JP5940482B2 - Water scrubber and exhaust gas treatment equipment - Google Patents

Description

  The present invention provides, for example, a water scrubber that cleans exhaust gas discharged from a semiconductor manufacturing process and removes a component that reacts with water, and an exhaust gas that burns or pyrolyzes the exhaust gas discharged from the water scrubber. The present invention relates to a processing apparatus.

From semiconductor device manufacturing processes, silane (SiH ₄ ), disilane (Si ₂ H ₆ ), diborane (B ₂ H ₆ ), phosphine (PH ₃ ), arsine (AsH ₃ ), nitrogen trifluoride (NF ₃ ), etc. It is known that exhaust gases that have adverse effects on the global environment such as exhaust gases that have toxic effects and fluorides typified by carbon tetrafluoride (CF ₄ ) and sulfur hexafluoride (SF ₆ ) are discharged. . Such exhaust gas is required to be detoxified in advance when released into the atmosphere.

  For this reason, a treatment method and apparatus for toxic exhaust gas capable of satisfying the above requirements by burning the exhaust gas as described above and detoxifying it, and then releasing it to the atmosphere has been proposed (see, for example, Patent Document 1). . The technique described in Patent Document 1 introduces the exhaust gas as described above into a cylindrical combustion chamber whose one end is closed, and hydrogen, methane, ethane, propane, butane, and the like by a burner disposed in the combustion chamber. It decomposes at the high temperature part generated when the fuel gas burns or burns by the action of auxiliary combustion air, then supplies to the water scrubber through the combustion exhaust gas transfer passage, and cools with the water scrubber At the same time, it absorbs powdered solids, harmful combustion by-product gases, etc., and discharges them to the atmosphere through a predetermined flue.

  In the treatment method described in Patent Document 1, when removing the fluoride contained in the exhaust gas, there is a possibility that the metal part constituting the treatment apparatus is corroded or the fluoride in an undecomposed state is released. The problem that there is. In order to solve this problem, an abatement apparatus described in Patent Document 2 has been proposed.

  The detoxification device described in Patent Document 2 includes an inlet scrubber for washing and removing hydrolyzable gas or water-soluble gas contained in exhaust gas, and a water-insoluble pyrolyzable gas contained in the washed exhaust gas washed with the inlet scrubber And a heating reaction section for thermally decomposing, an outlet scrubber for removing the hydrolytic gas generated by the pyrolysis with water, and a receiving tank for storing the wash water discharged from both scrubbers. .

  In the abatement apparatus, the exhaust gas introduction pipe led out from the semiconductor manufacturing apparatus is connected to the ceiling portion of the inlet scrubber, and the shower nozzle is provided at a position lower than the ceiling. Therefore, while the exhaust gas introduced from the exhaust gas introduction pipe flows from the upper side to the lower side, the washing water sprayed from the shower nozzle acts to remove the hydrolyzable gas and water-soluble gas by washing, and then in the heating reaction section The pyrolytic gas is pyrolyzed. For this reason, it becomes possible to remove a metal corrosive gas and to reduce the corrosion of the metal part which comprises an abatement apparatus.

Japanese Patent No. 2996392 Japanese Patent Laid-Open No. 11-212437

  In the semiconductor exhaust gas abatement apparatus described in Patent Document 2, the exhaust gas derived from the semiconductor manufacturing apparatus is cleaned by the cleaning water sprayed from the shower nozzle while flowing from the upper side to the lower side of the inlet scrubber. For this reason, the cleaning water and the exhaust gas flow in the same direction, and the contact time between the two becomes short, or there is a possibility that the cleaning efficiency is lowered due to the fact that reliable contact is not made.

  As a method of improving the cleaning efficiency, the exhaust gas flow is opposed to the flow of the cleaning water to shorten the contact time between them, and the cleaning efficiency is improved. The exhaust gas passes through the cleaning water formed in a horizontal film. And a method for improving the cleaning efficiency by reliably bringing them into contact with each other. In these methods, the contact time between the two can be increased by flowing the exhaust gas and the washing water in opposite directions, or reliable contact can be realized by passing the water film.

  For this reason, it is necessary to make the flow of exhaust gas flow from the bottom to the top while the wash water flows from the top to the bottom. That is, the water scrubber has a structure having an exhaust gas cleaning function, an introduction path for introducing the exhaust gas below the structure, and a tank for storing the solidified material generated by the reaction with the cleaning water or water. It will be necessary.

  When the present inventors configured the water scrubber as described above, the dust contained in the exhaust gas introduced into the exhaust gas introduction path adheres to the inner wall surface of the introduction path and becomes a lump solidified product, and this solidified product As a result, the solidified material adhering to the material interferes with the function of the introduction path.

  An object of the present invention is to provide a water scrubber capable of eliminating the attached solidified material even when the solidified material generated from dust contained in the introduced exhaust gas adheres to the inner wall surface of the introduction path, and the water scrubber. An object of the present invention is to provide an exhaust gas treatment apparatus used.

In order to solve the above problems, a water scrubber according to the present invention is a water scrubber used in an exhaust gas treatment apparatus that exhausts exhaust gas at a high temperature to burn or decompose, and is larger than the upper cylinder and the upper cylinder. An exhaust gas supply port formed in the upper cylindrical body, an exhaust gas exhaust port formed in the lower end, the upper cylindrical body and the lower cylindrical body, which has an upright cylindrical body having a lower cylindrical body having a diameter And a weir member having an inner diameter substantially equal to the inner diameter of the upper cylindrical body and a lower end portion of the hanging piece expanded toward the inner wall surface of the lower cylindrical body, and water along the inner wall. A gas introduction tower having a weir part for flowing, a scraper disposed from an upstream side in the flow direction of exhaust gas toward a downstream side of the weir part, a drive motor for driving the scraper, and the gas introduction tower, Arranged in parallel and supplied from the opening formed below The exhaust gas is cleaned by letting water act on the exhaust gas, and the exhaust gas discharged from the exhaust port is disposed in the gas introduction tower and the gas cleaning tower. The exhaust port of the gas introduction tower and the gas The exhaust gas passage connecting the opening formed below the washing tower is configured, and the tank has a tank that stores water acting on the exhaust gas and a solidified product that is generated by reacting with the water contained in the exhaust gas. Is.

  An exhaust gas treatment apparatus according to the present invention includes a water scrubber configured as described above, and a cleaning gas supply port connected to a discharge port of a gas cleaning tower that constitutes the water scrubber, from the cleaning gas supply port. And a combustion chamber for exhausting the supplied exhaust gas at a high temperature for combustion or decomposition.

  In addition, other exhaust gas treatment apparatuses are provided with a plurality of water scrubbers configured as described above, and supply ports of gas introduction towers constituting each water scrubber are connected by a supply side pipe, and any one of them via a supply side valve. The exhaust gas can be selectively supplied to the water scrubber, and the exhaust ports of the gas cleaning tower and the cleaning gas supply port of the combustion chamber are connected by exhaust side piping and driven in synchronization with the supply side valve. The exhaust gas that has been selectively cleaned from any of the water scrubbers to the combustion chamber can be supplied via the discharge side valve.

  In the water scrubber according to the present invention, the exhaust gas supplied from the upper part of the gas introduction tower can be discharged from the discharge port formed at the lower end, and can be supplied to the gas cleaning tower from the opening formed below through the exhaust gas passage, The gas cleaning tower can be cleaned while flowing from below to above.

  In particular, since a scraper directed toward the downstream side of the weir portion is disposed in the gas introduction tower, solidified substances that adhere to the inner wall surface of the gas introduction tower and grow can be scraped off. For this reason, the exhaust gas passage inside the gas introduction tower can be secured, and the function as the exhaust gas passage can be maintained.

  Then, the water flowing along the inner wall from the weir portion of the gas introduction tower and the solidified material scraped off by the scraper are stored in the tank, and the water that has acted on the exhaust gas inside the gas cleaning tower can be stored in the tank. it can.

  Further, in the exhaust gas treatment apparatus according to the present invention, since the exhaust port of the gas scrubber of the water scrubber is connected to the cleaning gas supply port of the combustion chamber, the cleaned exhaust gas discharged from the water scrubber Can be removed by combustion or decomposition.

  Further, another exhaust gas processing apparatus according to the present invention can selectively connect an exhaust gas generation source and any of a plurality of water scrubbers, and can connect the selected water scrubber and the combustion chamber. For this reason, the combustion chamber can be operated continuously while switching the water scrubber to burn or decompose the exhaust gas, and the maintenance work of the water scrubber can be performed reliably.

It is a figure explaining the structure of a water scrubber. It is a figure explaining the effect | action of a scraper. It is a figure explaining the structure of the processing apparatus of waste gas. It is a figure explaining the structure of the processing apparatus of the waste gas which arranged the some water scrubber in parallel.

  First, the water scrubber according to the present invention will be described. Exhaust gas generated from semiconductor manufacturing equipment and liquid crystal panel manufacturing equipment contains many silicon oxide components. This silicon oxide is dust made up of fine powder at the stage of generation, and adheres to the inner wall surface of the apparatus and the protrusions formed inside. The adhering solidified material becomes a strong lump and grows with an increase in operating time, resulting in a problem that the passage of exhaust gas is narrowed.

  The water scrubber according to the present invention is used in an exhaust gas treatment apparatus that removes heat by pyrolyzing or burning exhaust gas discharged from a semiconductor manufacturing apparatus or a liquid crystal panel manufacturing apparatus. That is, the substance reacting with water contained in the exhaust gas is separated as a solidified product by washing with water prior to thermal decomposition or combustion of the exhaust gas. The exhaust gas from which the substance that has reacted with water is removed is supplied to the combustion chamber, thereby reducing the burden on the combustion chamber and improving the detoxification efficiency.

  An embodiment of a water scrubber according to the present invention will be described with reference to FIGS. The water scrubber A shown in the figure includes a gas introduction tower (hereinafter referred to as “introduction tower”) 10 into which exhaust gas is introduced, and a gas cleaning tower (hereinafter referred to as “washing tower”) 20 arranged in parallel with the introduction tower 10. The tank 30 is provided with the introduction tower 10 and the washing tower 20 provided in the upper part. The exhaust gas introduced from the introduction tower 10 passes through the exhaust gas passage 34 formed in the upper part of the tank 30 from the lower side of the introduction tower 10 to the lower part of the cleaning tower 20 and flows from the lower side to the upper side of the cleaning tower 20. After cleaning, the water is discharged from the water scrubber A and supplied to the combustion chamber B shown in FIGS.

  The introduction tower 10 is constituted by a cylindrical body 11 standing on the top of the tank 30. The cylindrical body 11 is divided into an upper cylindrical body 11a and a lower cylindrical body 11b, the lower cylindrical body 11b is fixed to the upper part of the tank 30, and the upper cylindrical body 11a is connected to the lower cylindrical body 11b via a connecting portion 11c. It is detachably connected. The structure of the connection part 11c which connects the upper cylinder body 11a and the lower cylinder body 11b is not limited, It is possible to select flange connection or screw connection. In particular, since the inside of the introduction tower 10 has a pressure lower than the atmospheric pressure, it is preferable to employ the “clamp type joint for vacuum apparatus” defined in JISB8365. For this reason, by removing the upper cylinder 11a from the lower cylinder 11b, the inside of the introduction tower 10 can be opened, and cleaning can be performed in this state.

  The lower cylindrical body 11b has a larger diameter than the upper cylindrical body 11a, and a weir 12 is formed at a joint portion between both the cylindrical bodies 11a and 11b. The weir 12 is for forming a water film having a substantially uniform thickness on the inner wall surface of the lower cylindrical body 11b. For this reason, a ring-shaped water channel 12a is formed on the outer periphery of the upper end of the lower cylindrical body 11b, and a notch 12b is formed over the entire periphery of the upper end portion. Further, a dam member 12c is disposed at the upper end portion of the lower cylinder 11b, and the tip of the hanging piece 12c2 suspended from the main body 12c1 of the dam member 12c is positioned below the notch 12b so that the lower cylinder 11b. A substantially constant gap is formed between the inner wall surface and the inner wall surface.

  In particular, the dam member 12c is formed in a cylindrical shape, and is attached to a connection portion 11c with the upper cylinder 11a provided at the upper end portion of the lower cylinder 11b. The weir member 12c has an inner diameter substantially equal to the inner diameter of the upper cylindrical body 11a and an inner diameter smaller than that of the lower cylindrical body 11b. For this reason, the inner wall surface from the upper cylinder 11a to the dam member 12c is formed as a uniform surface without a step, so that the inner diameter increases in the portion extending from the upper cylinder 11a and the dam member 12c to the lower cylinder 11b. Is formed.

  On the upper side surface of the upper cylinder 11a, there is formed a supply port 13a that is connected to a process for generating exhaust gas such as a semiconductor manufacturing apparatus or a liquid crystal panel manufacturing apparatus (not shown) to supply exhaust gas. Further, the lower end of the lower cylinder 11b opens toward the tank 30, and the opening is configured as an exhaust port 13b for exhaust gas. A passage connecting the supply port 13a and the exhaust port 13b is configured as an exhaust gas introduction passage 13.

  A scraper 14 is disposed inside the introduction tower 10 and is configured to be driven by a drive motor 15 provided at the upper end of the upper cylindrical body 11a so as to rotate about the center of the introduction tower 10 as a rotation center. .

  The scraper 14 adheres to the inside of the upper cylindrical body 11a and the lower cylindrical body 11b constituting the introduction tower 10 and scrapes off the grown solidified material, and the tip reaches the downstream side of the exhaust gas flow direction weir 12. ing. That is, on the downstream side of the weir 12, a water film having a substantially uniform thickness is formed on the inner wall surface of the lower cylindrical body 11b by the water flowing from the weir 12, so that the solidified material does not adhere. . For this reason, the scraper 14 should just be what can reach | attain below rather than the hanging piece 12c2 of the dam member 12c.

  Since no water film is formed on the upstream side of the weir 12 in the introduction tower 10, the solidified substance contained in the exhaust gas adheres and the attached solidified substance grows. In particular, the solidified material adheres to the inner wall surface upstream of the weir 12 in the exhaust gas flow direction, for example, the inner wall surface of the upper cylindrical body 11a, because moisture inside the introduction tower 10 is supplied to the introduction tower 10. Many of them are caused by acting on dust contained in exhaust gas, or by being affected by minute irregularities on the inner wall surface. For this reason, by forming the scraper 14 toward the downstream side of the weir 12, it is possible to scrape off the solidified material that has adhered and grown.

  The shape of the scraper 14 is not particularly limited, and may be a round bar, a square bar, a flat bar, or the like. Moreover, the length of the scraper 14 should just be what can reach | attain the downstream of the hanging piece 12c2.

  The gap formed by the scraper 14 and the hanging piece 12c2 constituting the weir 12 is not limited, and is preferably as small as possible. However, since there is a risk of eccentricity when the weir member 12c is attached to the lower cylindrical body 11b, the gap, in other words, the distance from the center of the introduction tower 10 of the scraper 14 is taken into consideration in view of such assembly tolerances. Is set.

  In addition, when the water scrubber A is in operation, it is not limited whether the scraper 14 is always driven or periodically driven, and solids accompanying the increase in the type and amount of dust contained in the exhaust gas and the operation time. It is preferable to set appropriately considering various conditions including the degree of growth of the compound.

  In the introduction tower 10 configured as described above, when water is supplied to the water passage 12a of the weir 12 to form a water film on the inner wall surface of the lower cylindrical body 11b, and the exhaust gas is circulated through the introduction passage 13, As the gas flows, dust contained in the exhaust gas adheres to the weir member 12c as a solidified product. Furthermore, the attached solidified material grows as the operating time increases. For this reason, by driving the drive motor 15 and rotating the scraper 14, it is possible to scrape off the solidified material adhering to the weir member 12 c by the scraper 14.

  Since the scraper 14 is inside the introduction tower 10, the scraper 14 is also an object to which the solidified material is attached, and a cleaning operation for removing the attached solidified material is also required. For this reason, it is possible to remove the upper cylinder 11a from the lower cylinder 11b together with the scraper 14 by operating the connecting portion 11c, and to clean the scraper 14 and the weir member 12c in this state.

  The cleaning tower 20 is arranged in the upper part of the tank 30 in parallel with the introduction tower 10. The cleaning tower 20 removes a component that reacts with moisture contained in the exhaust gas by cleaning the exhaust gas supplied through the introduction tower 10 and flowing from below to above. In the cleaning tower 20, high cleaning efficiency can be realized by flowing the exhaust gas so as to face the water.

  The cleaning tower 20 has an opening 21a that opens downward toward the tank 30 and a discharge port 21b that discharges the cleaned exhaust gas at the top, and is formed between the opening 21a and the discharge port 21b. A gas passage 21 is configured. Therefore, the exhaust gas supplied from the opening 21a flows upward and is discharged from the discharge port 21b.

  Inside the washing tower 20 and on the opening 21a side (upstream side in the exhaust gas flow direction), a shower pipe 22a is disposed across the gas passage 21, and a plurality of shower nozzles 22b are provided in the shower pipe 22a. Is provided.

  Further, a filter member 23 that forms a water film across the gas passage 21 is disposed inside the cleaning tower 20 and on the discharge port 21b side (downstream side in the exhaust gas flow direction) from the shower nozzle 22b. . The filter member 23 includes a hole plate 23a in which a large number of holes are formed, a weir 23b that defines the thickness of a water film formed on the upper portion of the hole plate 23a, and a ridge 23c that receives water overflowing from the weir 23b. It is configured.

  The thickness of the water film formed on the filter member 23 (height of the weir 23b) is sufficiently smaller than the negative pressure acting on the discharge port 21b of the cleaning tower 20, and the exhaust gas supplied from the opening 21a is filtered. The water film of the member 23 can be passed through and discharged from the discharge port 21b. The number of filter members 23 installed in the cleaning tower 20 is not particularly limited, and may be one or more. In this embodiment, the filtering member 23 is configured in two stages.

  A draining member 24 is disposed inside the cleaning tower 20 and on the discharge port 21b side (downstream side in the exhaust gas flow direction) of the filter member 23. The draining member 24 is for removing moisture contained in the exhaust gas that has passed through the shower nozzle 22b and the filtration member 23, and is configured by arranging a plurality of draining plates 24a from the upstream side to the downstream side in the exhaust gas flow direction. Has been.

  In the cleaning tower 20 configured as described above, the exhaust gas flowing in from the opening 21a formed at the lower side is cleaned by the action of water in the process of flowing upward through the gas passage 21 and reaching the discharge port 21b. The component that reacts with is removed. That is, it is cleaned in contact with water droplets jetted from the shower nozzle 22b in the vicinity of the opening 21a, and then further cleaned by diving through a water film formed on the filter member 23, and further, moisture contained in the exhaust gas. Collides with the draining member 24 and is separated. And the exhaust gas from which the water | moisture content was removed is discharged | emitted from the discharge port 21b.

  The tank 30 has a function of storing water and the fallen solidified material, and a function of connecting the introduction tower 10 and the cleaning tower 20 to form an exhaust gas passage. An introduction tower 10 and a washing tower 20 are arranged in parallel in the upper part of the tank 30, and a portion where these towers 10, 20 are not arranged is closed by a lid member 31.

  Since the upper portion of the tank 30 is closed, the inside of the introduction tower 10, the tank 30, and the washing tower 20 becomes a series of sealed spaces from the supply port 13 a of the introduction tower 10 to the discharge port 21 b of the washing tower 20. For this reason, the exhaust gas supplied from the supply port 13a flows through the introduction passage 13, the exhaust gas passage 34, and the gas passage 21 to the discharge port 21b due to the pressure difference acting on the supply port 13a and the discharge port 21b. ing.

  The tank 30 includes water having a water film formed on the inner wall surface of the lower cylindrical body 11 b constituting the introduction tower 10, water sprayed from the shower nozzle 22 b disposed in the washing tower 20, and water flowing from the filter member 23. , Is configured to accept. And although the water level of the tank 30 moves up and down within a preset range, it is kept substantially constant within this range, and the internal space composed of the water surface and the lid member 31 is formed between the introduction tower 10 and the washing tower. 20 functions as an exhaust gas passage 34 connecting the two.

  Between the water surface and the lid member 31, the inner wall surface of the tank 30 is exposed to the flowing exhaust gas, and dust may adhere to the inner wall surface. For this reason, a water film is formed on the inner wall surface above the water surface of the tank 30 in the same manner as the lower cylindrical body 11b of the introduction tower 10.

  Moreover, the solidified material scraped off by the scraper 14 falls below the introduction tower 10 of the tank 30. For this reason, the basket 32 is arrange | positioned inside the tank 30 and the downward direction of the introduction tower 10, The solidified material which fell from the introduction tower 10 can be accommodated and stored in the fence 32. FIG. A detachable lid (not shown) is provided on the left side surface of the tank 30 shown in FIG. 1, and the solidified material stored by removing the lid and taking out the basket 32 from the tank 30 is cleaned. Is possible.

  The water received by the tank 30 from the introduction tower 10 and the washing tower 20 contains dust that has solidified by reacting with water, and this dust is stored at the bottom of the tank 30. For this reason, a removable lid 33 is formed on the side surface of the tank 30, and the inside can be cleaned by removing the lid 33.

  In the water scrubber A configured as described above, the exhaust gas supplied from the supply port 13a of the introduction tower 10 passes through the exhaust gas passage 34 from the exhaust port 13b formed below, and the opening formed below the cleaning tower 20 21a. Then, in the process of ascending the inside of the cleaning tower 20 from the opening 21a, contact with water droplets ejected from the shower nozzle 22b, diving through a water film formed on the filter member 23, and water contained in the exhaust gas Reacting components are removed and washed. Further, the moisture contained in the exhaust gas washed with water is separated by the draining member 24, and the exhaust gas from which the moisture has been separated is discharged from the discharge port 21b.

  In particular, it is possible to secure the cross-sectional area of the introduction path 13 regardless of the operation time by scraping off the solidified material that has adhered to the weir member 12c of the introduction tower 10 by the rotating scraper 14.

  Next, the configuration of the exhaust gas treatment apparatus using the water scrubber A configured as described above will be described with reference to FIG. The processing apparatus D according to the present embodiment has one water scrubber A and one combustion chamber B incorporated in a casing, and one water scrubber C is disposed downstream of the combustion chamber B. It is arranged and configured. However, the water scrubber C disposed on the downstream side of the combustion chamber B is not essential for the exhaust gas treatment apparatus of the present invention.

  In the processing apparatus D according to this embodiment, a pipe 61 is connected to the supply port 13a of the water scrubber A. The pipe 61 has branch pipes 66 a, 66 b, 66 c connected to a manufacturing process (not shown), and the exhaust gas discharged from any of the processes is supplied to the water scrubber A via the branch pipes 66 a to 66 c and the pipe 61. The The discharge port 21b of the water scrubber A and the combustion chamber B are connected by a pipe 62 so that the exhaust gas washed by the water scrubber A can be supplied to the combustion chamber B.

  In the combustion chamber B, the exhaust gas supplied from the water scrubber A is burned or decomposed by a flame of a burner, and the generated combustion exhaust gas is exhausted toward the water scrubber C, and is used in a conventional exhaust gas treatment apparatus. The same combustion chamber can be used. The shape and capacity of the combustion chamber B are not limited and are appropriately designed according to the type and amount of exhaust gas to be treated. Similarly, the number of burners and the nature of the fuel gas are not particularly limited, and are appropriately set according to the type and amount of exhaust gas to be treated.

  The combustion chamber B has a main combustion chamber 41, one end portion side of the main combustion chamber 41 is closed, and the other end portion is open. The closed end is provided with a cleaning gas supply port 42 connected to the discharge port 21 b of the water scrubber A via a pipe 62 and a plurality of burners 43, and the other end of the main combustion chamber 41. An exhaust pipe 44 is connected to the part.

  In this embodiment, the main combustion chamber 41 is constituted by a cylindrical body arranged upright, and a refractory layer 45 is formed on the entire inner peripheral surface. Further, a refractory layer 45 is also formed at a connection portion of the exhaust pipe 44 connected to the other end side of the main combustion chamber 41 with the main combustion chamber 41.

  The exhaust tube 44 is disposed below the main combustion chamber 41 and rapidly cools the combustion gas after burning in the combustion chamber B. A combustion gas passage 46 communicating with the water scrubber C is connected to the exhaust pipe 44. The combustion gas passage 46 connects the combustion chamber B and the water scrubber C and moves up and down within a preset range, but in a tank 47 that stores water so that a substantially constant water level can be maintained within the range. Is formed.

  The combustion chamber B is not limited to the structure in which the cylindrical body is erected in the vertical direction as in the present embodiment, and may be a structure in which the cylindrical body is disposed horizontally. That is, as the combustion chamber B, a main combustion chamber 41 made of a cylindrical body arranged in a vertical direction or a horizontal direction, and a cleaning gas supply port to which exhaust gas provided on an end surface of the main combustion chamber 41 or a side surface of the cylindrical body is supplied. 42 and a plurality of burners 43 provided on the end face of the main combustion chamber 41 or the side surface of the cylinder and provided downstream in the exhaust gas flow direction.

  The water scrubber C is for removing dust components and gas components contained in the combustion gas, and is configured integrally with the combustion chamber B via the tank 47. This water scrubber C has a structure similar to the washing tower 20 of the water scrubber A described above. That is, the water scrubber C is composed of a cylindrical body 51 disposed in the upper part of the tank 47, an opening 51a connected to the combustion gas passage 46 is formed below the cylindrical body 51, and a discharge port 51b is formed above. Yes. Further, a filtering member 52 similar to the filtering member 23 of the water scrubber A is disposed inside the cylindrical body 51, and a draining member 53 similar to the draining member 24 is further disposed. The filter member 52 need not be the same as the filter member 23 of the water scrubber A.

  A suction member 55 is connected to the discharge port 51b of the water scrubber C, and the negative pressure generated by the suction member 55 passes through the discharge port 51b of the water scrubber C. It is comprised so that it may act on the water scrubber A. The suction member 55 can be appropriately selected from a blower, a fan, a vacuum pump, or the like in consideration of the entire system of the exhaust gas treatment apparatus.

  In the processing apparatus D configured as described above, water is ejected from the shower nozzle 22b of the water scrubber A, and water is supplied to the filtration member 23 and the filtration member 52 of the water scrubber C to form a water film, and the suction member 55 is activated. Along with the operation of the suction member 55, the water scrubber C, the combustion chamber B, the pipe 62, and the water scrubber A have negative pressures, and a series of gas passages are formed therethrough.

  When exhaust gas is supplied to the supply port 13 a of the introduction tower 10 of the water scrubber A via the pipe 61, the exhaust gas passes through the cleaning tower 20 from the introduction tower 10 of the water scrubber A. In this process, the component that reacts with the water contained in the exhaust gas is washed and removed by the water, and falls into the tank 30 together with the water.

  At this time, dust contained in the exhaust gas adheres to the inner wall surface of the upper cylindrical body 11a constituting the introduction tower 10 and the inner surface of the weir member 12c and grows with time. However, it is possible to scrape off the solidified material composed of the attached and grown dust by continuously or appropriately rotating the scraper 14. Then, the solidified material scraped off by the scraper 14 is accommodated and stored in the basket 32 disposed in the tank 30.

  The exhaust gas that has been washed in the water scrubber A and from which the component that reacts with water has been removed is supplied to the combustion chamber B via the pipe 62. In the combustion chamber B, the exhaust gas supplied by the flame formed in the burner 43 is converted into combustion gas by removing harmful components by combustion or thermal decomposition, and is supplied to the water scrubber C. A large solidified lump that is a dust component generated by combustion and pyrolysis of exhaust gas falls into the tank 47.

  In the water scrubber C, high temperature combustion gas is washed by passing through a water film formed on the filter member 52. At this time, the fine dust component contained in the combustion gas discharged from the combustion chamber B is washed when passing through the water film formed on the filter member 52, and is put into the tank 47 together with the water forming the water film. Fall.

  In this way, the component that reacts with water contained in the exhaust gas is removed by the water scrubber A, and the component that does not react with water is removed by combustion and thermal decomposition in the combustion chamber B. Further, the combustion gas discharged from the combustion chamber B is cleaned by removing dust components and gas components contained in the water scrubber C. The exhaust gas that has been detoxified and cooled is discharged from the discharge port 51b of the water scrubber C through the suction member 55 to the atmosphere.

  Next, the configuration of another processing apparatus E will be described with reference to FIG. The processing apparatus E shown in the drawing is configured by incorporating two water scrubbers Aa and Ab and one combustion chamber B in a casing. In particular, the processing apparatus E performs cleaning work by selectively connecting two water scrubbers Aa and Ab to the combustion chamber B to stop the operation of the water scrubbers Aa and Ab while keeping the combustion chamber B continuous. It is comprised so that it can perform.

  In the figure, the two water scrubbers Aa and Ab both have the same configuration as the water scrubber A shown in FIG. 1, and the same reference numerals as those in FIG. Similarly, the combustion chamber B and the water scrubber C have the same configuration as the combustion chamber B and the water scrubber C shown in FIG.

  A pipe 61 connected to a manufacturing process (not shown) branches into pipes 61a and 61b via a supply side valve 63 such as a three-way valve. The pipe 61a is connected to the supply port 13a of the introduction tower 10 of the water scrubber Aa, and the pipe 61b is connected to the supply port 13a of the introduction tower 10 of the water scrubber Ab.

  A pipe 62a is connected to the discharge port 21b of the cleaning tower 20 of the water scrubber Aa, and a pipe 62b is connected to the discharge port 21b of the cleaning tower 20 of the water scrubber Ab. These pipes 62a and 62b are three-way valves or the like. This is connected to the pipe 62 via the discharge side valve 64. The pipe 62 is connected to the cleaning gas supply port 42 of the combustion chamber B.

  In the processing apparatus E configured as described above, the supply side valve 63 and the discharge side valve 64 are switched and driven synchronously, thereby switching the pipe 61 to the pipe 61a and connecting it to the water scrubber Aa as well as the pipe 62a and the pipe 62. It is possible to connect the water scrubber Aa and the combustion chamber B by connecting. Similarly, the water scrubber Ab and the combustion chamber B can be connected by switching the pipe 61 to the pipe 61b and connecting it to the water scrubber Ab and connecting the pipe 62b and the pipe 62.

For this reason, when it becomes necessary to clean the tank 30 of the water scrubber Aa or the weir member 12c and the scraper 14 constituting the introduction tower 10, the supply side valve 63 and the discharge side valve 64 are operated in synchronization. Thus, the water scrubber Ab and the combustion chamber B can be connected. Similarly, when the water scrubber Ab needs to be cleaned, the water scrubber Aa and the combustion chamber B can be connected.

  That is, it is possible to perform maintenance work including cleaning of the water scrubber Aa or the water scrubber Ab without stopping the operation of the combustion chamber B.

  The water scrubber configured as described above is advantageously installed on the upstream side of the combustion chamber when exhausting exhaust gas containing components that are discharged from the manufacturing process of semiconductors and the like and react with water.

  Further, the exhaust gas treatment apparatus is advantageous when continuously operating because the burden on the combustion chamber is reduced.

A, Aa, Ab Water scrubber B Combustion chamber C Water scrubber D, E Processing device 10 Introduction tower 11 Tubular body 11a Upper tubular body 11b Lower tubular body 11c Connection part 12 Weir 12a Water channel 12b Notch 12c Weir member 12c1 Main body 12c2 Drooping piece DESCRIPTION OF SYMBOLS 13 Introduction path 13a Supply port 13b Exhaust port 14 Scraper 15 Drive motor 20 Washing tower 21 Gas passage 21a Opening part 21b Exhaust port 22a Shower piping 22b Shower nozzle 23 Filter member 23a Hole plate 23b Weir 23c Reed 24 Drain plate member 24a Drain plate member 30 31 Lid member 32 籠 33 Lid 34 Exhaust gas passage 41 Main combustion chamber 42 Cleaning gas supply port 43 Burner 44 Exhaust tube 45 Refractory layer 46 Combustion gas passage 47 Tank 51 Cylindrical body 51a Opening 51b Discharge port 52 Filtration member 53 Draining member 55 Suction member 61, 61a, 6 1b, 62, 62a, 62b
Piping 66a, 66b, 66c
Branch piping 63 Supply side valve 64 Discharge side valve

Claims (3)

A water scrubber used in an exhaust gas treatment device that exhausts exhaust gas at a high temperature to burn or decompose,
The upper cylinder and the lower cylinder having a larger diameter than that of the upper cylinder, and an upright cylinder, the exhaust gas supply port formed in the upper cylinder, and the exhaust gas exhaust port formed in the lower end And a weir disposed between the upper cylindrical body and the lower cylindrical body and having an inner diameter substantially equal to the inner diameter of the upper cylindrical body and a lower end portion of the hanging piece expanding toward the inner wall surface of the lower cylindrical body a dam portion for flowing water along the inner wall has a member, and the scraper from the flow direction upstream side of the exhaust gas is disposed to the downstream side of the dam portion, and a drive motor for driving the scraper, the A gas introduction tower having,
A gas cleaning tower disposed in parallel with the gas introduction tower, cleaning the exhaust gas by causing water to act on the exhaust gas supplied from an opening formed below, and discharging the cleaned exhaust gas from an outlet;
The exhaust gas passage is arranged in the gas introduction tower and the gas cleaning tower and connects an exhaust port of the gas introduction tower and an opening formed below the gas cleaning tower, and is contained in water and exhaust gas acting on the exhaust gas. A tank for storing a solidified product generated by reacting with water;
Water scrubber characterized by having. A water scrubber according to claim 1;
A cleaning gas supply port connected to an exhaust port of a gas cleaning tower constituting the water scrubber; and a combustion chamber for exhausting the exhaust gas supplied from the cleaning gas supply port at a high temperature and burning or decomposing the exhaust gas. An exhaust gas treatment apparatus characterized by that.   A plurality of water scrubbers according to claim 1 are arranged, the supply ports of the gas introduction towers constituting each water scrubber are connected by supply side piping, and the exhaust gas is selectively discharged to any one of the water scrubbers via the supply side valve. The exhaust port of the gas cleaning tower and the cleaning gas supply port of the combustion chamber are connected by a discharge side pipe and are connected via a discharge side valve driven in synchronization with the supply side valve. An exhaust gas treatment apparatus configured to be able to supply exhaust gas selectively cleaned from a water scrubber to a combustion chamber.

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