JP5796032B2 - Manufacturing method of magnetic head suspension - Google Patents

Description

  The present invention relates to a method of manufacturing a magnetic head suspension that supports a magnetic head slider that reads and / or writes data to a storage medium such as a hard disk.

  The magnetic head suspension that supports the magnetic head slider is required to position the magnetic head slider at the center of the target track at high speed and with high accuracy.

  That is, the magnetic head suspension is configured such that the base end side is swung directly or indirectly around the swing center by an actuator such as a voice coil motor so that the magnetic head slider supported on the front end side is parallel to the disk surface. Move to the target track along the seek direction.

  Therefore, in order to position the magnetic head slider on the target track at high speed and accurately, even if the frequency of the drive signal of the actuator is increased, the vibration of the magnetic head slider can be reduced as much as possible. Thus, it is necessary to configure the magnetic head suspension.

  By the way, when the magnetic head suspension is swung by the actuator, vibrations of various vibration modes are generated in the magnetic head suspension, but this vibration hinders accurate positioning of the magnetic head slider with respect to the target track.

  In particular, among the various vibration modes that can occur in the magnetic head suspension, the resonance frequencies of the torsional primary mode, the torsional secondary mode, the torsional tertiary mode, and the SWAY mode (swing mode) are present in the low frequency band. It is important to prevent as much as possible the positional deviation of the magnetic head slider from the target track due to vibrations in these vibration modes.

  For example, Patent Document 1 below discloses a magnetic head suspension in which two bending portions are provided in a load bending portion of the magnetic head suspension and the bending angles of the two bending portions are the same.

  In the magnetic head suspension described in Patent Document 1, the bending angle of the two bending portions can be reduced as compared with a configuration in which a single bending portion is provided in the load bending portion. It is said that the bump height when the head suspension is loaded can be reduced to reduce the gain at resonance.

  This conventional configuration reduces the gain during torsional mode vibration, but does not take into account any positional deviation (gain) from the target track of the magnetic head slider due to SWAY mode vibration. .

  The positional deviation amount (gain) of the magnetic head slider from the target track due to the vibration of the SWAY mode cannot be reduced by adjusting the bending angle of the bending portion provided in the magnetic head suspension.

  That is, in order to prevent or reduce the positional deviation of the magnetic head slider from the target track due to the vibration of the SWAY mode, it is necessary to configure the magnetic head suspension so that the vibration of the SWAY mode does not easily occur. In other words, even if the frequency of the drive signal of the actuator is increased by increasing the resonance frequency of the SWAY mode of the magnetic head suspension as much as possible, the resonance of the SWAY mode is generated in the magnetic head suspension as much as possible. Need to be prevented.

Japanese Patent Laid-Open No. 11-007740

  The present invention has been made in view of the above prior art, and an efficient method of manufacturing a magnetic head suspension capable of effectively increasing the resonance frequency of the SWAY mode while reducing the gain of the magnetic head slider with respect to torsional mode vibration. The purpose is to provide.

In order to achieve the above object, the present invention provides a support portion that is swinged directly or indirectly by an actuator in a seek direction parallel to the disk surface, and a magnetic head slider supported by the support portion on the disk surface. A load bending portion that generates a pressing load to be pressed, a load beam portion that is supported by the support portion via the load bending portion and transmits the pressing load to the magnetic head slider, and supports the magnetic head slider. a head mounting region, wherein a flexure portion which is fixed to the load beam portion, the load beam section has a dimple that engages the rear surface opposite to the disk surface in the head mounting region, The first LB bend line is bent at a first LB bend angle θ1 and is different from the first LB bend line in the longitudinal direction of the suspension. And bent at a second LB bend line at a second LB bend angle θ2 in a direction different from the bend direction at the first LB bend line, and the load bend is bent at a load bend angle θ3 around the load bend line. The magnetic head suspension manufacturing method according to claim 1, wherein a predetermined pressing load is generated when the suspension is in a load-on state, and the load beam portion is positioned on a proximal side from the first and second LB bend lines. A plurality of bending angle sets of the first LB bending angle θ1, the second LB bending angle θ2, and the load bending angle θ3 that make the base end side region parallel to the disk surface, and torsion mode for each of the plurality of bending angle sets Analyzing or measuring the gain to obtain the relationship between the first LB bending angle θ1 and the torsion mode gain, and the torsion mode gain from the relationship The first LB bending angle θ1 (min) to be minimized is detected, a predetermined pressing load is generated when the magnetic head suspension having the first LB bending angle θ1 (min) is in a load-on state, and the base side A method of manufacturing a magnetic head suspension configured to find a set of bending angles of a second LB bending angle θ2 and a load bending angle θ3 that make the regions parallel to each other is provided.

  Preferably, the first LB bending angle θ1, the second LB bending angle θ2, and the load bending angle θ3 are bent so that the base end region is parallel to the disk surface while generating a predetermined pressing load in the load-on state. The step of finding a plurality of angle sets includes a first LB bending angle selection step of selecting an arbitrary angle as the first LB bending angle θ1, a second LB bending angle selection step of selecting an arbitrary angle as the second LB bending angle θ2, The load bending portion so that the load bending portion generates a predetermined pressing load when the suspension having the arbitrary angle currently selected as the first LB bending angle θ1 and the second LB bending angle θ2 is in a load-on state. The load bending angle determination step for determining the angle θ3 and the first LB bending angle θ1 and the second LB bending angle θ2 are currently selected. When the suspension having the arbitrary angle and the load bending angle θ3 determined by the load bending angle determination step is in a load-on state, the first and second loads of the load beam portion are set. A parallel determination step of determining whether or not a base end side region from the bend line is parallel to the disk surface, and when the parallel determination step determines that the region is parallel, the second LB bending angle θ2 and the A predetermined pressing load is generated in the load-on state and the base end region is made parallel to the angle currently recognized as the load bending angle θ3 with respect to the angle currently selected as the first LB bending angle θ1. Is determined as the second LB bending angle θ2 when it is determined that it is not parallel by the parallel determination step. Another angle different from the selected angle is selected again, and the suspension having the angle currently selected as the first LB bending angle θ1 and the angle selected again as the second LB bending angle θ2 is brought into the load-on state. The load bending angle θ3 is determined so that the load bending portion generates the predetermined pressing load, and when the suspension having these bending angles is in a load-on state, the base end side region is the disk. The operation of determining whether or not the plane is parallel to the surface is repeated, and a predetermined pressing load is generated in the load-on state with respect to the angle currently selected as the first LB bending angle θ1, and the base A bend angle set detecting step of finding a bend angle set of a second LB bend angle θ2 and a load bend angle θ3 that make the end regions parallel, and the first LB bend angle θ1; Then, at least one other arbitrary angle different from the arbitrary angle is selected, and the same operation as the process from the second LB bending angle selection step to the bending angle set detection step is performed for each selected other arbitrary angle. And another bending angle set detection step of finding a bending angle set of the second LB bending angle θ2 and the load bending angle θ3 that generates a predetermined pressing load in the load-on state and makes the proximal side region parallel to each other. It is supposed to include.

  In one embodiment, the first LB bend line is positioned closer to the proximal side in the suspension longitudinal direction than the second LB bend line.

  In the first aspect, preferably, the first LB bend line is disposed at a substantially longitudinal center of the suspension beam between the base end portion of the load beam portion and the dimple, and the second LB bend line is the first LB bend line and the dimple. It is arranged at the approximate center in the longitudinal direction of the suspension.

In the various configurations, preferably, the load bending line may include a proximal load bending line and a distal load bending line that are located on the suspension longitudinal direction proximal end side and the distal end side, respectively.
In this case, the resultant force of the load generated by the bent portion around the proximal load bending line and the load generated by the bent portion around the distal load bending line define the pressing load.

  According to the method of manufacturing a magnetic head suspension according to the present invention, the first LB bending angle θ1 that causes the base end side region of the load beam portion to be parallel to the disk surface while generating a predetermined pressing load in the load-on state. Then, a plurality of bending angle sets of the second LB bending angle θ2 and the load bending angle θ3 are found, and the relationship between the first LB bending angle θ1 and the torsion mode gain is obtained by performing analysis or measurement on the torsion mode gain for each of the plurality of bending angle sets. The first LB bending angle θ1 (min) that minimizes the torsional mode gain is detected from the above relationship, and the magnetic head suspension with the first LB bending angle θ1 (min) is predetermined when the load is on. The second LB bending angle θ2 and the bending angle set of the load bending angle θ3 that generate a pressing load of 2 mm and make the base end side region parallel are seen. As a result, the magnetic head suspension capable of effectively increasing the resonance frequency of the SWAY mode can be efficiently manufactured while reducing the gain of the magnetic head slider with respect to torsional mode vibration.

FIG. 1 is a top view of a magnetic head suspension manufactured by a manufacturing method according to an embodiment of the present invention. FIG. 2 is a cross-sectional view taken along the line II-II in FIG. FIG. 3 is a side view of the magnetic head suspension shown in FIG. FIG. 4 is an enlarged longitudinal sectional side view along the suspension longitudinal direction center line CL of the IV portion in FIG. 3. 5A to 5D are process block diagrams of the manufacturing method according to one embodiment of the present invention. FIG. 6 is a top view of a modified example of the magnetic head suspension shown in FIG. FIG. 7 is a process block diagram of a manufacturing method according to a modification of the embodiment. FIG. 8 is a top view of another modification of the magnetic head suspension shown in FIG.

  Hereinafter, a preferred embodiment of a method of manufacturing a magnetic head suspension according to the present invention will be described with reference to the accompanying drawings.

  FIG. 1 is a top view of a magnetic head suspension 1A manufactured by the magnetic head suspension manufacturing method according to the present embodiment (a plan view viewed from the side opposite to the disk surface), and FIG. A cross-sectional view along the line is shown.

  Further, FIG. 3 shows a load-on state of the magnetic head suspension 1A (which is mounted on the hard disk device in a state where the load bending portion 20 described below in the magnetic head suspension 1A is bent back and the air pressure associated with the rotation of the disk surface 100 is described below. The side view of the state in which the load bending portion 20 is further bent back by the flying of the magnetic head slider 50 is shown.

First, the magnetic head suspension 1A will be described.
As shown in FIGS. 1 to 3, the magnetic head suspension 1A is directly or indirectly swung around a swing center in a seek direction parallel to the disk surface by an actuator (not shown) such as a voice coil motor. The supporting portion 10, the load bending portion 20 having a base end connected to the supporting portion 10 so as to generate a pressing load for pressing the magnetic head slider 50 toward the disk surface, and the load bending A load beam portion 30 that is supported by the support portion 10 via the portion 20 and transmits the pressing load to the magnetic head slider 50, and is supported by the load beam portion 30 while supporting the magnetic head slider 50. And a flexure unit 40.

  The support portion 10 is a member that supports the load beam portion 30 via the load bending portion 20 while being directly or indirectly connected to the actuator, and has a relatively high rigidity.

  In this embodiment, as shown in FIGS. 1 and 3, the support portion 10 includes a boss portion 15 that is joined by caulking to the tip of a carriage arm (not shown) connected to the actuator. The base plate.

The support part 10 is preferably formed by a stainless plate having a thickness of 0.1 mm to 0.8 mm, for example.
As a matter of course, an arm whose base end portion is connected to the swing center of the actuator can be adopted as the support portion 10.

  As described above, the load beam portion 30 is a member for transmitting the pressing load generated by the load bending portion 20 to the magnetic head slider 50, and therefore a predetermined rigidity is required.

As shown in FIGS. 1 and 3, the load beam portion 30 has a flat plate-like main body portion 31 that faces the disk surface 100.
The load beam portion 30 is preferably formed by a stainless plate having a thickness of 0.02 mm to 0.1 mm, for example.

  In the present embodiment, as shown in FIGS. 1 to 3, the load beam portion 30 further includes a pair of left and right flanges extending from opposite sides of the main body portion 31 in the suspension width direction in the direction opposite to the disk surface 100. A portion 32 is provided, and the flange portion 32 improves the rigidity.

As shown in FIGS. 1 and 3, the load beam portion 30 has a projection called a dimple 33 on the distal end side of the main body portion 31.
The dimple 33 protrudes, for example, about 0.05 mm to 0.1 mm in the direction approaching the disk surface 100. The dimple 33 is in contact with the upper surface of the following head mounting region 415 in the flexure section 40 (the back surface opposite to the support surface that supports the magnetic head slider 50), and the pressing load is applied to the dimple 33 through the dimple 33. This is transmitted to the head mounting area 415 of the flexure unit 40.

  As shown in FIGS. 1 and 3, the load beam portion 30 differs from the first LB bend line 38 (1) bent around the first LB bend line BL1 with respect to the longitudinal direction of the suspension. And a second LB bent portion 38 (2) bent around the second LB bent line BL2 provided at the position.

FIG. 4 shows an enlarged longitudinal side view along the suspension longitudinal direction center line CL (see FIG. 1) of the IV part in FIG.
As shown in FIG. 1, FIG. 3 and FIG. 4, in the present embodiment, the first LB bend line BL1 is disposed closer to the suspension longitudinal direction base end side than the second LB bend line BL2.

  In such a configuration, the main body portion 31 of the load beam portion 30 includes the base end side region 31a located on the base end side in the suspension longitudinal direction from the first LB bend line BL1, and the first and first portions in the suspension longitudinal direction. It is divided into an intermediate region 31b located between the 2LB bend lines BL1 and BL2 and a tip side region 31c located on the tip side in the suspension longitudinal direction from the second LB bend line BL2.

  As shown in FIGS. 3 and 4, in the present embodiment, the first LB bent portion 38 (1) is convex toward the disk surface 100.

  Specifically, the intermediate region 31b is arranged around the first LB bend line BL1 with respect to the proximal end region 31a so that the intermediate region 31b moves away from the disk surface 100 as it goes to the distal end side as compared with the proximal end region 31a. Thus, the first LB bent portion 38 (1) forms a convex shape toward the disk surface.

The bending direction at the second LB bending line BL2 is different from the bending direction at the first LB bending line BL1.
That is, as shown in FIGS. 3 and 4, the second LB bent portion 38 (2) is convex toward the side opposite to the disk surface 100.

  Specifically, the tip end region 31c is bent around the second LB bend line BL2 with respect to the intermediate region 31b so that the tip end region 31c is closer to the disc surface 100 as it goes to the tip side than the intermediate region 31b. Thus, the second LB bent portion 38 (2) forms a convex shape that faces the side opposite to the disk surface 100.

  In the present embodiment, as shown in FIG. 1, both the first and second LB bend lines BL1 and BL2 are along the suspension width direction, but the present invention is not limited to such a form. Absent.

  That is, the first LB bend line BL1 is symmetrical with respect to the suspension width direction with respect to the suspension longitudinal center line CL, and is more distal than the first LB bend line BL1 by bending around the first LB bend line BL1. The first LB bend line BL1 can be inclined with respect to the suspension width direction as long as the part is close to or away from the disk surface 100 as compared to the part on the base end side.

  For example, the suspension width direction one inclined so that the first LB bend line BL1 is positioned at the proximal end side or the distal end side in the suspension longitudinal direction as it goes from the reference position on the suspension longitudinal direction center line CL to the suspension width direction one side. It can be configured to have a portion on the other side and a portion on the other side in the suspension width direction that is symmetric with respect to the portion on one side in the suspension width direction with respect to the suspension longitudinal direction center line CL.

  According to such a configuration, it is possible to finely adjust the deformation state of the flange portion 32 by the bending process around the first LB bend line BL1, and to perform the bending process around the first LB bend line BL2 while suppressing the deformation of the flange part 32. realizable.

  Similarly, the second LB bend line BL1 is symmetrical with respect to the suspension width direction with respect to the suspension longitudinal center line CL, and is more distal than the second LB bend line BL2 by bending around the second LB bend line BL2. It is also possible to incline the second LB bend line BL2 with respect to the suspension width direction as long as this part is close to or away from the disk surface 100 as compared to the base end part.

  For example, the suspension width direction one inclined such that the second LB bend line BL2 is positioned at the proximal end side or the distal end side in the suspension longitudinal direction as it goes from the reference position on the suspension longitudinal direction center line CL to the suspension width direction one side. It can be configured to have a portion on the other side and a portion on the other side in the suspension width direction that is symmetric with respect to the portion on one side in the suspension width direction with respect to the suspension longitudinal direction center line CL.

  According to such a configuration, it is possible to finely adjust the deformation state of the flange portion 32 due to the bending process around the second LB bend line BL2, and to perform the bending process around the second LB bend line BL2 while suppressing the deformation of the flange part 32. realizable.

  In the present embodiment, as shown in FIGS. 1 and 3, the load beam portion 30 further integrally includes a lift tab 34 that extends from the distal end of the main body portion 31 toward the distal end side in the suspension longitudinal direction. .

  The lift tab 34 includes a ramp provided in the hard disk device when the magnetic head suspension 1A is swung by the actuator so that the magnetic head slider 50 is positioned radially outward of the disk surface 100. It is a member for engaging and separating the magnetic head slider 50 from the disk surface 100 in the z direction orthogonal to the disk surface 100.

  In this embodiment, as shown in FIGS. 1 and 3, both sides of the load beam portion 30 in the suspension width direction of the main body portion 31 are centered in the suspension longitudinal direction from the suspension longitudinal direction base end side to the distal end side. It is inclined substantially linearly so as to be close to the line CL.

  According to such a configuration, the moment of inertia around the center line CL on the distal end side of the load beam portion 30 can be reduced, and the resonance frequency of the torsion mode and the SWAY mode can be increased.

  As shown in FIGS. 1 and 3, the load bending portion 20 has a pair of left and right leaf springs 21 disposed so that the plate surface faces the disk surface 100.

  The pair of leaf springs 21 are separated from each other in the suspension width direction, a base end portion is connected to a front end side of the support portion 10, and a front end portion is a base of the main body portion 31 of the load beam portion 30. It is connected to the end.

As shown in FIGS. 1 and 3, the pair of leaf springs 21 are bent around the load bending line PL so that the tip side is close to the disk surface 100.
The bending angle around the load bending line PL is set so as to generate a predetermined pressing load when the magnetic head suspension 1A is in the load-on state.

  Specifically, the magnetic head suspension 1A is incorporated into the hard disk device in a state where the leaf spring 21 bent around the load bending line PL is bent back by a predetermined amount and has retained elasticity.

  When the hard disk device is activated and the disk surface 100 is rotated, the magnetic head slider 50 receives air pressure accompanying the rotation of the disk surface 100 and floats away from the disk surface 100. In response to the flying operation of the magnetic head slider 50, the leaf spring 21 is further elastically deformed in the bending back direction, and the retained elasticity is increased.

  The load-on state means a state in which the magnetic head slider 50 floats due to air pressure accompanying the rotation of the disk surface 100. In this state, the load bending portion 20 generates a predetermined pressing load. Thus, a bending angle around the load bending line PL is set.

  Specifically, the position of the magnetic head slider 50 (for example, the disk-facing surface of the magnetic head slider 50) and the magnetic head suspension 1A in the z direction perpendicular to the disk surface 100 in the load-on state. A z-direction distance ZH between a fixed reference portion (for example, an upper surface opposite to the disk surface in the support portion 10) is determined as a set height according to specifications.

  Accordingly, the leaf spring 21 is bent back so that the z-direction distance ZH between the magnetic head slider 50 and the reference portion becomes a predetermined set height without actually incorporating the magnetic head suspension 1A into the hard disk device. At this time, the bending angle around the load bending line PL is determined so that the load bending portion 20 generates the predetermined pressing load.

  In the present embodiment, as shown in FIG. 1, the load bending line PL is along the suspension width direction, but as long as it is symmetric with respect to the suspension width direction with respect to the center line CL, It is also possible to incline the load bending line PL with respect to the suspension width direction.

  For example, the load bending line PL in one of the pair of leaf springs 21 is positioned with respect to the suspension width direction so as to be positioned at one of the distal end side and the proximal end side in the suspension longitudinal direction as it goes from the inner side to the outer side in the suspension width direction. The load bending line PL on the other of the pair of leaf springs 21 is inclined in the suspension width direction so as to be symmetrical with the load bending line PL on one of the pair of leaf springs 21 with respect to the center line CL. It can be inclined with respect to.

  In this way, by tilting the load bending line PL with respect to the suspension width direction, the main body portion 31 of the load beam portion 30 is moved closer to or away from the disk surface 100 without adding a manufacturing process. It can be bent in a convex shape in the direction, and the rigidity of the load beam portion 30 can be improved without causing an increase in mass. With such a configuration, it is possible to increase the resonance frequency of the torsional mode in particular.

The load bending part 20 is formed of, for example, a stainless plate having a thickness of 0.02 mm to 0.1 mm.
In the present embodiment, the load bending portion 20 is integrally formed with a load beam forming member 300 that forms the load beam portion 30.

  Specifically, in the present embodiment, as shown in FIG. 1, the load beam portion forming member 300 includes a load beam forming region 301 that forms the load beam portion 30, and a base end from the load beam forming region 301. A load bending portion forming region 305 extending to the side is integrally formed, and the load bending portion forming region 305 is provided with a gap at the center in the suspension width direction so that the pair of first and second leaf springs 21 are provided. Is forming.

  The flexure portion 40 is fixed to the load beam portion 30 by welding or the like while supporting the magnetic head slider 50.

  Specifically, as shown in FIGS. 3 and 4, the flexure unit 40 has a flexure substrate 410.

  The flexure substrate 410 has a load beam portion contact area 412 that contacts the disk facing surface of the main body 31 of the load beam section 30 and a base end portion connected to the load beam section contact area 412. It has a pair of left and right support pieces 413 and the head mounting area 415 supported by the tip portions of the pair of left and right support pieces 413.

  As shown in FIGS. 3 and 4, the head mounting area 415 supports the magnetic head slider 50 on the disk facing surface facing the disk surface, and the dimple 33 on the back surface opposite to the disk surface. As a result, the magnetic head slider 50 can flexibly swing in the roll direction and the pitch direction with the dimple 33 as a fulcrum.

  In the present embodiment, the load beam portion abutting region 412 is a region located in the base end side of the main body portion 31 from the first and second LB bend lines BL1 and BL2 (in the present embodiment, The base end side region 31a) is fixed by spot welding symmetrically arranged with respect to the suspension longitudinal center line CL.

The flexure substrate 410 has a lower rigidity than the load beam unit 30 so that the head mounting region 415 can swing in the roll direction and the pitch direction.
The flexure substrate 410 is preferably formed of a metal material such as stainless steel having a thickness of about 0.01 mm to 0.025 mm, for example.

  In the present embodiment, the flexure substrate 410 is fixed to the support portion 10 in addition to the main body portion 31 of the load beam portion 30.

  Specifically, as shown in FIGS. 1 and 3, the flexure substrate 410 further includes a support portion contact area 411 that contacts the support portion 10 and is fixed by spot welding or the like, and the support portion contact. A region 411 and the load beam portion abutting region 412 are connected, and a load bending portion corresponding region 418 that passes through the load bending portion 20 in the suspension longitudinal direction is provided.

  Preferably, the flexure section 40 includes a wiring structure (not shown) including a conductor layer for electrically connecting the magnetic head slider 50 to an external member.

The wiring structure includes an insulating layer stacked on the disk facing surface of the flexure substrate 410 and a conductor layer stacked on the disk facing surface of the insulating layer.
The wiring structure may further include an insulating cover layer surrounding the conductor layer.

Hereinafter, a method for manufacturing the magnetic head suspension according to the present embodiment will be described.
The manufacturing method according to the present embodiment enables efficient manufacture of a magnetic head suspension capable of effectively increasing the resonance frequency of the SWAY mode while reducing the gain of the magnetic head slider 50 during torsional mode vibration. .

5A to 5D show process block diagrams of the manufacturing method.
In the manufacturing method, after the support portion 10, the load bending portion 20, the load beam portion 30, and the flexure portion 40 are fixed to form a suspension assembly 1A ′ (see FIG. 5A), the first LB is formed. A first LB bending angle selection step of selecting a bending angle of a bending portion around the bending line BL1 (hereinafter referred to as a first LB bending angle θ1) and a bending angle of the bending portion around the second LB bending line BL2 (hereinafter referred to as a second LB bending angle). a second LB bending angle selection step (refer to FIG. 5B).

  The manufacturing method includes a load bending angle that determines a bending angle of a bent portion around the load bending line PL (hereinafter referred to as a load bending angle θ3) after the first LB bending angle selection step and the second LB bending angle selection step. It has a determination step (see FIG. 5 (c)).

  In the load bending angle determination step, the suspension having the arbitrary angle currently selected as the first LB bending angle θ1 and the second LB bending angle θ2 is in a load-on state (that is, the magnetic head slider 50 and the suspension The load bending portion 20 generates a predetermined pressing load when the load bending portion 20 is bent back so that the z-direction distance to the reference portion becomes a predetermined set height ZH. Thus, the load bending angle θ3 is determined.

  Here, the manufacturing method has respective arbitrary angles currently selected as the first LB bending angle θ1 and the second LB bending angle θ2, and is determined by the load bending angle determination step as the load bending angle θ3. When the suspension having a certain angle is in a load-on state, the base-end region located on the base-end side of the main body portion 31 of the load beam portion 30 from the first and second LB bending lines BL1 and BL2 There is a parallel determination step (see FIG. 5D) for determining whether or not 31a is parallel to the disk surface.

  The parallel determination step acts as a step of determining whether or not the suspension has a high resonance frequency equal to or higher than a predetermined value with respect to vibration in the SWAY mode.

More specifically, the vibration in the SWAY mode is the vibration in the main resonance mode of the suspension mainly including the vibration in the seek direction parallel to the disk surface.
Accordingly, when it is determined whether or not the base end side of the load beam portion 30 is parallel to the disk surface when the suspension is in the load-on state, the suspension is high with respect to the vibration in the SWAY mode. It can be determined whether or not it has rigidity, that is, whether or not it has a high resonance frequency with respect to vibration in the SWAY mode.

  For example, when the suspension is in the load-on state, if the inclination of the base end region 31a with respect to the disc surface 100 is within a predetermined threshold, it can be determined that the suspension is parallel.

The manufacturing method includes a bending angle set detection step after the parallel determination step.
The bending angle set detection step includes a second LB bending angle θ2 and a load bending for making the base end side region 31a parallel to the angle currently selected as the first LB bending angle θ1 in the load-on state. This is a step of finding a bending angle set of the angle θ3.

  Specifically, when it is determined that the bending angle set detection step is parallel by the parallel determination step, the currently set angles as the second LB bending angle θ2 and the load bending angle θ3 are It is recognized as a bending angle set that makes the base end region parallel while generating a predetermined pressing load in the load-on state with respect to the angle currently selected as the first LB bending angle θ1.

  On the other hand, if it is determined by the parallel determination step that the two are not parallel, the bending angle set detection step selects another angle different from the angle currently selected as the second LB bending angle θ2. When the suspension having the angle selected as the first LB bend angle θ1 and the angle selected as the second LB bend angle θ2 is in a load-on state, the load bending portion is pressed against the predetermined amount. Whether or not the load bending angle θ3 is determined so as to generate a load, and the base end region 31a is parallel to the disk surface 100 when a suspension having these bending angles is in a load-on state. The operation of determining whether or not the first LB bending angle θ1 is selected as the first LB bending angle θ1 during the load-on state is repeated. Only finding the bending angle set of the 2LB bending angle θ2 and load bending angle θ3 to parallel the proximal region while generating a load.

  The manufacturing method selects at least one other arbitrary angle different from the arbitrary angle selected in the previous step as the first LB bending angle θ1, and for each of at least one other arbitrary angle newly selected, The second LB is performed in a similar manner as the process from the second LB bending angle selection process to the bending angle set detection process, and the base end side region 31a is made parallel while generating a predetermined pressing load in the load-on state. There is another bending angle set detection step of finding a bending angle set of the bending angle θ2 and the load bending angle θ3.

  After that, the manufacturing method includes, for each of a plurality of suspensions having a plurality of bending angle sets found by the plurality of bending angle set detection steps, torsion mode vibrations and displacement amounts of the magnetic head slider 50. And a torsion mode gain detecting step for obtaining a relationship between the first LB bending angle θ1 and the torsion mode gain.

The analysis relating to the torsional mode gain can be performed by the following method.
In other words, for each of the plurality of suspensions, a forced vibration that causes torsional mode vibration is applied to a predetermined portion, and the ratio of the displacement amount of the magnetic head slider 50 to the displacement amount of the predetermined portion is determined as the torsion mode in the suspension. It can be recognized as a gain.

  For example, a position of the support portion 10 that is firmly fixed in the z direction (in the case where the support portion 10 is a base plate, the boss portion 15 that is fixed to the carriage arm connected to the actuator via caulking. Position (hereinafter referred to as a support portion fixing position) with respect to the z direction and the x direction along the longitudinal direction of the suspension, and the disk facing surface of the magnetic head slider 50 is restricted with respect to the z direction. Displacement due to the forced vibration applied to the support portion fixing position by applying forced vibration in the y direction along the suspension width direction (steady vibration due to periodic external force: frequency 100 Hz to 30 kHz) to generate torsional primary mode vibration. Displacement (or acceleration) "of the magnetic head slider 50 in the suspension width direction displacement (or Can be determined the ratio of the acceleration) "as the twist mode gain of the magnetic head slider 50.

  In the present embodiment, as described above, in the torsion mode gain detection step, the relationship between the first LB bending angle θ1 and the torsion mode gain is obtained by analysis. However, instead of the analysis, actual measurement, that is, actual It is also possible to apply a forced vibration to the predetermined portion of the suspension prepared in the above to measure the displacement amount of the predetermined portion and the displacement amount of the magnetic head slider 50, and obtain a torsion mode gain based on these actually measured values. .

The manufacturing method has a minimum torsion mode gain / first LB bending angle detection step thereafter.
The minimum torsion mode gain / first LB bending angle detection step includes a minimum torsion mode gain that minimizes the torsion mode gain based on the relationship between the first LB bending angle θ1 detected by the torsion mode gain detection step and the torsion mode gain. This is a step of obtaining the first LB bending angle θ1 (min).

  For example, create a graph with the first LB bending angle θ1 on the horizontal axis and the torsional mode gain on the vertical axis, and the horizontal axis position corresponding to the lowest point on the vertical axis in this graph is θ1 (min). Can be recognized.

  The manufacturing method is the same as the subsequent process from the second LB bending angle selection step to the bending angle set detection step for the suspension in which the first LB bending angle θ1 is the angle θ1 (min). In the suspension in which the first LB bending angle θ1 is set to θ1 (min), a second LB bending angle θ2 that causes the proximal side region 31a to be parallel while generating a predetermined pressing load in a load-on state. And a final bending angle set detecting step of finding a bending angle set of the load bending angle θ3.

  In the manufacturing method, a bending process is performed around the first LB bend line BL1, the second LB bend line BL2, and the load bend line PL at the bend angle thus found, that is, the first LB bend line. Bending is performed around BL1 at the angle θ1 (min), and the second LB bending angle θ2 found in the final bending angle set detection step around the second LB bending line BL2 and the load bending line PL, respectively. And a bending process at a load bending angle θ3.

  According to the manufacturing method according to the present embodiment including such a process, the magnetic head suspension capable of effectively increasing the resonance frequency of the SWAY mode while reducing the gain of the magnetic head slider 50 during the torsional mode vibration. Can be manufactured efficiently.

  Preferably, of the first and second LB bend lines BL1 and BL2, a bend line (in the present embodiment, the first LB bend line BL1) located on the proximal side in the suspension longitudinal direction is used as the base of the load beam portion 30. A bend line (in the present embodiment, the second LB bend line BL2) disposed at the approximate center of the suspension longitudinal direction between the end portion and the dimple 33 and positioned on the tip side of the first and second LB bend lines BL1 and BL2. ) Can be disposed at the approximate center of the suspension longitudinal direction between the dimple 33 and the LB bend line located on the base end side.

  According to such a configuration, the twist due to the bending angle around the bending lines BL1 and BL2 is ensured while ensuring the length of the base end side region 31a that is parallel to the disk surface in the load-on state. The mode gain adjustment sensitivity can be improved.

FIG. 6 shows a top view of a modified example 1B of the magnetic head suspension 1A.
As shown in FIG. 6, it is also possible to provide a damping material 60 on the opposite side of the base end side region 31a from the disk surface 100.
When the damping material 60 is provided, the damping effect by the damping material 60 can be enhanced by increasing the length of the base end side region 31a.

  The damping material 60 includes a first layer (not shown) made of a viscoelastic material fixed to the opposite side of the base end region 31a to the disc surface, and a disc surface of the first layer. And a second layer (not shown) secured to the opposite side.

As the first layer, for example, an acrylic polymer or silicon is preferably used.
As the second layer, for example, a metal material such as stainless steel or aluminum, or a resin material such as polyethylene terephthalate is preferably used.

  In the present embodiment, as described above, the bending direction at the first LB bend line BL1 is defined so that the first LB bend 38 (1) is convex toward the disk surface 100, In addition, the bending direction at the second LB bending line BL2 is defined so that the second LB bending portion 38 (2) is convex toward the side opposite to the disk surface 100 (see FIG. 4). The present invention is not limited to such a form.

  7A to 7D are process block diagrams showing a method of manufacturing the magnetic head suspension 2A in which the bending direction at the first and second bending lines BL1 and BL2 is opposite to that of the present embodiment.

  Specifically, as shown in FIGS. 7A to 7D, the first LB bend line BL1 is formed so that the first LB bent portion 38 (1) is convex toward the side opposite to the disk surface 100. It is also possible to perform bending at the second LB bend line BL2 so that the second LB bent portion 38 (2) is convex toward the disk surface 10.

  Further, in the present embodiment, the load bending portion 20 has been described as an example of a configuration in which the load bending portion 20 is bent along a single load bending line PL. However, as shown in FIG. It is also possible to bend around two bend lines, a side load bend line PL1 and a tip load bend line PL2.

  In the magnetic head suspension 1 </ b> C according to the modification shown in FIG. 8, the load bending is performed when the suspension 1 </ b> C is incorporated into the hard disk device and when the magnetic head slider 50 moves up with the rotation of the disk surface 100. The portion 20 is elastically deformed in the bending return direction around the bending lines of both the proximal load bending line PL1 and the distal load bending line PL2 and has a retained elasticity.

  That is, in the modified example 1C, the pressing load is defined by the resultant force of the load generated in the proximal end side load bending line PL1 and the load generated in the distal end side load bending line PL2.

  In such a configuration, the base end is compared with the bending angle (the load bending angle θ3) at the load bending line PL in the configuration in which the load bending portion 20 is bent at a single load bending line PL. The predetermined pressing load can be obtained while reducing the respective bending angles at the side load bending line PL1 and the front end side bending curve PL2.

  That is, as compared with a configuration in which the load bending portion 20 is bent along a single load bending line PL, the load bending portion 20 can be made parallel to the disk surface 100, and therefore the suspension as a whole. The resonance frequency of the SWAY mode can be increased.

1A to 1C Magnetic head suspension 10 Support portion 20 Load bending portion 21 Leaf spring 30 Load beam portion 31a Base end side region 33 Dimple 40 Flexure portion 50 Magnetic head slider 415 Head mounting region BL1 First LB bending line BL2 Second LB bending line PL Load Bend line PL1 Tip load bending line PL2 Base load bending line

Claims (5)

A support portion that is swung directly or indirectly in a seek direction parallel to the disk surface by an actuator; and a load bending portion that is supported by the support portion and generates a pressing load that presses the magnetic head slider toward the disk surface. A load beam portion that is supported by the support portion via the load bending portion and transmits the pressing load to the magnetic head slider, and a head mounting region that supports the magnetic head slider, and the load beam portion The load beam portion has a dimple engaged with the back surface opposite to the disk surface in the head mounting region, and has a first LB bend angle θ1 around the first LB bend line. Around the second LB bend line at a position that is bent and different from the first LB bend line in the longitudinal direction of the suspension 2. A method of manufacturing a magnetic head suspension, wherein the load bending portion is bent at a load bending angle θ3 around a load bending line, being bent in a direction different from a bending direction at the first LB bending line at a 2LB bending angle θ2. Because
While the magnetic head suspension is in a load-on state, a base end region located on the base end side from the first and second LB bend lines in the load beam portion is generated with respect to the disk surface while generating a predetermined pressing load. The first LB bend angle θ1, the second LB bend angle θ2, and the load bend angle θ3 that are made parallel to each other are found, and the first LB bend is performed by analyzing or measuring the torsion mode gain for each of the plurality of bend angle sets. A magnetic head in which the relationship between the angle θ1 and the torsion mode gain is obtained, the first LB bending angle θ1 (min) that minimizes the torsion mode gain is detected from the relationship, and the first LB bending angle is set to θ1 (min). A second LB bending angle θ2 and a load bending that generate a predetermined pressing load when the suspension is in a load-on state and make the base end side region parallel to each other. A method of manufacturing a magnetic head suspension, wherein a bending angle set of an angle θ3 is found.
  A set of bending angles of a first LB bending angle θ1, a second LB bending angle θ2, and a load bending angle θ3 that cause the base end region to be parallel to the disk surface while generating a predetermined pressing load in the load-on state. The plurality of finding steps include a first LB bending angle selection step of selecting an arbitrary angle as the first LB bending angle θ1, a second LB bending angle selection step of selecting an arbitrary angle as the second LB bending angle θ2, and the first LB bending angle. The load bending angle θ3 is determined so that the load bending portion generates a predetermined pressing load when the suspension having the arbitrary angle currently selected as θ1 and the second LB bending angle θ2 is in a load-on state. A load bending angle determination step to be performed, and the arbitrary angles currently selected as the first LB bending angle θ1 and the second LB bending angle θ2. And when a suspension having an angle determined by the load bending angle determination step as the load bending angle θ3 is in a load-on state, the base ends of the load beam portions from the first and second load bending lines. A parallel determination step for determining whether or not a side region is parallel to the disk surface, and when the parallel determination step determines that the side region is parallel, the second LB bending angle θ2 and the load bending angle θ3 A bending angle set for generating a predetermined pressing load in a load-on state and making the proximal end region parallel to an angle currently recognized as the first LB bending angle θ1. And the second LB bending angle θ2 is different from the currently selected angle when it is determined by the parallel determination step that it is not parallel. When another suspension is selected, and the suspension having the angle currently selected as the first LB bending angle θ1 and the angle selected again as the second LB bending angle θ2, the load bending is performed. The load bending angle θ3 is determined so that the portion generates the predetermined pressing load, and when the suspension having these bending angles is in a load-on state, the base end region is parallel to the disk surface. The operation of determining whether or not the above is repeated, a predetermined pressing load is generated in the load-on state with respect to the angle currently selected as the first LB bending angle θ1, and the base end region is made parallel A bending angle set detecting step of finding a bending angle set of the second LB bending angle θ2 and the load bending angle θ3 to be performed; and the arbitrary angle as the first LB bending angle θ1 At least one other arbitrary angle different from the above is selected, and the same operation as the process from the second LB bending angle selection step to the bending angle set detection step is performed for each selected other arbitrary angle, and the load on And a second bending angle set detecting step of finding a second LB bending angle θ2 and a bending angle set of the load bending angle θ3 that generate a predetermined pressing load in the state and make the proximal region parallel to each other. The method of manufacturing a magnetic head suspension according to claim 1.   3. The method of manufacturing a magnetic head suspension according to claim 1, wherein the first LB bend line is located closer to the base end side in the suspension longitudinal direction than the second LB bend line. 4.   The first LB bend line is disposed substantially at the center in the suspension longitudinal direction between the base end portion of the load beam portion and the dimple, and the second LB bend line is disposed at the approximately center in the suspension longitudinal direction between the first LB bend line and the dimple. The method of manufacturing a magnetic head suspension according to claim 3, wherein the magnetic head suspension is disposed. The load bend line includes a base end side load bend line and a tip end side load bend line located on the base end side and the front end side of the suspension longitudinal direction,
The resultant force of a load generated by a bent portion around the proximal end side load bend line and a load generated by a bent portion around the distal end side load bend line defines the pressing load. A method of manufacturing a magnetic head suspension according to any one of the above.

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