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JP5844589B2 - Anisotropic conductive film, connection method using the same, and connection structure - Google Patents
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JP5844589B2 - Anisotropic conductive film, connection method using the same, and connection structure - Google Patents

Anisotropic conductive film, connection method using the same, and connection structure Download PDF

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JP5844589B2
JP5844589B2 JP2011206379A JP2011206379A JP5844589B2 JP 5844589 B2 JP5844589 B2 JP 5844589B2 JP 2011206379 A JP2011206379 A JP 2011206379A JP 2011206379 A JP2011206379 A JP 2011206379A JP 5844589 B2 JP5844589 B2 JP 5844589B2
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JP2012041541A (en
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慎一 林
慎一 林
雄太 荒木
雄太 荒木
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Dexerials Corp
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Priority to KR1020147010110A priority patent/KR101872562B1/en
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    • CCHEMISTRY; METALLURGY
    • C08ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08FMACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
    • C08F220/00Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
    • C08F220/02Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
    • C08F220/10Esters
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09JADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04Homopolymers or copolymers of esters
    • C09J133/14Homopolymers or copolymers of esters of esters containing halogen, nitrogen, sulfur or oxygen atoms in addition to the carboxy oxygen
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/321Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by conductive adhesives
    • H05K3/323Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10007Types of components
    • H05K2201/10128Display
    • H05K2201/10136Liquid Crystal display [LCD]

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Medicinal Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Wire Bonding (AREA)
  • Non-Insulated Conductors (AREA)
  • Conductive Materials (AREA)
  • Adhesive Tapes (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Combinations Of Printed Boards (AREA)

Description

本発明は、異方性導電フィルム、及び異方性導電フィルムを用いて一対の回路部材を接続する接続方法、並びにその接続方法によって得られる接続構造体に関する。 The present invention relates to an anisotropic conductive film , a connection method for connecting a pair of circuit members using the anisotropic conductive film , and a connection structure obtained by the connection method.

従来より、一対の回路部材を電気的に接続する際に、導電性粒子を分散させた回路接続部材が使用されている。回路接続部材としては、例えば異方性導電フィルム(ACF:Anisotropic Conductive Film)が挙げられるが、異方性導電フィルムを介して基板の配線電極が形成された接続面と電子部品の端子電極(バンプ)が形成された接続面とを接続する方法がある。異方性導電フィルムを用いた接続方法では、基板の接続面上に異方性導電フィルムを仮貼りし、異方性導電フィルムと電子部品の接続面とを対峙させて異方性導電フィルム上に電子部品を配置して熱加圧を行う。これにより、異方性導電フィルム中の導電性粒子が電子部品の端子電極と基板の配線電極との間に挟み込まれて押し潰される。その結果、電子部品の端子電極と基板の配線電極とは、導電性粒子を介して電気的に接続される。   Conventionally, when a pair of circuit members are electrically connected, a circuit connection member in which conductive particles are dispersed has been used. Examples of the circuit connection member include an anisotropic conductive film (ACF). A connection surface on which a wiring electrode of a substrate is formed via an anisotropic conductive film and a terminal electrode (bump) of an electronic component. There is a method of connecting the connecting surface formed with a). In the connection method using the anisotropic conductive film, the anisotropic conductive film is temporarily attached on the connection surface of the substrate, and the anisotropic conductive film and the connection surface of the electronic component are opposed to each other on the anisotropic conductive film. An electronic component is placed on and heat-pressed. Thereby, the electroconductive particle in an anisotropic conductive film is inserted | pinched between the terminal electrode of an electronic component, and the wiring electrode of a board | substrate, and is crushed. As a result, the terminal electrode of the electronic component and the wiring electrode of the substrate are electrically connected via the conductive particles.

端子電極と配線電極との間にない導電性粒子は、異方性導電フィルムの絶縁性の接着剤組成物中に存在し、電気的に絶縁した状態を維持している。すなわち、端子電極と配線電極との間のみで電気的導通が図られることになる。   Conductive particles that are not between the terminal electrode and the wiring electrode are present in the insulating adhesive composition of the anisotropic conductive film and maintain an electrically insulated state. That is, electrical continuity is achieved only between the terminal electrode and the wiring electrode.

このような回路接続部材を構成する接着剤組成物としては、従来、エポキシ樹脂等を含有するものがある。この接着剤組成物は、一般に、エポキシ樹脂、エポキシ樹脂と反応するフェノール樹脂等の硬化剤、エポキシ樹脂と硬化剤との反応を促進する潜在性硬化剤等を含有する。   As an adhesive composition constituting such a circuit connecting member, there has heretofore been one containing an epoxy resin or the like. This adhesive composition generally contains an epoxy resin, a curing agent such as a phenol resin that reacts with the epoxy resin, a latent curing agent that accelerates the reaction between the epoxy resin and the curing agent, and the like.

近年、異方性導電フィルムに対しては、生産時間の短縮のために、低温短時間で硬化を行う接着剤組成物が要求されている。この要求に応えるために、(メタ)アクリレート誘導体及び過酸化物等のラジカル重合開始剤を含有するラジカル硬化型の接着剤組成物が注目されている。ラジカル硬化型の回路接続材料は、反応性に富むラジカルにより、短時間で硬化反応が進行するため、生産時間の短縮に有利である(特許文献1、2参照)。   In recent years, an anisotropic conductive film is required to have an adhesive composition that cures at a low temperature in a short time in order to shorten the production time. In order to meet this demand, a radical curable adhesive composition containing a radical polymerization initiator such as a (meth) acrylate derivative and a peroxide has attracted attention. The radical curing type circuit connection material is advantageous in shortening the production time because the curing reaction proceeds in a short time due to radicals rich in reactivity (see Patent Documents 1 and 2).

特開2008−291199号公報JP 2008-291199 A 特開2011−37953号公報JP 2011-37953 A

しかしながら、(メタ)アクリレート誘導体は、エポキシ樹脂等に比べて重合時の硬化収縮が大きく、また、硬化後の内部応力も大きい傾向にある。このため、一般に、ラジカル硬化型の接着剤組成物を含有する回路接続材料を用いた場合、その接着層とLCDパネル等の基板との界面において気泡が発生し、接続信頼性が低下するおそれがある。特に、TFT(Thin Film Transistor)方式のLCDパネルにおいてパネル配線上の絶縁膜として使用される窒化珪素(SiN)膜との界面においてこの気泡発生が顕著となり、密着力が劣り、結果として接続信頼性が大きく低下するおそれがある。   However, (meth) acrylate derivatives tend to have a large shrinkage during curing and a large internal stress after curing compared to epoxy resins and the like. For this reason, generally, when a circuit connection material containing a radical curable adhesive composition is used, bubbles may be generated at the interface between the adhesive layer and a substrate such as an LCD panel, which may reduce connection reliability. is there. In particular, in the TFT (Thin Film Transistor) type LCD panel, the generation of bubbles becomes remarkable at the interface with the silicon nitride (SiN) film used as an insulating film on the panel wiring, resulting in poor adhesion, resulting in connection reliability. May be greatly reduced.

本発明は、このような従来の実情に鑑みて提案されたものであり、高温高湿処理を受けたときに、窒化珪素膜との界面との密着性を向上させて優れた接続信頼性を発揮することが可能な異方性導電フィルム、及びこの異方性導電フィルムを用いて一対の回路部材を接続する接続方法、並びにその接続方法によって得られる接続構造体を提供することを目的とする。 The present invention has been proposed in view of such a conventional situation, and when subjected to a high-temperature and high-humidity treatment, the adhesion with the interface with the silicon nitride film is improved to provide excellent connection reliability. An object of the present invention is to provide an anisotropic conductive film that can be exhibited, a connection method for connecting a pair of circuit members using the anisotropic conductive film , and a connection structure obtained by the connection method. .

上述した課題を解決するために、本発明の異方性導電フィルムは、(1)多官能(メタ)アクリレートモノマーと、(2)熱又は光によって遊離ラジカルを発生するラジカル重合開始剤と、(3)絶縁性の接着剤組成物中の配合量が3〜20質量%である、単官能(メタ)アクリレートモノマーと、(4)金属被覆樹脂粒子とを含有し、単官能(メタ)アクリレートモノマーは、化学式(1)で表され、化学式(1)において、Rはビフェニル基又はナフタレン基であり、Rとそれに結合する酸素原子との結合位置はオルト位、メタ位、又はパラ位であり、nは1〜10であることを特徴とする。 In order to solve the above-described problems, the anisotropic conductive film of the present invention comprises (1) a polyfunctional (meth) acrylate monomer, (2) a radical polymerization initiator that generates free radicals by heat or light, 3) A monofunctional (meth) acrylate monomer containing a monofunctional (meth) acrylate monomer having a blending amount of 3 to 20% by mass in the insulating adhesive composition and (4) metal-coated resin particles. Is represented by the chemical formula (1), in which R is a biphenyl group or a naphthalene group, and the bonding position between R and an oxygen atom bonded thereto is an ortho position, a meta position, or a para position, n is 1-10.

また、上述した課題を解決するために、本発明の接続構造体は、回路電極同士が対向するように配置された一対の回路部材の間に、異方性導電フィルムが介在されて、対峙する回路部材が電気的且つ機械的に接続されてなる接続構造体において、回路部材の一方は、表面が窒化珪素膜に覆われており、異方性導電フィルムは、(1)多官能(メタ)アクリレートモノマーと、(2)熱又は光によって遊離ラジカルを発生するラジカル重合開始剤と、(3)絶縁性の接着剤組成物中の配合量が3〜20質量%である、単官能(メタ)アクリレートモノマーと、(4)金属被覆樹脂粒子とを含有し、単官能(メタ)アクリレートモノマーは、化学式(1)で表され、化学式(1)において、Rはビフェニル基又はナフタレン基であり、Rとそれに結合する酸素原子との結合位置はオルト位、メタ位、又はパラ位であり、nは1〜10であることを特徴とする。 In order to solve the above-described problems, the connection structure according to the present invention is opposed to each other with an anisotropic conductive film interposed between a pair of circuit members arranged so that circuit electrodes face each other. In the connection structure in which the circuit members are electrically and mechanically connected, one of the circuit members is covered with a silicon nitride film, and the anisotropic conductive film has (1) polyfunctional (meta) An acrylate monomer, (2) a radical polymerization initiator that generates free radicals by heat or light, and (3) a monofunctional (meth) content in the insulating adhesive composition of 3 to 20% by mass. A monofunctional (meth) acrylate monomer containing an acrylate monomer and (4) metal-coated resin particles is represented by the chemical formula (1). In the chemical formula (1), R is a biphenyl group or a naphthalene group, and R And it Bonding position to the oxygen atom if the ortho, meta, or para, n represents characterized in that 1 to 10.

また、上述した課題を解決するために、本発明の接続方法は、回路電極同士が対向するように配置された一対の回路部材の間に、異方性導電フィルムを介在させて、熱加圧により、対峙する該回路部材を電気的且つ機械的に接続させる接続方法において、回路部材の一方は、表面が窒化珪素膜に覆われており、異方性導電フィルムは、(1)多官能(メタ)アクリレートモノマーと、(2)熱又は光によって遊離ラジカルを発生するラジカル重合開始剤と、(3)絶縁性の接着剤組成物中の配合量が3〜20質量%である、単官能(メタ)アクリレートモノマーと、(4)金属被覆樹脂粒子とを含有し、単官能(メタ)アクリレートモノマーは、化学式(1)で表され、化学式(1)において、Rはビフェニル基又はナフタレン基であり、Rとそれに結合する酸素原子との結合位置はオルト位、メタ位、又はパラ位であり、nは1〜10であることを特徴とする。 In addition, in order to solve the above-described problem, the connection method of the present invention is a method in which an anisotropic conductive film is interposed between a pair of circuit members arranged so that circuit electrodes face each other, and heat pressing is performed. Thus, in the connection method of electrically and mechanically connecting the circuit members facing each other, one of the circuit members is covered with a silicon nitride film, and the anisotropic conductive film is (1) polyfunctional ( A monofunctional (meth) acrylate monomer, (2) a radical polymerization initiator that generates free radicals by heat or light, and (3) a blending amount in the insulating adhesive composition is 3 to 20% by mass ( A (meth) acrylate monomer and (4) metal-coated resin particles are contained, and the monofunctional (meth) acrylate monomer is represented by the chemical formula (1), and in the chemical formula (1), R is a biphenyl group or a naphthalene group. , R Bonding position to the oxygen atom bonded thereto is ortho, meta, or para, n represents characterized in that 1 to 10.

本発明によれば、高温高湿処理を受けたときに、窒化珪素膜との界面との密着性を向上させて優れた接続信頼性を発揮することが可能な異方性導電フィルム、及びこの異方性導電フィルムを用いて一対の回路部材を接続する接続方法、並びにその接続方法によって得られる接続構造体を提供することができる。 According to the present invention, an anisotropic conductive film capable of improving adhesion with an interface with a silicon nitride film and exhibiting excellent connection reliability when subjected to a high temperature and high humidity treatment, and this A connection method for connecting a pair of circuit members using an anisotropic conductive film, and a connection structure obtained by the connection method can be provided.

以下、本発明の具体的な実施の形態(以下、「本実施の形態」という。)について、図面を参照しながら下記の順に詳細に説明する。
<1.回路接続材料>
<2.接続方法>
<3.実施例>
Hereinafter, a specific embodiment of the present invention (hereinafter referred to as “the present embodiment”) will be described in detail in the following order with reference to the drawings.
<1. Circuit connection material>
<2. Connection method>
<3. Example>

<1.回路接続材料>
本実施の形態における回路接続材料は、回路電極同士が対向するように配置された一対の回路部材の間に介在され、対峙するこの回路部材を電気的且つ機械的に接続するものである。本実施の形態における回路接続材料は、絶縁性の接着剤組成物に複数の導電性粒子が分散されてフィルム状に形成された異方性導電フィルムに適用される。
<1. Circuit connection material>
The circuit connecting material in the present embodiment is interposed between a pair of circuit members arranged so that circuit electrodes face each other, and electrically and mechanically connects the facing circuit members. The circuit connection material in the present embodiment is applied to an anisotropic conductive film formed into a film shape by dispersing a plurality of conductive particles in an insulating adhesive composition.

絶縁性の接着剤組成物は、多官能(メタ)アクリレート化合物と、単官能(メタ)アクリレートモノマーと、熱又は光によって遊離ラジカルを発生するラジカル重合開始剤と、フィルム形成樹脂とを含有する。ここで、(メタ)アクリレートには、アクリレートとメタクリレートとが含まれる。   The insulating adhesive composition contains a polyfunctional (meth) acrylate compound, a monofunctional (meth) acrylate monomer, a radical polymerization initiator that generates free radicals by heat or light, and a film-forming resin. Here, (meth) acrylate includes acrylate and methacrylate.

多官能(メタ)アクリレート化合物、単官能(メタ)アクリレートモノマーは、何れもラジカル重合性樹脂であり、異方性導電フィルムが加熱されたときに絶縁性の接着剤組成物内において架橋構造を形成し、これにより、接着剤組成物を硬化させる。   Both polyfunctional (meth) acrylate compounds and monofunctional (meth) acrylate monomers are radical polymerizable resins and form a crosslinked structure in the insulating adhesive composition when the anisotropic conductive film is heated. Thus, the adhesive composition is cured.

単官能(メタ)アクリレートモノマーは、化学式(1)で表される。   The monofunctional (meth) acrylate monomer is represented by the chemical formula (1).

化学式(1)において、Rはビフェニル基又はナフタレン基である。Rとそれに結合する酸素原子Oとの結合位置はオルト位、メタ位、又はパラ位である。nは1〜10であり、1〜3が特に好ましい。nが大きすぎると、架橋構造が緩くなり、異方性導電フィルムの窒化珪素膜に対する密着性(接着性)が低下してしまう。   In chemical formula (1), R is a biphenyl group or a naphthalene group. The bonding position between R and the oxygen atom O bonded thereto is the ortho, meta, or para position. n is 1 to 10, and 1 to 3 is particularly preferable. When n is too large, the cross-linked structure becomes loose, and the adhesion (adhesiveness) of the anisotropic conductive film to the silicon nitride film is lowered.

単官能(メタ)アクリレートモノマーは、このように、かさ高いRと、適正な長さの(CHCH0)と、ラジカル重合を行うーCOCH=CHとからなる構造により、重合時に硬化収縮が小さくなり、また、硬化後の内部応力も小さくなることから、接続時に、接着層と基板の窒化珪素膜との界面において気泡が発生するのが抑制され、高い密着力により接続することができる。すなわち、異方性導電フィルムにこのような単官能(メタ)アクリレートモノマーを含有させることで、この異方性導電フィルムを用いて接続してなる接続構造体において、高い接続信頼性を得ることができる。 The monofunctional (meth) acrylate monomer thus has a bulky R, an appropriate length of (CH 2 CH 2 0) n, and a radical polymerization —COCH═CH 2, so that during polymerization, Since the shrinkage during curing is reduced and the internal stress after curing is also reduced, the generation of bubbles at the interface between the adhesive layer and the silicon nitride film of the substrate is suppressed during connection, and the connection is made with high adhesion. Can do. That is, by including such a monofunctional (meth) acrylate monomer in the anisotropic conductive film, it is possible to obtain high connection reliability in a connection structure formed by using this anisotropic conductive film. it can.

単官能(メタ)アクリレートモノマーとしては、例えば化学式(2)で表されるエトキシ化o−フェニルフェノールアクリレートを挙げることができる。   Examples of the monofunctional (meth) acrylate monomer include ethoxylated o-phenylphenol acrylate represented by the chemical formula (2).

なお、ビフェニル基とそれに結合する酸素原子との結合位置は、化学式(2)のようにオルト位に限定されず、メタ位(エトキシ化m−フェニルフェノールアクリレート)又はパラ位(エトキシ化p−フェニルフェノールアクリレート)であってもよい。   The bonding position between the biphenyl group and the oxygen atom bonded thereto is not limited to the ortho position as shown in chemical formula (2), but is meta-position (ethoxylated m-phenylphenol acrylate) or para-position (ethoxylated p-phenyl). Phenol acrylate).

また、Rがナフタレン基である場合も、ナフタレン基とそれに結合する酸素原子との結合位置は、オルト位、メタ位、パラ位の何れであってもよい。   Further, when R is a naphthalene group, the bonding position between the naphthalene group and the oxygen atom bonded thereto may be any of the ortho position, the meta position, and the para position.

絶縁性の接着剤組成物中の単官能(メタ)アクリレートモノマーの配合量は、3〜20質量%(絶縁性の接着剤組成物100質量部に対して3〜20質量部)であることが好ましい。3質量%未満であると、単官能(メタ)アクリレートモノマーの効果が得にくくなり、接着強度が弱くなる。一方、20質量%を超えると、耐熱性に劣る硬化物となり、導通抵抗値が高くなる。   The compounding amount of the monofunctional (meth) acrylate monomer in the insulating adhesive composition is 3 to 20% by mass (3 to 20 parts by mass with respect to 100 parts by mass of the insulating adhesive composition). preferable. When the content is less than 3% by mass, the effect of the monofunctional (meth) acrylate monomer is difficult to obtain, and the adhesive strength is weakened. On the other hand, when it exceeds 20 mass%, it will become a hardened | cured material inferior to heat resistance, and a conduction | electrical_connection resistance value will become high.

このような単官能(メタ)アクリルモノマーを含有させることにより、高温高湿処理を受けたときの回路電極間の抵抗値の変動を抑制しながら、窒化珪素膜との界面との密着性を向上させて優れた接続信頼性を発揮することが可能となる。   By including such a monofunctional (meth) acrylic monomer, the adhesiveness with the interface with the silicon nitride film is improved while suppressing the fluctuation of the resistance value between the circuit electrodes when subjected to the high temperature and high humidity treatment. It is possible to exhibit excellent connection reliability.

多官能(メタ)アクリレート化合物としては、多官能(メタ)アクリレートモノマー、多官能(メタ)アクリレートオリゴマー、多官能(メタ)アクリレートポリマー等を挙げることができる。   Examples of the polyfunctional (meth) acrylate compound include polyfunctional (meth) acrylate monomers, polyfunctional (meth) acrylate oligomers, polyfunctional (meth) acrylate polymers, and the like.

二官能(メタ)アクリレートとしては、ビスフェノールF―EO変性ジ(メタ)アクリレート、ビスフェノールA―EO変性ジ(メタ)アクリレート、ポリプロピレングリコールジ(メタ)アクリレート、ポリエチレングリコール(メタ)アクリレート、トリシクロデカンジメチロールジ(メタ)アクリレート、ジシクロペンタジエン(メタ)アクリレート等が挙げられる。   Bifunctional (meth) acrylates include bisphenol F-EO-modified di (meth) acrylate, bisphenol A-EO-modified di (meth) acrylate, polypropylene glycol di (meth) acrylate, polyethylene glycol (meth) acrylate, and tricyclodecanedi. Examples include methylol di (meth) acrylate and dicyclopentadiene (meth) acrylate.

三官能(メタ)アクリレートとしては、トリメチロールプロパントリ(メタ)アクリレート、トリメチロールプロパンPO変性(メタ)アクリレート、イソシアヌル酸EO変性トリ(メタ)アクリレート等が挙げられる。   Examples of the trifunctional (meth) acrylate include trimethylolpropane tri (meth) acrylate, trimethylolpropane PO-modified (meth) acrylate, and isocyanuric acid EO-modified tri (meth) acrylate.

四官能以上の(メタ)アクリレートとしては、ジペンタエリスリトールペンタ(メタ)アクリレート、ペンタエリスリトールヘキサ(メタ)アクリレート、ペンタエリスリトールテトラ(メタ)アクリレート、ジトリメチロールプロパンテトラアクリレート等が挙げられる。その他に、多官能ウレタン(メタ)アクリレートも使用することができる。   Examples of tetrafunctional or higher functional (meth) acrylates include dipentaerythritol penta (meth) acrylate, pentaerythritol hexa (meth) acrylate, pentaerythritol tetra (meth) acrylate, and ditrimethylolpropane tetraacrylate. In addition, polyfunctional urethane (meth) acrylates can also be used.

ラジカル重合開始剤は、熱又は光により分解して遊離ラジカルを発生する硬化剤であり、公知のラジカル重合開始剤を選択することができる。例えば、ジアシルパーオキサイド、パーオキシジカーボネート、パーオキシエステル、パーオキシケタール、ジアルキルパーオキサイド、ハイドロパーオキサイド等の過酸化物系重合開始剤、アゾビスブチロニトリル等のアゾ系重合開始剤、レドックス系重合開始剤等が挙げられる。   The radical polymerization initiator is a curing agent that generates a free radical by being decomposed by heat or light, and a known radical polymerization initiator can be selected. For example, peroxide polymerization initiators such as diacyl peroxide, peroxydicarbonate, peroxyester, peroxyketal, dialkyl peroxide, hydroperoxide, azo polymerization initiator such as azobisbutyronitrile, redox System polymerization initiators and the like.

絶縁性の接着剤組成物中のラジカル重合開始剤の配合量は、少なすぎると硬化が不十分となり、多すぎると異方性導電フィルムの凝集力が低下するため、(メタ)アクリレート化合物100質量部に対し、好ましくは1〜10質量部、より好ましくは3〜7質量部である。   If the blending amount of the radical polymerization initiator in the insulating adhesive composition is too small, the curing becomes insufficient, and if it is too large, the cohesive force of the anisotropic conductive film decreases, and therefore the (meth) acrylate compound 100 mass. The amount is preferably 1 to 10 parts by mass, more preferably 3 to 7 parts by mass with respect to parts.

膜形成樹脂としては、例えば、エポキシ樹脂、ポリエステル樹脂、ポリウレタン樹脂、フェノキシ樹脂、ポリアミド、EVA等の熱可塑性エラストマー等を使用することができる。中でも、耐熱性、接着性のために、ポリエステル樹脂、ポリウレタン樹脂、フェノキシ樹脂、特にフェノキシ樹脂、例えばビスA型エポキシ樹脂、フルオレン骨格を有するフェノキシ樹脂を挙げることができる。   As the film forming resin, for example, a thermoplastic elastomer such as an epoxy resin, a polyester resin, a polyurethane resin, a phenoxy resin, polyamide, EVA, or the like can be used. Among them, for heat resistance and adhesiveness, polyester resins, polyurethane resins, phenoxy resins, particularly phenoxy resins such as bis A type epoxy resins and phenoxy resins having a fluorene skeleton can be mentioned.

膜形成樹脂は、少なすぎるとフィルムを形成せず、多すぎると電気接続を得るための樹脂の排除性が低くなる傾向があるので、樹脂固形分(重合性アクリル系化合物と膜形成樹脂からなる接着剤組成物)100質量部に対し、80〜30質量部、より好ましくは70〜40質量部である。   If the amount of the film-forming resin is too small, a film is not formed. If the amount is too large, the resin elimination for obtaining electrical connection tends to be low. Adhesive composition) It is 80-30 mass parts with respect to 100 mass parts, More preferably, it is 70-40 mass parts.

導電性粒子としては、従来の異方性導電フィルムで用いられている導電性粒子を使用することができ、例えば、金粒子、銀粒子、ニッケル粒子等の金属粒子、ベンゾグアナミン樹脂やスチレン樹脂等の樹脂粒子の表面を金、ニッケル、亜鉛等の金属で被覆した金属被覆樹脂粒子等を挙げることができる。導電性粒子の平均粒径としては、接続信頼性の観点から、好ましくは1〜20μm、より好ましくは2〜10μmである。   As the conductive particles, the conductive particles used in conventional anisotropic conductive films can be used. For example, metal particles such as gold particles, silver particles, and nickel particles, benzoguanamine resins, styrene resins, etc. Examples thereof include metal-coated resin particles whose surfaces are coated with a metal such as gold, nickel, and zinc. The average particle diameter of the conductive particles is preferably 1 to 20 μm, more preferably 2 to 10 μm, from the viewpoint of connection reliability.

絶縁性の接着剤組成物における導電性粒子の平均粒子密度は、接続信頼性及び絶縁信頼性の観点から、好ましくは500〜50000個/mm、より好ましくは1000〜30000個/mmである。 The average particle density of the conductive particles in the insulating adhesive composition is preferably 500 to 50000 / mm 2 , more preferably 1000 to 30000 / mm 2 from the viewpoint of connection reliability and insulation reliability. .

絶縁性の接着剤組成物には、金属に対する接着性を向上させるために、リン酸アクリレートを含有させることができる。   The insulating adhesive composition can contain a phosphate acrylate in order to improve the adhesion to metal.

さらに、絶縁性の接着剤組成物には、他の添加組成物、例えば各種アクリルモノマー等の希釈用モノマー、充填剤、軟化剤、着色剤、難燃化剤、チキソトロピック剤、シランカップリング剤、シリカ微粒子等を含有させることができる。   In addition, the insulating adhesive composition includes other additive compositions such as dilution monomers such as various acrylic monomers, fillers, softeners, colorants, flame retardants, thixotropic agents, silane coupling agents. Further, silica fine particles and the like can be contained.

シランカップリング剤を含有させることにより、有機材料と無機材料との界面における接着性が向上される。シリカ微粒子を含有させることにより、貯蔵弾性率、線膨張係数等を調整して接続信頼性を向上させることができる。   By including the silane coupling agent, the adhesion at the interface between the organic material and the inorganic material is improved. By including silica fine particles, the storage elastic modulus, the linear expansion coefficient, etc. can be adjusted to improve the connection reliability.

本実施の形態の異方性導電フィルムは、ラジカル重合性樹脂である、多官能(メタ)アクリレート化合物及び化学式(1)で表される単官能(メタ)アクリレートモノマーと、(メタ)アクリレート化合物と、ラジカル重合開始剤と、フィルム形成樹脂とを含有する絶縁性の接着剤組成物に、導電性粒子を公知の分散手法により均一に分散混合し、得られた混合物をシリコーン剥離処理ポリエステルフィルム等の剥離フィルムにバーコータ等の公知の塗布手法により乾燥厚で10〜50μmとなるように塗布し、例えば、50〜90℃の恒温槽に投入して乾燥することにより製造することができる。この異方性導電フィルム上に絶縁性接着フィルムを積層する場合には、異方性導電フィルム上に、絶縁性の接着剤組成物を塗布し、乾燥することで得ることができる。   The anisotropic conductive film of the present embodiment is a radically polymerizable resin, a polyfunctional (meth) acrylate compound, a monofunctional (meth) acrylate monomer represented by the chemical formula (1), a (meth) acrylate compound, In the insulating adhesive composition containing the radical polymerization initiator and the film-forming resin, the conductive particles are uniformly dispersed and mixed by a known dispersion method, and the resulting mixture is used as a silicone release treatment polyester film or the like. It can manufacture by apply | coating to a peeling film so that it may become 10-50 micrometers in dry thickness by well-known application | coating methods, such as a bar coater, for example, putting in a 50-90 degreeC thermostat, and drying. When an insulating adhesive film is laminated on this anisotropic conductive film, it can be obtained by applying an insulating adhesive composition on the anisotropic conductive film and drying it.

剥離フィルムとしては、例えば、PET(Poly Ethylene Terephthalate)、OPP(Oriented Polypropylene)、PMP(Poly-4-methlpentene−1)、PTFE(Polytetrafluoroethylene)等にシリコーン等の剥離剤を塗布してなり、異方性導電フィルムの乾燥を防ぐとともに、異方性導電フィルムの形状を維持する。   As the release film, for example, a release agent such as silicone is applied to PET (Poly Ethylene Terephthalate), OPP (Oriented Polypropylene), PMP (Poly-4-methlpentene-1), PTFE (Polytetrafluoroethylene), etc. While preventing the conductive conductive film from drying, the shape of the anisotropic conductive film is maintained.

本実施の形態の異方性導電フィルムによれば、化学式(1)で表される構造の単官能(メタ)アクリルモノマーを含有させることにより、高温高湿処理を受けたときの回路電極間の抵抗値の変動を抑制しながら、窒化珪素膜との界面との密着性を向上させて優れた接続信頼性を発揮することが可能となる。
<2.接続方法>
According to the anisotropic conductive film of the present embodiment, by including the monofunctional (meth) acrylic monomer having the structure represented by the chemical formula (1), between the circuit electrodes when subjected to high temperature and high humidity treatment While suppressing the fluctuation of the resistance value, it is possible to improve the adhesion with the interface with the silicon nitride film and to exhibit excellent connection reliability.
<2. Connection method>

本実施の形態の異方性導電フィルムを介してLCD(Liquid Crystal Display)パネルを構成するガラス基板と配線材としてのCOF(Chip On Film)とを圧着接続する接続方法を提供する。ガラス基板には、配線電極がファインピッチに形成されている。また、COFには、配線電極の配線パターンに応じて端子電極が形成されている。そして、この接続方法によって、ガラス基板の配線電極とCOFの端子電極とを異方性導電接続することにより、接続構造体を得る。   Provided is a connection method in which a glass substrate constituting an LCD (Liquid Crystal Display) panel and a COF (Chip On Film) as a wiring material are connected by pressure bonding through the anisotropic conductive film of the present embodiment. Wiring electrodes are formed on the glass substrate at a fine pitch. Further, terminal electrodes are formed on the COF according to the wiring pattern of the wiring electrodes. And by this connection method, the connection structure is obtained by anisotropically connecting the wiring electrode of the glass substrate and the terminal electrode of the COF.

以下、異方性導電フィルムを介してガラス基板とCOFとを圧着接続する接続方法について具体的に説明する。先ず、ガラス基板上の配線電極が形成されている面と、異方性導電フィルムをガラス基板に仮貼りする(仮貼工程)。この仮貼りにおいては、加圧ボンダーの低温に加熱したヘッド部の加圧面を導電性粒子含有層上面に軽く押し当てて低圧で加圧する。加熱温度は、絶縁性の接着剤組成物が流動するが硬化しない程度の低温(例えば60〜80℃のうちの所定の値)である。また、仮貼工程での加圧圧力は、例えば0.5MPa〜2MPaのうちの所定の値である。また、仮貼工程での熱加圧時間は、例えば1〜3秒(sec)のうちの所定の時間である。   Hereinafter, a connection method in which the glass substrate and the COF are crimped and connected via an anisotropic conductive film will be specifically described. First, a surface on which a wiring electrode on a glass substrate is formed and an anisotropic conductive film are temporarily attached to the glass substrate (temporary attaching step). In this temporary bonding, the pressure surface of the head part heated to a low temperature of the pressure bonder is lightly pressed against the upper surface of the conductive particle-containing layer and pressed at a low pressure. The heating temperature is a low temperature (for example, a predetermined value of 60 to 80 ° C.) such that the insulating adhesive composition flows but does not cure. Moreover, the pressurization pressure in a temporary sticking process is a predetermined value in 0.5 MPa-2 MPa, for example. Moreover, the heat pressurization time in a temporary sticking process is predetermined time in 1-3 seconds (sec), for example.

仮貼工程で異方性導電フィルムを仮貼りした後、異方性導電フィルムの位置合わせ状態を確認し、位置ずれ等の不具合が生じている場合には、この仮貼工程の後に、異方性導電フィルムを剥離して再度異方性導電フィルムを正しい位置で仮貼りするリペア処理を行う(リペア工程)。   After temporarily sticking the anisotropic conductive film in the temporary sticking step, check the alignment state of the anisotropic conductive film, and if there is a problem such as misalignment, after this temporary sticking step, anisotropic The repair process which peels a conductive conductive film and temporarily sticks an anisotropic conductive film in a correct position again is performed (repair process).

次いで、バンプと配線電極とを対峙させるようにしてCOFを異方性導電フィルム上に配置する(配置工程)。   Next, the COF is disposed on the anisotropic conductive film so that the bump and the wiring electrode face each other (arrangement step).

そして、加圧ボンダーの加熱したヘッド部の加圧面(図示せず)をCOFの上面に押し当ててガラス基板とCOFとを圧着接続させる(接続工程)。   Then, the pressure surface (not shown) of the heated head part of the pressure bonder is pressed against the upper surface of the COF, and the glass substrate and the COF are connected by pressure bonding (connection process).

接続工程での加圧圧力は、例えば1MPa〜5MPaのうちの所定の値である。また、接続工程での加熱温度は、絶縁性粒子を溶融させるとともに絶縁性の接着剤組成物を硬化させる温度(例えば温度160〜210℃のうちの所定の値)である。また、接続工程での熱加圧時間は、例えば3〜10秒のうちの所定の時間である。   The pressurizing pressure in the connecting step is, for example, a predetermined value from 1 MPa to 5 MPa. The heating temperature in the connecting step is a temperature (for example, a predetermined value of 160 to 210 ° C.) at which the insulating particles are melted and the insulating adhesive composition is cured. Moreover, the heat pressurization time in a connection process is predetermined time in 3 to 10 seconds, for example.

このようにして、配線電極とバンプとの間に導電性粒子を挟持させ、接着剤組成物を硬化させる。これにより、ガラス基板とCOFとを電気的及び機械的に接続する。そして、ガラス基板とCOFとが異方性導電接続されてなる接続構造体を得る。得られた接続構造体は、上述したように、絶縁信頼性を良好に維持しながら、優れた接続信頼性及び導通信頼性を発揮することができる。   In this way, the conductive particles are sandwiched between the wiring electrode and the bump, and the adhesive composition is cured. Thereby, a glass substrate and COF are electrically and mechanically connected. Then, a connection structure in which the glass substrate and the COF are anisotropically conductively connected is obtained. As described above, the obtained connection structure can exhibit excellent connection reliability and conduction reliability while maintaining good insulation reliability.

以上、本実施の形態について説明したが、本発明が前述の実施の形態に限定されるものでないことは言うまでもなく、本発明の要旨を逸脱しない範囲で種々の変更が可能である。   As mentioned above, although this Embodiment was described, it cannot be overemphasized that this invention is not limited to the above-mentioned embodiment, A various change is possible in the range which does not deviate from the summary of this invention.

上述の実施の形態では、異方性導電接着部材として、異方性導電フィルムを用いた。しかしながら、異方性導電接着部材の構造は、これに限定されず、例えば、さらに絶縁性の接着剤層が積層された2層構造の異方性導電フィルムとしてもよい。また、例えば、絶縁性の接着剤組成物に導電性粒子が含まれてなる導電性接着剤ペーストと、絶縁性の接着剤組成物からなる絶縁性接着剤ペーストとからなり、これらを重ねて塗布することで2層の接着剤層としてもよい。   In the above-described embodiment, an anisotropic conductive film is used as the anisotropic conductive adhesive member. However, the structure of the anisotropic conductive adhesive member is not limited to this, and may be, for example, a two-layer anisotropic conductive film in which an insulating adhesive layer is further laminated. In addition, for example, a conductive adhesive paste in which conductive particles are contained in an insulating adhesive composition, and an insulating adhesive paste made of an insulating adhesive composition, these are applied in layers. By doing so, it is good also as two adhesive layers.

また、上述の実施の形態では、ガラス基板として、LCD(Liquid Crystal Display)パネルを構成するガラス基板を使用する場合について説明したが、ガラス基板は、これに限定されず、例えばPDP基板(PDPパネル)、有機EL基板(有機ELパネル)等を構成するガラス基板であってもよい。   In the above-described embodiment, the case where a glass substrate constituting an LCD (Liquid Crystal Display) panel is used as the glass substrate has been described. However, the glass substrate is not limited to this, for example, a PDP substrate (PDP panel) ), A glass substrate constituting an organic EL substrate (organic EL panel) or the like.

また、上述の実施の形態では、基板としてガラス基板を用いる場合について説明したが、リジット基板、フレキシブル基板等の他の基板であってもよい。また、上述の実施の形態では、電子部品としてCOFを用いる場合について説明したが、ICチップ、TAB等の他の電子部品であってもよい。   Moreover, although the above-mentioned embodiment demonstrated the case where a glass substrate was used as a board | substrate, other board | substrates, such as a rigid board | substrate and a flexible substrate, may be sufficient. In the above-described embodiment, the case where COF is used as an electronic component has been described. However, other electronic components such as an IC chip and TAB may be used.

また、上述の実施の形態では、本発明をFOG(Film On Glass)に適用する場合について説明したが、本発明は、COG(Chip On Glass)、FOB(Film On Board)等の他の実装方法にも適用できる。   Moreover, although the case where the present invention is applied to FOG (Film On Glass) has been described in the above embodiment, the present invention is not limited to other mounting methods such as COG (Chip On Glass) and FOB (Film On Board). It can also be applied.

以下、本発明の具体的な実施例について実験結果を基に説明する。   Hereinafter, specific examples of the present invention will be described based on experimental results.

<実施例1>
フィルム形成樹脂として、ポリエステルウレタン樹脂(商品名:UR8200、東洋紡績株式会社製、メチルエチルケトン/トルエン=50:50の混合溶媒にて20質量%に溶解したもの)を固形分換算で60質量部(絶縁性の接着剤組成物に対して60質量%)、ラジカル重合性樹脂(商品名:EB−600、ダイセル・サイテック株式会社製)33質量部(33質量%)及びエトキシ化o−フェニルフェノールアクリレート(商品名:A−LEN−10、新中村化学工業株式会社製)1質量部(1質量%)、シランカップリング剤(商品名:KBM−503、信越化学株式会社製)1質量部(1質量%)、リン酸アクリレート(商品名:P−1M、共栄化学株式会社製)1質量部(1質量%)、ラジカル重合開始剤(商品名:パーヘキサC、日本油脂株式会社製)4質量部(4質量%)を含有する絶縁性の接着剤組成物中に、導電性粒子(商品名:AUL704、積水化学工業株式会社製)を粒子密度10000個/mmになるように均一に分散し、導電性粒子含有組成物を剥離フィルム上にバーコータにより塗布して乾燥させ、厚み15μmの回路接続材料を作製した。
<Example 1>
Polyester urethane resin (trade name: UR8200, manufactured by Toyobo Co., Ltd., dissolved in 20% by mass in a mixed solvent of methyl ethyl ketone / toluene = 50: 50) as a film-forming resin is 60 parts by mass (insulating) 60% by mass with respect to the adhesive composition), 33 parts by mass (33% by mass) of radically polymerizable resin (trade name: EB-600, manufactured by Daicel Cytec Co., Ltd.) and ethoxylated o-phenylphenol acrylate ( Product name: A-LEN-10, manufactured by Shin-Nakamura Chemical Co., Ltd. 1 part by mass (1% by mass), silane coupling agent (trade name: KBM-503, manufactured by Shin-Etsu Chemical Co., Ltd.) 1 part by mass (1 mass) %), Phosphoric acid acrylate (trade name: P-1M, manufactured by Kyoei Chemical Co., Ltd.) 1 part by mass (1% by weight), radical polymerization initiator (trade name: Perheki) C, manufactured by Nippon Oil & Fats Co., Ltd.) In an insulating adhesive composition containing 4 parts by mass (4% by mass), conductive particles (trade name: AUL704, manufactured by Sekisui Chemical Co., Ltd.) have a particle density of 10,000. / Mm 2 was uniformly dispersed, and the conductive particle-containing composition was applied onto a release film by a bar coater and dried to prepare a circuit connection material having a thickness of 15 μm.

次に、作製した異方性導電フィルムを介してガラス基板とCOF(50μmP、Cu8μmt−Snメッキ、38μmt−S’perflex基材)とを接続する処理を行った。ここで、ガラス基板としては、後の導通抵抗値測定用としてIZOコーティングガラス基板(全表面IZOコート、ガラス厚0.7mm)、接続強度測定用としてSiNコーティングガラス基板(全表面SiNコート)を用いた。先ず、ガラス基板上の配線電極が形成されている面上に、異方性導電フィルムを1.5mm幅にスリットしてガラス基板上に仮貼りした(仮貼工程)。この仮貼りにおいては、加圧ボンダーの低温に加熱したヘッド部の加圧面を導電性粒子含有層上面に軽く押し当てて低圧で加圧した。加熱温度は、絶縁性粒子が溶解せず、絶縁性の接着剤組成物が流動するが硬化しない程度の低温である70℃とした。また、仮貼工程での加圧圧力は、1MPaとした。また、仮貼工程での熱加圧時間は、2秒とした。   Next, the process which connects a glass substrate and COF (50 micrometer P, Cu8 micrometer-Sn plating, 38 micrometer-S'perflex base material) was performed through the produced anisotropic conductive film. Here, as a glass substrate, an IZO coated glass substrate (all surface IZO coating, glass thickness 0.7 mm) is used for subsequent conduction resistance measurement, and an SiN coated glass substrate (all surface SiN coating) is used for connection strength measurement. It was. First, an anisotropic conductive film was slit to a width of 1.5 mm on the surface of the glass substrate on which the wiring electrodes were formed, and temporarily pasted on the glass substrate (temporary pasting step). In this temporary attachment, the pressure surface of the head part heated to a low temperature of the pressure bonder was lightly pressed against the upper surface of the conductive particle-containing layer and pressed at a low pressure. The heating temperature was set to 70 ° C., which is a low temperature such that the insulating particles do not dissolve and the insulating adhesive composition flows but does not cure. Moreover, the pressurization pressure in the temporary sticking process was 1 MPa. Moreover, the heat-pressing time in the temporary sticking process was 2 seconds.

次いで、COFの端子電極とガラス基板の配線電極とを対峙させるようにしてCOFを異方性導電フィルム上に配置した(配置工程)。   Next, the COF was disposed on the anisotropic conductive film so that the terminal electrode of the COF and the wiring electrode of the glass substrate were opposed to each other (arrangement step).

そして、加圧ボンダーの加熱したヘッド部の加圧面(1.5mm幅)を緩衝材(100μmtテフロン(登録商標))を介してCOFの上面に押し当ててガラス基板とCOFとを圧着接続させた(接続工程)。   Then, the pressure surface (1.5 mm width) of the heated head part of the pressure bonder was pressed against the upper surface of the COF through a buffer material (100 μmt Teflon (registered trademark)) to press-connect the glass substrate and the COF. (Connection process).

接続工程での加圧圧力は、4MPaとした。また、接続工程での加熱温度は、190℃とした。また、接続工程での熱加圧時間は、5秒とした。   The pressurizing pressure in the connecting step was 4 MPa. The heating temperature in the connection process was 190 ° C. Further, the heat pressurizing time in the connecting step was 5 seconds.

このようにして、配線電極とバンプとの間に導電性粒子を挟持させ、接着剤組成物を硬化させてガラス基板とCOFとを電気的及び機械的に接続し、接続構造体を得た。   In this way, conductive particles were sandwiched between the wiring electrodes and the bumps, the adhesive composition was cured, and the glass substrate and the COF were electrically and mechanically connected to obtain a connection structure.

<実施例2>
ラジカル重合性樹脂(商品名:EB−600、ダイセル・サイテック株式会社製)を32質量部、エトキシ化o−フェニルフェノールアクリレート(商品名:A−LEN−10、新中村化学工業株式会社製)を2質量部とした以外は、実施例1と同様の条件により、回路接続材料を作製した。
<Example 2>
32 parts by mass of radical polymerizable resin (trade name: EB-600, manufactured by Daicel Cytec Co., Ltd.), ethoxylated o-phenylphenol acrylate (trade name: A-LEN-10, manufactured by Shin-Nakamura Chemical Co., Ltd.) A circuit connection material was produced under the same conditions as in Example 1 except that the amount was 2 parts by mass.

<実施例3>
ラジカル重合性樹脂(商品名:EB−600、ダイセル・サイテック株式会社製)を31質量部、エトキシ化o−フェニルフェノールアクリレート(商品名:A−LEN−10、新中村化学工業株式会社製)を3質量部とした以外は、実施例1と同様の条件により、回路接続材料を作製した。
<Example 3>
31 parts by mass of radical polymerizable resin (trade name: EB-600, manufactured by Daicel Cytec Co., Ltd.), ethoxylated o-phenylphenol acrylate (trade name: A-LEN-10, manufactured by Shin-Nakamura Chemical Co., Ltd.) A circuit connecting material was produced under the same conditions as in Example 1 except that the amount was 3 parts by mass.

<実施例4>
ラジカル重合性樹脂(商品名:EB−600、ダイセル・サイテック株式会社製)を30質量部、エトキシ化o−フェニルフェノールアクリレート(商品名:A−LEN−10、新中村化学工業株式会社製)を4質量部とした以外は、実施例1と同様の条件により、回路接続材料を作製した。
<Example 4>
30 parts by mass of radical polymerizable resin (trade name: EB-600, manufactured by Daicel Cytec Co., Ltd.), ethoxylated o-phenylphenol acrylate (trade name: A-LEN-10, manufactured by Shin-Nakamura Chemical Co., Ltd.) A circuit connection material was produced under the same conditions as in Example 1 except that the amount was 4 parts by mass.

<実施例5>
ラジカル重合性樹脂(商品名:EB−600、ダイセル・サイテック株式会社製)を29質量部、エトキシ化o−フェニルフェノールアクリレート(商品名:A−LEN−10、新中村化学工業株式会社製)を5質量部とした以外は、実施例1と同様の条件により、回路接続材料を作製した。
<Example 5>
29 parts by mass of radical polymerizable resin (trade name: EB-600, manufactured by Daicel Cytec Co., Ltd.), ethoxylated o-phenylphenol acrylate (trade name: A-LEN-10, manufactured by Shin-Nakamura Chemical Co., Ltd.) A circuit connection material was produced under the same conditions as in Example 1 except that the amount was 5 parts by mass.

<実施例6>
ラジカル重合性樹脂(商品名:EB−600、ダイセル・サイテック株式会社製)を19質量部、エトキシ化o−フェニルフェノールアクリレート(商品名:A−LEN−10、新中村化学工業株式会社製)を15質量部とした以外は、実施例1と同様の条件により、回路接続材料を作製した。
<Example 6>
19 parts by mass of radical polymerizable resin (trade name: EB-600, manufactured by Daicel Cytec Co., Ltd.), ethoxylated o-phenylphenol acrylate (trade name: A-LEN-10, manufactured by Shin-Nakamura Chemical Co., Ltd.) A circuit connection material was produced under the same conditions as in Example 1 except that the amount was 15 parts by mass.

<実施例7>
ラジカル重合性樹脂(商品名:EB−600、ダイセル・サイテック株式会社製)を14質量部、エトキシ化o−フェニルフェノールアクリレート(商品名:A−LEN−10、新中村化学工業株式会社製)を20質量部とした以外は、実施例1と同様の条件により、回路接続材料を作製した。
<Example 7>
14 parts by mass of radical polymerizable resin (trade name: EB-600, manufactured by Daicel Cytec Co., Ltd.), ethoxylated o-phenylphenol acrylate (trade name: A-LEN-10, manufactured by Shin-Nakamura Chemical Co., Ltd.) A circuit connecting material was produced under the same conditions as in Example 1 except that the amount was 20 parts by mass.

<実施例8>
ラジカル重合性樹脂(商品名:EB−600、ダイセル・サイテック株式会社製)を9質量部、エトキシ化o−フェニルフェノールアクリレート(商品名:A−LEN−10、新中村化学工業株式会社製)を25質量部とした以外は、実施例1と同様の条件により、回路接続材料を作製した。
<Example 8>
9 parts by mass of radical polymerizable resin (trade name: EB-600, manufactured by Daicel Cytec Co., Ltd.), ethoxylated o-phenylphenol acrylate (trade name: A-LEN-10, manufactured by Shin-Nakamura Chemical Co., Ltd.) A circuit connection material was produced under the same conditions as in Example 1 except that the amount was 25 parts by mass.

<比較例1>
ラジカル重合性樹脂(商品名:EB−600、ダイセル・サイテック株式会社製)を34質量部含有させ、エトキシ化o−フェニルフェノールアクリレートを含有させない以外は、実施例1と同様の条件により、回路接続材料を作製した。
<Comparative Example 1>
Circuit connection under the same conditions as in Example 1 except that 34 parts by mass of a radically polymerizable resin (trade name: EB-600, manufactured by Daicel Cytec Co., Ltd.) is contained and no ethoxylated o-phenylphenol acrylate is contained. The material was made.

[導通抵抗値の測定]
実施例1〜8、比較例1で作製した接続構造体について、初期(Initial)の抵抗と、温度85℃、湿度85%RH、500時間のTHテスト(Thermal Humidity Test)後の抵抗を測定した。測定は、デジタルマルチメーター(デジタルマルチメーター7561、横河電機社製)を用いて4端子法にて電流1mAを流したときの接続抵抗を測定した。
[Measurement of conduction resistance]
For the connection structures manufactured in Examples 1 to 8 and Comparative Example 1, the initial resistance and the resistance after a TH test (Thermal Humidity Test) at a temperature of 85 ° C. and a humidity of 85% RH for 500 hours were measured. . The measurement was performed using a digital multimeter (digital multimeter 7561, manufactured by Yokogawa Electric Corporation) to measure the connection resistance when a current of 1 mA was passed by the four-terminal method.

[接着強度の測定]
実施例1〜8、比較例1の接続構造体について、引張試験機(テンシロン、オリエンテック社製)を用いて剥離速度50mm/分で90度(Y軸方向)に引き上げ、接着強度(N/cm)を測定した。
[Measurement of adhesive strength]
The connection structures of Examples 1 to 8 and Comparative Example 1 were pulled up to 90 degrees (Y-axis direction) at a peeling rate of 50 mm / min using a tensile tester (Tensilon, manufactured by Orientec Corp.), and the adhesive strength (N / cm).

実施例1〜8及び比較例1の条件、導通抵抗値及び接続強度の測定結果をまとめたものを[表1]に示す。   Table 1 summarizes the measurement results of the conditions, conduction resistance values, and connection strengths of Examples 1 to 8 and Comparative Example 1.

実施例1〜8の異方性導電フィルムは、エトキシ化o−フェニルフェノールアクリレートを含有することから、かさ高いビフェニル基と、(CHCH0)(n=1)と、ラジカル重合を行う−COCH=CHとからなる構造により、重合時に硬化収縮が小さくなり、また、硬化後の内部応力も小さくなったと考えられる。これにより、接続時に、接着層と基板の窒化珪素膜との界面において気泡が発生するのが抑制され、優れた密着力により、高い接着強度(接続信頼性)を得ることができたと考えられる。 Since the anisotropic conductive films of Examples 1 to 8 contain ethoxylated o-phenylphenol acrylate, bulky biphenyl groups, (CH 2 CH 2 0) n (n = 1), and radical polymerization. It is considered that the structure consisting of —COCH═CH 2 is reduced in curing shrinkage during polymerization, and also reduced in internal stress after curing. Thereby, it is considered that bubbles are suppressed from being generated at the interface between the adhesive layer and the silicon nitride film of the substrate at the time of connection, and high adhesive strength (connection reliability) can be obtained with excellent adhesion.

中でも、エトキシ化o−フェニルフェノールアクリレートを3〜20重量%含有させた実施例3〜7では、導通抵抗値及び接着強度において良好な値を得ることができた。   Among them, in Examples 3 to 7 containing 3 to 20% by weight of ethoxylated o-phenylphenol acrylate, good values in conduction resistance value and adhesive strength could be obtained.

一方、比較例1では、エトキシ化o−フェニルフェノールアクリレートを含有させないことから、重合時に硬化収縮が大きくなるとともに、硬化後の内部応力も大きくなり、これにより、接続時に、接着層と基板の窒化珪素膜との界面において気泡が発生し、結果として接着強度が低くなったと考えられる。   On the other hand, in Comparative Example 1, since no ethoxylated o-phenylphenol acrylate is contained, curing shrinkage during polymerization increases, and internal stress after curing also increases, thereby nitriding the adhesive layer and the substrate during connection. It is considered that bubbles were generated at the interface with the silicon film, resulting in a decrease in adhesive strength.

Claims (4)

(1)多官能(メタ)アクリレートモノマーと、
(2)熱又は光によって遊離ラジカルを発生するラジカル重合開始剤と、
(3)絶縁性の接着剤組成物中の配合量が3〜20質量%である、単官能(メタ)アクリレートモノマーと、
(4)金属被覆樹脂粒子とを含有し、
前記単官能(メタ)アクリレートモノマーは、化学式(1)で表され、
前記化学式(1)において、Rはビフェニル基又はナフタレン基であり、Rとそれに結合する酸素原子との結合位置はオルト位、メタ位、又はパラ位であり、nは1〜10である異方性導電フィルム。
(1) a polyfunctional (meth) acrylate monomer;
(2) a radical polymerization initiator that generates free radicals by heat or light;
(3) a monofunctional (meth) acrylate monomer whose blending amount in the insulating adhesive composition is 3 to 20% by mass;
(4) containing metal-coated resin particles,
The monofunctional (meth) acrylate monomer is represented by the chemical formula (1),
In the chemical formula (1), R is a biphenyl group or a naphthalene group, the bonding position of R and the oxygen atom bonded thereto is ortho, meta, or para, and n is 1 to 10 Conductive film.
前記単官能(メタ)アクリレートモノマーは、エトキシ化o−フェニルフェノールアクリレートである請求項1記載の異方性導電フィルム。   The anisotropic conductive film according to claim 1, wherein the monofunctional (meth) acrylate monomer is ethoxylated o-phenylphenol acrylate. 回路電極同士が対向するように配置された一対の回路部材の間に、異方性導電フィルムが介在されて、対峙する該回路部材が電気的且つ機械的に接続されてなる接続構造体において、
前記回路部材の一方は、表面が窒化珪素膜に覆われており、
前記異方性導電フィルムは、
(1)多官能(メタ)アクリレートモノマーと、
(2)熱又は光によって遊離ラジカルを発生するラジカル重合開始剤と、
(3)絶縁性の接着剤組成物中の配合量が3〜20質量%である、単官能(メタ)アクリレートモノマーと、
(4)金属被覆樹脂粒子とを含有し、
前記単官能(メタ)アクリレートモノマーは、下記化学式(1)で表され、
前記化学式(1)において、Rはビフェニル基又はナフタレン基であり、Rとそれに結合する酸素原子との結合位置はオルト位、メタ位、又はパラ位であり、nは1〜10である接続構造体。
In a connection structure in which an anisotropic conductive film is interposed between a pair of circuit members arranged so that circuit electrodes face each other, and the facing circuit members are electrically and mechanically connected.
One of the circuit members has a surface covered with a silicon nitride film,
The anisotropic conductive film is
(1) a polyfunctional (meth) acrylate monomer;
(2) a radical polymerization initiator that generates free radicals by heat or light;
(3) a monofunctional (meth) acrylate monomer whose blending amount in the insulating adhesive composition is 3 to 20% by mass;
(4) containing metal-coated resin particles,
The monofunctional (meth) acrylate monomer is represented by the following chemical formula (1):
In the chemical formula (1), R is a biphenyl group or a naphthalene group, the bonding position between R and an oxygen atom bonded thereto is an ortho position, a meta position, or a para position, and n is 1 to 10 body.
回路電極同士が対向するように配置された一対の回路部材の間に、異方性導電フィルムを介在させて、熱加圧により、対峙する該回路部材を電気的且つ機械的に接続させる接続方法において、
前記回路部材の一方は、表面が窒化珪素膜に覆われており、
前記異方性導電フィルムは、
(1)多官能(メタ)アクリレートモノマーと、
(2)熱又は光によって遊離ラジカルを発生するラジカル重合開始剤と、
(3)絶縁性の接着剤組成物中の配合量が3〜20質量%である、単官能(メタ)アクリレートモノマーと、
(4)金属被覆樹脂粒子とを含有し、
前記単官能(メタ)アクリレートモノマーは、下記化学式(1)で表され、
前記化学式(1)において、Rはビフェニル基又はナフタレン基であり、Rとそれに結合する酸素原子との結合位置はオルト位、メタ位、又はパラ位であり、nは1〜10である接続方法。
A connection method in which an anisotropic conductive film is interposed between a pair of circuit members arranged so that circuit electrodes are opposed to each other, and the facing circuit members are electrically and mechanically connected by heat and pressure. In
One of the circuit members has a surface covered with a silicon nitride film,
The anisotropic conductive film is
(1) a polyfunctional (meth) acrylate monomer;
(2) a radical polymerization initiator that generates free radicals by heat or light;
(3) a monofunctional (meth) acrylate monomer whose blending amount in the insulating adhesive composition is 3 to 20% by mass;
(4) containing metal-coated resin particles,
The monofunctional (meth) acrylate monomer is represented by the following chemical formula (1):
In the chemical formula (1), R is a biphenyl group or a naphthalene group, a bonding position between R and an oxygen atom bonded thereto is an ortho position, a meta position, or a para position, and n is 1 to 10 .
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KR20140064967A (en) 2014-05-28
WO2013042633A1 (en) 2013-03-28
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JP2012041541A (en) 2012-03-01
TW201336956A (en) 2013-09-16

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