JP6064803B2 - Sensor, method for adjusting sensor and method for measuring using sensor - Google Patents

Description

  The present invention relates to a sensor, a method for adjusting the sensor, and a method for measuring using the sensor.

  Conventionally, a corrosion sensor for examining deterioration due to corrosion of metal parts such as electronic devices has been used.

  For example, it has been reported that the cause of failure of electronic equipment is corrosion of metal parts inside the equipment. Corrosive gases such as hydrogen sulfide are contained in the atmosphere in the environment where electronic devices are installed, and such corrosive gases have the effect of promoting the deterioration of electronic devices even at low concentrations. Is known to affect.

  Corrosion of metal parts due to corrosive gas such as hydrogen sulfide may be accelerated in accordance with the concentration of the corrosive gas and the conditions such as temperature or humidity in the installation environment of the electronic device. Therefore, it is desirable to improve the reliability of the electronic device by examining the state or environment in which the electronic device is likely to corrode and taking measures such as improving the installation environment.

  For this reason, it is required to monitor the influence of corrosive gas contained in the atmosphere in the installation environment of electronic equipment.

  Conventionally, a corrosion sensor has been used to monitor the corrosive gas in the installation environment of such an electronic device.

  FIG. 1A is a plan view showing a conventional corrosion sensor, and FIG. 1B is a front view.

  The corrosion sensor shown in FIG. 1 is an example of a quartz crystal microbalance type sensor.

  The sensor 110 includes a quartz plate 111 that vibrates in a thickness-shear mode, a first sensor electrode 112a disposed on the first surface of the quartz plate 111, and a second sensor electrode 112b disposed on the second surface. The first sensor electrode 112a and the second sensor electrode 112b are made of metal, and are arranged at the center of the disc-shaped crystal plate 111.

  From one end of the crystal plate 111, an electrode wiring 112c for supplying power to the first sensor electrode 112a extends to the first sensor electrode 112a. Similarly, an electrode wiring 112d for supplying power to the second sensor electrode 112b extends from the other end of the crystal plate 111 to the second sensor electrode 112b.

  Both ends of the quartz plate 111 are supported by a pair of spring support portions 116a and 116b which are vertically long plate springs. The pair of spring support portions 116 a and 116 b are erected on the base portion 117. The pair of spring support portions 116a and 116b have electrical conductivity, and terminal wires 118a and 118b connected to the respective spring support portions 116a and 116b extend.

  When a drive signal is applied from a drive circuit (not shown) to the first sensor electrode 112a and the second sensor electrode 112b, the crystal plate 111 is driven to vibrate at the resonance frequency in the thickness shear mode.

  Since the mass changes when the first sensor electrode 112a or the second sensor electrode 112b corrodes, the resonance frequency of the quartz plate 111 changes.

  By measuring the resonance frequency output from the sensor 110, the degree of corrosion of the first sensor electrode 112a or the second sensor electrode 112b can be examined, and the corrosive gas in the installation environment can be monitored.

JP 2005-134161 A

  The sensor 110 shown in FIG. 1 can evaluate the corrosiveness of the installation environment of the electronic device, but does not necessarily correctly evaluate the degree of corrosion of the electronic device itself.

  This is because the shape of the corroded part influences the corrosion of the metal parts of the electronic device as well as the corrosiveness of the installation environment such as corrosive gas, temperature or humidity.

  FIG. 2 is a diagram illustrating a wiring structure of an electronic device.

  In the wiring structure 150 of the electronic device, the wiring terminal 152 of the wiring 151 is connected to the electrode terminal 153 by a screw 154.

  Here, there is a gap between the wiring terminal 152 and the electrode terminal 153. Similarly, there is a gap between the screw 154 and the wiring terminal 152.

  Moisture is easily adsorbed in such gaps. Further, since dust or the like tends to accumulate in the gap, moisture may be adsorbed by the dust or the like that has accumulated in the gap. Further, the gap is a portion where moisture tends to stay because moisture hardly adsorbs compared to the flat portion when moisture is adsorbed.

  Therefore, it can be said that the part which has a clearance gap is a part which corrodes easily compared with a plane part. Electronic devices have many metal parts having gaps such as wiring structures.

  Therefore, there is a need for a sensor that can accurately evaluate the degree of corrosion at a site that is susceptible to corrosion such as a gap.

  In this specification, it aims at providing the sensor which can solve the subject mentioned above.

  Another object of the present specification is to provide a method for adjusting a sensor that can solve the above-described problems.

  Furthermore, an object of the present specification is to provide a measurement method using a sensor that can solve the above-described problems.

  According to one embodiment of the sensor disclosed in the present specification, a quartz plate, a first sensor electrode disposed on the first surface of the quartz plate, and a second sensor electrode disposed on the second surface; The first counter plate facing the first sensor electrode with a gap, the second counter plate facing the second sensor electrode with a gap, the first counter plate and the second counter plate being the quartz crystal And an interval adjusting unit that changes the interval between the first counter plate and the first sensor electrode and the interval between the second counter plate and the second sensor electrode by pressing toward the plate side.

  Moreover, according to one form of the method of adjusting the sensor disclosed in this specification, the crystal plate, the first sensor electrode disposed on the first surface of the crystal plate, and the second surface are disposed. A second sensor electrode, a first counter plate facing the first sensor electrode with a gap, a second counter plate facing the second sensor electrode with a gap, the first counter plate, and the first counter plate A distance adjusting unit that changes a distance between the first counter plate and the first sensor electrode and a distance between the second counter plate and the second sensor electrode by pressing the two counter plates toward the crystal plate side; A method of adjusting a distance between the first counter plate and the first sensor electrode and a distance between the second counter plate and the second sensor electrode in a sensor comprising: measuring a resonance frequency of the sensor. However, using the distance adjusting unit, the first counter plate and Serial distance between the distance and the second opposing plate and the second sensor electrode and the first sensor electrode to adjust.

  Furthermore, according to one form of the measurement method using the sensor disclosed in the present specification, the quartz plate, the first sensor electrode arranged on the first surface of the quartz plate, and the second surface are arranged. The second sensor electrode, the first counter plate facing the first sensor electrode with a gap, the second counter plate facing the second sensor electrode with a gap, the first counter plate, By adjusting the distance between the first counter plate and the first sensor electrode and the distance between the second counter plate and the second sensor electrode by pressing the second counter plate toward the quartz plate side. A gap between the first counter plate and the first sensor electrode, or a gap between the second counter plate and the second sensor electrode is made equal to the gap of the measurement object. Measure the resonance frequency.

  According to one embodiment of the sensor disclosed in this specification, the degree of corrosion can be accurately evaluated.

  In addition, according to one embodiment of the method for adjusting a sensor disclosed in the present specification, a space corresponding to a portion where corrosion such as a gap is likely to occur can be formed between the sensor electrode and the counter plate.

  Furthermore, according to one embodiment of the method of measuring using the sensor disclosed in this specification, the degree of corrosion can be accurately evaluated.

  The objects and advantages of the invention will be realized and obtained by means of the elements and combinations particularly pointed out in the appended claims.

  Both the foregoing general description and the following detailed description are exemplary and explanatory and are not restrictive of the invention as claimed.

(A) is a top view which shows the corrosion sensor of a prior art example, (B) is a front view. It is a figure which shows the wiring structure of an electronic device. (A) is a front view of 1st Embodiment of the sensor disclosed in this specification, (B) is a side view. It is a figure which shows the water droplet adsorb | sucked between the opposing board and the sensor electrode. It is a figure explaining the dimension of the space | interval of an opposing board and a sensor electrode. (A)-(C) is a figure explaining 1st Embodiment of the method of adjusting the space | interval of an opposing board and a sensor electrode. It is FIG. (1) explaining 2nd Embodiment of the method of adjusting the space | interval of an opposing board and a sensor electrode. (A)-(C) is a figure (the 2) explaining 1st Embodiment of the method of adjusting the space | interval of an opposing board and a sensor electrode. (A) is a front view of 2nd Embodiment of the sensor disclosed in this specification, (B) is sectional drawing. (A) is a top view of 3rd Embodiment of the sensor disclosed in this specification, (B) is a front view. It is a figure explaining the usage example of the sensor disclosed in this specification.

  Hereinafter, a preferred first embodiment of a sensor disclosed in this specification will be described with reference to the drawings. However, the technical scope of the present invention is not limited to these embodiments, but extends to the invention described in the claims and equivalents thereof.

  FIG. 3A is a front view of the first embodiment of the sensor disclosed in this specification, and FIG. 3B is a side view thereof.

  The sensor 10 of this embodiment is a quartz crystal microbalance type corrosion sensor. The sensor 10 measures the degree of corrosion of the electronic device itself in an installation environment such as an electronic device having metal parts.

  The sensor 10 includes a crystal plate 11 having a first surface 11a and a second surface 11b, a first sensor electrode 12a disposed on the first surface 11a of the crystal plate 11, and a second surface disposed on the second surface 11b. Two sensor electrodes 12b are provided. The crystal plate 11 that is a piezoelectric body is cut so as to vibrate in a thickness-slip mode. As the quartz plate 11 that vibrates in the thickness sliding mode, for example, AT cut or BT cut quartz can be used. In the present embodiment, the crystal plate 11 is AT-cut in a disc shape.

  In addition, the sensor 10 includes a first counter plate 13a that faces the first sensor electrode 12a with a gap and a second counter plate 13b that faces the second sensor electrode 12b with a gap.

  From one end of the crystal plate 11, an electrode wiring 12c that supplies power to the first sensor electrode 12a extends to the first sensor electrode 12a. Similarly, an electrode wiring 12d that supplies power to the second sensor electrode 12b extends from the other end of the crystal plate 11 to the second sensor electrode 12b.

  The quartz plate 11 is supported by a pair of spring support portions 16a and 16b, which are vertically long plate springs, so as to vibrate in a thickness sliding mode. The spring support portion 16a has a slit 16c into which the other end of the crystal plate 11 on which the electrode wiring 12d is laminated is fitted. Similarly, the spring support portion 16b has a slit 16c into which one end of the crystal plate 11 on which the electrode wiring 12c is laminated is fitted. In this manner, the opposite ends of the quartz plate 11 are supported by the pair of spring support portions 16a and 16b.

  The pair of spring support portions 16 a and 16 b is erected on the base portion 17. The pair of spring support portions 16 a and 16 b have electrical conductivity, and terminal wires 18 a and 18 b connected to the spring support portions 16 a and 16 b extend below the base portion 17.

  A drive signal is applied to the first sensor electrode 12a and the second sensor electrode 12b from a drive circuit (not shown) via the terminal wires 18a and 18b and the pair of spring support portions 16a and 16b. The quartz plate 11 to which the drive signal is applied by the first sensor electrode 12a and the second sensor electrode 12b is driven to vibrate at the resonance frequency in the thickness-shear mode. This resonance frequency can be determined by conditions such as the natural frequency due to the cut shape of the crystal plate 11, the masses of the first sensor electrode 12a and the second sensor electrode 12b, and the capacitance (not shown) of the drive circuit.

  The quartz crystal plate 11 that is a piezoelectric body vibrates at a resonance frequency and generates an electric signal at the resonance frequency to output an electrical signal. The resonance frequency output from the quartz plate 11 is measured by an external measurement circuit (not shown).

  When the first sensor electrode 12a or the second sensor electrode 12b is corroded, the mass of the sensor electrode changes. Usually, the mass of the electrode increases due to corrosion. Thus, when the masses of the first sensor electrode 12a and the second sensor electrode 12b change, the resonance frequency at which the quartz plate 11 oscillates also changes. By measuring the change in the resonance frequency, the degree of corrosion of the first sensor electrode 12a and the second sensor electrode 12b can be examined. Normally, when the mass of the sensor electrodes 12a and 12b increases, the resonance frequency changes so as to decrease.

  In the sensor 10, the first sensor electrode 12 a and the second sensor electrode 12 b are arranged at the center of the quartz plate 11 in order to improve the sensitivity of the change of the resonance frequency with respect to the mass change of the first sensor electrode 12 a and the second sensor electrode 12 b. Placed in.

  The sensor 10 has a structure that reproduces the space of the corroded portion in order to correctly evaluate the degree of corrosion of the electronic device.

  Specifically, the sensor 10 presses the first counter plate 13a and the second counter plate 13b to the quartz plate 11 side, whereby the distance d1 between the first counter plate 13a and the first sensor electrode 12a and the second counter plate. An interval adjusting unit 20 that changes an interval d2 between the plate 13b and the second sensor electrode 12b is provided.

  In the sensor 10, the distance d 1 between the first counter plate 13 a and the first sensor electrode 12 a and / or the distance d 2 between the second counter plate 13 b and the second sensor electrode 12 b is measured using the distance adjusting unit 20. It is adjusted so that it may become equal to the clearance gap which the metal component of the electronic device which is.

  Next, the first counter plate 13a and the second counter plate 13b described above will be further described.

  The first counter plate 13 a and the second counter plate 13 b are vertically long, and one end in the longitudinal direction thereof is joined via an electrically insulating spacer 15. The other ends in the longitudinal direction of the first counter plate 13 a and the second counter plate 13 b are fixed to the base portion 17 by using the interval adjusting portion 20 so as to sandwich the base portion 17.

  The first counter plate 13a and the second counter plate 13b have a plurality of through holes 14a and 14b penetrating the plate. Specifically, the first counter plate 13a includes a first through hole 14a and a plurality of second through holes 14b arranged in point symmetry with respect to the first through hole 14a. Similarly, the second opposing plate 13b also has a first through hole 14a and a plurality of second through holes 14b arranged symmetrically with respect to the first through hole 14a. The first through hole 14a is disposed so as to face the center of the first sensor electrode 12a and the second sensor electrode 12b.

  The above-described through holes 14a and 14b allow water vapor or dust in the atmosphere to pass through the first counter plate 13a or the second counter plate 13b and be adsorbed to the first sensor electrode 12a or the second sensor electrode 12b. Is provided.

  The reason why the through holes 14a and 14b are provided in the first counter plate 13a and the second counter plate 13b will be further described.

  If the through holes 14a and 14b are not provided in the first counter plate 13a and the second counter plate 13b, the corrosion of the first sensor electrode 12a or the second sensor electrode 12b is caused by the first counter plate 13a or the second counter plate. It tends to occur from the portions of the sensor electrodes 12a and 12b facing the side portions of the plate 13b. On the other hand, the portion of the first sensor electrode 12a or the second sensor electrode 12b covered with the counter plate is prevented from being corroded because the supply of water vapor or dust is hindered.

  When the corrosion products of the sensor electrodes 12a and 12b facing the side portions of the first counter plate 13a or the second counter plate 13b grow, supply of water vapor or dust to the inside of the counter plate is hindered. Corrosion of the portion of the first sensor electrode 12a or the second sensor electrode 12b covered with the counter plate hardly occurs. In particular, corrosion at the center of the first sensor electrode 12a or the second sensor electrode 12b, which is highly sensitive to mass changes, is less likely to occur. Further, even if water droplets are adsorbed between the electrodes facing the side portions of the first counter plate 13a or the second counter plate 13b, the supply of water vapor, dust or the like to the inside of the counter plates 13a, 13b is hindered. .

  Therefore, in the sensor 10, water vapor, dust, or the like in the atmosphere is supplied to the first sensor electrode 12a or the second sensor electrode 12b covered with the first counter plate 13a and the second counter plate 13b. As shown, through holes 14a and 14b are provided. In particular, by disposing the first through hole 14a in the portion of the opposing plate that faces the center of the first sensor electrode 12a and the second sensor electrode 12b, to the center of the first sensor electrode 12a and the second sensor electrode 12b. The supply of water vapor or dust is not hindered.

  FIG. 4 is a diagram showing water droplets adsorbed between the counter plate and the sensor electrode.

  As shown in FIG. 4, water vapor or the like in the atmosphere can form water droplets W between the first sensor electrode 12a and the first counter plate 13a through the through holes 14a and 14b. And if corrosive gas exists in air | atmosphere, corrosive gas will melt | dissolve in the water droplet W and will corrode the 1st sensor electrode 12a.

  In the sensor 10, as described above, the plurality of second through holes 14b are arranged point-symmetrically with respect to the first through hole 14a. This is for the purpose of uniformly corroding the surfaces of the first sensor electrode 12a and the second sensor electrode 12b.

  As shown in FIG. 3A, by providing a plurality of through holes 14a and 14b in the first counter plate 13a and the second counter plate 13b, the sensor electrodes 12a and 12b covered by the counter plates 13a and 13b are provided. Even in the portion, water vapor or dust in the atmosphere is uniformly diffused and supplied. As a result, the surfaces of the first sensor electrode 12a and the second sensor electrode 12b can be uniformly corroded.

  For example, even when the first sensor electrode 12a or the second sensor electrode 12b undergoes the same amount of mass change due to corrosion, the amount of change in the resonance frequency varies between when it is uniformly corroded and when it is corroded unevenly. Unlikely, the sensitivity of the sensor 10 to corrosion can be different. Therefore, the first sensor electrode 12a and the second sensor electrode 12b are uniformly corroded so that the sensitivity of the sensor 10 to corrosion is the same.

  Moreover, in the sensor 10, the 1st opposing board 13a and the 2nd opposing board 13b have electrical conductivity. The first counter plate 13a is electrically connected to the spring support 16b using the wiring 13d and is equipotential with the first sensor electrode 12a. Similarly, the second opposing plate 13b is electrically connected to the spring support portion 16a using the wiring 13e and is equipotential with the second sensor electrode 12b.

  This is to prevent dust and the like from being selectively adsorbed to any one of the sensor electrodes 12a and 12b or the opposing plates 13a and 13b, and to cause both to corrode similarly. It is.

  As a mechanism of corrosion, first, dust charged with static electricity is adsorbed on metal parts, and then corrosive gas is adsorbed on dust etc. adsorbed on metal parts, causing corrosion of metal parts. May progress. Here, if the polarity or potential of charging is different between the sensor electrode and the counter plate, the method of adsorbing dust or the like may be different. Therefore, the opposing sensor electrodes 12a and 12b and the opposing plates 13a and 13b are made to be equipotential so that static dust and the like are similarly adsorbed.

  As the material for forming the sensor electrodes 12a and 12b and the counter plates 13a and 13b, the same material as that used to form the gap in the electronic device that is the measurement target is used to bring the state of corrosion of the sensor 10 closer to the measurement target. Is preferable.

  When the gap between the electronic devices is formed by the metal parts and the metal parts, the sensor electrodes 12a and 12b and the opposing plates 13a and 13b can be formed by the material of the corresponding metal parts. On the other hand, when a gap between electronic devices is formed by a metal part and a non-conductive part such as resin, the sensor electrodes 12a and 12b are formed by the material of the metal part, and the opposing plates 13a and 13b are non-conductive. It is preferable that it be formed of a material for the functional parts.

  Next, the interval adjusting unit 20 will be described below.

  The interval adjusting unit 20 includes a screw portion 21 and a nut portion 22 that mates with the screw portion 21. The screw portion 21 includes a screw main body 21a formed with a thread that mates with the nut portion 22, a pressing portion 21b that presses the first counter plate 13a, and a knob portion 21c that is used to rotate the screw main body 21a. .

  Corresponding screw holes 13c are provided at the other end in the longitudinal direction of the first counter plate 13a and the other end in the longitudinal direction of the second counter plate 13b, respectively.

  The screw portion 21 is engaged with the nut portion 22 by inserting the screw body 21a of the screw portion 21 into the screw hole 13c of the first counter plate 13a and the screw hole 13c of the second counter plate 13b. By rotating the knob portion 21c in a predetermined direction, the first opposing plate 13a and the second opposing plate 13b sandwiched between the pressing portion 21b and the nut portion 22 are pressed toward the quartz plate 11 side. In this way, the distance d1 between the first counter plate 13a and the first sensor electrode 12a and the distance d2 between the second counter plate 13b and the second sensor electrode 12b are adjusted.

  Further, by rotating the knob portion 21c in the direction opposite to the predetermined direction, the first counter plate 13a and the second counter plate are caused by the reaction force of the counter plates 13a and 13b whose one end is fixed to the spacer 15. 13 b is separated from the crystal plate 11.

  In the sensor 10, by rotating the knob portion 21c, the interval between the first counter plate 13a and the first sensor electrode 12a changes by the same amount as the interval between the second counter plate 13b and the second sensor electrode 12b.

  FIG. 5 is a diagram for explaining the dimension of the interval between the counter plate and the sensor electrode.

  A distance between one end portions in the longitudinal direction of the first counter plate 13 a and the second counter plate 13 b is fixed by a spacer 15. On the other hand, the interval between the other ends in the longitudinal direction of the first counter plate 13 a and the second counter plate 13 b can be adjusted using the interval adjusting unit 20.

  Therefore, in the state where the interval between the other ends in the longitudinal direction of the first counter plate 13a and the second counter plate 13b is narrowed using the interval adjustment unit 20, the first sensor electrode 12a and the first counter plate 13a The interval is not constant. That is, the distance between the first sensor electrode 12 a and the first counter plate 13 a is wider near the spacer 15 than near the distance adjusting unit 20.

  Here, as shown in FIG. 5, the distance between one end of the first opposing plate 13a in the longitudinal direction and the first sensor electrode 12a is 6.5 mm, and the dimension of the first sensor electrode 12a is 3. 5 mm. Further, the distance between the other end in the longitudinal direction of the first counter plate 13a and the first sensor electrode 12a is set to 6.5 mm. Further, the distance between the first counter plate 13a and the first sensor electrode 12a in a parallel state is set to 0.05 mm.

  When the interval is adjusted so that the other end in the longitudinal direction of the first counter plate 13a is in contact with the crystal plate 11, the first sensor electrode 12a and the first counter plate 13a are used. Is about 0.030 mm at the maximum and about 0.020 mm at the minimum.

  In this case, the gap between the first sensor electrode 12a and the first counter plate 13a varies by about 0.010 mm depending on the location. The difference in degree is often negligible as an error. The same applies to the distance between the second sensor electrode 12b and the second counter plate 13b.

  Next, a first embodiment of a method for adjusting the distance between the opposing sensor electrodes 12a, 12b and the opposing plates 13a, 13b using the distance adjusting unit 20 in the sensor 10 will be described below with reference to FIG. explain.

  In the method of this embodiment, the distance d1 between the first counter plate 13a and the first sensor electrode 12a and the second counter plate 13b and the second sensor are measured by using the interval adjuster 20 while measuring the resonance frequency of the sensor 10. The distance d2 from the electrode 12b is adjusted.

  First, as shown in FIG. 6 (A), the first counter plate 13a and the first sensor electrode 12a are separated from each other by using the distance adjusting unit 20, and the second counter plate 13b and the second sensor electrode 12b are separated. The sensor 10 is adjusted so as to be separated from each other.

  Then, measurement of the resonance frequency of the sensor 10 is started. Here, as a measurement of the resonance frequency of the sensor 10, a difference frequency Δf that is a difference between the resonance frequency measured in advance and the resonance frequency measured when adjusting the interval is measured.

  Then, using the interval adjusting unit 20, the interval between the first counter plate 13a and the first sensor electrode 12a and the interval between the second counter plate 13b and the second sensor electrode 12b are reduced.

  Next, as shown in FIG. 6B, the first counter plate 13a and the first sensor electrode 12a are in contact with each other and the second counter plate 13b and the second counter plate 13 It is determined that the two sensor electrodes 12b are in contact. The contact between the opposing sensor electrodes 12a, 12b and the opposing plates 13a, 13b corresponds to an increase in the mass of the sensor electrodes 12a, 12b, so that the resonance frequency of the sensor 10 decreases.

  Next, as shown in FIG. 6C, using the interval adjusting unit 20, the interval between the first opposing plate 13a and the first sensor electrode 12a and the interval between the second opposing plate 13b and the second sensor electrode 12b. And the interval between the first counter plate 13a and the first sensor electrode 12a and the interval between the second counter plate 13b and the second sensor electrode 12b are adjusted to a predetermined interval. Here, the relationship between the amount of rotation of the knob portion 21c and the amount of movement of the opposing plates 13a and 13b relative to the opposing sensor electrodes 12a and 12b is examined in advance.

  In this way, using the distance adjusting unit 20, the distance d1 between the first counter plate 13a and the first sensor electrode 12a and the distance d2 between the second counter plate 13b and the second sensor electrode 12b are measured objects. It is adjusted so as to be equal to the gap of a metal part of an electronic device.

  Next, in the sensor 10, a second embodiment of a method for adjusting the distance between the opposing sensor electrodes 12 a and 12 b and the opposing plates 13 a and 13 b using the distance adjusting unit 20 will be described with reference to FIGS. 7 and 8. This will be described below.

  First, as shown in FIG. 7, the first spacer 19a is disposed between the first counter plate 13a and the first sensor electrode 12a, and the second spacer is interposed between the second counter plate 13b and the second sensor electrode 12b. A spacer 19b is arranged. The thickness of the 1st spacer 19a and the 2nd spacer 19b is equal to the clearance gap which the metal component of the electronic device which is a measuring object has.

  Next, as shown in FIG. 8A, measurement of the difference frequency Δf of the sensor 10 is started. Then, using the interval adjusting unit 20, the interval between the first counter plate 13a and the first sensor electrode 12a and the interval between the second counter plate 13b and the second sensor electrode 12b are reduced.

  Next, as shown in FIG. 8B, based on the time when the difference frequency Δf of the sensor 10 decreases, the first counter plate 13a contacts the first sensor electrode 12a via the first spacer 19a, and It is determined that the second counter plate 13b is in contact with the second sensor electrode 12b through the second spacer 19b.

  Next, as shown in FIG. 8C, the first spacer 19a is removed from between the first counter plate 13a and the first sensor electrode 12a, and the second counter plate 13b and the second sensor electrode 12b The second spacer 19b is removed from between.

  In this way, the distance between the first counter plate 13a and the first sensor electrode 12a and the distance between the second counter plate 13b and the second sensor electrode 12b are measured using the distance adjusting unit 20 and the spacers 19a and 19b. It is adjusted so as to be equal to the gap of the metal part of the target electronic device.

  As the material for forming the first spacer 19a and the second spacer 19b, it is preferable to use a material that hardly damages the sensor electrode or the like when it is removed from between the opposing sensor electrodes 12a and 12b and the opposing plates 13a and 13b. Specifically, a PE resin sheet, a fluororesin sheet, or the like can be used as a material for forming the first spacer 19a and the second spacer 19b.

  According to the sensor 10 of the present embodiment described above, the distance between the opposing sensor electrodes 12a, 12b and the opposing plates 13a, 13b can be made equal to the gap of the metal part of the electronic device that is the measurement target, so the degree of corrosion Can be evaluated accurately.

  A large number of metal parts are arranged and overlapped inside the electronic device to be measured, and a large number of gaps exist. The size of these gaps varies depending on the shape or arrangement of metal parts. Moreover, the speed at which corrosion proceeds varies depending on the size of the gap.

  The sensor 10 reproduces the space of the easily corroded gap existing inside the electronic device to be measured by adjusting the distance between the opposing sensor electrodes 12a, 12b and the opposing plates 13a, 13b. The degree of corrosion can be measured.

  Next, another embodiment of the sensor described above will be described below with reference to FIGS. 9 and 10. For points that are not particularly described in the other embodiments, the description in detail regarding the first embodiment is applied as appropriate. Moreover, the same code | symbol is attached | subjected to the same component.

  FIG. 9A is a front view of a second embodiment of the sensor disclosed in this specification, and FIG. 9B is a cross-sectional view taken along line XX in FIG. 9A.

  Similar to the first embodiment described above, the sensor 10 of the present embodiment is spaced apart from the crystal plate 11, the first counter plate 31 facing the first sensor electrode 12a with a gap, and the second sensor electrode 12b. A second opposing plate 32 that is open and opposed is provided.

  The first counter plate 31 and the second counter plate 32 have a plurality of through holes 34a and 34b penetrating the plate. Specifically, the first counter plate 31 includes a first through hole 34a and a plurality of second through holes 34b arranged in point symmetry with respect to the first through hole 34a. Similarly, the second opposing plate 32 also has a first through hole 34a and a plurality of second through holes 34b arranged symmetrically with respect to the first through hole 34a. The first through hole 34a is disposed so as to face the center of the first sensor electrode 12a and the second sensor electrode 12b.

  The configuration of the crystal plate 11 in the sensor 10 and each electrode wiring disposed on the crystal plate 11 is the same as that of the first embodiment described above. In FIG. 9A and FIG. 9B, not all of the reference numerals for these components are described, but for the reference numerals of the components not described, refer to the drawings of the first embodiment. .

  In the sensor 10 of the present embodiment, the interval d1 between the first counter plate 31 and the first sensor electrode 12a and / or the second counter plate 32 and the second sensor are used by using the three interval adjusters 20a, 20b, and 20c. The distance d2 from the electrode 12b is adjusted to be equal to the gap of the metal part of the electronic device that is the measurement target.

  And in the sensor 10 of this embodiment, the space | interval of the sensor electrodes 12a and 12b and the opposing plates 31 and 32 which oppose can be adjusted uniformly using three space | interval adjustment parts 20a, 20b, and 20c.

  The configuration of the three interval adjustment units 20a, 20b, and 20c is the same as that of the interval adjustment unit of the first embodiment described above.

  The crystal plate 11 supported by the pair of spring support portions 16 a and 16 b is supported inside a support frame 35 having an opening 36. The support frame 35 is formed by superimposing the first support frame 35 a and the second support frame 35 b so that the respective openings are aligned and sandwiching the base portion 17, and is joined by screws 37.

  The crystal plate 11 supported by the pair of spring support portions 16a and 16b is disposed in the opening 36, and water vapor or dust in the atmosphere diffuses into the first sensor electrode 12a and the second sensor electrode 12b. And can be supplied.

  The first counter plate 31 in the sensor 10 has three extending portions 31a, 31b, 31c extending in a rotationally symmetrical manner with respect to the center of the counter plate, and a screw hole 33 is provided in each of the extending portions. It has been. The three extending portions 31a, 31b, 31c are arranged at intervals so as to have a central angle of 120 degrees with respect to the center of the opposing plate.

  Similarly, the second opposing plate 32 has three extending portions 32a, 32b, and 32c that extend rotationally symmetrically with respect to the center of the opposing plate, and each of the extending portions is provided with a screw hole 33. It has been.

  The extension part 31 a of the first counter plate 31 is disposed so as to face the extension part 32 a of the second counter plate 32. Similarly, the extension part 31 b of the first counter plate 31 is disposed so as to face the extension part 32 b of the second counter plate 32, and the extension part 31 c of the first counter plate 31 is the second counter plate 32. It arrange | positions so that the extension part 32c may be opposed.

  The screw holes 33 provided in the three extending portions 31a, 31b, and 31c of the first counter plate 31 correspond to the screw holes 33 of the three extending portions 32a, 32b, and 32c of the second counter plate 32, respectively. Placed in.

  The interval adjusting unit 20a presses the extending portion 31a of the first opposing plate 31 and the extending portion 32a of the second opposing plate 32 toward the quartz plate 11 side. Specifically, the screw portion 21 of the gap adjusting portion 20a is formed by connecting the screw body 21a of the screw portion 21 to the screw hole 33 of the extending portion 31a of the first opposing plate 31 and the extending portion 32a of the second opposing plate 32. The nut portion 22 is engaged with the screw hole 33. By rotating the knob portion 21c in a predetermined direction, the extension portion 31a of the first counter plate 31 and the extension portion 32a of the second counter plate 32 sandwiched between the pressing portion 21b and the nut portion 22 are crystallized. Pressed toward the plate 11 side.

  Similarly, the interval adjusting unit 20b presses the extending portion 31b of the first opposing plate 31 and the extending portion 32b of the second opposing plate 32 toward the crystal plate 11 side, and the interval adjusting unit 20c is the first opposing plate 31. The extension part 31c of the second and the extension part 32c of the second counter plate 32 are pressed against the quartz plate 11 side.

  In this way, the distance d1 between the first opposing plate 13a having the three extending portions 31a, 31b and 31c and the first sensor electrode 12a, and the second opposing plate having the three extending portions 32a, 32b and 32c. The distance d2 between 13b and the second sensor electrode 12b is adjusted.

  Locking portions 31d are formed at the ends of the three extending portions 31a, 31b, 31c of the first counter plate 31, and the extending portions 31a, 31b, 31c pressed against the quartz plate 11 side are locked. The portion 31 d is locked to the edge of the opening 36. Similarly, locking portions 32d are formed at the ends of the three extending portions 32a, 32b, 32c of the second opposing plate 32, and the extending portions 32a, 32b, 32c pressed toward the quartz plate 11 side. The locking portion 32 d is locked to the edge of the opening 36.

  In the sensor 10 of the present embodiment, the first counter plate 31 and the first sensor electrode 12a are parallel to each other and the second counter plate 32 and the second sensor electrode using the three gap adjusting units 20a, 20b, and 20c. It can be adjusted so that 12b is substantially parallel. That is, in the sensor 10 of the present embodiment, the distance between the opposed plates 31 and 32 and the sensor electrodes 12a and 12b can be adjusted to be more constant than in the first embodiment described above.

  Further, the distance d1 between the first counter plate 31 and the first sensor electrode 12a and the distance d2 between the second counter plate 32 and the second sensor electrode 12b correspond to the gaps of the metal parts of the electronic device to be measured. It is possible to adjust from a narrow interval to a wide interval.

  Although the sensor 10 of the present embodiment includes three interval adjustment units, the sensor 10 may include two interval adjustment units or four or more interval adjustment units.

  In the sensor 10 of the present embodiment, while measuring the resonance frequency of the sensor 10, the distance d1 between the first counter plate 31 and the first sensor electrode 12a and the second distance are adjusted using the three distance adjusters 20a, 20b, and 20c. The distance d2 between the counter plate 32 and the second sensor electrode 12b is adjusted.

  Specifically, the method shown in FIG. 6 or the methods shown in FIGS. 7 and 8 can be used for the adjustment of each interval adjustment unit. For example, first, the interval adjustment unit 20a is used to adjust the interval, and then the interval adjustment unit 20b and the interval adjustment unit 20c can be adjusted in order. At this time, it is preferable to repeat the adjustment of the interval adjusting units 20a to 20c at least once after the adjustment of the interval adjusting units 20a to 20c, in order to accurately set the interval d1 and the interval d2.

  According to the sensor 10 of this embodiment described above, the distance d1 and the distance d2 can be adjusted so that the opposing sensor electrodes 12a, 12b and the opposing plates 31, 32 are substantially parallel.

  Further, according to the sensor 10 of the present embodiment, the same effects as those of the first embodiment described above can be obtained.

  Next, a third embodiment of the sensor disclosed in this specification will be described below with reference to the drawings.

  FIG. 10A is a plan view of a third embodiment of the sensor disclosed in this specification, and FIG. 10B is a front view thereof.

  The interval adjustment unit 40 in the sensor 10 of the present embodiment is different in structure from the above-described embodiments.

  The sensor 10 of the present embodiment is arranged on the crystal plate 11 and the crystal plate 11 except that the first counter plate 13a and the second counter plate 13b do not have screw holes and the structure of the interval adjustment unit 40. The configuration of each of the electrode wirings is the same as that of the first embodiment described above.

  The interval adjusting unit 40 of the sensor 10 according to the present embodiment includes a vertically long pressing body 41 and a pair of pressing portions 42 extending from the pressing body 41 with a space therebetween. The first counter plate 13a and the second counter plate 13b are sandwiched between the pair of pressing portions 42, and the first counter plate 13a and the second counter plate 13b are pressed toward the crystal plate 11 side.

  Specifically, in the sensor 10, two pairs of the pressing portions 42 are arranged at intervals in the longitudinal direction of the pressing body 41. A pair of pressing parts 42 or three or more pairs of pressing parts 42 may be arranged on the pressing body 41.

  The pressing portion 42 functions as a leaf spring, and the inner surface of the pressing portion 42 presses the opposing plates 13a and 13b toward the quartz plate 11 side.

  The first counter plate 13a and the second counter plate 13b have flexibility to be bent toward the crystal plate 11 side when pressed by the pressing portion 42.

  The distance between the pressing part 42 and the pressing part 42 is a predetermined distance between the distance d1 between the first counter plate 13a and the first sensor electrode 12a and the distance d2 between the second counter plate 13b and the second sensor electrode 12b. Is set as follows.

  The distance between the pressing part 42 and the pressing part 42 can be determined in correspondence with the gap of the metal part of the electronic device to be measured. The distance d1 between the first opposing plate 13a and the first sensor electrode 12a and the second opposing plate are used by using the interval adjusting unit 40 in which the interval between the pressing unit 42 and the pressing unit 42 is different according to the gap of the measurement target. The distance d2 between 13b and the second sensor electrode 12b can be adjusted.

  The base portion 17 of the sensor 10 has a fitting convex portion 17 a for fitting the pressing body 41. Moreover, the press main body 41 has the fitting recessed part 41a fitted with the fitting convex part 17a.

  The interval adjusting unit 40 is configured such that the fitting concave portion 41 a of the pressing body 41 is fitted with the fitting convex portion 17 a of the base portion 17, and the first opposing plate 13 a and the second opposing plate 13 b are interposed between the pair of pressing portions 42. In a state of being sandwiched, the base 17 is detachably fixed.

  The pressing portion 42 is provided with a knob portion 42 a for widening the interval between the pressing portion 42 and the pressing portion 42. When fixing or detaching the distance adjusting part 40 to the base part 17, the distance between the pressing part 42 and the pressing part 42 is widened by using the knob part 42 a, and the pair of pressing parts 42 are connected to the opposing plates 13 a and 13 b. Remove from.

  According to the sensor 10 of the present embodiment described above, the interval d1 and the interval d2 are adjusted by fixing the interval adjusting unit 40 to the base 17, so that the interval performed in each of the embodiments described above is adjusted. This work becomes unnecessary.

  Further, according to the sensor 10 of the present embodiment, the same effects as those of the first embodiment described above can be obtained.

  Next, with reference to FIG. 11, one embodiment for evaluating the corrosivity of the installation environment of the electronic device together with the degree of corrosion of the electronic device itself using the sensor disclosed in the present specification will be described below. To do.

  FIG. 11 is a diagram illustrating an example of use of the sensor disclosed in this specification.

  Any one of the sensors A in the first to third embodiments described above is arranged inside the electronic apparatus. The electronic device is arranged in a room having an air conditioner. In addition, a heating element such as another electronic device is also arranged in this room.

  In the sensor A, the distance between the counter plate and the sensor electrode is adjusted so as to match the size of the gap of the metal component of the electronic device. Further, the material for forming the counter plate and the sensor electrode is formed of the material of the corresponding metal part. The sensor A is mainly used for the purpose of evaluating the degree of corrosion of the electronic device itself.

  A plurality of conventional sensors B1 to B3 as shown in FIG. 1 are disposed in the same room. The sensor B1 is arranged inside the electronic device together with the sensor A. The sensor B2 is disposed in the vicinity of the electronic device. Sensor B3 is arrange | positioned in the indoor position where the ventilation from an air conditioner is sprayed directly. The sensors B1 to B3 are mainly used for the purpose of evaluating the corrosiveness of the installation environment of the electronic device.

  FIG. 11 is a graph showing an example of measurement results of the sensor A and the sensors B1 to B3. The vertical axis of each graph represents a value obtained by converting the amount of change in the resonance frequency output from the sensor into the amount of corrosion.

  For example, by comparing the measurement results of the sensor B1 and the sensor B2 or the sensor B3, it is possible to check whether the cause of corrosion is due to the internal environment of the electronic device or the indoor environment.

  Further, by comparing the measurement results of the sensor A and the sensor B1, whether the cause of corrosion is due to adsorption of water vapor or dust related to the shape of the part such as a gap, or corrosive gas or temperature. It is possible to check whether the shape of the component is low.

  Thus, by clarifying the cause of corrosion, it is possible to take specific measures for preventing corrosion for each cause.

  In the present invention, the sensor of the above-described embodiment, the method for adjusting the sensor, and the method for measuring using the sensor can be appropriately changed without departing from the spirit of the present invention. In addition, the configuration requirements of one embodiment can be applied to other embodiments as appropriate.

  For example, in each of the above-described embodiments, both the first counter plate and the second counter plate of the sensor have a through-hole penetrating the plate, but any one of the first counter plate and the second counter plate One of them may have a through hole.

  In each of the above-described embodiments, the distance d1 between the first counter plate and the first sensor electrode and the distance d2 between the second counter plate and the second sensor electrode are adjusted to be the same, but the distance d1. And the interval d2 may be adjusted to be different.

  All examples and conditional words mentioned herein are intended for educational purposes to help the reader deepen and understand the inventions and concepts contributed by the inventor. All examples and conditional words mentioned herein are to be construed without limitation to such specifically stated examples and conditions. Also, such exemplary mechanisms in the specification are not related to showing the superiority and inferiority of the present invention. While embodiments of the present invention have been described in detail, it should be understood that various changes, substitutions or modifications can be made without departing from the spirit and scope of the invention.

DESCRIPTION OF SYMBOLS 10 Sensor 11 Quartz plate 11a 1st surface 11b 2nd surface 12a 1st sensor electrode 12b 2nd sensor electrode 12c, 12d Electrode wiring 13a 1st opposing plate 13b 2nd opposing plate 13c Screw hole 13d, 13e Wiring 14a 1st penetration Hole 14b Second through hole 15 Spacer 16a, 16b Spring support portion 16c Slit 17 Base portion 17a Fitting convex portion 18a, 18b Terminal wire 19a First spacer 19b Second spacer 20, 20a, 20b, 20c Spacing adjustment portion 21 Screw portion 21a Screw body 21b Pressing portion 21c Knob portion 22 Nut portion 31 First counter plate 31a, 31b, 31c Extension portion 31d Locking portion 32 Second counter plate 32a, 32b, 32c Extension portion 32d Locking portion 33 Screw hole 34a First through hole 34b Second through hole 35 Support frame 35a First support frame 35 b Second support frame 36 Opening 37 Screw 40 Interval adjusting part 41 Pressing body 41a Fitting recess 42 Pressing part 42a Knob part 150 Wiring structure of electronic device 151 Wiring 152 Wiring terminal 153 Electrode terminal 154 Screw

Claims (13)

A crystal plate,
A first sensor electrode disposed on the first surface of the quartz plate and a second sensor electrode disposed on the second surface;
A first counter plate facing the first sensor electrode with a gap, and a second counter plate facing the second sensor electrode with a gap;
By pressing the first counter plate and the second counter plate toward the quartz plate, the distance between the first counter plate and the first sensor electrode and the distance between the second counter plate and the second sensor electrode. An interval adjustment unit for changing the interval;
Comprising a sensor.   The sensor according to claim 1, wherein the first counter plate or the second counter plate has a through-hole penetrating the plate.   The first counter plate or the second counter plate has a first through hole and a plurality of second through holes arranged symmetrically with respect to the first through hole. Sensor. The first counter plate and the second counter plate have electrical conductivity,
The sensor according to any one of claims 1 to 3, wherein the first counter plate is equipotential with the first sensor electrode, and the second counter plate is equipotential with the second sensor electrode.   The sensor according to any one of claims 1 to 4, wherein the first sensor electrode and the second sensor electrode are disposed in a central portion of the crystal plate. The first counter plate and the second counter plate are provided with corresponding screw holes,
The gap adjusting portion has a screw portion and a nut portion mated with the screw portion,
The sensor according to any one of claims 1 to 5, wherein the screw portion is inserted through the screw hole of the first counter plate and the screw hole of the second counter plate and mated with the nut portion. One end of the first counter plate is joined to one end of the second counter plate across a spacer,
The sensor according to claim 6, wherein the corresponding screw hole is provided in the other end of the first counter plate and the other end of the second counter plate. The first counter plate and the second counter plate have a plurality of extending portions extending rotationally symmetrically with respect to the center of the plate,
The sensor according to claim 6, wherein each of the extending portions is provided with the screw hole. The spacing adjustment section has a pressing body and a pair of pressing sections extending from the pressing body with a space therebetween,
The first counter plate and the second counter plate are sandwiched between the pair of pressing portions, and the first counter plate and the second counter plate are pressed toward the crystal plate side. The sensor according to any one of 5. A crystal plate,
A first sensor electrode disposed on the first surface of the quartz plate and a second sensor electrode disposed on the second surface;
A first counter plate facing the first sensor electrode with a gap, and a second counter plate facing the second sensor electrode with a gap;
By pressing the first counter plate and the second counter plate toward the quartz plate, the distance between the first counter plate and the first sensor electrode and the distance between the second counter plate and the second sensor electrode. An interval adjustment unit for changing the interval;
A distance between the first opposing plate and the first sensor electrode and a distance between the second opposing plate and the second sensor electrode in a sensor comprising:
While measuring the resonance frequency of the sensor, the interval adjusting unit is used to adjust the interval between the first counter plate and the first sensor electrode and the interval between the second counter plate and the second sensor electrode. Method. Using the gap adjusting unit, the gap between the first counter plate and the first sensor electrode and the gap between the second counter plate and the second sensor electrode were narrowed, and the resonance frequency of the sensor was lowered. Based on the time point, it is determined that the first counter plate and the first sensor electrode are in contact, and the second counter plate and the second sensor electrode are in contact,
Using the distance adjusting unit, the distance between the first counter plate and the first sensor electrode and the distance between the second counter plate and the second sensor electrode are widened, and the first counter plate and the first sensor electrode are expanded. The method according to claim 10, wherein the distance between the sensor electrode and the distance between the second counter plate and the second sensor electrode are adjusted to a predetermined distance. A first spacer is disposed between the first counter plate and the first sensor electrode, and a second spacer is disposed between the second counter plate and the second sensor electrode;
Using the gap adjusting unit, the gap between the first counter plate and the first sensor electrode and the gap between the second counter plate and the second sensor electrode were narrowed, and the resonance frequency of the sensor was lowered. Based on the time point, it is determined that the first counter plate is in contact with the first sensor electrode through a first spacer, and the second counter plate is in contact with the second sensor electrode through a second spacer. And
11. The method according to claim 10, wherein the first spacer is removed from between the first counter plate and the first sensor electrode, and the second spacer is removed from between the second counter plate and the second sensor electrode. The method described. A crystal plate,
A first sensor electrode disposed on the first surface of the quartz plate and a second sensor electrode disposed on the second surface;
A first counter plate facing the first sensor electrode with a gap, and a second counter plate facing the second sensor electrode with a gap;
By pressing the first counter plate and the second counter plate toward the quartz plate, the distance between the first counter plate and the first sensor electrode and the distance between the second counter plate and the second sensor electrode. An interval adjustment unit for changing the interval;
The distance between the first counter plate and the first sensor electrode or the distance between the second counter plate and the second sensor electrode in a sensor comprising: How to measure.

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