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JP5995082B2 - A surface-coated cutting tool with a hard coating layer that exhibits excellent peeling and chipping resistance in high-speed intermittent cutting. - Google Patents
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JP5995082B2 - A surface-coated cutting tool with a hard coating layer that exhibits excellent peeling and chipping resistance in high-speed intermittent cutting. - Google Patents

A surface-coated cutting tool with a hard coating layer that exhibits excellent peeling and chipping resistance in high-speed intermittent cutting. Download PDF

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JP5995082B2
JP5995082B2 JP2012285219A JP2012285219A JP5995082B2 JP 5995082 B2 JP5995082 B2 JP 5995082B2 JP 2012285219 A JP2012285219 A JP 2012285219A JP 2012285219 A JP2012285219 A JP 2012285219A JP 5995082 B2 JP5995082 B2 JP 5995082B2
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正樹 奥出
正樹 奥出
五十嵐 誠
誠 五十嵐
健志 山口
健志 山口
長田 晃
晃 長田
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Mitsubishi Materials Corp
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Description

この発明は、各種の鋼や鋳鉄などの切削加工を、高速で、かつ、切刃に断続的・衝撃的負荷が作用する断続切削条件で行った場合でも、硬質被覆層がすぐれた耐剥離性、耐チッピング性を発揮し、長期に亘ってすぐれた耐摩耗性を示す表面被覆切削工具(以下、被覆工具という)に関するものである。   This invention has excellent resistance to peeling even when various cutting processes such as steel and cast iron are performed at high speed and under intermittent cutting conditions in which intermittent and impact loads are applied to the cutting edge. The present invention relates to a surface-coated cutting tool (hereinafter referred to as a coated tool) that exhibits chipping resistance and exhibits excellent wear resistance over a long period of time.

従来、一般に、炭化タングステン(以下、WCで示す)基超硬合金または炭窒化チタン(以下、TiCNで示す)基サーメットで構成された基体(以下、これらを総称して工具基体という)の表面に、
(a)下部層が、Tiの炭化物(以下、TiCで示す)層、窒化物(以下、同じくTiNで示す)層、炭窒化物(以下、TiCNで示す)層、炭酸化物(以下、TiCOで示す)層、および炭窒酸化物(以下、TiCNOで示す)層のうちの1層または2層以上からなるTi化合物層、
(b)上部層が、化学蒸着した状態でα型の結晶構造を有する酸化アルミニウム層(以下、Al層で示す)、
以上(a)および(b)で構成された硬質被覆層を蒸着形成してなる被覆工具が知られている。
Conventionally, generally on the surface of a substrate (hereinafter collectively referred to as a tool substrate) composed of a tungsten carbide (hereinafter referred to as WC) -based cemented carbide or titanium carbonitride (hereinafter referred to as TiCN) -based cermet. ,
(A) The lower layer is a Ti carbide (hereinafter referred to as TiC) layer, a nitride (hereinafter also referred to as TiN) layer, a carbonitride (hereinafter referred to as TiCN) layer, a carbon oxide (hereinafter referred to as TiCO). And a Ti compound layer composed of one or more of a carbonitride oxide (hereinafter referred to as TiCNO) layer,
(B) an aluminum oxide layer (hereinafter, referred to as an Al 2 O 3 layer) having an α-type crystal structure in a state where the upper layer is chemically vapor-deposited;
A coated tool formed by vapor-depositing the hard coating layer constituted by (a) and (b) is known.

しかし、上記従来の被覆工具は、例えば各種の鋼や鋳鉄などの連続切削や断続切削では優れた耐摩耗性を発揮するが、これを、高速断続切削に用いた場合には、剥離、チッピングが発生しやすく、工具寿命が短命になるという問題点があった。
そこで、被覆層の剥離、チッピングの発生を抑制することを目的として、硬質被覆層の層構造については各種の提案がなされている。
However, the above-mentioned conventional coated tools exhibit excellent wear resistance in continuous cutting and intermittent cutting of various steels and cast irons, for example, but when this is used for high-speed intermittent cutting, peeling and chipping are not possible. There was a problem that it was easy to occur and the tool life was shortened.
Therefore, various proposals have been made for the layer structure of the hard coating layer for the purpose of suppressing the peeling and chipping of the coating layer.

例えば、特許文献1に示すように、工具基体の表面に、内側層として、表面性状が平坦なTiC層、TiN層、TiCN層のうちの少なくともいずれか1種、外側層として、表面性状が平坦なAl層を被覆した被覆工具において、内側層と外側その間に、表面性状が先鋭化針状結晶のTiCO層、TiCNO層のうちの少なくともいずれかを中間層として形成することにより、耐チッピング性の改善を図ることが提案されている。 For example, as shown in Patent Document 1, at least one of a TiC layer, a TiN layer, and a TiCN layer having a flat surface property as an inner layer is formed on the surface of the tool base, and a surface property is flat as an outer layer. In a coated tool coated with a new Al 2 O 3 layer, by forming at least one of a TiCO layer and a TiCNO layer having a sharpened needle crystal surface as an intermediate layer between the inner layer and the outer surface, the anti-resistance It has been proposed to improve chipping.

また、例えば、特許文献2に示すように、工具基体の表面に、多層の硬質被覆層を被覆形成した被覆工具において、硬質被覆層として、Al等からなる酸化物層と、該酸化物層の直下に設けたTi炭化物等からなる強化層を備え、かつ、酸化物層と強化層の界面の凹凸差を0.2μm以上、凸部の平均間隔を3μm以下として構成し、酸化物層の密着性向上を図ることにより、硬質被覆層の破壊、剥離を防止することが提案されている。 Further, for example, as shown in Patent Document 2, in a coated tool in which a multilayer hard coating layer is formed on the surface of a tool base, an oxide layer made of Al 2 O 3 or the like as the hard coating layer, and the oxidation Comprising a reinforcing layer made of Ti carbide or the like provided directly under the physical layer, the unevenness difference of the interface between the oxide layer and the reinforcing layer being 0.2 μm or more, and the average interval between the convex portions being 3 μm or less. It has been proposed to prevent breakage and peeling of the hard coating layer by improving the adhesion of the layer.

また、例えば、特許文献3に示すように、工具基体の表面に、密着性Ti化合物層と改質炭窒化チタン層からなる下部層、厚膜化改質α型酸化アルミニウム層からなる上部層を設けた被覆工具において、下部層の改質炭窒化チタン層については、表面研磨面の法線に対して、結晶粒の{112}面の法線がなす傾斜角を測定・集計した場合、0〜10度の傾斜角区分に最高ピークが存在し、かつ、該傾斜角区分内の度数割合は全体の45%以上とし、また、厚膜化改質α型酸化アルミニウム層については、表面研磨面の法線に対して、結晶粒の(0001)の法線がなす傾斜角を測定・集計した場合、0〜10度の範囲内の傾斜角区分に最高ピークが存在し、かつ、該傾斜角区分内の度数割合は全体の45%以上とすることにより、耐チッピング性の改善を図ることが提案されている。   For example, as shown in Patent Document 3, a lower layer made of an adhesive Ti compound layer and a modified titanium carbonitride layer and an upper layer made of a thickened modified α-type aluminum oxide layer are formed on the surface of the tool base. In the provided coated tool, for the modified titanium carbonitride layer of the lower layer, when the inclination angle formed by the normal of the {112} plane of the crystal grain is measured and totaled with respect to the normal of the surface polished surface, 0 The highest peak exists in the tilt angle section of -10 degrees, and the frequency ratio in the tilt angle section is 45% or more of the whole, and the thickened modified α-type aluminum oxide layer has a surface polished surface. When the inclination angle formed by the (0001) normal line of the crystal grain is measured and aggregated with respect to the normal line, the highest peak exists in the inclination angle section within the range of 0 to 10 degrees, and the inclination angle Chipping resistance by making the frequency ratio in the category 45% or more of the whole It has been proposed to improve the performance.

さらに、例えば、特許文献4に示すように、工具基体の表面に、密着性Ti化合物層と縦長成長結晶組織を有する改質Ti系炭窒化物層からなる下部層と、Al層からなる上部層を被覆形成した被覆工具において、改質Ti系炭窒化物層について、表面研磨面の法線に対して、結晶粒の結晶面である{112}面、{110}面および{111}面の各法線がなす傾斜角を測定し、かつ、{112}面、{110}面および{111}面についての測定傾斜角が、表面研磨面の法線に対して0〜10度の傾斜角の範囲内にあるそれぞれの結晶粒子の総面積を、それぞれA、B、Cとした場合に、A/BおよびA/Cの値がいずれも2〜8である結晶配向性を示す改質Ti系炭窒化物層を形成することによって、耐チッピング性、耐摩耗性の向上を図ることが提案されている。 Further, for example, as shown in Patent Document 4, on the surface of the tool base, an adhesive Ti compound layer and a lower layer composed of a modified Ti carbonitride layer having a vertically grown crystal structure, and an Al 2 O 3 layer In the coated tool having the upper layer formed thereon, with respect to the modified Ti-based carbonitride layer, the {112} plane, the {110} plane, and the {111} are the crystal planes of the crystal grains with respect to the normal line of the surface polished surface. } The inclination angle formed by each normal of the surface is measured, and the measured inclination angles for the {112}, {110}, and {111} planes are 0 to 10 degrees with respect to the normal of the surface polished surface. When the total area of each crystal grain within the range of the inclination angle is A, B, and C, respectively, the values of A / B and A / C are 2 to 8, respectively. By forming a modified Ti carbonitride layer, chipping resistance, abrasion resistance It has been proposed to improve the resistance.

特許第3250134号公報Japanese Patent No. 3250134 特開平11−229144号公報Japanese Patent Laid-Open No. 11-229144 特開2006−315154号公報JP 2006-315154 A 特開2009−166195号公報JP 2009-166195 A

近年の切削加工に対する省力化および省エネ化、さらに低コスト化の要求は強く、これに伴い、切削加工は一段と高速化すると共に、断続切削等で切刃に高負荷が作用する傾向にあるが、上記特許文献1〜4に示される従来被覆工具においては、これを鋼や鋳鉄などの通常の条件での連続切削や断続切削に用いた場合には問題はないが、特にこれを高速断続切削条件で用いた場合には、硬質被覆層を構成するTi化合物層とAl層の付着強度が不十分となり、上部層と下部層間での剥離、チッピング等の異常損傷の発生により、比較的短時間で使用寿命に至るのが現状である。 In recent years, there has been a strong demand for labor saving and energy saving and further cost reduction for cutting work, and along with this, cutting speed has been further increased, and high load tends to act on the cutting edge in intermittent cutting etc. In the conventional coated tools shown in the above-mentioned patent documents 1 to 4, there is no problem when this is used for continuous cutting or interrupted cutting under normal conditions such as steel or cast iron. When used in the above, the adhesion strength between the Ti compound layer and the Al 2 O 3 layer constituting the hard coating layer becomes insufficient, and due to the occurrence of abnormal damage such as peeling and chipping between the upper layer and the lower layer, The current situation is that the service life is reached in a short time.

そこで、本発明者等は、上述のような観点から、Ti化合物層からなる下部層とAl層からなる上部層の付着強度を改善し、もって、剥離、チッピング等の異常損傷の発生を防止するとともに、工具寿命の長寿命化を図るべく鋭意研究を行った結果、
Ti化合物層からなる下部層を、下地Ti化合物層、密着性TiCN層及び上部TiCN層の三層構造として形成し、かつ、上記密着性TiCN層について、これをくさび形結晶組織を有する層として構成するとともに、該層の結晶粒の{110}面の法線が特定の傾斜角度数分布をとるようにし、さらに、上記上部TiCN層についても、該層の結晶粒の{112}面の法線が特定の傾斜角度数分布をとるようにした場合には、密着性TiCN層及び上部TiCN層間の密着性が向上することで、下部層全体の付着強度が向上することを見出したのである。
したがって、このような硬質被覆層を被覆形成した被覆工具を、高熱発生を伴うとともに、切刃に断続的・衝撃的な高負荷が作用する高速断続切削に用いた場合には、剥離、チッピング等の異常損傷の発生が抑えることができ、長期の使用にわたってすぐれた切削性能を発揮することを見出したのである。
In view of the above, the present inventors have improved the adhesion strength of the lower layer made of the Ti compound layer and the upper layer made of the Al 2 O 3 layer, thereby causing abnormal damage such as peeling and chipping. As a result of earnest research to improve tool life and prevent tool life,
A lower layer made of a Ti compound layer is formed as a three-layer structure of a base Ti compound layer, an adhesive TiCN layer, and an upper TiCN layer, and the adhesive TiCN layer is configured as a layer having a wedge-shaped crystal structure. In addition, the normal of the {110} plane of the crystal grains of the layer has a specific inclination angle number distribution, and the normal of the {112} plane of the crystal grains of the layer is also applied to the upper TiCN layer. It has been found that the adhesive strength of the entire lower layer is improved by improving the adhesiveness between the adhesive TiCN layer and the upper TiCN layer in the case of taking a specific inclination angle number distribution.
Therefore, if a coated tool with such a hard coating layer is used for high-speed intermittent cutting that is accompanied by high heat generation and intermittent / impact high loads are applied to the cutting edge, peeling, chipping, etc. It has been found that the occurrence of abnormal damage can be suppressed and that excellent cutting performance is exhibited over a long period of use.

この発明は、上記知見に基づいてなされたものであって、
「(1) 炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に、下部層と上部層からなる硬質被覆層を蒸着形成した表面被覆切削工具において、
(a)上記下部層は、3〜20μmの合計平均層厚を有し、下地Ti化合物層、密着性TiCN層及び上部TiCN層の三層構造からなり、また、上記上部層は、2〜15μmの平均層厚を有し、化学蒸着した状態でα型の結晶構造を有するAl層からなり、
(b)下部層の上記下地Ti化合物層は、TiC層、TiN層、TiCN層、TiCO層およびTiCNO層のうちの1層または2層以上からなり、合計平均層厚は0.5〜2.5μmであり、
(c)下部層の上記密着性TiCN層は、くさび形結晶組織を有し、該くさび形結晶組織の凹凸部の平均高低差が1〜3μm、凸部の平均間隔が1〜3μmであり、該くさび形結晶組織を有するTiCN結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、その断面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である{110}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、0〜10度の範囲内の傾斜角区分に最高ピークが存在するとともに、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の40%以上の割合を占め、
(d)下部層の上記上部TiCN層は、その断面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である{112}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、0〜10度の範囲内の傾斜角区分に最高ピークが存在するとともに、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の60%以上の割合を占めることを特徴とする表面被覆切削工具。
(2) 上記(c)のくさび形結晶組織は、平均粒径0.05〜1μmのTiCN結晶粒の集合体によって構成されていることを特徴とする前記(1)に記載の表面被覆切削工具。」
に特徴を有するものである。
This invention has been made based on the above findings,
“(1) In a surface-coated cutting tool in which a hard coating layer composed of a lower layer and an upper layer is vapor-deposited on the surface of a tool base made of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet,
(A) The lower layer has a total average layer thickness of 3 to 20 μm, and has a three-layer structure of a base Ti compound layer, an adhesive TiCN layer, and an upper TiCN layer, and the upper layer has a thickness of 2 to 15 μm. And an Al 2 O 3 layer having an α-type crystal structure in the state of chemical vapor deposition,
(B) The underlying Ti compound layer of the lower layer is composed of one or more of a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer, and the total average layer thickness is 0.5-2. 5 μm,
(C) The adhesive TiCN layer of the lower layer has a wedge-shaped crystal structure, the average height difference of the concave and convex portions of the wedge-shaped crystal structure is 1 to 3 μm, the average interval of the convex portions is 1 to 3 μm, With respect to the TiCN crystal grains having the wedge-shaped crystal structure, using a field emission scanning electron microscope and an electron beam backscattering diffractometer, each crystal grain having a cubic crystal lattice existing within the measurement range of the cross-sectional polished surface has electrons. The angle of inclination formed by the normal of the {110} plane, which is the crystal plane of the crystal grain, is measured with respect to the normal of the surface of the tool base. When the measured inclination angle within the range of degrees is divided into pitches of 0.25 degrees and the frequency existing in each division is represented by an inclination angle number distribution graph, the range of 0 to 10 degrees The highest peak exists in the tilt angle section, and The total of the frequencies existing in the inclination angle section within the range of 0 to 10 degrees occupies a ratio of 40% or more of the entire degrees in the inclination angle frequency distribution graph,
(D) The upper TiCN layer of the lower layer is irradiated with an electron beam to each crystal grain having a cubic crystal lattice existing within the measurement range of the cross-sectional polished surface, and the normal line on the surface of the tool base is Then, the inclination angle formed by the normal of the {112} plane, which is the crystal plane of the crystal grain, is measured, and the measurement inclination angle within the range of 0 to 45 degrees out of the measurement inclination angles is set to a pitch of 0.25 degrees. When it is divided into each, and is represented by an inclination angle distribution graph obtained by counting the frequencies existing in each division, the highest peak exists in the inclination angle division within the range of 0 to 10 degrees, and 0 to 10 A surface-coated cutting tool characterized in that the sum of the frequencies existing in the inclination angle division within the range of degrees occupies a ratio of 60% or more of the entire degrees in the inclination angle frequency distribution graph.
(2) The surface-coated cutting tool according to (1), wherein the wedge-shaped crystal structure of (c) is composed of an aggregate of TiCN crystal grains having an average particle diameter of 0.05 to 1 μm. . "
It has the characteristics.

以下に、この発明の被覆工具の硬質被覆層の構成層について詳細に説明する。
下部層:
図1に、その概略縦断面図を示すように、この発明の下部層は、3〜20μmの合計平均層厚を有し、下地Ti化合物層、密着性TiCN層及び上部TiCN層の三層構造として構成される。
下部層は、基本的にはα型の結晶構造を有するAl(以下、単に「Al」で示す)層の下部層として存在し、自身の具備するすぐれた高温強度によって硬質被覆層が高温強度を具備するようになるほか、工具基体、Al層のいずれにも密着し、硬質被覆層の工具基体に対する密着性を維持する作用を有する。
しかし、下部層の合計平均層厚が3μm未満では、前記作用を十分に発揮させることができず、一方その合計平均層厚が20μmを越えると、特に高熱発生を伴う高速断続切削では熱塑性変形を起し易くなり、これが偏摩耗の原因となることから、下部層の合計平均層厚は3〜20μmと定めた。
Hereinafter, the constituent layers of the hard coating layer of the coated tool of the present invention will be described in detail.
Lower layer:
As shown in the schematic longitudinal sectional view of FIG. 1, the lower layer of the present invention has a total average layer thickness of 3 to 20 μm, and has a three-layer structure of a base Ti compound layer, an adhesive TiCN layer and an upper TiCN layer. Configured as
The lower layer basically exists as a lower layer of an Al 2 O 3 (hereinafter simply referred to as “Al 2 O 3 ”) layer having an α-type crystal structure, and is hard due to its excellent high-temperature strength. In addition to the high temperature strength of the coating layer, the coating layer is in close contact with both the tool substrate and the Al 2 O 3 layer, and has an effect of maintaining the adhesion of the hard coating layer to the tool substrate.
However, if the total average layer thickness of the lower layer is less than 3 μm, the above-mentioned effect cannot be sufficiently exerted. On the other hand, if the total average layer thickness exceeds 20 μm, the thermoplastic deformation is caused particularly in high-speed intermittent cutting with high heat generation. Since it becomes easy to occur and this causes uneven wear, the total average layer thickness of the lower layer was determined to be 3 to 20 μm.

(a)下部層の下地Ti化合物層:
工具基体表面の直上には下地Ti化合物層を形成するが、下地Ti化合物層は、従来から知られているTiC層、TiN層、TiCN層、TiCO層及びTiCNO層の内の一層又は二層以上から構成することができ、例えば、当業者に既によく知られている化学蒸着法によって形成することができる。
ただ、下地Ti化合物層の合計平均層厚が0.5μm未満の場合には、該くさび形結晶組織の凹凸部の高低差が十分に得られず、この上に形成される上部TiCN層との付着強度を十分に得ることができず、一方、その合計平均層厚が2.5μmを超えると、下部層の密着性TiCN層結晶粒の結晶面である{110}面の法線がなす傾斜角を測定した場合、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の40%以上にならず、所望の方位形態を得ることができないため、下地Ti化合物層の合計平均層厚は、0.5〜2.5μmとすることが必要である。
(A) The underlying Ti compound layer of the lower layer:
An underlayer Ti compound layer is formed immediately above the surface of the tool substrate. The underlayer Ti compound layer is one or more of TiC layers, TiN layers, TiCN layers, TiCO layers, and TiCNO layers that are conventionally known. For example, it can be formed by a chemical vapor deposition method well known to those skilled in the art.
However, when the total average layer thickness of the underlying Ti compound layer is less than 0.5 μm, the level difference of the concave and convex portions of the wedge-shaped crystal structure cannot be obtained sufficiently, and the upper TiCN layer formed on this Adhesive strength cannot be obtained sufficiently. On the other hand, if the total average layer thickness exceeds 2.5 μm, the slope formed by the normal of the {110} plane that is the crystal plane of the adhesive TiCN crystal grains of the lower layer When the angle is measured, the sum of the frequencies existing in the tilt angle section within the range of 0 to 10 degrees does not exceed 40% of the total power in the tilt angle frequency distribution graph, and a desired orientation pattern cannot be obtained. Therefore, the total average layer thickness of the base Ti compound layer needs to be 0.5 to 2.5 μm.

(b)下部層の密着性TiCN層:
上記の下地Ti化合物層の上には、密着性TiCN層を形成するが、密着性TiCN層は、くさび形結晶組織という特異な組織を有するとともに、密着性TiCN層を構成する結晶粒の{110}面の法線が工具基体の表面の法線に対してなす傾斜角を測定した場合、特有の傾斜角度数分布を示す。
以下に、くさび型結晶組織について説明する。下部層の下地Ti化合物層上に成長した{110}面の法線がなす傾斜角が工具基体の表面の法線に対して0〜10度の範囲内にあるTiCN結晶粒について、それぞれ隣接する結晶粒相互間の界面における{112}面の法線同士の交わる角度を求め、角度差が20度未満の範囲にある場合は、互いがくさび型結晶構造をなしており、その角度差の範囲を外れた場合、その結晶粒界がくさび型結晶組織と後述する上部TiCN結晶粒を分ける箇所となる。
なお、図1に硬質被覆層の概略縦断面模式図を示すように、この発明で言うくさび形結晶組織とは、種々の粒径を持つTiCN結晶粒の集合体により形成されるものであり、くさび形結晶組織全体としては膜厚方向に凹凸を有した構造と定義される。
即ち、密着性TiCN層は、まず、上部TiCN層に面する表面がくさび形結晶組織を有しており、そして、該くさび形結晶組織の凹凸部の平均高低差は1〜3μmであり、また、凸部の平均間隔は1〜3μmである。
そして、密着性TiCN層は、このようなくさび形結晶組織を備えることによって、この上に形成される上部TiCN層との付着強度が改善され、その結果として、硬質被覆層の耐チッピング性、耐剥離性の向上が図られる。
ただ、くさび形結晶組織の凹凸部の平均高低差が1μm未満である場合には、
くさび形結晶組織を構成するTiCN結晶粒とその上に形成される上部TiCN層との接触界面の表面積の増大が見込めず、また平均高低差が3μmを超える場合には、その上層に成長する上部TiCN層の方位形態が所望のものとならなくなるため、くさび形結晶組織の凹凸部の平均高低差は、1〜3μmとすることが必要である。
また、くさび形結晶組織の凸部の平均間隔が1μm未満である場合は、くさび形結晶組織の凹部とその上部に成長する上部TiCN層の界面にポアが形成しやすくなり、また凸部の平均間隔が3μmを超える場合には、くさび形結晶組織を構成する密着性TiCN層のTiCN結晶粒と上部TiCN層のTiCN結晶粒の界面の接触する表面積の増大が見込めないため、凸部の平均間隔を1〜3μmとすることが必要である。
さらに、くさび形結晶組織は、種々の粒径を持つTiCN結晶粒の集合体により形成されるが、該集合体を構成する個々のTiCN結晶粒の平均粒径が0.05μm未満では、下部層の下地Ti化合物層表面の凹凸に対する密着性が悪くなるため、下部層の下地Ti化合物層と密着性TiCN層間の付着強度が低下する一方、集合体を構成する個々のTiCN結晶粒の平均粒径が1μmを超える場合には、その上に形成される上部TiCN層のTiCN結晶粒の粒径が大きくなり、耐チッピング性が低下するとともに、くさび形結晶組織を構成する密着性TiCN層のTiCN結晶粒と、上部TiCN層のTiCN結晶粒の界面にポアが形成されやすくなり、そのため硬さ、強度が低下し、また、密着性TiCN層と上部TiCN層の付着強度が低下するため、くさび形結晶組織を構成する密着性TiCN層のTiCN結晶粒の平均粒径は、0.05〜1μmの範囲内であることが望ましい。
(B) Adhesive TiCN layer of the lower layer:
An adhesive TiCN layer is formed on the above-mentioned base Ti compound layer. The adhesive TiCN layer has a unique structure called a wedge-shaped crystal structure, and {110 of crystal grains constituting the adhesive TiCN layer. } When the inclination angle formed by the normal of the surface to the normal of the surface of the tool base is measured, a specific distribution of the number of inclination angles is shown.
The wedge-shaped crystal structure will be described below. TiCN crystal grains whose inclination angle formed by the normal of the {110} plane grown on the underlying Ti compound layer of the lower layer is within the range of 0 to 10 degrees with respect to the normal of the surface of the tool base are adjacent to each other. The angle at which the normals of the {112} planes intersect at the interface between the crystal grains is obtained, and when the angle difference is in the range of less than 20 degrees, each has a wedge-shaped crystal structure, and the range of the angle difference In the case of deviating from the above, the crystal grain boundary becomes a part that separates the wedge-shaped crystal structure and the upper TiCN crystal grains described later.
In addition, as shown in the schematic longitudinal cross-sectional schematic diagram of a hard coating layer in FIG. 1, the wedge-shaped crystal structure said by this invention is formed with the aggregate | assembly of the TiCN crystal grain which has various particle sizes, The entire wedge-shaped crystal structure is defined as a structure having irregularities in the film thickness direction.
That is, the adhesive TiCN layer first has a wedge-shaped crystal structure on the surface facing the upper TiCN layer, and the average height difference of the concave and convex portions of the wedge-shaped crystal structure is 1 to 3 μm. The average interval between the convex portions is 1 to 3 μm.
The adhesive TiCN layer is provided with the wedge-shaped crystal structure as described above, thereby improving the adhesion strength with the upper TiCN layer formed thereon. As a result, the chipping resistance and resistance of the hard coating layer are improved. The peelability is improved.
However, when the average height difference of the concave and convex portions of the wedge-shaped crystal structure is less than 1 μm,
If the surface area of the contact interface between the TiCN crystal grains constituting the wedge-shaped crystal structure and the upper TiCN layer formed thereon cannot be increased, and the average height difference exceeds 3 μm, the upper portion that grows on the upper layer Since the orientation of the TiCN layer does not become a desired one, the average height difference of the concave and convex portions of the wedge-shaped crystal structure needs to be 1 to 3 μm.
In addition, when the average interval between the convex portions of the wedge-shaped crystal structure is less than 1 μm, pores are easily formed at the interface between the concave portion of the wedge-shaped crystal structure and the upper TiCN layer growing on the upper portion thereof. When the distance exceeds 3 μm, it is not possible to increase the surface area of the interface between the TiCN crystal grains of the adhesive TiCN layer constituting the wedge-shaped crystal structure and the TiCN crystal grains of the upper TiCN layer. Is required to be 1 to 3 μm.
Further, the wedge-shaped crystal structure is formed by an aggregate of TiCN crystal grains having various grain sizes. When the average grain size of individual TiCN crystal grains constituting the aggregate is less than 0.05 μm, the lower layer is formed. Adhesive strength of the surface of the underlying Ti compound layer to the surface becomes worse, so that the adhesion strength between the underlying Ti compound layer of the lower layer and the adhesive TiCN layer decreases, while the average particle diameter of the individual TiCN crystal grains constituting the aggregate When the thickness exceeds 1 μm, the grain size of the TiCN crystal grains of the upper TiCN layer formed thereon becomes large, the chipping resistance decreases, and the TiCN crystal of the adhesive TiCN layer constituting the wedge-shaped crystal structure The pores are easily formed at the interface between the grains and the TiCN crystal grains of the upper TiCN layer, so that the hardness and strength are reduced, and the adhesion strength between the adhesive TiCN layer and the upper TiCN layer is reduced. Therefore, the average grain size of the TiCN crystal grains of the adhesive TiCN layer constituting the wedge-shaped crystal structure is preferably in the range of 0.05 to 1 μm.

次に、上記の密着性TiCN層は、該層を構成するTiCN結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、該層の断面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、工具基体の表面の法線に対して、前記結晶粒の結晶面である{110}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで作成した場合、0〜10度の範囲内の傾斜角区分に最高ピークが存在するとともに、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の40%以上の割合を占める傾斜角度数分布を示す。
ここで、上記傾斜角度数分布グラフにおいて、0〜10度の範囲内の傾斜角区分に最高ピークが存在しない場合、あるいは、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の40%未満の割合である場合には、密着性TiCN層の上に形成される上部TiCN層との付着強度が低下し、所望の耐剥離性を得ることができなくなることから、密着性TiCN層のTiCN結晶粒については、上記傾斜角度数分布グラフにおいて、0〜10度の範囲内の傾斜角区分に最高ピークが存在するとともに、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の40%以上の割合を占める傾斜角度数分布を示すことが必要である。
上記くさび形結晶組織を有し、しかも、上記傾斜角度数分布形態を有する密着性TiCN層は、例えば、後記する化学蒸着条件によって形成することができる。
図2に、密着性TiCN層について測定して求めた傾斜角度数分布グラフの一例を示す。
Next, the above-mentioned adhesive TiCN layer is present within the measurement range of the cross-sectional polished surface of the layer, using a field emission scanning electron microscope and an electron beam backscatter diffraction device, for the TiCN crystal grains constituting the layer. Each crystal grain having a cubic crystal lattice is irradiated with an electron beam, and the inclination angle formed by the normal of the {110} plane which is the crystal plane of the crystal grain is measured with respect to the normal of the surface of the tool base. In the inclination angle distribution graph, the measurement inclination angles within the range of 0 to 45 degrees among the measurement inclination angles are divided for each pitch of 0.25 degrees, and the frequencies existing in each division are totaled. When created, the highest peak is present in the inclination angle section within the range of 0 to 10 degrees, and the total of the frequencies existing in the inclination angle section within the range of 0 to 10 degrees is the entire frequency in the inclination angle distribution graph. Of inclination angle that occupies 40% or more of It is shown.
Here, in the inclination angle number distribution graph, when the highest peak does not exist in the inclination angle section within the range of 0 to 10 degrees, or the sum of the frequencies existing in the inclination angle section within the range of 0 to 10 degrees is In the case where the ratio is less than 40% of the entire frequency in the inclination angle number distribution graph, the adhesion strength with the upper TiCN layer formed on the adhesive TiCN layer is lowered, and desired peeling resistance is obtained. For the TiCN crystal grains of the adhesive TiCN layer, in the inclination angle number distribution graph, the highest peak exists in the inclination angle section in the range of 0 to 10 degrees, and the range of 0 to 10 degrees. It is necessary to show an inclination angle number distribution in which the total of the frequencies existing in the inclination angle section occupies a ratio of 40% or more of the entire degrees in the inclination angle number distribution graph.
The adhesive TiCN layer having the wedge-shaped crystal structure and having the inclination angle number distribution form can be formed by, for example, chemical vapor deposition conditions described later.
FIG. 2 shows an example of an inclination angle number distribution graph obtained by measuring the adhesive TiCN layer.

(c)下部層の上部TiCN層:
上部TiCN層は、上記密着性TiCN層の上に、例えば、後記する化学蒸着条件によって形成することができるが、上部TiCN層について、その断面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、工具基体の表面の法線に対して、前記結晶粒の結晶面である{112}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフを作成した場合、0〜10度の範囲内の傾斜角区分に最高ピークが存在するとともに、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の60%以上の割合を占める傾斜角度数分布を示す。
ここで、上記傾斜角度数分布グラフにおいて、0〜10度の範囲内の傾斜角区分に最高ピークが存在しない場合、あるいは、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の60%未満の割合である場合には、所望の高温硬さや耐熱性を得ることができなくなる。
したがって、上部TiCN層のTiCN結晶粒については、上記傾斜角度数分布グラフにおいて、0〜10度の範囲内の傾斜角区分に最高ピークが存在するとともに、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の60%以上の割合を占める傾斜角度数分布を示すことが必要である。
図3に、上部TiCN層について測定して求めた傾斜角度数分布グラフの一例を示す。
(C) Lower TiCN upper TiCN layer:
The upper TiCN layer can be formed on the adhesive TiCN layer by, for example, chemical vapor deposition conditions described later. For the upper TiCN layer, a cubic crystal lattice existing within the measurement range of the cross-sectional polished surface is formed. Each crystal grain is irradiated with an electron beam, and an inclination angle formed by a normal of a {112} plane which is a crystal plane of the crystal grain is measured with respect to a normal line of the surface of the tool base, and the measurement inclination angle When a measured inclination angle within a range of 0 to 45 degrees is divided for each pitch of 0.25 degrees, and an inclination angle number distribution graph formed by counting the frequencies existing in each section is 0 The highest peak exists in the inclination angle section within the range of -10 degrees, and the sum of the frequencies existing in the inclination angle section within the range of 0 to 10 degrees is 60% or more of the entire frequencies in the inclination angle distribution graph. Number of tilt angles that occupy a percentage Show the cloth.
Here, in the inclination angle number distribution graph, when the highest peak does not exist in the inclination angle section within the range of 0 to 10 degrees, or the sum of the frequencies existing in the inclination angle section within the range of 0 to 10 degrees is When the ratio is less than 60% of the entire frequency in the inclination angle number distribution graph, desired high-temperature hardness and heat resistance cannot be obtained.
Therefore, for the TiCN crystal grains of the upper TiCN layer, in the tilt angle number distribution graph, the highest peak exists in the tilt angle section within the range of 0 to 10 degrees, and the tilt angle section within the range of 0 to 10 degrees. It is necessary to show an inclination angle frequency distribution in which the sum of the frequencies existing in the graph occupies 60% or more of the entire frequency in the inclination angle frequency distribution graph.
FIG. 3 shows an example of an inclination angle number distribution graph obtained by measuring the upper TiCN layer.

(d)三層構造からなる下部層(下地Ti化合物層、密着性TiCN層及び上部TiCN層)の形成:
この発明では、三層構造からなる下部層を、例えば、以下に示す3段階の化学蒸着法によって形成することができる。
即ち、第1段階として、炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に所定層厚となるように下地Ti化合物層を蒸着形成し、次いで第2段階として、この上に密着性TiCN層を蒸着形成し、次いで、第3段階として上部TiCN層を蒸着形成することによって、三層構造からなる下部層を形成することができる。
より具体的にいえば、次のとおりである。
≪第1段階≫
通常の化学蒸着装置を用いて、工具基体の表面に、0.5〜2.5μmの合計平均層厚になるように通常の条件(例えば、後記表3に示されるような条件)でTiC層、TiN層、TiCN層、TiCO層およびTiCNO層のうちの1層または2層以上を蒸着形成する。
≪第2段階≫
次いで、
反応ガス組成(容量%):TiCl 3〜5%、N 15〜25%、
CHCN 0.2〜0.5%、残部H
雰囲気温度:900〜950 ℃、
雰囲気圧力:10〜20 kPa、
時間:5〜60 min、
という条件で蒸着する。
そして、上記条件による蒸着によって、所定のくさび形結晶組織を有するとともに、所定の傾斜角度数分布形態(即ち、工具基体の表面の法線に対して、結晶粒の{110}面の法線がなす傾斜角を測定・集計した傾斜角度数分布グラフにおいて、0〜10度の範囲内の傾斜角区分に最高ピークが存在し、かつ、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフの度数全体の40%以上の割合を占める)を有する密着性TiCN層を蒸着形成することができる。
≪第3段階≫
次いで、
反応ガス組成(容量%):TiCl 3〜5%、N 15〜25%、
CHCN 0.6〜1.0%、残部H
雰囲気温度:800〜900 ℃、
雰囲気圧力:3〜10 kPa、
時間:(所定の目標合計平均層厚になるまで)
という条件で上部TiCN層を蒸着する。
そして、上記条件による蒸着によって、所定の傾斜角度数分布形態(即ち、工具基体の表面の法線に対して、結晶粒の{112}面の法線がなす傾斜角を測定・集計した傾斜角度数分布グラフにおいて、0〜10度の範囲内の傾斜角区分に最高ピークが存在し、かつ、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフの度数全体の60%以上の割合を占める)を有する上部TiCN層を蒸着形成することができる。
上記で形成された三層構造からなる下部層は、密着性TiCN層はくさび形結晶組織という特異な組織を有するとともに、密着性TiCN層を構成する結晶粒の{110}面の法線が工具基体の表面の法線に対してなす傾斜角を測定した場合、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の40%以上の割合を占め、上部TiCN層は結晶粒の結晶面である{112}面の法線がなす傾斜角を測定し、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の60%以上の割合を占めるという特徴を持っている。各層が示す度数の合計割合の値がこれらの値を得られない場合、密着性TiCN層と上部TiCN層の結合が弱くなり、所望の付着強度が得られなくなる。
(D) Formation of lower layer (underlying Ti compound layer, adhesive TiCN layer and upper TiCN layer) having a three-layer structure:
In the present invention, the lower layer having a three-layer structure can be formed by, for example, the following three-stage chemical vapor deposition method.
That is, as a first stage, a base Ti compound layer is formed by vapor deposition on the surface of a tool base made of tungsten carbide-based cemented carbide or titanium carbonitride-based cermet, and then as a second stage, A lower layer having a three-layer structure can be formed by depositing an adhesive TiCN layer thereon and then depositing an upper TiCN layer as a third step.
More specifically, it is as follows.
≪First stage≫
Using a normal chemical vapor deposition apparatus, a TiC layer is formed on the surface of the tool base under normal conditions (for example, conditions as shown in Table 3 below) so that the total average layer thickness is 0.5 to 2.5 μm. One or more of the TiN layer, the TiCN layer, the TiCO layer, and the TiCNO layer are formed by vapor deposition.
≪Second stage≫
Then
Reaction gas composition (volume%): TiCl 4 3-5%, N 2 15-25%,
CH 3 CN 0.2~0.5%, remainder H 2,
Atmospheric temperature: 900-950 ° C.
Atmospheric pressure: 10-20 kPa,
Time: 5-60 min,
Vapor deposition is performed under the conditions.
The vapor deposition under the above conditions has a predetermined wedge-shaped crystal structure, and has a predetermined inclination angle number distribution form (that is, the normal of the {110} plane of the crystal grain is normal to the normal of the surface of the tool base) In the inclination angle distribution graph that measures and summarizes the inclination angle, the highest peak exists in the inclination angle section within the range of 0 to 10 degrees, and the frequency exists in the inclination angle section within the range of 0 to 10 degrees. Can occupy 40% or more of the entire frequency of the inclination angle number distribution graph).
≪Third stage≫
Then
Reaction gas composition (volume%): TiCl 4 3-5%, N 2 15-25%,
CH 3 CN 0.6~1.0%, remainder H 2,
Atmospheric temperature: 800-900 ° C
Atmospheric pressure: 3-10 kPa,
Time: (until the target total average layer thickness is reached)
The upper TiCN layer is deposited under the conditions.
Then, by vapor deposition under the above conditions, the inclination angle number distribution form (that is, the inclination angle obtained by measuring and counting the inclination angle formed by the normal of the {112} plane of the crystal grain with respect to the normal of the surface of the tool base) In the number distribution graph, the highest peak exists in the inclination angle section within the range of 0 to 10 degrees, and the total of the frequencies existing in the inclination angle section within the range of 0 to 10 degrees is the sum of the inclination angle number distribution graph. An upper TiCN layer having a ratio of 60% or more of the entire frequency) can be deposited.
The lower layer having the three-layer structure formed as described above has a unique structure called an adhesive TiCN layer called a wedge-shaped crystal structure, and the normal of the {110} plane of the crystal grains constituting the adhesive TiCN layer is When the inclination angle formed with respect to the normal of the surface of the substrate is measured, the ratio of the total frequency existing in the inclination angle section within the range of 0 to 10 degrees is 40% or more of the entire frequency in the inclination angle frequency distribution graph. The upper TiCN layer measures the inclination angle formed by the normal of the {112} plane, which is the crystal plane of the crystal grain, and the sum of the frequencies existing in the inclination angle section within the range of 0 to 10 degrees is the inclination angle. It has a feature that it accounts for 60% or more of the total frequency in the number distribution graph. When the values of the total ratio of the frequencies indicated by the respective layers cannot obtain these values, the bond between the adhesive TiCN layer and the upper TiCN layer becomes weak, and a desired adhesion strength cannot be obtained.

(e)上部層のAl層:
上記で蒸着形成した下部層の上に、例えば、通常の化学蒸着装置を用い、
反応ガス組成(容量%):AlCl 1〜3%、CO 3〜7%、
HCl 1.0〜2.5%、HS 0.1〜0.25%、残部H
反応雰囲気温度:980〜1020℃、
反応雰囲気圧力:3〜10kPa、
時間:(目標とする上部層層厚になるまで)
という条件で蒸着することにより、Al層からなる上部層を蒸着形成することができる。
ここで、上記上部層は、特定のくさび形結晶組織を有し、かつ、特定の傾斜角度数分布形態を有する密着性TiCN層と、さらに、特定の傾斜角度数分布形態を有する上部TiCN層の上に蒸着形成されることによって、密着性TiCN層及び上部TiCN層間の密着性が向上することで、下部層全体の付着強度が向上する。また、下部層の最表面で結晶粒の{112}面の法線が特定の傾斜角度数分布をとる場合、その上に成長する上部層とのエピタキシャル関係を保つことで、付着強度が向上するとともに、被覆層自体の強度も向上する。その結果、高熱発生を伴うとともに、切れ刃に衝撃的・断続的な高負荷が作用する高速断続切削加工においても、すぐれた耐剥離性、耐チッピング性が発揮される。
なお、上部層の平均層厚が、2μm未満であると長期の使用にわたってすぐれた高温強度および高温硬さを発揮することができず、一方、15μmを越えると、チッピングが発生し易くなることから、上部層の層厚は2〜15μmと定めた。
(E) Upper Al 2 O 3 layer:
On the lower layer formed by vapor deposition above, for example, using a normal chemical vapor deposition apparatus,
Reaction gas composition (volume%): AlCl 3 1-3%, CO 2 3-7%,
HCl 1.0-2.5%, H 2 S 0.1-0.25%, balance H 2 ,
Reaction atmosphere temperature: 980-1020 ° C.
Reaction atmosphere pressure: 3 to 10 kPa,
Time: (until the target upper layer thickness is reached)
By vapor deposition under the conditions, an upper layer composed of an Al 2 O 3 layer can be formed by vapor deposition.
Here, the upper layer includes an adhesive TiCN layer having a specific wedge-shaped crystal structure and having a specific inclination angle number distribution form, and further an upper TiCN layer having a specific inclination angle number distribution form. By forming the upper layer by vapor deposition, the adhesion strength between the adhesive TiCN layer and the upper TiCN layer is improved, so that the adhesion strength of the entire lower layer is improved. In addition, when the normal of the {112} plane of the crystal grain has a specific inclination angle number distribution on the outermost surface of the lower layer, the adhesion strength is improved by maintaining an epitaxial relationship with the upper layer grown thereon. At the same time, the strength of the coating layer itself is improved. As a result, excellent peeling resistance and chipping resistance are exhibited even in high-speed intermittent cutting with high heat generation and impact and intermittent high load acting on the cutting edge.
If the average layer thickness of the upper layer is less than 2 μm, excellent high-temperature strength and high-temperature hardness cannot be exhibited over a long period of use, whereas if it exceeds 15 μm, chipping is likely to occur. The layer thickness of the upper layer was determined to be 2 to 15 μm.

この発明の被覆工具は、下部層と上部層からなる硬質被覆層において、下部層が、下地Ti化合物層、密着性TiCN層及び上部TiCN層の三層構造として形成され、しかも、密着性TiCN層は、特定のくさび形結晶組織と特定の傾斜角度数分布形態を有し、さらに、上部TiCN層も特定の傾斜角度数分布形態を有することから、下部層間における付着強度が高められ、また、硬質被覆層自体の強度も向上し、その結果、高熱発生を伴うとともに、切れ刃に衝撃的・断続的な高負荷が作用する高速断続切削条件においても、剥離・チッピングの発生もなく、長期の使用にわたってすぐれた切削性能を発揮する。   The coated tool of the present invention is a hard coating layer composed of a lower layer and an upper layer, wherein the lower layer is formed as a three-layer structure of a base Ti compound layer, an adhesive TiCN layer and an upper TiCN layer, and the adhesive TiCN layer Has a specific wedge-shaped crystal structure and a specific inclination angle number distribution form, and since the upper TiCN layer also has a specific inclination angle number distribution form, the adhesion strength between the lower layers is increased, and the hard layer is hard. The strength of the coating layer itself is also improved. As a result, it is accompanied by high heat generation, and it can be used for a long time without peeling or chipping even in high-speed intermittent cutting conditions where impact and intermittent high loads act on the cutting edge. Exhibits excellent cutting performance.

本発明被覆工具の硬質被覆層の概略縦断面模式図を示す。The schematic longitudinal cross-sectional schematic diagram of the hard coating layer of this invention coated tool is shown. 本発明被覆工具1の密着性TiCN層について測定したTiCN結晶粒の傾斜角度数分布グラフを示す。The inclination angle number distribution graph of the TiCN crystal grain measured about the adhesive TiCN layer of this invention coated tool 1 is shown. 本発明被覆工具1の上部TiCN層について測定したTiCN結晶粒の傾斜角度数分布グラフを示す。The inclination angle number distribution graph of the TiCN crystal grain measured about the upper TiCN layer of this invention coated tool 1 is shown.

つぎに、この発明の被覆工具を実施例により具体的に説明する。   Next, the coated tool of the present invention will be specifically described with reference to examples.

原料粉末として、いずれも1〜3μmの平均粒径を有するWC粉末、TiC粉末、ZrC粉末、TaC粉末、NbC粉末、Cr32粉末、TiN粉末、およびCo粉末を用意し、これら原料粉末を、表1に示される配合組成に配合し、さらにワックスを加えてアセトン中で24時間ボールミル混合し、減圧乾燥した後、98MPaの圧力で所定形状の圧粉体にプレス成形し、この圧粉体を5Paの真空中、1370〜1470℃の範囲内の所定の温度に1時間保持の条件で真空焼結し、焼結後、切刃部にR:0.07mmのホーニング加工を施すことによりISO・CNMG120412に規定するインサート形状をもったWC基超硬合金製の工具基体A〜Fをそれぞれ製造した。 As raw material powders, WC powder, TiC powder, ZrC powder, TaC powder, NbC powder, Cr 3 C 2 powder, TiN powder and Co powder all having an average particle diameter of 1 to 3 μm are prepared. Then, blended into the composition shown in Table 1, added with wax, ball mill mixed in acetone for 24 hours, dried under reduced pressure, and then press-molded into a green compact of a predetermined shape at a pressure of 98 MPa. Is vacuum-sintered at a predetermined temperature in the range of 1370 to 1470 ° C. for 1 hour in a vacuum of 5 Pa. After sintering, the cutting edge is subjected to honing of R: 0.07 mm. -WC base cemented carbide tool bases A to F each having an insert shape defined in CNMG12041 were manufactured.

また、原料粉末として、いずれも0.5〜2μmの平均粒径を有するTiCN(質量比でTiC/TiN=50/50)粉末、Mo2 C粉末、ZrC粉末、NbC粉末、TaC粉末、WC粉末、Co粉末、およびNi粉末を用意し、これら原料粉末を、表2に示される配合組成に配合し、ボールミルで24時間湿式混合し、乾燥した後、98MPaの圧力で圧粉体にプレス成形し、この圧粉体を1.3kPaの窒素雰囲気中、温度:1540℃に1時間保持の条件で焼結し、焼結後、切刃部分に幅:0.1mm、角度:20度のチャンファーホーニング加工を施すことによりISO規格・CNMG120412のインサート形状をもったTiCN基サーメット製の工具基体a〜fを形成した。 In addition, as raw material powders, TiCN (mass ratio TiC / TiN = 50/50) powder, Mo 2 C powder, ZrC powder, NbC powder, TaC powder, WC powder, all having an average particle diameter of 0.5 to 2 μm. Co powder and Ni powder are prepared, and these raw material powders are blended in the blending composition shown in Table 2, wet mixed by a ball mill for 24 hours, dried, and pressed into a compact at a pressure of 98 MPa. The green compact was sintered in a nitrogen atmosphere of 1.3 kPa at a temperature of 1540 ° C. for 1 hour, and after sintering, a chamfer with a width of 0.1 mm and an angle of 20 degrees at the cutting edge portion. By performing honing, tool bases a to f made of TiCN-based cermet having an ISO standard / CNMG120212 insert shape were formed.

ついで、これらの工具基体A〜Fおよび工具基体a〜fのそれぞれを、通常の化学蒸着装置に装入し、
(a)まず、表3(表3中のl−TiCNは特開平6−8010号公報に記載される縦長成長結晶組織をもつTiCN層の形成条件を示すものであり、これ以外は通常の粒状結晶組織の形成条件を示すものである)に示される条件にて、表6に示される目標層厚で、下部層の下地Ti化合物層を蒸着形成し、
(b)ついで、表4に示される条件にて、所定の目標層厚で、表7に示す下部層の密着性TiCN層を蒸着形成し、さらに、表5に示される条件にて、下部層の所定の目標合計平均層厚になるまで同じく表7に示す上部TiCN層を蒸着形成し、
(c)ついで、上記で蒸着形成した下地Ti化合物層、密着性TiCN層及び上部TiCN層の三層構造からなる下部層の表面に、表3に示される条件にて、表7に示す所定の目標平均層厚のAl層からなる上部層を蒸着形成することにより、
表7に示す本発明被覆工具1〜13(但し、硬質被覆層の下地Ti化合物層については表6参照)をそれぞれ製造した。
Then, each of these tool bases A to F and tool bases a to f is charged into a normal chemical vapor deposition apparatus,
(A) First, Table 3 (l-TiCN in Table 3 indicates the conditions for forming a TiCN layer having a vertically elongated crystal structure described in JP-A-6-8010, and the other conditions are ordinary granularity. Under the conditions shown in Table 6), the underlying Ti compound layer of the lower layer is formed by vapor deposition at the target layer thickness shown in Table 6.
(B) Next, under the conditions shown in Table 4, the lower layer adhesive TiCN layer shown in Table 7 was formed by vapor deposition at a predetermined target layer thickness. Further, under the conditions shown in Table 5, the lower layer The upper TiCN layer shown in Table 7 is also formed by vapor deposition until a predetermined target total average layer thickness of
(C) Next, on the surface of the lower layer composed of the three-layer structure of the base Ti compound layer, the adhesive TiCN layer and the upper TiCN layer formed by vapor deposition as described above, the predetermined conditions shown in Table 7 are applied under the conditions shown in Table 3. By vapor-depositing an upper layer composed of an Al 2 O 3 layer with a target average layer thickness,
Invention coated tools 1 to 13 shown in Table 7 (however, see Table 6 for the base Ti compound layer of the hard coating layer) were produced.

また、比較の目的で、上記本発明被覆工具1〜13と同一の条件(表3に示す条件)で表6に示す下地Ti化合物層を蒸着形成した後、上記本発明被覆工具1〜13の上記工程(b)から外れる条件(表4、5で、それぞれ本発明外として示す)で密着性TiCN層、上部TiCN層を蒸着形成することにより、表8に示す比較被覆工具1〜13(但し、下地Ti化合物層については表6参照)を製造した。   Moreover, for the purpose of comparison, after the underlayer Ti compound layer shown in Table 6 was formed by vapor deposition under the same conditions (conditions shown in Table 3) as those of the invention-coated tools 1-13, Comparative coating tools 1 to 13 shown in Table 8 (however, by depositing the adhesive TiCN layer and the upper TiCN layer under the conditions deviating from the step (b) (Tables 4 and 5 are shown as outside the present invention, respectively) For the underlying Ti compound layer, see Table 6).

ついで、硬質被覆層の下部層の密着性TiCN層のTiCN結晶粒についての傾斜角度数分布を、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用いて測定した。
すなわち、上記の本発明被覆工具1〜13、比較被覆工具1〜13の下部層の密着性TiCN層と下地Ti化合物層の界面から密着性TiCN層の厚み方向へ0.3μm、また、工具基体表面と平行方向に50μmの断面研磨面の測定範囲(1μm×50μm)を、電界放出型走査電子顕微鏡の鏡筒内にセットし、前記研磨面に70度の入射角度で15kVの加速電圧の電子線を1nAの照射電流で、それぞれの前記研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に照射して、電界放出型走査電子顕微鏡と電子線後方散乱回折像装置を用い、TiCN結晶粒について、0.3×50μmの測定領域を0.1μm/stepの間隔で、工具基体の表面の法線に対して、前記結晶粒の結晶面である{110}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表し、測定傾斜角が0〜10度である結晶粒の度数の合計を測定することによって求めた。
表7、表8にこれらの値を示す。
図2に、本発明被覆工具1について測定した密着性TiCN層のTiCN結晶粒の傾斜角度数分布グラフを示す。
Subsequently, the inclination angle number distribution of the TiCN crystal grains of the adhesive TiCN layer of the lower layer of the hard coating layer was measured using a field emission scanning electron microscope and an electron beam backscatter diffraction apparatus.
That is, 0.3 μm in the thickness direction of the adhesive TiCN layer from the interface between the adhesive TiCN layer of the lower layer of the present invention coated tools 1 to 13 and the comparative coated tools 1 to 13 and the underlying Ti compound layer, and the tool substrate A measurement range (1 μm × 50 μm) of a 50 μm cross-section polished surface in a direction parallel to the surface is set in a lens barrel of a field emission scanning electron microscope, and an electron with an acceleration voltage of 15 kV at an incident angle of 70 degrees on the polished surface. Using a field emission scanning electron microscope and an electron beam backscatter diffraction image apparatus, the line is irradiated with individual crystal grains having a cubic crystal lattice existing within the measurement range of each polished surface with an irradiation current of 1 nA. With respect to the TiCN crystal grains, the normal region of the {110} plane, which is the crystal plane of the crystal grains, with respect to the normal line of the surface of the tool base with a measurement region of 0.3 × 50 μm at an interval of 0.1 μm / step The angle of inclination An inclination angle number distribution obtained by measuring and dividing the measurement inclination angles within the range of 0 to 45 degrees among the measurement inclination angles for each pitch of 0.25 degrees and totaling the frequencies existing in each division It represented by a graph and calculated | required by measuring the sum total of the frequency of the crystal grain whose measurement inclination | tilt angle is 0-10 degree | times.
Tables 7 and 8 show these values.
In FIG. 2, the inclination angle number distribution graph of the TiCN crystal grain of the adhesive TiCN layer measured about this invention coated tool 1 is shown.

また、本発明被覆工具1〜13、比較被覆工具1〜13の硬質被覆層の下部層の上部TiCN層の結晶粒については、上部TiCN層と上部層の界面から上部TiCN層の深さ方向へ0.3μm、また、工具基体表面と平行方向に50μmの断面研磨面の測定範囲(1μm×50μm)を、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、前記と同様、その断面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である{112}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表し、その傾斜角が0〜10度である結晶粒の度数の合計を測定することによって求めた。
表7、表8にこれらの値を示す。
図3に、本発明被覆工具1について測定した上部TiCN層のTiCN結晶粒の傾斜角度数分布グラフを示す。
Moreover, about the crystal grain of the upper TiCN layer of the lower layer of the hard coating layer of the present coated tools 1 to 13 and the comparative coated tools 1 to 13, from the interface between the upper TiCN layer and the upper layer to the depth direction of the upper TiCN layer. The measurement range (1 μm × 50 μm) of the cross-section polished surface of 0.3 μm and 50 μm in the direction parallel to the surface of the tool base is measured using a field emission scanning electron microscope and an electron beam backscatter diffractometer. A {112} plane which is a crystal plane of the crystal grain with respect to the normal of the surface of the tool base by irradiating an electron beam to each crystal grain having a cubic crystal lattice existing within the measurement range of the polished surface The inclination angle formed by the normal line is measured, and the measurement inclination angle within the range of 0 to 45 degrees among the measurement inclination angles is divided for each pitch of 0.25 degrees, and the frequency existing in each division is determined. Represented by a graph of the distribution of the number of tilt angles It was determined by measuring the total frequency of crystal grains having an inclination angle of 0 to 10 degrees.
Tables 7 and 8 show these values.
In FIG. 3, the inclination angle number distribution graph of the TiCN crystal grain of the upper TiCN layer measured about this invention coated tool 1 is shown.

また、本発明被覆工具1〜13、比較被覆工具1〜13の硬質被覆層の下部層の密着性TiCN層の結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、前記と同様、その断面研磨面の測定範囲内に存在する六方晶結晶格子を有する結晶粒個々に電子線を照射することで、くさび形結晶組織の凸部の平均間隔、凹凸部の平均高低差、くさび形結晶組織を構成するTiCN結晶粒の平均粒径を算出した。
くさび形結晶組織の凸部の平均間隔は図1のa部に示すように、本発明で述べた、くさび型結晶組織の隣あう凸部間の距離を測定し、5点測定の平均値を凸部の平均間隔とした。くさび形結晶組織の凹凸部の平均高低差は図1のc部に示すように、本発明で述べた、結晶群の凹部と一つ隣の凸部の距離を測定し、5点測定の平均値を凹凸部の平均高低差とした。くさび形結晶組織を構成する密着性TiCN結晶粒の平均粒径は、下部層Ti化合物層直上の{110}配向TiCN結晶粒における横方向の線分測定点10箇所の測定値の平均から、くさび形結晶組織を構成するTiCN結晶粒の横方向平均粒径を求めた。
表7、表8にこれらの値を示す。
Moreover, about the crystal grain of the adhesive TiCN layer of the lower layer of the hard coating layer of the present invention coated tools 1 to 13 and comparative coated tools 1 to 13, using a field emission scanning electron microscope and an electron beam backscatter diffraction device, Similarly, by irradiating an electron beam to each crystal grain having a hexagonal crystal lattice existing within the measurement range of the cross-sectional polished surface, the average interval between the convex portions of the wedge-shaped crystal structure, the average height difference of the concave and convex portions, The average grain size of TiCN crystal grains constituting the wedge-shaped crystal structure was calculated.
The average interval between the convex portions of the wedge-shaped crystal structure is measured by measuring the distance between adjacent convex portions of the wedge-shaped crystal structure described in the present invention as shown in part a of FIG. It was set as the average space | interval of a convex part. The average height difference between the concave and convex portions of the wedge-shaped crystal structure was measured by measuring the distance between the concave portion of the crystal group and the adjacent convex portion described in the present invention as shown in part c of FIG. The value was defined as the average height difference of the uneven portions. The average grain size of the adhesive TiCN crystal grains constituting the wedge-shaped crystal structure is determined from the average of the measured values at the ten points of the horizontal line segment measurement points in the {110} -oriented TiCN crystal grains immediately above the lower Ti compound layer. The transverse average grain size of TiCN crystal grains constituting the shape crystal structure was determined.
Tables 7 and 8 show these values.

さらに、本発明被覆工具1〜13、比較被覆工具1〜13の硬質被覆層の各構成層の厚さを、走査型電子顕微鏡を用いて測定(縦断面測定)した。
以下に密着性TiCN層と上部TiCN層の構成について説明する。
密着性TiCN層に関しては、図1に示すように、下地Ti化合物層との界面から膜厚方向にくさび型結晶組織の凹部頂点までの距離bと、くさび形結晶組織の凹凸部の平均高低差cを測定し、それぞれの5か所測定の平均値を表7、8に記した。
上部TiCN層に関しては、図1に示すように、Al層との界面から膜厚方向に密着性TiCN層のくさび型結晶組織の凸部頂点までの距離dを測定し、その5か所測定の平均値を表7、8に記した。
本発明被覆工具1〜13、比較被覆工具1〜13の硬質被覆層の各構成層の厚さはいずれも目標層厚と実質的に同じ平均層厚を示した。
表6〜表8にこれらの値を示す。
なお、下部層の合計厚みは、図1によれば、「下地Ti化合物層+b+c+d」となる。
Furthermore, the thickness of each component layer of the hard coating layer of the present invention coated tools 1 to 13 and comparative coated tools 1 to 13 was measured (longitudinal section measurement) using a scanning electron microscope.
The structure of the adhesive TiCN layer and the upper TiCN layer will be described below.
For the adhesive TiCN layer, as shown in FIG. 1, the distance b from the interface with the underlying Ti compound layer to the apex of the concave portion of the wedge-shaped crystal structure in the film thickness direction, and the average height difference of the concave and convex portions of the wedge-shaped crystal structure c was measured, and the average value of each of the five measurements was shown in Tables 7 and 8.
For the upper TiCN layer, as shown in FIG. 1, the distance d from the interface with the Al 2 O 3 layer to the convex vertex of the wedge-shaped crystal structure of the adhesive TiCN layer is measured in the film thickness direction. The average values of the measurements are shown in Tables 7 and 8.
The thicknesses of the constituent layers of the hard coating layers of the invention coated tools 1 to 13 and the comparative coated tools 1 to 13 all showed substantially the same average layer thickness as the target layer thickness.
Tables 6 to 8 show these values.
The total thickness of the lower layer is “underlying Ti compound layer + b + c + d” according to FIG.









つぎに、上記の本発明被覆工具1〜13、比較被覆工具1〜13の各種の被覆工具について、いずれも工具鋼製バイトの先端部に固定治具にてネジ止めした状態で、
被削材:JIS・SCM440の長さ方向等間隔8本縦溝入り丸棒、
切削速度:380m/min、
切り込み:1.5mm、
送り:0.3mm/rev、
切削時間:7分、
の条件(切削条件Aという)での合金鋼の湿式高速断続切削試験(通常の切削速度は、200m/min)、
被削材:JIS・45Cの長さ方向等間隔8本縦溝入り丸棒、
切削速度:380m/min、
切り込み:1.8mm、
送り:0.3mm/rev、
切削時間:7分、
の条件(切削条件Bという)での炭素鋼の湿式高速断続切削試験(通常の切削速度は、200m/min)、
被削材:JIS・FCD700の長さ方向等間隔8本縦溝入り丸棒、
切削速度:300m/min、
切り込み:1.5mm、
送り:0.3mm/rev、
切削時間:7分、
の条件(切削条件Cという)でのダグタイル鋳鉄の湿式高速断続切削試験(通常の切削速度は180m/min)、
を行い、いずれの切削試験でも切刃の逃げ面摩耗幅を測定した。
表9にこの測定結果を示した。
Next, for the various coated tools of the present invention coated tools 1 to 13 and comparative coated tools 1 to 13, all of them are screwed with a fixing jig to the tip of the tool steel tool,
Work material: JIS / SCM440 lengthwise equal 8 round bars with vertical grooves,
Cutting speed: 380 m / min,
Incision: 1.5mm,
Feed: 0.3mm / rev,
Cutting time: 7 minutes
Wet high-speed intermittent cutting test (normal cutting speed is 200 m / min) of alloy steel under the above conditions (referred to as cutting condition A),
Work material: JIS · 45C length direction equally spaced 8 vertical grooved round bar,
Cutting speed: 380 m / min,
Cutting depth: 1.8mm,
Feed: 0.3mm / rev,
Cutting time: 7 minutes
Wet high-speed intermittent cutting test of carbon steel under the above conditions (referred to as cutting condition B) (normal cutting speed is 200 m / min),
Work material: JIS / FCD700 lengthwise equal 8 round grooved round bars,
Cutting speed: 300 m / min,
Incision: 1.5mm,
Feed: 0.3mm / rev,
Cutting time: 7 minutes
Wet high-speed intermittent cutting test (normal cutting speed is 180 m / min) of ductile cast iron under the above conditions (referred to as cutting condition C),
In each cutting test, the flank wear width of the cutting edge was measured.
Table 9 shows the measurement results.


表6〜9に示される結果から、本発明被覆工具1〜13は、いずれも、下部層の密着性TiCN層はくさび形結晶組織を示すとともに該層のTiCN結晶粒は特定の傾斜角度数分布を示し、また、下部層の上部TiCN層のTiCN結晶粒も特定の傾斜角度数分布を示すことから、高熱発生を伴い、かつ、切刃に断続的・衝撃的負荷が作用する高速断続切削条件に用いた場合でも、硬質被覆層の耐剥離性が優れるとともに、耐チッピング性にも優れる。
これに対して、比較被覆工具1〜13では、高速断続切削加工においては、硬質被覆層の剥離発生、チッピング発生により、比較的短時間で使用寿命に至ることが明らかである。
From the results shown in Tables 6 to 9, in the coated tools 1 to 13 of the present invention, the adhesive TiCN layer of the lower layer shows a wedge-shaped crystal structure, and the TiCN crystal grains of the layer have a specific inclination angle number distribution. In addition, since the TiCN crystal grains of the upper TiCN layer of the lower layer also show a specific inclination angle number distribution, high-temperature intermittent cutting conditions that cause high heat generation and intermittent / impact load acts on the cutting edge Even when it is used for, the peel resistance of the hard coating layer is excellent and the chipping resistance is also excellent.
On the other hand, it is apparent that the comparative coated tools 1 to 13 reach the service life in a relatively short time due to occurrence of peeling and chipping of the hard coating layer in high-speed intermittent cutting.

上述のように、この発明の被覆工具は、各種鋼や鋳鉄などの通常の条件での連続切削や断続切削は勿論のこと、高熱を発生し、切刃に断続的・衝撃的な高負荷が作用する高速断続切削という厳しい切削条件下でも、硬質被覆層の剥離、チッピングが発生することはなく、長期の使用に亘ってすぐれた切削性能を発揮するものであるから、切削装置の高性能化並びに切削加工の省力化および省エネ化、さらに低コスト化に十分満足に対応できるものである。





As described above, the coated tool of the present invention generates high heat as well as continuous cutting and intermittent cutting under normal conditions such as various steels and cast irons, and the cutting blade is subjected to intermittent and impactful high loads. Even under severe cutting conditions such as high-speed intermittent cutting that acts, the hard coating layer does not peel or chipping, and it exhibits excellent cutting performance over a long period of use. In addition, it is possible to sufficiently satisfy the labor-saving and energy-saving of the cutting process and the cost reduction.





Claims (2)

炭化タングステン基超硬合金または炭窒化チタン基サーメットで構成された工具基体の表面に、下部層と上部層からなる硬質被覆層を蒸着形成した表面被覆切削工具において、
(a)上記下部層は、3〜20μmの合計平均層厚を有し、下地Ti化合物層、密着性TiCN層及び上部TiCN層の三層構造からなり、また、上記上部層は、2〜15μmの平均層厚を有し、化学蒸着した状態でα型の結晶構造を有するAl層からなり、
(b)下部層の上記下地Ti化合物層は、TiC層、TiN層、TiCN層、TiCO層およびTiCNO層のうちの1層または2層以上からなり、合計平均層厚は0.5〜2.5μmであり、
(c)下部層の上記密着性TiCN層は、くさび形結晶組織を有し、該くさび形結晶組織の凹凸部の平均高低差が1〜3μm、凸部の平均間隔が1〜3μmであり、該くさび形結晶組織を有するTiCN結晶粒について、電界放出型走査電子顕微鏡と電子線後方散乱回折装置を用い、その断面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である{110}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、0〜10度の範囲内の傾斜角区分に最高ピークが存在するとともに、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の40%以上の割合を占め、
(d)下部層の上記上部TiCN層は、その断面研磨面の測定範囲内に存在する立方晶結晶格子を有する結晶粒個々に電子線を照射して、前記工具基体の表面の法線に対して、前記結晶粒の結晶面である{112}面の法線がなす傾斜角を測定し、前記測定傾斜角のうち0〜45度の範囲内にある測定傾斜角を0.25度のピッチ毎に区分すると共に、各区分内に存在する度数を集計してなる傾斜角度数分布グラフで表わした場合、0〜10度の範囲内の傾斜角区分に最高ピークが存在するとともに、0〜10度の範囲内の傾斜角区分に存在する度数の合計が、傾斜角度数分布グラフにおける度数全体の60%以上の割合を占めることを特徴とする表面被覆切削工具。
In a surface-coated cutting tool in which a hard coating layer composed of a lower layer and an upper layer is vapor-deposited on the surface of a tool base composed of a tungsten carbide-based cemented carbide or a titanium carbonitride-based cermet,
(A) The lower layer has a total average layer thickness of 3 to 20 μm, and has a three-layer structure of a base Ti compound layer, an adhesive TiCN layer, and an upper TiCN layer, and the upper layer has a thickness of 2 to 15 μm. And an Al 2 O 3 layer having an α-type crystal structure in the state of chemical vapor deposition,
(B) The underlying Ti compound layer of the lower layer is composed of one or more of a TiC layer, a TiN layer, a TiCN layer, a TiCO layer, and a TiCNO layer, and the total average layer thickness is 0.5-2. 5 μm,
(C) The adhesive TiCN layer of the lower layer has a wedge-shaped crystal structure, the average height difference of the concave and convex portions of the wedge-shaped crystal structure is 1 to 3 μm, the average interval of the convex portions is 1 to 3 μm, With respect to the TiCN crystal grains having the wedge-shaped crystal structure, using a field emission scanning electron microscope and an electron beam backscattering diffractometer, each crystal grain having a cubic crystal lattice existing within the measurement range of the cross-sectional polished surface has electrons. The angle of inclination formed by the normal of the {110} plane, which is the crystal plane of the crystal grain, is measured with respect to the normal of the surface of the tool base. When the measured inclination angle within the range of degrees is divided into pitches of 0.25 degrees and the frequency existing in each division is represented by an inclination angle number distribution graph, the range of 0 to 10 degrees The highest peak exists in the tilt angle section, and The total of the frequencies existing in the inclination angle section within the range of 0 to 10 degrees occupies a ratio of 40% or more of the entire degrees in the inclination angle frequency distribution graph,
(D) The upper TiCN layer of the lower layer is irradiated with an electron beam to each crystal grain having a cubic crystal lattice existing within the measurement range of the cross-sectional polished surface, and the normal line on the surface of the tool base is Then, the inclination angle formed by the normal of the {112} plane, which is the crystal plane of the crystal grain, is measured, and the measurement inclination angle within the range of 0 to 45 degrees out of the measurement inclination angles is set to a pitch of 0.25 degrees. When it is divided into each, and is represented by an inclination angle distribution graph obtained by counting the frequencies existing in each division, the highest peak exists in the inclination angle division within the range of 0 to 10 degrees, and 0 to 10 A surface-coated cutting tool characterized in that the sum of the frequencies existing in the inclination angle division within the range of degrees occupies a ratio of 60% or more of the entire degrees in the inclination angle frequency distribution graph.
上記(c)のくさび形結晶組織は、平均粒径0.05〜1μmのTiCN結晶粒の集合体によって構成されていることを特徴とする請求項1に記載の表面被覆切削工具。



2. The surface-coated cutting tool according to claim 1, wherein the wedge-shaped crystal structure of (c) is composed of an aggregate of TiCN crystal grains having an average grain size of 0.05 to 1 μm.



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