JP6156920B2 - Dust remover - Google Patents

Description

The present invention relates to a dust remover , and for example, relates to a dust remover that removes dust adhering to a dust removal surface such as a substrate or a sheet in manufacturing a liquid crystal panel.

  For example, in the manufacturing process of a liquid crystal panel, it is necessary to remove dust adhering to a glass substrate, a printed board, a sheet, or the like. Conventionally, as a method of removing dust from a dust removal surface such as the substrate, there is a method of mechanically removing dust with an adhesive roller or the like. However, in the method of removing dust with the adhesive roller, there is a risk of damaging the dust surface because the adhesive roller has a strong adhesive force. Furthermore, if the charged surface of the dust removal surface is far away from the adhesive roller, both the adhesion roller and the dust removal surface are charged by contact peeling electrification due to contact and peeling of the adhesive roller, and dust is attracted by electrostatic attraction force. There was a problem of attracting.

Therefore, in order to remove the dust from the dust removal surface, a method for removing the dust in a non-contact manner has been required. In response to the above requirement, there is a method in which compressed air is blown onto a substrate surface or the like to blow off dust on the dust removal surface. However, since the air flow by the compressed air is a direct current, the dust cannot be shaken, and there is a problem that it is difficult to separate from the dust removal surface.
In order to solve the above-described problem, Patent Document 1 discloses a method and an apparatus for removing dust by shaking dust on a dust removal surface by intermittently injecting gas onto the dust removal surface.
FIG. 5 shows a cross-sectional view of the dust removing device disclosed in Patent Document 1. As shown in FIG. The dust removal apparatus 50 shown in FIG. 5 includes an ejection unit 51 that intermittently ejects gas toward the surface (dust removal surface) of the substrate G that is a dust removal object. Directly below the ejecting means 51, the substrate G is arranged so as to be conveyed in the horizontal direction by the belt conveyor 52.

  The ejecting means 51 blows out the gas fed into the inside of the rectangular tube member 53 (long in the direction perpendicular to the paper surface) from the nozzle 54 provided on the side surface of the rectangular tube member 53. More specifically, the rectangular tube member 53 is accommodated in a cylindrical body 55 extending along the longitudinal direction, and a large number of through holes 56 are formed on the peripheral surface of the cylindrical body 55. Has been. The cylindrical body 55 is rotatable about the central axis, and blocks or pulsates the gas injected from the nozzle 54 toward the substrate G at a constant period.

  According to the dust removing device 50 configured as described above, the substrate G is moved by the belt conveyor 52, the gas is ejected from the nozzle 54 of the ejecting means 51, and the cylindrical body 55 is rotated. Then, with the rotation of the cylindrical body 55, gas is intermittently or pulsatically jetted from the through holes 56 to the surface of the substrate G. As a result, the dust D on the surface of the substrate G is shaken and pulled away from the substrate surface, the dust D soars, and the separated dust D flows in the gas jetting direction, by a predetermined dust collecting means (not shown). Dust is collected.

JP-A-9-248535

By the way, in the dust removal method (dust removal device 50) disclosed in Patent Document 1, in order to cause the injection means 51 to inject intermittently or pulsatilely from the through hole 56 of the cylindrical body 55, the rectangular tube member 53 is used. It is necessary to inject high pressure and high flow rate gas from the nozzle 54.
However, in order to inject such a high-pressure and high-flow gas, a large apparatus with high power consumption such as a compressor apparatus is required, and there is a problem that the apparatus becomes large and running cost increases.

The present invention has been made paying attention to the above points, and in a dust removing device that removes dust adhering to a dust removal surface , the device can be reduced in size, and the cost can be reduced as compared with the prior art. An object of the present invention is to provide a dust removing device capable of performing the above.

In order to solve the above-described problems, a dust removing device according to the present invention is a dust removing device that removes dust adhering to a surface to be dusted, and receives an electric signal having a predetermined voltage level that changes based on a predetermined frequency. A signal generating unit for generating, an electroacoustic converting unit for vibrating a vibrating body based on the electric signal generated by the signal generating unit, and an airflow forming surface arranged to face the dust removing surface, Forming an air flow path between the surface and the air flow forming surface, moving the gas by vibration of the vibrating body of the electroacoustic conversion means, and forming an alternating air flow forming means for forming an alternating air flow in the air flow path , riding a suction means for sucking the dust flow, the alternating airflow generating means, the first internal space is formed, it accommodates the electro-acoustic conversion means into the inner space of the first, the electro-acoustic conversion A third box disposed so that the vibrating body of the step is exposed from one surface and a second internal space; and the third box is disposed in the second internal space; And a fourth box that exposes the vibrating body housed in the box of 3 from an opening formed on one side, and the airflow forming surface is on the exposed side of the vibrating body in the third box. The suction means is configured to suck the gas in the vicinity of the periphery of the airflow forming surface formed in the third box, and in the second internal space, the inner surface of the fourth box and the The suction path is formed in the gap between the outer surface of the third box .
The alternating airflow forming means preferably has elevating means for moving the third box up and down to adjust the height dimension of the air flow path between the airflow forming surface and the dust removal surface.
According to such a configuration, an alternating airflow can be efficiently formed on the airflow forming surface.
In addition, the dust flowing in the alternating airflow flows into the suction path formed in the gap between the inner surface of the fourth box and the outer surface of the third box by the suction means, so that the suction removal can do.
Furthermore, since the suction means only sucks dust separated from the dust removal surface, it can be handled by a small device such as a vacuum cleaner.

ADVANTAGE OF THE INVENTION According to this invention, in a dust removal apparatus which removes the dust adhering to a dust removal surface , an apparatus can be reduced in size and cost can be reduced rather than before.

FIG. 1 is a cross-sectional view schematically showing the configuration of the first embodiment of the dust removing apparatus according to the present invention. FIG. 2 is a plan view of the dust removing device of FIG. 1 (the dust removal object is not shown). FIG. 3 is a sectional view showing a schematic configuration of the second embodiment according to the present invention. FIG. 4 is a plan view of the dust removing apparatus of FIG. 3 (the dust removal object is not shown). FIG. 5 is a cross-sectional view showing a configuration of a conventional dust removing device.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a cross-sectional view schematically showing a configuration of a first embodiment of a dust removing apparatus according to the present invention. FIG. 2 is a plan view of the dust removing device of FIG. 1 (the dust removal object is not shown).
A dust removing device 1 shown in FIG. 1 is a device for removing dust D adhering to a dust removal surface G1 of, for example, a printed board, a glass substrate, or a sheet-like dust removal object G. Specifically, an alternating air flow is generated, sprayed onto the dust removal surface G1, and the dust D on the surface is pulled away and removed by suction.

The dust removing apparatus 1 includes, for example, a main body portion 4 having a substantially rectangular parallelepiped shape as a whole, and the main body portion 4 includes a substantially rectangular parallelepiped box body 2 (second box body, alternating box) in which internal spaces S1 and S2 are respectively formed. The airflow forming means) and the box 3 (first box, alternating airflow forming means) are connected in a state where the openings 2a, 3a on one side face each other.
An airflow forming surface 4a that forms an alternating airflow is provided on one surface (the upper surface in FIG. 1) of the main body 4. More specifically, on one surface of the main body portion 4, the box body 2 and the box body 3 are respectively formed with communication holes 2b and 3b (second communication holes and first communication holes), and the communication holes The airflow forming surface 4a is formed between 2b and 3b.

The main body 4 is connected with lifting / lowering means 20 for adjusting the height position of the main body 4 and parallel movement means 21 for translating the main body 4 along the dust removal surface G1. The position of the portion 4 with respect to the dust removal surface G1 can be arbitrarily adjusted. The elevating means 20 and the parallel moving means 21 can be adjusted with high accuracy by using, for example, a moving mechanism using a ball screw mechanism.
When the dust D on the dust removal surface G1 is removed, the air flow forming surface 4a is brought close to the dust removal surface G1 by driving the elevating means 20, and an air flow path (gap) is formed. The dust D on the dust removal surface G1 is shaken and separated by the airflow.
A step portion 4b is provided around the air flow forming surface 4a, thereby increasing a gap on the inner side than the edge portion, and it is difficult for the air flow to escape outward from the edge portion of the air flow forming surface 4a. Yes.

  Subsequently, a configuration for generating the alternating airflow will be described. A speaker unit 5 (electroacoustic conversion means) is accommodated in the internal space S2 of the box 3. Specifically, the front surface of the diaphragm 5a (vibrating body) of the speaker unit 5 is disposed so as to be exposed to the internal space S1 of the box body 2 through the openings 3a and 2a, and the outer edge of the diaphragm 5a. The portion is in close contact with the edge of the opening 3a. In addition, a coil (not shown) is disposed inside the annular magnet 5b of the speaker unit 5, and an electric signal having a predetermined frequency and a predetermined voltage level is supplied from the signal generating means 6. ing.

The signal generating means 6 includes an oscillator 7 that generates a predetermined frequency signal, an attenuator 8 that attenuates and adjusts the waveform of the generated frequency signal to an appropriate level, and a signal input from the attenuator 8 to a desired voltage level. And a power amplifier 9 for amplification.
When a predetermined electric signal is supplied from the signal generating means 6 to the speaker unit 5, the diaphragm 5a of the speaker unit 5 vibrates according to the supplied electric signal, and the front internal space S1 and the rear of the diaphragm 5a are vibrated. Gas (such as air) in the internal space S2 is vibrated according to the frequency of the electrical signal.
Since the gas in the internal space S1 and the gas in the internal space S2 vibrate in opposite phases with respect to the diaphragm 5a, the airflow is alternately reversed in the airflow forming surface 4a through the communication holes 2b and 3b. Alternating airflow that changes to is generated.

  Further, as shown in the drawing, in the box 2 and the box 3, through holes 2c and 3c are respectively provided on the side opposite to the air flow target surface 4a, and the intake pipe 11 is provided in the through holes 2c and 3c. , 12 are respectively connected to one end side. A suction means 13 such as a vacuum cleaner or a vacuum pump is connected to the other end side of the intake pipes 11 and 12, and floats in the internal space S1 of the box 2 and the internal space S2 of the box 3. Dust is sucked and removed through the intake pipes 11 and 12.

In the dust removal apparatus 1 configured as described above, when removing the dust D adhering to the dust removal surface G1, the elevation means 20 is driven to adjust the height position of the main body 4 and the dust removal surface. The air flow forming surface 4a is brought close to G1 as shown in FIG. 1, and an air flow path (gap) is formed.
Next, the signal generating means 6 is driven, and an electric signal having a predetermined frequency (for example, 50 Hz) and a predetermined voltage level is supplied to the speaker unit 5.
The diaphragm 5a of the speaker unit 5 vibrates based on the supplied electric signal, and moves the gas in the internal spaces S1 and S2 of the main body 4 in opposite directions (reverse phase).
As a result, an alternating airflow that flows parallel to the dust removal surface G1 is generated between the internal space S1 and the internal space S2, that is, on the airflow forming surface 4a that forms an air flow path that communicates both.

Due to this alternating airflow, the dust D adhering to the dust removal surface G1 is shaken in a direction parallel to the surface, so that the dust D is easily separated from the dust removal surface G1 and is carried along the alternating airflow.
Further, since the dust D flowing in the alternating airflow flows into the internal spaces S1 and S2 of the main body 4, the dust D flowing into the internal spaces S1 and S2 is sucked through the intake pipes 11 and 12, respectively. Is removed by suction.
When all the dust removal surface G1 is to be removed, the main body 4 of the dust removal device 1 is moved in parallel with respect to the dust removal surface G1 by driving the parallel moving means 21, and the dust removal process is performed again as shown in FIG. Just do it.

As described above, according to the first embodiment of the present invention, it is possible to generate an alternating air flow parallel to the dust removal surface G1 and thereby shake the dust D adhering to the dust removal surface G1. The dust D can be easily separated from the dust removal surface G1.
Furthermore, since the dust D flowing on the alternating airflow flows into the internal spaces S1 and S2 of the main body portion 4, it can be easily sucked and removed by the suction means 13.
In addition, since the speaker unit 5 that converts an electrical signal into an acoustic signal is used to generate an alternating airflow for separating the dust D from the dust removal surface G1, a high-pressure and high-flow gas is generated as in the prior art. Therefore, there is no need for a large apparatus with high power consumption such as a compressor apparatus for reducing the cost, and the cost can be reduced as compared with the conventional apparatus.
Moreover, since the suction means 13 only needs to suck up the dust D separated from the dust removal surface G1 by the alternating airflow, it can be handled by a small device such as a vacuum cleaner.

Then, based on FIG. 3, FIG. 4, 2nd Embodiment of the dust removal apparatus which concerns on this invention is described.
FIG. 3 is a sectional view showing a schematic configuration of the second embodiment according to the present invention. FIG. 4 is a plan view of the dust removing apparatus of FIG. 3 (the dust removal object is not shown). 3 and 4 include the same configurations as those already described with reference to FIGS. 1 and 2, and corresponding members are denoted by the same reference numerals.

The dust removing apparatus 1 shown in FIGS. 3 and 4 includes a substantially cylindrical box 15 (third box, alternating airflow forming means) in which an internal space S3 is formed, and an internal space S4. A substantially cylindrical box body 16 in which the box body 15 is disposed in S4.
As shown in the figure, the box body 16 is opened at its upper end to form an opening 16a, and a flange 16b is formed at the edge of the opening 16a so as to protrude horizontally outward. The box 15 is accommodated in the internal space S4 from the opening 16a of the box 16, and is supported in the space by, for example, a plurality of rod-like support members 17 as shown in FIG.
In addition, as will be described later, one surface of the box body 15 disposed on the opening 16a side of the box body 16 is an air flow forming surface 15a, and it is difficult for the alternating air flow formed on the air flow forming surface 15a to escape to the outside. The air flow forming surface 15a is submerged in the internal space S4 from the height position of the flange 16b.

Further, a through hole 16 c is provided on the lower surface of the box body 16, and the through hole 16 c is connected to the suction means 13 via the suction pipe 18.
That is, as shown in FIG. 3, in the internal space S <b> 4 of the box body 16, a gap between the inner surface of the box body 16 and the outer surface of the box body 15 serves as a suction path, and dust D flowing on the alternating airflow flows. The suction means 13 is sucked from, for example, an annular suction hole 19 formed between the upper surface of the box 15 (air flow forming surface 15a) and the upper surface of the flange 16b.
Further, the box body 16 includes an elevating means 20 for adjusting the height positions of the box body 16 and the box body 15, and a parallel moving means 21 for translating the box bodies 15 and 16 along the dust removal surface G1. Are connected so that the positions of the boxes 15 and 16 with respect to the dust removal surface G1 can be arbitrarily adjusted.

Subsequently, a configuration for generating the alternating airflow will be described. A speaker unit 5 is disposed in the internal space S3 of the box 15. An opening 15b for exposing the front surface of the diaphragm 5a (vibrating body) of the speaker unit 5 upward is formed on the upper surface of the box 15, and the outer edge of the diaphragm 5a is formed at the edge of the opening 15b. It is in close contact.
In addition, a coil (not shown) is disposed inside the annular magnet 5b of the speaker unit 5, and an electric signal having a predetermined frequency and a predetermined voltage level is supplied from the signal generating means 6. ing.

In the dust removing device 1 configured as described above, when removing the dust D adhering to the dust removal surface G1, the airflow forming surface 15a is shown in FIG. It is set as the state where it adjoined.
Next, the signal generating means 6 is driven, and an electric signal having a predetermined voltage level that changes at a predetermined frequency (for example, 50 Hz) is supplied to the speaker unit 5.
The diaphragm 5a of the speaker unit 5 vibrates based on the supplied electric signal, and vibrates the gas in front of the diaphragm 5a. Here, since the dust removal surface G1 is disposed immediately in front of the diaphragm 5a, a positive pressure state and a negative pressure state are alternately repeated in front of the diaphragm 5a, and in the airflow forming surface 15a, An airflow spreading outward from the center position of the diaphragm 5a and an airflow flowing from the outside toward the center position are alternately generated. That is, an alternating airflow that flows parallel to the dust removal surface G1 is generated.

Due to this alternating airflow, the dust D adhering to the dust removal surface G1 is shaken in a direction parallel to the surface, so that the dust D is easily separated from the dust removal surface G1 and flows together with the alternating airflow.
Further, the dust D flowing on the alternating airflow is sucked out from the suction holes 19 provided around the airflow forming surface 15 a and sucked and removed by the suction means 13 through the suction pipe 18.

As described above, according to the second embodiment of the present invention, as in the first embodiment, an alternating air flow parallel to the dust removal surface G1 is generated and thereby adhered to the dust removal surface G1. Since the dust D can be shaken, the dust D can be easily separated from the dust removal surface G1.
Further, the dust D flowing on the alternating airflow can be easily sucked and removed from the intake holes 19 outside the airflow forming surface 15a by the suction means 13.
In addition, in order to generate an alternating airflow for separating the dust D from the dust removal surface G1, the loudspeaker unit 5 that regenerates an electrical signal is used. Therefore, in order to generate a high pressure and high flow rate gas as in the prior art. This eliminates the need for a large apparatus with high power consumption, such as a compressor apparatus, and can reduce the cost compared to the conventional apparatus.
Further, since the suction means 13 only sucks up the dust D separated by the alternating airflow from the dust removal surface G1, it can be handled by a small device such as a vacuum cleaner.
Further, when all the dust removal surface G1 is removed, the parallel movement means 21 is driven to move the box bodies 15 and 16 of the dust removal apparatus 1 in parallel with respect to the dust removal surface G1, and the dust removal process is again performed as shown in FIG. Just do.

In the first embodiment, the boxes 2 and 3 have a rectangular parallelepiped shape, and in the second embodiment, the boxes 15 and 16 have a substantially cylindrical shape. The shapes are not limited to each other, and other shapes may be used.
In the first and second embodiments, the speaker unit has been described as an example of the electroacoustic conversion unit. However, the present invention is not limited to this, and any unit that converts an electrical signal into an acoustic signal by vibration of a vibrating body may be used. Electroacoustic conversion means other than the speaker unit may be used.
Moreover, although the raising / lowering means 20 and the parallel moving means 21 shown in the said 1st, 2nd embodiment shall move the dust removal apparatus 1 side with respect to the dust removal surface G1, it is with respect to the dust removal surface G1. What is necessary is just the structure which an alternating airflow formation surface moves relatively. Therefore, the dust removal object G may be held by the lifting means 20 and the parallel movement means 21 and the dust removal surface G1 may be moved with respect to the stationary dust removal apparatus 1.

DESCRIPTION OF SYMBOLS 1 Dust removal apparatus 2 Box (2nd box, alternating airflow formation means)
3 box (first box, alternating airflow forming means)
4 Main body part 4a Air flow forming surface 4b Step 5 Speaker unit (electroacoustic conversion means)
5a Diaphragm (vibrating body)
6 Signal generating means 11 Intake pipe 12 Intake pipe 13 Suction means 15 Box (third box, alternating airflow forming means)
15a Airflow forming surface 16 Box 19 Air intake hole 20 Lifting means 21 Parallel moving means G Dust removal object G1 Dust removal surface S1 Internal space S2 Internal space

Claims (2)

A dust removing device for removing dust adhering to a dust removal surface,
Signal generating means for generating an electrical signal of a predetermined voltage level that changes based on a predetermined frequency;
Electroacoustic conversion means for vibrating a vibrating body based on the electric signal generated by the signal generation means;
An air flow forming surface disposed opposite to the dust removal surface, forming an air flow path between the dust removal surface and the air flow formation surface, and gas generated by vibration of the vibrating body of the electroacoustic conversion means. An alternating airflow forming means for moving and forming an alternating airflow in the air flow path ;
A suction means for sucking the dust flowing on the alternating airflow ,
The alternating airflow forming means includes:
Forming a first internal space, housing the electroacoustic conversion means in the first internal space, and a third box disposed so that the vibrating body of the electroacoustic conversion means is exposed from one surface;
A second internal space is formed, the third box is disposed in the second internal space, and the vibrator accommodated in the third box is exposed from an opening formed on one surface. A fourth box to be formed, and the airflow forming surface is formed on the exposed surface of the vibrating body in the third box,
The suction means sucks the gas in the vicinity of the periphery of the air flow forming surface formed in the third box, and in the second internal space, the inner surface of the fourth box and the third box A dust removing device, wherein a suction path is formed in a gap between the outer surface of the box. The said alternating airflow formation means has a raising / lowering means which moves the said 3rd box up and down, and adjusts the height dimension of the air flow path between the said airflow formation surface and the said dust removal surface, It is characterized by the above-mentioned. Item 1. A dust removing device according to Item 1.

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