JP6144907B2 - Method for producing fine metal pattern sheet for sliding surface coating - Google Patents

Description

The present invention relates to a method of manufacturing a fabricated slide surface coating fine metal pattern sheet by continuous plating using a roll DLC pattern is provided.

  The roll for continuous plating is used for a continuous plating apparatus. For example, the roll is continuously plated by passing a strip-shaped workpiece such as a steel sheet wound around a reel through a plating bath while continuously winding it. is there. As an example of the roll for continuous plating, there exist rolls, such as a sink roll disclosed by patent document 1 or patent document 2, for example.

  When manufacturing a roll for continuous plating as described above, if a photosensitive material is applied to a substrate and exposed, developed, burned, and etched, there is a problem that over etching called so-called side etching occurs. As the patterning becomes finer, the problem of side etching becomes more obvious.

JP 2006-283044 A JP 2001-89836 A JP 2009-093170 A

The present invention has been made in view of the above-described problems of the prior art, and is manufactured using a roll with a DLC pattern that eliminates the problem of side etching, and manufactures a fine metal pattern sheet for coating a sliding surface with a small friction coefficient. It aims to provide a method.

In order to solve the above-mentioned problems, the present sliding metal coating fine metal pattern sheet is formed by applying a photoresist to the surface of a cylindrical metal substrate that can be plated, and exposing and developing to form a resist pattern. A DLC coating film is formed on the surface of the metal substrate and the mesh-like resist pattern, the DLC coating film formed on the resist pattern is peeled off together with the resist pattern, and the DLC pattern is formed on the surface of the cylindrical metal substrate. It is manufactured by continuously plating a metal that can be plated using a roll with a DLC pattern manufactured by forming a film.

  Thus, since the DLC coating film formed on the resist pattern is peeled off together with the resist pattern, there is an advantage that the problem of side etching is solved. That is, in the present invention, since a technique called so-called lift-off is used instead of etching, the conventional side etching problem does not occur.

  As a pattern shape of the fine metal pattern sheet for covering the sliding surface, for example, a pattern in which a large number of polygons such as a triangle, a quadrangle, a pentagon, a hexagon, a heptagon, an octagon, and the like are arranged, or when the sheet is rolled into a cylindrical shape Any pattern such as a spiral pattern or a stripe pattern may be used. In particular, it is preferable that the sliding surface coated with the sliding surface coating fine metal pattern sheet has a pattern in which lubricating oil can easily flow.

This sliding surface coating fine metal pattern sheet is used by being attached to the sliding surface so as to cover the sliding surface of various members. As a sliding surface of various members, for example, there is an inner peripheral surface of a piston cylinder such as an automobile engine. When affixing to the sliding surface, it can be affixed by screwing in addition to adhesion or welding with an adhesive such as a heat-resistant adhesive. Among these, it is preferable that the sliding surface coating fine metal pattern sheet is screwed to the sliding surface.

  Further, for example, when the sliding surface coating fine metal pattern sheet is attached to the inner peripheral surface of a piston cylinder of an automobile engine or the like, the inside of the piston cylinder covered with the sliding surface coating fine metal pattern sheet A spiral pattern may be used so that the lubricating oil can easily flow on the peripheral surface.

This fine metal pattern sheet for coating a sliding surface is suitable for coating a sliding surface because of its small friction coefficient.

  The cylindrical metal substrate to which the photoresist is applied can be any metal that can be plated, but is made of nickel, tungsten, chromium, titanium, gold, silver, platinum, stainless steel, iron, copper, or aluminum. It is preferably composed of at least one material selected from the group.

  Any metal that can be plated is applicable to the metal that can be plated by the continuous plating. For example, nickel, tungsten, chromium, titanium, gold, silver, platinum, iron, copper, aluminum, and the like are applied. be able to.

  The thickness of the coated DLC coating film is preferably 0.1 μm to 10 μm. More specifically, 0.1 μm to 5 μm is more preferable.

  The cylindrical metal substrate may be provided on a CFRP (carbon fiber reinforced resin) material.

  The cylindrical metal base material may be provided on a cushion layer made of rubber or a resin having cushioning properties. As the cushion layer, a synthetic rubber such as silicone rubber, or a synthetic resin having elasticity such as polyurethane or polystyrene can be used. The thickness of the cushion layer is not particularly limited as long as it can provide cushioning properties, that is, elasticity. For example, a thickness of about 1 cm to 5 cm is sufficient. As an example of the gravure plate provided with a cushion layer made of rubber or a resin having cushioning properties, there is, for example, Patent Document 3 and the like, and the cylindrical metal substrate can have the same configuration.

  As the photoresist, either a positive photoresist or a negative photoresist is applicable, but a negative photoresist is preferable.

  The method for producing a fine metal pattern sheet for covering a sliding surface according to the present invention comprises a step of preparing a cylindrical metal substrate that can be plated, and a photoresist is applied to the surface of the cylindrical metal substrate, followed by exposure and development. Forming a resist pattern, forming a DLC coating film on the surface of the cylindrical metal substrate and the resist pattern, and peeling the DLC coating film formed on the resist pattern together with the resist pattern. Forming a DLC pattern on the surface of the cylindrical metal base, and producing a roll with a DLC pattern, and by using the roll with the DLC pattern, continuously plating a metal that can be plated for sliding surface coating And a step of producing a fine metal pattern sheet.

  The metal substrate to which the photoresist is applied is made of at least one material selected from the group consisting of nickel, tungsten, chromium, titanium, gold, silver, platinum, stainless steel, iron, copper, and aluminum. Is preferable.

  The metal substrate to which the photoresist is applied may have a cushion layer made of rubber or a resin having a cushioning property.

  The metal base material to which the photoresist is applied can be made of a cushioning material made of rubber or a cushioning resin.

  The thickness of the DLC coating film is preferably 0.1 μm to 10 μm. More specifically, 0.1 μm to 5 μm is more preferable.

ADVANTAGE OF THE INVENTION According to this invention, it is produced using the roll with a DLC pattern which eliminated the problem of side etching, and the remarkable effect that the manufacturing method of the fine metal pattern sheet for sliding surface coating | cover with a small friction coefficient can be provided. Have

The fine metal pattern sheet for covering a sliding surface produced by the method of the present invention can have a pattern line-to-line spacing of 1 μm to 100 μm or less and can be produced with high accuracy. For this reason, it is applicable to various uses. Any application is possible as long as it covers the sliding surface. For example, the inner surface of the piston cylinder of the internal combustion engine, the outer peripheral surface of the piston, the inner peripheral surface of the bearing receiving portion or the bearing, etc. Any one having a surface is applicable.

It is a principal part enlarged view which shows one Embodiment of the fine metal pattern sheet for sliding surface coating manufactured by the method of this invention. It is a principal part enlarged view which shows the example which applied the fine metal pattern sheet for sliding surface coating | cover of FIG. 1 to the engine of a motor vehicle. It is a principal part enlarged view which shows another embodiment of the fine metal pattern sheet for sliding surface coating manufactured by the method of this invention. It is explanatory drawing which shows typically an example of the roll with a DLC pattern used for the fine metal pattern sheet for sliding surface coating manufactured by the method of this invention, (a) is a photoresist on the surface of a cylindrical metal base material. (C) is a cross-sectional view of the main part in a state where a resist pattern is formed by exposure and development, and (c) is a DLC coating film on the surface of the cylindrical metal substrate and the resist pattern. FIG. 6D is a cross-sectional view of a main part showing a state where the DLC coating film formed on the resist pattern is peeled off together with the resist pattern. It is a flowchart which shows the process order of the manufacturing method of the roll with a DLC pattern shown in FIG.

  Embodiments of the present invention will be described below, but these embodiments are exemplarily shown, and it goes without saying that various modifications can be made without departing from the technical idea of the present invention.

  In FIG. 1, the code | symbol 10A shows the fine metal pattern sheet for sliding surface coating | cover. The sliding surface coating fine metal pattern sheet 10A is a sliding surface coating fine metal pattern sheet manufactured by continuously plating a metal that can be plated using the roll with DLC pattern shown in FIG. The shape of the pattern 12 of the fine metal pattern sheet for sliding surface coating is a stripe shape.

  FIG. 2 shows an example in which the sliding surface coating fine metal pattern sheet 10A is applied to an automobile engine. In FIG. 2, a sliding surface coating fine metal pattern sheet 10 </ b> A is attached so as to cover the inner peripheral surface of the piston cylinder 14. Inside the piston cylinder 14, the piston 18 slides and reciprocates by the crank 16.

  FIG. 3 shows another embodiment of the fine metal pattern sheet for sliding surface coating according to the present invention. In FIG. 3, the code | symbol 10B shows the fine metal pattern sheet for sliding surface coating | cover. The shape of the pattern 20 of the sliding surface coating fine metal pattern sheet 10B is a pattern in which a large number of hexagons are arranged.

  Next, FIG. 4 shows an example of a roll with a DLC pattern used for the fine metal pattern sheet for sliding surface coating according to the present invention.

  Reference numeral 22 denotes a cylindrical metal substrate that can be plated. The cylindrical metal substrate 22 can be any metal that can be plated, but is selected from the group consisting of nickel, tungsten, chromium, titanium, gold, silver, platinum, stainless steel, iron, copper, and aluminum, for example. It can be composed of at least one material.

  Moreover, the cylindrical metal base material 22 is good also as a structure provided on a CFRP (carbon fiber reinforced resin) material, and is good also as a structure provided on the cushion layer which consists of resin which has rubber | gum or cushioning properties.

  First, a cylindrical metal substrate 22 is prepared (step 100 in FIG. 5), and as shown in FIG. 4A, a photoresist 24 is applied to the surface of the cylindrical metal substrate 22, and the photoresist 24 is coated. Is exposed and developed to form a resist pattern 26 on the surface of the cylindrical metal substrate 22 (step 102 in FIG. 5). The photoresist 24 is preferably a negative photoresist. In this way, the state shown in FIG.

  Then, a DLC coating film 28 is formed on the surfaces of the cylindrical metal substrate 22 and the resist pattern 26 (step 104 in FIG. 5). In this way, the state shown in FIG.

  Next, the DLC coating film 28 formed on the resist pattern 26 is peeled off together with the resist pattern 26 to form a DLC pattern 30 on the surface of the cylindrical metal substrate 22 to produce a roll 32 with a DLC pattern. (Step 106 in FIG. 5). In this way, the state shown in FIG.

  Then, by continuously plating a metal that can be plated using the roll 32 with the DLC pattern, the fine metal pattern sheets 10A and 10B for covering the sliding surface as shown in FIGS. 1 and 2 can be obtained. As the metal that can be plated using the roll with DLC pattern 32, any metal that can be plated can be applied. For example, nickel, tungsten, chromium, titanium, gold, silver, platinum, iron, Copper, aluminum, or the like can be applied. For example, when the cylindrical metal substrate 22 is copper, nickel can be applied as a metal to be plated using the roll 32 with the DLC pattern.

  When the DLC coating film 28 is formed, it can be coated with DLC by a CVD (Chemical Vapor Deposition) method or a sputtering method.

  The thickness of the DLC coating film 28 is preferably 0.1 μm to 10 μm. More specifically, 0.1 μm to 5 μm is more preferable.

  Further, as the pattern shape of the fine metal pattern sheet for covering the sliding surface, for example, a pattern in which a large number of polygons such as a triangle, a quadrangle, a pentagon, a hexagon, a heptagon, and an octagon are arranged, or the sheet is rounded into a cylindrical shape. Any pattern such as a spiral pattern or a stripe pattern may be used. In particular, it is preferable that the sliding surface coated with the sliding surface coating fine metal pattern sheet has a pattern in which lubricating oil can easily flow.

  Further, for example, when the sliding surface coating fine metal pattern sheet is attached to the inner peripheral surface of a piston cylinder of an automobile engine or the like, the inside of the piston cylinder covered with the sliding surface coating fine metal pattern sheet A spiral pattern may be used so that the lubricating oil can easily flow on the peripheral surface.

  The fine metal pattern sheet for coating a sliding surface of the present invention is suitable for coating a sliding surface because of its small friction coefficient.

  The present invention will be described more specifically with reference to the following examples. However, it is needless to say that these examples are shown by way of illustration and should not be construed in a limited manner.

Example 1
Prepare a plate base material (aluminum hollow roll) with a circumference of 600 mm and a surface length of 1100 mm, and use the boomerang line (a fully automatic laser gravure plate making machine manufactured by Sink Laboratories, Inc.) to form the copper plating layer described below. went.

First, a plate base material (aluminum hollow roll) was mounted in a copper plating tank, and the hollow roll was completely immersed in the plating solution to form a copper plating layer having a current density of 30 A / dm ² and a voltage of 6.0 V with a thickness of 80 μm. The plating surface was free of bumps and pits, and a uniform copper plating layer was obtained.

The surface of the copper plating layer was polished by a two-head type polishing machine (Sinc Laboratory Co., Ltd. polishing machine) to make the surface of the copper plating layer a uniform polishing surface. Using the formed copper plating layer as a base material, a photosensitive film (resist for semiconductor laser: TSER-NS (manufactured by Sink Laboratories)) was applied to the surface (Fountain coater) and dried. The film thickness of the obtained photosensitive film was 15 μm as measured by a film thickness meter (F20 manufactured by FILLMETRICS, sold by Matsushita Techno Trading). The image was then developed with laser exposure. In the laser exposure, a laser stream FX was used and a predetermined pattern exposure was performed under an exposure condition of 300 mJ / cm ² . The development was performed at 24 ° C. for 90 seconds at a developer dilution ratio (stock solution 1: water 7) using a TLD developer (Sink Laboratory Co., Ltd. developer) to form a predetermined resist pattern.

An intermediate layer having a thickness of 0.1 μm was formed in an argon / hydrogen gas atmosphere, hexamethyldisiloxane as a source gas, a film formation temperature of 80 to 120 ° C., and a film formation time of 60 minutes. Next, a DLC layer having a thickness of 2 μm was formed as a source gas using toluene, a film formation temperature of 80 to 120 ° C., and a film formation time of 180 minutes.
Next, the resist was peeled off with a 5% aqueous sodium hydroxide solution to form a plurality of oblique DLC patterns. In this way, a roll with a pattern was obtained.

Next, it was mounted in a copper plating bath and completely immersed in a plating solution to obtain a copper pattern foil having a thickness of ^{2 A} / dm ² and 7.0 V and a thickness of 20 μm. When the surface was observed with an optical microscope, a fine metal pattern sheet for sliding surface coating having a pattern as shown in FIG. 1 was obtained. Moreover, the line width D1 shown in FIG. 1 was 20 μm. When the obtained sliding surface coating fine metal pattern sheet was screwed to the inner peripheral surface of an automobile engine and the piston was moved, it slid smoothly.

(Example 2)
A patterned roll was obtained in the same manner as in Example 1 except that a plurality of hexagonal DLC patterns were formed. The thickness of the DLC coating film was 2 μm. The obtained roll with a pattern was mounted on a nickel plating tank in the same manner as in Example 1 and completely immersed in a plating solution to obtain a nickel pattern foil having a thickness of ^{2 A} / dm ² and 7.0 V and a thickness of 20 μm. When the surface was observed with an optical microscope, a fine metal pattern sheet for covering the sliding surface as shown in FIG. 3 was obtained. Further, the line width D2 shown in FIG. 3 was 30 μm. When the obtained sliding surface coating fine metal pattern sheet was screwed to the inner peripheral surface of an automobile engine and the piston was moved, it slid smoothly.

10A, 10B: Fine metal pattern sheet for covering sliding surface, 12, 20: pattern, 14: piston cylinder, 16: crank, 18: piston, 22: cylindrical metal substrate, 24: photoresist, 26: resist pattern 28: DLC coating film, 30: DLC pattern, 32: roll with DLC pattern, D1, D2: line width.

Claims (5)

A step of preparing a cylindrical metal substrate that can be plated, a step of applying a photoresist to the surface of the cylindrical metal substrate, exposing and developing to form a resist pattern, and the cylindrical metal substrate and resist Forming a DLC coating film on the surface of the pattern, peeling the DLC coating film formed on the resist pattern together with the resist pattern to form a DLC pattern on the surface of the cylindrical metal substrate, Producing a roll with a pattern;
Using the roll with DLC pattern to produce a fine metal pattern sheet for sliding surface coating by continuously plating a metal that can be plated; and
The manufacturing method of the fine metal pattern sheet for sliding-surface coating | covering characterized by including this. The metal substrate to which the photoresist is applied is composed of at least one material selected from the group consisting of nickel, tungsten, chromium, titanium, gold, silver, platinum, stainless steel, iron, copper, and aluminum. The method for producing a fine metal pattern sheet for coating a sliding surface according to claim 1 . The method for producing a fine metal pattern sheet for covering a sliding surface according to claim 1 or 2, wherein the metal substrate to which the photoresist is applied comprises a cushion layer made of rubber or a resin having cushioning properties. The method for producing a fine metal pattern sheet for sliding surface coating according to any one of claims 1 to 3 , wherein the photoresist is a negative photoresist. The thickness of the DLC coating film, according to claim 1 to 4, any one of a sliding surface coating fine metal pattern sheet manufacturing method as set forth, which is a 0.1 m to 10 m.

Images