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JP5850064B2 - Vibration measuring apparatus and vibration measuring method - Google Patents
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JP5850064B2 - Vibration measuring apparatus and vibration measuring method - Google Patents

Vibration measuring apparatus and vibration measuring method Download PDF

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JP5850064B2
JP5850064B2 JP2013555245A JP2013555245A JP5850064B2 JP 5850064 B2 JP5850064 B2 JP 5850064B2 JP 2013555245 A JP2013555245 A JP 2013555245A JP 2013555245 A JP2013555245 A JP 2013555245A JP 5850064 B2 JP5850064 B2 JP 5850064B2
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JPWO2013111687A1 (en
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哲博 前里
哲博 前里
勝 増井
勝 増井
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Meidensha Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H1/00Measuring characteristics of vibrations in solids by using direct conduction to the detector

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Description

本発明は、モータやエンジン、自動変速機等の振動を伴う製品の振動を計測する振動計測装置及び振動計測方法に関する。 The present invention relates to a vibration measuring apparatus and a vibration measuring method for measuring the vibration of a product accompanied by vibrations such as a motor, an engine, and an automatic transmission.

モータやエンジン、自動変速機等の振動を発する製品は、製造後、出荷前にその製品が発する振動を振動計測装置で計測し、製品に異常が無いことを確認した上で出荷される。 Products that emit vibrations, such as motors, engines, and automatic transmissions, are shipped after manufacturing and before the shipment, the vibrations generated by the products are measured with a vibration measuring device to confirm that the products are free of abnormalities.

従来、図4に示す振動計測装置が知られている。この振動計測装置101は、振動センサ102と、振動センサ102を先端に取り付けたセンサホルダ103と、センサホルダ103を介して振動センサ102を被測定物104の測定面(以下、測定面と称する)104aに接離させるエアシリンダ105と、を備えている。 Conventionally, a vibration measuring apparatus shown in FIG. 4 is known. This vibration measuring apparatus 101 includes a vibration sensor 102, a sensor holder 103 with the vibration sensor 102 attached to the tip, and the vibration sensor 102 via the sensor holder 103 as a measurement surface (hereinafter referred to as a measurement surface) of the object 104 to be measured. And an air cylinder 105 that contacts and separates from 104a.

図5に示すように、振動センサ102は、センサホルダ103下部のセンサ保持部106に収納されている。センサ保持部106の下面には開口107が形成されていて、開口107の周囲に係止爪108を有している。 As shown in FIG. 5, the vibration sensor 102 is housed in the sensor holding unit 106 below the sensor holder 103. An opening 107 is formed on the lower surface of the sensor holding portion 106, and a locking claw 108 is provided around the opening 107.

振動センサ102は、センサ本体102aの下面に上記開口107よりもやや小径の接触部102bを有し、上面にはウレタン等の弾性体109が接着されている。接触部102bは、センサ保持部106の開口107から少し突出しており、センサ本体102aと接触部102bの間の段部110が係止爪108によって遊動自在に保持されている。センサホルダ103内には圧縮バネ111によって付勢されたロッド112が収容されており、ロッド112の下端のヘッド部113が振動センサ102の上面に弾接している。 The vibration sensor 102 has a contact portion 102b having a slightly smaller diameter than the opening 107 on the lower surface of the sensor main body 102a, and an elastic body 109 such as urethane is bonded to the upper surface. The contact portion 102b slightly protrudes from the opening 107 of the sensor holding portion 106, and the stepped portion 110 between the sensor main body 102a and the contact portion 102b is held freely by the locking claw 108. A rod 112 urged by a compression spring 111 is accommodated in the sensor holder 103, and a head portion 113 at the lower end of the rod 112 is in elastic contact with the upper surface of the vibration sensor 102.

特開平8−201159号公報Japanese Patent Laid-Open No. 8-201159

ところで、上記従来の振動計測装置101は、振動センサ102をセンサ本体102aと接触部102bの間の段部110において係止爪108によって遊動自在に保持したので、振動センサ102の接触部102bの下面のセンシング面が被測定物104の測定面104aと平行でない場合でも、振動センサ102を測定面104aに押し当てると振動センサ102が傾き、振動センサ102のセンシング面と被測定物104の測定面104aとを密着させることができるという効果がある反面、次に述べるような課題があった。
(1)圧縮バネ111による拘束力が振動センサ102に作用し、振動の測定に悪影響を及ぼす。
(2)単一のエアシリンダ105で振動センサ102を上下動させて被測定物104の測定面104aに接離させているために、測定面104aに高低差の有る場合、例えば自動変速機試験装置において被測定物104として測定面104aの高さ位置の異なる自動変速機の振動を測定する場合に、高さの異なる測定面104aに振動センサ102を接離させるのが困難である。
By the way, in the conventional vibration measuring apparatus 101, the vibration sensor 102 is held freely by the locking claw 108 at the stepped portion 110 between the sensor main body 102a and the contact portion 102b, so that the lower surface of the contact portion 102b of the vibration sensor 102 is retained. Even if the sensing surface is not parallel to the measurement surface 104 a of the object 104 to be measured, the vibration sensor 102 is tilted when the vibration sensor 102 is pressed against the measurement surface 104 a, and the sensing surface of the vibration sensor 102 and the measurement surface 104 a of the object 104 to be measured are detected. However, there is a problem as described below.
(1) The restraining force by the compression spring 111 acts on the vibration sensor 102 and adversely affects vibration measurement.
(2) Since the vibration sensor 102 is moved up and down by the single air cylinder 105 and moved away from the measurement surface 104a of the object 104 to be measured, when there is a height difference in the measurement surface 104a, for example, an automatic transmission test When measuring vibrations of an automatic transmission having different height positions of the measurement surface 104a as the object 104 to be measured in the apparatus, it is difficult to bring the vibration sensor 102 into and out of contact with the measurement surface 104a having different heights.

本発明は上記従来の課題を解決し、圧縮バネ等による拘束力を排除して、より正確な振動の計測を可能にすると共に、測定面に高低差が有る場合でも容易に対応することのできる振動計測装置を提供することを目的に成されたものである。 The present invention solves the above-mentioned conventional problems, eliminates the restraining force due to a compression spring and the like, enables more accurate vibration measurement, and can easily cope with a case where there is a height difference on the measurement surface. The object is to provide a vibration measuring device.

請求項1の発明は、振動センサと、該振動センサを先端部に嵌合して上下動可能に取り付けたセンサホルダと、センサホルダを介して振動センサを被測定物の測定面に接離させるセンサ接離機構と、を備えた振動計測装置において、
上記振動センサは、上面側にフランジ状の突起および振動測定素子を設けた測定子板を備え、下面側に磁石を備え、
上記センサホルダは、下端側に上記振動センサの下端の磁石を突出させる開口と、嵌合した上記振動センサのフランジ状の突起の下面に係合する突起係合部を備え
上記振動センサのフランジ状の突起と上記センサホルダの突起係合部は、互いに嵌り合う位置決めピンとピン嵌合孔を備え、
上記位置決めピンは、振動計測時には上記ピン嵌合孔の下端部との接触が解除され、振動計測終了後、センサホルダ上昇時に、上記ピン嵌合孔の下端部と接触して上記振動センサを上記センサホルダの中心部に位置させる傾斜面を下端部に備えていることを特徴とする。
According to the first aspect of the present invention, a vibration sensor, a sensor holder fitted with the vibration sensor to a tip portion and attached so as to be movable up and down, and the vibration sensor are brought into contact with and separated from the measurement surface of the object to be measured via the sensor holder. In a vibration measuring device comprising a sensor contact / separation mechanism,
The vibration sensor includes a measuring element plate provided with a flange-like protrusion and a vibration measuring element on the upper surface side, and includes a magnet on the lower surface side.
The sensor holder includes an opening for projecting a magnet at the lower end of the vibration sensor on a lower end side, and a protrusion engaging portion that engages with a lower surface of the flange-shaped protrusion of the fitted vibration sensor ,
The flange-shaped protrusion of the vibration sensor and the protrusion engaging portion of the sensor holder include a positioning pin and a pin fitting hole that fit together,
The positioning pin is released from contact with the lower end portion of the pin fitting hole at the time of vibration measurement, and after the vibration measurement is finished, when the sensor holder is lifted, the positioning pin comes into contact with the lower end portion of the pin fitting hole so that the vibration sensor is The lower end part is provided with the inclined surface located in the center part of a sensor holder, It is characterized by the above-mentioned.

請求項2の発明は、請求項1に記載の振動計測装置において、上記センサホルダは、複数に分割されていて、上端部が連結部で連結されていることを特徴とする。 According to a second aspect of the present invention, in the vibration measuring apparatus according to the first aspect, the sensor holder is divided into a plurality of parts, and upper ends thereof are connected by a connecting part.

請求項の発明は、請求項1または2に記載の振動計測装置において、上記センサ接離機構は、上記振動センサを待機位置から第1の測定位置に移動させる第1の昇降操作用エアシリンダと、上記振動センサを上記第1の測定位置からこれよりも低位の第2の測定位置に移動させる第2の昇降操作用エアシリンダと、を備えていることを特徴とする。 According to a third aspect of the present invention, in the vibration measuring apparatus according to the first or second aspect , the sensor contacting / separating mechanism is configured to move the vibration sensor from a standby position to a first measurement position. And a second lifting / lowering air cylinder for moving the vibration sensor from the first measurement position to a second measurement position lower than the first measurement position.

請求項の発明は、請求項に記載の振動計測装置において、上記第2の昇降操作用エアシリンダは、上記第1の昇降操作用エアシリンダで上記振動センサを上記第1の測定位置に移動させた後に、上記第2の昇降操作用エアシリンダで上記第1の昇降操作用エアシリンダと共に上記振動センサを上記第2の測定位置に移動させることを特徴とする。 According to a fourth aspect of the present invention, in the vibration measuring apparatus according to the third aspect , the second elevating operation air cylinder is the first elevating operation air cylinder, and the vibration sensor is set to the first measurement position. After the movement, the vibration sensor is moved to the second measuring position together with the first lifting operation air cylinder by the second lifting operation air cylinder.

請求項の発明は、振動センサと、該振動センサを先端部に嵌合して上下動可能に取り付けたセンサホルダと、センサホルダを介して振動センサを被測定物の測定面に接離させるセンサ接離機構と、を備え、
上記振動センサは、上面側にフランジ状の突起および振動測定素子を設けた測定子板を備え、下面側に磁石を備え、
上記センサホルダは、下端側に上記振動センサの下端の磁石を突出させる開口と、上記振動センサのフランジ状の突起の下面に係合する突起係合部を備え 上記振動センサのフランジ状の突起と上記センサホルダの突起係合部は、互いに嵌り合う位置決めピンとピン嵌合孔を備え、
上記位置決めピンは、振動計測時には上記ピン嵌合孔の下端部との接触が解除され、振動計測終了後、センサホルダ上昇時に、上記ピン嵌合孔の下端部と接触して上記振動センサを上記センサホルダの中心部に位置させる傾斜面を下端部に備えた振動計測装置を使用して被測定物の測定面の振動を測定する振動測定方法であって、
上記振動センサに設けたフランジ状の突起がセンサホルダに設けた突起係合部に係合して、振動センサがセンサホルダから抜け落ちるのを防止し、センサ接離機構でセンサホルダを被測定物の測定面に向けて移動させて、先ず上記磁石を測定面に吸着させて振動センサを測定面に取り付け、更にセンサ接離機構でセンサホルダを測定面側に移動させて、センサホルダのみを下降させて、振動センサに設けたフランジ状の突起とセンサホルダに設けた突起係合部を非係合状態にして振動の測定を行なうことを特徴とする。
According to a fifth aspect of the present invention, there is provided a vibration sensor, a sensor holder that is fitted to the tip portion so as to be movable up and down, and the vibration sensor is brought into contact with and separated from the measurement surface of the object to be measured via the sensor holder A sensor contact / separation mechanism,
The vibration sensor includes a measuring element plate provided with a flange-like protrusion and a vibration measuring element on the upper surface side, and includes a magnet on the lower surface side.
The sensor holder includes an opening for projecting a magnet at a lower end of the vibration sensor on a lower end side, and a protrusion engaging portion that engages with a lower surface of the flange-shaped protrusion of the vibration sensor, and a flange-shaped protrusion of the vibration sensor; The protrusion engaging portion of the sensor holder includes a positioning pin and a pin fitting hole that fit together,
The positioning pin is released from contact with the lower end portion of the pin fitting hole at the time of vibration measurement, and after the vibration measurement is finished, when the sensor holder is lifted, the positioning pin comes into contact with the lower end portion of the pin fitting hole so that the vibration sensor is A vibration measurement method for measuring the vibration of a measurement surface of an object to be measured using a vibration measurement device having an inclined surface positioned at the lower end of the sensor holder ,
The flange-shaped protrusion provided on the vibration sensor engages with the protrusion engaging portion provided on the sensor holder to prevent the vibration sensor from coming off the sensor holder, and the sensor holder is used to attach the sensor holder to the object to be measured. Move toward the measurement surface, first attach the magnet to the measurement surface and attach the vibration sensor to the measurement surface, then move the sensor holder to the measurement surface side with the sensor contact / separation mechanism and lower only the sensor holder. Thus, the vibration is measured by disengaging the flange-shaped protrusion provided on the vibration sensor and the protrusion engaging portion provided on the sensor holder.

(1)請求項1の発明によれば、振動センサは、センサホルダ内に軸方向に移動可能に収容されていて、振動センサに設けたフランジ状の突起がセンサホルダに設けた突起係合部に係合して、振動センサがセンサホルダから抜け落ちるのが防止される。そして、センサ接離機構でセンサホルダを被測定物の測定面に向けて移動させると、先ず磁石が測定面に吸着されて振動センサが測定面に取り付けられた状態になる。更にセンサ接離機構でセンサホルダを測定側に移動させると、センサホルダのみが下降し、振動センサに設けたフランジ状の突起と、センサホルダに設けた突起係合部が非係合(非接触)になり、振動センサは、センサホルダからの拘束を解かれた状態での振動の測定が可能になる。
また、振動計測時には上記ピン嵌合孔の下端部との接触が解除され、センサホルダの拘束を解かれた状態で振動計測が可能になり、終了後、センサホルダ上昇時に、位置決めピンの下端部に設けた傾斜面が上記ピン嵌合孔の下端部と接触して、上記振動センサを上記センサホルダの中心部に戻すので、振動計測時において発生した振動センサの位置ずれを補正して、次の振動計測に備えることができる。
(1) According to the invention of claim 1, the vibration sensor is accommodated in the sensor holder so as to be movable in the axial direction, and the flange-like protrusion provided on the vibration sensor is provided on the sensor holder. And the vibration sensor is prevented from falling off the sensor holder. When the sensor holder is moved toward the measurement surface of the object to be measured by the sensor contact / separation mechanism, the magnet is first attracted to the measurement surface and the vibration sensor is attached to the measurement surface. When the sensor holder is further moved to the measurement side by the sensor contact / separation mechanism, only the sensor holder is lowered, and the flange-like protrusion provided on the vibration sensor and the protrusion engaging portion provided on the sensor holder are not engaged (non-contact). Thus, the vibration sensor can measure vibration in a state where the restraint from the sensor holder is released.
Also, during vibration measurement, contact with the lower end of the pin fitting hole is released, and vibration measurement can be performed with the sensor holder being unconstrained. Since the inclined surface provided in the contact with the lower end portion of the pin fitting hole returns the vibration sensor to the center portion of the sensor holder, the positional deviation of the vibration sensor generated at the time of vibration measurement is corrected. Can be prepared for vibration measurement.

(2)請求項2の発明によれば、上記センサホルダを複数に分割したので、振動センサを中心にして、その外周に分割したセンサホルダを配置して、これら分割したセンサホルダの上端部を連結部で連結することにより、センサホルダ内への振動センサの組付けを容易に行うことができる。 (2) According to the invention of claim 2, since the sensor holder is divided into a plurality of parts, the sensor holder divided on the outer periphery is arranged around the vibration sensor, and the upper ends of the divided sensor holders are arranged. By connecting at the connecting portion, the vibration sensor can be easily assembled into the sensor holder.

)請求項の発明によれば、被測定物の機種等により測定面に高低差が有る場合でも、対応することが可能になる。 ( 3 ) According to the invention of claim 3 , even if there is a difference in height on the measurement surface depending on the model of the object to be measured, it is possible to cope with it.

)請求項の発明によれば、第1の昇降操作用エアシリンダで上記振動センサを第1の測定位置に移動させた後に、第2の昇降操作用エアシリンダで第1の昇降操作用エアシリンダと共に振動センサを上記第2の測定位置に移動させるので、単一の昇降操作用エアシリンダで、振動センサを上記第2の測定位置に移動させる場合に較べて、シリンダロッドのストローク量の少ないエアシリンダを使用して、振動センサを上記第2の測定位置に移動させることができる。 ( 4 ) According to the invention of claim 4 , after the vibration sensor is moved to the first measurement position by the first lifting / lowering operation air cylinder, the second lifting / lowering operation air cylinder performs the first lifting / lowering operation. Since the vibration sensor is moved to the second measurement position together with the air cylinder for the cylinder, the stroke amount of the cylinder rod is compared with the case where the vibration sensor is moved to the second measurement position with a single lifting / lowering air cylinder. The vibration sensor can be moved to the second measurement position by using an air cylinder having a small amount.

)請求項の発明によれば、振動センサをセンサホルダの拘束から解除して振動の測定を行なうので、より正確な振動の測定が可能になる。 ( 5 ) According to the invention of claim 5 , since the vibration is measured by releasing the vibration sensor from the restraint of the sensor holder, the vibration can be measured more accurately.

振動計測装置の正面図。The front view of a vibration measuring device. 振動計測装置の側面図。The side view of a vibration measuring device. 図3Aは振動センサ及びセンサホルダ部分の断面図、図3Bは側面図、図3Cは図3AのC−C断面図。3A is a cross-sectional view of a vibration sensor and a sensor holder portion, FIG. 3B is a side view, and FIG. 3C is a cross-sectional view taken along the line CC of FIG. 3A. 従来例の振動計測装置の説明図。Explanatory drawing of the vibration measuring device of a prior art example. 従来例の振動計測装置の振動センサ及びセンサホルダ部分の断面図。Sectional drawing of the vibration sensor and sensor holder part of the vibration measuring device of a prior art example.

以下、本発明の実施例を図1〜図3を参照して説明する。図1及び図2に示すように、振動計測装置1は、振動センサ2と、該振動センサ2を先端に取り付けたセンサホルダ3と、センサホルダ3を介して振動センサ2を被測定物の測定面104aに接離させるセンサ接離機構4と、を備えている。 Embodiments of the present invention will be described below with reference to FIGS. As shown in FIGS. 1 and 2, the vibration measuring apparatus 1 includes a vibration sensor 2, a sensor holder 3 having the vibration sensor 2 attached to the tip, and the vibration sensor 2 for measuring an object to be measured via the sensor holder 3. And a sensor contact / separation mechanism 4 that contacts and separates from the surface 104a.

図3Aに示すように、振動センサ2は、上部にフランジ状の突起5を備えたセンサ本体部6と、センサ本体部6の上面側に取り付けられていて複数の振動測定素子7およびコネクタ8を有する測定子板9と、センサ本体部6の下面側に取り付けられた磁石10を備えている。8aは、コネクタ8に接続されたハーネスである。 As shown in FIG. 3A, the vibration sensor 2 includes a sensor main body 6 having a flange-like protrusion 5 on the top, and a plurality of vibration measuring elements 7 and connectors 8 attached to the upper surface side of the sensor main body 6. And a magnet 10 attached to the lower surface side of the sensor main body 6. Reference numeral 8 a denotes a harness connected to the connector 8.

上記磁石10は、センサ本体部6の下面に設けた凹部に嵌合した状態で取り付けられていて、磁石10の下端はセンサ本体部6の下面から僅かに突出している。 The magnet 10 is attached in a state of being fitted into a recess provided on the lower surface of the sensor main body 6, and the lower end of the magnet 10 slightly protrudes from the lower surface of the sensor main body 6.

フランジ状の突起5は、後記するセンサホルダ3の突起係合部16上に重なり合ってセンサホルダ3からの脱落を阻止する。フランジ状の突起5には、上記突起係合部16上に設けた位置決めピン18が挿入されるピン嵌合孔11が形成されている。 The flange-shaped protrusion 5 overlaps with a protrusion engaging portion 16 of the sensor holder 3 to be described later and prevents the sensor holder 3 from falling off. The flange-like projection 5 is formed with a pin fitting hole 11 into which a positioning pin 18 provided on the projection engaging portion 16 is inserted.

センサホルダ3は、上述したように振動センサ2のフランジ状の突起5が係合して振動センサ2の抜け落ちを防止した状態で振動センサ2を上下動可能に支持するものであり、左右一対のホルダ本体部12,13と、これら左右一対のホルダ本体部12,13の上端部をネジ結合した連結部14と、で構成されている。 As described above, the sensor holder 3 supports the vibration sensor 2 so that the vibration sensor 2 can move up and down in a state where the flange-shaped protrusion 5 of the vibration sensor 2 is engaged to prevent the vibration sensor 2 from falling off. The holder main body portions 12 and 13 and a connecting portion 14 in which the upper ends of the pair of left and right holder main body portions 12 and 13 are screwed together are configured.

左右一対のホルダ本体部12,13は、内周面に凹溝15を有し、該凹溝15の下部に上記振動センサ2のフランジ状の突起5が重なり合う突起係合部16が形成されている。左右一対のホルダ本体部12,13の突起係合部16間には、振動センサ2のセンサ本体部6の下端部を突出させる開口17が形成されている。 The pair of left and right holder main body portions 12 and 13 has a concave groove 15 on the inner peripheral surface, and a protrusion engaging portion 16 is formed below the concave groove 15 so that the flange-shaped protrusion 5 of the vibration sensor 2 overlaps. Yes. An opening 17 is formed between the protrusion engaging portions 16 of the pair of left and right holder main body portions 12 and 13 for projecting the lower end portion of the sensor main body portion 6 of the vibration sensor 2.

突起係合部16には、振動センサ2のフランジ状の突起5を重ね合わせたときに、該フランジ状の突起5に設けたピン嵌合孔11に嵌合する位置決めピン18が設けられている。位置決めピン18は、ピン嵌合孔11への挿入を容易にするために、先端に行くに従って小径となるように形成されているとともに、下端部には、略円錐形の傾斜面18aが設けられている。 The protrusion engaging portion 16 is provided with a positioning pin 18 that fits into the pin fitting hole 11 provided in the flange-shaped protrusion 5 when the flange-shaped protrusion 5 of the vibration sensor 2 is overlapped. . In order to facilitate insertion into the pin fitting hole 11, the positioning pin 18 is formed to have a smaller diameter toward the tip, and a substantially conical inclined surface 18a is provided at the lower end. ing.

上記傾斜面18aは、図3Aに示すように、振動計測時には、ピン嵌合孔11の下端部との係合が解除され、センサホルダ3からの拘束を解かれた状態で振動の計測が可能になる。また、振動計測終了後、センサホルダ3を上昇させる際に、上記傾斜面18aがピン嵌合孔11の下端部と接触して,振動センサ2をセンサホルダ3の中心部に戻して、振動計測時において生じる振動センサ2の位置ずれを補正して、次の振動計測に備えることができる。 As shown in FIG. 3A, the inclined surface 18a is capable of measuring vibration in a state where the engagement with the lower end portion of the pin fitting hole 11 is released and the restraint from the sensor holder 3 is released during vibration measurement. become. Further, when the sensor holder 3 is raised after the vibration measurement is finished, the inclined surface 18a comes into contact with the lower end portion of the pin fitting hole 11, and the vibration sensor 2 is returned to the center portion of the sensor holder 3 to measure the vibration. It is possible to prepare for the next vibration measurement by correcting the positional deviation of the vibration sensor 2 that occurs at the time.

上記振動センサ2のセンサホルダ3への組み付けは、例えば以下のようにして行なわれる。先ず、センサ本体部6に測定子板9と磁石10を取り付けて振動センサ2を構成する。次に、振動センサ2のフランジ状の突起5に設けたピン嵌合孔11に、該ピン嵌合孔11の下方から位置決めピン18を挿入して、振動センサ2の対向位置に左右一対のホルダ本体部12,13を組み付けた状態にする。しかる後に、左右一対のホルダ本体部12,13の上端側を連結部14で連結することにより、振動センサ2は、センサホルダ3へ組み付けられる。 The vibration sensor 2 is assembled to the sensor holder 3 as follows, for example. First, the vibration sensor 2 is configured by attaching the measuring base plate 9 and the magnet 10 to the sensor body 6. Next, a positioning pin 18 is inserted into the pin fitting hole 11 provided in the flange-shaped protrusion 5 of the vibration sensor 2 from below the pin fitting hole 11, and a pair of left and right holders are placed at positions opposed to the vibration sensor 2. The main body parts 12 and 13 are assembled. Thereafter, the vibration sensor 2 is assembled to the sensor holder 3 by connecting the upper end sides of the pair of left and right holder main body portions 12 and 13 with the connecting portion 14.

次に、センサ接離機構4について説明する。図2に示すように、センサ接離機構4は、振動センサ2を被測定物の測定面104aの真上に移動させる水平方向移動操作用エアシリンダ21と、上記測定面104aの真上の待機位置(以下、待機高さと称する)に在る振動センサ2を待機高さから第1の測定位置(以下、第1の測定高さAと称する)又は第1の測定高さよりも低位の第2の測定位置(以下、第2の測定高さBと称する)に移動させる第1,第2の昇降操作用エアシリンダ22,23(以下、第1の昇降操作用エアシリンダ22をXストロークシリンダ、第2の昇降操作用エアシリンダ23をYストロークシリンダと称する)を備えている。上記水平方向移動操作用エアシリンダ21,Xストロークシリンダ22,Yストロークシリンダ23は、スピードコントローラを備えている。 Next, the sensor contact / separation mechanism 4 will be described. As shown in FIG. 2, the sensor contact / separation mechanism 4 includes a horizontal movement operation air cylinder 21 that moves the vibration sensor 2 directly above the measurement surface 104a of the object to be measured, and a standby right above the measurement surface 104a. The vibration sensor 2 located at a position (hereinafter referred to as standby height) is moved from the standby height to a first measurement position (hereinafter referred to as first measurement height A) or a second lower than the first measurement height. The first and second lifting and lowering operation air cylinders 22 and 23 (hereinafter referred to as the first lifting and lowering operation air cylinder 22 are referred to as X stroke cylinders, hereinafter) moved to the measurement position (hereinafter referred to as the second measurement height B). The second lifting / lowering air cylinder 23 is referred to as a Y stroke cylinder). The horizontal direction moving operation air cylinder 21, the X stroke cylinder 22, and the Y stroke cylinder 23 are provided with a speed controller.

図1に示すように、上記水平方向移動用エアシリンダ21は、第1ブラケット24を介して固定面25に取り付けられている。 As shown in FIG. 1, the horizontal moving air cylinder 21 is attached to a fixed surface 25 via a first bracket 24.

図2に示すように、Xストロークシリンダ22は、第2ブラケット26に取り付けられている。第2ブラケット26は、レール部27を介して水平方向移動用エアシリンダ21側に取り付けられていて、該水平方向移動用エアシリンダ21によりレール部27に沿って水平方向に移動するとともに、Yストロークシリンダ23を上下動させる。 As shown in FIG. 2, the X stroke cylinder 22 is attached to the second bracket 26. The second bracket 26 is attached to the horizontal moving air cylinder 21 side via the rail portion 27, and is moved in the horizontal direction along the rail portion 27 by the horizontal moving air cylinder 21. The cylinder 23 is moved up and down.

Yストロークシリンダ23は、第3ブラケット28に取り付けられている。第3ブラケット28は、Xストロークシリンダ22のロッド22aの下端に取り付けられていて、該ロッド22aの動きに追従する。 The Y stroke cylinder 23 is attached to the third bracket 28. The third bracket 28 is attached to the lower end of the rod 22a of the X stroke cylinder 22 and follows the movement of the rod 22a.

Yストロークシリンダ23のロッド23aの下部には上下動板29が取り付けられていると共に、更にその下部のロッド23aの先端には上記センサホルダ3と振動センサ2が取り付けられている。上記第3ブラケット28には、ハイドロスピードコントローラ(以下、ハイドロスピコンと称する)30が取り付けられている。また、上記上下動板29には、ハイドロスピコン30を操作するスコピンドグ31が設けられている。 A vertical moving plate 29 is attached to the lower portion of the rod 23a of the Y stroke cylinder 23, and the sensor holder 3 and the vibration sensor 2 are attached to the tip of the rod 23a below the rod 23a. A hydro speed controller (hereinafter referred to as a hydro speed controller) 30 is attached to the third bracket 28. Further, the vertical moving plate 29 is provided with a scoping dog 31 for operating the hydro-speakon 30.

図2に示すように、Yストロークシリンダ23のストローク量Yは、待機位置から第1の測定高さAまでの距離に相当する長さになっているとともに、Xストロークシリンダ22のストローク量Xは、第1の測定高さAから第2の測定高さBまでの距離に相当する長さになっている。 As shown in FIG. 2, the stroke amount Y of the Y stroke cylinder 23 has a length corresponding to the distance from the standby position to the first measurement height A, and the stroke amount X of the X stroke cylinder 22 is The length corresponds to the distance from the first measurement height A to the second measurement height B.

次に、振動計測装置1の作用について説明する。振動計測前において振動センサ2は、待機位置にセットされている。そして、振動を計測する際には、先ず水平方向移動用エアシリンダ21で振動センサ2を測定面104aの真上に位置させる。 Next, the operation of the vibration measuring device 1 will be described. Before the vibration measurement, the vibration sensor 2 is set at the standby position. When measuring vibration, first, the vibration sensor 2 is positioned directly above the measurement surface 104a by the horizontal moving air cylinder 21.

次に、測定面104aが第1の測定高さAの場合には、Yストロークシリンダ23を使用して、振動センサ2を第1の測定高さAに移動させる。
振動センサ2が待機高さから第1の測定高Aさに移動する過程においては、先ず、磁石10が被測定物の測定面104aに吸着固定される。更に、Yストロークシリンダ23のロッド23aが下降すると、上記磁石10により被測定物104の測定面104aに吸着固定された振動センサ2に対して、センサホルダ3のみが下降して、振動センサ2のフランジ状の突起5と、センサホルダ3の突起係合部16が非接触状態になると共に、位置決めピン18の略円錐形の傾斜面18aとピン嵌合孔11が非接触状態となり、振動センサ2は、センサホルダ3からの拘束を解かれた状態で振動の計測が可能になる。
Next, when the measurement surface 104 a has the first measurement height A, the vibration sensor 2 is moved to the first measurement height A using the Y stroke cylinder 23.
In the process in which the vibration sensor 2 moves from the standby height to the first measurement height A, first, the magnet 10 is attracted and fixed to the measurement surface 104a of the object to be measured. Further, when the rod 23a of the Y stroke cylinder 23 is lowered, only the sensor holder 3 is lowered with respect to the vibration sensor 2 attracted and fixed to the measurement surface 104a of the object 104 to be measured by the magnet 10, and the vibration sensor 2 The flange-shaped protrusion 5 and the protrusion engaging portion 16 of the sensor holder 3 are brought into a non-contact state, and the substantially conical inclined surface 18a of the positioning pin 18 and the pin fitting hole 11 are brought into a non-contact state. The vibration can be measured in a state where the restraint from the sensor holder 3 is released.

また、測定面104aが第2の測定高さBの場合には、更にXストロークシリンダ22を使用して、振動センサ2を第2の測定高さBに移動させる。 When the measurement surface 104a is the second measurement height B, the vibration sensor 2 is further moved to the second measurement height B using the X stroke cylinder 22.

この場合も、上記振動センサ2を待機高さから第1の測定高さAに移動させる場合と同様に、振動センサ2が第1の測定高さAから第2の測定高さBに移動する過程においては、先ず、磁石10が被測定物の測定面104aに吸着固定され、更にXストロークシリンダ22のロッド22aが下降すると、上記磁石10により被測定物104の測定面104aに吸着固定された振動センサ2に対して、センサホルダ3のみが下降して、振動センサ2のフランジ状の突起5と、センサホルダ3の突起係合部16が非接触状態になり、振動センサ2は、センサホルダ3からの拘束を解かれた状態で振動の計測が可能になる。そして、振動計測終了後センサホルダ3を待機位置に上昇させる際に、上記傾斜面18aがピン嵌合孔11の下端部と接触して,振動センサ2をセンサホルダ3の中心部に戻して、振動計測時において生じる振動センサ2の位置ずれを補正して、次回の振動計測に備える。なお、実施例では、位置決めピン18の下端部に、傾斜面18aを設けた場合を示したが、ピン嵌合孔11の下端部を傾斜面にして実施例と同様の効果を得てもよい。 Also in this case, the vibration sensor 2 moves from the first measurement height A to the second measurement height B in the same manner as when the vibration sensor 2 is moved from the standby height to the first measurement height A. In the process, first, the magnet 10 is attracted and fixed to the measurement surface 104a of the object to be measured, and when the rod 22a of the X stroke cylinder 22 is further lowered, the magnet 10 is attracted and fixed to the measurement surface 104a of the object 104 to be measured. Only the sensor holder 3 is lowered with respect to the vibration sensor 2, and the flange-like protrusion 5 of the vibration sensor 2 and the protrusion engaging portion 16 of the sensor holder 3 are brought into a non-contact state. Vibration can be measured in a state where the constraint from 3 is released. When the sensor holder 3 is raised to the standby position after the vibration measurement is finished, the inclined surface 18a comes into contact with the lower end portion of the pin fitting hole 11, and the vibration sensor 2 is returned to the center portion of the sensor holder 3. The positional deviation of the vibration sensor 2 that occurs during vibration measurement is corrected to prepare for the next vibration measurement. In addition, although the case where the inclined surface 18a was provided in the lower end part of the positioning pin 18 was shown in the Example, you may acquire the effect similar to an Example by making the lower end part of the pin fitting hole 11 into an inclined surface. .

1…振動計測装置
2…振動センサ
3…センサホルダ
4…センサ接離装置
5…フランジ状の突起
6…センサ本体部
7…振動測定素子
8…コネクタ
8a…コネクタに接続されたハーネス
9…測定子板
10…磁石
11…ピン嵌合孔
12,13…一対のホルダ本体部
14…連結部
15…凹溝
16…突起係合部
17…開口
18…位置決めピン
21…水平方向移動操作用エアシリンダ
22…第1の昇降操作用エアシリンダ(Xストロークエアシリンダ)
23…第2の昇降操作用エアシリンダ(Yストロークエアシリンダ)
DESCRIPTION OF SYMBOLS 1 ... Vibration measuring device 2 ... Vibration sensor 3 ... Sensor holder 4 ... Sensor contact-and-separation device 5 ... Flange-shaped protrusion 6 ... Sensor main-body part 7 ... Vibration measuring element 8 ... Connector 8a ... Harness connected to the connector 9 ... Measuring element Plate 10 ... Magnet 11 ... Pin fitting hole 12, 13 ... A pair of holder main body parts 14 ... Connection part 15 ... Groove 16 ... Projection engagement part 17 ... Opening 18 ... Positioning pin 21 ... Air cylinder for horizontal movement operation 22 ... First air cylinder for lifting operation (X stroke air cylinder)
23 ... Second air cylinder for lifting operation (Y stroke air cylinder)

Claims (5)

振動センサと、該振動センサを先端部に嵌合して上下動可能に取り付けたセンサホルダと、センサホルダを介して振動センサを被測定物の測定面に接離させるセンサ接離機構と、を備え、
上記振動センサは、上面側にフランジ状の突起および振動測定素子を設けた測定子板を備え、下面側に磁石を備え、
上記センサホルダは、下端側に上記振動センサの下端の磁石を突出させる開口と、上記振動センサのフランジ状の突起の下面に係合する突起係合部を備え
上記振動センサのフランジ状の突起と上記センサホルダの突起係合部は、互いに嵌り合う位置決めピンとピン嵌合孔を備え、
上記位置決めピンは、振動計測時には上記ピン嵌合孔の下端部との接触が解除され、振動計測終了後、センサホルダ上昇時に、上記ピン嵌合孔の下端部と接触して上記振動センサを上記センサホルダの中心部に位置させる傾斜面を下端部に備えていることを特徴とする振動計測装置。
A vibration sensor; a sensor holder that is fitted to the tip of the vibration sensor so as to be movable up and down; and a sensor contact / separation mechanism that causes the vibration sensor to contact and separate from the measurement surface of the object to be measured via the sensor holder. Prepared,
The vibration sensor includes a measuring element plate provided with a flange-like protrusion and a vibration measuring element on the upper surface side, and includes a magnet on the lower surface side.
The sensor holder includes an opening for projecting a magnet at the lower end of the vibration sensor on a lower end side, and a protrusion engaging portion that engages with a lower surface of the flange-shaped protrusion of the vibration sensor ,
The flange-shaped protrusion of the vibration sensor and the protrusion engaging portion of the sensor holder include a positioning pin and a pin fitting hole that fit together,
The positioning pin is released from contact with the lower end portion of the pin fitting hole at the time of vibration measurement, and after the vibration measurement is finished, when the sensor holder is lifted, the positioning pin comes into contact with the lower end portion of the pin fitting hole so that the vibration sensor is A vibration measuring device comprising an inclined surface positioned at the center of the sensor holder at the lower end .
上記センサホルダは、複数に分割されていて、上端部が連結部で連結されていることを特徴とする請求項1に記載の振動計測装置。   The vibration measuring apparatus according to claim 1, wherein the sensor holder is divided into a plurality of parts, and upper ends thereof are connected by a connecting part. 上記センサ接離機構は、上記振動センサを待機位置から第1の測定位置に移動させる第1の昇降操作用エアシリンダと、上記振動センサを上記第1の測定位置よりも低位の第2の測定位置に移動させる第2の昇降操作用エアシリンダと、を備えていることを特徴とする請求項1または2に記載の振動計測装置。 The sensor contacting / separating mechanism includes a first lifting / lowering operation air cylinder that moves the vibration sensor from a standby position to a first measurement position, and a second measurement that is lower than the first measurement position. vibration measuring apparatus according to claim 1 or 2, and a second lifting operating air cylinder for moving to the position, characterized in that it comprises a. 上記第2の昇降操作用エアシリンダは、上記第1の昇降操作用エアシリンダで上記振動センサを上記第1の測定位置に移動させた後に、上記第1の昇降操作用エアシリンダと共に上記振動センサを上記第2の測定位置に移動させることを特徴とする請求項に記載の振動計測装置。 The second elevating operation air cylinder moves the vibration sensor to the first measurement position with the first elevating operation air cylinder, and then moves the vibration sensor together with the first elevating operation air cylinder. The vibration measuring apparatus according to claim 3 , wherein the vibration measuring apparatus is moved to the second measurement position. 振動センサと、該振動センサを先端部に嵌合して上下動可能に取り付けたセンサホルダと、センサホルダを介して振動センサを被測定物の測定面に接離させるセンサ接離機構と、を備え、
上記振動センサは、上面側にフランジ状の突起および振動測定素子を設けた測定子板を備え、下面側に磁石を備え、
上記センサホルダは、下端側に上記振動センサの下端の磁石を突出させる開口と、上記振動センサのフランジ状の突起の下面に係合する突起係合部を備え
上記振動センサのフランジ状の突起と上記センサホルダの突起係合部は、互いに嵌り合う位置決めピンとピン嵌合孔を備え、
上記位置決めピンは、振動計測時には上記ピン嵌合孔の下端部との接触が解除され、振動計測終了後、センサホルダ上昇時に、上記ピン嵌合孔の下端部と接触して上記振動センサを上記センサホルダの中心部に位置させる傾斜面を下端部に備えた振動計測装置を使用して被測定物の測定面の振動を測定する振動測定方法であって、
上記振動センサに設けたフランジ状の突起がセンサホルダに設けた突起係合部に係合して、振動センサがセンサホルダから抜け落ちるのを防止し、センサ接離機構でセンサホルダを被測定物の測定面に向けて移動させて、先ず上記磁石を測定面に吸着させて振動センサを測定面に取り付け、更にセンサ接離機構でセンサホルダを測定面側に移動させて、センサホルダのみを下降させて、振動センサに設けたフランジ状の突起とセンサホルダに設けた突起係合部を非係合状態にして振動の測定を行なうことを特徴とする振動計測方法。
A vibration sensor; a sensor holder that is fitted to the tip of the vibration sensor so as to be movable up and down; and a sensor contact / separation mechanism that causes the vibration sensor to contact and separate from the measurement surface of the object to be measured via the sensor holder. Prepared,
The vibration sensor includes a measuring element plate provided with a flange-like protrusion and a vibration measuring element on the upper surface side, and includes a magnet on the lower surface side.
The sensor holder includes an opening for projecting a magnet at the lower end of the vibration sensor on a lower end side, and a protrusion engaging portion that engages with a lower surface of the flange-shaped protrusion of the vibration sensor ,
The flange-shaped protrusion of the vibration sensor and the protrusion engaging portion of the sensor holder include a positioning pin and a pin fitting hole that fit together,
The positioning pin is released from contact with the lower end portion of the pin fitting hole at the time of vibration measurement, and after the vibration measurement is finished, when the sensor holder is lifted, the positioning pin comes into contact with the lower end portion of the pin fitting hole so that the vibration sensor is A vibration measurement method for measuring the vibration of a measurement surface of an object to be measured using a vibration measurement device having an inclined surface positioned at the lower end of the sensor holder ,
The flange-shaped protrusion provided on the vibration sensor engages with the protrusion engaging portion provided on the sensor holder to prevent the vibration sensor from coming off the sensor holder, and the sensor holder is used to attach the sensor holder to the object to be measured. Move toward the measurement surface, first attach the magnet to the measurement surface and attach the vibration sensor to the measurement surface, then move the sensor holder to the measurement surface side with the sensor contact / separation mechanism and lower only the sensor holder. A vibration measuring method comprising: measuring a vibration by disengaging a flange-like protrusion provided on the vibration sensor and a protrusion engaging portion provided on the sensor holder.
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