JP5854398B2 - Scribing equipment - Google Patents

Description

  The present invention relates to a substrate made of a brittle material such as a glass substrate, a semiconductor wafer such as silicon (Si) or gallium nitride (GaN), or a low temperature co-fired ceramics (LTCC) substrate (hereinafter simply referred to as “substrate”). And a scribing device that rolls the rotary blade in a pressure contact state to form a crack in the substrate.

  The conventional scribing device is supported so as to be swingable around a fulcrum, and applies an arm swinging force to an arm having a cutter on one end side away from the fulcrum and a connecting bracket on the other end side of the arm. Therefore, when the distance from the fulcrum to the cutter is A, and the distance from the fulcrum to the connecting bracket is B, A <B is set. (See, for example, Patent Document 1).

JP 2009-196211 A

Since the conventional scribing device is set such that the distance from the fulcrum to the connecting bracket is larger than the distance from the fulcrum to the cutter, there is a problem that the size of the arm increases and the size of the device increases.
In addition, the conventional scribing device can suppress the generation of chips in the process of engraving the scribe line, but does not prevent the generation of chips, and when chips are generated, There is no means to remove this chip. For this reason, the conventional scribing apparatus has the subject that it cannot prevent the generation | occurrence | production of the inferior goods by the adhesion residue of the chip on the surface of the glass plate, and the fall of product quality.

  The present invention has been made in order to solve the above-described problems, and the load applied to the cutting edge of the rotary blade can be finely adjusted without increasing the size of the apparatus, and chips are generated in the scribing process. Even if it is a case, it aims at providing the scribing apparatus which can prevent adhesion of the chip to the surface of a board | substrate.

In the scribing apparatus according to the present invention, a cylindrical suction port portion that has an opening facing the substrate, and the blade edge of the rotary blade includes the rotary blade at a position exposed from the opening, and communicates with the suction port portion. , A decompression unit that makes the suction port negative, a pressure detection unit that detects the pressure inside the suction port, and a pressure control unit that adjusts the pressure inside the suction port based on the detection result of the pressure detection unit And a drive unit that changes the interval between the substrate and the suction port unit, an interval detection unit that detects an interval between the substrate and the suction port unit, and a drive unit that is driven based on the detection result of the interval detection unit, comprising a distance control unit for adjusting the spacing between the inlet portion, a pressure control unit, based on the control signal of the interval control unit, it is shall adjust the internal pressure of the suction opening.

  The disclosed scribing device has a load applied to the cutting edge of the rotary blade (gravity of the rotary blade, vertical drag that the rotary blade receives from the substrate, drag that the axis of the rotary blade receives from the contact portion, suction port, without increasing the size of the device. There is an effect that fine adjustment of the resultant force applied to the entire rotary blade such as buoyancy exerted by the gas flowing from the opening of the portion can be performed.

1 is a perspective view showing a schematic configuration of a scribing apparatus according to a first embodiment. It is explanatory drawing for demonstrating the position adjustment mechanism of the Z-axis direction of the scribe head shown in FIG. (A) is a front view which shows schematic structure of the suction inlet part shown in FIG. 1, (b) is sectional drawing of the suction inlet part shown in FIG. 3 (a), (c) is FIG. 3 (a). It is a bottom view of the suction inlet part shown in FIG. 3, (d) is sectional drawing which shows the state which removed the rotary blade from the suction inlet part shown in FIG.3 (b). (A) is a front view which shows the other schematic structure of the suction inlet part shown in FIG. 1, (b) is sectional drawing of the suction inlet part shown in FIG. 4 (a), (c) is FIG. It is a bottom view of the suction inlet part shown to a), (d) is the bottom view which formed the different groove | channel in the suction inlet part shown to Fig.4 (a). It is explanatory drawing for demonstrating the position adjustment mechanism of the Z-axis direction of the scribe head which concerns on 2nd Embodiment. (A) is sectional drawing which shows the state which removed the rotary blade from the suction inlet part which concerns on 3rd Embodiment, (b) is the axis | shaft of the rotary blade in the suction inlet part shown to FIG. It is sectional drawing which shows the state which exists in the upper end of this, (c) is sectional drawing which shows the state in which the axis | shaft of the rotary blade in the suction inlet part shown to Fig.6 (a) exists in the lower end of a long hole. It is explanatory drawing for demonstrating the position adjustment mechanism of the Z-axis direction of the scribe head which concerns on other embodiment.

(First embodiment of the present invention)
As shown in FIG. 1, the scribing device 100 can move in the Y-axis direction in the horizontal plane (XY plane), and can be rotated 90 degrees with respect to the Y-axis direction in the horizontal plane by a motor (not shown). The stage 20 and two CCD (charge-coupled device) cameras 30 that image the alignment mark (not shown) of the substrate 200 that is placed on the stage 20 and held on the stage 20 by a chuck for chucking (not shown). A support portion 41 that is disposed oppositely via the stage 20, a bridge portion 42 that is supported by the support portion 41 and extends across the stage 20 in the X-axis direction, and a motor 43 along the guide 44 in the X-axis direction. And a scribing head 10 disposed on the bridge portion 42 so as to be movable.

  As shown in FIGS. 2 and 3, the scribe head 10 has a plate-like base 11 attached to the bridge portion 42 and an opening 12a facing the substrate 200. The cutting edge 1a of the rotary blade 1 is the opening 12a. A cylindrical suction port portion 12 containing the rotary blade 1 at a position exposed from the top, and a base 11 slidably mounted in the vertical (Z-axis) direction via a rail 11a to hold the suction port portion 12 A holding member 13 that is held on the base 11 above the holding member 13 and connected to an electro-pneumatic regulator 50, which will be described later, and an air cylinder 14 that changes the interval between the substrate 200 and the suction port 12. Yes.

  In addition, as shown in FIG. 3, the suction inlet 12 according to the present embodiment includes a pair of opposed recesses 12b so that the rotary blade 1 can be pivotally supported at a position where the cutting edge 1a of the rotary blade 1 is exposed from the opening 12a. Is provided on the inner surface 12f, and the cylindrical pin 2 fitted in the recess 12b is passed through the through-hole 1b at the center of the rotary blade 1, thereby holding the rotary blade 1 rotatably. In addition, the suction port portion 12 is provided with a connection portion 12 c screwed into the end portion of the conduit 61 at the upper end, and communicates with the capturing portion 60 via the conduit 61.

  The recess 12b of the suction port 12 is a through hole instead of a bottomed hole, and after inserting the pin 2 of the rotary blade 1 into the through hole, the gap between the through hole and the pin 2 is sealed. It may be. With this configuration, the pin 2 can be inserted and removed from the suction port portion 12, and the replacement from the rotary blade 1 mounted on the suction port portion 12 to another rotary blade 1 can be facilitated.

  The capturing unit 60 is a mechanism that captures particles due to chipping (chipping, fiber) of the substrate 200 caused by rolling of the rotary blade 1, scraping of the blade edge 1 a, etc., and gas sucked from the suction port 12 through the conduit 61. However, a vortex is wound inside, and only heavy particles remain inside due to centrifugal force at this time, and only gas is discharged from the conduit 62.

  The capturing unit 60 according to the present embodiment has a hollow, substantially cylindrical shape, and a conduit 61 communicating with the suction port unit 12 is disposed along the side surface through the peripheral edge of one end surface (upper surface) 60a, and is vacuum. A conduit 62 communicating with a decompression device 70 such as a pump passes through the substantial center of the other end surface (bottom surface) 60b and is disposed along the longitudinal direction of the capturing portion 60 to the inside. That is, the decompression device 70 is communicated with the suction port 12 via the conduit 62, the capturing unit 60, and the conduit 61, and makes the pressure inside the suction port 12 negative with respect to the outside (suction port 12). Corresponds to the decompression section according to the present invention.

  In addition, a first pressure detection unit 81 such as a pressure sensor is disposed inside the capture unit 60, and the first pressure detection unit 81 detects the pressure inside the capture unit 60 (suction port 12). Then, the signal is transmitted to the first pressure control unit 82. Then, the first pressure control unit 82 is preset by controlling the decompression device 70 when there is a differential pressure between the input signal from the first pressure detection unit 81 and a preset signal. Adjust to pressure.

The electropneumatic regulator 50 adjusts the discharge and supply of the gas in the negative pressure port 52, and controls the pressure in the air cylinder 14 to a predetermined pressure.
In the present embodiment, an exhaust port 53 serving as an exhaust port and a supply port 54 communicating with a pressurizing device 90 such as a pump for increasing pressure are disposed at one end of the regulator body 51, and the negative pressure port 52 is disposed at the regulator body. 51 is disposed at the other end. Further, the regulator body 51 has a negative pressure port 52 communicating with the air cylinder 14 via a conduit 14a. The air cylinder 14 corresponds to a drive unit according to the present invention that changes the distance between the substrate 200 and the suction port 12, but if the distance between the substrate 200 and the suction port 12 can be changed, the air cylinder 14 It is not limited to the cylinder 14.

  The regulator main body 51 is provided with an exhaust solenoid valve 55 and a supply solenoid valve 56. The exhaust solenoid valve 55 switches between discharging and stopping the exhaust of the gas in the negative pressure port 52, and supplying the solenoid valve 56. Switches between gas supply into the negative pressure port 52 and air supply stop.

  The negative pressure port 52 is provided with a second pressure detection unit 57 such as a pressure sensor. The second pressure detection unit 57 detects the pressure inside the negative pressure port 52 (air cylinder 14), and The signal is transmitted to the second pressure control unit 58. Then, when there is a differential pressure between the input signal from the second pressure detection unit 57 and a preset signal, the second pressure control unit 58 uses the exhaust solenoid valve 55 and the supply solenoid valve 56. Control signal is transmitted to open and close the exhaust solenoid valve 55 and the supply solenoid valve 56.

  That is, when the pressure in the negative pressure port 52 is higher than the set value, the second pressure control unit 58 opens the exhaust solenoid valve 55 to allow the gas in the air cylinder 14 to flow through the negative pressure port 52. When the pressure in the negative pressure port 52 reaches the set value, the exhaust solenoid valve 55 is closed to stop the gas discharge. Further, the second pressure control unit 58 opens the supply electromagnetic valve 56 when the pressure in the negative pressure port 52 is lower than the set value, and the gas from the pressurizing device 90 is aired through the negative pressure port 52. When supplied to the cylinder 14 and the pressure in the negative pressure port 52 reaches a set value, the supply electromagnetic valve 56 is closed to stop the gas supply.

  The second pressure detection unit 57 corresponds to the interval detection unit according to the present invention that detects the interval between the substrate 200 and the suction port 12, but can detect the interval between the substrate 200 and the suction port 12. If it is, it is not restricted to a pressure sensor. Further, the second pressure control unit 58 drives the drive unit (air cylinder 14) based on the detection result of the interval detection unit (second pressure detection unit 57) to set the interval between the substrate 200 and the suction port unit 12. This corresponds to the interval control unit according to the present invention to be adjusted.

  Note that the scribing apparatus 100 according to the present embodiment closes the exhaust solenoid valve 55 and the supply solenoid valve 56 in the initial state. First, the second pressure control unit 58 is connected to the negative pressure port 52 (air cylinder). 14) The internal pressure is controlled to adjust the distance between the substrate 200 and the suction port 12. In the scribing apparatus 100, the second pressure control unit 58 transmits a control signal to the first pressure control unit 82, and the first pressure control unit 82 uses the control signal of the second pressure control unit 58. Based on this, the pressure in the trap 60 (suction port 12) is controlled to finely adjust the load applied to the cutting edge 1a of the rotary blade 1.

Next, the processing operation of the scribing apparatus 100 according to the present embodiment will be described.
First, the scribing apparatus 100 images an alignment mark (not shown) formed on the substrate 200 with the CCD camera 30 and adjusts the position of the substrate 200 in the horizontal plane (XY plane) with the stage 20.

  Then, the second pressure control unit 58 of the electropneumatic regulator 50 opens the supply solenoid valve 56 from the state where the exhaust solenoid valve 55 and the supply solenoid valve 56 are closed, and applies the pressure via the negative pressure port 52. Gas from the pressure device 90 is supplied to the air cylinder 14.

When the pressure inside the air cylinder 14 increases, the holding member 13 (suction port 12) is pushed by the piston 14b of the air cylinder 14 and moves downward along the rail 11a of the base 11.
The second pressure control unit 58 of the electropneumatic regulator 50 is such that the cutting edge 1a of the rotary blade 1 to which the suction port 12 is attached and the substrate 200 are in contact (the pressure in the negative pressure port 52 becomes a set value). Thus, the supply solenoid valve 56 is closed to stop the supply of gas to the air cylinder 14.

  Thereafter, the first pressure control unit 82 causes the gas in the suction port 12 to be sucked by the decompression device 70 via the capturing unit 60, and the load applied to the cutting edge 1a of the rotary blade 1 is a predetermined force (for example, no load). Or a low load equal to or less than the dead weight of the rotary blade 1) (the pressure in the capturing unit 60 becomes a set value), the amount of pressure reduction by the pressure reducing device 70 is adjusted.

  The scribing device 100 presses the cutting edge 1a of the rotary blade 1 attached to the scribing head 10 against the surface of the substrate 200 with a predetermined pressure by pressure control of the air cylinder 14 and negative pressure control of the suction port 12. Then, the surface of the substrate 200 is scribed along the X direction.

  In addition, the scribing apparatus 100 is configured such that particles generated by the scribing process are sucked from the opening 12a of the suction port portion 12 and enter the trapping portion 60 through the conduit 61 and remain inside the trapping portion 60. Prevents particles from sticking to the surface.

  Then, the scribing apparatus 100 moves the table at a predetermined pitch in the Y-axis direction, and when the scribing process in the X-axis direction at each position in the Y-axis direction is completed, the stage 20 is rotated 90 degrees to Similar to the operation in the axial direction, the surface of the substrate 200 is scribed along the Y-axis direction.

  When the table is moved at a predetermined pitch in the X-axis direction and the scribing process in the Y-axis direction at each position in the X-axis direction is finished, the first pressure control unit 82 stops the suction by the decompression device 70, The second pressure control unit 58 opens the exhaust solenoid valve 55 and discharges the gas in the air cylinder 14 from the exhaust port 53 via the negative pressure port 52.

  When the pressure inside the air cylinder 14 decreases, the holding member 13 (suction port 12) moves upward along the rail 11a of the base 11 following the rise of the piston 14b of the air cylinder 14, and the rotary blade 1 The cutting edge 1a and the substrate 200 are not in contact with each other, and the processing of the scribing apparatus 100 is finished.

  As described above, the scribing apparatus 100 according to the present embodiment can finely adjust the load applied to the cutting edge 1a of the rotary blade 1 by controlling the negative pressure of the suction port portion 12, and according to the specifications of the substrate 200. There is an effect that scribe processing can be performed by the scribe pressure.

  Further, the scribing apparatus 100 according to the present embodiment can prevent adhesion of particles to the surface of the substrate 200 even when particles are generated in the scribing process due to suction from the suction port portion 12. Has an effect.

  In addition, as shown in FIG.3 (b), the suction inlet part 12 which concerns on this embodiment provides the space where the rotary blade 1 does not exist in the back (left side of a paper surface) side with respect to a scribe direction, The particles generated by rolling are easily sucked up behind, but the outer shape is not limited as long as the particles can be sucked.

Further, as shown in FIG. 4, the suction port portion 12 has a plurality of grooves 12e whose bottom portion constituting the opening 12a of the suction port portion 12 is recessed in the bottom surface 12d. A shape in which the direction of each groove 12e is aligned clockwise (see FIG. 4C) or counterclockwise (see FIG. 4D) around 1 may be used. With this shape, the gas flowing from each groove 12e of the suction port portion 12 can be swirled inside the suction port portion 12 to increase the force of sucking up particles.
Further, the suction port portion 12 is provided with a spiral projection (not shown) on the inner surface 12f from the opening 12a side to the connection portion 12c side, and the gas flowing from the opening 12a of the suction port portion 12 follows the spiral projection. Thus, it is possible to increase the force of vortexing inside the suction port portion 12 and sucking up particles.

(Second embodiment of the present invention)
FIG. 5 is an explanatory diagram for explaining a position adjustment mechanism in the Z-axis direction of the scribe head according to the second embodiment. 5, the same reference numerals as those in FIG. 2 denote the same or corresponding parts, and the description thereof is omitted.

  The second pressure control unit 58 according to the present embodiment readjusts the pressure inside the air cylinder 14 based on the control signal of the first pressure control unit 82.

  In the second embodiment, only the second pressure control unit 58 re-adjusts the pressure inside the air cylinder 14 based on the control signal of the first pressure control unit 82. This embodiment is different from the embodiment, and exhibits the same operations and effects as those of the first embodiment except for the operations and effects obtained by readjusting the pressure inside the air cylinder 14.

  In the scribing apparatus 100 according to the present embodiment, the substrate 200 and the suction port 12 are controlled by controlling the air cylinder 14 in addition to the negative pressure control of the suction port 12 by the first pressure control unit 82 (decompression device 70). The interval between them is variable, and the load applied to the blade edge 1a of the rotary blade 1 is adjusted.

  That is, when the control signal from the first pressure control unit 82 is input, the second pressure control unit 58 opens the exhaust electromagnetic valve 55 and discharges the gas inside the air cylinder 14. The pressure in 14 is reduced. Thereby, piston 14b raises, the pressing force which the blade edge | tip 1a of the rotary blade 1 applies to the board | substrate 200 is decreased, and the reaction force which the blade edge | tip 1a of the rotary blade 1 receives from the board | substrate 200 is reduced.

  In addition, widening the space | interval between the board | substrate 200 and the suction inlet part 12 will raise the pressure in the suction inlet part 12 if the pressure reduction amount by the decompression device 70 is constant, and the 2nd pressure control part 58 ( The negative pressure of the suction port 12 can also be controlled by the air cylinder 14).

  As described above, the scribing apparatus 100 according to the present embodiment controls the distance between the substrate 200 and the suction port 12 and the negative pressure of the suction port 12 to finely adjust the load applied to the cutting edge 1a of the rotary blade 1. Thus, there is an effect that scribing can be performed with a scribing pressure according to the specifications of the substrate 200.

  In particular, the scribing device 100 according to the present embodiment can reduce the load applied to the cutting edge 1a of the rotary blade 1 to no load or a low load equal to or less than the dead weight of the rotary blade 1, and a light emitting diode (LED). There is an effect that it is possible to deal with a substrate 200 made of a brittle material substrate having a very thin plate thickness such as a substrate or a very fragile brittle material substrate.

(Third embodiment of the present invention)
FIG. 6A is a cross-sectional view showing a state where the rotary blade of the suction port portion according to the third embodiment is removed, and FIG. 6B is a view of the rotary blade in the suction port portion shown in FIG. FIG. 6C is a cross-sectional view showing a state where the shaft of the rotary blade in the suction port portion shown in FIG. 6A is at the lower end of the long hole. is there. 6, the same reference numerals as those in FIGS. 3 and 4 denote the same or corresponding parts, and the description thereof is omitted.

  As shown in FIG. 6, the suction port portion 12 according to the present embodiment has a pair of opposed elongated holes 12 g on the inner side surface 12 f, and the rotary blade 1 (pin 2) is perpendicular to the substrate 200 (Z It is pivotally supported by the long hole 12g so as to be slidable in the (axis) direction.

  In the third embodiment, only the recess 12b of the suction port portion 12 is a long hole 12g, which is different from the first embodiment or the second embodiment. Except for the effects, the same operational effects as those of the first embodiment or the second embodiment are obtained.

  Since the scribing device 100 according to the present embodiment has play at the axial support position of the rotary blade 1 in the vertical direction due to the long hole 12g, it becomes easy to balance the resultant force applied to the entire rotary blade 1. There exists an effect that the load concerning 1 blade edge | tip 1a can be made no load.

  In addition, the scribing device 100 according to the present embodiment allows the rotary blade 1 and the substrate 200 to be moved up and down by the air cylinder 14 within the length range of the long hole 12g. Can always be in contact with each other and scribe processing can be performed, and the pressure in the suction port portion 12 can be adjusted in a state where the amount of decompression of the decompression device 70 is constant.

(Other embodiments of the present invention)
FIG. 7 is an explanatory diagram for explaining a position adjustment mechanism in the Z-axis direction of a scribe head according to another embodiment. 7, the same reference numerals as those in FIG. 2 denote the same or corresponding parts, and the description thereof is omitted.

  In the scribing apparatus 100 according to the first to third embodiments, the air cylinder 14 adjusts the position of the suction port 12 in the Z-axis direction with respect to the substrate 200 in the initial state. However, if the positioning of the suction port 12 with respect to the substrate 200 in the Z-axis direction is set in the initial state, as shown in FIG. 7, the air cylinder 14, the electropneumatic regulator 50, the pressurizing device 90, and the base 11 is not required to be provided in the scribing device 100, and the first pressure control unit 82 controls the pressure in the capturing unit 60 (suction port 12), and the load applied to the cutting edge 1a of the rotary blade 1 It may be a configuration that only finely adjusts.

DESCRIPTION OF SYMBOLS 1 Rotating blade 1a Cutting edge 1b Through hole 2 Pin 10 Scribe head 11 Base 11a Rail 12 Suction port 12a Open 12b Recess 12c Connection 12d Bottom 12e Groove 12f Inner side 12g Slot 13 Holding member 14 Air cylinder 14a Conduit 14b Piston 14b Stage 30 CCD camera 41 Support section 42 Bridge section 43 Motor 44 Guide 50 Electropneumatic regulator 51 Regulator body 52 Negative pressure port 53 Exhaust port 54 Supply port 55 Exhaust solenoid valve 56 Supply solenoid valve 57 Second pressure detector 58 First 2 pressure control unit 60 capturing unit 60a one end surface 60b other end surface 61 conduit 62 conduit 70 pressure reducing device 81 first pressure detecting unit 82 first pressure control unit 90 pressurizing device 100 scribe device 200 substrate

Claims (3)

In a scribing device that rolls a rotary blade against a substrate in a pressure contact state and forms a crack on the substrate,
A cylindrical suction port portion that includes an opening facing the substrate and includes the rotary blade at a position where the blade edge of the rotary blade is exposed from the opening;
A pressure reducing portion that communicates with the suction port portion and makes the suction port portion a negative pressure;
A pressure detector for detecting the pressure inside the suction port,
A pressure controller that adjusts the pressure inside the suction port based on the detection result of the pressure detector; and
A drive unit that changes a distance between the substrate and the suction port; and
An interval detector for detecting an interval between the substrate and the suction port; and
Based on the detection result of the interval detection unit, the interval control unit that adjusts the interval between the substrate and the suction port unit by driving the drive unit;
Equipped with a,
Scribing apparatus wherein the pressure control unit, which based on the control signal of the interval control unit, characterized that you adjust the pressure inside of the suction opening. In the scribing apparatus according to claim 1,
The suction port portion has a pair of opposed elongated holes on the inner surface,
The scribing apparatus , wherein the rotary blade is pivotally supported by the elongated hole so as to be slidable in a vertical direction with respect to the substrate . In the scribing device according to claim 1 or 2,
The bottom part constituting the opening of the suction port part has a plurality of grooves recessed in the bottom surface,
The plurality of grooves align the direction of each groove clockwise or counterclockwise around the rotary blade
Scribing apparatus characterized by comprising Te.

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