JP5898577B2 - Fluid control unit, fluid control integrated unit - Google Patents

Description

  The present invention relates to a fluid control unit and a fluid control integrated unit having a valve body in which a valve body storage chamber is formed between a first flow path and a second flow path, and a switching valve in the valve body storage chamber.

  Conventionally, there are a needle valve shown in FIG. 17 and a ball valve shown in FIG. 18 as switching valves for connecting or disconnecting the first flow path and the second flow path.

A needle valve 500 shown in FIG. 17 is a valve that adjusts the flow rate of the fluid flowing from the first flow path 511 to the second flow path 512. When the handle 501 of the needle valve 500 is rotated to rotate the integrally formed needle shaft 502, the needle shaft 502 rotates and moves in the axial direction along a screw (not shown).
When the valve is opened, the needle shaft 502 is rotated, and the tip portion 503 of the needle shaft 502 moves in a direction away from the orifice hole 513. Accordingly, as shown in FIG. 17, a gap is formed between the orifice hole 513 and the tip portion 503, and the first flow path 511 and the second flow path 512 are in communication.
On the other hand, when the valve is closed, the needle shaft 502 is rotated in the opposite direction so that the tapered tip portion 503 of the needle shaft 502 moves in a direction in which the needle shaft 502 comes into contact with the orifice hole 513. As a result, the tip 503 and the orifice hole 513 come into contact with each other, and the first flow path 511 and the second flow path 512 are in a non-communication state.

A ball valve 600 shown in FIG. 18 is a valve that adjusts the flow rate of the fluid flowing from the first flow path 611 to the second flow path 612. When the handle 601 of the ball valve 600 is rotated, the ball portion 602 is rotated. A communication hole 605 is formed in the ball portion 602, and an opening 604 is formed in one curved surface portion of the ball portion 602.
When the valve is opened, as shown in FIG. 18, the opening 604 of the ball portion 602 and the first flow path 611 are in communication.
On the other hand, when the valve is closed, the ball portion 602 is rotated to bring the ball surface 603 into contact with the valve seat 613. Thereby, since the ball surface 603 and the valve seat 613 are in contact with each other, the first flow path 611 and the second flow path 612 are not communicated.

  Although different from the needle valve and ball valve described above as patent documents, there are needle valves and ball valves published in the following patent publications.

JP 2008-82493 A JP 2010-1964 A

However, the needle valve 500 shown in FIG. 17 has a problem that the needle valve 500 becomes large when the flow rate is large due to a large pressure loss. In addition, the needle valve 500 has a problem that the opening degree of the valve cannot be seen in appearance after the flow rate is adjusted. Further, the needle valve 500 has a problem that the operability is poor because it is necessary to turn many knobs during the temporary stop.
Further, the ball valve 600 shown in FIG. 18 is problematic in that if the lever is touched after the flow rate adjustment, the position changes and the adjustment is performed again.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a large flow control unit and a fluid control integrated unit that are small and have a small pressure loss.

In order to achieve the above object, a fluid control unit and a fluid control integrated unit according to the present invention have the following configurations.
(1) In a fluid control unit having a valve body in which a valve body storage chamber is formed between a first flow path and a second flow path, and a switching valve in the valve body storage chamber, the valve body storage chamber includes: A hollow inverted conical shape, the switching valve has an inverted conical shape, the switching valve is disposed in the valve body storage chamber, a spacer disposed above the valve body, and the first Having a seal member that shuts off one flow path and the second flow path; the seal member is an upper seal portion that seals upward, a lower seal portion that seals downward, and a side that seals laterally It has a seal part, the side seal part connects the upper seal part and the lower seal part, and the seal member is tapered from the upper seal part toward the lower seal part. , the engaging convex portion is formed on the upper surface of the valve body A portion that is opposed to the engaging convex portion, and a counter engaging convex portion is formed on a lower surface of the spacer, and the engaging convex portion and the counter engaging convex portion are When the first flow path and the second flow path are in a non-communication state, the first flow path and the second flow path are in communication with each other. It is characterized by being in a disengaged state when in the state .

As a result, the pressure loss is reduced, and the fluid control unit can be made compact and capable of controlling a large flow rate. That is, by making the switching valve into an inverted conical shape and the valve body storage chamber into a hollow inverted conical shape, the first flow path and the second flow path can be brought into communication by rotating the switching valve. Therefore, the pressure loss can be reduced as in the case where the ball valve is used.
Furthermore, since the sealing member has a tapered shape similar to the inverted conical shape along the switching valve, the gap between the switching valve and the valve body storage chamber can be reliably sealed.
Thereby, when the switching valve is in the closed state, the seal member attached to the switching valve is pressed against the valve body storage chamber, so that the sealing force is increased and leakage can be prevented. That is, when the switching valve is in the closed state, the engagement convex portion and the paired engagement convex portion formed in the switching valve are in the engagement state, so that the switching valve is pressed toward the valve body storage chamber. When the switching valve is pressed toward the valve body storage chamber, the seal member is pressed into the valve body storage chamber. The pressing force can increase the sealing force of the seal member against the valve body storage chamber. Therefore, it is possible to prevent leakage of fluid flowing from the first flow path to the second flow path, which should not flow originally when the valve is closed.
(2) In a fluid control unit including a valve body in which a valve body storage chamber is formed between a first flow path and a second flow path, and a switching valve in the valve body storage chamber, the valve body storage chamber includes: It has a hollow inverted conical shape, the switching valve has an inverted conical shape, the switching valve has a sealing member that blocks the first flow path and the second flow path, and the sealing member is upward. An upper seal portion that seals the lower seal, a lower seal portion that seals downward, and a side seal portion that seals laterally. The side seal portion connects the upper seal portion and the lower seal portion. The seal member is tapered from the upper seal portion toward the lower seal portion, the switching valve is a manual valve connected to a handle, and the handle is a rotatable handle portion. And a fixed part, front The fixing portion, the through hole of the U-shape is formed with respect to the rotational axis of the handle, it said in the through hole, and wherein Rukoto, Tei fixing screw is inserted for fixing the fixing portion To do.
Thereby, since the handle is fixed by the fixing screw, even when the handle is touched, the opening degree of the switching valve does not change and the flow rate does not change.
Furthermore, since the through hole is formed, the valve can be reliably opened and closed by rotating the handle by 90 degrees. That is, since the handle is guided by the through hole through the fixing screw, it can only be rotated 90 degrees. Therefore, the valve can be reliably opened and closed with a small operation of rotating the handle by 90 degrees.

(3) In the fluid control unit described in (1) or (2) , the first flow path and the second flow path are communicated with each other by rotating the switching valve.

  Thereby, since the opening degree of the switching valve can be recognized from the outside, the working efficiency of the operator can be improved. That is, if the opening degree of the switching valve cannot be recognized from the outside, the operator needs to check the opening degree of the switching valve one by one, which is troublesome. Therefore, if the opening degree of the switching valve can be recognized from the outside, the working efficiency can be improved.

(4) In the fluid control unit described in (3) , the switching valve is rotated 90 degrees.

  Thereby, operability can be improved. That is, by rotating the switching valve by 90 degrees, it is possible to facilitate the fully open or fully closed operation, so that the operation can be reduced and the operability can be improved.

(5) The fluid control unit described in (2) is characterized in that the through hole is formed at a position where it can be visually observed from the outside.

Accordingly, the operator can visually confirm the fixing position of the through hole, so that the fixing of the handle and an excessive force exceeding the allowable range are not applied.
Further, whether the valve is in the open state or the closed state can be confirmed by the position of the through hole of the fixing screw.

(6) A plurality of fluid control units according to any one of (1) to (5) are provided.

As a result, the pressure loss is reduced, and the fluid control integrated unit can be made compact and capable of controlling a large flow rate. That is, by making the switching valve into an inverted conical shape and the valve body storage chamber into a hollow inverted conical shape, the first flow path and the second flow path can be brought into communication by rotating the switching valve. Therefore, the pressure loss can be reduced as in the case where the ball valve is used.
Furthermore, since the sealing member has a tapered shape similar to the inverted conical shape along the switching valve, the gap between the switching valve and the valve body storage chamber can be reliably sealed.

  According to the present invention, it is possible to provide a fluid control unit and a fluid control integrated unit with a small and large flow rate.

It is a top view of the fluid control unit concerning this embodiment. It is AA sectional drawing of the fluid control unit shown in FIG. 1 which concerns on this embodiment. It is a front view of the valve body and seal member concerning this embodiment. It is PP sectional drawing of the valve body and seal member which are shown in FIG. 3 which concern on this embodiment. It is a bottom view of the valve body and seal member concerning this embodiment. It is a top view of the fully opened state of the 1st control valve concerning this embodiment. It is BB sectional drawing of the 1st control valve shown in FIG. 6 which concerns on this embodiment. It is CC sectional drawing of the 1st control valve shown in FIG. 7 which concerns on this embodiment. It is a top view of the intermediate state of the 1st control valve concerning this embodiment. It is DD sectional drawing of the 1st control valve shown in FIG. 9 which concerns on this embodiment. It is EE sectional drawing of the 1st control valve shown in FIG. 10 which concerns on this embodiment. It is a top view of the fully closed state of the 1st control valve concerning this embodiment. It is FF sectional drawing of the 1st control valve shown in Drawing 12 concerning this embodiment. It is GG sectional drawing of the 1st control valve shown in FIG. 13 which concerns on this embodiment. It is sectional drawing before attaching a spacer with respect to the valve body and seal member which concern on this embodiment. It is a top view of the fluid control integrated unit which concerns on this embodiment. It is sectional drawing of the needle valve which concerns on a prior art. It is sectional drawing of the ball valve which concerns on a prior art.

  Next, an embodiment of a fluid control unit and a fluid control integrated unit according to the present invention will be described with reference to the drawings.

<Overall configuration of fluid control integrated unit>
FIG. 16 shows a top view of the fluid control integrated unit 1.
The fluid control integrated unit 1 arranges and accumulates the first and second input / output units 3 and 4 at both ends of the plurality of fluid control units 10 and controls the first fluid and the second fluid supplied to the external work. Is. The fluid control unit 10 is provided in the number corresponding to the system connected to the workpiece. In the present embodiment, five fluid control units 10 are provided. For convenience of explanation, FIG. 16 shows the fluid control units 10A, 10B, 10C, 10D, and 10E in order from the left side in the figure. In addition, when it is not necessary to distinguish in description, the added alphabets A to E are omitted and referred to as the fluid control unit 10.

  The fluid control integrated unit 1 includes a plurality of fluid control units 10A to 10E and first and second input / output units 3 and 4 which are in surface contact with each other and penetrated through the second input / output unit 4 and the fluid control units 10A to 10E. By fixing with the fastening member, the fluid control units 10A to 10E and the first and second input / output units 3 and 4 are integrally connected.

  In the fluid control integrated unit 1, the first common flow path 5 and the second common flow path 6 are formed straight and independently through the unit integration direction (the left-right direction in FIG. 16). A first port 91, a second port 92, a third port 93, and a fourth port 94 are opened at both ends of the fluid control integrated unit 1. The first port 91 and the third port 93 are coaxially provided at both end openings of the first common flow path 5. The second port 92 and the fourth port 94 are provided coaxially at both end openings of the second common flow path 6. Therefore, the fluid control integrated unit 1 is arranged along the flow direction of the fluid flowing through the first and second common flow paths 5 and 6 regardless of which of the first to fourth ports 91 to 94 is an input port and an output port. It is possible to input and output fluid, and the flow path structure has good fluid removal efficiency.

  The fluid control integrated unit 1 is provided with first to fourth two-way valves 95, 96, 97, 98 for each of the first to fourth ports 91, 92, 93, 94, and the first to fourth ports 91-94. The fluid that is input and output to the can be individually controlled.

  In the fluid control integrated unit 1, five first branch channels 15A, 15B, 15C, 15D, and 15E are branched from the first common channel 5. In the fluid control integrated unit 1, the communication state between the first common flow path 5 and the first branch flow paths 15A to 15E can be individually switched by the first control valves 20A, 20B, 20C, 20D, and 20E. Yes.

  In the fluid control integrated unit 1, five second branch channels 19A, 19B, 19C, 19D, and 19E are branched from the second common channel 6. In the fluid control integrated unit 1, the communication state between the second common flow path 6 and the second branch flow paths 19A to 19E can be individually switched by the second control valves 30A, 30B, 30C, 30D, and 30E. Yes.

  The flow sensors 50A, 50B, 50C, 50D, and 50E are attached to the fluid control integrated unit 1 so as to be connected to the first branch flow paths 15A to 15E, respectively. The flow sensors 50A to 50E are arranged so as to measure the flow rate of the fluid flowing into the first branch flow paths 15A to 15E. In the flow sensors 50A to 50E, wirings 56A, 56B, 56C, 56D, and 56E are electrically connected to an external device (not shown), respectively, and transmit a fluid measurement value.

<Configuration of fluid control unit>
FIG. 1 shows a top view of the fluid control unit 10. FIG. 2 is a cross-sectional view of the fluid control unit 10 shown in FIG. FIG. 3 shows a front view of the first valve body 21 and the seal member 22. FIG. 4 shows a PP cross-sectional view of the first valve body 21 and the seal member 22 shown in FIG. FIG. 5 shows a bottom view of the first valve body 21 and the seal member 22. FIG. 6 shows a top view of the first control valve 20 in a fully opened state. FIG. 7 shows a BB cross-sectional view of the first control valve shown in FIG. FIG. 8 shows a CC cross-sectional view of the first control valve shown in FIG. FIG. 9 shows a top view of the intermediate state of the first control valve 20. FIG. 10 shows a DD cross-sectional view of the first control valve shown in FIG. FIG. 11 shows an EE cross-sectional view of the first control valve shown in FIG. FIG. 12 shows a top view of the first control valve in the fully closed state. FIG. 13 shows an FF sectional view of the first control valve 20 shown in FIG. FIG. 14 shows a GG sectional view of the first control valve shown in FIG. FIG. 15 is a cross-sectional view of the first valve body 21 and the seal member 22 before the spacer 24 is mounted.

  As shown in FIG. 2, the fluid control unit 10 is attached to the valve body 11 with the first control valve 20, the second control valve 30, and the flow rate sensor 50 aligned in a row.

  As shown in FIG. 2, the valve main body 11 of the fluid control unit 10 includes a first straight flow path 12 that constitutes a part of the first common flow path 5 and a second straight line that constitutes a part of the second common flow path 6. Two straight flow paths 16 are formed penetrating along the unit integration direction (a direction penetrating FIG. 2 from the near side to the far side). The first straight flow path 12 communicates with the first branch flow path 15 via the first communication flow path 13 and the first valve body storage chamber 14. On the other hand, the second straight channel 16 communicates with the second branch channel 19 via the second communication channel 17 and the second valve body storage chamber 18.

  As shown in FIG. 2, the first valve body storage chamber 14 and the first communication channel 13 are formed coaxially from the valve mounting surface (upper surface in FIG. 2) of the valve body 11. The first valve body storage chamber 14 and the first communication channel 13 are formed in a direction orthogonal to the first straight channel 12. The first communication channel 13 has a channel inner diameter dimension set to be smaller than the channel inner diameter dimension of the first straight channel 12 because the fluid that is merged or divided into the first common channel 5 flows. The first valve body storage chamber 14 is formed in a substantially hollow inverted conical shape. The first valve body storage chamber 14 has a tapered shape that tapers from the upper surface in FIG. 2 to the bottom surface 14B of the first valve body storage chamber. The first valve body storage chamber bottom surface 14B has a circular shape, and a cylindrical first communication channel 13 smaller than the diameter of the first valve body storage chamber bottom surface 14B communicates with the center thereof. The first valve body storage chamber 14 is set to have an inner diameter dimension larger than that of the first communication flow path 13 so that the first valve body 21 of the first control valve 20 can be rotatably stored. The first branch flow path 15 is formed in a direction perpendicular to the first straight flow path 12 from a position shifted from the first straight flow path 12 toward the valve mounting surface side, and the inner wall of the first valve body storage chamber 14. Is open.

  As shown in FIG. 2, the second valve body storage chamber 18, the second communication channel 17, and the second branch channel 19 are composed of the first valve body storage chamber 14, the first communication channel 13, and the first branch. It is formed in the same manner as the flow path 15.

  Here, the first and second valve body storage chambers 14 and 18 and the first and second communication passages 13 and 17 have their axes closer to the inside than the axes of the first and second straight passages 12 and 16. The valve body 11 is provided. That is, the valve body 11 has the first and second control valves 20 and 30 attached to the inner side of the axes of the first and second straight flow paths 12 and 16. Therefore, the valve body 11 has a space outside the first and second control valves 20, 30 on the valve mounting surface so that the first and second control valves 20, 30 are connected to the first and second straight flow paths 12, 16. It is wider than when it is arranged on the axis.

  The first and second control valves 20 and 30 rotate the handles 23 and 33 to rotate the first and second valve bodies 21 and 31 in the first and second valve body storage chambers 14 and 18, The first and second straight flow paths 12 and 16 are attached to the valve body 11 so as to communicate with the first and second branch flow paths 15 and 19 through the communication holes 21a and 31a.

The first and second control valves 20 and 30 shown in FIG. 2 have the handles 23 and 33, the first and second valve bodies 21 and 31, the covers 25 and 35, and the seals, except for the shapes of the communication holes 21a and 31a. The members 22 and 32 are configured in the same manner as the handles 951 and 961 configured in the first and second two-way valves 95 and 96 shown in FIG. 16 and a valve body, a spacer, a cover, a seal member, etc. (not shown). Yes.
The communication holes 21a and 31a are connected to the first and second communication passages 13 and 17 below and the first and second branch passages 15 and 19 on the side, respectively. , 31 are formed in an L-shaped cross section that opens to the lower surface and the outer peripheral surface.

・ Explain the valve disc.
As shown in FIG. 3, a seal fitting groove 213 is formed in the first valve body 21, and the seal member 22 is fitted into the seal fitting groove 213 so as to be integrated. The first valve body 21 is formed with a handle engaging portion 211 that engages with the handle 23 at the top in FIG. As for the 1st valve body 21, the valve body part 212 is formed in the downward direction in FIG. The valve body portion 212 has a substantially inverted conical shape similar to that of the first valve body storage chamber 14, and the inverted conical tip portion 212a is a flat surface. The substantially inverted conical shape means that the valve body portion 212 has a tapered shape that tapers from an upper surface 212b that is a flat surface on the upper side in FIG. Moreover, both the upper surface 212b and the front-end | tip part 212a are circular, and the upper surface 212b has a larger diameter of the circle of the front-end | tip part 212a. Further, the upper surface 212b and the tip end portion 212a are in a parallel positional relationship.

  As shown in FIGS. 3 and 4, the valve body 212 is formed with a concave seal fitting groove 213. As shown in FIG. 4, the seal fitting groove 213 has a shape that is recessed by one step from the valve body portion 212, and similarly has a substantially inverted conical shape that tapers from the upper surface 212 b direction to the distal end portion 212 a direction.

As shown in FIG. 4, a hollow cylindrical communication hole 21 a is formed at the center of the valve body 212. As shown in FIG. 15, an opening 214 is formed in a part of the peripheral wall 215 forming the communication hole 21a, and the opening 214 and the communication hole 21a communicate with each other. As shown in FIG. 3, the opening 214 is formed in a U shape with respect to the side surface of the first valve body 21 when viewed from the front.
As shown in FIG. 8, the opening 214 opens as a cut-out surface that is about half of the circumferential wall 215 having a circular cross section.
The opening 214 is formed in a U-shape and is opened as a cut-out surface that is about half of the circumferential wall 215 having a circular cross section, so that a large flow rate of fluid can flow through the communication hole 21a. .

  As shown in FIGS. 7 and 13, a spacer-side convex portion 217 (“engagement convex portion” in the claims, the same applies hereinafter) is formed on the upper surface 212 b of the first valve body 21. As shown in FIG. 13, the spacer-side convex portion 217 is formed at a position that overlaps with the valve-body-side convex portion 244 formed on the spacer 24 when the valve is closed (the “opposing engagement convex portion” in the claims, the same applies hereinafter). Has been. Since the spacer-side convex portion 217 and the valve-body-side convex portion 244 are engaged when the valve is closed, the first valve body 21 is pressed toward the first valve body housing chamber 14.

・ Explain the handle.
A handle 23 shown in FIG. 2 is a member for moving the first valve body 21. The handle 23 has a handle portion 231 and a fixing portion 232.
As shown in FIG. 2, a handle portion 231 that is convex in the vertical direction with respect to the fixing portion 232 of the handle 23 is formed. As shown in FIG. 1, the handle portion 231 is formed with a center portion 231A having a substantially cylindrical shape when viewed from above. As shown in FIG. 7, an insertion hole 231AN into which the handle engagement portion 211 is inserted is formed at the center of the center portion 231A.

As shown in FIG. 1, substantially cuboid-shaped end portions 231B and 231C are formed at both ends of the center portion 231A. Of the end portions, one end portion 231C has two protrusions formed at the tip portion, and a triangle mark is written at the tip portion. By making a difference between the end portion 231B and the end portion 231C, it can be easily understood that the fluid flows when the end portion 231C is directed toward the first branch flow path 15 as shown in FIG. Thereby, since an operator can confirm at a glance from the outside, workability | operativity improves.
The central portion 231A and the end portions 231B and 231C are integrally formed. Since the end portions 231B and 231C have a substantially rectangular parallelepiped shape, the operator can easily grip the handle portion 231.

  As shown in FIG. 1, the fixing | fixed part 232 is circular shape. The fixed portion 232 is formed with a U-shaped through hole 232A with respect to the rotation axis of the central portion 231A. As shown in FIG. 6, the end portion 232 </ b> AK is a portion of the through hole 232 </ b> A that comes into contact with the fixing screw 233 when the valve is open. Even when the fixing screw 233 and the end 232AK are in contact with each other, as shown in FIG. 8, the opening 214 is not at a position orthogonal to the first branch flow path 15 side, and the opening 214 is not in the first position. The shape is inclined obliquely with respect to the one branch channel 15. This is because a large amount of fluid flows through the communication hole 21a even when the opening 214 is not orthogonal to the first branch flow path 15 side.

On the other hand, as shown in FIG. 12, the portion of the through hole 232A that comes into contact with the fixing screw 233 when the valve is closed is an end portion 232AH. Even when the fixing screw 233 and the end portion 232AH are in contact with each other, as shown in FIG. 14, the opening 214 is not in a state of being completely turned away from the first branch flow path 15, but is directed obliquely. It becomes a shape. Even if the opening 214 is not completely turned away from the first branch flow path 15, the first branch flow path 15 and the communication hole 21 a are in a non-communication state and can stop the flow of fluid. is there.
Since the groove of the through hole 232A is a groove having a length from the end portion 232AK to the end portion 232AH, it can be opened and closed only by rotating the handle portion 231 by 90 degrees. That is, since the through-hole 232A is a groove from the end 232AK to the end 232AH, the operator does not rotate the handle portion 231 unnecessarily and rotates it 90 degrees. Therefore, the operator can perform opening and closing by simply rotating 90 degrees.

A fixing screw 233 is formed in the through hole 232A as shown in FIG. Since the fixing screw 233 is formed in the through hole 232A, the handle 23 can be fixed to the cover 25 and non-fixed by the screwing state of the fixing screw 233.
Further, as shown in FIG. 1, a U-shaped operation display portion 232B is formed at a position facing the central portion 231A of the through hole 232A in the fixed portion 232. Since the operation display portion 232B has a description meaning opening and closing, the operation direction of the handle 23 can be understood from the appearance.

  As shown in FIG. 2, the fixing portion 232 is formed with an engaging recess 232 </ b> C that engages with the cover 25. The engaging recess 232C is formed with a recess in the side surface portion in the outer peripheral direction. The engagement hole 251 of the cover 25 engages with the engagement recess 232C. Since the engagement hole 251 and the engagement recess 232C are slidably engaged, the handle 23 can be rotated.

・ Explain the cover.
A cover 25 shown in FIG. 1 is a member for fixing the first valve body 21, the handle 23, the spacer 24, and the like to the valve body 11. As shown in FIG. 2, the cover 25 has a circular engagement hole 251 penetrating the cover 25. The engaging recess 232 </ b> C of the fixing portion 232 of the handle 23 is engaged with the engaging hole 251.
As shown in FIG. 1, a block fixing screw 26 is formed on the cover 25 so as to surround the handle 23. A through hole (not shown) is formed in a portion of the cover 25 where the block fixing screw 26 is formed.
Further, an engagement recess 252 is formed on the lower surface 25B of the cover 25 shown in FIG.

・ The spacer will be explained.
The spacer 24 shown in FIGS. 2 and 15 is a member for filling the space between the handle 23 and the first valve body 21. As shown in FIG. 15, the spacer 24 has a disc shape, and a valve element insertion hole 241 that is a through hole is formed at the center thereof. On the upper surface 24A side of the spacer 24, a contact protrusion 242 is formed in a circumferential shape. In addition, a protrusion 243 that further protrudes from the other contact protrusion 242 is formed on a part of the contact protrusion 242. The protrusion 243 engages with the engagement recess 252 of the cover 25 shown in FIG. 7, and the spacer 24 and the cover 25 are fixed.

  As shown in FIGS. 7, 13, and 15, a valve body-side convex portion 244 is formed on the lower surface 24 </ b> B of the spacer 24. As shown in FIG. 13, the valve-side convex portion 244 is formed at a position overlapping the spacer-side convex portion 217 formed on the first valve body 21 when the valve is closed.

-The seal member will be described.
The seal member 22 shown in FIG. 3 is a member for preventing fluid leakage. As shown in FIGS. 3 and 5, an upper seal portion 221 that seals the upper portion of the valve body portion 212 in an annular shape and a lower seal portion 222 that seals the lower portion in an annular shape are provided. As shown in FIG. 5, the diameter of the upper seal portion 221 is formed larger than the diameter of the lower seal portion 222. As shown in FIGS. 3 to 5, a side seal portion 223 that connects the upper seal portion 221 and the lower seal portion 222 is formed. The upper seal portion 221 and the lower seal portion 222 are formed in parallel positions, and the side seal portion 223 is formed so as to be vertically connected to the upper seal portion 221 and the lower seal portion 222. In addition, in the front view shown in FIG. 3, although the sealing member 22 is made into square shape, when it sees from the back, it becomes square shape similarly.

  As shown in FIG. 8, the side seal portion 223 of the seal member 22 is provided at the boundary between the peripheral wall 215 and the opening 214. By being provided at the boundary between the peripheral wall 215 and the opening 214, fluid does not leak from the opening 214 toward the peripheral wall 215 in the valve open state shown in FIG. On the other hand, in the valve closed state shown in FIG. 14, the fluid does not leak from the peripheral wall 215 to the opening 214 side and flow.

・ The flow sensor will be explained.
As shown in FIG. 2, the flow sensor 50 is attached to the valve body 11 so as to measure the flow rate of the fluid flowing into the first branch flow path 15. The flow sensor 50 integrally includes a flow measurement block 52 that measures a flow rate and a substrate block 53 that contains a control substrate. As shown in FIG. 1, the flow sensor 50 has a width equal to or smaller than the width of the valve body 11. On the other hand, in the flow rate sensor 50, as shown in FIG. 2, the flow rate measurement block 52 is smaller than the substrate block 53 and is arranged at the center of the substrate block 53. In the flow sensor 50, a joint 54 is attached to a step portion between the substrate block 53 and the flow measurement block 52.

  In such a flow rate sensor 50, the wiring 56 of the substrate block 53 is taken out in the direction opposite to the first control valve 20. In the flow rate sensor 50, the substrate block 53 is partially overlapped on the valve mounting surface of the valve body 11, and the flow rate measurement block 52 is fixed to the valve body 11. The flow sensor 50 is fixed by inserting a fixing bolt (not shown) in the longitudinal direction of the flow rate measuring block 52, and a female screw hole (not shown) formed in the valve body 11 with the fixing bolt (not shown). It is done by tightening.

<Effects of fluid control unit>
The fluid control integrated unit 1 is an assembly of fluid control units 10A to 10E. Therefore, the description of the operation of the fluid control unit 10 shown in FIG. The fluid flow of the fluid control integrated unit 1 is not different from the conventional one, so that the explanation is omitted. Further, since the fluid control units 10A to 10E have the same configuration, description of the other fluid control units 10A to 10E will be omitted by describing the common fluid control unit 10 shown in FIGS.

The relationship of the fluid flow from the first branch flow path 15 to the first straight flow path 12 shown in FIG. 2 will be described using the first control valve 20. On the contrary, the case where the fluid flows from the first straight flow path 12 to the first branch flow path 15 can be considered similarly.
Although the first control valve 20 will be described below, the second control valve 30 has the same configuration and exhibits the same function and effect. Therefore, the second control valve 20 is described by describing the first control valve 20. The description of the valve 30 is omitted.

(The first control valve is open)
As shown in FIG. 6, when the end 231 </ b> C of the handle 23 faces toward the first branch flow path 15, the fluid flowing from the first branch flow path 15 opens as shown in FIGS. 7 and 8. 214 flows into the communication hole 21 a and flows into the first communication channel 13 and the first straight channel 12.

  When the handle 23 is in the state of FIG. 6, the opening 214 of the first valve body 21 faces the first branch flow path 15 side in the first valve body storage chamber 14 as shown in FIG. 8. Specifically, as shown in FIG. 8, the angle α1 from the central axis J1 of the first branch flow path 15 to the center K1 of the opening 214 is an opening of 45 degrees. The reason why the angle α1 in the maximum valve opening state is set to 45 degrees is that even if the angle α1 is 45 degrees, a flow rate that is almost the same as the angle 0 degrees at which the center axis J1 and the center K1 overlap is obtained. It is. When the angle α1 is 0 degree, the worker needs to further rotate 45 degrees. Therefore, the angle α1 is set to 45 degrees in order to reduce the operation of the worker.

  As shown in FIG. 8, when positioned at the angle α <b> 1, the end 232 </ b> AK of the through hole 232 </ b> A of the handle 23 shown in FIG. 6 is in contact with the fixing screw 233. Even when the handle 23 is turned fully open, the opening angle of the opening 214 does not become 45 degrees or less of the angle α1 because the through hole 232A is formed. Therefore, since the through hole 232A is formed, the operation of the operator can be reduced.

  In order to maintain the valve open state, the handle 23 is fixed by tightening the fixing screw 233 with respect to the handle 23. As a result, even when the operator accidentally touches the handle 23, the handle 23 does not move and the valve open state can be maintained.

As shown in FIG. 7, the fluid flowing upward from the opening 214 is sealed above the opening 214 by the upper seal 221 of the seal member 22. Similarly, the fluid flowing downward from the opening 214 is sealed under the opening 214 by the lower sealing portion 222 of the sealing member 22.
Further, as shown in FIG. 8, the fluid flowing from the opening 214 toward the peripheral wall 215 is sealed by the side sealing part 223 of the sealing member 22 at the side of the opening 214.
Therefore, the fluid flowing through the opening 214 can flow into the communication hole 21a without leaking from the opening 214.

(The first control valve is in the intermediate state)
As shown in FIG. 9, when the end portion 231C of the handle 23 is at an intermediate position rotated by 45 degrees, the first control valve 20 is in an intermediate state and not in a closed state. Therefore, as shown in FIG. 11, the fluid in the first branch channel 15 flows into the opening 214 and the communication hole 21 a, and the fluid flows into the first straight channel 12.

  When the handle 23 is in the state of FIG. 9, the opening 214 of the first valve body 21 faces sideways with respect to the first branch flow path 15 in the first valve body storage chamber 14 as shown in FIG. 11. Yes. Specifically, as shown in FIG. 11, an angle α2 from the central axis J1 of the first branch flow path 15 to the center K1 of the opening 214 is an opening of 90 degrees.

  When the angle α2 is 90 degrees, the opening 214 is half open. Therefore, the flow rate of the fluid flowing from the first branch flow path 15 to the communication hole 21a is reduced as compared with the angle α1 in the fully open state.

(The first control valve is closed)
As shown in FIG. 12, when the end portion 231 </ b> C of the handle 23 is oriented in the direction perpendicular to the flow path of the first branch flow path 15, all the fluid flowing from the first branch flow path 15 to the communication hole 21 a is caused by the peripheral wall 215. It is prevented. Therefore, as shown in FIG. 14, no fluid flows from the first branch flow path 15 to the communication hole 21a.

  When the handle 23 is in the state shown in FIG. 12, the opening 214 of the first valve body 21 faces away from the first branch flow path 15 in the first valve body storage chamber 14, as shown in FIG. Yes. Specifically, as shown in FIG. 14, the angle α3 from the central axis J1 of the first branch flow path 15 to the center K1 of the opening 214 is an opening of 135 degrees. The angle α3 in the maximum valve closing state is set to 135 degrees because even if the angle α3 is 135 degrees, the angle α3 has the same sealing performance as the angle 180 degrees in which the central axis J1 and the center K1 are linearly positioned. This is because the fluid does not flow from the first branch flow path 15 into the communication hole 21a. Further, when the angle α3 is 180 degrees, the operator needs to further rotate 45 degrees. In order to reduce the movement of the worker, the angle α3 is set to 135 degrees.

  The operator can perform the opening and closing operations by rotating the handle 23 from 45 degrees of the angle α1 in the opened state to 135 degrees of the angle α3 in the closed state. That is, the valve opening and closing operations can be performed by rotating 90 degrees that is the difference between the angle α3 and the angle α1. Therefore, since the first control valve 20 can be easily opened and closed by rotation of 90 degrees, the operation operation can be reduced and the operability can be improved.

  As shown in FIG. 14, the end 232 </ b> AH of the through hole 232 </ b> A of the handle 23 shown in FIG. 12 is in contact with the fixing screw 233 when positioned at the angle α <b> 3. Even when the handle 23 is turned fully open, the opening angle of the opening 214 does not exceed 135 degrees of the angle α3 because the through hole 232A is formed. Therefore, since the through hole 232A is formed, the operation of the operator can be reduced.

  In order to maintain the valve closed state, the handle 23 is fixed by tightening the fixing screw 233 with respect to the handle 23. As a result, even when the operator accidentally touches the handle 23, the handle 23 does not move and the valve closing state can be maintained.

As shown in FIG. 13, the fluid flowing upward from the opening 214 is sealed above the opening 214 by the upper seal 221 of the seal member 22. Similarly, the fluid flowing downward from the opening 214 is sealed under the opening 214 by the lower sealing portion 222 of the sealing member 22.
Further, as shown in FIG. 14, the lateral flow is sealed on the side of the peripheral wall 215 by the side seal portion 223 of the seal member 22.
Therefore, all the fluid flowing from the first branch flow path 15 to the communication hole 21 a is prevented by the peripheral wall 215. Therefore, no fluid flows from the first branch flow path 15 to the communication hole 21a.

  As shown in FIG. 13, when the first control valve 20 is in a closed state, the spacer-side convex portion 217 on the upper surface 212 b of the first valve body 21 and the valve-side convex portion 244 formed on the spacer 24 overlap. It will be in the engaged state. When the spacer-side convex portion 217 is engaged with the valve-body-side convex portion 244 of the spacer 24, the first valve body 21 is pressed toward the first valve body housing chamber 14. When the first valve body 21 is pressed, the seal member 22 formed on the peripheral wall of the first valve body 21 is also pressed by the first valve body storage chamber 14. Since the seal member 22 is an elastic member, the seal member 22 is elastically deformed by being pressed by the first valve body storage chamber 14 and the sealing force is improved. Therefore, when the valve is closed, the spacer-side convex portion 217 on the upper surface 212b of the first valve body 21 and the valve-side convex portion 244 formed on the spacer 24 are overlapped and engaged with each other, thereby improving the sealing force. be able to.

As described above in detail, the fluid control unit 10 and the fluid control integrated unit 1 have the following effects.
(1) The first valve body storage chamber 14 has a hollow inverted conical shape, and the first control valve 20 has an inverted conical shape. The first control valve 20 includes a seal member 22 that blocks the first branch flow path 15 and the first communication flow path 13. The seal member 22 includes an upper seal portion 221 that performs an upward seal, It has a lower seal part 222 for sealing and a side seal part 223 for lateral sealing. Further, the side seal portion 223 connects the upper seal portion 221 and the lower seal portion 222, and the seal member 22 is tapered from the upper seal portion 221 toward the lower seal portion 222.
As a result, the pressure loss is reduced, and the fluid control unit 10 that is small in size and capable of controlling a large flow rate can be obtained. That is, the first control valve 20 has an inverted conical shape, and the first valve body storage chamber 14 has a hollow inverted conical shape, whereby the first control valve 20 is rotated to communicate with the first branch flow path 15 and the first communication. The flow path 13 can be made to communicate. Therefore, the pressure loss can be reduced as in the case where the ball valve is used.
Furthermore, since the sealing member 22 has a tapered shape similar to the inverted conical shape along the first valve body 21 of the first control valve 20, a gap between the first valve body 21 and the first valve body storage chamber 14 is provided. It can be surely sealed.

(2) In the fluid control unit 10 described in (1), the first branch flow path 15 and the first communication flow path 13 communicate with each other by rotating the first control valve 20.
Thereby, since the opening degree of the 1st control valve 20 can be recognized from the exterior, an operator's working efficiency can be improved. In other words, if the opening degree of the first control valve 20 cannot be recognized from the outside, the operator needs to check the opening degree of the first control valve 20 one by one, which is troublesome. Therefore, if the opening degree of the first control valve 20 can be recognized from the outside, the working efficiency can be improved.

(3) In the fluid control unit 10 described in (2), the first control valve 20 can be opened and closed by rotating 90 degrees.
Thereby, operability can be improved. That is, by rotating the first control valve 20 by 90 degrees, the fully open or fully closed operation can be facilitated, so that the operation operation can be reduced and the operability can be improved.

(4) In any one of the fluid control units 10 described in (1) to (3), the first control valve 20 is formed with the spacer-side engagement convex portion 217, and the spacer-side engagement of the first control valve 20 is performed. A valve body side engaging convex portion 244 is formed at a portion facing the convex portion 217. The spacer engaging convex portion 217 and the valve element side engaging convex portion 244 are engaged when the first branch flow path 15 and the first communication flow path 13 are in the non-communication state, and are not engaged when the communication state is established. It becomes a state.
As a result, when the first control valve 20 is in the closed state, the seal member 22 attached to the first control valve 20 is pressed against the valve body storage chamber 14, and the sealing force is increased to prevent leakage. . That is, when the first control valve 20 is in the closed state, the spacer-side engagement convex portion 217 and the valve-body-side engagement convex portion 244 are in the engaged state, so that the first control valve 20 is on the valve body storage chamber 14 side. Pressed. When the first control valve 20 is pressed toward the valve body storage chamber 14, the seal member 22 is pressed against the valve body storage chamber 14. With the pressing force, the sealing force of the seal member 22 against the valve body storage chamber 14 can be increased. Therefore, it is possible to prevent leakage of fluid flowing from the first branch flow path 15 to the first communication flow path 13 that should not flow when the valve is closed.

(5) In any one fluid control unit 10 described in (1) to (4), the first control valve 20 is a manual valve connected to the handle 23. A U-shaped through hole 232A is formed with respect to the rotation axis of the handle 23, and a fixing screw 233 for fixing is inserted.
Thereby, since the handle 23 is fixed by the fixing screw 233, even if the handle 23 is touched, the opening degree of the first control valve 20 does not change and the flow rate does not change. Further, since the handle 23 is fixed by the fixing screw 233, it is possible to prevent rotation due to the momentum of the fluid.
Further, since the through hole 233A is formed, the handle 23 can be rotated 90 degrees so that the valve can be opened and closed reliably. That is, since the handle 23 is guided by the through hole 232A through the fixing screw 233, it can only be rotated by 90 degrees. Therefore, the valve 23 can be reliably opened and closed by a small operation of rotating the handle 23 by 90 degrees.

(6) In the fluid control unit 10 described in (5), the through hole 232A is formed at a position where it can be visually observed from the outside.
Accordingly, the operator can visually confirm the fixing position of the through-hole 232A, so that the fixing of the handle 23 and an excessive force exceeding the allowable range are not applied.
Further, whether the valve is in the open state or the closed state can be confirmed by the position of the through hole 232A of the fixing screw 233.

(7) A fluid control integrated unit 1 having a plurality of fluid control units 10 described in (1) to (6).
As a result, the pressure loss is reduced, and the fluid control integrated unit 1 that is small in size and capable of controlling a large flow rate can be obtained. That is, the first control valve 20 has an inverted conical shape, and the valve body storage chamber 14 has a hollow inverted conical shape, whereby the first control valve 20 is rotated to rotate the first branch flow path 15 and the first communication flow path. 13 can be made to communicate. Therefore, the pressure loss can be reduced as in the case where the ball valve is used.
Furthermore, since the sealing member 22 has a tapered shape similar to the inverted conical shape along the first valve body 21 of the first control valve 20, a gap between the first valve body 21 and the first valve body storage chamber 14 is provided. It can be surely sealed.

<Modification>
Note that the present invention is not limited to the above-described embodiment, and various applications are possible without departing from the spirit of the invention.

  For example, although the first control valve 20 has been described in the present embodiment, the second control valve 30 has the same function and effect.

  For example, in the fluid control integrated unit 1, five fluid control units 10 are integrated, but if two or more are integrated, a fluid control integrated unit can be used.

  For example, in the present embodiment, the first control valve 20, the second control valve 30, and the first to fourth two-way valves 95, 96, 97, and 98 are manual valves, but are electromagnetic valves, pilot valves, and machine operations. It can also be a valve.

  For example, although the fluid control integrated unit 1 is used in the present embodiment, the first valve body storage chamber 14, the first control valve 20, and the like can be used as a single fluid control valve.

  For example, in the present embodiment, the valve-side convex portion 244 is provided on the spacer 24, but it can be formed on the spacer 24 as long as it is formed in a portion that engages with the spacer-side convex portion 217. For example, when the cover 25 and the handle 23 are in direct contact with the valve body portion 212, it is possible to form an engaging convex portion at the contact portion.

  For example, the third port 93 and the fourth port 94 of the fluid control integrated unit 1 shown in FIG. 16 can be blocked to form a block shape. The third and fourth two-way valves 97 and 98 are not necessary when the block shape is used, and can be eliminated. Furthermore, the first common flow path 5 can be directly communicated with the first port 91 and the second port 92 without providing the first and second two-way valves 95 and 96.

DESCRIPTION OF SYMBOLS 1 Fluid control integrated unit 10 Fluid control unit 11 Valve main body 13 1st communication flow path ("2nd flow path" in a claim)
14 Valve body storage chamber 15 1st branch flow path ("the 1st flow path" in a claim)
20 First control valve ("switching valve" in claims)
22 Seal member 221 Upper seal part 222 Lower seal part 223 Side seal part

Claims (6)

In a fluid control unit having a valve body in which a valve body storage chamber is formed between a first flow path and a second flow path, and a switching valve in the valve body storage chamber,
The valve body storage chamber has a hollow inverted conical shape;
The switching valve has an inverted conical shape;
The switching valve has a valve body disposed in the valve body storage chamber, a spacer disposed on the upper side of the valve body, and a seal member that blocks the first flow path and the second flow path,
The seal member has an upper seal portion for performing an upward seal, a lower seal portion for performing a downward seal, and a side seal portion for performing a lateral seal;
The side seal portion connects the upper seal portion and the lower seal portion;
The seal member is tapered from the upper seal portion toward the lower seal portion;
An engagement protrusion is formed on the upper surface of the valve body;
It is a part facing the engaging convex part, and a counter engaging convex part is formed on the lower surface of the spacer,
The engagement protrusion and the pair engagement protrusion are in an engaged state when the first flow path and the second flow path are in a non-communication state;
The engagement protrusion and the pair engagement protrusion are in a disengaged state when the first flow path and the second flow path are in a communication state;
A fluid control unit. In a fluid control unit having a valve body in which a valve body storage chamber is formed between a first flow path and a second flow path, and a switching valve in the valve body storage chamber,
The valve body storage chamber has a hollow inverted conical shape;
The switching valve has an inverted conical shape;
The switching valve has a seal member that shuts off the first flow path and the second flow path;
The seal member has an upper seal portion for performing an upward seal, a lower seal portion for performing a downward seal, and a side seal portion for performing a lateral seal;
The side seal portion connects the upper seal portion and the lower seal portion;
The seal member is tapered from the upper seal portion toward the lower seal portion;
The switching valve is a manual valve connected to a handle;
The handle has a rotatable handle portion and a fixed portion, and the fixed portion has a U-shaped through hole formed with respect to the rotation axis of the handle portion.
Wherein the through hole, Tei Rukoto fixing screws for fixing the fixing portion is inserted,
A fluid control unit. In the fluid control unit according to claim 1 or 2 ,
Communicating the first flow path and the second flow path by rotating the switching valve;
A fluid control unit. The fluid control unit according to claim 3 ,
Rotating the switching valve by 90 degrees;
A fluid control unit. The fluid control unit according to claim 2 ,
The through hole is formed at a position where it can be visually observed outside,
A fluid control unit. A plurality of fluid control units according to any one of claims 1 to 5 ;
An integrated fluid control unit.

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