JP5887151B2 - Recovery method for removing foreign substances from adhesive surfaces - Google Patents

Description

  The present invention relates to a method for removing and recovering a foreign substance on an adhesive surface, and more particularly, to a method for removing and recovering a foreign substance on an adhesive surface that can efficiently remove an adhered foreign substance even though the surface state of the adhesive surface can be maintained.

  Conventionally, for example, when manufacturing a small electronic component such as a chip capacitor, an elastic adhesive member capable of sticking and holding the small electronic component or a member for a small electronic component capable of manufacturing a small electronic component on the surface thereof. The holding jig provided is used. As such a holding jig, for example, the holding jig described in Patent Document 1 is “formed with a rubber elastic material having at least a surface portion having adhesiveness, and a small component is tightly held on the elastic material surface by the adhesive force. It is possible to do this "(see claim 1 of Patent Document 1). In addition, the holding jig for small electronic components described in Patent Document 2 is “a rigid plate material, a rubber-like elastic body having a flat surface provided on at least one surface of the plate material, and the rubber-like material. It has a guide sheet provided with a plurality of guide holes into which the small electronic component is loosely fitted on the surface of the elastic body ”(claim 1 of Patent Document 2).

  In order to manufacture a small electronic component such as a capacitor chip having electrodes at both ends in the axial direction using such a holding jig, the small electronic component member is adhesively held on the adhesive surface of the elastic adhesive member. The first electrode forming step and the like are used in a state of being in contact with each other, and the second electrode forming step and the like are transferred to the adhesive surface of another elastic adhesive member having an adhesive strength stronger than that of the adhesive surface. Thereafter, the manufactured small electronic component or the like is forcibly removed from the elastic adhesive member by a scraping blade or the like.

  In the manufacture of such small electronic components, when the conductive paste is not sufficiently dried in the electrode forming process, that is, when the electrodes are not sufficiently formed, the small electronic component member or the small electronic component is removed from the elastic adhesive member, or other elasticity. When transferring to an adhesive member, an electrode may be damaged or an electrode may peel from a member for small electronic components. Further, even when the conductive paste is sufficiently dried, the small electronic component member or the small electronic component collides with the scraping blade or the like when removing the small electronic component member or the small electronic component from the elastic adhesive member, or The members for small electronic components or the small electronic components may collide with each other and the electrodes may be damaged. In the case of an elastic adhesive member having a particularly strong adhesive force, the electrode is easily peeled from the small electronic component member. When the electrode is damaged or peeled in this way, broken or peeled electrode fragments remain in a state of being adhered to the adhesive surface. In addition, since the manufacture of small electronic components and the like are not necessarily performed in a clean room, dust such as members for small electronic components, dust in the atmosphere, and the like may adhere to the adhesive surface.

  The holding jig used for the manufacture of small electronic components can be used repeatedly any number of times by removing the dirt on the adhesive surface (for example, 0005 and 0010 of Patent Document 1 and Patent Document 2). 0055 etc.). For example, the holding jig can be used for the manufacture of small electronic components and the like by repeating it several hundred times, or in some cases, 1000 times or more, as long as it can remove dirt on the adhesive surface.

  Although a method for removing foreign matters such as debris, dust and dust from the adhesive surface of the holding jig is not described in Patent Document 1 and Patent Document 2, as such a removal method, for example, the adhesive surface is made of a nonwoven fabric. A method of wiping with an adhesive, a method of cleaning the adhesive surface with a cleaning liquid such as water, a method of injecting compressed air or the like onto the adhesive surface, and the like are conceivable.

  However, since the sticky surface of the holding jig is sticky in the first place, these foreign substances are firmly held on the sticky surface and cannot be easily removed from the sticky surface. Still, if you try to remove foreign matter from the adhesive surface, the adhesive surface will be damaged, the surface state of the adhesive surface will be damaged, and you will not be able to hold small electronic parts etc. in the desired adhesive holding state, you can use a holding jig Sometimes it disappears.

Japanese Patent Publication No. 07-093247 JP 2005-005650 A

  An object of the present invention is to provide a method for removing and recovering a foreign substance on an adhesive surface, which can efficiently remove the adhered foreign substance even though the surface state of the adhesive surface can be maintained.

As means for solving the problems,
Claim 1 removes the foreign matter adhering to the adhesive surface having an adhesive force of 1 to 60 g / mm ² that can hold the object to be adhered in the holding jig for sticking and holding the object to be adhered. A method for recovering a surface state, wherein the adhesive member is made of a styrene butadiene rubber pressure-sensitive adhesive and has an adhesive force of more than 1 time and not more than 3.5 times of the adhesive surface, and at least foreign matter among the adhesive surfaces. A method for adhering a sticky surface region, and a method for removing and recovering an adhesive surface foreign matter having a step of peeling the pressure-sensitive adhesive member from the surface region after the step of sticking,
2. The pressure-sensitive adhesive according to claim 1, wherein the pressure-sensitive adhesive member is made of a styrene-butadiene rubber pressure-sensitive adhesive, and the pressure-sensitive adhesive layer having the pressure-sensitive adhesive force is a pressure-sensitive adhesive tape or a pressure-sensitive adhesive sheet disposed on the surface of the substrate. It is a method for removing foreign matter from the surface
A third aspect of the present invention is the sticky surface foreign matter removal recovery method according to the second aspect, wherein the base material has an elongation (JIS Z 0237) of 120 to 200%.

  The adhesive surface foreign matter removal recovery method according to the present invention is an adhesive member made of a styrene butadiene rubber adhesive and having an adhesive force of more than 1 time and less than 3.5 times the adhesive surface of a holding jig; Since it has the process of sticking at least the surface area which the foreign material adheres among the adhesive surfaces, and the process of peeling the adhesive member from the surface area after this sticking process, it gives to the surface area Despite the small damage, almost all of the foreign matter adhered to the surface region can be transferred to the adhesive member. Therefore, according to the present invention, it is possible to provide a method for removing and recovering a foreign substance on an adhesive surface that can efficiently remove the adhered foreign substance even though the surface state of the adhesive surface can be maintained.

  The sticky surface from which the foreign matter has been removed by the foreign matter removal recovery method for the adhesive surface according to the present invention is, for example, several hundreds or thousands of times before the foreign matter has been removed and the foreign matter removed and recovered. Since the surface condition such as flatness is maintained at a high level and the adhesive force is hardly lowered, the adherend can be held and removed for several hundreds or thousands of times, and high durability for use is exhibited.

FIG. 1 is a schematic view showing an example of a used holding jig used in the method for recovering and removing foreign matters on an adhesive surface according to the present invention, and FIG. 1 (a) shows the removal of foreign matters on an adhesive surface according to the present invention. It is a schematic plan view which shows an example of the used holding jig used for the recovery method, FIG.1 (b) is an example of the used holding jig used for the foreign material removal recovery method of the adhesive surface which concerns on this invention. It is a schematic front view which shows. FIG. 2 is a schematic explanatory view illustrating a method for removing and recovering a foreign substance from an adhesive surface according to the present invention, and FIG. 2 (a) illustrates a process of adhering an adhesive tape to an elastic adhesive member in this method. FIG. 2B is a schematic explanatory view for explaining a process of peeling the adhesive tape from the elastic adhesive member in this one method.

  The adherend to be adhered to the holding jig used in the method for removing and recovering an adhesive surface from an adhesive surface according to the present invention is a member for an adherend that can manufacture the adherend, such as a member for a small instrument, a small machine A member for elements, a member for small electronic parts, etc. are mentioned. Moreover, since the manufacture of the adherend includes a transporting process of the adherend, the adherend includes the adherend itself, for example, a small instrument, a small machine element, and a small electronic component. Therefore, in this invention, it is not necessary to distinguish clearly the to-be-adhered object and the member for to-be-adhered objects. Among these adherends, small electronic components and / or members for small electronic components can be cited as adherends that are suitably held by the holding jig used in the foreign matter removal recovery method for adhesive surfaces according to the present invention. It is done. Examples of the small electronic component and the small electronic component member include a capacitor chip (also referred to as a chip capacitor), an inductor chip, a resistor chip, an FPC, a finished product such as a wafer, an unfinished product, and the like. For example, a prism or cylinder, a prism or cylinder having ridges at one end, a prism or cylinder having ridges at both ends, and the like can be used.

  The holding jig used in the method for removing and recovering a foreign substance from an adhesive surface according to the present invention will be described. As this holding jig, a known one can be used without particular limitation, and examples thereof include “holding jig” in Patent Document 1 and “invention of this application” in Patent Document 2, and the like. And a holding jig provided with a plate-like or endless jig main body and an elastic adhesive member that is disposed on the surface of the jig main body and has an adhesive surface capable of adhering and holding an adherend.

  A holding jig 1 shown in FIG. 1 will be described as an example of such a holding jig. The holding jig 1 includes a jig main body 2 and an elastic adhesive member 3 which is disposed on the surface of the jig main body 2 and has an adhesive surface 3a capable of sticking and holding an adherend.

  The jig body 2 is a disk-shaped body having a smooth surface, and supports the elastic adhesive member 3 on the surface. The jig body 2 can take various forms based on various design changes as long as the elastic adhesive member 3 can be supported, and is formed of a material capable of supporting the elastic adhesive member 3. Examples of such materials include metals and resins.

  The elastic adhesive member 3 is designed to be in contact with one surface of an object to be adhered and to hold a large number of objects to be adhered by adhesion, and is a square that is slightly smaller than the jig body 2 on the surface of the jig body 2. Is formed into a disk-shaped body. The elastic adhesive member 3 is formed of, for example, an adhesive material having an adhesive force described later or a cured product of the adhesive material, and the entire surface is an adhesive surface that can hold the object to be adhered. .

The adhesive surface 3a of the elastic adhesive member 3 has an adhesive force capable of adhering and holding an object to be adhered. For example, the adhesive force by the Shin-Etsu polymer method described later is 1 to 60 g / mm ^2. 7-60 g / mm ² . The Shin-Etsu polymer method is as described later, but when the adhesive force of the adhesive surface 3a is measured, the indentation load is 25 g / mm ² . The adhesive surface 3a has a generally flat area for holding an object to be adhered, and has an appropriate surface roughness according to the size of the object to be adhered and the like. The adhesive surface 3a preferably has, for example, a ten-point average roughness Rz (JIS B 0601-1994) of 0.5 to 3 μm, particularly preferably 0.5 to 2 μm. This ten-point average roughness Rz can be measured under conditions such as a cutoff of 0.8 mm and a measurement length of 2.4 mm, and can be a value obtained by arithmetically averaging measured values at a plurality of locations. The hardness (JIS K6253 [durometer E]) of the adhesive surface 3a, that is, the elastic adhesive member 3, is preferably about 5 to 60.

  The elastic adhesive member 3 may be fixed to the surface of the jig body 2 by an adhesive layer or a primer layer, by the adhesive force of the elastic adhesive member 3, or by a fixture or the like. The elastic adhesive member 3 is fixed to the surface of the jig body 2 through an adhesive layer or a primer layer.

  The elastic adhesive member 3 only needs to be formed of an adhesive material capable of exhibiting the adhesive force or a cured product of this adhesive material. Examples of the adhesive material include a fluorine resin, a fluorine rubber, and a fluorine resin. Various elastomers such as fluorine-based compositions containing resins or fluorine-based rubbers, silicone resins or silicone rubbers, silicone compositions containing silicone resins or silicone rubbers, urethane-based elastomers, natural rubbers, styrene-butadiene copolymer elastomers, etc. Can be mentioned. Among these, addition reaction curable adhesive silicone compositions and peroxide curable adhesive silicone compositions containing silicone rubber and / or silicone rubber are preferred. Examples of the addition reaction curable adhesive silicone composition include, for example, a silicone raw rubber (a), a crosslinking component (b), an adhesion improver (c), and a catalyst (d) described in JP-A-2008-091659. And a pressure-sensitive adhesive composition containing silica-based filler (e). Examples of the peroxide curable adhesive silicone composition include silicone raw rubber (a), adhesive strength improver (c), silica-based filler (e), and organic material described in JP-A-2008-091659. Mention may be made of an adhesive composition containing a peroxide (f).

  The holding jig used in the foreign matter removal recovery method for an adhesive surface according to the present invention is a holding jig in which foreign matters such as debris, dust, and atmospheric dust adhere to the adhesive surface, specifically Used in the manufacture of adherends, etc., holding jigs with adherent debris, dust, etc. adhered to the adhesive surface, used, stored or left in the atmosphere, etc. And a holding jig to which is adhered. FIG. 1 shows a state in which a foreign substance 5 adheres to an adhesive surface 3a of a holding jig 1 which is an example of a holding jig used in the method for removing and recovering a foreign substance on an adhesive surface according to the present invention.

  The holding jig used in the method for removing and recovering a foreign substance on an adhesive surface according to the present invention is as described above, and the foreign substance adheres to the adhesive surface. Such foreign matter adheres to the adhesive surface of the holding jig by manufacturing an object to be adhered, or by storing or leaving it in the air. This holding jig may be a holding jig used once for the manufacture of the adherend, or a holding jig in which a relatively large number of foreign substances 5 adhere to each other used for the manufacture of the adherend. It may be a tool. FIG. 1 shows an exaggerated state for easy understanding of the holding jig 1 in which the foreign material 5 adheres to the adhesive surface 3a, which was used once for the manufacture of a capacitor chip having electrodes at both ends in the axial direction. ing.

In general, an adhesive member having adhesiveness is considered that the adhesive component contained in the adhesive member has been transferred or adhered to the adhesive surface so far, and removes the foreign matter adhering to the adhesive surface. I haven't even tried to use it. However, the inventor of the present invention dared to adopt an adhesive member contrary to this idea and practice, and adopted a styrene butadiene rubber that had not been particularly noted as a component forming the adhesive member. In addition to the fact that the adhesive component in the styrene butadiene rubber hardly migrates to the adhesive surface, it has been found that such an adhesive member can effectively remove foreign substances from the adhesive surface. The pressure-sensitive adhesive member used in the method for recovering and removing foreign matters on the pressure-sensitive adhesive surface according to the present invention has an adhesive force (by the Shin-Etsu Polymer method described below) that is more than 1 time and 3.5 times or less than the pressure-sensitive surface 3a. When the adhesive force of the adhesive member is less than 1 times that of the adhesive surface 3a, almost all foreign matter 5 adhering to the adhesive surface 3a cannot be detached from the adhesive surface 3a and transferred to the adhesive member. On the other hand, if the adhesive force of the adhesive member exceeds 3.5 times that of the adhesive surface 3a, almost all foreign matter 5 adhering to the adhesive surface 3a can be detached from the adhesive surface 3a. The adhesive surface 3a, particularly the surface state, may be greatly damaged, and the adhesive surface 3a may not be able to maintain the desired surface state. The adhesive member is 1.5 times to 3.5 times less adhesive than the adhesive surface 3a in that damage to the adhesive surface 3a is small and almost all foreign matter 5 can be detached from the adhesive surface 3a. It preferably has a strength, and particularly preferably has an adhesive strength of 2 to 3.5 times. Specifically, the adhesive strength according to the Shin-Etsu polymer method is preferably such that the ratio to the adhesive surface 3a is in the above range and in the range of 87 to 109 g / mm ² .

The adhesive strength of this adhesive member is the adhesive strength in the following adhesive strength measurement method (also referred to as Shin-Etsu Polymer Method). Specifically, a suction fixing device (for example, trade name: electromagnetic chuck, KET-1530B, manufactured by Kanetech Co., Ltd.) or a vacuum suction chuck plate or the like that horizontally fixes the adhesive member, and a 10 mm diameter at the tip of the measurement unit A load measuring device equipped with a digital force gauge (trade name: ZP-50N, manufactured by Imada Co., Ltd.) equipped with a cylindrical stainless steel (SUS304) contactor is prepared, and adsorption by this load measuring device An adhesive member is fixed on a fixing device or a vacuum suction chuck plate, and the measurement environment is set to 21 ± 1 ° C. and humidity 50 ± 5%. Next, the contact attached to the load measuring device is lowered at a descending speed of 10 mm / min until it comes into contact with the measured part of the adhesive member at a speed of 20 mm / min. Press for 3 seconds perpendicularly to the part to be measured with the indentation load. Here, the predetermined pushing load is set to 25 g / mm ² . Next, the contact is pulled away from the measurement site at an ascending speed of 80 mm / min, and the pulling load measured by the digital force gauge at this time is read. This operation is performed at a plurality of locations of the measurement site, the plurality of separation loads obtained are arithmetically averaged, and the arithmetic average value obtained is used as the adhesive strength of the adhesive member.

  The adhesive member only needs to have a certain thickness. For example, when the adhesive member is an adhesive tape and an adhesive sheet described later, the total thickness is preferably 40 to 80 μm.

  Examples of the adhesive member having such an adhesive force include an elastic adhesive member, an adhesive tape, an adhesive sheet, and the like that are basically the same as the elastic adhesive member of the holding jig. A sheet is preferable, and an elastic adhesive member is preferable from the viewpoint of cost reduction and resource saving by diverting a holding jig.

  The adhesive member is made of a styrene butadiene rubber pressure sensitive adhesive 3a, and in particular, the portion to be adhered to the surface area to which foreign matter is adhered is made of styrene butadiene rubber pressure sensitive adhesive, and the whole is made of styrene butadiene rubber pressure sensitive adhesive. May be. Specifically, the styrene-butadiene rubber pressure-sensitive adhesive is a copolymer having styrene and butadiene as constituent monomers, and in addition to these, a monomer having a reactive ethylene bond, for example, isoprene, ethylene, etc. as constituent monomers. You may contain.

As a characteristic or physical property of styrene butadiene rubber, it is preferable that the adhesive force by a JIS Z 0237 measuring method is 3.3-5.6 N / cm. The adhesive strength of the styrene butadiene rubber is basically the same as that of the elastic member. Specifically, the adhesive strength according to the Shin-Etsu polymer method is preferably 87 to 109 g / mm ² . In such a styrene butadiene rubber pressure-sensitive adhesive, the constituent component including the constituent monomer hardly migrates or adheres to the pressure-sensitive adhesive surface 3a and does not substantially contaminate the pressure-sensitive adhesive surface 3a.

  This elastic member preferably has a small elongation (JIS Z 0237), specifically 140 to 200%, preferably 160 to 200%. The elongation of the elastic member (JIS Z 0237) is small, especially when it is within the above range, the elastic member is difficult to stretch when peeling the elastic member attached to the adhesive surface 3a, and the damage to the adhesive surface 3a is reduced. The surface state of the adhesive surface 3a can be maintained. The elongation of the elastic member can be measured based on JIS Z 0237, or a catalog value can be adopted.

  If this elastic member is transparent or translucent, it can be easily confirmed that the foreign material 5 has been transferred from the adhesive surface 3a to its own surface. In this invention, it is not necessary to clearly distinguish between “transparent” and “semi-transparent”, and the elastic member has such transparency that the foreign matter 5 transferred to the surface of the elastic member can be confirmed from the back surface of the elastic member. Just do it.

  The pressure-sensitive adhesive tape and pressure-sensitive adhesive sheet as the pressure-sensitive adhesive member preferably have a base material and a pressure-sensitive adhesive layer disposed on the surface of the base material. The base material should just hold | maintain an adhesive layer, for example, a resin-made elongate body or a film is mentioned. Examples of such a resin include polyolefins such as polyethylene and polypropylene. For example, the base material preferably has a thickness of 20 to 100 μm, and the elongation (JIS Z 0237) is preferably 120 to 200%, and particularly preferably 160 to 200%. When the substrate has an elongation of 120 to 200%, the adhesive tape or the adhesive sheet is difficult to extend when the adhesive tape or the adhesive sheet attached to the adhesive surface 3a is peeled off, and damage is given to the adhesive surface 3a. The surface state of the adhesive surface 3a can be maintained by reducing the size. This substrate is preferably transparent or translucent. The pressure-sensitive adhesive layer is made of the above-described styrene-butadiene rubber pressure-sensitive adhesive and has the above-described pressure-sensitive adhesive force. That is, the pressure-sensitive adhesive tape or pressure-sensitive adhesive sheet can also be referred to as a pressure-sensitive adhesive member having a base material. This pressure-sensitive adhesive layer may be disposed on the entire surface of the substrate, or may be disposed on a part thereof. This pressure-sensitive adhesive layer has a thickness of 10 to 30 μm and an elongation of 140 to 200% (JIS Z 0237), and is preferably transparent or translucent.

Examples of such an adhesive tape include “Scotch Pro Box Sealing Tape” manufactured by Sumitomo 3M Limited (base material: made of polypropylene, adhesive: styrene butadiene rubber). As the “Scotch Pro Box Sealing Tape”, specifically, the trade name “Scotch Pro # 369HQ” (adhesive strength 87 g / mm ² by Shin-Etsu Polymer Method, adhesive strength 3.3 N / cm of JIS Z 0237, JIS Z 0237 140% elongation, substrate thickness 25 μm, total thickness 40 μm), trade name “Scotch Pro # 370HQ” (adhesive strength 94 g / mm ² by Shin-Etsu Polymer Method, JIS Z 0237 adhesive strength 3.8 N / cm, JIS Z 0237 elongation 140%, substrate thickness 30 μm, total thickness 48 μm), trade name “Scotch Pro # 372HQ” (adhesive strength 102 g / mm ² by Shin-Etsu polymer method, JIS Z 0237 adhesive strength 4.7 N / cm) , JIS Z 0237, 170% elongation, base material thickness 40 μm, total thickness 62 μm), trade name “Scotch Pro # 375HQ” ( Adhesion 5.6 N / cm of adhesive strength 109g ^/ mm 2, JIS Z 0237 by Yue polymer method, elongation 190% of JIS Z 0237, thickness 50μm of the substrate, the total thickness 77 m), and the like.

  One example (hereinafter referred to as one method) of the method for removing and recovering foreign matter from an adhesive surface according to the present invention will be described with reference to the drawings. In this method, a holding jig 1 in which a foreign substance 5 adheres to an adhesive surface 3a, an adhesive tape 10 as an adhesive member, and a roller 11 for closely attaching the adhesive tape 10 to the adhesive surface 3a are prepared.

  The holding jig 1 and the adhesive tape 10 to be prepared are as described above. As shown in FIG. 2A, the roller 11 has a cylindrical shape formed of rubber or the like, and has a grip portion that is rotatably connected to a central axis thereof. The roller 11 preferably has a hardness and / or elasticity that does not damage the elastic adhesive member 3, and its axial length is not particularly limited, but considering workability, the length of one side of the elastic adhesive member 3 is not limited. Preferably they are the same or longer. Specifically, the roller 11 is made of styrene butadiene rubber and has a cylindrical shape longer than the length of one side of the elastic adhesive member 3.

  In this one method, when the foreign material 5 is excessively adhering to the adhesive surface 3a of the prepared holding jig 1, it is preferable to carry out a pretreatment step for removing the foreign material 5 that can be easily removed in advance. . For example, as the pretreatment step, a step of wiping with the adhesive surface 3a before the step of attaching described later can be mentioned. The wiping process is not limited as long as the adhesive surface 3a can be wiped with a nonwoven fabric or the like, and may be dry or wet. In the case of being wet, for example, a method of wiping the adhesive surface 3a by impregnating a cleaning liquid into a nonwoven fabric or the like, a method of wiping with a nonwoven fabric or the like while spraying or supplying the cleaning liquid to the adhesive surface 3a, etc. The cleaning liquid may be any liquid that does not damage the elastic adhesive member 3, and examples thereof include water, alcohol, and alcohol water.

  In this method, the prepared adhesive tape 10 is placed on the adhesive surface 3 a of the holding jig 1, and the adhesive surface 3 a and the adhesive layer of the adhesive tape 10 are brought into close contact with each other. At this time, the adhesive tape 10 only needs to be in close contact with at least the surface area of the adhesive surface 3a to which the foreign material 5 is adhered, and as shown in FIG. 2, the adhesive tape 10 is in close contact with the entire surface of the adhesive surface 3a. May be. Thus, the process of sticking the adhesive tape 10 and the adhesive surface 3a is complete | finished.

In this one method, it is preferable to carry out a step of pressing the pressure-sensitive adhesive tape 10 placed on the pressure-sensitive adhesive surface 3a against the elastic pressure-sensitive adhesive member 3 and pressing or pressure-bonding the pressure-sensitive adhesive surface 3a and the pressure-sensitive adhesive layer as desired. . Thereby, almost all of the foreign material 5 adhered to the adhesive surface 3 a can be transferred to the adhesive layer of the adhesive tape 10. In this step, for example, as shown in FIG. 2A, the laminate of the adhesive surface 3a and the adhesive tape 10 is placed on the base material of the adhesive tape 10 in the direction of arrow A in FIG. It is carried out by rolling the prepared roller 11 along the opposite direction. At this time, the roller 11 preferably rolls so as to press the base material against the elastic adhesive member 3 with a certain pressure, and the pressing force can be set to 2.0 kg / cm ² , for example.

  In this one method, next, the process which peels the adhesive tape 10 which is closely_contact | adhered to the adhesive surface 3a from the adhesive surface 3a is implemented. In this peeling process, for example, as shown in FIG. 2 (b), one end edge of the adhesive tape 10 is gripped and rolled up obliquely upward along the direction of arrow B shown in FIG. 2 (b). Thus, in this example, the adhesive tape 10 is peeled in the direction opposite to the arrow A in FIG. 2A from one end edge to the other end edge of the elastic adhesive member 3. Then, since the pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape 10 has an adhesive strength in the above-mentioned range, preferably the pressure-sensitive adhesive tape 10 is pressure-contacted or pressure-bonded to the pressure-sensitive adhesive surface 3a, so that it is adhered to the pressure-sensitive adhesive surface 3a. The foreign material 5 is transferred from the adhesive surface 3a to the adhesive layer of the adhesive tape 10, and is removed from the adhesive surface 3a together with the adhesive layer of the adhesive tape 10 peeled off from the adhesive surface 3a. Therefore, the foreign matter removal recovery method on the adhesive surface according to the present invention can also be referred to as the foreign matter removal method or foreign matter removal method on the adhesive surface. In addition, the peeling speed which spreads the adhesive tape 10 in this process to peel is not specifically limited, For example, it can be set as 40-100 mm / min.

  Further, since the pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape 10 is made of a styrene-butadiene rubber pressure-sensitive adhesive, the pressure-sensitive adhesive component contained in the styrene-butadiene rubber pressure-sensitive adhesive hardly migrates to the pressure-sensitive adhesive surface 3a. It is possible to recover to an uncontaminated state before the foreign material 5 adheres, for example, an uncontaminated state after manufacture.

  In this one method, the pressure-sensitive adhesive layer of the pressure-sensitive adhesive tape 10 is made of the above-mentioned styrene butadiene rubber pressure-sensitive adhesive and has an adhesive strength in the above range. Even if the adhesive surface 3a has a relatively strong adhesive force like the other holding jig transferred from the tool, the adhesive surface 3a is attached without causing any significant damage or damage. The surface state of the adhesive surface 3a before performing the process and the peeling process can be maintained. In particular, when the above-mentioned adhesive tape is used, the surface state of the adhesive surface 3a can be maintained at a high level. Thus, if the surface state of the adhesive surface 3a before and after the implementation of one method can be maintained, the surface roughness and adhesive force of the adhesive surface 3a are hardly changed before and after the implementation of the one method. 3a can be removed and the original state can be recovered. Therefore, the foreign matter removal recovery method for an adhesive surface according to the present invention can also be referred to as an original recovery method for an adhesive surface.

  In addition, since the surface roughness and the adhesive force of the adhesive surface 3a hardly change before and after the execution of one method, the holding jig 1 having the adhesive surface 3 that has been removed and recovered by one method. Can hold the adherend again in a substantially similar holding state again. Therefore, the sticky surface 3a from which the foreign matter 5 has been removed can hold and remove the adherend for several hundreds or thousands of times, and the holding jig 1 having the sticky surface 3a has high durability for use. Demonstrate.

  The surface state of the adhesive surface 3a after the implementation of one method maintains the flatness of the adhesive surface 3a before the implementation of the method, that is, the ten-point average roughness Rz (JIS B 0601-1994), The amount and rate of change are extremely small. For example, in the present invention, the amount of change in the surface state cannot be generally specified depending on the size of the object to be adhered, but is usually about ± 3 μm, particularly 0.3 mm long × 0.3 mm wide × height. If it is a holding jig used for sticking and holding a 0.6 mm adherend in an upright state, it is preferably about ± 2 μm. In the present invention, the change rate of the surface state is the initial ten-point average roughness before the foreign matter removal recovery method according to the present invention is performed 500 times when the foreign matter removal recovery method according to the present invention is performed 500 times. The difference between the Rz and the ten-point average roughness Rz after the implementation of the foreign matter removal recovery method according to the present invention 500 times (initial ten-point average roughness Rz−the ten-point average roughness Rz after the implementation) is the initial ten points. The average roughness Rz is preferably within ± 150%.

  In the present invention, the ten-point average roughness Rz (JIS B 0601-1994) before carrying out the foreign substance removal recovery method according to the present invention is determined before the foreign substance 5 adheres, that is, the object to be adhered is adhered to the holding jig 1. The ten-point average roughness Rz (JIS B 0601-1994) on the adhesive surface 3a before being held, and the ten-point average roughness Rz (JIS B 0601-1994) on the adhesive surface 3a after the foreign material 5 adheres. is not.

The adhesive strength of the adhesive surface 3a after the implementation of one method maintains the adhesive strength of the adhesive surface 3a before the implementation of the one method, and the amount of change and the rate of change are extremely small. For example, in the present invention, the amount of change in the adhesive force cannot be generally specified depending on the size of the object to be adhered, but is usually about ± 3 g / mm ² . Further, in the present invention, the rate of change of the adhesive strength is the same as the initial adhesive strength before the foreign matter removal recovery method according to the present invention is performed 500 times and the present invention when the foreign matter removal recovery method according to the present invention is performed 500 times. It is preferable that the difference (initial adhesive force-post-adhesion force) after the implementation of the foreign matter removal recovery method according to 500 is within ± 10% with respect to the initial adhesive force.

  In the present invention, the adhesive force before the foreign matter removal recovery method according to the present invention is applied is the adhesive force on the adhesive surface 3a before the foreign material 5 adheres, that is, before the object to be adhered is adhered and held by the holding jig 1. It is not the adhesive force on the adhesive surface 3a after the foreign material 5 adheres.

  Thus, according to one method, almost all of the foreign material 5 adhered to the surface region is small even though the damage to the adhesive surface 3a, specifically, the surface region to which the foreign material 5 is adhered is small. Can be transferred to the adhesive layer of the adhesive tape 10.

  The foreign matter removal recovery method for the adhesive surface according to the present invention is not limited to the above-described one method, and various modifications can be made within a range in which the object of the present invention can be achieved.

  In the one method, a wiping step is carried out as a pretreatment step as desired. In this invention, the pretreatment step is a step of washing the adhesive surface with a cleaning liquid and / or an adhesive instead of or in addition to the wiping step. The process etc. which inject | pour compressed air etc. to a property surface can also be implemented.

  In the one method, the step of pressure contact or pressure bonding for rolling the roller 11 is carried out as desired. In this invention, the step of pressure contact or pressure bonding is performed by elastic adhesion of the substrate with a flat plate-like member or the like other than the roller. You may press with respect to a member.

  In the one method, the peeling step is performed by rolling up the pressure-sensitive adhesive tape 10 along the direction of arrow B. In this invention, the pressure-sensitive adhesive tape is moved in the direction opposite to the arrow A shown in FIG. A step of peeling along the adhesive surface 3a, that is, in the same manner as the so-called “180 ° peel test” can also be performed.

  Moreover, in the said one method, although the peeling process peels the adhesive tape 10 toward the other end edge from the one end edge of the elastic adhesive member 3, in this invention, the method of peeling an adhesive tape is not specifically limited, For example, the adhesive tape may be peeled along the diagonal line of the elastic adhesive member.

  In the one method, the step of sticking and the step of peeling may each be performed once. When the foreign matter 5 is excessively adhered to the adhesive surface 3a, the pretreatment step is not performed. In some cases, the step of sticking and the step of peeling can be performed a plurality of times, respectively.

(Preparation of holding jig)
The holding jig 1 was manufactured as follows. That is, a square plate-like body having a side length of 120 mm was cut out from a stainless steel plate (made of SUS304, thickness 0.5 mm). After degreasing one surface of this disc-like body with acetone, an appropriate amount of silicone rubber adhesion primer (trade name “X-33-156-20”, manufactured by Shin-Etsu Chemical Co., Ltd.) was applied, The primer layer (thickness 3 μm) was formed by drying in the environment. In this way, the jig body 2 was produced. Next, the produced jig body 2 is housed in a mold, and an addition reaction curable adhesive silicone composition having the following composition is formed into a cavity (the length of one side is 110 mm). , Thickness of 0.8 mm), transfer molding under conditions of 120 ° C. and 10 MPa, and then further cured under conditions of 200 ° C. for 4 hours to form an elastic adhesive member 3 on the surface of the jig body 2. The holding jig 1 was manufactured.
<Composition of addition reaction curable adhesive silicone composition>
-99% by mass of silicone rubber (trade name “X-34-632 A / B”, manufactured by Shin-Etsu Chemical Co., Ltd.) and 1% by mass of silica-based filler (trade name “Crystallite” manufactured by Tatsumori Co., Ltd.) 60 mass parts of adhesive silicone composition to be contained-Liquid silicone rubber composition (trade name "KE-1950 / 40 A / B", manufactured by Shin-Etsu Chemical Co., Ltd.) as an adhesive force adjusting composition 40 mass parts

As described above, the ten-point average roughness Rz (JIS B 0601-1994) of the adhesive surface 3a in the holding jig 1 (unused) is used as a non-contact type surface roughness meter (trade name “color 3D laser microscope”). ”, Model number“ VK-8710 ”, manufactured by Keyence Corporation), it was approximately 0.8 μm (actual value including measurement error was 0.7 to 1.2 μm), and the adhesive strength was When measured in this manner, it was approximately 36 g / mm ² (actual measurement value including measurement error was 33 to 37 g / mm ² ).

  Next, 20,000 chip capacitors having a length of 0.3 mm, a width of 0.3 mm, and a height of 0.6 mm are erected on the adhesive surface 3a of the holding jig 1 in the height direction. The chip capacitor was forcibly removed from the adhesive surface 3a by allowing the scraping blade to slide on the adhesive surface 3a. Such chip capacitor adhesive holding and desorption were repeated 300 times. In this way, a holding jig 1 (300) in which the foreign material 5 was adhered and held on the adhesive surface 3a was prepared. When the ten-point average roughness Rz (JIS B 0601-1994) of the surface region in the holding jig 1 (300) was measured using the non-contact type surface roughness meter as described above, the measurement error was included. The actually measured value was 1.3 to 5.6 μm.

  Also, a holding jig 1 (1000) was prepared in which the sticking and holding of the adherend was repeated 1000 times in the same manner as the holding jig 1 (300). When the ten-point average roughness Rz (JIS B 0601-1994) of the surface region in the holding jig 1 (1000) was measured using the non-contact type surface roughness meter as described above, the measurement error was included. The measured values were 1.7 to 5.4 μm.

Example 1
As shown in FIG. 2A, the adhesive tape 10 was placed on the adhesive surface 3a of the holding jig 1 (300) to bring the adhesive surface 3a and the adhesive layer into close contact. The pressure-sensitive adhesive tape 10 is 3.03 times the product name “Scotch Pro # 375HQ” (adhesive strength 109 g / mm ² by Shin-Etsu Polymer Method, and adhesive strength 3 g / mm ² ) of the adhesive surface 3 a of the holding jig 1. JIS Z 0237 adhesive strength 5.6 N / cm, JIS Z 0237 elongation 190%, substrate thickness 50 μm, total thickness 77 μm). Next, as shown in FIG. 2A, a cylindrical roller 11 made of styrene butadiene rubber and longer than one side of the elastic adhesive member 3 is disposed on the base material of the adhesive tape 10. While pressing the substrate toward the elastic adhesive member 3 with a pressing force of 0 kg / cm ^2, the substrate was rotated once in one direction along the direction of arrow A in FIG. Next, as shown in FIG. 2 (b), one end edge of the adhesive tape 10 is gripped, and the adhesive tape 10 is lifted obliquely upward along the direction of the arrow B shown in FIG. The adhesive tape 10 was peeled from the one end edge of the adhesive member 3 toward the other end edge. The peeling speed at this time was 60 mm / min. In this way, the foreign matter removal recovery of the adhesive surface 3a of the holding jig 1 (300) was performed.

(Examples 2 to 4)
As the adhesive tape 10, instead of the trade name “Scotch Pro # 375HQ”, the trade name “Scotch Pro # 372HQ” (adhesive strength 102 g / mm ² by Shin-Etsu Polymer Method, adhesive strength of the adhesive surface 3a of the holding jig 1 ( 37 g / mm ² ) 2.76 times, JIS Z 0237 adhesive strength 4.7 N / cm, JIS Z 0237 elongation 170%, substrate thickness 40 μm, total thickness 62 μm), trade name “Scotch Pro # 370HQ "(Adhesive strength 94 g / mm ² by Shin-Etsu Polymer method, 2.61 times the adhesive strength of the adhesive surface 3a of the holding jig 1 (36 g / mm ² ), JIS Z 0237 adhesive strength 3.8 N / Cm, 140% elongation of JIS Z 0237, base material thickness 30 μm, total thickness 48 μm), or trade name “Scotch Pro # 369 HQ” (adhesive strength 87 g by Shin-Etsu Polymer Method) mm ^2, 2.35 times the adhesive strength of the adhesive surface 3a of the holding jig 1 (37g / mm ^2), the adhesive strength 3.3 N / cm in JIS Z 0237, elongation 140% of JIS Z 0237, group The removal of foreign matter on the adhesive surface 3a of the holding jig 1 (300) was basically performed in the same manner as in Example 1 except that the material thickness was 25 μm and the total thickness was 40 μm.

(Examples 5 to 8)
Foreign matter on the adhesive surface 3a of the holding jig 1 (1000) basically in the same manner as in each of Examples 1 to 4 except that the holding jig 1 (1000) was used instead of the holding jig 1 (300). Removed and recovered.

(Comparative Example 1)
The adhesive tape 10 was replaced with the product name “Scotch Pro # 375HQ”, except that an adhesive tape having an adhesive layer having an adhesive strength equivalent to the adhesive surface 3a (36 g / mm ² ) by the Shin-Etsu polymer method was used. The foreign matter removal recovery of the adhesive surface 3a of the holding jig 1 (300) was basically performed in the same manner as in Example 1.

(Comparative Example 2)
As the adhesive tape 10, instead of the trade name "Scotch Pro # 375HQ", an adhesive layer of 3.7 times the adhesive strength tacky surface ^{3a (33g / mm 2) (} 122g / mm 2) by Shin-Etsu Polymer Method The foreign matter removal recovery of the adhesive surface 3a of the holding jig 1 (300) was basically performed in the same manner as in Example 1 except that the adhesive tape was used.

(Comparative Example 3)
While supplying pure on the adhesive surface 3a of the holding jig 1 (300), the adhesive surface 3a of the holding jig 1 (300) was cleaned by wiping with a nonwoven fabric. In the comparative example 3, the foreign material removal recovery method of the adhesive surface 3a by an adhesive tape is not implemented.

(Foreign matter removal effect)
The holding jig 1 (300) in which the adhesive surface 3a was removed and recovered in Examples 1 to 8 and Comparative Examples 1 to 3 and the adhesive surface 3a of the holding jig 1 (1000) were made into a microscope (HV-500 manufactured by Keyence). In Examples 1 to 8 and Comparative Example 2, all of the foreign material 5 did not remain on the adhesive surface 3a, whereas in Comparative Example 1, the foreign material 5 remained on the adhesive surface 3a. In Comparative Example 3, many foreign substances 5 remained on the adhesive surface 3a.

(Flatness evaluation)
In order to evaluate the flatness of the adhesive surface 3a, the foreign matter removal recovery method or cleaning method in Examples 1-8 and Comparative Examples 1-3 on the adhesive surface 3a of the produced holding jig 1 (unused) Was repeated 500 times. Thereafter, the ten-point average roughness Rz (JIS B 0601-1994) of the adhesive surface 3a was measured using the non-contact type surface roughness meter according to the above method. The measured ten-point average roughness Rz (JIS B 0601-1994) is the same as the ten-point average roughness Rz (JIS B 0601-1994) of the holding jig 1 (unused) and the holding jig 1 (300). Table 10 shows the ten-point average roughness Rz (JIS B 0601-1994) and the ten-point average roughness Rz (JIS B 0601-1994) of the holding jig 1 (1000). Table 1 shows the results of calculating the amount of change and the rate of change of the ten-point average roughness Rz (JIS B 0601-1994). In addition, it is known that there is no practical problem if the change amount is ± 2.0 μm and the change rate is within ± 150% after 500 tests.

(Adhesive strength evaluation)
In order to evaluate the adhesive strength of the adhesive surface 3a, the foreign matter removal recovery method or cleaning method in Examples 1-8 and Comparative Examples 1-3 on the adhesive surface 3a of the produced holding jig 1 (unused) Was repeated 500 times. Then, the adhesive force of the adhesive surface 3a was measured based on the said method. The measured adhesive strength is shown in Table 1 together with the adhesive strength when the holding jig 1 is not used. Table 2 shows the results of calculating the amount of change and the rate of change in adhesive strength. It is known that there is no practical problem if the change is ± 3 g / mm ² and the change rate is about ± 10% after 500 tests.

(Ingredient transfer test)
When the adhesive surface 3a recovered and removed from foreign matters in Examples 1 to 8 was subjected to IR analysis by the ATR method, in Examples 1 to 8, the adhesive component of the adhesive tape 10 was not detected on the adhesive surface 3a, and the adhesive surface The transition to could not be confirmed.

DESCRIPTION OF SYMBOLS 1 Holding jig 2 Jig main body 3 Elastic adhesive member 3a Adhesive surface 5 Foreign material 10 Adhesive tape 11 Roller

Claims (3)

The holding jig for sticking and holding the adherend removes the foreign matter adhering to the sticky surface having an adhesive force of 1 to 60 g / mm ² capable of sticking and holding the sticky object and recovers its surface state. A method,
Adhesive member made of styrene-butadiene rubber adhesive and having an adhesive force of more than 1 times and less than 3.5 times the adhesive surface and a surface area where at least foreign matter adheres to the adhesive surface And a process of
A method for removing and recovering a foreign substance from an adhesive surface, comprising a step of peeling the adhesive member from the surface region after the attaching step.   The foreign material removal of the adhesive surface according to claim 1, wherein the adhesive member is an adhesive tape or an adhesive sheet made of a styrene butadiene rubber adhesive, and the adhesive layer having the adhesive force disposed on the surface of the substrate. Recovery method.   The method according to claim 2, wherein the substrate has an elongation (JIS Z 0237) of 120 to 200%.

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