JP5821482B2 - オゾン発生装置 - Google Patents
オゾン発生装置 Download PDFInfo
- Publication number
- JP5821482B2 JP5821482B2 JP2011216942A JP2011216942A JP5821482B2 JP 5821482 B2 JP5821482 B2 JP 5821482B2 JP 2011216942 A JP2011216942 A JP 2011216942A JP 2011216942 A JP2011216942 A JP 2011216942A JP 5821482 B2 JP5821482 B2 JP 5821482B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- supplied
- dehumidifying
- reactor
- temperature
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Drying Of Gases (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
Description
11…エアフィルタ
12…コンプレッサ
13…除湿部
131…中空糸膜ユニット
131a…膜
133…センサ
134…制御手段
135…ヒータ
14…反応器
15…筺体
Claims (2)
- 供給されるガスを連続的に除湿可能な除湿手段と、
前記除湿手段で除湿されたガスが供給され、オゾンを発生させる反応器と、
供給されるガスの温度が閾値より高い場合、前記除湿手段で除湿したガスを前記反応器に導入させ、供給されるガスの温度が閾値より低い場合、前記除湿手段にガスを供給せずに、供給されるガスを前記反応器に導入する制御手段と、
を備えることを特徴とするオゾン発生装置。 - 前記除湿手段を加温する加温手段を備え、
前記制御手段は、供給されるガスの温度が前記閾値より低い場合であっても、前記除湿手段の温度が第2閾値より高くなったとき、供給されるガスを前記除湿手段に供給する
ことを特徴とする請求項1記載のオゾン発生装置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011216942A JP5821482B2 (ja) | 2011-09-30 | 2011-09-30 | オゾン発生装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011216942A JP5821482B2 (ja) | 2011-09-30 | 2011-09-30 | オゾン発生装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2013075792A JP2013075792A (ja) | 2013-04-25 |
| JP5821482B2 true JP5821482B2 (ja) | 2015-11-24 |
Family
ID=48479569
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011216942A Expired - Fee Related JP5821482B2 (ja) | 2011-09-30 | 2011-09-30 | オゾン発生装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5821482B2 (ja) |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2605100B2 (ja) * | 1988-04-28 | 1997-04-30 | 東京エレクトロン株式会社 | オゾン発生装置 |
| JP2658422B2 (ja) * | 1989-09-06 | 1997-09-30 | 富士電機株式会社 | 膜式ドライヤ付のオゾナイザ |
| JPH05254804A (ja) * | 1992-03-06 | 1993-10-05 | Nippon Steel Chem Co Ltd | オゾン発生装置 |
| JPH0859211A (ja) * | 1994-08-19 | 1996-03-05 | Toshiba Corp | オゾン発生装置 |
| JPH09301702A (ja) * | 1996-05-14 | 1997-11-25 | Toshiba Corp | オゾン発生装置 |
-
2011
- 2011-09-30 JP JP2011216942A patent/JP5821482B2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2013075792A (ja) | 2013-04-25 |
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