JP6103151B2 - Gas control device - Google Patents

Description

The present invention includes a pump generating a pressure change in the gas, to the gas control device and a valve for directing the flow of opening and closing a gas flow path.

A gas control device, such as a micro-blower includes a pump generating a pressure change in the gas, and a passive valve for directing the opening and closing flow of the flow path in response to pressure fluctuations of the gas, there is that used (e.g. (See Patent Document 1). The passive valve disclosed in Patent Document 1 is configured by providing a film in the valve chamber. The film, when the gas in the flow path of gas control apparatus starts to flow in the forward direction to open the passage hole, to the contrary, displaced as a gas in the channel blocks the as passageway hole begins to flow in the reverse direction (deformation) To do. Therefore, this passive valve opens and closes the flow path according to the pressure fluctuation of the gas and directs the flow.

In the gas control device using the passive valve and the pump, the flow of gas is blocked by the passive valve when the pump is stopped, and the internal pressure of the pressure chamber connected to the passive valve may be difficult to be released. For example, when the pump is stopped, depending on the internal pressure of the pressure chamber, the film of the passive valve may be displaced so as to block the channel hole. In this case, the internal pressure of the pressure chamber cannot be released, or the internal pressure of the pressure chamber is gradually released due to a leak in the passive valve, and the internal pressure is slowly released.

  Therefore, in order to quickly release the internal pressure of the pressure chamber, an active valve that can dynamically (actively) control the opening and closing of the flow path has been used.

JP 2012-528980 A

  It is necessary to provide the active valve with a valve body that opens and blocks the flow path, a valve drive unit that drives the valve body, and a control unit that controls the valve drive unit. For this reason, the active valve has a more complicated configuration than the passive valve, and its cost and size are likely to increase.

In addition, when the pump of the gas control device is a high frequency drive type such as a piezoelectric drive type, it is necessary to drive the valve drive source also at a high frequency in order to use the active valve. It was not easy to match with high precision.

Therefore, an object of the present invention is to provide a gas control device that can form an active valve in a small size and at low cost, and that can easily match the operation timing of the active valve and the pump even when driven at a high frequency. There is.

The gas control device according to the present invention includes a casing that forms a pump chamber and a flow path that communicates with the pump chamber, a vibration unit that causes fluctuations in the pressure of the gas in the pump chamber by vibration, A valve body that is elastically displaced by the vibration part or the housing between a position approaching the opening and a position far from the opening of the flow path; and a driving frequency of the vibration part, A control unit that switches between a first frequency at which the body vibrates at the same phase as the vibration unit and a second frequency at which the valve body vibrates at a phase opposite to that of the vibration unit.

In this configuration, since the valve body is supported so as to be elastically displaceable, the valve body vibrates at the driving frequency of the vibrating portion when the vibration of the casing or the fluctuation of the gas pressure is transmitted to the valve body. That is, the valve body approaches or moves away from the opening of the flow path in accordance with a cycle in which the gas pressure (hereinafter referred to as internal pressure ) varies in the pump chamber. Then, for example, when the internal pressure of the pump chamber is positive, the valve body is far from the opening of the flow path and opens the flow path, and when the internal pressure of the pump chamber is negative, the valve body is at the opening of the flow path. By approaching and shielding the flow path, the flow can be directed so as to discharge gas from the pump chamber to the valve body side (hereinafter, this direction is referred to as a discharge direction). Alternatively, when the internal pressure of the pump chamber is positive, the valve body approaches the opening of the flow path to shield the flow path, and when the internal pressure of the pump chamber is negative, the valve body is far from the opening of the flow path. If the flow path is opened, the flow can be directed so that gas is sucked into the pump chamber from the valve body side (hereinafter, this direction is referred to as a suction direction).

  Since the operation of such a valve body causes the vibration of the vibration part that fluctuates the internal pressure of the pump chamber as a drive source, the pump operation and the drive source are shared by using the vibration part as the valve drive part of the active valve. Therefore, the function of the active valve can be realized in a small size and at a low cost. Further, the fluctuation of the internal pressure in the pump chamber and the operation of the valve body are surely synchronized, and even when the vibration part is driven at a high frequency, the operation timing is not shifted between the valve body and the vibration part.

Furthermore, the vibration state of the valve body can be changed by switching the drive frequency of the vibration unit to either the first frequency or the second frequency by the frequency control unit. Specifically, by switching the driving frequency of the vibration part, the phase of the vibration of the valve body is reversed, the timing when the valve body approaches the opening of the flow path, and the timing when the valve body is far from the opening of the flow path. Will be replaced. Therefore, it is possible to switch the gas flow between the discharge direction and the suction direction by switching the driving frequency of the vibration unit. Also, if the flow in one of the discharge direction and the suction direction is weaker than the flow in the other, by switching the drive frequency of the vibration part, the pump chamber remains in a state of moving the valve body. The internal pressure of the closed space connected to the discharge side or the suction side can be released.

Further, the flow path includes a first flow path and a second flow path that communicate with each other through the pump chamber, and the valve body is a first flow path attached to the first flow path. A valve body and a second valve body attached to the second flow path may be included. In this case, when one of the first valve body and the second valve body is in a position close to the opening of the flow path, the other is in a position far from the opening of the flow path. It is preferable. Thereby, by switching the drive frequency of the vibration part, the pump chamber sucks gas from the first flow path and discharges gas from the second flow path, and the pump chamber gas flows from the second flow path. Can be switched between a state in which gas is sucked and gas is discharged from the first flow path.

  Moreover, it is preferable that the said valve body is a metal plate fixed on one end side, and rock | fluctuated on the other end side. Thereby, the valve body which elastically displaces with a simple structure is realizable.

Moreover, it is preferable that the said 1st frequency or the said 2nd frequency is a structural resonance frequency of the said vibration part. In particular, it is preferable that the first frequency is a low-order structural resonance frequency of the vibrating section, and the second frequency is a high-order structural resonance frequency of the vibrating section. Thereby, the vibration part can be structurally resonated, and the vibration amplitude of the vibration part can be maximized to increase the pump efficiency.

Further, it is preferable that the pump chamber has a cylindrical shape whose height is lower than the radius, and the flow path hole to which the valve body is attached is provided near the center of the pump chamber. In particular, the first frequency or the second frequency is preferably an acoustic resonance frequency of the pump chamber. Furthermore, it is preferable that the first frequency is a low-order acoustic resonance frequency of the pump chamber, and the second frequency is a high-order acoustic resonance frequency of the pump chamber. With this configuration, the pump chamber can be acoustically resonated, and the pump efficiency can be increased by maximizing the amplitude of the acoustic vibration of the pump chamber, that is, the change in the internal pressure of the pump chamber.

  Moreover, it is preferable that the said vibration part is provided with the piezoelectric element which vibrates by application of a drive voltage.

According to the present invention, the internal pressure of the closed space connected to the discharge side or the suction side of the pump chamber is released by switching the gas flow or moving the valve body by switching the driving frequency of the vibration unit. The function of the active valve can be realized. Since the pump function and the active valve function are realized by a common drive source, the function of the active valve can be realized in a small size and at a low cost. The operation timing is not shifted between the vibrating part.

It is a graph which shows the relationship between the frequency of the exciting force which acts on a valve body, and the phase difference of the vibration of a valve body with respect to an exciting force. It is a mimetic diagram of a fluid control device concerning a 1st embodiment of the present invention. It is a schematic diagram of the fluid control apparatus which concerns on 2nd Embodiment of this invention. It is a schematic diagram of the fluid control apparatus which concerns on 3rd Embodiment of this invention. It is a schematic diagram of the fluid control apparatus which concerns on 4th Embodiment of this invention. It is a schematic diagram of the fluid control apparatus which concerns on 5th Embodiment of this invention. It is a schematic diagram of the fluid control apparatus which concerns on 6th Embodiment of this invention. It is the external appearance perspective view seen from the top | upper surface side of the fluid control apparatus which concerns on 1st Example of this invention. It is the external appearance perspective view seen from the bottom face side of the fluid control apparatus shown in FIG. It is sectional drawing of the fluid control apparatus shown in FIG. It is sectional drawing of the fluid control apparatus which concerns on 2nd Example of this invention. It is sectional drawing of the fluid control apparatus which concerns on 3rd Example of this invention. It is sectional drawing which shows the state which operated the fluid control apparatus which concerns on 4th Example of this invention with the frequency of the primary mode. It is sectional drawing which shows the state which operated the fluid control apparatus which concerns on 4th Example of this invention with the frequency of secondary mode.

<< Operation Principle of the Present Invention >>
First, some of the operating principles used by the present invention will be briefly described.

  FIG. 1 is a graph showing the relationship between the frequency of the exciting force acting on the valve body and the phase difference of the vibration of the valve body with respect to the exciting force.

  In general, a structure that is elastically supported, such as the valve body of the present invention, vibrates at a frequency that matches the frequency of the excitation force when an external excitation force is applied. The structure has a structural resonance frequency f0, and when the frequency of the excitation force coincides with the structural resonance frequency f0, the vibration amplitude is maximized by resonating with the excitation force.

When vibrating the structure in excitation force lower frequency f _L than structural resonance frequency f0, structure the phase difference is substantially zero state of the exciting force, i.e., a phase delay relative to the vibration force It will vibrate in the same in-phase state. On the other hand, when the structure is vibrated with an excitation force having a frequency f _H higher than the structural resonance frequency f0, the structure has a phase difference of −π [rad] from the excitation force, that is, the excitation force. Vibrate in a reverse phase state where a phase delay has occurred. Therefore, the vibration phase of the structure is inverted when the frequency of the excitation force changes beyond the structural resonance frequency f0. The present invention controls the flow of fluid in the fluid control device by using the relationship between the frequency of the excitation force and the vibration phase and controlling the frequency of the excitation force.

<< First Embodiment of the Invention >>
Hereinafter, a schematic configuration and operation of the fluid control device according to the first embodiment of the present invention will be described.

  FIG. 2A is a schematic cross-sectional view of the fluid control apparatus 10 according to the first embodiment of the present invention. The fluid control device 10 includes a housing 11, a vibration unit 12, a valve body 13, and a control unit 14.

  The housing 11 constitutes a pump chamber 15, a first flow path hole 16, and a second flow path hole 17. The pump chamber 15 is provided inside the housing 11. The first flow path hole 16 is provided in a part of the top surface of the housing 11. The second flow path hole 17 is provided in a part of the side wall of the housing 11. The pump chamber 15 communicates with the external space through each of the first flow path hole 16 and the second flow path hole 17.

  The vibration unit 12 is attached to the bottom surface of the housing 11. The vibration unit 12 includes a diaphragm 18 and a piezoelectric element 19. The diaphragm 18 has a thin plate shape, is attached to the bottom surface of the housing 11, and faces the pump chamber 15. The piezoelectric element 19 has a thin plate shape and is attached to the bottom surface of the diaphragm 18. The piezoelectric element 19 has piezoelectricity that expands and contracts in the in-plane direction. Moreover, the vibration part 12 comprises what is called a unimorph structure by bonding the diaphragm 18 and the piezoelectric element 19 together. Therefore, the vibration part 12 causes the central portion to bend and vibrate up and down as the piezoelectric element 19 expands and contracts due to the inverse piezoelectric effect, thereby changing the internal pressure of the pump chamber 15.

  The valve body 13 is provided in the vicinity of the opening on the top surface side of the first flow path hole 16. The valve body 13 is elastically supported by the diaphragm 18 so as to vibrate in the vertical direction, and has a structural resonance frequency f0. And the valve body 13 is elastically displaceable between the position contact | abutted to the opening part of the 1st flow-path hole 16, and the position spaced apart from the opening part of the 1st flow-path hole 16 to the top | upper surface side. The valve body 13 has a balance position in a static state between a position where it abuts on the opening of the first flow path hole 16 and a position where it is separated from the opening of the first flow path hole 16 toward the top surface. Intermediate position.

The control unit 14 applies an alternating drive voltage to the piezoelectric element 19. Control unit 14, the driving voltage V1 having the low frequency side frequency f _L, which is a frequency lower than structural resonance frequency f0 of the valve body 13 or, the high-frequency side with a frequency higher than the structural resonance frequency f0 of the valve body 13 A drive voltage V 2 having a frequency f _H is selected and applied to the piezoelectric element 19. Accordingly, the control unit 14 has the frequency of the drive voltage of the piezoelectric element 19, i.e., the driving frequency of the vibration unit 12, a function of switching to a low-frequency-side frequency f _L, or high-frequency side frequency f _H.

Figure 2 (B) is a diagram for explaining the operation of the fluid control device 10 when driving the vibration unit 12 in the low frequency side frequency f _L.

Driving vibration unit 12 in the low frequency side frequency f _L, the piezoelectric element 19 expands and contracts in the plane direction by the reverse piezoelectric effect. When the piezoelectric element 19 tries to extend in the in-plane direction, as shown on the left side in the figure, the expansion of the piezoelectric element 19 causes the diaphragm 18 to bend so that it protrudes toward the bottom surface in the thickness direction. As a result, the volume of the pump chamber 15 expands, and the internal pressure of the pump chamber 15 decreases to a negative pressure. On the other hand, when the piezoelectric element 19 is to be contracted in the in-plane direction, as shown on the right side in the figure, the contraction of the piezoelectric element 19 causes the diaphragm 18 to bend so as to protrude toward the top surface in the thickness direction. As a result, the volume of the pump chamber 15 contracts, and the internal pressure of the pump chamber 15 increases to a positive pressure.

When driving this way the vibrating portion 12 at the low frequency side frequency f _L is the vibration of the vibration part 12 to the valve body 13 is elastically supported on the vibrating section 12 is transmitted as the excitation force, the valve body 13 is also vibration To come. When the vibration part 12 bends to the bottom surface side, the valve body 13 exerts an excitation force that can be pulled down from the vibration part 12. Further, when the vibration part 12 bends to the top surface side, the valve body 13 exerts an excitation force that is pushed upward from the vibration part 12.

As described above, since the vibration force is applied to the valve body 13 from the vibration part 12, the frequency of the vibration force, that is, the drive frequency of the vibration part 12 is the structural resonance frequency f0 as described above with reference to FIG. If it is lower the low frequency side frequency f _L than the valve body will vibrate in a state of phase with the phase lag without relative excitation force. Accordingly, as shown on the left side of the figure, when an exciting force that pulls downward acts on the valve body 13, the valve body 13 is displaced downward in the same phase with no phase delay with respect to the exciting force. Then, it approaches the first flow path hole 16. On the other hand, as shown on the right side in the figure, when an exciting force that pushes upward is exerted on the valve body 13, the valve body 13 is displaced upward in the same phase with no phase delay with respect to the exciting force. However, it is far from the first flow path hole 16.

  For this reason, as shown on the left side in the figure, the valve element 13 shields the first flow path hole 16 when the vibrating portion 12 bends to the bottom surface side. At this time, since the internal pressure of the pump chamber 15 is negative, external fluid is sucked into the pump chamber 15 through the second flow path hole 17. On the other hand, as shown on the right side in the figure, the valve element 13 opens the first flow path hole 16 when the vibrating portion 12 bends to the top surface side. At this time, since the internal pressure of the pump chamber 15 is positive, fluid is discharged from the pump chamber 15 to the outside through the first flow path hole 16.

Therefore, when driving the vibration unit 12 in the low frequency side frequency f _L in the fluid control system 10, by the vibration unit 12 vibrates bending, the operation of the valve 13 is repeated, the fluid in the valve body 13 side The flow in the discharge direction for discharging the liquid is steadily generated.

Figure 2 (C) is a diagram for explaining the operation of the fluid control device 10 when driving the vibration unit 12 in the high-frequency side frequency f _H.

When the vibration unit 12 is driven at the high frequency side frequency f _H , the vibration unit 12 bends to the bottom side as shown on the left side in the figure, similarly to when the vibration unit 12 is driven at the low frequency side frequency f _L. At this time, the internal pressure of the pump chamber 15 becomes a negative pressure, and an exciting force is applied to the valve body 13 so as to be pulled down from the vibrating portion 12. Further, as shown on the right side in the figure, when the vibration part 12 bends to the top surface side, the internal pressure of the pump chamber 15 becomes positive and the valve body 13 is pushed upward from the vibration part 12. Excitation force works.

However, when driving the vibration unit 12 at a higher high frequency side frequency f _H than structural resonance frequency f0, as described with reference to FIG. 1 above, the valve body is a phase delay relative to the vibration force It will occur and vibrate in a reverse phase. Therefore, as shown on the left side in the figure, when an exciting force that pulls downward is applied to the valve body 13, the valve body 13 is in an opposite phase with a phase delay with respect to the exciting force. And the first channel hole 16 is opened away from the first channel hole 16. At this time, since the internal pressure of the pump chamber 15 is negative, external fluid is sucked into the pump chamber 15 via the first flow path hole 16. On the other hand, as shown in the right side of the figure, when an exciting force that pushes upward is applied to the valve body 13, the valve body 13 is in a reverse phase with a phase delay with respect to the exciting force. The first flow path hole 16 is shielded by approaching the first flow path hole 16. At this time, since the internal pressure of the pump chamber 15 is positive, the fluid is discharged from the pump chamber 15 to the outside through the second flow path hole 17.

Therefore, when driving the vibration unit 12 in the low frequency side frequency f _L in the fluid control apparatus 10, the operation of the valve body 13 are repeated by the vibration unit 12 vibrates bending, the fluid from the valve body 13 side A flow in the suction direction for suction is generated constantly.

As described above, in the fluid control device 10, the vibration phase of the valve body 13 (by controlling the drive frequency of the vibration unit 12 to be switched to the low frequency side frequency f _L or the high frequency side frequency f _H ). The operation timing can be reversed. Therefore, in the fluid control device 10, the flow of the fluid is switched to the discharge direction or the suction direction, or the valve body is moved at the other drive frequency while causing the flow in the suction direction or the discharge direction at one drive frequency. The fluid can be controlled so as to release the internal pressure of the closed space connected to the suction side and the discharge side of the pump chamber in the state.

  Since the operation of the valve body 13 occurs using the vibration of the vibration unit 12 that fluctuates the internal pressure of the pump chamber 15 as a drive source, the function of the pump and the function of the active valve can be realized by the shared drive source. This function can be realized in a small size and at a low cost. Further, the fluctuation of the internal pressure in the pump chamber 15 and the operation of the valve body 13 are surely synchronized, and even when the vibration unit 12 is driven at a high frequency, the operation timing is shifted between the valve body 13 and the vibration unit 12. Nothing will happen.

<< Second Embodiment of the Invention >>
Hereinafter, a schematic configuration and operation of the fluid control device according to the second embodiment of the present invention will be described.

  FIG. 3A is a schematic cross-sectional view of a fluid control device 20 according to the second embodiment of the present invention. The fluid control device 20 includes a housing 21, a vibration unit 22, a valve body 23, and a control unit 24. The casing 21 constitutes a pump chamber 25, a first flow path hole 26, and a second flow path hole 27. The vibration unit 22 includes a diaphragm 28 and a piezoelectric element 29. The fluid control device 20 has almost the same configuration as that of the first embodiment, but the configuration of the valve body 23 is different, and the valve body 23 is provided inside the pump chamber 25.

3 (B) is a diagram for explaining the operation of the fluid control device 20 when driving the vibration unit 22 in the low frequency side frequency f _L.

When driving the vibration unit 22 in the low frequency side frequency f _L, when as in the first embodiment, the vibrating unit 22 as shown on the left side in the drawing bends the bottom side, the inner pressure of the pump chamber 25 Becomes a negative pressure, and an exciting force is applied to the valve body 23 so as to be pulled downward from the vibrating portion 22, and the valve body 23 is displaced downward in the same phase with no phase delay with respect to the exciting force. Further, as shown on the right side in the figure, when the vibration part 22 bends to the top surface side, the internal pressure of the pump chamber 25 becomes positive pressure, and the valve body 23 is pushed upward from the vibration part 22. The valve body 23 is displaced upward in the same phase state where there is no phase delay with respect to the excitation force.

  At this time, in this configuration, the valve body 23 is provided not on the top surface side but on the bottom surface side of the first flow path hole 26. Therefore, the movement of the valve body 23 and the timing of opening or shielding the first flow path hole 26 However, this is the reverse of the first embodiment. That is, as shown on the left side in the figure, when the valve body 23 is displaced downward, the valve body 23 is far from the first flow path hole 26 and the valve body 23 opens the first flow path hole 26. At this time, since the internal pressure of the pump chamber 25 is negative, an external fluid is sucked into the pump chamber 25 through the first flow path hole 26. On the other hand, as shown on the right side in the figure, when the valve body 23 is displaced upward, the valve body 23 approaches the first flow path hole 26 and the valve body 23 shields the first flow path hole 26. At this time, since the internal pressure of the pump chamber 25 is positive, fluid is discharged from the pump chamber 25 to the outside through the second flow path hole 27.

Thus, the fluid control device 20, when driving the vibration unit 22 in the low frequency side frequency f _L, the above operation of the valve body 23 is repeated by vibrating section 22 vibrates bending, fluid from the valve body 23 side The flow in the suction direction for inhaling the air is steadily generated.

FIG. 3C is a diagram for explaining the operation of the fluid control device 20 when the vibration unit 22 is driven at the high frequency side frequency f _H.

Even when the vibration unit 22 is driven at the high frequency _fH , when the vibration unit 22 bends to the bottom side as shown on the left side in the drawing, the internal pressure of the pump chamber 25 becomes negative and the valve An exciting force is applied to the body 23 so as to be pulled downward from the vibrating portion 22. Further, as shown on the right side in the figure, when the vibration part 22 bends to the top surface side, the internal pressure of the pump chamber 25 becomes positive and the valve body 23 is pushed upward from the vibration part 22. Vibration force works.

However, the vibration unit 22 is driven at a higher high frequency side frequency f _H than structural resonance frequency f0, when the exciting force such as pulling downward as shown on the left side in the figure acts on the valve body 23, valve The body 23 is displaced upward in a reverse phase state in which a phase delay has occurred with respect to the excitation force, approaches the first flow path hole 26 and shields the first flow path hole 26. At this time, since the internal pressure of the pump chamber 25 is negative, external fluid is sucked into the pump chamber 25 via the second flow path hole 27. On the other hand, as shown in the right side of the figure, when an exciting force that pushes upward acts on the valve element 23, the valve element 23 is in a reverse phase with a phase lag with respect to the exciting force. To distant from the first flow path hole 26 and open the first flow path hole 26. At this time, since the internal pressure of the pump chamber 25 is positive, the fluid is discharged from the pump chamber 25 to the outside through the first flow path hole 26.

Therefore, when driving the vibration unit 22 in the high-frequency side frequency f _H in the fluid control device 20, the operation of the valve body 23 is repeated by vibrating section 22 vibrates bending, the fluid in the valve body 23 side A flow in the discharge direction is generated constantly.

As described above, also in the fluid control device 20, the vibration phase of the valve body 23 (by controlling the drive frequency of the vibration unit 22 to be switched to the low frequency side frequency f _L or the high frequency side frequency f _H ). Operation timing) and flow direction can be reversed.

<< Third Embodiment of the Invention >>
Hereinafter, a schematic configuration and operation of the fluid control device according to the third embodiment of the present invention will be described.

  FIG. 4A is a schematic cross-sectional view of a fluid control device 30 according to a third embodiment of the present invention. The fluid control device 30 includes a housing 31, a vibration unit 32, a valve body 33, and a control unit 34. The housing 31 constitutes a pump chamber 35, a first flow path hole 36, and a second flow path hole 37. The vibration unit 32 includes a diaphragm 38 and a piezoelectric element 39. The fluid control device 30 has almost the same configuration as that of the first embodiment, but the configuration of the valve element 33 is different. Specifically, the valve body 33 is elastically supported on the top surface of the housing 31. Then, the top plate of the housing 31 vibrates so that the vibration of the vibration part 32 is transmitted and is displaced in the opposite direction to the vibration part 32.

4 (B) is a diagram for explaining the operation of the fluid control device 30 when driving the vibration unit 32 in the low frequency side frequency f _L.

When driving the vibration unit 32 in the low frequency side frequency f _L, when as in the first embodiment, the vibrating unit 32 as shown on the left side in the drawing bends the bottom side, the inner pressure of the pump chamber 35 Becomes negative pressure. Further, as shown on the right side in the figure, when the vibration part 32 bends to the top surface side, the internal pressure of the pump chamber 35 becomes positive as in the first embodiment.

  However, unlike the first embodiment, the valve element 33 is supported by the top plate of the casing 31 that is displaced in the opposite direction to the vibration part 32. Therefore, as shown on the left side in the figure, the vibration part 32 is When bending to the bottom surface side, the top plate of the casing 31 bends to the top surface side, and an excitation force is applied to the valve body 33 so that the valve body 33 is pushed upward from the top plate of the casing 31. Displaced upward and distant from the first flow path hole 36, the first flow path hole 36 is opened. At this time, since the internal pressure of the pump chamber 35 is negative, external fluid is sucked into the pump chamber 35 via the first flow path hole 36. On the other hand, as shown in the right side of the figure, when the vibration part 32 bends to the top surface side, the top plate of the housing 31 bends to the bottom surface side, and is pulled down from the top plate of the housing 31 to the valve body 33. Such an exciting force acts, and the valve body 33 is displaced downward and approaches the first flow path hole 36 to shield the first flow path hole 36. At this time, since the internal pressure of the pump chamber 35 is positive, the fluid is discharged from the pump chamber 35 to the outside through the second flow path hole 37.

Thus, the fluid control device 30, when driving the vibration unit 32 in the low frequency side frequency f _L, the above operation of the valve body 33 is repeated by vibrating portion 32 vibrates bending, fluid from the valve body 33 side The flow in the suction direction for inhaling the air is steadily generated.

FIG. 4C is a diagram for explaining the operation of the fluid control device 30 when the vibration unit 32 is driven at the high frequency side frequency f _H.

Even when the vibration unit 32 is driven at the high frequency _fH , when the vibration unit 32 bends to the bottom side as shown on the left side in the figure, the internal pressure of the pump chamber 35 becomes negative and the housing The top plate of the body 31 bends to the top surface side, and an excitation force acts so that the valve body 33 is pushed upward from the top plate of the housing 31. Further, as shown on the right side in the figure, when the vibration part 32 bends to the top surface side, the internal pressure of the pump chamber 35 becomes positive pressure, and the top plate of the casing 31 bends to the bottom surface side. An excitation force is applied to the body 33 so as to be pulled downward from the top plate of the casing 31.

However, the vibration unit 32 is driven at a higher high frequency side frequency f _H than structural resonance frequency f0, when the top plate of the housing 31 as shown on the left side in the figure is bent in the top side, the valve body 33 is displaced downward in a reverse phase where a phase delay has occurred due to the excitation force, approaches the first flow path hole 36, and the valve element 33 shields the first flow path hole 36. At this time, since the internal pressure of the pump chamber 35 is negative, external fluid is sucked into the pump chamber 35 via the second flow path hole 37. On the other hand, as shown on the right side in the figure, when the top plate of the casing 31 is bent to the bottom surface side, the valve element 33 is displaced upward in a reverse phase state in which a phase lag has occurred from the excitation force. The valve element 33 opens the first flow path hole 36 away from the first flow path hole 36. At this time, since the internal pressure of the pump chamber 35 is positive, the fluid is discharged from the pump chamber 35 to the outside through the first flow path hole 36.

Therefore, in the fluid control device 30, when the vibration part 32 is driven at the high frequency side frequency f _H , the vibration part 32 vibrates and vibrates, so that the operation of the valve body 33 is repeated, and the fluid is moved to the valve body 33 side. The flow in the discharge direction for discharging the liquid is steadily generated.

Therefore, also in the fluid control device 30, the vibration phase (operation timing) and flow of the valve element 33 are controlled by switching the drive frequency of the vibration unit 32 to the low frequency side frequency f _L or the high frequency side frequency f _H. Can be reversed.

<< 4th Embodiment of this invention >>
Hereinafter, a schematic configuration and operation of the fluid control device according to the fourth embodiment of the present invention will be described.

  FIG. 5A is a schematic cross-sectional view of a fluid control device 40 according to a fourth embodiment of the present invention. The fluid control device 40 includes a housing 41, a vibration unit 42, a valve body 43, and a control unit 44. The housing 41 constitutes a pump chamber 45, a first flow path hole 46, and a second flow path hole 47. The vibration unit 42 includes a diaphragm 48 and a piezoelectric element 49. The fluid control device 40 has almost the same configuration as that of the third embodiment, but the configuration of the valve body 43 is different, and the valve body 43 is provided inside the pump chamber 45.

Figure 5 (B) is a diagram for explaining the operation of the fluid control device 40 when driving the vibration unit 42 in the low frequency side frequency f _L.

When driving the vibration unit 42 in the low frequency side frequency f _L, when as in the third embodiment, the vibrating unit 42 as shown on the left side in the drawing bends the bottom side, the inner pressure of the pump chamber 45 Becomes a negative pressure, and an excitation force is applied to the valve body 43 so as to be pulled upward from the top plate of the housing 41, and the valve body 43 is displaced upward in the same phase with no phase delay from the excitation force. . Further, as shown on the right side in the figure, when the vibration part 42 is bent to the top surface side, the internal pressure of the pump chamber 45 becomes a positive pressure, and the valve body 43 is pulled downward from the top plate of the housing 41. Thus, the valve body 43 is displaced downward in the same phase with no phase delay from the excitation force.

  At this time, in this configuration, since the valve body 43 is provided on the bottom surface side rather than the top surface side of the first flow path hole 46, the movement of the valve body 43 and the opening or shielding timing of the first flow path hole 46 However, this is the reverse of the third embodiment. That is, as shown on the left side in the drawing, when the valve body 43 is displaced upward, the valve body 43 approaches the first flow path hole 46 and the valve body 43 shields the first flow path hole 46. At this time, since the internal pressure of the pump chamber 45 is a negative pressure, an external fluid is sucked into the pump chamber 45 through the second flow path hole 47. On the other hand, as shown on the right side in the figure, when the valve body 43 is displaced downward, the valve body 43 is far from the first flow path hole 46 and the valve body 43 opens the first flow path hole 46. At this time, since the internal pressure of the pump chamber 45 is positive, fluid is discharged from the pump chamber 45 to the outside through the first flow path hole 46.

Thus, the fluid control device 40, when driving the vibration unit 42 in the low frequency side frequency f _L, the above operation of the valve body 43 is repeated by vibrating section 42 vibrates bent, fluid on the valve body 43 side The flow in the discharge direction for discharging the liquid is steadily generated.

Figure 5 (C) is a diagram for explaining the operation of the fluid control device 40 when driving the vibration unit 42 in the high-frequency side frequency f _H.

Even when the vibration part 42 is driven at the high frequency side frequency f _H , as shown on the left side in the figure, when the vibration part 42 bends to the bottom side, the internal pressure of the pump chamber 45 becomes negative and the valve An excitation force that pulls upward from the top plate of the casing 41 acts on the body 43. Further, as shown on the right side in the figure, when the vibrating portion 42 bends to the top surface side, the internal pressure of the pump chamber 45 becomes a positive pressure, and the valve body 43 is pushed downward from the top plate of the housing 41. Exciting force like this works.

However, the vibration unit 42 is driven at a higher high frequency side frequency f _H than structural resonance frequency f0, as shown on the left side in the figure, when the acts excitation force that pulls the valve body 43 upward, The valve body 43 is displaced downward in a reverse phase in which a phase delay has occurred with respect to the excitation force, and is distant from the first flow path hole 46 to open the first flow path hole 46. At this time, since the internal pressure of the pump chamber 45 is negative, external fluid is sucked into the pump chamber 45 via the first flow path hole 46. On the other hand, as shown in the right side of the figure, when an exciting force that pushes down the valve body 43 is exerted, the valve body 43 moves upward in a reverse phase in which a phase lag has occurred with respect to the exciting force. To approach the first flow path hole 46 and shield the first flow path hole 46. At this time, since the internal pressure of the pump chamber 45 is positive, fluid is discharged from the pump chamber 45 to the outside through the second flow path hole 47.

Thus, the fluid control device 40, when driving the vibration unit 42 in the high-frequency side frequency f _H is the operation of the valve body 43 is repeated by vibrating section 42 vibrates bending, fluid from the valve body 43 side The flow in the suction direction for inhaling the air is steadily generated.

Therefore, in a fluid control system 40, by controlling so as to switch the driving frequency of the vibration unit 42 to the low-frequency side frequency f _L, or high-frequency side frequency f _H, the vibration phase (operation timing) of the valve element 43 and flow Can be reversed.

<< Fifth Embodiment of the Invention >>
Hereinafter, a schematic configuration and operation of a fluid control device according to a fifth embodiment of the present invention will be described.

FIG. 6A is a schematic cross-sectional view of a fluid control device 50 according to a fifth embodiment of the present invention. The fluid control device 50 includes a housing 51, a vibration unit 52, a valve body 53, and a control unit 54. The casing 51 constitutes a pump chamber 55, a first flow path hole 56, and a second flow path hole 57. The vibration unit 52 includes a diaphragm 58 and a piezoelectric element 59. The fluid control device 50 has almost the same configuration as that of the first embodiment, but the configuration of the valve body 53 is different. Specifically, the valve body 53 is elastically supported by a fixed portion (a portion that is not displaced), and is not directly supported by the vibrating portion 52. The fixing part corresponds to the housing of the present invention. Therefore, the valve body 53 is configured so that the vibration of the vibration part 52 is not transmitted through the housing 51. In this case, the vibration is transmitted from the vibrating portion 52 to the valve body 53 not through the vibration transmitted through the casing 51 but through the fluctuation of the fluid pressure near the opening of the first flow path hole 56.

6 (B) is a diagram for explaining the operation of the fluid control device 50 when driving the vibration unit 52 in the low frequency side frequency f _L.

When driving the vibration unit 52 in the low frequency side frequency f _L, when as in the first embodiment, the vibrating unit 52 as shown on the left side in the drawing bends the bottom side, the inner pressure of the pump chamber 55 Becomes negative pressure, and an excitation force that pulls down the valve body 53 by this negative pressure acts. Therefore, the valve body 53 is displaced downward, and the valve body 53 approaches the first flow path hole 56 to The first flow path hole 56 is shielded, and external fluid is sucked into the pump chamber 55 from the second flow path hole 57. Further, as shown on the right side in the figure, when the vibration part 52 bends to the top surface side, the internal pressure of the pump chamber 55 becomes a positive pressure, and the positive pressure causes the valve body 53 to be pushed upward. Since the force acts, the valve body 53 is displaced upward, the valve body 53 is distant from the first flow path hole 56 to open the first flow path hole 56, and the fluid in the pump chamber 55 is discharged from the first flow path hole 56. Discharge.

Therefore, the fluid control device 50, the vibration unit 52 when driven at a low frequency side frequency f _L, the above operation of the valve body 53 are repeated by the vibration unit 52 vibrates bending, the valve element 53 side A flow in the discharge direction for discharging the fluid is steadily generated.

FIG. 6C is a diagram for explaining the operation of the fluid control device 50 when the vibration unit 52 is driven at the high frequency side frequency f _H.

When driving the vibration unit 52 in the high-frequency side frequency f _H, in conjunction with the vibration unit 52 as shown on the left side in the figure when bending the bottom side, the inner pressure of the pump chamber 55 becomes negative pressure, the An excitation force acts so as to be pulled down to the valve body 53 by the negative pressure. However, since the phase lag occurs from this excitation force, the valve body 53 is displaced upward and the valve body 53 is displaced. Is distant from the first flow path hole 56, opens the first flow path hole 56, and sucks an external fluid from the first flow path hole 56 into the pump chamber 55. Further, as shown on the right side in the figure, when the vibration part 52 bends to the top surface side, the internal pressure of the pump chamber 55 becomes positive pressure, and the positive pressure causes the valve body 53 to be pushed upward. Although the excitation force works, a phase lag occurs from this excitation force, resulting in a reverse phase state, so that the valve body 53 is displaced downward, and the valve body 53 approaches the first flow path hole 56 and the first flow. The passage hole 56 is shielded, and the fluid in the pump chamber 55 is discharged from the second passage hole 57.

Therefore, the fluid control device 50, when driving the vibration unit 52 in the high-frequency side frequency f _H is the operation of the valve body 53 are repeated by the vibration unit 52 vibrates the bending, the valve member 53 side A flow in the suction direction for sucking the fluid is steadily generated.

Therefore, in the fluid control device 50, by controlling so as to switch the driving frequency of the vibration unit 52 to the low-frequency side frequency f _L, or high-frequency side frequency f _H, the vibration phase (operation timing) of the valve element 53 and flow Can be reversed.

<< Sixth Embodiment of the Present Invention >>
Hereinafter, a schematic configuration and operation of a fluid control device according to a sixth embodiment of the present invention will be described.

  FIG. 7A is a schematic cross-sectional view of a fluid control device 60 according to a sixth embodiment of the present invention. The fluid control device 60 includes a housing 61, a vibrating unit 62, valve bodies 63 </ b> A and 63 </ b> B, and a control unit 64. The casing 61 constitutes a pump chamber 65 and flow path holes 66A and 66B. The vibration unit 62 includes a diaphragm 68 and a piezoelectric element 69. The fluid control device 60 has almost the same configuration as that according to the first embodiment, but is provided with valve bodies 63A and 63B in the channel hole 66A and the channel hole 66B, respectively. Then, the valve body 63A is arranged inside the pump chamber 65 so that the timing of opening and shielding the corresponding flow path holes 66A, 66B by the valve bodies 63A, 63B is reversed, and the valve body 63B is a pump. Arranged outside the chamber 65. For this reason, the valve body 63A has the same configuration and operation as in the second embodiment, and the valve body 63B has the same configuration and operation as in the first embodiment.

Figure 7 (B) is a diagram showing the operation of the fluid control device 60 when driving the vibration unit 62 in the low frequency side frequency f _L.

To drive the vibrating unit 62 in the low frequency side frequency f _L is the vibration unit 62 as shown on the left side in the figure the internal pressure of the pump chamber 65 when bent to the bottom surface side becomes a negative pressure. Then, the valve body 63A is displaced downward similarly to the second embodiment, and is distant from the flow path hole 66A and opens the flow path hole 66A. Further, the valve body 63B is displaced downward similarly to the first embodiment, and approaches the flow path hole 66B to shield the flow path hole 66B. Therefore, an external fluid is sucked into the pump chamber 65 through the flow path hole 66A.

  On the other hand, as shown in the right side of the drawing, when the vibrating section 62 is bent toward the top surface, the internal pressure of the pump chamber 65 becomes positive. Then, the valve body 63A is displaced upward as in the second embodiment, approaches the flow path hole 66A, and shields the flow path hole 66A. Further, the valve body 63B is displaced upward as in the first embodiment, and is distant from the flow path hole 66B to open the flow path hole 66B. As a result, the fluid is discharged from the pump chamber 65 to the outside through the flow path hole 66B.

Thus, the fluid control device 60, when driving the vibration unit 62 in the low frequency side frequency f _L, the valve body 63A, the above operation of 63B is repeated by vibrating section 62 vibrates the bending, the valve body 63A side Thus, a fluid flow in which the fluid is sucked in and discharged from the valve body 63B side is steadily generated.

FIG. 7C is a diagram illustrating the operation of the fluid control device 60 when the vibration unit 62 is driven at the high frequency side frequency f _H.

To drive the vibrating unit 62 at a high frequency side frequency f _H is the inner pressure of the pump chamber 65 when the vibrating portion 62 as shown on the left side in the drawing bends the bottom side becomes negative pressure. Then, the valve body 63A is displaced upward as in the second embodiment, approaches the flow path hole 66A, and shields the flow path hole 66A. Further, the valve body 63B is displaced upward as in the first embodiment, and is distant from the flow path hole 66B to open the flow path hole 66B. Accordingly, an external fluid is sucked into the pump chamber 65 through the flow path hole 66B.

  On the other hand, as shown in the right side of the drawing, when the vibrating section 62 is bent toward the top surface, the internal pressure of the pump chamber 65 becomes positive. Then, the valve body 63A is displaced downward similarly to the second embodiment, and is distant from the flow path hole 66A and opens the flow path hole 66A. Further, the valve body 63B is displaced downward similarly to the first embodiment, and approaches the flow path hole 66B to shield the flow path hole 66B. As a result, the fluid is discharged from the pump chamber 65 to the outside through the flow path hole 66A.

Thus, the fluid control device 60, when driving the vibration unit 62 in the high-frequency side frequency f _H, the valve body 63A, the above operation of 63B is repeated by vibrating section 62 vibrates the bending, the valve body 63B side From the valve body 63A, and a fluid flow is constantly generated.

Therefore, also in the fluid control device 60, by controlling so as to switch the driving frequency of the vibration unit 62 to the low-frequency side frequency f _L, or high-frequency side frequency f _H, the valve body 63A, 63B of the vibration phase (operation timing) And the direction of flow can be reversed.

<< First Example >>
Hereinafter, a first example of the present invention corresponding to the schematic configuration shown in the fifth embodiment will be described in detail.

  FIG. 8 is an external perspective view of the fluid control apparatus 50 according to the embodiment of the present invention as viewed from the top surface side. FIG. 9 is an external perspective view of the fluid control apparatus 50 shown in FIG. 8 as viewed from the bottom surface side. 10 is a cross-sectional view of the fluid control device 50 shown in FIG.

  As described above, the fluid control device 50 includes the housing 51, the vibration unit 52, the valve body 53, and the control unit 54.

  The casing 51 constitutes a pump chamber 55 and a first flow path hole 56. The casing 51 and the vibration part 52 are bonded together and configured in a disk shape as a whole. The casing 51 is configured in a container shape, and a pump chamber 55 is provided inside, and a first flow path hole 56 is provided in the center of the top surface. The pump chamber 55 has a cylindrical shape whose height is lower than the radius. The vibration unit 52 is attached to the bottom surface side of the housing 51.

  The vibration unit 52 includes a diaphragm 58 and a piezoelectric element 59. Further, the vibrating part 52 constitutes a second flow path hole 57. The diaphragm 58 is made of, for example, stainless steel (SUS). The diaphragm 58 has a disk shape with a radius larger than that of the piezoelectric element 59, and the piezoelectric element 59 is attached to the bottom side central portion. Further, the diaphragm 58 is provided with a second flow path hole 57 along the outer peripheral portion so as to surround the piezoelectric element 59. The piezoelectric element 59 has a disk shape, and is made of, for example, lead zirconate titanate ceramic. Electrodes (not shown) are formed on both main surfaces of the piezoelectric element 59. The piezoelectric element 59 has piezoelectricity that expands and contracts in the in-plane direction according to the applied drive voltage. Therefore, when the piezoelectric element 59 expands and contracts, a concentric bending vibration is generated in the diaphragm 58, and the center portion of the diaphragm 58 vibrates so as to be bent up and down. Since the outer periphery of the diaphragm is provided so that the second flow path hole 57 occupies a large area, the connection between the diaphragm and the casing is weak. Therefore, the bending vibration of the diaphragm is hardly transmitted to the top surface side.

  The valve body 53 is attached to the top surface side opening of the first flow path hole 56 of the housing 51. The valve body 53 has a shape in which a circular member is cut from the center. The outer end of the valve body 53 is fixed with an angle with respect to the top surface of the casing 51. There are a plurality of inner ends of the valve body 53, and each face the opening of the first flow path hole 56. The valve body 53 is made of a metal plate and has spring elasticity such that the vertical vibration of the inner end becomes the structural resonance frequency f0. Thus, since the valve body 53 is elastically supported by the top surface of the housing 51 in the vicinity of the opening on the top surface side of the first flow path hole 56, the fluctuation of the internal pressure in the pump chamber 55 is caused by the first flow path. By being transmitted through the hole 56, the inner end vibrates in the vertical direction.

Control unit 54, a drive voltage applied to the piezoelectric element 59 is switched to the low-frequency side frequency f _L, or high-frequency side frequency f _H. Thereby, in the fluid control device 50, the flow in the discharge direction for discharging the fluid from the valve body 53 side and the flow in the suction direction for sucking the fluid from the valve body 53 side can be controlled by switching the driving frequency.

Further, here, the control unit 54 adjusts the low frequency side frequency f _L or the high frequency side frequency f _H to the acoustic resonance frequency of the pump chamber 55. In particular, the low frequency side frequency f _L is matched with the low order acoustic resonance frequency of the pump chamber 55, and the high frequency side frequency f _H is matched with the high order acoustic resonance frequency of the pump chamber 55. The acoustic resonance frequency of the pump chamber 55 is the pressure vibration generated in the central portion of the pump chamber 55, the pressure vibration that propagates and reflects to the outer peripheral side, and reaches the central portion of the pump chamber 55 again. Is the frequency at which resonance occurs. In this way, at least the vicinity of the central portion in the planar direction becomes a bending vibration antinode, and at least the vicinity of the outer peripheral portion in the planar direction becomes a bending vibration node. That is, in the pump chamber 55, a standing wave-like pressure distribution is generated in the plane direction. As a result, in the vicinity of the first flow path hole 56 provided to face the central portion of the pump chamber 55 in the planar direction, the pressure fluctuation of the fluid becomes large and faces the outer peripheral portion of the pump chamber 55 in the planar direction. In the vicinity of the second flow path hole 57 provided, the pressure fluctuation of the fluid is almost eliminated. Therefore, if the second flow path hole 57 is communicated with the outer periphery of the pump chamber 55 in the plane direction, the pressure through the second flow path hole 57 can be obtained without providing a valve or the like in the second flow path hole 57. There is no loss. Therefore, the second flow path hole 57 can be formed in an arbitrary shape and size, and the flow rate of the fluid can be increased.

<< Second Embodiment >>
Hereinafter, the second example of the present invention corresponding to the schematic configuration shown in the sixth embodiment will be described in detail.

  FIG. 11 is a cross-sectional view of a fluid control device 60 according to an embodiment of the present invention.

  As described above, the fluid control device 60 includes the housing 61, the vibration unit 62, the valve bodies 63 </ b> A and 63 </ b> B, and the control unit 64.

  The casing 61 constitutes a pump chamber 65 and flow path holes 66A and 66B. The casing 61 is configured in a container shape, a pump chamber 65 is provided inside, and flow path holes 66A and 66B are provided in a part of the top surface.

  The vibration part 62 is attached to the bottom surface side of the housing 61. The vibration unit 62 includes a diaphragm 68 and a piezoelectric element 69. The piezoelectric element 69 has piezoelectricity that expands and contracts in the in-plane direction according to the applied drive voltage. Therefore, when the piezoelectric element 69 expands and contracts, a concentric bending vibration is generated in the diaphragm 68, and the center portion of the diaphragm 68 vibrates so as to be bent up and down. In the fluid control device 60, the vibration of the diaphragm 68 is transmitted to the housing 61, so that the housing 61 is also vibrated such that the central portion is bent up and down.

  The valve body 63 </ b> A is attached to the opening on the bottom surface side of the flow path hole 66 </ b> A of the housing 61. The valve body 63B is attached to the opening on the top surface side of the flow path hole 66B of the housing 61. Each of the valve bodies 63A and 63B is made of a metal plate, and has spring elasticity so that the vibration in the vertical direction becomes the structural resonance frequency f0.

  In this configuration, the valve bodies 63A and 63B are both provided on the top plate of the casing 61. However, the channel hole 66A is provided on the bottom surface side of the top plate, and the channel hole 66B is provided on the top surface side of the top plate. Since the valve body 63A and the valve body 63B are provided, the timing for opening the channel holes 66A and 66B and the timing for shielding the channel holes 66A and 66B can be reversed.

Accordingly, the control unit 64, a drive voltage applied to the piezoelectric element 69, by switching to the low-frequency side frequency f _L, or high-frequency side frequency f _H, the fluid control device 60, the direction of fluid flow of the drive frequency switching Can be controlled by.

<< Third embodiment >>
Hereinafter, a third example of the present invention corresponding to a modification in which the schematic configuration shown in the third embodiment and the schematic configuration shown in the sixth embodiment are combined will be described in detail.

  FIG. 12 is a cross-sectional view of a fluid control device 70 according to an embodiment of the present invention.

  The fluid control device 70 includes a casing 71, a vibration unit 72, valve bodies 73 </ b> A and 73 </ b> B, and a control unit 74.

  The casing 71 constitutes a pump chamber 75 and a flow path hole 76A. The casing 71 is configured in a vessel shape, and a pump chamber 75 is provided inside, and a flow path hole 76A is provided in a part of the top surface.

  The vibration unit 72 is attached to the bottom surface side of the housing 71. The vibration unit 72 includes a diaphragm 78 and a piezoelectric element 79. A piezoelectric element 79 is affixed to the bottom surface side of the diaphragm 78, and a flow path hole 76 </ b> B is provided in an outer peripheral side region surrounding the piezoelectric element 79 in the diaphragm 78. The piezoelectric element 79 has a piezoelectric property that expands and contracts in the in-plane direction according to the applied driving voltage. Therefore, when the piezoelectric element 79 expands and contracts, a concentric bending vibration is generated in the diaphragm 78, and the center portion of the diaphragm 78 vibrates so as to be bent up and down.

  The valve body 73 </ b> A is attached to the opening on the top surface side of the flow path hole 76 </ b> A of the housing 71. The valve body 73B is attached to the opening on the top surface side of the flow path hole 76B of the vibration part 72. The valve bodies 73A and 73B are each made of a metal plate and have spring elasticity such that the vibration in the vertical direction becomes the structural resonance frequency f0.

  In this configuration, the valve bodies 73A and 73B are both provided on the top surface side of the flow path holes 76 and 77. However, the top plate of the housing 71 provided with the flow path holes 76 and the flow path holes 77 are provided. The diaphragm 78 is vibrated so that the direction of vibration is opposite to that of the diaphragm 78. Therefore, the valve body 73A and the valve body 73B have a timing for opening the flow path holes 76 and 77, and the flow path holes 76 and 77. The timing for shielding can be set to the opposite timing.

Accordingly, the control unit 74, a drive voltage applied to the piezoelectric element 79, by switching to the low-frequency side frequency f _L, or high-frequency side frequency f _H, the fluid control device 70, and discharges the fluid from the valve body 73 side The flow in the discharge direction and the flow in the suction direction for sucking fluid from the valve body 73 side can be controlled by switching the driving frequency.

«Fourth embodiment»
Hereinafter, a fourth embodiment of the present invention corresponding to a further modification of the second embodiment will be described in detail.

Fluid control device 60 shown here is the same as the structure of the above configuration, the control unit 64, matched low-frequency side frequency f _L to a structural resonance frequency f1 of the first-order mode of the vibrating section 62. Further, the high frequency side frequency f _H is matched with the structural resonance frequency f 2 of the secondary mode of the vibration part 62. Therefore, the dimensions and materials of the vibration part 62 and the valve bodies 63A and 63B are such that the structural resonance frequency f1 of the primary mode of the vibration part 62 is lower than the structural resonance frequency f0 of the valve bodies 63A and 63B. The structural resonance frequency f2 of the secondary mode of the vibration part 62 is set to be higher than the structural resonance frequency f0 of the valve bodies 63A and 63B.

  Thus, by vibrating the vibrating part 62 at the structural resonance frequency f1 of the primary mode or the structural resonance frequency f2 of the secondary mode, the vibration amplitude generated in the vibrating part 62 is maximized by the resonance phenomenon. be able to. Therefore, the vibration transmitted to the valve bodies 63A and 63B can be increased, and the valve bodies 63A and 63B can be operated reliably. In addition, pump efficiency can be improved.

  FIG. 13 is a cross-sectional view of the fluid control device 60 in a state of operating at the structural resonance frequency f1 of the primary mode. FIG. 14 is a cross-sectional view of the fluid control device 60 in a state of operating at the structural resonance frequency f2 of the secondary mode. Here, the case where the valve bodies 63A and 63B vibrate mainly due to the vibration transmitted through the housing 61 will be described as an example.

When vibrating the vibrating portion 62 in the structure resonant frequency f1 of the first order mode (when driven at a low frequency side frequency f _L), as shown in FIG. 13 (A), the central portion is the bottom surface side of the vibrating portion 62 When being bent, the central portion of the top plate of the casing 61 is bent to the top surface side, and the volume of the pump chamber 65 is maximized. Further, as shown in FIG. 13B, when the central portion of the vibrating portion 62 is bent toward the top surface, the central portion of the top plate of the housing 61 is bent toward the bottom surface, and the volume of the pump chamber 65 is increased. Most decrease.

In the state shown in FIG. 13A, an excitation force that pulls upward acts on the valve body 63 </ b> A provided on the bottom surface side of the top plate of the housing 61. Here, the vibrating portion 62 to being driven at a low frequency side frequency f _L, the valve body 63A is displaced upward phase delay without relative excitation force. Therefore, the valve body 63A approaches the channel hole 66A and shields the channel hole 66A. On the other hand, an exciting force that pushes upward also acts on the valve body 63B provided on the top surface side of the top plate of the housing 61. Also here, the valve body 63B is displaced upward with no phase delay with respect to the excitation force. Accordingly, the valve body 63B is far from the channel hole 66B and opens the channel hole 66B. As a result, an external fluid is sucked into the pump chamber 65 through the flow path hole 66B.

  In addition, in the state shown in FIG. 13B, an excitation force that pushes down on the valve body 63A provided on the bottom surface side of the top plate of the casing 61 acts. Also here, the valve body 63A is displaced downward with no phase delay with respect to the excitation force. Therefore, the valve body 63A is far from the flow path hole 66A and opens the flow path hole 66A. On the other hand, an excitation force that pulls downward also acts on the valve body 63B provided on the top surface side of the top plate of the housing 61. Also here, the valve body 63B is displaced downward with no phase delay with respect to the excitation force. Therefore, the valve body 63B approaches the channel hole 66B and shields the channel hole 66B. Thereby, the fluid is discharged from the pump chamber 65 to the outside through the flow path hole 66A.

Therefore, the fluid control device 60, when driving the vibration unit 62 in the low frequency side frequency f _L, the valve body 63A, the above operation of 63B is repeated by vibrating section 62 vibrates the bending, the valve body 63B The flow of sucking fluid from the side and discharging fluid from the valve body 63A side is steadily generated.

Further, when the vibrating unit 62 is vibrated at the structural resonance frequency f2 of the secondary mode (when driven at the high frequency side frequency f _H ), as shown in FIG. When bending to the bottom surface side, a region on the outer peripheral side with respect to the central portion of the vibrating portion 62 is bent to the top surface side. Further, as shown in FIG. 14B, when the central portion of the vibrating portion 62 is bent toward the top surface, the region on the outer peripheral side than the central portion of the vibrating portion 62 is bent toward the bottom surface side. Thus, in the secondary mode vibration, the region near the center of the pump chamber 55 and the region on the outer peripheral side of the center of the vibration unit 62 are bent in opposite directions. Since the area of the outer peripheral side of the vibrating part 62 is larger than the area of the central part of the vibrating part 62, the entire volume of the pump chamber 65 is determined when the central part of the vibrating part 62 is bent toward the bottom side. It tends to increase most when the central portion of the vibration part 62 bends to the top surface side. Here, in the top plate of the housing 61, the channel holes 66 </ b> A and 66 </ b> B are disposed at positions that face the outer peripheral side region of the vibration unit 62.

In the state shown in FIG. 14A, the outer peripheral side region of the top plate is bent to the bottom surface side, so that the valve body 63A provided on the bottom surface side of the outer peripheral side region of the top plate is pushed downward. Exciting force like this works. Here, for the vibrating unit 62 is driven at a high frequency side frequency f _H, the valve body 63A is cause phase delay with respect to the excitation force, the excitation force displaced upward in reverse. Therefore, the valve body 63A approaches the channel hole 66A and shields the channel hole 66A. On the other hand, an exciting force that pulls downward also acts on the valve body 63B provided on the top surface side of the outer peripheral side region of the top plate. Here, the valve body 63B also has a phase delay with respect to the excitation force, and is displaced upward in contrast to the excitation force. Accordingly, the valve body 63B is far from the channel hole 66B and opens the channel hole 66B. The open / closed state of the valve body 63A and the valve body 63B is the same as the state shown in FIG. 13A. However, when the vibration unit 62 vibrates in the secondary mode, it is opposite to the vibration in the primary mode. When the area near the center of the pump chamber 65 is bent toward the bottom surface, the entire volume of the pump chamber 65 is reduced most. For this reason, fluid is discharged from the pump chamber 65 to the outside through the flow path hole 66B.

  In the state shown in FIG. 14 (B), the valve body 63A provided on the bottom surface side of the outer peripheral side region of the top plate is bent by the outer peripheral region of the top plate toward the top surface side. Exciting force that pulls upwards works. Here, the valve body 63A is delayed in phase with respect to the excitation force, and is displaced downward, contrary to the excitation force. Therefore, the valve body 63A is far from the flow path hole 66A and opens the flow path hole 66A. On the other hand, an exciting force that pushes upward also acts on the valve body 63B provided on the top surface side of the outer peripheral side region of the top plate. Here, the valve body 63B also has a phase delay with respect to the excitation force, and is displaced downward as opposed to the excitation force. Therefore, the valve body 63B approaches the channel hole 66B and shields the channel hole 66B. The open / closed state of the valve body 63A and the valve body 63B is the same as the state of FIG. 13B, but when the vibration part 62 vibrates in the secondary mode, contrary to the vibration in the primary mode, When the area near the center of the pump chamber 55 is bent toward the top surface, the entire volume of the pump chamber 65 increases most. For this reason, the fluid is sucked into the pump chamber 65 from the outside through the channel hole 66A.

Therefore, the fluid control device 60, when driving the vibration unit 62 in the high-frequency side frequency f _H, the valve body 63A, the above operation of 63B is repeated by vibrating section 62 vibrates the bending, the valve body 63A A flow of sucking fluid from the side and discharging fluid from the valve body 63B side is steadily generated.

Therefore, also in the fluid control device 60, by controlling so as to switch the driving frequency of the vibration unit 62 to the low-frequency side frequency f _L, or high-frequency side frequency f _H, it is possible to reverse the direction of flow.

  As shown in the above embodiments and examples, the present invention can be implemented. However, the above description should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above embodiments but by the claims. Furthermore, the scope of the present invention is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

10, 20, 30, 40, 50, 60 ... fluid control devices 11, 21, 31, 41, 51, 61 ... casings 12, 22, 32, 42, 52, 62 ... vibrating portions 13, 23, 33, 43 , 53, 63A, 63B ... valve bodies 14, 24, 34, 44, 54, 64 ... control units 15, 25, 35, 45, 55, 65 ... pump chambers 16, 17, 26, 27, 36, 37, 46 , 47, 56, 57, 66A, 66B ... flow passage holes 18, 28, 38, 48, 58, 68 ... diaphragms 19, 29, 39, 49, 59, 69 ... piezoelectric elements

Claims (9)

A casing constituting a pump chamber and a flow path leading to the pump chamber;
A vibrating section that causes fluctuations in the pressure of the gas in the pump chamber by vibrating;
A valve body supported by the vibrating part or the housing so as to be elastically displaceable between a position approaching the opening of the flow path and a position distant from the opening of the flow path;
The drive frequency of the vibration part is switched between a first frequency at which the valve body vibrates in the same phase as the vibration part and a second frequency at which the valve body vibrates in a phase opposite to that of the vibration part. A control unit;
A gas control device comprising: The flow path includes a first flow path and a second flow path that communicate with each other via the pump chamber,
The gas control device according to claim 1, wherein the valve body includes a first valve body attached to the first flow path and a second valve body attached to the second flow path. The gas control device according to claim 1 or 2, wherein the valve body is a metal plate that is fixed on one end side and swings on the other end side. The gas control device according to any one of claims 1 to 3, wherein the first frequency or the second frequency is a structural resonance frequency of the vibrating section. The first frequency is a low-order structural resonance frequency of the vibration unit,
The gas control device according to claim 4, wherein the second frequency is a higher-order structural resonance frequency of the vibration unit. The pump chamber is cylindrical with a height lower than the radius,
The gas control device according to any one of claims 1 to 3, wherein the flow path hole provided with the valve body is provided near a center of the pump chamber. The gas control device according to claim 6, wherein the first frequency or the second frequency is an acoustic resonance frequency of the pump chamber. The first frequency is a low-order acoustic resonance frequency of the pump chamber,
The gas control device according to claim 7, wherein the second frequency is a higher-order acoustic resonance frequency of the pump chamber. The gas control device according to claim 1, wherein the vibration unit includes a piezoelectric element that vibrates when a drive voltage is applied.

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