JP5906583B2 - Method for producing metal-based member - Google Patents
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- JP5906583B2 JP5906583B2 JP2011113079A JP2011113079A JP5906583B2 JP 5906583 B2 JP5906583 B2 JP 5906583B2 JP 2011113079 A JP2011113079 A JP 2011113079A JP 2011113079 A JP2011113079 A JP 2011113079A JP 5906583 B2 JP5906583 B2 JP 5906583B2
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- 229910052751 metal Inorganic materials 0.000 title claims description 50
- 239000002184 metal Substances 0.000 title claims description 50
- 238000004519 manufacturing process Methods 0.000 title claims description 30
- 239000007769 metal material Substances 0.000 claims description 77
- 239000000463 material Substances 0.000 claims description 48
- 239000001301 oxygen Substances 0.000 claims description 44
- 229910052760 oxygen Inorganic materials 0.000 claims description 44
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 38
- 239000011347 resin Substances 0.000 claims description 34
- 229920005989 resin Polymers 0.000 claims description 34
- 239000010949 copper Substances 0.000 claims description 25
- 229910052723 transition metal Inorganic materials 0.000 claims description 22
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims description 16
- 239000012298 atmosphere Substances 0.000 claims description 16
- 235000014113 dietary fatty acids Nutrition 0.000 claims description 15
- 229930195729 fatty acid Natural products 0.000 claims description 15
- 239000000194 fatty acid Substances 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 14
- 230000003647 oxidation Effects 0.000 claims description 14
- 238000007254 oxidation reaction Methods 0.000 claims description 14
- 238000000576 coating method Methods 0.000 claims description 13
- 150000004665 fatty acids Chemical class 0.000 claims description 10
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000005304 joining Methods 0.000 claims description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 5
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 238000003754 machining Methods 0.000 claims description 3
- BERDEBHAJNAUOM-UHFFFAOYSA-N copper(i) oxide Chemical group [Cu]O[Cu] BERDEBHAJNAUOM-UHFFFAOYSA-N 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000009832 plasma treatment Methods 0.000 description 21
- 238000012545 processing Methods 0.000 description 16
- 239000000758 substrate Substances 0.000 description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 15
- 235000021355 Stearic acid Nutrition 0.000 description 12
- 238000000089 atomic force micrograph Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 12
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 12
- 239000008117 stearic acid Substances 0.000 description 12
- 239000004925 Acrylic resin Substances 0.000 description 10
- 229920000178 Acrylic resin Polymers 0.000 description 10
- 239000002131 composite material Substances 0.000 description 10
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 230000008569 process Effects 0.000 description 8
- 239000006087 Silane Coupling Agent Substances 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 238000011282 treatment Methods 0.000 description 6
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 5
- 244000020998 Acacia farnesiana Species 0.000 description 4
- 235000010643 Leucaena leucocephala Nutrition 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 230000007246 mechanism Effects 0.000 description 4
- 238000003917 TEM image Methods 0.000 description 3
- 239000012300 argon atmosphere Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- -1 fatty acid salt Chemical class 0.000 description 3
- 238000001878 scanning electron micrograph Methods 0.000 description 3
- 238000004611 spectroscopical analysis Methods 0.000 description 3
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000002776 aggregation Effects 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002149 energy-dispersive X-ray emission spectroscopy Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 238000005187 foaming Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 2
- 238000010191 image analysis Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- MWUXSHHQAYIFBG-UHFFFAOYSA-N nitrogen oxide Inorganic materials O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical group [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- VMQMZMRVKUZKQL-UHFFFAOYSA-N Cu+ Chemical compound [Cu+] VMQMZMRVKUZKQL-UHFFFAOYSA-N 0.000 description 1
- CWYNVVGOOAEACU-UHFFFAOYSA-N Fe2+ Chemical compound [Fe+2] CWYNVVGOOAEACU-UHFFFAOYSA-N 0.000 description 1
- VTLYFUHAOXGGBS-UHFFFAOYSA-N Fe3+ Chemical compound [Fe+3] VTLYFUHAOXGGBS-UHFFFAOYSA-N 0.000 description 1
- 241000135309 Processus Species 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 238000005054 agglomeration Methods 0.000 description 1
- 238000004220 aggregation Methods 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000003763 carbonization Methods 0.000 description 1
- 238000005255 carburizing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- KYKAJFCTULSVSH-UHFFFAOYSA-N chloro(fluoro)methane Chemical compound F[C]Cl KYKAJFCTULSVSH-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- NZZFYRREKKOMAT-UHFFFAOYSA-N diiodomethane Chemical compound ICI NZZFYRREKKOMAT-UHFFFAOYSA-N 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- DCAYPVUWAIABOU-UHFFFAOYSA-N hexadecane Chemical compound CCCCCCCCCCCCCCCC DCAYPVUWAIABOU-UHFFFAOYSA-N 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000011572 manganese Substances 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- HLWCOIUDOLYBGD-UHFFFAOYSA-N trichloro(decyl)silane Chemical compound CCCCCCCCCC[Si](Cl)(Cl)Cl HLWCOIUDOLYBGD-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
Description
本発明は、表面に粒状突起を有する金属材からなる金属系部材とその製造方法に関する。 The present invention relates to a metal member made of a metal material having a granular protrusion on the surface and a method for manufacturing the metal member.
金属系部材の表面には、その部材に要求される機能に応じて、種々の表面処理が施される。例えば、浸炭処理、窒化処理、軟窒化処理等の表面改質処理や、耐摩耗性や耐食性等に優れる表面被膜の形成等がある。さらに最近では、密着性や撥水性等の向上を図るために、微細な凹凸を基材表面に形成する表面処理もなされている。 Various surface treatments are performed on the surface of the metal-based member according to the function required for the member. For example, there are surface modification treatments such as carburizing treatment, nitriding treatment, soft nitriding treatment, and formation of a surface coating excellent in wear resistance, corrosion resistance and the like. Furthermore, recently, in order to improve adhesion and water repellency, surface treatment for forming fine irregularities on the surface of the substrate has also been performed.
このような微細な凹凸を形成する方法は種々あるが、下記の特許文献ではイオン衝撃処理またはプラズマ処理等による方法を提案している。特に特許文献2および3では、生産コストの低減を図れ得る大気圧プラズマ処理を利用することも提案している。 There are various methods for forming such fine irregularities, but the following patent document proposes a method by ion bombardment treatment or plasma treatment. In particular, Patent Documents 2 and 3 also propose to use atmospheric pressure plasma processing that can reduce production costs.
しかし上記の特許文献では、プラズマ(イオン)を用いているとしても、表面の清浄化、エッチングによる微細な凹凸の形成等を行っているに過ぎない。また大気圧プラズマを利用している場合でも、その照射対象は樹脂材であり、樹脂を構成する結合を破壊することにより凹凸を形成しているに過ぎない。 However, in the above-mentioned patent documents, even if plasma (ions) is used, the surface is merely cleaned and fine irregularities are formed by etching. Even when atmospheric pressure plasma is used, the irradiation target is a resin material, and the unevenness is merely formed by breaking the bonds constituting the resin.
本発明はこのような事情に鑑みてなされたものであり、従来のエッチング等によって形成される凸部とは根本的に異なる突起を金属表面に有する金属系部材とその製造方法を提供することを目的とする。 This invention is made | formed in view of such a situation, and provides the metal-type member which has the processus | protrusion fundamentally different from the convex part formed by the conventional etching etc. on the metal surface, and its manufacturing method. Objective.
本発明者はこの課題を解決すべく鋭意研究し、試行錯誤を重ねた結果、特定の金属元素(例えばCu)からなる金属材表面へ大気圧プラズマを照射することにより、その表面にその金属元素の酸化物(例えばCu2O)からなる突起が隆起することを新たに見出した。この知見を発展させることにより、以降に述べる本発明を完成するに至った。 As a result of extensive research and trial and error, the present inventor has radiated atmospheric pressure plasma onto the surface of a metal material made of a specific metal element (for example, Cu). It was newly found that protrusions made of an oxide (for example, Cu 2 O) were raised. By developing this knowledge, the present invention described below has been completed.
《金属系部材》
(1)本発明の金属系部材は、酸化数の異なる安定酸化物と準安定酸化物とを生成し得る特定遷移金属元素を含む金属材からなる金属系部材であって、前記金属材は、前記安定酸化物で被覆されていないと共に脂肪酸または脂肪酸塩を付着させた表面へ酸素活性種を導入することにより得られ、該表面から隆起した前記特定遷移金属元素の酸化物からなる粒状突起を有することを特徴とする。
《Metallic material》
(1) The metal-based member of the present invention is a metal-based member made of a metal material including a specific transition metal element capable of generating a stable oxide and a metastable oxide having different oxidation numbers, and the metal material is wherein obtained by introducing oxygen active species to the surface adhered with fatty acid or fatty acid salt with not coated with a stable oxide, having a granular protrusions consisting of oxides of the specific transition metal element that protrudes from the surface It is characterized by that.
(2)本発明の金属系部材によれば、金属材の表面に粒状突起が存在するため、金属材と他材との接合界面の改質、撥水性または撥油性の向上等を図れる。このような粒状突起の形成メカニズムや粒状突起によりもたらされる効果の発現メカニズムなど、詳細は調査中であり、現状、必ずしも明らかではない。もっとも本発明者の鋭意研究により、そのような粒状突起が表面に形成される金属材は、酸化数の異なる安定酸化物と準安定酸化物とを生成し得る特定遷移金属元素を含むものであり、またその粒状突起はその特定遷移金属元素の酸化物からなることがわかっている。 (2) According to the metal-based member of the present invention, since the granular protrusions are present on the surface of the metal material, it is possible to improve the bonding interface between the metal material and the other material, improve water repellency or oil repellency, and the like. Details such as the formation mechanism of such granular protrusions and the mechanism of the effects brought about by the granular protrusions are under investigation and are not necessarily clear at present. However, as a result of intensive studies by the present inventors, the metal material on which such granular protrusions are formed includes a specific transition metal element capable of generating a stable oxide and a metastable oxide having different oxidation numbers. In addition, it is known that the granular protrusion is made of an oxide of the specific transition metal element.
《金属系部材の製造方法》
(1)本発明は、上記の金属系部材としてのみならず、その製造方法としても把握できる。すなわち本発明は、前記安定酸化物で被覆されていないと共に脂肪酸または脂肪酸塩を付着させた前記金属材の表面へ酸素活性種を導入する酸素導入工程を備え、上述した金属系部材が得られることを特徴とする金属系部材の製造方法であってもよい。
<< Method for producing metal-based member >>
(1) The present invention can be grasped not only as the metal-based member but also as a manufacturing method thereof. That is, the present invention includes an oxygen introduction step of introducing an oxygen active species into the surface of the metal material that is not coated with the stable oxide and to which a fatty acid or a fatty acid salt is adhered , and the metal member described above is obtained. The manufacturing method of the metal-type member characterized by these may be sufficient.
(2)本発明の製造方法により、上述したような粒状突起が形成される理由は必ずしも定かではなないが、現状では次のように考えられる。安定酸化物で被覆されていない金属材の表面へ部分的に酸素活性種(酸素ラジカル)が導入されると、酸素活性種が付着または侵入した部分に、特定遷移金属元素の酸化物(この酸化物を「特定酸化物」という。)が生成される。このように特定酸化物が金属材の表面に部分的に生成され、隆起することによって、粒状突起が創成されると考えられる。そして粒状突起の形態(特にサイズ)は、その特定酸化物の生成過程または凝集形態に応じて定まると考えられる。 (2) The reason why the above-described granular protrusions are formed by the manufacturing method of the present invention is not necessarily clear, but at present, it is considered as follows. When oxygen active species (oxygen radicals) are partially introduced into the surface of a metal material that is not coated with a stable oxide, oxides of this specific transition metal element (this oxidation) The product is referred to as a “specific oxide”). As described above, it is considered that the specific oxide is partially generated on the surface of the metal material and is raised, thereby creating a granular protrusion. And the form (especially size) of a granular protrusion is considered to be decided according to the production | generation process or aggregation form of the specific oxide.
ちなみに、このような特定酸化物の生成(さらにその凝集)は、高活性で高エネルギーな酸素活性種により生じるため、粒状突起の創成に要する時間は短い。従って本発明の製造方法によれば、効率的に金属系部材を製造することもできる。 Incidentally, the generation of such a specific oxide (and its agglomeration) is caused by a highly active and high energy oxygen active species, so that the time required for creating the granular protrusions is short. Therefore, according to the manufacturing method of the present invention, a metal-based member can also be manufactured efficiently.
《その他》
(1)本発明でいう安定酸化物は、特定遷移金属元素の酸化物の中で一般的に最も安定な酸化物であり、通常は、特定遷移金属元素の酸化数が最も大きくなる酸化物である。準安定酸化物は、安定酸化物よりも不安定な酸化物または安定酸化物に変化し得る酸化物であり、通常は、特定遷移金属元素の酸化数が安定酸化物の場合よりも小さくなる酸化物である。
<Others>
(1) The stable oxide referred to in the present invention is generally the most stable oxide among the oxides of the specific transition metal element, and is usually an oxide having the largest oxidation number of the specific transition metal element. is there. A metastable oxide is an oxide that is unstable or can be changed to a stable oxide rather than a stable oxide. Usually, an oxidation number of a specific transition metal element is smaller than that of a stable oxide. It is a thing.
(2)特に断らない限り本明細書でいう「x〜y」は下限値xおよび上限値yを含む。本明細書に記載した種々の数値または数値範囲に含まれる任意の数値を新たな下限値または上限値として「a〜b」のような範囲を新設し得る。 (2) Unless otherwise specified, “x to y” in this specification includes a lower limit value x and an upper limit value y. A range such as “a to b” can be newly established with any numerical value included in various numerical values or numerical ranges described in the present specification as a new lower limit value or upper limit value.
m 金属基板(金属材)
r アクリル樹脂板(樹脂材)
m Metal substrate (metal material)
r Acrylic resin plate (resin material)
発明の実施形態を挙げて本発明をより詳しく説明する。上述した本発明の構成に本明細書中から任意に選択した一つまたは二つ以上の構成要素を付加し得る。本明細書で説明する内容は、本発明に係る金属系部材のみならず、その製造方法にも適用され得る。製造方法に関する構成要素は、プロダクトバイプロセスとして理解すれば物に関する構成要素ともなり得る。なお、いずれの実施形態が最良であるか否かは、対象、要求性能等によって異なる。 The present invention will be described in more detail with reference to embodiments of the invention. One or two or more components arbitrarily selected from the present specification may be added to the above-described configuration of the present invention. The contents described in this specification can be applied not only to the metal-based member according to the present invention but also to the manufacturing method thereof. A component related to a manufacturing method can be a component related to an object if understood as a product-by-process. Note that which embodiment is the best depends on the target, required performance, and the like.
《金属系部材》
(1)金属材
金属材は、酸化数の異なる安定酸化物と準安定酸化物とを生成し得る特定遷移金属元素を含む限り、純金属、合金、複合材等を問わない。このような特定遷移金属元素として、Cu、Fe、Mn等がある。例えば特定遷移金属元素がCuの場合、その酸化数は+1または+2となり、それぞれ、準安定酸化物である酸化銅(I)(Cu2O)または安定酸化物である酸化銅(II)(CuO)が生成される。また特定遷移金属元素がFeである場合、その酸化物は+2または+3となり、それぞれ、準安定酸化物である酸化鉄(II)(FeO)または安定酸化物である酸化鉄(III)(Fe2O3)若しくは酸化鉄(II,III)(Fe3O4)が生成される。
《Metallic material》
(1) Metal material The metal material may be a pure metal, an alloy, a composite material, or the like as long as it contains a specific transition metal element capable of generating a stable oxide and a metastable oxide having different oxidation numbers. Examples of such a specific transition metal element include Cu, Fe, and Mn. For example, when the specific transition metal element is Cu, the oxidation number is +1 or +2, and copper (I) (Cu 2 O) which is a metastable oxide or copper (II) (CuO) which is a stable oxide, respectively. ) Is generated. When the specific transition metal element is Fe, the oxide becomes +2 or +3, and iron (II) (FeO) which is a metastable oxide or iron (III) (Fe 2 ) which is a stable oxide, respectively. O 3 ) or iron oxide (II, III) (Fe 3 O 4 ) is produced.
(2)粒状突起
粒状突起は、金属材の表面から隆起した特定遷移金属元素の酸化物(特定酸化物)からなる。特定酸化物は、準安定酸化物でも、安定酸化物でも、さらにはそれらが複合した複合酸化物でもよい。例えば、特定遷移金属元素がCuであり金属材の表面に酸化物(酸化被膜)がない場合なら、粒状突起を構成する特定酸化物はCu2Oから構成され得る。金属材の表面にCu2Oからなる酸化被膜が形成されている場合、その特定酸化物はCu2OまたはCuOをとり得るが、主にCu2Oであると考えられる。
(2) Granular protrusion A granular protrusion consists of an oxide (specific oxide) of the specific transition metal element raised from the surface of the metal material. The specific oxide may be a metastable oxide, a stable oxide, or a composite oxide in which they are combined. For example, if the specific transition metal element is Cu and there is no oxide (oxide film) on the surface of the metal material, the specific oxide constituting the granular protrusions can be made of Cu 2 O. When an oxide film made of Cu 2 O is formed on the surface of the metal material, the specific oxide can be Cu 2 O or CuO, but is considered to be mainly Cu 2 O.
また、特定遷移金属元素がFeであり金属材の表面に酸化物(酸化被膜)がない場合なら、特定酸化物はFeOから構成され得る。金属材の表面にFeOからなる酸化被膜が形成されている場合なら、特定酸化物はFeO、Fe3O4またはFe2O3をとり得るが、主にFeOであると考えられる。 Further, when the specific transition metal element is Fe and there is no oxide (oxide film) on the surface of the metal material, the specific oxide can be composed of FeO. If an oxide film made of FeO is formed on the surface of the metal material, the specific oxide can be FeO, Fe 3 O 4 or Fe 2 O 3 , but is considered to be mainly FeO.
本発明に係る粒状突起は、金属材の表面がエッチング等により形成された凸部ではなく、金属材の表面に酸化物が生成(さらには凝集)して隆起するように形成されたものである。この粒状突起とその周囲との間にできる高低差は問わない。もっとも本発明者の研究により、粒状突起は、高低差が10〜400nmさらには15〜350nm程度の微細な凸部であることがわかっている。 The granular protrusions according to the present invention are not convex portions formed by etching or the like on the surface of the metal material, but are formed so that the oxide is generated (and further aggregated) on the surface of the metal material. . There is no limitation on the height difference between the granular protrusions and the periphery thereof. However, according to the research of the present inventor, it is known that the granular protrusion is a fine convex part having a height difference of about 10 to 400 nm, further about 15 to 350 nm.
粒状突起を囲繞する金属材の表面は、平坦でも波状にうねっていてもよい。また粒状突起を囲繞する金属材の表面部分は、特定遷移金属元素の単体等でも、粒状突起と同様な酸化物等でもよいが、通常は酸化前の金属(合金を含む)状態であると考えられる。 The surface of the metal material surrounding the granular protrusions may be flat or wavy. In addition, the surface portion of the metal material surrounding the granular protrusions may be a single element of a specific transition metal element or the like, or an oxide similar to the granular protrusion, but is usually considered to be in a metal (including alloy) state before oxidation. It is done.
《金属系部材の製造方法》
(1)酸素導入工程
本発明に係る粒状突起は、安定酸化物で被覆されていない金属材の表面に(部分的に)、酸素活性種を付着または導入させることにより創成される。この酸素活性種は、例えば、酸素雰囲気中へプラズマを供給するプラズマ供給工程により得られる。このときのプラズマ源として、不活性ガス、窒素、酸素、クロロフルオロカーボン(CFC)化合物ガス、炭化水素化合物ガスなどがあるが、反応性の低さの点でヘリウム、ネオン、アルゴン、クリプトン、キセノン等の不活性ガス、特にアルゴンガスが好ましい。
<< Method for producing metal-based member >>
(1) Oxygen introduction process The granular protrusion which concerns on this invention is created by making an oxygen active species adhere or introduce | transduce (partly) to the surface of the metal material which is not coat | covered with the stable oxide. This oxygen active species can be obtained, for example, by a plasma supply process for supplying plasma into an oxygen atmosphere. Plasma sources at this time include inert gas, nitrogen, oxygen, chlorofluorocarbon (CFC) compound gas, hydrocarbon compound gas, etc., but helium, neon, argon, krypton, xenon, etc. in terms of low reactivity Inert gases, particularly argon gas, are preferred.
プラズマを供給する酸素雰囲気は、酸素濃度(体積%)が1%以上、10%以上さらには15%以上あると好ましい。酸素濃度が過小では、十分な酸素活性種が生成されず、粒状突起を効率的に創成することが困難となる。酸素濃度の上限値は特に限定されないが、酸素濃度が過大になるとコスト高となり、また金属材の表面全体に酸化物(被膜)が形成され易くなり、粒状突起の創成が阻害されると考えられる。そこで酸素濃度は50%以下さらには30%以下が好ましい。 The oxygen atmosphere for supplying plasma preferably has an oxygen concentration (% by volume) of 1% or more, 10% or more, and more preferably 15% or more. If the oxygen concentration is too low, sufficient oxygen active species are not generated, and it becomes difficult to efficiently create granular protrusions. The upper limit value of the oxygen concentration is not particularly limited, but if the oxygen concentration is excessive, the cost is increased, and an oxide (film) is easily formed on the entire surface of the metal material, which is thought to hinder the creation of granular protrusions. . Therefore, the oxygen concentration is preferably 50% or less, more preferably 30% or less.
この酸素雰囲気は大気圧雰囲気でもよく、このとき、プラズマ供給工程は大気圧プラズマ供給工程となる。大気圧プラズマを利用することにより、生産設備の簡素化や生産性の向上を図れ、ひいては金属系部材の製造コストの低減を図れる。この大気圧プラズマは、例えば、大気圧プラズマグロー放電、大気圧ジェットプラズマ、大気圧プラズマトーチ、大気圧表面誘電体バリア放電等により得られる。 The oxygen atmosphere may be an atmospheric pressure atmosphere, and at this time, the plasma supply process is an atmospheric pressure plasma supply process. By using atmospheric pressure plasma, production facilities can be simplified and productivity can be improved, and as a result, the manufacturing cost of metal-based members can be reduced. This atmospheric pressure plasma is obtained, for example, by atmospheric pressure plasma glow discharge, atmospheric pressure jet plasma, atmospheric pressure plasma torch, atmospheric pressure surface dielectric barrier discharge, or the like.
(2)金属材の被処理面
酸素活性種が導入される金属材の表面(被処理面)には、脂肪酸または脂肪酸塩(以下単に「脂肪酸」という。)が付着していると好ましい。この脂肪酸が介在することによって、被処理面上に特定酸化物ひいては粒状突起が部分的に生成され易くなる。この詳細なメカニズムは明らかではないが、脂肪酸中に部分的に存在するカルボニル基、カルボキシル基またはヒドロキシル基等に含まれるOが、金属材の被処理面における部分的な特定酸化物の生成に寄与したと考えられる。逆にいうと、脂肪酸被膜は、金属材の被処理面全体が酸化されることを抑制する酸化抑制被膜として、または金属材の被処理面に特定酸化物を選択的に生成させる選択的酸化誘導被膜として作用すると考えられる。
(2) Surface to be treated of metal material It is preferable that a fatty acid or a fatty acid salt (hereinafter simply referred to as “fatty acid”) adheres to the surface (surface to be treated) of the metal material into which oxygen active species are introduced. By the presence of this fatty acid, the specific oxide and thus the granular protrusions are easily generated on the surface to be treated. Although this detailed mechanism is not clear, O contained in a carbonyl group, carboxyl group, hydroxyl group, or the like partially present in a fatty acid contributes to the formation of a partial specific oxide on the surface to be treated of a metal material. It is thought that. In other words, the fatty acid coating is an oxidation-inhibiting coating that suppresses oxidation of the entire treated surface of the metal material or selective oxidation induction that selectively generates a specific oxide on the treated surface of the metal material. It is thought to act as a coating.
また金属材の被処理面は、切削、研磨、バフ掛け等の機械加工が施されていると好ましい。これにより被処理面上に特定酸化物ひいては粒状突起が部分的に生成され易くなる。この詳細なメカニズムは明らかではないが、機械加工により金属材の被処理面に導入された欠陥(例えば転位)や歪みが影響していると考えられる。つまり、金属材の被処理面上にできた欠陥等を起点として、粒状突起の核となる特定酸化物が生成されるようになる。そして、被処理面の温度上昇や被処理面上の歪みエネルギーが駆動力となって、その核となる特定酸化物が凝集した粒状突起が創成され易くなると考えられる。 Further, it is preferable that the surface to be treated of the metal material is subjected to machining such as cutting, polishing, buffing, or the like. As a result, the specific oxide, and thus the granular protrusions, are easily generated partially on the surface to be processed. Although this detailed mechanism is not clear, it is considered that defects (for example, dislocations) and distortion introduced into the surface to be processed of the metal material by machining have an influence. That is, a specific oxide serving as a nucleus of the granular protrusion is generated starting from a defect or the like formed on the surface to be processed of the metal material. Then, it is considered that the temperature rise of the surface to be processed and the strain energy on the surface to be processed become a driving force, and it becomes easy to create granular projections in which specific oxides that are the cores aggregate.
《金属系部材の用途》
本発明の金属系部材は、その用途を問わないが、従来の部材にない特長を発揮するため、従来品の代替品としてのみならず、新たな機能部材等としても利用され得る。
<Uses of metal-based members>
The metal-based member of the present invention can be used not only as a substitute for the conventional product but also as a new functional member because the metal-based member of the present invention can be used regardless of its use, and exhibits characteristics that are not found in conventional members.
(1)本発明の金属系部材の一用例として、金属材に樹脂材を溶融接合した複合部材がある。この複合部材によれば、金属材の表面に形成された粒状突起を介して金属材と樹脂材とがアンカー効果等により機械的に強固に接合され得る。このため、接着剤等を使用しない複合部材を低コストで効率的に得ることが可能となる。 (1) As an example of the metal-based member of the present invention, there is a composite member obtained by melting and joining a resin material to a metal material. According to this composite member, the metal material and the resin material can be mechanically and firmly joined to each other by the anchor effect or the like via the granular protrusions formed on the surface of the metal material. For this reason, it becomes possible to obtain the composite member which does not use an adhesive etc. efficiently at low cost.
また本発明に係る粒状突起は非常に微細なため、金属材の外観に殆ど影響を与えず、金属材の表面の光沢等をそのまま維持することが可能である。このような金属材へ透明な樹脂材を接合すると、金属材の光沢や美観を保持しつつ、樹脂材の機能が付加された複合部材が容易に得られる。 Further, since the granular protrusions according to the present invention are very fine, it is possible to maintain the gloss of the surface of the metal material as it is without affecting the appearance of the metal material. When a transparent resin material is joined to such a metal material, a composite member to which the function of the resin material is added can be easily obtained while maintaining the gloss and appearance of the metal material.
ところで、金属材と樹脂材との接合界面に要求される性状は、複合部材の接合強度、金属材や樹脂材の材質、面粗度等により異なるため一概にはいえない。もっとも本発明者の研究から、接合界面における粒状突起は、例えば、突起密度が25個/μm2以上さらには50個/μm2以上であり、突起高さ(高低差)が30〜400nmさらには100〜350nmであると好ましい。特に、銅板(金属材)へアクリル樹脂(樹脂材)を接合する場合などに、そのような粒状突起が好ましい。 By the way, the properties required for the bonding interface between the metal material and the resin material are different depending on the bonding strength of the composite member, the material of the metal material or the resin material, the surface roughness, etc., and thus cannot be generally described. However, according to the inventor's study, the granular protrusions at the joint interface have, for example, a protrusion density of 25 pieces / μm 2 or more, further 50 pieces / μm 2 or more, and a protrusion height (height difference) of 30 to 400 nm. It is preferable in it being 100-350 nm. In particular, such a granular protrusion is preferable when an acrylic resin (resin material) is bonded to a copper plate (metal material).
金属材と樹脂材との接合は、例えば、樹脂材を透過するレーザー光を樹脂材側から金属材へ照射し、金属材の少なくとも接合界面近傍を加熱する加熱工程により行える。この際、接合界面近傍にある樹脂材側を加熱することも考えられる。しかし、樹脂材側を加熱すると、発泡や炭化等が生じ易くなるため、あまり好ましくない。従って、接合界面で樹脂材が軟化または溶融する程度に、金属材側を加熱すると好ましい。また、金属材の片面側のみに樹脂材を接合する場合であれば、金属材の接合界面近傍だけを加熱してよいし、金属材の両面に樹脂材を接合する場合であれば金属材全体を加熱してよい。 The joining of the metal material and the resin material can be performed, for example, by a heating process in which laser light that passes through the resin material is irradiated from the resin material side to the metal material, and at least the vicinity of the joining interface of the metal material is heated. At this time, it is conceivable to heat the resin material side in the vicinity of the bonding interface. However, heating the resin material side tends to cause foaming, carbonization, and the like, which is not preferable. Therefore, it is preferable to heat the metal material side so that the resin material softens or melts at the bonding interface. In addition, if the resin material is bonded only to one side of the metal material, only the vicinity of the bonding interface of the metal material may be heated, and if the resin material is bonded to both surfaces of the metal material, the entire metal material May be heated.
本発明に係る複合部材は、上述したように基本的に、樹脂材の軟化または溶融に伴うアンカー効果等によって、金属材と樹脂材が機械的に接合される。従って樹脂材は、接合時の加熱により、軟化または溶融する限り、熱可塑性樹脂でも熱硬化性樹脂でもよく、その種類は問わない。もっとも、金属材中の金属元素(M)は、酸素(O)や窒素(N)を介して樹脂材中の炭素(C)と結合(M−O−C−またはM−N−C−)し得る。この場合、金属材と樹脂材は、単なる機械的結合に留まらず、化学的結合もすることになり、両者はより強固に接合される。従って金属材へ接合される樹脂材は、カルボニル基、カルボキシル基、ヒドロキシル基等を構成する酸素(O)またはアミノ基等を構成する窒素(N)を含むと好ましい。 As described above, in the composite member according to the present invention, the metal material and the resin material are mechanically joined basically by the anchor effect or the like accompanying the softening or melting of the resin material. Therefore, the resin material may be either a thermoplastic resin or a thermosetting resin as long as it is softened or melted by heating at the time of joining. However, the metal element (M) in the metal material is bonded to the carbon (C) in the resin material via oxygen (O) or nitrogen (N) (M-O-C- or M-N-C-). Can do. In this case, the metal material and the resin material are not only mechanically bonded but also chemically bonded, and both are bonded more firmly. Therefore, the resin material bonded to the metal material preferably contains oxygen (O) constituting a carbonyl group, a carboxyl group, a hydroxyl group or the like, or nitrogen (N) constituting an amino group or the like.
(2)本発明に係る粒状突起がある金属材の表面は、優れた撥水性または撥油性を発揮し得る。さらに、表面エネルギーを低下させる被覆材を金属材の表面に設けると、その撥水性は一層向上する。このような被覆材として、例えば、シランカップリング剤、フッ素樹脂コーティング剤等がある。これらの被覆材は、水接触角を例えば、5°以上向上させるものであると好ましい。また被覆材の表面エネルギーは、例えば、40mN/m以下であると好ましい。この被覆材の表面エネルギーは接触角計を用いて2溶媒以上から接触角を求めたものである。例えば、水、メチレンアイオダイドなど表面エネルギーが既知の2種類の液体を用いて表面エネルギーは特定される。 (2) The surface of the metal material having the granular protrusions according to the present invention can exhibit excellent water repellency or oil repellency. Furthermore, when a coating material that lowers the surface energy is provided on the surface of the metal material, the water repellency is further improved. Examples of such a covering material include a silane coupling agent and a fluororesin coating agent. These coating materials preferably have a water contact angle of, for example, 5 ° or more. The surface energy of the covering material is preferably 40 mN / m or less, for example. The surface energy of the coating material is obtained by obtaining the contact angle from two or more solvents using a contact angle meter. For example, the surface energy is specified using two types of liquids with known surface energy, such as water and methylene iodide.
この場合、突起密度が10個/μm2以上さらには25個/μm2以上であり、突起高さ(高低差)が10〜200nmさらには50〜150nmであると好ましい。 In this case, the protrusion density is preferably 10 pieces / μm 2 or more, further 25 pieces / μm 2 or more, and the protrusion height (height difference) is preferably 10 to 200 nm, more preferably 50 to 150 nm.
なお、このような撥水性等は金属材の表面における濡れ性によって評価される。濡れ性は、流体が金属材の界面との間に形成する接触角(濡れ角)により特定される。このような金属材の表面における流体の状態には、WenzelモードとCassieモードが考えられる。Wenzelモードは金属材の表面にできた凹凸構造の底部まで液体の浸入を想定した状態であり、Cassieモードは空気等の介在により金属材の表面にできた凹凸構造の底部まで液体が浸入せず、凹凸構造の凸部の先端で液体を支える状態である。本発明に関していう撥水性は、Cassieモードに基づくと考えられる。 Such water repellency is evaluated by wettability on the surface of the metal material. The wettability is specified by a contact angle (wet angle) formed between the fluid and the interface of the metal material. As the fluid state on the surface of such a metal material, a Wenzel mode and a Cassie mode can be considered. The Wenzel mode is a state in which liquid enters the bottom of the concavo-convex structure formed on the surface of the metal material, and the Cassie mode does not allow liquid to enter the bottom of the concavo-convex structure formed on the surface of the metal material by the intervention of air or the like. In this state, the liquid is supported by the tip of the convex portion of the concave-convex structure. The water repellency referred to in the context of the present invention is believed to be based on the Cassie mode.
実施例を挙げて本発明をより具体的に説明する。
《試料の製造》
(1)供試材
無酸素銅からなる板材(金属材)を供試材とした。この供試材にバフ研磨(研磨材:アルミナ/粒径0.05mm)による鏡面加工を施した。これにより、その表面粗さをRa=0.04、Rz=0.23(JIS)程度とした。これをステアリン酸(脂肪酸)のヘキサデカン溶液(10−5mol/L)に浸漬して、ステアリン酸を供試材の表面へ付着させた。なお、比較のため、ステアリン酸を付着させない供試材も用意した。
The present invention will be described more specifically with reference to examples.
<Production of sample>
(1) Test material A plate material (metal material) made of oxygen-free copper was used as a test material. The specimen was mirror-finished by buffing (abrasive: alumina / particle size 0.05 mm). Thereby, the surface roughness was set to Ra = 0.04 and Rz = 0.23 (JIS). This was immersed in a hexadecane solution (10 −5 mol / L) of stearic acid (fatty acid) to adhere stearic acid to the surface of the test material. For comparison, a test material to which stearic acid was not attached was also prepared.
(2)プラズマ処理(酸素導入工程、プラズマ供給工程)
各供試材の表面(被処理面)へプラズマを照射する様子を図1に示した。ここで用いたプラズマガンは交流励起式である(NUエコ・エンジニアリング社製μ−AP)。この際の処理条件は、プラズマガス:アルゴンガス、ガス流入量:4L/min、電極間電圧:80Vとした。またプラズマガンの電極出口から供試材の被処理面までの距離(照射距離)は5mmとした。
(2) Plasma treatment (oxygen introduction process, plasma supply process)
FIG. 1 shows a state in which plasma is irradiated on the surface (surface to be treated) of each test material. The plasma gun used here is an alternating current excitation type (μ-AP manufactured by NU Eco-Engineering). The processing conditions at this time were plasma gas: argon gas, gas inflow: 4 L / min, and interelectrode voltage: 80V. The distance (irradiation distance) from the electrode exit of the plasma gun to the surface to be processed of the test material was 5 mm.
但し、プラズマ処理を行う雰囲気および処理時間は、各供試材毎に表1に示すように変更した。表1中に示した「大気圧」雰囲気は、温度:室温、湿度:40%、酸素濃度:17.4%である。また「アルゴン」雰囲気は、大気を遮断するために容器を用いて形成され、圧力:大気圧下、温度:室温、酸素濃度:0.01%未満である。 However, the atmosphere and processing time for plasma treatment were changed as shown in Table 1 for each specimen. The “atmospheric pressure” atmosphere shown in Table 1 is temperature: room temperature, humidity: 40%, oxygen concentration: 17.4%. In addition, an “argon” atmosphere is formed by using a container to block the atmosphere, and pressure: atmospheric pressure, temperature: room temperature, and oxygen concentration: less than 0.01%.
こうしてプラズマガンで発生したプラズマをガス流に沿って電極外に噴出させ、供試材へ照射するプラズマ処理を行い、表1に示す各試料を得た(プラズマ供給工程)。 The plasma generated in the plasma gun was ejected outside the electrode along the gas flow, and plasma treatment was performed to irradiate the test material to obtain each sample shown in Table 1 (plasma supply process).
《観察および測定》
(1)各試料のプラズマ処理後の被処理面(プラズマ処理面)を、顕微鏡観察した写真を図2A〜2C、図3A〜3Bおよび図4に示した。図2A〜2Cは試料No.1、2およびC1のプラズマ処理面をそれぞれ原子間力顕微鏡(AFM)で観察したAFM像であり、図3A〜3Bは試料No.2および4のプラズマ処理面をそれぞれ走査型電子顕微鏡(SEM)で観察したSEM像であり、図4は試料No.2のプラズマ処理面を透過型電子顕微鏡(TEM)で観察したTEM像である。
<< Observation and measurement >>
(1) FIGS. 2A to 2C, FIGS. 3A to 3B, and FIG. 4 show photographs obtained by microscopic observation of the surface to be treated (plasma treated surface) after the plasma treatment of each sample. 2A to 2C are sample Nos. FIGS. 3A to 3B are AFM images obtained by observing plasma processing surfaces of 1, 2 and C1 with an atomic force microscope (AFM). FIGS. 4A and 4B are SEM images obtained by observing the plasma-treated surfaces of 2 and 4 with a scanning electron microscope (SEM), respectively. It is the TEM image which observed the plasma processing surface of 2 with the transmission electron microscope (TEM).
(2)試料No.1〜3のプラズマ処理面に形成された粒状突起について、その突起径(直径)、突起高さ(高低差)および突起密度を測定し、各平均値を表1に併せて示した。突起径はAFM像を画像解析して断面曲線から突起と基盤平坦部の境界を探索することにより求めた。突起高さはAFM像の断面境界から突起形状の頂点と基盤平坦部との差を求めることにより測定し、AFM像1μm四方の相加平均値を算出した。突起密度もAFM像を画像解析して高さ情報を二値化し、1μm四方の突起を数え上げることにより求めた。 (2) Sample No. With respect to the granular protrusions formed on the plasma treatment surfaces 1 to 3, the protrusion diameter (diameter), protrusion height (height difference) and protrusion density were measured, and each average value is shown in Table 1. The projection diameter was obtained by image analysis of the AFM image and searching for the boundary between the projection and the base flat portion from the cross-sectional curve. The protrusion height was measured by obtaining the difference between the apex of the protrusion shape and the base flat portion from the cross-sectional boundary of the AFM image, and the arithmetic average value of 1 μm square of the AFM image was calculated. The protrusion density was also obtained by image analysis of the AFM image, binarizing the height information, and counting protrusions of 1 μm square.
(3)試料No.2のプラズマ処理面のTEM像(図4)中に示した領域1、領域2および領域3の元素濃度比(成分組成)を、エネルギー分散型X線分光法(EDX)により測定した。この結果を表2に示す。なお図4中の領域1は、突起を集束イオンビーム(FIB)により切断した断面であり、領域2および領域3は突起のない部分である。 (3) Sample No. The element concentration ratio (component composition) of region 1, region 2 and region 3 shown in the TEM image (FIG. 4) of the plasma treated surface 2 was measured by energy dispersive X-ray spectroscopy (EDX). The results are shown in Table 2. Region 1 in FIG. 4 is a cross section obtained by cutting the protrusion with a focused ion beam (FIB), and regions 2 and 3 are portions without protrusions.
(4)X線光電子分光法(XPS)により観察した試料No.2および4の被処理面のオージェスペクトル(Cu−LMM1s)を、それぞれ図5Aおよび図5Bに示した。 (4) Sample No. observed by X-ray photoelectron spectroscopy (XPS). Auger spectra (Cu-LMM1s) of the surfaces to be treated 2 and 4 are shown in FIGS. 5A and 5B, respectively.
《評価》
(1)粒状突起の創成
表1および図2A〜2Cおよび図3Aおよび図3Bに示す写真から明らかなように、被処理面にステアリン酸被膜を形成した試料へ大気圧プラズマ処理を施すことにより、微細な粒状突起が多数隆起した表面が得られることがわかった。
<Evaluation>
(1) Creation of granular protrusions As is apparent from the photographs shown in Table 1 and FIGS. 2A to 2C and FIGS. 3A and 3B, by subjecting a sample having a stearic acid film formed on the surface to be processed to atmospheric pressure plasma treatment, It was found that a surface with a lot of fine granular protrusions was obtained.
特に、表1中の試料No.1〜3と図2A、図2Bおよび図3Aから明らかなように、15〜60秒程度の短時間のプラズマ処理で、多数の粒状突起が創成されることもわかった。またプラズマ処理時間が長くなるほど、粒状突起の個数(密度)自体は減少するが、一つ一つの粒状突起は成長してサイズが大きくなることがわかった。 In particular, Sample No. As can be seen from FIGS. 1 to 3 and FIGS. 2A, 2B and 3A, it was also found that a large number of granular protrusions were created in a short plasma treatment of about 15 to 60 seconds. It was also found that the longer the plasma treatment time, the smaller the number (density) of the granular protrusions itself, but each granular protrusion grew and increased in size.
このような現象が生じる理由は定かではないが、現状では次のように考えられる。先ず、プラズマ処理の開始直後の短時間内に、酸素活性種が金属材の被処理面へ到達して、核となる酸化物(特定酸化物)が生成される。そして、プラズマ処理の進行と共に被処理面が加熱され、その温度が上昇する。この温度上昇に伴い、その特定酸化物が移動して凝集するようになり、好適なサイズの粒状突起に成長したと考えられる。なお、核となる微細な特定酸化物は、鏡面加工時に被処理面へ導入された転位等の欠陥を起点として生成されると考えられる。 The reason why such a phenomenon occurs is not clear, but at present, it is considered as follows. First, within a short time immediately after the start of the plasma treatment, the oxygen active species reaches the surface to be treated of the metal material, and an oxide (specific oxide) serving as a nucleus is generated. As the plasma treatment proceeds, the surface to be treated is heated and its temperature rises. As the temperature rises, the specific oxide moves and aggregates, and it is considered that the protrusions have grown to a suitable size. In addition, it is considered that a fine specific oxide serving as a nucleus is generated starting from defects such as dislocations introduced into the surface to be processed during mirror finishing.
また、表1中の試料No.C1および図2Cから明らかなように、実質的に酸素の存在しないアルゴン雰囲気でプラズマ処理を行っても粒状突起は創成されないことがわかった。逆にいうと、粒状突起を創成するには酸素雰囲気(大気圧雰囲気)でプラズマ処理を行うことが必要であることがわかる。 Sample No. in Table 1 As is apparent from C1 and FIG. 2C, it was found that the granular protrusions were not created even when the plasma treatment was performed in an argon atmosphere substantially free of oxygen. In other words, it can be seen that it is necessary to perform plasma treatment in an oxygen atmosphere (atmospheric pressure atmosphere) in order to create granular protrusions.
(2)粒状突起の組成
図4および表2から、粒状突起(領域1の部分)は主にCu2O(準安定酸化物)からなることがわかった。また粒状突起の形成されていない平坦な部分(領域1、2の部分)は、殆ど酸化されていない(すなわちCuからなる)こともわかった。
(2) Composition of granular protrusion From FIG. 4 and Table 2, it was found that the granular protrusion (part of region 1) was mainly composed of Cu 2 O (metastable oxide). It was also found that the flat portions where no granular protrusions were formed (regions 1 and 2) were hardly oxidized (that is, made of Cu).
(3)ステアリン酸被膜の影響
表1中の試料No.1および4と図3Aおよび図3Bから明らかなように、ステアリン酸被膜がなくても微小な特定酸化物(粒状突起)は形成され得るが、ステアリン酸被膜を設けた被処理面へプラズマ処理を施すことにより、好適なサイズの粒状突起が多数創成されることがわかる。
(3) Effect of stearic acid film Sample No. 1 in Table 1 As is clear from FIGS. 1 and 4 and FIGS. 3A and 3B, fine specific oxides (granular protrusions) can be formed without the stearic acid coating, but plasma treatment is applied to the surface to be treated with the stearic acid coating. It turns out that many granular protrusions of suitable size are created by applying.
このことは、図5Aおよび図5Bに示すXPSの分析結果からもわかる。つまり試料No.2のように被処理面にステアリン酸被膜がある場合(図5A)、プラズマ処理面にCuのピークが現れている。これに対して試料No.4のようにステアリン酸被膜がない場合(図5B)、プラズマ処理面にCuのピークが現れない。これは、ステアリン酸被膜がある場合は被処理面に酸化されていないCuが残存するが、ステアリン酸被膜がない場合は被処理面全体が酸化され、点在的な粒状突起が生成され難いことを意味している。 This can also be seen from the XPS analysis results shown in FIGS. 5A and 5B. That is, sample no. When a stearic acid film is present on the surface to be treated as shown in FIG. 2 (FIG. 5A), a Cu peak appears on the plasma treated surface. In contrast, sample no. When there is no stearic acid coating as in FIG. 4 (FIG. 5B), no Cu peak appears on the plasma treated surface. This is because, when there is a stearic acid film, unoxidized Cu remains on the surface to be processed, but when there is no stearic acid film, the entire surface to be processed is oxidized and it is difficult to generate scattered granular projections. Means.
また図5Aおよび図5Bからわかるように、プラズマ処理前後を通じてCu2+のピークがあまり観られない。このことから、(大気圧)プラズマ処理により被処理面に生成される酸化物は、ステアリン酸被膜の有無に拘わらず、実質的にCu2O(準安定酸化物)であることがわかった。 Further, as can be seen from FIG. 5A and FIG. 5B, the Cu 2+ peak is hardly observed before and after the plasma treatment. From this, it was found that the oxide produced on the surface to be treated by the (atmospheric pressure) plasma treatment was substantially Cu 2 O (metastable oxide) regardless of the presence or absence of the stearic acid coating.
(4)酸素活性種(酸素ラジカル)
前述したように、プラズマ処理の雰囲気によって粒状突起の創成が影響を受ける。そこで大気圧雰囲気の場合(酸素濃度:17.4%)とアルゴン雰囲気の場合(酸素濃度:0.01%未満)について、プラズマ発光分光分析した結果を図6Aおよび図6Bに示した。これらから大気圧雰囲気では、アルゴン雰囲気では観られないピークが検出され、酸素ラジカル(O*)と酸化窒素ラジカル(NO*)が生じていることがわかった。特に、酸素ラジカル(酸素活性種)のピークが顕著であった。このことから、粒状突起は酸素ラジカル(O*)により創成されると考えられる。
(4) Oxygen active species (oxygen radical)
As described above, the creation of granular protrusions is affected by the plasma treatment atmosphere. Therefore, the results of plasma emission spectroscopic analysis in the case of an atmospheric pressure atmosphere (oxygen concentration: 17.4%) and the case of an argon atmosphere (oxygen concentration: less than 0.01%) are shown in FIGS. 6A and 6B. From these, it was found that in the atmospheric pressure atmosphere, peaks not observed in the argon atmosphere were detected, and oxygen radicals (O * ) and nitrogen oxide radicals (NO * ) were generated. In particular, the peak of oxygen radical (oxygen active species) was prominent. From this, it is considered that the granular protrusions are created by oxygen radicals (O * ).
《複合部材》
(1)製造
本発明の金属系部材の一例として、図7に示すように、粒状突起を有する無酸化銅からなる金属基板(金属材)mへ、アクリル樹脂板(樹脂材)rをレーザー接合した複合部材を検討した。レーザー光は、金属基板mの接合界面(粒状突起がある側)へ照射し、接合界面近傍の金属基板mを加熱した(加熱工程)。この際、金属基板mとアクリル樹脂板rは、ガラス板G1とアクリル板G2により0.4MPaの加圧力で挟持し、そのガラス板G1側からレーザー光を照射した。
<Composite material>
(1) Manufacture As an example of the metal-based member of the present invention, as shown in FIG. 7, an acrylic resin plate (resin material) r is laser-bonded to a metal substrate (metal material) m made of non-oxide copper having granular protrusions. The composite member was examined. The laser beam was applied to the bonding interface (side with the granular protrusions) of the metal substrate m to heat the metal substrate m in the vicinity of the bonding interface (heating process). At this time, the metal substrate m and the acrylic resin plate r were sandwiched between the glass plate G1 and the acrylic plate G2 with a pressure of 0.4 MPa, and laser light was irradiated from the glass plate G1 side.
ここで用いた金属基板mはφ10mm×厚み2mm、アクリル樹脂板rは10mm×10mm×3mm、レーザー光は波長:920nm、接合界面におけるスポット径:2.0mm、レーザー出力:25W、照射時間:30秒とした。 The metal substrate m used here is φ10 mm × thickness 2 mm, the acrylic resin plate r is 10 mm × 10 mm × 3 mm, the laser beam has a wavelength of 920 nm, a spot diameter at the bonding interface: 2.0 mm, a laser output: 25 W, an irradiation time: 30 Seconds.
(2)評価
表1の試料No.1と同様なプラズマ処理面を有する金属基板mは、アクリル樹脂板rと強固に接合することがわかった。試料No.3と同様なプラズマ処理面を有する金属基板mも、アクリル樹脂板rと接合し得たが、衝撃で剥離した。
(2) Evaluation Sample No. in Table 1 It was found that the metal substrate m having the same plasma treated surface as 1 was firmly bonded to the acrylic resin plate r. Sample No. The metal substrate m having the same plasma treated surface as 3 could be bonded to the acrylic resin plate r, but peeled off by impact.
参考に、他の金属基板mについても、同様なレーザー接合により、アクリル樹脂板rと接合するか否かを評価した。用意した金属基板mは、試料No.4、C2およびC3に相当するプラズマ処理前のものと同様である。また、無酸化銅板にサンドブラスト処理したもの(Ra=0.74、Rz=5.04)も用意した。前三者の金属基板mはいずれも、アクリル樹脂板rと接合しなかった。サンドブラスト処理した金属基板mはアクリル樹脂板rと接合できたが、接合界面に樹脂発泡を生じた。 For reference, it was evaluated whether or not other metal substrates m were bonded to the acrylic resin plate r by similar laser bonding. The prepared metal substrate m is Sample No. This is the same as that before the plasma treatment corresponding to 4, C2 and C3. In addition, a non-oxidized copper plate that was sandblasted (Ra = 0.74, Rz = 0.04) was also prepared. None of the former three metal substrates m were bonded to the acrylic resin plate r. The metal substrate m subjected to the sandblast treatment could be bonded to the acrylic resin plate r, but resin foaming occurred at the bonding interface.
ちなみに、試料No.C2と同等なプラズマ処理前の被処理面のAFM象を図8Aに、試料No.C3と同等なプラズマ処理前の被処理面のAFM象を図8Bにそれぞれ示した。いずれの場合も、熱酸化では、被処理面に粒状の酸化物が生成されていないことがわかる。上述したことから、接着剤等を用いずに金属材と樹脂材を強固にレーザー接合するには、本発明に係る粒状突起を接合界面に形成することが有効であることがわかった。 Incidentally, Sample No. An AFM image of the surface to be processed before plasma processing equivalent to C2 is shown in FIG. FIG. 8B shows AFM images of the surface to be processed before plasma processing equivalent to C3. In either case, it can be seen that no particulate oxide is generated on the surface to be treated by thermal oxidation. From the above, it was found that it is effective to form the granular protrusions according to the present invention at the bonding interface in order to strongly laser-bond the metal material and the resin material without using an adhesive or the like.
《濡れ性》
(1)観察および測定
表面における水接触角を測定して、各金属材の濡れ性を評価した。この結果を図9A〜9Eに示した。図9Aは、試料No.2に関するプラズマ処理面の濡れ性を示す。図9Bは、そのプラズマ処理面へシランカップリング剤(被覆材)を塗布したときの濡れ性を示す。図9Cは、試料No.4に関するプラズマ処理前の被処理面の濡れ性を示す。図9Dは、そのプラズマ処理前の被処理面へシランカップリング剤を塗布したときの濡れ性を示す。図9Eは、試料No.C2に関するプラズマ処理前の被処理面の濡れ性を示す。
《Wettability》
(1) Observation and measurement The water contact angle on the surface was measured to evaluate the wettability of each metal material. The results are shown in FIGS. FIG. 2 shows the wettability of the plasma-treated surface with respect to 2; FIG. 9B shows wettability when a silane coupling agent (coating material) is applied to the plasma treated surface. FIG. 4 shows the wettability of the surface to be processed before the plasma treatment. FIG. 9D shows wettability when a silane coupling agent is applied to the surface to be treated before the plasma treatment. FIG. The wettability of the to-be-processed surface before the plasma processing regarding C2 is shown.
ここで用いたシランカップリング剤はデシルトリクロロシランであり、その表面エネルギーは濡れ性評価試験機で測定して25mN/m以下であった。 The silane coupling agent used here was decyltrichlorosilane, and its surface energy was 25 mN / m or less as measured by a wettability evaluation tester.
(2)評価
図9Aと図9Cおよび図9Eとを比較すると明らかなように、表面に粒状突起が存在すると、水接触角が大幅に向上した。つまり、金属材の表面に粒状突起を創成することにより、その表面における撥水性を大幅に向上させ得ることがわかった。
(2) Evaluation As is clear when FIG. 9A is compared with FIG. 9C and FIG. 9E, the water contact angle is greatly improved when the granular protrusions are present on the surface. In other words, it has been found that the water repellency on the surface can be greatly improved by creating granular protrusions on the surface of the metal material.
また図9Bと図9Dを比較すると明らかなように、単なる鏡面(バフ研磨面)にシランカップリング剤を塗布しても水接触角は約80°であるが、粒状突起がある表面にシランカップリング剤を塗布すると水接触角は約90にもなり、水接触角が大幅に向上することもわかった。なお、このような粒状突起による撥水性の向上は、Cassieモードに依ると考えられる。 9B and 9D, the water contact angle is about 80 ° even when a silane coupling agent is applied to a simple mirror surface (buffed surface), but the surface with granular protrusions has a silane cup. It was also found that when the ring agent was applied, the water contact angle was about 90, and the water contact angle was greatly improved. In addition, it is thought that the improvement in water repellency due to such granular protrusions depends on the Cassie mode.
Claims (12)
前記安定酸化物で被覆されていないと共に脂肪酸または脂肪酸塩を付着させた前記金属材の表面へ酸素活性種を導入する酸素導入工程を備え、
該表面から隆起した前記特定遷移金属元素の酸化物からなる粒状突起が形成されることを特徴とする金属系部材の製造方法。 A method for producing a metal member comprising a metal material containing a specific transition metal element capable of generating a stable oxide and a metastable oxide having different oxidation numbers ,
An oxygen introduction step of introducing an oxygen active species into the surface of the metal material not covered with the stable oxide and having a fatty acid or fatty acid salt attached thereto ;
Method for producing a metal-based member granular protrusions consisting of oxides of the specific transition metal element raised from the surface is characterized by Rukoto formed.
前記準安定酸化物は酸化銅(I)(Cu2O)である請求項1〜10のいずれかに記載の金属系部材の製造方法。 The specific transition metal element is copper (Cu),
The method for producing a metal-based member according to claim 1, wherein the metastable oxide is copper (I) oxide (Cu 2 O).
前記準安定酸化物は酸化鉄(II)(FeO)を含む請求項1〜11のいずれかに記載の金属系部材の製造方法。 The specific transition metal element is iron (Fe),
The method for producing a metal-based member according to any one of claims 1 to 11, wherein the metastable oxide includes iron (II) oxide (FeO).
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