JP5853538B2 - Work rotation conveyor - Google Patents

Description

  The present invention relates to a workpiece rotating / conveying apparatus capable of changing a direction by conveying and rotating a workpiece.

  2. Description of the Related Art Conventionally, various types of devices are known as devices capable of changing a conveyance direction on a conveyance line while conveying a workpiece.

  For example, as in Patent Document 1, there is a type in which a large number of electrostatic actuators are arranged in a lattice shape on a work conveyance surface. This is because a large number of hook-shaped stators are provided on the conveying surface, the conveying elements are suspended through spring members, and the conveying electrodes are operated by operating suction electrodes provided on the bottom and side surfaces in the stator. By controlling the operation of the child, the work on the carrier is moved or rotated.

  Further, in Patent Document 2, a large number of small rollers are arranged on the workpiece conveyance surface so that the rotation axis is parallel to the conveyance surface, and the rotation and direction of these rollers are controlled, so that the workpiece placed on them is controlled. A technique for controlling the transport direction is disclosed.

  Further, Patent Document 3 discloses a configuration in which rollers having rotation axes orthogonal to each other are alternately arranged on the conveyance surface, and the direction of workpiece conveyance and rotation is controlled by controlling the rotation of these rollers. Yes.

JP-A-8-116683 JP 2004-75387 A JP 2008-168956 A

  However, the above-described workpiece rotating and conveying apparatus according to the prior art is composed of a large number of devices such as electrostatic actuators and small rollers and needs to be driven at the same time, so that the configuration is complicated and the control method is also complicated. It will be a thing. For this reason, the manufacturing cost and the maintenance cost are increased, and the malfunction of the device is likely to occur.

  Moreover, in such a structure, since the unevenness | corrugation arises in the conveyance surface which the workpiece | work to convey contacts, a workpiece | work small compared with the magnitude | size of the said unevenness | corrugation cannot be conveyed. Therefore, it is difficult to transport a wide range of workpieces from a small to a large one with a single workpiece rotation conveyance device.

  Furthermore, if it is accompanied by rotation and sliding of the members in the apparatus as described above, wear powder is generated, making it difficult to use in a clean environment.

  An object of the present invention is to effectively solve such problems. Specifically, a workpiece can be arbitrarily conveyed and rotated on a conveying surface with a simple configuration and without requiring complicated control. An object of the present invention is to provide a workpiece rotating and conveying device that can be used in a clean environment and can convey workpieces of various sizes.

  The present invention takes the following means in order to achieve such an object.

In other words, the workpiece rotating and conveying apparatus of the present invention provides a movable table having a conveying surface on which a workpiece is placed and elastically supported with respect to the substrate, and a vertical periodic excitation force applied to the movable table. A vertical vibration means, and a plurality of horizontal vibration units disposed opposite to each other with a reference position set on the movable table as a center, the plurality of horizontal vibration units cooperating with respect to the movable table Horizontal excitation means for applying horizontal excitation force in the horizontal linear direction and rotation direction, and an operation command signal based on the input switching command are output, and the periodic excitation force by each of the excitation means is controlled. Vibration control means for controlling each excitation means so as to generate a three-dimensional vibration trajectory on the movable table simultaneously with the same frequency while having a phase difference, and switching of operation command signals to the vibration control means A command is output and periodic vibration is generated by the horizontal vibration means. A the direction and shall comprise a vibration switch means linear direction or rotational direction or the linear direction as the rotation of the component is switched in a direction mixed, the horizontal vibration portion, the substrate and the a movable table directly Or a bar-like spring member extending in the vertical direction to be indirectly connected and fixed at both ends, and a piezoelectric element pasted on any end side avoiding the longitudinal central portion on the side surface of the bar-like spring member; These piezoelectric elements are applied with a sine voltage from the vibration control means to cause periodic elongation, and the rod-shaped spring member is deformed in a direction perpendicular to the side surface on which the piezoelectric elements are attached. And is configured to generate a periodic excitation force .

  With this configuration, when a periodic vibration force in the linear direction is generated on the movable table by the vibration switching unit, the workpiece can be conveyed in that direction, and a periodic vibration force in the rotation direction is generated. In the event of a failure, the workpiece can be rotated. In addition, when a periodic excitation force is generated in a direction in which components in both directions are mixed, the workpiece can be rotated and conveyed simultaneously. While having the functions of transferring and rotating the workpiece, the number of parts and the number of control targets can be reduced and the configuration can be simplified, thereby reducing the manufacturing cost and facilitating the control and improving the operation stability. . In addition, there is no part that rolls or slides to rotate and convey the workpiece by vibration, it is possible to suppress the generation of wear powder, and it can be used in a clean place, and the conveyance surface on the movable table Can be configured to be flat, so that it is possible to deal with workpieces of various sizes and shapes.

Moreover, the horizontal vibration unit, the base body and the rod-shaped spring member the fixed and movable table and the extending vertically directly or indirectly connected at both ends, longitudinally definitive on the side surface of the rod-like spring member Piezoelectric elements pasted on either end side avoiding the central part, and these piezoelectric elements are subjected to a sine voltage from the vibration control means, causing periodic elongation, and piezoelectric elements Since the rod-shaped spring member is deformed in the direction perpendicular to the side surface on which the element is pasted to generate a periodic exciting force, it is configured with a small number of elements, and in the rotational direction and the horizontal direction with high accuracy. An exciting force can be generated. Furthermore, since both ends of the rod-shaped spring member are fixed, the deflection direction is reversed up and down with respect to the center. For this reason, it is efficient in controlling the deflection that the piezoelectric element is provided on either end side while avoiding the center in the longitudinal direction.

  In addition, in order to realize the rotation direction and the conveyance in the two horizontal directions with simple control, the horizontal vibration unit is periodically arranged in a linear direction attached to the same rod-shaped spring member. It is preferable to include a horizontal excitation piezoelectric element that generates an excitation force and a rotation excitation piezoelectric element that generates a periodic excitation force in the rotation direction.

  Further, in order to simplify the apparatus configuration by reducing the number of piezoelectric elements, the horizontal excitation unit is replaced with a configuration in which a horizontal excitation piezoelectric element and a rotary excitation piezoelectric element are separately provided, In the case where a periodic vibration force is generated in the direction in which the components of the linear direction and the rotation direction are mixed by the horizontal vibration means, a straight line is applied to each piezoelectric element included in the horizontal vibration unit constituting the horizontal vibration means. It is preferable to provide an operation command signal in which an operation command signal for applying a periodic excitation force in the direction and an operation command signal for applying a periodic excitation force in the rotation direction are superimposed. .

  Furthermore, in order to easily switch the generation direction of the periodic excitation force as the horizontal excitation means to a linear direction, a rotational direction, or a direction in which components of the linear direction and the rotational direction are mixed, It is preferable that the switching means is configured to switch each periodic excitation force by a horizontal excitation unit disposed opposite to each other across the reference position between the same phase and the opposite phase.

  Further, in order to allow the workpiece on the movable table to be conveyed in an arbitrary direction in the horizontal direction, the horizontal vibration unit periodically applies a first horizontal direction to the movable table. A plurality of first horizontal vibration units that respectively apply a vibration force; a plurality of second horizontal vibration units that respectively apply a periodic vibration force in a second horizontal direction intersecting the first horizontal direction; The horizontal vibration means comprises: a first horizontal vibration means comprising the plurality of first horizontal vibration parts; and a second horizontal vibration means comprising the plurality of second horizontal vibration parts. The vibration control means simultaneously generates a periodic excitation force by the first horizontal excitation means and a periodic excitation force by the second horizontal excitation means while having a phase difference. It is preferable to configure as described above.

  According to the present invention described above, a simple configuration with a small number of parts does not require complicated control, and the workpiece can be conveyed and rotated in any direction on the conveyance surface while having excellent operational stability. In addition, it is possible to provide a workpiece rotating and conveying apparatus that can handle workpieces of various shapes and sizes and can be used in a clean environment.

The system block diagram of the workpiece | work rotation conveying apparatus which concerns on 1st Embodiment of this invention. The perspective view of the mechanical apparatus part of the workpiece | work rotation conveying apparatus. The front view of the mechanical apparatus part of the workpiece | work rotation conveying apparatus. The circuit block diagram which shows typically how to give the operation command signal with respect to each piezoelectric element with which the workpiece | work rotation conveying apparatus is provided. The circuit block diagram which shows typically an example of how to give the operation command signal in the case of generating the vibration of a linear direction in the workpiece | work rotation conveying apparatus. The circuit block diagram which shows typically an example of how to give the operation command signal in the case of producing the vibration of a rotation direction in the workpiece | work rotation conveying apparatus. The front view which shows the form when the movable stand in the workpiece | work rotation conveying apparatus has displaced to the perpendicular direction. The front view which shows the form when the movable stand in the workpiece | work rotation conveying apparatus displaces to a horizontal direction (X direction). The top view which shows the form when the movable stand in the same workpiece | work rotation conveying apparatus displaces to a rotation direction. The top view which showed typically the displacement direction of each 1st spring member in the case of producing the displacement of a rotation direction in the movable stand in the workpiece | work rotation conveying apparatus. The top view which showed typically the example in the case of operating the workpiece | work on a conveyance surface in the workpiece | work rotation conveying apparatus. The top view which showed typically the example in the case of making it operate | move to the workpiece | work on a conveyance surface in the workpiece | work rotation conveying apparatus. The top view which showed typically the state which produced the vibration of the horizontal 2 direction and the rotation direction simultaneously on the movable stand in the workpiece | work rotation conveying apparatus. The circuit block diagram which shows typically how to give the operation command signal with respect to each piezoelectric element with which the workpiece | work rotation conveying apparatus which concerns on 2nd Embodiment of this invention is provided. The circuit block diagram which shows typically an example of how to give the operation command signal in the case of producing the vibration of a rotation direction in the workpiece | work rotation conveying apparatus. The top view which showed typically the displacement direction of each 1st spring member in the case of producing the displacement of a rotation direction in the movable stand in the workpiece | work rotation conveying apparatus. The perspective view of the mechanical apparatus part of the workpiece | work rotation conveying apparatus which concerns on the modification of 1st Embodiment of this invention. The circuit block diagram which shows typically how to give the operation command signal with respect to each piezoelectric element with which the workpiece | work rotation conveying apparatus is provided.

  Embodiments of the present invention will be described below with reference to the drawings.

<First Embodiment>
As shown in FIG. 1, the workpiece rotating and conveying apparatus 1 according to the first embodiment of the present invention is mainly composed of a mechanical device unit 2 and a control system unit 3. As will be described later, the control system unit 3 controls the piezoelectric elements 71 to 74 incorporated in the mechanical device unit 2 to rotate the mechanical device unit 2 in the X, Y, and Z directions and around the Z axis. It is configured to generate a vibration in a linear direction and a rotational direction by applying a periodic exciting force in the direction.

  Note that the X direction is a first horizontal direction in which the right side in the drawing is positive, and the Y direction is a second horizontal direction in which the direction perpendicular to the X direction and the front side of the drawing is positive, the Z direction. Is defined as a coordinate axis shown at the lower left in the figure, indicating a vertical direction in which the upward direction orthogonal to the X and Y directions is positive. Furthermore, the direction of rotation about the Z axis is defined as the θ direction with the counterclockwise direction being positive when viewed from above. In the following, the description will proceed along this coordinate axis.

  As shown in FIGS. 2 and 3, the mechanical device unit 2 is mainly a base 4 fixed to the floor surface and a movable base that transports the workpiece 9 placed on the transport surface 61 by vibrating with respect to the base 4. 6 and elastic support means 5 for applying vibration while elastically supporting the movable base 6 with respect to the base 4. Further, a part of the elastic support means 5 constitutes the vibration means 7 that causes the movable table 6 to vibrate together with the piezoelectric elements 71 to 74 described above.

  The base body 4 has a rectangular flat plate shape with the long side facing in the X direction, and two rectangular parallelepiped mounting blocks 41 with the long side facing in the Y direction are parallel to the upper surface 4a with an interval in the X direction. Is fixed. If an elastic body having a small spring constant such as an anti-vibration rubber (not shown) is attached below the base body 4, it is preferable because the reaction force against the floor to be installed can be reduced.

  The elastic support means 5 includes a first spring member 52 that is four rod-like spring members connected to the base 4, and an intermediate base that is elastically supported in the horizontal direction with respect to the base 4 by the first spring member 52. 51, and a second spring member 53 that is a plate spring member that is connected to the intermediate base 51 and elastically supports the movable base 6 in the vertical direction.

  A pair of first spring members 52, 52 that are spaced apart from each other in the Y direction and arranged in parallel with each other are arranged on the outer side surface 41 a among the side surfaces orthogonal to the X axis of the mounting block 41 at the lower end portion 52 b configured in a flat plate shape. It is connected and has a shape extending vertically upward (Z direction) from the lower end 52b. Then, a total of four first spring members 52 are arranged at equal distances around the reference position S, which is the center of the transport surface 61, and stand up slightly from the inside of the four corners of the rectangle that forms the outer edge of the base body 4. The upper block 51a that constitutes a part of the intermediate base 51 is connected by the upper end portion 52a so as to be supported from the side surface. Furthermore, the first spring members 52, 52 at the diagonal positions are arranged so as to face each other with the reference position S on the movable table 6 as the center.

  Here, the phrase “opposite with respect to the reference position S” means that it is in a symmetrical position with the reference position S as the center of symmetry when viewed from the upper surface of the movable base 6, that is, the positive direction of the Z axis. In the three-dimensional spatial coordinate system, it means that the position is symmetric with respect to a straight line parallel to the Z axis passing through the reference position S.

  An intermediate portion 52c between the upper end portion 52a and the lower end portion 52b of the first spring member 52 is configured to have a square cross section, and each side surface is a plane orthogonal to the X axis and the Y axis. I have to. Thus, by supporting by the four first spring members 52, the intermediate stage 51 is elastically supported in the horizontal direction, and can maintain a substantially horizontal state even when displacement occurs in the X and Y directions. .

  The intermediate stand 51 is configured to form a rectangular frame in which four flat side plates 51d are assembled vertically and horizontally, and is fixed in such a manner as to be suspended by a pair of upper blocks 51a arranged in the X direction. ing. As described above, since the upper block 51a is supported by the four first spring members 52, the intermediate platform 51 is elastically supported in the horizontal direction in the air as a whole. Furthermore, on the inner side of the side plate 51d, two second spring members 53, which are plate springs, are arranged in series in the X direction and parallel to the horizontal plane as a pair, and these are arranged in two vertical directions. It is installed as a step. Since the side plate 51d has sufficient strength with respect to the second spring member 53, the first spring member 52 is equally deformed while suppressing deformation in the twisting direction of the second spring member 53 as a strength member. It functions to constrain the deformation direction. Each of the four second spring members 53 is fixed so that one end side is sandwiched vertically between the upper block 51a and the intermediate block 51b or the intermediate block 51b and the lower block 51c. The other end side is fixed so as to be sandwiched vertically between the support block upper part 62a and the support block intermediate part 62b provided at the lower part of the movable base 6, or the support block intermediate part 62b and the support block lower part 62c. With this configuration, the movable table 6 is elastically supported in the vertical direction with respect to the intermediate table 51, and can maintain a horizontal state even when displacement occurs in the Z direction.

  The movable base 6 includes a support block upper part 62a, a support block intermediate part 62b, and a support block lower part 62c as described above, and operates as a unit. The upper surface of the movable table 6 can be loaded with a workpiece 9 as a flat conveying surface 61. As described above, the intermediate platform 51 is elastically supported in the horizontal direction by being connected to the base body 4 by the same four first spring members 52, and the movable platform 6 is further supported by the intermediate platform 51. By being connected by the second spring member 53, it is elastically supported in the vertical direction. As a result, the movable base 6 is configured to be elastically supported in each of the X, Y, and Z directions with respect to the base 4 and is displaced in each of the X, Y, and Z directions or the θ direction. Even in this case, the upper surface of the movable base 6 can be maintained in a substantially horizontal state.

  In addition, since the movable table 6 has a flat upper surface 61 serving as a transfer surface, it is possible to place workpieces 9 of various sizes and shapes.

  And the vibration means 7 is provided as a drive part for vibrating this movable stand 6. FIG. As will be described below, the vibration means 7 includes a first horizontal vibration means 7a that applies vibrations in the X direction and the rotation direction (θ direction) to the movable base 6, and a second vibration that applies vibrations in the Y direction. Horizontal vibration means 7b and vertical vibration means 7c for applying vibration in the Z-axis direction.

  First, the first horizontal excitation means 7a for applying vibrations around the X direction and the Z axis includes a first spring member 52 formed as a rod-shaped spring member, and the longitudinal length of the side surface orthogonal to the X axis in the intermediate portion 52c. A rectangular parallelepiped first piezoelectric element 71 attached to a portion below the center in the direction, and a rectangular parallelepiped fourth piezoelectric element 74 attached to a portion above the center in the longitudinal direction of the intermediate portion 52c on the same surface. Is done.

  Further, as shown in FIG. 4, the first horizontal vibration means 7 a includes four first horizontal vibration units 7 a 1 to 4 provided at four positions A to D in the drawing while corresponding to the four corners of the movable table 6. 7a4 can be considered, and it can be said that the first horizontal vibration units 7a1 to 7a4 are configured. Each of the first horizontal vibrating portions 7a1 to 7a4 includes a first spring member 52, two first piezoelectric elements 71 and 71 provided on both side surfaces orthogonal to the X axis of the first spring member 52, and 2 It comprises four fourth piezoelectric elements 74 and 74. The first piezoelectric elements 71 and 71 and the fourth piezoelectric elements 74 and 74 are attached to the same surface. However, as described above, the former is positioned below the center of the first spring member 52 in the longitudinal direction. Since the latter is attached to the upper portion, the operations do not interfere with each other. Further, the first horizontal vibration portions 7a1 and 7a3 and 7a2 and 7a4 that are diagonal to each other are set so as to be opposed to each other with the reference position S on the movable table 6 as a center.

  The first piezoelectric elements 71, 71 and the fourth piezoelectric elements 74, 74 are attached in a direction in which elongation occurs in the Z-axis direction when a voltage is applied, and the surface to which the piezoelectric elements are attached is caused by elongation. It is possible to cause the first spring members 52 to 52 to bend in the vertical direction. By causing the first spring members 52 to 52 to bend in this way, for example, the intermediate base 51 and the movable base 6 are displaced in the horizontal direction with respect to the base body 4 as shown in FIG. Can do. When such a deflection occurs, since both ends of the first spring member 52 are fixed, the deflection direction is reversed up and down with respect to the center. Therefore, providing the piezoelectric elements 71 and 74 on either end side while avoiding the center in the longitudinal direction is efficient in controlling the deflection.

  Although not shown in the drawings, when the piezoelectric elements 71 to 74 are attached to the front and back of the same member, the positive and negative of the input voltage are reversed so that the expansion and contraction sides are reversed on the front and back. It is configured on the circuit. This also applies to the second piezoelectric element 72 and the third piezoelectric element 73 described later.

  Returning to FIG. 4, by periodically varying the voltage applied to the piezoelectric elements 71 and 74, it is possible to generate a periodic excitation force using the first spring member 52 as a vibration member. Yes. That is, each of the first horizontal excitation units 7a1 to 7a4 generates an excitation force in the X direction as the first horizontal direction which is a vertical direction with respect to the surface to which the piezoelectric elements 71 and 74 are attached. And these 1st horizontal vibration parts 7a1-7a4 cooperate, and function as the 1st horizontal vibration means 7a which gives a vibration force with respect to the movable stand 6. FIG. When viewed as the first horizontal vibration means 7a, the first horizontal vibration portions 7a1 to 7a4 simultaneously vibrate in the same phase, thereby generating a periodic vibration force in a linear direction parallel to the X axis. The first horizontal vibration portions 7a1 and 7a3 or 7a2 and 7a4 at the corners vibrate in opposite phases, thereby generating a periodic vibration force in the rotation direction (θ direction) centered on the reference position S.

  Next, as shown in FIG. 2 and FIG. 3, the second horizontal excitation means 7b for applying the vibration in the Y direction includes the first spring member 52 and the side surface orthogonal to the Y axis in the intermediate portion 52c. It is comprised from the rectangular parallelepiped-shaped 2nd piezoelectric element 72 affixed on the part below the center of a longitudinal direction.

  Further, as shown in FIG. 4, the second horizontal vibration means 7 b includes four second horizontal vibration units 7 b 1 to 7 provided at four locations A to D in the drawing while corresponding to the four corners of the movable table 6. 7b4 and can be considered to be composed of these second horizontal vibration units 7b1 to 7b4. Each of the second horizontal vibrating portions 7b1 to 7b4 includes a first spring member 52 and two second piezoelectric elements 72 and 72 provided on both side surfaces orthogonal to the Y axis of the first spring member 52. ing.

  The second piezoelectric elements 72 and 72 are attached in a direction in which elongation occurs in the Z-axis direction when a voltage is applied, and in a direction perpendicular to the surface to which the piezoelectric elements 72 and 72 are attached by elongation. It is possible to cause the first spring member 52 to bend. Furthermore, by periodically varying the voltage applied to the piezoelectric elements 72, 72, the first spring member 52 can be used as a vibration member to generate a periodic excitation force.

  That is, each of the second horizontal excitation units 7b1 to 7b4 generates an excitation force in the Y direction as the second horizontal direction which is a direction perpendicular to the surface to which the piezoelectric elements 72 and 72 are attached. And these 2nd horizontal vibration parts 7b1-7b4 cooperate, and function as the 2nd horizontal vibration means 7b which gives a vibration force with respect to the movable stand 6. FIG. When viewed as the second horizontal vibration means 7b, the second horizontal vibration portions 7b1 to 7b4 simultaneously vibrate in the same phase, thereby generating a periodic vibration force in a linear direction parallel to the Y axis. Become.

  Further, as shown in FIG. 3, the vertical vibration means 7c for applying the vibration in the Z-axis direction is attached to the second spring member 53, which is a plate-like spring member, and the back and front of the position outside the center in the longitudinal direction. The third piezoelectric elements 73 to 73 are provided. The third piezoelectric elements 73 to 73 are affixed in a direction in which an extension in the X-axis direction is caused by applying a voltage, and the second spring member 53 is caused to bend by controlling the applied voltage. As shown in FIG. 3, the movable base 6 can be displaced in the Z-axis direction. In the drawing, the third piezoelectric element 73 is attached only to the upper two of the four second spring members 53. Instead, the third piezoelectric element 73 is attached to the lower second spring member 53. The element 73 may be attached, or the third piezoelectric element 73 may be attached to all the upper and lower stages. However, similarly to the first spring member 52, the second spring member 53 also has a bending direction that is reversed with the central portion in the longitudinal direction as a boundary when the deflection occurs. It is efficient to provide it more than the part.

  The second spring member 53 and the third piezoelectric element 73 are provided symmetrically with respect to the movable base 6, and the voltage applied to each third piezoelectric element 73 is always the same for all the second spring members 53 simultaneously. The positive and negative values are adjusted at the same time so as to be displaced in the direction. Therefore, by periodically varying the voltage applied to the third piezoelectric elements 73 to 73, the third piezoelectric elements 73 to 73 and the second spring members 53 to 53 cooperate to perform vertical excitation. It functions as the means 7c and vibrates in the vertical direction while keeping the movable table 6 horizontal.

  With respect to the mechanical device unit 2 configured in this way, the control system unit 3 shown in FIG. 1 sends an operation command signal to the first horizontal vibration unit 7a, the second horizontal vibration unit 7b, and the vertical vibration unit 7c. By outputting, control is performed so as to generate a periodic excitation force for generating vibrations in the X, Y, Z, and θ directions. Therefore, a sine wave voltage signal (hereinafter referred to as an operation command signal) is supplied from the vibration control means 31 included in the control system unit 3 to each of the piezoelectric elements 71 to 74 constituting a part of the horizontal vibration means 7a to 7c. , Referred to as a sinusoidal voltage signal.) Sx, Sy, Sz, or Sθ is provided, respectively.

  Specifically, the vibration control means 31 constituting a part of the control system unit 3 includes an oscillator 33 for generating a reference sine voltage signal Sz as shown in FIG. Sz is amplified by an amplifier 37c and then given to the piezoelectric element 73. By doing so, an excitation force in the vertical direction (Z direction) is generated by the vertical excitation means 7c at the same frequency as the frequency in the sine voltage signal Sz generated by the oscillator 33, and the movable base 6 is shown in FIG. 7 can generate vertical vibrations. The magnitude of the vertical periodic excitation force can be changed by changing the amplitude of the sine voltage signal Sz by the oscillator 33 in FIG. 1 or changing the amplification factor by the amplifier 37c. ing. Furthermore, the frequency of the periodic excitation force can be changed by changing the frequency of the sine voltage signal Sz by the oscillator 33.

  Further, the vibration control means 31 generates sine voltage signals Sx, Sy, Sθ whose amplitude is changed with the same frequency and a desired phase difference based on the reference sine voltage signal Sz. An X-direction vibration generation unit 34, a Y-direction vibration generation unit 35, and a θ-direction vibration generation unit 36 are provided. The sine voltage signal Sx generated by the X-direction vibration generation unit 34 is amplified through the amplifier 37a and is subjected to the first horizontal addition as a control for controlling the vibration in the linear direction parallel to the X axis applied to the movable base 6. It is given to the vibration means 7a. Further, the sine voltage signal Sy generated by the Y-direction vibration generating unit 35 is amplified through the amplifier 37b and is secondly controlled so as to control the vibration in the linear direction parallel to the Y-axis applied to the movable base 6. It is given to the horizontal vibration means 7b. Further, the sine voltage signal Sθ generated by the θ-direction vibration generator 36 is amplified through the amplifier 37d as a control for controlling the vibration in the rotation direction (θ direction) around the Z axis applied to the movable base 6. Is given to the first horizontal vibration means 7a.

  More specifically, as shown in FIG. 4, the sinusoidal voltage signal Sx that causes the vibration in the X direction is supplied to each first horizontal vibration unit 7a1 constituting the first horizontal vibration unit 7a via an amplifier 37a. The electric circuit 38 is configured so as to be applied to the first piezoelectric elements 71 to 71 as horizontal excitation piezoelectric elements included in .about.7a4. As shown in FIG. 5, when the same voltage signal is simultaneously input to each of the first piezoelectric elements 71 to 71, the electric circuit 38 has each first horizontal addition at positions A to D in the figure. It is comprised so that the displacement of the same direction may arise with respect to the vibration parts 7a1-7a4. In this figure and FIG. 4, a part of the electric circuit 38 is omitted, and for the piezoelectric elements 71 to 74 installed facing each other on the front and back sides, a voltage inverted from the opposite piezoelectric element is applied. Is meant to give.

  The same (inverted on both sides) sinusoidal voltage signal Sx is applied to the first piezoelectric elements 71 to 71 almost simultaneously through the electric circuit 38. For this reason, the first horizontal excitation units 7a1 to 7a4 at positions A to D in the figure all vibrate in the X direction at the same frequency and in the same phase. By doing so, vibration in a linear direction parallel to the X axis is given to the movable table 6.

  Returning to FIG. 4, the sinusoidal voltage signal Sθ that causes the vibration in the θ direction is for rotational excitation provided in each of the first horizontal excitation units 7a1 to 7a4 constituting the first horizontal excitation means 7a via the amplifier 37d. The electric circuit 38 is configured to be provided to the fourth piezoelectric elements 74 to 74 as piezoelectric elements. As shown in FIG. 6, the electric circuit 38 receives the same voltage signal at the same time for the fourth piezoelectric elements 74 to 74, so that the first horizontal excitation at positions A and B in the figure is achieved. The parts 7a1 and 7a2 and the first horizontal vibration parts 7a3 and 7a4 at the positions C and D in the figure are configured so that the displacement directions are reversed. Similarly to the above, in this figure, it is meant that a voltage that is inverted with respect to the piezoelectric element on the opposite side is applied to the piezoelectric elements that are placed facing each other.

  When the voltage is applied in this way, as shown in FIG. 10, the first spring members 52 to 52 are at the positions A and B in the figure and at the positions C and D in the figure, and the displacement directions are reversed. Thus, a rotational moment is generated with respect to the movable table 6. As described above, the first spring members 52 to 52 are arranged with the reference position S as the center, and the first spring members 52 and 52 that face each other with the reference position S as the center move in the opposite directions. As a result, the rotational movement around the reference position S can be performed.

  Returning to FIG. 6, the same sine voltage signal Sθ is input to each of the fourth piezoelectric elements 74 to 74 (while being inverted on the front and back sides), whereby the first horizontal excitation units 7 a 1 and 7 a 2 and the first The horizontal vibration units 7a3 and 7a4 generate vibrations in the opposite phase in the X direction. By doing so, it is possible to generate vibration in the rotational direction (θ direction) about the reference position S as shown in FIG.

  Returning to FIG. 4, the sine voltage signal Sy that causes the vibration in the Y direction is supplied to the second piezoelectric element included in each of the second horizontal excitation units 7 b 1 to 7 b 4 constituting the second horizontal excitation unit 7 b via the amplifier 37 b. The electric circuit 38 is configured to be given to 72-72. Here, the second piezoelectric elements 72 to 72 function as horizontal excitation piezoelectric elements having different directions from the first piezoelectric elements 71 to 71. The same (inverted on both sides) sinusoidal voltage signal Sy is applied to the second piezoelectric elements 72 to 72 almost simultaneously through the electric circuit 38. Therefore, each of the second horizontal excitation units 7b1 to 7b4 vibrates in the Y direction with the same frequency and the same phase. By doing so, vibration in a linear direction parallel to the Y axis is given to the movable table 6.

  As described above, sinusoidal voltage signals Sx, Sy, Sz, Sθ as operation command signals are given to the respective excitation means 7a, 7b, 7c of the mechanical device section 2 configured as shown in FIG. A three-dimensional vibration trajectory can be generated when each of the vibration means 7a, 7b, 7c applies a periodic vibration force in each direction to the movable base 6 based on the operation command signal.

  In addition, the control system unit 3 in the present embodiment has a vibration switching unit 32 that changes a three-dimensional vibration locus generated in the movable table 6 by outputting an operation signal switching command to the vibration control unit 31. doing. Specifically, the vibration switching means 32 is a switching command for switching the sine voltage signals Sx, Sy, Sθ to the X, Y direction, and θ direction vibration generating units 34 to 36 constituting the vibration control means 31. Is output.

  Based on the switching command, the vibration generators 34 to 36 change the phase difference and amplitude based on the reference sine voltage signal Sz output from the oscillator 33, and change the sine voltage signals Sx, Sy, Output is performed as Sθ. By doing so, each of the periodic exciting forces in the X, Y, and Z directions is simultaneously generated at the same frequency as the periodic exciting force in the Z direction, and each has a phase relative to the periodic exciting force in the Z direction. And the amplitude can be changed.

  The frequency of the vibration generated by the oscillator 33 is set to a frequency that resonates with any vibration system in the X, Y, and Z directions, thereby amplifying the vibration and saving power. In order to avoid interference of vibrations in the vibration system in all directions, the natural frequencies in each direction may be separated. At this time, the natural frequency in each direction is separated by, for example, about −10% to + 10%.

  The work rotation transport device 1 of the present embodiment configured as described above can transport and rotate the work 9 by operating as follows.

  First, as shown in FIG. 1, the control system unit 3 generates the sine voltage signal Sz generated by the oscillator 33 and sets the amplitude and phase according to the switching command from the vibration switching means 32 based on the sine voltage signal Sz. The sine voltage signals Sx, Sy, Sθ are output to the mechanical device unit 2. In the mechanical device unit 2, the movable table 6 is vibrated by the vibration means 7 a to 7 c according to the sine voltage signals Sx, Sy, Sz, Sθ, so that X, Y, Z, θ is applied to the movable table 6. A three-dimensional vibration locus is generated by combining the vibration components in the respective directions.

  At this time, among the vibration components in each direction given to the movable table 6, a combination of the vibration component in the Z direction and the vibration component in the X direction generates an elliptical vibration locus on the movable table 6 in the XZ plane. Can be made. Then, the frictional force applied to the work 9 from the transfer surface 61 by the elliptical vibration locus can be periodically changed, and the transfer can be performed using this as a thrust in the X direction. Further, when the sine voltage signal Sx is changed by the vibration switching means 32, the size of the elliptical vibration locus is changed by changing the phase or amplitude of the vibration component in the X direction with respect to the vibration component in the Z direction. And by changing the direction, the direction and speed of conveying the workpiece 9 can be changed.

  Similarly, by the combination of the vibration component in the Z direction and the vibration component in the Y direction, the workpiece 9 on the movable table 6 can be transported by applying a thrust in the Y direction. In addition, the direction is changed by applying a thrust in the rotation direction (θ direction) to the work 9 on the movable table 6 and rotating on the movable table 6 by a combination of the vibration component in the Z direction and the vibration component in the θ direction. Can be made. The magnitude and direction of the thrust in the Y direction and θ direction can be changed by changing the sine voltage signals Sy and Sθ by the vibration switching means 32.

  By combining these operations in the two horizontal directions and the rotation direction, the workpiece 9 can be operated in a wide range. Hereinafter, a description will be given based on FIGS. 11 and 12 with reference to FIG.

  For example, as shown in FIG. 11 (a), the workpiece 9 placed on the right side of the movable table 6 at the time T0 is converted into sine voltage signals Sx and Sz in the X and Z directions (see FIG. 1). ) Can be conveyed in the negative X-axis direction toward the left side in the figure. From time T1, by controlling the vibration to be switched by the vibration switching means 32 (see FIG. 1) and applying the sine voltage signal Sy, a conveyance speed component in the Y direction can be simultaneously given. At this time, if Sy is set in a direction in which thrust is applied in the negative Y-axis direction, the workpiece can be conveyed in the upper left direction in the figure.

  Further, as shown in FIG. 11B, the sine voltage signal Sx is generated by the vibration switching means 32 while generating the respective sine voltage signals Sx, Sy, Sz (see FIG. 1) in the X direction, the Y direction, and the Z direction. By continuously changing the size and phase of Sy (see FIG. 1), the workpiece 9 can be conveyed in an arbitrary direction such as meandering the conveyance locus. At this time, the vibration switching by the vibration switching means 32 may be performed by a predetermined program, or a switching command can be output so as to change the conveyance direction in accordance with an external input. .

  Further, by adding a sine voltage signal Sθ in the θ direction (see FIG. 1), it is possible to perform a continuous operation as shown in FIGS. In this example, first, from time T0 to T1, the work 9 placed at the right end position on the movable platform 6 in the drawing is transported in the X direction. Then, a thrust in the counterclockwise rotation direction (θ direction) is applied to the workpiece 9 positioned at the center of the movable table 6 until the time T2 to change the direction approximately 90 °. Further, it is moved in the Y direction in the figure until time T3. By performing such a continuous operation, the workpiece 9 supplied onto the movable platform 6 from an upstream line (not shown) can be used to change the direction and send it out to the downstream line.

  Further, the conveyance of the workpiece 9 in the X, Y, and θ directions as described above applies the sine voltage signals Sx, Sy, and Sθ (see FIG. 1) at the same time, and the X is moved with respect to the movable base 6 as shown in FIG. , Y, and θ directions are simultaneously generated, and a vibration trajectory in which these are mixed is generated in the movable base 6 to simultaneously carry X and Y in two horizontal directions and rotate in the θ direction. You can also.

  Here, the periodic excitation force in the X direction and the periodic excitation force in the θ direction are generated by the common first horizontal excitation means 7a, and give sine voltage signals Sx and Sθ for that purpose. Since the target is different between the first piezoelectric elements 71 to 71 as the horizontal vibration piezoelectric elements and the fourth piezoelectric elements 74 to 74 as the rotational vibration piezoelectric elements, the control is easily performed while distinguishing between the two. It can be performed. By doing in this way, the vibration which mixed both vibrations arises by each rod-shaped spring member 52-52, and it is given with respect to the movable stand 6. FIG.

  Moreover, since the conveyance surface 61 on the movable stand 6 is configured as a flat surface, the workpiece 9 can be loaded with various sizes and shapes of workpieces 9 in a wide range. The workpiece 9 can be moved. Furthermore, the thrust generated to cause the workpiece 9 to be conveyed and rotated is due to friction from the conveying surface 61, and a rotating part or a sliding part serves as a source of excitation force for applying the friction. There is little generation of wear powder because it is not accompanied.

  As described above, the workpiece rotating and conveying apparatus 1 according to the present embodiment has the movable table 6 that has the conveying surface on which the workpiece 9 is placed and is elastically supported with respect to the base 4, and the periodic vibration force in the vertical direction. A vertical vibration means 7c applied to the movable table 6 and a plurality of horizontal vibration units 7a1 to 7a4 arranged to face each other with a reference position set in the movable table 6 as the center. Based on horizontal switching means 7a and 7b that apply horizontal vibration units 7a1 to 7a4 in cooperation with each other to apply a horizontal linear rotation and a periodic rotational force to the movable table 6 and a switching command that is input. An operation command signal is output to generate a three-dimensional vibration trajectory on the movable base 6 by simultaneously generating the periodic excitation force by the respective excitation means 7a, 7b, 7c at the same frequency while having a phase difference. Vibration control for controlling each of the excitation means 7a, 7b, 7c An operation command signal switching command is output to the means 31 and the vibration control means 31, and the direction of the periodic excitation force by the horizontal excitation means 7a, 7b is set to a linear direction or a rotational direction or a linear direction and a rotational direction. And vibration switching means 32 for switching in the direction in which the components are mixed.

  Because of this configuration, when the vibration switching means 32 generates a periodic vibration force in the linear direction on the movable table 6, the workpiece 9 can be conveyed in that direction, and the periodic movement in the rotation direction can be performed. When an exciting force is generated, the workpiece 9 can be rotated. Further, when a periodic excitation force is generated in a direction in which components in both directions are mixed, the work 9 can be rotated and conveyed simultaneously. As described above, since the work 9 can be transported and rotated, the number of components and the number of control targets can be reduced and the configuration can be simplified. Therefore, the manufacturing cost is reduced and the control is facilitated to improve the operation stability. be able to. In addition, since there are no parts that roll or slide, the generation of wear powder can be suppressed, and it can be suitably used in a clean field. Moreover, since the conveyance surface 61 on the movable platform 6 can be configured to be flat, it is possible to deal with workpieces 9 of various sizes and shapes.

  Further, the vibration switching means 32 causes the periodic vibration forces generated by the horizontal vibration portions 7a1, 7a3 (7a2, 7a4) arranged opposite to each other across the reference position to be in phase with each other. Since it is configured to be switched, it is possible to easily switch the generation direction of the periodic vibration force as the horizontal vibration means 7a to a linear direction, a rotation direction, or a direction in which components of the linear direction and the rotation direction are mixed. It becomes.

  In addition, the horizontal vibration unit provides a plurality of first horizontal vibration units 7a1 to 7a4 that respectively apply a periodic vibration force in the first horizontal direction to the movable platform 6, and the first horizontal vibration unit. A plurality of second horizontal vibration portions 7b1 to 7b4 that respectively apply a periodic vibration force in a second horizontal direction intersecting the direction, and the horizontal vibration means includes the plurality of first vibration vibration means. The vibration control means includes first horizontal vibration means 7a including horizontal vibration parts 7a1 to 7a4 and second horizontal vibration means 7b including the plurality of second horizontal vibration parts 7b1 to 7b4. 31 is configured to generate the periodic excitation force by the first horizontal excitation means 7a and the periodic excitation force by the second horizontal excitation means 7b simultaneously with a phase difference. The first horizontal vibration means 7a and the second horizontal vibration means 7b are used to move the movable table 6 Can be moved in two directions crossing the over click 9, it is possible to transport in any direction by combining these.

  In addition, the horizontal vibrating portions 7a1 to 4 and 7b1 to 4 are rod-shaped spring members 52 to 52 that extend in the vertical direction directly or indirectly connecting the base 4 and the movable base 6, and the rod-shaped members. Piezoelectric elements 71 to 72 and 74 pasted on the side surfaces of the spring members 52 to 52 are provided, and the piezoelectric elements 71 to 72 and 74 are subjected to a sine voltage from the vibration control means 31 so as to have a period. Since the rod-shaped spring members 52 to 52 are deformed in a direction orthogonal to the side surface on which the piezoelectric elements 71 to 72 and 74 are attached, the periodic excitation force is generated. It is possible to generate an exciting force in the rotational direction and the horizontal direction with high accuracy by controlling the voltage applied to the piezoelectric elements 71 to 72 and 74 while configuring with a small number of elements.

  Further, the horizontal vibration parts 7a1 to 4 and 7b1 to 4 are horizontal vibration-generating piezoelectric elements 71 to 72 that generate a periodic vibration force in a linear direction that is attached to the same bar-shaped spring members 52 to 52, respectively. In addition, since the rotation excitation piezoelectric elements 74 to 74 that generate periodic excitation force in the rotation direction are included, the conveyance in the rotation direction and the two horizontal directions can be performed without generating a complicated operation command signal. Can be realized by simple control.

Second Embodiment
The workpiece | work rotation conveying apparatus 101 which concerns on 2nd Embodiment of this invention is demonstrated using FIG. In this figure, the same code | symbol is attached | subjected to the part which is common in 1st Embodiment, and description is abbreviate | omitted about these parts.

In the second embodiment, with respect to the first spring members 52 to 52 as rod-like spring members, the first piezoelectric elements 71 to 71 are only attached below the center in the longitudinal direction on the side surfaces orthogonal to the X axis. In the first embodiment, the fourth piezoelectric elements 74 to 74 (see FIG. 4) provided as the rotary vibration piezoelectric elements are omitted. Therefore, each of the first horizontal vibration units 107a1 to 107a4 constituting the first horizontal vibration means 107a is configured only by the first spring members 52 to 52 and the first piezoelectric elements 71 to 71, respectively, and the second horizontal vibration unit 107a4. Each of the second horizontal excitation portions 107b1 to 107b4 constituting the means 107b is constituted by the first spring members 52 to 52 and the second piezoelectric elements 72 to 72, respectively.
Thus, since the number of piezoelectric elements is small, the apparatus configuration can be simplified.

  And in cooperation with the first spring members 52 to 52, the first piezoelectric elements 71 to 71 that generate vibration in the X direction and the second piezoelectric elements 72 to 72 that generate vibration in the Y direction, A sinusoidal voltage signal Sθ for rotational excitation is also superimposed and vibrations in the θ direction are generated simultaneously with the X and Y directions. That is, not only the first horizontal vibration means 107a but also the second horizontal vibration means 107b generates a periodic vibration force in the rotational direction.

  In this embodiment, if the sine voltage signal Sθ in the rotational direction (θ direction) is not generated, the signal is transmitted to each of the piezoelectric elements 71 to 71 and 72 to 72 as in the first embodiment. Input is performed (see FIG. 4). Further, the sine voltage signal Sθ in the rotation direction (θ direction) is input after being superimposed on the sine voltage signal Sx in the X direction through the adder 139a in the first horizontal excitation unit 107a1 at the position A in the figure. I try to do it. Further, in the first horizontal excitation unit 107a3 that is diagonally opposite to this, the X-direction sine voltage signal Sx is input after being subtracted through the subtractor 139c. That is, the sine voltage signal Sθ is inverted and superimposed on the sine voltage signal Sx.

  Similarly, the sine voltage signal Sθ in the θ direction is superimposed on the sine voltage signal Sy in the Y direction and input to the second horizontal excitation unit 107b2 at the position B in the figure through the adder 139b. Further, the sine voltage signal Sθ in the θ direction is inverted and superimposed on the sine voltage signal Sy in the Y direction through the reducer 139d and input to the second horizontal excitation unit 107b4 at the position D in the figure. .

  Furthermore, since the signals to be applied to the piezoelectric elements 71 to 72 are different from each other by configuring as described above, these signals are amplified so as to be input after being amplified through the amplifiers 137a to 137h provided individually. A circuit 138 is configured.

  With this configuration, for example, when only the sine voltage signal Sθ in the θ direction is applied, the reference position S (see FIG. 2) on the movable base 6 is at the opposite position as shown in FIG. Exciting forces having opposite phases can be generated in the first horizontal excitation units 107a1 and 107a3 and the second horizontal excitation units 107b2 and 107b4, respectively. Therefore, as shown in FIG. 16, when a displacement in the X negative direction occurs in the first spring member 52 at the position A in the drawing, the second spring member 52 at the diagonal C position has a displacement in the X positive direction. Displacement occurs. At this time, displacement occurs in the Y negative direction at the B position and in the Y positive direction at the D position. As a result, a rotational moment about the reference position S on the movable base 6 is generated, and these displacements periodically fluctuate according to the signal to generate a periodic exciting force in the rotational direction (θ direction). .

  Even when configured as described above, the workpiece 9 can be conveyed and rotated as in the first embodiment. Therefore, among the above-described effects obtained by the first embodiment, substantially the same effect can be obtained except that the piezoelectric element for rotational excitation and the piezoelectric element for horizontal excitation are provided separately. Can do.

  Further, in the second embodiment, when the horizontal vibration means 107a and 107b generate a periodic vibration force in a direction in which components in the linear direction and the rotation direction are mixed, the horizontal vibration means 107a and 107b are An operation command signal for applying a periodic vibration force in the linear direction to each piezoelectric element 107a1, 107a3, 107b2, and 107b4 included in the constituting horizontal vibration unit, and a periodic vibration force in the rotation direction. Since the operation command signal is superimposed on the operation command signal, the number of piezoelectric elements 71 to 73 as drive sources can be reduced, and the apparatus configuration can be simplified. Yes.

  The specific configuration of each unit is not limited to the above-described embodiment.

  For example, a modified configuration as shown in FIGS. 17 and 18 based on the first embodiment described above is also conceivable. In this modification, as shown in FIG. 17, the piezoelectric elements 274 and 275 for rotational excitation attached to the side surfaces of the first embodiment and the first spring members 52 to 52 are different. In the first embodiment, fourth piezoelectric elements 74 to 74 (see FIG. 2) as rotational excitation piezoelectric elements are attached to the side surfaces orthogonal to the X axis for all the first spring members 52 to 52. In this modification, the fourth piezoelectric elements 274 and 274 of the piezoelectric element for rotational excitation are attached to the side surfaces orthogonal to the X axis only on the pair of first spring members 52 and 52 at the diagonal positions. In addition, the fifth piezoelectric elements 275 and 275 of the rotational excitation piezoelectric element are attached to the other pair of first spring members 52 and 52 on the side surface orthogonal to the Y-axis. In other words, not only the first horizontal vibration means 207a but also the second horizontal vibration means 207b generates a periodic vibration force in the rotational direction.

  Therefore, as shown in FIG. 18, the pair of first horizontal vibration portions 207a1 and 207a3 includes a first spring member 52, a first piezoelectric element 71, and a fourth piezoelectric element 274 as a rotational vibration piezoelectric element. The other pair of first horizontal excitation portions 207 a 2 and 207 a 4 is configured by the first spring member 52 and the first piezoelectric element 71. In addition, the pair of second horizontal vibration portions 207 b 1 and 207 b 3 includes the first spring member 52 and the second piezoelectric element 72, and the other pair of second horizontal vibration portions 207 a 2 and 207 a 4 includes the first spring member 52. The second piezoelectric element 72 and a fifth piezoelectric element 275 serving as a piezoelectric element for rotational excitation.

  Even in such a configuration, when the sine voltage signal Sθ in the θ direction is given by configuring the electric circuit 238 as shown in FIG. 18, the reference position on the movable table is similar to FIG. 15. Rotational moments are generated by generating opposite-phase excitation forces in the first horizontal excitation units 207a1 and 207a3 and the second horizontal excitation units 207b2 and 207b4 that are opposed to each other with S (see FIG. 2) as the center. To generate a periodic exciting force in the θ direction.

  Furthermore, in the above-described first and second embodiments, the excitation means 7a, 7b, 7c (107a, 107b, 7c) in each direction are given excitation forces in the directions orthogonal to each other in X, Y, Z. Although configured as described above, it is not always necessary to make the vibration trajectory three-dimensionally synthesized with the movable table 6 orthogonal to each other as long as it can be generated and changed, and the directions may simply intersect. Further, it is not necessary to set the vibration means 7a, 7b, 7c (107a, 107b, 7c) strictly in the vertical and horizontal directions, and various usage modes such as tilting the base body 4 are possible. It is.

  Moreover, in the above-mentioned embodiment, although it was set as the bimorph type which made two sets which stuck the side surface of the 1st spring member 52, and the piezoelectric elements 71-74 stuck on the 2nd spring member 53 on the back and front, It is also possible to use a unimorph type in which each is one. Furthermore, it is possible to develop such a configuration so that the horizontal excitation piezoelectric element 71 and the rotary excitation piezoelectric element 74 in the first embodiment are attached to the front and back.

  Furthermore, in the above-described embodiment, a total of four second spring members 53 are provided, and a pair of second spring members 53 arranged in series is provided as two upper and lower stages, but two sheets arranged in series. Is formed as a single continuous plate-like spring, and these are arranged in the upper and lower stages, so that a total of two can be configured. When the four-sheet configuration is used as in the present embodiment, there is an advantage that assembly is easy and accuracy is improved, and when the two-sheet configuration is used, the number of parts can be reduced and management is easy. There is.

  In the above-described embodiment, the control circuit is configured to adjust the phase of each periodic excitation force in the X, Y, and θ directions with reference to the phase of the periodic excitation force in the Z direction. As long as the phase difference between the periodic excitation force of each and the periodic excitation forces in the X, Y, and θ directions can be set to a predetermined value, the phase of the periodic excitation force in any direction is changed. You may comprise as follows.

  Other configurations can be variously modified without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 1 ... Work rotation conveying apparatus 4 ... Base | substrate 6 ... Movable stand 7 ... Excitation means 7a ... 1st horizontal excitation means 7a1-7a4 ... 1st horizontal excitation part 7b ... 2nd horizontal excitation means 7b1-7b4 2nd horizontal vibration unit 7c Vertical vibration means 9 Workpiece 31 Vibration control means 32 Vibration switching means 52 First spring member (bar spring member)
53. Second spring member (plate spring member)
61 ... Conveying surface 71 ... First piezoelectric element (piezoelectric element for horizontal excitation)
72 ... Second piezoelectric element (piezoelectric element for horizontal excitation)
73: Third piezoelectric element 74: Fourth piezoelectric element (piezoelectric element for rotational excitation)
S: Reference position

Claims (5)

A movable table having a conveying surface on which the workpiece is placed and elastically supported with respect to the substrate;
Vertical excitation means for applying a vertical periodic excitation force to the movable table;
A plurality of horizontal vibration units arranged opposite to each other with a reference position set on the movable table as a center, and a horizontal linear direction and rotation with respect to the movable table by cooperating the plurality of horizontal vibration units Horizontal excitation means for applying a periodic excitation force in the direction;
An operation command signal based on the input switching command is output, and a periodic excitation force by each of the excitation means is generated simultaneously at the same frequency while having a phase difference, and a three-dimensional vibration locus is generated on the movable table. Vibration control means for controlling each of the vibration means to cause generation;
An operation command signal switching command is output to the vibration control unit, and the direction of the periodic excitation force by the horizontal excitation unit is switched to a linear direction, a rotation direction, or a direction in which components of the linear direction and the rotation direction are mixed. a shall a vibration switching means,
The horizontal excitation unit is
A rod-like spring member extending in the vertical direction to directly or indirectly connect the base and the movable base and having both ends fixed;
A piezoelectric element pasted on either end side avoiding the longitudinal central portion on the side surface of the rod-shaped spring member;
These piezoelectric elements are cyclically stretched by applying a sine voltage from the vibration control means, and the rod-shaped spring member is deformed in a direction perpendicular to the side surface on which the piezoelectric elements are pasted, whereby periodic excitation is performed. A workpiece rotating and conveying apparatus configured to generate force . The horizontal oscillating unit is a horizontal piezo-electric element that generates a periodic oscillating force in a linear direction and is affixed to the same bar-shaped spring member, and a rotational oscillating force that generates a periodic oscillating force in a rotating direction The work rotation conveyance device according to claim 1 , further comprising: a piezoelectric element for use. In the case of generating a periodic excitation force in a direction in which the components of the linear direction and the rotation direction are mixed by the horizontal excitation means,
An operation command signal for applying a periodic vibration force in the linear direction to each piezoelectric element included in the horizontal vibration unit constituting the horizontal vibration means and a periodic vibration force in the rotation direction. The work rotation conveying apparatus according to claim 1 , wherein an operation command signal superimposed with the operation command signal is provided.   The vibration switching means is configured to switch each periodic excitation force by a horizontal excitation unit arranged opposite to each other across the reference position between the same phase and the opposite phase. Item 2. The work rotation conveyance device according to Item 1. The horizontal excitation unit is
A plurality of first horizontal vibration units that respectively apply a periodic vibration force in a first horizontal direction to the movable table;
A plurality of second horizontal excitation units each imparting a periodic excitation force in a second horizontal direction intersecting the first horizontal direction,
The horizontal vibration means
First horizontal excitation means comprising the plurality of first horizontal excitation units;
A second horizontal vibration means comprising the plurality of second horizontal vibration units,
The vibration control unit is configured to simultaneously generate the periodic excitation force by the first horizontal excitation unit and the periodic excitation force by the second horizontal excitation unit with a phase difference. The work rotation conveyance device according to claim 1 or 4 characterized by things.

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