JP6004885B2 - Mount flange removal jig - Google Patents

Description

  The present invention relates to a mount flange removing jig for removing a mount flange for holding a cutting blade mounted on a spindle of a cutting apparatus from the spindle.

  A cutting apparatus that divides a semiconductor wafer into individual devices includes a chuck table that holds the wafer, and a cutting means that rotatably supports a cutting blade that cuts a scheduled division line of the wafer held on the chuck table. The wafer can be divided into individual devices with high accuracy.

  The cutting means includes a motor for rotating the spindle, a mounting flange attached to the tip of the spindle, a cutting blade having a thin cutting blade attached to the mounting flange, and a fixing nut for fixing the cutting blade to the mounting flange. Consists of

  The tip of the spindle to which the mount flange is attached has a tapered shape, and the mount flange has a taper-shaped engagement hole corresponding to the taper shape of the spindle, and the mount flange is attached to the spindle through the engagement hole. Installed.

  The difference between the radius of the mounting flange and the radius of the cutting blade is the length of the cutting blade. However, if the length of the cutting blade is longer than the thickness of the cutting blade, the rigidity of the cutting blade is reduced at once. It causes meandering of grooves and damage to cutting blades. Therefore, it is necessary to appropriately change the size of the mount flange according to the radius of the cutting blade.

Japanese Patent No. 4149735 JP 2009-262266 A

  Since the mount flange is rotated at a high speed such as 40000 rpm together with the cutting blade, the inner diameter of the mount flange is expanded by the centrifugal force and moves in the depth direction of the tip of the tapered spindle, resulting in strong engagement with the spindle. There is a problem that it cannot be removed from.

  In particular, since the mount flange is mounted on the taper portion of the spindle, the bite becomes stronger as it moves in the back direction, and is difficult to remove. Then, although the removal jig | tool disclosed by patent document 2 was developed, since this removal jig | tool is divided into two parts, it is necessary to screw each part separately or in a fixed order. There was a problem that it was basically inconvenient to work with both hands and lacked convenience.

  The present invention has been made in view of the above points, and an object of the present invention is to mount a mount flange that is strongly bitten with a spindle and that can be easily removed using only one hand. It is to provide a removal jig.

According to the present invention, there is a boss portion that is firmly attached to the tapered portion of the spindle having a tapered portion and a center hole at the tip, and a flange portion that is formed integrally with the boss portion. And a mounting flange removing jig for removing the mounting flange on which the female screw is formed, and a through hole in which the female screw is formed in part, and a male screw that can be screwed into the female screw formed in the boss portion of the mounting flange. A cylindrical main body portion having a protruding portion protruding from the center of the formed one end portion, a handle portion, and an intermediate portion extending from the handle portion formed with a male screw that engages with the female screw of the cylindrical main body portion. A screw portion that is longer than the cylindrical main body portion , and the screw rod of the driver portion includes the through hole of the cylindrical main body portion and the screw hole inserted into the through hole. Relative to the screw rod of the driver part Slip means for limiting the rotation are the form, internal thread formed on the through hole of the tubular body portion diameter than the internal thread formed in said boss portion of said mounting flanges is formed smaller, After the male screw of the cylindrical main body portion is screwed into the female screw formed on the boss portion of the mount flange, the handle portion of the driver portion is rotated to allow the male screw of the screw rod to pass through the through hole. The cylindrical main body portion and the driver portion are integrally rotated together by the anti-slip means, and the handle portion of the driver portion is further rotated. When the male screw of the cylindrical main body portion is completely fastened to the female screw formed on the boss portion of the mount flange, the advancement of the cylindrical main body portion is restricted, and the handle portion is further rotated. The screw rod moves forward Abutting against the bottom of the central hole formed in the spindle tip, the screw rod of pressure anti by further rotate the handle portion while abutting screwing the threaded rod relative to the cylindrical body portion A mounting flange removing jig is provided, wherein the mounting flange is detached from the spindle by force.

  According to the mount flange removal jig of the present invention, the male screw formed on the screw rod of the driver part for pushing the spindle to remove the mount flange has a small diameter, so the handle part is rotated with a small torque to rotate the driver part. Since the screw rod can protrude strongly, it is possible to easily remove even the mounting flange in which strong engagement with the spindle has occurred. Further, since the cylindrical main body portion and the driver portion can be integrally rotated by the anti-slip means, the mounting flange can be easily removed with one hand.

It is an external appearance perspective view of a cutting device. It is a disassembled perspective view which shows a mode that a cutting blade is attached to a spindle. It is a perspective view of a mount flange removal jig. It is a partial cross section side view of a mount flange removal jig | tool. It is a partial cross section side view just before screwing a mount flange removal jig on a mount flange. It is a partial cross section side view of the state where the mount flange removal jig was screwed into the internal thread formed in the boss part of the mount flange. It is a partial cross section side view in the state where the mount flange is removed by the pressure contact reaction force of the screw rod by further rotating the mount flange removal jig.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, an external perspective view of the cutting device 2 is shown. A pair of guide rails 6 extending in the X-axis direction are fixed on the stationary base 4 of the cutting device 2.

  The X-axis moving block 8 is guided by the guide rail 6 by an X-axis moving mechanism (machining feed mechanism) 14 composed of a ball screw 10 and a pulse motor 12 so as to be movable in the machining feed direction, that is, the X-axis direction. It is installed. A chuck table 16 is mounted on the X-axis moving block 8 via a cylindrical support member 20.

  The chuck table 16 has a suction holding portion 18 made of porous ceramics or the like. The chuck table 16 is configured to be rotatable by a motor accommodated in the cylindrical support member 20.

  A portal frame 22 is erected on the stationary base 4 so as to straddle the pair of guide rails 6. A pair of guide rails 24 extending in the Y-axis direction are fixed to the portal frame 22.

  A Y-axis moving block 26 is disposed so as to be movable in the Y-axis direction along the guide rail 24 by a Y-axis moving mechanism (index feed mechanism) 32 including a ball screw 28 and a pulse motor 30.

  A pair of guide rails 34 extending in the Z-axis direction (vertical direction) are fixed to the Y-axis moving block 26. The Z-axis moving block 36 is disposed so as to be movable in the Z-axis direction along the pair of guide rails 34 by a Z-axis moving mechanism (cutting feed mechanism) constituted by a ball screw 38 and a pulse motor 40.

  The Z-axis moving block 36 is provided with a cutting unit 44 and an alignment unit 48. The alignment unit 48 includes an imaging unit 50 having a camera such as a microscope and a CCD camera.

  As shown in FIG. 2, the cutting unit 44 is accommodated in a spindle housing 52, and has a spindle having a tip 54 formed on a tapered surface. A center blind hole 56 having a female screw is formed on the end face of the spindle tip portion (spindle taper portion) 54.

  Reference numeral 58 denotes a mount flange, which includes a cylindrical boss part 60 and a flange part 62 formed integrally with the cylindrical boss part 60. A male screw 64 is formed on the outer periphery of the cylindrical boss portion 60, and a female screw 66 is formed on the inner periphery thereof. The mount flange 58 further has a tapered engagement hole 68.

  By inserting the engagement hole 68 of the mount flange 58 into the spindle taper portion 54 and screwing the screw 70 into the female screw of the center blind hole 56 through the engagement hole 68 of the mount flange 58, the mount flange 58 is fixed to the spindle taper. Mounted on the part 54.

  The cutting blade 46 is a washer type cutting blade composed of an electroformed cutting blade as a whole. The cutting blade 46 is inserted into the boss portion 60 of the mount flange 58, and the holding flange 72 is connected to the boss portion 60 from the outside. The cutting blade 46 is clamped between the mount flange 58 and the holding flange 72 and attached to the spindle taper portion 54 by inserting and fastening the fixing nut 76 to the male screw 64 of the boss portion 60 and tightening.

  Referring to FIG. 3, a perspective view of the mount flange removal jig 80 is shown. FIG. 4 is a partial cross-sectional side view thereof. The mount flange removal jig 80 includes a cylindrical main body portion 84 and a driver portion 82.

  The cylindrical main body 84 has a through hole 100 in which an internal thread 102 is formed in an intermediate part, and a protruding part 96 in which an external thread 98 is formed on the outer periphery. The through hole 100 has a large diameter part 100 a and a medium diameter part 100 b formed on one side of the female screw 102, and a small diameter part 100 c formed on the other side of the female screw 102.

The driver portion 82 includes a handle portion 86 that the operator holds by hand and rotates, and a screw rod 88 that is driven into and integrated with the handle portion 86. The screw rod 88 is longer than the cylindrical main body 84 .

The screw rod 88 is formed with a male screw 90 that is screwed into the female screw 102 of the cylindrical main body portion 84 at the intermediate portion, and the diameter of the tip portion of the screw rod 88 is a central blind hole 56 formed on the end face of the spindle taper portion 54. It is formed smaller than the diameter.

  An O-ring 92 as anti-slip means is inserted on the handle portion 86 side of the male screw 90 formed on the screw rod 88. Further, a protruding portion 91 having a diameter smaller than that of the large diameter portion 100 a of the through hole 100 of the cylindrical main body portion 84 is formed on the proximal end portion side of the screw rod 88.

  When the cutting blade 46 is mounted on the spindle taper portion 54 and cutting of a workpiece such as a wafer is continued, the mount flange 58 is rotated at a high speed together with the cutting blade 46, so that the inner diameter of the mount flange 58 is expanded by centrifugal force. The mount flange 58 moves in the depth direction of the spindle taper portion 54, and strong engagement is generated with the spindle taper portion 54. As a result, the mounting flange 58 cannot be normally removed by hand.

  Hereinafter, the operation of the mount flange detaching jig 80 according to the above-described embodiment for detaching the mount flange 58 with such strong engagement from the spindle taper portion 54 will be described with reference to FIGS. 4 to 7. In the cutting device 2 of the present embodiment, when the rotation of the spindle is stopped, the spindle is locked by a lock mechanism and its rotation is restricted.

  As shown in FIG. 4, the screw rod 88 of the driver portion 82 of the spindle removing jig 80 is inserted into the through hole 100 of the cylindrical main body portion 84, and the male screw 90 of the screw rod 88 is screwed into the female screw 102 of the through hole 100. As shown in FIG. 5, the mounting flange removing jig 80 is assembled by rotating the handle portion 86 of the driver portion 82 and moving the screw rod 88 forward relative to the cylindrical main body portion 84.

  In this state, the driver portion 82 and the cylindrical main body portion 84 are integrated by restricting relative rotation by an O-ring 92 serving as a slip stopper. Therefore, the mount flange 58 can be removed by holding the handle portion 86 of the mount flange removal jig 80 with one hand.

  As shown in FIG. 5, the operator holds the handle portion 86 of the mount flange removal jig 80 with one hand and brings the mount flange removal jig 80 closer to the mount flange 58 firmly attached to the spindle taper portion 54. 6, the male screw 98 formed on the projecting portion 96 of the cylindrical main body portion 84 is screwed with the female screw 66 formed on the boss portion 60 of the mount flange 58 so that the handle portion 86 is moved in the arrow A direction. By rotating, the male screw 98 of the projecting portion 96 is screwed into the female screw 66 formed on the boss portion 60 of the mount flange 98.

  Since the relative rotation of the driver portion 82 and the cylindrical main body portion 84 of the mount flange removal jig 80 is restricted by an O-ring 92 as a slip stopper, the handle portion 82 is rotated in the direction of arrow A with one hand. The male screw 98 formed on the protruding portion 96 of the cylindrical main body 84 can be fastened to the innermost side with the female screw 66 formed on the boss portion 60 of the mount flange 58.

  When the male screw 98 formed on the projecting portion 96 of the cylindrical main body portion 84 is fastened to the female screw 66 formed on the boss portion 66 of the mount flange 58, the screw rod 88 is centered on the end surface of the spindle taper portion 54. It is inserted into the blind hole 56.

  As shown in FIG. 7, when the handle portion 86 of the driver portion 82 is further rotated in the direction of arrow A, the male screw 98 formed on the protruding portion 96 of the cylindrical main body portion 84 is formed on the boss portion 60 of the mount flange 58. Since the cylindrical main body 84 is integrated with the mount flange 58 by being screwed into the innermost side of the female screw 66, the rotation restriction of the O-ring 92 serving as the anti-slip means is released, and the screw rod 88 is cylindrical. It rotates with respect to the main body 84.

  As a result, the male screw 90 of the screw rod 88 rotates while being screwed into the female screw 102 formed in the through hole 100 of the cylindrical main body portion 84, and the screw rod 88 advances relative to the cylindrical main body portion 84. The distal end portion of 88 is in contact with the bottom portion of the center blind hole 56 formed on the end face of the spindle taper portion 54.

  When the handle 86 is further rotated in the direction of arrow A, the advancement of the screw rod 88 is blocked by the bottom of the central blind hole 56 formed in the end face of the spindle taper portion 54. The mount flange 58 integrated with the cylindrical main body portion 84 moves in the direction of arrow B and is detached from the spindle taper portion 54.

  In the mount flange removal jig 80 of this embodiment, the diameter of the male screw 90 formed on the screw rod 88 is very small compared to the female screw 66 formed on the boss 60 of the mount flange 58, so the handle portion 86 is rotated. Even if the torque to be applied is small, the screw rod 88 can be strongly protruded with respect to the cylindrical main body portion 84, and the mount flange 58 that is strongly engaged with the spindle taper portion 54 can be easily removed.

2 Cutting device 16 Chuck table 22 Cutting unit 46 Cutting blade 54 Spindle taper portion 56 Center blind hole 58 Mount flange 60 Cylindrical boss portion 62 Gutter portion 72 Holding flange 76 Fixing nut 80 Mount flange removal jig 82 Driver portion 84 Cylindrical body Part 86 handle part 88 screw rod 90 through hole 92 O-ring

Claims (1)

A boss portion that is firmly attached to the tapered portion of the spindle having a tapered portion and a center hole at the tip, and a flange portion that is formed integrally with the boss portion, and a male screw and a female screw are formed on the boss portion. A mounting flange removal jig for removing the mounted flange,
A cylindrical body having a through-hole partially formed with a female screw, and a protruding portion protruding from the center of one end formed with a male screw that can be screwed into the female screw formed on the boss portion of the mount flange And
A driver portion having a handle portion and a screw rod longer than the cylindrical main body portion extending from the handle portion in which a male screw that is screwed into the female screw of the cylindrical main body portion is formed at an intermediate portion. ,
The screw rod of the driver portion is formed with anti-slip means for restricting relative rotation between the through hole of the cylindrical main body portion and the screw rod of the driver portion inserted into the through hole.
The female screw formed in the through hole of the cylindrical main body is formed with a smaller diameter than the female screw formed in the boss portion of the mount flange.
After the male screw of the cylindrical main body portion is screwed into the female screw formed on the boss portion of the mount flange, the handle portion of the driver portion is rotated to allow the male screw of the screw rod to pass through the through hole. The cylindrical main body portion and the driver portion are integrally rotated together by the anti-slip means, and the handle portion of the driver portion is further rotated. When the male screw of the cylindrical main body portion is completely fastened to the female screw formed on the boss portion of the mount flange, the advancement of the cylindrical main body portion is restricted, and the handle portion is further rotated. and the screw rod is advanced abutting against the bottom of the central hole formed in the spindle tip, screwing the threaded rod relative to the cylindrical main body portion is further rotated the handle portion while abutting The mouse is pressed by the pressure reaction force of the screw rod. Mounting flanges detaching jig, characterized in that removal from the spindle Tofuranji.

Images