JP6152340B2 - Manufacturing method of disk-shaped substrate and carrier for grinding or polishing - Google Patents

Description

The present invention relates to a method for manufacturing a disk-shaped substrate and a carrier for grinding or polishing .

  With the recent increase in recording density of magnetic recording media, it is required to improve the flatness of glass substrates for magnetic disks used in the production of magnetic recording media. In order to reduce the surface unevenness of the glass substrate for magnetic disk, the glass substrate is polished.

  In the polishing treatment, polishing is performed on the main surface of the glass substrate using a double-side polishing apparatus equipped with a planetary gear mechanism. Specifically, the main surface on both sides of the glass substrate is ground while holding the outer peripheral side end face of the glass substrate in a holding hole provided in the glass substrate carrier of the double-side polishing apparatus. The double-side polishing apparatus has a pair of upper and lower surface plates (upper surface plate and lower surface plate), and the glass substrate is sandwiched between the upper surface plate and the lower surface plate together with the glass substrate carrier. Then, while supplying a polishing slurry containing loose abrasive grains between the upper surface plate and the lower surface plate, either or both of the upper surface plate and the lower surface plate are moved to operate the glass substrate and each surface plate. Both main surfaces of the glass substrate can be ground by relatively moving.

  As a material for a glass substrate carrier, there is a material using a resin impregnated substrate composed of a glass cloth made of glass fiber and a resin material impregnated in the glass cloth. When the holding hole of the glass substrate or the outer peripheral shape of the glass substrate carrier is formed by cutting the resin-impregnated substrate, the glass fiber is exposed on the cutting surface. For this reason, in order to prevent a glass substrate from being damaged by the exposed glass fiber, the etching process of glass fiber is performed (for example, refer patent document 1).

JP 2012-218103 A

  When a glass substrate carrier composed of a resin-impregnated substrate is repeatedly used for the grinding or polishing treatment of the glass substrate, the number of foreign matters on the surface (main surface and end face) of the glass substrate after the polishing treatment has increased. In addition, scratches on the glass substrate, which are considered to be caused by this foreign matter, increased.

  Then, an object of this invention is to provide the manufacturing method of a glass substrate which can reduce the number of foreign materials and the damage | wound in the surface of the glass substrate after a grinding | polishing process.

  In order to solve the above problems, the inventors have observed a glass substrate carrier repeatedly used for grinding and polishing of a glass substrate. Glass fibers are exposed on the main surface of the glass substrate carrier. found. It is considered that a part of the glass fiber is detached in the grinding process or the polishing process and damages the main surface of the glass substrate or adheres to the main surface of the glass substrate as a foreign substance.

Therefore, a first aspect of the present invention is a method for manufacturing a magnetic disk glass substrate,
In a state where a glass substrate is held in a glass substrate holding hole provided in a glass substrate carrier made of a plurality of glass cloths made of glass fibers containing aluminum as a component and a resin material impregnated in the plurality of glass cloths, A polishing process for holding the glass substrate between an upper surface plate and a lower surface plate, and polishing a main surface of the glass substrate;
Etching treatment for etching the glass fiber exposed from the main surface of the glass substrate carrier by the polishing treatment with an etching solution containing hydrofluoric acid;
It is characterized by having.

When the surface of the glass substrate after performing the polishing treatment using the glass substrate carrier subjected to the etching treatment was observed, the number of scratches and foreign matters was reduced as a whole. However, depending on the type of glass substrate carrier used for the polishing treatment, there were still glass substrates on which scratches and foreign matter remained. In particular, when the surface of the glass substrate polished using a glass substrate carrier using glass fiber containing aluminum was observed, a foreign material was found, and when this foreign material was analyzed, a fluoroaluminate crystal was included. Turned out to be.
When alumina (aluminum oxide) is contained in glass as a component, fluoroaluminic acid is produced by the reaction of fluorine in the etching solution with alumina when the glass is etched with an etching solution containing hydrofluoric acid. .

A glass cloth of a resin-impregnated substrate that is a material for a glass substrate carrier is manufactured by weaving glass yarn. The glass fiber constituting the glass yarn has a large surface area per unit weight, and is easily weathered by carbon dioxide or water in the air. Therefore, in order to increase the durability of the glass fiber, there is one in which the ratio of alumina (Al ₂ O ₃ ) in the glass component is increased. For this reason, it is thought that the crystal | crystallization of a fluoroaluminate precipitated on the surface of the glass substrate carrier by performing the etching process of glass fiber with respect to the resin impregnation board | substrate after a cutting process. Further, it was found that the precipitates are easily clogged into the recesses formed on the carrier surface by etching and cannot be easily removed. Then, it has been found that when the carrier with the deposits attached is subjected to grinding or polishing, they are gradually detached. The crystal of fluoroaluminate has a sharp outer shape, and if it remains on the glass substrate carrier, the glass substrate may be damaged in the polishing process. For this reason, it is necessary to remove the fluoroaluminate from the glass substrate carrier in advance.

  Therefore, when the glass fiber contains aluminum as a component and the etching solution contains hydrofluoric acid, it is preferable to further have a removal treatment for removing the fluorinated aluminate generated by the etching treatment.

  In the removal treatment, it is preferable to dissolve the fluoroaluminate in an acidic electrolyte solution containing metal ions.

  The electrolyte solution is preferably an aluminum sulfate aqueous solution or an aluminum nitrate aqueous solution.

  In the removal treatment, it is preferable to remove the fluoroaluminate by polishing the surface of the glass substrate carrier.

A second aspect of the present invention is a method for manufacturing a glass substrate for a magnetic disk,
In a state where the outer peripheral end face of the glass substrate is held in a glass substrate holding hole provided in a glass substrate carrier made of a plurality of glass cloths made of glass fibers and a resin material impregnated in the plurality of glass cloths. Polishing treatment for holding the substrate carrier and the glass substrate between the upper surface plate and the lower surface plate, and polishing the main surface of the glass substrate;
Each time the polishing process is performed a plurality of times, an etching process for etching the glass fiber exposed from the main surface of the glass substrate carrier by performing the polishing process a plurality of times with an etching solution;
It is characterized by including.

  According to the method for manufacturing a glass substrate for a magnetic disk described above, the glass fiber exposed from the main surface of the glass substrate carrier by the polishing process is removed by etching. By performing the polishing treatment, it is possible to manufacture a foreign substance from which the exposed glass fiber is detached and a glass substrate with few scratches due to the foreign substance.

It is a top view of the carrier for glass substrates of this embodiment. It is II-II arrow sectional drawing of FIG. FIG. 3 is an enlarged view of a part III in FIG. 2. It is an enlarged view of the IV section of FIG. It is a fragmentary sectional view showing carrier 10 for glass substrates after an etching process.

  Hereinafter, the manufacturing method of the glass substrate for magnetic disks which concerns on this embodiment is demonstrated in detail.

(Magnetic disk glass substrate)
First, the glass substrate for magnetic disks will be described. The glass substrate for a magnetic disk has a disc shape and a ring shape in which a circular center hole concentric with the outer periphery is cut out. A magnetic disk is formed by forming an annular magnetic layer (recording area) on both surfaces of a magnetic disk glass substrate.

  A magnetic disk glass blank (hereinafter simply referred to as a glass blank) is a circular glass plate produced by press molding, which will be described later, and has a form before a center hole is cut out.

  As a material for the glass blank, aluminosilicate glass, soda lime glass, borosilicate glass, or the like can be used. In particular, aluminosilicate glass can be suitably used in that it can be chemically strengthened and a glass substrate for a magnetic disk excellent in the flatness of the main surface and the strength of the substrate can be produced.

(Method for producing glass substrate for magnetic disk)
Next, a method for manufacturing a magnetic disk glass substrate will be described. First, a glass blank as a material for a plate-shaped magnetic disk glass substrate having a pair of main surfaces is produced by press molding (press molding process). Next, a circular hole is formed in the center part of the produced glass blank, and it is set as a ring-shaped (annular) glass substrate (circular hole formation process). Next, shape processing is performed on the glass substrate in which the circular holes are formed (shape processing processing). Thereby, a glass substrate is produced | generated. Next, end-face polishing is performed on the shape-processed glass substrate (end-face polishing process). Grinding with a fixed abrasive is performed on the glass substrate that has been subjected to end surface polishing (grinding treatment). Next, 1st grinding | polishing is performed to the main surface of a glass substrate (1st grinding | polishing process). Next, chemical strengthening is performed on the glass substrate (chemical strengthening treatment). Next, second polishing is performed on the chemically strengthened glass substrate (second polishing treatment). The glass substrate for magnetic disks is obtained through the above processing. Hereinafter, each process will be described in detail.

(A) Press molding treatment A lump of molten glass is sandwiched between the press molding surfaces of a pair of molds and pressed to form a glass blank. After pressing for a predetermined time, the mold is opened and the glass blank is taken out.

(B) Circular hole formation treatment A disk-shaped glass substrate having a circular hole can be obtained by forming a circular hole in a glass blank using a drill or the like.

(C) Shape processing processing Next, the shape processing processing will be described. The shape processing includes chamfering (chamfering of the outer peripheral side end surface and the inner end surface) for the end of the glass substrate after the circular hole formation processing. The chamfering process is a shape process in which chamfering is performed with a diamond grindstone on the outer peripheral side end face and the inner end face of the glass substrate after the circular hole forming process. A glass substrate having a predetermined shape is generated by this shape processing.

(D) End Surface Polishing Process Next, the end surface polishing process will be described. In the end surface polishing, mirror finishing is performed by brush polishing on the inner end surface and the outer peripheral side end surface of the glass substrate. At this time, an abrasive slurry containing fine particles as free abrasive grains is used.

(E) Grinding process In the grinding process, grinding is performed on the main surface of the glass substrate using a double-sided grinding apparatus having a planetary gear mechanism. Specifically, grinding the main surface on both sides of the glass substrate while holding the outer peripheral side end surface of the glass substrate generated from the glass blank in the holding hole provided in the holding member of the double-side grinding apparatus Perform with fixed abrasive. The double-sided grinding apparatus has a pair of upper and lower surface plates (upper surface plate and lower surface plate), and a glass substrate is sandwiched between the upper surface plate and the lower surface plate. Then, by moving one or both of the upper surface plate and the lower surface plate and relatively moving the glass substrate and each surface plate, both main surfaces of the glass substrate can be ground.

(F) 1st grinding | polishing process Next, 1st grinding | polishing is given to the main surface of the glass substrate of grinding. The first polishing is one of main surface processing. Specifically, the main surfaces on both sides of the glass substrate are polished while holding the outer peripheral side end face of the glass substrate in a holding hole provided in the glass substrate carrier of the double-side polishing apparatus. The purpose of the first polishing is to remove scratches and distortions remaining on the main surface of the glass substrate after the grinding treatment, or to adjust minute surface irregularities (microwaveness, roughness).

  In the first polishing process, the glass substrate is polished while applying a polishing slurry by using a double-side polishing apparatus having the same configuration as that of the double-side grinding apparatus used for the grinding process using fixed abrasive grains. In the first polishing process, a polishing slurry containing loose abrasive grains is used instead of fixed abrasive grains. Similarly to the double-side grinding apparatus, the double-side polishing apparatus also holds the glass substrate between a pair of upper and lower surface plates. An annular flat polishing pad (for example, a resin polisher) is attached to the upper surface of the lower surface plate and the bottom surface of the upper surface plate as a whole. Then, by moving either the upper surface plate or the lower surface plate, or both, the glass substrate and each surface plate are relatively moved, thereby polishing both main surfaces of the glass substrate.

(G) Chemical strengthening treatment Next, the glass substrate is chemically strengthened. As the chemical strengthening liquid, for example, a mixed molten liquid of potassium nitrate and sodium sulfate or the like is used, and the glass substrate is immersed in the chemical strengthening liquid. The chemical strengthening process may not be performed.

(H) Second polishing (final polishing) treatment Next, the glass substrate after the chemical strengthening treatment is subjected to second polishing. The second polishing treatment aims at mirror polishing of the main surface. Also in the second polishing, a double-side polishing apparatus having the same configuration as the double-side polishing apparatus used for the first polishing is used. Specifically, the main surfaces on both sides of the glass substrate are polished while holding the outer peripheral side end face of the glass substrate in a holding hole provided in the glass substrate carrier of the double-side polishing apparatus. The second polishing process is different from the first polishing process in that the type and particle size of the free abrasive grains are different and the hardness of the resin polisher is different.

As the free abrasive grains used in the second polishing treatment, for example, fine particles (particle size: diameter of about 5 to 100 nm) such as colloidal silica made turbid in slurry are used. The polished glass substrate is washed with a neutral detergent, pure water, IPA or the like to obtain a glass substrate for a magnetic disk.
The second polishing process is not necessarily an essential process, but it is preferable that the second polishing process is performed in that the level of surface irregularities on the main surface of the glass substrate can be further improved. By performing the second polishing treatment, the roughness (Ra) of the main surface can be made 0.1 nm or less. In this manner, the glass substrate subjected to the second polishing is washed to become a glass substrate for a magnetic disk.

(Carrier for glass substrate)
Here, the glass substrate carrier used in the grinding process or the polishing process (first polishing process, second polishing process) will be described.
FIG. 1 is a plan view of a glass substrate carrier 10. The glass substrate carrier 10 holds a glass substrate to be polished in a grinding process or a polishing process (first polishing process or second polishing process).
As shown in FIG. 1, the glass substrate carrier 10 is provided with a glass substrate holding hole 20 and a gear portion 30. By storing the glass substrate to be polished inside the glass substrate holding hole 20, the inner wall of the glass substrate holding hole 20 holds the outer peripheral side end face of the glass substrate.
The gear part 30 has a plurality of teeth provided along the outer peripheral part of the glass substrate carrier 10. The glass substrate carrier 10 is a planetary gear arranged between a sun gear and an outer gear of a double-side polishing apparatus having a planetary gear mechanism.

2 is a cross-sectional view taken along the line II-II in FIG. 1, FIG. 3 is an enlarged view of a portion III in FIG. 2, and FIG. 4 is an enlarged view of a portion IV in FIG.
The glass substrate carrier 10 can be manufactured using a resin-impregnated substrate composed of a glass cloth 11 made of glass fiber and a resin material 12 impregnated in the glass cloth 11.
As the glass cloth 11, glass cloth (JIS R3414: 2012) manufactured by weaving glass yarn made of glass fiber (JIS R3413: 2012) can be used. The glass fiber contains silica (SiO ₂ ) as a main component, and preferably contains aluminum as a component in order to maintain weathering resistance and durability, and contains 1 to 30% by weight of alumina (Al ₂ O ₃ ). preferable.

As the resin material 12 to be impregnated into the glass cloth 11, a thermosetting resin (for example, epoxy resin, phenol resin, etc.) can be used.
After impregnating the above-mentioned glass cloth 11 with the resin material 12, a prepreg obtained by drying the resin material 12 is laminated and pressure-bonded to obtain a resin-impregnated substrate as a material for the glass substrate carrier 10. . As such a resin-impregnated substrate, for example, glass fiber reinforced plastic (JIS K7051: 1987) can be used.

  As shown in FIG. 3, a concave portion 21 is provided on the inner wall surface of the glass substrate holding hole 20. The recess 21 is formed by etching glass fibers exposed on the inner wall surface of the glass substrate holding hole 20 formed on the resin-impregnated substrate by cutting. By providing the recess 21 on the inner wall surface of the glass substrate holding hole 20, the resin material 12 protrudes toward the inner wall surface side of the glass substrate holding hole 20 with respect to the glass fiber constituting the glass cloth 11, and Since the resin material 12 contacts the outer peripheral side end face of the glass substrate to be held, there is no possibility that the glass substrate is damaged by the glass fiber.

  Further, as shown in FIG. 4, a recess 31 may be provided on the outer peripheral surface of the gear portion 30. The concave portion 31 can be formed by etching glass fibers exposed on the outer wall surface of the gear portion 30 formed on the resin-impregnated substrate by cutting. When the concave portion 31 is provided on the outer wall surface of the gear portion 30, the resin material 12 protrudes toward the outer wall surface side of the gear portion 30 with respect to the glass fibers constituting the glass cloth 11, and the resin material 12 is applied to the sun gear and the inner gear. Therefore, there is no possibility that the sun gear and the internal gear are damaged by the glass fiber.

  When the glass substrate carrier 10 is repeatedly used for grinding processing and polishing processing, particularly the resin portion of the main surface of the glass substrate carrier 10 is worn, and the glass fibers constituting the glass cloth 11 are exposed. When the exposed glass fiber portion comes into contact with a polishing pad or a grinding pad provided on the surface plate, a part of the glass fiber is broken and detached. If the glass fiber is detached in the grinding process or the polishing process, the detached glass fiber may adhere to the surface of the treated glass substrate as a foreign substance, or the detached glass fiber may damage the surface of the glass substrate. is there. For this reason, in the embodiment of the present invention, in order to prevent the glass fiber exposed on the main surface of the glass substrate carrier 10 from being detached, the following etching process is performed every time the polishing process is performed a predetermined number of times.

  The “predetermined number of times” is the number of times that the glass fiber is exposed by repeatedly using the glass substrate carrier 10 for the grinding process or the polishing process, or the number of times less than that. For this reason, the “predetermined number of times” is appropriately changed depending on the grinding and polishing conditions. For example, the etching treatment may be performed after 100 times of polishing treatment for 1 hour once, or may be performed after 50 times of polishing treatment of 2 hours once. In other words, the glass substrate carrier 10 may be etched after a predetermined time of grinding or polishing for exposing the glass fibers.

[Etching treatment]
The etching process is performed, for example, by immersing the glass substrate carrier 10 in an etching solution for a predetermined time. The etching solution is not particularly limited, but preferably contains hydrofluoric acid, and may contain ammonium fluoride (NH ₄ F), ammonium hydrogen fluoride (NH ₅ F ₂ ), and the like. Alternatively, a mixed acid obtained by mixing hydrofluoric acid with a strong acid such as sulfuric acid or nitric acid may be used for the etching solution.

  FIG. 5 is a partial cross-sectional view showing the glass substrate carrier 10 after the etching process. As shown in FIG. 5, the glass fiber exposed from the main surface of the glass substrate carrier 10 is removed in the etching process, whereby a recess 41 is formed on the main surface of the glass substrate carrier 10.

[Removal processing]
In addition, when the glass fiber which comprises the glass cloth 11 of the carrier 10 for glass substrates contains aluminum as a component and an etching solution contains a hydrofluoric acid, the crystal | crystallization of a fluoroaluminate will be carried out by performing a glass fiber etching process. There exists a possibility of depositing on the surface of the carrier 10 for glass substrates. The crystal of fluoroaluminate tends to be clogged in the recess formed on the surface of the glass substrate carrier 10 by etching, and is difficult to remove. The crystal of the fluoroaluminate has a sharp outer shape. When the glass substrate carrier 10 with the precipitates adhered is used for grinding or polishing, the precipitates are gradually detached and the glass There is a risk of scratching the substrate. For this reason, it is preferable to perform the removal process which removes a fluoroaluminate from the carrier for glass substrates previously. Hereinafter, the removal process will be described.
Here, examples of the fluorinated aluminate generated by etching the glass fiber include Li ₃ AlF ₆ , Na ₃ AlF ₆ , and Li ₃ Na ₃ (AlF ₆ ) ₂ .

  In general, fluoroaluminates are hardly soluble or insoluble in mixed acids such as hydrofluoric acid, sulfuric acid, and nitric acid, and strong bases. However, the fluoroaluminate is soluble in an acidic electrolyte solution containing metal ions. By immersing the glass substrate carrier 10 after the etching treatment in such an acidic electrolyte solution containing metal ions, the fluoroaluminate can be dissolved and removed from the surface of the glass substrate carrier 10. it can.

This “metal ion” is not particularly limited, but it has been confirmed that a fluoroaluminate is dissolved in an acidic aqueous solution containing, for example, iron ions and aluminum ions. In particular, from the viewpoint of the dissolution rate of the fluoroaluminate, the “metal ion” is preferably an aluminum ion.
Ions other than the metal contained in the acidic electrolyte solution are not particularly limited, but are preferably sulfate ions or nitrate ions from the viewpoint of the solubility of the fluorinated aluminate. In particular, sulfate ions are preferable in that the resin material of the resin-impregnated substrate is not dissolved.
Therefore, the acidic electrolyte solution containing metal ions is preferably an aluminum sulfate aqueous solution or an aluminum nitrate aqueous solution, and more preferably an aluminum sulfate aqueous solution.

  The fluorinated aluminate may be removed mechanically. For example, the fluoroaluminate may be removed by polishing the inner wall surface of the glass substrate holding hole 20 or the outer wall surface of the gear portion 30 with a brush, a sponge, or the like.

  The glass substrate carrier 10 that has been subjected to the above treatment has been detached by polishing the glass substrate using the glass substrate carrier 10 because the glass fibers protruding on the surface due to abrasion have been removed. A glass substrate with few foreign matters and scratches due to glass fibers can be produced.

  According to such a method for manufacturing a glass substrate for a magnetic disk, the glass fiber detached from the glass substrate carrier 10 adheres to the glass substrate as a foreign substance, or the glass substrate is not damaged by the detached glass fiber. A glass substrate with a small amount can be obtained.

[Example 1]
As a resin impregnated substrate, a glass fiber reinforced plastic (JIS K7051: 1987) obtained by impregnating a glass cloth with a resin material obtained by mixing a phenol resin and an epoxy resin, laminating a prepreg obtained by drying and curing, and laminating and pressing. ) Was used as a carrier for glass substrates.

[Etching treatment]
After 100 times of polishing treatment for one hour using a glass substrate carrier, the glass substrate carrier used for the polishing treatment is immersed in an etching solution of 1 wt% hydrofluoric acid (HF) and 2 wt% sulfuric acid for 30 minutes. Etching was performed.

[Polishing treatment]
After the glass substrate carrier after the etching treatment is washed with water, the glass substrate carried out before the second polishing is inserted into the glass substrate holding hole of the obtained glass substrate carrier, and the glass substrate carrier is inserted. The glass substrate was sandwiched between the upper surface plate and the lower surface plate of the double-side polishing apparatus, and the second polishing was performed. While supplying loose abrasive grains between the upper surface plate and the lower surface plate, the upper surface plate, the lower surface plate, and the glass substrate are relatively moved to polish both main surfaces of the glass substrate for 1 hour, 100 sheets A glass substrate was obtained as a sample.

[Example 2]
The glass substrate carrier after performing the etching treatment in the same manner as in Example 1 was washed with water and then immersed in an aqueous aluminum sulfate solution to remove the fluoroaluminate. Thereafter, the glass substrate carrier was taken out of the aluminum sulfate aqueous solution and washed with water.
Using the glass substrate carrier, polishing treatment was performed in the same manner as in Example 1 to obtain 100 glass substrates as samples.

[Comparative Example]
After 100 times of polishing treatment for 1 hour at a time, polishing treatment was performed in the same manner as in Example 1 using the glass substrate carrier used for polishing treatment, and 100 glass substrates were obtained as samples.

<Scratch on the main surface of the glass substrate>
The main surfaces of 100 glass substrates after the polishing treatment were inspected using a laser-type surface defect inspection apparatus, and the number of glass substrates on which scratches were present was measured.
The results are shown in Table 1.

  In the comparative example, scratches were found on 17 glass substrates, whereas in Example 1, there were 5 glass substrates on which scratches were found. The glass fiber exposed from the main surface of the glass substrate carrier can be removed by etching the glass substrate carrier, and the glass fiber detached from the glass substrate carrier adheres to the glass substrate as a foreign substance. It can also be seen that the foreign substance can prevent the glass substrate from being damaged.

  Furthermore, in Example 2, the number of glass substrates on which scratches were found was zero. By removing the fluoroaluminate with an aqueous aluminum sulfate solution, the amount of the fluoroaluminate deposited on the glass substrate carrier can be reduced, and scratches caused by the fluoroaluminate can be prevented. I understand.

  As mentioned above, although the manufacturing method of the glass substrate for magnetic discs of this invention was demonstrated in detail, this invention is not limited to the said embodiment and Example, In the range which does not deviate from the main point of this invention, various improvement and a change are carried out. Of course.

10 Glass substrate carrier 11 Glass cloth 12 Resin material 20 Glass substrate holding hole 21 Recess 30 Gear portion 31 Recess 41 Recess

Claims (9)

A method of manufacturing a disk-shaped substrate,
In a state where a disk-shaped substrate is held in a substrate holding hole provided in a disk-shaped substrate carrier made of a resin material impregnated with a plurality of glass cloths made of glass fibers and the plurality of glass cloths, a polishing treatment is held, to polish the grinding process or said main surface grinding the main surface of the substrate of the disc-shaped between the upper platen and the lower platen of the substrate of the disc-shaped,
Etching treatment that etches the glass fiber exposed from the main surface of the disk-shaped substrate carrier by the grinding treatment or polishing treatment with an etching solution;
A method of manufacturing a disk-shaped substrate having: The glass fiber contains aluminum as a component,
The etching solution includes hydrofluoric acid;
The manufacturing method of the disk-shaped board | substrate of Claim 1 which further has the removal process which removes the fluoroaluminate produced by the said etching process. The manufacturing method of the disk-shaped board | substrate of Claim 2 which dissolves a fluoroaluminate in the acidic electrolyte solution containing a metal ion in the said removal process. The method for manufacturing a disk-shaped substrate according to claim 3, wherein the electrolyte solution is an aluminum sulfate aqueous solution or an aluminum nitrate aqueous solution. The disk-shaped substrate manufacturing method according to claim 2, wherein in the removing process, the fluoroaluminate is removed by polishing a surface of the disk-shaped substrate carrier. A method of manufacturing a disk-shaped substrate,
A plurality of glass cloths made of glass fibers and a substrate holding hole provided in a disk-shaped substrate carrier made of a resin material impregnated in the plurality of glass cloths, the outer peripheral end face of the disk-shaped substrate was held. In the state, the disk-shaped substrate carrier and the disk-shaped substrate are held between an upper surface plate and a lower surface plate, and a grinding process for grinding the main surface of the disk-shaped substrate or the main surface a polishing process for polishing,
Every a plurality of times the grinding treatment or polishing treatment, the glass fiber exposed from the main surface of the carrier substrate of the disc-shaped by a plurality of times the grinding treatment or polishing treatment, etching treatment for etching with an etching solution And a method for manufacturing a disk-shaped substrate. A carrier used for grinding or polishing of a disk-shaped substrate,
The carrier is composed of a plurality of glass cloths made of glass fibers and a resin material impregnated in the plurality of glass cloths,
The carrier is provided with a substrate holding hole for holding the disk-shaped substrate,
A grinding or polishing carrier characterized in that a main surface of the carrier is provided with a concave portion of the main surface formed by etching glass fibers exposed on the main surface of the carrier. The carrier for grinding or polishing according to claim 7, wherein the inner wall surface of the substrate holding hole is provided with a recess of the inner wall surface formed by etching glass fibers exposed on the inner wall surface of the carrier. The carrier is formed with a gear portion on the outer peripheral side,
The grinding or polishing carrier according to claim 7 or 8, wherein a concave portion of the outer wall surface is formed on the outer wall surface of the gear portion by etching glass fibers exposed on the outer wall surface of the carrier.

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