JP5952785B2 - Physical quantity measuring sensor and manufacturing method thereof - Google Patents

Description

  The present invention relates to, for example, a pressure sensor that measures the pressure of a fluid to be measured, another physical quantity measurement sensor, and a method of manufacturing the physical quantity measurement sensor.

There are various physical quantity measuring sensors, for example, a pressure sensor for measuring the pressure of a fluid to be measured. As a conventional example of a pressure sensor, an element housing, a hermetic glass fixed to the central opening of the element housing, a plurality of lead pins and a sensor chip mounting part mounted on the hermetic glass, and a sensor chip mounting part are provided. There is one in which an external device is provided with a pressure detection element constituted by a pressure detection sensor chip formed (Patent Document 1).
In the conventional example of Patent Document 1, the pressure detection sensor chip and the lead pin are electrically connected by a wire or the like, and a signal from the sensor chip is led to the outside through the lead pin.

In order to improve the dielectric strength of the pressure sensor, an insulating resin may be provided on the pressure detection element.
In the conventional example shown in FIGS. 6 and 7 of Patent Document 1, an insulating resin such as an adhesive or a gel material is coated or potted on the surface of the lead pin, hermetic glass and element housing in order to improve the dielectric strength. The insulation distance is increased and the dielectric strength is increased.
The adhesive or the gel material is retained from the surface of the hermetic glass provided with the lead pins penetrating from the surface of the element housing to which the hermetic glass is fixed to the central opening.

JP 2002-357501 A (FIGS. 6 and 7)

In general, an insulating resin such as an adhesive or a gel material exhibits its performance by being completely bonded and fixed to an adhesive surface. Therefore, since the insulating resin flows out in a state where it is not cured, the insulating resin must be retained at a predetermined position with a predetermined thickness.
In the conventional example shown in FIG. 6 and FIG. 7 of Patent Document 1, the surface of the hermetic glass and the element housing is coated or potted with an adhesive or gel material, but since there is no device for retention, there is no adhesion. There is a possibility that the agent or the gel material may flow out of the predetermined position. In particular, when the pressure sensor is miniaturized, an area for applying an insulating resin such as an adhesive is inevitably reduced, so that it is difficult to retain the insulating resin having a predetermined thickness.
If the adhesive or gel material flows out of a predetermined position, a problem occurs in connection or assembly with an external circuit.

  An object of the present invention is to provide a physical quantity measuring sensor and a method for manufacturing the same that can easily perform an operation for retaining an insulating resin to increase a withstand voltage.

  The physical quantity measuring sensor of the present invention includes a lead pin for taking out an electric signal, an electrically insulating member through which the lead pin passes, an airtight terminal having a base provided with the electrically insulating member, and a cylinder provided on the base. And a sensor module having a detector provided in the main body and connected to the lead pin and outputting an electrical signal by pressure, a pressure introduction hole is formed inside, and one end side of the pressure introduction hole is an external device And the other end side is joined to the hermetic terminal, a cover member formed on the housing and formed with a window portion through which the lead pin is inserted, and the hermetic terminal, the housing, and the cover member are enclosed. An insulating resin filled in a region where the cover member has a constant width on the base or the housing. And having a wall portion crimped to prevent the leakage of the insulating resin.

In the present invention having this configuration, the hermetic terminal, the sensor module, and the housing are assembled, and then the cover member is mounted on the housing. In this state, the insulating resin is poured from the window portion of the cover member into a region surrounded by the hermetic terminal, the housing, and the cover member. Since the wall portion of the cover member is pressure-bonded to the base or the housing with a certain width, the injected insulating resin is blocked by the wall portion and does not leak outside. Therefore, since the insulating resin stays in the wall portion, the predetermined thickness is maintained at the predetermined position until the insulating resin is cured. When the insulating resin is cured, the insulation distance is increased and the withstand voltage is increased.
Therefore, in the present invention, the retention of the insulating resin can be maintained simply by attaching the cover member having the wall portion to the housing, so that the outflow of the insulating resin is reliably prevented and the work for increasing the withstand voltage is easy. It becomes.

The physical quantity measuring sensor of the present invention includes a lead pin for taking out an electrical signal, an electrical insulating member through which the lead pin passes, and a base in which the electrical insulating member is provided and an air introduction hole for introducing atmospheric pressure is formed. A sensor module having an airtight terminal, a cylindrical main body that is provided on the base and that communicates with the air introduction hole, and a detection unit that is connected to the lead pin and outputs an electric signal by pressure. A housing in which a pressure introduction hole is formed and one end side of the pressure introduction hole is connected to an external device and the other end side is joined to the airtight terminal, and a window portion that is attached to the housing and through which the lead pin is inserted And a cover member formed with the airtight terminal, the housing and the cover member. The cover member is a bridge that is bridged from a position where the window portion is separated from the wall portion, and a wall portion that is crimped to the base or the housing with a certain width to prevent leakage of the insulating resin. And a cylindrical abutting portion provided on the bridge, the cylindrical abutting portion being pressure-bonded to the base with a certain width to prevent the insulating resin from flowing into the atmosphere introduction hole. It is characterized by.
In this configuration, in addition to the effects of the above-described invention, the following effects can be achieved. That is, by attaching the cover member to the housing, the cylindrical contact portion of the cover member is crimped to the base with a certain width. In this state, even if the insulating resin is poured into the region surrounded by the airtight terminal, the housing and the cover member from the window of the cover member, the cylindrical contact portion of the cover member is crimped to the base with a certain width. The insulating resin is blocked by the cylindrical contact portion and does not flow into the air introduction hole formed in the base. Therefore, since the insulating resin stays in the cylindrical contact portion, the predetermined thickness is maintained at the predetermined position until the insulating resin is cured. Moreover, since the insulating resin does not flow into the sensor module through the air introduction hole, the detection accuracy is not affected.

In the physical quantity measurement sensor of the present invention, the housing includes a cylindrical member formed with a flat surface with which the wall portion abuts and an outer peripheral surface intersecting the flat surface, and the pressure introduction is included in the flat surface of the cylindrical member. A protrusion that fits with the outer peripheral edge of the base is formed at the opening edge peripheral edge of the other end side of the hole, and the cover member includes a cover body in which the outer peripheral surface and the inner peripheral surface of the housing face each other, and the cover A configuration including a flat portion integrally formed with the main body and facing the flat surface and having the wall portion formed thereon is preferable.
In this configuration, the flat surface of the housing has a protrusion that fits with the outer peripheral edge of the base, so that the housing and the base are positioned and securely fitted, and the physical quantity measurement sensor is assembled. Can be easily performed.
In addition, since the wall portion of the cover member is pressure-bonded to the flat surface of the housing, the insulating resin is reliably dammed by the wall portion. Therefore, it is possible to effectively prevent leakage of the insulating resin.

The physical quantity measurement sensor of the present invention may be configured such that a diaphragm is provided at a position away from the base of the housing, and a space between the diaphragm, the housing, and the base is filled with a sealing liquid.
In this configuration, when the fluid to be measured is introduced from the pressure introduction hole of the housing, the diaphragm is displaced by the pressure change of the fluid to be measured. The displacement of the diaphragm is output as an electric signal at the detection unit of the sensor module via the sealing liquid, and this electric signal is sent to the outside through the lead pin. The liquid-encapsulated physical quantity measurement sensor having such a configuration can also exhibit the above-described effects.

In the manufacturing method of the physical quantity measuring sensor of the present invention, a lead pin for taking out an electric signal is attached to a base formed with an air introduction hole for introducing atmospheric pressure via an electrical insulating member, and an airtight terminal is assembled. A sensor module that is connected to the lead pin and is provided with a detection unit that outputs an electrical signal by pressure is connected to the cylindrical main body communicating with the air introduction hole, and the pressure introduction hole is formed inside and one end side is external The airtight terminal is joined to the other end of the housing connectable to the apparatus, a cover member having a wall portion and a window portion is formed, and the lead pin is inserted into the window portion and the wall portion is the base or It is attached to the housing so as to be crimped to the housing with a certain width, and an insulating tree is formed in an area surrounded by the hermetic terminal, the housing and the cover member. Wherein the filling.
According to the present invention having this configuration, a method for manufacturing a physical quantity measuring sensor capable of achieving the above-described effects can be provided.

In the physical quantity measuring sensor manufacturing method of the present invention, it is preferable that the cover member be removed after the insulating resin is cured.
In this configuration, since the cover member can be reused, the manufacturing cost of the physical quantity measurement sensor can be reduced.

The top view of the physical quantity measurement sensor concerning 1st Embodiment of this invention. The front view of a physical quantity measurement sensor. FIG. 3 is a cross-sectional view taken along line III-III in FIG. 1. (A) The top view of a cover member, (B) Sectional drawing of a cover member. The top view of the physical quantity measurement sensor concerning 2nd Embodiment of this invention. The front view of a physical quantity measurement sensor. The arrow directional cross-sectional view along the VII-VII line in FIG. The figure which shows the physical quantity measurement sensor concerning 3rd Embodiment of this invention, and respond | corresponds to FIG. (A) The top view of a cover member, (B) Sectional drawing of a cover member.

Embodiments of the present invention will be described below with reference to the drawings. The physical quantity measurement sensor of this embodiment is a pressure sensor.
1 to 4 show a first embodiment of the present invention.
1 to 3 show the overall configuration of the physical quantity measurement sensor of the first embodiment.
1 to 3, the physical quantity measurement sensor has a structure in which a cover member 2 is attached to a sensor body 1.
The sensor body 1 includes a housing 3, an airtight terminal 5 having a base 4 hermetically fixed to the housing 3, and a sensor module 6 provided on the base 4.

The housing 3 includes a cylindrical member 31 in which a pressure introduction hole 30 is formed along the axial direction, a connection portion 32 provided on one end side of the pressure introduction hole 30 of the cylindrical member 31, and a pressure of the cylindrical member 31. This is a metal member having a protrusion 33 provided on the other end side of the introduction hole 30.
The pressure introduction hole 30 is formed so that the diameter of the portion located in the cylindrical member 31 is larger than the portion located in the connection portion 32. Further, the pressure introduction hole 30 is formed with a step 30 </ b> A that faces the outer peripheral edge of the base 4 at a portion where the cylindrical member 31 is located.

The cylindrical member 31 is formed with an outer peripheral surface 31A and a flat surface 31B orthogonal to the outer peripheral surface 31A.
The connection unit 32 is connected to an external device (not shown). The external device has a communication path (not shown) communicating with the pressure introduction hole 30.
The protrusion 33 is fitted to the outer peripheral edge of the base 4 and is formed in a ring shape having a predetermined width and a predetermined height along the opening end on the other end side of the pressure introduction hole 30 of the flat surface 31B. Has been.

The hermetic terminal 5 includes a base 4, an electrical insulating member 50 made of glass provided on the base 4, and a lead pin 51 provided through the electrical insulating member 50 and for taking out an electrical signal. Yes. The lead pin 51 is airtightly fixed to the base 4 via the electrical insulating member 50.
The base 4 is formed of a metal disk, and an air introduction hole 4A for introducing atmospheric pressure is formed at the center thereof. On the surface of the base 4 opposite to the surface facing the opening end of the pressure introducing hole 30, a flat rectangular shaped upper portion 4B is formed. The top of the raised portion 4B has a flat shape.

The outer peripheral edge portion of the base 4 is integrally formed with an outer peripheral surface 4C facing the inner peripheral surface of the pressure introducing hole 30 and a flange portion 4D having a larger diameter than the outer peripheral surface 4C. The flange portion 4 </ b> D is supported at the tip of the protrusion 33, and the dimension protruding from the outer peripheral surface 4 </ b> C is equal to the width of the tip surface of the protrusion 33.
The electrically insulating member 50 is provided in a mounting hole 4 </ b> E provided through the base 4.
One end of the lead pin 51 is exposed inside the pressure introduction hole 30 of the housing 3, and the other end is exposed outside the sensor.

The sensor module 6 includes a cylindrical main body 61 provided at the center of the surface of the base 4 facing the opening end of the pressure introducing hole 30, and a detection unit 62 provided on the main body 61. The sensor module 6 is bonded and fixed to the base 4 with a bonding material such as an adhesive, glass, or a low melting point metal. Here, means for approximating the linear expansion coefficients of the base 4, the bonding material, and the sensor module to each other or absorbing and reducing the influence of the mutual coefficient difference is provided.
The inside of the main body 61 communicates with the air introduction hole 4A.
The detection unit 62 is connected to the lead pin 51 via the bonding wire 5A and outputs an electrical signal by pressure, and includes a strain gauge (not shown).
In plan view, two rows of lead pins 51 each having three rows are arranged around the sensor module 6 (see FIG. 1).

A detailed configuration of the cover member 2 will be described with reference to FIG.
1 to 4, the cover member 2 has a shape that follows the shape of the sensor body 1, and a ring shape that is integrally formed from the cover body 21 and the opening end of the cover body 21 toward the axis. The flat portion 22, the ring-shaped upright portion 23 formed by rising from the inner peripheral edge of the flat portion 22, the top portion 24 provided at the end of the upright portion 23, and the upright portion 23 of the flat portion 22 are And a wall portion 25 integrally formed on the opposite side. The cover member 2 is formed from PBT (polybutylene terephthalate), PPS (polyphenylene sulfide), and other insulating materials by an appropriate manufacturing method such as injection molding.
The cover body 21 is configured such that the inner peripheral surface 21A faces the outer peripheral surface 31A of the cylindrical member 31, and the dimension along the axial direction of the inner peripheral surface 21A is the dimension along the axial direction of the outer peripheral surface 31A of the cylindrical member 31. Greater than.

A protruding snap portion 210 that fits with a corner portion of the cylindrical member 31 is formed along the circumferential direction at the end portion of the cover body 21 opposite to the end portion where the flat portion 22 is formed.
The cover main body 21 is formed with a display window 21 </ b> B for displaying a model number displayed in advance on the outer peripheral surface 31 </ b> A of the cylindrical member 31 and other information (not shown) regarding the physical quantity measurement sensor.
The flat portion 22 is a shoulder portion having a facing surface that faces the flat surface 31 </ b> B of the cylindrical member 31.
The inner peripheral surface of the upright portion 23 is opposed to the outer peripheral surfaces of the protrusion 33 and the flange portion 4D.

A window portion 24A through which the lead pin 51 is inserted is formed on the top portion 24, and a long plate-like bridge 24B is bridged at positions apart from each other in the window portion 24A.
A central portion 24C of the bridge 24B has a disk shape. A cylindrical contact portion 24D is integrally formed at the center of the central portion 24C toward the base 4 side. The cylindrical contact portion 24 </ b> D is to be crimped to the top of the raised portion 4 </ b> B of the base 4 with a constant width t <b> 1.
A hole is formed in the central portion 24C continuously with the inner peripheral portion of the cylindrical contact portion 24D.
The cylindrical abutting portion 24D prevents an insulating resin R, which will be described later, from flowing into the air introduction hole 4A. Therefore, in a state where the cylindrical contact portion 24D is pressure-bonded to the raised portion 4B, the air introduction hole 4A communicates with the external space through the internal space of the cylindrical contact portion 24D.
The wall portion 25 is pressed against the flat surface 31B of the housing with a constant width t2 to prevent leakage of an insulating resin R described later, and is formed in a ring shape.
The height dimension of the cylindrical contact portion 24D is set to a dimension that interferes with the base 4 when the cover member 2 is attached to the sensor body 1. The height of the wall portion 25 is set to a size that interferes with the flat surface 31B of the housing.

An insulating resin R is filled in an area S surrounded by the hermetic terminal 5, the housing 3 and the cover member 2. 1 and 2, the illustration of the insulating resin R is omitted.
Specific examples of the insulating resin R include an adhesive and a gel material, but are specifically selected depending on the application.
In the state in which the insulating resin R is cured, the creepage distance and the insulating distance are larger than in the state in which the insulating resin R is not present.

Next, the manufacturing method of the physical quantity measuring sensor of the present invention will be described.
[Manufacture of sensor body]
First, the airtight terminal 5 is assembled by attaching the lead pin 51 to the base 4 in which the air introduction hole 4 </ b> A is formed via the electrical insulating member 50.
Further, the sensor module 6 is bonded and fixed to the base 4 with a bonding material such as an adhesive. The detection unit 62 of the sensor module 6 and the lead pin 51 are electrically connected by a bonding wire 5A. Then, the airtight terminal 5 is joined to the housing 3.

[Attaching the cover member]
The cover member 2 manufactured in advance by an appropriate method such as an injection molding method is mounted on the housing 3.
Therefore, the cover member 2 is pushed into the housing 3 with the lead pin 51 inserted through the window 24A. Then, the wall portion 25 is brought into contact with the flat surface 31B of the housing 3 and the cylindrical contact portion 24D is brought into contact with the raised portion 4B of the base 4.
When the cover member 2 is continuously pushed into the housing 3, the bridge 24 </ b> B is elastically deformed so that the wall portion 25 is crimped to the housing 3 and the cylindrical contact portion 24 </ b> D is crimped to the base 4.
Then, the snap portion 210 is engaged with the corner portion of the housing 3 so that the cover member 2 is not detached from the housing 3.

[Insulating resin filling and curing]
The insulating resin R is filled into the area S surrounded by the airtight terminal 5, the housing 3 and the cover member 2 from the window portion 24 </ b> A of the cover member 2. Although the height which fills the resin R for insulation is suitably set in the range which does not overflow from the top part 24 of the cover member 2, it may exceed the height of the upper part 4B of the base 4, for example.

The filled insulating resin R is formed between the flat surface 31B of the housing 3 and the cover member between the flange portion 4D of the base 4 and the outer peripheral surface of the projection 33 of the housing 3 and the inner peripheral surface of the upright portion 23 of the cover member 2. Although it goes to the space between the two flat portions 22, it is blocked by the wall portion 25 provided on the flat portion 22 of the cover member 2. Furthermore, even if the insulating resin R exceeds the height of the raised portion 4B of the base 4, the insulating resin R does not flow into the air introduction hole 4A by the cylindrical contact portion 24D of the cover member 2.
The filled insulating resin R is cured with time. When the insulating resin R is cured, the insulation distance is increased and the withstand voltage is increased.
In this embodiment, in order to accelerate curing, the insulating resin R may be irradiated with ultraviolet rays as necessary.

[Removal of cover member]
The sensor main body 1 may be used as a product with the cover member 2 mounted, but the cover member 2 may be removed from the sensor main body 1 when used as a product. A tool is appropriately used to remove the cover member 2.
In order to easily remove the cover member 2, a material that does not adhere to the insulating resin may be selected as the material of the cover member 2, or a release agent (not shown) may be applied to the inner peripheral surface of the cover member 2.

Therefore, in the first embodiment, the following operational effects can be achieved.
(1) The airtight terminal 5 assembled by attaching the lead pin 51 to the base 4 via the electrical insulating member 50, the sensor module 6 provided on the base 4 and connected to the lead pin 51, and the pressure introducing hole 30 inside. The housing 3 formed and joined to the hermetic terminal 5, the cover member 2 attached to the housing 3 and having the window 24 </ b> A formed therein, and the region S surrounded by the hermetic terminal 5, the housing 3 and the cover member 2 are filled. The cover member 2 has a wall portion 25 that is pressure-bonded to the housing 3 with a constant width t2 to prevent leakage of the insulating resin R. Therefore, the insulating resin R poured into the region S from the window portion 24A of the cover member 2 attached to the housing 3 is blocked by the wall portion 25 and does not leak out of the sensor, and is insulated by the wall portion 25. Resin R will stay. Therefore, a predetermined thickness is maintained at a predetermined position until the insulating resin R is cured.
Therefore, the retention of the insulating resin R can be maintained only by mounting the cover member 2 having the wall portion 25 on the housing 3, so that the outflow of the insulating resin R is reliably prevented and the work for increasing the withstand voltage is performed. It becomes easy. In particular, in the first embodiment, since the cover member 2 has a characteristic structure, the structure of the sensor body 1 having the airtight terminal 5, the sensor module 6, and the housing 3 does not have to be changed as compared with the conventional one. Therefore, it can be easily applied to the existing sensor body 1.

(2) The bridge 24B is bridged from a position where the window portion 24A of the cover member 2 is separated from each other, a cylindrical contact portion 24D is provided on the bridge 24B, and the cylindrical contact portion 24D is provided on the base 4 with a constant width t1. To prevent the insulating resin R from flowing into the air introduction hole 4A. Therefore, by attaching the cover member 2 to the housing 3, the cylindrical contact portion 24D is crimped to the base 4 with a constant width t1, so that the insulating resin R that has flowed into the region S is the cylindrical contact portion 24D. Therefore, the air does not flow into the air introduction hole 4 </ b> A formed in the base 4.
Therefore, since the insulating resin R stays in the cylindrical contact portion 24D, a predetermined thickness can be maintained at a predetermined position until the insulating resin R is cured. Moreover, the insulating resin R does not flow into the sensor module 6 through the air introduction hole 4A, and the detection accuracy is not affected.

(3) Since the bridge 24B has a long plate shape, the cover member 2 is easily elastically deformed when the cover member 2 is attached to the housing 3. Therefore, the cylindrical abutting portion 24D and the wall portion 25 can be easily crimped to the base 4 and the housing 3, and leakage of the insulating resin R can be effectively prevented. In particular, even when the top portion 24 of the cover member 2 is not parallel to the base 4, the bridge 24 </ b> B is elastically deformed so that the cylindrical contact portion 24 </ b> D and the wall portion 25 are crimped to the base 4 and the housing 3. Can be performed reliably.

(4) Since the protrusion 33 that fits the outer peripheral edge of the base 4 is formed on the flat surface 31B orthogonal to the outer peripheral surface 31A of the housing 3, the housing 3 and the base 4 are positioned and securely fitted. As a result, the physical quantity measuring sensor can be easily assembled.

(5) Since the wall portion 25 of the cover member 2 is pressure-bonded to the flat surface 31B of the housing 3, the insulating resin R is reliably dammed by the wall portion 25, and the leakage prevention of the insulating resin R is effectively prevented. Can be done automatically.

(6) Since an end portion of the cover body 21 is formed with a protruding snap portion 210 that fits with a corner portion of the cylindrical member 31 of the housing 3, the cover member 2 can be securely attached to the housing 3. It can be carried out.

(7) Since the display window 21B is formed in the cover body 21, information such as the model number of the physical quantity measurement sensor displayed in advance on the outer peripheral surface 31A of the cylindrical member 31 can be displayed through the display window 21B.

(8) In manufacturing the physical quantity measurement sensor, if the cover member 2 is removed after the insulating resin R is cured, the cover member 2 can be reused, so the manufacturing cost of the physical quantity measurement sensor is low. Can be a thing.

Next, a second embodiment of the present invention will be described with reference to FIGS.
The second embodiment is different from the first embodiment in that it is a liquid-filled pressure sensor using a diaphragm, and the other configuration is the same as that of the first embodiment. In particular, the cover member 2 has the same structure as the cover member 2 described in the first embodiment. 5 and 6, the illustration of the insulating resin R is omitted.
Here, in the description of the second embodiment, the same components as those of the first embodiment are denoted by the same reference numerals, and description thereof is omitted.
5 to 7, in the second embodiment, the housing 3 is divided into two members, a first block 3A to which the airtight terminal 5 is attached and a second block 3B in which the pressure introduction hole 30 is formed. Yes. The first block 3A and the second block 3B are joined to each other at the outer peripheral edge.

The outer peripheral edge of the diaphragm 7 is joined to the end face of the first block 3A at a position away from the base 4. The diaphragm 7 is formed of stainless steel or other metal and has a structure that is displaced in response to a change in the pressure of the fluid to be measured introduced from the pressure introduction hole 30 of the second block 3B.
Spacers 8 are arranged on the base 4 so as to surround the sensor module 6, the lead pins 51, and the bonding wires 5A.
A space surrounded by the spacer 8, the base 4 and the diaphragm 7 is filled with an encapsulating liquid L. The sealing liquid L is used to transmit the displacement of the diaphragm 7 to the detection unit 62 of the sensor module 6, and can be exemplified by oil, for example.

The spacer 8 is formed of a material having a small linear expansion coefficient, and is used for the purpose of reducing the amount of oil having a large expansion / contraction change due to temperature, reducing the rigidity of the diaphragm 7 and reducing the characteristic change due to temperature. As shown in the figure, the spacer 8 may be constituted by a block-shaped member, or may be constituted by overlapping a plurality of plate materials.
An encapsulated liquid introduction path 8A for introducing the encapsulated liquid L into the encapsulated liquid filling space is formed in the spacer 8 at the outer peripheral part of the spacer 8 and the part facing the diaphragm 7. A sealing liquid introduction hole 4F communicating with the sealing liquid introduction path 8A is formed in the base 4. A spherical sealing member 9 is provided at the opening end of the sealing liquid introduction hole 4F opposite to the spacer 8. The sealing member 9 is joined to the base 4 after the space surrounded by the spacer 8, the base 4 and the diaphragm 7 is filled with the sealing liquid L through the sealing liquid introduction hole 4F and the sealing liquid introduction path 8A.
The manufacturing method of the physical quantity measurement sensor of the second embodiment having the above configuration is the same as that of the first embodiment.

Therefore, in 2nd Embodiment, there can exist the same effect as 1st Embodiment, and there can exist the following effect.
(9) The diaphragm 7 is provided at a position away from the base 4 of the housing 3, and the space between the diaphragm 7, the housing 3 and the base 4 is filled with the filled liquid L, so that the object to be introduced through the pressure introducing hole 30 is filled. The pressure displacement of the measurement fluid is changed to the displacement of the diaphragm 7, and the displacement of the diaphragm 7 is transmitted to the detection unit 62 of the sensor module 6 through the sealing liquid L. Therefore, since the fluid to be measured does not have to be in direct contact with the detection unit 62 of the sensor module 6, the type of fluid to be measured is not limited.

Next, a third embodiment of the present invention will be described with reference to FIGS.
The third embodiment is different from the first embodiment in that the air introduction hole 4A is not formed in the base 4, and the other configuration is the same as that of the first embodiment.
Here, in the description of the third embodiment, the same components as those of the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.
In FIG. 8, in the third embodiment, the base 4 has a disk shape because it does not have the air introduction hole 4A. The sensor module 6 may use an absolute pressure or a shield gauge. FIG. 8 shows a sensor using absolute pressure.

8 and 9, the cover member 2 has a cover body 21, a flat portion 22, a raised portion 23, a top portion 24, and a wall portion 25, as in the first embodiment, but the structure of the top portion 24 is the first embodiment. It differs from the form. That is, the top portion 24 is formed with a window portion 24A having a circular outer periphery, and unlike the first embodiment, the bridge 24B and the central portion 24C and the protruding portion 24E provided in the bridge 24B are omitted. .
Therefore, in the third embodiment, the same effects as (1), (4) to (8) of the first embodiment can be obtained.

In addition, this invention is not limited to the said embodiment, The deformation | transformation shown below is included in the range which can achieve the objective of this invention.
For example, in the above-described embodiment, the bridge 24B is bridged from a position where the window portion 24A of the cover member 2 is separated from each other, and the cylindrical contact portion 24D is provided on the bridge 24B. In the present invention, the height of the raised portion 4B of the base 4 is increased by pressure-bonding to the raised portion 4B with a constant width t1 to prevent the insulating resin R from flowing into the atmosphere introduction hole 4A. The cylindrical contact portion 24D can be omitted.
Furthermore, in the present invention, it is not necessary to form the snap portion 210 in the cover body 21 of the cover member 2, and further, it is not necessary to form the display window 21 </ b> B in the cover body 21.

In the present invention, the attachment position of the wall portion 25 is not limited to the flat portion 22 of the cover member 2, and may be provided at the top portion 24, for example. By providing the wall portion 25 on the top portion 24, the wall portion 25 is crimped to the base 4.
Furthermore, the physical quantity measurement sensor of the present invention is not limited to a pressure sensor, and can be applied to a differential pressure sensor and a temperature sensor.

  The present invention can be used for pressure sensors and other physical quantity measuring sensors.

  DESCRIPTION OF SYMBOLS 1 ... Sensor main body, 2 ... Cover member, 3 ... Housing, 4 ... Base, 4A ... Air introduction hole, 5 ... Airtight terminal, 6 ... Sensor module, 7 ... Diaphragm, 24A ... Window part, 22 ... Flat part, 24A ... Window part, 24B ... Bridge, 24D ... Cylindrical contact part, 25 ... Wall part, 30 ... Pressure introducing hole, 31 ... Cylindrical member, 31B ... Flat surface, 33 ... Projection part, 50 ... Electrical insulation member, 51 ... Lead pin 61... Main body 62. Detection unit R R Insulating resin L L. Filling liquid S S. Within region

Claims (6)

A lead pin for taking out an electrical signal, an electrically insulating member through which the lead pin passes, and an airtight terminal having a base provided with the electrically insulating member;
A cylindrical main body provided on the base, and a sensor module having a detection unit provided on the main body and connected to the lead pin and outputting an electric signal by pressure;
A housing in which a pressure introduction hole is formed and one end side of the pressure introduction hole is connected to an external device and the other end side is joined to the airtight terminal;
A cover member formed on the housing and formed with a window portion through which the lead pin is inserted;
An insulating resin filled in a region surrounded by the hermetic terminal, the housing and the cover member,
The physical quantity measuring sensor, wherein the cover member has a wall portion that is pressed against the base or the housing with a certain width to prevent leakage of the insulating resin. An airtight terminal having a lead pin for taking out an electrical signal, an electrical insulating member through which the lead pin passes, and a base in which the electrical insulating member is provided and an air introduction hole for introducing atmospheric pressure is formed;
A cylindrical main body that is provided in the base and communicates with the atmosphere introduction hole, and a sensor module that is provided in the main body and has a detection unit that is connected to the lead pin and outputs an electric signal by pressure;
A housing in which a pressure introduction hole is formed and one end side of the pressure introduction hole is connected to an external device and the other end side is joined to the airtight terminal;
A cover member formed on the housing and formed with a window portion through which the lead pin is inserted;
An insulating resin filled in a region surrounded by the hermetic terminal, the housing and the cover member,
The cover member is provided on the bridge and a wall portion that is crimped to the base or the housing with a certain width to prevent leakage of the insulating resin, a bridge that is bridged from a position away from the window portion, and the bridge. A cylindrical abutting portion,
The cylindrical contact portion is a physical quantity measurement sensor characterized in that the cylindrical abutting portion is pressure-bonded to the base with a certain width to prevent the insulating resin from flowing into the air introduction hole. In the physical quantity measuring sensor according to claim 1 or 2,
The housing includes a cylindrical member formed with a flat surface with which the wall portion abuts and an outer peripheral surface intersecting the flat surface,
A protrusion that fits with the outer peripheral edge of the base is formed on the peripheral edge of the opening on the other end side of the pressure introducing hole in the flat surface of the cylindrical member,
The cover member includes a cover main body in which an outer peripheral surface and an inner peripheral surface of the housing face each other, and a flat portion formed integrally with the cover main body and facing the flat surface and having the wall portion formed therein. A physical quantity measuring sensor. In the physical quantity measurement sensor according to any one of claims 1 to 3,
A physical quantity measurement sensor, wherein a diaphragm is provided at a position away from the base of the housing, and a space between the diaphragm and the housing and the base is filled with a sealing liquid. An airtight terminal is assembled by attaching a lead pin for taking out an electric signal to the base formed with an air introduction hole for introducing atmospheric pressure via an electrical insulating member,
A sensor module provided with a detection unit that is connected to the lead pin and outputs an electrical signal by pressure is connected to the base in a cylindrical main body that communicates with the atmosphere introduction hole,
The airtight terminal is joined to the other end of the housing in which a pressure introduction hole is formed inside and one end can be connected to an external device,
A cover member having a wall portion formed with a window portion is attached to the housing such that the lead pin is inserted into the window portion and the wall portion is crimped to the base or the housing with a certain width,
A method of manufacturing a physical quantity measuring sensor, comprising filling an insulating resin in a region surrounded by the hermetic terminal, the housing, and the cover member. In the manufacturing method of the physical quantity measurement sensor according to claim 5,
The method for manufacturing a physical quantity sensor, wherein the cover member is removed after the insulating resin is cured.

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