JP5772509B2 - Manufacturing method of molded body - Google Patents

Description

  The present invention relates to a method for producing a molded body.

Various molding methods are used for manufacturing the molded body.
In particular, a method of transferring irregularities on the surface of a workpiece using a mold is widely used (see, for example, Patent Document 1).

  However, in the above method, when a fine pattern (for example, a fine pattern having a width of 500 μm or less) is to be formed, it is difficult to faithfully transfer the pattern of the mold, and when releasing the mold, There have been problems such as the occurrence of defects such as cracks and chips in the pattern formed on the workpiece.

JP 2007-326367 A

  The objective of this invention is providing the manufacturing method of the molded object which can manufacture efficiently the molded object which has a fine pattern as what has a target shape.

Such an object is achieved by the present invention described in the following (1) to (9).
(1) A method of manufacturing a molded body having a fine pattern having a width of 10 nm or more and 500 μm or less by heating a workpiece using a molding die,
A heating step in which molding is performed at a temperature T [° C.] at which a difference in storage elastic modulus E ′ between the constituent material of the mold and the constituent material of the workpiece is 100 [MPa] or more;
A mold release step of releasing the molded body obtained by heating and molding the workpiece from the mold;
The linear expansion coefficient of the constituent material of the workpiece at the temperature T [° C.] is α ₁ [° C. ⁻¹ ], and the linear expansion coefficient of the constituent material of the mold at the temperature T [° C.] is α ₂ [° C. ⁻¹ ]. When satisfying the relationship, | α ₁ −α ₂ | ≦ 100.0 × 10 ⁻⁴ is satisfied.

  (2) The said temperature T is a manufacturing method of the molded object as described in said (1) which is the temperature more than the glass transition point of the constituent material of the said workpiece | work.

  (3) The method for producing a molded article according to (1) or (2) above, wherein the storage elastic modulus E ′ of the constituent material of the mold at the temperature T [° C.] is 100 [MPa] or more.

  (4) The above (1) to (1) further comprising a cooling step of cooling to a temperature at which the storage elastic modulus E ′ of the constituent material of the workpiece becomes 1000 [MPa] or more between the heating step and the release step. The manufacturing method of the molded object in any one of 3).

  (5) The method for producing a molded body according to any one of (1) to (4), wherein the molded body has a regular pattern.

  (6) The said molded object is a manufacturing method of the molded object in any one of said (1) thru | or (5) which has a some columnar convex part as said pattern.

  (7) The above molds (1) to (6), wherein the mold is composed of one or more selected from the group consisting of polyetheretherketone, polyethersulfone, polyester and polyetherimide. The manufacturing method of the molded object in any one of.

  (8) The manufacturing method of the molded object in any one of said (1) thru | or (7) whose said workpiece | work is comprised with amorphous resin.

  (9) The manufacturing method of the molded object in any one of said (1) thru | or (8) using what the mold release agent is not provided as said shaping | molding die.

  ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of the molded object which can manufacture efficiently the molded object which has a fine pattern as what has the target shape can be provided.

It is a longitudinal cross-sectional view which shows suitable embodiment of the manufacturing method of a molded object. It is a model figure of the differential scanning calorimetry curve in the vicinity of the melting point of the sample obtained when the differential scanning calorimetry is performed.

Hereinafter, the present invention will be described in detail.
<Method for producing molded body>
First, the manufacturing method of the molded object of this invention is demonstrated. FIG. 1 is a longitudinal sectional view showing a preferred embodiment of a method for producing a molded body. Note that the drawings referred to in this specification show part of the configuration in an exaggerated manner, and do not accurately reflect actual dimensions and the like.

The manufacturing method of the present invention is a method of manufacturing a molded body having a fine pattern with a width of 10 nm to 500 μm by heating a workpiece using a molding die, and comprising the constituent material of the molding die and the workpiece. A heating step of forming at a temperature T [° C.] at which a difference in storage elastic modulus E ′ from the constituent material is 100 [MPa] or more, and a molded body obtained by heating and molding the workpiece are formed into the mold A mold release step of releasing from the mold, the linear expansion coefficient of the constituent material of the workpiece at the temperature T [° C.] is α ₁ [° C. ⁻¹ ], and the constituent material of the mold at the temperature T [° C.] When the coefficient of linear expansion is α ₂ [° C. ⁻¹ ], a relationship of | α ₁ −α ₂ | ≦ 100.0 × 10 ⁻⁴ is satisfied. Thereby, the manufacturing method of the molded object which can manufacture efficiently the molded object which has a fine pattern as what has a target shape can be provided. In particular, a molded body having a desired shape can be stably and repeatedly manufactured over a long period of time while preventing defects such as chipping from occurring in the molded body and the mold to be manufactured.

  Further, in the present embodiment, a cooling step (cooling step) in which the storage elastic modulus E ′ of the constituent material of the workpiece 1 is 1000 [MPa] or more between the heating step (1b) and the release step (1d) ( 1c). Thereby, in the mold release step, the molded body 10 can be released from the molding die 2 in a state in which the stability of the shape of the molded body 10 is sufficiently high. The accuracy and the like can be made particularly excellent. Moreover, the operativity in a mold release process can also be improved and the productivity of the molded object 10 can be made especially excellent. The storage elastic modulus E ′ can be obtained by measurement according to JIS K7244.

Hereinafter, each process etc. are demonstrated in detail.
[Preparation process]
Prior to the heating step, the mold 2 and the workpiece 1 are prepared (1a).
The mold 2 and the workpiece 1 will be described in detail later.

[Heating process]
As described above, in this step, the difference in the storage elastic modulus E ′ between the constituent material of the molding die 2 and the constituent material of the workpiece 1 is 100 [MPa] or more in a state where the molding die 2 and the workpiece 1 are in close contact with each other. Molding is performed at a temperature T [° C.]. That is, the storage elastic modulus E ′ of the constituent material of the workpiece 1 at the molding temperature T [° C.] is E′1 [MPa], and the storage elastic modulus E ′ of the constituent material of the mold 2 at the molding temperature T [° C.] is E ′. When 2 [MPa] is satisfied, the relationship of E′2-E′1 ≧ 100 is satisfied. Thus, by performing this process in a state where the difference between the storage elastic modulus E′2 of the constituent material of the mold 2 and the storage elastic modulus E′1 of the constituent material of the work 1 is sufficiently large, it is easy and reliable. The workpiece 1 can be deformed, and the molding die 2 can be reliably prevented from being deformed. As a result, a molded body molded into a desired shape can be obtained.

  As described above, in the present invention, the relationship E′2-E′1 ≧ 100 may be satisfied, but the relationship E′2-E′1 ≧ 300 is preferably satisfied, and E′2-E ′ It is more preferable to satisfy the relationship of 1 ≧ 500. Thereby, the effects as described above are more remarkably exhibited.

In the present invention, the linear expansion coefficient of the constituent material of the workpiece at the temperature T [° C.] is α ₁ [° C. ⁻¹ ], and the linear expansion coefficient of the constituent material of the mold at the temperature T [° C.] is α _2. When [° C. ⁻¹ ], the relationship | α ₁ −α ₂ | ≦ 100.0 × 10 ⁻⁴ is satisfied. Thus, by making the value of | α ₁ −α ₂ | sufficiently small, one of the molded body and the mold obtained from the workpiece is larger than the other in the mold release step described in detail later. It is in a contracted state, and the operation of releasing the molded body from the mold can be performed smoothly, and it is possible to reliably prevent defects in the molded body and the mold.

In the present invention, the linear expansion coefficients of the workpiece constituent material and the molding die constituent material are defined by the value at the temperature T for the following reason. That is, a solid (including a softened state) substance generally has a large linear expansion coefficient at a high temperature and a low linear expansion coefficient at a low temperature. In a solid substance (including a softened state), generally, a difference in linear expansion coefficient per unit temperature in a high temperature region (for example, a difference in linear expansion coefficient between 200 ° C. and 180 ° C.) is low. Is larger than the difference in linear expansion coefficient per unit temperature (for example, the difference in linear expansion coefficient between 30 ° C. and 10 ° C.). Therefore, if it is specified that the difference (| α ₁ −α ₂ |) of the linear expansion coefficient at the temperature T in the heating process is a sufficiently small value, the temperature (T ° C. or less) at which the mold release treatment is performed. The difference in linear expansion coefficient with respect to (temperature) can also be set to a sufficiently small value (a value equal to or less than | α ₁ −α ₂ |), so that the above-described effects can be reliably obtained.

On the other hand, the conventional method does not satisfy the relationship of the linear expansion coefficient as described above, so even if a minute pattern is precisely formed on the mold, the pattern is transferred to the workpiece and then molded. The body and the mold are in a so-called biting state, and it is difficult to release the molded product from the mold, and there is a problem that defects occur in the molded product at the time of release.
A linear expansion coefficient can be calculated | required by the measurement based on JISK7197.

As described above, in the present invention, the relationship of | α ₁ −α ₂ | ≦ 100.0 × 10 ⁻⁴ may be satisfied, but the relationship of | α ₁ −α ₂ | ≦ 80.0 × 10 ⁻⁴ is satisfied. It is preferable to satisfy, and it is more preferable to satisfy the relationship of | α ₁ −α ₂ | ≦ 70.0 × 10 ⁻⁴ . Thereby, the effects as described above are more remarkably exhibited.

When the glass transition point of the constituent material of the workpiece 1 is Tg ₁ [° C.], the treatment temperature T [° C.] in this step is preferably Tg ₁ [° C.] or higher, (Tg ₁ +10) The temperature is more preferably [° C.] or more and (Tg ₁ +100) [° C.] or less. As a result, the molding pressure in this step can be reduced, cracking of the workpiece 1 (molded body 10) due to application of excessive pressure can be more reliably prevented, and the productivity of the molded body 10 is improved. Can be made particularly excellent.

When the glass transition point of the constituent material of the mold 2 is Tg ₂ [° C.], the processing temperature T [° C.] in this step is a temperature lower than (Tg ₂ −20) [° C.]. preferable. Thereby, even if it is a case where manufacture of the molded object 10 is performed repeatedly, the unintentional deformation | transformation etc. of the shaping | molding die 2 can be prevented reliably.

  In this step, when the heating temperature is changed with time, the maximum processing temperature in this step is adopted as the temperature T.

  The storage elastic modulus E ′ of the constituent material of the mold 2 at the temperature T [° C.] is preferably 100 [MPa] or more, and more preferably 300 [MPa] or more. Thereby, it can prevent more reliably that the shaping | molding die 2 deform | transforms in this process, and while being able to obtain the molded object shape | molded by the desired shape more reliably, durability of the shaping | molding die 2 is possible. The properties can be made particularly excellent, and a stable molded product can be produced over a longer period of time.

  The mold 2 may be manufactured by any method. For example, a pattern corresponding to a fine pattern to be formed on the workpiece 1 by chemical processing such as etching, laser processing, or mechanical processing. Can be used.

  As the constituent material of the mold 2, for example, polyether ether ketone, polyether sulfone, polyester, polyether imide, fluororesin, polysulfone, polyphenylene sulfide, polyimide, amorphous polyarylate, phenol resin, epoxy resin, melamine Resin materials such as resins can be mentioned, but the mold 2 is composed of one or more selected from the group consisting of polyetheretherketone, polyethersulfone, polyester and polyetherimide. Is preferred. Thereby, the durability of the mold 2 can be made particularly excellent, and the releasability of the molded body 10 from the mold 2 (particularly, the configuration of the workpiece 1 in the mold release step described in detail later). The releasability when the material is as described later can be made particularly excellent.

  The constituent material of the workpiece 1 may be any material that satisfies the above-described relationship with the constituent material of the mold 2. For example, polymethyl methacrylate, polycarbonate, cycloolefin polymer In addition, resin materials such as polyethylene, polystyrene, polypropylene, acrylonitrile / styrene, acrylonitrile / butadiene / styrene, and the like can be used, but the work 1 is preferably made of an amorphous resin. Since such a material has a wide molding temperature range, the moldability is good and the dimensional stability is also excellent.

  Examples of the amorphous resin that can be used as the constituent material of the workpiece 1 include polymethyl methacrylate, polycarbonate, cycloolefin polymer, and polystyrene.

In the present invention, “amorphous” means that no clear endothermic peak is shown when the melting point endothermic peak is measured by differential scanning calorimetry (DSC). It is preferable that the heat of fusion E _f obtained when measuring the endothermic peak of the melting point by scanning calorimetry is not detectable. However, the heat of fusion does not include the heat quantity of the endothermic peak at the glass transition point (see FIG. 2). The measurement conditions of the endothermic peak of the melting point are not particularly limited. For example, the target polymer was heated to 200 ° C. at a rate of temperature increase: 10 ° C./min, and further decreased at a rate of temperature decrease: 10 ° C./min. Thereafter, a value measured when the temperature is increased at a rate of temperature increase of 10 ° C./min can be obtained as the heat of fusion. In the figure, the center value of the peak when the endothermic peak of the melting point was measured by differential scanning calorimetry (DSC) was shown as T _mp [° C.], and the shoulder peak value was shown as T _ms .

  In particular, the combination of the constituent material of the workpiece 1 and the constituent material of the mold 2 is preferably the combination of the resins listed above, but the mold 2 is composed of polyetheretherketone and the workpiece 1 is It is particularly preferable that the material is composed of polymethyl methacrylate, or the mold 2 is composed of polyethersulfone and the workpiece 1 is composed of polymethyl methacrylate. Thereby, the durability of the mold 2 can be made particularly excellent, and the releasability of the molded body 10 from the mold 2 in the mold release step described in detail later is particularly excellent. be able to. Moreover, the dimensional accuracy, transparency, etc. of the molded body 10 to be produced can be made particularly excellent, and the occurrence of defects such as cracks and chips can be more reliably prevented.

  Moreover, in this process, it is preferable to use the mold 2 to which no release agent is applied. Thereby, it can prevent reliably that a mold release agent transfers to the workpiece | work 1 and a bad influence is exerted on the characteristic of the molded object 10 manufactured. Also, conventionally, for the purpose of ensuring releasability, molding is performed with a mold release agent added to the mold, and in order to prevent deterioration of the releasability over time, it is regularly released. Although maintenance such as application of an agent is necessary, in the present invention, such maintenance can be made unnecessary.

  The molding pressure of the workpiece 1 is preferably 0.5 MPa or more and 50 MPa or less, and more preferably 1 MPa or more and 30 MPa or less. When the molding pressure is a value within the above range, it is possible to more efficiently prevent the molded body 10 having a desired pattern while preventing the molded body 10 and the molding die 2 from generating defects such as cracks and chips. Can be manufactured.

  The molded body 10 to be manufactured preferably has a regular pattern as a pattern formed by the mold 2. That is, the mold 2 preferably has a regular pattern as a pattern to be transferred to the workpiece 1. Conventionally, the occurrence of the above-mentioned problem has been more noticeable when a molded body having a fine and regular pattern is produced, whereas the present invention has a fine and regular pattern. However, the occurrence of the above problems can be reliably prevented. That is, the effect of the present invention can be exhibited more remarkably. In addition, compared to a molded body having an irregular pattern, a molded body having a regular pattern is likely to be visually recognized even if it is a slight defect. Therefore, even if the defects in the pattern are acceptable in terms of the performance of the molded product, there were problems such as causing the user to question the reliability of the molded product, In the present invention, such a problem can be reliably prevented.

  Moreover, it is preferable that the molded object 10 to be manufactured has a plurality of columnar protrusions (pillars) as a pattern formed by the mold 2. That is, it is preferable that the shaping | molding die 2 has the recessed part for several columnar convex part (pillar) formation as a pattern transcribe | transferred to a workpiece | work. Conventionally, the occurrence of the above-mentioned problem is more noticeable when a molded product having a minute pattern having a plurality of columnar protrusions (pillars) is produced. Even if it has, it is possible to reliably prevent the occurrence of the above problems. That is, the effect of the present invention can be exhibited more remarkably.

  When the molded body 10 to be manufactured has columnar protrusions (pillars), the height of the protrusions is preferably 10 nm or more and 5000 μm or less, and more preferably 100 nm or more and 500 μm or less. . Conventionally, when the plurality of columnar protrusions (pillars) having such a large height are formed, the occurrence of the above-described problem appears more conspicuously. Even if it has it, generation | occurrence | production of the above problems can be prevented reliably. That is, the effect of the present invention can be exhibited more remarkably.

  When the molded body 10 to be manufactured has columnar protrusions (pillars), the aspect ratio of the protrusions, that is, the height of the protrusions is H [nm], and the width of the protrusions is W [nm]. H / W is preferably 0.1 or more and 20 or less, and more preferably 1 or more and 20 or less. Conventionally, the occurrence of the above-mentioned problem is more noticeable when a plurality of columnar protrusions (pillars) having a large aspect ratio are formed. In the present invention, such a pattern is used. Even if it has it, generation | occurrence | production of the above problems can be prevented reliably. That is, the effect of the present invention can be exhibited more remarkably.

  In the present invention, the pattern formed by the molding die is not limited to the above as long as it has irregularities, for example, those having line-shaped irregularities, those having columnar recesses, etc. It may be.

[Cooling process]
After the heating step, the work 1 and the mold 2 are kept in close contact with each other and are cooled (1c). Thereby, the shape having the pattern transferred from the mold 2 is fixed, and the molded body 10 is obtained.

  In particular, in the present embodiment, cooling is performed to a temperature at which the storage elastic modulus E ′ of the constituent material of the workpiece 1 is 1000 [MPa] or more. As a result, the molded body 10 can be released from the molding die 2 in a later release step in a state in which the stability of the shape of the molded body 10 is sufficiently high, and the finally obtained molded body 10 is obtained. The dimensional accuracy and the like can be made particularly excellent. Moreover, the operativity in a later mold release process is also improved, and the productivity of the molded body 10 can be made particularly excellent.

  In the cooling step, both the workpiece 1 (molded body 10) and the mold 2 contract, but as described above, the linear expansion coefficient of the constituent material of the workpiece 1 and the linear expansion coefficient of the constituent material of the mold 2 are the same. Since the predetermined relationship is satisfied, the difference in shrinkage between the two becomes very small. As a result, even when the workpiece 1 (molded body 10) having a fine pattern and the mold 2 are cooled in a close contact state, defects such as chipping are reliably prevented from occurring in the mold 2 and the molded body 10. ing.

  The rate of temperature decrease from (T-10) ° C. to (T-50) ° C. is preferably 5 ° C./min or more and 50 ° C./min or less. Thereby, the productivity of the molded body 10 can be made particularly excellent while reliably preventing the occurrence of defects in the mold 2 and the work 1 (molded body 10) due to a rapid temperature change.

[Release process]
Thereafter, the molded body 10 is released from the mold 2 (1d).

  The molded body 10 has a fine pattern transferred from the mold 2, and the mold 2 also has a fine pattern corresponding thereto. Since the expansion coefficient and the linear expansion coefficient of the constituent material of the mold 2 satisfy a predetermined relationship, the difference in shrinkage between the two is very small, and in this step, molding is performed without causing defects. The body 10 can be easily removed from the mold.

<Molded body>
The molded body obtained as described above may be used for any purpose, for example, lithography, packaging, semiconductor-related members such as an interposer, diffusion plate, light guide plate, antireflection film, functional optical film, Optical members such as microlens arrays and optical waveguides, optical disks such as Blu-ray and HD-DVD, recording media such as magneto-optical disks, biomedical members such as DNA chips, blood test chips, and well plates, and fuel cells Examples include separators, battery members such as solar cell condensing films, and anti-fingerprint hard coat films.

  As mentioned above, although this invention was demonstrated based on suitable embodiment, this invention is not limited to these.

  For example, in the above-described embodiment, a case where the heating process, the cooling process for cooling to a temperature at which the storage elastic modulus E ′ of the constituent material of the workpiece is 1000 [MPa] or more, and the mold release process are representatively described. However, the manufacturing method of the molded body of the present invention only needs to have the heating step and the release step as described above, and it is not necessary to provide a cooling step that satisfies the above-described conditions.

  Moreover, in the manufacturing method of this invention, you may have the post-processing process performed after the pre-processing process of a heating process, the intermediate process performed between each said process, and a mold release process.

  Hereinafter, although the present invention is explained in detail based on a concrete example and a comparative example, the present invention is not limited to this.

[1] Manufacture of molded body (Example 1)
First, using a polyether ether ketone (glass transition point: 161 ° C.), a mold having a large number of cylindrical recesses on the surface was manufactured by machining with an end mill. The columnar concave portion of the mold had a diameter of 10 μm and a depth of 5 μm. In addition, a large number of cylindrical recesses are provided in a lattice shape (a plurality of squares are regularly arranged when the center of the recess is connected with a straight line when the mold is viewed in plan view) ), And the pitch between adjacent recesses was 20 μm. Moreover, the shaping | molding die made | formed the plate shape of length 1cm x width 1cm x thickness 0.2mm.

  Next, a plate made of polymethyl methacrylate (glass transition point: 131 ° C.) having a plate shape of 3 cm long × 3 cm wide × 0.5 mm thick was prepared.

  Then, the mold was heated to a temperature T of 170 ° C., and the surface of the mold provided with the concave portion was brought into contact with one surface of the workpiece, and molding was performed under a molding pressure of 5 MPa (heating process). The holding time of the temperature T was 2 minutes.

  Then, these were cooled to the cooling temperature of 40 degreeC, maintaining the state which contact | adhered the workpiece | work and the shaping | molding die, and the molded object was obtained (cooling process). The rate of temperature decrease from the temperature T ° C to (T-50) ° C was constant at 13 ° C / min.

  Thereafter, the molded body was released from the molding die to obtain a target molded body. The obtained molded body had a large number of cylindrical convex portions having a diameter of 10 μm and a height of 5 μm.

(Examples 2 to 12)
As shown in Table 1, the constituent material of the mold and the constituent material of the workpiece are shown in Table 1, and the heating rate, molding temperature (temperature T), molding pressure, cooling rate, and cooling temperature in the heating process are shown in Table 1. A molded body was produced in the same manner as in Example 1 except that.

(Comparative Examples 1-3)
As shown in Table 1, the constituent material of the mold and the constituent material of the workpiece are shown in Table 1, and the heating rate, molding temperature (temperature T), molding pressure, cooling rate, and cooling temperature in the heating process are shown in Table 1. A molded body was produced in the same manner as in Example 1 except that.

Table 1 summarizes the production conditions of the molded body for each of the above Examples and Comparative Examples. In the table, polyether ether ketone is PEEK, polymethyl methacrylate (amorphous resin) is PMMA, cycloolefin polymer (amorphous resin) is COP, polycarbonate (amorphous resin) is PC, poly Ether sulfone is PES, polypropylene is PP, glass transition point of workpiece material is Tg ₁ , glass transition point of molding material is Tg ₂ , storage elastic modulus E ′ of workpiece material at molding temperature T E′1, the storage elastic modulus E ′ of the constituent material of the mold at the molding temperature T [° C.] is E′2, the linear expansion coefficient of the constituent material of the workpiece at the molding temperature T is α ₁ , and the mold at the molding temperature T The linear expansion coefficient of the constituent material is indicated by α ₂ , and the storage elastic modulus E ′ of the constituent material of the workpiece at the cooling temperature is indicated by E ′ 3.

  In addition, the storage elastic modulus E 'was calculated | required by the measurement based on JISK7244 using DMS210 (made by Seiko Instruments Inc.). Moreover, the linear expansion coefficient was calculated | required by the measurement based on JISK7197 using EXSTAR TMA / SS6000 series (made by Seiko Instruments Inc.). In each of the above Examples and Comparative Examples, the rate of temperature decrease from the temperature T ° C. to the temperature (T-50) ° C. was constant. In the table, the holding time column shows the holding time (integrated time) at a temperature of (T-10) ° C. or higher and (T + 10) ° C. or lower, and the temperature drop rate column shows (T-10) ° C. To (T-50) ° C.

[2] Evaluation [2.1] Releasability The releasability of the molded body from the mold in the mold release process during the production of the molded bodies in the respective Examples and Comparative Examples was evaluated according to the following criteria.

A: The molded product can be removed very easily, and the releasability is very excellent.
B: The molded body can be easily removed, and the releasability is excellent.
C: There is some difficulty in removing the molded body, and the mold release property is slightly inferior.
D: There is difficulty in removing the molded body, and the releasability is inferior.

[2.2] Dimensional accuracy The dimensional accuracy of the molded bodies obtained in the respective Examples and Comparative Examples was evaluated according to the following criteria.

A: The height of the molded body is 90% or more of the depth of the concave portion of the mold.
B: The height of the molded body is 75% or more and less than 90% of the depth of the concave portion of the mold.
C: The height of the molded body is 50% or more and less than 75% of the depth of the concave portion of the mold.
D: The height of the molded body is less than 50% of the depth of the concave portion of the mold.

[2.3] Presence / absence of defects such as cracks and chips The molded bodies obtained in the respective Examples and Comparative Examples were observed using a microscope and evaluated according to the following criteria.

A: Generation | occurrence | production of defects, such as a crack and a chip, is not recognized at all.
B: Slight occurrence of defects such as cracks and chips is observed.
C: Many defects such as cracks and chips are observed.
D: The occurrence of defects such as cracks and chips is noticeable.
The results of the above evaluation are shown in Table 2.

  As is apparent from the table, excellent results were obtained with the present invention, whereas satisfactory results were not obtained with the comparative example.

  Further, except that the width of the pattern to be formed was changed in the range of 10 nm to 500 μm, a molded body was produced in the same manner as described above, and as a result of performing the same evaluation as above, the same result as above was obtained. Obtained.

  In addition, the design value of the height of the convex portion of the molded body to be manufactured (depth of the concave portion of the mold) is changed within a range of 10 nm to 5000 μm, and the aspect ratio (H / Except that the design value of W) was changed in the range of 0.1 to 20, the molded body was produced in the same manner as described above, and as a result of performing the same evaluation as above, the same result as above was obtained. It was.

1 Work 2 Mold 10 Molded body

Claims (9)

A method for producing a molded body having a fine pattern with a width of 10 nm or more and 500 μm or less by heating a workpiece using a molding die,
A heating step in which molding is performed at a temperature T [° C.] at which a difference in storage elastic modulus E ′ between the constituent material of the mold and the constituent material of the workpiece is 100 [MPa] or more;
A mold release step of releasing the molded body obtained by heating and molding the workpiece from the mold;
The linear expansion coefficient of the constituent material of the workpiece at the temperature T [° C.] is α ₁ [° C. ⁻¹ ], and the linear expansion coefficient of the constituent material of the mold at the temperature T [° C.] is α ₂ [° C. ⁻¹ ]. When satisfying the relationship, | α ₁ −α ₂ | ≦ 100.0 × 10 ⁻⁴ is satisfied.   The method for producing a molded body according to claim 1, wherein the temperature T is a temperature equal to or higher than a glass transition point of a constituent material of the workpiece.   The method for producing a molded body according to claim 1 or 2, wherein a storage elastic modulus E 'of the constituent material of the mold at the temperature T [° C] is 100 [MPa] or more.   4. The method according to claim 1, further comprising a cooling step of cooling to a temperature at which a storage elastic modulus E ′ of the constituent material of the workpiece becomes 1000 [MPa] or more between the heating step and the release step. The manufacturing method of the molded object of description.   The method for manufacturing a molded body according to any one of claims 1 to 4, wherein the molded body has the regular pattern.   The method for producing a molded body according to any one of claims 1 to 5, wherein the molded body has a plurality of columnar protrusions as the pattern.   The said shaping | molding die is comprised by the 1 type (s) or 2 or more types selected from the group which consists of polyetheretherketone, polyethersulfone, polyester, and polyetherimide. Manufacturing method of a molded object.   The method for producing a molded body according to any one of claims 1 to 7, wherein the workpiece is made of an amorphous resin.   The manufacturing method of the molded object in any one of Claim 1 thru | or 8 using what the mold release agent is not provided as said shaping | molding die.

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