JP6060432B2 - Surface treatment equipment - Google Patents

Description

  The present invention relates to a surface treatment apparatus. In particular, the present invention relates to a surface treatment apparatus suitable for performing a surface treatment on the surface of a tubular body such as a tube or a belt.

  Conventionally, surface treatments such as sputtering treatment for forming a metal film, blast treatment used for pretreatment such as anticorrosion coating, and coating treatment are performed on the surface of the member. Various apparatuses for performing such a surface treatment are known. For example, Patent Document 1 discloses an apparatus for forming a metal film by performing a sputtering process on the surface of a tubular body such as a tube or a belt. There is a device.

  The apparatus disclosed in Patent Document 1 forms a metal film on the surface of a spiral tube by sputtering. As shown in FIG. 12, a large number of tube holding shafts 101 are placed on a rotating disk 100 in a circular shape. Standing up at predetermined intervals in the circumferential direction, the spiral tube 102 is inserted into each tube holding shaft 101 in an interference fit shape and supported vertically, and the spiral tube 102 is rotated while revolving to rotate. A metal film is formed on the surface.

JP 2001-286027 A

  However, in the case of the surface treatment apparatus as described above, the metal formed on the surface of the spiral tube 102 due to the influence of the positional relationship between the target 103 for scattering the metal particles and the spiral tube 102 inserted through the tube holding shaft 101. There was a problem that the film thickness of the film varied. The apparatus shown in FIG. 12 has a problem that the film thickness of the metal film at the center of the spiral tube 102 inserted through the tube holding shaft 101 is increased while the film thickness of the upper and lower ends is decreased. It was.

  In order to solve such a problem, it is possible to cope by traversing the tube holding shaft 101 along its axial direction, but it is necessary to further include a traverse mechanism as a device configuration, which increases the size of the device. At the same time, a new problem arises that the device configuration becomes complicated.

  The present invention has been made in order to solve such a problem, and effectively reduces variation when performing surface treatment on the surface of a tubular body such as a tube or a belt, thereby efficiently performing the surface treatment. An object of the present invention is to provide a surface treatment apparatus capable of performing treatment.

The object of the present invention is a surface treatment apparatus for performing a surface treatment on the surface of a cylindrical body, the first rotating means for holding the cylindrical body and rotating it in the circumferential direction, and the first A second rotating means for rotating the first rotating means with the direction different from the axial direction of the rotating axis of the cylindrical body by the rotating means as the axial direction of the rotating axis, and a surface treatment material toward the surface of the cylindrical body And a rotation axis of the cylindrical body by the first rotation means and a rotation axis of the first rotation means by the second rotation means are arranged on the same plane. This is achieved by a surface treatment apparatus characterized by being absent .

  Further, in this surface treatment apparatus, the rotation axis of the cylindrical body by the first rotation means and the rotation axis of the first rotation means by the second rotation means are configured to be substantially orthogonal to each other, It is preferable that the discharge portion is disposed at a position where the discharge center of the surface treatment material does not overlap the rotation axis of the first rotation means by the second rotation means.

  The first rotating means preferably includes a plurality of rollers that stretch the cylindrical body, and the cylindrical body is preferably rotated along the circumferential direction by the rotation of the roller.

  Moreover, it is preferable to provide a gear mechanism for transmitting the rotation by the second rotating means as the rotation of the first rotating means.

Further, a gear mechanism for transmitting the rotation by the second rotation means as the rotation of the first rotation means is provided, and the gear mechanism has a rotation axis of the first rotation means by the second rotation means as a central axis. A ring gear arranged; a first gear rotatably supported by the first rotating means; and meshed with the ring gear; and a position spaced apart from the first gear by a predetermined distance in the rotational axis direction of the first gear. A second gear supported so as to be integrally rotatable with respect to the first gear, a third gear provided so as to be integrally rotatable with respect to one of the plurality of rollers, and orthogonal to a rotation axis of the one roller A fourth gear that is rotatably supported around the rotation axis and meshes with the third gear, and is positioned relative to the fourth gear at a position spaced apart from the fourth gear in the direction of the rotation axis of the fourth gear. Is the body rotatably supported, it is preferable to provide a fifth gear is engaged to said second gear.

  ADVANTAGE OF THE INVENTION According to this invention, the surface treatment apparatus which can reduce the dispersion | variation at the time of performing a surface treatment with respect to the surfaces of cylindrical bodies, such as a tube and a belt, and can perform a surface treatment efficiently is provided. it can.

It is a schematic structure sectional view showing the surface treatment apparatus concerning the present invention. It is AA sectional drawing of the surface treatment apparatus shown in FIG. It is BB sectional drawing of the surface treatment apparatus shown in FIG. It is a side view of the support frame which the 1st rotation means in a holding drive means has. It is a front view of the support frame which the 1st rotation means in a holding drive means has. It is explanatory drawing which shows the state which stretched the cylindrical body between each roller. It is a schematic diagram for demonstrating the action | operation of the surface treatment apparatus shown in FIG. It is a front view which shows the modification of the holding | maintenance drive means which the surface treatment apparatus shown in FIG. 1 has. It is a rear view which shows the modification of the holding | maintenance drive means which the surface treatment apparatus shown in FIG. 1 has. It is schematic structure sectional drawing which shows the modification of the surface treatment apparatus which concerns on this invention. It is a front view of the holding | maintenance drive means which the surface treatment apparatus shown in FIG. 10 has. It is explanatory drawing which shows a prior art example.

  Hereinafter, a surface treatment apparatus 1 according to an embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a schematic sectional view showing a surface treatment apparatus 1 according to the present invention. 2 is a cross-sectional view taken along the line AA in FIG. 1, and FIG. 3 is a cross-sectional view taken along the line BB in FIG. Each drawing is partially enlarged or reduced to facilitate understanding of the configuration, not the actual size ratio.

  The surface treatment apparatus 1 according to the present invention is an apparatus that performs surface treatment on the surface of a cylindrical body such as a belt or a tube. Specific examples of the surface treatment include surface treatment such as sputtering treatment for forming a metal film, blast treatment used for pretreatment such as anticorrosion coating, and coating treatment. The surface treatment apparatus 1 shown in FIGS. 1 to 3 is configured as a sputtering apparatus for performing a sputtering treatment on the surface of a cylindrical body. As shown in FIGS. 1 to 3, the surface treatment apparatus 1 includes a chamber 2 having an internal space, a holding drive unit 3, and a discharge unit 4.

  The chamber 2 is provided with a suction port (not shown) connected to a vacuum pump, and an introduction port (not shown) for introducing an inert gas such as argon or nitrogen as a process gas into the chamber 2. ) Is provided. In addition, a discharge portion 4 is placed on the bottom of the chamber 2. The discharge part 4 discharges the surface treatment material toward the surface of the cylindrical body. In this embodiment, the discharge part 4 is for sputtering made of a coating metal such as Au, Ag, Ni, Cr, Ti, SUS. The target is the discharge part 4. This sputtering target is separately connected to an electrode (not shown), and after the inside of the chamber 2 is evacuated, a DC high voltage between the sputtering target and the electrode is applied while introducing a process gas (inert gas). Thus, the cationized gas molecules collide with the metal surface of the sputtering target at high speed, and the negatively charged metal particles (surface treatment material) are scattered. The scattered metal particles adhere to the surface of the cylindrical body held by the holding drive means 3 to form a metal film.

  The holding driving means 3 is a device for rotating and driving a cylindrical body such as a belt or a tube, and includes a first rotating means 5 and a second rotating means 6 as shown in FIGS. ing. The 1st rotation means 5 is an apparatus arrange | positioned inside the chamber 2, and is an apparatus for hold | maintaining a cylindrical body and rotating it along the circumferential direction. The first rotating means 5 includes a support frame 51 and a plurality of rollers 52 (in this embodiment, a total of four rollers 52) that stretch the cylindrical body. Each roller 52 is rotatably supported by the support frame 51.

  As shown in the side view of FIG. 4 and the front view of FIG. 5, the support frame 51 includes a bottom plate 511, a plurality of support columns 512, and an upper plate 513. Each column 512 is arranged so as to stand at a predetermined interval on one side edge 511 a (first side edge 511 a) of the bottom plate 511, and at the upper end of each column 512, the upper plate 513 is connected to both end positions of one side edge 513a. The top plate 513 and the bottom plate 511 are configured to be parallel to each other in a side view. The structure including the bottom plate 511, the support column 512, and the top plate 513 thus configured has a U-shape when viewed from the side. Further, as shown in FIG. 3, the upper plate 513 has a side edge (second side) in a direction perpendicular to one side edge 511a (first side edge 511a) of the bottom plate 511 on which the support column 512 is erected. The edge portion 511b and the third side edge portion 511c) are arranged so as to be offset from one side. In the present embodiment, the upper plate 513 is arranged in a form close to the second side edge 511b side.

  The bottom plate 511 of the support frame 51 is provided with a plurality of roller support portions 514 that can rotatably support the rollers 52. These roller support portions 514 include one side edge (first side edge 511a) of the bottom plate 511 on which the support column 512 is disposed, and the side edge of the bottom plate 511 facing the first side edge 511a. It arrange | positions at (4th side edge part 511d). The roller support portions 514 disposed on the first side edge portion 511a side are provided on both sides of the support columns 512 and 512, respectively. The height of these roller support portions 514 is configured to be lower than the height of the support column 512 erected on the bottom plate 511.

  These roller support portions 514 are provided with bearing portions that rotatably support both end portions of each roller 52. Each bearing portion is provided at a position where two rollers 52 can be arranged side by side in the vertical direction on each of the second side edge portion 511b side and the third side edge portion 511c side of the bottom plate 511. Each roller 52 is arranged so that the axis directions of its rotation shafts are parallel to each other. Further, as shown in FIG. 2, each roller 52 is supported by a roller support portion 514 so as to be rotatable outside the second side edge portion 511b and the third side edge portion 511c of the bottom plate 511. . Further, regarding the arrangement position of each roller 52, when the cylindrical body is stretched between the rollers 52, the bottom plate 511 is disposed inside the cylindrical body Z as shown in FIG. To do.

  In the first rotating means 5 configured as described above, the structure including the bottom plate 511, the support column 512, and the top plate 513 has a U-shape when viewed from the side as shown in the side view of FIG. In addition, since the height of the roller support portion 514 provided on the bottom plate 511 is configured to be lower than the height of the support column 512, the cylinder is formed from the fourth side edge 511d side of the bottom plate 511. The cylindrical body can be stretched around each roller 52 in such a manner that the rollers 52 are arranged inside the expanded state. Further, after the tubular body is stretched around each roller 52, at least one of the plurality of rollers 52 is rotationally driven, whereby the tubular body is rotated along the circumferential direction thereof. Various mechanisms can be adopted as the mechanism for rotationally driving at least one of the plurality of rollers 52. For example, it is possible to provide a driving means that is connected to the shaft of an arbitrary roller 52 and rotationally drives the shaft. Alternatively, it is possible to provide a gear mechanism that transmits the rotation of the second rotating means 6 as the rotation of the first rotating means 5. A configuration including such a gear mechanism will be described later.

  The second rotating means 6 rotates in a direction different from the axial direction of the axis of rotation of the cylindrical body by the first rotating means 5 (the line indicated by L1 in FIG. 3 and indicated by the x mark in FIG. 6). This is a device for rotating the first rotating means 5 in the axial direction of the axis, and the rotational driving shaft body 61 having one end connected to the upper plate 513 of the support frame 51 in the first rotating means 5 and the rotational driving shaft body 61 And a driving device 62 for rotating around the axis. The rotation axis of the first rotating means 5 by the second rotating means 6 is indicated by L2 in FIGS. The rotational drive shaft 61 is inserted into the chamber 2 through a through hole 22 provided in the ceiling wall 21 of the chamber 2, and the distal end is connected at the center of the upper plate 513 of the support frame 51. doing. The through hole 22 provided in the ceiling wall 21 of the chamber 2 is provided with a bearing portion that can rotatably support the rotary drive shaft body 61, and the first rotating means 5 is the same as the second rotating means 6. The rotary drive shaft 61 is suspended. A drive device 62 for rotating the rotary drive shaft body 61 is disposed outside the chamber 2.

  With such a configuration of the second rotation means 6, the rotation axis L <b> 2 of the rotation drive shaft body 61 included in the second rotation means 6 is substantially orthogonal to the rotation axis L <b> 1 of the cylindrical body formed by the first rotation means 5. It is configured as follows. Further, the upper plate 513 in the support frame 51 of the first rotating means 5 is arranged in a form close to the second side edge 511b side of the bottom plate 511. Further, the rotation axis L2 of the second rotating means 6 is provided. Is configured to pass through the center of the upper plate 513, so that the rotation axis L1 of the cylindrical body by the first rotation means 5 and the rotation axis L2 of the first rotation means 5 by the second rotation means 6 are , And are not arranged on the same plane. In addition, in the 1st rotation means 5, unless the rotation axis L1 of the cylindrical body by the 1st rotation means 5 and the rotation axis L2 of the 1st rotation means 5 by the 2nd rotation means 6 are arrange | positioned on the same plane. The connection position of the rotation drive shaft body 61 in the second rotation means 6 with respect to the upper plate 513 may be changed as appropriate.

  Here, it is about the position where the discharge part 4 that discharges the surface treatment material provided for performing the surface treatment of the cylindrical body is disposed, but toward the surface of the cylindrical body held by the first rotating means 5. The surface treatment material (in this embodiment, the scattered metal particles) is not particularly limited as long as it is a position where it can be efficiently released and adhered, but as shown in FIG. 3 and FIG. In the present embodiment, the surface treatment material discharge center 4a by the sputtering target) does not overlap the rotation axis L2 of the first rotation unit 5 by the second rotation unit 6 (the center position of the discharge unit 4 is the second position). It is preferable to arrange the discharge portion 4 so as to be at a position different from the axis of the rotation drive shaft body 61 of the rotation means 6. The discharge part 4 may be arranged so that the discharge center of the surface treatment material by the discharge part 4 is on the rotation axis L <b> 2 of the second rotating means 6. Moreover, in this embodiment, although comprised so that the single discharge | release part 4 may be provided, you may comprise so that the several discharge | release part 4 may be provided.

  The surface treatment apparatus 1 according to the present invention rotates in a direction different from the axial direction of the rotation axis of the cylindrical body by the first rotating means 5 and the first rotating means 5 that rotates the cylindrical body along its circumferential direction. The second rotating means 6 is configured to rotate the first rotating means 5 in the axial direction of the shaft. With such a configuration, it is possible to rotate the cylindrical body so as to rotate the central axis itself of the cylindrical body while rotating the cylindrical body to be surface-treated around the central axis in the circumferential direction. The surface treatment material discharged from the discharge portion 4 is sprayed (deposited) substantially uniformly over the entire surface of the cylindrical body. As a result, it is possible to effectively reduce the variation in performing the surface treatment on the surface of the cylindrical body, and to efficiently perform the surface treatment (in the present embodiment, the sputtering treatment).

  Further, in the surface treatment apparatus 1 according to the present invention, the rotation axis L1 of the cylindrical body by the first rotation means 5 and the rotation axis L2 of the first rotation means 5 by the second rotation means 6 are the same plane. Since it is configured so as not to be placed on the surface, it is possible to more effectively reduce variation when performing surface treatment on the surface of a tubular body such as a tube or a belt, and to effectively perform surface treatment (this embodiment In the method, sputtering treatment can be performed.

  More specifically, it is assumed that the rotation axis L1 of the cylindrical body by the first rotation means 5 and the rotation axis L2 of the second rotation means 6 are arranged on the same plane (first When the rotation axis L1 of the cylindrical body by the rotation means 5 passes through the rotation axis L2 of the first rotation means 5 by the second rotation means 6), the cylindrical body held by the first rotation means 5 Is a rotational movement by the first rotating means 5 and a rotational movement by the second rotating means 6 within a circular area shown as area A in the schematic diagram of FIG. 7 (corresponding to the BB cross-sectional view of FIG. 1). It will be. On the other hand, as in the present embodiment, when the rotation axis L1 of the cylindrical body by the first rotation means 5 and the rotation axis L2 of the second rotation means 6 are not arranged on the same plane, The cylindrical body held by the rotating means 5 is rotated by the first rotating means 5 and rotated by the second rotating means 6 within a circular area shown as area B in the schematic diagram of FIG. Become. Here, the region A is the rotation axis L2a of the second rotation means 6 when the rotation axis L1 of the cylindrical body by the first rotation means 5 and the rotation axis L2 of the second rotation means 6 are arranged on the same plane. The radius is the distance K1 between the rotation axis L2a of the second rotation means 6 and the most distal portion of the cylindrical body with respect to the rotation axis L2a. Similarly, in the region B, the rotation axis L2b of the second rotation means 6 when the rotation axis L1 of the cylindrical body by the first rotation means 5 and the rotation axis L2 of the second rotation means 6 are not arranged on the same plane. The radius is the distance K2 between the rotation axis L2b of the second rotating means 6 and the most distal portion of the cylindrical body with respect to the rotation axis L2b. As can be seen from FIG. 7, when the rotation axis L1 of the cylindrical body by the first rotation means 5 and the rotation axis L2 of the second rotation means 6 are not arranged on the same plane, they are indicated by hatching. The cylindrical body can be moved (traversed) in the range expanded by the region C. By providing such a traverse function, it is possible to smooth the arrival amount of the surface treatment material discharged from the discharge portion 4 with respect to an arbitrary surface position of the cylindrical body held by the first rotating means 5. In addition, it is possible to effectively reduce the processing variation when the surface treatment is performed on the surface of the cylindrical body, and to perform the efficient surface treatment.

  Further, in the surface treatment apparatus 1 according to the present invention, the discharge center 4a of the surface treatment material by the discharge portion 4 is the axis line of the rotation drive shaft body 61 of the second rotation means 6 (first rotation means by the second rotation means 6). 5 is configured so as not to overlap the rotation axis L2). In this way, the discharge center 4 is discharged from the discharge portion 4 by disposing it so that the discharge center of the surface treatment material by the discharge portion 4 does not overlap the rotation axis L2 of the first rotation means 5 by the second rotation means 6. The surface treatment material is evenly deposited on the end portion of the rotating cylindrical body held by the first rotating means, and the variation in performing the surface treatment on the surface of the cylindrical body is more effectively performed. Can be reduced. In addition, as a result of reducing the variation during the surface treatment, it is possible to make the discharge portion 4 small and to make the device compact.

  As mentioned above, although one Embodiment of the surface treatment apparatus 1 which concerns on this invention was described, a specific structure is not limited to the said embodiment. In the above embodiment, for example, as shown in the front view of the holding drive means 3 shown in FIG. 8 and the rear view of FIG. 9, the arm 7 that is rotatably attached to the roller support portion 514 is provided. A roller 52 is rotatably disposed at one end, and the roller 52 is configured to be rotatable with respect to the support frame 51, and a fixing means (not shown) that fixes the arm 7 at a predetermined position. May be provided.

  By configuring the roller 52 to be rotatable with respect to the support frame 51 as described above, the roller 52 attached to the arm 7 can be moved to the roller 52 side disposed below the roller 52. Therefore, the distance between the roller 52 attached to the arm 7 and the roller 52 arranged below is shortened, and each roller 52 can be smoothly inserted into the cylindrical body. Further, after each roller 52 is inserted inside the cylindrical body, the roller 52 attached to the arm 7 is pulled up so that the cylindrical body is in an optimal state in which no slack or warpage occurs in the cylindrical body. It is possible to apply tension to the roller 52 and to treat the surface of the cylindrical body while preventing variations such as processing unevenness. The arm 7 to which the roller 52 is attached and the roller support portion 514 may be connected via an elastic member such as a spring so that the roller 52 can be moved by the elastic force of the spring.

  In the above-described embodiment, as a mechanism for rotationally driving at least one of the plurality of rollers 52, the gear mechanism 8 that transmits the rotation by the second rotation means 6 as the rotation of the first rotation means 5 is provided. Also good. This gear mechanism 8 includes a ring gear 80 (internal gear), a first gear 81, a second gear 82, as shown in a schematic sectional view of FIG. 10 and a front view of the holding drive means 3 in FIG. A third gear 83, a fourth gear 84, and a fifth gear 85 are provided.

  The ring gear 80 is a gear in which teeth are formed on the inner side of the cylindrical body, and is installed with its outer peripheral surface fixed to the side wall portion of the chamber 2. The ring gear 80 is arranged so that the rotation axis of the first rotation means 5 by the second rotation means 6 is the central axis.

  The gear configuration including the first gear 81 and the second gear 82 is a gear that is rotatably supported by the first rotating means 5. The first gear 81 is a gear meshed with the ring gear 80, and the second gear 82 is relative to the first gear 81 at a position spaced apart from the first gear 81 in the rotational axis direction of the first gear 81. It is a gear that is supported so as to rotate integrally. More specifically, the first gear 81 and the second gear 82 are provided at both ends of the first gear shaft 86, respectively, and between the first gear 81 and the second gear 82 on the first gear shaft 86. And the end portion on the side where the first gear 81 is provided are rotatably supported by bearings. The bearing that supports the first gear shaft 86 is attached to the support frame 51 in the first rotating means 5. The first gear 81 can be a spur gear whose teeth are cut parallel to the axis of the first gear shaft 86, and the second gear 82 can be a fifth gear described later. In order to transmit the power to 85, a bevel gear, a bevel gear, a bevel gear, a miter gear, or the like, which is a conical gear that transmits power between two intersecting axes, can be used.

  The gear configuration including the first gear 81 and the second gear 82 is a gear that is rotatably supported by the first rotating means 5. The first gear 81 is a gear that rotates (spins) by meshing with the ring gear 80 when the first rotating unit 5 rotates (revolves) around the rotation axis L2 of the rotation drive shaft 61 of the second rotating unit 6. The second gear 82 is a gear that is supported so as to be integrally rotatable with respect to the first gear 81 at a position spaced apart from the first gear 81 in the rotational axis direction of the first gear 81. More specifically, the first gear 81 and the second gear 82 are provided at both ends of the first gear shaft 86, respectively, and between the first gear 81 and the second gear 82 on the first gear shaft 86. And the end portion on the side where the first gear 81 is provided are rotatably supported by bearings. The bearing that supports the first gear shaft 86 is attached to the support frame 51 in the first rotating means 5. The first gear 81 can be a spur gear whose teeth are cut parallel to the axis of the first gear shaft 86, and the second gear 82 can be a fifth gear described later. In order to transmit the power to 85, a bevel gear, a bevel gear, a bevel gear, a miter gear, or the like, which is a conical gear that transmits power between two intersecting axes, can be used.

  The third gear 83 is a gear provided so as to be integrally rotatable with respect to one of the plurality of rollers 52, and is provided on an end surface at one end of the one roller 52. The third gear 83 is provided at one end of the roller 52 such that the center of rotation is disposed on the rotation axis of the roller 52 installed. As the third gear 83, a bevel gear, a crown gear, or the like can be used.

  The gear configuration including the fourth gear 84 and the fifth gear 85 is a gear that is rotatably supported by the first rotating means 5. The fourth gear 84 is a gear that is supported so as to be rotatable around a rotation axis perpendicular to the rotation axis of the one roller 52 on which the third gear 83 is provided, and is meshed with the third gear 83. The fifth gear 85 is supported so as to be integrally rotatable with the fourth gear 84 at a position spaced apart from the fourth gear 84 in the rotational axis direction of the fourth gear 84 and meshes with the second gear 82 described above. Gear. More specifically, the fourth gear 84 and the fifth gear 85 are provided at both ends of the second gear shaft 87, respectively, and between the fourth gear 84 and the fifth gear 85 in the second gear shaft 87. Are rotatably supported by two bearings. A bearing that supports the second gear shaft 87 is attached to the support frame 51 in the first rotating means 5. The fourth gear 84 uses a bevel gear, a bevel gear, a bevel gear, a miter gear, or the like to transmit power to the roller 52 having an axis that intersects the axis of the second gear shaft 87. can do. Since the fifth gear 85 receives power transmission from the first gear shaft 86 that intersects with the second gear shaft 87 to be installed, the fifth gear 85, like the fourth gear 84, is a bevel gear, a quick bevel gear, or a helical gear. A bevel gear, a miter gear, or the like can be used.

  When such a gear mechanism 8 is provided, the first rotation means 5 connected to the rotation drive shaft body 61 is rotated by rotating the rotation drive shaft body 61 in the second rotation means 6 around its axis, The meshing of the ring gear 80 fixed to the chamber 2 and the first gear 81 installed in the first rotating means 5 causes the first gear shaft 86 included in the first rotating means 5 to rotate. The rotation of the first gear shaft 86 is transmitted to the second gear shaft 87 via the second gear 82 and the fifth gear 85, and the rotation transmitted to the second gear shaft 87 is transmitted to the fourth gear 84 and the fourth gear. One roller 52 provided with the third gear 83 is rotated via the three gears 83, and the cylindrical body stretched around the four rollers 52 is rotated in the circumferential direction.

  By providing such a gear mechanism 8, it is not necessary to provide a large driving means for rotationally driving the roller 52 in the first rotating means 5, and the cylindrical body can be rotated along the circumferential direction with a simple configuration. Therefore, the surface treatment apparatus 1 can be made compact. The gear mechanism 8 is not limited to the above configuration, and may be configured using a gear box or the like that converts drive transmission and axial direction. Further, the ring gear 80 that transmits the rotation of the rotation drive shaft 61 in the second rotation means 6 to the rotation of the first gear shaft 86 provided in the first rotation means 5 may be constituted by a ring gear of a crown gear.

  Moreover, in the said embodiment, in order to comprise the surface treatment apparatus 1 as a sputtering device, although the discharge | release part 4 is comprised by the sputtering target, it is not specifically limited to such a structure, For example, surface treatment In order to configure the apparatus 1 as a blast processing apparatus, the discharge unit 4 may be configured by a blast nozzle that discharges a blast material (surface treatment material) such as high-purity alumina particles. Or in order to comprise the surface treatment apparatus 1 as a coating treatment apparatus, you may comprise the discharge part 4 by the spray nozzle which discharge | releases a coating agent (surface treatment material).

DESCRIPTION OF SYMBOLS 1 Surface treatment apparatus 2 Chamber 3 Holding drive means 4 Discharge part 5 1st rotation means 51 Support frame 52 Roller 6 2nd rotation means 61 Rotation drive shaft body 62 Drive apparatus 7 Arm 8 Gear mechanism 80 Ring gear 81 First gear 82 Second Gear 83 Third gear 84 Fourth gear 85 Fifth gear 86 First gear shaft 87 Second gear shaft

Claims (5)

A surface treatment apparatus for performing a surface treatment on the surface of a cylindrical body,
First rotating means for holding and rotating the cylindrical body along the circumferential direction;
Second rotating means for rotating the first rotating means with the direction different from the axial direction of the rotation axis of the cylindrical body by the first rotating means as the axial direction of the rotating axis;
A discharge portion for discharging the surface treatment material toward the surface of the cylindrical body ,
The surface treatment apparatus according to claim 1, wherein a rotation axis of the cylindrical body by the first rotation means and a rotation axis of the first rotation means by the second rotation means are not arranged on the same plane . The rotation axis of the cylindrical body by the first rotation means and the rotation axis of the first rotation means by the second rotation means are configured to be substantially orthogonal to each other,
2. The surface treatment apparatus according to claim 1, wherein the discharge portion is disposed at a position where a discharge center of the surface treatment material does not overlap a rotation axis of the first rotation means by the second rotation means.   3. The surface treatment according to claim 1, wherein the first rotating unit includes a plurality of rollers that stretch the cylindrical body, and rotates the cylindrical body along a circumferential direction by the rotation of the roller. apparatus.   The surface treatment apparatus according to claim 1, further comprising a gear mechanism that transmits rotation by the second rotation unit as rotation of the first rotation unit. A gear mechanism for transmitting rotation by the second rotation means as rotation of the first rotation means;
The gear mechanism is
A ring gear arranged around the rotation axis of the first rotation means by the second rotation means;
A first gear rotatably supported by the first rotating means and meshed with the ring gear;
A second gear supported so as to be integrally rotatable with respect to the first gear at a position spaced apart from the first gear in a rotational axis direction of the first gear;
A third gear provided so as to be integrally rotatable with respect to one of the plurality of rollers;
A fourth gear supported rotatably around a rotation axis perpendicular to the rotation axis of the one roller and meshed with a third gear;
And a fifth gear that is supported so as to be integrally rotatable with the fourth gear at a position spaced apart from the fourth gear in a rotational axis direction of the fourth gear and meshed with the second gear. 4. The surface treatment apparatus according to 3 .

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