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JP5778895B2 - Glass base material manufacturing method - Google Patents
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JP5778895B2 - Glass base material manufacturing method - Google Patents

Glass base material manufacturing method Download PDF

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JP5778895B2
JP5778895B2 JP2010105536A JP2010105536A JP5778895B2 JP 5778895 B2 JP5778895 B2 JP 5778895B2 JP 2010105536 A JP2010105536 A JP 2010105536A JP 2010105536 A JP2010105536 A JP 2010105536A JP 5778895 B2 JP5778895 B2 JP 5778895B2
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glass
starting rod
rod
base material
starting
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JP2011230984A (en
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石原 朋浩
朋浩 石原
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Sumitomo Electric Industries Ltd
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Sumitomo Electric Industries Ltd
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Priority to JP2010105536A priority Critical patent/JP5778895B2/en
Priority to CN201180008034.XA priority patent/CN102741184B/en
Priority to US13/574,879 priority patent/US8919153B2/en
Priority to PCT/JP2011/060362 priority patent/WO2011136324A1/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01Manufacture of glass fibres or filaments
    • C03B37/012Manufacture of preforms for drawing fibres or filaments
    • C03B37/014Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering

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  • Chemical Kinetics & Catalysis (AREA)
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  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Description

本発明は、光ファイバ用のガラス母材を製造する方法に関するものである。   The present invention relates to a method for producing a glass preform for an optical fiber.

光ファイバは、略円柱形状であるガラス母材の一端を加熱し軟化させて線引することで製造される。また、光ファイバ用のガラス母材は、OVD法やMCVD法等の製造方法により製造される。特許文献1には、OVD法によるガラス母材製造方法が開示されている。   An optical fiber is manufactured by heating and softening one end of a glass base material having a substantially cylindrical shape and drawing. Moreover, the glass base material for optical fibers is manufactured by manufacturing methods, such as OVD method and MCVD method. Patent Document 1 discloses a glass base material manufacturing method by the OVD method.

特許文献1に開示されたガラス母材製造方法は、水分含有量が低い光ファイバ用のガラス母材を製造することを意図するものであって、出発棒が種棒パイプに挿入されてなる出発ロッドの外周にガラス微粒子を堆積させてガラス微粒子堆積体を作製し、このガラス微粒子堆積体から出発棒を引き抜いて、軸方向に延在し貫通する中心孔を有するガラス微粒子堆積体とする。そして、このガラス微粒子堆積体を加熱して乾燥・固結させ、中心孔を閉塞して透明なガラス母材を製造する。   The glass base material manufacturing method disclosed in Patent Document 1 is intended to manufacture a glass base material for an optical fiber having a low moisture content, and the starting bar is inserted into a seed bar pipe. A glass fine particle deposit is produced by depositing glass fine particles on the outer periphery of the rod, and a starting rod is pulled out from the glass fine particle deposit to obtain a glass fine particle deposit having a central hole extending in the axial direction. Then, the glass fine particle deposit is heated to dry and solidify, and the central hole is closed to produce a transparent glass base material.

特表2002−543026号公報Japanese translation of PCT publication No. 2002-543026

特許文献1に開示されたガラス母材製造方法では、出発ロッドの外周にガラス微粒子を堆積させてガラス微粒子堆積体を作製する堆積工程の際に、出発棒の軸方向に沿って出発ロッドとガラス微粒子合成用バーナとを相対的に往復運動させ、出発棒の先端部から種棒パイプの一部に亘って出発ロッドの外周にガラス微粒子を堆積させてガラス微粒子堆積体を作製する。このような堆積工程によりガラス微粒子堆積体を作製する場合、ガラス微粒子堆積体が割れて、ガラス母材製造の歩留りが悪化することがある。   In the glass base material manufacturing method disclosed in Patent Document 1, the starting rod and the glass along the axial direction of the starting rod during the deposition process in which glass particulates are deposited on the outer periphery of the starting rod to produce a glass particulate deposit. A fine particle synthesizing burner is relatively reciprocated to deposit glass fine particles on the outer periphery of the starting rod from the tip of the starting rod to a part of the seed rod pipe to produce a glass fine particle deposit. When producing a glass fine particle deposit by such a deposition process, the glass fine particle deposit may be broken and the yield of manufacturing the glass base material may deteriorate.

本発明は、上記問題点を解消する為になされたものであり、高い歩留りでガラス母材を製造することができる方法を提供することを目的とする。   The present invention has been made to solve the above problems, and an object of the present invention is to provide a method capable of producing a glass base material with a high yield.

本発明に係るガラス母材製造方法は、(1)出発棒の先端部が種棒パイプの一端から突出するように出発棒を種棒パイプに挿入し固定して出発ロッドを作製する固定工程と、(2)固定工程の後に、出発棒の軸方向に沿って出発ロッドとガラス微粒子合成用バーナとを相対的に往復運動させ、出発棒の先端部から種棒パイプの一部に亘って出発ロッドの外周にガラス微粒子を堆積させてガラス微粒子堆積体を作製する堆積工程と、(3)堆積工程の後に出発棒を種棒パイプおよびガラス微粒子堆積体から引き抜く引抜工程と、(4)引抜工程の後にガラス微粒子堆積体を加熱して透明ガラス管材を作製する透明化工程と、(5)透明化工程の後に透明ガラス管材の内部を減圧するとともに透明ガラス管材を加熱して中実のガラス母材を作製する中実化工程と、を備える。そして、本発明に係るガラス母材製造方法は、堆積工程において、出発棒の周囲にガラス微粒子合成用バーナを用いて堆積されるガラス微粒子の平均密度を0.2g/cc以上0.4g/cc未満とし、種棒パイプの周囲にガラス微粒子合成用バーナを用いて堆積されるガラス微粒子の平均密度を0.4g/cc以上とすることを特徴とする。
The glass base material manufacturing method according to the present invention includes (1) a fixing step of making a starting rod by inserting and fixing the starting rod into the seed rod pipe so that the tip of the starting rod protrudes from one end of the seed rod pipe; (2) After the fixing step, the starting rod and the glass fine particle synthesizing burner are reciprocated relatively along the axial direction of the starting rod to start from the tip of the starting rod to a part of the seed rod pipe. A deposition step of depositing glass particulates on the outer periphery of the rod to produce a glass particulate deposit; (3) a withdrawal step of drawing the starting rod from the seed rod pipe and the glass particulate deposit after the deposition step; and (4) a withdrawal step. And (5) after the transparentizing step, the inside of the transparent glass tube is depressurized and the transparent glass tube is heated to form a solid glass mother. Make the material It includes a collapsing step. In the glass base material manufacturing method according to the present invention, in the deposition step, the average density of the glass particles deposited using the glass particle synthesis burner around the starting bar is 0.2 g / cc or more and 0.4 g / cc. The average density of the glass particles deposited using a glass particle synthesis burner around the seed rod pipe is set to 0.4 g / cc or more .

なお、上記したガラス微粒子の平均密度とは、堆積工程で最終的に得られたガラス微粒子堆積体において各部位の重量を各部位の体積で割った値である。   The average density of the glass fine particles described above is a value obtained by dividing the weight of each part by the volume of each part in the glass fine particle deposit finally obtained in the deposition step.

本発明に係るガラス母材製造方法は、高い歩留りでガラス母材を製造することができる。   The glass base material manufacturing method according to the present invention can manufacture a glass base material with a high yield.

本実施形態に係るガラス母材製造方法のフローチャートである。It is a flowchart of the glass base material manufacturing method which concerns on this embodiment. 本実施形態に係るガラス母材製造方法の固定工程S1を説明する図である。It is a figure explaining fixing process S1 of the glass base material manufacturing method which concerns on this embodiment. 本実施形態に係るガラス母材製造方法の堆積工程S2を説明する図である。It is a figure explaining deposition process S2 of the glass base material manufacturing method concerning this embodiment. 本実施形態に係るガラス母材製造方法の引抜工程S3を説明する図である。It is a figure explaining drawing-out process S3 of the glass base material manufacturing method concerning this embodiment. 本実施形態に係るガラス母材製造方法の透明化工程S4を説明する図である。It is a figure explaining transparentization process S4 of the glass base material manufacturing method concerning this embodiment. 本実施形態に係るガラス母材製造方法の中実化工程S5を説明する図である。It is a figure explaining solidification process S5 of the glass base material manufacturing method which concerns on this embodiment. 実施例および比較例それぞれでのガラス微粒子の平均密度および良好製造率を纏めた図表である。It is the table | surface which put together the average density and favorable manufacturing rate of the glass fine particle in each of an Example and a comparative example.

以下、添付図面を参照して、本発明を実施するための形態を詳細に説明する。なお、図面の説明において同一の要素には同一の符号を付し、重複する説明を省略する。   DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention will be described in detail with reference to the accompanying drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and redundant description is omitted.

図1は、本実施形態に係るガラス母材製造方法のフローチャートである。この図に示されるように、本実施形態に係るガラス母材製造方法は、固定工程S1,堆積工程S2,引抜工程S3,透明化工程S4および中実化工程S5を順に経て、ガラス母材を製造する。なお、このガラス母材製造方法により製造されるガラス母材は、例えば、線引により光ファイバを製造するための光ファイバ母材であり、或いは、その光ファイバ母材のうちでもコア部となるべきコア母材である。   FIG. 1 is a flowchart of the glass base material manufacturing method according to the present embodiment. As shown in this figure, the glass base material manufacturing method according to the present embodiment passes through a fixing step S1, a deposition step S2, a drawing step S3, a clarification step S4 and a solidification step S5 in order, To manufacture. In addition, the glass base material manufactured by this glass base material manufacturing method is an optical fiber base material for manufacturing an optical fiber by drawing, for example, or becomes a core part among the optical fiber base materials. It should be a core base material.

図2は、本実施形態に係るガラス母材製造方法の固定工程S1を説明する図である。図3は、本実施形態に係るガラス母材製造方法の堆積工程S2を説明する図である。図4は、本実施形態に係るガラス母材製造方法の引抜工程S3を説明する図である。図5は、本実施形態に係るガラス母材製造方法の透明化工程S4を説明する図である。また、図6は、本実施形態に係るガラス母材製造方法の中実化工程S5を説明する図である。   FIG. 2 is a view for explaining the fixing step S1 of the glass base material manufacturing method according to the present embodiment. FIG. 3 is a view for explaining the deposition step S2 of the glass base material manufacturing method according to the present embodiment. FIG. 4 is a view for explaining the drawing step S3 of the glass base material manufacturing method according to the present embodiment. FIG. 5 is a diagram for explaining the transparency step S4 of the glass base material manufacturing method according to the present embodiment. Moreover, FIG. 6 is a figure explaining solidification process S5 of the glass base material manufacturing method which concerns on this embodiment.

固定工程S1(図2)では、出発棒11の先端部11aが種棒パイプ12の一端12aから突出するように、出発棒11が種棒パイプ12に挿入され固定されて、これにより出発ロッド10が作製される(同図(a),(b)参照)。出発棒11は、例えば、アルミナ、ガラス、耐火性セラミクス、カーボンなどの材料からなる。種棒パイプ12は石英ガラスからなる。   In the fixing step S1 (FIG. 2), the starting rod 11 is inserted into the seed rod pipe 12 and fixed so that the tip end portion 11a of the starting rod 11 protrudes from the one end 12a of the seed rod pipe 12, whereby the starting rod 10 Is produced (see FIGS. 1A and 1B). The starting rod 11 is made of a material such as alumina, glass, refractory ceramics, or carbon. The seed rod pipe 12 is made of quartz glass.

この出発ロッド10において種棒パイプ12の一端12aから突出している出発棒11の部分の外周は、都市ガスバーナやアセチレンバーナなどを用いたバーナ20からの火炎によりカーボン皮膜11bが形成されるのが好適である(同図(c))。カーボン皮膜形成中も、出発ロッド10は出発棒11の中心軸を中心として回転し、バーナ20は、出発棒11の軸方向に沿って出発ロッド10に対して相対的に往復運動を繰り返す。   In the starting rod 10, a carbon film 11 b is preferably formed on the outer periphery of the portion of the starting rod 11 protruding from the one end 12 a of the seed rod pipe 12 by a flame from the burner 20 using a city gas burner or an acetylene burner. ((C) in the figure). Even during the formation of the carbon film, the starting rod 10 rotates about the central axis of the starting rod 11, and the burner 20 repeatedly reciprocates relative to the starting rod 10 along the axial direction of the starting rod 11.

固定工程S1の後の堆積工程S2(図3)では、出発棒11が種棒パイプ12に挿入され固定されてなる出発ロッド10は、出発棒11の中心軸を中心として回転される。また、出発ロッド10の側方に配置されて酸水素火炎を形成するガラス微粒子合成用バーナ21は、出発棒11の軸方向に沿って出発ロッド10に対して相対的に往復運動を繰り返す。そして、OVD法により、出発棒11の先端部11aから種棒パイプ12の一部に亘って出発ロッド10の外周にガラス微粒子が堆積されて、これによりガラス微粒子堆積体13が作製される。   In the deposition step S2 (FIG. 3) after the fixing step S1, the starting rod 10 in which the starting rod 11 is inserted and fixed in the seed rod pipe 12 is rotated about the central axis of the starting rod 11. Further, the glass fine particle synthesis burner 21 that is arranged on the side of the starting rod 10 and forms an oxyhydrogen flame repeats reciprocating movement relative to the starting rod 10 along the axial direction of the starting rod 11. Then, by the OVD method, glass fine particles are deposited on the outer periphery of the starting rod 10 from the tip portion 11a of the starting rod 11 to a part of the seed rod pipe 12, whereby the glass fine particle deposit 13 is produced.

堆積工程S2では、ガラス微粒子合成用バーナ21における供給原料流量をトラバース毎に調整する。これにより、出発棒11の外周に堆積されるガラス微粒子は、径方向に所定の組成分布(すなわち、後のガラス母材または光ファイバにおける径方向の屈折率分布)を有することになる。   In the deposition step S2, the feed material flow rate in the glass fine particle synthesis burner 21 is adjusted for each traverse. Thereby, the glass fine particles deposited on the outer periphery of the starting rod 11 have a predetermined composition distribution in the radial direction (that is, a refractive index distribution in the radial direction in the subsequent glass preform or optical fiber).

堆積工程S2において、出発棒11の周囲に堆積されるガラス微粒子の平均密度より、種棒パイプ12の周囲に堆積されるガラス微粒子の平均密度が大きくなるようにする。また、堆積工程S2において、出発棒11の周囲に堆積されるガラス微粒子の平均密度を0.2g/cc以上0.4g/cc未満とし、種棒パイプ12の周囲に堆積されるガラス微粒子の平均密度を0.4g/cc以上とすることが好ましい。なお、ガラス微粒子の平均密度とは、堆積工程で最終的に得られたガラス微粒子堆積体において各部位の重量を各部位の体積で割った値である。   In the deposition step S2, the average density of the glass particles deposited around the seed rod pipe 12 is made larger than the average density of the glass particles deposited around the starting rod 11. Further, in the deposition step S2, the average density of the glass particles deposited around the starting rod 11 is set to 0.2 g / cc or more and less than 0.4 g / cc, and the average of the glass particles deposited around the seed rod pipe 12 is set. The density is preferably 0.4 g / cc or more. The average density of the glass fine particles is a value obtained by dividing the weight of each part by the volume of each part in the glass fine particle deposit finally obtained in the deposition step.

堆積工程S2の後の引抜工程S3(図4)では、種棒パイプ12およびガラス微粒子堆積体13から出発棒11が引き抜かれる。このとき、種棒パイプ12とガラス微粒子堆積体13とは互いに固定されたままである。なお、固定工程S1後において種棒パイプ12の一端12aから突出している出発棒11の部分の外周にカーボン皮膜を形成するため、この引抜工程S3で出発棒11が引き抜かれる際にガラス微粒子堆積体13の中心孔の内壁面にキズが付くことが防止される。   In the extraction step S3 (FIG. 4) after the deposition step S2, the starting rod 11 is extracted from the seed rod pipe 12 and the glass particulate deposit 13. At this time, the seed rod pipe 12 and the glass fine particle deposit 13 remain fixed to each other. In addition, in order to form a carbon film on the outer periphery of the portion of the starting rod 11 protruding from the one end 12a of the seed rod pipe 12 after the fixing step S1, when the starting rod 11 is pulled out in this drawing step S3, a glass particulate deposit It is possible to prevent the inner wall surface of the 13 central hole from being scratched.

引抜工程S3の後の透明化工程S4(図5)では、ガラス微粒子堆積体13は、一体となっている種棒パイプ12とともに、HeガスやClガスが導入された加熱炉22の内部に入れられ、ヒータ23により加熱される。これにより、透明ガラス管材14が作製される。 In the clearing step S4 (FIG. 5) after the drawing step S3, the glass fine particle deposit 13 is placed inside the heating furnace 22 into which He gas and Cl 2 gas are introduced, together with the integrated seed rod pipe 12. It is put in and heated by the heater 23. Thereby, the transparent glass tube material 14 is produced.

透明化工程S4の後の中実化工程S5(図6)では、透明ガラス管材14は、加熱炉に設置されて回転され、中心孔にSFが導入されるとともにヒータ24により加熱されて、中心孔の内壁面が気相エッチングされる(同図(a))。次いで、透明ガラス管材14は、内部が減圧されるとともにヒータ24により加熱されて中実化され(同図(b))、これにより中実のガラス母材が作製される。 In the solidification step S5 (FIG. 6) after the transparentization step S4, the transparent glass tube 14 is placed in a heating furnace and rotated, and SF 6 is introduced into the center hole and heated by the heater 24. The inner wall surface of the center hole is vapor-phase etched (FIG. 1A). Next, the transparent glass tube material 14 is decompressed and heated by the heater 24 to be solidified (FIG. 5B), whereby a solid glass base material is produced.

このようにして製造された透明なガラス母材は、さらにその外側にクラッド層形成・透明化処理などされてプリフォーム化された後、先端を加熱・軟化されて線引きされることで、光ファイバが製造される。   The transparent glass preform manufactured in this way is further formed into a clad layer on the outside and subjected to a transparent treatment, and then preformed, and then the tip is heated and softened to draw an optical fiber. Is manufactured.

本実施形態では、堆積工程S2において、出発棒11の周囲に堆積されるガラス微粒子の平均密度より、種棒パイプ12の周囲に堆積されるガラス微粒子の平均密度が大きくされる。このように石英ガラス製の種棒パイプ12の周囲に堆積されるガラス微粒子の平均密度を、それより下部の出発棒11の周囲に堆積されるガラス微粒子の平均密度より高くする(固くする)ことにより、上部に堆積されたガラス微粒子で下部に堆積されたガラス微粒子を十分支えることができるので、ガラス微粒子堆積体の割れが生じにくくなる。この種棒パイプ12の周囲に堆積されるガラス微粒子の平均密度が0.4g/cc以上であれば、種棒パイプ12との密着力も十分とれ、下部に堆積したガラス微粒子を支えることができる。一方、出発棒11の周囲に堆積されるガラス微粒子の密度を下げることにより、引抜工程S3で出発棒11が引き抜かれた後のガラス微粒子堆積体の中心孔の内表面が滑らかになり、中心孔の内表面に傷が入りにくくなるので、ガラス微粒子堆積体の透明化後や透明ガラス管材のコラプス中に、透明ガラス管材が割れる確率を低くすることができる。このためには、出発棒11の周囲に堆積されるガラス微粒子の密度を0.4g/cc未満にすれば良い。但し、出発棒11の周囲に堆積されるガラス微粒子の平均密度が0.2g/cc未満であると、ガラス微粒子堆積体の強度を十分に保てなくなるので、平均密度は0.2g/cc以上0.4g/cc未満が好ましい。   In the present embodiment, in the deposition step S <b> 2, the average density of the glass particles deposited around the seed rod pipe 12 is made larger than the average density of the glass particles deposited around the starting rod 11. Thus, the average density of the glass particles deposited around the seed rod pipe 12 made of quartz glass is made higher (hardened) than the average density of the glass particles deposited around the starting rod 11 below it. Thus, the glass fine particles deposited on the upper part can sufficiently support the glass fine particles deposited on the lower part, so that the glass fine particle deposit is less likely to break. If the average density of the glass fine particles deposited around the seed rod pipe 12 is 0.4 g / cc or more, the adhesion with the seed rod pipe 12 is sufficient, and the glass fine particles deposited on the lower portion can be supported. On the other hand, by reducing the density of the glass fine particles deposited around the starting rod 11, the inner surface of the central hole of the glass fine particle deposit after the starting rod 11 is drawn in the drawing step S3 becomes smooth. Since the inner surface of the glass is less likely to be scratched, the probability that the transparent glass tube breaks can be reduced after the glass particulate deposit is made transparent or during the collapse of the transparent glass tube. For this purpose, the density of the fine glass particles deposited around the starting rod 11 may be less than 0.4 g / cc. However, if the average density of the glass fine particles deposited around the starting bar 11 is less than 0.2 g / cc, the strength of the glass fine particle deposit cannot be maintained sufficiently, so the average density is 0.2 g / cc or more. Less than 0.4 g / cc is preferred.

次に、本実施形態に係るガラス母材製造方法の実施例について説明する。本実施例では、グレーデッドインデックス型の光ファイバを線引により製造するためのガラス母材が製造される。   Next, examples of the glass base material manufacturing method according to the present embodiment will be described. In the present embodiment, a glass base material for manufacturing a graded index optical fiber by drawing is manufactured.

堆積工程S2においてOVD装置が用いられてガラス微粒子の堆積が行われる。出発棒11として、外径9〜10mmで長さ1200mmのアルミナ製のものが使用される。種棒パイプ12として、長さ600mm、外径20〜40mm、内径9.8〜21mmの石英ガラス製のものが使用される。   In the deposition step S2, an OVD apparatus is used to deposit glass particles. The starting rod 11 is made of alumina having an outer diameter of 9 to 10 mm and a length of 1200 mm. The seed rod pipe 12 is made of quartz glass having a length of 600 mm, an outer diameter of 20 to 40 mm, and an inner diameter of 9.8 to 21 mm.

堆積工程S2において酸水素火炎を形成するガラス微粒子合成用バーナ21に投入されるガラス原料ガスは、SiCl(投入量1〜3SLM/本)およびGeCl(投入量0.0〜0.3SLM)である。 The glass raw material gases introduced into the glass fine particle synthesis burner 21 forming an oxyhydrogen flame in the deposition step S2 are SiCl 4 (input amount 1 to 3 SLM / piece) and GeCl 4 (input amount 0.0 to 0.3 SLM). It is.

種棒パイプ12の一端12aに0.5mmの段差が生じている。ガラス微粒子合成用バーナ21に対する出発ロッド10の相対移動速度は3〜1500mm/分とされる。   A step of 0.5 mm is formed at one end 12 a of the seed rod pipe 12. The relative moving speed of the starting rod 10 with respect to the glass fine particle synthesizing burner 21 is 3 to 1500 mm / min.

このような堆積工程S2の後、引抜工程S3および透明化工程S4を経て中実化工程S5が行われる。中実化工程S5では、透明ガラス管材14は、加熱炉に設置されて30rpmで回転され、速度5〜20mm/分で透明ガラス管材14の長手方向に移動する加熱炉により温度1900〜2200℃に加熱される。なお、中実化工程S5における加熱手段は、カーボンヒータや電磁誘導コイル式発熱体などを熱源とする加熱炉の替わりに、酸水素バーナ旋盤を用いても良い。このとき、透明ガラス管材14の中心孔の内部に50〜100sccmのSFガスが流されて、透明ガラス管材14の中心孔の内壁面が気相エッチングされる。 After such a deposition step S2, a solidification step S5 is performed through a drawing step S3 and a transparency step S4. In the solidification step S5, the transparent glass tube 14 is set in a heating furnace, rotated at 30 rpm, and moved to the longitudinal direction of the transparent glass tube 14 at a speed of 5 to 20 mm / min. Heated. The heating means in the solidification step S5 may use an oxyhydrogen burner lathe instead of a heating furnace that uses a carbon heater, an electromagnetic induction coil heating element, or the like as a heat source. At this time, 50 to 100 sccm of SF 6 gas is flowed into the center hole of the transparent glass tube material 14, and the inner wall surface of the center hole of the transparent glass tube material 14 is vapor-phase etched.

次いで、透明ガラス管材14は、中心孔の内部が0.1〜10kPaに減圧され、エッチング時と同じ温度にて中実化されて、ガラス母材が製造される。   Next, the transparent glass tube material 14 is decompressed to 0.1 to 10 kPa in the center hole, and is solidified at the same temperature as during the etching to produce a glass base material.

このようにして製造されるガラス母材は、所望の径に延伸されて、その外周にOVD法でジャケットガラスが合成されて、光ファイバ用ガラス母材が製造される。この光ファイバ用ガラス母材が線引きされて、グレーデッドインデックス型のマルチモードファイバが製造される。   The glass base material manufactured in this way is stretched to a desired diameter, and jacket glass is synthesized on the outer periphery thereof by the OVD method to manufacture a glass base material for an optical fiber. This glass preform for optical fiber is drawn to produce a graded index type multimode fiber.

図7は、実施例および比較例それぞれでのガラス微粒子の平均密度および良好製造率を纏めた図表である。ここでは、出発棒11の周囲に堆積されるガラス微粒子の平均密度X(g/cc)、および、種棒パイプ12の周囲に堆積されるガラス微粒子の平均密度Y(g/cc)それぞれが各値とされて、ガラス微粒子堆積体若しくは透明ガラス管材において割れが生じない確率である良好製造率Z(%)が比較評価される。この図表に示されるとおり、出発棒11の周囲に堆積されるガラス微粒子の平均密度Xが0.2g/cc以上0.4g/cc未満であって、種棒パイプ12の周囲に堆積されるガラス微粒子の平均密度Yが0.4g/cc以上であれば、良好製造率Zは97%以上であり、高い歩留りでガラス母材が製造され得る。なお、図表中の「透明ガラス管材の割れ」は、出発棒11の周囲に堆積されるガラス微粒子の平均密度Xが高すぎて、孔内表面に傷が入り、ガラス微粒子堆積体の状態では割れなかったものの、透明化後に割れたことを意味する。   FIG. 7 is a chart summarizing the average density and good production rate of the glass fine particles in each of the examples and comparative examples. Here, the average density X (g / cc) of the glass fine particles deposited around the starting rod 11 and the average density Y (g / cc) of the glass fine particles deposited around the seed rod pipe 12 are respectively shown. The good production rate Z (%), which is a probability that no cracks are generated in the glass fine particle deposit or the transparent glass tube, is comparatively evaluated. As shown in this chart, the average density X of the glass particles deposited around the starting rod 11 is not less than 0.2 g / cc and less than 0.4 g / cc, and the glass deposited around the seed rod pipe 12 If the average density Y of the fine particles is 0.4 g / cc or more, the good production rate Z is 97% or more, and a glass base material can be produced with a high yield. In addition, the “cracking of the transparent glass tube material” in the chart indicates that the average density X of the glass particles deposited around the starting rod 11 is too high, and the inner surface of the hole is scratched. Although it did not exist, it means that it broke after clearing.

10…出発ロッド、11…出発棒、12…種棒パイプ、13…ガラス微粒子堆積体、14…透明ガラス管材、20…バーナ、21…ガラス微粒子合成用バーナ、22…加熱炉、23,24…ヒータ。
DESCRIPTION OF SYMBOLS 10 ... Departure rod, 11 ... Departure rod, 12 ... Seed rod pipe, 13 ... Glass particulate deposit, 14 ... Transparent glass tube, 20 ... Burner, 21 ... Glass particulate synthesis burner, 22 ... Heating furnace, 23, 24 ... heater.

Claims (1)

出発棒の先端部が種棒パイプの一端から突出するように前記出発棒を前記種棒パイプに挿入し固定して出発ロッドを作製する固定工程と、
前記固定工程の後に、前記出発棒の軸方向に沿って前記出発ロッドとガラス微粒子合成用バーナとを相対的に往復運動させ、前記出発棒の先端部から前記種棒パイプの一部に亘って前記出発ロッドの外周にガラス微粒子を堆積させてガラス微粒子堆積体を作製する堆積工程と、
前記堆積工程の後に前記出発棒を前記種棒パイプおよび前記ガラス微粒子堆積体から引き抜く引抜工程と、
前記引抜工程の後に前記ガラス微粒子堆積体を加熱して透明ガラス管材を作製する透明化工程と、
前記透明化工程の後に前記透明ガラス管材の内部を減圧するとともに前記透明ガラス管材を加熱して中実のガラス母材を作製する中実化工程と、
を備え、
前記堆積工程において、前記出発棒の周囲に前記ガラス微粒子合成用バーナを用いて堆積されるガラス微粒子の平均密度を0.2g/cc以上0.4g/cc未満とし、前記種棒パイプの周囲に前記ガラス微粒子合成用バーナを用いて堆積されるガラス微粒子の平均密度を0.4g/cc以上とする、
ことを特徴とするガラス母材製造方法。
A fixing step of making the starting rod by inserting and fixing the starting rod into the seed rod pipe such that the tip of the starting rod protrudes from one end of the seed rod pipe;
After the fixing step, the starting rod and the glass fine particle synthesizing burner are reciprocated relatively along the axial direction of the starting rod, and extend from the tip of the starting rod to a part of the seed rod pipe. A deposition step of depositing glass particulates on the outer periphery of the starting rod to produce a glass particulate deposit;
A drawing step of drawing the starting rod from the seed rod pipe and the glass particulate deposit after the deposition step;
A transparentization step of heating the glass particulate deposit after the drawing step to produce a transparent glass tube,
A solidification step of reducing the inside of the transparent glass tube material after the transparentizing step and heating the transparent glass tube material to produce a solid glass base material,
With
In the deposition step, an average density of glass particles deposited using the glass particle synthesis burner around the starting rod is set to 0.2 g / cc or more and less than 0.4 g / cc, and the seed rod pipe is surrounded by the average density. The average density of the glass particles deposited using the glass particle synthesis burner is 0.4 g / cc or more .
The glass base material manufacturing method characterized by the above-mentioned.
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