JP6153760B2 - Ultrasonic plate thickness measuring device - Google Patents

Description

  The present invention relates to an ultrasonic plate thickness measuring apparatus that measures a plate thickness using ultrasonic waves.

  In the ultrasonic plate thickness measuring apparatus, the thickness of an object to be measured is measured by ultrasonic waves emitted from an ultrasonic probe. In order to accurately measure the thickness of the object to be measured, the contact surface (measurement surface) of the ultrasonic probe is closely attached to the surface of the object to be measured (measurement surface) so that there is no gap. It is necessary to make the measurement surface of the probe follow the measurement surface of the object to be measured. An example of a conventional ultrasonic plate thickness measuring apparatus is disclosed in Patent Document 1.

  The ultrasonic plate thickness measuring apparatus described in Patent Document 1 is supported by a support frame that is urged and arranged to move up and down with a predetermined stroke with respect to a movable apparatus body, and is rotatably supported in the support frame. And a joint that swingably holds the ultrasonic probe for measuring the plate thickness, and presses the ultrasonic probe for measuring the plate thickness against the surface to be measured with a predetermined pressure. Then, the thickness of the object to be measured is measured by the ultrasonic wave emitted from the ultrasonic probe. In this device, the gimbal joint has a cylindrical outer ring rotatably held in a support frame, and an inner ring is pivotally supported in the outer ring via a pair of first support pins. Yes. Further, a flange portion formed on the outer periphery of the ultrasonic probe is disposed in the inner ring, and the flange portion is pivotally supported via a pair of second support pins orthogonal to the first support pins. ing. When measuring the thickness of the object to be measured, the ultrasonic probe is rotated by an air actuator, the contact surface is rubbed against the upper surface of the object to be measured, and ultrasonic waves are emitted.

JP 7-218244 A

  When measuring the thickness of an object to be measured with an ultrasonic plate thickness measuring device, the surface to be measured of the object to be measured is not parallel to the measurement surface of the ultrasonic probe but is inclined with respect to the measurement surface. There is a case. That is, the measurement surface of the measurement object may have an inclination angle with respect to the measurement surface of the ultrasonic probe. Even in such a case, in order to increase the measurement accuracy, the inclination of the measurement surface of the ultrasonic probe is made to coincide with the inclination of the measurement surface of the measurement object, and the measurement surface of the ultrasonic probe is adjusted to the measurement object. It is necessary to closely copy the surface to be measured. However, with the conventional ultrasonic plate thickness measuring apparatus, it is difficult to bring the measurement surface of the ultrasonic probe into close contact with the measurement surface of the measurement object with respect to an arbitrary inclination angle of the measurement surface of the measurement object. It is. For this reason, the measurement surface of the measurement surface of the ultrasonic probe is not sufficiently copied to the measurement surface, which may cause erroneous measurement.

  In addition, in the conventional ultrasonic plate thickness measuring device, the measurement surface of the ultrasonic probe is rubbed against the measurement surface of the measurement object or constantly pressed, so that the measurement object is not damaged. Is difficult.

  For example, in the ultrasonic plate thickness measuring apparatus described in Patent Document 1, since the ultrasonic probe is supported at the fixed positions of the first and second support pins, the degree of freedom is small. There is a concern that it is difficult to easily bring the contact surface (measurement surface) of the touch element into close contact with the measurement surface of the object to be measured. Further, since the measurement surface of the ultrasonic probe is rubbed against the measurement surface of the object to be measured, there is a concern that it is difficult to make the object to be measured adhere to without being scratched. Moreover, since the mechanism for closely contacting the probe is composed of the inner and outer rings, there is a concern that it is difficult to reduce the size of the apparatus.

  The present invention provides an ultrasonic probe for an arbitrary inclination angle in an arbitrary direction even if the measurement surface of the object to be measured has an inclination angle with respect to the measurement surface of the ultrasonic probe. It is an object to provide an ultrasonic plate thickness measuring apparatus that can measure the thickness of a measurement object without scratching the measurement object without causing any damage to the measurement object. And

  In order to achieve the above object, an ultrasonic thickness measuring apparatus according to the present invention has the following characteristics. An ultrasonic probe that emits ultrasonic waves from a measurement surface to measure the thickness of the object to be measured, and a ring-shaped member that surrounds the ultrasonic probe and is fixed to the ultrasonic probe A ring-shaped elastic body disposed so as to be in contact with an outer peripheral side surface of the ring-shaped member, the ultrasonic probe, the ring-shaped member, and the ring-shaped elastic body, and the ring-shaped elastic body A fixing case. The ultrasonic probe can be tilted so that the orientation of the measurement surface changes due to the elastic force of the ring-shaped elastic body, and the measurement surface when pressed against the measurement surface of the object to be measured Can be inclined so as to coincide with the inclination of the surface to be measured.

  The ultrasonic plate thickness measuring apparatus according to the present invention has an inclination angle of an arbitrary size in an arbitrary direction even if the measurement surface of the object to be measured has an inclination angle with respect to the measurement surface of the ultrasonic probe. On the other hand, the measurement surface of the ultrasonic probe can be brought into close contact with the measurement surface of the object to be measured, and the thickness can be measured without scratching the object to be measured.

It is sectional drawing which shows the whole structure of the ultrasonic plate | board thickness measuring apparatus by the Example of this invention. It is sectional drawing which shows the state before making an ultrasonic probe contact | adhere to the to-be-measured object of the ultrasonic plate | board thickness measuring apparatus by a present Example. It is sectional drawing which shows the state which has contact | adhered the ultrasonic probe to the to-be-measured object of the ultrasonic plate thickness measuring apparatus by a present Example. It is sectional drawing which shows the state which has pressed the ultrasonic probe on the to-be-measured object with the cylinder, after making an ultrasonic probe contact | adhere to the to-be-measured object of the ultrasonic plate thickness measuring apparatus by a present Example. It is sectional drawing which looked at the ultrasonic plate thickness measuring apparatus by a present Example along the arrows A and A of FIG. In the ultrasonic plate thickness measuring apparatus according to the present embodiment, it is a schematic diagram showing a close contact state between a measurement surface of an ultrasonic probe and a measurement surface of an object to be measured.

  The ultrasonic plate thickness measuring apparatus according to the present invention can measure the plate thickness of a steel plate or a steel pipe using an ultrasonic probe. In the ultrasonic plate thickness measuring apparatus according to the present invention, the periphery of the ultrasonic probe is constrained by a ring-shaped elastic body, and can be inclined at an arbitrary angle in an arbitrary direction. The case that accommodates the ultrasonic probe and the ring-shaped elastic body has a space that does not interfere even when the ultrasonic probe is inclined. With such a configuration, the ultrasonic plate thickness measuring apparatus according to the present invention enables an arbitrary measurement in an arbitrary direction even if the measurement surface of the object to be measured has an inclination angle with respect to the measurement surface of the ultrasonic probe. The measurement surface can be easily brought into close contact with the surface to be measured with respect to the inclination angle of the magnitude, and erroneous measurement can be prevented. Further, since the measurement surface is brought into close contact with the measurement surface without sliding the measurement surface on the measurement surface, the plate thickness can be measured without damaging the measurement surface.

  Hereinafter, an embodiment of an ultrasonic plate thickness measuring apparatus according to the present invention will be described with reference to FIGS.

  FIG. 1 is a cross-sectional view showing the overall configuration of an ultrasonic plate thickness measuring apparatus according to an embodiment of the present invention. FIG. 2 is a cross-sectional view showing a state before the ultrasonic probe is brought into close contact with an object to be measured in the ultrasonic plate thickness measuring apparatus according to the present embodiment. FIG. 3 is a cross-sectional view showing a state in which an ultrasonic probe is in close contact with an object to be measured in the ultrasonic plate thickness measuring apparatus according to the present embodiment. FIG. 4 is a cross-sectional view showing a state in which the ultrasonic probe is pressed against the object to be measured with a cylinder after the ultrasonic probe is brought into close contact with the object to be measured in the ultrasonic plate thickness measuring apparatus according to the present embodiment. FIG. FIG. 5 is a cross-sectional view (a view taken along the line AA in FIG. 1) of the ultrasonic plate thickness measuring apparatus according to the present embodiment as viewed along arrows A and A in FIG. FIG. 6 is a schematic diagram showing a close contact state between the measurement surface of the ultrasonic probe and the measurement surface of the object to be measured in the ultrasonic plate thickness measurement apparatus according to the present embodiment. 1 to 6, the same reference numerals indicate the same parts.

  In the following embodiments, an example in which the DUT 1 is a square steel pipe and the thickness of the square steel pipe is measured will be described. However, the ultrasonic plate thickness measuring apparatus according to the present invention can measure the plate thickness as the DUT 1 regardless of the length of not only a square steel pipe but also a steel plate or a round steel pipe.

  First, the overall configuration of the ultrasonic plate thickness measuring apparatus according to the present embodiment will be described with reference to FIGS. Although FIG. 1 shows the entire ultrasonic plate thickness measuring apparatus, FIGS. 2 to 4 show a part of the ultrasonic plate thickness measuring apparatus. 2 to 4 show only a part of the device under test 1 (the portion of the surface to be measured 10b that is a surface on which the thickness is measured).

  As shown in FIG. 1, the ultrasonic plate thickness measuring apparatus according to the present embodiment includes an ultrasonic probe 2, a ring-shaped member 4, four pins 6, a ring-shaped elastic body 3, a case 5, a pipe 7, A main body 9, a cylinder 8, a guide 11, a motor 12, and a mount 13 are provided.

  The ultrasonic probe 2 has a cylindrical shape (see FIG. 5), has a measurement surface 10a that emits ultrasonic waves, and the measurement surface 10a is closely attached to the measurement surface 10b of the object 1 to be measured. The thickness of the object 1 is measured (see FIGS. 2 and 3). In the following description, the measurement surface 10a of the ultrasonic probe 2 is simply referred to as “measurement surface 10a”, and the measurement surface 10b of the DUT 1 is simply referred to as “measurement surface 10b”. It is assumed that the measured surface 10b is inclined by an angle θ with respect to the measuring surface 10a.

  The ring-shaped member 4 is a metal or resin ring-shaped member, and is disposed so as to surround the ultrasonic probe 2 (see FIG. 5). Hereinafter, the ring-shaped member 4 is simply referred to as “ring 4”. The size of the cross section parallel to the central axis of the ring 4 (the size of the cross section shown in FIG. 1) can fix the ultrasonic probe 2 with a pin 6 to be described later, and will be described later with the ring 4. It can be arbitrarily determined within a range in which a frictional force that does not slip with the ring-shaped elastic body 3 can be generated.

  The pin 6 fixes the ultrasonic probe 2 and the ring 4. The pin 6 forms a gap between the side surface of the ultrasound probe 2 and the inner peripheral side surface of the ring 4 (see FIGS. 1 and 5). This gap serves as a flow path 17 for supplying a medium used for measuring the plate thickness to the measurement surface 10a. The number of the channels 17 is the same as the number of pins 6 (four in this embodiment). However, the pins 6 are provided at positions where the sizes of the channels 17 are equal, and the ultrasonic probe 2 is provided. And the ring 4 are fixed. Therefore, the ultrasonic probe 2 is disposed at the center of the ring 4.

  In addition, although the four pins 6 are used in a present Example, the number of the pins 6 is not restricted to this, What is necessary is just two or more. However, if the number of pins 6 is two or less, it is difficult to fix the ultrasonic probe 2 to the center of the ring 4, so three or more pins are preferable. If the number of pins 6 is too large, the medium flow path 17 becomes small, and there is a possibility that a necessary amount of medium cannot be supplied to the measurement surface 10a. For this reason, the number of pins 6 is most preferably four.

  The ring-shaped elastic body 3 is disposed so as to contact the outer peripheral side surface of the ring 4 and restrains the ultrasonic probe 2 via the ring 4 and the pin 6 (see FIGS. 1 and 5). The elastic body 3 may be ring-shaped, and the cross-sectional shape parallel to the central axis (cross-sectional shape shown in FIG. 1) may be a polygon such as a circle, an ellipse, or a quadrangle. Further, the size of the cross section parallel to the central axis of the ring-shaped elastic body 3 (the size of the cross section shown in FIG. 1) can restrain the ultrasonic probe 2, and It can be arbitrarily determined as long as a frictional force that does not slip with the ring 4 can be generated. That is, the elastic body 3 has a friction coefficient with respect to the ring 4 such that the elastic body 3 is deformed without sliding (or hardly sliding) when a pressing force is applied from the ring 4. . Although any material such as rubber or resin can be used for the elastic body 3, it is preferable to use a viscoelastic body that gently deforms. In this embodiment, a viscoelastic elastomer having a hardness of 65 (Asker F) is used as the elastic body 3.

  Since the periphery of the ultrasonic probe 2 is constrained by the ring-shaped elastic body 3 via the ring 4 and the pin 6, it receives an elastic force from the periphery. For this reason, when the measurement surface 10a is in close contact with the surface to be measured 10b, it can be inclined in an arbitrary direction by an elastic force of the elastic body 3 (see FIG. 3). That is, the ultrasonic probe 2 can be tilted arbitrarily so that the orientation of the measurement surface 10a changes before and after the measurement surface 10a is pressed against the measurement surface 10b (see FIGS. 2 and 3). is there. Therefore, even if the measurement surface 10b is inclined by the angle θ with respect to the measurement surface 10a, the measurement surface 10a can be inclined so as to coincide with the inclination of the measurement surface 10b.

  In addition, when the measurement surface 10a is separated from the measurement surface 10b, the ultrasonic probe 2 is not inclined due to the elastic force of the elastic body 3 and the original state (the measurement surface 10a shown in FIG. 2 is measured). It is possible to return to the state before being in close contact with the surface 10b. That is, when the measurement surface 10a is separated from the measurement surface 10b, the measurement surface 10a can face the direction before being pressed against the measurement surface 10b by the elastic force of the elastic body 3.

  The case 5 has a cylindrical shape, houses the ultrasonic probe 2, the ring 4, the pins 6, and the ring-shaped elastic body 3, and fixes the ring-shaped elastic body 3. Further, the case 5 includes a flow path for supplying a medium to a flow path 17 formed by the side surface of the ultrasonic probe 2 and the inner peripheral side surface of the ring 4. The case 5 faces the device under test 1 during measurement, and a part of the ultrasonic probe 2 protrudes from the surface facing the device under test 1.

  The ultrasonic probe 2 is housed in the case 5 so as to be tiltable by the elastic force of the ring-shaped elastic body 3, and the ring 4 and the pin 6 are moved inside the case 5 as the ultrasonic probe 2 is tilted. Inclined (see FIG. 3). Accordingly, the case 5 has a space in which the ultrasonic probe 2, the ring 4, and the pin 6 do not interfere even when the measurement surface 10a is in close contact with the measurement target surface 10b. That is, in the case 5, even if the ultrasonic probe 2, the ring 4, and the pin 6 are inclined at an arbitrary angle in an arbitrary direction, the ultrasonic probe 2, the ring 4, and the pin 6 do not contact the case 5. It has a space of such a size inside.

  The pipe 7 is provided in the main body 9 that supports the case 5 and supplies a medium to the case 5.

  The main body 9 supports the case 5 and includes a pipe 7. The main body 9 is provided with a stopper portion 14 on the upper portion of the ultrasonic probe 2 in order to prevent the ultrasonic probe 2 from buckling. The stopper portion 14 comes into contact with the ring 4 when a measurement head portion 15 described later moves downward and the measurement surface 10a is excessively pressed against the measurement surface 10b.

  The cylinder 8 is attached to the main body 9 and has a movable part that applies a pressing force to the ultrasonic probe 2. The movable part can be moved up and down by a driving mechanism (not shown), and the tip is spherical. The movable portion presses the upper surface of the ultrasonic probe 2 with this tip, and presses the ultrasonic probe 2 against the object to be measured 1 (see FIG. 4).

  The guide 11 moves the measuring head unit 15 including the case 5 and the main body 9 up and down. As the measurement head unit 15 moves downward along the guide 11, the measurement surface 10a comes into close contact with the surface to be measured 10b.

  The motor 12 moves the measurement head unit 15 up and down along the guide 11 by a predetermined fixed stroke amount.

  The gantry 13 includes a cradle 16 to which a guide 11 is attached. The DUT 1 is placed on the cradle 16.

  Next, a procedure for measuring the plate thickness of the DUT 1 using the ultrasonic plate thickness measuring apparatus according to this embodiment will be described.

  First, a square steel pipe as the DUT 1 is placed on the cradle 16. The state (initial state) of the ultrasonic plate thickness measuring apparatus at this time is the state shown in FIG. 1, FIG. 2, and FIG.

  Next, a medium is supplied to the measurement surface 10a. The medium passes from the pipe 7 through the flow path formed in the case 5 and the flow path 17 formed between the side surface of the ultrasonic probe 2 and the inner peripheral side surface of the ring 4. Is supplied to the measurement surface 10a through the side surface.

  The medium may be any liquid that can easily pass ultrasonic waves, and water is preferable, for example. The amount of the medium to be supplied may be an amount that can cover the measurement surface 10a with the medium when performing the measurement. The medium to be supplied may be dropped from between the side surface of the ultrasound probe 2 and the inner peripheral side surface of the ring 4 and attached to the surface to be measured 10b with which the measurement surface 10a contacts.

  After supplying the medium to the measurement surface 10a, the measurement head unit 15 is lowered by a predetermined stroke amount by the motor 12 along the guide 11 attached to the gantry 13, and the measurement surface 10a is pushed onto the measurement surface 10b. Hit it. As shown in FIG. 2, even when the measured surface 10 b has an inclination of the angle θ with respect to the measurement surface 10 a, the ultrasonic probe 2 can be arbitrarily moved in an arbitrary direction by the elastic force of the elastic body 3. Since it can be inclined at an angle, the measurement surface 10a can be inclined so as to coincide with the inclination of the measurement surface 10b, and can be in close contact with the measurement surface 10b (see FIG. 3). In this way, even if the measurement surface 10b is inclined at an arbitrary angle in an arbitrary direction with respect to the measurement surface 10a, the measurement surface 10a can be closely adhered to the measurement surface 10b to be followed.

  After the measurement surface 10a is made to follow the measurement surface 10b, the plate thickness is measured in the state shown in FIG. A known method can be used for measuring the plate thickness. For example, an ultrasonic wave is emitted from the measurement surface 10 a and the thickness of the DUT 1 is measured using a reflected wave from the DUT 1.

  If the measurement head 10 is lowered by the motor 12 and the measurement surface 10a is pressed against the measurement surface 10b, if the adhesion between the measurement surface 10a and the measurement surface 10b is not sufficient, as shown in FIG. Thus, a pressing force is applied to the ultrasonic probe 2. That is, the movable part of the cylinder 8 is pushed down, the ultrasonic probe 2 is pressed against the object 1 to be measured, the measurement surface 10a is further brought into close contact with the measurement surface 10b, and then the plate thickness is measured. In this way, the plate thickness of the DUT 1 can be measured with higher accuracy. Whether the measurement surface 10a and the measured surface 10b are sufficiently close can be determined based on whether or not the measured plate thickness is an appropriate value.

  As described above, the periphery of the ultrasonic probe 2 is restrained by the ring-shaped elastic body 3 via the pin 6 and the ring 4. The elastic body 3 is restrained by the case 5 and can generate a frictional force that prevents the ring 4 from slipping even when a force is received from the ring 4. Further, when the ultrasonic probe 2 is tilted by pressing the measurement surface 10 a against the measurement surface 10 b, the ring-shaped elastic body 3 is deformed by receiving a force from the ring 4. Due to this deformation, an elastic force (restoring force) is generated in the ring-shaped elastic body 3 to return to the original shape. Such frictional force and elastic force are also forces that press the measurement surface 10a against the measurement surface 10b.

  When the measurement surface 10a and the measurement surface 10b are brought into close contact with each other, the inclination of the ultrasonic probe 2 is determined by the frictional force between the ring-shaped elastic body 3 and the ring 4 and the elastic force of the elastic body 3. In order to stabilize the inclination of the ultrasonic probe 2, the force for bringing the measurement surface 10 a and the measurement surface 10 b into close contact (the force for lowering the measurement head 15 and pressing the ultrasonic probe 2 against the measurement object 1) And the sum of the forces of the cylinder 8 pressing the ultrasonic probe 2) is preferably larger than the maximum elastic force of the elastic body 3. Further, when the measurement surface 10a and the measurement surface 10b are separated from each other, the ultrasonic probe 2 is not tilted by the elastic force of the elastic body 3 (the measurement surface 10a shown in FIG. It is possible to return to the state before being in close contact with the measurement surface 10b.

  Next, with reference to FIG. 6, the adhesion state between the measurement surface 10a and the measurement surface 10b in the ultrasonic plate thickness measurement apparatus according to the present embodiment will be described. In FIG. 6, the ultrasonic probe 2 before contact is shown by a two-dot chain line, and the ultrasonic probe 2 after contact is shown by a solid line. It is assumed that the measurement target surface 10b is inclined by an angle θ with respect to the measurement surface 10a before contact. The center line of the ultrasound probe 2 before contact is indicated by A, the center is indicated by B, the center line of the ultrasound probe 2 after contact is indicated by A ', and the center is indicated by B'.

  When the ultrasonic probe 2 is lowered and the measurement surface 10a is moved closer to the measurement surface 10b, the measurement surface 10a is first measured at the point (contact point O) having the shortest distance from the measurement surface 10b. It contacts the surface 10b. Thereafter, when the measurement surface 10a is pressed against the surface to be measured 10b, the ultrasonic probe 2 tilts with respect to the contact point O, and the measurement surface 10a contacts the surface to be measured 10b with reference to the contact point O. Finally, the inclinations of the measurement surface 10a and the measurement surface 10b coincide with each other, and the measurement surface 10a and the measurement surface 10b come into close contact with each other. At this time, the center position of the ultrasound probe 2 moves from B before contact to B ′ after contact.

  In the ultrasonic plate thickness measuring apparatus according to the present embodiment, the measurement surface 10a is in close contact with the measurement surface 10b with reference to the contact point O in this way, so that the plate thickness can be measured without damaging the measurement surface 10b. it can. In the conventional ultrasonic plate thickness measuring apparatus, the measurement surface 10a is brought into close contact with the surface to be measured 10b using a multi-axis mechanism such as a gimbal. At this time, the measurement surface 10a is rotated around these axes. Therefore, the measurement surface 10a slides on the measurement surface 10b, and the measurement surface 10b is easily damaged. In the ultrasonic plate thickness measuring apparatus according to the present embodiment, since the periphery of the ultrasonic probe 2 is restrained by the elastic body 3, the degree of freedom is high, and the ultrasonic probe 2 can be inclined at an arbitrary angle in an arbitrary direction. Accordingly, since the measurement surface 10a is brought into close contact with the measurement surface 10b with reference to the contact point O without sliding the measurement surface 10a on the measurement surface 10b, the plate thickness can be measured without damaging the measurement surface 10b. can do.

  When the ultrasonic probe 2 is tilted and the measurement surface 10a is in close contact with the surface to be measured 10b, there is a possibility that the position where the plate thickness is to be measured is displaced. That is, the point P (position where the plate thickness is to be measured) where the center line A of the ultrasound probe 2 before contact intersects the surface to be measured 10b and the center line A ′ of the ultrasound probe 2 after contact are A positional deviation occurs between a point P ′ (a position at which the plate thickness is actually measured) intersecting the surface to be measured 10b. However, if the deviation amount R (the distance between the point P and the point P ′) at the position where the thickness is to be measured is small enough to be ignored with respect to the diameter 2L of the ultrasonic probe 2, the deviation at this position is ignored. be able to. The amount of deviation R at the position where the plate thickness before and after the close contact of the measurement surface 10a should be measured can be expressed by equation (1).

  In addition, this invention is not limited to an above-described Example, Various modifications are included. For example, the above-described embodiments have been described in detail for easy understanding of the present invention, and are not necessarily limited to those having all the configurations described. Further, a part of the configuration of one embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of one embodiment. Further, it is possible to add, delete, and replace other configurations for a part of the configuration of each embodiment.

  Each of the above-described configurations, functions, processing units, processing means, and the like may be realized by hardware by designing a part or all of them with, for example, an integrated circuit. Each of the above-described configurations, functions, and the like may be realized by software by interpreting and executing a program that realizes each function by the processor. Information such as programs, tables, files, measurement information, and calculation information for realizing each function is stored in a memory, a hard disk, a recording device such as an SSD (Solid State Drive), or a recording medium such as an IC card, an SD card, or a DVD. Can be put in.

  Further, the control lines and information lines are those that are considered necessary for the explanation, and not all the control lines and information lines on the product are necessarily shown. Actually, it may be considered that almost all the components are connected to each other.

  DESCRIPTION OF SYMBOLS 1 ... Measuring object, 2 ... Ultrasonic probe, 3 ... Elastic body, 4 ... Ring (ring-shaped member), 5 ... Case, 6 ... Pin, 7 ... Piping, 8 ... Cylinder, 9 ... Main body, 10a ... Measurement surface, 10b ... surface to be measured, 11 ... guide, 12 ... motor, 13 ... mount, 14 ... stopper, 15 ... measurement head, 16 ... cradle, 17 ... flow path.

Claims (4)

An ultrasonic probe that emits ultrasonic waves from the measurement surface to measure the thickness of the object to be measured;
A ring-shaped member surrounding the ultrasonic probe and fixed to the ultrasonic probe;
A ring-shaped elastic body disposed so as to be in contact with the outer peripheral side surface of the ring-shaped member;
A pin for fixing the ultrasonic probe and the ring-shaped member, and providing a gap between a side surface of the ultrasonic probe and an inner peripheral side surface of the ring-shaped member;
A case for housing the ultrasonic probe, the ring-shaped member, the pin, and the ring-shaped elastic body, and fixing the ring-shaped elastic body;
The ultrasonic probe can be tilted so that the orientation of the measurement surface changes due to the elastic force of the ring-shaped elastic body, and the measurement surface when pressed against the measurement surface of the object to be measured Can be inclined so that the inclination of the surface coincides with the inclination of the surface to be measured ,
The ring-shaped member and the pin are inclined as the ultrasonic probe is inclined,
The ring-shaped elastic body is a viscoelastic body, and has a coefficient of friction that allows the ring-shaped member to be deformed by receiving a force from the ring-shaped member when the ultrasonic probe is inclined. An ultrasonic plate thickness measuring device comprising: The gap provided between the side surface of the ultrasonic probe and the inner peripheral side surface of the ring-shaped member is a flow for supplying a medium used for measuring the thickness of the object to be measured to the measurement surface. ultrasonic thickness measuring apparatus according to claim 1, wherein the road.   The ultrasonic plate thickness measuring apparatus according to claim 1, further comprising a cylinder that presses the ultrasonic probe to press the measurement surface against the surface to be measured.   The ultrasonic plate thickness measuring apparatus according to claim 1, wherein the case has a space where the ultrasonic probe does not contact the case when the ultrasonic probe is inclined.

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