JP6136012B2 - Method for producing a filling liquid filling sheet and a filling liquid filling apparatus - Google Patents

Description

  The present invention relates to a method for manufacturing a filling liquid filling sheet and a filling liquid filling apparatus.

  For example, a metal mask used for a deposition mask for organic EL (Electro Luminescence) or the like is etched (drilled) into a desired pattern on a metal base having a thickness of several tens to several hundreds of micrometers, and the opening width is several. It is produced by forming a fine through hole of 10 μm. In this case, after the fine through hole is etched to a predetermined depth with a desired pattern from one side of the fine hole, a fine recess (fine hole) is formed, and the fine hole is filled with an etching inhibitor. Then, it is formed by performing etching with a pattern corresponding to the pattern of the fine holes from the other surface side.

  In addition, antireflection films used for TV and personal computer screens, louvers for preventing side peeping, and films for improving contrast are finely made of PET (polyethylene terephthalate) or TAC (triacetylcellulose). It is created by applying a coating agent on the surface of a substrate having irregularities to form a desired functional layer.

  Furthermore, for wallpaper having a fine pattern such as a wood grain pattern, for example, a fine dent (micropore) corresponding to the desired pattern is formed in a resin layer formed on a paper base material, and then a colorant is added to the micropore. Created by filling.

  And as a method of filling such fine dents (micropores) with a liquid agent (a plugging liquid) such as an etching inhibitor, a coating agent, or a colorant, the liquid (the plugging liquid) is discharged from the die head. Method of pushing the liquid (filling liquid) into the micropores by pressure, or after placing the liquid (packing liquid) on the base material, press the doctor against the base material to give a high shearing force to the liquid material (filling liquid) There is a method of pushing into the fine holes.

  By the way, as described above, when a liquid agent (filling liquid) is pushed into a micropore using a die head or a doctor, depending on the viscosity of the liquid agent (filling liquid) or the size of the opening width of the microhole, In some cases, bubbles were formed and the micropores were not clogged as desired.

  The present invention has been made in consideration of such points, and a filling liquid filling sheet manufacturing method capable of filling a filling liquid without forming bubbles in the micropores, and filling the filling liquid An object is to provide an apparatus.

  The present invention is a method for producing a filling liquid-filled sheet in which the fine pores of the base material having micropores are filled with the filling liquid, and the base material is placed in a reduced pressure environment and the base material An air removing step for removing air in the micropores, and supplying the plugging liquid continuously to the micropores in the base material before or simultaneously with returning the base material to atmospheric pressure. And a filling liquid filling step for filling a filling liquid into the fine holes.

  According to the present invention, the filling liquid is supplied to the fine holes after the substrate having the fine holes is placed in a reduced pressure environment to remove air from the fine holes. As a result, it is suppressed that bubbles are formed in the fine holes when the filling liquid is filled.

  Specifically, in the air removal step, the base material is placed in a reduced pressure environment of 1 Torr or less, and in the filling liquid filling step, the filling liquid is atmospheric pressure in the micropores of the base material. It is filled by the action of.

  Preferably, in the filling liquid filling step, the filling liquid continues in the fine holes of the base material by passing the fine hole side of the base material through the filling liquid reservoir portion where the filling liquid is stored. Supplied. In this case, it is possible to fill the micropores with a filling liquid before air enters the micropores returned to atmospheric pressure. Thereby, it is more remarkably suppressed that bubbles are formed in the fine holes when the filling liquid is filled.

  Preferably, the width of the opening of the micropore is 50 μm or less, and the viscosity of the filling liquid when supplied to the micropore of the substrate is 10,000 cP or less. According to the knowledge obtained by the present inventors, in this case, it is suppressed that the viscosity of the filling liquid is too high with respect to the width of the opening of the fine hole and the fine hole is not filled with the filling liquid as desired. Is done. Furthermore, the width of the opening of the fine hole may be 20 μm or less.

  Alternatively, the present invention is an apparatus for filling the micropores of a base material having micropores with a filling liquid, and the base material supply apparatus for supplying the base material and the inside thereof can be maintained in a reduced pressure state. A decompression chamber having a base material carry-in port and a base material carry-out port, and the base material supplied from the base material supply device is external to the decompression chamber through the base material carry-in port of the decompression chamber A base material transport device constituting a base material transport path that is transported from the inside of the decompression chamber to the outside through the base material carry-out port, and the base by the base material transport device with respect to the decompression chamber A filling liquid supply device provided on the downstream side in the conveying direction of the material, and comprising a filling liquid supply device that supplies the filling liquid toward the base material outlet of the decompression chamber Device.

  According to the present invention, air can be removed from the micropores by placing the substrate in a reduced pressure environment in a reduced pressure chamber. Further, by supplying the plugging liquid from the plugging liquid supply device toward the base material outlet of the decompression chamber, the substrate placed in the decompression environment in the decompression chamber is returned to the atmospheric pressure, or At the same time, the filling liquid can be continuously supplied to the micropores. Therefore, it is possible to fill the filling liquid into the fine holes from which the air has been removed. As a result, it is suppressed that bubbles are formed in the fine holes when the filling liquid is filled. Further, since the base material supply device is disposed outside the decompression chamber, a relatively small decompression chamber can be used.

  Preferably, the base material supply device is configured such that a base material roll is set and the base material roll is rotated so that a sheet-like base material is supplied as the base material from the base material roll. It has a material feed shaft. In this case, a sheet-like base material can be continuously supplied.

  Or the said base material supply apparatus sets the conveyance web roll, The conveyance web feed axis | shaft which rotates the said conveyance web roll so that a conveyance web is supplied from the said conveyance web roll, and the said conveyance A substrate placing device for placing a sheet-like substrate as the substrate on the transport web supplied from a web roll. In this case, a sheet-like base material can be continuously supplied.

  Preferably, the decompression chamber can be maintained in a decompressed state of 1 Torr or less. In this case, the air in the micropores of the substrate can be sufficiently removed, and the filling liquid can be filled in the micropores by the action of atmospheric pressure.

  Preferably, the base material carry-in port of the decompression chamber has a pair of base material carry-in rollers provided by a pair of base material carry-in rollers provided such that the axes are parallel and rotatable with respect to each other so that the outer peripheral surfaces are adjacent to each other. The base material outlet of the decompression chamber is a pair of base material outlet rollers provided so that the outer peripheral surfaces are adjacent to each other so that the shafts are parallel and rotatable with respect to each other. Is defined between the outer peripheral surfaces of the pair of base material carry-out / out rollers. In this case, it is easy to place continuously supplied substrates in a reduced pressure environment.

  Alternatively, the base material carry-in port of the decompression chamber has an intermediate roller that is rotatably provided, and a shaft that is parallel and rotated with respect to the shaft of the intermediate roller so that the outer peripheral surface is adjacent to the outer peripheral surface of the intermediate roller. A base material carry-in roller provided so as to be defined between the outer peripheral surface of the intermediate roller and the outer peripheral surface of the base material carry-in roller, and the base material carry-out port of the decompression chamber is An outer peripheral surface of the intermediate roller by an intermediate roller and a base material carry-out / outlet roller provided such that the outer peripheral surface is adjacent to the outer peripheral surface of the intermediate roller and the shaft is parallel and rotatable with respect to the shaft of the intermediate roller And the outer peripheral surface of the substrate carry-out roller. Also in this case, it is easy to place the continuously supplied base material in a reduced pressure environment.

  Preferably, an eye for storing a filling liquid on at least one side of the base material transport path from the base material outlet of the decompression chamber to a downstream side of the base material transport direction by the base material transport device. A filling liquid reservoir is provided. In this case, after the base material is placed in a reduced pressure environment in the decompression chamber, it is possible to continuously pass the fine hole side of the base material through the filling liquid reservoir portion in which the filling liquid is stored. Therefore, the filling liquid can be continuously supplied to the micropores of the substrate before or at the same time as the substrate placed under the reduced pressure environment is returned to the atmospheric pressure. Thereby, it is possible to fill the micropores with the filling liquid before the air enters the micropores returned to the atmospheric pressure. Thereby, it is more remarkably suppressed that bubbles are formed in the fine holes when the filling liquid is filled.

  For example, the filling liquid reservoir is formed using a plate-like member around the base material outlet of the decompression chamber.

  Alternatively, the filling liquid filling device is supplied from the film feed shaft and the film roll configured to rotate the film roll so that the film roll is set and the film is supplied from the film roll. Further, the film transport that constitutes a film transport path in which the film is transported from the outside of the decompression chamber to the inside through the base material carry-in port of the decompression chamber and from the inside to the outside of the decompression chamber through the base material carry-out port. An apparatus, and the film transport path is located downstream of the base material transport port in the transport direction of the base material by the base material transport apparatus. The plugging liquid reservoir is formed between them. Also in this case, it is easy to form the filling liquid reservoir. Moreover, it can be prevented that the base material outlet of the decompression chamber is contaminated with the filling liquid.

  Preferably, the film conveyance path is configured to be separated from the base material conveyance path in at least a partial region in the decompression chamber. In this case, air can be sufficiently removed from the micropores of the substrate in the vacuum chamber.

  Preferably, the filling liquid filling device includes the base material transported by the base material transport device on the downstream side in the transport direction of the base material by the base material transport device with respect to the filling liquid reservoir portion. And a pressing roller configured to press the film transported by the film transporting device against each other. In this case, it is easy to finish the surface of the base material filled with the filling liquid in the fine holes smoothly.

  Alternatively, the present invention is an apparatus for filling the micropores of a substrate having micropores with a filling liquid, and is a depressurization chamber capable of maintaining the inside in a depressurized state and having a substrate carry-out port A decompression chamber, a substrate supply device that supplies the substrate, a substrate supply device provided in the decompression chamber, and the substrate that is supplied from the substrate supply device includes the substrate in the decompression chamber. A base material transport device that constitutes a base material transport path that is transported from the inside of the decompression chamber to the outside through the base material transport outlet; and A filling liquid filling device provided on the downstream side and comprising a filling liquid supply device that supplies the filling liquid toward the substrate outlet of the decompression chamber.

  According to the present invention, air can be removed from the micropores by placing the substrate in a reduced pressure environment in a reduced pressure chamber. Further, by supplying the plugging liquid from the plugging liquid supply device toward the base material outlet of the decompression chamber, the substrate placed in the decompression environment in the decompression chamber is returned to the atmospheric pressure, or At the same time, the filling liquid can be continuously supplied to the micropores. Therefore, it is possible to fill the filling liquid into the fine holes from which the air has been removed. As a result, it is suppressed that bubbles are formed in the fine holes when the filling liquid is filled.

  Preferably, the base material supply device is configured such that a base material roll is set and the base material roll is rotated so that a sheet-like base material is supplied as the base material from the base material roll. It has a material feed shaft. In this case, in this case, a sheet-like base material can be continuously supplied.

  Or the said base material supply apparatus sets the conveyance web roll, The conveyance web feed axis | shaft which rotates the said conveyance web roll so that a conveyance web is supplied from the said conveyance web roll, and the said conveyance A substrate placing device for placing a sheet-like substrate as the substrate on the transport web supplied from a web roll. In this case, a sheet-like base material can be continuously supplied.

  Preferably, the decompression chamber can be maintained in a decompressed state of 1 Torr or less. In this case, the air in the micropores of the substrate can be sufficiently removed, and the filling liquid can be filled in the micropores by the action of atmospheric pressure.

  Preferably, the base material carry-out port of the decompression chamber is a pair of base material carry-out rollers provided by a pair of base material carry-out rollers provided so that the outer peripheral surfaces thereof are adjacent to each other and parallel to each other and rotatable. Between the outer peripheral surfaces. In this case, it is easy to continuously contact the base material, which is placed in a reduced pressure environment and continuously supplied, with the filling liquid.

  Preferably, an eye for storing a filling liquid on at least one side of the base material transport path from the base material outlet of the decompression chamber to a downstream side of the base material transport direction by the base material transport device. A filling liquid reservoir is provided. In this case, after the base material is placed in a reduced pressure environment in the decompression chamber, it is possible to continuously pass the fine hole side of the base material through the filling liquid reservoir portion in which the filling liquid is stored. Therefore, the filling liquid can be continuously supplied to the micropores of the substrate before or at the same time as the substrate placed under the reduced pressure environment is returned to the atmospheric pressure. Thereby, it is possible to fill the micropores with the filling liquid before the air enters the micropores returned to the atmospheric pressure. Thereby, it is more remarkably suppressed that bubbles are formed in the fine holes when the filling liquid is filled.

  For example, the filling liquid reservoir is formed using a plate-like member around the base material outlet of the decompression chamber.

  Alternatively, the filling liquid filling device is a film feeding shaft in which a film roll is set and the film roll is rotated so that the film is supplied from the film roll, A film feeding shaft provided on the film, and a film transporting device that constitutes a film transporting path through which the film supplied from the film roll is transported from the inside of the decompression chamber to the outside through the substrate carry-out port, The film conveyance path is further provided between the film conveyance path and the substrate conveyance path on the downstream side in the conveyance direction of the substrate by the substrate conveyance device with respect to the substrate conveyance outlet. It is comprised so that the filling liquid reservoir part may be formed. Also in this case, it is easy to form the filling liquid reservoir. Moreover, it can be prevented that the base material outlet of the decompression chamber is contaminated with the filling liquid.

  Preferably, the filling liquid filling device includes the base material transported by the base material transport device on the downstream side in the transport direction of the base material by the base material transport device with respect to the filling liquid reservoir portion. And a pressing roller configured to press the film transported by the film transporting device against each other. In this case, it is easy to finish the surface of the base material filled with the filling liquid in the fine holes smoothly.

  According to the present invention, the filling liquid is supplied to the fine holes after the substrate having the fine holes is placed in a reduced pressure environment to remove air from the fine holes. As a result, it is suppressed that bubbles are formed in the fine holes when the filling liquid is filled.

The figure which shows schematically the structure of the filling liquid filling apparatus by the 1st Embodiment of this invention. The figure which shows the base material of 1st Embodiment schematically. Specifically, FIG. 2 (a) is a plan view schematically showing a sheet-like substrate having fine holes, and FIG. 2 (b) is a 2b-2b line of the substrate shown in FIG. 2 (a). FIG. 2C is a cross-sectional view, and FIG. 2C is a view showing a filling liquid-filled sheet in which the base material shown in FIG. 2B is filled with the filling liquid. The figure which shows schematically the structure of the filling liquid filling apparatus by the 2nd Embodiment of this invention. The figure which shows schematically the structure of the filling liquid filling apparatus by the 3rd Embodiment of this invention. The figure which shows schematically the structure of the filling liquid filling apparatus by the 4th Embodiment of this invention. The figure which shows schematically the structure of the filling liquid filling apparatus by the 5th Embodiment of this invention.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram schematically showing a configuration of a filling liquid filling device according to a first embodiment of the present invention. FIG. 2 is a diagram schematically illustrating an example of the base material according to the first embodiment. Specifically, FIG. 2 (a) is a plan view schematically showing a sheet-like substrate having fine holes, and FIG. 2 (b) is a 2b-2b line of the substrate shown in FIG. 2 (a). FIG. 2C is a cross-sectional view schematically showing a filling liquid-filled sheet in which the base material shown in FIG. 2B is filled with the filling liquid.

  As shown in FIG. 1, a filling liquid filling device 100 of the present embodiment is an apparatus for filling the fine holes 12 of a base material 10 having fine holes 12 with a filling liquid 15. 10, a decompression chamber 30 capable of maintaining the interior in a decompressed state, the decompression chamber 30 having a substrate carry-in port 31 and a substrate carry-out port 32, and the substrate feed device 20. The base material transport path is such that the base material 10 supplied from is conveyed from the outside of the decompression chamber 30 through the base material carry-in port 31 of the decompression chamber 30 to the inside and from the inside of the decompression chamber 30 through the base material carry-out port 32. 45 is provided downstream of the decompression chamber 30 and the decompression chamber 30 in the transport direction of the substrate 10 by the substrate transport apparatus 40, and toward the exit port 32 of the decompression chamber 30. Packing liquid 15 It includes a supply Clogging liquid supply apparatus 50, the.

  In the present embodiment, the substrate 10 is a sheet-like metal substrate having a width W of about 100 to 500 mm and a thickness T of about 20 to 30 μm. The base material 10 is etched to a depth D that is about half the thickness T of the base material 10 with a desired pattern only from one surface side in order to produce a metal mask used for an organic EL vapor deposition mask or the like. The fine hole 12 is formed on the one surface side. In the present embodiment, the width e of the opening of the fine hole 12 is 50 μm or less, for example, about 20 μm, but is not limited thereto. Here, in the present embodiment, the width e of the opening of the fine hole 12 means the diameter of the inscribed circle 12 ′ of the opening of the fine hole 12.

  The base material 10 is not limited to a base material for creating a metal mask. For example, an antireflection film used for a screen of a television or a personal computer, a louver for preventing side peeping, or a PET for creating a film for improving contrast. A substrate or a TAC substrate may be used. Furthermore, it is a base material for creating wallpaper having a fine pattern such as a wood grain pattern, the base material comprising a resin layer provided with micropores corresponding to a desired pattern and a paper base material supporting the resin layer It may be.

  In the present embodiment, the base material supply device 20 is set so that a base material roll 10 ′ in which the base material 10 is rolled is set, and the sheet-like base material 10 is supplied from the base material roll 10 ′. It has a substrate feed shaft 22 adapted to rotate the material roll 10 '.

  In the present embodiment, the decompression chamber 30 is a decompression chamber that can be maintained in a decompressed state of 1.5 Torr or less, preferably 1 Torr or less, and more preferably 0.8 Torr or less. The decompression chamber 30 of the present embodiment is opposite to the housing 33, the base material inlet 31 provided in the wall portion of the housing 33 on the base material supply device 20 side, and the base material inlet 31 of the housing 33. And a base material outlet / outlet 32 provided in the wall portion on the side to be operated.

  In the present embodiment, the pair of substrate carry-in ports 31 are loaded by a pair of substrate carry-in rollers 311 provided with shafts 312 that are parallel and rotatable with respect to each other so that the outer peripheral surfaces are adjacent to each other. It is defined between the outer peripheral surfaces of the mouth roller 311. In the present embodiment, the base material carry-in entrance roller 311 is made of metal, and a drive unit 313 for rotationally driving the base material carry-in entrance roller 311 is provided on the shaft 312 of each base material carry-in entrance roller 311. ing.

  In the present embodiment, the base material carry-out port 32 is formed by a pair of base material carry-out rollers 321 provided such that the shafts 322 are parallel and rotatable with respect to each other so that the outer peripheral surfaces are adjacent to each other. It is defined between the outer peripheral surfaces of the rollers 321. In the present embodiment, the substrate carry-out / out roller 321 is made of metal, and a drive unit 323 for rotating the substrate carry-out / out roller 321 is provided on the shaft 322 of each substrate carry-out / out roller 321. ing. Further, each base material exit roller 321 is provided with a heat source (not shown) for heating the base material exit roller 321, and when a heat-meltable material is used as the filling liquid 15, The molten state of the filling liquid 15 can be maintained in the vicinity of the base material carry-out roller 321.

  A resinous sealing member 34 is provided on the edge portion of the housing 33 that faces the outer peripheral surface of the base material carry-in roller 311 and the edge portion of the housing 33 that faces the outer peripheral surface of the base material carry-out roller 321. It has been. In the present embodiment, the distance between the sealing member 34 and the outer peripheral surface of the base material carry-in roller 311 and the distance between the sealing member 34 and the outer peripheral surface of the base material carry-out roller 321 are about 10 μm. .

  In the present embodiment, the filling liquid is stored on at least one side of the substrate conveyance path 45 from the substrate carry-out port 32 of the decompression chamber 30 to the downstream side in the conveyance direction of the substrate 10 by the substrate conveyance device 40. For this purpose, a filling liquid reservoir 60 is provided. In this embodiment, the filling liquid reservoir 60 is formed around the base material outlet 32 of the decompression chamber 30 by using a plate-like member 61.

  The filling liquid supply device 50 includes a container 51 for storing the filling liquid 15, a pump 52 for pumping the filling liquid 15 from the container 51, and the filling liquid 15 pumped by the pump 52. And a pipe 53 that guides the reservoir 60. In the present embodiment, the container 51 is provided with a heat source (not shown) for heating the container 51. When a heat-meltable material is used as an etching inhibitor, the heat-meltable material is stored in the container. It can be heated and melted in 51 to obtain a filling liquid 15 having a desired viscosity.

  Note that the filling liquid 15 is not limited to an etching inhibitor. For example, when the substrate 10 is an antireflection film used for a screen of a television or a personal computer, a louver for preventing side peeping, a PET substrate or a TAC substrate for creating a film for improving contrast, etc. It may be a coating agent for forming the functional layer. Moreover, when the base material 10 is a base material for wallpaper having a fine pattern such as a wood grain pattern and is a base material provided with micropores corresponding to a desired pattern, the filling liquid 15 is: It may be a colorant. When a heat-meltable material is not used as the filling liquid 15, the container 51 of the filling liquid supply device 50 and the substrate carry-out / out roller 321 of the decompression chamber 30 are connected to the container 51 and the substrate carrying material. It is not necessary to have a heat source for heating the exit roller 321.

  In the present embodiment, the base material transport device 40 is provided on the most downstream side in the transport direction of the base material 10 by the base material transport device 40 and is configured to wind up the base material 10. 42 and a feed roller 46 provided between the base material supply device 20 and the base material winding shaft 42 on the base material conveyance path 45. The substrate take-up shaft 42 is provided with a drive unit 43 for rotationally driving the substrate take-up shaft 42.

  A base material squeegee 71 is provided between the base material take-up shaft 42 and the filling liquid reservoir 60 to scrape off the excessive filling liquid 15 disposed on the base material 10. . In the present embodiment, the base material squeegee 71 has a distance between the end on the base material transport path 45 side and the surface of the base material 10 transported on the base material transport path 45 of 20 μm or more. It is positioned so that

  Next, the operation of the present embodiment configured as described above will be described.

  First, a sheet-like base material that is etched only from one surface side to a depth D that is about half the thickness T of the base material 10 with a desired pattern, and has fine holes 12 formed on the one surface side. A base material roll 10 ′ in which 10 is rolled is set on the base material feeding shaft 22 of the base material supply device 20. The width e of the opening of the fine hole 12 is about 20 μm. Then, after the base material 10 unwound from the base material roll 10 ′ is passed from the outside to the inside of the decompression chamber 30 through the base material inlet 31 of the decompression chamber 30, Passed from inside to outside. Thereafter, the base material 10 is passed between the outer peripheral surface of one base material carry-out roller 321 and the plate-like member 61 of the filling liquid reservoir 60, and between the base material squeegee 71 and the feed roller 46. Is passed. The end of the base material 10 on the unwinding start side is fixed to the base material winding shaft 42 of the transport device 40. Here, in the filling liquid reservoir 60, the base material 10 can come into contact with the filling liquid 15 stored in the filling liquid reservoir 60 on the surface of the base 10 on the side of the fine holes 12. That is, the substrate 10 is disposed so that the surface opposite to the surface on the fine hole 12 side of the substrate 10 faces the outer peripheral surface of the substrate carry-out / out roller 321. Thereby, the fine hole 12 side of the base material 10 can be passed through the filling liquid reservoir 60 in which the filling liquid 15 is stored.

  Next, a hot-melt urethane resin as an etching inhibitor is supplied to the container 51 of the filling liquid supply apparatus 50 and is heated to about 100 ° C. and melted by the container 51 so as to have a viscosity of about 1000 cP. The melted hot-melt urethane resin is pumped out of the container 51 by the pump 52 as the filling liquid 15, guided by the pipe 53, and stored in the filling liquid reservoir 60. The filling liquid 15 stored in the filling liquid reservoir 60 is located on the outer peripheral surface of the base material carry-out port 321 of the decompression chamber 30 and one of the base material carry-out rollers 321 at the bottom of the filling solution reservoir 60. It is in contact with the substrate 10.

  The decompression chamber 30 is evacuated, and the interior of the decompression chamber 30 is maintained in a decompressed state of 1 Torr or less. Then, the pair of base material carry-out / out rollers 321 are heated by a heat source (not shown) so that the temperature of the outer peripheral surface becomes about 100 ° C., and the viscosity of the filling liquid 15 in contact with the base material 10 in the filling liquid reservoir 60 is reached. However, it is maintained at about 1000 cP.

  However, the viscosity of the filling liquid 15 in contact with the substrate 10 may be larger than 1000 cP depending on the width e of the opening of the micropore 12. According to the knowledge obtained by the present inventors, when the inside of the micropore 12 is decompressed to 1 Torr or less and the width e of the opening of the micropore 12 is about 20 μm, about 10,000 cP, more preferably about 5000 cP. If the opening width e is about 50 μm, it may be about 10000 cP.

  Further, the decompression chamber 30 may be maintained in a decompressed state higher than 1 Torr depending on the width e of the opening of the fine hole 12 or the viscosity of the filling liquid 15.

  In this state, the base material 10 is transported by the base material transport device 40. Specifically, the drive unit is arranged such that the base material winding shaft 42 provided on the most downstream side in the transport direction of the base material 10 by the base material transport apparatus 40 transports the base material 10 at a desired transport speed. 43, the winding of the base material 10 onto the base material winding shaft 42 is started.

  As the base material 10 is wound around the base material take-up shaft 42, the base material roll 10 ′ is rotated together with the base material feed shaft 22 of the base material supply device 20, while the base material roll 10 ′ is rotated. 10 is fed.

  In addition, the pair of base material carry-in rolls 311 of the decompression chamber 30 are rotated by the drive unit 313 so that the speeds of the outer peripheral surfaces on the opposite sides coincide with the desired transport speed of the base material 10. At the same time, the pair of base material carry-out rolls 321 are rotated by the driving unit 323 so that the speeds of the opposite sides of the outer peripheral surface coincide with the desired transport speed of the base material 10. Then, the base material 10 fed from the base material roll 10 ′ set on the base material feeding shaft 22 is rotated through the base material carry-in port 31 of the decompression chamber 30 by the rotation of the base material winding shaft 42. From outside to inside.

  The substrate 10 transported into the decompression chamber 30 is placed in a decompressed environment in the decompression chamber 30, and air in the micropores 12 of the substrate 10 is removed.

  The base material 10 from which the air in the micropores 12 has been removed is moved from the inside of the decompression chamber 30 to the outside through the base material outlet 32 of the decompression chamber 30 by the rotation of the base take-up shaft 42, that is, the filling liquid reservoir. 60. Thus, the base material 10 carried out from the decompression chamber 30 is returned to the atmospheric pressure, and at the same time, the fine hole 12 side of the base material 10 has the filling liquid reservoir 60 in which the filling liquid 15 is stored. Then, the filling liquid 15 is continuously supplied to the fine holes 12. Then, the filling liquid 15 is filled in the fine holes 12 of the base material 10 by the action of the atmospheric pressure.

  The substrate 10 that has passed through the filling liquid reservoir 60 is further conveyed by the rotation of the substrate take-up shaft 42, and passes between the substrate squeegee 71 and the feed roller 46. At this time, the excess squeegee 15 (etching inhibitor) disposed on the substrate 10 is scraped off by the substrate squeegee 71 in the filling liquid reservoir 60, as shown in FIG. 2 (c). Then, a layer of the filling liquid 15 (etching inhibitor) having a thickness h of about 20 μm is formed on the substrate 10.

  The layer of the filling liquid 15 (etching inhibitor) formed on the substrate 10 is cooled and solidified during the conveyance of the substrate 10. Then, the base material 10 on which the layer of the filling liquid 15 (etching inhibitor) is formed is wound around the base material winding shaft 42 by the rotation of the base material winding shaft 42.

  As described above, according to the present embodiment, air can be removed from the micropores 12 by placing the base material 10 in a reduced pressure environment in the reduced pressure chamber 30. Further, by supplying the filling liquid 15 from the filling liquid supply device 50 toward the base material outlet 32 of the decompression chamber 30, the substrate 10 placed in the decompressed environment in the decompression chamber 30 is brought to atmospheric pressure. Before or at the same time as being returned, the filling liquid 15 can be continuously supplied into the micropores 12. Therefore, it is possible to fill the filling liquid 15 into the fine holes 12 from which the internal air has been removed. As a result, bubbles are prevented from being formed in the micropores 12 when the filling liquid 15 is filled. In addition, since the substrate supply device 20 is disposed outside the decompression chamber 30, a relatively small decompression chamber can be used.

  The opening width e of the fine holes is about 20 μm, whereas the viscosity of the filling liquid when supplied to the fine holes 12 of the substrate 10 is about 1000 cP. For this reason, it is suppressed that the viscosity of the filling liquid 15 is too high with respect to the opening width e of the fine holes 12 and the fine holes 12 are not filled with the filling liquid 15 as desired.

  In addition, the base material supply device 20 is set so that the base material roll 10 ′ is set, and the base material roll 10 ′ is rotated so that a sheet-like base material is supplied as the base material 10 from the base material roll 10 ′. The base material feeding shaft 22 is formed. For this reason, the sheet-like base material 10 can be continuously supplied.

  In addition, when the base material 10 is a sheet-like base material, the base material supply apparatus 20 rotates the said conveyance web roll so that a conveyance web roll is set and a conveyance web is supplied from the said conveyance web roll. You may have the conveyance web feeding axis | shaft 22 which is made to carry out, and the base material mounting apparatus which mounts the sheet-like base material 10 on the conveyance web supplied from a conveyance web roll. In this case, the sheet-like base material 10 can be continuously supplied.

  Further, the decompression chamber 30 can be maintained in a decompressed state of 1 Torr or less. For this reason, the air in the fine holes 12 of the substrate 10 can be sufficiently removed, and the filling liquid 15 can be filled into the fine holes 12 by the action of atmospheric pressure.

  Further, the base material carry-in port 31 of the decompression chamber 30 is formed by a pair of base material carry-in rollers 311 provided such that the shafts 312 are parallel and rotatable with respect to each other so that the outer peripheral surfaces are adjacent to each other. The base material unloading port 32 of the decompression chamber 30 is defined between the outer peripheral surfaces of the rollers 311, and a pair of base material transports in which shafts 322 are provided so as to be parallel and rotatable with respect to each other so that the outer peripheral surfaces are adjacent to each other. The outlet roller 321 is defined between the outer peripheral surfaces of the pair of base material carry-out rollers 321. Thereby, it is easy to place the continuously supplied base material 10 under a reduced pressure environment.

  Further, an eye for storing the filling liquid 15 on at least one side of the base material transport path 45 from the base material carry-out port 32 of the decompression chamber 30 to the downstream side in the transport direction of the base material 10 by the base material transport device 40. A filling liquid reservoir 60 is provided. For this reason, after the base material 10 is placed in a decompressed environment in the decompression chamber 30, the fine hole 12 side of the base material 10 is continuously passed through the filling liquid reservoir 60 in which the filling liquid 15 is stored. It is possible. Accordingly, the filling liquid 15 can be continuously supplied to the micropores 12 of the base material 10 before or simultaneously with returning the base material 10 placed in a reduced pressure environment to the atmospheric pressure. Thereby, it is possible to fill the filling liquid 15 into the fine holes 12 before air enters the fine holes 12 returned to the atmospheric pressure. Thereby, when the filling liquid 15 is filled, it is more remarkably suppressed that bubbles are formed in the micropores 12.

  Next, a second embodiment of the filling liquid filling device according to the present invention will be described with reference to FIG.

  FIG. 3 is a diagram schematically showing a configuration of a filling liquid filling apparatus according to the second embodiment of the present invention. In the filling liquid filling device of the present embodiment, the film roll 81 ′ is set and the film 81 is supplied from the film roll 81 ′ with respect to the filling liquid filling device 100 according to the first embodiment. The film feed shaft 82 configured to rotate the film roll 81 ′ and the film 81 supplied from the film roll 81 ′ from the outside of the decompression chamber 30 through the base material inlet 31 of the decompression chamber 30. And a film transport device 87 that constitutes a film transport path 84 that is transported from the inside of the decompression chamber to the outside through the base material exit port 32.

  In the present embodiment, the film 81 is a sheet-like PET film having a width that is substantially the same as the width W of the substrate 10 and a thickness of approximately 50 μm.

  In the present embodiment, the film feed shaft 82 is provided in parallel to the base material feed shaft 22 on the upstream side in the transport direction of the base material 10 by the base material transport device 40 with respect to the decompression chamber 30. Yes.

  In this embodiment, the film transport device 87 is provided on the most downstream side in the transport direction of the film 81 by the film transport device 87 and is fed from a film roll 81 ′ set on the film feed shaft 82. Has a film take-up shaft 88 and a feed roller 86.

  In the present embodiment, the film conveyance path 84 is configured to be separated from the base material conveyance path 45 in at least a part of the region within the decompression chamber 30. Specifically, a film separation roller 85 is disposed on the side of the film conveyance path 84 with respect to the substrate conveyance path 45 in the decompression chamber 30 so as to be separated from the substrate conveyance path 45.

  In addition, the film conveyance path 84 is located between the film conveyance path 84 and the substrate conveyance path 45 on the downstream side in the conveyance direction of the substrate 10 by the substrate conveyance device 40 with respect to the substrate carry-out port 32 of the decompression chamber 30. A clogging liquid reservoir 60 'is formed between them. Specifically, in the region between the base material carry-out port 32 and the base material take-up shaft 42 of the decompression chamber 30 and on the side of the film transport path 84 with respect to the base material transport path 45, the clogging liquid reservoir portion The roller 91 is disposed away from the substrate conveyance path 45. The pipe 53 of the filling liquid supply device 50 is filled with the eyes pumped from the container 51 by the pump 52 into the filling liquid reservoir 60 ′ formed between the base material conveyance path 45 and the film conveyance path 84. It arrange | positions so that the filling liquid 15 may be guided. Here, in the present embodiment, an ultraviolet curable resin is used as the filling liquid 15.

  In the present embodiment, the filling liquid 15 on the film 81 that has passed through the filling liquid reservoir 60 ′ is disposed downstream of the filling liquid reservoir 60 ′ in the direction in which the film 81 is conveyed by the film conveying device 87. A film squeegee 72 is provided to scrape off the film. The film squeegee 72 is positioned so that the tip of the film squeegee 72 abuts on the surface of the film 81 conveyed on the film conveyance path 84 and is disposed on the film 81 in the filling liquid reservoir 60 ′. The filling liquid 15 can be sufficiently scraped off.

  Further, the filling liquid filling device 100 ′ of the present embodiment is downstream of the filling liquid reservoir 60 ′ in the conveyance direction of the substrate 10 by the substrate conveyance device 40, more specifically for the substrate. The substrate 10 conveyed by the substrate conveying device 40 and the film conveying device 87 are conveyed downstream of the squeegee 71 and the film squeegee 72 in the conveying direction of the substrate 10 by the substrate conveying device 40. And a pressing roller 93 configured to press the film 81 against each other. In this embodiment, the pressing roller 93 is a pair of pressing rollers provided in a region between the filling liquid reservoir roller 91 and the substrate conveying device 40.

  In a region between the pressing roller 93 and the substrate conveying device 40, a pair of feeding rollers 86 ′ are arranged so that the outer peripheral surfaces are adjacent to each other, and between the pressing roller 93 and the feeding roller 86 ′. The substrate 10 and the film 81 are conveyed in a state of being in close contact with each other.

  An ultraviolet irradiation device 95 is provided in a region between the pressing roller 93 and the feed roller 86 ′, and the base material passing through the region by irradiating the base material conveyance path 45 in the region with ultraviolet light. The ultraviolet curable resin filled as the filling liquid 15 in the ten fine holes 12 can be cured. In the case where a thermosetting material is used as the filling liquid 15, a heating device may be provided in the region.

  Other configurations are substantially the same as the configuration of the filling liquid filling device 100 according to the embodiment of FIG. In the embodiment shown in FIG. 3, the same parts as those of the embodiment shown in FIG.

  Next, the operation of the present embodiment configured as described above will be described.

  First, a base material roll 10 ′ in which a sheet-like base material 10 in which micropores 12 are formed on one side is formed into a roll is set on a base material feeding shaft 22 of a base material supply device 20. . The width e of the opening of the fine hole 12 is about 20 to 30 μm. Then, the base material 10 unwound from the base material roll 10 ′ is passed from the outside to the inside of the decompression chamber 30 through the base material carry-in port 31 of the decompression chamber 30, and then passed through the base material carry-out port 32 of the decompression chamber 30. The decompression chamber 30 is passed from the inside to the outside. Thereafter, the substrate 10 is passed through a region between the substrate squeegee 71 and the feed roller 46. And after passing between a pair of press rollers 93, the edge part by the side of the unwinding start of the base material 10 is fixed to the base material winding shaft 42 of the conveying apparatus 40. In the base material 10, the surface of the base material 10 on the fine hole 12 side is at least the film transport path 84 in the filling liquid reservoir 60 ′ formed between the base material transport path 45 and the film transport path 84. It arrange | positions so that it may oppose. In this way, the fine hole 12 side of the base material 10 can be passed through the filling liquid reservoir 60 ′ where the filling liquid 15 is stored.

  In addition, a film roll 81 ′ in which a PET film 81 having the same width as the width W of the substrate 10 is rolled is set on the film feeding shaft 82. The thickness of the PET film 81 is about 20 to 30 μm. Then, the film 81 unwound from the film roll 81 ′ is passed from the outside to the inside of the decompression chamber 30 through the base material inlet 31 of the decompression chamber 30, and is applied to the film separation roller 85 disposed in the decompression chamber 30. On the other hand, after being guided to the side opposite to the substrate conveyance path 45, it is passed from the inside of the decompression chamber 30 to the outside through the substrate carry-out port 32 of the decompression chamber 30. Thereafter, the film 81 is passed between the feed roller 86 and the film squeegee 72 and guided to the side opposite to the substrate transport path 45 with respect to the filling liquid reservoir roller 91, and then a pair of Passed between the pressing rollers 93. The film 81 passed between the pair of pressing rollers 93 is passed between the pair of feed rollers 86 ′, and then the end portion on the unwinding start side is fixed to the film winding shaft 88.

  And the base material 10 of the base material conveyance apparatus 40 with respect to the decompression chamber 30 is stored so that the filling liquid 15 supplied from the filling liquid supply apparatus 50 can be stored between the base material 10 and the film 81. The base material 10 is formed so that a space surrounded by the base material 10, the film 81, and the plate-like member is formed around the base material carry-out port 32 on the downstream side in the transport direction. And in contact with the edge of the film 81. In this way, the film 81 and the substrate 10 separated from each other by the filling liquid reservoir roller 91 on the downstream side in the conveyance direction of the substrate 10 by the substrate conveyance device 40 with respect to the substrate carry-out port 32. In between, a filling liquid reservoir 61 'is formed.

  Next, an ultraviolet curable resin having a viscosity of about 1000 cP is supplied to the container 51 of the plugging liquid supply device 50 as the plugging liquid 15. The filling liquid 15 in the container 51 is pumped out of the container 51 by the pump 52, guided by the pipe 53, and stored in the filling liquid reservoir 60 '. Thereby, the filling liquid 15 stored in the filling liquid reservoir 60 ′ comes into contact with the surface of the substrate 10 on the fine hole 12 side and one side surface of the film 81 in the filling liquid reservoir 60 ′. .

  The decompression chamber 30 is evacuated, and the interior of the decompression chamber 30 is maintained in a decompressed state of 1 Torr or less.

  In this state, the base material 10 is transported by the base material transport device 40. Specifically, the substrate winding shaft 42 is rotated by the drive unit 43 so that the substrate 10 is conveyed at a desired conveyance speed, and the substrate 10 is wound around the substrate winding shaft 42. Be started. Then, as the base material 10 is wound around the base material take-up shaft 42, the base material roll 10 ′ is rotated together with the base material feed shaft 22 of the base material supply device 20, while rotating from the base material roll 10 ′. The substrate 10 is fed.

  At the same time as the rotation of the substrate winding shaft 42 is started, the film winding shaft 88 provided on the most downstream side in the conveying direction of the film 81 by the film conveying device 87 is connected to the film 81 of the substrate 10. The film is rotated by the drive unit 89 so as to be conveyed in accordance with a desired conveyance speed, and winding of the film 81 onto the film winding shaft 88 is started. The film 81 is fed from the film roll 81 ′ while the film roll 81 ′ is rotated together with the film feeding shaft 82 as the film 81 is wound on the film winding shaft 88.

  Further, the pair of base material carry-in rolls 311 and the pair of base material carry-out rolls 321 of the decompression chamber 30 are respectively set so that the speeds of the opposite sides of the outer peripheral surface coincide with the desired transport speed of the base material 10. It is rotated by the drive units 312 and 322.

  The substrate 10 and the film 81 which are brought into contact with each other by the substrate carry-in roller 311 of the decompression chamber 30 and are transported into the decompression chamber 30 are placed in a decompressed environment in the decompression chamber 30 and the film 81 is used for film separation. They are separated from each other by being guided by the rollers 85. Then, the air in the micropores 12 of the base material 10 is removed in the decompression chamber 30.

  The substrate 10 and the film 81 from which the air in the fine holes 12 has been removed are further conveyed by the rotation of the substrate take-up shaft 42 and the film take-up shaft 88, respectively, and are mutually conveyed by the substrate unloading roller 321 of the decompression chamber 30. Touched. Then, the base material 10 and the film 81 are transported from the inside of the decompression chamber 30 to the outside through the base material carry-out port 32. The base material 10 and the film 81 conveyed from the decompression chamber 30 are separated from each other as the film 81 is guided by the filling liquid reservoir roller 91. In this way, the base material 10 unloaded from the decompression chamber 30 is returned to atmospheric pressure, and at the same time, the filling liquid reservoir 60 ′ in which the filling liquid 15 is stored on the fine hole 12 side of the base material 10 is stored. And the filling liquid 15 is continuously supplied to the fine holes 12. Then, the filling liquid 15 is filled in the fine holes 12 of the base material 10.

  The substrate 10 that has passed through the filling liquid reservoir 60 ′ is further conveyed by the rotation of the substrate take-up shaft 42, and passes between the substrate squeegee 71 and the feed roller 46. At this time, the excess squeegee 15 disposed on the substrate 10 is scraped off by the substrate squeegee 71 in the reservoir solution reservoir 60 '.

  On the other hand, the film 81 that has passed through the filling liquid reservoir 60 ′ is further conveyed by the rotation of the film take-up shaft 88, and passes between the film squeegee 72 and the feed roller 86. At this time, the squeegee 72 for the film scrapes off the filling liquid 15 disposed on the film 81 in the filling liquid reservoir 60 '. Then, the film 81 is guided to the filling liquid reservoir roller 91.

  Thereafter, the base material 10 and the film 81 are further conveyed by the rotation of the base material take-up shaft 42 and the film take-up shaft 88 and passed between the pair of pressing rollers 93. The substrate 10 and the film 81 are pressed against each other by a pair of pressing rollers 93. Thereby, the surface of the layer of the filling liquid 15 formed on the base material 10 is smoothed.

  The substrate 10 and the film 81 are conveyed toward the pair of feed rollers 86 ′ while being in contact with each other, and ultraviolet rays are emitted by the ultraviolet irradiation device 95 in a region between the pressing roller 93 and the feed roller 86 ′. Irradiated. In this way, the layer of the filling liquid 15 formed on the base material 10 is cured with the surface thereof being smoothed.

  Then, the base material 10 and the film 81 on which the filling liquid 15 is cured are peeled from each other by the rotation of the base material winding shaft 42 and the film winding shaft 88, and the base material winding shaft 42 and the film winding respectively. It is wound on a take-up shaft 88.

  As described above, according to the present embodiment, the filling liquid filling device 100 ′ rotates the film roll 81 ′ so that the film roll 81 ′ is set and the film 81 is supplied from the film roll 81 ′. The film feed shaft 82 and the film 81 supplied from the film roll 81 ′ pass from the outside of the decompression chamber 30 to the inside through the substrate carry-in port 31 of the decompression chamber 30 and through the substrate carry-out port 32. 30, and a film transport device 87 that constitutes a film transport path 84 that is transported from the inside to the outside. 10 on the downstream side in the transport direction, and is configured to form a filling liquid reservoir 60 ′ between the film transport path 84 and the substrate transport path 45. . For this reason, it is easy to form the filling liquid reservoir 60 '. Moreover, it can be prevented that the base material outlet / outlet 32 of the decompression chamber 30 is contaminated with the filling liquid.

  The film conveyance path 84 is configured to be separated from the base material conveyance path 45 in at least a part of the region within the decompression chamber 30. For this reason, the air can be sufficiently removed from the micropores 12 of the substrate 10 in the decompression chamber 30.

  Further, the filling liquid filling device 100 ′ is the base material transported by the base material transport device 40 on the downstream side in the transport direction of the base material 10 by the base material transport device 40 with respect to the filling liquid reservoir 60 ′. 10 and a film 81 conveyed by the film conveying device 87 are further provided with a pressing roller 93 adapted to press against each other. For this reason, it is easy to smoothly finish the surface of the base material 10 in which the fine holes 12 are filled with the filling liquid 15.

  Next, a third embodiment of the filling liquid filling device according to the present invention will be described with reference to FIG.

  FIG. 4 is a diagram schematically showing a configuration of a filling liquid filling apparatus according to the third embodiment of the present invention. The filling liquid filling device 100 ″ according to the present embodiment is different from the filling liquid filling device 100 ′ shown in FIG. 3 only in the decompression chamber 30 ′, and other configurations are the same as those shown in FIG. The configuration is substantially the same as that of the filling liquid filling apparatus 100 ′. In the embodiment shown in FIG. 4, the same parts as those in the embodiment shown in FIG.

  The decompression chamber 30 ′ is also a decompression chamber capable of maintaining the interior in a decompressed state of 1 Torr or less in the present embodiment, and includes a housing 33 ′, a substrate carry-in port 31 ′, and a substrate carry-out port 32 ′. ,have. In the present embodiment, the substrate carry-in port 31 ′ includes an intermediate roller 361 that is rotatably provided, and a shaft 312 that is adjacent to the outer peripheral surface of the intermediate roller 361 with respect to the shaft 362 of the intermediate roller 361. And a base material carry-in roller 311 ′ provided so as to be parallel and rotatable, the outer peripheral surface of the intermediate roller 361 and the outer peripheral surface of the base material carry-in roller 311 ′ are defined. The base material outlet 32 ′ of the decompression chamber 30 ′ is rotatable in parallel with the intermediate roller 361, and the shaft 322 is parallel to the shaft 362 of the intermediate roller 361 so that the outer peripheral surface is adjacent to the outer peripheral surface of the intermediate roller 361. Is defined between the outer peripheral surface of the intermediate roller 361 and the outer peripheral surface of the substrate carry-out roller 321 ′.

  Next, the operation of the present embodiment configured as described above will be described.

  In the present embodiment, when the conveyance of the substrate 10 and the film 81 is started, the substrate carry-in roller 311 ′, the intermediate roller 361, and the substrate carry-out roller 321 ′ of the decompression chamber 30 are loaded into the substrate. The speeds of the outer peripheral surfaces of the mouth roller 311 ′ and the intermediate roller 361 facing each other and the speeds of the outer peripheral surfaces of the base material carry-out roller 321 ′ and the intermediate roller 361 facing each other are determined as desired. The only difference is that it is rotated so as to match the transport speed, and the other operations are substantially the same as those of the embodiment shown in FIG.

  As described above, also according to the present embodiment, it is easy to place the continuously supplied base material 10 in a reduced pressure environment.

  Next, a fourth embodiment of the filling liquid filling apparatus according to the present invention will be described with reference to FIG.

  FIG. 5 is a diagram schematically showing a configuration of a filling liquid filling device according to a fourth embodiment of the present invention. As shown in FIG. 5, the filling liquid filling device 200 according to the present embodiment is a decompression chamber 30 ″ capable of maintaining the inside in a reduced pressure state with respect to the filling liquid filling device 100 shown in FIG. 1. A decompression chamber 30 '' having a substrate carry-out port 32 '' and a substrate supply device 20 '' for supplying the substrate 10, and a substrate supply device 20 'provided in the decompression chamber 30' ' 'And the base material 10 supplied from the base material supply device 20' 'is transported from the inside of the decompression chamber 30' 'to the outside through the base material outlet 32' 'of the decompression chamber 30' '. The only difference is that it includes a substrate conveying device 40 '' that constitutes the conveying path 45 '', and the other configuration is substantially the same as the configuration of the filling liquid filling device 100 shown in FIG. . In the embodiment shown in FIG. 5, the same parts as those in the embodiment shown in FIG.

  The base material supply device 20 '' is similar to the base material supply device 20 of the embodiment shown in FIG. 1, in which a base material roll 10 'is set, and a sheet-like base material is used as the base material 10 from the base material roll 10'. Has a substrate feed shaft 22 that is adapted to rotate the substrate roll 10 '.

  The decompression chamber 30 ″ is a decompression chamber capable of maintaining the interior in a decompressed state of 1 Torr or less in the present embodiment as well. The decompression chamber 30 '' of the present embodiment includes a housing 33 '' and a base material outlet 32 '' provided on the wall portion of the housing 33 ''.

  The base material carry-out port 32 '' of the decompression chamber 30 '' has a pair of base material carry-out rollers 321 provided such that the shafts 322 are parallel and rotatable with respect to each other so that the outer peripheral surfaces are adjacent to each other. It is defined between the outer peripheral surfaces of the carry-out roller 321. Also in the present embodiment, the shaft 322 of each base material carry-out roller 321 is provided with a drive unit 323 for rotationally driving the base material carry-out roller 321. Each base material exit roller 321 is provided with a heat source (not shown) for heating the base material exit roller 321.

  Also in the present embodiment, the base material transport device 40 ″ is provided on the most downstream side in the transport direction of the base material 10 by the base material transport device 40 ″ and winds up the base material 10. A base material take-up shaft 42 and a feed roller 46 provided between the base material supply device 20 ″ and the base material take-up shaft 42 on the base material conveyance path 45 ″ are provided. The substrate take-up shaft 42 is provided with a drive unit 43 for rotationally driving the substrate take-up shaft 42.

  Next, the operation of the present embodiment configured as described above will be described.

  First, the base material roll 10 ′ in which the sheet-like base material 10 shown in FIG. 2A is rolled is supplied to the base material feeding device 20 ″ provided in the decompression chamber 30 ″. Set on shaft 22. Then, the substrate 10 unwound from the substrate roll 10 ′ is passed from the inside of the decompression chamber 30 ″ to the outside through the substrate carry-out port 32 ″ of the decompression chamber 30 ″. Thereafter, the base material 10 is passed between the outer peripheral surface of one base material carry-out roller 321 and the plate-like member 61 of the filling liquid reservoir 60, and between the base material squeegee 71 and the feed roller 46. Is passed. And the edge part by the side of the unwinding start of the base material 10 is fixed to the base material winding shaft 42 of conveying apparatus 40 ''. The base material 10 is disposed in the filling liquid reservoir 60 so that the surface of the base material 10 on the fine hole 12 side can come into contact with the filling liquid 15 stored in the filling liquid reservoir 60. The Thereby, at the same time when the base material 10 is returned to the atmospheric pressure, the fine hole 12 side of the base material 10 can be passed through the filling liquid reservoir 60 in which the filling liquid 15 is stored.

  Next, as in the case of the embodiment shown in FIG. 1, the hot-melt urethane resin as an etching inhibitor is supplied to the container 51 of the filling liquid supply device 50 and heated and melted. It is stored in the filling liquid reservoir 60.

  Further, the decompression chamber 30 ″ is evacuated, and the interior of the decompression chamber 30 ″ is maintained in a decompressed state of 1 Torr or less. And a pair of base material carrying-out exit roller 321 is heated so that the temperature of an outer peripheral surface may be about 100 degreeC with the heat source not shown.

  In this state, the base material 10 is transported by the base material transport device 40 ″. Specifically, the substrate winding shaft 42 is rotated by the drive unit 43 so that the substrate 10 is conveyed at a desired conveyance speed, and the substrate 10 is wound around the substrate winding shaft 42. Be started.

  In addition, the pair of base material carry-out rolls 321 of the decompression chamber 30 ″ are rotated by the driving unit 323 so that the speeds of the outer peripheral surfaces on the opposite sides coincide with the desired transport speed of the base material 10.

  As the base material 10 is wound around the base material take-up shaft 42, the base material roll 10 ′ is rotated together with the base material feed shaft 22 of the base material supply device 20, while the base material roll 10 ′ is rotated. 10 is fed.

  The base material 10 fed from the base material roll 10 ′ is conveyed to the base material carry-out port 32 ″ of the decompression chamber 30 ″ by the rotation of the base material winding shaft 42. Until the substrate 10 is unwound from the substrate roll 10 ′ and conveyed to the substrate carry-out port 32 ″, the micropores 12 of the substrate 10 are exposed to the reduced pressure environment in the reduced pressure chamber 30 ″. Then, the air in the fine hole 12 is removed.

  The base material 10 from which the air in the micro holes 12 has been removed is moved from the inside of the decompression chamber 30 ″ to the outside through the base material carry-out port 32 ″ of the decompression chamber 30 ″ by the rotation of the substrate winding shaft 42. That is, it is conveyed to the filling liquid reservoir 60. Thus, the base material 10 carried out from the decompression chamber 30 ″ is returned to the atmospheric pressure, and at the same time, the filling liquid reservoir portion in which the filling liquid 15 is stored on the fine hole 12 side of the base material 10. After passing through 60, the filling liquid 15 is continuously supplied to the fine holes 12. Then, the filling liquid 15 is filled in the fine holes 12 of the base material 10 by the action of the atmospheric pressure.

  The substrate 10 that has passed through the filling liquid reservoir 60 is further conveyed by the rotation of the substrate take-up shaft 42, and passes between the substrate squeegee 71 and the feed roller 46.

  Then, the base material 10 on which the layer of the etching inhibitor 15 is formed is wound on the base material winding shaft 42 by the rotation of the base material winding shaft 42.

  As described above, according to the present embodiment as well, air can be removed from the micropores 12 by placing the base material 10 in a reduced pressure environment in the reduced pressure chamber 30 ″. Further, by supplying the filling liquid 15 from the filling liquid supply device 50 toward the base material outlet 32 ″ of the decompression chamber 30 ″, the substrate placed in a decompressed environment in the decompression chamber 30 ″. Before or at the same time as 10 is returned to atmospheric pressure, the plugging solution 15 can be supplied to the micropores 12. Therefore, it is possible to fill the filling liquid 15 into the fine holes 12 from which the internal air has been removed. As a result, bubbles are prevented from being formed in the micropores 12 when the filling liquid 15 is filled.

  Next, a fifth embodiment of the filling liquid filling apparatus according to the present invention will be described with reference to FIG.

  FIG. 6 is a diagram schematically showing a configuration of a filling liquid filling device according to a fifth embodiment of the present invention. As shown in FIG. 6, the filling liquid filling device 200 ′ according to the present embodiment is a decompression chamber 30 ″ capable of maintaining the inside in a reduced pressure state with respect to the filling liquid filling device 100 ′ shown in FIG. 3. A decompression chamber 30 ″ having a substrate carry-out port 32 and a substrate supply device 20 ″ for supplying the substrate 10, and a substrate supply device 20 ′ provided in the decompression chamber 30 ″. 'And the base material transport such that the base material 10 supplied from the base material supply device 20' 'is transported from the inside of the decompression chamber 30' 'to the outside through the base material outlet 32' 'of the decompression chamber 30' '. The base material transport device 40 '' constituting the path 45 '' and the film roll 81 'are set, and the film roll 81' is rotated so that the film 81 is supplied from the film roll 81 '. A film feed shaft 82 having a vacuum chamber 30 '' And a film transport path 84 ′ such that the film 81 supplied from the film roll 81 ′ is transported from the inside of the decompression chamber 30 ″ to the outside through the substrate carry-out port 32 ″. The only difference is that it is provided with a film transporting device 87 '' that constitutes ', and the other configuration is substantially the same as the configuration of the filling liquid filling device 100' shown in FIG. In the embodiment shown in FIG. 6, the same parts as those in the embodiment shown in FIG.

  The base material supply device 20 '' is similar to the base material supply device 20 of the embodiment shown in FIG. 3, in which a base material roll 10 'is set, and the base material roll 10' to the base material 10 is a sheet-like base material. 10 has a substrate feed shaft 22 adapted to rotate the substrate roll 10 'so that 10 is fed.

  The decompression chamber 30 ″ is a decompression chamber capable of maintaining the interior in a decompressed state of 1 Torr or less in the present embodiment as well. The decompression chamber 30 '' of the present embodiment includes a housing 33 '' and a base material outlet 32 '' provided on the wall portion of the housing 33 ''.

  The base material carry-out port 32 '' of the decompression chamber 30 '' has a pair of base material carry-out rollers 321 provided such that the shafts 322 are parallel and rotatable with respect to each other so that the outer peripheral surfaces are adjacent to each other. It is defined between the outer peripheral surfaces of the carry-out roller 321. Also in the present embodiment, the shaft 322 of each base material carry-out roller 321 is provided with a drive unit 323 for rotationally driving the base material carry-out roller 321. The drive shaft 322 of each substrate carry-out roller 321 is provided with a heat source (not shown) for heating the substrate carry-out roller 321.

  Also in the present embodiment, the base material transport device 40 ″ is provided on the most downstream side in the transport direction of the base material 10 by the base material transport device 40 ″ and winds up the base material 10. A base material take-up shaft 42 and a feed roller 46 provided between the base material supply device 20 ″ and the base material take-up shaft 42 on the base material conveyance path 45 ″ are provided. The substrate take-up shaft 42 is provided with a drive unit 43 for rotationally driving the substrate take-up shaft 42.

  In the present embodiment, the film feed shaft 82 is provided in the vicinity of the base material feed shaft 22 in parallel with the base material feed shaft 22.

  In this embodiment, the film transport device 87 ″ is provided on the most downstream side in the transport direction of the film 81 by the film transport device 87 ″, and is fed from the film roll 81 ′ set on the film feed shaft 82. A film take-up shaft 88 for taking up the film 81 to be wound, and a feed roller 86.

  Next, the operation of the present embodiment configured as described above will be described.

  First, a sheet-like base material that is etched only from one surface side to a depth D that is about half the thickness T of the base material 10 with a desired pattern, and has fine holes 12 formed on the one surface side. 10 is rolled to form a base material roll 10 ′, and the base material roll 10 ′ is set on the base material feeding shaft 22 of the base material supply device 20 ″. Then, the substrate 10 unwound from the substrate roll 10 ′ is passed from the inside of the decompression chamber 30 ″ to the outside through the substrate carry-out port 32 ″ of the decompression chamber 30 ″. Thereafter, the substrate 10 is passed between the substrate squeegee 71 and the feed roller 46. And after passing between a pair of press rollers 93, the edge part by the side of the unwinding start of the base material 10 is fixed to the base material winding shaft 42 of conveying apparatus 40 ''. In addition, the surface of the base material 10 on the side of the fine holes 12 of the base material 10 is at least in the filling liquid reservoir 60 ′ formed between the base material transport path 45 ″ and the film transport path 84 ″. It arrange | positions so that film conveyance path 84 '' may be opposed. Thereby, at the same time when the base material 10 is returned to atmospheric pressure, the fine hole 12 side of the base material 10 can be passed through the filling liquid reservoir 60 ′ in which the filling liquid 15 is stored.

  In addition, a film roll 81 ′ in which a PET film having the same width as the width W of the substrate 10 is rolled is set on the film feeding shaft 82. Then, the film 81 unwound from the film roll 81 ′ is passed from the inside of the decompression chamber 30 to the outside through the base material carry-out port 32 ″ of the decompression chamber 30 ″. Thereafter, the film 81 is passed between the feed roller 86 and the film squeegee 72 and guided to the side opposite to the base material conveyance path 45 ″ with respect to the filling liquid reservoir portion roller 91. Passed between the pair of pressing rollers 93. After the film 81 passed between the pair of pressing rollers 93 passes between the pair of feed rollers 86 ′, the end portion on the unwinding start side is fixed to the film winding shaft 88.

  And the base material by base material conveyance apparatus 40 '' with respect to the pressure reduction chamber 30 so that the filling liquid 15 supplied from the filling liquid supply apparatus 50 can be stored between the base material 10 and the film 81. A space in which a plate-like member (not shown) is surrounded by the substrate 10, the film 81, and the plate-like member is formed on the downstream side in the conveyance direction 10 and around the substrate carry-out port 32 ''. The substrate 10 and the film 81 are arranged so as to be in contact with each other. In this way, the films 81 separated from each other by the filling liquid reservoir roller 91 on the downstream side in the conveyance direction of the substrate 10 by the substrate conveyance device 40 ″ with respect to the substrate carry-out port 32 ″. A filling liquid reservoir 60 ′ is formed between the substrate 10 and the base material 10.

  Next, as the filling liquid 15, an ultraviolet curable resin is supplied to the container 51 of the filling liquid supply apparatus 50 as in the embodiment of FIG. 3, and the filling liquid reservoir is stored using the pump 52 and the pipe 53. Stored in the part 60 '.

  The decompression chamber 30 is evacuated, and the interior of the decompression chamber 30 ″ is maintained in a decompressed state of 1 Torr or less.

  In this state, the base material 10 is transported by the base material transport device 40 ″. Specifically, the substrate winding shaft 42 is rotated by the drive unit 43 so that the substrate 10 is conveyed at a desired conveyance speed, and the substrate 10 is wound around the substrate winding shaft 42. Be started. Then, as the base material 10 is wound around the base material take-up shaft 42, the base material roll 10, while the base material roll 10 ′ is rotated together with the base material feed shaft 22 of the base material supply device 20 ″. The substrate 10 is fed from “.

  Further, at the same time when the rotation of the substrate winding shaft 42 is started, the film winding shaft 88 is moved by the driving unit 89 so that the film 81 is conveyed in accordance with a desired conveying speed of the substrate 10. The film 81 is rotated and the film 81 is started to be wound around the film winding shaft 88. The film 81 is fed from the film roll 81 ′ while the film roll 81 ′ is rotated together with the film feeding shaft 82 as the film 81 is wound on the film winding shaft 88.

  Further, the pair of base material carry-out rolls 321 of the decompression chamber 30 ″ are rotated by the driving unit 322 so that the speeds of the outer peripheral surfaces on the opposite sides coincide with the desired transport speed of the base material 10.

  The base material 10 fed from the base material roll 10 ′ is conveyed to the base material carry-out port 32 ″ of the decompression chamber 30 ″ by the rotation of the base material winding shaft 42. Until the base material 10 is unwound from the base material roll 10 ′ and conveyed to the base material outlet 32 ″, the micropores 12 of the base material 10 are exposed to the reduced pressure environment in the reduced pressure chamber 30 ″. The air in the fine hole 12 is removed.

  The substrate 10 and the film 81 from which the air in the fine holes 12 has been removed are brought into contact with each other by the substrate unloading roller 321 of the decompression chamber 30 ″ by the rotation of the substrate winding shaft 42 and the film winding shaft 88, respectively. Then, it is transported from the inside of the decompression chamber 30 '' to the outside through the substrate carry-out port 32 ''. The substrate 10 and the film 81 conveyed from the decompression chamber 30 ″ are separated from each other by the filling liquid reservoir roller 91. Thus, the base material 10 carried out from the decompression chamber 30 ″ is returned to the atmospheric pressure, and at the same time, the filling liquid reservoir portion in which the filling liquid 15 is stored on the fine hole 12 side of the base material 10. After passing through 60 ′, the filling liquid 15 is continuously supplied to the fine holes 12. Then, the filling liquid 15 is filled in the fine holes 12 of the base material 10.

  Other operations are substantially the same as those of the embodiment shown in FIG.

  As described above, according to the present embodiment as well, air can be removed from the micropores 12 by placing the base material 10 in a reduced pressure environment in the reduced pressure chamber 30 ″. Further, by supplying the filling liquid 15 from the filling liquid supply device 50 toward the base material outlet 32 ″ of the decompression chamber 30 ″, the substrate placed in a decompressed environment in the decompression chamber 30 ″. Before or at the same time as 10 is returned to atmospheric pressure, the plugging solution 15 can be supplied to the micropores 12. Therefore, it is possible to supply the filling liquid 15 to the fine holes 12 from which the internal air has been removed. As a result, bubbles are prevented from being formed in the micropores 12 when the filling liquid 15 is filled.

DESCRIPTION OF SYMBOLS 10 Base material 10 'Base material 11 Pattern 12 Micro hole 15 Packing liquid 20 Base material supply apparatus 20''Base material supply apparatus 22 Base material feed axis 100 Filling liquid filling apparatus 100' Packing liquid filling apparatus 100 '' Filling liquid filling device 200 Filling liquid filling device 200 ′ Filling liquid filling device 22 Substrate feeding shaft 30 Depressurization chamber 30 ″ Decompression chamber 31 Substrate carry-in port 31 ′ Substrate carry-in port 311 Substrate carry-in roller 312 Axis 313 Drive unit 32 Substrate unloading port 32 ′ Substrate unloading port 32 ″ Substrate unloading port 321 Substrate unloading roller 322 Shaft 323 Driving unit 33 Housing 33 ″ Housing 34 Sealing unit 361 Intermediate roller 362 Shaft 363 Drive unit 40 Base material transport device 40 '' Base material transport device 42 Base material take-up shaft 43 Drive unit 45 Base material transport path 45 '' Base material transport path 46 Feed roller 50 Filling liquid supply device 51 Container 52 Pump 53 Tube 60 Liquid pool Portion 60 'Liquid reservoir 61 Plate member 71 Base squeegee 72 Film squeegee 81 Film 81' Film roll 82 Film feed shaft 84 Film transport path 84 '' Film transport path 85 Film separation roller 86 Feed roller 86 ' Feed roller 87 Film transport device 87 '' Film transport device 88 Film take-up shaft 89 Drive unit 91 Roller 93 for filling liquid reservoir Press roller 95 Ultraviolet irradiation device

Claims (17)

An apparatus for filling a filling liquid into the micropores of a substrate having micropores,
A substrate supply device for supplying the substrate;
A decompression chamber capable of maintaining the interior in a decompressed state, the decompression chamber having a substrate carry-in port and a substrate carry-out port;
The base material supplied from the base material supply device is transported from the inside of the decompression chamber to the inside through the base material carry-in port of the decompression chamber and from the inside to the outside of the decompression chamber through the base material carry-out port. A base material transport device that constitutes a simple base material transport path;
A filling liquid supply device that is provided on the downstream side in the conveyance direction of the substrate by the substrate conveyance device with respect to the decompression chamber and supplies a filling solution toward the substrate carry-out port of the decompression chamber When,
Equipped with a,
The base material carry-in port of the decompression chamber has a rotatable intermediate roller and a shaft that is parallel and rotatable with respect to the shaft of the intermediate roller so that the outer peripheral surface is adjacent to the outer peripheral surface of the intermediate roller. The base material carry-in roller provided is defined between the outer peripheral surface of the intermediate roller and the outer peripheral surface of the base material carry-in roller,
The base material carry-out port of the decompression chamber is a base material provided such that the shaft is parallel and rotatable with respect to the shaft of the intermediate roller such that the outer peripheral surface of the intermediate roller is adjacent to the outer peripheral surface of the intermediate roller. A filling liquid filling device characterized by being defined between an outer peripheral surface of the intermediate roller and an outer peripheral surface of the substrate carry-out roller by a carry-out roller . A filling liquid reservoir for storing a filling liquid on at least one side of the substrate conveyance path from the substrate discharge port of the decompression chamber to the downstream side in the conveyance direction of the substrate by the substrate conveyance device. The filling liquid filling device according to claim 1 , wherein a portion is provided. The said filling liquid reservoir part is formed in the circumference | surroundings of the said base material carrying-out port of the said pressure reduction chamber using a plate-shaped member, The filling liquid filling apparatus of Claim 2 characterized by the above-mentioned. The filling liquid filling device comprises:
A film feed shaft configured to rotate the film roll so that the film roll is set and the film is supplied from the film roll;
Film transport such that the film supplied from the film roll is transported from the inside of the decompression chamber to the inside through the base material carry-in port of the decompression chamber and from the inside to the outside of the decompression chamber through the base material carry-out port A film conveying device constituting the path;
Further comprising
The film transport path is located between the film transport path and the base material transport path on the downstream side in the transport direction of the base material by the base material transport device with respect to the base material carry-out port. The filling liquid filling device according to claim 2 , wherein the filling device is configured to form a portion. An apparatus for filling a filling liquid into the micropores of a substrate having micropores,
A substrate supply device for supplying the substrate;
A decompression chamber capable of maintaining the interior in a decompressed state, the decompression chamber having a substrate carry-in port and a substrate carry-out port;
The base material supplied from the base material supply device is transported from the inside of the decompression chamber to the inside through the base material carry-in port of the decompression chamber and from the inside to the outside of the decompression chamber through the base material carry-out port. A base material transport device that constitutes a simple base material transport path;
A filling liquid supply device that is provided on the downstream side in the conveyance direction of the substrate by the substrate conveyance device with respect to the decompression chamber and supplies a filling solution toward the substrate carry-out port of the decompression chamber When,
A film feed shaft configured to rotate the film roll so that the film roll is set and the film is supplied from the film roll;
Film transport such that the film supplied from the film roll is transported from the inside of the decompression chamber to the inside through the base material carry-in port of the decompression chamber and from the inside to the outside of the decompression chamber through the base material carry-out port A film conveying device constituting the path;
Equipped with a,
A filling liquid reservoir for storing a filling liquid on at least one side of the substrate conveyance path from the substrate discharge port of the decompression chamber to the downstream side in the conveyance direction of the substrate by the substrate conveyance device. Part is provided,
The film transport path is located between the film transport path and the base material transport path on the downstream side in the transport direction of the base material by the base material transport device with respect to the base material carry-out port. A filling liquid filling device characterized by being configured to form a portion . The outer periphery of the pair of substrate carry-in rollers is formed by a pair of substrate carry-in rollers provided such that the shafts are parallel and rotatable with respect to each other so that the outer circumferential surfaces are adjacent to each other. Is defined between the faces,
The outer periphery of the pair of substrate unloading rollers is formed by a pair of substrate unloading rollers provided such that the shafts are parallel and rotatable with respect to each other so that the outer peripheral surfaces are adjacent to each other. 6. The filling liquid filling device according to claim 5 , wherein the filling liquid filling device is defined between the surfaces. The film transport path, at least in some areas, the eye according to any one of claims 4 to 6, characterized in that it is configured to be separated from the base material transfer path of the vacuum chamber Filling liquid filling device. The base material transported by the base material transport device and the film transported by the film transport device on the downstream side in the transport direction of the base material by the base material transport device with respect to the filling liquid reservoir portion 8. The filling device for filling liquid according to claim 4 , further comprising a pressing roller configured to press each other against each other. The base material feeding device is configured to rotate the base material roll so that a base material roll is set and a sheet-like base material is supplied as the base material from the base material roll. 9. The filling liquid filling device according to claim 1, further comprising a shaft. The base material supply device includes:
A transport web feed shaft configured to rotate the transport web roll so that the transport web roll is set and the transport web is supplied from the transport web roll;
A substrate mounting device for mounting a sheet-like substrate as the substrate on the transport web supplied from the transport web roll;
The filling device for filling liquid according to any one of claims 1 to 8, characterized by comprising: The filling device according to any one of claims 1 to 10 , wherein the decompression chamber can be maintained in a decompressed state of 1 Torr or less. An apparatus for filling a filling liquid into the micropores of a substrate having micropores,
A decompression chamber capable of maintaining the interior in a decompressed state, the decompression chamber having a substrate carry-out port;
A base material supply device for supplying the base material, the base material supply device provided in the decompression chamber;
A base material transport device that constitutes a base material transport path in which the base material supplied from the base material supply device is transported from the inside of the decompression chamber to the outside through the base material carry-out port of the decompression chamber;
A filling liquid supply device that is provided on the downstream side in the conveyance direction of the substrate by the substrate conveyance device with respect to the decompression chamber and supplies a filling solution toward the substrate carry-out port of the decompression chamber When,
A film feed shaft that is configured to rotate the film roll so that the film roll is set and the film is supplied from the film roll, the film feed shaft provided in the decompression chamber;
A film transporting device that constitutes a film transporting path in which the film supplied from the film roll is transported from the inside of the decompression chamber to the outside through the base material unloading port;
Equipped with a,
A filling liquid reservoir for storing a filling liquid on at least one side of the substrate conveyance path from the substrate discharge port of the decompression chamber to the downstream side in the conveyance direction of the substrate by the substrate conveyance device. Part is provided,
The film transport path is located between the film transport path and the base material transport path on the downstream side in the transport direction of the base material by the base material transport device with respect to the base material carry-out port. A filling liquid filling device characterized by being configured to form a portion . The base material feeding device is configured to rotate the base material roll so that a base material roll is set and a sheet-like base material is supplied as the base material from the base material roll. 13. The filling liquid filling apparatus according to claim 12 , further comprising a shaft. The base material supply device includes:
A transport web feed shaft configured to rotate the transport web roll so that the transport web roll is set and the transport web is supplied from the transport web roll;
A substrate mounting device for mounting a sheet-like substrate as the substrate on the transport web supplied from the transport web roll;
The filling device for filling liquid according to claim 12 , comprising: 15. The filling liquid filling apparatus according to claim 12 , wherein the decompression chamber can be maintained in a decompressed state of 1 Torr or less. The outer periphery of the pair of substrate unloading rollers is formed by a pair of substrate unloading rollers provided such that the shafts are parallel and rotatable with respect to each other so that the outer peripheral surfaces are adjacent to each other. 16. The filling device for filling liquid according to claim 12, wherein the filling device is defined between the surfaces. The base material transported by the base material transport device and the film transported by the film transport device on the downstream side in the transport direction of the base material by the base material transport device with respect to the filling liquid reservoir portion The filling liquid filling device according to claim 12 , further comprising a pressing roller configured to press each other against each other.

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