JP6008979B2 - Work equipment and component mounting machines - Google Patents

Description

  The present invention relates to a work device of a method in which a work member extends and contacts a work object to perform a predetermined work, and a component mounting machine included in the category of the work device of this method.

  There are solder printing machines, component mounting machines, board inspection machines, reflow machines, etc., as equipment for producing boards with a large number of components mounted on them. It has become. Among these components, the component mounter includes a substrate transfer device, a component supply device, and a component transfer device, and mounts components on the substrate. The component transfer apparatus includes a mounting head and a nozzle holder that are driven in two orthogonal axes, and a mounting nozzle that is held by the nozzle holder and extends downward. The mounting nozzle uses negative pressure to adsorb the component to the adsorbing portion at the tip, and performs the stretching operation to release the adhering while mounting the component on the substrate. In order to finish the component mounting operation in a short time, it is preferable to increase the stretching speed of the mounting nozzle. However, on the other hand, the impact load when the component comes into contact with the substrate increases and the work reliability decreases. A number of techniques, including Patent Document 1, have been disclosed for achieving both shortening of component mounting work and ensuring work reliability.

  In the electronic component mounting method disclosed in Patent Document 1, the suction nozzle (mounting nozzle) is lowered to a target position obtained by subtracting a variation error due to the thickness of the electronic component or the warp of the substrate, and the lowering speed of the suction nozzle is reduced from the target position. When the electronic component is brought close to the substrate and a collision of the electronic component with the substrate is detected, the suction nozzle is stopped and the suction is released. As a result, it is described that the electronic component is not damaged by the impact, and the electronic component and the mounting position of the substrate can be reliably joined.

Japanese Patent No. 4172902

  By the way, as a recent demand for component mounting machines, it is possible to cope with downsizing of final products typified by smartphones. Specifically, the parts are remarkably miniaturized and thinned, and it is required that an integrated circuit part (IC, LSI, etc.) made of a low-profile chip capacitor or an ultra-thin wafer can be mounted. In these parts, the impact load and the position error allowed at the time of mounting are stricter than before, and depending on the prior art, the parts may be damaged or the mounting position accuracy may be lowered.

  In this regard, the technique of Patent Document 1 is preferable in that the impact load can be reduced by decelerating during the lowering of the mounting nozzle, but there is a problem that the mounting nozzle vibrates. That is, the mounting nozzle vibrates due to the reaction force generated when the descending speed of the mounting nozzle changes significantly, and the mounting position accuracy decreases. In particular, if the mounting nozzle is stretched at a high speed until just before the component comes into contact with the substrate, a large deceleration is required immediately before mounting, which inevitably generates a large reaction force, which is not preferable. As described above, it is not allowed to simply increase the stretching speed, acceleration, and deceleration of the mounting nozzle by extension of the prior art.

  This type of problem is not limited to the component mounting machine, but is common to work machines of a type in which the work member extends to contact the work object and perform a predetermined work.

  The present invention has been made in view of the above-mentioned problems of the background art, and shortens the working time by increasing the stretching speed of the working member, and reduces the impact load when the working member comes into contact with the work object. However, it is an object to be solved to provide a working device that can ensure work position accuracy. In addition, it solves the problem of providing a component mounter that can shorten the component mounting time even for low-profile components and ultra-thin components, and reduce the impact load when the component contacts the board, while ensuring the mounting position accuracy. It should be a challenge.

  An invention of a work device according to claim 1 that solves the above-described problem is a work on a work object that is positioned by a base member and a base member that is held so as to be stretchable and stretched from a reference position of the base member. A working member that abuts at a position to perform a predetermined work; a driving unit that outputs driving power to drive an extension operation of the working member; and a driving power of the driving unit is controlled to control a current of the working member A work control unit that variably controls at least one of a position and a stretching speed, wherein the work control unit has a stroke length by which the work member extends from the reference position to the work position. A switching setting means for setting a switching position in the middle, and setting a coarse motion driving region from the reference position to the switching position and a low speed driving region from the switching position to the work position; and the coarse motion Coarse motion control means for controlling vibration generated in at least one of the work member and the base member by a reaction force when the work member performs a stretching operation while controlling the stretching speed of the work member at a high speed in a moving region. And a low speed for controlling the working member to extend to the working position after the working member is below an allowable speed suitable for the predetermined work while controlling the drawing speed of the working member to be low in the low-speed drive region. Control means and switching adjustment means for adjusting the stretching speed and acceleration of the working member to change smoothly when the working member passes the switching position.

  According to a second aspect of the present invention, in the work device according to the first aspect, the coarse motion control means is configured to use the drive unit based on a natural frequency of the vibration determined depending on a structure of the work member and the base member. And a damping filter means for selectively attenuating a frequency component including the natural frequency in the driving power.

  According to a third aspect of the present invention, in the work equipment according to the first or second aspect, the switching adjustment unit is configured to control the stretching speed and the acceleration when the work member passes the switching position as the coarse motion control unit. A switching value to be transferred to the low-speed control means from the controller, and the coarse motion control means controls the stretching speed and the acceleration when the working member passes through the switching position to match the switching value. Termination state control means or linear matrix inequity means.

  According to a fourth aspect of the present invention, in the work equipment according to any one of the first to third aspects, the switching adjustment means sets the stretching speed when the working member passes the switching position to the allowable speed. Set as follows.

  According to a fifth aspect of the present invention, in the work device according to any one of the first to fourth aspects, the work control unit includes the switching setting unit, the coarse motion control unit, the low speed control unit, and the switching. A position command profile that is determined by the adjusting means and indicates the relationship between the elapsed time after the working member starts the stretching operation and the current position of the working member, and the elapsed time and the stretching speed of the working member Further, pre-calculation means is further provided for calculating and holding at least one of the speed command profiles indicating the relationship between and for use in control.

  According to a sixth aspect of the present invention, the work device according to any one of the first to fifth aspects includes a substrate holding device that positions and holds a substrate, a component supply device that supplies a plurality of components, and the component supply device. A mounting nozzle that mounts the mounting nozzle on a substrate held by suction, a nozzle holder that holds the mounting nozzle so as to perform a stretching operation, and a component transfer device that includes a nozzle drive mechanism that drives the stretching operation of the mounting nozzle; The base member is the nozzle holder, the work member is the mounting nozzle, the drive unit is the nozzle drive mechanism, and the predetermined work is the work target. A component mounting operation in which the mounting nozzle is brought into contact with the surface of the positioned substrate and the component is mounted, with the object as the held substrate and the work position as the surface of the substrate. .

  According to a seventh aspect of the present invention, in the component mounter according to the sixth aspect, the switching setting means depends on at least one of a component height dimension and a deformation of the positioned board that differ depending on the type of the component. In consideration of the changing stroke length, the switching position is set as a work position when the stroke length is minimized.

  In the work equipment invention according to claim 1, the switching position is set in the middle of the stroke length in which the work member extends from the reference position to the work position, and the coarse drive is divided into the coarse drive area and the low speed drive area. The vibration is suppressed while controlling the work member at a high speed in the region, and the work member is brought into contact with the work object after the work member is controlled at a low speed in the low-speed drive region and becomes below the allowable speed. It adjusts so that the extending | stretching speed and acceleration at the time of passing may change smoothly. Therefore, the average drawing speed of the working member is increased, and the working time can be shortened. In addition, since the stretching speed of the work member is equal to or lower than the allowable speed when contacting the work object, the impact load is reduced and the predetermined work is properly performed. Furthermore, the vibration of the work member is suppressed in the coarse drive region, and in addition, the reaction position generated by the smooth change in the stretching speed and acceleration is small at the switching position, so that the work position is not affected by the vibration. Accuracy can be secured.

  In the invention according to claim 2, the coarse motion control means includes damping filter means for selectively attenuating a frequency component including the natural frequency of vibration in the drive power of the drive unit. Therefore, even if the working member is extended at a high speed, the vibration of the frequency component including the natural frequency is suppressed, and the work position accuracy can be further ensured by significantly suppressing the vibration.

  In the invention according to claim 3, the switching adjusting means presets a switching value of the stretching speed and acceleration at the switching position, and the coarse motion control means includes a terminal state control means or a linear matrix inequality means for realizing the switching value. It is out. Therefore, even if the control method is changed at the switching position, the stretching speed and acceleration do not become discontinuous and an excessive reaction force is not generated, so that the vibration can be remarkably suppressed and the work position accuracy can be further ensured.

  In the invention which concerns on Claim 4, a switching adjustment means sets the extending | stretching speed when a working member passes a switching position to below an allowable speed. Accordingly, the stretching speed when the work member comes into contact with the work object after this is always equal to or lower than the allowable speed, and the impact load is surely reduced.

  In the invention according to claim 5, the pre-calculation means can calculate and hold in advance at least one of the position command profile and the speed command profile and use it for the control. According to this, there is no need for calculation for obtaining the profile after the working member starts the extending operation, and control delay due to the calculation process does not occur. In addition, it becomes easy to set the profile as a target value and perform feedback control by actually measuring the position or speed of the working member. Thereby, highly accurate operation control can be performed.

  In the invention of the component mounter according to the sixth aspect, a remarkable effect is generated in the component mounting work by the mounting nozzle. In other words, even for low-profile parts and ultra-thin parts where the allowable impact load and position error are severer than before, the component mounting time can be shortened by the high-speed extension operation in the coarse drive region. In addition, since the impact load when the component comes into contact with the substrate can be reduced, the component mounting operation is properly performed and there is no possibility of damaging the component. Furthermore, since the vibration of the mounting nozzle is suppressed, it is possible to ensure the mounting position accuracy of the component.

  In the invention according to claim 7, the stroke position that changes depending on at least one of the component height dimension and the deformation of the board is taken into consideration, and the switching position is set as the work position when the stroke length is minimized. As a result, a minimum low-speed drive region can be secured and most of the stroke length can be set as the coarse drive region, so that the average stretching speed of the mounting nozzle can be maximized and the component mounting time can be minimized.

It is the perspective view which showed the whole structure of the component mounting machine of embodiment. It is a side view which shows typically the state just before the component transfer apparatus of the component mounting machine of an embodiment enters into component mounting work. It is a functional block diagram showing the control function of a work control part. It is the figure which showed the speed command profile calculated | required by differentiating a position command profile. It is a figure of the flowchart which shows the calculation processing content of a position command part. It is the figure which illustrated the frequency characteristic of three types of damping filter means, and the total frequency characteristic when using them in combination. It is a figure of the waveform explaining the method of the basic experiment which confirms the effect of the damping filter means of the position control part 62 and a torque control part. It is a frequency spectrum figure which illustrates and demonstrates the effect | action of the damping filter means of a torque control part. It is a waveform figure which shows the result of the basic experiment which confirms the effect of a damping filter means.

  A component mounter 1 according to an embodiment of the present invention will be described with reference to FIGS. The component mounting machine 1 is included in the category of work equipment in which a work member extends and abuts against a work object to perform a predetermined work. FIG. 1 is a perspective view illustrating an overall configuration of a component mounter 1 according to an embodiment. FIG. 1 shows two component mounters 1 arranged side by side on a common base 90. The component mounter 1 is configured by assembling a board carrier device 2, a component supply device 3, a component transfer device 4, a component camera 5, a control computer (not shown), and the like on a machine base 91 (the symbol is on the right front side). This is attached only to the component mounting machine 1). As shown by the XYZ coordinate axes in the upper right of FIG. 1, the horizontal width direction of the component mounting machine 1 (the direction from the upper left to the lower right in FIG. 1) is the X axis direction, and the horizontal longitudinal direction of the component mounting machine 1 (FIG. 1). The direction from the upper right to the lower left of the drawing) is the Y-axis direction, and the vertical height direction is the Z-axis direction.

  The board transfer device 2 is provided in the middle of the component mounter 1 in the longitudinal direction. The substrate transfer device 2 is a so-called double conveyor type device in which a first transfer device 21 and a second transfer device 22 are arranged in parallel. The substrate transfer device 2 operates the two substrates K in parallel, carries them in the X-axis direction, positions them, and carries them out. Each of the first and second transfer devices 21 and 22 has a pair of conveyor rails (reference numerals omitted) spaced apart on the machine base 91 and arranged in parallel in the X-axis direction. Each conveyor rail forms a conveyance path, and a conveyor belt (not shown) is mounted so as to be able to rotate. A conveyor belt conveys the board | substrate K mounted by rotating. Each of the first and second transfer devices 21 and 22 has a substrate holding device (not shown) that pushes up the substrate K transferred to the component mounting position from the machine base 91 side and holds it.

  The component supply device 3 is a feeder-type device. The component supply device 3 is provided at the front portion in the longitudinal direction of the component mounter 1 (the left front side in FIG. 1). The component supply device 3 is configured by arranging a plurality of cassette-type feeders 31 in parallel in the X-axis direction on a machine base 91. Each cassette type feeder 31 includes a main body 32 that is detachably attached to the machine base 91, a supply reel 33 that is rotatably and detachably attached to a rear portion of the main body 32 (a front side of the component mounting machine 1), and a main body 32. And a component supply unit 34 provided at the front end (near the center of the component mounter 1). The supply reel 33 is a medium for supplying parts. The supply reel 33 is wound with a carrier tape (not shown) that holds a large number of components at regular intervals. The leading end of the carrier tape is pulled out to the component supply unit 34, and different components are supplied for each carrier tape.

  The component transfer device 4 is a so-called XY robot type device that can move in the X-axis direction and the Y-axis direction. The component transfer device 4 is disposed from the rear portion in the longitudinal direction of the component mounter 1 (the right back side in FIG. 1) to the upper portion of the front component supply device 3. The component transfer device 4 includes a head drive mechanism 41 (most of which is omitted in FIG. 1), a component mounting head 45, and the like. The head drive mechanism 41 drives the component mounting head 45 in the X axis direction and the Y axis direction.

  A nozzle holder 46 is provided below the component mounting head 45. The nozzle holder 46 holds a plurality of mounting nozzles 47 for sucking and mounting components using negative pressure. The component mounting head 45 has an R-axis rotation drive mechanism (not shown) that rotates the nozzle holder 46 around the Z-axis. Further, the component mounting head 45 rotates the selected mounting nozzle 47 around the Z-axis, and a Z-axis drive mechanism 49 (reference numeral is shown in FIG. 3) for extending and retracting the selected mounting nozzle 47 in the Z-axis direction. It has a θ-axis rotation drive mechanism (not shown) for driving. The Z-axis drive mechanism 49 uses a servo motor as a drive source, and is driven by a drive current I output from a servo amplifier 67 (shown in FIG. 3).

  The component camera 5 is a device that captures an image of the state when the mounting nozzle 47 of the component transfer device 4 sucks the component. The component camera 5 is disposed on a machine base 91 near the component supply unit 34 of the component supply device 3. A control computer (not shown) is connected to the substrate transfer device 2, the component supply device 3, the component transfer device 4, and the component camera 5 through a communication cable. The control computer obtains necessary information from each of the devices 2 to 5, performs calculations and determinations, and issues appropriate commands to control the operations of the devices 2 to 5. In order for the operator to check the information output from the control computer and to perform necessary operations and settings, a display operation device 93 is disposed on the upper front side of the upper cover 92.

  In the component mounter 1 according to the embodiment, a series of operations from component adsorption to mounting is performed as follows. That is, first, the head drive mechanism 41 of the component transfer device 4 moves the component mounting head 45 to above the component supply unit 34 of the cassette type feeder 31 to which the component P to be mounted is supplied. Next, the Z-axis drive mechanism 49 operates, and the mounting nozzle 47 extends downward from the reference position. The mounting nozzle 47 sucks the component P by the lower suction portion 48 using negative pressure, and degenerates to return to the reference position. After the mounting nozzle 47 is contracted or during the contracting operation, the head drive mechanism 41 moves the component mounting head 45 above the component camera 5. The component camera 5 images the state in which the mounting nozzle 47 is sucking the component, and determines whether or not the component can be mounted based on the image data.

  In most cases, the component may be mounted, and the head driving mechanism 41 moves the component mounting head 45 to above the positioned substrate K. Next, the component transfer device 4 enters a component mounting operation. FIG. 2 is a side view schematically showing a state immediately before the component transfer device 4 of the component mounter 1 of the embodiment enters the component mounting operation. In FIG. 2, only one of the plurality of mounting nozzles 47 held by the nozzle holder 46 is shown for ease of explanation. A position Z in the Z-axis direction of the mounting nozzle 47 is a reference position Z0. In the description of the embodiment, the position Z of the mounting nozzle 47 is represented by the lower end position of the sucked component P. Further, the substrate K is not deformed, and the surface thereof is illustrated as being held at a specified position hN. In FIG. 2, the distance LN between the lower end of the component P and the surface of the substrate K is the stroke length L. That is, when the mounting nozzle 47 extends downward by the stroke length LN, the component P is mounted in contact with the surface of the substrate K.

  The nozzle holder 46 corresponds to the base member of the present invention, the mounting nozzle 47 corresponds to the working member of the present invention, and the Z-axis drive mechanism 49 corresponds to the drive unit of the present invention. The component mounting operation corresponds to the predetermined operation of the present invention, the substrate K corresponds to the work object of the present invention, and the position Z of the mounting nozzle 47 when the component P abuts on the surface of the substrate K is the main operation. This corresponds to the working position Z2 of the invention.

  In FIG. 2, when the substrate K is deformed, for example, the surface rises to the position hH due to the upper warping of the substrate K, and the surface falls to the position hL due to the lower warping of the substrate K. Correspondingly, the work position Z2 changes, and the stroke length L changes from the minimum value LH to the maximum value LL. Further, the stroke length L varies depending on the component height dimension hP of the component P.

  In order to reduce the influence of the impact load when the component P abuts on the surface of the substrate K, the mounting nozzle 47 has an unillustrated elastic structure. That is, the mounting nozzle 47 includes a nozzle main body that extends from the nozzle holder 46 and a nozzle tip that is held by the nozzle main body via an elastic member and sucks the component P. For this reason, when the Z-axis drive mechanism 49 extends the nozzle main body beyond the stroke length L, the elastic member is deformed after the component P contacts the substrate K. Due to this action, an excessive load does not act on the substrate K and it is not damaged.

  In the prior art, if the stretching speed of the mounting nozzle 47 is increased in order to shorten the mounting work time, a large acceleration / deceleration is required. Then, vibration is generated in the mounting nozzle 47 and the nozzle holder 46 due to a reaction force when the mounting nozzle 47 is extended. Here, as shown in FIG. 1, the mounting nozzle 47 and the nozzle holder 46 are cantilevered by the head driving mechanism 41 via the component mounting head 45. Therefore, the mounting nozzle 47 vibrates in a pitching manner in the YZ plane. As a result, the suction portion 48 at the tip of the mounting nozzle 47 vibrates in the Y-axis direction and the Z-axis direction, and the mounting position accuracy decreases.

  In the present embodiment, the work control unit 6 is provided in the control computer that controls the component mounting work in order to suppress the deterioration of the mounting position accuracy. FIG. 3 is a functional block diagram illustrating control functions of the work control unit 6. The work control unit 6 performs feedforward control of the drive power (torque) of the Z-axis drive mechanism 49 and feedback control of the current position Z of the mounting nozzle 47 against the position command Zcd. As illustrated, the work control unit 6 includes a position command unit 61, a position control unit 62, a torque control unit 63, a feedback control unit 64, and the like. The position command unit 61 includes a switching setting unit 611, a switching adjustment unit 612, and a terminal state control unit 613 according to the present invention. The position control unit 62 includes the damping filter means of the present invention. The torque control unit 63 includes a torque conversion unit 631 and a damping filter unit 632 of the present invention.

  The work control unit 6 calculates a position command profile Zpr indicating the relationship between the elapsed time t after the mounting nozzle 47 starts the stretching operation and the current position Z of the mounting nozzle 47, holds this, and uses it for control. . FIG. 4 shows a speed command profile obtained by differentiating the position command profile Zpr. The speed command profile is not actually used for control of the work control unit 6, but is illustrated for easy understanding of the control contents.

  In FIG. 4, the horizontal axis represents the elapsed time t after the mounting nozzle 47 starts the stretching operation, and the vertical axis represents the stretching speed V of the mounting nozzle 47. The points Z0, Z1, and Z2 in FIG. 4 correspond to the fact that the current position Z of the mounting nozzle 47 in FIG. 2 is the reference position Z0, the switching position Z1, and the work position Z2 (as described above, the current position Z Z represents the lower end position of the part P). The period from time t0 to t1 corresponds to a coarse driving area LH described later, and the period from time t1 to t2 corresponds to a low speed driving area LS described later.

  Specifically, the position command unit 61 of the work control unit 6 creates the position command profile Zpr according to the calculation processing procedure shown in FIG. FIG. 5 is a flowchart showing the calculation processing contents of the position command unit 61. In step S <b> 1 of FIG. 5, the switching setting unit 611 of the position command unit 61 sets a stroke length L = LL at which the mounting nozzle 47 extends. At this time, the switching setting unit 611 considers the component height dimension hP of the component P and also considers the position hL where the board K descends where the stroke length L reaches the maximum value LL. In addition, the switching setting unit 611 sets the switching position to the work position when the stroke length L becomes the minimum value LH. Specifically, the upper limit position hH of the substrate K in FIG. 2 is the switching position Z1. Thereby, the coarse drive region LH (same as the minimum value LH) from the reference position Z0 to the switching position Z1 and the low speed drive region LS from the switching position Z1 to the work position Z2 are set. FIG. 2 illustrates the low speed drive region LS when the surface of the substrate K is held at the specified position hN.

  In the next step S2, the position command unit 61 sets initial conditions and termination conditions when the mounting nozzle 47 extends in the coarse motion drive region LH. The position command unit 61 sets position Z = reference position Z0, speed V = 0, and acceleration A = 0 as initial conditions when the mounting nozzle 47 starts to extend from the reference position Z0. Further, the switching adjustment means 612 of the position command section 61 sets position Z = switching position Z1, speed V = low speed VL, acceleration A = 0 as termination conditions when the mounting nozzle 47 passes the switching position Z1. . The low speed VL is set to a speed Vav or less suitable for the component mounting work, in which the impact load generated on the component P is sufficiently small, and allowed even for a low-profile component or an extremely thin component.

In the next step S3, the position command unit 61 sets a target movement time Tm required for the mounting nozzle 47 to move in the coarse movement drive region LH. Here, the stretching operation of the mounting nozzle 47 is controlled at intervals of the control cycle Ts of the work control unit 6. Therefore, the control step number n can be calculated by the following equation.
Number of control steps n = (target movement time Tm / control cycle Ts)

  In the next step S4, the terminal state control means 613 of the position command unit 61 calculates a torque value required for each control cycle Ts in the coarse drive region LH. A torque command profile is obtained by arranging n torque values at intervals of the control cycle Ts in time series. The terminal state control means 613 is a mathematical calculation method for calculating a torque command profile that satisfies the initial condition, the terminal condition, and the number n of control steps described above and that can perform feedforward control. It should be noted that the mass (size of inertia) of the mounting nozzle 47 used for calculation, the characteristics of the servo motor of the Z-axis drive mechanism 49, and the like are held in the terminal state control means 613 in advance.

  Details of the terminal state control means 613 are disclosed in, for example, a paper of IEEJ Transaction D, Vol. 129, No. 9, “Nanoscale Servo Control of Galvano Scanner by Terminal State Control”. Further, instead of the terminal state control means 613, known linear matrix inequality means (LMI means, Linear Matrix Inequality means), which is another similar mathematical calculation method, may be used.

  In the next step S5, the position command unit 61 converts the obtained torque command profile to generate a position command profile for the coarse drive region LH. This conversion operation is basically performed by inertia division and second-order time integration operation.

  In the next step S6, the position command unit 61 calculates a position command for each control cycle Ts in the low speed drive region LS under the condition that the speed V = low speed VL and the acceleration A = 0 at the switching position Z1 change smoothly. To do. A position command profile of the low speed drive region LS is obtained by arranging the position commands at the control cycle Ts intervals in time series. For example, if the acceleration A = 0 is always set in the low speed drive region LS, a position command profile is obtained in which the mounting nozzle 47 continues the constant speed extension operation at the low speed VL.

  In the final step S7, the position command profiles of the coarse drive region LH and the low speed drive region LS are connected to create an overall position command profile Zpr. The position command unit 61 outputs the entire position command profile Zpr to the position control unit 62 and the torque control unit 63. The position command section 61 can obtain and hold the position command profile Zpr by performing the above-described calculation in advance when the component P to be mounted is determined. That is, the position command unit 61 can be a pre-calculation unit of the present invention.

  Based on the position command profile Zpr received from the position command unit 61, the position control unit 62 sequentially calculates the position command Zcd required for each control cycle Ts using the vibration damping filter means. The damping filter means of the position control unit 62 includes the natural frequency included in the position command profile Zpr based on the natural frequency of vibration determined depending on the structure of the mounting nozzle 47, the nozzle holder 46, the mounting head 45, and the like. Selectively attenuate frequency components. The natural frequency of vibration can be obtained by actual measurement, for example. The vibration suppression filter means obtains a position command Zcd by performing a predetermined calculation corresponding to the filter process every control cycle Ts. The position command Zcd is an amount that becomes a control target value of the feedback control unit 64 in a control step for each control cycle Ts. The position control unit 62 outputs the position command Zcd to the adder 65 at intervals of the control cycle Ts.

  On the other hand, torque control unit 63 performs torque conversion and generation of feedforward torque command TQ1 based on position command profile Zpr received from position command unit 61. First, the torque conversion means 631 of the torque control unit 63 converts the position command profile Zpr and calculates the original torque command value for each control cycle Ts. This conversion operation is basically performed by inertia accumulation and second-order time differentiation operation.

  Next, the damping filter means 632 of the torque control unit 63 includes a natural frequency in the driving power (torque) of the Z-axis drive mechanism 49 by the same calculation method as the damping filter means of the position control unit 62. Selectively attenuate frequency components. To the damping filter means 632, the original command value of the torque in the coarse drive region LH is input from the torque conversion means 631 in time series. The damping filter means 632 performs a predetermined calculation corresponding to the filter process every control cycle Ts to obtain a feedforward torque command TQ1, and outputs it to the adder 66 every control cycle Ts. Therefore, the time-series change in the feedforward torque command TQ1 is obtained by filtering the time-series change in the original torque command value.

  Even in the low-speed drive region LS, the damping filter means can be used as necessary.

  Specifically, the damping filter means 632 of the position control unit 62 and the torque control unit 63 is realized by a digital arithmetic notch filter (band elimination filter). FIG. 6 is a diagram illustrating the frequency characteristics of the three types of damping filter means F1 to F3 and the total frequency characteristics Ftot when all of them are used in combination. Without being limited to these examples, the filter characteristics of the damping filter means 632 of the position control unit 62 and the torque control unit 63 can be appropriately designed according to the natural frequency of vibration described above. Further, the damping filter unit 632 is not limited to the notch filter, and may be configured by appropriately combining a low-pass filter, a high-pass filter, and the like.

  Returning to FIG. 3, the feedback control unit 64 is a means for realizing the position waveform in real time with high accuracy. As shown in the figure, the current position Z of the mounting nozzle 47 driven by the Z-axis drive mechanism 49 is measured, and information on the current position Z is fed back to the negative terminal of the subtractor 65. The position command Zcd output from the position control unit 62 is input to the positive terminal of the subtractor 65. The subtracter 65 subtracts the current position Z from the position command Zcd to obtain a position error ΔZ and inputs it to the feedback control unit 64.

  For the feedback control unit 64, for example, known proportional integral differential control, proportional integral control, or the like can be used. The feedback control unit 64 calculates a feedback torque command TQ2 that reduces the position error ΔZ, and inputs it to the adder 66. In addition, a feedforward torque command TQ <b> 1 is input from the torque control unit 63 to the adder 66. The adder 66 calculates the final torque command TQ3 for obtaining the desired acceleration A while reducing the position error ΔZ by adding the feedforward torque command TQ1 and the feedback torque command TQ2, and inputs the final torque command TQ3 to the servo amplifier 67. To do.

  The servo amplifier 67 holds preset motor characteristics. The motor characteristic represents the relationship between the torque of the servo motor used in the Z-axis drive mechanism 49 and the drive current. The servo amplifier 67 calculates a drive current I from the final torque command TQ3 based on the motor characteristics, and outputs the actual drive current I to the servo motor.

  Returning to the speed command profile of FIG. 4, the work control unit 6 starts the stretching operation from the reference position Z0 of the mounting nozzle 47 at time t0, and thereafter rapidly accelerates the stretching speed V to control it at a high speed. Shortly before the mounting nozzle 47 approaches the switching position Z1, the work control unit 6 rapidly decelerates the stretching speed V of the mounting nozzle 47 to about the allowable speed Vav, and thereafter gradually reduces the deceleration. Thereby, when the mounting nozzle 47 passes the switching position Z1 at time t1, the stretching speed V becomes a low speed VL that is equal to or lower than the allowable speed Vav.

  Further, at the switching position Z1, the stretching speed V can be kept constant at the low speed VL, and the acceleration A can be made zero. For this reason, the stretching speed V cannot exceed the allowable speed Vav after the mounting nozzle 47 has passed the switching position Z1. Therefore, even if the working position Z2 changes within the range of the positions hH to hL when the substrate K is warped, the stretching speed V when the component P comes into contact with the substrate K is surely below the allowable speed Vav. Become.

  In the present embodiment, the coarse motion control means and the low speed control means are distributed and included in the position command unit 61, the position control unit 62, and the torque control unit 63.

  Next, the operation and effect of the damping filter means 632 will be described. FIG. 7 is a waveform diagram for explaining a basic experiment method for confirming the effect of the damping filter means 632 of the position control unit 62 and the torque control unit 63. In FIG. 7, the horizontal axis indicates time t, and the vertical axis indicates the position Z of the mounting nozzle 47. In the basic experiment, a position command profile W1 was created by the position command unit 61 on the assumption that the mounting nozzle 47 is extended from the reference position Z0 to the switching position Z1 and stopped. The position command profile W1 is input to the position control unit 62 and the torque control unit 63, and the damping filter means 632 having the total frequency characteristic Ftot is applied.

  The broken line graph in FIG. 7 shows the position command profile W1. Further, the solid line graph in FIG. 7 shows the position command waveform W2 obtained by applying the damping filter means in the position control unit 62. Even if the damping filter means is applied, the inclination of the waveform W2 of the position command is not significantly changed from the position instruction profile W1, and the inclination is slightly relaxed as it approaches the switching position Z1. That is, the stretching speed V commanded to the mounting nozzle 47 in the coarse motion drive region LH does not change significantly. In the digital calculation, the position command waveform W2 is delayed in time from the position command profile W1, but there is no problem because the delay amount is small.

  FIG. 8 is a frequency spectrum diagram illustrating the operation of the damping filter means 632 of the torque control unit 63 by way of example. In FIG. 8, the horizontal axis indicates the frequency f, and the vertical axis indicates the magnitude of the frequency component of the torque. The broken line graph shows the frequency spectrum W3 of the original torque command value obtained by converting the position command profile W1. Further, the solid line graph shows the frequency spectrum W4 of the feedforward torque command TQ1 after applying the damping filter means 632. In the example of FIG. 8, the low frequency component of the original torque torque command value is greatly attenuated by applying the damping filter means 632 having the total frequency characteristic Ftot. As described above, the vibration suppression filter means 632 can selectively attenuate the frequency component including the natural frequency of vibration.

  FIG. 9 is a waveform diagram showing the result of a basic experiment for confirming the effect of the damping filter means 632. In FIG. 9, the horizontal axis indicates time t, and the vertical axis indicates the actual measurement value of the position Z of the mounting nozzle 47, and the vicinity of the switching position Z <b> 1 is enlarged as compared with FIG. 7. The broken line graph shows the actual measured value W5 of the position Z of the mounting nozzle 47 when the position control based on the position command profile W1 of FIG. 7 is performed, that is, when the vibration damping filter means 632 is not applied. In addition, the solid line graph indicates the actual measurement value W6 of the position Z of the mounting nozzle 47 when the position control based on the position waveform W2 of FIG. 7 is performed, that is, when the damping filter means 632 is applied.

  The broken line graph and the solid line graph vibrate up and down around the switching position Z1 after time t1. Here, the amplitude of the actual measurement value W6 indicated by the solid line is less than half the amplitude of the actual measurement value W5 indicated by the broken line. That is, the vibration of the mounting nozzle 47 can be suppressed by applying the damping filter means 632.

  In the component mounting machine 1 of the embodiment, the work control unit 6 sets the switching position Z1 in the middle of the stroke length LN in which the mounting nozzle 47 extends from the reference position Z0 to the work position Z2, and the low speed of the coarse drive region LH. It is divided into drive regions LS. Further, the work control unit 6 suppresses vibration while controlling the mounting nozzle 47 at a high speed in the coarse drive region LH, and controls the mounting nozzle 47 to a low speed VL in the low speed drive region LS to be equal to or lower than the allowable speed Vav. After that, the component P is brought into contact with the substrate K. Furthermore, the work control unit 6 adjusts so that the stretching speed V and the acceleration A when the mounting nozzle 47 passes through the switching position Z1 change smoothly. Therefore, the average stretching speed of the mounting nozzle 47 is increased, and the component mounting time can be shortened.

  In addition, since the stretching speed V when the mounting nozzle 47 passes the switching position Z1 is a low speed VL that is equal to or less than the allowable speed Vav, the stretching speed V when the component P abuts against the substrate K is reliably equal to or less than the allowable speed Vav. It becomes. Thereby, the impact load generated on the component P is reduced, and the component mounting operation is appropriately performed even on a low-profile component or an ultra-thin component in which the allowable impact load or position error is severer than before. Further, in the coarse motion drive region LH, the vibration of the frequency component including the natural frequency of the mounting nozzle 47 is remarkably suppressed by the damping filter means 632. In addition, in the switching position Z1, since the reaction force generated by the smooth change in the stretching speed V and the acceleration A is small, the work position accuracy can be further ensured without being affected by vibration.

  In addition, a position command section 61 is provided which can calculate and hold the position command profile Zpr in advance and use it for control. Accordingly, there is no need for calculation for obtaining the position command profile Zpr after the mounting nozzle 47 starts the stretching operation, and control delay due to the calculation process does not occur. Further, a feedback control unit 64 that sets the position command profile Zpr as a control target value, and actually measures the current position Z of the mounting nozzle 47 to perform feedback control is provided. With these comprehensive actions, highly accurate operation control can be performed.

  The speed command profile shown in FIG. 4 is an example. Various forms can be applied to the speed command profile and the position command profile Zpr. Further, the termination control means and the vibration suppression filter means described in the embodiment can be changed as appropriate. Various other applications and modifications are possible for the present invention.

1: Component mounter (work equipment)
2: Board transfer device 3: Component supply device 4: Component transfer device 41: Head drive mechanism 45: Component mounting head 46: Nozzle holder (base member)
47: Mounting nozzle (working member)
49: Z-axis drive mechanism (drive unit)
5: Component camera 6: Work control unit 61: Position command unit (pre-calculation means)
611: Switching setting unit 612: Switching adjustment unit 613: Terminal state control unit 62: Position control unit 63: Torque control unit 631: Torque conversion unit 632: Damping filter unit 64: Feedback control unit 67: Servo amplifier K: Substrate ( Work object) P: Parts Z0: Reference position Z1: Switching position Z2: Work position LN, LL: Stroke length LH: Coarse motion drive area LS: Low speed drive area

Claims (7)

A base member;
A work member which is held by the base member so as to be stretchable, performs a stretching operation from a reference position of the base member, and abuts a positioned work object at a work position to perform a predetermined work;
A drive unit that outputs a driving power to drive the extending operation of the working member;
A work control unit that variably controls at least one of the current position and the stretching speed of the work member by controlling the drive power of the drive unit,
The work control unit
A switching position is set in the middle of a stroke length that the working member extends from the reference position to the working position, and a coarse drive region from the reference position to the switching position and a low speed from the switching position to the working position. Switching setting means for setting the drive region;
While controlling the stretching speed of the working member at a high speed in the coarse motion drive region, a rough force that suppresses vibration generated in at least one of the working member and the base member by a reaction force when the working member performs a stretching operation. Dynamic control means;
Low speed control means for controlling the working member to extend to the working position after the working member is below an allowable speed suitable for the predetermined work while controlling the drawing speed of the working member to a low speed within the low speed drive region. When,
A working device having switching adjustment means for adjusting the stretching speed and acceleration of the working member to smoothly change when the working member passes the switching position. The work equipment according to claim 1,
The coarse motion control means selectively selects a frequency component including the natural frequency out of the drive power of the drive unit based on the natural frequency of the vibration determined depending on the structure of the working member and the base member. Work equipment including damping filter means for damping. In the work equipment according to claim 1 or 2,
The switching adjustment unit sets in advance a switching value for transferring the stretching speed and the acceleration when the working member passes the switching position from the coarse motion control unit to the low speed control unit,
The coarse motion control means includes a terminal state control means or a linear matrix inequality means for controlling the stretching speed and the acceleration when the work member passes the switching position so as to coincide with the switching value. machine. In the work equipment according to any one of claims 1 to 3,
The switching adjustment means is a working device that sets the stretching speed when the working member passes the switching position to be equal to or lower than the allowable speed. In the work equipment according to any one of claims 1 to 4,
The work control unit is determined by the switching setting means, the coarse motion control means, the low speed control means, and the switching adjustment means, and an elapsed time after the work member starts an extension operation and the work member Pre-calculation means for calculating and holding in advance and controlling at least one of a position command profile indicating a relationship with the current position and a speed command profile indicating a relationship between the elapsed time and the stretching speed of the working member Further work equipment. The work device according to any one of claims 1 to 5, wherein a substrate holding device that positions and holds a substrate, a component supply device that supplies a plurality of components, and the component that is sucked and held from the component supply device. A component mounting machine comprising: a mounting nozzle that is mounted on a substrate that is mounted; a nozzle holder that holds the mounting nozzle so as to perform a stretching operation; and a component transfer device that includes a nozzle drive mechanism that drives the stretching operation of the mounting nozzle. Yes,
The base member is the nozzle holder, the working member is the mounting nozzle, and the driving unit is the nozzle driving mechanism;
The predetermined work is a component mounting in which the work object is the held substrate, the work position is the surface of the substrate, and the mounting nozzle is in contact with the surface of the positioned substrate to mount the component. Component mounter that is work. In the component mounting machine according to claim 6,
The switching setting means takes into account the stroke length that changes depending on at least one of a component height dimension and a deformation of the positioned board that vary depending on the type of the component, and the stroke length is minimized. A component mounter that sets the switching position to the work position.

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