JP5907810B2 - Liquid crystal display - Google Patents
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Description
本発明は表示装置に係り、特に視野角特性が優れ、かつ、高精細画面を実現できる壁電極を有するIPS方式の液晶表示装置に関する。 The present invention relates to a display device, and more particularly to an IPS liquid crystal display device having wall electrodes that have excellent viewing angle characteristics and can realize a high-definition screen.
液晶表示装置に使用される液晶表示パネルは、画素電極および薄膜トランジスタ(TFT)等を有する画素がマトリクス状に形成されたTFT基板と、TFT基板に対向して、TFT基板の画素電極と対応する場所にカラーフィルタ等が形成された対向基板が配置され、TFT基板と対向基板の間に液晶が挟持されている。そして液晶分子による光の透過率を画素毎に制御することによって画像を形成している。 A liquid crystal display panel used for a liquid crystal display device includes a TFT substrate in which pixels having pixel electrodes and thin film transistors (TFTs) are formed in a matrix, and a location corresponding to the pixel electrode of the TFT substrate facing the TFT substrate. A counter substrate on which a color filter or the like is formed is disposed, and a liquid crystal is sandwiched between the TFT substrate and the counter substrate. An image is formed by controlling the light transmittance of the liquid crystal molecules for each pixel.
液晶表示装置はフラットで軽量であることから、色々な分野で用途が広がっている。携帯電話やDSC(Digital Still Camera)等には、小型の液晶表示装置が広く使用されている。液晶表示装置では視野角特性が問題である。視野角特性は、画面を正面から見た場合と、斜め方向から見た場合に、輝度が変化したり、色度が変化したりする現象である。視野角特性は、液晶分子を水平方向の電界によって動作させるIPS(In Plane Switching)方式が優れた特性を有している。 Since liquid crystal display devices are flat and lightweight, they are used in various fields. Small liquid crystal display devices are widely used for mobile phones, DSCs (Digital Still Cameras), and the like. A viewing angle characteristic is a problem in a liquid crystal display device. The viewing angle characteristic is a phenomenon in which luminance changes or chromaticity changes when the screen is viewed from the front and when viewed from an oblique direction. The viewing angle characteristic is excellent in an IPS (In Plane Switching) system in which liquid crystal molecules are operated by a horizontal electric field.
IPS方式であっても、高精細な画面で、画素の大きさが小さくなった場合は、透過率が問題となり、画面輝度が問題となる。一方、液晶層内に突出した壁構造の壁面に形成した電極を利用して液晶層に電界を印加する壁電極IPS-LCD(In-Plane-Swiching-Liquid Crystal Display)は、平面電極を用いた従来のIPS-LCDに比較して液晶層に、より平行な電界を印加可能なため、より高い透過率を実現することができる。 Even in the IPS system, when the pixel size is reduced on a high-definition screen, the transmittance becomes a problem, and the screen brightness becomes a problem. On the other hand, a wall electrode IPS-LCD (In-Plane-Swiching-Liquid Crystal Display) that applies an electric field to the liquid crystal layer using an electrode formed on the wall surface of the wall structure protruding into the liquid crystal layer uses a planar electrode. Since a more parallel electric field can be applied to the liquid crystal layer as compared with the conventional IPS-LCD, higher transmittance can be realized.
なお、「特許文献1」には、液晶表示装置において、寄生容量低減の観点からIPS方式に最適化した柱状スペーサが記載されている。また、「特許文献2」には、IPS方式において、配線電位の影響を抑制するため、配線上を壁構造で覆い、その上にコモン電極を形成する構成が記載されている。但し、「特許文献2」には、壁構造の詳細な構成については記載がない。
Note that “
壁電極方式IPSにおける壁構造は、画素境界部のブラックマトリクス下に配置するため、高精細化により画素幅が減少しても液晶層の配向変化の仕方は一定であり、壁電極IPS-LCDの表示モード効率は高精細化によらず一定である。尚ここで、表示モード効率とは基板透過率で規格化した透過率である。 Since the wall structure in the wall electrode type IPS is arranged under the black matrix at the pixel boundary, even if the pixel width is reduced due to high definition, the way of changing the orientation of the liquid crystal layer is constant, and the wall electrode IPS-LCD The display mode efficiency is constant regardless of high definition. Here, the display mode efficiency is a transmittance normalized by the substrate transmittance.
壁電極IPS-LCDの課題の一つが壁構造周囲の光漏れであり、光漏れは暗表示の透過率を増大するためコントラスト比を低下させる。光漏れの原因は壁構造周囲での配向変化であり、これには壁構造の断面構造が関与している。 One of the problems of the wall electrode IPS-LCD is light leakage around the wall structure, and the light leakage increases the transmittance of dark display, and thus reduces the contrast ratio. The cause of light leakage is an orientation change around the wall structure, which involves the cross-sectional structure of the wall structure.
壁構造を形成するにはまず初めに有機レジストPRをホトリソグラフでパターンニングするが、有機レジストPR自体はほぼ方形の断面形状になるように加工できる。この上に電極や絶縁膜を積層した後最終的に配向膜を形成するが、その際には配向膜材料を含む溶液、すなわち配向膜溶液を塗布する。配向膜溶液はその表面張力により有機レジストPRの基部に集まる傾向にあり、配向膜は有機レジストPRの基部に厚く分布する。その結果壁構造の基部に緩やかな傾斜を有する部分、すなわち傾斜部が形成される。光漏れの原因は壁構造近傍の界面反射もしくは壁面のアンカリング効果と推測されるが、傾斜部はこれらを増大する効果がある。光漏れ低減には配向膜まで含めた壁構造の断面形状を方形としなければならないが、従来の発明ではそのような観点からの構造最適化はなされていなかった。 In order to form the wall structure, the organic resist PR is first patterned by photolithography, but the organic resist PR itself can be processed to have a substantially square cross-sectional shape. An alignment film is finally formed after laminating an electrode and an insulating film thereon. In this case, a solution containing an alignment film material, that is, an alignment film solution is applied. The alignment film solution tends to gather at the base of the organic resist PR due to its surface tension, and the alignment film is thickly distributed at the base of the organic resist PR. As a result, a portion having a gentle inclination at the base of the wall structure, that is, an inclined portion is formed. The cause of light leakage is presumed to be the interface reflection near the wall structure or the anchoring effect of the wall surface, but the inclined portion has the effect of increasing these. In order to reduce light leakage, the cross-sectional shape of the wall structure including the alignment film must be rectangular, but the conventional invention has not been optimized from such a viewpoint.
本発明の課題は、壁電極周辺からの光漏れを防止し、高精細画面においても、コントラストの良い液晶表示装置を実現することである。 An object of the present invention is to realize a liquid crystal display device that prevents light leakage from the periphery of a wall electrode and has good contrast even on a high-definition screen.
配向膜形成前の段階で壁構造の基部に凹部を形成する。具体的には近接する壁構造の間に絶縁膜を形成し、絶縁膜の膜厚は壁構造の近傍で薄くなるようにする。本発明の主な手段は次のとおりである。 A recess is formed at the base of the wall structure before the alignment film is formed. Specifically, an insulating film is formed between adjacent wall structures, and the thickness of the insulating film is reduced in the vicinity of the wall structure. The main means of the present invention are as follows.
(1)ソース電極とコモン電極とTFTとカラーフィルタを有する第1の基板と、第2の基板との間に液晶が挟持された液晶表示装置であって、前記第1の基板における画素は、映像信号線と走査信号線で囲まれた領域によって定義され、前記画素には、第1の壁構造と第2の壁構造が対向して形成され、前記第1の壁構造と前記第2の壁構造の間には、第3の壁構造が形成され、前記第1の壁構造と前記第2の壁構造は同じ高さであり、かつ、前記第3の壁構造よりも高く、前記第1の壁構造と前記第2の壁構造と前記第3の壁構造は前記コモン電極によって覆われ、前記コモン電極は、第1の絶縁膜によって覆われ、前記第1の壁構造と前記第2の壁構造と前記第3の壁構造の側部における前記第1の絶縁膜の上にソース電極が形成され、前記第1の壁構造と前記第3の壁構造の間、および、前記第2の壁構造と前記第3の壁構造の間は平坦化膜によって充填され、前記平坦化膜は、前記第1の壁構造および前記第2の壁構造の基部において凹部が形成され、前記凹部には、配向膜が存在していることを特徴とする液晶表示装置。 (1) A liquid crystal display device in which liquid crystal is sandwiched between a first substrate having a source electrode, a common electrode, a TFT, and a color filter, and a second substrate, and the pixels on the first substrate are The pixel is defined by a region surrounded by the video signal line and the scanning signal line. In the pixel, a first wall structure and a second wall structure are formed to face each other, and the first wall structure and the second wall structure are formed to face each other. A third wall structure is formed between the wall structures, and the first wall structure and the second wall structure have the same height and are higher than the third wall structure, 1 wall structure, the second wall structure, and the third wall structure are covered by the common electrode, the common electrode is covered by a first insulating film, and the first wall structure and the second wall structure are covered by the common electrode. A source electrode is formed on the first insulating film on the side wall of the first wall structure and the third wall structure. A space between the first wall structure and the third wall structure and between the second wall structure and the third wall structure is filled with a planarizing film, and the planarizing film is filled with the first wall structure. A concave portion is formed in the base portion of the wall structure and the second wall structure, and an alignment film is present in the concave portion.
(2)ソース電極とコモン電極とTFTとカラーフィルタを有する第1の基板と、第2の基板との間に液晶が挟持された液晶表示装置であって、前記第1の基板における画素は、映像信号線と走査信号線で囲まれた領域によって定義され、前記画素には、第1の壁構造と第2の壁構造が対向して形成され、前記第1の壁構造と前記第2の壁構造は第1の絶縁膜によって覆われ、前記第1の壁構造の側部おける前記第1の絶縁膜の上に前記ソース電極が形成され、前記第2の壁構造の側部における前記第2の絶縁膜の上に第1のコモン電極が形成され、前記第1の壁構造と前記第2の壁構造の間には、平坦化膜が形成され、前記平坦化膜は、前記第1の壁構造の基部および前記第2の壁構造の基部において凹部が形成され、前記凹部には配向膜が存在していることを特徴とする液晶表示装置。 (2) A liquid crystal display device in which liquid crystal is sandwiched between a first substrate having a source electrode, a common electrode, a TFT, and a color filter, and a second substrate, wherein the pixels on the first substrate are: The pixel is defined by a region surrounded by the video signal line and the scanning signal line. In the pixel, a first wall structure and a second wall structure are formed to face each other, and the first wall structure and the second wall structure are formed to face each other. The wall structure is covered with a first insulating film, the source electrode is formed on the first insulating film on a side portion of the first wall structure, and the first electrode on the side portion of the second wall structure is formed. A first common electrode is formed on the two insulating films; a planarizing film is formed between the first wall structure and the second wall structure; A recess is formed in the base of the wall structure and the base of the second wall structure, and an alignment film is formed in the recess. The liquid crystal display device, characterized in that is present.
壁構造近傍における傾斜部形成を防ぐことができるため、該傾斜部からの光漏れを低減してコントラスト比を向上できる。また、壁構造周辺の光漏れを低減すれば場所による光漏れのばらつきも低減できるため、画面内でより均一なコントラスト比を実現できる。本発明は、特に、高精細表示が要求される中小型液晶表示装置に有効である。 Since the formation of the inclined portion in the vicinity of the wall structure can be prevented, light leakage from the inclined portion can be reduced and the contrast ratio can be improved. Further, if the light leakage around the wall structure is reduced, the variation in light leakage depending on the location can be reduced, so that a more uniform contrast ratio can be realized in the screen. The present invention is particularly effective for small and medium-sized liquid crystal display devices that require high-definition display.
壁構造の周囲で液晶層の配向方向は壁構造の壁面に平行に近づくように変化し、その結果として壁構造の周囲で光漏れが生じる。壁構造上に配向処理するには偏光紫外光を用いた光配向法を用いるが、このような配向方向変化の一因として偏光紫外光照射時の界面反射による振動方向の回転が挙げられる。すなわち、界面反射率はS偏光成分とP偏光成分で異なり、一般にS偏光成分の方が界面反射率が高い。壁面での反射光はS偏光成分が増大するため振動方向が壁構造壁面の平行方向に近づくように変化し、光配向処理において界面反射成分が実効的であれば配向処理方向は壁構造壁面の平行方向に近づくように変化する。従って、液晶層の配向方向もまた壁構造壁面の平行方向に近づくように変化する。 The alignment direction of the liquid crystal layer changes around the wall structure so as to approach the wall surface of the wall structure, and as a result, light leakage occurs around the wall structure. For alignment treatment on the wall structure, a photo-alignment method using polarized ultraviolet light is used. One cause of such a change in alignment direction is rotation of the vibration direction due to interface reflection during irradiation with polarized ultraviolet light. That is, the interface reflectance differs between the S-polarized component and the P-polarized component, and generally the S-polarized component has a higher interface reflectance. The reflected light from the wall surface changes so that the S-polarized component increases, so that the vibration direction approaches the parallel direction of the wall structure wall surface. It changes so as to approach the parallel direction. Accordingly, the alignment direction of the liquid crystal layer also changes so as to approach the parallel direction of the wall structure wall surface.
偏光紫外光は主に基板法線方向から照射されるため、壁構造基部が平坦であれば振動方向の回転を伴う界面反射はその壁面でのみ生じる。光漏れの生じる領域は壁構造壁面に限定されるためブラックマトリクスで遮蔽でき、コントラスト低下を生じない。一方で傾斜部がある場合には、振動方向の回転を伴う界面反射は壁面の他に傾斜部においても生じる。そのため傾斜部があれば光漏れの生じる領域は拡大し、ブラックマトリクスで遮蔽しきれずにコントラスト低下の原因になる。 Since polarized ultraviolet light is mainly emitted from the normal direction of the substrate, if the wall structure base is flat, interface reflection accompanied by rotation in the vibration direction occurs only on the wall surface. Since the region where light leakage occurs is limited to the wall surface of the wall structure, it can be shielded with a black matrix and does not cause a decrease in contrast. On the other hand, when there is an inclined portion, interface reflection accompanied by rotation in the vibration direction occurs in the inclined portion in addition to the wall surface. For this reason, if there is an inclined portion, the region where light leakage occurs is enlarged, and it cannot be completely shielded by the black matrix, causing a decrease in contrast.
本発明は、配向膜形成前の段階で壁構造の基部に液だまりとして機能する凹部を形成する。この上に配向膜溶液を塗布すると、配向膜溶液は表面張力で壁構造基部に集まった際に凹部に入り込み、配向膜は凹部を埋めるように分布する。その結果壁構造近傍に傾斜部が形成されず、壁構造はほぼ方形の断面形状となる。このように凹部は余剰な配向膜溶液の液だめとして作用し、壁構造近傍への傾斜部の形成を防ぐ。 In the present invention, a recess functioning as a liquid pool is formed at the base of the wall structure before the formation of the alignment film. When an alignment film solution is applied thereon, the alignment film solution enters the recesses when gathered at the wall structure base by surface tension, and the alignment film is distributed so as to fill the recesses. As a result, no inclined portion is formed in the vicinity of the wall structure, and the wall structure has a substantially square cross-sectional shape. Thus, the concave portion acts as a reservoir for excess alignment film solution, and prevents formation of an inclined portion near the wall structure.
以下に本発明の内容を、実施例を用いて詳細に説明する。 Hereinafter, the contents of the present invention will be described in detail using examples.
本発明の液晶表示装置の一画素の平面図を図1に、断面図を図2、図3に示す。図2は一画素の中央部の断面図で、図3は薄膜トランジスタTFTとコンタクトホールCHを含む部分の断面図で、これらの断面は図1中にAA’、BB’で示してある。図2および図3において、第一の基板SU1と第二の基板SU2が液晶層LCを挟持して成り、第一の基板SU1上には液晶層LCに近接する側より第一の配向膜AL1、第一の平坦化膜OC1、カラーフィルタCF、ブラックマトリクスBMが順次積層されている。 FIG. 1 is a plan view of one pixel of the liquid crystal display device of the present invention, and FIGS. 2 and 3 are cross-sectional views thereof. 2 is a cross-sectional view of the central portion of one pixel, and FIG. 3 is a cross-sectional view of a portion including the thin film transistor TFT and the contact hole CH. These cross sections are indicated by AA ′ and BB ′ in FIG. 1. 2 and 3, the first substrate SU1 and the second substrate SU2 sandwich the liquid crystal layer LC, and the first alignment film AL1 is formed on the first substrate SU1 from the side close to the liquid crystal layer LC. The first planarization film OC1, the color filter CF, and the black matrix BM are sequentially stacked.
第二の基板SU2上には液晶層LCに近接する側より第二の配向膜AL2、第二の平坦化膜OC2、ソース電極SE、第一の絶縁膜IL1、コモン電極CE、第一の壁構造WL1および第二の壁構造WL2、第二の絶縁膜IL2、信号配線DL、第三の絶縁膜IL3、走査配線GL、ポリシリコン層PS、第四の絶縁膜IL4を有する。図1においてソース電極SEとコモン電極CEの輪郭は破線で示してある。図1においてコモン電極CEはコンタクトホールCHを除くほぼ全面に分布するため、その輪郭を表す破線はコンタクトホールCH周辺のみに分布する。 On the second substrate SU2, the second alignment film AL2, the second planarization film OC2, the source electrode SE, the first insulating film IL1, the common electrode CE, and the first wall are arranged from the side close to the liquid crystal layer LC. A structure WL1 and a second wall structure WL2, a second insulating film IL2, a signal wiring DL, a third insulating film IL3, a scanning wiring GL, a polysilicon layer PS, and a fourth insulating film IL4 are included. In FIG. 1, the outlines of the source electrode SE and the common electrode CE are indicated by broken lines. In FIG. 1, since the common electrode CE is distributed over almost the entire surface except for the contact hole CH, the broken line representing the outline is distributed only around the contact hole CH.
第一の壁構造WL1は第二の壁構造WL2よりも高く、液晶層LCの中に突出している。第二の壁構造WL2の周囲は第二の平坦化膜OC2で埋められており、その頂部のみが第二の平坦化膜OC2上に現れている。コモン電極CEは第一の壁構造WL1、第二の壁構造WL2および両者の間隙に分布し、ソース電極SEは第一の壁構造WL1の壁面、第二の壁構造WL2の基部および両者の間隙に分布している。コモン電極CEとソース電極SEは第一の絶縁膜IL1を介して重畳しており、重畳部は保持容量として機能する。また、コモン電極CEは第一の壁構造WL1、第二の壁構造WL2以外に両者の間隙にも分布することにより、隣接する画素や配線の電位を遮蔽する機能を有する。 The first wall structure WL1 is higher than the second wall structure WL2, and protrudes into the liquid crystal layer LC. The periphery of the second wall structure WL2 is filled with the second planarization film OC2, and only the top portion appears on the second planarization film OC2. The common electrode CE is distributed in the first wall structure WL1, the second wall structure WL2, and the gap between them, and the source electrode SE is the wall surface of the first wall structure WL1, the base of the second wall structure WL2, and the gap between them. Is distributed. The common electrode CE and the source electrode SE overlap with each other via the first insulating film IL1, and the overlapping portion functions as a storage capacitor. In addition to the first wall structure WL1 and the second wall structure WL2, the common electrode CE has a function of shielding potentials of adjacent pixels and wirings by being distributed in the gap between them.
図1において、ポリシリコン層PSは、スルーホールを介して信号配線DLと接続し、屈曲して、走査配線GLの下を2回くぐっている。ポリシリコン層PSが走査配線GLをくぐる部分では薄膜トランジスタ(TFT)が形成されている。したがって、図1ではTFTが2個直列に形成されている。 In FIG. 1, the polysilicon layer PS is connected to the signal wiring DL through the through hole, bent, and passes under the scanning wiring GL twice. A thin film transistor (TFT) is formed in a portion where the polysilicon layer PS passes through the scanning wiring GL. Therefore, in FIG. 1, two TFTs are formed in series.
ソース電極SEはポリシリコン層PS、コンタクトホールCHを介して信号配線DLに接続されており、画像信号に応じた電位を液晶層LCに印加する。コモン電極CEはコンタクトホールCHの周囲に開口部を有し、ソース電極SEとの短絡を防いでいる。ソース電極SEとコモン電極CEの間に形成される電気力線ELを図2中に破線で表した。電気力線ELは第1の壁構造WL1の壁面のソース電極SEと画素中央において露出しているコモン電極CEを結ぶように分布するので、電気力線ELは第二の壁構造WL2上を除けば液晶層LC中において概略液晶層LCに平行に分布する。 The source electrode SE is connected to the signal wiring DL through the polysilicon layer PS and the contact hole CH, and applies a potential corresponding to the image signal to the liquid crystal layer LC. The common electrode CE has an opening around the contact hole CH to prevent a short circuit with the source electrode SE. The electric lines of force EL formed between the source electrode SE and the common electrode CE are represented by broken lines in FIG. Since the electric lines of force EL are distributed so as to connect the source electrode SE on the wall surface of the first wall structure WL1 and the common electrode CE exposed at the center of the pixel, the electric lines of force EL are excluded on the second wall structure WL2. For example, the liquid crystal layer LC is distributed in parallel to the liquid crystal layer LC.
液晶層LCは室温を含む広い温度範囲でネマチック相を示す。液晶層LCの電圧無印加時における配向状態はホモジニアス配向であり、電界印加時に液晶ダイレクタは液晶層内で回転するように変化する。ストライプ状のコモン電極CEとソース電極SEを用いたIPS−LCDに比較して液晶層LCにより均一な電界を印加できるため、より高い透過率が得られる。第一の壁構造WL1の存在する部分には液晶層LCが存在しないため、第一の壁構造WL1の存在する部分は非開口部となる。 The liquid crystal layer LC exhibits a nematic phase in a wide temperature range including room temperature. The alignment state of the liquid crystal layer LC when no voltage is applied is homogeneous alignment, and the liquid crystal director changes so as to rotate within the liquid crystal layer when an electric field is applied. Since a uniform electric field can be applied by the liquid crystal layer LC as compared with the IPS-LCD using the stripe-shaped common electrode CE and the source electrode SE, higher transmittance can be obtained. Since the liquid crystal layer LC does not exist in the portion where the first wall structure WL1 exists, the portion where the first wall structure WL1 exists becomes a non-opening portion.
第一の壁構造WL1は主に画素境界上に形成しており、画素境界はブラックマトリクスBMで遮光されているため、第一の壁構造WL1があっても開口率は実質的に低下しない。第一の配向膜AL1と第二の配向膜AL2は光配向膜であり、配向処理には光配向法を用いる。偏光紫外光を照射して配向処理し、非接触で配向処理が可能である。そのため、第一の壁構造WL1上に塗布した第二の配向膜AL2を配向処理することができる。 Since the first wall structure WL1 is mainly formed on the pixel boundary and the pixel boundary is shielded from light by the black matrix BM, the aperture ratio does not substantially decrease even with the first wall structure WL1. The first alignment film AL1 and the second alignment film AL2 are photo-alignment films, and a photo-alignment method is used for the alignment process. Alignment treatment is possible by irradiating polarized ultraviolet light, and alignment treatment is possible without contact. Therefore, the second alignment film AL2 applied on the first wall structure WL1 can be subjected to alignment treatment.
第二の平坦化膜OC2の膜厚は第一の壁構造WL1の基部において薄くなり凹部を形成している。この凹部の深さDは、第二の平坦化膜OC2の膜厚の半分以上であることが望ましい。すなわち、図2に示すように、第二の平坦化膜OC2の上には、第2の配向膜AL2が形成されるが、第2の配向膜AL2の膜厚は100nm程度であり、第二の平坦化膜OC2の膜厚は1μm〜2μmである。したがって、凹部の深さが、第二の平坦化膜OC2の膜厚の半分以上であれば、配向膜の液溜りとしての役割を十分に果たすことが出来るからである。なおこの深さは、第二の平坦化膜OC2の平坦部の包絡線に対して、凹部の最も深い谷部の深さをいう。 The film thickness of the second planarizing film OC2 is reduced at the base of the first wall structure WL1 to form a recess. The depth D of the recess is desirably half or more than the film thickness of the second planarization film OC2. That is, as shown in FIG. 2, the second alignment film AL2 is formed on the second planarization film OC2, and the second alignment film AL2 has a thickness of about 100 nm, The thickness of the planarizing film OC2 is 1 μm to 2 μm. Therefore, if the depth of the recess is more than half the film thickness of the second planarizing film OC2, it can sufficiently serve as a liquid reservoir for the alignment film. Note that this depth refers to the depth of the deepest valley portion of the recess with respect to the envelope of the flat portion of the second planarizing film OC2.
このような膜厚分布は次のようにして実現した。第一の壁構造WL1と第二の壁構造WL2に第二の平坦化膜OC2のもとになるレジストPRを塗布する。そうすると、レジストPRは第一の壁構造WL1上に薄く分布し、第二の壁構造WL2上にはより厚く分布する。また、レジストPRは段差を埋めるように分布するため、第一の壁構造WL1近傍で最も厚くなっている。 Such a film thickness distribution was realized as follows. A resist PR serving as a basis for the second planarization film OC2 is applied to the first wall structure WL1 and the second wall structure WL2. As a result, the resist PR is thinly distributed on the first wall structure WL1 and thicker on the second wall structure WL2. Further, since the resist PR is distributed so as to fill the step, it is thickest in the vicinity of the first wall structure WL1.
レジストPRは光照射部が消失するポジレジストである。即ち、フォトマスクPMは第一の壁構造WL1と第二の壁構造WL2の上に開口部を有し、第一の壁構造WL1上のフォトマスクの開口部は第一の壁構造WL1よりも幅が広く、第二の壁構造WL2の上の開口部は第二の壁構造WL2と同程度の幅である。これを露光してエッチングすると第1の壁の基部で膜厚が薄くなるような断面形状となる。即ち第一の壁構造WL1上のレジストPRは除去され、その近傍の膜厚の厚い部分も除去される。また、第二の壁構造WL2上のレジストPRも除去される。これをアニーリングして膜厚分布をなだらかにし、第二の平坦化膜OC2とした後の状態が図2に示す断面形状となる。すなわち、第二の壁構造WL2近傍で平坦化膜OC2の膜厚はほぼ均一になり、第一の壁構造WL1近傍で膜厚は減少する。 The resist PR is a positive resist in which the light irradiation part disappears. That is, the photomask PM has openings on the first wall structure WL1 and the second wall structure WL2, and the photomask opening on the first wall structure WL1 is larger than the first wall structure WL1. The opening is wide, and the opening above the second wall structure WL2 has the same width as the second wall structure WL2. When this is exposed and etched, the cross-sectional shape becomes thin at the base of the first wall. That is, the resist PR on the first wall structure WL1 is removed, and the thick part in the vicinity thereof is also removed. Further, the resist PR on the second wall structure WL2 is also removed. This is annealed to smooth the film thickness distribution, and the state after forming the second planarizing film OC2 becomes the cross-sectional shape shown in FIG. That is, the film thickness of the planarization film OC2 is substantially uniform in the vicinity of the second wall structure WL2, and the film thickness is decreased in the vicinity of the first wall structure WL1.
これ以降、第一の壁構造WL1近傍における第二の平坦化膜OC2の膜厚が減少した部分、すなわち凹部を液だまり部と呼ぶことにする。その理由は凹部が第二の配向膜形成時に液だまりとして機能するためである。配向膜はモノマーを含む溶液を塗布し、これを焼成して形成するが、モノマー溶液はその表面張力により第一の壁構造WL1の基部に集まる傾向にある。液だまりがあればモノマー溶液は液だまりを埋めるように分布するため、これを焼成して第二の配向膜とした際に、第一の壁構造WL1の基部はほぼ平坦になる。 Hereinafter, a portion where the film thickness of the second planarization film OC2 in the vicinity of the first wall structure WL1 is reduced, that is, a concave portion is referred to as a liquid pool portion. The reason is that the concave portion functions as a liquid pool when the second alignment film is formed. The alignment film is formed by applying a solution containing a monomer and baking the solution, but the monomer solution tends to gather at the base of the first wall structure WL1 due to its surface tension. If there is a puddle, the monomer solution is distributed so as to fill the puddle. Therefore, when this is baked to form the second alignment film, the base portion of the first wall structure WL1 becomes substantially flat.
第一の基板SU1の外側に第一の偏光板PL1を、第二の基板SU2の外側に第二の偏光板PL2をそれぞれ積層して、第二の偏光板PL2の吸収軸を配向処理方向に対して並行にし、第一の基板SU1の吸収軸を配向処理方向に対して直交方向とした。本発明の液晶表示装置は印加電圧0Vとその近傍が暗表示となるが、この状態の画素を顕微鏡観察したところ、画素内は一様に暗かった。また、明表示透過率と暗表示透過率の比からコントラスト比を計算すると、1000:1以上の値が得られた。このように、第一の壁構造WL1の基部に液だまりを形成して平坦化したことにより、暗表示において画素内は一様に低透過率となり、1000:1以上のコントラスト比が得られた。 The first polarizing plate PL1 is laminated outside the first substrate SU1, and the second polarizing plate PL2 is laminated outside the second substrate SU2, and the absorption axis of the second polarizing plate PL2 is oriented in the alignment processing direction. In parallel, the absorption axis of the first substrate SU1 was perpendicular to the alignment processing direction. In the liquid crystal display device of the present invention, an applied voltage of 0 V and the vicinity thereof are darkly displayed. When the pixels in this state are observed with a microscope, the inside of the pixels is uniformly dark. Further, when the contrast ratio was calculated from the ratio between the bright display transmittance and the dark display transmittance, a value of 1000: 1 or more was obtained. Thus, by forming a liquid puddle at the base of the first wall structure WL1 and flattening, the pixels in the dark display are uniformly low in transmittance, and a contrast ratio of 1000: 1 or more is obtained. .
本実施例の一画素中央部の断面図を図4に示す。実施例1の図2に比較して第二の壁構造WL2がなく、より簡略化した構造である。図4中の左側の第一の壁構造WL1上にはソース電極SEがあり、右側の第一の壁構造WL1上には第一のコモン電極CE1がある。第一の絶縁膜IL1を介して第二のコモン電極CE2が配置され、ソース電極SEと第二のコモン電極SE2の重畳部は保持容量として機能する。液晶層LCにはソース電極SEと第一のコモン電極CE1間の電界が印加され、ソース電極SEと第一のコモン電極CE1間の電気力線ELを図4中に破線で示した。電気力線ELの密度は液晶層LC全域においてほぼ一定であり、液晶層LC全域にほぼ均一な電界が印加されている。図4に示した画素構造では画素の両端に存在するソース電極SEと第一のコモン電極CE1の間を結ぶように電気力線ELが形成されており、高精細に対応した幅の狭い画素の場合に特に有効である。 A cross-sectional view of the central portion of one pixel of this embodiment is shown in FIG. Compared to FIG. 2 of the first embodiment, there is no second wall structure WL2, and the structure is simplified. The source electrode SE is on the left first wall structure WL1 in FIG. 4, and the first common electrode CE1 is on the right first wall structure WL1. The second common electrode CE2 is disposed via the first insulating film IL1, and the overlapping portion of the source electrode SE and the second common electrode SE2 functions as a storage capacitor. An electric field between the source electrode SE and the first common electrode CE1 is applied to the liquid crystal layer LC, and electric lines of force EL between the source electrode SE and the first common electrode CE1 are indicated by broken lines in FIG. The density of the electric lines of force EL is substantially constant throughout the liquid crystal layer LC, and a substantially uniform electric field is applied across the entire liquid crystal layer LC. In the pixel structure shown in FIG. 4, electric lines of force EL are formed so as to connect between the source electrode SE and the first common electrode CE1 existing at both ends of the pixel, and the narrow pixel corresponding to high definition is formed. It is especially effective in cases.
第二の平坦化膜OC2の膜厚は画素の両端における第一の壁構造WL1の基部において薄くなり、液だまり、あるいは、凹部を形成している。この凹部の深さDは、実施例1と同じ理由により、第二の平坦化膜OC2の膜厚の半分以上であることが望ましい。なおこの深さは、第二の平坦化膜OC2の平坦部の包絡線に対して、凹部の最も深い谷部の深さをいう。 The film thickness of the second planarizing film OC2 is reduced at the base of the first wall structure WL1 at both ends of the pixel, forming a liquid pool or a recess. The depth D of the recess is desirably half or more of the film thickness of the second planarizing film OC2 for the same reason as in the first embodiment. Note that this depth refers to the depth of the deepest valley portion of the recess with respect to the envelope of the flat portion of the second planarizing film OC2.
本実施例の断面構造は、次のようにして形成した。第一の壁構造WL1に第二の平坦化膜OC2のもとになるレジストPRを塗布すると、レジストPRは第一の壁構造WL1上に薄く分布し、その近傍で最も厚く分布している。 The cross-sectional structure of this example was formed as follows. When the resist PR which becomes the basis of the second planarization film OC2 is applied to the first wall structure WL1, the resist PR is distributed thinly on the first wall structure WL1 and is distributed most thickly in the vicinity thereof.
フォトマスクPMは第一の壁構造WL1上に開口部を有し、フォトマスクPMの開口部は第一の壁構造WL1よりも幅が広い。これを露光してエッチングするとレジストPRは第一の壁構造WL1上から除去され、その近傍の膜厚の厚い部分も除去される。これをアニーリングして膜厚分布をなだらかにし、第二の平坦化膜OC2とした後の状態が図4に示す断面図となる。この構造では、第一の壁構造WL1近傍で膜厚が減少して液だまりとなる。図4はこれに第二の配向膜AL2を形成した状態であり、第二の配向膜AL2が液だまりに集まったことにより第一の壁構造WL1基部は平坦になっている。 The photomask PM has an opening on the first wall structure WL1, and the opening of the photomask PM is wider than the first wall structure WL1. When this is exposed and etched, the resist PR is removed from above the first wall structure WL1, and the thick portion in the vicinity thereof is also removed. This is annealed to smooth the film thickness distribution, and the state after forming the second planarizing film OC2 is the cross-sectional view shown in FIG. In this structure, the film thickness decreases in the vicinity of the first wall structure WL1 and becomes a liquid pool. FIG. 4 shows a state in which the second alignment film AL2 is formed on the first wall structure WL1 due to the collection of the second alignment film AL2 in the liquid pool.
暗表示の画素を顕微鏡観察したところ画素内は一様に暗く、またコントラスト比は1000:1以上の値が得られた。このように、本実施例の画素構造においても第一の壁構造WL1の基部に液だまりを形成して平坦化したことにより、暗表示において画素内は一様に低透過率となり、1000:1以上のコントラスト比が得られた。 When the dark display pixel was observed with a microscope, the inside of the pixel was uniformly dark and a contrast ratio of 1000: 1 or more was obtained. As described above, in the pixel structure of the present embodiment as well, a liquid pool is formed at the base portion of the first wall structure WL1 and is flattened, whereby the inside of the pixel has a low transmittance uniformly in dark display, and 1000: 1. The above contrast ratio was obtained.
実施例1において液だまりを形成せず、図5に示したように第二の平坦化膜OC2の膜厚を第一の壁構造の基部においてほぼ一定にした。その結果第二の壁構造WL2基部は平坦にならず図5に示したように傾斜部が形成された。このような膜厚分布は図6に示したようにして実現した。図6(a)は画素中央での断面図であり、これにレジストPRを塗布すると図6(b)に示したように第一の壁構造WL1上に薄く、第二の壁構造WL2上により厚く分布する。 In Example 1, no liquid pool was formed, and the thickness of the second planarization film OC2 was made substantially constant at the base of the first wall structure as shown in FIG. As a result, the base portion of the second wall structure WL2 was not flat, and an inclined portion was formed as shown in FIG. Such a film thickness distribution was realized as shown in FIG. FIG. 6A is a cross-sectional view at the center of the pixel. When a resist PR is applied to the pixel, it is thin on the first wall structure WL1 as shown in FIG. 6B, and is formed on the second wall structure WL2. Thickly distributed.
これを図6(c)に示したフォトマスクPMで加工する。フォトマスクPMは第一の壁構造WL1と第二の壁構造WL2の上に開口部を有し、いずれの開口部もそれぞれ第一の壁構造WL1、第二の壁構造WL2と同程度の幅である。これを露光してエッチングするとレジストPRは図6(d)に示したような断面形状となる。即ち、第一の壁構造WL1上のレジストPRREは除去さるが、その近傍の膜厚の厚い部分は完全には除去されないで若干残る。 This is processed with the photomask PM shown in FIG. The photomask PM has openings on the first wall structure WL1 and the second wall structure WL2, and both openings have the same width as the first wall structure WL1 and the second wall structure WL2, respectively. It is. When this is exposed and etched, the resist PR has a cross-sectional shape as shown in FIG. That is, the resist PRRE on the first wall structure WL1 is removed, but the thick part in the vicinity thereof is not completely removed but remains a little.
これをアニーリングして膜厚分布をなだらかにし、第二の平坦化膜OC2とした後の状態が図6(e)であり、第二の壁構造WL2近傍で平坦化膜OC2の膜厚はほぼ均一になり、液だまりは形成されない。この上にモノマー溶液を塗布すると表面張力により第二の壁構造WL2の基部に集まるが、液だまりがないため第二の壁構造WL2の基部とその近傍に傾斜部が形成される。これを焼成すると、図6(f)に示したようにモノマー溶液塗布時の形状をほぼ保ったまま第二の配向膜AL2が形成される。 FIG. 6E shows the state after annealing to smooth the film thickness distribution to obtain the second planarization film OC2, and the film thickness of the planarization film OC2 is almost in the vicinity of the second wall structure WL2. It becomes uniform and no puddle is formed. When the monomer solution is applied thereon, it collects at the base of the second wall structure WL2 due to surface tension, but since there is no liquid pool, an inclined portion is formed at and near the base of the second wall structure WL2. When this is fired, as shown in FIG. 6F, the second alignment film AL2 is formed while maintaining the shape when the monomer solution is applied.
暗表示の画素を顕微鏡観察したところ、第一の壁構造WL1の近傍で光漏れが観察された。また、明表示透過率と暗表示透過率の比からコントラスト比を計算したところ、200:1を下回る値に低下していた。 When the dark display pixel was observed with a microscope, light leakage was observed in the vicinity of the first wall structure WL1. Further, when the contrast ratio was calculated from the ratio between the bright display transmittance and the dark display transmittance, it was reduced to a value lower than 200: 1.
第一の壁構造WL1近傍の光漏れは、図7に示したように光配向処理時に界面反射で配向処理方向の方位が変化することで生じると考えられる。図7中において第一の壁構造WL1は断面図で示してあるが、光配向処理時の各段階での偏光状態は平面図で示しており、第一の壁構造WL1に入射する偏光紫外光の振動方向は図7(a)に示したように壁面に対して45度としてある。図7(b)に示したように光配向法で用いる偏光紫外光は第二の配向膜AL2の界面で反射するが、界面反射率はS偏光成分SPLとP偏光成分PPLで異なり、一般にS偏光成分SPLの方が界面反射率が高い。 Light leakage in the vicinity of the first wall structure WL1 is considered to be caused by a change in the orientation in the alignment processing direction due to interface reflection during the optical alignment processing as shown in FIG. In FIG. 7, the first wall structure WL1 is shown in a sectional view, but the polarization state at each stage during the photo-alignment process is shown in a plan view, and polarized ultraviolet light incident on the first wall structure WL1. The vibration direction is set to 45 degrees with respect to the wall surface as shown in FIG. As shown in FIG. 7B, the polarized ultraviolet light used in the photo-alignment method is reflected at the interface of the second alignment film AL2, but the interface reflectivity differs between the S-polarized component SPL and the P-polarized component PPL. The polarization component SPL has a higher interface reflectance.
壁面での反射光は図7(c)に示したようにS偏光成分SPLが増大するため振動方向が第一の壁構造WL1壁面の平行方向に近づくように変化し、光配向処理において界面反射成分が実効的であれば配向処理方向は第二の壁構造WL2壁面の平行方向に近づくように変化する。あるいはまた透過光は図7(d)に示したようにP偏光成分PPLが増大するため振動方向が第一の壁構造WL1壁面の平行方向から遠ざかるように変化し、透過成分が実効的であれば配向処理方向は第一の壁構造WL1壁面の平行方向から遠ざかるように変化する。 As shown in FIG. 7C, the reflected light on the wall surface changes in the vibration direction so as to approach the parallel direction of the wall surface of the first wall structure WL1 because the S-polarized component SPL increases. If the component is effective, the orientation processing direction changes so as to approach the parallel direction of the wall surface of the second wall structure WL2. Alternatively, as shown in FIG. 7D, the transmitted light increases in the P-polarized component PPL, so that the vibration direction changes away from the parallel direction of the first wall structure WL1, and the transmitted component is effective. For example, the orientation process direction changes away from the parallel direction of the wall surface of the first wall structure WL1.
偏光紫外光は主に基板法線方向から照射されるため、第一の壁構造WL1の基部が平坦であれば振動方向の回転を伴う界面反射はその壁面でのみ生じる。光漏れの生じる領域は第一の壁構造WL1の壁面に限定されるためブラックマトリクスで遮蔽でき、コントラスト比の低下を生じない。一方で傾斜部がある場合には、振動方向の回転を伴う界面反射は壁面の他に傾斜部においても生じる。そのため光漏れ発生領域は拡大し、ブラックマトリクスで遮蔽しきれずにコントラスト比が低下する。 Since polarized ultraviolet light is mainly emitted from the normal direction of the substrate, if the base of the first wall structure WL1 is flat, interface reflection accompanied by rotation in the vibration direction occurs only on the wall surface. Since the region where light leakage occurs is limited to the wall surface of the first wall structure WL1, it can be shielded by the black matrix, and the contrast ratio does not decrease. On the other hand, when there is an inclined portion, interface reflection accompanied by rotation in the vibration direction occurs in the inclined portion in addition to the wall surface. For this reason, the light leakage occurrence area is enlarged, and the contrast ratio is lowered without being completely shielded by the black matrix.
図8は第一の壁構造WL1近傍の液晶配向状態を表す平面図であり、図8(a)のように配向方向が配向処理方向ADから変化している液晶分子LCM2の分布が第一の壁構造WL1のごく近傍に限定されるならば、ブラックマトリクスBMで遮蔽されてコントラスト比の低下を生じない。即ち、図8(a)ではブラックマトリクスBMの外側には配向処理方向ADと同一の液晶分子LCM1のみが分布している。一方で図8(b)のように配向方向が配向処理方向ADから変化している液晶分子LCM2の分布が第一の壁構造WL1から離れた部分にまで及んでいれば、これによる光漏れはブラックマトリクスで遮蔽しきれずにコントラスト比の低下を生じる。図8(a)、(b)はいずれも第一の壁構造WL1近傍の液晶配向方向が第一の壁構造WL1壁面の平行方向に近づくように変化した場合を示しているが、以上のことは第一の壁構造WL1近傍の液晶配向方向が第一の壁構造WL1壁面から遠ざかるように変化した場合においても同様に成り立つ。 FIG. 8 is a plan view showing the liquid crystal alignment state in the vicinity of the first wall structure WL1, and the distribution of the liquid crystal molecules LCM2 in which the alignment direction is changed from the alignment processing direction AD as shown in FIG. If it is limited to the very vicinity of the wall structure WL1, it is shielded by the black matrix BM and does not cause a decrease in contrast ratio. That is, in FIG. 8A, only the same liquid crystal molecules LCM1 as the alignment processing direction AD are distributed outside the black matrix BM. On the other hand, as shown in FIG. 8B, if the distribution of the liquid crystal molecules LCM2 in which the alignment direction is changed from the alignment processing direction AD extends to a portion away from the first wall structure WL1, the light leakage due to this The contrast ratio is lowered without being completely shielded by the black matrix. FIGS. 8A and 8B show the case where the liquid crystal alignment direction in the vicinity of the first wall structure WL1 is changed so as to approach the parallel direction of the wall surface of the first wall structure WL1. The same holds true when the liquid crystal alignment direction in the vicinity of the first wall structure WL1 changes so as to move away from the wall surface of the first wall structure WL1.
WL1…第1の壁構造、 WL2…第2の壁構造、 SU1…第1の基板、 SU2…第2の基板、 BM…ブラックマトリクス、 OC1…第1の平坦化膜、 OC2…第2の平坦化膜、 AL1…第1の配向膜、 AL2…第2の配向膜、 LC…液晶、 SE…ソース電極、 CE…コモン電極、 EL…電気力線、 IL1…第1の絶縁膜、 IL2…第2の絶縁膜、 IL3…第3の絶縁膜、 IL4…第4の絶縁膜、 CF…カラーフィルタ、 CH…コンタクトホール、 DL…信号配線、 GL…走査配線 PS…ポリシリコン層、 DL…信号配線、 D…凹部の深さ、 PR…レジスト。 WL1 ... first wall structure, WL2 ... second wall structure, SU1 ... first substrate, SU2 ... second substrate, BM ... black matrix, OC1 ... first planarization film, OC2 ... second flatness AL1 ... first alignment film, AL2 ... second alignment film, LC ... liquid crystal, SE ... source electrode, CE ... common electrode, EL ... electric field lines, IL1 ... first insulating film, IL2 ... first 2 insulating film, IL3 ... third insulating film, IL4 ... fourth insulating film, CF ... color filter, CH ... contact hole, DL ... signal wiring, GL ... scanning wiring PS ... polysilicon layer, DL ... signal wiring D: Depth of recess, PR: Resist.
Claims (6)
前記第1の基板における画素は、映像信号線と走査信号線で囲まれた領域によって定義され、
前記画素には、第1の壁構造と第2の壁構造が対向して形成され、前記第1の壁構造と前記第2の壁構造の間には、第3の壁構造が形成され、前記第3の壁構造の高さは、前記第1の壁構造および前記第2の壁構造の高さよりも低く、
前記第1の壁構造と前記第2の壁構造の側部にはソース電極が形成され、前記第3の壁構造の頂部にはコモン電極が形成され、
前記第1の壁構造と前記第3の壁構造の間、および、前記第2の壁構造と前記第3の壁構造の間は平坦化膜によって充填され、前記平坦化膜は、前記第1の壁構造および前記第2の壁構造の基部において凹部が形成され、前記凹部には、配向膜が存在していることを特徴とする液晶表示装置。 A liquid crystal display device in which liquid crystal is sandwiched between a first substrate and a second substrate,
The pixel on the first substrate is defined by a region surrounded by the video signal line and the scanning signal line,
In the pixel, a first wall structure and a second wall structure are formed to face each other, and a third wall structure is formed between the first wall structure and the second wall structure. A height of the third wall structure is lower than a height of the first wall structure and the second wall structure;
A source electrode is formed on the side of the first wall structure and the second wall structure, and a common electrode is formed on the top of the third wall structure,
A space between the first wall structure and the third wall structure and between the second wall structure and the third wall structure is filled with a planarizing film, and the planarizing film is filled with the first wall structure. A concave portion is formed in the base portion of the wall structure and the second wall structure, and an alignment film is present in the concave portion.
前記第1の基板における画素は、映像信号線と走査信号線で囲まれた領域によって定義され、
前記画素には、第1の壁構造と第2の壁構造が対向して形成され、
前記第1の壁構造の側部にはソース電極が形成され、前記第2の壁構造の側部にはコモン電極が形成され、
前記第1の壁構造と前記第2の壁構造の間には、平坦化膜が形成され、前記平坦化膜は、前記第1の壁構造の基部および前記第2の壁構造の基部において凹部が形成され、前記凹部には配向膜が存在していることを特徴とする液晶表示装置。 A liquid crystal display device in which liquid crystal is sandwiched between a first substrate and a second substrate,
The pixel on the first substrate is defined by a region surrounded by the video signal line and the scanning signal line,
The pixel is formed with a first wall structure and a second wall structure facing each other,
A source electrode is formed on the side of the first wall structure, a common electrode is formed on the side of the second wall structure,
A planarization film is formed between the first wall structure and the second wall structure, and the planarization film is a recess in the base portion of the first wall structure and the base portion of the second wall structure. A liquid crystal display device, wherein an alignment film is present in the recess.
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