space and a part of the base portion And a second base storage space capable of storing a shape formed on a surface of the cylindrical portion facing a surface in contact with the flat plate portion. A second annular convex portion whose outer diameter is smaller than the size of the main surface of the crystal piece and a second annular convex portion positioned on the inner edge side of the second annular convex portion and having the same size as the excitation electrode. A second jig in which a through hole is formed in the bottom surface of the third recess space, and an outer shape larger than an outer diameter of the excitation electrode and smaller than an outer diameter of the crystal piece, and the second annular shape A second O-ring disposed at a position in contact with the surface facing the inner edge of the convex portion and the bottom surface of the third concave space and sandwiched between the bottom surface of the third concave space and the main surface of the crystal piece; A third O-ring housed in the first annular groove and sandwiched between the first jig and the second jig, the first base housing space and the second base housing A portion of the leg is accommodated in the leg recess space while the base is accommodated in the space, and the first recess When the bottom surface of the partial space is brought into contact with the surface of the cylindrical portion facing the surface in contact with the flat plate portion, the crystal piece is sandwiched between the first annular convex portion and the second annular convex portion, An opening of the first through hole is disposed at a position facing the excitation electrode facing the first jig side, and the excitation electrode of the second through hole facing the second jig side It arrange | positions in the position which opposes, It is characterized by the above-mentioned.

  Further, in order to solve the above-mentioned problem, the jig for forming the sensitive film is used to contact the surface facing the inner edge side of the first annular convex portion while being in contact with the bottom surface of the second concave space. A first O-ring mounting step of mounting the first O-ring on one jig, and the legs in the leg recess space while storing a part of the base in the first base storage space. Of the crystal piece facing the bottom surface of the second recess space and the first jig side so that the excitation electrode is located on the inner edge side of the first O-ring. A quartz crystal vibrating element mounting step for mounting the quartz crystal vibrating element on the first jig, and a third O ring housed in the first annular groove and mounted on the first jig. A third O-ring mounting step, and the quartz crystal vibration element mounted on the first jig, A second O-ring mounting step of mounting the second O-ring so that the excitation electrode facing the surface facing the first jig side is positioned on the inner edge side of the second O-ring; The second jig is sandwiched between the first jig and the second jig with the convex part facing the bottom surface side of the first concave space. Adjusting and fixing the excitation electrode facing to the inner edge side of the second O-ring, and the first penetration in the direction from the first jig toward the second jig A liquid material that becomes a sensitive film by curing or drying in the hole is dropped on the excitation electrode facing the first jig side, and dropped on the excitation electrode facing the first jig side. The excitation electrode which hardens or dries the liquid material and faces the first jig side A first sensitive film forming step of forming a sensitive film, and a liquid material that becomes a sensitive film by curing or drying the second through hole in a direction from the second jig toward the second jig. A second dropping step of dropping on the excitation electrode facing the second jig side, and curing or drying the liquid material dropped on the excitation electrode facing the second jig side to face the second jig side A second sensitive film forming step of forming a sensitive film on the excitation electrode.

According to such a sensitive film forming jig, the first base housing space of the first jig in which the first through hole is formed and the second jig in which the second through hole is formed. While the base portion is stored in the second base storage space, a part of the leg portion is stored in the leg recess space, and the bottom surface of the first recess space is opposed to the surface in contact with the flat plate portion. When contacting the surface, the crystal piece is sandwiched between the first annular convex portion and the second annular convex portion, and the opening of the first through hole faces the excitation electrode facing the first jig side. Since the opening of the second through hole is arranged at a position facing the excitation electrode facing the second jig side, the excitation electrode facing the first jig side is exposed by the first through hole. However, the excitation electrode facing the second jig side can be exposed by the second through hole.
Therefore, according to such a sensitive film forming jig, the sensitive film is not formed on the extraction electrode as in the conventional sensitive film forming jig, and the sensitive film is formed only on the exposed excitation electrode. Is possible.
Therefore, when a predetermined substance is detected by a QCM sensor element having a sensitive film formed using such a sensitive film forming jig, the sensitive film can be formed only on the excitation electrode. Compared with the case where a jig is used, the detection accuracy for detecting a predetermined substance can be improved.

Also, according to such a sensitive film forming jig, the first base housing space of the first jig in which the first through hole is formed and the second hole in which the second through hole is formed. A cylinder in which a base is stored in the second base storage space of the jig, a part of the leg is stored in the leg recess space, and the bottom surface of the first recess space faces the surface in contact with the flat plate portion. Since the excitation electrode of the crystal resonator element is not in contact with the first jig and the second jig when it is brought into contact with the surface of the part, dust is not generated on the excitation electrodes provided on both main surfaces of the crystal resonator element. It is possible to prevent the attached matter such as
For this reason, when a predetermined substance is detected by a QCM sensor element having a sensitive film formed using such a sensitive film forming jig, it is possible to prevent the frequency from being changed due to an adhering substance adhering to the other excitation electrode. Therefore, the detection accuracy for detecting a predetermined substance can be improved as compared with the case where a conventional sensitive film forming jig is used.

Also, according to such a sensitive film forming jig, the first base housing space of the first jig in which the first through hole is formed and the second hole in which the second through hole is formed. A cylinder in which a base is stored in the second base storage space of the jig, a part of the leg is stored in the leg recess space, and the bottom surface of the first recess space faces the surface in contact with the flat plate portion. The crystal piece is sandwiched between the first annular projection and the second annular projection, and the opening of the first through hole faces the excitation electrode facing the first jig side. Since the opening of the second through hole is disposed at a position facing the excitation electrode facing the second jig side, the excitation electrode facing the first jig side by the first through hole is arranged. The excitation electrode facing the second jig side can be exposed by the second through hole while being exposed.
For this reason, according to such a sensitive film forming jig, when a sensitive film is formed on the excitation electrodes on both main surfaces of the crystal resonator element, the sensitive film is formed on the excitation electrode on one main surface of the crystal resonator element. Thereafter, the sensitive film can be formed on the excitation electrode on the other main surface of the crystal resonator element as it is.
Therefore, when forming a sensitive film on both main surfaces using such a sensitive film forming jig, the crystal vibrating elements held by the holder are still mounted on the first jig and the second jig. Since a sensitive film can be formed on the excitation electrodes on both main surfaces of the crystal resonator element, labor and time can be saved and productivity can be improved compared to the case of using a conventional sensitive film forming jig. be able to.

According to such a method for forming a sensitive film, the quartz vibrating element held by the holder is fixed with the first jig and the second jig, and the excitation electrode facing the first jig side passes through the first penetration. The excitation electrode that is exposed from the hole and faces the second jig side is exposed from the second through hole, and a liquid material that becomes a sensitive film is dropped into the first through hole and cured or dried to be first. A sensitive film is formed on the excitation electrode facing the jig side, and a liquid material that becomes the sensitive film is dropped into the second through hole and cured or dried to form a sensitive film on the excitation electrode facing the second jig side. Since the sensitive film is formed on the excitation electrodes on both main surfaces of the crystal resonator element, the liquid material is dropped from the opening of the first through hole and the opening of the second through hole to a predetermined position. The liquid material can be easily dropped, and as a result, the sensitive film can be formed at a predetermined position. That.
For this reason, when a predetermined substance is detected by the QCM sensor element on which the sensitive film is formed using such a sensitive film forming method, the sensitive film can be formed only on the excitation electrode of the crystal vibrating element. Compared with the conventional method for forming a sensitive film, the detection accuracy for detecting a predetermined substance can be improved.

Further, according to such a sensitive film forming method, the crystal vibrating element held by the holder is fixed by the first jig and the second jig, and only the excitation electrode facing the first jig side is the first. Only the excitation electrode that is exposed from one through hole and faces the second jig is exposed from the second through hole, and a liquid material that becomes a sensitive film is dropped into the first through hole and cured or dried. Then, a sensitive film is formed on the excitation electrode facing the first jig side, and a liquid material that becomes the sensitive film is dropped into the second through-hole and cured or dried to sense the excitation electrode facing the second jig side. Since the film is formed and the sensitive film is formed on the excitation electrodes on both main surfaces of the crystal resonator element, the sensitive film can be formed only on the excitation electrode of the crystal resonator element.
For this reason, when a predetermined substance is detected by a QCM sensor element having a sensitive film formed using such a sensitive film forming method, the sensitive film is not formed on the extraction electrode as in the conventional sensitive film forming method. The detection accuracy for detecting a predetermined substance can be improved as compared with the conventional method for forming a sensitive film.

Further, according to such a method for forming a sensitive film, when the crystal vibrating element held by the holder is mounted on the sensitive film forming jig, a part of the leg portion is accommodated in the concave portion space for the leg portion. Since the other part of the part is exposed from the jig for forming the sensitive film, the frequency of the crystal resonator element can be measured while dropping the liquid material that becomes the sensitive film.
For this reason, according to such a sensitive film forming method, it is possible to control the dropping amount of the liquid material, and it is possible to control the thickness of the sensitive film formed by curing or drying the liquid material.
Therefore, according to such a sensitive film forming method, variations in the thickness of the sensitive film can be suppressed, and productivity can be improved as compared with the conventional sensitive film forming method.

(A) is a top view which shows an example of the QCM sensor element formed with the jig for sensitive film formation which concerns on embodiment of this invention, (b) is a jig for sensitive film formation concerning embodiment of this invention. It is sectional drawing which shows an example of the QCM sensor element formed by. It is an exploded sectional view showing an example of the state when the crystal oscillation element currently held by the sensitive film formation jig concerning the embodiment of the present invention is being fixed. (A) is a top view which shows an example of the 1st jig of the jig for sensitive film formation which concerns on embodiment of this invention, (b) is AA sectional drawing of Fig.3 (a). (A) is a top view which shows an example of the 2nd jig of the sensitive film formation jig which concerns on embodiment of this invention, (b) is BB sectional drawing of Fig.4 (a). It is sectional drawing which shows an example of the state of the 1st O-ring mounting process of the sensitive film formation method which concerns on embodiment of this invention.- It is sectional drawing which shows an example of the state of the crystal vibration element mounting process of the sensitive film | membrane formation method which concerns on embodiment of this invention. It is sectional drawing which shows an example of the state of the 3rd O-ring mounting process of the sensitive film | membrane formation method which concerns on embodiment of this invention. It is sectional drawing which shows an example of the state of the 2nd O-ring mounting process of the sensitive film | membrane formation method which concerns on embodiment of this invention. It is sectional drawing which shows an example of the state of the fixing process of the sensitive film | membrane formation method which concerns on embodiment of this invention. It is sectional drawing which shows an example of the state of the 1st dripping process of the sensitive film | membrane formation method which concerns on embodiment of this invention. It is sectional drawing which shows an example of the state of the 2nd dripping process of the sensitive film | membrane formation method which concerns on embodiment of this invention.

  Next, the best mode for carrying out the present invention will be described. In each drawing, the state of each component is exaggerated for easy understanding.

First, the QCM sensor element formed by the sensitive film forming jig according to the embodiment of the present invention will be described.
For example, as shown in FIGS. 1A and 1B, the QCM sensor element mainly includes a crystal vibrating element, a holder 120 holding the crystal vibrating element, and a sensitive film K. .

  For example, as shown in FIGS. 1A and 1B, the crystal resonator element includes a crystal piece 111, an excitation electrode 112, and an extraction electrode 113.

The crystal piece 111 is
As shown in FIGS. 1 (a) and 1 (b), a crystal member, which is a piezoelectric material, is used, and is formed in, for example, a disk-like flat plate shape.

For example, as shown in FIG. 1B, two pairs of excitation electrodes 112 are formed.
One excitation electrode 112 is provided, for example, on one main surface of the crystal piece 111 as shown in FIG.
For example, as shown in FIG. 1B, the other excitation electrode 112 is provided on the other main surface of the crystal piece 111 at a position facing the one excitation electrode 112.

For example, two pairs of extraction electrodes 113 are provided.
As shown in FIG. 1A, one extraction electrode 113 has one end connected to one excitation electrode 112 and the other end connected to the end of one main surface of the crystal piece 111. positioned. Therefore, the other end of one extraction electrode and one excitation electrode 112 are electrically connected.
The other extraction electrode has one end connected to the other excitation electrode 112 and the other end located at the end of the other main surface of the crystal piece 111. Therefore, the end portion of the other extraction electrode and the other excitation electrode 112 are electrically connected.

Accordingly, as shown in FIGS. 1A and 1B, the quartz resonator element is provided with one excitation electrode 112 and one extraction electrode 113 on one main surface of the flat plate-like crystal piece 111. The other excitation electrode 112 and the extraction electrode are provided on the other main surface of the crystal piece 111.
Since the crystal resonator element 111 is a piezoelectric material, the crystal resonator element has a characteristic that when a voltage is applied to the extraction electrode 113, the crystal element 111 sandwiched between the excitation electrodes 112 vibrates at a predetermined frequency. Yes.

The holder 120 holds the crystal resonator element as described above.
Moreover, the holder 120 is comprised from the base 121, the fixing | fixed part 122, and the leg part 123, for example, as shown to Fig.1 (a) and FIG.1 (b).

  The base 121 has, for example, a rectangular parallelepiped shape as shown in FIGS. 1 (a) and 1 (b).

For example, as shown in FIG. 1A, the fixing portion 122 is a pair of two.
Further, the fixing portion 122 is made of a conductive material.
Moreover, the fixing | fixed part 122 is extended in the same direction from the predetermined one surface of the base 121, as shown to Fig.1 (a) and FIG.1 (b).
One fixing portion 122 is fixed while being electrically connected to one extraction electrode 113 of the above-described crystal resonator element, for example, by a conductive adhesive (not shown).
The other fixing portion 122 is fixed, for example, with a conductive adhesive (not shown) while being electrically connected to the other extraction electrode of the crystal resonator element described above.

For example, as shown in FIG. 1A, the leg portions 123 are in pairs.
The leg portion 123 is made of a conductive material.
Moreover, the leg part 123 is extended in the same direction from the surface of the base 121 opposite to the surface where the fixing | fixed part 122 is extended, as shown to Fig.1 (a) and FIG.1 (b). . Accordingly, the two pairs of leg portions 123 are extended in a direction opposite to the direction in which the fixing portion 122 is extended.
One leg portion 123 is electrically connected to one fixing portion 122 via an internal wiring (not shown) of the base portion 121. Accordingly, one leg 123 is electrically connected to one excitation electrode 112.
The other leg portion 123 is electrically connected to the other fixing portion 122 via an internal wiring (not shown) of the base portion 121. Therefore, the other leg 123 is electrically connected to the other excitation electrode 112.

Accordingly, the holder 120 has two pairs of leg portions 123 extending from a predetermined other surface of the base 121 opposite to the predetermined one surface, while two pairs of fixing portions 122 are extended from the predetermined one surface of the base 121. It is extended.
In addition, in the holder 120, the one fixing portion 122 and the one leg portion 123 are electrically connected, while the other fixing portion 122 and the other leg portion 123 are electrically connected.
In addition, in the holder 120, for example, one fixing portion 122 is electrically connected to and fixed to one extraction electrode 113 of the crystal resonator element, and the other fixing portion 122 is electrically connected to the other extraction electrode of the crystal resonator element. By being connected and fixed to each other, it is possible to hold the crystal resonator element.
When the crystal resonator element is held by the holder 120, the one excitation electrode 112 of the crystal resonator element and the one leg 123 of the holder 120 are electrically connected, while the other excitation electrode of the crystal resonator element. 112 and the other leg 123 of the holder 120 are electrically connected.

The sensitive film K has a property of reacting with a predetermined substance and adhering to the predetermined substance.
The sensitive film K is formed by dropping a predetermined liquid material and curing or drying the dropped liquid material.
Here, the sensitive film K is formed, for example, by dropping and curing a liquid material to be the sensitive film K onto the excitation electrodes 112 on both main surfaces of the crystal resonator element.
Here, the case where the sensitive film K is formed on the excitation electrodes 112 on both main surfaces of the quartz resonator element has been described. For example, the sensitive film K is formed only on one excitation electrode of the quartz resonator element. May be.

Accordingly, the QCM sensor element is fixed while one extraction electrode 113 of the crystal vibration element is electrically connected to the one fixing portion 122, and the other extraction electrode of the crystal vibration element is electrically connected to the other fixing portion 122. By being fixed while being connected, the crystal vibrating element is held in the holder 120.
In the QCM sensor element, since the excitation electrode 112 and the leg 123 are electrically connected, when a voltage is applied to the two pairs of legs 123, the crystal piece 111 sandwiched between the excitation electrodes 112. Is configured to vibrate at a predetermined frequency.
Further, in the QCM sensor element, a sensitive film K that reacts with a predetermined substance and adheres the predetermined substance to one excitation electrode 112 of the quartz-crystal vibrating element held by the holder 120 is formed.
In the QCM sensor element, when a predetermined substance reacts with the sensitive film K in a state where a voltage is applied to two pairs of legs, the predetermined substance adheres to the sensitive film K, and the predetermined substance adheres. The frequency at which the crystal piece vibrates changes by the amount. For this reason, the QCM sensor element is configured to be able to detect the adhesion amount of a predetermined substance adhered to the sensitive film K formed on the excitation electrode from the amount of change in the oscillating frequency.

Next, a sensitive film forming jig according to an embodiment of the present invention will be described.
As described above, the sensitive film forming jig according to the embodiment of the present invention is a jig used for forming the sensitive film K on the crystal vibrating element held by the holder 120.

Further, the sensitive film forming jig according to the embodiment of the present invention includes, for example, a first jig 130, a first O-ring 140, a second O-ring 160, and a third O-ring as shown in FIG. 150 and the second jig 170 at least.
In addition, the sensitive film forming jig according to the embodiment of the present invention is, for example, as shown in FIG. 2, the crystal vibration held by the holder 120 so that the first O-ring is sandwiched between the first jig 130. An element is mounted, a third O-ring 150 is mounted on the first jig 130 on which the crystal vibrating element is mounted, and the second O-ring 150 faces the surface facing the first jig 130 side. The O-ring 160 is arranged, and thereafter, the second jig 170 is mounted and can be fixed.

As shown in FIGS. 2, 3 (a), and 3 (b), the first jig 130 has a rectangular flat plate shape.
The first jig 130 has an annular groove 131, a first recess space 132, and a leg recess space 133 formed on one main surface.
Further, as shown in FIGS. 2, 3 (a) and 3 (b), the first jig 130 is formed on the bottom surface of the first recess space 132 with the first base storage recess space 134 and the second jig 130. The recessed space 135 is formed.
Further, as shown in FIGS. 2, 3 (a), and 3 (b), the first jig 130 is formed on the bottom surface of the second recessed space 135, with the first annular protrusion 136 and the first through hole. 137 is formed.

The first annular groove 131 is provided on one main surface of the first jig 130. For example, when one main surface of the first jig 130 is viewed as shown in FIG. It is a circular groove.
Further, as shown in FIG. 2, a third O-ring 150 described later is accommodated in the first annular groove 131.

The leg recess space 133 is provided from a first recess space 132 to be described later to the side surface of the first jig 130.
The leg recess space 133 is located at a position where a part of the leg 123 can be stored when a part of the base 121 of the holder 120 is stored in a first base storage space 134 described later. Is provided.

As shown in FIG. 3A, the first recessed space 132 has a circular opening and bottom.
The first recess space 132 has a bottom surface that can accommodate the crystal resonator element and the holder 120 that holds the crystal resonator element. However, at this time, the leg portion 123 of the holder 120 is not included.
Further, as shown in FIGS. 2, 3 (a) and 3 (b), the first recess space 132 has a first base storage recess space 134 and a second recess space 135 on its bottom surface. Is formed.

  The first base storage recessed space 134 has a size capable of storing a part of the base 121 of the holder 120.

The second recess space 135 is formed, for example, continuously with the first base housing recess space 134.
Further, when the second recess space 135 stores a part of the base 121 of the holder 120 holding the crystal resonator element in the first base storage recess space 134, the fixing portion 122 and the crystal resonator element The size can be stored.
Moreover, as shown in FIG. 3A, for example, the second recessed space 135 has a rectangular bottom surface.
The second recess space 135 has, for example, a first annular protrusion 136 and a first through hole 137 on the bottom surface thereof as shown in FIGS. 2, 3 (a), and 3 (b). Is formed.

The first annular convex portion 136 has a convex shape in a direction from the bottom surface of the second concave space 135 toward the opening of the second concave space 135.
Further, for example, when one main surface of the first jig 130 is viewed, the first annular convex portion 136 faces the edge portion facing the inner edge side and the outer edge side as shown in FIG. The edge is a concentric circular shape.
Further, the first annular convex portion 136 has a size of the edge portion of the surface facing the inner edge side larger than the outer shape of the excitation electrode 112 when one main surface of the first jig 130 is viewed. .
Further, the first annular convex portion 136 has a size of the edge portion of the surface facing the outer edge side smaller than the outer shape of the crystal piece 111 when one main surface of the first jig 130 is viewed. .
Further, when the first annular convex portion 136 accommodates a part of the base 121 of the holder 120 holding the crystal resonator element in the first base accommodating concave space 134, It forms so that it may be located in the inner edge side from the edge part of an inner edge side.
The first annular convex portion 136 is arranged such that a first O-ring 140 (to be described later) is in contact with the surface facing the inner edge of the first annular convex portion 136 and the bottom surface of the second concave space 135. When a part of the base 121 is stored in one base storage space 134, the edge on the inner edge side of the first O-ring 140 is arranged along the edge of the opening of the first through hole 137 described later. It is provided at a position.

The first through hole 137 is formed from the bottom surface of the second recessed space 135 toward the other main surface of the first jig 130.
The first through hole 137 is formed on the bottom surface of the second recess space 135 and on the inner side of the inner edge side edge of the first annular protrusion 136.
In addition, the first through hole 137 is formed in the first through hole 137 when a part of the base 121 of the holder 120 holding the crystal resonator element is stored in the first base storing recessed space 134. The opening is provided at a position facing the excitation electrode 112 provided on the main surface of the crystal resonator element facing the first jig 130 side.

When the first jig 130 stores a part of the base 121 of the holder 120 in which the crystal resonator element is held in the first base storage recessed space 134, the first jig 130 stores the leg 123 in the leg recessed space 133. It has a structure that can store a part.
In addition, when the first jig 130 stores a part of the base 121 of the holder 120 holding the crystal resonator element in the first base storage recessed space 134, the main surface of the crystal piece 111 is the second surface. The excitation electrode 112 provided on the main surface of the crystal resonator element facing the first jig 130 in a state in contact with the surface of the first annular convex portion 136 facing the bottom surface of the concave space 135 of the The structure is located at a position facing the opening of the through hole 137.
Further, the first jig 130 has a structure in which the first O-ring 140 can be mounted at a position in contact with the bottom surface of the second recessed space 135 and the surface facing the inner edge side of the first annular projecting portion 136. ing.
Further, when the first jig 130 stores a part of the base 121 of the holder 120 holding the crystal resonator element in the first base storage recess space 134, the first O-ring 140 is mounted. As a result, the first O-ring 140 can be sandwiched between the bottom surface of the second recessed space 132 and the crystal piece 111.

As described above, the first O-ring 140 is mounted on the first jig 130. At this time, the first O-ring 140 is disposed and mounted at a position in contact with the surface facing the inner edge side of the first annular convex portion 136 while being in contact with the bottom surface of the second concave space 135.
The first O-ring 140 is an annular elastic body.
Further, when the first O-ring 140 is mounted on the first jig 130 and is sandwiched between the bottom surface of the second recessed space 135 and the crystal piece 111 of the crystal resonator element, The edge on the edge side is located along the edge of the excitation electrode 112 facing the first jig 130 side. Accordingly, when the first O-ring 140 is mounted on the first jig 130 and the crystal vibrating element held by the holder 120 is mounted on the first jig 130, the size of the edge on the inner edge side is set. Is the same size as the excitation electrode 112 facing the first jig 130 side, and the size of the edge portion on the outer edge side is smaller than the main surface of the crystal piece 111.
Further, the first O-ring 140 includes a main surface of the crystal piece 111 facing the first jig 130 and the first jig 130 when a second jig 170 described later is fixed to the first jig 130. It plays the role of keeping the airtightness of.

The third O-ring 150 uses an annular elastic body, and has a size that can be accommodated in the first annular groove 131 of the first jig 130.
The third O-ring 150 is accommodated in the first annular groove 131 of the first jig 130 when the first jig 130 and a second jig 170 described later are fixed.

For example, as shown in FIGS. 2, 4 (a) and 4 (b), the second jig 170 is a cylindrical protrusion provided at the center of one main surface of the flat plate portion 171 and the flat plate portion 171. It is mainly composed of a portion 172.
Further, the second jig 170 has a configuration in which the cylindrical convex portion 172 can be fitted into the first concave space 132 of the first jig 130.
The second jig 170 is formed with a second base storage recess space 174 (174a, 174b) and a third recess space 173 on the surface of the cylindrical protrusion 172 facing the surface in contact with the flat plate portion 171. Has been.
The second jig 170 has a second annular convex portion 175 and second through holes 176 (176a, 176b) formed on the bottom surface of the third concave space 173.

The flat plate portion 171 is provided in a rectangular flat plate shape, for example.
Further, the flat plate portion 171 has the same main surface as the main surface of the first jig 130.
Further, as shown in FIGS. 2 and 4B, for example, the flat plate portion 171 is formed with a part 176b of the second through hole 176 and a part 174b of the second base storage recessed space 174. ing.

Here, the case where a part 176b of the second through hole 176 is formed in the flat plate portion 171 is described, but the bottom surface of the third recessed space 173 is flush with the main surface of the flat plate portion 171. When it is on the upper side, the second through hole 176 may be formed only in the flat plate portion 171.
Further, here, a case where a part 174b of the second base housing empty recessed space 174 is formed on the flat plate portion 171 is described, but the sensitive film forming jig according to the embodiment of the present invention is used. If the base 121 of the holder 120 can be stored in the space formed by the first base storage recess space 134 and the second base storage recess space 174, only the cylindrical projection 172 described later can be used. You may form in.

The cylindrical convex portion 172 has a circular shape on both main surfaces, the size of both main surfaces is the same as the bottom surface of the first concave space 132 of the first jig 130, and one main surface The length from the other main surface to the other main surface is the same as the length from the opening to the bottom surface of the first recess space 132. Accordingly, the cylindrical convex portion 172 has a size that can be fitted into the first concave space 132 of the first jig 130.
Further, the cylindrical convex portion 172 is provided on one main surface of the flat plate portion 171.
Further, the cylindrical convex portion 172 is formed with a portion 174 a of the second base storing recessed space 174 and a third recessed space 173 on the surface facing the surface in contact with the flat plate portion 171.
Further, the cylindrical convex portion 172 is formed with a second annular convex portion 175 and a part 176 a of the second through hole 176 on the bottom surface of the third concave space 173.

As described above, the second base housing recessed space 174 is provided in the flat plate portion 171 and the cylindrical convex portion 172.
Further, when the second base storage recessed space 174 is brought into contact with the bottom surface of the first recessed space 132 of the first jig 130 and the surface of the cylindrical convex portion 172 facing the surface in contact with the flat plate portion 171, The opening is formed at a position facing the opening of the first base housing recessed space 134 of the first jig 130.
The second base storage recess space 174 is large enough to store a part of the base 121 and is in contact with the flat plate portion 171 on the bottom surface of the first recess space 132 of the first jig 130. When the surface of the cylindrical convex portion 172 facing the surface is brought into contact, the base 121 can be stored in the space formed by the first base storage recess space 134 and the second base storage recess space 174. It has a structure that can be done.

The third recess space 173 is formed, for example, continuously with the second base storage recess space 174.
Further, the third recess space 173 is configured such that when a part of the base 121 of the holder 120 holding the crystal resonator element is stored in the second base storage recess space 174, the fixing portion 122 of the holder 120 is stored. And a crystal resonator element can be accommodated.
Moreover, as shown in FIG. 4A, for example, the third recessed space 174 has a rectangular bottom surface.
Further, as described above, the third recessed space 174 is formed with the second annular protruding portion 175 and a part 176a of the second through hole 176 on the bottom surface thereof.

As shown in FIGS. 2 and 4B, the second annular convex portion 175 is formed on the bottom surface of the third concave space 174 and extends from the bottom surface of the third concave space 174 to the third concave space. A convex shape is formed in the direction toward the opening 174.
In addition, when the second jig 170 is viewed from the cylindrical convex portion 172 toward the flat plate portion 171, the second annular convex portion 175 is an edge portion facing the inner edge side as shown in FIG. And the edge part which faces an outer edge side is a concentric circular shape.
Further, when the second jig 170 is viewed in the direction from the cylindrical convex portion 172 toward the flat plate portion 171, the second annular convex portion 175 has a larger edge portion facing the inner edge side than the outer shape of the excitation electrode 112. It is a size.
Further, when the second jig 170 is viewed from the cylindrical convex portion 172 toward the flat plate portion 171, the second annular convex portion 175 is smaller in the size of the edge portion facing the outer edge side than the outer shape of the crystal piece 111. It is a big size.
Further, when the second annular convex portion 175 accommodates a part of the base 121 of the holder 120 holding the crystal resonator element in the second base accommodating concave space 174, the excitation electrode 112 is located on the inner edge side. It is formed so that it may be located in the inner edge side rather than the edge part which faces.
Further, the second annular convex portion 175 is arranged so that a second O-ring 160 described later is in contact with the surface facing the inner edge side of the second annular convex portion 175 and the bottom surface of the third concave space 13, When a part of the base 121 of the holder 120 holding the crystal resonator element is stored in the second base storage recessed space 174, the edge on the inner edge side of the second O-ring 160 described later is the second edge. The through hole 176 is provided at a position along the edge of the opening.

The second through hole 176 is formed in the flat plate portion 171 and the cylindrical convex portion 172.
Further, as shown in FIGS. 2 and 4B, the second through hole 176 extends from the bottom surface of the third recessed space 173 to the surface of the flat plate portion 171 facing the surface in contact with the cylindrical convex portion 172. Is formed.
The second through hole 176 is formed so that one opening is located on the inner edge side of the bottom surface of the third recess space 173 and facing the inner edge side of the second annular protrusion 175. Yes.
In addition, the second through hole 176 is formed when the part of the base 121 of the holder 120 holding the crystal resonator element is stored in the second base storing recessed space 174. The opening is provided at a position facing the excitation electrode 112 on the main surface of the crystal resonator element facing the second jig 170 side.

Further, the second jig 170 is formed on the bottom surface of the third recess space 173 when a part of the base 121 of the holder 120 holding the crystal resonator element is stored in the second base storage recess space 174. In the state where the main surface of the crystal piece 111 is in contact with the surface of the second annular convex portion 175 facing the surface in contact with the surface, the excitation electrode 112 on the main surface of the crystal resonator element facing the second jig 170 side passes through the second through-hole. The structure is located at a position facing the opening of the hole 176.
Further, the second jig 170 has a structure in which a second O-ring 160 described later can be mounted at a position in contact with the bottom surface of the third recess space 173 and the surface facing the inner edge side of the second annular protrusion 175. It has become.
The second jig 170 is mounted with a second O-ring 160 described later, and a part of the base 121 of the holder 120 in which the crystal resonator element is held in the second base storage recess space 174 is stored. In this case, a second O-ring 160 described later can be sandwiched between the bottom surface of the third recessed space 173 and the main surface of the crystal piece 111 facing the second jig 170 side.

As described above, the second O-ring 160 is disposed and mounted at a position in contact with the surface facing the inner edge side of the second annular convex portion 175 while being in contact with the bottom surface of the third concave space 173.
The second O-ring 160 is an annular elastic body.
In addition, when the second O-ring 160 is sandwiched between the second jig 170 and the crystal piece 111 of the crystal resonator element held by the holder 120, the edge on the inner edge side of the second O-ring 170. Is disposed and mounted at a location located along the edge of the excitation electrode 112 facing the second jig 170 side. Therefore, when the second O-ring 160 is sandwiched between the second jig 170 and the crystal piece 111 of the crystal resonator element held by the holder 120, the size of the edge on the inner edge side is the second size. The size is the same as that of the excitation electrode 112 facing the jig 170 side, and the size of the edge portion on the outer edge side is smaller than the size of the main surface of the crystal piece 111.
In addition, the second O-ring 160 is formed between the main surface of the crystal piece 111 facing the second jig 170 side and the second jig 170 when the first jig 130 and the second jig 170 are fixed. It plays the role of keeping airtightness.

Although the sensitive film forming jig according to the embodiment of the present invention is not particularly illustrated, the first jig 130 and the second jig 170 can be fixed.
For example, in the sensitive film forming jig 100 according to the embodiment of the present invention, screw through holes (not shown) are formed in the first jig 130 and the second jig 170. The surface forming the edge of the screw through hole is threaded, and the first jig 130 and the second jig 170 can be fixed by a fixing screw (not shown). Yes. At this time, the screw head of the fixing screw is not protruding from the surface facing the surface of the flat plate portion 171 in contact with the cylindrical convex portion 172.

Further, the sensitive film forming jig according to the embodiment of the present invention is configured such that the first O-ring 140 is sandwiched between the first jig 130 and the main surface of the crystal piece 111 facing the first jig 130, The O-ring 160 is sandwiched between the second jig 170 and the main surface of the crystal piece 111 facing the second jig 170, and the third O-ring is formed by the first jig 130 and the second jig 170. 150 and the crystal resonator element held by the holder 120 are sandwiched.
At this time, the first O-ring 140 is disposed at a position where it does not contact the excitation electrode 112 on the surface of the crystal resonator element facing the first jig 130 side. The second O-ring 160 is disposed at a position where it does not contact the excitation electrode 112 on the surface of the crystal resonator element facing the second jig 170 side.

In addition, the sensitive film forming jig according to the embodiment of the present invention has the first base housing recessed space 134 and the second base housing when the first jig 130 and the second jig 170 are fixed. The base 121 of the holder 120 holding the crystal resonator element can be accommodated in the space formed by the concave portion space 174 for use.
At this time, the opening of the first through hole 137 is provided at a position facing the excitation electrode 112 of the crystal resonator element facing the first jig 130, and the opening of the second through hole 147 is the second. Is provided at a position facing the excitation electrode 112 of the crystal resonator element facing the jig 170 side.
Therefore, in the sensitive film forming jig 100 according to the embodiment of the present invention, the excitation electrode 112 on the surface of the crystal resonator element facing the first jig 130 side from the first through hole 137 is exposed, and the second through-hole is exposed. The crystal resonator element held by the holder 120 can be mounted so that the excitation electrode 112 on the surface of the crystal resonator element facing the second jig 170 from the hole 176 is exposed.

According to the sensitive film forming jig according to the embodiment of the present invention, the first base housing space 132 and the second through hole of the first jig 130 in which the first through hole 137 is formed. The base 121 is stored in the second base storage space 176 of the second jig 170 in which the 176 is formed, and a part of the leg 123 is stored in the leg recess space 133, and the first When the bottom surface of the recessed space 132 is brought into contact with the surface of the cylindrical portion 172 facing the surface in contact with the flat plate portion 171, the crystal piece 111 is sandwiched between the first annular convex portion 136 and the second annular convex portion 175, The opening of the first through hole 137 is arranged at a position facing the excitation electrode 112 facing the first jig 130 side, and the excitation electrode 112 whose opening of the second through hole 176 faces the second jig 170 side. The first through hole 37 by while exposing the excitation electrode 112 facing the first jig 130 side, and has a structure capable of exposing the excitation electrode 112 by the second through hole 175 faces the second jig 170 side.
For this reason, according to the sensitive film forming jig according to the embodiment of the present invention, the sensitive film K is not formed on the extraction electrode 113 as in the conventional sensitive film forming jig, and is exposed. The sensitive film K can be formed only on the electrode 112.
Therefore, when a predetermined substance is detected by the QCM sensor element in which the sensitive film K is formed using the sensitive film forming jig according to the embodiment of the present invention, the sensitive film K is formed only on the excitation electrode 112. Therefore, the detection accuracy for detecting a predetermined substance can be improved as compared with the case where a conventional sensitive film forming jig is used.

Further, according to the sensitive film forming jig according to the embodiment of the present invention, the first base storage space 134 and the second base storage space 134 of the first jig 130 in which the first through hole 137 is formed. While the base 121 is stored in the second base storage space 174 of the second jig 170 in which the through hole 176 is formed, a part of the leg 123 is stored in the leg recess space 133, and the first When the bottom surface of one recessed space 132 is brought into contact with the surface of the cylindrical portion 172 facing the surface in contact with the flat plate portion 171, the excitation electrode 112 of the crystal resonator element does not contact the first jig 130 and the second jig 170. Since it has a structure, it is possible to prevent adhering substances such as dust from adhering to the excitation electrodes 112 provided on both main surfaces of the crystal resonator element.
For this reason, when a predetermined substance is detected by the QCM sensor element in which the sensitive film K is formed using the sensitive film forming jig according to the embodiment of the present invention, the adhering material adhered to the other excitation electrode 112 is used. Since it is possible to prevent the frequency from changing, the detection accuracy for detecting a predetermined substance can be improved as compared with the case where a conventional sensitive film forming jig is used.

Further, according to the sensitive film forming jig according to the embodiment of the present invention, the first base storage space 134 and the second base storage space 134 of the first jig 130 in which the first through hole 137 is formed. While the base 121 is stored in the second base storage space 174 of the second jig 170 in which the through hole 176 is formed, a part of the leg 123 is stored in the leg recess space 133, and the first When the bottom surface of one concave space 132 is brought into contact with the surface of the cylindrical portion 172 facing the surface in contact with the flat plate portion 171, the crystal piece 111 is sandwiched between the first annular convex portion 136 and the second annular convex portion 175. Thus, the opening of the first through hole 137 is arranged at a position facing the excitation electrode 112 facing the first jig 130 side, and the opening of the second through hole 176 is excited toward the second jig 170 side. Since it is arranged at a position facing the electrode 112, the first penetration By 137 while exposing the excitation electrode 112 facing the first jig 130 side, and has a structure capable of exposing the excitation electrode 112 by the second through hole 176 faces the second jig 170 side.
For this reason, according to the sensitive film forming jig according to the embodiment of the present invention, when the sensitive film K is formed on the excitation electrodes 112 on both main surfaces of the crystal resonator element, one main surface of the crystal resonator element is provided. After forming the sensitive film K on the excitation electrode 112, the sensitive film K can be formed on the excitation electrode 112 on the other main surface of the quartz crystal vibration element as it is.
Therefore, when the sensitive film K is formed on both main surfaces using the sensitive film forming jig according to the embodiment of the present invention, the crystal vibrating element held by the holder 120 is replaced with the first jig 130 and the second jig 130. Since the sensitive film K can be formed on the excitation electrodes 112 on both main surfaces of the quartz-crystal vibrating element while being mounted on the second jig 170, it is troublesome as compared with the case where the conventional sensitive film forming jig is used. Saving time and improving productivity.

  Further, according to the sensitive film forming jig according to the embodiment of the present invention, the size of the main surface of the cylindrical convex portion 172 of the second jig 170 is the first concave space 132 of the first jig 130. The length of both main surfaces of the second jig 170 is the same as the length from the bottom surface of the first recessed space 132 of the first jig 130 to the opening. Therefore, the second jig 170 can be easily disposed at a predetermined position of the first jig 130 after the crystal vibrating element held by the holder 120 is mounted on the first jig 130.

  In addition, according to the sensitive film forming jig according to the embodiment of the present invention, the holding tool 120 holding the crystal resonator element in the first base housing recessed space 134 of the first jig 130. By accommodating a part of the base 121, the excitation electrode 112 on the surface of the crystal resonator element facing the first jig 130 can be easily disposed at a position facing the opening of the first through hole 137. .

  Further, according to the sensitive film forming jig according to the embodiment of the present invention, when the first jig 130 and the second jig 170 are fixed, the second base portion of the second jig 170 is used. Since the opening of the storage recess space 174 is provided at a position facing the opening of the first base storage recess space 134 of the first jig 130, the second position is set at a predetermined position of the first jig 130. When the jig 170 is arranged, the excitation electrode 112 on the surface of the crystal vibrating element facing the second jig 170 can be easily arranged at a position facing the opening of the second through hole 176.

In addition, according to the sensitive film forming jig according to the embodiment of the present invention, the sensitive film K can be easily formed on the excitation electrodes 112 provided on both main surfaces of the crystal piece 111.
For this reason, the sensor element for measuring a minute mass in which the sensitive film is formed using the sensitive film forming jig according to the embodiment of the present invention has the excitation electrode 112 provided on one main surface of the crystal piece 111. The detection accuracy and detection sensitivity for detecting a predetermined substance can be improved as compared with the sensor element for measuring a minute mass on which only the sensitive film K is formed.

Next, a method for forming a sensitive film according to an embodiment of the present invention will be described.
In the sensitive film forming method according to the embodiment of the present invention, the above-described sensitive film forming jig is used.

  The sensitive film forming method according to the embodiment of the present invention includes a first O-ring mounting process, a crystal vibrating element mounting process, a third O-ring mounting process, a second O-ring mounting process, a fixing process, and a first dropping. A process, a first sensitive film forming process, a second dropping process, and a second sensitive film forming process.

(First O-ring mounting process)
In the first O-ring mounting step, for example, as shown in FIG. 5, the first O-ring mounting step is in contact with the surface facing the inner edge side of the first annular convex portion 136 while being in contact with the bottom surface of the second concave space 135. In this step, the first O-ring 140 is mounted on the first jig 130.

The first jig 130 is formed in a flat plate shape, and a first annular groove 131, a first recess space 132, and a leg recess space 133 (see FIG. 3A) are formed on one main surface. ing.
In the first jig 130, a first base housing recessed space 134 and a second recessed space 135 are formed on the bottom surface of the first recessed space 132.
In the first jig 130, a first annular convex portion 136 and a first through hole 137 are formed on the bottom surface of the second concave space 135.

As described above, the first O-ring 140 is an annular elastic body.
Further, the first O-ring 140 is disposed at a position in contact with the surface facing the inner edge of the first annular convex portion 136 while being in contact with the bottom surface of the second concave space 135.
In addition, the first O-ring 140 accommodates a part of the base 121 of the holder 120 in which the crystal resonator element is held in the first base storage recessed space 134 while accommodating a part of the leg 123 of the holder 120. When the portion is accommodated in the leg recess space 133, it is sandwiched between the main surface of the crystal piece 111 facing the first jig 130 side and the bottom surface of the second recess space 135.
The first O-ring 140 is an excitation electrode on the surface of the crystal vibrating element facing the first jig 130 when the first jig 130 and the second jig 170 are fixed in a fixing process described later. The size is such that it does not contact 112 but contacts the surface of the crystal piece 111 facing the first jig 130.

(Quartz crystal element mounting process)
In the crystal resonator element mounting step, as shown in FIG. 6, the leg 123 is accommodated in the leg recess space 133 while part of the base 121 is accommodated in the first base accommodation space 134. The crystal piece facing the first O-ring 140 toward the bottom surface of the second recess space 135 and the first jig 130 so that the excitation electrode 112 is positioned on the inner edge side of the first O-ring 140. 111 is a step of mounting the crystal resonator element on the first jig 130 with the main surface of 111.
In FIG. 6, the first O-ring 140 shows a state where it is sandwiched between the crystal piece 111 of the crystal resonator element and the first jig 130.

The crystal resonator element is held by the holder 120.
Further, the quartz resonator element is provided with one excitation electrode 112 and one extraction electrode 113 (see FIG. 1A) on one main surface of the flat plate-like crystal piece 111, while the other main part of the crystal piece 111 is provided. The other excitation electrode 112 and the other extraction electrode 113 are provided on the surface.
The crystal resonator element has a characteristic that when a voltage is applied to the extraction electrode 113, a voltage is applied to the excitation electrode 113, and the crystal piece 111 sandwiched between the excitation electrodes 113 vibrates at a predetermined frequency. Yes.

The holder 120 has two pairs of leg portions 123 extended from a predetermined other surface of the base 121 opposite to the predetermined one surface while two pairs of fixing portions 123 are extended from the predetermined one surface of the base portion 121. ing.
In addition, in the holder 120, the one fixing portion 122 and the one leg portion 123 are electrically connected, while the other fixing portion 122 and the other leg portion 123 are electrically connected.
In addition, for example, the holder 120 is fixed while one fixing portion 122 is electrically connected to one extraction electrode 113 and is fixed while the other fixing portion 122 is electrically connected to the other extraction electrode 113. In this way, the crystal resonator element can be held. At this time, one excitation electrode 112 and one fixed portion 122 are electrically connected, and the other excitation electrode 112 and the other fixed portion 122 are electrically connected.

  The first jig 130 stores a part of the base 121 of the holder 120 in which the crystal resonator element is held in the first base storage recess space 134, and the leg 123 in the leg recess space 133. When a part is accommodated, the surface of the quartz crystal element 111 facing the first jig 130 is in contact with the surface of the crystal piece 111 facing the first jig 130 while the surface of the crystal vibrating element 136 facing the first jig 130 side. The structure is located at a position facing the opening of the first through hole 137.

  Accordingly, in the crystal resonator element mounting step, a part of the base 121 of the holder 120 holding the crystal resonator element is stored in the first base storage recess space 134 while one of the leg portions 123 of the holder 120 is stored. Is mounted on the first jig 130 so that the excitation electrode 112 facing the first jig 130 and the opening of the first through hole 137 face each other. The first O-ring 140 is sandwiched between the surface of the crystal piece 111 facing the first jig 130 and the bottom surface of the second recessed space 135, and the crystal resonator element held by the holder 120 is mounted.

(Third O-ring mounting process)
As shown in FIG. 7, the third O-ring mounting step is a step of housing the third O-ring 150 in the first annular groove 131 and mounting the third O-ring 150.
In the third O-ring mounting process, the third O-ring 140 and the first annular groove 131 of the first jig 130 on which the quartz crystal vibration element held by the holder 120 is mounted are inserted into the third O-ring 140. The ring 150 is stored and mounted.

(Second O-ring mounting process)
In the second O-ring mounting step, as shown in FIG. 8, the excitation electrode 112 facing the surface of the crystal resonator element mounted on the first jig 130 facing the first jig 130 side. Is mounted on the second O-ring 160 so as to be positioned on the inner edge side of the second O-ring 160.

The second O-ring 160 uses an annular elastic body, has an inner diameter equal to or larger than the outer diameter of the excitation electrode 112, and the outer diameter is smaller than the outer diameter of the crystal piece 111.
The second O-ring 160 is positioned on a surface facing the surface of the crystal piece 111 facing the first jig 130 side. At this time, the second O-ring 160 is disposed and mounted at a position that does not contact the excitation electrode 112 provided on the surface facing the surface of the crystal piece 111 facing the first jig 130.

(Fixing process)
As shown in FIG. 9, in the fixing step, the crystal vibration is caused by the first jig 130 and the second jig 170 with the cylindrical convex portion 172 facing the bottom surface side of the first concave space 132. Adjusting and fixing the excitation electrode 112 facing the second jig 170 so as to be located on the inner edge side of the second O-ring 160 while sandwiching the element and the third O-ring 150. .

When the second jig 170 stores a part of the base 121 of the holder 120 holding the crystal resonator element in the second base storage recessed space 174, the excitation electrode 112 facing the second jig 170 side. However, the crystal resonator element can be mounted at a position facing the opening of the second through hole 176.
Further, the second jig 170 has a structure in which the second O-ring 160 can be mounted so as to come into contact with the bottom surface of the third recessed space 173 and the surface facing the inner edge side of the second annular protruding portion 175. It has become.
Further, the second jig 170 accommodates a part of the base 121 of the holder 120 in which the crystal resonator element is held in the second base storage recessed space 174 while the second O-ring 160 is mounted. In the state in which the second O-ring 160 is sandwiched between the crystal piece 111 of the crystal resonator element and the second annular convex portion 175, the inner edge side edge of the second O-ring 160 covers the second jig 170 side. The second O-ring 160 can be mounted at a position where it does not contact the excitation electrode 112 facing.

The second jig 170 has a structure that can be fixed to the first jig 130, although not particularly shown.
For example, a screw through hole (not shown) is formed in the first jig 130 and the second jig 170, and the surface forming the edge of the screw through hole of the second jig 130 is threaded. The first jig 130 and the second screw 170 can be fixed by a fixing screw (not shown). At this time, the screw head of the fixing screw does not protrude from the surface of the second jig 170 facing the surface in contact with the second jig 170.

In the fixing process, the first O-ring 140, the crystal vibrating element held by the holder 120 and the third O-ring 150 are mounted on the first jig 130, and the second piece is attached to the crystal piece of the crystal vibrating element. After the O-ring 160 is mounted, the second jig 170 is mounted so that the cylindrical convex portion 172 of the second jig 170 faces the first concave space 132 side of the first jig 130. 130 and the second jig 170 are fixed.
At this time, the second O-ring 160 is in a position in contact with the surface facing the inner edge side of the second annular convex portion 175 while being in contact with the bottom surface of the third concave space 173 of the second jig 170, It is arranged at a position where it does not come into contact with the excitation electrode 112 of the crystal resonator element facing the second jig 170 side.
Further, in the fixing step, when attention is paid to the crystal resonator element held by the holder 120, as shown in FIG. 9, the excitation electrode 112 facing the first jig 130 side from the opening of the first through hole 137 is exposed. However, the excitation electrode 112 facing the second jig 170 from the opening of the second through hole 176 is exposed.

(First dripping step)
In the first dripping step, the liquid material that becomes the sensitive film K by curing or drying the first through hole 137 in the direction from the first jig 130 toward the second jig 170 is formed in the first jig 130. This is a step of dropping on the excitation electrode 112 facing the jig 130 side.
Here, as described above, the case where the sensitive film K is formed by curing a predetermined liquid material will be described.

In the first dripping step, the excitation electrode 112 facing the first jig 130 side from the opening of the first through hole 137 is exposed, and the second jig 170 side is opened from the opening of the second through hole 176. The liquid material is dropped in the direction from the first jig 130 toward the second jig 170 in the state where the facing excitation electrode 112 is exposed.
At this time, the first O-ring 140 contacts the excitation electrode 112 facing the first jig 130 while contacting the bottom surface of the second recess space 135 and the surface facing the inner edge side of the first annular projection 136. The liquid material is not dropped on the extraction electrode 113 that is not exposed even if the liquid material that becomes the sensitive film K is dropped.

In the first dropping step, as described above, one leg 123 and one excitation electrode 112 of the crystal resonator element are electrically connected, and the other end 123 and the other excitation of the crystal resonator element. Since the electrode 113 is electrically connected, by measuring the leg 123 of the holder 120 exposed from the sensitive film forming jig 100, the crystal vibrating element when the liquid material is dropped is measured. The frequency of the crystal piece can be measured in real time.
For this reason, in the first dropping step, the amount of the liquid material to be the sensitive film K dropped onto the excitation electrode 112 facing the first jig 130 can be easily controlled. It is possible to control the thickness of the sensitive film K formed on the excitation electrode 112 facing.
That is, in the first dripping step, it is possible to easily control the amount of the liquid material to be the sensitive film K dripped onto the excitation electrode 112 facing the first jig 130 side. Variations in the thickness of the sensitive film K formed on the facing excitation electrode 112 can be suppressed.

(First sensitive film formation process)
In the first sensitive film forming step, the liquid material dropped on the excitation electrode 112 facing the first jig 130 is cured or dried, and the sensitive film K is applied to the excitation electrode 112 facing the first jig 130. Is a step of forming.
In the first sensitive film forming step, for example, the liquid material dropped on the excitation electrode 112 facing the first jig 130 is cured to form the sensitive film K on the excitation electrode 112 facing the first jig 130 side. Is done.

(Second dripping step)
In the second dropping step, the liquid material that becomes the sensitive film K by curing or drying in the second through hole 176 in the direction from the second jig 170 to the second jig 170 is applied to the second jig 170. This is a step of dropping on the excitation electrode 112 facing the jig 170 side.
Here, as described above, the case where the sensitive film K is formed by curing a predetermined liquid material will be described.

In the second dripping step, the excitation electrode 112 facing the second jig 170 from the opening of the second through hole 176 is exposed, and the liquid is directed in the direction from the second jig 170 toward the first jig 130. Material is dripped.
At this time, the second O-ring 160 contacts the excitation electrode 112 facing the second jig 170 while contacting the bottom surface of the third recess space 173 and the surface facing the inner edge of the second annular projection 175. The liquid material is not dropped on the extraction electrode 113 that is not exposed even if the liquid material that becomes the sensitive film K is dropped.

In the second dropping step, as described above, one leg 123 and one excitation electrode 112 of the crystal resonator element are electrically connected, and the other leg 123 and the other excitation of the crystal resonator element. Since the electrode 112 is electrically connected, the leg 123 of the holder 120 exposed from the sensitive film forming jig 100 is measured, so that the crystal vibrating element when the liquid material is dropped is measured. The frequency of the crystal piece 111 can be measured in real time.
For this reason, in the second dropping step, the amount of the liquid material to be the sensitive film K dropped onto the excitation electrode 112 facing the second jig 170 side can be easily controlled. It is possible to control the thickness of the sensitive film K formed on the excitation electrode 112 facing.
That is, in the second dropping step, it is possible to easily control the amount of the liquid material that becomes the sensitive film K being dropped onto the excitation electrode 112 facing the second jig 170 side. Variations in the thickness of the sensitive film K formed on the facing excitation electrode 112 can be suppressed.

(Second dripping)
In the second dropping step, the liquid material dropped on the excitation electrode 112 facing the second jig 170 is cured or dried to form a sensitive film K on the excitation electrode 112 facing the second jig 170. It is a process to do.
In the second sensitive film forming step, for example, the liquid material dropped on the excitation electrode 112 facing the second jig 170 side is cured, and the sensitive film K is formed on the excitation electrode 112 facing the second jig 170 side. Is done.

According to the method for forming a sensitive film according to the embodiment of the present invention, the crystal vibrating element held by the holder 120 is fixed by the first jig 130 and the second jig 170, and the first jig The excitation electrode 112 facing the 130 side is exposed from the first through hole 137 while the excitation electrode 112 facing the second jig 170 side is exposed from the second through hole 176, and the inside of the first through hole 137 A liquid material that becomes the sensitive film K is dropped and cured or dried to form the sensitive film K on the excitation electrode 112 facing the first jig 130, and the liquid material that becomes the sensitive film K inside the second through hole 176. Since the sensitive film K is formed on the excitation electrode 112 facing the second jig 170 and the excitation film 112 is formed on both main surfaces of the crystal resonator element, the sensitive film K is formed. Opening of one through hole 137 and second penetration It can be easily dropping the liquid material to a predetermined position by dropping the liquid material from the opening of the hole 176, as a result, it is possible to form the sensitive layer K in position.
Therefore, when a predetermined substance is detected by the QCM sensor element on which the sensitive film K is formed by using the sensitive film forming method according to the embodiment of the present invention, the sensitive film is formed only on the excitation electrode of the crystal vibrating element. Therefore, the detection accuracy for detecting a predetermined substance can be improved as compared with the conventional method for forming a sensitive film.

Further, according to the method for forming a sensitive film according to the embodiment of the present invention, the crystal vibrating element held by the holder 120 is fixed by the first jig 130 and the second jig 170, and the first jig 130 is fixed. Only the excitation electrode 112 facing the jig 130 side is exposed from the first through hole 137 while only the excitation electrode 112 facing the second jig 170 side is exposed from the second through hole 176. A liquid material that becomes the sensitive film K is dropped into the through hole 137 and cured or dried to form the sensitive film K on the excitation electrode 112 facing the first jig 130, and the sensitive film K is introduced into the second through hole 176. A liquid material is dropped and cured or dried to form a sensitive film K on the excitation electrode 112 facing the second jig 170 side, and a sensitive film K is formed on the excitation electrodes 112 on both main surfaces of the crystal resonator element. Because of this, the excitation electrode 1 of the crystal resonator element Only on the two may form a sensing film K.
Therefore, when a predetermined substance is detected by the QCM sensor element on which the sensitive film K is formed using the sensitive film forming method according to the embodiment of the present invention, the extraction electrode is used as in the conventional sensitive film forming method. Since the sensitive film K is not formed on 113, the detection accuracy for detecting a predetermined substance can be improved as compared with the conventional sensitive film forming method.

Further, according to the sensitive film forming method according to the embodiment of the present invention, when the crystal vibrating element held by the holding tool 120 is mounted on the sensitive film forming jig 100, a part of the leg 123 is formed. Since the other part of the leg 123 is exposed from the sensitive film forming jig 100 while being accommodated in the leg recessed space 133, the crystal vibrating element is dropped while dropping the liquid material that becomes the sensitive film K Frequency can be measured.
For this reason, according to the method for forming a sensitive film according to the embodiment of the present invention, it is possible to control the dropping amount of the liquid material, and to reduce the thickness of the sensitive film formed by curing or drying the liquid material. Can be controlled.
Therefore, according to the sensitive film forming method according to the embodiment of the present invention, the thickness variation of the sensitive film K can be suppressed, and the productivity can be improved as compared with the conventional sensitive film forming method.

Further, according to the sensitive film forming method according to the embodiment of the present invention, the sensitive film K can be easily formed on the excitation electrodes 112 provided on both main surfaces of the crystal piece 111.
For this reason, the sensor element for measuring a minute mass formed using the method for forming a sensitive film according to the embodiment of the present invention is the sensitive film K only for the excitation electrode 112 provided on one main surface of the crystal piece 111. The detection accuracy and detection sensitivity for detecting a predetermined substance can be improved as compared with the sensor element for measuring a minute mass.

  The second jig and the first jig are described as being fixed by screws, but if the first jig and the second jig can be fixed, for example, the clip It may be used and fixed.

  Moreover, although the case where the second jig and the first jig are fixed by screws is described, if the first jig and the second jig can be fixed, for example, the first jig Further, the second jig may be fixed using gravity applied from each.

  Moreover, although the jig which forms a sensitive film | membrane in the hold | maintained crystal vibration element is demonstrated, you may connect two or more so that a several crystal vibration element can be formed simultaneously, for example.

  Moreover, although the case where the sensitive film is formed by dropping a predetermined liquid material and curing is described, the sensitive film may be formed by dripping and drying another predetermined liquid material. .

  In addition, the case where the first O-ring and the first jig are independent from each other has been described. It may be made. At this time, the first O-ring mounting step can be omitted.

  Further, the case where the second O-ring and the second jig are independent from each other has been described. For example, the second O-ring is integrated with the second O-ring mounted at a predetermined position on the second jig. It may be made. At this time, the second O-ring mounting step can be omitted.

  In addition, the case where the sensitive film is formed on the excitation electrode facing the first jig side after the sensitive film is formed on the excitation electrode facing the second jig side has been described. For example, it faces the first jig side. After forming the sensitive film on the excitation electrode, the sensitive film may be formed on the excitation electrode facing the second jig side.

111 Quartz piece 112 Excitation electrode 113 Extraction electrode 120 Holder 121 Base 122 Fixing portion 123 Leg K Sensitive membrane 130 First jig 131 First annular groove 132 First recess space 133 Leg recess space 134 First Base storage recess space 135 Second recess space 136 First annular projection 137 First through hole 140 First O-ring 150 Third O-ring 160 Second O-ring 170 Second jig 171 Flat plate portion 172 Cylindrical convex portion 173 Third concave space 174 Second base storage concave space 175 Second annular convex portion 176 Second through hole

Claims (2)

An extraction electrode is provided so that one end is connected to the excitation electrode provided on both main surfaces of the crystal piece and the other end is located at the end of the crystal piece, and a base having a substantially rectangular parallelepiped shape, A holder comprising a fixed portion extending in the same direction from a predetermined surface of the base and two pairs of legs extending in a direction opposite to the fixed portion; A sensitive film forming jig used for forming a sensitive film on the excitation electrode of a quartz crystal vibration element fixed while being connected to
The first annular groove is formed on one main surface, the first recessed space is formed on the inner edge side of the first annular groove, and the leg space is formed from the first recessed space to the side surface. The second recess space and the first base storage space capable of storing a part of the base are formed on the bottom surface of the first recess space, and the outer diameter is larger than the size of the main surface of the crystal piece. A small first annular protrusion and a first through hole having the same size as the excitation electrode are formed on the bottom surface of the second recess space while being positioned on the inner edge side of the first annular protrusion. With the first jig being
The outer diameter is larger than the outer diameter of the excitation electrode and smaller than the outer diameter of the crystal piece, at a position in contact with the surface facing the inner edge of the first annular convex portion and the bottom surface of the second concave space. A first O-ring disposed and sandwiched between the bottom surface of the second recess space and the main surface of the crystal piece;
It is composed of a flat plate portion and a cylindrical portion that is provided on one main surface of the flat plate portion and has the same shape as the first concave space, and stores a third concave space and a part of the base portion. A second base convex storage space formed on the surface of the cylindrical portion facing the surface in contact with the flat plate portion, and an outer diameter of the second annular convex portion smaller than the size of the main surface of the crystal piece and the second A second jig in which an opening is located on the inner edge side of the annular convex portion and a second through hole having the same size as the excitation electrode is formed on the bottom surface of the third concave space,
The outer shape is larger than the outer diameter of the excitation electrode and smaller than the outer diameter of the crystal piece, and is arranged at a position in contact with the surface facing the inner edge of the second annular convex portion and the bottom surface of the third concave space. A second O-ring sandwiched between the bottom surface of the third recess space and the main surface of the crystal piece,
A third O-ring housed in the first annular groove and sandwiched between the first jig and the second jig;
With
A portion of the leg is accommodated in the leg recess space while the base is stored in the first base storage space and the second base storage space, and the bottom surface of the first recess space is When contacting the surface of the columnar portion facing the surface in contact with the flat plate portion,
The crystal piece is sandwiched between the first annular convex portion and the second annular convex portion,
The opening of the first through hole is disposed at a position facing the excitation electrode facing the first jig side,
The sensitive film forming jig, wherein the opening of the second through hole is arranged at a position facing the excitation electrode facing the second jig side. Using the sensitive film forming jig according to claim 1,
A first O-ring on which the first O-ring is mounted on the first jig so as to be in contact with the surface facing the inner edge side of the first annular convex portion while being in contact with the bottom surface of the second concave space. Mounting process;
The leg portion is accommodated in the leg recess space while part of the base portion is accommodated in the first base accommodating space, and the excitation electrode is positioned on the inner edge side of the first O-ring. A crystal resonator element in which the first O-ring is sandwiched between the bottom surface of the second recess space and the main surface of the crystal piece facing the first jig, and the crystal resonator element is mounted on the first jig. Mounting process;
A third O-ring mounting step of housing the third O-ring in the first annular groove and mounting the third O-ring;
The second electrode is arranged such that the excitation electrode facing the surface facing the first jig side of the quartz crystal vibration element mounted on the first jig is positioned on the inner edge side of the second O-ring. A second O-ring mounting process for mounting the O-ring;
While holding the quartz crystal vibration element and the third O-ring between the first jig and the second jig with the cylindrical convex portion facing the bottom surface side of the first concave space, the second jig A fixing step of adjusting and fixing the excitation electrode facing the jig side of the second O-ring so as to be positioned on the inner edge side of the second O-ring;
A liquid material that becomes a sensitive film by being cured or dried in the first through hole in a direction from the first jig toward the second jig is dropped onto the excitation electrode facing the first jig side. One dripping step;
A first sensitive film forming step of curing or drying the liquid material dropped on the excitation electrode facing the first jig side to form a sensitive film on the excitation electrode facing the first jig side;
A liquid material that becomes a sensitive film by being cured or dried in the second through hole in a direction from the second jig toward the second jig is dropped onto the excitation electrode facing the second jig side. Two dripping steps;
A second sensitive film forming step of curing or drying the liquid material dropped on the excitation electrode facing the second jig side to form a sensitive film on the excitation electrode facing the second jig side;
A method for forming a sensitive film, comprising:

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