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JP5838864B2 - Thermocouple mounting method and coated thermocouple - Google Patents
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JP5838864B2 - Thermocouple mounting method and coated thermocouple - Google Patents

Thermocouple mounting method and coated thermocouple Download PDF

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JP5838864B2
JP5838864B2 JP2012048816A JP2012048816A JP5838864B2 JP 5838864 B2 JP5838864 B2 JP 5838864B2 JP 2012048816 A JP2012048816 A JP 2012048816A JP 2012048816 A JP2012048816 A JP 2012048816A JP 5838864 B2 JP5838864 B2 JP 5838864B2
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thermocouple
adherend
metal oxide
oxide film
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JP2013185838A (en
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徳作 西浦
徳作 西浦
高木 啓司
啓司 高木
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Nippon Electric Glass Co Ltd
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Description

本発明は熱電対取り付け方法及び被覆熱電対に関する。   The present invention relates to a thermocouple mounting method and a coated thermocouple.

熱電対は、異種金属からなる2本の素線の端部同士を接合して2つの接合部を形成し、この2つの接合部間の温度差による熱起電力を利用した温度センサである。接合する素線の特性によって測定可能な温度範囲が異なり、低温領域から高温領域まで様々な環境での温度測定に幅広く使用されている。特に高温領域用熱電対には、長期間使用すると金属の酸化、劣化が生じるため、保護膜を設けたものが知られている(特許文献1参照)。   The thermocouple is a temperature sensor that uses two electromotive forces due to a temperature difference between two joints by joining two ends of two strands made of different metals to form two joints. The measurable temperature range varies depending on the characteristics of the wire to be joined, and it is widely used for temperature measurement in various environments from low temperature to high temperature. In particular, a thermocouple for a high temperature region is known to be provided with a protective film since metal is oxidized and deteriorated when used for a long time (see Patent Document 1).

特許文献1には、2本の素線の表面上に、被覆用の金属酸化物膜を形成する被覆熱電対の製造方法が記載されている。特許文献1の製造方法によれば、高温でも安定している金属酸化物膜で2本の素線が被覆されているため、酸化による劣化が低減され、被覆熱電対は長い耐用寿命を有している。   Patent Document 1 describes a method for manufacturing a coated thermocouple in which a metal oxide film for coating is formed on the surfaces of two strands. According to the manufacturing method of Patent Document 1, since two strands are covered with a metal oxide film that is stable even at high temperatures, deterioration due to oxidation is reduced, and the coated thermocouple has a long service life. ing.

特開平6−229837号公報JP-A-6-229837

熱電対は使用時、2本の素線の端部の接合部を測定対象物と接触させて測定対象物の温度を測定する。しかしながら、特許文献1に記載の被覆熱電対は、素線のみならず接合部も金属酸化物膜で被覆されている。このため、使用する際、接合部と測定対象物との間に金属酸化物膜が介在し、熱の伝導が阻まれることとなり、被覆熱電対の応答性が低減してしまう。   When in use, the thermocouple measures the temperature of the measurement object by bringing the joint of the ends of the two strands into contact with the measurement object. However, in the coated thermocouple described in Patent Document 1, not only the strands but also the joints are covered with a metal oxide film. For this reason, when used, a metal oxide film is interposed between the joint and the object to be measured, and heat conduction is hindered, and the responsiveness of the coated thermocouple is reduced.

本発明は、上記課題を鑑みてなされたものであり、その目的は、応答性を損なうことなく、耐用寿命を向上できる熱電対取り付け方法及び被覆熱電対を提供することにある。   This invention is made | formed in view of the said subject, The objective is to provide the thermocouple attachment method and coating | coated thermocouple which can improve a service life, without impairing responsiveness.

本発明の熱電対取り付け方法は、被着物に熱電対を取り付ける熱電対取り付け方法であって、それぞれの一端が互いに接合して接合部を構成した2本の素線を有する熱電対を用意する用意工程と、前記接合部を前記被着物に固定する固定工程と、前記固定工程の後に行われ、前記被着物の一部及び前記2本の素線を金属酸化物膜で被覆する被覆工程とを包含する。   The thermocouple attachment method of the present invention is a thermocouple attachment method for attaching a thermocouple to an adherend, and is prepared to prepare a thermocouple having two strands in which each end is joined to each other to form a joint. A fixing step for fixing the bonding portion to the adherend, and a covering step that is performed after the fixing step and covers a part of the adherend and the two strands with a metal oxide film. Include.

ある実施形態において、本発明の熱電対取り付け方法は、前記被着物を測定対象物に装着する装着工程を更に包含し、前記装着工程において、前記被着物の前記一部とは異なる他の一部が前記測定対象物に装着される。   In one embodiment, the thermocouple attachment method of the present invention further includes an attachment step of attaching the adherend to a measurement object, and in the attachment step, another part different from the part of the adherend. Is attached to the measurement object.

ある実施形態において、前記被着物が、前記接合部と前記測定対象物との接触を補強する補強部材である。   In one embodiment, the adherend is a reinforcing member that reinforces contact between the joint and the measurement object.

ある実施形態において、前記補強部材はプレート形状を有している。   In one embodiment, the reinforcing member has a plate shape.

ある実施形態において、前記補強部材は白金、ロジウム、イリジウム及びパラジウムのうちの少なくとも1つを含む。   In one embodiment, the reinforcing member includes at least one of platinum, rhodium, iridium, and palladium.

ある実施形態において、前記被着物が測定対象物である。   In one embodiment, the adherend is a measurement object.

ある実施形態において、前記金属酸化物膜はジルコニア、イットリア、アルミナ、チタニア、マグネシア及びシリカのうちの少なくとも1つを含む。   In one embodiment, the metal oxide film includes at least one of zirconia, yttria, alumina, titania, magnesia, and silica.

ある実施形態では、前記被覆工程において、前記金属酸化物膜の被覆は、溶射、塗布、蒸着、スパッタリング及び化学気相成長のうちの少なくとも1つによって行われる。   In one embodiment, in the coating step, the metal oxide film is coated by at least one of spraying, coating, vapor deposition, sputtering, and chemical vapor deposition.

本発明の被覆熱電対は、測定対象物の温度を測定する被覆熱電対であって、それぞれの一端が互いに接合して接合部を構成した2本の素線を有する熱電対と、前記接合部に直接接触している被着物と、前記被着物の一部と前記熱電対のうちの前記被着物に接触した部分を除いた部分とを被覆する金属酸化物膜とを備え、前記被着物が、前記2本の素線の前記接合部と前記測定対象物との接触を補強する補強部材である。   The coated thermocouple of the present invention is a coated thermocouple for measuring the temperature of an object to be measured, the thermocouple having two strands in which each end is joined to each other to form a joined portion, and the joined portion. An adherend that is in direct contact with the substrate, and a metal oxide film that covers a portion of the adherend and a portion of the thermocouple excluding a portion that is in contact with the adherend. The reinforcing member reinforces the contact between the joint of the two strands and the measurement object.

ある実施形態において、前記補強部材はプレート形状を有している。   In one embodiment, the reinforcing member has a plate shape.

ある実施形態において、前記補強部材は白金、ロジウム、イリジウム及びパラジウムのうちの少なくとも1つを含む。   In one embodiment, the reinforcing member includes at least one of platinum, rhodium, iridium, and palladium.

ある実施形態において、前記金属酸化物膜はジルコニア、イットリア、アルミナ、チタニア、マグネシア及びシリカのうちの少なくとも1つを含む。   In one embodiment, the metal oxide film includes at least one of zirconia, yttria, alumina, titania, magnesia, and silica.

本発明の熱電対取り付け方法によれば、応答性を損なうことなく、耐用寿命を向上させた被覆熱電対を提供することができる。   According to the thermocouple attachment method of the present invention, it is possible to provide a coated thermocouple having an improved service life without impairing responsiveness.

本発明の実施形態に係る被覆熱電対を示す模式図である。It is a mimetic diagram showing a covering thermocouple concerning an embodiment of the present invention. (a)〜(c)は、本発明の実施形態に係る被覆熱電対の取り付け方法を説明するための図である。(A)-(c) is a figure for demonstrating the attachment method of the covering thermocouple which concerns on embodiment of this invention. 本発明の実施形態に係る被覆熱電対を示す模式図である。It is a mimetic diagram showing a covering thermocouple concerning an embodiment of the present invention. (a)〜(d)は、本発明の実施形態に係る被覆熱電対の取り付け方法を説明するための図である。(A)-(d) is a figure for demonstrating the attachment method of the covering thermocouple which concerns on embodiment of this invention.

以下、図面を参照して、本発明に係る熱電対取り付け方法及び被覆熱電対の実施形態を説明する。ただし、本発明は以下の実施形態に限定されない。   Embodiments of a thermocouple mounting method and a coated thermocouple according to the present invention will be described below with reference to the drawings. However, the present invention is not limited to the following embodiments.

図1は本発明の実施形態に係る被覆熱電対10Aを示す模式図である。図1を用いて、測定対象物20に取り付けられた被覆熱電対10Aを説明する。被覆熱電対10Aは、熱電対1と金属酸化物膜13とを備えている。測定対象物20は、説明のために白金からなるパイプを例として挙げるが、他の素材や構造であってもよい。   FIG. 1 is a schematic diagram showing a coated thermocouple 10A according to an embodiment of the present invention. The coated thermocouple 10A attached to the measurement object 20 will be described with reference to FIG. The coated thermocouple 10 </ b> A includes a thermocouple 1 and a metal oxide film 13. The measurement object 20 is exemplified by a pipe made of platinum for the sake of explanation, but may be another material or structure.

熱電対1は、2本の素線11を有している。2本の素線11は、それぞれの一端が互いに接合して温度測定用の接合部111を構成し、それぞれの他の一端が温度測定装置(図示せず)に接続される。接合部111は、被着物12と接触するように配置される。本実施形態において、被着物12は測定対象物20である。このように、温度測定装置によって測定対象物20(被着物12)としての白金パイプの温度を測定できる。2本の素線11は、プラス脚とマイナス脚に分けられて成分が互いに異なり、測定する温度領域、測定精度などによって適切にその種類を選択することができる。本発明は2本の素線11の種類を限定せず、JIS C1602(1995)のB、R、S、K、E、J、T、Nに規定されたものであってもよく、JIS規格外のものであってもよい。例えば、高温領域での温度測定には、白金を含む素線11が用いられる。   The thermocouple 1 has two strands 11. One end of each of the two strands 11 is joined to each other to form a temperature measuring joint 111, and the other end is connected to a temperature measuring device (not shown). The joining part 111 is arrange | positioned so that the to-be-adhered body 12 may be contacted. In the present embodiment, the adherend 12 is the measurement object 20. Thus, the temperature of the platinum pipe as the measuring object 20 (the adherend 12) can be measured by the temperature measuring device. The two strands 11 are divided into a plus leg and a minus leg, and the components are different from each other, and the type can be appropriately selected depending on the temperature range to be measured, the measurement accuracy, and the like. The present invention does not limit the types of the two wires 11 and may be those defined in B, R, S, K, E, J, T, and N of JIS C1602 (1995). It may be outside. For example, the strand 11 containing platinum is used for temperature measurement in a high temperature region.

被着物12の一部と、接合部111が被着物12と接触する接触部位112を除いた2本の素線11とは、金属酸化物膜13で被覆されている。本実施形態において、2本の素線11は、接合部111が測定対象物20と接触する接触部位112を除いて、金属酸化物膜13で被覆されている。金属酸化物膜13としては、高温での安定性に優れたものが用いられるが、靱性があって容易に折れず、且つ素線11と近い熱膨張率を有して熱を受けても素線11から剥がれにくい観点から、特にジルコニア、イットリア、アルミナ、チタニア、マグネシア及びシリカのうちの少なくとも1つを含むものが好ましい。   Part of the adherend 12 and the two strands 11 excluding the contact portion 112 where the bonding portion 111 contacts the adherend 12 are covered with the metal oxide film 13. In the present embodiment, the two strands 11 are covered with the metal oxide film 13 except for the contact portion 112 where the bonding portion 111 is in contact with the measurement object 20. As the metal oxide film 13, a film having excellent stability at high temperature is used. However, the metal oxide film 13 has toughness and does not break easily, and has a thermal expansion coefficient close to that of the element wire 11, so From the viewpoint of being difficult to peel off from the wire 11, those containing at least one of zirconia, yttria, alumina, titania, magnesia and silica are particularly preferable.

図1を参照して説明したように、本実施形態の被覆熱電対10Aにおいて、熱電対1の2本の素線11は、接合部111が測定対象物20(被着物12)と接触する接触部位112を除いて、金属酸化物膜13で被覆されている。このため、酸化による素線11の劣化が防止される。更に、接合部111の一部が金属酸化物膜13を介さずに測定対象物20(被着物12)と直接接触していることから、熱は金属酸化物膜13によって阻まれることなく接合部111と測定対象物20(被着物12)との間を伝導することができる。このような構成により、被覆熱電対10Aでは、応答性を損なうことなく、耐用寿命を向上できる。   As described with reference to FIG. 1, in the coated thermocouple 10 </ b> A of the present embodiment, the two strands 11 of the thermocouple 1 are in contact with each other at which the joint portion 111 contacts the measurement object 20 (the adherend 12). The metal oxide film 13 is covered except for the portion 112. For this reason, deterioration of the strand 11 by oxidation is prevented. Furthermore, since a part of the bonding part 111 is in direct contact with the measurement object 20 (the adherend 12) without passing through the metal oxide film 13, heat is not blocked by the metal oxide film 13. It is possible to conduct between 111 and the measurement object 20 (the adherend 12). With such a configuration, the service life of the coated thermocouple 10A can be improved without impairing responsiveness.

図2(a)〜(c)は、本発明の実施形態に係る被覆熱電対10Aの取り付け方法を説明するための図である。以下、図2を参照して、被覆熱電対10Aを好適に取り付けるための熱電対取り付け方法を説明する。本実施形態の熱電対取り付け方法は、以下の工程によって行われる。   FIGS. 2A to 2C are views for explaining a method of attaching the coated thermocouple 10A according to the embodiment of the present invention. Hereinafter, with reference to FIG. 2, a thermocouple attachment method for suitably attaching the coated thermocouple 10A will be described. The thermocouple attachment method of this embodiment is performed by the following steps.

(1)図2(a)に示すように、それぞれの一端が互いに接合して接合部111を構成した2本の素線11を有する熱電対1を用意する。上述したように、素線11の材質は、必要に応じて適切に選択することができる。   (1) As shown in FIG. 2A, a thermocouple 1 having two strands 11 each having one end joined to each other to form a joint 111 is prepared. As described above, the material of the wire 11 can be appropriately selected as necessary.

(2)図2(b)に示すように、接合部111を被着物12に固定する。本実施形態において、被着物12は、温度測定の対象となる測定対象物20である。具体的には、測定対象物20は例えば白金からなるパイプであり、その表面に、2本の素線11の接合部111が固定される。接合部111の固定は、例えば溶接によって行われるが、本発明はこれに限定されない。接合部111は、溶接以外の手段(例えば接着、機械的固定)で測定対象物20(被着物12)に固定されてもよい。   (2) As shown in FIG. 2 (b), the joining portion 111 is fixed to the adherend 12. In this embodiment, the adherend 12 is a measurement object 20 that is a target for temperature measurement. Specifically, the measuring object 20 is a pipe made of platinum, for example, and the joint 111 of the two strands 11 is fixed on the surface thereof. The joint 111 is fixed by, for example, welding, but the present invention is not limited to this. The joint portion 111 may be fixed to the measurement object 20 (the adherend 12) by means other than welding (for example, adhesion or mechanical fixation).

(3)図2(c)に示すように、前記固定工程の後、測定対象物20(被着物12)の一部及び熱電対1を金属酸化物膜13で被覆する。被覆手段としては、例えば溶射であり得る。具体的には、接合部111が測定対象物20(被着物12)としての白金パイプと接触する接触部位112を除いて、接合部111を含めた2本の素線11の表面上を、金属酸化物膜13で被覆する。   (3) As shown in FIG. 2C, after the fixing step, a part of the measurement object 20 (the adherend 12) and the thermocouple 1 are covered with the metal oxide film 13. The coating means can be, for example, thermal spraying. Specifically, on the surface of the two strands 11 including the joint 111 except for the contact portion 112 where the joint 111 contacts the platinum pipe as the measurement object 20 (the adherend 12), a metal Cover with oxide film 13.

金属酸化物膜13としては、上述したようにジルコニア、イットリア、アルミナ、チタニア、マグネシア及びシリカのうちの少なくとも1つを含むものが用いられる。なお、ここでは、溶射によって測定対象物20(被着物12)の一部及び熱電対1を金属酸化物膜13で被覆していたが、本発明はこれに限定されない。金属酸化物膜13の被覆は、例えば、溶射、塗布、蒸着、スパッタリング及び化学気相成長(Chemical Vapor Deposition;CVD)のうちの少なくとも1つによって行われる。   As the metal oxide film 13, as described above, a film containing at least one of zirconia, yttria, alumina, titania, magnesia, and silica is used. Here, a part of the measurement object 20 (the adherend 12) and the thermocouple 1 are covered with the metal oxide film 13 by thermal spraying, but the present invention is not limited to this. The coating of the metal oxide film 13 is performed, for example, by at least one of spraying, coating, vapor deposition, sputtering, and chemical vapor deposition (CVD).

図2を参照して説明したように、金属酸化物膜13の被覆は、接合部111を測定対象物20(被着物12)に固定した後に行われたため、接合部111の一部は金属酸化物膜13を介さずに測定対象物20と直接接触している。このように、本実施形態の熱電対取り付け方法によれば、上述した被覆熱電対10Aを好適に取り付けることができる。   As described with reference to FIG. 2, the coating of the metal oxide film 13 was performed after fixing the bonding portion 111 to the measurement target 20 (the adherend 12), and therefore a part of the bonding portion 111 was subjected to metal oxidation. It is in direct contact with the measuring object 20 without passing through the physical film 13. Thus, according to the thermocouple attachment method of the present embodiment, the above-described coated thermocouple 10A can be suitably attached.

上述した実施形態の被覆熱電対10Aにおいて、2本の素線11の接合部111は、他の部材を介することなく測定対象物20に直接接触していたが、本発明はこれに限定されない。2本の素線11の接合部111は、他の部材を介して測定対象物20と接触してもよい。   In the coated thermocouple 10A of the above-described embodiment, the joint portion 111 of the two strands 11 is in direct contact with the measurement object 20 without any other member, but the present invention is not limited to this. The joint part 111 of the two strands 11 may contact the measuring object 20 through another member.

図3は、本発明の実施形態に係る被覆熱電対10Bを示す模式図である。以下、図3を参照して、本実施形態の被覆熱電対10Bを説明する。被覆熱電対10Bは、2本の素線11と、被着物12と、金属酸化物膜13とを備えている。   FIG. 3 is a schematic diagram showing a coated thermocouple 10B according to an embodiment of the present invention. Hereinafter, with reference to FIG. 3, the coated thermocouple 10 </ b> B of the present embodiment will be described. The coated thermocouple 10 </ b> B includes two strands 11, an adherend 12, and a metal oxide film 13.

本実施形態の被覆熱電対10Bは、測定対象物20とは異なる被着物12を更に備えた点を除いて、図1を参照して上述した被覆熱電対10Aと同様な構成を有しているため、重複する説明について省略する。被覆熱電対10Bにおいて、被着物12は、2本の素線11の接合部111と測定対象物20との接触を補強する補強部材121であり、接合部111は、補強部材121を介して測定対象物20と接触している。補強部材121はプレート形状を有しており、その一部は、接合部111と直接接触して接合部111に固定され、他の一部は、測定対象物20としての白金パイプと接触して測定対象物20に装着される。   The coated thermocouple 10B of the present embodiment has the same configuration as the coated thermocouple 10A described above with reference to FIG. 1 except that an adherend 12 different from the measurement target 20 is further provided. Therefore, a duplicate description is omitted. In the coated thermocouple 10 </ b> B, the adherend 12 is a reinforcing member 121 that reinforces the contact between the joint portion 111 of the two strands 11 and the measurement object 20, and the joint portion 111 is measured via the reinforcing member 121. It is in contact with the object 20. The reinforcing member 121 has a plate shape, part of which is in direct contact with the joint 111 and fixed to the joint 111, and the other part is in contact with a platinum pipe as the measurement object 20. Mounted on the measurement object 20.

被着物12の一部と、接合部111が被着物12と接触する接触部位112を除いた2本の素線11とは、金属酸化物膜13で被覆されている。本実施形態において、被着物12としての補強部材121及び2本の素線11は、補強部材121が測定対象物20に接触する接触部位122と接合部111が補強部材121に接触する接触部位112とを除いて、金属酸化物膜13で被覆されている。   Part of the adherend 12 and the two strands 11 excluding the contact portion 112 where the bonding portion 111 contacts the adherend 12 are covered with the metal oxide film 13. In the present embodiment, the reinforcing member 121 and the two strands 11 as the adherend 12 include a contact portion 122 where the reinforcing member 121 contacts the measuring object 20 and a contact portion 112 where the joint 111 contacts the reinforcing member 121. Are covered with the metal oxide film 13.

本実施形態において、補強部材121はプレート形状を有しており、比較的広い面積で測定対象物20と接触し得る。このため、接合部111を測定対象物20に直接接触させる場合と比べて、補強部材121を介して接合部111と測定対象物20とを接触させることで、熱変形などに起因する接合部111の脱落を好適に防止することができる。なお、ここでは、補強部材121はプレート形状を有していたが、本発明はこれに限定されない。接合部111と測定対象物20との接続を補強できれば、補強部材121はプレート形状以外の形状(例えば棒形状)を有してもよい。   In the present embodiment, the reinforcing member 121 has a plate shape, and can contact the measurement object 20 in a relatively large area. For this reason, compared with the case where the joining part 111 is made to contact the measuring object 20 directly, the joining part 111 resulting from a thermal deformation etc. is brought into contact with the joining part 111 and the measuring object 20 via the reinforcing member 121. Can be suitably prevented. Here, although the reinforcing member 121 has a plate shape, the present invention is not limited to this. The reinforcing member 121 may have a shape (for example, a rod shape) other than the plate shape as long as the connection between the joint portion 111 and the measurement object 20 can be reinforced.

例えば、補強部材121としては白金が用いられる。ただし、本発明はこれに限定されない。補強部材121は、素線11又は測定対象物20の素材や、温度測定を行う環境によって適切に選択することができる。好ましくは、補強部材121は、素線11又は測定対象物20に溶接される場合、良好な溶接が得られるように、測定対象物20と類似又は同一の素材である。また、好ましくは、補強部材121は、酸化による劣化を防止するために、高い化学的安定性を有する素材である。例えば、補強部材121は、白金、ロジウム、イリジウム及びパラジウム等の白金族金属のうちの少なくとも1つを含むものであってもよい。   For example, platinum is used as the reinforcing member 121. However, the present invention is not limited to this. The reinforcing member 121 can be appropriately selected depending on the material of the wire 11 or the measurement object 20 and the environment in which the temperature is measured. Preferably, the reinforcing member 121 is made of a material that is similar or identical to the measurement object 20 so that good welding can be obtained when the reinforcement member 121 is welded to the wire 11 or the measurement object 20. Preferably, the reinforcing member 121 is a material having high chemical stability in order to prevent deterioration due to oxidation. For example, the reinforcing member 121 may include at least one of platinum group metals such as platinum, rhodium, iridium, and palladium.

図3を参照して説明したように、本実施形態の被覆熱電対10Bにおいて、2本の素線11は、接合部111が被着物12と接触する接触部位112を除いて、金属酸化物膜13で被覆されている。このため、温度測定時に、酸化による素線11の劣化が防止される。更に、接合部111の一部が金属酸化物膜13を介さずに被着物12と直接接触しており、被着物12の一部が金属酸化物膜13を介さずに測定対象物20と直接接触していることから、熱は金属酸化物膜13によって阻まれることなく接合部111と測定対象物20との間を伝導することができる。このような構成により、被覆熱電対10Bでは、応答性を損なうことなく、耐用寿命を向上できる。   As described with reference to FIG. 3, in the coated thermocouple 10 </ b> B of the present embodiment, the two strands 11 are formed of a metal oxide film except for the contact portion 112 where the bonding portion 111 contacts the adherend 12. 13 is covered. For this reason, at the time of temperature measurement, deterioration of the strand 11 by oxidation is prevented. Further, a part of the bonding portion 111 is in direct contact with the adherend 12 without the metal oxide film 13, and a part of the adherend 12 is directly with the measurement object 20 without the metal oxide film 13. Since they are in contact with each other, heat can be conducted between the joint 111 and the measurement object 20 without being blocked by the metal oxide film 13. With such a configuration, the service life of the coated thermocouple 10B can be improved without impairing responsiveness.

図4(a)〜(d)は、本発明の実施形態に係る被覆熱電対10Bの取り付け方法を説明するための図である。以下、図4を参照して、被覆熱電対10Bを好適に取り付けるための熱電対取り付け方法を説明する。本実施形態の熱電対取り付け方法は、以下の工程によって行われる。   4A to 4D are views for explaining a method of attaching the coated thermocouple 10B according to the embodiment of the present invention. Hereinafter, with reference to FIG. 4, a thermocouple attachment method for suitably attaching the coated thermocouple 10B will be described. The thermocouple attachment method of this embodiment is performed by the following steps.

(1)図4(a)に示すように、2本の素線11を有する熱電対1を用意する。2本の素線11は、それぞれの一端が互いに接合して接合部111を含む。上述したように、素線11は、必要に応じて適切に種類を選択することができる。   (1) As shown in FIG. 4A, a thermocouple 1 having two strands 11 is prepared. The two strands 11 include a joint portion 111 with their one ends joined together. As described above, the type of the wire 11 can be appropriately selected as necessary.

(2)図4(b)に示すように、接合部111を被着物12に固定する。本実施形態において、被着物12は、2本の素線11の接合部111と測定対象物20との接触を補強する補強部材121である。具体的には、被着物12は例えば白金からなり、プレート形状を有しており、その一部に、接合部111が固定される。   (2) As shown in FIG. 4B, the joining portion 111 is fixed to the adherend 12. In the present embodiment, the adherend 12 is a reinforcing member 121 that reinforces the contact between the joint portion 111 of the two strands 11 and the measurement target 20. Specifically, the adherend 12 is made of, for example, platinum and has a plate shape, and the joining portion 111 is fixed to a part thereof.

補強部材121と接合部111との固定手段としては特に限定せず、例えばかしめ、溶接又は接着であってよい。かしめによる固定の場合、接合部111は、補強部材121と図示しない圧着部材との間に挟持される。接合部111は、圧着部材によって補強部材121に圧着される。なお、図4(b)では、接合部111は補強部材121の周縁部付近に固定されていたが、本発明はこれに限定されない。接合部111は補強部材121の主面の中央付近に固定されてもよい。   The fixing means between the reinforcing member 121 and the joint 111 is not particularly limited, and may be, for example, caulking, welding, or adhesion. In the case of fixing by caulking, the joint portion 111 is sandwiched between the reinforcing member 121 and a crimping member (not shown). The joining portion 111 is crimped to the reinforcing member 121 by a crimping member. In addition, in FIG.4 (b), although the junction part 111 was being fixed to the peripheral part vicinity of the reinforcement member 121, this invention is not limited to this. The joining portion 111 may be fixed near the center of the main surface of the reinforcing member 121.

(3)図4(c)に示すように、前記固定工程の後、被着物12の一部及び熱電対1を金属酸化物膜13で被覆する。被覆手段としては、例えば溶射であり得る。具体的には、接合部111が被着物12としての補強部材121に接触する接触部位112を除いて、接合部111を含めた2本の素線11の表面と補強部材121の表面の一部とを金属酸化物膜13で被覆する。金属酸化物膜13で被覆しない補強部材121の表面の他の一部は後述する装着工程において装着に用いられるため、装着する際に必要に応じてその領域の広さを調節する。   (3) As shown in FIG. 4C, after the fixing step, a part of the adherend 12 and the thermocouple 1 are covered with a metal oxide film 13. The coating means can be, for example, thermal spraying. Specifically, the surface of the two strands 11 including the bonding portion 111 and a part of the surface of the reinforcing member 121 except for the contact portion 112 where the bonding portion 111 contacts the reinforcing member 121 as the adherend 12. Are covered with a metal oxide film 13. Another part of the surface of the reinforcing member 121 that is not covered with the metal oxide film 13 is used for mounting in a mounting process to be described later. Therefore, the width of the region is adjusted as necessary when mounting.

金属酸化物膜13の種類については、図1を参照して上述した実施形態と同様、ジルコニア、イットリア、アルミナ、チタニア、マグネシア及びシリカのうちの少なくとも1つを含むものが用いられる。また、ここでは、金属酸化物膜13の被覆は溶射によって行われていたが、溶射の他に例えば、塗布、蒸着、スパッタリング及びCVDなどの成膜手段のうちの少なくとも1つによって行い得る。   As for the type of the metal oxide film 13, a film containing at least one of zirconia, yttria, alumina, titania, magnesia, and silica is used as in the embodiment described above with reference to FIG. 1. Here, the coating of the metal oxide film 13 is performed by thermal spraying. However, in addition to thermal spraying, it can be performed by at least one of film forming means such as coating, vapor deposition, sputtering, and CVD.

(4)図4(d)に示すように、被着物12としての補強部材121を測定対象物20に装着する。具体的には、上記被覆工程において、補強部材121の金属酸化物膜13で被覆された前記一部とは異なる他の一部を、装着部材30によって測定対象物20に装着する。ここでは、装着手段として溶接が用いられ、被着物12は溶接材である装着部材30によって測定対象物20へ装着される。しかし、本発明はこれに限定されない。被着物12の装着手段としては、溶接の他に接着、機械的固定などが挙げられ、必要に応じて被着物12を着脱不可又は着脱自在に測定対象物20へ装着し得る。例えば装着部材30として取り外し可能な固定具を使用する場合、被着物12は着脱自在となる。但し、被着物12全体の酸化による劣化を防止する観点から、被着物12は、金属酸化物膜13で被覆された前記一部とは異なる他の一部を密封できる手段(例えば上述した溶接)によって測定対象物20に装着されることが好ましい。   (4) As shown in FIG. 4 (d), the reinforcing member 121 as the adherend 12 is attached to the measurement object 20. Specifically, in the covering step, another part different from the part covered with the metal oxide film 13 of the reinforcing member 121 is attached to the measurement object 20 by the attachment member 30. Here, welding is used as the attachment means, and the adherend 12 is attached to the measurement object 20 by the attachment member 30 which is a welding material. However, the present invention is not limited to this. Examples of attachment means for the adherend 12 include adhesion, mechanical fixation, and the like in addition to welding. The adherend 12 can be attached to the measurement object 20 in a non-detachable or detachable manner as required. For example, when a detachable fixing tool is used as the mounting member 30, the adherend 12 is detachable. However, from the viewpoint of preventing deterioration of the entire adherend 12 due to oxidation, the adherend 12 can seal other part different from the part covered with the metal oxide film 13 (for example, welding described above). Is preferably attached to the measuring object 20.

図4を参照して説明したように、金属酸化物膜13の被覆は、接合部111に被着物12としての補強部材121を固定した後に行われたため、接合部111の一部は金属酸化物膜13を介さずに補強部材121と直接接触している。また、補強部材121が測定対象物20と接触する接触部位122には金属酸化物膜13が被覆されていないため、補強部材121の一部は金属酸化物膜13を介さずに測定対象物20と直接接触している。このように、本実施形態の熱電対取り付け方法によれば、上述した被覆熱電対10Bを好適に取り付けることができる。   As described with reference to FIG. 4, since the metal oxide film 13 is coated after the reinforcing member 121 as the adherend 12 is fixed to the joint portion 111, a part of the joint portion 111 is a metal oxide. The reinforcing member 121 is in direct contact with no membrane 13 interposed. In addition, since the metal oxide film 13 is not coated on the contact portion 122 where the reinforcing member 121 contacts the measuring object 20, a part of the reinforcing member 121 does not pass through the metal oxide film 13. In direct contact. Thus, according to the thermocouple attachment method of the present embodiment, the above-described coated thermocouple 10B can be suitably attached.

本発明は測定対象物の温度を測定する熱電対利用できる。   The present invention can use a thermocouple for measuring the temperature of an object to be measured.

1 熱電対
10A、10B 被覆熱電対
11 素線
111 接合部
112 接触部位
12 被着物
121 補強部材
122 接触部位
13 金属酸化物膜
20 測定対象物
30 装着部材
DESCRIPTION OF SYMBOLS 1 Thermocouple 10A, 10B Coated thermocouple 11 Wire 111 Joint part 112 Contact part 12 Adhered object 121 Reinforcement member 122 Contact part 13 Metal oxide film 20 Measuring object 30 Mounting member

Claims (6)

被着物に熱電対を取り付ける熱電対取り付け方法であって、
それぞれの一端が互いに接合して接合部を構成した2本の素線を有する熱電対を用意する用意工程と、
前記接合部を前記被着物に固定する固定工程と、
前記固定工程の後に行われ、前記被着物の一部及び前記2本の素線を金属酸化物膜で被覆する被覆工程と
前記被着物を測定対象物に装着する装着工程と
を包含し、
前記装着工程において、前記被着物の前記一部とは異なる他の一部が前記測定対象物に装着される、熱電対取り付け方法。
A thermocouple attachment method for attaching a thermocouple to an adherend,
A preparation step of preparing a thermocouple having two strands in which each end is joined to each other to form a joint;
A fixing step of fixing the joining portion to the adherend;
A coating step that is performed after the fixing step and covers a part of the adherend and the two strands with a metal oxide film ;
A mounting step of mounting the adherend to a measurement object;
Including
A thermocouple mounting method in which, in the mounting step, another part different from the part of the adherend is mounted on the measurement object .
前記被着物が、前記接合部と前記測定対象物との接触を補強する補強部材である、請求項に記載の熱電対取り付け方法。 The thermocouple attachment method according to claim 1 , wherein the adherend is a reinforcing member that reinforces contact between the joint and the measurement object. 前記補強部材はプレート形状を有している、請求項に記載の熱電対取り付け方法。 The thermocouple attachment method according to claim 2 , wherein the reinforcing member has a plate shape. 前記補強部材は白金、ロジウム、イリジウム及びパラジウムのうちの少なくとも1つを含む、請求項又はに記載の熱電対取り付け方法。 The thermocouple attachment method according to claim 2 or 3 , wherein the reinforcing member includes at least one of platinum, rhodium, iridium, and palladium. 前記金属酸化物膜はジルコニア、イットリア、アルミナ、チタニア、マグネシア及びシリカのうちの少なくとも1つを含む、請求項1からの何れか一項に記載の熱電対取り付け方法。 At least one containing, thermocouple mounting method according to any one of claims 1 to 4 of the metal oxide film is zirconia, yttria, alumina, titania, magnesia and silica. 前記被覆工程において、前記金属酸化物膜の被覆は、溶射、塗布、蒸着、スパッタリング及び化学気相成長のうちの少なくとも1つによって行われる、請求項1からの何れか一項に記載の熱電対取り付け方法。 In the coating step, the coating of metal oxide film, thermal spraying, coating, vapor deposition is carried out by at least one of sputtering and chemical vapor deposition, thermoelectric according to any one of claims 1 5 Pair mounting method.
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