JP6154438B2 - Manufacturing method of speaker diaphragm - Google Patents
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- JP6154438B2 JP6154438B2 JP2015145192A JP2015145192A JP6154438B2 JP 6154438 B2 JP6154438 B2 JP 6154438B2 JP 2015145192 A JP2015145192 A JP 2015145192A JP 2015145192 A JP2015145192 A JP 2015145192A JP 6154438 B2 JP6154438 B2 JP 6154438B2
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- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000010407 anodic oxide Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 18
- 229910000861 Mg alloy Inorganic materials 0.000 claims description 14
- 238000007743 anodising Methods 0.000 claims description 14
- 229910052749 magnesium Inorganic materials 0.000 claims description 11
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 claims description 10
- 230000008569 process Effects 0.000 claims description 10
- 208000028659 discharge Diseases 0.000 claims description 5
- 238000000465 moulding Methods 0.000 claims description 5
- 229910000029 sodium carbonate Inorganic materials 0.000 claims description 5
- -1 ammonium ions Chemical class 0.000 claims description 4
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- 238000007254 oxidation reaction Methods 0.000 claims description 3
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- 239000011777 magnesium Substances 0.000 description 18
- 239000000463 material Substances 0.000 description 8
- 239000013078 crystal Substances 0.000 description 6
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- 238000009832 plasma treatment Methods 0.000 description 5
- 239000011148 porous material Substances 0.000 description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000002425 crystallisation Methods 0.000 description 4
- 230000008025 crystallization Effects 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 3
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- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 229910021645 metal ion Inorganic materials 0.000 description 3
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- 229910052719 titanium Inorganic materials 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 239000012814 acoustic material Substances 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000010953 base metal Substances 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 239000011734 sodium Substances 0.000 description 2
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 229910003023 Mg-Al Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000002048 anodisation reaction Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
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- 229910052751 metal Inorganic materials 0.000 description 1
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- 150000002739 metals Chemical class 0.000 description 1
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Description
本発明は、スピーカー用振動板、とくにハイレゾオーデイオ用スピーカーに好適な振動板の製造方法に関する。 The present invention is a speaker diaphragm, in particular a method of manufacturing a suitable diaphragm high resolution audio speaker.
近年、ハイレゾ（ハイレゾリューション（高解像度））時代を迎え、オーデイオ機器も記録再生周波数帯域が数Ｈｚから５０ＫＨｚを超える音響帯域を忠実に再生する必要から、アンプ、スピーカーに要求される仕様が厳しくなり、新たな方式での対応が要求されるようになってきた。 In recent years, high resolution (high resolution (high resolution)) era has been reached, audio equipment must also faithfully reproduce the sound band of recording and playback frequency range from several Hz to over 50KHz, the specifications required for amplifiers and speakers are strict As a result, a new method has been required.
ツイタ―（ｔｗｅｅｔｅｒ）に代表される高音域スピーカー用振動板材料としては、比弾性率、内部摩擦の大きい音速１２０００−１５０００ｍ／ｓｅｃの六方結晶構造を有するＢｅが適しているが、Ｂｅは機械加工性、材料コストに問題があるため、一部の高級オーデイオ機器の領域でしか使用されていない。 As a diaphragm material for a high-frequency speaker typified by a tweeter, Be having a hexagonal crystal structure with a specific elastic modulus and a high sound velocity of 12000-15000 m / sec is suitable, but Be is machined. It is used only in the area of some high-end audio equipments due to problems in performance and material cost.
Ｂｅと同じ結晶構造を持つＭｇ、Ｍｇ合金、Ｔｉ、Ｔｉ合金も、内部摩擦が大きいことから使用されてきているが、これらの金属は、比弾性率で決まる音速が５０００−６０００ｍ／ｓｅｃであり、Ｂｅに比較してはるかに小さいので、その改良が求められている。 Mg, Mg alloy, Ti, and Ti alloy having the same crystal structure as Be have been used because of high internal friction, but these metals have a sound velocity determined by specific elastic modulus of 5000-6000 m / sec. Since it is much smaller than Be, its improvement is demanded.
特にＭｇは、比重が１．７４と軽いので注目されてきていたが、耐食性が低く機械加工性も良くないので、Ａｌ、レアアース等添加剤による機械特性の改良がなされてきた。Ａｌ等の添加により引張強度は純Ｍｇの数倍になり、構造材料として新しい用途を広げてきたが、比弾性率は合金化によっても改良されず、音響材料として重要な六方結晶固有の内部摩擦が純Ｍｇの３０％程度まで劣化するので、新たな改良が求められている。 In particular, Mg has been attracting attention because its specific gravity is as light as 1.74, but its mechanical properties are improved by additives such as Al and rare earths because it has low corrosion resistance and poor machinability. With the addition of Al, etc., the tensile strength is several times that of pure Mg and has expanded to new applications as a structural material. However, the specific elastic modulus is not improved by alloying, and the internal friction inherent in hexagonal crystals, which is important as an acoustic material. Deteriorates to about 30% of pure Mg, so new improvements are required.
非特許文献１および２には、Ｍｇの合金化による内部摩擦の著しい減少が記載され、そのため用途が限定されていることが記載されている。
スピーカー用振動板材料には、なるべく比重が小さいこと、音速が早いこと、そして、内部摩擦係数が大きいことが要求される。比重が小さいことが要求される理由は、周波数応答を早くして高周波再生帯域を広げるためである。音速が早いことが要求される理由は、振動板が一様にピストンモーションして基本波以外の高次音を出さないようにするためである。内部摩擦係数が大きいことが要求される理由は、基本振動周波数での振動板の振幅を速やかに消して、時間的に次にくる周波数への応答をよくするためである。 The speaker diaphragm material is required to have a specific gravity as low as possible, a high sound velocity, and a large internal friction coefficient. The reason why the specific gravity is required to be small is to speed up the frequency response and widen the high frequency reproduction band. The reason why the sound speed is required to be high is to prevent the diaphragm from making a piston motion uniformly and producing high-order sounds other than the fundamental wave. The reason why the internal coefficient of friction is required to be large is that the amplitude of the diaphragm at the fundamental vibration frequency is quickly erased to improve the response to the next frequency in time.
Ｍｇは結晶系が六方晶であり、Ｂｅに次ぐ比強度を持つ材料として従来から使用されてきた。しかし、比強度はＢｅの３０−５０％程度であり、純Ｍｇは耐食性に劣るため、Ａｌ等の合金材料として使用されてきた。合金化することにより比強度は大幅に向上し、強度材料としての特性は向上し、密度が低いので、自動車等の構造材料として広く検討され、使用されるようになった。 Mg has a hexagonal crystal system and has been conventionally used as a material having a specific strength next to Be. However, the specific strength is about 30-50% of Be, and pure Mg is inferior in corrosion resistance, so it has been used as an alloy material such as Al. By alloying, the specific strength is greatly improved, the properties as a strength material are improved, and the density is low. Therefore, the alloy has been widely studied and used as a structural material for automobiles and the like.
しかし、従来のＭｇ合金は、振動板としての音速に関係する弾性率が、２４−２６ＧＰａ/ 密度の範囲に留まり、純Ｍｇと比較して進展は見られない。特許文献１および２には、音速改善のため、陽極酸化皮膜の上に酸化チタン膜の塗布またはＮｉとＴｉ等のメッキ膜を形成することが有効であることが記載されている。すなわち、非晶質の陽極酸化膜は強度が不足するため、ヤング率の大きな膜を陽極酸化膜にコートすることにより音速を稼いでいることを示している。
However, the conventional Mg alloy has an elastic modulus related to the speed of sound as a vibration plate in the range of 24-26 GPa / density, and no progress is seen compared to pure Mg.
振動板のもう一つの主要な特性である内部摩擦は、Ａｌ等の添加剤で純Ｍｇの３０％程度に劣化し、六方結晶固有の内部摩擦の大きい音響材料としての特性が失われるため、改善が求められてきた。 Internal friction, which is another main characteristic of the diaphragm, is improved to about 30% of pure Mg with additives such as Al, and the characteristics as an acoustic material with large internal friction inherent to hexagonal crystals are lost. Has been demanded.
本発明は、上記の事情に鑑みてなされたものであり、音速および内部摩擦特性を向上させたハイレゾスピーカー用として好適な振動板の製造方法を提供することを目的とする。
本発明は、振動板の音速および内部摩擦特性を改良すると同時に耐食性を向上させる表面処理技術をも提供するものである。
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a method of manufacturing a diaphragm suitable for a high-resolution speaker with improved sound speed and internal friction characteristics.
The present invention also provides a surface treatment technique that improves the sound speed and internal friction characteristics of the diaphragm and at the same time improves the corrosion resistance.
上記目的を達成するため、本発明に係る振動板は、ＭｇまたはＭｇ合金板を所定の形状に成型加工した後、その成型加工された物を第一陽極酸化処理により表面に非晶質陽極酸化皮膜を生成し、その生成された非晶質陽極酸化皮膜を第二陽極酸化処理により結晶化してなることを特徴とする。 In order to achieve the above object, the diaphragm according to the present invention is obtained by forming an Mg or Mg alloy plate into a predetermined shape and then subjecting the formed product to an amorphous anodization on the surface by a first anodizing treatment. A film is produced, and the produced amorphous anodized film is crystallized by a second anodizing treatment.
本発明に係る振動板の製造方法は、次の工程を含むことを特徴とする。
（ａ）ＭｇまたはＭｇ合金板を所定の形状に成型加工する第１工程。
（ｂ）第１工程により成型加工された物に対して第一陽極酸化処理を行って表面に非晶質陽極酸化皮膜を生成する第２工程。
（ｃ）第２工程により生成された非晶質陽極酸化皮膜に対して第二陽極酸化処理を行って非晶質陽極酸化皮膜を結晶化する第３工程。
The method for manufacturing a diaphragm according to the present invention includes the following steps.
(A) A first step of molding the Mg or Mg alloy plate into a predetermined shape.
(B) A second step in which a first anodizing treatment is performed on the product molded in the first step to form an amorphous anodized film on the surface.
(C) a third step of crystallizing the amorphous anodic oxide film by performing a second anodic oxidation process to the amorphous anodic oxide film produced by the second step.
本発明に係る振動板の製造方法は、第２工程においては、膜厚２−３０μｍの陽極酸化皮膜を生成し、第３工程においては、第二陽極酸化処理としてのプラズマ放電処理により非晶質酸化皮膜を結晶化させることを特徴とする。 In the method for manufacturing a diaphragm according to the present invention, an anodized film having a film thickness of 2 to 30 μm is generated in the second step, and in the third step, the film is amorphous by plasma discharge treatment as the second anodizing treatment. The oxide film is crystallized.
また、本発明は、第２工程の第一陽極酸化処理においてはアンモニウムイオンおよびリン酸イオンを含む溶液を用い、第３工程のプラズマ放電処理においては炭酸ナトリウムを含む溶液中で結晶化させることを特徴とする。 Further, the present invention uses a solution containing ammonium ions and phosphate ions in the first anodizing treatment in the second step, and crystallizes in a solution containing sodium carbonate in the plasma discharge treatment in the third step. Features.
本発明に係る振動板は、ＭｇまたはＭｇ合金板の表面に結晶化された強固な陽極酸化皮膜が生成されているので、音速および内部摩擦が向上し、かつ、耐食性に優れており、ハイレゾオーデイオ用スピーカーに用いて好適である。 In the diaphragm according to the present invention, a strong anodic oxide film crystallized on the surface of the Mg or Mg alloy plate is formed, so that the sound speed and internal friction are improved, and the corrosion resistance is high. It is suitable for use as a loudspeaker.
本発明に係る振動板の製造方法によれば、ＭｇまたはＭｇ合金板の表面に結晶化された強固な陽極酸化皮膜が生成されるので、音速および内部摩擦が向上し、かつ、耐食性のあるハイレゾオーデイオ用スピーカーに好適な振動板の製造が可能である。 According to the method for manufacturing a diaphragm according to the present invention, a strong anodic oxide film crystallized on the surface of the Mg or Mg alloy plate is generated, so that the sound speed and internal friction are improved, and the high resolution is corrosion resistant. A diaphragm suitable for an audio speaker can be manufactured.
また、２−３０μｍの硬質結晶膜がベース金属両面に生成されるため、拘束力が増すので、音速および内部摩擦が向上し、かつ高音再生帯域が広い振動板の製造が可能である。 Moreover, since 2-30 μm hard crystal films are formed on both surfaces of the base metal, the restraining force is increased, so that it is possible to manufacture a diaphragm with improved sound speed and internal friction and a wide high sound reproduction band.
また、第一陽極酸化処理としてアンモニウムイオンおよびリン酸イオンを含む溶液を用いるので、ポア径の小さな比較的緻密な非晶質酸化膜が得られ、次のプラズマ処理においては炭酸ナトリウムを含む溶液中で結晶化させるので、強固な酸化物皮膜が得られ、音速および内部摩擦の大きな振動板が容易に形成される。 Further, a solution containing Since use of a solution containing ammonium ions and phosphate ions as the first anodizing treatment, a small relatively dense amorphous oxide film of the pore diameter is obtained, the sodium carbonate in the following plasma treatment Since it is crystallized in the inside, a strong oxide film is obtained, and a diaphragm having a large sound speed and high internal friction is easily formed.
次に、本発明に係る振動板の製造方法の実施の形態について詳細に説明する。 Next, an embodiment of a method for manufacturing a diaphragm according to the present invention will be described in detail.
本発明は、第１工程として所定の板厚を有するＭｇまたはＭｇ合金の板材を所定の形状にプレス加工して振動板を成型する。プレス成型は、２００−３００℃の温間成型が望ましい。成型後、必要に応じて１５０℃前後の温度で所定時間、焼鈍して歪取りをすることが望ましい。 In the present invention, as a first step, a diaphragm is formed by pressing a plate material of Mg or Mg alloy having a predetermined plate thickness into a predetermined shape. The press molding is preferably warm molding at 200 to 300 ° C. After molding, it is desirable to remove strain by annealing at a temperature of around 150 ° C. for a predetermined time if necessary.
所定の形状に成型され、歪取り焼鈍をされた振動板は、次に、第２工程として、第一陽極酸化処理により両面に所定の厚みの陽極酸化被膜を生成する。膜厚は、たとえば、２−３０μｍであることが好ましい。膜厚が２μ未満である場合は、ＭｇまたはＭｇ合金基板の拘束力が弱く、音速及び内部摩擦の向上に寄与しない。また、膜厚が３０μｍ超である場合は、内部摩擦および音速の膜厚依存性が飽和特性を示し、経済的でない。
陽極酸化処理液としては、アンモニウムイオンを含むリン酸浴が望ましい。アンモニウムイオンおよびリン酸浴で処理された陽極酸化被膜は、緻密でポア径が小さいので、次の結晶化処理で強固な被膜が形成されるからである。
印加電圧は６０Ｖ前後、浴温は４０−８０℃が好ましい。印加電圧が８０Ｖ以上になると、陽極酸化皮膜のポア径が大きくなり、緻密な膜が得られなくなるので好ましくない。電流密度は、振動板の形状、合金組成に依存するが、５−５０ｍＡ／ｃｍ２が望ましい。
It is molded into a predetermined shape, the vibration plate which is stress relief annealing, then as a second step, to generate an anodic oxide target film of a predetermined thickness on both sides by the first anodizing treatment. The film thickness is preferably 2-30 μm, for example. When the film thickness is less than 2 μm, the binding force of the Mg or Mg alloy substrate is weak and does not contribute to the improvement of sound speed and internal friction. On the other hand, when the film thickness exceeds 30 μm, the film thickness dependence of internal friction and sound velocity shows saturation characteristics and is not economical.
The anodic oxidation treatment solution, phosphoric acid bath containing ammonium two-ion is preferable. This is because the anodic oxide coating treated with ammonium ions and a phosphoric acid bath is dense and has a small pore diameter, so that a strong coating is formed by the subsequent crystallization treatment.
The applied voltage is preferably around 60 V and the bath temperature is preferably 40-80 ° C. An applied voltage of 80 V or more is not preferable because the pore diameter of the anodized film becomes large and a dense film cannot be obtained. Although the current density depends on the shape of the diaphragm and the alloy composition, 5-50 mA / cm 2 is desirable.
第一陽極酸化処理で得られる膜は、非結晶状態の膜で水分を多く含み、膜強度も十分ではないが、ＭｇまたはＭｇ合金板材を膜でサンドイッチ構造に挟む形になるため、振動板の音速および内部摩擦が向上する。 Since film obtained by the first anodizing treatment includes a large amount of water with a film of non-crystalline state, but also not sufficient film strength, which will form sandwich San Doi pitch structure Mg or Mg alloy sheet with a film, The sound speed and internal friction of the diaphragm are improved.
陽極酸化膜の厚みは、使用されるＭｇまたはＭｇ合金板材の厚みに依存するが、通常オーデイオ振動板で使用される１００μｍ板厚では、５−３０μｍが望ましい。５μｍ未満では、音速、内部摩擦を向上させる膜強度が不足する。３０μｍ超の陽極酸化膜は、音速および内部摩擦係数の向上特性が飽和状態になり、処理費用が嵩み経済的ではない。 The thickness of the anodic oxide film depends on the thickness of the Mg or Mg alloy plate used, but 5-30 μm is desirable for a 100 μm plate thickness that is normally used for an audio diaphragm. If it is less than 5 μm, the film strength for improving the sound speed and internal friction is insufficient. An anodic oxide film having a thickness of more than 30 μm is not economical because the characteristics for improving the sound speed and the internal friction coefficient are saturated, the processing cost is high.
次に、第２工程で得られた非晶質膜に、第３工程として、第二陽極酸化処理により、浴中で大電流を流し、プラズマ発光させて非晶質膜を結晶化させ、硬質膜を作る。これにより、膜強度が増すため、振動板の音速および内部摩擦が向上する。 Next, the amorphous film obtained in the second step, a third step, by the second anodizing treatment, a large current flows in the bath, to crystallize the amorphous film by plasma emission, hard Make a membrane. Thereby, the film strength is increased, so that the sound speed and the internal friction of the diaphragm are improved.
浴組成としては、炭酸ナトリウムを含む浴中で、浴温５０℃前後、５０−１００Ａ／ｄｍ２の電流密度で処理することが好ましい。しかし、浴組成や電極配置状態により条件は適宜選択される。上記非晶質膜の結晶化処理により膜強度が増すので、サンドイッチ膜によるベース金属拘束力が増す。このため、振動板の音速および内部摩擦が、第一陽極酸化膜形成時より一段と向上する。 The bath composition is preferably treated in a bath containing sodium carbonate at a bath temperature of about 50 ° C. and a current density of 50-100 A / dm 2 . However, conditions are appropriately selected depending on the bath composition and electrode arrangement state. Since film strength is increased by crystallization process of the amorphous film, the base metal binding by Sun Doi pitch film is increased. For this reason, the sound speed and the internal friction of the diaphragm are further improved as compared with the formation of the first anodic oxide film.
第一陽極酸化膜生成時の浴中に金属イオンを分散させて、生成される陽極酸化膜に金属イオンを取込むか、または第一陽極酸化皮膜生成後のポア中にＡＣ電界をかけて金属イオンを封入し、その後に第二陽極酸化処理をすれば、金属イオンの選択により各種のカラーを有する結晶化膜を得ることが可能である。 Disperse metal ions in the bath when the first anodic oxide film is formed, and incorporate the metal ions into the generated anodic oxide film, or apply an AC electric field to the pore after the first anodic oxide film is generated. If ions are encapsulated and then subjected to a second anodizing treatment, it is possible to obtain crystallized films having various colors by selecting metal ions.
比重が４．７５と大きいチタンまたは酸化チタン複合膜および比重が７．８６と大きいＮｉメッキ膜を使用しないので、比重１．７４−１．９０のＭｇまたはＭｇ合金膜の重量の優位性を崩すことなく、音響再生応答性のよい振動板が形成できる。
膜厚２μｍ以下では拘束力が不足するので、音速および内部摩擦の向上が期待できなく、３０μｍ以上では音速、内部摩擦向上特性の膜厚依存性が飽和するので経済的でない。
Since the titanium or titanium oxide composite film having a large specific gravity of 4.75 and the Ni plating film having a large specific gravity of 7.86 are not used, the weight advantage of the Mg or Mg alloy film having a specific gravity of 1.74-1.90 is lost. Therefore, a diaphragm having good sound reproduction response can be formed.
If the film thickness is 2 μm or less, the binding force is insufficient, so that it is not possible to expect an improvement in sound speed and internal friction. If the film thickness is 30 μm or more, the film thickness dependence of the sound speed and internal friction improvement characteristics is saturated, which is not economical.
液温２０−８０℃に対して電圧１００−５０Ｖの範囲で陽極酸化すれば、ポア径の小さな比較的緻密な非晶質酸化膜が得られ、次のプラズマ処理で強固な酸化物皮膜が得られ、音速および内部摩擦の大きな振動板が容易に形成される。 If anodized in a range of voltage 100-50V against liquid temperature 20-80 ° C., a small relatively dense amorphous oxide film of the pore diameter is obtained, the strong oxide film at the next plasma treatment to obtain Therefore, a diaphragm having a large sound speed and high internal friction can be easily formed.
プラズマ処理として炭酸ナトリウムを含む溶液中で結晶化処理することが好ましい。代表的な薬品として、第一陽極酸化膜形成にはＮＨ４ＨＦ、Ｈ３ＰＯ４が、プラズマ処理液としてＮａ２ＣＯ３があげられる。 As the plasma treatment, crystallization treatment is preferably performed in a solution containing sodium carbonate. As typical chemicals, NH 4 HF and H 3 PO 4 are used for forming the first anodic oxide film, and Na 2 CO 3 is used as the plasma processing liquid.
Ｍｇ−Ａｌ合金１００μｍ厚の板を１ｘ１２ｃｍの形状に加工し、第一陽極酸化液としてＮＨ４ＨＦを２２０ｇ／ｌ、Ｈ３ＰＯ４を８０ｇ／ｌを主として使用し、ＤＣ電圧６０−８０Ｖで所定の膜厚の陽極酸化膜を得た。プラズマ処理液としてＮａ２ＣＯ３を２ｍｏｌ／ｌ、５０℃の溶液中で３０−５０Ａ／ｄｍ２の電流密度で結晶化処理し、１−２０μｍ厚の膜を作り、非晶質陽極酸化膜と結晶質プラズマ膜の音速および内部摩擦を振動法により測定した。
A Mg-Al alloy 100 μm thick plate is processed into a 1 × 12 cm shape, and NH 4 HF is mainly used as 220 g / l and H 3 PO 4 as 80 g / l as a first anodizing solution, and a predetermined voltage is set at 60-80 V DC voltage. An anodic oxide film having a film thickness of was obtained.
測定値は処理無の膜を基準として規格化して図1および２に示す。内部摩擦については５μｍ厚で膜厚依存性は結晶質膜、非晶質膜いずれも飽和状態を示すが、プラズマ処理結晶化膜のほうが内部摩擦係数は非結晶質膜に比較して大きい。音速については、非結晶質膜の膜厚依存性は１０μｍ程度で飽和特性を示すが、プラズマ処理結晶質膜では２０μｍ膜ではまだ飽和特性を示してなく、プラズマ処理膜の効果が顕著に示されている。 The measured values are normalized with respect to the untreated film as shown in FIGS. 1 and 2. Internal thickness dependencies 5μm thick for friction crystalline film, both amorphous films exhibit saturation, the internal friction coefficient towards the plasma processing crystallized film is large compared to the non-crystalline film. The speed of sound, the film thickness dependency of the amorphous film exhibits a saturation characteristic of about 10 [mu] m, rather than 20μm film still shows a saturation characteristic in the plasma processing crystalline film, the effect of the plasma treatment the film is shown conspicuously ing.
本実施例によりプラズマ結晶化処理の効果は明らかであるが、実験例は１００μｍ基板での一例であり、基板の厚みが異なれば、最適膜厚は異なる。 Although the effect of the plasma crystallization treatment is apparent from this example, the experimental example is an example with a 100 μm substrate, and the optimum film thickness differs if the substrate thickness is different.
Claims (1)
（ａ）ＭｇまたはＭｇ合金板を所定の形状に成型加工する第１工程。
（ｂ）第１工程により成型加工された物に対してアンモニウムイオンおよびリン酸イオンを含む溶液を用いた第一陽極酸化処理を行って、表面に２から３０μｍの非晶質陽極酸化皮膜を生成する第２工程。
（ｃ）第２工程により生成された非晶質陽極酸化皮膜に対して第二陽極酸化処理として炭酸ナトリウムを含む溶液を用いたプラズマ放電処理により非晶質陽極酸化皮膜を結晶化する第３工程。 The manufacturing method of the diaphragm for speakers characterized by including the following processes.
(A) A first step of molding the Mg or Mg alloy plate into a predetermined shape.
(B) A first anodizing treatment using a solution containing ammonium ions and phosphate ions is performed on the product molded in the first step to form an amorphous anodic oxide film having a thickness of 2 to 30 μm on the surface. The second step.
(C) a third step of crystallizing the amorphous anodic oxide film by plasma discharge treatment using a solution containing sodium carbonate as the second anodic oxidation process to the amorphous anodic oxide film produced by the second step .
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