JP6028263B2 - Pressure heating mechanism - Google Patents

Description

  The present invention relates to a pressure heating mechanism, and more specifically to a pressure heating mechanism that seals an electronic component in a container by joining a container and a lid with a sealing material.

  With recent miniaturization of electronic circuits, electronic components such as piezoelectric vibrators mounted on the electronic circuits are also miniaturized. An electronic component may be sealed (air-tightly sealed) in a container in order to block the influence of outside air and stabilize its characteristics. For example, in the case of a crystal resonator, a container for housing the crystal resonator and a lid are bonded to seal the crystal resonator. There are seam welding, electron beam welding, atmosphere heating, and the like as methods for sealing electronic components in a container. Seam welding and electron beam welding are difficult to reduce because of individual processing, but atmosphere heating can reduce the tact because multiple processes can be performed simultaneously. Atmospheric heating is not particularly affected by the size of the object to be processed, so it is particularly effective for small crystal units and has been widely used in recent years.

  Patent Document 1 discloses an example of a fusion sealing device using an atmosphere heating method. The sealing device of the same document (for example, FIG. 6) includes a positioning pallet (15), a heating means (20), a pressing protrusion (22), a spring (23), and a second heating means (24) for heating the pressing protrusion. Is provided. The lid (18) and the container (17) are arranged on the through hole (16A) of the positioning pallet, and the pressing protrusion penetrates the through hole and raises the lid and the container as the second heating means rises. Then, the lid and the container are pressed against the heating means by the rising of the positioning pallet and the elastic force of the spring. Here, the lid and the container are heated by the heating means and by the pressing protrusion (transferred from the second heating means). The lid and the container are joined and sealed by pressing the pressing protrusion in this heated state.

  FIG. 6 shows a conventional pressure heating mechanism. The pressure heating mechanism 6 heats and seals the electronic components housed in the opening recess provided on the transport tray 5. As shown in FIG. 5, the transport tray 5 has a plurality of opening recesses 51, and in each of the opening recesses 51, a container for storing an electronic component and a lid provided with a sealing material are stacked and mounted. Placed. In the present specification, the container and the lid for housing the electronic components are collectively referred to as “workpiece”. The pressure heating mechanism 6 of FIG. 6 includes an upper heating block 61 and a lower heating block 62 that sandwich the transport tray 5, and a probe 64 that presses the workpiece in the opening recess 51 is provided in the upper heating block. The probe 64 is driven in the vertical direction in the figure by the probe driving unit 65.

JP 2011-146491 A

  As described above, in the sealing device of Patent Document 1, the pressing protrusion is heated by the second heating unit, and the probe 64 is heated by the upper heating block 61 in the pressure heating mechanism 6 of FIG. However, the amount of heat that can be held by the entire pressing protrusion or probe (hereinafter referred to as “probe etc.”) is small relative to the amount of heat required on the pressing surface of the work, and if the probe etc. is in contact with the work, The temperature of the probe or the like is greatly reduced due to the work. In the pressure heating mechanism 6, since the heat transfer area between the upper heating block 61 and the probe 64 is small, it is difficult to quickly recover the amount of heat lost to the work when the probe 64 is in contact with the work.

  Therefore, shortly after the probe or the like comes into contact with the workpiece, there is a problem that heat sealing at a desired temperature cannot be performed. Furthermore, once the encapsulant becomes below the melting temperature, it takes time to recover the encapsulant again above the melting temperature, resulting in a long tact. In addition, when the sealing material is repeatedly lowered and raised in the vicinity of the melting temperature, the metal contained in the sealing material repeats evaporation and wetting and spreading due to this temperature cycle, and the sealing performance of the work is reduced. It is not preferable.

  Therefore, an object of the present invention is to provide a configuration in which the temperature of a probe at the time of pressing a workpiece is stabilized and the workpiece is reliably sealed within a desired temperature range in a pressure heating mechanism.

  The pressurizing and heating mechanism of the present invention is a pressurizing and heating mechanism that heats and seals a work housed in a plurality of opening recesses provided on a transport tray, and includes a first block having a first surface, A second block having a second surface sandwiching the transport tray between the first surface, a probe held in the first block and heated by a heat source provided in the first block, and a probe The probe has a drive unit that moves in a direction perpendicular to the surface, and the probe has a main body part and a tip part that extends from the main body part and is arranged so as to be able to press the opening recess, and is perpendicular to the longitudinal direction of the main body part The cross-sectional area cut by a flat surface is larger than the cross-sectional area cut by a plane perpendicular to the longitudinal direction of the tip.

Further, the probe has a terminal portion extending from the main body portion on the opposite side to the tip portion across the main body portion, and a cross-sectional area cut by a plane perpendicular to the longitudinal direction of the terminal portion is perpendicular to the longitudinal direction of the main body portion. It is smaller than the cross-sectional area cut by a flat surface.
Further, an elastic body is provided between the side periphery of the terminal end portion of the probe on the main body side and the step formed on the first block, and the first force is generated by the elastic force based on the step of the first block of the elastic body. The workpiece is pressed in a direction perpendicular to the surface of 2.

It is a figure which shows the sealing device containing the pressurization heating mechanism of this invention. It is a figure which shows the pressurization heating mechanism by the Example of this invention. It is a figure explaining the probe used for the pressurization heating mechanism of FIG. It is a figure which shows the probe in the modification of this invention. It is a figure which shows a general conveyance tray. It is a figure which shows the conventional pressurization heating mechanism.

  FIG. 1 shows a sealing device including the pressure heating mechanism of the present invention. The sealing device 1 includes a pressure heating mechanism 2, a transport mechanism 3 for transporting the transport tray 5, and preheating mechanisms 4a and 4b. The pressure heating mechanism 2, a part of the transport mechanism 3, and the preheating mechanisms 4 a and 4 b are disposed inside the vacuum chamber 10. The pressurizing and heating mechanism 2 pressurizes and heats each workpiece on the transport tray 5 transported by the transport mechanism 3 to seal elements in the container, as will be described in detail later. The transport mechanism 3 includes a support mechanism 31 that supports the transport tray 5. In this embodiment, the support mechanism 31 is composed of a large number of rotating bodies, and the transport tray 5 placed thereon is transported in the rotating direction of the rotating bodies. The support mechanism 31 transports the transport tray 5 not only by transporting the transport tray 5 by rotational force, but also by guiding the transport tray 5 by some kind of guide, or by transporting it by a sliding operation such as a movable rail. Other forms may be used as long as they can move in the direction. In FIG. 1, the transport tray 5 is transported from the left side to the right side of the drawing. The plurality of workpieces mounted on the transport tray 5 are transported simultaneously using the transport tray 5 as a processing unit and processed by each processing mechanism.

  As shown in FIG. 1, the sealing device 1 may include preheating mechanisms 4 a and 4 b (hereinafter collectively referred to as a preheating mechanism 4) before the pressure heating mechanism 2. The preheating mechanism 4 preheats the transport tray 5 on which the work is placed at a temperature lower than the melting point of the sealing material before the work is pressurized and heated by the pressure heating mechanism 2. In order to shorten the manufacturing time by raising the temperature stepwise, the sealing device 1 includes the two-stage preheating mechanism 4, but the number of stages of the preheating mechanism may be one or three or more. The preheating mechanism 4 sandwiches the transport tray 5 with a heater block and performs contact heat transfer by bringing the transport tray 5 and the heater block into surface contact. In order to increase the radiation rate, the surface of the transport tray 5 or the heater block may be oxidized or blackened in advance. If preheating is performed at a temperature lower than the melting point of the sealing material by the preheating mechanism 4, the pressurization and heating by the pressurization heating mechanism 2 can be completed in a short time. Material diffusion is prevented. Further, the preheating mechanism 4 degasses the inside of the container. Therefore, the preheating mechanism 4 provided in the previous stage of the pressure heating mechanism 2 contributes to the improvement of productivity and the sealing performance.

  FIG. 2 shows a front view of the pressure heating mechanism 2 of FIG. Referring to FIGS. 1 and 2, the pressure heating mechanism 2 includes an upper heating block 21, a lower heating block 22, a block driving source 23, and a plurality of probes 24. The upper heating block 21 is fixed in the vacuum chamber 10 by a support member (not shown). The transport tray 5 is sandwiched between the clamping surface 21 a of the upper heating block 21 and the clamping surface 22 a of the lower heating block 22.

  The upper heating block 21 holds the plurality of probes 24 in such a manner that the clamping surface 22a (that is, the opening recess 51) is aligned so as to be pressed. In the present embodiment, the plurality of probes 24 are held perpendicular to the clamping surface 22a. The upper heating block 21 has a heater through hole 21b. A heater for raising the temperature of the upper heating block 21 is disposed in the through hole 21b, and the heat of the upper heating block 21 heated by the heater radiates to the probe 24. Heat is transferred by conduction.

  The lower heating block 22 is moved up and down by a block drive source 23. That is, the transport tray 5 is placed on the sandwiching surface 22a of the lower heating book 22, and the lower heating block 22 is raised by the block drive source 23, whereby the transport tray 5 is sandwiched between the sandwiching surface 21a and the sandwiching surface 22a. It is.

  Each of the probes 24 is movably held in its longitudinal direction, that is, in a direction perpendicular to the sandwiching surface 22 a of the lower heating block 22. In this embodiment, the lower heating block 22 is raised by the block drive source 23, the transport tray 5 presses the probe 24 simultaneously with the clamping surface 21a, and the raised probe 24 is urged by the elastic body 26 to press the workpiece. Configuration is taken. Since it is the structure pressed using the block drive source 23 and the elastic body 26, the probe drive part 65 of the conventional structure shown in FIG. 6 is omissible.

  As shown in FIGS. 2 and 3, the probe 24 has a main body 240 and a tip 241 and a terminal 242 that extend in the opposite direction from the main body 240, respectively. The length in the longitudinal direction of the main body 240 is larger than the length in the longitudinal direction of the tip 241, that is, the main body 240 occupies most of the probe 24. An elastic body (for example, a spring) 26 is provided around the end portion 242 side end portion of the main body portion 240 and the step 21 c of the upper heating block 21. The elastic body 26 generates an elastic force with the step 21c as a base point, and the pressing force from the probe 24 to the workpiece is adjusted by the elastic force.

  In the present embodiment, the cross-sectional area cut by a plane perpendicular to the longitudinal direction of the main body 240 is larger than the cross-sectional area cut by a plane perpendicular to the longitudinal direction of the tip 241. For example, when the probe 24 has a cylindrical shape as a whole, the outer diameter of the main body 240 is larger than the outer diameter of the tip 241. In this embodiment, the cross-sectional area cut by a plane perpendicular to the longitudinal direction is a cross-sectional area cut by a plane parallel to the sandwiching surface 21a or 22a. Moreover, in this specification, the cross-sectional areas of the main body 240, the front end 241 and the terminal end 242 refer to the average cross-sectional area of the part.

  The material of the probe 24 may be any material as long as it has high heat conductivity and excellent durability, and may be a metal such as iron and copper, for example. The probe 24 is manufactured by cutting, and the tip portion 241 and the end portion 242 are cut from a rod-shaped metal material, leaving the portion of the main body portion 240.

  In the probe 24, the heat capacity of the probe 24 is increased by making the cross-sectional area of the main body 240 larger than the cross-sectional area of the tip 241. Thereby, it is possible to secure a sufficient amount of heat that can be held by the entire probe with respect to the amount of heat required on the pressing surface of the workpiece when the workpiece is pressed. Therefore, even when the probe 24 and the workpiece are in contact with each other, the temperature of the probe 24 can be maintained within a desired temperature range.

  Further, the cross-sectional area cut by a plane perpendicular to the longitudinal direction of the terminal portion 242 is smaller than the cross-sectional area cut by a plane perpendicular to the longitudinal direction of the main body 240. Thereby, it can suppress that the heat | fever of the main-body part 240 moves to the termination | terminus part 242 side, and can maintain the temperature of the probe 24 reliably.

  Further, since the heat transfer area (that is, the surface area) of the upper heating block 21 and the probe 24 is increased as compared with the conventional configuration shown in FIG. Immediate recovery by heat transfer from 21. Therefore, according to the configuration of the present embodiment, the sealing material can be melted at a desired and substantially constant temperature. That is, unlike the conventional configuration, the temperature of the sealing material does not deviate from the desired range, and an increase in tact due to the temperature adjustment time of the sealing material can be prevented. Further, it is possible to prevent metal evaporation and wetting and spreading of the sealing material due to repeated temperature lowering and temperature rising near the melting temperature of the sealing material, and the work sealing performance is improved.

  In the above embodiment, the main body 240 and the tip 241 of the plurality of probes 24 are configured to be coaxial and held perpendicular to the sandwiching surfaces 21a and 22a, respectively. The part 241 may not be configured coaxially. For example, as shown in FIG. 4, the front end portion 241 and the end portion 242 are configured to be perpendicular to the sandwiching surfaces 21a and 22a, and the main body 240 is configured to be inclined with respect to the sandwiching surfaces 21a and 22a. May be.

  Even in such a case, if the probe 24 is formed so that the cross-sectional area cut by the plane perpendicular to the longitudinal direction of the main body 240 is larger than the cross-sectional area cut by the plane perpendicular to the longitudinal direction of the tip 241. The above effects of the present invention can be obtained. Then, it is desirable to form the probe 24 so that the cross-sectional area cut by the plane perpendicular to the longitudinal direction of the terminal portion 242 is smaller than the cross-sectional area cut by the plane perpendicular to the longitudinal direction of the main body 240. In this modification, the length of the main body 240 contained in the upper heater block 21 can be increased by inclining the main body 240 between the clamping surface 21a and the terminal portion 242, and the heat capacity of the main body 240 can be increased. Contribute to increase. In other words, the heat capacity of the probe 24 (main body 240) can be secured even in the upper heating block 21 having a low height.

  As described above, according to the pressure heating mechanism of the present invention, the temperature of the probe at the time of heating and pressing the workpiece can be stabilized and the workpiece can be reliably sealed within the desired temperature range.

1. 1. Sealing device 2. Pressure heating mechanism Transport mechanism 4a, 4b. 4. Preheating mechanism Transport tray 10. Vacuum chamber 21. Upper heating block 21a. Clamping surface 21b. Heater through hole 21c. Step 22. Lower heating block 22a. Clamping surface 23. Block drive source 24. Probe 26. Elastic body 31. Support mechanism 51. Opening recess 240. Body 241. Tip 242. Termination

Claims (1)

A pressure heating mechanism for heat-sealing a work housed in a plurality of opening recesses provided on a transport tray,
A first block having a first surface;
A second block having a second surface sandwiching the transport tray with the first surface;
A probe held in the first block and heated by a heat source included in the first block; and a drive unit that moves the second block in a direction perpendicular to the second surface;
The probe includes a main body portion, a tip portion extending from the main body portion and arranged to be able to press the opening concave portion, and a terminal portion extending from the main body portion on the opposite side of the tip portion. The cross-sectional area cut by a plane perpendicular to the longitudinal direction of the part is larger than the cross-sectional area cut by a plane perpendicular to the longitudinal direction of the tip end part and the terminal end part,
An elastic body is provided between a side circumference on the main body side of the end portion of the probe and a step formed in the first block, and the second block is moved by the driving unit, and the elastic body Pressing the workpiece in a direction perpendicular to the second surface by an elastic force based on the step of the first block of
Pressure heating mechanism.