JP6124445B2 - Tension fluctuation suppressing method and tension fluctuation suppressing apparatus - Google Patents

Description

  The present invention relates to a method and apparatus for suppressing rapid fluctuations in web tension in an apparatus for applying tension to a web.

  In the present invention, the web refers to a long traveling object such as a woven fabric, paper, film (photographic film, battery electrode film), wire, thread, strap, rope, or the like.

  For example, a wire saw processes a workpiece by running the wire and pressing the running wire against a workpiece such as a semiconductor ingot. During processing, the wire is controlled by a tensioning device to run at a target tension for stable processing.

  Patent Document 1 discloses a dancer-roller type tension in which a cutting wire is wound around a guide roller, and the guide roller is urged in a tension applying direction by a dancer arm and a servo motor to apply a target tension to the running cutting wire. A grant mechanism is disclosed.

  According to the technique of Patent Document 1, when the tension of the cutting wire during travel changes suddenly, the servo motor drives the dancer arm in a direction to correct the tension of the cutting wire during travel to the target tension. Follow to move. At this time, the inertial energy accompanying the acceleration during the movement of the dancer arm is applied as an impact to the tension of the cutting wire that is running, so that the control tends to be complicated and unstable.

  Further, Patent Document 2 wraps a long film around a dancer roll in order to quickly absorb a change in tension of the long film while traveling, and urges the dancer roll in a tension applying direction by a servo motor. A film transport device for applying a target tension to a long film while traveling is disclosed.

  According to the technique of Patent Document 2, a servo motor is used as a tension detecting means for a long film and a tension applying means, and a speed detecting means and a speed difference detecting means are required upstream and downstream of the long film. Therefore, the control system becomes complicated.

Japanese Patent Laid-Open No. 9-225936 JP 2001-213557 A

Accordingly, an object of the present invention, the tensioning device for applying tension to the web by an actuator, when a sharp decrease in the web tension, by suppressing the rapid speed change of the dancer arm, prevents large fluctuations in the tension, It is to stabilize the tension control in a short time and to prevent the dancer arm from colliding with the stopper.

Based of the above problems, the present invention detects the speed of the dancer arm during the operation of the tensioning device, along with the sharp decrease in web tension can and become detected speed ≧ upper speed limit, the correction signal based on said speed is negatively fed back to the command signal, - and is decelerated by driving the rotary actuator or linear actuator, the speed of the dancer arm by a (command signal correction signal).

  More specifically, in the tension fluctuation suppressing method according to the present invention, a dancer roller is rotatably supported on a movable dancer arm, an actuator is connected to the dancer arm, a web is wound around the dancer roller, and the actuator is controlled by a command signal. In the tension applying device that urges the dancer arm in the direction of applying tension to the web by driving and applies a target tension to the running web, the speed of the dancer arm is increased during the operation of the tension applying device. When a detected speed is equal to or higher than the upper limit speed due to a rapid decrease in the tension of the web, a correction signal based on the speed is negatively fed back to the command signal, and (command signal−correction signal) By driving the actuator, the speed of the dancer arm is reduced. Are (claim 1).

  The tension fluctuation suppressing device according to the present invention includes a dancer roller rotatably supported on a movable dancer arm, an actuator coupled to the dancer arm, a web wound around the dancer roller, and the actuator driven by a command signal. In a tension applying device that applies a target tension to the running web by urging the dancer arm in a tension applying direction to the web, a command device that generates the command signal, and the actuator using the command signal as an input A speed amplifier for detecting the speed of the dancer arm, a speed detected by the speed detector and a preliminarily inputted upper limit speed, and a rapid decrease in the tension of the web. When the detected speed is equal to or higher than the upper limit speed, an operation signal is generated. A comparator, a relay operated by an operation signal of the comparator, a correction signal generator for generating a correction signal based on the detected speed when the relay is operated, and interposed between the command device and the drive amplifier And an addition point where the correction signal of the correction signal generator is negatively fed back to the command signal of the command device and the input of the drive amplifier is (command signal-correction signal). (Claim 2)

  In the tension fluctuation suppressing device, the dancer arm is constituted by a dancer arm capable of swinging motion, and the actuator is constituted by a torque motor (Claim 3), or the dancer arm is constituted by a dancer arm capable of linear motion. The actuator is constituted by a direct acting actuator. Further, in the tension fluctuation suppressing device, the functions of the command unit, the comparator, the relay, the correction signal generator, and the addition point are realized by a control computer.

  According to the tension fluctuation suppressing method according to the present invention, when the web tension is suddenly decreased, the actuator is decelerated and the rapid speed change of the dancer arm is suppressed. In addition to preventing collision with the stopper, in particular, since the speed of the dancer arm is detected, the required braking can be performed regardless of the position of the dancer arm during the detected speed ≧ the upper limit speed.

  According to the tension fluctuation suppressing device according to the present invention, when the web tension is suddenly reduced, the actuator is decelerated and the rapid speed change of the dancer arm is suppressed. In addition to preventing collision with the stopper, in particular, the speed of the actuator is detected by the speed detector, and the correction signal generator generates a correction signal corresponding to the speed during the period when the detected speed ≥ upper limit speed by the function of the comparator. Therefore, it is possible to perform appropriate braking with respect to the speed of the dancer arm regardless of the position of the actuator.

  In the tension fluctuation suppressing device, the swingable movement of the dancer arm can be driven by the rotation of the torque motor at the position of the arm shaft, so that the support and drive portion of the dancer arm can be configured simply (claim 3). According to the dancer arm capable of linear motion, the tension applying force does not change at all positions of the dancer arm, so that the tension control is stabilized. Further, when the control element and the circuit are constituted by a control computer, the tension fluctuation suppressing device can be realized in the field of software and programs.

1 is a block diagram of a tension fluctuation suppressing device according to the present invention. It is operation | movement explanatory drawing by the tension | tensile_strength fluctuation suppression apparatus of FIG. It is a skeleton figure of the principal part of the tension | tensile_strength provision apparatus by the dancer arm which can be linearly moved.

  FIG. 1 shows a tension fluctuation suppressing device 1 based on the tension fluctuation suppressing method according to the present invention. The tension fluctuation suppressing device 1 is based on a tension applying device 2. The tension applying device 2 rotatably supports a dancer roller 5 at the tip of a movable dancer arm 4, that is, a dancer arm 4 that can swing about the arm shaft 3, and the arm shaft 3 is a torque motor as a rotary actuator. 6 is driven directly by the rotational force 6 or indirectly by the speed reducer 31, the wire 7 as a web is wound around the dancer roller 5, and the arm shaft 3 is urged by the torque motor 6 in the tension applying direction to the wire 7. The target tension is applied to the running wire 7.

  The wire 7 to be tension-controlled is fed from a wire feeding device 8, sent to a wire saw 10 through a guide roller 9, a dancer roller 5, and a guide roller 9, and wound from a wire saw 10 to a wire winding device 11 through a guide roller 12. It is done.

  The tension fluctuation suppressing device 1 according to the present invention detects the speed V when the dancer arm 4 swings and rotates from the arm shaft 3, and suppresses the tension fluctuation of the wire 7 in order to control the commander 13 and the drive amplifier 14. A speed detector 15, a comparator 16, a relay 17, a correction signal generator 18, and an addition point 19.

  The command device 13 generates a torque command signal a, adds the command signal a, and sends the command signal a to the drive amplifier 14 via the joining point 19. The drive amplifier 14 receives the command signal a over the period of the steady state, drives the torque motor 6 with a current corresponding to the command signal a, rotates the arm shaft 3 in the clockwise direction (+) in FIG. By applying a torque to 4, a target tension is applied to the wire 7. For this reason, the command signal a has a current value corresponding to the target tension of the wire 7.

  The speed detector 15 detects the speed V of the dancer arm 4 from the rotation of the arm shaft 3 during the swinging rotation of the dancer arm 4, and sends a speed signal b proportional to the detected speed V to the comparator 16. The speed V of the dancer arm 4 can also be detected from the speed (rotation speed) of the torque motor 6 that is linked to this. The comparator 16 always compares the output of the speed detector 15, that is, the speed signal b corresponding to the detected speed V with the upper limit speed signal c corresponding to the upper limit speed V1 input in advance by the setting device 20. As a result of the comparison, when the detected speed V ≧ the upper limit speed V1, the operation signal d is generated, the relay 17 is operated by the operation signal d, and the relay contact 21 of the relay 17 is turned on.

  When the relay contact 21 is in the ON state, the correction signal generator 18 receives the speed signal b from the speed detector 15 for proportional control, integral control, differential control, or a combination control thereof (PID control). Then, a correction signal e having a magnitude related to the speed value, for example, a correction signal e proportional to the speed V, is generated based on the speed V of the dancer arm 4 and negatively fed back to the addition point 19. For this reason, when the speed V ≧ the upper limit speed V1, the drive amplifier 14 receives a negative correction signal e in addition to the command signal a, and has a value smaller than the command signal a (command signal a− The torque motor 6 is driven while decelerating with a torque lower than that in the steady state by the current corresponding to the correction signal e).

  FIG. 2 shows changes in the speed V of the dancer arm 4 and the input of the drive amplifier 14 on the time axis. During a steady state period during which the wire 7 is traveling, that is, a period of speed V <upper limit speed V1, the drive amplifier 14 receives the command signal a and drives the torque motor 6 with a current corresponding to the command signal a. Therefore, the torque in the clockwise direction (+) of the torque motor 6 is constant during the period of speed V <upper limit speed V1, and the arm shaft 3 and the dancer arm 4 are controlled according to changes in the normal operation of the tension of the wire 7. The rotation in the direction (+) and the rotation in the counterclockwise direction (−) are repeated, and a constant tension is applied to the wire 7 while absorbing a change in the tension of the wire 7 by a swinging motion with a small amplitude.

  When the tension of the wire 7 suddenly decreases due to some cause during the traveling of the wire 7, the arm shaft 3 and the dancer arm 4 follow the decrease in the tension of the wire 7 by the torque of the torque motor 6, and in FIG. Accelerate to (+). If the inertial force of the dancer arm 4 or the dancer roller 5 acts on the wire 7 after this acceleration, the tension of the wire 7 suddenly increases. Therefore, the tension control is not stabilized by a complicated fluctuation of the tension in a short time, and the dancer arm 4 In addition, the stopper 22 for limiting rotation is hit with an impact.

  Therefore, as shown in FIG. 2, when the speed V ≧ the upper limit speed V1, the drive amplifier 14 receives (command signal a−correction signal e) and is smaller than the command signal a (command signal a−correction signal). The torque motor 6 is driven by the current corresponding to e). For this reason, the torque in the clockwise direction (+) of the torque motor 6 is suppressed to a small value only during the period of speed V ≧ the upper limit speed V1, and rotates in the clockwise direction (+) while decelerating. This deceleration control is performed regardless of the position of the arm shaft 3 or the dancer arm 4 if the speed V ≧ the upper limit speed V1.

  As a result of this deceleration control, the tension control does not become unstable, and the impact of the dancer arm 4 on the stopper 22 is mitigated. Thereafter, when the speed V <the upper limit speed V1, the torque of the torque motor 6 returns to the original torque value. Further, when the tension of the wire 7 is restored, the control shifts to a steady state. In addition, when the cause of the rapid drop in the tension of the wire 7 is the cutting of the wire 7, the cutting is continued in the continuous stop state of the arm shaft 3 and the dancer arm 4, the tension of the wire 7, the guide rollers 9, 12 and the like. Can be identified from the typical rotation stop state.

  Since the torque motor 6 always generates torque in the direction in which the tension is applied to the wire 7, that is, clockwise (+), the torque of the torque motor 6 is energized when the tension of the wire 7 increases rapidly. And does not accelerate counterclockwise (-).

  The functions of the command device 13, the comparator 16, the relay 17, the correction signal generator 18, the addition point 19 and the setting device 20 can be configured by a control computer, and also by a control program based on the tension fluctuation suppressing method according to the present invention. realizable.

The example of FIG. 1, the rotation Shikia actuator and torque motor 6, but is configured by a swinging movable dancer arm 4, the example of FIG. 3, the linear movable dancer arm 4 as linear Shikia actuator The target tension is applied to the wire 7 by being driven by the linear motor 61. In the case of this example, the speed detector 15 is configured by, for example, a pulse generator, and detects the linear motion of the dancer arm 4 by converting it to rotational motion by, for example, the rack and pinion 24. Incidentally, linear Shikia actuator may also be constituted by an air cylinder, also the speed detector 1 5, and linear inductosyn may be configured by including a magnetic scale.

According to the dancer arm 4 capable of swinging movement in the tension applying device of FIG. 1, when the dancer arm 4 is tilted, the direction of the torque and the direction of the tension do not coincide with each other, and the torque of the torque motor 6 is accurately set as the target tension. No longer works. However, according to the linear movable dancer arm 4 in tensioning device 2 of FIG. 3, the tension direction for tensioning force and the wire 7 by the linear motor 61 of the linear motion Shikia actuator at every movement position of the dancer arm 4 Are always perfectly matched, so tension control can be performed accurately and stable.

  As described above, the present invention can be used for controlling the travel of a web, a wire, a thread, a strap, a rope, a woven fabric, a paper, a film (photo film, battery electrode film), and the like.

DESCRIPTION OF SYMBOLS 1 Tension fluctuation suppression apparatus 2 Tension applying apparatus 3 Arm shaft 31 Reducer 4 Dancer arm 5 Dancer roller 6 Torque motor 61 as a rotary actuator Linear motor 7 as a linear actuator 7 Wire as a web 8 Wire feeding device 9 Guide roller 10 Wire saw DESCRIPTION OF SYMBOLS 11 Wire winding device 12 Guide roller 13 Commander 14 Drive amplifier 15 Speed detector 16 Comparator 17 Relay 18 Correction signal generator 19 Addition point 20 Setter 21 Relay contact 22 Stopper 24 Rack and pinion a Command signal b Speed signal c Upper limit speed signal d Actuation signal e Correction signal V Speed V1 Upper limit speed

Claims (5)

  A dancer roller is rotatably supported on a movable dancer arm, an actuator is connected to the dancer arm, a web is wound around the dancer roller, and the actuator is driven by a command signal so that the dancer arm is in a direction to apply tension to the web. In the tension applying device that urges and applies the target tension to the running web, the speed of the dancer arm is detected during the operation of the tension applying device, and along with the rapid decrease in the tension of the web, When the detected speed ≧ the upper limit speed, a correction signal based on the speed is negatively fed back to the command signal, and the actuator is driven by (command signal−correction signal), thereby reducing the speed of the dancer arm. , A method for suppressing tension fluctuations.   A dancer roller is rotatably supported on a movable dancer arm, an actuator is connected to the dancer arm, a web is wound around the dancer roller, and the actuator is driven by a command signal so that the dancer arm is in a direction to apply tension to the web. In a tension applying device that biases and applies a target tension to the running web, a command device that generates the command signal, a drive amplifier that drives the actuator by using the command signal, and a speed of the dancer arm The speed detected by the speed detector and the speed detected by the speed detector are compared with the upper limit speed input in advance, and the detected speed ≧ the upper limit speed as the web tension rapidly decreases. Sometimes, the comparator that generates the activation signal and the activation signal of the comparator A relay that operates, a correction signal generator that generates a correction signal based on the detected speed when the relay is operated, and the command device and the drive amplifier. A tension fluctuation suppressing device, comprising: a summing point for negatively feeding back a correction signal of a correction signal generator and setting an input of the driving amplifier as (command signal-correction signal).   3. The tension fluctuation suppressing device according to claim 2, wherein the dancer arm is constituted by a dancer arm capable of swinging and the actuator is a torque motor.   3. The tension fluctuation suppressing device according to claim 2, wherein the dancer arm is constituted by a dancer arm capable of linear motion, and the actuator is a direct acting actuator.   The tension according to claim 2, 3 or 4, wherein functions of the command unit, the comparator, the relay, the correction signal generator, and the addition point are configured by a control computer. Fluctuation suppression device.

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