JP5912849B2 - Horizontal bellows pump - Google Patents

Description

  The present invention relates to a slurry liquid (for example, a polishing apparatus used for polishing a semiconductor wafer by a CMP (Chemical Mechanical Polishing) method) containing a slurry component such as a chemical solution or a solid component used in a semiconductor manufacturing process. The present invention relates to a horizontal bellows pump for feeding a liquid such as a liquid.

  As a horizontal bellows pump of this type, conventionally, a pump head having a discharge passage and a suction passage, a pair of cylinder cases provided on both sides of the pump head, and an axis line in each cylinder case. A pair of bellows attached to the pump chamber, and a pair of discharge-side check valves attached to the pump head in a state protruding from the pump chamber surrounded by each bellows. One of the pumps by alternately extending and contracting both bellows, with a pair of suction-side check valves attached to the pump head arranged at the lower part of the pump chamber in a state of protruding into each pump chamber A discharge step for feeding liquid from the chamber to the discharge passage via the discharge side check valve, and a suction step for supplying liquid from the suction passage to the other pump chamber via the suction side check valve. Configured double acting bellows pump to perform at is known (e.g., see Figure 2 of Figure 1 or Patent Document 2 Patent Document 1).

  In such a conventional horizontal bellows pump (hereinafter referred to as “conventional pump”), each discharge-side check valve is attached to the pump head so as to protrude into the pump chamber and communicates with the upstream end of the discharge passage. The valve case, the valve inlet passage that penetrates the tip of the valve case in the axial direction, the valve closing position that is built in the valve case and closes the valve inlet passage, and the valve opening position that opens the valve case. In a discharge process in which the volume of the pump chamber is reduced by the reduction operation of the bellows, and a spring that is built in the valve case and biases and holds the valve body in the closed position. The valve body is displaced to the valve opening position against the urging force of the spring due to the pressure rise, and the pump chamber and the discharge passage are communicated with each other. Each suction side check valve protrudes into the pump chamber. Pump head in a state A cylindrical valve case that is attached and communicates with the downstream end of the suction passage, a valve outlet passage that penetrates the tip of the valve case in the axial direction, and a valve closure that is built in the valve case and closes the downstream end of the suction passage The bellows extends with a valve body that can move forward and backward in the axial direction over a position and a valve opening position that opens it, and a spring that is built in the valve case and biases and holds the valve body in the valve closing position. In the suction process in which the volume of the pump chamber is expanded by operation, the valve body is displaced to the valve opening position against the biasing force of the spring due to the pressure drop in the pump chamber, and the pump chamber and the suction passage are communicated with each other. ing.

  Therefore, by alternately extending and contracting both bellows, the liquid is supplied from the pump chamber to the discharge passage through the discharge check valve and the pump is supplied from the suction passage to the pump through the suction check valve. The liquid suction step is performed simultaneously in both pump chambers, and the liquid can be continuously fed.

JP 2004-084486 A JP 2000-205138 A JP 2009-108678 A

  However, in the conventional pump, since the discharge side check valve and the suction side check valve are attached to the pump head as independent parts, a horizontal bellows pump (for example, such a structure that these check valves are incorporated in the pump head (for example, Compared to Patent Document 3), the pump head structure can be simplified, the pump shaft length can be reduced by reducing the thickness of the pump head, and maintenance can be facilitated. However, there are the following problems.

  The region directly above the discharge-side check valve in the pump chamber, that is, the region between the upper and lower opposed peripheral surfaces of the check valve and the upper portion of the bellows (hereinafter referred to as the “upper pump chamber portion”) and directly below the suction-side check valve In the region, that is, the region between the upper and lower peripheral surfaces (hereinafter referred to as “lower pump chamber portion”) between the valve case of the check valve and the lower portion of the bellows, there is a possibility that the liquid may stay without flowing.

  That is, the valve inlet passage and the valve outlet passage are formed so as to penetrate the tip end portions of the respective valve cases in the axial direction, and from the valve inlet passages opened to the tip face of the valve case of the discharge side check valve in the discharge step. In the liquid suction direction and the suction step, the liquid ejection direction from the valve outlet passage that opens to the distal end surface of the valve case of the suction side check valve and the protruding direction to the pump chamber of each valve case are parallel, In the discharge process, the flow of the liquid in each pump chamber is blocked by the valve case due to the liquid flow sucked from the valve inlet passage. Also in the suction step, the flow of the liquid in each pump chamber portion is hindered by the valve case due to the liquid flow ejected from the valve outlet passage. As a result, the liquid tends to stay in each pump chamber portion. Such liquid stagnation is such that the peripheral wall of the bellows has a corrugated shape with a corrugated cross section, and in each pump chamber portion, it is often parallel in the axial direction to the inner peripheral surface of the bellows that directly faces the outer peripheral surface of the valve case. The presence of the valleys of this causes the problem to occur more remarkably. Even when the liquid has a high viscosity, the liquid tends to stay.

  As described above, the staying liquid in the upper pump chamber portion is discharged from the pump chamber to the discharge passage after the discharge process and the suction process are repeated several times, but the staying liquid in the upper pump chamber portion is discharged to the discharge passage. Is not performed by repeating the discharge process and the suction process a predetermined number of times, and the discharge timing of the staying liquid from the upper pump chamber portion is indefinite. Therefore, liquids continuously discharged from the discharge passage are mixed intermittently and irregularly with liquids having different residence times in the upper pump chamber. As a result, the liquid is fed by the horizontal bellows pump. There is a risk that the properties of the liquid will be unstable and change. For example, when the liquid is a chemical solution that requires strict temperature control, the liquid stays in the upper pump chamber for a long time, and the liquid that has changed temperature is discharged intermittently and irregularly. If there is a risk that the temperature of the liquid discharged from the passage may change, or if the liquid is a slurry liquid that requires strict control of the mixing ratio of slurry components, etc., the staying liquid will be intermittent Moreover, there is a possibility that the component, concentration, etc. of the liquid discharged from the discharge passage may change due to irregular mixing. Although it is conceivable to reduce the volume of the upper pump chamber as much as possible by bringing the discharge side check valve closer to the upper part of the bellows, that is, to reduce the amount of retained liquid as much as possible. On the contrary, liquid replacement in the upper pump chamber portion (particularly in the valley portion of the bellows) becomes difficult, and the liquid is more likely to stay.

  Also, the staying liquid in the lower pump chamber part may be discharged by repeating the discharge process and the suction process, as in the staying liquid in the upper pump chamber part. Since the valley portion of the inner peripheral surface of the bellows is opened upward, the accumulated liquid is discharged from the lower pump chamber portion (that is, the new pump chamber portion is different from the upper pump chamber portion where the valley portion is opened downward). It is extremely difficult to replace the liquid supplied to the liquid. Accordingly, in the lower pump chamber portion, the liquid stays in the valley portion of the inner peripheral surface of the bellows for a very long time, and the property of the liquid fed by the horizontal bellows pump is more unstable. Become. In particular, when the liquid is a slurry liquid containing a slurry component such as a solid component, the slurry component may settle or accumulate in the lower pump chamber or become sludge.

  As described above, in the conventional pump, there is a problem that the liquid tends to stay in the upper pump chamber portion and the lower pump chamber portion, that is, the liquid replacement property in each pump chamber portion is poor, so that strict property management is required. The actual situation is that it cannot be put into practical use as a liquid feed pump, and its use is greatly limited.

  The liquid retention in the upper pump chamber portion and / or the lower pump chamber portion as described above and the above-described problems caused by this are not limited to the double-acting horizontal bellows pump such as a conventional pump, but a single pump. This also occurs in a single-acting horizontal bellows pump in which the discharge side check valve and the lower suction side check valve are protruded from the pump head in the chamber so that the discharge process and the suction process are performed alternately. .

  The present invention has been made in view of such a point, and prevents liquid retention in the upper pump chamber portion and the lower pump chamber portion as much as possible, and also sends a liquid that requires strict property management. An object of the present invention is to provide a double-acting or single-acting horizontal bellows pump that can be liquefied.

The present invention includes a pump head having a discharge passage and a suction passage, a cylinder case provided in the pump head, a bellows disposed in the cylinder case and attached to the pump head so as to be extendable in the axial direction, and a bellows. A discharge-side check valve attached to the pump head and arranged at the upper part of the pump chamber in a state protruding to the pump chamber formed in the surroundings, and arranged at the lower part of the pump chamber in a state of protruding to the pump chamber to the pump head. A suction step that includes an attached suction side check valve, and causes the bellows to expand and contract, thereby sending liquid from the pump chamber to the discharge passage through the discharge side check valve; and from the suction passage to the suction side check valve In the horizontal bellows pump configured to alternately perform the suction step of supplying the liquid to the pump chamber via the discharge chamber, in order to achieve the above-described purpose, in particular, the discharge-side check valve is A cylindrical valve case attached to the pump head in a state where the end portion communicates with the upstream end of the discharge passage, and a through hole formed in the tip portion of the valve case, with one end opening in the valve case The other end is composed of a valve inlet passage that opens to the upper pump chamber portion, which is a region between the upper and lower opposed peripheral surfaces of the valve case and the upper portion of the bellows, and one end of the valve inlet passage that is movably disposed in the valve case. A valve body that opens and closes the valve seat opening and a spring that is arranged in the valve case and biases the valve body to a valve closing position that closes the valve seat opening. The stop valve includes a cylindrical valve case attached to the pump head in a state where the base end portion communicates with the downstream end of the suction passage through the valve seat port, and a through hole formed in the distal end portion of the valve case. One end opens into the valve case and the other end A valve outlet passage that opens to a lower pump chamber portion that is a region between the upper and lower opposing peripheral surfaces with the lower portion, a valve body that is movably disposed in the valve case to open and close the valve seat opening, and a valve case arranged Ri Na and and a spring for biasing the valve closing position for closing the valve seat opening the valve body, both or either of the valve case of the discharge-side check valve in the valve casing and the suction side check valve On one side, a lower suction hole and / or an upper blowout hole that is opened in the intermediate pump chamber portion that is the region between the upper and lower opposing circumferential surfaces of the valve cases of both check valves are formed. Formed in the valve case of the stop valve, one end opened in the valve inlet passage and the other end opened in the intermediate pump chamber part which is the region between the upper and lower opposed peripheral surfaces of the valve case of both check valves The upper outlet hole is formed in the valve case of the suction-side check valve, and one end is a valve outlet passage. It is proposed that the other end opens to the intermediate pump chamber portion which is the region between the upper and lower opposing peripheral surfaces of the valve cases of both check valves .

  In a preferred embodiment of such a horizontal bellows pump, the pump is configured as a double-acting type or a single-acting type. That is, the double-acting bellows pump includes a pump head having a discharge passage and a suction passage, a pair of cylinder cases provided on both sides of the pump head, and a cylinder head disposed in each cylinder case in the axial direction of the pump head. A pair of bellows attached in a telescopic manner, a pair of discharge-side check valves attached to the pump head in a state protruding from the pump chamber surrounded by each bellows, and attached to the pump head; A pair of suction-side check valves attached to the pump head that are arranged in the lower part of the pump chamber in a state of projecting into the pump chamber, and by alternately expanding and contracting both bellows from one pump chamber A discharge process for feeding liquid to the discharge passage via the discharge side check valve and a suction process for supplying liquid from the suction path to the other pump chamber via the suction side check valve are performed simultaneously. Sea urchin made. In addition, the single double acting type bellows pump is composed of a pump head having a discharge passage and a suction passage, a cylinder case provided on one side of the pump head, and arranged in the cylinder case so that the pump head can extend and contract in the axial direction. An attached bellows, a discharge check valve mounted on the pump head in a state protruding from the pump chamber surrounded by the bellows, and a pump chamber protruding from the pump chamber A suction step, which is provided at the lower portion of the pump and attached to the pump head, and causes the bellows to expand and contract, thereby allowing the liquid to be sent from the pump chamber to the discharge passage via the discharge side check valve. And a suction step of supplying liquid from the suction passage to the pump chamber via the suction-side check valve.

  In such a double-acting or single-acting horizontal bellows pump, it is preferable that both check valves are positioned on a vertical line passing through the axis of the pump chamber, and the discharge-side check valve is a bellows. It is preferable to be close to the upper part of the.

  In a preferred embodiment, the valve inlet passage is opened to the upper pump chamber portion at one or a plurality of locations in the valve case, and in the latter case, the valve inlet passage is located at a plurality of locations in the circumferential direction of the valve case and / or Openings are made in the upper pump chamber at a plurality of locations in the axial direction of the valve case. Further, the valve outlet passage is opened to the lower pump chamber portion at one or a plurality of locations in the valve case. In the latter case, the valve outlet passage is located at a plurality of locations in the circumferential direction of the valve case and / or the axial direction of the valve case. Are opened to the lower pump chamber at a plurality of locations.

  The horizontal bellows pump of the present invention is such that the valve inlet passage of the discharge side check valve is opened in the upper pump chamber portion and the valve outlet side passage of the suction side check valve is opened in the lower pump chamber portion, In the discharge step, liquid feeding from the pump chamber to the discharge passage is started from the upper pump chamber portion, and in the suction step, liquid supply from the suction passage to the pump chamber is started from the lower pump chamber portion. Therefore, the liquid is forced to flow in both the upper pump chamber and the lower pump chamber, and liquid retention in both pump chambers can be prevented as much as possible. It can be made. Therefore, according to the present invention, it is possible to send liquid in a stable state without causing problems such as property changes as described above, and a good pump function even when handling liquids that require strict property management Thus, it is possible to provide a double-acting or single-acting horizontal bellows pump that is extremely practical.

FIG. 1 is a longitudinal side view showing an example of a double-acting horizontal bellows pump according to the present invention. FIG. 2 is a longitudinal side view corresponding to FIG. 1 showing a state different from FIG. FIG. 3 is a longitudinal side view corresponding to FIG. 1 and showing a state different from FIGS. 4 is an enlarged vertical side view of the main part of FIG. FIG. 5 is a longitudinal rear view of a main part taken along the line V-V in FIG. 4. FIG. 6 is a longitudinal front view of a main part taken along line VI-VI in FIG. FIG. 7 is a longitudinal side view of a main part corresponding to FIG. 4 showing a modification of the double-acting horizontal bellows pump according to the present invention. FIG. 8 is a longitudinal rear view of a main part taken along line VIII-VIII in FIG. FIG. 9 is a cross-sectional plan view of the main part along the line IX-IX in FIG. FIG. 10 is a transverse bottom view of the main part along the line XX in FIG. FIG. 11 is a longitudinal side view of a main part corresponding to FIG. 4 showing another modification of the double-acting horizontal bellows pump according to the present invention. FIG. 12 is a longitudinal side view of a main part corresponding to FIG. 4 showing still another modification of the double-acting horizontal bellows pump according to the present invention. FIG. 13 is a longitudinal side view of a main part corresponding to FIG. 4 showing still another modification of the double-acting horizontal bellows pump according to the present invention. FIG. 14 is a longitudinal rear view of a main part taken along line XIV-XIV in FIG. FIG. 15 is a longitudinal front view of a main part taken along line XV-XV in FIG. FIG. 16 is a longitudinal side view showing an example of a single-acting horizontal bellows pump according to the present invention. 17 is a longitudinal side view corresponding to FIG. 16 and showing a state different from FIG. FIG. 18 is an enlarged vertical side view showing the main part of FIG. FIG. 19 is an enlarged vertical side view showing the main part of FIG. FIG. 20 is a longitudinal sectional front view of an essential part taken along line XX-XX in FIG. FIG. 21 is a longitudinal sectional front view of an essential part taken along line XXI-XXI in FIG. FIG. 22 is a longitudinal side view of a main part corresponding to FIG. 19 showing a modification of the single-acting horizontal bellows pump according to the present invention. FIG. 23 is a longitudinal front view of a main part taken along line XXIII-XXXIII in FIG. 24 is a cross-sectional plan view of the main part along the line XXIV-XXIV in FIG. FIG. 25 is a transverse bottom view of the main part along the line XXV-XXV in FIG. FIG. 26 is a longitudinal side view of a main part corresponding to FIG. 19 showing another modification of the single-acting horizontal bellows pump according to the present invention. FIG. 27 is a longitudinal side view of a main part corresponding to FIG. 19 showing still another modification of the single-acting horizontal bellows pump according to the present invention. FIG. 28 is a longitudinal side view of a main part corresponding to FIG. 18 showing still another modification of the single-acting horizontal bellows pump according to the present invention. FIG. 29 is a longitudinal side view of a main part corresponding to FIG. 19 showing a state different from FIG. 28 of the single-acting horizontal bellows pump. FIG. 30 is a longitudinal sectional front view of a main part taken along line XXX-XXX in FIG. FIG. 31 is a longitudinal front view of a main part taken along line XXXI-XXXI in FIG.

  A mode for carrying out the present invention will be specifically described with reference to the drawings.

  1 is a longitudinal side view showing an example of a horizontal bellows pump according to the present invention, FIG. 2 is a longitudinal side view corresponding to FIG. 1 showing a state different from FIG. 1, and FIG. 3 is different from FIGS. 4 is a longitudinal side view corresponding to FIG. 1 showing the state, FIG. 4 is an enlarged longitudinal side view showing the main part of FIG. 1, and FIG. 5 is a vertical rear view of the main part along the line V-V in FIG. FIG. 6 is a longitudinal front view of a main part taken along line VI-VI in FIG. In the following description, “upper and lower” and “left and right” refer to the upper and lower and left and right in FIGS.

  The horizontal bellows pump shown in FIGS. 1 to 3 is a double-acting type (hereinafter referred to as a double-acting type) that is used for continuously feeding a liquid (such as the above-described chemical liquid or slurry liquid) A that requires strict property management. A pump head 3 having a discharge passage 1 and a suction passage 2, a pair of left and right cylinder cases 4, 4 provided on both sides of the pump head 3, A pair of left and right cylindrical bellows 5, 5 disposed in the cylinder case 4 and attached to the pump head 3 so as to be extendable in the axial direction (horizontal direction), and a pair of left and right pumps surrounded by the bellows 5 Chambers 6, 6, a pair of left and right discharge-side check valves 7, 7 disposed on the top of the pump chamber 6 so as to protrude into the pump chamber 6, and attached to the pump head 3, In the protruding state, the pump chamber 6 And a pair of left and right suction side check valves 8 and 8 attached to the pump head 3 and alternately expanding and contracting the bellows 5 and 5 so that the liquid A is supplied to one pump chamber. A discharge process for feeding liquid from 6 to the discharge passage 1 via the discharge side check valve 7 and a suction process for feeding liquid from the suction path 2 to the other pump chamber 6 via the suction side check valve 8 are simultaneously performed. Is configured to do. It should be noted that both cylinder cases 4, 4, both bellows 5, 5, both pump chambers 6, 6, both discharge-side check valves 7, 7 and both suction-side check valves 8, constituting the first double-acting bellows pump, 8 have the same structure except that each has a symmetrical structure.

  The pump head 3 has a disc shape in which a discharge passage 1 connected to a liquid supply line and a suction passage 2 connected to a liquid supply line are formed. As shown in FIGS. Is opened by branching the upstream end of the discharge passage 1 and the downstream end of the suction passage 2 respectively.

  As shown in FIGS. 1 to 4, each cylinder case 4 has a bottomed cylindrical shape attached to the pump head 3, and the cylinder heads 4, 4 and the pump head 3 are internally left and right by the pump head 3. The pump body is divided into two.

  Each bellows 5 is a bottomed cylindrical body in which the peripheral wall 51 has a cross-sectional corrugated bellows structure, as shown in FIGS. It is intended to scale. Each bellows 5 has its open end 52 closely fixed to the pump head 3, and the inside of the bellows 5 is configured as a pump chamber 6 closed by the pump head 3. Both bellows 5 and 5 are adapted to expand and contract in the opposite direction synchronously by connecting disk-shaped movable plates 9 and 9 fixed to the bottom walls 53 and 53 with a connecting rod 10. That is, as shown in FIG. 1, the connecting rod 10 interlocks the bellows 5 and 5 so that when one bellows 5 is in the most contracted state, the other bellows 5 is in the most extended state. Yes, when one bellows 5 is contracted, the other bellows 5 is extended in conjunction with this.

  The operation means for expanding and contracting the bellows 5 is generally composed of a piston / cylinder mechanism, a crank mechanism, an air cylinder mechanism, etc., but in this example, it is composed of an air cylinder mechanism. In other words, the operating means feeds and discharges the pressurized air 42 to and from the space formed between the bellows 5 and the movable plate 9 and the cylinder case 4 from the air supply / exhaust port 41 formed on the end wall of the cylinder case 4. The bellows 5 is configured to extend and contract in the axial direction. The air supply / exhaust from both the air supply / exhaust ports 41, 41 is performed alternately and synchronously, and the air supply from one air supply / exhaust port 41 and the air supply from the other air supply / exhaust port 41 are performed simultaneously. The expansion / contraction operation, that is, the expansion / contraction operation of the two pump chambers 6 and 6 is performed in the reverse direction. That is, the suction process (or discharge process) in one pump chamber 6 and the discharge process (or suction process) in the other pump chamber 6 are performed in synchronization, and the discharge process (liquid A in both pump chambers 6 and 6). And a suction step (liquid A is supplied from the suction passage 2 to the pump chamber 6 via the suction-side check valve 8). Are switched at the same time. 1 shows the end of the suction process in the left pump chamber 6 and the discharge process in the right pump chamber 6, and FIG. 2 shows the discharge process in the left pump chamber 6 and the suction process in the right pump chamber 6. FIG. 3 shows a state during the progress of the discharge process in the left pump chamber 6 and the suction process in the right pump chamber 6.

  As shown in FIG. 4, each discharge-side check valve 7 includes a valve case 71 attached to the pump head 3, a valve inlet passage 72 formed in the valve case 71, and a valve body 73 built in the valve case 71. And a spring 74.

  As shown in FIGS. 4 and 5, each valve case 71 is a bottomed cylindrical body having a base end attached to the pump head 3 with the pump chamber 6 protruding in parallel with the axis thereof. The opening is connected in communication with the upstream end of the discharge passage 1. Both valve cases 71, 71 are arranged in the upper part of the pump chambers 6, 6 in a horizontal state where the axes coincide. In this example, each valve case 71 has its axis located on a vertical line (diameter line) passing through the axis of the pump chamber 6 and its outer peripheral surface is close to the upper inner peripheral surface of the bellows 5. It is attached to the head 3.

  Each valve inlet passage 72 is a through-hole formed at the distal end portion of the valve case 71 as shown in FIGS. 1 to 4, and one end of the valve inlet passage 72 is configured as a valve seat opening 75 that opens into the valve case 71. The other end is opened to the pump chamber 6.

  1 to 4, each valve body 73 is closed to a valve seat 75 and closes it (the position of the valve body 73 in the discharge check valve 7 on the left side shown in FIG. 1). Alternatively, the valve body 73 in the right-side discharge-side check valve 7 shown in FIGS. 2 to 4 and the valve-opening position in which the valve seat port 75 is opened apart (the left-side discharge shown in FIGS. 2 to 4). The valve case 71 is housed in a valve case 71 so as to be movable back and forth in the axial direction over the position of the valve body 73 in the side check valve 7 or the position of the valve body 73 in the right discharge side check valve 7 shown in FIG. As shown in FIGS. 1 to 4, each spring 74 is a coil spring that presses and biases the valve body 73 to the valve closing position. Thus, each valve element 73 is held in the closed position by the urging force of the spring 74 in the suction process in which the bellows 5 expands (the volume of the pump chamber 6 changes), and the bellows 5 contracts. In the discharge process (the volume of the pump chamber 6 is reduced), the pump chamber 6 is displaced to the valve opening position against the urging force of the spring 74 due to the pressure increase in the pump chamber 6.

  As shown in FIG. 4, each suction-side check valve 8 includes a valve case 81 attached to the pump head 3, a valve outlet passage 82 formed in the valve case 81, and a valve body 83 built in the valve case 81. And a spring 84.

  As shown in FIGS. 4 and 5, each valve case 81 is a bottomed cylindrical body having a base end attached to the pump head 3 with the pump chamber 6 protruding in parallel with the axis thereof. The opening is connected to the upstream end of the suction passage 2 through a valve seat port 85. In this example, the valve seat port 85 is configured by an opening (upstream end) of the suction passage 2 on the end face of the pump head 3 as shown in FIG. Both valve cases 81, 81 are arranged in a horizontal state in which the axes coincide with each other, below the pump chamber 6 and directly below the valve case 71 of the discharge-side check valve 7. In this example, each valve case 81 has its axis positioned on a vertical line (diameter line) passing through the axis of the pump chamber 6 and its outer peripheral surface is close to the lower portion of the bellows 5. 3 is attached.

  1 to 4, each valve outlet passage 82 is a through-hole formed at the tip of the valve case 81, one end opening in the valve case 81 and the other end opening in the pump chamber 6. Has been.

  1 to 4, each valve body 83 abuts against the valve seat 85 and closes the valve seat 85 (the valve body in the left suction side check valve 8 shown in FIGS. 2 to 4). 83 or the position of the valve body 83 in the right side suction side check valve 8 shown in FIG. 1 and the valve opening position where the valve seat port 85 is separated and opened (the left side suction side check valve shown in FIG. 1). The valve case 81 is provided so as to be movable back and forth in the axial direction over the position of the valve body 83 in the valve 8 or the position of the valve body 83 in the right side suction side check valve 8 shown in FIGS. As shown in FIGS. 1 to 4, each spring 84 is a coil spring that presses and biases the valve body 83 to the valve closing position. Thus, each valve element 83 is in a closed position by the back pressure (pressure in the pump chamber 6) and the urging force of the spring 84 in the discharge process in which the bellows 5 is contracted (the volume of the pump chamber 6 is contracted and changed). In the suction process in which the bellows 5 is extended (the volume of the pump chamber 6 is expanded), the valve chamber 6 is displaced to the valve opening position against the urging force of the spring 84 due to the pressure drop in the pump chamber 6.

  For pump components such as the pump head and bellows 5 that come into contact with the liquid A, an appropriate material is selected according to the properties of the liquid A, etc., but in this example, the corrosion resistance and chemical resistance are improved. It is made of excellent fluororesin plastic such as polytetrafluoroethylene.

  In the horizontal bellows pump configured as described above, the discharge process in one pump chamber 6 and the suction process in the other pump chamber 6 are performed simultaneously, as in the conventional pump described at the beginning. The liquid A can be continuously fed from the suction passage 2 to the discharge passage 1 by performing the steps alternately and continuously in both the pump chambers 6 and 6. By configuring as follows, the upper pump chamber portion 61 which is the region between the upper and lower opposed peripheral surfaces of the valve case 71 of each discharge side check valve 7 and the upper portion of the bellows 5 and each suction side check valve. It is devised to prevent as much as possible liquid retention in the lower pump chamber portion 62, which is the region between the upper and lower opposing peripheral surfaces of the valve case 81 and the lower portion of the bellows 5. In the following description, for the sake of convenience, the pump chamber 6 in the discharge process and the check valves 7 and 8 incorporated therein and the pump chamber 6 in the suction process and the check valves 7 and 8 incorporated therein are included. When it is necessary to distinguish between the first and the like, the former is given the “first” acronym, and the latter is given the “second” acronym.

  First, as shown in FIGS. 1 to 4, the valve inlet passage 72 formed at the tip of the valve case 71 of each discharge-side check valve 7 has one end opened in the valve case 71 and the other end The valve case 71 is formed in a special shape that opens to the upper pump chamber portion 61 at one location or a plurality of locations in the circumferential direction of the valve case 71 and / or a plurality of locations in the axial direction of the valve case 71.

  That is, as shown in FIG. 4, the valve inlet passage 72 is located in the center of the tip of the valve case 71 and communicates with the concave portion 76 having a circular cross section that opens into the valve case 71 and the upper pump chamber. It consists of one or a plurality of suction holes 77 opening in the portion 61. In this example, as shown in FIGS. 4 and 5, three suction holes 77 are arranged on a cross section orthogonal to the axial direction of the concave portion 76 to form a radial shape about the axial line of the concave portion 76. is there. Each suction hole 77 is a straight hole having a circular cross section. As shown in FIG. 5, the central suction hole 77 extends in the vertical direction on the diameter line passing through the center of the valve case 71. The two suction holes 77, 77 are located. In addition, each suction hole 77 has a peripheral edge of the opening to the concave portion 76 at least at one position on the peripheral edge of the bottom surface of the concave portion 76 (in this example, a circular surface orthogonal to the axis of the valve case 71). As shown in FIG. That is, each suction hole 77 is a plane (plane including the axis) that passes through the axis, and a cross-sectional shape that is parallel to the axis of the recess 76 (axis of the valve case 71) (for example, the suction at the center described above). In regard to the hole 77, the recess 76 is formed so that the peripheral edge of the suction hole 77 and the peripheral edge of the bottom surface of the concave part 76 are directly connected without any wrinkles (with no step) in the sectional shape shown in FIG. It is communicated to. Note that the cross-sectional diameter of the recess 76 and the cross-sectional diameter of each suction hole 77 are set so that the inflow amount from the valve inlet passage 72 constituted by these coincides with the liquid supply amount from the suction passage 2.

  Thus, in the first pump chamber 6 in the discharge process, the liquid A is fed from the first pump chamber 6 to the discharge passage 1 through the first valve inlet passage 72 and the valve case 71. A is sucked into the first valve inlet passage 72 from the first upper pump chamber portion 61 through the suction holes 77 that open toward the first upper pump chamber portion 61. That is, liquid feeding from the first pump chamber 6 to the discharge passage 1 is started from the first upper pump chamber portion 61, and the liquid A in the first upper pump chamber portion 61 is a valley portion on the inner surface of the first bellows. The liquid A in 54 is forced to flow from the upper pump chamber portion 61 into the first valve case 71. Therefore, in the discharge process, even when the liquid A is a slurry liquid or a high viscosity liquid, the retention of the liquid A in the first upper pump chamber portion 61 is prevented as much as possible.

  The effect of preventing liquid retention in the first upper pump chamber portion 61 due to the inflow of liquid from the first valve inlet passage 72 into the first valve case 71 is that each valve case 71 approaches the upper portion of the bellows 5 as described above. However, if the valve case 71 is brought close to the bellows 5 in this manner, the volume of the upper pump chamber portion 61 becomes small, that is, there is a possibility that it will stay. Since the amount of liquid is reduced, liquid retention in the first upper pump chamber portion 61 is extremely effectively prevented.

  Secondly, as shown in FIGS. 1 to 4, the valve outlet passage 82 formed at the tip of the valve case 81 of each suction side check valve 8 has one end opened in the valve case 81 and the other end The valve case 81 is configured in a special shape that opens to the lower pump chamber portion 62 at one location or at a plurality of locations in the circumferential direction of the valve case 81 and / or at a plurality of locations in the axial direction of the valve case 81.

That is, as shown in FIG. 4, the valve outlet passage 82 is located at the center of the tip of the valve case 81 and communicates with the concave portion 86 having a circular cross section that opens into the valve case 81 and the lower pump. It consists of one or a plurality of blowout holes 87 that open into the chamber portion 62. In this example, as shown in FIGS. 4 and 6, the three blowout holes 87 are arranged on a cross section orthogonal to the axis of the recess 86 and are formed in a radial shape centered on the axis of the recess 86. . Each blowing hole 87 is a straight hole having a circular cross section. As shown in FIG. 6, the central blowing hole 87 extends in the vertical direction on the diameter line passing through the center of the valve case 81. The two outlet holes 87, 87 are located. Further, similarly to the suction hole 77, each blowout hole 87 has a peripheral edge of the opening to the concave portion 86 at least at one place at the bottom surface of the concave portion 86 (in this example, a circular surface perpendicular to the axis of the valve case 81). And communicated with the recess 86 so as to be located on the periphery of That is, each blowing hole 87 has a shape (for example, the above-described center blowing) that is a plane passing through the axis (a plane including the axis) and parallel to the axis of the recess 86 (axis of the valve case 81). In regard to the hole 87, the recess 86 is formed so that the peripheral edge of the blow-out hole 87 and the peripheral edge of the bottom surface of the concave part 86 are directly connected without any wrinkles (with no step). It is communicated to.
Note that the cross-sectional diameter of the recess 86 and the cross-sectional diameter of each outlet hole 87 are set so that the amount of outflow from the valve outlet passage 82 constituted by these coincides with the amount of inflow from the valve inlet passage 72.

  Thus, in the second pump chamber 6 in the suction process, the liquid A flows out from the suction passage 2 to the second pump chamber 6 through the second valve case 81 and the second valve outlet passage 82. A is ejected from the respective blowing holes 87 toward the second lower pump chamber portion 62. That is, the liquid supply from the second valve outlet passage 82 to the second pump chamber 6 is started from the second lower pump chamber portion 62, and the liquid A in the second lower pump chamber portion 62 is supplied to the second bellows. The liquid A in the inner valley 54 is forced to flow from the lower pump chamber portion 62 to a region outside the lower pump chamber portion 62. Therefore, in the suction process, even when the liquid A is a slurry liquid or a high viscosity liquid, the retention of the liquid A in the second lower pump chamber portion 62 is prevented as much as possible.

  By the way, the liquid flow from the upper pump chamber portion 61 into the first valve case 71 due to the suction from the first valve inlet passage 72 does not immediately disappear at the time of switching from the discharge process to the suction process. For a while from the time, it remains due to inertia. Further, the liquid flow from the lower pump chamber portion 62 to the region outside the lower pump chamber portion 62 due to the blowing from the second valve outlet passage 82 immediately disappears when the suction process is switched to the discharge process. Instead, it remains due to inertia for a while from the time of switching. Therefore, when switching from the discharge process to the suction process, or when switching from the suction process to the discharge process, the liquid flowing from the upper pump chamber portion 61 to the valve inlet passage 72 in each pump chamber 6 is a short period of time. Since the flow and the liquid flow due to the discharge from the valve outlet passage 82 to the lower pump chamber portion 62 coexist, in each pump chamber 6, convection from the lower part to the upper part occurs, and this convection causes As a result, the liquid retention in the pump chamber portions 61 and 62 is more effectively prevented. Such convection is more effectively generated by arranging the check valves 7 and 8 on the vertical line passing through the center of the pump chamber 6 as described above.

  In this way, since the liquid A is prevented from staying in the upper pump chamber portion 61 and the lower pump chamber portion 62 in the discharge process and the suction process as much as possible, in each pump chamber 6, the discharge process is changed to the suction process or Liquid replacement by switching from the suction process to the discharge process is performed well, and as a result, the liquid A staying in the upper pump chamber portion 61 and / or the lower pump chamber portion 62 is discharged from the discharge passage 1. It is extremely rare that the liquid A is intermittently and irregularly mixed into the liquid A, and the liquid A can be sent in a stable state while keeping its properties constant. Since the first double-acting bellows pump is excellent in liquid replacement properties as described above, it can be suitably used as a liquid feed pump that handles liquids that require strict property management.

  By the way, the structure of the double-acting bellows pump according to the present invention is not limited to the above-described embodiment, and can be appropriately improved and changed without departing from the basic principle of the present invention.

  For example, in the first double-acting bellows pump described above, the valve inlet passage 72 and the valve outlet passage 82 are opened to the pump chamber portions 61 and 62 at a plurality of locations (three locations) of the valve cases 71 and 81. The plurality of suction holes 77 and the blowout holes 87 are formed in the valve cases 71 and 81. The suction holes 77 and / or the blowout holes 87 are formed on the valve cases 71 and 81 as shown in FIGS. You may make it form in one place. By the way, when the number of the suction holes 77 and the blowout holes 87 is one, the suction holes 77 and the blowout holes 87 have a large circular cross section beyond a certain level depending on the shape of the valve cases 77 and 81 (that is, the valve inlet passage 72). In addition, in order to ensure a sufficient flow rate from the valve outlet passage 82, it is sometimes difficult to increase the diameter of the blowout hole 77 and the blowout hole 87 from the space in the axial direction. In such a case, the cross-sectional shape of the single suction hole 77 and / or blowout hole 87 may be an oval or elliptical shape that is long in the circumferential direction of the valve cases 71 and 81 as shown in FIGS. That's fine. Such a contrivance is also adopted when the suction holes 77 and the blowout holes 87 having a circular cross section are provided with a plurality of suction holes 77 and blowout holes 87 and the flow rate is insufficient. In the case where a plurality of suction holes 77 and / or blowout holes 87 are provided, the number and arrangement thereof can be appropriately set according to pump conditions such as the properties of the liquid A, and the plurality of suction holes. 77 and / or the blowout holes 87 can be opened to the pump chamber portions 61 and 62 at a plurality of locations in the circumferential direction of the valve cases 71 and 81 and / or a plurality of locations in the axial direction of the valve cases 71 and 81.

  Further, the one or more suction holes 77 and / or the blowout holes 87 are not limited to those that penetrate the valve case 71 in a direction perpendicular to the axis of the valve case 71, and may be inclined with respect to the axis. Good. For example, as shown in FIG. 11, the suction hole 77 and / or the blowout hole 87 are opened in the pump chamber portions 61 and 62 in a state of being inclined toward the reduction direction of the bellows 5 (or toward the opposite extension direction). Furthermore, as shown in FIG. 12, a pair or a plurality of pairs of suction holes 77 and / or outlet holes 87 that open in the pump chamber portions 61 and 62 in a state of being inclined in both directions are provided. It is also possible to make it.

  Further, depending on the properties of the liquid A, there is a possibility that the liquid stays in the intermediate pump chamber portion 63 which is a region between the upper and lower opposed peripheral surfaces of the valve cases 71 and 81 of the check valves 7 and 8. Liquid retention can be effectively prevented by the following configuration. For example, as shown in FIGS. 13 to 15, one end opens in the valve case 71 of each discharge side check valve 7 in the valve inlet passage 72 (recess 76), and the other end opens in the intermediate pump chamber portion 63. While forming the lower suction hole 78, the valve case 81 of each suction-side check valve 8 has an upper end that opens into the valve outlet passage 82 (recess 86) and the other end that opens into the intermediate pump chamber portion 63. A blowout hole 88 is formed. With this configuration, in the discharge process, the liquid A in the first intermediate pump chamber portion 63 is forced to flow from the first lower suction hole 78 into the first valve case 71 through the first valve inlet passage 72. In addition, in the suction process, the liquid A is ejected from the second upper blowing hole 88 toward the intermediate pump chamber portion 63, and the liquid A in the second intermediate pump chamber portion 63 is outside the pump chamber portion 63. The liquid is forced to flow into the region, and no liquid stays in the intermediate pump chamber portion 63. A plurality of lower suction holes 78 and upper blowout holes 88 can be provided, and either one of the lower suction holes 78 or the upper blowout holes 88 may be provided.

  The lengths of the check valves 7 and 8 (valve cases 71 and 81) (projection length from the pump head 3 in the axial direction) are preferably the same for preventing liquid retention (for example, , See FIG.

  Each of the double-acting bellows pumps shown in FIGS. 6 to 15 can naturally exhibit the effects described above for the first double-acting bellows pump shown in FIGS. 1 to 5, except for the above points. Thus, the first double-acting bellows pump has the same configuration. In each double-action type bellows pump shown in FIGS. 6-15, about the part which makes the same structure as a 1st double-action type bellows pump, by attaching | subjecting the same code | symbol as FIGS. 1-5 to FIGS. Detailed description thereof will be omitted. Further, the suction hole 77, the lower suction hole 78, the blowout hole 87, and the upper blowout hole 88 in each double-acting bellows pump shown in FIGS. As in the case of 87, as described above, the peripheral edge of the opening to the concave portions 76, 86 is communicated with the concave portions 76, 86 so that the peripheral edge is located on the peripheral edge of the bottom surface of the concave portions 76, 86 at least in one place. It is preferable. The lengths of the check valves 7 and 8 (valve cases 71 and 81) (projection length from the pump head 3 in the axial direction) are preferably the same for preventing liquid retention (for example, , See FIG.

  The present invention can be suitably applied to a single-acting horizontal bellows pump as shown in FIGS. 16 to 21 in addition to the double-acting lateral bellows pump shown in FIGS.

  16 is a vertical side view showing an example of a single-acting horizontal bellows pump according to the present invention, FIG. 17 is a vertical side view corresponding to FIG. 16 showing a state different from FIG. 16, and FIG. FIG. 19 is an enlarged vertical side view showing the main part of FIG. 17, FIG. 19 is an enlarged vertical side view showing the main part of FIG. 17, and FIG. 20 is a vertical cut of the main part along the line XX-XX in FIG. 21 is a front view, and FIG. 21 is a longitudinal sectional front view of a main part taken along line XXI-XXI in FIG. In the following description, “upper and lower” and “left and right” refer to the upper and lower and left and right in FIGS.

  The horizontal bellows pump shown in FIG. 16 and FIG. 17 is a single-acting type pump (hereinafter referred to as “first”) that is used for feeding a liquid (such as the above-described chemical liquid or slurry liquid) A that requires strict property management. A single-acting bellows pump) having a discharge passage 1 and a suction passage 2, and a cylinder case 4 provided on one side of the pump head 3 (the right side in FIGS. 16 and 17); A cylindrical bellows 5 disposed in the cylinder case 4 and attached to the pump head 3 so as to be extendable in the axial direction (horizontal direction), a pump chamber 6 surrounded by the bellows 5, and protruding into the pump chamber 6 The discharge side check valve 7 arranged on the upper part of the pump chamber 6 and attached to the pump head 3 in a state of being attached, and the lower part of the pump chamber 6 and attached to the pump head 3 in a state of protruding to each pump chamber 6 Is A discharge step (FIG. 16) that includes the suction-side check valve 8 and causes the bellows 5 to expand and contract to send the liquid A from the pump chamber 6 to the discharge passage 1 via the discharge-side check valve 7. And the suction step (see FIGS. 17 and 19) for alternately supplying the liquid from the suction passage 2 to the other pump chamber 6 via the suction-side check valve 8. It is.

  The pump head 3 has a disk shape in which a discharge passage 1 connected to a liquid supply line and a suction passage 2 connected to a liquid supply line are formed. As shown in FIGS. Is open at the upstream end of the discharge passage 1 and the downstream end of the suction passage 2.

  As shown in FIGS. 16 to 19, each cylinder case 4 has a bottomed cylindrical shape attached to the pump head 3, and constitutes a pump body together with the pump head 3.

  As shown in FIGS. 16 and 17, the bellows 5 is a bottomed cylindrical body in which the peripheral wall 51 has a cross-sectional corrugated bellows structure, and expands and contracts the volume of the pump chamber 6 by expanding and contracting in the axial direction (left and right horizontal direction). It is something to be made. The bellows 5 has an opening end portion 52 closely fixed to the pump head 3, and the inside of the bellows 5 is configured as a pump chamber 6 closed by the pump head 3. The bellows 5 is expanded and contracted by advancing and retracting the disc-shaped movable plate 9 fixed to the bottom wall 53 in the axial direction of the bellows 5 by appropriate operating means. This operating means is generally composed of a piston / cylinder mechanism, a crank mechanism, an air cylinder mechanism, etc. In this example, as shown in FIGS. 16 and 17, an operating shaft 11 having a tip connected to a movable plate 9 is provided. The bellows 5 is configured to advance and retreat in the axial direction (horizontal direction) of the bellows 5 by known driving means (not shown). That is, the bellows 5 is expanded and contracted in the axial direction by the advance and retreat of the operating shaft 11, the discharge process is performed by the contracting operation of the bellows 5, and the suction process is performed by the extending operation of the bellows 5. 16 shows the end state of the discharge process (that is, the state immediately before switching to the suction process), and FIG. 17 shows the end state of the suction process (that is, the state immediately before switching to the discharge process).

  As shown in FIGS. 16 to 19, the discharge side check valve 7 includes a valve case 71 attached to the pump head 3, a valve inlet passage 72 formed in the valve case 71, and a valve built in the valve case 71. A body 73 and a spring 74 are provided.

  16 to 19, the valve case 71 is a bottomed cylindrical body having a base end attached to the pump head 3 in a state of protruding from the pump chamber 6 in parallel with the axis thereof, and has a base end opening. The part is connected in communication with the upstream end of the discharge passage 1. The valve case 71 is disposed above the pump chamber 6 with the axis thereof being horizontal. In this example, the valve case 71 is a vertical line (diameter line) through which the axis passes through the axis of the pump chamber 6. The pump head 3 is attached to the pump head 3 with its outer peripheral surface being close to the upper inner peripheral surface of the bellows 5.

  The valve inlet passage 72 is a through-hole formed at the tip of the valve case 71 as shown in FIGS. 16 to 19. One end of the valve inlet passage 72 is configured as a valve seat opening 75 that opens into the valve case 71. The end is opened to the pump chamber 6.

  As shown in FIGS. 16 to 19, the valve body 73 is separated from the valve seat port 75 by a valve closing position (a position shown in FIGS. 17 and 19) that abuts and closes the valve seat port 75. Is housed in the valve case 71 so as to be movable back and forth in the axial direction over the valve opening position (the position shown in FIGS. 16 and 18). As shown in FIGS. 16 and 18, each spring 74 is a coil spring that presses and urges the valve body 73 to the valve closing position. Thus, the valve body 73 is held in the closed position by the urging force of the spring 74 in the suction process in which the bellows 5 expands (the volume of the pump chamber 6 changes), and the bellows 5 contracts ( In the discharge process (the volume of the pump chamber 6 is reduced), the pump chamber 6 is displaced to the valve opening position against the urging force of the spring 74 due to the pressure increase in the pump chamber 6.

  As shown in FIGS. 16 to 19, the suction-side check valve 8 includes a valve case 81 attached to the pump head 3, a valve outlet passage 82 formed in the valve case 81, and a valve built in the valve case 81. The body 83 and the spring 84 are provided, and in this example, the body 83 and the spring 84 are disposed immediately below the discharge-side check valve 7.

  The valve case 81 is a bottomed cylindrical body having a base end attached to the pump head 3 in a state of projecting in parallel to the axis of the pump chamber 6 as shown in FIGS. The portion is connected to the upstream end of the suction passage 2 through a valve seat port 85. In this example, the valve seat port 85 is configured by an opening (downstream end) of the suction passage 2 on the end surface (right end surface) of the pump head 3 as shown in FIGS. The valve case 81 is disposed at a position directly below the valve case 71 below the pump chamber 6 in a horizontal state in which the axis is parallel to the valve case 71 of the discharge-side check valve 7. In this example, the valve case 81 is positioned on a vertical line (diameter line) whose axis passes through the axis of the pump chamber 6, and the outer peripheral surface thereof is close to the lower portion of the bellows 5. Is attached.

  The valve outlet passage 82 is a through hole formed at the tip of the valve case 81 as shown in FIGS. 16 to 19, and one end opens into the valve case 81 and the other end opens into the pump chamber 6. ing.

  As shown in FIGS. 16 to 19, the valve body 83 is separated from the valve seat port 85 by a valve closing position (position shown in FIGS. 16 and 18) that abuts the valve seat port 85 and closes it. Is housed in the valve case 81 so as to be movable back and forth in the axial direction over the valve opening position (the position shown in FIGS. 17 and 19). As shown in FIGS. 16 and 18, each spring 84 is a coil spring that presses and biases the valve body 83 to the valve closing position. Thus, the valve body 83 is brought into the closed position by the back pressure (pressure of the pump chamber 6) and the urging force of the spring 84 in the discharge process in which the bellows 5 is contracted (the volume of the pump chamber 6 is contracted and changed). In the suction process in which the bellows 5 is held and the bellows 5 is extended (the volume of the pump chamber 6 is enlarged and changed), the pump 84 is displaced to the valve opening position against the urging force of the spring 84 due to the pressure drop in the pump chamber 6.

  For pump components such as the pump head and bellows 5 that come into contact with the liquid A, an appropriate material is selected according to the properties of the liquid A, etc., but in this example, the corrosion resistance and chemical resistance are improved. It is made of excellent fluororesin plastic such as polytetrafluoroethylene.

  In the first single-acting bellows pump configured as described above, the liquid A is obtained by alternately performing the discharge process and the suction process in the pump chamber 6 as in the known single-acting bellows pump. Can be fed from the suction passage 2 to the discharge passage 1, but in accordance with the present invention, the valve case 71 and the bellows 5 of the discharge-side check valve 7 can be configured as follows. The upper pump chamber portion 61, which is a region between the upper and lower opposing peripheral surfaces with the upper portion (the upper portion of the peripheral wall 51), and the lower portion of the valve case 81 and the bellows 5 of the suction side check valve 8 (the lower portion of the peripheral wall 51) ) Is devised to prevent as much as possible liquid retention in the lower pump chamber portion 62, which is the region between the upper and lower opposing peripheral surfaces.

  First, the valve inlet passage 72 formed at the tip of the valve case 71 of the discharge side check valve 7 has one end opened into the valve case 71 and the other end opened as shown in FIGS. It is configured in a special shape that opens to the upper pump chamber portion 61 at one location of the case 71 or at multiple locations in the circumferential direction of the valve case 71 and / or at multiple locations in the axial direction of the valve case 71.

  That is, as shown in FIGS. 18 and 19, the valve inlet passage 72 is located at the center of the distal end portion of the valve case 71 and communicates with the concave portion 76 having a circular cross section that opens into the valve case 71. It consists of one or a plurality of suction holes 77 that open to the upper pump chamber portion 61. In this example, as shown in FIGS. 20 and 21, three suction holes 77 are arranged on a cross section perpendicular to the axial direction of the concave portion 76 to form a radial shape centering on the axial line of the concave portion 76. is there. Each suction hole 77 is a straight hole having a circular cross section. As shown in FIGS. 20 and 21, the central suction hole 77 extends in the vertical direction on the diameter line passing through the center of the valve case 71 and is symmetrical on both sides. The other two suction holes 77, 77 are located at the position. In addition, each suction hole 77 has a peripheral edge of the opening to the concave portion 76 at least at one position on the peripheral edge of the bottom surface of the concave portion 76 (in this example, a circular surface orthogonal to the axis of the valve case 71). As shown in FIG. That is, each suction hole 77 is a plane (plane including the axis) that passes through the axis, and a cross-sectional shape that is parallel to the axis of the recess 76 (axis of the valve case 71) (for example, the suction at the center described above). As for the hole 77, in the cross-sectional shape shown in FIG. 18 or FIG. 19, the peripheral edge of the suction hole 77 and the peripheral edge of the bottom surface of the recess 76 are directly connected without any wobbling (without a step). , Communicated with the recess 76. Note that the cross-sectional diameter of the recess 76 and the cross-sectional diameter of each suction hole 77 are set so that the inflow amount from the valve inlet passage 72 constituted by these coincides with the liquid supply amount from the suction passage 2.

  Thus, in the discharge process, the liquid A is sent from the pump chamber 6 to the discharge passage 1 through the valve inlet passage 72 and the valve case 71. At this time, the liquid A is directed from the upper pump chamber portion 61 to the discharge passage 1. Then, the air is sucked into the valve inlet passage 72 by the respective suction holes 77 opened. That is, liquid feeding from the pump chamber 6 to the discharge passage 1 is started from the upper pump chamber portion 61, and the liquid A in the upper pump chamber portion 61 includes the liquid A in the valley portion 54 on the inner surface of the bellows. The fluid is forced to flow from the upper pump chamber portion 61 into the valve case 71. Therefore, in the discharge process, even when the liquid A is a slurry liquid or a high viscosity liquid, the retention of the liquid A in the upper pump chamber portion 61 is prevented as much as possible.

  Note that the effect of preventing liquid retention in the upper pump chamber portion 61 due to the inflow of liquid from the valve inlet passage 72 into the valve case 71 can be further improved by keeping the valve case 71 close to the upper portion of the bellows 5 as described above. Although it is demonstrated well, the volume of the upper pump chamber portion 61 is reduced by keeping the valve case 71 close to the bellows 5 in this way, that is, the amount of liquid that may stay is reduced. The liquid staying in the upper pump chamber portion 61 is extremely effectively prevented.

  Secondly, as shown in FIGS. 16 to 19, a valve outlet passage 82 formed at the tip of the valve case 81 of the suction side check valve 8 has one end opened in the valve case 81 and the other end is a valve. It is configured in a special shape that opens to the lower pump chamber portion 62 at one location of the case 81 or at a plurality of locations in the circumferential direction of the valve case 81 and / or at a plurality of locations in the axial direction of the valve case 81.

  That is, as shown in FIGS. 16 to 19, the valve outlet passage 82 is located at the center of the tip portion of the valve case 81 and communicates with the concave portion 86 having a circular cross section that opens into the valve case 81. It consists of one or a plurality of blowout holes 87 that open to the lower pump chamber portion 62. In this example, as shown in FIG. 20 and FIG. 21, three blowout holes 87 are arranged on a cross section perpendicular to the axis of the recess 86 to form a radial shape centering on the axis of the recess 86. . Each blowing hole 87 is a straight hole having a circular cross section, and as shown in FIGS. 20 and 21, the central blowing hole 87 extends vertically on the diameter line passing through the center of the valve case 81, and is symmetrical on both sides. Two other blowout holes 87, 87 are located at the position. Further, similarly to the suction hole 77, each blowout hole 87 has a peripheral edge of the opening to the concave portion 86 at least at one place at the bottom surface of the concave portion 86 (in this example, a circular surface perpendicular to the axis of the valve case 81). And communicated with the recess 86 so as to be located on the periphery of That is, each blowing hole 87 has a shape (for example, the above-described center blowing) that is a plane passing through the axis (a plane including the axis) and parallel to the axis of the recess 86 (axis of the valve case 81). As for the hole 87, in the cross-sectional shape shown in FIG. 20 or FIG. 21, the peripheral edge of the blowout hole 87 and the peripheral edge of the bottom surface of the recess 86 are directly connected without any wrinkles (without a step). , Communicated with the recess 86. Note that the cross-sectional diameter of the recess 86 and the cross-sectional diameter of each outlet hole 87 are set so that the amount of outflow from the valve outlet passage 82 constituted by these coincides with the amount of inflow from the valve inlet passage 72.

  Thus, in the suction process, the liquid A flows out from the suction passage 2 to the pump chamber 6 through the valve case 81 and the valve outlet passage 82. At this time, the liquid A is discharged from each blow hole 87 to the lower pump chamber portion 62. Erupted toward the. That is, liquid supply from the valve outlet passage 82 to the pump chamber 6 is started from the lower pump chamber portion 62, and the liquid A in the lower pump chamber portion 62 causes the liquid A in the valley portion 54 on the inner surface of the bellows to flow. Including the forced flow from the lower pump chamber portion 62 to the region outside the lower pump portion 62. Therefore, in the suction step, even when the liquid A is a slurry liquid or a high viscosity liquid, the retention of the liquid A in the lower pump chamber portion 62 is prevented as much as possible.

  By the way, the liquid flow from the upper pump chamber portion 61 into the valve case 71 due to the suction from the valve inlet passage 72 does not immediately disappear when switching from the discharge process to the suction process, but for a while from the switching time. The gap remains due to inertia. Further, the liquid flow from the lower pump chamber portion 62 to the region outside the lower pump chamber portion 62 due to the blowout from the valve outlet passage 82 does not immediately disappear when the suction process is switched to the discharge process. For a while from the time of switching, it remains due to inertia. Accordingly, when the discharge process is switched to the suction process, or when the suction process is switched to the discharge process, the liquid flow toward the valve inlet passage 72 from the upper pump chamber portion 61 in the pump chamber 6 is a short period. And the liquid flow caused by the discharge from the valve outlet passage 82 to the lower pump chamber portion 62 coexist, the convection from the lower portion to the upper portion is generated in the pump chamber 6, and the convection also causes the above-mentioned convection. Thus, liquid retention in the pump chamber portions 61 and 62 is more effectively prevented. Such convection is more effectively generated by arranging the check valves 7 and 8 on the vertical line passing through the center of the pump chamber 6 as described above.

  In this way, since the liquid A is prevented from staying in the upper pump chamber portion 61 and the lower pump chamber portion 62 in the discharge process and the suction process as much as possible, in the pump chamber 6, the discharge process is changed to the suction process or the suction process. Liquid replacement by switching from the process to the discharge process is performed satisfactorily. As a result, the liquid A staying in the upper pump chamber portion 61 and / or the lower pump chamber portion 62 is discharged from the discharge passage 1. The occurrence of intermittent and irregular mixing with A is extremely small, and the liquid A can be fed in a stable state while maintaining its properties constant. Since the first single-acting bellows pump is excellent in liquid replacement properties as described above, it can be suitably used as a liquid feed pump that handles liquids that require strict property management.

  By the way, the configuration of the single-acting bellows pump according to the present invention is not limited to the above-described embodiment, and can be appropriately improved and changed without departing from the basic principle of the present invention.

  For example, in the first single-acting bellows pump described above, the valve inlet passage 72 and the valve outlet passage 82 are opened to the pump chamber portions 61 and 62 at a plurality of locations (three locations) of the valve cases 71 and 81. A plurality of suction holes 77 and blowout holes 87 are formed in the valve cases 71 and 81. The suction holes 77 and / or the blowout holes 87 are formed on the valve cases 71 and 81 as shown in FIGS. You may make it form in one place. By the way, when the number of the suction holes 77 and the blowout holes 87 is one, the suction holes 77 and the blowout holes 87 have a large circular cross section beyond a certain level depending on the shape of the valve cases 77 and 81 (that is, the valve inlet passage 72). In addition, in order to ensure a sufficient flow rate from the valve outlet passage 82, it is sometimes difficult to increase the diameter of the blowout hole 77 and the blowout hole 87 from the space in the axial direction. In such a case, the cross-sectional shape of the suction hole 77 and the blowout hole 87 may be an oval or an ellipse that is long in the circumferential direction of the valve cases 71 and 81, as shown in FIGS. Such a contrivance is also adopted when the suction holes 77 and the blowout holes 87 having a circular cross section are provided with a plurality of suction holes 77 and blowout holes 87 and the flow rate is insufficient. In the case where a plurality of suction holes 77 and / or blowout holes 87 are provided, the number and arrangement thereof can be appropriately set according to pump conditions such as the properties of the liquid A, and the plurality of suction holes. 77 and / or the blowout holes 87 can be opened to the pump chamber portions 61 and 62 at a plurality of locations in the circumferential direction of the valve cases 71 and 81 and / or a plurality of locations in the axial direction of the valve cases 71 and 81.

  Further, the one or more suction holes 77 and / or the blowout holes 87 are not limited to those that penetrate the valve case 71 in a direction perpendicular to the axis of the valve case 71, and may be inclined with respect to the axis. Good. For example, as shown in FIG. 26, the suction hole 77 and / or the blow-out hole 87 are opened in the pump chamber portions 61 and 62 in an inclined state toward the contraction direction of the bellows 5 (or toward the opposite extension direction). Further, as shown in FIG. 27, one or more pairs of suction holes 77 and outlet holes 87 that open to the pump chamber portions 61 and 62 in a state inclined in both directions are provided. It is also possible.

  Further, depending on the properties of the liquid A, there is a possibility that the liquid stays in the intermediate pump chamber portion 63 which is a region between the upper and lower opposed peripheral surfaces of the valve cases 71 and 81 of the check valves 7 and 8. Liquid retention can be effectively prevented by the following configuration. For example, as shown in FIGS. 28 to 31, one end opens in the valve inlet passage 72 (recess 76) and the other end opens in the intermediate pump chamber portion 63 in the valve case 71 of each discharge-side check valve 7. While forming the lower suction hole 78, the valve case 81 of each suction-side check valve 8 has an upper end that opens into the valve outlet passage 82 (recess 86) and the other end that opens into the intermediate pump chamber portion 63. A blowout hole 88 is formed. With this configuration, in the discharge process, the liquid A in the intermediate pump chamber portion 63 is forced to flow from the lower suction hole 78 through the first valve inlet passage 72 into the valve case 71, and In the suction process, the liquid A is ejected from the upper blowing hole 88 toward the intermediate pump chamber portion 63, and the liquid A in the intermediate pump chamber portion 63 is forced to flow to a region outside the pump chamber portion 63. In the intermediate pump chamber portion 63, no liquid stays. A plurality of lower suction holes 78 and upper blowout holes 88 can be provided, and either one of the lower suction holes 78 or the upper blowout holes 88 may be provided. The lengths of the check valves 7 and 8 (valve cases 71 and 81) (projection length from the pump head 3 in the axial direction) are preferably the same for preventing liquid retention (for example, , See FIG.

  Each of the single-acting bellows pumps shown in FIGS. 22 to 31 can naturally exhibit the effects described above for the first single-acting bellows pump shown in FIGS. 16 to 21, except for the points described above. Thus, the first single-acting bellows pump has the same configuration. In the single-acting bellows pumps shown in FIGS. 22 to 31, parts having the same configuration as the first single-acting bellows pump are denoted by the same reference numerals as in FIGS. 16 to 21 in FIGS. 22 to 31. Detailed description thereof will be omitted. Further, the suction hole 77, the lower suction hole 78, the blowout hole 87, and the upper blowout hole 88 in each single-acting bellows pump shown in FIGS. 22 to 31 are the suction hole 77 and the blowout hole in the first single-acting bellows pump. As in the case of 87, as described above, the peripheral edge of the opening to the concave portions 76, 86 is communicated with the concave portions 76, 86 so that the peripheral edge is located on the peripheral edge of the bottom surface of the concave portions 76, 86 at least in one place. It is preferable.

DESCRIPTION OF SYMBOLS 1 Discharge passage 2 Suction passage 3 Pump head 4 Cylinder case 5 Bellows 6 Pump chamber 7 Discharge side check valve 8 Suction side check valve 9 Movable plate 10 Connecting rod 11 Actuation shaft 41 Supply / exhaust port 42 Pressurized air 51 Bellows peripheral wall 52 Open end of bellows 53 Bottom wall of bellows 54 Valley of bellows 61 Upper pump chamber portion 62 Lower pump chamber portion 63 Intermediate pump chamber portion 71 Valve case 72 Valve inlet passage 73 Valve body 74 Spring 75 Valve seat port 76 Recess 77 Suction hole 78 Lower suction hole 81 Valve case 82 Valve outlet passage 83 Valve body 84 Spring 85 Valve seat port 86 Recessed portion 87 Blowout hole 88 Upper blowout hole A Liquid

Claims (9)

A pump head having a discharge passage and a suction passage, a cylinder case provided in the pump head, a bellows disposed in the cylinder case and attached to the pump head so as to be extendable in the axial direction, and surrounded by the bellows A discharge-side check valve attached to the pump head by being placed in the upper part of the pump chamber in a state of protruding into the pump chamber, and a suction attached to the lower part of the pump chamber in a state of protruding into the pump chamber and attached to the pump head A discharge step for supplying liquid from the pump chamber to the discharge passage through the discharge side check valve by expanding and contracting the bellows, and a pump from the suction passage through the suction side check valve In the horizontal bellows pump configured to alternately perform the suction process of supplying liquid to the chamber,
The discharge side check valve has a cylindrical valve case attached to the pump head in a state where the base end portion communicates with the upstream end of the discharge passage, and a through hole formed in the distal end portion of the valve case, Is opened in the valve case and the other end of the valve inlet passage opens in the upper pump chamber portion, which is the region between the upper and lower opposing circumferential surfaces of the valve case and the bellows upper portion, A valve body that opens and closes a valve seat opening constituted by one end of the valve inlet passage, and a spring that is arranged in the valve case and biases the valve body to a valve closing position that closes the valve seat opening,
The suction side check valve has a cylindrical valve case attached to the pump head with the base end communicating with the downstream end of the suction passage through the valve seat port, and a penetration formed at the tip of the valve case A valve outlet passage which is a hole and has one end opened in the valve case and the other end opened in a lower pump chamber portion which is a region between upper and lower opposed peripheral surfaces of the valve case and the lower portion of the bellows, a valve body for opening and closing the movably arranged in the valve seat opening within, Ri Na and and a spring for biasing the valve closing position for closing the valve seat opening the valve body disposed in the valve casing,
Lower suction opening to the intermediate pump chamber part that is the area between the upper and lower opposing peripheral surfaces of the valve case of both check valves in the valve case of the discharge check valve and / or the suction check valve The lower suction hole is formed in the valve case of the discharge side check valve, and one end opens into the valve inlet passage and the other end is opposite to each other. The upper pumping hole is formed in the valve case of the suction-side check valve, and opens at one end of the valve case. horizontal bellows pump, characterized in der Rukoto which opens into the intermediate pump chamber portion and the other end is vertically between opposed peripheral surfaces area of the valve case of both check valves while opening the outlet passage.   A pump head having a discharge passage and a suction passage; a pair of cylinder cases provided on both sides of the pump head; and a pair of bellows disposed in each cylinder case and attached to the pump head so as to be extendable in the axial direction. A pair of discharge check valves mounted on the pump head in a state protruding from the pump chamber surrounded by each bellows, and the pump chamber in a state protruding from each pump chamber And a pair of suction-side check valves attached to the pump head at the bottom of the pump, and by alternately extending and contracting both bellows, the discharge passage from one pump chamber via the discharge-side check valve Double-acting bellows pump configured to simultaneously perform a discharge process for feeding liquid to the other pump chamber and a suction process for feeding liquid to the other pump chamber via a suction-side check valve And characterized in that, the lateral bellows pump according to claim 1.   A pump head having a discharge passage and a suction passage, a cylinder case provided on one side of the pump head, a bellows disposed in the cylinder case and attached to the pump head so as to be extendable in the axial direction, and surrounded by the bellows A discharge-side check valve attached to the pump head by being placed in the upper part of the pump chamber in a state of protruding into the pump chamber, and attached to the pump head by being placed in the lower part of the pump chamber in a state of protruding into the pump chamber The suction side check valve, and by extending and retracting the bellows, the discharge process for feeding the liquid from the pump chamber to the discharge passage through the discharge side check valve and the suction side check valve from the suction passage. The horizontal bellows pump according to claim 1, wherein the bellows pump is a single-acting bellows pump configured to alternately perform a suction step of supplying liquid to the pump chamber via Pump.   The horizontal bellows pump according to any one of claims 1 to 3, wherein both check valves are positioned on a vertical line passing through the axis of the pump chamber.   The horizontal bellows pump according to any one of claims 1 to 4, wherein in the pump chamber, the discharge side check valve is close to an upper portion of the bellows.   The horizontal bellows pump according to any one of claims 1 to 5, wherein the valve inlet passage opens to the upper pump chamber portion at one location of the valve case.   The valve inlet passage opens to the upper pump chamber part at a plurality of locations in the circumferential direction of the valve case and / or at a plurality of locations in the axial direction of the valve case. Horizontal bellows pump. The horizontal bellows pump according to any one of claims 1 to 7, wherein the valve outlet passage opens to a lower pump chamber portion at one location of the valve case . Wherein the valve outlet passage is to open the lower pump chamber portion at a plurality of locations in the axial direction of the plurality of locations and / or the valve case in the circumferential direction of the valve casing, to any one of claims 1-7 The horizontal bellows pump described.

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