JP5801161B2 - X-ray tube and method of manufacturing X-ray tube - Google Patents

Description

  The present invention relates to an X-ray tube and a method for manufacturing the X-ray tube.

  Conventionally, an X-ray tube that emits X-rays has been disclosed (for example, see Patent Document 1). Such an X-ray tube is used in a static eliminator or the like that generates an ion gas by irradiating a gas such as air with an X-ray to neutralize an object. A static eliminator using an X-ray tube is used in a wide range of fields, and may be used in an environment where strict temperature control is required, such as a semiconductor manufacturing process. In such an environment, it is required to sufficiently cool the X-ray tube so that the temperature management is not hindered by heat generated from the X-ray tube.

  As a technique for cooling the X-ray tube, an X-ray tube main body in which a counter-cathode (anode member) is provided at one end of a cylindrical vacuum glass container, an X-ray tube main body, and heat generated from the X-ray tube main body. An X-ray tube including a heat absorbing member that absorbs water is disclosed (for example, see Patent Document 2). In the X-ray tube described in Patent Document 2, the heat absorption member includes a mounting plate attached to one end of the X-ray tube main body, and a shield case that surrounds the side surface of the X-ray tube main body and is attached to the mounting plate. .

Special table 2008-536284 gazette Japanese Utility Model Publication No. 4-38453

  In the X-ray tube described in Patent Document 2, since there is no element for connecting the anode member and the heat absorbing member to each other, heat is not efficiently transferred from the anode member, which is a main heat source, to the heat absorbing member, and the X-ray tube is There is a risk that it cannot be cooled sufficiently.

  The present invention has been made to solve the above-described problems, and an object thereof is to provide an X-ray tube that can be sufficiently cooled and a method for manufacturing the X-ray tube.

  An X-ray tube according to the present invention has a cylindrical shape and a side wall provided with an X-ray emission window, a filament disposed on one end side of the case and emitting electrons, and the other end in the case An anode member that attracts electrons emitted from the filament, a target formed on the anode member so that X-rays generated by the collision of the electrons are directed to the X-ray exit window, and the other end of the housing A heat absorbing member that absorbs heat generated in the housing, and a fastening member is passed through the anode member and the heat absorbing member, and the anode member and the heat absorbing member are connected by fastening of the fastening member. It is characterized by being connected.

  In such an X-ray tube, the anode member and the heat absorbing member are coupled by fastening the fastening member. Thus, the anode member is held in the state of being close to the heat absorbing member, and the fastening member itself also functions as a heat conduction path, so that heat can be efficiently transferred from the anode member to the heat absorbing member. Therefore, the anode member can be sufficiently cooled. In this X-ray tube, the electrons from the filament move in the axial direction of the housing, whereas the X-rays generated at the target are directed to the X-ray exit window on the side wall portion of the housing. It is a wire tube. For this reason, even if the heat absorbing member is placed close to the anode member, the X-rays are not hindered by the heat absorbing member.

  Here, the housing further includes a holding wall portion provided at the other end of the side wall portion while holding the anode member, and the anode member and the heat absorbing member are closely fixed to the holding wall portion. Is preferred. In this case, since the anode member is connected to the heat absorption member via the holding wall portion, the holding wall portion functions as a heat conduction path, and heat can be more efficiently transferred from the anode member to the heat absorption member.

  Moreover, it is preferable that the holding wall is formed with an opening through which the fastening member passes, and the anode member is disposed so as to close the opening. In this case, the heat conduction path by the fastening member and the heat conduction path by the holding wall can be achieved with a simple configuration.

  Moreover, it is preferable that the anode member is arrange | positioned so that an opening part may be penetrated. In this case, since the heat absorbing member can be directly brought into contact with the anode member penetrating the opening of the holding wall, heat can be more efficiently transferred from the anode member to the heat absorbing member.

  Moreover, it is preferable that the other end side of a housing | casing consists of the same material as an anode member, and the anode member is integrally formed with the other end side of a housing | casing. In this case, since the heat absorbing member can be brought into direct contact with the anode member, heat can be more efficiently transferred from the anode member to the heat absorbing member.

  The heat absorbing member has a main body portion that abuts the other end of the housing and an enclosure portion that surrounds the side wall portion. The enclosure portion has an opening that exposes the X-ray emission window. Preferably it is. In this case, since the heat generated from the anode member is absorbed by the main body portion that contacts the other end of the housing and the surrounding portion that surrounds the side wall portion of the housing, the anode member can be further sufficiently cooled. it can. X-rays that have passed through the X-ray emission window are emitted through the opening of the enclosure.

  Moreover, it is preferable that the side wall part and the surrounding part are in contact. In this case, since heat is more efficiently transmitted from the side wall portion to the surrounding portion, the anode member can be further sufficiently cooled.

  Further, it is preferable that a heat conducting member made of an insulating material is interposed between a portion of the side wall portion surrounding the filament and the surrounding portion. In this case, the heat conduction member ensures insulation between the filament and the surrounding portion, and heat generated from the filament is efficiently transmitted to the surrounding portion. For this reason, the filament can be sufficiently cooled.

  The enclosing portion projects from the main body portion and surrounds the other end side of the housing, and the second portion is detachably coupled to the first portion and encloses the one end side of the housing. And a portion. In this case, since the heat absorbing member can be attached to the housing with the second portion removed and the length of the surrounding portion protruding from the main body portion of the heat absorbing member shortened, the assembly of the X-ray tube can be performed. It becomes easy.

  Moreover, it is preferable that the outer side part of the side wall part is formed with a recessed part that is recessed inwardly relative to the other outer part, and the X-ray exit window is provided at the position where the recessed part is formed. In this case, the X-ray exit window is located inside the X-ray tube as compared with the case where there is no depression. This makes it difficult for heat to be transmitted from the X-ray exit window to the outside of the X-ray tube. Therefore, the influence on the temperature management of the usage environment of the X-ray tube can be suppressed. In addition, when the heat absorption member has the surrounding part, a space is formed between the side wall part and the surrounding part by the hollow part. Due to the heat insulation effect of this space, heat is further less likely to be transmitted in the direction in which X-rays are emitted.

  Moreover, it is preferable that the edge of the X-ray emission window is in contact with the edge of the recess. In this case, the X-ray exit window can be maximized within the depression, and the X-ray irradiation range can be widened.

  An X-ray tube manufacturing method according to the present invention is the X-ray tube manufacturing method described above, wherein the heat absorbing member is disposed on the other end side of the housing, the fastening member is passed through the anode member and the heat absorbing member, It is characterized by comprising a step of joining the anode member and the heat absorbing member by fastening the fastening member.

  According to such a manufacturing method, it is possible to manufacture an X-ray tube in which the anode member and the heat absorbing member are combined. In the manufactured X-ray tube, since the anode member is held in a state close to the heat absorbing member, heat is efficiently transmitted from the anode member to the heat absorbing member. Further, the fastening member itself also becomes a heat conduction path, and heat is more efficiently transmitted from the anode member to the heat absorbing member. Therefore, the anode member can be sufficiently cooled.

  Here, a cylindrical member for forming the side wall of the housing and a plate member for forming the other end of the housing are prepared, and the anode member and the plate member are joined by brazing, It is preferable to further include a step of inserting the member into the other end side of the cylindrical member and coupling the plate-like member to the other end of the cylindrical member. In this case, it is possible to manufacture an X-ray tube in which a holding wall portion holding the anode member is provided at the other end portion of the housing, and the anode member and the holding wall portion are coupled by brazing. In the manufactured X-ray tube, the anode member is fixed to the holding wall portion without a gap by brazing. For this reason, heat can be efficiently transmitted from the anode member to the heat absorbing member via the holding wall portion.

  Further, it is preferable to further include a step of forming a recessed portion that is recessed inwardly of the outer portion of the side wall portion and providing an X-ray emission window at a position where the recessed portion is formed. In this case, an X-ray tube in which the X-ray exit window is positioned inside the X-ray tube can be manufactured as compared with the case where no depression is formed. In the manufactured X-ray tube, heat becomes difficult to be transmitted from the X-ray exit window to the outside of the X-ray tube. For this reason, the influence which it has on the temperature management of the use environment of an X-ray tube can be suppressed.

  ADVANTAGE OF THE INVENTION According to this invention, the manufacturing method of the X-ray tube and X-ray tube which can fully cool can be provided.

It is sectional drawing which shows 1st Embodiment of the X-ray tube which concerns on this invention. It is a top view of the X-ray tube main body in FIG. It is a left view of the X-ray tube main body in FIG. It is a figure which shows the manufacturing process of the X-ray tube of FIG. It is a figure which shows the manufacturing process of the X-ray tube of FIG. It is a figure which shows the manufacturing process of the X-ray tube of FIG. It is a figure which shows the manufacturing process of the X-ray tube of FIG. It is a figure which shows the manufacturing process of the X-ray tube of FIG. It is a figure which shows the manufacturing process of the X-ray tube of FIG. It is a figure which shows the manufacturing process of the X-ray tube of FIG. It is sectional drawing which shows the modification of 1st Embodiment. It is sectional drawing which shows 2nd Embodiment of the X-ray tube which concerns on this invention. It is a top view of the X-ray tube main body in FIG. It is a left view of the X-ray tube main body in FIG. It is sectional drawing which shows 3rd Embodiment of the X-ray tube which concerns on this invention. It is a top view of the X-ray tube main body in FIG. It is a left view of the X-ray tube main body in FIG. It is sectional drawing which shows 4th Embodiment of the X-ray tube which concerns on this invention. It is a top view of the X-ray tube main body in FIG. It is a left view of the X-ray tube main body in FIG.

  Hereinafter, preferred embodiments of an X-ray tube according to the present invention will be described in detail with reference to the drawings. FIG. 1 is a cross-sectional view showing a first embodiment of an X-ray tube according to the present invention. 2 is a plan view of the X-ray tube main body in FIG. 1, and FIG. 3 is a left side view of the X-ray tube main body in FIG. As shown in FIGS. 1 and 2, the X-ray tube 1 includes an X-ray tube main body 2 and a heat absorbing member 3 that absorbs heat generated from the X-ray tube main body 2.

  The X-ray tube main body 2 includes a cylindrical housing 4, a filament 5 disposed on one end side in the housing 4, an anode member 6 disposed on the other end side in the housing 4, and an anode member 6. And a target 7 formed on the surface.

  The housing 4 has an accommodating portion 8 on one end side and an accommodating portion 9 on the other end side. The accommodating portion 8 has a glass main body portion 10 and a metal joint portion 11. The main body 10 is formed integrally with a cylindrical side wall 10a and a wall 10b that seals one end of the side wall 10a. The joint part 11 is provided with flange parts 11b and 11c at both ends of a cylindrical side wall part 11a, and is made of, for example, Kovar, copper, or stainless steel. The outer diameter of the side wall part 11a is substantially equal to the outer diameter of the side wall part 10a. The flange portion 11b protrudes inward from one end of the side wall portion 11a. The flange portion 11c protrudes outward from the other end of the side wall portion 11a. The flange part 11b contacts the other end of the side wall part 10a, and the outer periphery of the side wall part 11a is aligned with the outer periphery of the side wall part 10a. The joint part 11 and the main body part 10 are coupled by bonding or the like, and the boundary part between the joint part 11 and the main body part 10 is sealed.

  The accommodating part 9 has a cylindrical side wall part 13 and a wall part 14 (holding wall part) provided at the other end of the side wall part 13. The side wall part 13 is comprised by the cylindrical member which consists of Kovar, copper, or stainless steel, for example. As shown in FIG. 3, the outer side portion of the side wall portion 13 is formed with a recessed portion 13 d that is recessed inward from the other outer portions. It forms so that the outer peripheral part of the side wall part 13 may be notched, and as shown in FIG. 2, the bottom face of the hollow part 13d is a rectangular plane. A substantially circular opening 13e is formed in a portion of the side wall portion 13 where the recessed portion 13d is formed. The edge R2 of the opening 13e is in contact with the edge R1 of the recess 13d.

  As shown in FIGS. 1 and 2, a sheet 15 is disposed on the outer surface of the side wall portion 13 so as to close the opening 13 e. The sheet 15 is made of beryllium, for example. The side wall 13 and the sheet 15 are joined by brazing or the like, and the opening 13e is sealed. An X-ray exit window W through which X-rays easily pass is configured by a portion of the sheet 15 corresponding to the opening 13e. That is, the X-ray emission window W is provided at the formation position of the depression 13d, and the edge R2 of the X-ray emission window W is in contact with the edge R1 of the depression 13d. Further, a flange portion 13b is provided at one end of the side wall portion 13, and a flange portion 13a is provided at the other end.

  The wall part 14 is comprised by the disk-shaped member which consists of Kovar, copper, or stainless steel, for example. The outer diameter of the wall part 14 is substantially the same as the outer diameter of the flange part 13a. A substantially circular opening 14 a is formed at a substantially central position of the wall portion 14. On one side of the wall portion 14, a counterbore 14b is formed around the opening 14a. One surface of the wall portion 14 abuts on the flange portion 13a, and the outer periphery of the wall portion 14 is aligned with the outer periphery of the flange portion 13a. The outer peripheral portion of the wall portion 14 and the flange portion 13a are joined by brazing, welding, or the like, and the boundary portion between the side wall portion 13 and the wall portion 14 is sealed.

  The flange portion 13 b of the housing portion 9 is in contact with the flange portion 11 c of the housing portion 8. The outer diameter of the flange portion 13b is substantially equal to the outer diameter of the flange portion 11c, and the outer periphery of the flange portion 13b is aligned with the outer periphery of the flange portion 11c. The flange portion 13b and the flange portion 11c are joined by brazing, welding, or the like, and the boundary portion between the housing portion 9 and the housing portion 8 is sealed.

  The filament 5 has a heating wire 5 a made of tungsten, for example, and a pair of lead wires 5 b and 5 b connected to both ends of the heating wire 5 a, and is accommodated in the accommodating portion 8. The pair of lead wires 5b and 5b are connected to pin-shaped terminals 12 and 12, respectively, and the terminals 12 and 12 extend outside the accommodating portion 8 through the wall portion 10b. When power is supplied to the terminals 12 and 12, the heating wire 5a generates heat and emits thermoelectrons.

  The anode member 6 is a columnar member made of, for example, Kovar, copper, or stainless steel. The anode member 6 is accommodated in the accommodating portion 9, and the central axis L 1 of the anode member 6 is along the central axis L 2 of the side wall portion 13. The end surface 6 b on the other end side of the anode member 6 is substantially perpendicular to the central axis L <b> 1 of the anode member 6. On the other end side of the anode member 6, a female screw hole 6c is formed along the central axis L1. An end face 6a on one end side of the anode member 6 is inclined with respect to the central axis L1. A target 7 made of tungsten, for example, is formed by vapor deposition or the like in the approximate center of the end face 6a.

  The other end side of the anode member 6 is fitted into the counterbore 14b of the wall portion 14, and the end surface 6b is in contact with the bottom surface of the counterbore 14b. The anode member 6 and the wall portion 14 are joined by brazing, and the opening 14 a of the wall portion 14 is sealed by the anode member 6. The central portion of the end face 6b and the female screw hole 6c are exposed from the opening 14a. The end face 6a faces the filament 5 and the X-ray exit window W.

  The anode member 6 attracts the thermoelectrons generated from the filament 5 when a positive voltage is applied. The target 7 generates X-rays with the collision of thermoelectrons. Since the end face 6 a on which the target 7 is formed faces the filament 5 and also faces the X-ray exit window W, the X-rays generated at the target 7 go to the X-ray exit window W. That is, the target 7 is formed such that X-rays generated by electron collisions are directed to the X-ray exit window W.

  In this manner, the filament 5 is disposed on one end side in the housing 4, and the anode member 6 is disposed on the other end side of the housing 4. The inside of the housing 4 is sealed and is substantially vacuum. A high voltage cable 16 is connected to each of the terminals 12 and 12 extending to the outside of the housing 4 for power supply. Connection portions J1 and J1 between the terminals 12 and 12 and the cables 16 and 16 are surrounded by a heat shrinkable tube 17 together with a portion on one end side of the housing 4. Inside the heat shrinkable tube 17, resin is filled to form a mold part 18, and connection parts J <b> 1 and J <b> 1 are embedded in the mold part 18. As a result, the terminals 12 and 12 and the connecting portions J1 and J1 are reinforced and are reliably insulated from the surroundings.

  Next, the heat absorbing member 3 will be described.

  The heat absorbing member 3 includes a main body portion 19 disposed on the other end side of the housing 4 and a cylindrical surrounding portion 20 protruding from the main body portion 19 to one end side. The surrounding portion 20 surrounds the side wall portions 10a, 11a, and 13. The heat absorbing member 3 is made of a metal material having high thermal conductivity such as aluminum or stainless steel.

  The main body 19 is formed with a through-hole 19a that opens to one end side and the other end side. A bolt 21 (fastening member) is passed through the through hole 19a from the other end side to the one end side. The tip of the bolt 21 passes through the opening 14 a of the wall 14 and is fastened to the female screw hole 6 c of the anode member 6. That is, the bolt 21 is passed through the main body portion 19 and the anode member 6, and the anode member 6 and the main body portion 19 are coupled by fastening the bolt 21. As a result, the anode member 6 and the main body 19 are held in close proximity to each other, and are firmly fixed to the wall 14.

  The main body portion 19 is formed with a plurality of female screw holes 19b. With the female screw hole 19b, the main body 19 can be attached to an external device with a bolt.

  The surrounding portion 20 includes an surrounding portion 22 (first portion) and an surrounding portion 23 (second portion). The surrounding portion 22 is formed integrally with the main body portion 19 and surrounds the accommodating portion 9. A substantially circular opening 22 a that exposes the X-ray exit window W is formed in the surrounding portion 22. X-rays transmitted through the X-ray emission window W are emitted through the opening 22a. The surrounding portion 23 is disposed on one end side of the surrounding portion 22 and surrounds the accommodating portion 8. A female screw portion 22 b is formed on the inner periphery on one end side of the surrounding portion 22. On the outer periphery on the other end side of the surrounding portion 23, a male screw portion 23a is formed. The surrounding part 22 and the surrounding part 23 are detachably connected by screwing the male screw part 23a into the female screw part 22b.

  A lid member 24 is detachably attached to one end side of the surrounding portion 23. The lid member 24 has an opening 24a through which the cables 16 and 16 are passed. The cables 16, 16 are drawn out of the heat absorbing member 3 through the opening 24a and connected to a controller for control.

  Then, the manufacturing method of the X-ray tube 1 mentioned above is demonstrated.

  First, as shown in FIG. 4, the cylindrical member E1 for making the side wall part 13 is prepared, and the flange parts 13a and 13b are formed in the both ends. Next, as shown in FIG. 5, the outer peripheral part of the cylindrical member E1 is notched between the flange parts 13a and 13b, and the hollow part 13d is formed. Next, as shown in FIG. 6, an opening 13e is formed in the portion where the recess 13d is formed. These processes are performed by cutting or the like. A sheet 15 is disposed on the outer surface of the cylindrical member E1 in which the opening 13e is formed so as to close the opening 13e. In this state, the cylindrical member E1 and the sheet 15 are joined by brazing or the like, and the opening 13e is sealed.

  Next, as shown in FIG. 7, an opening 14 a and a counterbore 14 b are formed in the disk-shaped member E <b> 2 for forming the wall portion 14. Moreover, the anode member 6 on which the target 7 is formed is prepared. Then, the anode member 6 and the disk-shaped member E2 are joined by brazing, and the opening 14a is sealed.

  Next, as shown in FIG. 8, the anode member 6 is inserted into the cylindrical member E1, the one surface of the disk-shaped member E2 and the flange portion 13a of the cylindrical member E1 are brought into contact with each other, and the disk-shaped member E2 is brought into contact. Are aligned with the outer periphery of the flange portion 13a. Further, the positional relationship between the disk-like member E2 and the cylindrical member E1 is adjusted so that the end face 6a of the anode member 6 faces the X-ray emission window W. In this state, the outer peripheral portion of the disk-shaped member E2 and the flange portion 13a of the cylindrical member E1 are joined by brazing, welding, or the like, and the boundary between the cylindrical member E1 and the disk upper member E2 is sealed. . Thereby, the accommodating part 9 which accommodated the anode member 6 is prepared.

  Next, as shown in FIG. 9, the accommodating part 8 which accommodated the filament 5 is prepared, the flange part 13b and the flange part 11c are contacted, and the outer periphery of the flange part 13b and the outer periphery of the flange part 11c are arrange | equalized. In this state, the flange portion 13b and the flange portion 11c are joined by brazing, welding, or the like, and the boundary portion between the housing portion 9 and the housing portion 8 is sealed.

  Next, as shown in FIG. 10, the cable 16 is connected to each of the terminals 12 and 12. The connection portions J1 and J1 between the terminals 12 and 12 and the cables 16 and 16 are surrounded by the heat shrinkable tube 17 together with a portion on one end side of the housing 4, and the mold portion 18 is filled with resin inside the heat shrinkable tube 17. Form.

  Next, the heat absorbing member 3 with the surrounding portion 23 removed is prepared, the other end side of the X-ray tube main body 2 is inserted into the surrounding portion 22, and the wall portion 14 is brought into contact with the main body portion 19. By removing the surrounding portion 23, the length of the cylindrical portion into which the X-ray tube main body 2 is inserted is shortened, so that the work of attaching the heat absorbing member 3 to the X-ray tube main body 2 becomes easy.

  Next, from the other end side of the main body 19, the bolt 21 is passed through the through hole 19 a of the main body 19 and the opening 14 a of the wall 14, and fastened to the female screw hole 6 c of the anode member 6. That is, the bolt 21 is passed through the main body 19 and the anode member 6, and the anode member 6 and the main body 19 are coupled by fastening the bolt 21.

  Next, the lid member 24 is attached to the surrounding part 23, and one end side of the X-ray tube main body 2 is inserted into the surrounding part 23. At this time, the cables 16 and 16 are passed through the opening 24 a of the lid member 24. The surrounding part 23 is connected to the surrounding part 22 by screwing the male screw part 23 a of the surrounding part 23 into the female screw part 22 b of the surrounding part 22. The lid member 24 may be attached after the surrounding portion 23 is connected to the surrounding portion 22.

  As described above, the X-ray tube 1 in which the anode member 6 and the heat absorbing member 3 are combined can be manufactured. In the X-ray tube 1, when power is supplied from the cables 16 and 16 to the terminals 12 and 12, the filament 5 emits thermoelectrons. When a positive voltage is applied to the anode member 6, thermoelectrons are attracted to the anode member 6 and accelerated to collide with the target 7. Then, X-rays are generated from the target 7 toward the X-ray exit window W. The X-rays pass through the X-ray exit window W, and are further emitted to the outside of the X-ray tube 1 through the opening 22a.

  At this time, the target 7 generates heat due to collision of electrons. When the target 7 generates heat, the entire anode member 6 holding the target 7 becomes high temperature and becomes the main heat source of the X-ray tube 1. In this situation, the anode member 6 is coupled to the heat absorbing member 3 by fastening the bolt 21. Thereby, the anode member 6 is held in the state of being close to the heat absorbing member 3, and the bolt 21 itself also functions as a heat conduction path, so that heat can be efficiently transferred from the anode member 6 to the heat absorbing member 3. Therefore, the anode member 6 can be sufficiently cooled. In the X-ray tube 1, electrons from the filament 5 move in the axial direction of the housing 4, whereas X-rays generated by the target 7 enter the X-ray exit window W of the side wall 13 of the housing 4. This is a so-called reflective X-ray tube. For this reason, even if the heat absorption member 3 is brought close to the anode member 6, X-rays are not hindered by the heat absorption member 3.

  The anode member 6 and the heat absorbing member 3 are tightly fixed to the wall portion 14. The anode member 6 is fixed to the wall portion 14 with no gap by brazing. Thereby, since the anode member 6 is connected to the heat absorption member 3 through the wall portion 14, the wall portion 14 functions as a heat conduction path and transfers heat from the anode member 6 to the heat absorption member 3 more efficiently. Can do.

  An opening 14 a through which the bolt 21 passes is formed in the wall portion 14, and the anode member 6 is disposed so as to close the opening 14 a. Thereby, the heat conduction path | route by the volt | bolt 21 and the heat conduction path | route by the wall part 14 can be compatible by simple structure.

  The heat absorbing member 3 includes a main body 19 that contacts the other end of the housing 4 and an enclosure 20 that surrounds the side walls 10a, 11a, and 13. The enclosure 20 includes an X-ray exit window W. An opening 22a is formed to expose the. Thereby, the heat generated from the anode member 6 is absorbed by the main body portion 19 that contacts the other end of the housing 4 and the surrounding portion 20 that surrounds the side wall portion 13 of the housing 4. Furthermore, it can fully cool.

  The outer portion of the side wall portion 13 is formed with a recess portion 13d that is recessed inwardly relative to the other outer portion, and the X-ray exit window W is provided at the position where the recess portion 13d is formed. As a result, the X-ray exit window W is positioned inside the X-ray tube 1 as compared with the case where there is no depression 13d. For this reason, heat is hardly transmitted from the X-ray exit window W to the outside of the X-ray tube 1. Therefore, the influence on the temperature management of the usage environment of the X-ray tube 1 can be suppressed. Since the side wall portion 13 is surrounded by the surrounding portion 20, a space is formed between the side wall portion 13 and the surrounding portion 20 by the recessed portion 13 d. Due to the heat insulation effect of this space, heat is further hardly transmitted in the direction in which X-rays are emitted.

  The edge R2 of the X-ray exit window W is in contact with the edge R1 of the recess 13d. As a result, the X-ray exit window W is maximized in the depression 13d, and the X-ray irradiation range is widened.

  As shown in FIG. 11, the anode member 6 may penetrate through the opening 14 a of the wall portion 14. In this case, since the heat absorbing member 3 can be brought into direct contact with the anode member 6 penetrating the opening 14 a of the wall portion 14, heat can be more efficiently transmitted from the anode member 6 to the heat absorbing member 3.

  Further, a heat conducting member 30 made of an insulating material such as silicone may be interposed between the side wall portion 10 a surrounding the filament 5 and the surrounding portion 20. In this case, the heat conduction member 30 ensures insulation between the filament 5 and the surrounding portion 20, and heat generated from the filament 5 is efficiently transmitted to the surrounding portion 20. For this reason, the filament 5 can be sufficiently cooled.

  Subsequently, a second embodiment of the present invention will be described. FIG. 12 is a cross-sectional view showing the second embodiment. 13 is a plan view of the X-ray tube main body in FIG. 12, and FIG. 14 is a left side view of the X-ray tube main body in FIG. The X-ray tube 1A of the second embodiment is obtained by integrally forming the side wall portion 13, the wall portion 14, and the anode member 6 in the first embodiment.

  As shown in FIGS. 12 to 14, the housing 4 </ b> A of the X-ray tube 1 </ b> A has a housing portion 25 instead of the housing portion 9. In the accommodating portion 25, for example, a hole 25a along the central axis L3 is formed on one end side of a cylindrical member made of Kovar, copper, or stainless steel, and a female screw hole 25b along the central axis L3 is formed on the other end side. It has been done. The outer portion of the side wall portion 25c of the hole 25a is formed with a recessed portion 25d that is recessed inwardly from the other outer portion. The bottom surface of the recess 25d is a flat surface. A substantially circular opening 25e is formed in a portion of the side wall portion 25c where the hollow portion 25d is formed in a plan view. The sheet 15 is disposed on the outer surface of the side wall part 25c so as to close the opening 25e, and the side wall part 25c and the sheet 15 are coupled by brazing or the like. An X-ray exit window W through which X-rays easily pass is configured by a portion of the sheet 15 corresponding to the opening 25e.

  A slope 25f that is inclined with respect to the central axis L3 is formed at the bottom of the hole 25a so as to face the X-ray exit window W. A target 7 is formed by vapor deposition or the like substantially at the center of the inclined surface 25f. In the housing part 25 configured as described above, the side wall part 25c of the hole 25a corresponds to the side wall part 13, and the female screw hole 25b corresponds to the female screw hole 6c. Further, the bottom of the hole 25 a becomes an anode member 25 g corresponding to the anode member 6.

  One end of the accommodating portion 25 is in contact with the flange portion 11 c of the accommodating portion 8. The outer diameter of the accommodating part 25 is substantially the same as the outer diameter of the flange part 11c, and the outer periphery of the accommodating part 25 is aligned with the outer periphery of the flange part 11c. The outer peripheral part of the accommodating part 25 and the flange part 11c are couple | bonded by brazing, welding, etc., and the boundary part of the accommodating part 25 and the accommodating part 8 is sealed.

  In addition, the outer diameter of the housing portion 25 is substantially the same as the inner diameter of the surrounding portion 23, and the housing portion 25 is fitted to the surrounding portion 23. As a result, the side wall portion 25 c of the housing portion 25 is in contact with the surrounding portion 23.

  In the X-ray tube 1A, the accommodating portion 25 that forms the other end of the housing 4A is made of the same material as the anode member 25g, and the anode member 25g is formed integrally with the accommodating portion 25. Thereby, since the heat absorption member 3 can be directly brought into contact with the anode member 25g, heat can be more efficiently transmitted from the anode member 25g to the heat absorption member 3. Further, when the side wall portion 25c and the surrounding portion 23 are in contact with each other, heat is more efficiently transmitted from the side wall portion 25c to the surrounding portion 23. Therefore, the anode member 25g can be further sufficiently cooled.

  Subsequently, a third embodiment of the present invention will be described. FIG. 15 is a cross-sectional view showing the third embodiment. 16 is a plan view of the X-ray tube main body in FIG. 15, and FIG. 17 is a left side view of the X-ray tube main body in FIG. The X-ray tube 1B of the third embodiment is such that the side wall portion 13 and the surrounding portion 23 in the first embodiment are in contact with each other.

  As shown in FIGS. 15 to 17, the housing 4 </ b> B of the X-ray tube 1 </ b> B has a housing portion 9 </ b> B instead of the housing portion 9. The accommodating part 9 </ b> B has a side wall part 26 and a wall part 27 instead of the side wall part 13 and the wall part 14.

  The side wall part 26 is configured by a cylindrical member in the same manner as the side wall part 13. The side wall portion 26 is formed with a recess portion 26d similar to the recess portion 13d, and an X-ray exit window W is provided at a position where the recess portion 26d is formed. At one end of the side wall portion 26, a flange portion 26b similar to the flange portion 13b is provided. The outer diameter of the side wall part 26 is substantially uniform except for the flange part 26b. On the other end side of the side wall portion 26, a counterbore 26a is formed around the opening.

  The wall portion 27 is formed of a disk-like member as with the wall portion 14. The outer diameter of the wall 27 is substantially equal to the inner diameter of the counterbore 26a. The thickness of the wall 27 is substantially equal to the depth of the counterbore 26a. The wall 27 is formed with an opening 27a similar to the opening 14a. A counterbore hole 27b similar to the counterbore hole 14b is formed on one side of the wall portion 27. A counterbore 27c is formed around the opening 27a on the other surface side of the wall 27.

  The wall 27 is fitted into the counterbore 26a, and one surface of the wall 27 is in contact with the bottom of the counterbore 26a. The side wall portion 27d of the counterbore hole 27c is surrounded by the side wall portion 26f of the counterbore hole 26a. The side wall portion 27d and the side wall portion 26f are joined by brazing, welding, or the like, and the boundary portion between the side wall portion 26 and the wall portion 27 is sealed. Similarly to the flange portion 13b, the flange portion 26b is coupled to the flange portion 11c of the accommodating portion 8, and the boundary portion between the accommodating portion 9B and the accommodating portion 8 is sealed. Similar to the counterbore 14b, the anode member 6 is fitted in the counterbore 27b. The anode member 6 and the wall portion 27 are coupled by brazing, and the opening 27 a of the wall portion 27 is sealed by the anode member 6.

  The outer diameter of the side wall part 26 excluding the flange part 26 b is substantially the same as the inner diameter of the surrounding part 23, and the part of the side wall part 26 other than the flange part 26 b is fitted with the surrounding part 23. Thus, the side wall portion 26 is in contact with the surrounding portion 23. An annular groove 19c is formed on one end side of the main body 19, and a side wall 26f and a side wall 27d are fitted into the groove 19c.

  In the X-ray tube 1 </ b> B, heat is efficiently transferred from the side wall part 26 to the surrounding part 23 by the side wall part 26 and the surrounding part 23 being in contact with each other. Therefore, the anode member 6 can be further sufficiently cooled.

  Subsequently, a fourth embodiment of the present invention will be described. FIG. 18 is a cross-sectional view showing the fourth embodiment. 19 is a plan view of the X-ray tube main body in FIG. 18, and FIG. 20 is a left side view of the X-ray tube main body in FIG. The X-ray tube 1C of the fourth embodiment eliminates the flange portion 26b of the side wall portion 26 and the flange portion 11c of the joint portion 11 in the third embodiment, and increases the length in which the housing 4B and the enclosure portion 23 are fitted. It is a thing.

  As shown in FIGS. 18 to 20, the housing 4 </ b> C of the X-ray tube 1 </ b> C has a housing portion 8 </ b> C and a housing portion 9 </ b> C instead of the housing portion 8 and the housing portion 9 </ b> B.

  The accommodating portion 8 </ b> C has a joint portion 28 instead of the joint portion 11. The joint part 28 is provided with a flange part 28b similar to the flange part 11b at one end of a side wall part 28a similar to the side wall part 11a.

  The accommodating portion 9 </ b> C has a side wall portion 29 instead of the side wall portion 26. The side wall part 29 is configured by a cylindrical member in the same manner as the side wall part 13. The outer diameter of the side wall part 29 is substantially the same as the outer diameter of the side wall part 28a. The side wall 29 is formed with a recess 29d similar to the recess 13d, and an X-ray exit window W is provided at the position where the recess 29d is formed. A counterbore hole 29a similar to the counterbore hole 26a is formed on the other end side of the side wall portion 29. Similar to the counterbore hole 26a, the wall portion 27 is fitted into the counterbore hole 29a. On the outer periphery on one end side of the side wall portion 29, a thin diameter portion 29b is formed so that the side wall portion 28a of the joint portion 28 can be attached. The other end portion of the side wall portion 28a is attached to the small diameter portion 29b, and the outer periphery of the side wall portion 28a is aligned with the outer periphery of the side wall portion 29 excluding the small diameter portion 29b. The other end portion of the side wall portion 28a and the small diameter portion 29b are joined by brazing, welding, or the like, and the boundary portion between the accommodating portion 9C and the accommodating portion 8C is sealed.

  In this way, the outer diameter of the housing 4C is substantially uniform from the side wall portion 29 to the side wall portion 28a, and the side wall portion 29 and the side wall portion 28a are fitted to the surrounding portion 23. That is, compared with the case where only the side wall portion 29 is fitted to the surrounding portion 23, the length in which the housing 4 </ b> C and the surrounding portion 23 are fitted is longer. Accordingly, the housing 4C and the surrounding portion 23 come into contact with each other in a wider range, and heat is more efficiently transmitted from the housing 4C to the surrounding portion 23. Therefore, the anode member 6 can be further sufficiently cooled.

  The preferred embodiments of the present invention have been described above. However, the present invention is not necessarily limited to the above-described embodiments, and various modifications can be made without departing from the scope of the present invention. For example, the heat absorbing member 3 may be cooled by forming a fluid passage inside the heat absorbing member 3 and flowing a cooling fluid through the passage.

  1, 1A, 1B, 1C ... X-ray tube, 3 ... Heat absorbing member, 4 ... Housing, 4A, 4B, 4C ... Housing, 5 ... Filament, 6, 25g ... Anode member, 7 ... Target, 10a, 11a , 13, 25c, 26, 28a, 29 ... side wall, 13d, 25d, 26d, 29d ... hollow, 14, 27 ... wall (holding wall), 14a, 27a ... opening, 19 ... main body, 20 ... Enclosure, 21 ... bolt (fastening member), 22 ... enclosure (first part), 22a ... opening, 23 ... enclosure (second part), 30 ... heat conduction member, E1 ... cylindrical member, E2 ... disk-shaped member, R1 ... edge, R2 ... edge, W ... X-ray exit window.

Claims (14)

A casing having a cylindrical shape and an X-ray exit window provided on the side wall;
A filament disposed on one end side of the housing and emitting electrons;
An anode member disposed on the other end side in the housing and attracting the electrons emitted from the filament;
A target formed on the anode member such that X-rays generated by the collision of electrons are directed to the X-ray exit window;
The housing is disposed on the other end side of, and a heat absorbing member for absorbing heat generated in the housing,
An X-ray tube, wherein a fastening member is passed through the anode member and the heat absorbing member, and the anode member and the heat absorbing member are coupled by fastening of the fastening member. The housing further includes a holding wall provided at the other end of the side wall in a state where the anode member is held,
The X-ray tube according to claim 1, wherein the anode member and the heat absorption member are closely fixed to the holding wall portion. The holding wall is formed with an opening through which the fastening member passes,
The X-ray tube according to claim 2, wherein the anode member is disposed so as to close the opening.   The X-ray tube according to claim 3, wherein the anode member is disposed so as to penetrate the opening. The other end side of the housing is made of the same material as the anode member,
The X-ray tube according to claim 1, wherein the anode member is formed integrally with the other end side of the casing. The heat absorbing member has a main body that contacts the other end of the housing, and an enclosure that surrounds the side wall,
The X-ray tube according to claim 1, wherein an opening for exposing the X-ray exit window is formed in the surrounding portion.   The X-ray tube according to claim 6, wherein the side wall portion and the surrounding portion are in contact with each other. X-ray tube according to claim 6 or 7 SL placing insulating materials made of heat-conducting member is characterized by being interposed between the portion and the surrounding portion surrounding said filament of said side wall portion.   The surrounding portion is detachably coupled to the first portion and a first portion that protrudes from the main body portion and surrounds the other end side of the housing, and surrounds one end side of the housing. The X-ray tube according to claim 6, further comprising: a second portion. In the outer part of the side wall part, a recessed part that is recessed inward than the other outer part is formed,
The X-ray tube according to claim 1, wherein the X-ray exit window is provided at a position where the recess is formed.   The X-ray tube according to claim 10, wherein an edge of the X-ray exit window is in contact with an edge of the recess. It is a manufacturing method of the X-ray tube of Claim 1,
The heat absorbing member is disposed on the other end side of the housing, the fastening member is passed through the anode member and the heat absorbing member, and the fastening member is fastened, whereby the anode member and the heat absorbing member are The manufacturing method of the X-ray tube characterized by including the process of couple | bonding.   Preparing a cylindrical member for forming the side wall portion of the casing and a plate-shaped member for forming the other end of the casing, and joining the anode member and the plate-shaped member by brazing; The manufacture of the X-ray tube according to claim 12, further comprising a step of inserting the anode member into the other end side of the cylindrical member and coupling the plate member to the other end of the cylindrical member. Method.   13. The method further comprises a step of forming a recessed portion that is recessed inwardly of the outside portion of the side wall portion, and providing the X-ray exit window at a position where the recessed portion is formed. Or the manufacturing method of the X-ray tube of 13.

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