JP6120648B2 - Correction member manufacturing apparatus and correction member manufacturing method - Google Patents

Description

  The present invention relates to a correction member manufacturing apparatus and a correction member manufacturing method, and more particularly, a correction member manufacturing apparatus for manufacturing a correction member used for removing defects in a defect correction apparatus for correcting a defect of a fine pattern on a substrate. The present invention also relates to a method for manufacturing a correction member.

  A substrate used for a flat panel display is manufactured by laminating a pattern or a thin film on a substrate such as glass or resin. For example, a color filter substrate used for a flat panel display is produced by laminating a colored layer and a protective layer on a glass substrate.

  In the production of the color filter substrate, a lump in a liquid material such as a resist, which is a material for forming the colored layer or the protective layer, or dust in the atmosphere is a foreign substance in the colored layer and the protective layer. May be mixed. It is difficult to remove foreign matter mixed in the thin film by a method such as cleaning or air blowing, and the foreign matter is removed by a method such as laser irradiation or polishing. Further, as another method for removing foreign matter, a method for removing foreign matter by operating a correction needle has been proposed (see, for example, Patent Documents 1 to 5). In general, in a defect correction apparatus that removes foreign matter with a correction needle, the correction needle is held by a correction needle holding portion of the defect correction apparatus as a correction member connected and fixed to the needle holder.

JP 2002-131527 A JP 2008-261995 A JP 2009-272484 A JP 2010-152078 A JP-A-2005-107318

  However, in the methods proposed in Patent Documents 1 to 5, a correction needle having a conical shape and having a flat surface or a spherical surface formed at the tip is used as the correction needle. The radius of the flat surface and spherical surface formed at the tip of the correction needle is several μm to several tens of μm. In this case, in the removal of the foreign matter by the correction needle, there is a problem that the color filter substrate is easily damaged because the correction needle makes point contact with the colored layer and the protective layer formed on the glass substrate or the glass substrate. .

  The inventors of the present application have made extensive studies to solve the above-mentioned problems, and are developing a defect correction apparatus capable of removing foreign matters while the ridge line portion of the correction needle is in line contact with the surface of the substrate.

  With reference to FIGS. 6 and 9, in the defect correction apparatus for removing the foreign matter 23 on the substrate 22 by the correction needle 11, the correction needle is used to reduce damage to the substrate 22 by the correction needle 11 during correction. It is preferable that a linear ridge line part 11 d is formed at the tip of 11 and the ridge line part 11 d is in line contact with the surface of the substrate 22. In order to achieve line contact with the surface of the substrate 22, it is required that the positional relationship between the ridge line portion 11d of the correction needle 11 and the surface of the substrate 22 to be corrected is ideally parallel.

  At this time, as described above, when the correction needle is held as a correction member in the correction needle holding portion of the defect correction device, there is the following problem in bringing the ridge line portion into line contact with the surface of the substrate. To do.

  In order to connect and fix the correction needle formed with the ridge line portion to the needle holder as a correction member, it is necessary to adjust the contact angle of the correction needle with the needle holder with extremely high accuracy. This is because the parallelism between the substrate mounting portion for mounting the substrate to be corrected and the correction needle holding portion in the defect correction device is not strictly constant but has a value unique to the device. This is because it is necessary to manufacture a correction member according to the above.

  However, the angle of the ridge line formed on the correction needle with respect to the needle holder is accurately adjusted so that the ridge line of the correction needle and the surface of the substrate are parallel, and the correction needle is connected and fixed to the needle holder. It ’s difficult. That is, with the above method, it is difficult to produce a correction needle that can reduce damage to the substrate when the foreign matter on the substrate is removed by the correction needle.

  The present invention has been made to solve the above-described problems. A main object of the present invention is to provide a correction member manufacturing apparatus and a correction member that can easily manufacture a correction needle that can reduce damage to the substrate when foreign substances on the substrate are removed by the correction needle. It is to provide a method.

The correction member manufacturing apparatus of the present invention is a correction member manufacturing apparatus for manufacturing a correction member, which is used for removing defects in a defect correction apparatus for correcting a defect of a fine pattern on a substrate, and is a correction member connected to a needle holder. A correction needle holding part that holds a correction member including a needle through a needle holder, a polishing part that polishes the needle tip part of the correction needle, and a correction needle holding part with the needle tip part contacting the surface of the polishing part And a drive unit that moves the part relative to the polishing unit. The correction needle holding unit moves in a specific direction relative to the polishing unit by the driving unit in a contact state, and the polishing unit can change the inclination angle of the surface in a plane intersecting the direction. . The correction needle holding part can change the contact angle of the needle tip part with respect to the surface of the polishing part. Here, the contact angle of the correction needle to the surface of the polishing portion refers to an angle formed by the surface of the polishing portion and the longitudinal direction of the correction needle. This makes it possible to polish the tip of the correction needle with the correction needle connected to the needle holder, that is, as the correction member, so that the angle of the correction needle relative to the needle holder can be accurately determined. A ridge line portion can be formed. Therefore, it is possible to easily manufacture a correction member that can reduce damage to the substrate when the foreign matter on the substrate is removed by the correction needle. Furthermore, a correction needle suitable for the substrate is prepared by setting the surface inclination angle according to the mechanical condition (tilt) of the substrate mounting surface in the defect correction apparatus and polishing the needle tip of the correction needle. Can do. Furthermore, the angle at which the adjacent surfaces across the ridge line at the needle tip of the correction needle intersect (or the apex angle when the ridge line is the apex) can be arbitrarily selected and processed by the defect correction device. A correction needle suitable for the target substrate and foreign matter can be produced.

  The correction needle holding part may include a magnetic field generating member that attracts the needle holder by magnetic force. Thereby, the correction needle holding part can hold the needle holder by magnetic force.

  The correction needle holding unit moves in a specific direction relative to the polishing unit by the driving unit in a contact state, and the polishing unit can change the inclination angle of the surface in a plane intersecting the direction. It may be. As a result, the inclination angle of the surface is set according to the mechanical condition (inclination) of the substrate mounting surface in the defect correction apparatus, and the correction needle suitable for the substrate is manufactured by polishing the needle tip of the correction needle. be able to.

  The polishing part may include an abrasive material on the surface. Thereby, the needle tip portion of the correction needle can be polished by moving the correction needle holding portion relative to the polishing portion.

  The correction needle holding part may be capable of changing the contact angle of the correction needle with the surface of the polishing part. Here, the contact angle of the correction needle to the surface of the polishing portion refers to an angle formed by the surface of the polishing portion and the longitudinal direction of the correction needle. As a result, it is possible to arbitrarily select an angle at which the adjacent surfaces across the ridge line part at the needle tip part of the correction needle (or an apex angle when the ridge line part is a vertex) can be selected. A correction needle suitable for a substrate and foreign matter to be processed can be produced.

  The drive unit can make the correction needle holding unit movable so as to relieve an external force applied to the correction needle when the correction needle comes into contact with the polishing unit. Thereby, damage to the correction needle can be suppressed.

The correction member manufacturing method of the present invention is a correction member that is held by a correction member holding unit and used for removing defects in a defect correction device that corrects a defect in a fine pattern on a substrate mounted on a substrate mounting unit. A method of manufacturing a correction member for manufacturing a correction needle, the step of attaching a correction needle connected to the needle holder to the correction needle holding portion via the needle holder, and bringing the needle tip of the correction needle into contact with the surface of the polishing portion And a step of polishing the tip end portion of the needle tip by driving the correction needle holding portion relative to the polishing portion. In the polishing process, based on the parallelism between the correction member holding part and the substrate mounting part of the defect correction device acquired in advance, the contact angle of the needle tip with respect to the surface of the polishing part and the correction needle holding part in the contact state are After the inclination angle of the surface of the polishing part is set in a plane that intersects the direction of movement relative to the polishing part, the tip of the needle is polished. As a result, the tip of the correction needle can be polished as a correction member in a state where the correction needle is connected to the needle holder, that is, when the foreign matter on the substrate is removed by the correction needle, the damage to the substrate is reduced. A correction needle that can be easily manufactured.

  ADVANTAGE OF THE INVENTION According to this invention, the correction needle | hook which can reduce the damage given to the said board | substrate when removing the foreign material on a board | substrate with a correction needle | hook can be manufactured easily.

It is the schematic of the correction member manufacturing apparatus which concerns on this Embodiment. It is the schematic of the correction member used for the correction member manufacturing apparatus which concerns on this Embodiment. It is a figure for demonstrating the correction needle | hook holding | maintenance part of the correction member manufacturing apparatus which concerns on this Embodiment. It is a figure for demonstrating operation | movement of the correction member manufacturing apparatus which concerns on this Embodiment. It is the schematic when a correction member is attached to the correction member manufacturing apparatus which concerns on this Embodiment. It is the schematic which shows the example which used the correction member manufactured by the correction member manufacturing apparatus which concerns on this Embodiment for defect correction. FIG. 7 is a side view of FIG. 6. It is a schematic end view which shows the structure of the correction member which concerns on embodiment seen from the direction shown by the arrow D in FIG. It is the schematic which shows the example which used the modification of the correction member manufactured by the correction member manufacturing apparatus concerning this Embodiment for defect correction. FIG. 10 is a side view of FIG. 9. It is a schematic end view which shows the structure of the correction member which concerns on embodiment seen from the direction shown by the arrow E in FIG. It is a figure which shows the flow of the manufacturing method of the correction member which concerns on this Embodiment.

  Embodiments of the present invention will be described below. The correction member manufacturing apparatus according to the present embodiment is a correction member manufacturing apparatus that manufactures, as a correction member, a correction needle that is used to remove a defect in a defect correction apparatus that corrects a fine pattern defect on a substrate.

  The correction needle is preferably provided so that the tip of the needle tip is in line contact with the substrate surface in the defect correction apparatus. For this reason, an appropriate correction needle shape is determined according to the mechanical conditions of the defect correction apparatus and the state of the substrate to be corrected. The correction member manufacturing apparatus according to the present embodiment processes the tip of the correction needle so that the tip of the correction needle is in line contact with the substrate surface while the correction needle is connected and fixed to the needle holder. A correction member manufacturing apparatus for manufacturing a correction member including a correction needle having an appropriate shape.

  First, with reference to FIG. 1 and FIG. 5, the structure of the correction member manufacturing apparatus 1 which concerns on this Embodiment is demonstrated. The correction member manufacturing apparatus 1 according to the present embodiment includes a surface plate 2, an X stage 3, a correction needle holding device 4, a Z stage 5, a correction needle holding part 6, a magnetic field generating member 7, and a polishing part. 8 and an abrasive material 9.

  The surface plate 2 is provided with an X stage 3. The X stage 3 holds the correction needle holding device 4 movably in the X direction in FIG.

  The correction needle holding device 4 is provided with a Z stage 5. The Z stage 5 holds the correction needle holder 6 so as to be movable in the Z direction in FIG.

  The correction needle holder 6 is configured to hold the correction needle 11 via the needle holder 12. That is, the correction needle holding part 6 is configured to hold the correction member 10. Specifically, the correction needle holder 6 is provided with a magnetic field generating member 7 that attracts the needle holder 12 to the holding surface 6a (see FIG. 3) by a magnetic force. The magnetic field generating member 7 is made of any material that generates a magnetic field, and is, for example, a magnet. Moreover, the material which generate | occur | produces an electromagnetic field may be sufficient, and it is good also as an electromagnet which consists of a magnetic material and a coil.

  Referring to FIG. 3, the correction needle holding portion 6 is configured to be able to rotate the holding surface 6 a around a fulcrum 6 b that is a connection portion between the Z stage 5 and the correction needle holding portion 6.

  Further, when a force above a certain level is applied to the correction needle holding unit 6 in the upward direction, the correction needle holding unit 6 moves in the direction in which the force is applied independently of driving the Z stage 5. Is configured to move freely.

  A polishing unit 8 is further installed on the surface plate 2. A polishing material 9 is provided on the upper surface of the polishing portion 8 in the Z direction. As a material constituting the polishing material 9, any material having a higher hardness than the material of the correction needle can be used. At this time, since the correction needle holding part 6 is configured to be able to rotate the holding surface 6a as described above, the contact angle θ1 of the correction needle 11 with respect to the polishing material 9 can be changed in the XZ plane in FIG. It is.

  The polishing unit 8 intersects the direction in which the correction needle holding unit 6 is moved relative to the polishing unit 8 by the drive unit in a state where the needle tip of the correction needle 11 and the surface of the polishing unit 8 are in contact with each other. The inclination angle of the surface can be changed in the plane to be changed. Here, the “surface” refers to the surface of the polishing portion 8 provided with the polishing material 9. The “surface inclination angle” refers to a surface intersecting with the longitudinal direction of the correction needle 11 (a surface perpendicular to the longitudinal direction in FIG. 5) and a main surface (largest surface) of the needle holder 12 with reference to FIG. 3 is the angle θ2 formed by the intersection line L with the plane along the holding surface 6a) in FIG. When the polishing material 9 is provided on the upper surface (XY plane) of the polishing unit 8, the correction needle holding unit 6 reciprocates in the X-axis direction with the tip of the needle being in contact with the polishing material 9 during polishing. Moved. Therefore, the polishing unit 8 in this case is provided such that the surface inclination angle θ2 can be changed in the direction of the arrow C in a plane intersecting the X-axis direction. Preferably, the polishing section 8 is provided such that the surface inclination angle θ2 can be changed in the direction of arrow C in the YZ plane which is a plane perpendicular to the X-axis direction.

  Any method can be used to change the surface inclination angle θ2. For example, the upper surface (polishing surface) of the abrasive material 9 is inclined with respect to the bottom surface of the abrasive material 9, and a plurality of types of abrasive materials 9 having different inclination angles are prepared, according to the required inclination angle. The abrasive material 9 may be replaced.

  The X stage 3 and the Z stage 5 hold the correction needle holding part 6 movably relative to the polishing part 8 and the polishing material 9 in the X direction and the Z direction in FIG. The X stage 3 and the Z stage 5 are driven by an instruction from a control unit (not shown).

  Next, with reference to FIG. 2, the correction member 10 as a workpiece material held by the correction needle holding part 6 will be described. The correction member 10 includes a correction needle 11 and a needle holder 12. The correction needle 11 has a conical shape, and the bottom surface side is connected and fixed to the needle holder 12. For example, the needle holder 12 is provided with a hole through which the bottom surface side of the correction needle 11 can be inserted, and the correction needle 11 is inserted into the hole and bonded to the needle holder 12. Further, the needle holder 12 is provided with a magnetic field generating member 13 on a held surface 12a that is a main surface facing the holding surface 6a of the correction needle holding portion 6. The magnetic field generating member 13 is made of any material that generates a magnetic field, and is a ferromagnetic material such as a magnet. In this way, referring to FIG. 5, the needle holder 12 is caused by the magnetic force generated between the magnetic field generating member 13 and the magnetic field generating member 7 (see FIG. 1) provided in the correction needle holding unit 6. Further, it is detachably held from above the correction needle holding portion 6 (upward in the Z direction in FIG. 5).

  4 and 5, after the correction needle holding portion 6 holds the correction needle 11 via the needle holder 12, the X stage 3 is in the direction of arrow A and the Z stage 5 is in the direction of arrow B. To drive. In this way, the needle tip of the correction needle 11 is brought into contact with the surface of the polishing portion 8, and the correction needle holding portion 6 is moved relative to the polishing material 9 in the contacted state, thereby correcting the correction needle. 11 can be polished.

  As described above, in the correction member manufacturing apparatus according to the present embodiment, since the correction needle holding unit 6 is configured to be able to rotate the holding surface 6a around the fulcrum 6b, the needle holder 12 is placed on the holding surface 6a. Can be changed, the contact angle θ1 of the correction needle 11 with respect to the surface of the polishing portion 8 can be changed. Further, the polishing section 8 is provided so that the surface inclination angle θ <b> 2 can be changed in a direction perpendicular to the longitudinal direction of the correction needle 11.

  By doing in this way, the positional relationship between the correction needle holding part 6 and the polishing material 9 in the correction member manufacturing apparatus 1 according to the present embodiment is such that the correction needle holding part and the substrate to be corrected in the defect correction apparatus. It can be set to be the same as the relative positional relationship. For example, the contact angle θ1 is set according to the angle formed between the holding surface of the correction needle holding portion and the substrate surface in the defect correction apparatus in a plane perpendicular to the holding surface, and the surface inclination angle θ2 is set to the defect correction. It can be set according to the mechanical conditions (tilt with respect to the horizontal plane, etc.) of the substrate mounting surface in the apparatus. After setting in this way, by correcting the tip of the correction needle 11, the correction needle having a ridge line portion 11 d that is parallel and line-contactable with the substrate to be corrected in the defect correction apparatus. Can be easily manufactured. As a result, the correction needle produced by the correction member manufacturing apparatus according to the present embodiment can reduce damage to the substrate that is the target of defect correction.

  In the present embodiment, the correction needle holding portion 6 is configured to be able to rotate the holding surface 6a around a fulcrum 6b that is a connection portion between the Z stage 5 and the correction needle holding portion 6, and the polishing portion 8 is corrected. The inclination angle θ2 of the surface is changed in a plane perpendicular to the direction in which the needle holding unit 6 is moved relative to the polishing unit 8 by the drive unit in a state where the tip of the needle and the surface of the polishing unit 8 are in contact with each other. Although it is possible, it is not limited to this. For example, the holding surface 6a may be fixed with respect to the fulcrum 6b, and the inclination angle θ2 of the surface of the polishing unit 8 may be provided constant. Even in this case, when the relative positional relationship between the correction needle in the defect correction apparatus and the substrate to be corrected is constant and it is sufficient to produce the correction needle 11 having a single shape, The correction needle 11 that can reduce damage to the substrate when the foreign matter on the substrate is removed by the correction needle 11 can be easily manufactured. Further, the holding surface 6a may be fixed to the fulcrum 6b and provided so that the inclination angle θ2 of the surface of the polishing portion 8 can be changed. In this way, even when the parallelism between the substrate mounting portion on which the substrate is mounted in the defect correction device and the parallelism of the correction needle holding portion has a value unique to each of the plurality of defect correction devices, each defect correction device The correction needle 11 that is parallel to the substrate mounting portion when held by the correction needle holding portion can be produced.

  In addition, referring to FIG. 4, in the correction member manufacturing apparatus 1 according to the present embodiment, when the correction needle holding unit 6 is applied with a certain force or more upward, the correction needle holding unit 6 is The stage 5 is configured to be movable independently of the drive of the stage 5. Thereby, when the correction needle 11 is in contact with the polishing material 9 and an excessive force is applied to the correction needle 11 as in the case where the Z stage 5 is further driven to lower the correction needle holding portion 6. In other words, the correction needle holding portion 6 can move in a direction to retract from the abrasive material 9. As a result, the force applied to the correction needle holding unit 6 can be reduced, and damage to the correction needle 11 can be suppressed.

  In the correction member manufacturing apparatus according to the present embodiment, the correction needle holding unit 6 is configured to be movable by the X stage 3 and the Z stage 5, but is not limited thereto. For example, a Y stage that can move the correction needle holder 6 in the Y direction in FIG. 1 may be provided.

  4 and 5, in the correction member manufacturing apparatus 1 according to the present embodiment, the polishing material 9 is provided on the upper surface in the Z direction of the polishing portion 8, but the present invention is not limited to this. . In the polishing unit 8, the polishing material 9 may be provided on the surface that is not in contact with the surface plate 2. For example, in the polishing unit 8, the polishing material 9 may be provided on the side surface (YZ plane). In this case, the needle tip portion of the correction needle 11 is moved by driving the correction needle holding portion 6 relative to the polishing portion 8 in the Z-axis direction with the needle tip portion in contact with the polishing material 9. Polishing with the polishing material 9 is possible. Therefore, the inclination angle of the surface in this case may be provided so as to be changeable within a plane intersecting the Z axis, and preferably provided so as to be changeable within an XY plane perpendicular to the Z axis.

  In the correction member manufacturing apparatus 1 according to the present embodiment, a plurality of types of polishing materials may be provided side by side on the same surface of the polishing unit 8. Thereby, a plurality of types of processing can be performed on the correction needle 11.

  In addition, referring to FIG. 2, the correction needle 11 as the work material in the present embodiment has a conical shape, but is not limited thereto. For example, a pyramid shape, a cylinder, or a prism shape may be used. If the shape closest to the appropriate shape of the correction needle described above is used, it is possible to reduce the processing time until this is polished to obtain an appropriate shape. If the conical correction needle is processed by the correction member manufacturing apparatus 1 according to the present embodiment, for example, the correction needle 11 shown in FIGS. 6 to 8 can be obtained. Moreover, if the prismatic correction needle is processed by the correction member manufacturing apparatus according to the present embodiment, for example, the correction needle 11 shown in FIGS. 9 to 11 can be obtained.

  Next, the manufacturing method of the correction member which concerns on this Embodiment is demonstrated. A method for manufacturing a correction member according to the present embodiment is a method for manufacturing a correction member for manufacturing a correction member used for removing a defect in a defect correction apparatus for correcting a fine pattern defect on a substrate. It implements by using and operating the correction member manufacturing apparatus 1 which concerns on a form. As described above, the corrective needle 11 has an appropriate shape depending on the mechanical conditions of the defect correcting device and the substrate to be corrected. The manufacturing method of the correction member 10 according to the present embodiment is a correction member manufacturing the correction member 10 including the correction needle 11 having an appropriate shape by processing the correction needle 11 connected and fixed to the needle holder 12. It is a manufacturing method.

  Referring to FIG. 12, the method for manufacturing a correction member according to the present embodiment includes a step of attaching correction needle 11 connected to needle holder 12 to correction needle holding portion 6 via needle holder 12 (S01). The step of polishing the tip end portion of the needle tip by driving the correction needle holding portion relative to the polishing portion while the tip end portion of the correction needle 11 is in contact with the surface of the polishing material 9 (S02). With.

  First, referring to FIGS. 1 and 2, in step (S01), a conical correction needle 11 connected and fixed to the needle holder 12 is prepared. The needle holder 12 is provided with a magnetic field generating member 13, and the magnetic field provided on the magnetic field generating member 13 and the holding surface 6 a by placing the needle holder 12 on the holding surface 6 a of the correction needle holding unit 6. The generating member 7 is adsorbed to each other. Thereby, the needle holder 12 can be attached to the correction needle holding part 6.

  Next, referring to FIGS. 3 to 5, in the step (S <b> 02), first, the correction according to the present embodiment is performed based on the parallelism between the correction needle holding unit and the substrate mounting unit in the defect correction apparatus acquired in advance. The mechanical conditions of the member manufacturing apparatus 1 are set. The mechanical condition is, for example, a condition for determining the relative positional relationship between the correction needle 11 and the polishing portion 8, and the contact angle θ 1 of the correction needle 11 with respect to the surface of the polishing portion 8 and the length of the correction needle 11. The inclination angle of the surface of the polishing part 8 in a direction perpendicular to the direction is exemplified.

  After setting the correction needle holding unit 6 and the polishing unit 8, the correction needle holding unit 6 is moved by driving the X stage 3 and the Z stage 5, and the tip of the correction needle 11 is brought into contact with the polishing material 9. Thereafter, the contact load of the correction needle 11 may be adjusted by further driving the Z stage 5 so that the correction needle holding portion 6 approaches the polishing material 9 or is retracted from the polishing material 9. At this time, the contact load applied to the correction needle 11 is also transmitted to the correction needle holding portion 6 via the needle holder 12. When the correction needle holding portion 6 receives a force exceeding a certain level, the correction needle holding portion 6 moves in a direction to retract from the abrasive material 9.

  After the correction needle 11 and the polishing material 9 are in contact with each other, the correction needle 11 is polished by driving the X stage 3 and the Z stage 5. As the polishing progresses, the contact area between the correction needle 11 and the polishing material 9 increases. Therefore, the Z stage may be driven to keep the contact pressure constant.

  Further, when it is necessary to polish both surfaces of one correction needle, after the step (S02) is completed, the needle holder 12 of the correction needle 11 is again attached to the correction needle holding unit 6 in the step (S01). You may reattach and perform a process (S02).

  Next, the correction needle manufactured by the correction member manufacturing apparatus and the correction member manufacturing method according to the present embodiment will be exemplified.

  With reference to FIGS. 6 to 8, a conical correction needle 11 includes a first flat surface 11 a perpendicular to the longitudinal direction of the correction needle 11 and a second surface that intersects the first flat surface 11 a and faces the substrate 22. A case of processing the correction needle 11 including the flat surface 11b and the third flat surface formed on the side opposite to the second flat surface 11b when viewed from the first flat surface 11a will be described. At this time, the angle formed between the second flat surface 11b and the third flat surface 11c of the correction needle 11 is θ3, and the needle tip portion of the correction needle 11 is held with respect to the held surface 12a of the needle holder 12. Processing is performed to have a predetermined inclination angle θ4.

  First, the inclination angle θ2 of the surface of the polishing unit 8 is set according to the parallelism between the correction needle holding unit and the substrate mounting unit in the defect correction apparatus. Next, polishing is performed by setting the contact angle θ1 of the correction needle 11 to the surface of the polishing portion 8 to θ3 / 2 to form the second flat surface 11b. After the predetermined polishing is completed, the needle holder 12 is reversed and attached so that the held surface 12a faces the holding surface 6a of the correction needle holding portion 6. Thereafter, the third flat surface 11c is formed by polishing again with the contact angle θ1 as θ3 / 2.

  Further, the first flat surface 11 a is formed by polishing the holding surface 6 a of the correction needle holding portion 6 perpendicular to the polishing material 9. Thereby, the correction needle | hook 11 shown to FIGS. 6-8 is producible. At this time, the ridge line portion 11d is constituted by an intersection line of the first flat surface 11a and the second flat surface 11b, and when the correction needle 11 is held by the correction needle holding portion in the defect correction device, It can be parallel to the substrate mounting portion.

  9 to 11, the prismatic correction needle 11 includes a first flat surface 11 a and a second flat surface 11 b that intersects the first flat surface 11 a and faces the substrate 22. The case where the second flat surface 11b is processed into the correction needle 11 formed as a surface parallel to the longitudinal direction of the correction needle 11 will be described.

  In this case, in order to process the angle formed by the first flat surface 11a and the second flat surface 11b to be θ5, polishing is performed with the contact angle θ1 of the correction needle 11 with respect to the surface of the polishing portion 8 as θ5. The second flat surface 11b is formed. Thereby, the correction needle | hook 11 shown to FIGS. 9-11 is producible. At this time, the ridge line portion 11d is configured by a line of intersection between the first flat surface 11a and the second flat surface 11b.

  As described above, according to the manufacturing method of the correction member manufacturing apparatus according to the present embodiment, the substrate can be removed when the foreign matter on the substrate is removed by the correction needle by using the correction member manufacturing apparatus according to the present embodiment. It is possible to easily manufacture a correction needle that can reduce damage to the needle.

  Although the embodiment of the present invention has been described above, the above-described embodiment can be variously modified. The scope of the present invention is not limited to the above-described embodiment. The scope of the present invention is defined by the terms of the claims, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

  The correction member manufacturing apparatus and the correction member manufacturing method of the present invention are particularly advantageously applied to a defect correction apparatus and a defect correction method that are required to suppress damage to a substrate due to contact of a correction needle.

  DESCRIPTION OF SYMBOLS 1 Correction member manufacturing apparatus, 2 Surface plate, 3 X stage, 4 Correction needle holding device, 5 Z stage, 6 Correction needle holding part, 6a Holding surface, 6b A fulcrum, 7, 13 Magnetic field generating member, 8 Polishing part, 9 Polishing Materials 10 Correction member 11 Correction needle 11a 1st flat surface 11b 2nd flat surface 11c 3rd flat surface 11d ridgeline part 12 needle holder 12a surface to be held 22 substrate 23 foreign material

Claims (5)

A correction member manufacturing apparatus for manufacturing a correction member used for removing the defect in a defect correction apparatus for correcting a defect of a fine pattern on a substrate,
A correction needle holding portion that holds the correction member including the correction needle connected to the needle holder via the needle holder;
A polishing portion for polishing the needle tip of the correction needle;
A drive unit that moves the correction needle holding unit relative to the polishing unit in a state where the needle tip is in contact with the surface of the polishing unit ;
The correction needle holding unit moves in a specific direction relative to the polishing unit by the driving unit in the contact state,
The polishing section is capable of changing the tilt angle of the surface in a plane intersecting the direction,
The correction needle holding unit is a correction member manufacturing apparatus capable of changing a contact angle of the needle tip with respect to the surface of the polishing unit .   The correction member manufacturing apparatus according to claim 1, wherein the correction needle holding unit includes a magnetic field generation member that adsorbs the needle holder by a magnetic force. It said polishing unit includes a polishing material to the surface, modifying member manufacturing apparatus according to claim 1 or 2. The drive unit, when the modified needle is in contact with the polishing portion, so as to alleviate the external force is loaded to the modified needle, to allow moving the modified needle holder, claim 1-3 The correction member manufacturing apparatus according to Item 1. A correction member manufacturing method for manufacturing a correction member that is held by a correction member holding unit and used to remove the defect in a defect correction device that corrects a fine pattern defect on a substrate mounted on the substrate mounting unit. There,
Attaching the correction needle connected to the needle holder to the correction needle holder via the needle holder;
And a step of polishing the needle tip by driving the correction needle holding part relative to the polishing part in a state where the needle tip of the correction needle is in contact with the surface of the polishing part. ,
In the polishing step, based on the parallelism between the correction member holding portion and the substrate mounting portion of the defect correction device acquired in advance, the contact angle of the needle tip with respect to the surface of the polishing portion, and the contact In this state, after the correction needle holding part is set with the inclination angle of the surface of the polishing part in a plane intersecting with the direction of movement relative to the polishing part, the needle tip part is polished. The manufacturing method of a correction member.

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