JP5872989B2 - Ceramic member, semiconductor manufacturing apparatus member using the same, and marking method - Google Patents

Description

  The present invention relates to a ceramic member having characters and figures stamped on its surface, a member for a semiconductor manufacturing apparatus using the ceramic member, and a marking method.

  Conventionally, identifiers such as company names, logo marks, and manufacturing numbers have been provided on the surface of ceramic products, and methods such as printing using ink and printing on transfer paper have been used as methods for providing these identifiers. It was. However, characters and figures provided on the surface of ceramic products by printing or printing on transfer paper may cause the printing surface to be rubbed many times and the ink will peel off, or the ink may deteriorate after a long period of time. This makes it difficult to read characters and figures and makes reading difficult.

  To deal with this problem, a concave part that is shaped like a character or figure is formed on the surface of the ceramic product, and the contrast between the bottom surface of the concave part and the surface of the ceramic product is used to make an There has been proposed a method for recognizing characters and figures. For example, in Patent Document 1, a laser beam is continuously irradiated to the same portion of the surface of the ceramic material a plurality of times, the surface of the ceramic material is thermally deformed, a concave portion deeper than the uneven surface of the surface is formed, and a marking shape is formed. Proposed a method to form characters and figures with contrast, with the laser beam or ceramic material moving along the surface to form deep recesses in order, making the deep recesses a dark pattern and the uneven surface of the surface bright. Has been.

JP 2004-66299 A

  However, in the method proposed in Patent Document 1, when the area of the concave portion that represents a character or a figure is increased to make it clearer, the dark pattern of the concave portion and the ceramic material are reflected by the light reflected by the bottom surface of the concave portion. There is a problem that the contrast with the bright pattern on the surface of the sheet becomes small, making it difficult to read when recognizing characters or figures.

  The present invention has been devised to solve the above-described problems, and an object thereof is to provide a ceramic member provided with an identifier that can be easily read and a member for a semiconductor manufacturing apparatus using the ceramic member.

Ceramic member of the present invention, the surface of the ceramic sintered body, as a group a plurality of marking lines provided adjacent, and an identifier that is formed by the combination of one group or multiple groups are provided, wherein The ceramic sintered body is a white ceramic made of at least one of alumina, yttria, zirconia, cordierite, mullite, and forsterite, or a joined body thereof, and the interval between the adjacent marking lines in the group is the The length is 1.5 to 4 times the width of the marking line .

  A member for a semiconductor manufacturing apparatus according to the present invention is characterized by using the ceramic member.

  Moreover, the marking method of this invention has the process of providing the identifier which consists of one group in parallel with a marking line on the surface of a ceramic sintered compact at fixed intervals.

  Further, the marking method of the present invention is a marking method including a step of providing an identifier having a plurality of groups formed by arranging inscribed lines in parallel at a constant interval on the surface of the ceramic sintered body, , Repeating the step of forming one group by forming a group in parallel at a constant interval, and providing an identifier having a plurality of groups formed by arranging the marking lines in parallel at a constant interval, or a plurality of groups Repeating the step of sequentially forming the marking lines forming the plurality of groups, and providing a identifier having a plurality of groups formed by arranging the marking lines in parallel at a constant interval. .

According to the ceramic member of the present invention, the surface of the ceramic sintered body, as a group a plurality of marking lines provided adjacent, and an identifier that is formed by the combination of one group or multiple groups are provided The ceramic sintered body is a white ceramic made of at least one of alumina, yttria, zirconia, cordierite, mullite, and forsterite, or a joined body thereof, and the interval between adjacent marking lines in the group is imprinted. Compared to the case where an identifier formed by a combination of a single marking line is provided, the length of the marking line is more than 1.5 to 4 times the width of the line. The contrast between the dark pattern due to the reflected light on the bottom surface and the bright pattern due to the reflected light on the surface of the ceramic component can be increased, making it easy to read the identifier It can be.

  Moreover, according to the member for a semiconductor manufacturing apparatus of the present invention, since the ceramic member containing the Group 3 element of the periodic table is used, it has higher corrosion resistance and can easily read the identifier.

  In addition, according to the marking method of the present invention, since the method includes the step of forming the marking lines in parallel at regular intervals on the surface of the ceramic sintered body and providing the identifier consisting of one group, the identifier with improved reading accuracy. Can be easily manufactured.

  Further, according to the marking method of the present invention, the marking method includes a step of providing an identifier having a plurality of groups formed by parallelly imprinting marking lines on the surface of the ceramic sintered body, The step is a step of providing an identifier having a plurality of groups formed by parallelly forming engraved lines at a constant interval by repeating a step of forming a group by forming the groups in parallel at a constant interval, or a plurality of steps The process of repeating the step of sequentially forming the marking lines forming the groups of the plurality of groups in order to provide an identifier having a plurality of groups formed by arranging the marking lines in parallel at a constant interval, so that the reading accuracy is provided. It is possible to easily create an improved identifier.

(A) is a schematic diagram which shows an example of the ceramic member of this embodiment, (b) is the A section enlarged schematic diagram of (a). (A), (b) is a schematic diagram which shows another example of the ceramic member of this embodiment.

  Fig.1 (a) is a schematic diagram which shows an example of the ceramic member of this embodiment, (b) is the A section enlarged schematic diagram of (a).

  In the ceramic member 1a of the present embodiment, the identifier 4 formed by a combination of the groups 41 and 42 is provided on the surface of the ceramic sintered body 2 with a plurality of adjacent marking lines 3 as the groups 41 and 42. It has been. In other words, on the surface of the ceramic sintered body 2, “12” which is an identifier 4 formed by a combination of two groups 41 and 42 of “1” and “2” consisting of three marking lines 3 arranged in parallel. Is provided.

In addition, as shown in FIG. 1B, the group 41 (“1”) forming the identifier 4 (“12”) provided on the surface of the sintered body 2 has a marking line 3 having a width W with an interval L. There are three in parallel. Here, the marking line 3 is composed of, for example, a plurality of laser marks, processing marks such as etching and grinding. The width W is a value obtained by measuring the widths of at least five locations of the marking line 3 and averaging them, and the interval L is a value obtained by measuring at least five intervals between the adjacent marking lines 3 and averaging them. is there. The width W and the interval L are photographed by enlarging the identifier 4 using a metal microscope capable of taking a photograph, and the interval L between the adjacent marking line 3 and the width W of the marking line 3 is measured. The measured value can be calculated by dividing by the magnification of the metallurgical microscope.

  In the ceramic member 1a of this embodiment, an identifier formed by a combination of the groups 41 and 42 is provided on the surface of the ceramic sintered body 2 with the plurality of adjacent marking lines 3 as the groups 41 and 42. Therefore, compared to a conventional ceramic member provided with an identifier formed by a combination of one marking line, in the groups 41 and 42 forming the identifier 4, the reflected light from the bottom surface of the plurality of marking lines 3 The contrast between the dark pattern and the bright pattern by the reflected light on the surface of the ceramic component 1a is increased, and the identifier 4 can be easily read by visual observation or using a reading device.

  The ceramic member 1a of the present embodiment is preferably provided with irregularities 50 along the outer shape of the marking line 3 when the marking line 3 provided on the surface of the ceramic sintered body 2 is viewed in plan. is there. In addition, the unevenness | corrugation 50a of FIG. 1 has shown the recessed part of the external shape of the marking line 3, and the unevenness | corrugation 50b has shown the convex part. In such a configuration, the contour line of the marking line 3 is easily clarified by the shading of the unevenness 50, and the identifier 4 can be read more easily by visual observation or using a reading device.

  2A and 2B are schematic views showing another example of the ceramic member of the present embodiment.

  The ceramic member 1b shown in FIG. 2 (a) combines a plurality of marking lines 3 to form groups 41 and 42 so as to form one symbol constituting the identifier 4, and a combination of these groups 41 and 42. The identifier 4 is provided.

  In the ceramic member 1c shown in FIG. 2B, one area in which the plurality of marking lines 3 are not provided in the peripheral area of the area indicating the identifier 4 is left in the area indicating the identifier 4, As shown by a symbol, a plurality of marking lines 3 are combined to form groups 41 and 42, and an identifier 4 is provided by a combination of these groups 41 and 42.

  In the ceramic members 1a to 1c, when the identifier 4 can be formed by only one group, for example, when the identifier 4 is “1”, the plurality of marking lines 3 are identified by only the group 41 (“1”). Therefore, it is not necessary to form the identifier 4 by combining a plurality of groups. That is, the ceramic members 1a to 1c of the present embodiment need only be provided with the identifier 4 formed by one group or a combination of a plurality of groups. Further, the identifier 4 may be a symbol, a character, a figure, or a combination thereof in addition to numbers.

  Further, one symbol constituting the identifier 4 can be provided by combining a plurality of groups each made of a plurality of marking lines 3. If one symbol constituting the identifier 4 is a symbol that can be indicated with a single stroke, such as “1” and “2” above, one symbol can be formed as one group. For example, if the symbol cannot be shown with a single stroke, such as the letter X, one symbol may be formed by combining a group of a plurality of marking lines 3.

Here, as for ceramic member 1a-1c of this embodiment, it is preferable that the space | interval L of the adjacent marking line 3 is 0.8 to 4 times the width W of the marking line 3. FIG. By setting the interval L between the adjacent marking lines 3 within the above range, the intervals L between the plurality of marking lines 3 can be sufficiently secured, so that the unmarked portion 5 between the marking lines 3 can be prevented from being damaged. Since the contrast between the dark pattern due to the reflected light on the bottom surface of the marking line 3 and the bright pattern due to the reflected light on the surface of the ceramic member is further optimized, the identification 4 can be confirmed and read more easily. Furthermore, since it is possible to suppress the interval L between the adjacent marking lines 3 from becoming too large with respect to the width W of the marking line 3, even if there are a plurality of marking lines 3, a set of the plurality of marking lines 3 is specified. It can be identified as a group 41, 42 showing an image. Here, when the width W of the marking line 3 is, for example, 10 μm to 100 μm, the images indicated by the groups 41 and 42 tend to be clear. In particular, when the interval L is 1.5 to 4 times the width W of the marking line 3, it tends to be easily identified that the set of the plurality of marking lines 3 is a group 41 or 42 showing a specific image. . In addition, the depth of the marking line may be set as appropriate according to the thickness of the ceramic member 2 as 3 μm or less when the width W is 10 μm to 100 μm, for example.

  Moreover, it is preferable that the ceramic sintered compact 2 of the ceramic members 1a-1c of this embodiment contains a periodic table group 3 element. Note that the Group 3 elements of the periodic table are, for example, Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Ac, Th. , Pa, U, Np, Pu, Am, Cm, Bk, Cf, Es, Fm, Md, No, and Lr.

  The ceramic sintered body 2 containing the Group 3 element of the periodic table has a high melting point of oxides, fluorides and chlorides of the Group 3 element of the periodic table, and can enhance the corrosion resistance of the ceramic members 1a to 1c. . Thus, ceramic member 1a-1c with high corrosion resistance can be used suitably for a semiconductor manufacturing apparatus etc., for example.

  Here, the semiconductor manufacturing apparatus member using the ceramic members 1a to 1c containing the Group 3 element of the periodic table has high corrosion resistance, and can easily check and read the identifier 4 using visual observation or a reading device. . Therefore, even if the semiconductor manufacturing apparatus member of the present embodiment is exposed to plasma or the like in the semiconductor manufacturing process, the identifier 4 can be read for a long period of time using visual inspection or a reading apparatus. Examples of the member for a semiconductor manufacturing apparatus include an inner wall material (chamber), a microwave introduction window, a shower head, a focus ring, a shield ring, and the like, but it goes without saying that it is not limited to these examples. . In addition, the ceramic members 1a to 1c of the present embodiment can be used for liquid crystal manufacturing apparatus members and the like in addition to semiconductor manufacturing apparatus members.

Moreover, as content of the periodic table 3 group element of ceramic member 1a-1c of this embodiment, when the total mass of the ceramic sintered compact 2 used as a base material of ceramic member 1a-1c is 100 mass% The content is preferably 0.5% by mass or more and 30% by mass or less. If the content of the group 3 element of the periodic table is within the above range, the corrosion resistance can be kept higher, and the workability of the ceramic member 2 tends to be ensured to such an extent that the identifier 4 can be easily recognized visually or by various reading devices. .

  In addition, the ceramic members 1a to 1c of the present embodiment have a plurality of marking lines 3 when the ceramic sintered body 2 having a lightness index L * of 50 or more in the CIE 1976 L * a * b * color space on the surface is used as a base material. Since the contrast between the dark pattern due to the reflected light on the bottom surface of the light and the bright pattern due to the reflected light on the surfaces of the ceramic members 1a to 1c can be increased, the identifier 4 can be read more easily using visual observation or a reading device.

  In addition, about the lightness index L * of the ceramic sintered body 2 used as a base material of the ceramic members 1a to 1c, the lightness index L * in the CIE1976L * a * b * color space of the surface is based on JIS Z 8722-2000. , And the chromaticness index a * and b * can be measured simultaneously.

  Moreover, as a material of the ceramic sintered compact 2 applicable as a base material of the ceramic members 1a-1c of this embodiment, among alumina, yttria, zirconia, cordierite, mullite, forsterite, silicon nitride, and silicon carbide At least one or a complex thereof can be used. Among these, white ceramics made of at least one of alumina, yttria, zirconia, cordierite, mullite and forsterite having a high lightness index L * of 50 or more or a composite thereof is particularly preferable.

  Next, as an example of the manufacturing method of the present embodiment, a case where the ceramic member 1a shown in FIG. 1A is manufactured using the ceramic sintered body 2 as an alumina sintered body will be described.

First, a commercially available primary alumina material is 100% by mass, a sintering aid made of oxides of Ca, Si and Mg is 0.5 to 5% by mass, a binder such as PVA is 1 to 1.5% by mass, and a solvent is 100 to 200% by mass. % And an appropriate amount in the range of 0.1 to 1% by mass of the dispersing agent, put into a container of a stirrer and mixed and stirred to form a slurry, which is then granulated by spray drying granulation (spray drying) method, A secondary raw material is used. Then, the secondary material is molded by an isostatic press molding (rubber press molding) method or a powder press molding method, and is subjected to a cutting process as necessary. Bake at the firing temperature. After firing, final finishing is performed by grinding to obtain a ceramic sintered body 2 used as a base material of the ceramic member 1a of the present embodiment.

  Next, an identifier 4 (numeral “12”) composed of groups 41 and 42 provided with three marking lines 3 adjacent to each other is formed on the surface of the obtained ceramic sintered body 2.

  Here, when a plurality of marking lines provided adjacent to each other is provided as a group on the surface of the ceramic sintered body 2 and an identifier is provided as one group (for example, the group 41 is provided alone on the surface of the ceramic sintered body). In the case where only the identifier “1” is provided), a marking method (hereinafter referred to as marking method X) in which the marking lines 3 are arranged in parallel at regular intervals to form the group 41 may be used.

In the case where an identifier is provided by combining a plurality of marking lines provided adjacent to the surface of the ceramic sintered body 2 as a group (for example, the groups 41 and 42 are provided on the surface of the ceramic sintered body). When the identifier “12” is provided), the surface of the ceramic sintered body is formed in parallel at regular intervals to form one group 41, which is repeated to form a plurality of groups (groups). marking method of forming a 41 (hereinafter, referred to as marking method Y _1.), or more consisting of engraved lines having a plurality of groups identifiers (e.g., "12") in the case of forming a first stamped "1" By repeating the process of forming one or more lines, subsequently forming one or more “2” marking lines, and then forming one or more “1” marking lines, Mark forming the group (group) 41, 42 Grayed method (hereinafter, referred to as marking method Y _2.) Is preferably used.

In the marking methods X and Y (Y ₁ , Y ₂ ), there are the following methods A to D as methods for forming the marking line 3 on the surface of the ceramic sintered body 2.
A. A method of forming a marking line 3 by a set of laser marks that are deformed at a high temperature by irradiating the surface of the ceramic sintered body 2 with a laser beam.
B. A method of forming a stamped line 3 by etching a specific surface of the ceramic sintered body 2 with a soluble agent.
C. A method of forming a marking line 3 by finely grinding the surface of the ceramic sintered body 2 with various grinding machines to which a diamond tool is attached.
D. A method of forming a marking line 3 by forming a concave portion to be a marking line 3 by fine cutting in advance on the surface of the ceramic molded body obtained through the molding step and firing it.

Among the methods A to D described above, the method using the laser beam A is most easily controlled with the highest precision in the width and interval of the marking lines 3 and efficiently sets the plurality of marking lines 3 as groups 41 and 42. An identifier 4 composed of 41 and 42 can be formed, and is particularly useful as a manufacturing method of the present embodiment.

  Further, when a laser beam is used, when the marking line 3 is formed, the unevenness 50 can be easily formed along the outer shape of the marking line 3. Specifically, by appropriately adjusting the frequency, pulse width, scan speed, etc. of the laser beam, it is possible to leave a laser mark when forming the marking line 3, and the unevenness 50 can be easily formed by the laser mark. .

The marking method Y (Y ₁ , Y ₂ ) using the laser beam A will be specifically described below.

First, the case where the identifier 4 (“12”) is formed by the marking method Y ₁ will be described.

Procedure 1: A commercially available laser irradiation apparatus is prepared. Various lasers such as YAG laser, CO ₂ laser, excimer laser, carbon dioxide laser, and fiber laser can be used as applicable laser types, but they can be made compact and are widely used for laser marking. It is preferable to use a Nd: YVO ₄ laser or a Yb fiber laser. And the ceramic sintered compact 2 is mounted in the predetermined position directly under the laser irradiation part of a commercially available laser irradiation apparatus, and the laser irradiation part which draws the character and the number previously input into the laser irradiation apparatus by predetermined magnitude | size Using the movable program, the numeral “1” shown in FIG. 1 is first imprinted on the surface of the ceramic sintered body 2 with one imprint line 3. The width W and the depth of the marking line 3 can be appropriately set by adjusting the laser output of the apparatus and the distance from the laser irradiation part to the irradiation surface.

  Procedure 2: The head portion of the laser irradiation apparatus is shifted by an interval L between adjacent marking lines 3 shown in FIG. 1B, and the second marking line 3 is ceramic sintered body under the same conditions as the first marking line 3. 2 Mark on the surface. Since the laser irradiation device is attached with a controller that can manually adjust the laser irradiation part in the order of microns so that the identifier 4 consisting of fine characters and figures can be formed, the interval L between the marking lines 3 is several microns. Even if it exists, it is possible to implement the adjustment which shifts a laser irradiation part manually according to it. Then, the group 41 (“1”) can be provided on the surface of the ceramic sintered body 2 by imprinting the third marking line 3 on the surface of the ceramic sintered body 2 by the same method as the first and second. it can. Note that the size of the marking line 3 (“1”) to be stamped after the second line may be enlarged or reduced depending on the shape of the marking line 3 to be stamped to be similar to the first marking line 3. .

  Step 3: Set the character to be engraved with the laser irradiation device to “2”, and leave steps 1 and 2 apart from the group 41 (“1”) provided on the surface of the ceramic sintered body 2. By repeating, the group 42 (“2”) can be provided on the surface of the ceramic sintered body 2.

  As described above, by sequentially performing steps 1 to 3, a plurality of marking lines 3 provided adjacent to each other as shown in FIG. 1A are defined as groups 41 and 42, and a plurality of groups 41 and 42 (“1”, “2” ]) And the ceramic member 1a of the present embodiment having the identifier 4 ("12") formed on the surface of the ceramic sintered body 2 can be manufactured.

  Here, when the marking method X is used and the identifier is provided as one group on the surface of the ceramic sintered body 2 by using a plurality of adjacent marking lines as a group, steps 1 to 1 of the marking method Y are used. 2 may be performed sequentially.

Next, the case where the identifier 4 (“12”) is formed by the marking method Y ₂ will be described.

Step 1: Prepare a similar commercially available laser irradiation device and a description of the marking process Y _1. And the ceramic sintered compact 2 is mounted in the predetermined position directly under the laser irradiation part of a commercially available laser irradiation apparatus, and the laser irradiation part which draws the character and the number previously input into the laser irradiation apparatus by predetermined magnitude | size Using the movable program, the numeral “1” shown in FIG. 1 is first imprinted on the surface of the ceramic sintered body 2 with one imprint line 3.

  Procedure 2: Subsequently, the head portion of the laser irradiation apparatus is shifted by a predetermined interval, and the numeral “2” shown in FIG. 1 is first imprinted on the surface of the ceramic sintered body 2 with one marking line 3.

  Step 3: The head portion of the laser irradiation apparatus is shifted by an interval L from the marking line 3 of “1” produced in Step 1, and the second marking line 3 is sintered into the ceramic under the same conditions as the first marking line 3. 2 Mark on the surface.

  Step 4: The head portion of the laser irradiation apparatus is shifted by an interval L from the marking line 3 of “2” produced in step 2, and the second marking line 3 is ceramic sintered body under the same conditions as the first marking line 3. 2 Mark on the surface.

  Step 5: Repeat Step 3 and Step 4.

  As described above, by sequentially performing the steps 1 to 5, the plurality of marking lines 3 provided adjacent to each other as shown in FIG. 1A are set as the groups 41 and 42, and a plurality of groups 41 and 42 (“1”, “2” ]) And the ceramic member 1a of the present embodiment having the identifier 4 ("12") formed on the surface of the ceramic sintered body 2 can be manufactured.

In the marking methods X and Y (Y ₁ , Y ₂ ), the groups 41 and 42 constituting the identifier 4 are not limited to a shape in which a plurality of marking lines 3 are laterally shifted, and for example, marking lines 3 may be provided with an oblique shift, or the marking line 3 may be provided with a shift in the vertical direction, and the position of the laser irradiation unit may be appropriately adjusted according to the shape of the identifier 4. .

Further, by using the marking methods X and Y (Y ₁ , Y ₂ ), the identifier 4 with improved reading accuracy can be easily produced.

  Examples of the present invention are shown below.

  On the surface of the alumina sintered body, an identifier 4 consisting of three marking lines 3 arranged in parallel and an identifier consisting of one marking line as a comparative example are formed. A test was conducted to determine whether or not is easy to read.

First, a commercially available primary alumina material is purchased, and the primary raw material is taken as 100% by mass. Ca, Si and Mg, which are sintering aids, are 1% in total in terms of oxides, and 1.5% by mass of a binder such as PVA. Then, 100% by mass of the solvent and 0.2% by mass of the dispersant were weighed, put into a ball mill using alumina balls, mixed to make a slurry, and the slurry discharged from the ball mill was put into a spray drying granulator (spray dryer) The resulting mixture was granulated by a spray-drying granulation method and used as a secondary raw material. This secondary material was put into a predetermined rubber mold, and the mold was sealed and molded into a predetermined shape using an isostatic press molding apparatus (rubber press apparatus). Thereafter, the produced compact is cut into a predetermined size and sintered at a temperature of 1600 ° C. in an oxidizing atmosphere in a firing furnace to sinter alumina having a length and width of 20 mm and a thickness of 5 mm used as a base material for a ceramic member. Got the body.

Next, on the surface of the alumina sintered body 2 obtained by the above manufacturing method, a laser irradiation device (S
A number “1234” was formed as an identifier 4 consisting of three marking lines 3 arranged in parallel under the conditions of a laser output of 60 W and a scanning speed of 3 mm / s using LP-V10 manufactured by UNX. Here, in each numeral of the identifier 4, the width W of one marking line 3 is 30 μm, the interval L between the adjacent marking lines 3 is 55 μm, and the marking depth is 5 μm. Further, the size of each number of the identifier 4 is set to 8 points in the font size (hereinafter simply referred to as font size) defined in the Japanese Industrial Standard Z8305.

In addition, a laser irradiation device (LP-V10 made by SUNX) is used with a number “1234” as an identifier consisting of one marking line, with a space below the identifier 4 consisting of three marking lines 3 arranged in parallel. Formed. Here, the width of one marking line was 200 μm, and the marking depth was 5 μm. The font size of the identifier numbers is 8 points.

  Next, an alumina sintered body provided with an identifier 4 composed of three marking lines 3 arranged in parallel and an identifier composed of one marking line as a comparative example is placed on a desk, and the alumina sintered body is moved upward. Visual observation from the position of 30 cm allowed the subject to determine which of the identifier 4 consisting of three marking lines 3 in parallel and the identifier consisting of one marking line is easier to read the number “1234”. In addition, confirmation of the identifier by the test subject was performed in the same environment.

  As a result, all 10 subjects answered that the identifier 4 consisting of three marking lines 3 in parallel was easier to see than the identifier consisting of one marking line.

  Next, a sample in which an identifier 4 (identifier: “1234”) composed of three marking lines 3 having a width W and a spacing L shown in Table 1 was formed on the surface of an alumina sintered body produced in the same manner as in Example 1. No. 1 to 24 were prepared, and a test was conducted in which 10 subjects evaluated the readability of each sample in four stages. The method for forming the identifier 4 was the same as in Example 1. The readability of the identifier 4 is determined by the subject in four stages: “1: very easy to read”, “2: easy to read”, “3: difficult to read”, “4: very difficult to read”, The results are shown in Table 1.

  Further, as Comparative Examples, Comparative Examples 1 to 4 were prepared in which an identifier made of one marking line was provided as a width W shown in Table 1 on the surface of an alumina sintered body produced in the same manner as in Example 1. It should be noted that the method for forming an identifier consisting of a single marking line was the same as in Example 1.

  And sample no. A test was conducted in which 10 subjects who evaluated 1 to 24 evaluated the readability of Comparative Examples 1 to 4 in the above four stages, and the total number of people evaluated by each evaluation was calculated. The results are shown in Table 1.

  From the results of Table 1, Comparative Examples 1 to 4 consisting of one stamped line formed the identifier 4 consisting of three stamped lines 3 whereas all the subjects evaluated “very difficult to read”. Sample No. Nos. 1 to 24 are samples Nos. 1 to 24 in which at least one subject evaluated “very easy to read” or “easy to read”, and the identifier 4 formed by the three stamped lines 3 was formed. It can be seen that the identifier 4 is easier to read than the comparative examples 1 to 4 in which 1 to 24 are formed of one marking line.

Sample No. In Samples Nos. 1 to 24, the distance L between adjacent marking lines 3 is 0.8 to 4 times the width W of the marking line 3. Nos. 5, 9 to 20 and 22 to 24 are evaluated by all the subjects as “very easy to read” or “easy to read”. It can be seen that the identifier 4 is easier to read than 1-4, 6-8 and 21.

Furthermore, the sample No. 2 in which the interval L between the adjacent marking lines 3 is 1.5 to 4 times the width W of the marking line 3.
9, 13-15, 17-20, and 22-24 are evaluated as “very easy to read” by all the subjects, and it can be seen that the identifier 4 is particularly easy to read.

1a, 1b, 1c: Ceramic member 2: Ceramic sintered body 3: Marked line 4: Identifier 5: Unmarked part

Claims (3)

On the surface of the ceramic sintered body, an identifier formed by one or a combination of a plurality of groups is provided with a plurality of adjacent marking lines provided as a group, and the ceramic sintered body is made of alumina. , Yttria, zirconia, cordierite, mullite, and forsterite, or white ceramics composed of a joined body thereof, and the interval between the adjacent marking lines in the group is 1. A ceramic member having a length of 5 to 4 times . The ceramic member according to claim 1, wherein the ceramic sintered body includes a group 3 element of the periodic table. A member for a semiconductor manufacturing apparatus, comprising the ceramic member according to claim 2 .

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