JP6043346B2 - COMPOSITE HEATING ELEMENT, METHOD FOR PRODUCING MOLDED BODY COMPRISING THIN FILM USING THE SAME, AND HEATING ELEMENT CVD APPARATUS - Google Patents

Description

  The present invention relates to a composite heating element with improved durability, a method for producing a molded body including a thin film using the composite heating element, and a heating element CVD (chemical vapor deposition) apparatus.

  The heating element CVD method is also referred to as a Cat-CVD method or a hot wire CVD method, which decomposes the heated heating element by contacting the raw material gas directly and after undergoing a reaction process directly or in the gas phase. And a method of depositing as a thin film on a substrate (see, for example, Patent Document 1 or 2). Patent Document 1 proposes a technique for forming, for example, a hydrogen-containing SiNx thin film, a hydrogen-containing DLC thin film, a hydrogen-containing SiOx thin film, or a hydrogen-containing SiCxNy thin film by combining a plurality of gases as source gases. Patent Document 2 discloses a method of forming a silicon carbonitride film using a gas containing at least silicon, carbon, and nitrogen atoms.

  When the heating element reacts with the raw material gas or the like and is consumed, the catalytic activity and the like are impaired, and as a result, the decomposition ability of the raw material gas is impaired. Therefore, techniques for improving the durability of the heating element have been proposed (see, for example, Patent Documents 3 to 5). Patent Document 3 provides information on a technique in which at least the surface of the heating element is platinum as a technique for preventing the heating element from reacting with the cleaning gas in the in-situ cleaning method and thinning. Patent Document 4 discloses a technique for forming a carbon film on the surface of a catalyst body as a heating element as a technique for preventing the heating element from reacting with a silane gas used when forming a silicon-based film. . Further, in Patent Document 5, as a result of continuing to use after heating the heating element, the high temperature strength is reduced due to a change in the structure of the internal structure such as a change in the crystal grain size of the metal that is the material of the heating element. As a technique for preventing, or as a technique for preventing the deterioration of toughness due to deterioration of the material of the heating element as a result of oxidation by oxygen atoms remaining in the processing space, there is a technique for containing phosphorus atoms in the base material of the heating element. It is disclosed. In Patent Document 6, as a technique for preventing an increase in the electric resistance of the heating element due to the gradual carbonization of the heating element as a result of increasing the temperature of the heating element and continuing the use, the surface of the tantalum heating element is previously carbonized. A technique has been disclosed in which carbonization is less likely to proceed.

WO2006 / 126777 Publication JP-A-2005-310861 JP 2001-49437 A JP 2009-215618 A JP 2000-303183 A JP 2012-41576 A

  In the heating element CVD method, when a gas containing carbon is used as a source gas, there is a problem that a carbonization reaction occurs on the surface layer of the heating element and the catalytic activity of the heating element is impaired (hereinafter, this catalytic activity is impaired) Is sometimes referred to as “carbonization degradation”.) For example, the heating element is required to satisfy the requirements of (1) having a high melting point exceeding 2000 ° C., (2) no carbonization deterioration, and (3) being capable of conducting heating. No heating element has been disclosed so far. Since the carbonization inside the heating element cannot be stopped even by the technique disclosed in Patent Document 6, the problem that the toughness of the heating element is lowered and the practical performance is impaired cannot be solved sooner or later.

  An object of the present invention is to provide a composite heating element with improved durability that can reliably generate heat up to a predetermined temperature and exhibit catalytic activity even if a carbonization reaction occurs on the surface layer of the heating element. Another object of the present invention is to produce a molded body having a thin film, which can stably form a film on the surface of each molded body for a long period of time by a heating element CVD method using a source gas containing carbon. It is to provide a method and a heating element CVD apparatus.

The composite heating element according to the present invention includes a linear resistance heating element mainly composed of carbon, rhenium, iridium, rhodium, silicon carbide, or molybdenum disilicide, and a raw material disposed on the outer surface of the resistance heating element. comprising a gas contacting portion, raw material gas contact portion, decomposing unit der decomposing a raw material gas of the heating element CVD method is, the raw material gas contact portion is a wire, a spiral on the outer surface of the resistance heating element It is characterized by being wound in a shape . Since the source gas contact portion is a wire and is wound spirally around the outer surface of the resistance heating element, the source gas contact portion can be easily assembled and replaced. The composite heating element according to the present invention includes a linear resistance heating element mainly composed of carbon, rhenium, iridium, rhodium, silicon carbide, or molybdenum disilicide, and a raw material disposed on the outer surface of the resistance heating element. A gas contact portion, and the source gas contact portion is a decomposition portion that decomposes the source gas of the heating element CVD method, and the source gas contact portion has a particle shape and is fixed to the outer surface of the resistance heating element. It is characterized by being. The raw material gas contact portion has a grain shape and is fixed to the outer surface of the resistance heating element, thereby improving durability regardless of the difference in thermal expansion coefficient between the resistance heating element and the source gas contact portion. Can do. The composite heating element according to the present invention includes a linear resistance heating element mainly composed of carbon, rhenium, iridium, rhodium, silicon carbide, or molybdenum disilicide, and a raw material disposed on the outer surface of the resistance heating element. A gas contact portion, and the source gas contact portion is a decomposition portion that decomposes the source gas of the heating element CVD method, the source gas contact portion is a foil material, and is wound around the outer surface of the resistance heating element It is characterized by. Since the source gas contact portion is a foil material and is wound around the outer surface of the resistance heating element, the source gas contact portion can be easily assembled and replaced.

  In the composite heating element according to the present invention, the source gas contact portion is mainly composed of at least one of tantalum, tungsten, molybdenum, tantalum-based alloy, tungsten-based alloy, molybdenum-based alloy, tantalum carbide, tungsten carbide, and molybdenum carbide. It is preferable to do. The decomposition of the gas containing carbon can be performed more efficiently.

  In the composite heating element according to the present invention, it is preferable that the source gas contact portion has a layer structure covering the outer surface of the resistance heating element. The resistance heating element and the source gas contact portion can be integrated.

  In the composite heating element according to the present invention, the resistance heating element preferably has a flat cross-sectional shape. Since the surface area of the resistance heating element can be increased, the surface area of the source gas contact portion disposed on the outer surface of the resistance heating element can be increased.

  In the composite heating element according to the present invention, the outer surface of the resistance heating element is preferably a surface subjected to a coating treatment with rhenium oxide, zirconium oxide, magnesium oxide, silicon dioxide, tantalum carbide, or tungsten carbide. Durability can be further improved by coating treatment according to the use atmosphere or application.

A method for producing a molded body including a thin film according to the present invention comprises heating a composite heating element according to the present invention to 1800 ° C. or higher, bringing a source gas containing carbon into contact with the generated heating element, and decompose to produce a chemical species, characterized that you form a thin film by reaching the chemical species on the surface of the molded body.

  A heating element CVD apparatus according to the present invention includes a vacuum chamber, an exhaust pump for evacuating the internal gas in the vacuum chamber, a source gas supply pipe disposed in the vacuum chamber and having a gas blowing hole, and the present invention. And a composite heating element according to the present invention.

  In the heating element CVD apparatus according to the present invention, the gas blowing hole is provided at least at a tip of the source gas supply pipe, and the source gas supply pipe is fitted with a center hole that is fitted around the tip of the gas blowing hole side. It is preferable that a lotus root type member having a plurality of guide holes provided around the center hole is provided, and the composite heating element is supported through the guide holes. The composite heating element is stably supported, and the composite heating element does not disturb the flow of the source gas. Furthermore, the source gas can be more efficiently brought into contact with the composite heating element.

  In the heating element CVD apparatus according to the present invention, it is preferable that the composite heating element has a return portion in front of the gas blowing hole. The raw material gas can be brought into contact with the composite heating element more efficiently.

  The present invention can provide a composite heating element with improved durability that can reliably generate heat up to a predetermined temperature and exhibit catalytic activity even if a carbonization reaction occurs on the surface layer of the heating element. Further, the present invention provides a method for producing a molded body having a thin film, which can stably form a film on the surface of each molded body over a long period of time by a heating element CVD method using a source gas containing carbon, and A heating element CVD apparatus can be provided.

It is a partial enlarged front view which shows an example of the composite heat generating body which concerns on 1st embodiment. It is sectional drawing which shows an example of the composite heat generating body which concerns on 2nd embodiment. It is a partial enlarged front view which shows an example of the composite heat generating body which concerns on 3rd embodiment. It is sectional drawing which shows an example of the composite heat generating body which concerns on 4th embodiment. It is sectional drawing which shows the modified example of the composite heat generating body which concerns on 2nd embodiment. It is sectional drawing which shows the modification example of the composite heat generating body which concerns on 4th embodiment. It is the schematic which shows an example of the heat generating body CVD apparatus which concerns on this embodiment. It is the schematic which shows an example of the support state to the raw material gas supply pipe | tube of a composite heat generating body.

  Next, the present invention will be described in detail with reference to embodiments, but the present invention is not construed as being limited to these descriptions. As long as the effect of the present invention is exhibited, the embodiment may be variously modified.

  FIG. 1 is a partially enlarged front view showing an example of a composite heating element according to the first embodiment. A composite heating element 1A according to the first embodiment includes a linear resistance heating element 2A mainly composed of carbon, rhenium, iridium, rhodium, silicon carbide, or molybdenum disilicide, and an outer surface of the resistance heating element 2A. The material gas contact portion 3A is a decomposition portion that decomposes the material gas of the heating element CVD method.

  The resistance heating element 2A generates heat when energized, for example, and mainly has a role of supplying heat to the source gas contact portion 3A. The resistance heating element 2A is a linear member mainly composed of carbon, rhenium, iridium, rhodium, silicon carbide, or molybdenum disilicide. Even if a carbonization reaction occurs in the surface layer of these materials, since the change in electric resistance is small, the material gas contact portion 3A can be heated by stably generating heat to a predetermined temperature. In this specification, the term “linear” refers to a shape having an elongated outer shape. Moreover, a wire means a linear member.

  The cross-sectional shape of the resistance heating element 2A may be a circle, a square, a regular polygon, or a flat shape. The flat shape means that the flatness expressed by the ratio (a / b) of the long side length (a) and the short side length (b) of the cross-sectional shape is 1.5 to 100. For example, an elliptical shape, a rectangular shape, a semicircular shape, or a deformed shape thereof. The shape of the side surface on the long side of the resistance heating element 2A is not particularly limited, and is, for example, a flat surface, a convex curved surface, or a concave curved surface. By making the cross-sectional shape of the resistance heating element 2A flat, the surface area of the resistance heating element 2A can be increased compared to a circle or the like. And the surface area of 3 A of source gas contact parts arrange | positioned on the outer surface of 2 A of resistance heating elements can be enlarged.

  The wire diameter of the resistance heating element 2A is preferably 0.05 to 5 mm, more preferably 0.1 to 1.5 mm, and still more preferably 0.5 to 1.0 mm. In this specification, the wire diameter is a diameter when the cross-sectional shape is circular, and when the cross-sectional shape is a square or regular polygon, it is a diameter of a circle circumscribing the square or regular polygon, or the cross-sectional shape is In the case of a flat shape, it is the diameter of a perfect circle having the same area as the cross-sectional area.

  The material of the resistance heating element 2A may be a single material or a composite material. Examples of the carbon-based material include a carbon fiber reinforced carbon composite material (C / C composite), a carbon fiber reinforced metal composite material, a carbon sintered body, and graphite. For example, the electrical resistance may be reduced by using a composite material containing carbon as a main component and tungsten or tantalum added. The material mainly containing rhenium is a rhenium-based alloy such as metal rhenium, rhenium-tungsten alloy, rhenium-tantalum alloy, for example. Examples of the iridium-based material include iridium-based alloys such as metal iridium, iridium-tantalum alloy, and iridium-platinum alloy. Examples of the rhodium-based material include rhodium-based alloys such as metal rhodium, rhodium-tantalum alloy, and rhodium-platinum alloy. The material mainly composed of silicon carbide is, for example, silicon carbide or a composite material of silicon carbide and tungsten. The material mainly composed of molybdenum disilicide is, for example, molybdenum disilicide, a composite material of molybdenum disilicide and tungsten. In the present specification, the main component means a component having the largest content (% by mass) among all the components of the material, preferably 50% by mass or more, more preferably 80% by mass or more.

  The source gas contact part 3A is a decomposition part that decomposes the source gas of the heating element CVD method, and has a role as a catalyst in the heating element CVD method. The raw material gas contact portion 3A is mainly composed of tantalum, tungsten, molybdenum, tantalum-based alloy, tungsten-based alloy, molybdenum-based alloy, tantalum carbide, tungsten carbide in that the carbon-containing gas can be decomposed more efficiently. Or it is preferable to consist of at least 1 sort (s) of molybdenum carbide. The material of the source gas contact portion 3A may be a single material or a composite material. The tantalum-based alloy is an alloy containing 50% by mass or more of tantalum, for example, a tantalum-silicon alloy or a tantalum-iridium alloy. The tungsten-based alloy is an alloy containing 50% by mass or more of tungsten, for example, a tungsten-rhenium alloy or a tungsten-thorium alloy. The molybdenum-based alloy is an alloy containing 50% by mass or more of molybdenum, for example, a molybdenum-silicon alloy or a molybdenum-gold alloy.

  Next, the first embodiment to the fifth embodiment will be described as examples of disposing the source gas contact portion 3A on the outer surface of the resistance heating element 2A.

(First embodiment)
In the composite heating element 1A according to the first embodiment, as shown in FIG. 1, it is preferable that the source gas contact portion 3A is a wire, and is wound spirally around the outer surface of the resistance heating element 2A. By assembling the source gas contact portion 3A in a spiral manner around the outer surface of the resistance heating element 2A, the source gas contact portion 3A can be easily assembled and replaced. Moreover, recycling becomes easy. The winding pitch may be equal intervals as shown in FIG. 1 or may be unequal intervals provided with relatively sparse and dense portions. The wire diameter of the raw material gas contact portion 3A is preferably 0.05 to 1.5 mm, more preferably 0.2 to 1.2 mm, and still more preferably 0.5 to 1.0 mm. . The ratio of the area covered by the raw material gas contact portion 3A to the area of the outer surface of the resistance heating element 2A (hereinafter sometimes referred to as the coverage) is preferably 25 to 100%, and more preferably 50 to 100%. It is more preferable.

(Second embodiment)
FIG. 2 is a cross-sectional view showing an example of a composite heating element according to the second embodiment. In the composite heating element 1B according to the second embodiment, as shown in FIG. 2, it is preferable that the source gas contact portion 3B has a layer structure covering the outer surface of the resistance heating element 2B. Examples of the method of coating the source gas contact portion 3B on the outer surface of the resistance heating element 2B include a wet coating method, a cladding method, and a sputtering method. The thickness of the layer of the source gas contact part 3B is preferably 0.0001 to 1 mm, and more preferably 0.01 to 0.1 mm. In the composite heating element 1B according to the second embodiment, the resistance heating element 2B and the source gas contact portion 3B are joined and integrated, so the composite heating element 1B is processed into a coil spring shape, a zigzag shape, etc. The chance of contact with the source gas can be increased.

(Third embodiment)
FIG. 3 is a partially enlarged front view showing an example of the composite heating element according to the third embodiment. In the composite heating element 1C according to the third embodiment, it is preferable that the material gas contact portion 3C has a grain shape and is fixed to the outer surface of the resistance heating element 2C. For example, when the resistance heating element 2C is made of a material mainly composed of carbon, the coefficient of thermal expansion of the material mainly composed of carbon is relatively smaller than the coefficient of thermal expansion of the material mainly composed of metal. As in the case of the composite heating element 1B according to the second embodiment, it may be difficult to make the resistance heating element 2B and the source gas contact part 3B adhere in a layer structure. At this time, the raw material gas contact portion 3C is formed into a grain shape, so that the raw material gas contact portion 3C can be placed on the outer surface of the resistance heat generator 2C even if the difference in thermal expansion coefficient between the resistance heat generator 2C and the raw material gas contact portion 3C is large. Can be fixed to.

  In the composite heating element 1C according to the third embodiment, the source gas contact portion 3C may be in contact with the outer surface of the resistance heating element 2C, but is more preferably fixed. The fixing method is, for example, a method (spraying method) in which the material of the source gas contact portion 3C heated to a molten or semi-molten state is solidified and adhered by spraying the outer surface of the wire to be the resistance heating element 2C, A method of applying and sintering a paste containing particles to be the source gas contact portion 3C on the outer surface of the resistance heating element 2C (sintering method), or kneading the particles to be the source gas contact portion 3C to the material of the resistance heating element 2C This is a method (kneading method) in which a wire is formed from the squeezed composition. Further, when the resistance heating element 2C is in the form of a fiber such as a C / C composite or a carbon fiber reinforced metal composite material, after forming a wire as the resistance heating element 2C, the source gas contact portion 3C and the outer surface of the wire The particles that become the source gas contact portion 3C are fixed between the fibers by colliding with each other (shot peening), or the source gas contact portion 3C is formed between the fibers forming the resistance heating element 2C. After fixing the particles, a wire may be formed.

(Fourth embodiment)
FIG. 4 is a cross-sectional view showing an example of a composite heating element according to the fourth embodiment. In the composite heating element 1D according to the fourth embodiment, it is preferable that the source gas contact portion 3D is a foil material and is wound around the outer surface of the resistance heating element 2D. The composite heating element 1D according to the fourth embodiment differs from the composite heating element 1B according to the second embodiment in that, in the composite heating element 1B according to the second embodiment, the resistance heating element 2B and the source gas contact portion 3B. In the composite heating element 1D according to the fourth embodiment, the resistance heating element 2D and the source gas contact portion 3D are separate members that can be separated. In the composite heating element 1D according to the fourth embodiment, the source gas contact portion 3D can be easily assembled and replaced. Moreover, recyclability becomes easy.

  In FIGS. 1 to 4, the resistance heating elements 2 </ b> A to 2 </ b> D have been shown to be wire rods having a circular cross-sectional shape, but the present invention is not limited to these embodiments. Next, an example of a modification will be described.

  FIG. 5 is a cross-sectional view showing a modified example of the composite heating element according to the second embodiment. In the modification shown in FIG. 5, a wire having an elliptical cross section is used as the resistance heating element 2E, and the outer surface of the resistance heating element 2E is covered with the source gas contact portion 3E. By making the cross-sectional shape of the resistance heating element 2E flat, the surface area of the source gas contact portion 3E can be increased, so that opportunities for contact with the source gas can be increased. The source gas contact portion 3E can be formed in the same manner as the source gas contact portion 3B of the second embodiment. In the modified example of the composite heating element according to the second embodiment, the resistance heating element 2E and the source gas contact portion 3E are integrated in the same manner as the composite heating element according to the second embodiment. Processing into a zigzag shape can further increase the chance of contact with the source gas.

  FIG. 6 is a cross-sectional view showing a modified example of the composite heating element according to the fourth embodiment. In the modified example shown in FIG. 6, the resistance heating element 2F is a wire having a rectangular cross-sectional shape, and the source gas contact portion 3F is a foil material, and the source gas contact portion is placed on the side surfaces 2F1 and 2F2 of the resistance heating element 2F. It has a laminated structure in which 3F is arranged. By making the cross-sectional shape of the resistance heating element 2F flat, the surface area of the source gas contact portion 3F can be increased, so that the chance of contact with the source gas can be increased. Since the source gas contact portion 3F is a foil material, the source gas contact portion 3F can be easily assembled and replaced. Moreover, recyclability becomes easy. As shown in FIG. 6, the end surface 2F3, 2F4 is not disposed with the source gas contact portion 3F, and the end surfaces 2F3, 2F4 are exposed, or the source gas contact portion 3F extends to the end surfaces 2F3, 2F4. It is good also as a form which coat | covered 2F3 and 2F4.

  1, 4 and 6, the resistance heating elements 2 </ b> A, 2 </ b> D, 2 </ b> F and the source gas contact portions 3 </ b> A, 3 </ b> D, 3 </ b> F are shown in contact with each other without gaps. There may be a portion where the resistance heating elements 2A, 2D, 2F and the source gas contact portions 3A, 3D, 3F are not in contact with each other.

  In the composite heating elements 1A to 1F according to the first to fifth embodiments, the outer surfaces of the resistance heating elements 2A to 2F are coated with rhenium oxide, zirconium oxide, magnesium oxide, silicon dioxide, tantalum carbide, or tungsten carbide. It is preferable that the surface has been rubbed. Durability can be further improved by coating the outer surfaces of the resistance heating elements 2A to 2F according to the use atmosphere or application. For example, when the use atmosphere is an oxidizing atmosphere, the resistance heating elements 2A to 2F are oxidized by coating the outer surfaces of the resistance heating elements 2A to 2F with rhenium oxide, zirconium oxide or molybdenum disilicide as a coating treatment. It can prevent and generate stable heat. In addition, when the use is for food containers, the outer surfaces of the resistance heating elements 2A to 2F are coated with tantalum carbide as a coating treatment, so that the resistance heating elements 2A to 2F volatilize undesired components for food contact. It is possible to generate stable heat by preventing distribution on the surface.

  FIG. 7 is a schematic view showing an example of a heating element CVD apparatus according to this embodiment. A heating element CVD apparatus 100 shown in FIG. 7 is an apparatus that uses a plastic container 11 as a molded body and forms a thin film on the inner surface of the plastic container 11. The heating element CVD apparatus 100 according to this embodiment includes a vacuum chamber 6, an exhaust pump (not shown) that evacuates the internal gas in the vacuum chamber 6, and a gas blowout hole 17 x that is disposed in the vacuum chamber 6. The raw material gas supply pipe 23 and the composite heating element 18 according to the first to fifth embodiments are provided.

  The vacuum chamber 6 has a space for accommodating a plastic container 11 as a molded body therein, and the space serves as a reaction chamber 12 for forming a thin film. The vacuum chamber 6 includes a lower chamber 13 and an upper chamber 15 that is detachably attached to the upper portion of the lower chamber 13 and seals the inside of the lower chamber 13 with an O-ring 14. The upper chamber 15 has an upper and lower drive mechanism (not shown) and moves up and down as the plastic container 11 is carried in and out. The internal space of the lower chamber 13 is formed to be slightly larger than the outer shape of the molded body (the plastic container 11 in FIG. 7) accommodated therein.

  An exhaust pipe 22 communicates with the internal space of the upper chamber 15 via a vacuum valve 8, and air in the reaction chamber 12 inside the vacuum chamber 6 is exhausted by an exhaust pump (not shown).

  The source gas supply pipe 23 is supported so as to hang downward at the center of the inner ceiling surface of the upper chamber 15. The raw material gas 33 flows into the raw material gas supply pipe 23 through the gas flow rate adjusters 24a and 24b and the valves 25a to 25c. The source gas 33 can be supplied by a bubbling method when the starting material is liquid. That is, the bubbling gas is supplied to the starting material 41a accommodated in the material tank 40a while the flow rate is controlled by the gas flow rate regulator 24a, and the vapor of the starting material 41a is generated and supplied as the material gas 33.

  The source gas supply pipe 23 preferably has a source gas channel 17 inside, and a gas blowing hole 17 x communicating with the source gas channel 17 is preferably provided at least at the tip of the source gas supply pipe 23. The end of the source gas supply pipe 23 opposite to the side where the gas blowing holes 17 x are provided is connected to a gas supply port 16 provided in the upper chamber 15. As a result, the source gas passes through the source gas flow path 17 connected to the gas supply port 16 and is blown out from the gas outlet hole 17x.

  The material of the source gas supply pipe 23 may be an insulator or a conductor. The material of the source gas supply pipe 23 is, for example, a ceramic pipe formed of a material mainly composed of aluminum nitride, silicon carbide, silicon nitride, or aluminum oxide, mainly composed of aluminum nitride, silicon carbide, silicon nitride, or aluminum oxide. A metal tube whose surface is coated with a material to be made, such as a stainless steel tube. However, when the material of the source gas supply pipe 23 is a conductor such as a stainless steel pipe, in order to stably energize the resistance heating element, the source gas supply pipe 23 is made a part of the energization path or a separate It is necessary to secure an energization path. For these purposes, it is desirable that the lotus root type member 35 for fixing the relative position of the resistance heating element to the source gas supply pipe 23 is made of an insulator. The composite heating element 18 can be energized stably, is durable, and the heat generated by the composite heating element 18 can be efficiently exhausted by heat conduction. Moreover, it is preferable to provide a plurality of gas blowing holes on the side wall of the source gas supply pipe 23. The opportunity for the source gas contact portion of the composite heating element 18 disposed along the side wall of the source gas supply pipe to contact the source gas can be increased, and chemical species can be efficiently generated.

  The composite heating element 18 is disposed along the side wall of the source gas supply pipe 23 and is connected to the wiring 19 by connection portions 26a and 26b. A heater power source 20 is connected to the wiring 19.

  FIG. 8 is a schematic view showing an example of a state in which the composite heating element is supported on the source gas supply pipe. FIG. 8 shows an example in which two composite heating elements 1A according to the first embodiment are provided as an example. In the heating element CVD apparatus 100 according to the present embodiment, the gas blowing hole 17x is provided at least at the tip of the source gas supply pipe 23, and the source gas supply pipe 23 is fitted around the tip of the gas blowing hole 17x. It is preferable that a lotus root-type member 35 having a hole 51 and a plurality of guide holes 52 provided around the center hole 51 is provided, and the composite heating element 1 </ b> A is supported through the guide holes 52.

  The central hole 51 of the lotus root type member 35 is a through hole provided in the central portion of the lotus root type member 35, and has a role of fixing the lotus root type member 35 to the side wall of the source gas supply pipe 23. The method of fixing the lotus root type member 35 to the raw material gas supply pipe 23 is not particularly limited. For example, the physical diameter is set by fitting the inner diameter of the center hole 51 and the outer diameter of the raw material gas supply pipe 23 to dimensions that fit each other. A fixing method, a fixing method using an adhesive. Moreover, you may fix so that attachment or detachment is possible or not so that attachment or detachment is impossible.

  The guide holes 52 of the lotus root type member 35 are through holes arranged radially with the center hole 51 as the center, and have a role of supporting the composite heating element 1A. The guide holes 52 are preferably arranged in the same circle. The guide hole 52 preferably supports the composite heating element 1A in a non-fixed manner and more preferably supports the composite heating element 1A in a non-contact manner in that the deformation due to thermal expansion of the composite heating element 1A is not hindered. By supporting the composite heating element 18 through the guide hole 52, the composite heating element 1 </ b> A can be disposed slightly away from the side wall surface of the source gas supply pipe 23. As a result, it is possible to prevent a rapid temperature rise of the source gas supply pipe 23. Moreover, the contact opportunity with the source gas blown out from the gas blowing hole 17x and the source gas in the reaction chamber 12 can be increased.

  The composite heating element 1A preferably has a return portion 4A in front of the gas blowing hole 17x. As a result, the source gas blown out from the gas blowing holes 17x can easily come into contact with the composite heating element 1A, so that the source gas can be activated efficiently. The shape of the return portion 4A is, for example, an arch shape obtained by bending the composite heating element 1A into an arc shape as shown in FIG. 8, a convex shape obtained by bending the composite heating element 1A into a square shape as shown in FIG. It is a polygonal shape (not shown) obtained by bending 1A into a coil spring shape and a zigzag shape. Here, the front of the gas blowing hole 17x refers to a portion protruding in the length direction of the source gas supply pipe 23, and the return portion 4A is disposed across the front of the gas blowing hole 17x or the gas blowing. You may arrange | position without traversing the front of the hole 17x.

  The material of the lotus root type member 35 may be an insulator or a conductor. The material of the lotus root type member 35 is, for example, a ceramic, aluminum nitride, silicon carbide, silicon nitride, or aluminum oxide as a main component formed of a material mainly composed of aluminum nitride, silicon carbide, silicon nitride, or aluminum oxide. It is a metal, stainless steel tube whose surface is coated with. In particular, an insulator having a high thermal conductivity is preferable. The material of the lotus root type member 35 is selected depending on whether the source gas supply pipe 23 is insulative or conductive. That is, when the material of the source gas supply pipe 23 is insulative, the material of the lotus root type member 35 may be either an insulator or a conductor. Further, when the material of the source gas supply pipe 23 is conductive, the material of the lotus root type member 35 is preferably an insulator.

  As shown in FIG. 7, only one lotus root type member 35 may be provided at the distal end portion on the gas blowing hole 17 x side. However, as shown in FIG. 8, a plurality of lotus root type members 35 are provided. It is more preferable that the guide holes 52 of the lotus root type members 35 are arranged so that the positions of the lotus root type members 35 face each other. Thus, the composite heating element 2A is supported at two or more points along the side wall of the source gas supply pipe 23, and the composite heating element 1A can be more reliably prevented from contacting the side wall of the source gas supply pipe 23.

  Since the composite heating element 18 has conductivity, it can generate heat when energized, for example. By causing electricity to flow through the composite heating element 18 by the heater power source 20, the composite heating element 18 generates heat. Note that the present invention is not limited to the heating method of the composite heating element 18. In addition, although one composite heating element 18 is shown in FIG. 7, two composite heating elements 18 may be provided as shown in FIG. 8, or three or more may be provided although not shown.

  Next, with reference to FIG. 7, a method for manufacturing a molded body including the thin film according to the present embodiment will be described by taking as an example a case where a thin film is formed on the inner surface of the plastic container 11 as a molded body. In the method of manufacturing a molded body including a thin film according to the present embodiment, a gas containing carbon as a source gas is brought into contact with the composite heating element 18 that generates heat at 1800 ° C. or more, and the source gas is decomposed to generate a chemical species 34. Then, the thin film is formed by allowing the chemical species 34 to reach the surface of the molded body (in FIG. 7, the plastic container 11).

(Attaching the molded product to the film deposition system)
First, a vent (not shown) is opened to open the vacuum chamber 6 to the atmosphere. A plastic container 11 as a molded body is inserted into the reaction chamber 12 from the upper opening of the lower chamber 13 with the upper chamber 15 removed. Thereafter, the positioned upper chamber 15 is lowered, and the source gas supply pipe 23 attached to the upper chamber 15 and the composite heating element 18 fixed thereto are inserted into the plastic container 11 from the mouth portion 21 of the plastic container. Then, the upper chamber 15 is brought into contact with the lower chamber 13 via the O-ring 14, whereby the reaction chamber 12 is made a sealed space. At this time, the distance between the inner wall surface of the lower chamber 13 and the outer wall surface of the plastic container 11 is kept substantially uniform, and the distance between the inner wall surface of the plastic container 11 and the composite heating element 18 is also substantially equal. It is kept uniform.

(Pressure adjustment process)
Next, after closing the vent (not shown), the exhaust pump (not shown) is operated and the vacuum valve 8 is opened, whereby the air in the reaction chamber 12 is exhausted. At this time, not only the internal space of the plastic container 11 but also the space between the outer wall surface of the plastic container 11 and the inner wall surface of the lower chamber 13 is evacuated and evacuated. That is, the entire reaction chamber 12 is exhausted. The pressure in the reaction chamber 12 is preferably reduced until it reaches a required pressure, for example, 1.0 to 100 Pa. More preferably, it is 1.4-50 Pa. If it is less than 1.0 Pa, exhaust time may be required. Moreover, when it exceeds 100 Pa, impurities may increase in the plastic container 11, and a container having a high barrier property may not be obtained. When the pressure is reduced to reach 1.4 to 50 Pa from atmospheric pressure, an appropriate residual water vapor pressure derived from the atmosphere, the device and the container can be obtained together with an appropriate vacuum pressure, and a thin film having a barrier property can be easily obtained. Can be formed.

(Film formation process-Energizing the composite heating element)
Next, the composite heating element 18 is heated by, for example, energization. The heating temperature of the composite heating element 18 is 1800 ° C. or higher. More preferably, it is 1900 degreeC. If it is less than 1800 degreeC, source gas cannot be decomposed | disassembled efficiently, but film formation takes time and is inferior to work efficiency. The upper limit value of the heating temperature of the composite heating element 18 varies depending on the material of the resistance heating element 2A and the source gas contact portion 3A. For example, the material of the resistance heating element 2A is rhenium, and the material of the source gas contact portion 3A is tantalum. In some cases, the upper limit of the heat generation temperature of the composite heating element 18 is preferably 2300 ° C, and more preferably 2200 ° C.

(Film formation process-introduction of source gas)
Thereafter, a gas containing carbon is supplied as the source gas 33. The gas containing carbon is, for example, an organosilane compound. Examples of the organic silane compound include vinyl silane (H ₃ SiC ₂ H ₃ ), disilabutane (H ₃ SiC ₂ H ₄ SiH ₃ ), disilylacetylene (H ₃ SiC ₂ SiH ₃ ), 2-aminoethylsilane (H _3). SiC ₂ H ₄ NH ₂ ). Of these, vinylsilane, disilabutane, or disilylacetylene is preferable. By using these organosilane compounds as the source gas 33, a SiOC thin film having gas barrier properties can be formed as a thin film. The obtained SiOC thin film can have a barrier property improvement rate (Barrier Improvement Factor, hereinafter referred to as BIF) obtained by (Equation 1) of 6 or more. As a specific example, a 500 ml PET bottle (a bottle made of polyethylene terephthalate, hereinafter also referred to as a PET bottle) (height 133 mm, trunk outer diameter 64 mm, mouth outer diameter 24.9 mm, mouth inner diameter 21.4 mm) The oxygen permeability can be 0.0058 cc / container / day or less at a wall thickness of 300 μm and a resin amount of 29 g). In a 720 ml PET bottle, the oxygen permeability can be 0.0082 cc / container / day or less.
(Equation 1) BIF = [Oxygen permeability of molded body without thin film] / [Oxygen permeability of molded body with thin film]

  The raw material gas 33 is supplied after the flow rate is controlled by the gas flow rate regulator 24a. Further, the carrier gas is mixed with the source gas 33 before the valve 25c while the flow rate of the carrier gas is controlled by the gas flow rate regulator 24b as necessary. The carrier gas is an inert gas such as argon, helium or nitrogen. Then, the source gas 33 is supplied to the source gas supply pipe 23 in the plastic container 11 whose pressure is reduced to a predetermined pressure in a state where the flow rate is controlled by the gas flow rate regulator 24a or in a state where the flow rate is controlled by the carrier gas. The gas is blown out toward the composite heating element 18 that has generated heat from the gas blowing holes 17x. Thus, it is preferable to start spraying the raw material gas 33 after the heating of the composite heating element 18 is completed. From the initial stage of film formation, the chemical species 34 sufficiently activated by the composite heating element 18 can be generated, and a film having a high gas barrier property can be obtained.

  When the source gas 33 is a liquid, it can be supplied by a bubbling method. The bubbling gas used for the bubbling method is, for example, an inert gas such as nitrogen, argon, or helium, and nitrogen gas is more preferable. That is, when the starting material 41a in the material tank 40a is bubbled using a bubbling gas while controlling the flow rate with the gas flow rate regulator 24a, the starting material 41a is vaporized and taken into the bubbles. Thus, the source gas 33 is supplied in a state of being mixed with the bubbling gas. Further, the carrier gas is mixed with the raw material gas 33 in front of the valve 25c while controlling the flow rate with the gas flow rate regulator 24b. Then, the raw material gas 33 is directed toward the composite heating element 18 that generates heat from the gas blowing hole 17x of the raw material gas supply pipe 23 in the plastic container 11 whose pressure is reduced to a predetermined pressure while the flow rate is controlled by the carrier gas. And blown out. Here, the flow rate of the bubbling gas is preferably 3 to 50 sccm, and more preferably 5 to 15 sccm. The flow rate of the carrier gas is not particularly limited, but is preferably 0 to 80 sccm. More preferably, it is 5-50 sccm. The pressure in the plastic container 11 can be adjusted to 20 to 80 Pa depending on the flow rate of the carrier gas.

(Film formation process-film formation)
When the source gas 33 comes into contact with the composite heating element 18, a chemical species 34 is generated. The chemical species 34 reaches the inner wall of the plastic container 11 to deposit a thin film. The time during which the composite heating element 18 is heated in the film formation step and the source gas is sprayed onto the composite heating element 18 (hereinafter sometimes referred to as film formation time) is preferably 1.0 to 20 seconds, and more preferably. Is 1.0 to 8.5 seconds. The pressure in the vacuum chamber during film formation is preferably reduced until it reaches, for example, 1.0 to 100 Pa. More preferably, it is 1.4-50 Pa.

  The thickness of the thin film is not particularly limited. For example, when the thin film is a SiOC thin film, it is preferably 5 to 200 nm and more preferably 10 to 100 nm in order to obtain an effect of improving gas barrier properties. .

(Finish film formation)
When the thin film reaches a predetermined thickness, the supply of the raw material gas 33 is stopped, the inside of the reaction chamber 12 is exhausted again, and a leak gas (not shown) is introduced to bring the reaction chamber 12 to atmospheric pressure. Thereafter, the upper chamber 15 is opened and the plastic container 11 is taken out.

  According to the experiments conducted by the present inventors, the resistance heating element and the raw material gas contact portion are not separately formed, but the heating element integrally formed of the same material (for example, a tantalum wire having a diameter of 0.5 mm) is used. When a thin film was formed using vinylsilane as a source gas, sufficient catalytic activity was not exhibited when continuous film formation was performed 30 times. As a result, the gas barrier thin film could not be deposited. At this time, when the constituent elements on the surface of the heating element were subjected to X-ray electron spectroscopy analysis (hereinafter sometimes referred to as XPS analysis), it was confirmed that the surface of the heating element was carbonized. In contrast, the composite heating element 1A according to the first embodiment is a composite heating element in which the resistance heating element 2A is a rhenium wire having a diameter of 0.5 mm and the source gas contact portion 3A is a tantalum wire having a diameter of 0.1 mm. Using the body 1A and forming a thin film using vinylsilane as a source gas, it was confirmed that continuous film formation of 10,000 times or more was possible. Here, the continuous film formation of 10,000 times or more means that the film formation apparatus for forming the film one by one on the formed body as shown in FIG. A series of film forming operations up to “end” is defined as one time and is repeated 10,000 times or more. Further, in the film forming apparatus for sequentially forming a film while moving the formed body by a conveyor as shown in FIG. 12 of Patent Document 1, the number of formed bodies that have passed in front of an arbitrary source gas supply pipe is 10,000 or more. It means that.

  Although the method for forming the thin film on the inner surface of the plastic container has been described, the thin film can be formed on the outer surface of the plastic container using, for example, a film forming apparatus shown in FIG. .

  Although the aspect which a molded object is a plastic container has been demonstrated, this invention is not limited to this, A molded object can be made into a film or a sheet | seat.

  Next, although an example of the present invention is given and explained, the present invention is not limited to these examples.

Example 1
FIG. 7 shows the inner surface of a 500 ml plastic bottle (height 133 mm, body outer diameter 64 mm, mouth outer diameter 24.9 mm, mouth inner diameter 21.4 mm, wall thickness 300 μm, resin amount 29 g) as a molded body. The SiOC thin film was formed using the film-forming apparatus. The PET bottle was accommodated in the vacuum chamber 6 and decompressed until it reached 1.0 Pa. Next, two composite heating elements 18 were used, and 24 V of direct current was applied to the composite heating element 18 to generate heat at 2000 ° C. As the composite heating element 18, the composite heating element 1A according to the first embodiment shown in FIG. 1 was used. That is, the resistance heating element 2A is a rhenium wire having a diameter of 0.5 mm and a length of 44 cm, the source gas contact portion 3A is a tantalum wire having a diameter of 0.1 mm and a length of 5000 mm, and the source gas contact portion 3A is formed on the outer surface of the resistance heating element 2A. Was used which was spirally wound. Next, vinylsilane was supplied as a source gas 33 from the gas flow controller 24a so that the flow rate was 50 sccm, and a gas barrier thin film was deposited on the inner surface of the PET bottle. Thereafter, the supply of the raw material gas 33 was stopped, and the reaction chamber 12 was evacuated again. Then, a leak gas was introduced, the reaction chamber 12 was brought to atmospheric pressure, the upper chamber 15 was opened, and the plastic container 11 was taken out. The film thickness was 20 nm. The film thickness is a value measured using a stylus type step meter (model: α-step, manufactured by KLA-Eten). Here, the piping from the gas flow rate regulators 24a and 24b to the gas supply port 16 was composed of 1/4 inch piping made of alumina. The pressure during film formation was 5.0 Pa. The film formation time was 6 seconds.

(Example 2)
Regarding the composite heating element 18, the resistance heating element 2A is a C / C composite wire having a diameter of 0.5 mm and a length of 44 cm, and the source gas contact portion 3A is a tantalum wire having a diameter of 0.1 mm and a length of 5000 mm. A film forming operation was performed in the same manner as in Example 1 except that the surface was changed to a material gas contact portion 3A spirally wound around the surface.

Example 3
Regarding the composite heating element 18, the resistance heating element 2A is made of iridium wire having a diameter of 0.5 mm and a length of 44 cm, the source gas contact portion 3A is made of tungsten wire having a diameter of 0.1 mm and a length of 5000 mm, and the raw material is formed on the outer surface of the resistance heating element 2A. The film forming operation was performed in the same manner as in Example 1 except that the gas contact part 3A was changed to a spirally wound one.

Example 4
Regarding the composite heating element 18, the resistance heating element 2A is a rhodium wire having a diameter of 0.5 mm and a length of 44 cm, the source gas contact portion 3A is a molybdenum wire having a diameter of 0.1 mm and a length of 5000 mm, and the raw material is formed on the outer surface of the resistance heating element 2A. The film forming operation was performed in the same manner as in Example 1 except that the gas contact part 3A was changed to a spirally wound one.

(Example 5)
Regarding the composite heating element 18, the resistance heating element 2A is a silicon carbide wire having a diameter of 0.5 mm and a length of 44 cm, and the source gas contact portion 3A is a tantalum-iridium alloy having a diameter of 0.1 mm and a length of 5000 mm (tantalum content 95% by mass). The film forming operation was performed in the same manner as in Example 1 except that the line was changed to a spirally wound material gas contact portion 3A around the outer surface of the resistance heating element 2A.

(Example 6)
Regarding the composite heating element 18, the resistance heating element 2A is made of molybdenum disilicide wire having a diameter of 0.5 mm and a length of 44 cm, the source gas contact portion 3A is made of a tungsten-rhenium alloy having a diameter of 0.1 mm and a length of 5000 mm (tungsten content 95 mass%). ) The film forming operation was performed in the same manner as in Example 1 except that the line was changed to a spirally wound source gas contact portion 3A around the outer surface of the resistance heating element 2A.

(Example 7)
Regarding the composite heating element 18, the resistance heating element 2A is a rhenium wire having a diameter of 0.5 mm and a length of 44 cm, and the source gas contact portion 3A is a molybdenum-gold alloy (molybdenum content 95 mass%) wire having a diameter of 0.1 mm and a length of 5000 mm. The film forming operation was performed in the same manner as in Example 1 except that the material gas contact portion 3A was spirally wound around the outer surface of the resistance heating element 2A.

(Example 8)
With respect to the composite heating element 18, the resistance heating element 2A is a rhenium wire having a diameter of 0.5 mm and a length of 44 cm, and the source gas contact portion 3A is a tantalum carbide wire having a diameter of 0.1 mm and a length of 5000 mm on the outer surface of the resistance heating element 2A. The film forming operation was performed in the same manner as in Example 1 except that the source gas contact portion 3A was changed to a spirally wound one. The tantalum carbide was produced by winding a resistance heating element 2A in a propane gas atmosphere after winding a tantalum wire around the resistance heating element 2A.

Example 9
Regarding the composite heating element 18, the resistance heating element 2A is a rhenium wire having a diameter of 0.5 mm and a length of 44 cm, and the source gas contact portion 3A is a tungsten carbide wire having a diameter of 0.1 mm and a length of 5000 mm on the outer surface of the resistance heating element 2A. The film forming operation was performed in the same manner as in Example 1 except that the source gas contact portion 3A was changed to a spirally wound one. Tungsten carbide was produced by winding a resistance wire 2A in a propane gas atmosphere after winding a tungsten wire around the resistance heater 2A.

(Example 10)
Regarding the composite heating element 18, the resistance heating element 2A is made of rhenium wire having a diameter of 0.5 mm and a length of 44 cm, and the source gas contact portion 3A is made of molybdenum carbide wire having a diameter of 0.1 mm and a length of 5000 mm on the outer surface of the resistance heating element 2A. The film forming operation was performed in the same manner as in Example 1 except that the source gas contact portion 3A was changed to a spirally wound one. Molybdenum carbide was prepared by winding a resistance wire 2A in a propane gas atmosphere after winding a molybdenum wire around the resistance heater 2A.

(Example 11)
The film forming operation was performed in the same manner as in Example 1 except that the composite heating element 18 was changed to the composite heating element 1B according to the second embodiment shown in FIG. In the composite heating element 1B according to the second embodiment, the resistance heating element 2B is made of rhenium wire having a diameter of 0.5 mm and a length of 44 cm, and the source gas contact part 3B is made of a tantalum film having a thickness of 0.1 mm. What coat | covered the outer surface with the source gas contact part 3B was used. The tantalum film was formed by a clad wire method.

(Example 12)
The film forming operation was performed in the same manner as in Example 1 except that the composite heating element 18 was changed to the composite heating element 1C according to the third embodiment shown in FIG. The composite heating element 1C according to the third embodiment is a resistance heating element in which the resistance heating element 2C is a C / C composite wire having a diameter of 0.5 mm and a length of 44 cm, and the source gas contact portion 3C is tantalum particles having an average particle diameter of 50 nm. What fixed the particle | grains of the raw material gas contact part 3C to the outer surface of 2C was used. The tantalum particles were fixed as follows. That is, tantalum particles are collided with the outer surface of the resistance heating element 2C by a shot peening machine (model FDD-11RBDT-20-701, manufactured by Fuji Seisakusho), and the particles of the source gas contact portion 3C are contacted with the outer surface of the resistance heating element 2B. Was fixed.

(Example 13)
The film forming operation was performed in the same manner as in Example 1 except that the composite heating element 18 was changed to the composite heating element 1D according to the fourth embodiment shown in FIG. In the composite heating element 1D according to the fourth embodiment, the resistance heating element 2D is a rhenium wire having a diameter of 0.5 mm and a length of 44 cm, and the source gas contact portion 3D is 0.01 mm in thickness, 10 mm in width, and 120 cm in length. As described above, a material in which the source gas contact portion 3D is wound around the outer surface of the resistance heating element 2D is used.

(Example 14)
The film forming operation was performed in the same manner as in Example 1 except that the composite heating element 18 was changed to the composite heating element 1E according to the modification of the second embodiment shown in FIG. A composite heating element 1E according to a modification of the second embodiment is the same as in Example 11 except that the resistance heating element 2E has an elliptical cross-sectional shape, an elliptical average major axis of 1.0 mm, an average minor axis of 0.25 mm, and a side surface. This was formed in the same manner as in Example 11 except that a rhenium wire having a length of 44 cm was used.

(Example 15)
The film forming operation was performed in the same manner as in Example 1 except that the composite heating element 18 was changed to the composite heating element 1F according to the modification of the fourth embodiment shown in FIG. A composite heating element 1F according to a modification of the fourth embodiment is the same as that of Example 13 except that the resistance heating element 2F has a rectangular cross-sectional shape, an elliptical long side of 0.6 mm, a short side of 0.3 mm, and a side length. It was formed in the same manner as Example 13 except that a rhenium wire having a thickness of 44 cm was used.

(Comparative Example 1)
The film forming operation was carried out in the same manner as in Example 1 except that instead of the composite heating element 18, a resistance heating element and a source gas contact portion were integrally formed of the same material. A tantalum wire having a diameter of 0.5 mm and a length of 44 mm was used as the heating element.

(Comparative Example 2)
The film forming operation was performed in the same manner as in Example 1 except that a tungsten wire having a diameter of 0.5 mm and a length of 44 mm was used as the heating element instead of the composite heating element 18.

(Comparative Example 3)
A film forming operation was performed in the same manner as in Example 1 except that a molybdenum wire having a diameter of 0.5 mm and a length of 44 mm was used as the heating element instead of the composite heating element 18.

(Number of times of continuous film formation)
The film forming operation described in Example 1 was repeatedly performed under the same conditions, and the oxygen permeability of the PET bottle with the film formed was a half of the reference value with the oxygen permeability of the PET bottle with no thin film formed as a reference value. When reaching the stage exceeding the above, it was judged that the electric resistance was lowered due to carbonization deterioration and the film formation was impossible, and the number of repetitions at that time was recorded as the number of film formation possible. Oxygen permeability was measured under the conditions of 23 ° C. and 90% RH using an oxygen permeability measuring device (model: Oxtran 2/20, manufactured by Modern Control), conditioned for 24 hours from the start of measurement, and then started measurement. The value after 72 hours had passed. The PET bottles formed by the film forming operations of Examples 1 to 15 and Comparative Examples 1 to 3 all decreased to 1/10 or less of the reference value in the first film forming operation.

  In each of Examples 1 to 15, the number of continuous film formations allowed exceeded 10,000 times. On the other hand, in Comparative Example 1, the number of continuous film formations was 30 times, in Comparative Example 2 was 26 times, and in Comparative Example 3 was 23 times, and the number of continuous film formations was much lower than in Examples 1-10.

1A-1F Composite heating element 2A-2F Resistance heating element 2F1, 2F2 Side face 2F3, 2F4 End face 3A-3F Raw material gas contact part 4A Return part 6 Vacuum chamber 8 Vacuum valve 11 Plastic container 12 Reaction chamber 13 Lower chamber 14 O-ring 15 Upper part Chamber 16 Gas supply port 17 Raw material gas flow path 17x Gas blowout hole 18 Composite heating element 19 Wiring 20 Heater power source 21 Plastic container port 22 Exhaust pipe 23 Raw material gas supply pipes 24a and 24b Gas flow rate regulators 25a to 25c Valve 26a, 26b connecting portion 33 source gas 34 chemical species 35 lotus root type member 40a source tank 41a starting material 51 center hole 52 guide hole 100 heating element CVD apparatus

Claims (10)

A linear resistance heating element mainly composed of carbon, rhenium, iridium, rhodium, silicon carbide or molybdenum disilicide;
A source gas contact portion disposed on the outer surface of the resistance heating element,
Raw material gas contact portion, Ri decomposition unit der decompose the heating element CVD method material gas,
The composite heating element, wherein the source gas contact portion is a wire, and is spirally wound around the outer surface of the resistance heating element. A linear resistance heating element mainly composed of carbon, rhenium, iridium, rhodium, silicon carbide or molybdenum disilicide;
A source gas contact portion disposed on the outer surface of the resistance heating element,
The source gas contact part is a decomposition part that decomposes the source gas of the heating element CVD method,
The composite heating element, wherein the source gas contact portion has a grain shape and is fixed to an outer surface of the resistance heating element. A linear resistance heating element mainly composed of carbon, rhenium, iridium, rhodium, silicon carbide or molybdenum disilicide;
A source gas contact portion disposed on the outer surface of the resistance heating element,
The source gas contact part is a decomposition part that decomposes the source gas of the heating element CVD method,
The composite heating element, wherein the source gas contact portion is a foil material and is wound around the outer surface of the resistance heating element. 2. The source gas contact portion is mainly composed of at least one of tantalum, tungsten, molybdenum, tantalum-based alloy, tungsten-based alloy, molybdenum-based alloy, tantalum carbide, tungsten carbide, and molybdenum carbide. The composite heating element as described in any one of -3 . The composite heating element according to any one of claims 1 to 4 , wherein a cross-sectional shape of the resistance heating element is a flat shape. The outer surface of the resistance heating element, rhenium oxide, zirconium oxide, magnesium oxide, silicon dioxide, one or more of claims 1-5, wherein the coating process of tantalum carbide or tungsten carbide is the surface is A composite heating element as described in 1. The composite heating element according to any one of claims 1 to 6 is heated to 1800 ° C or higher,
Febrile by contacting a raw material gas containing carbon to the heating element, by decomposing the raw material gas to produce a chemical species, characterized that you form a thin film by reaching the chemical species on the surface of the molded body The manufacturing method of a molded object provided with a thin film. A vacuum chamber;
An exhaust pump for evacuating the internal gas in the vacuum chamber;
A source gas supply pipe disposed in the vacuum chamber and having a gas blowing hole;
Heating element CVD apparatus characterized by comprising a composite heating element according to any one of claims 1-7. The gas blowing hole is provided at least at the tip of the source gas supply pipe;
The source gas supply pipe includes a lotus root type member having a center hole that is fitted around the distal end portion on the gas blowing hole side and a plurality of guide holes provided around the center hole,
The heating element CVD apparatus according to claim 8 , wherein the composite heating element is supported through the guide hole. The heating element CVD apparatus according to claim 8 or 9 , wherein the composite heating element has a return portion in front of the gas blowing hole.

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