JP6157933B2 - Spray pattern measuring method and measuring apparatus - Google Patents

Description

  The present invention relates to a spray pattern measurement method, a measurement device, a liquid spray device, a program, and a recording medium, for example, for measuring a spray pattern of a functional film applied to a spray target substrate.

  For example, a plurality of LED light source light emitting modules are mounted on a metal bar and used for backlight or illumination. In such an LED light source light emitting module, for example, one to a plurality of LED chips are mounted on a mounting substrate made of a ceramic substrate by die bonding. In addition, a phosphor resin layer is formed on the mounting substrate so as to cover all of the LED chip and its connecting portion (primary mold), and the phosphor resin layer is sealed in a dome shape with a high transmittance transparent resin layer. Stopped (secondary mold).

  In the manufacture of the LED light source light emitting module, the phosphor resin layer is usually formed in a substantially hemisphere or a substantially semi-flat ball. For this purpose, a liquid repellent made of a material that repels the phosphor resin is applied to the entire surface of the mounting substrate to form a liquid repellent film, and the liquid repellent film in the region that becomes the bottom surface of the phosphor resin layer is etched. Remove. Thereby, surface tension acts on the phosphor resin, and the phosphor resin layer can have the above shape.

  In forming the liquid repellent film, a method of spraying a liquid repellent agent on a mounting substrate is frequently used. In this method, a liquid repellent agent is ejected from a certain height by a droplet discharge head, and a liquid repellent film of about 1 to 2 μm is formed on a mounting substrate. Moreover, the said etching is performed by the plasma processing which uses argon plasma, for example.

  If the liquid repellent film is wet on the entire surface of the mounting substrate, the liquid repellent film cannot be completely removed by etching and becomes a residue. Therefore, the liquid repellent film has a droplet density of the liquid repellent that is coarse (low density) so that the unnecessary portion can be completely removed by etching so that the liquid repellent does not get wet on the entire surface of the mounting substrate. ) Is preferably applied. The spray pattern of the liquid repellent is preferably formed so as not to be biased with respect to the center position of the spray so that the droplet density is stable over the entire surface of the mounting substrate.

  Therefore, in the manufacture of the LED light source light emitting module, in order to form a good liquid repellent film, the surface state of the formed liquid repellent film is grasped. As a method for this, a method is known in which image data of a paint surface is acquired and the surface state is measured by processing the acquired image.

  In Patent Document 1, light is applied to the sample coating surface from an oblique direction, luminance image data of the sample coating surface is acquired, and the luminance image data is binarized to determine the number of recesses per unit area of the coating surface. It is described that the state of the surface is calculated and detected based on the quantity.

  In Patent Document 2, dots printed on a recording medium are imaged with a microscope and a camera, the acquired image data is converted into binarized image data, erosion processing is performed on the binarized image data, and erosion is performed. It describes that after processing, the center of gravity position of the remaining portion is detected as the landing position of the dot.

JP 2008-014907 A (published January 24, 2008) JP 2005-131960 A (published May 26, 2005)

  However, with the configuration described in Patent Document 1, although it is possible to detect the state of the entire coating surface, it is not possible to accurately detect the deviation of the spray pattern.

  Further, with the configuration described in Patent Document 2, although the landing position of the dots that have landed on the paint surface by the spray method can be specified, similarly, the deviation of the spray pattern cannot be accurately detected. For this reason, when the spray pattern is biased, it cannot be accurately adjusted so that the spray pattern is appropriate.

  Therefore, the present invention provides a spray pattern measuring method, a measuring device, a liquid spray device, a program, and a recording medium that can accurately detect the presence or absence of a spray pattern deviation of a functional film formed on a substrate to be sprayed. It is aimed.

In order to solve the above problems, a spray pattern measuring apparatus according to an aspect of the present invention is a method of reading image data obtained by reading a spray pattern of a functional film formed by spraying a functional liquid on a spray target substrate. From the center position, the first edge portion of the spray pattern with respect to the center position, which is the position immediately below the droplet discharge head on the spray target substrate, and the second edge portion on the opposite side thereof are obtained. A first distance to the edge of the first and a second distance from the center position to the second edge to determine the deviation of the spray pattern; And a determination unit that determines whether or not the deviation of the spray pattern is within an allowable range.

  According to one aspect of the present invention, it is possible to accurately measure the presence or absence of bias in the spray spray pattern of the functional film formed on the substrate to be sprayed, and to make the spray pattern accurate based on the measurement result. Can be adjusted.

It is a schematic diagram which shows the structure of the liquid spray apparatus provided with the spray pattern measuring apparatus of embodiment of this invention. It is a block diagram which shows the structure of the spray pattern measuring apparatus shown in FIG. FIG. 2 is a perspective view showing a liquid repellent film forming operation on a spray target substrate by the droplet discharge head shown in FIG. 1. FIG. 4 is a longitudinal sectional view showing a state where a residue is generated in an etching region after etching of the liquid repellent film in the spray target substrate shown in FIG. 3. It is a top view which shows the state shown in FIG. 3 is a flowchart showing a droplet density measuring operation in the spray pattern measuring apparatus shown in FIG. It is explanatory drawing which shows the change of the droplet density between each division area in the binarization data produced in the binarization process part shown in FIG. It is a graph which shows the change of the droplet density between each division area | region shown in FIG. FIG. 9A is an explanatory diagram showing a case where the droplet density of the liquid repellent film is high (in the case of A) on the spray target substrate shown in FIG. 3, and FIG. 9B is a diagram of the liquid repellent film. FIG. 9C is an explanatory diagram showing a case where the droplet density is low (in the case of B). FIG. 9C shows the case of A and the case of B in the XX ′ cross-sectional position in FIGS. Is a graph showing the height of relative droplet density. It is a flowchart which shows the spray pattern deviation measurement operation | movement in the spray pattern measuring apparatus shown in FIG. It is explanatory drawing of the relationship between the spray width in the spray pattern formed with the liquid spray apparatus shown in FIG. 1, and the height of a droplet discharge head.

Embodiment 1
(Outline of configuration of liquid spray device)
Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a schematic diagram showing a configuration of a liquid spray apparatus 1 including a spray pattern measuring apparatus according to an embodiment of the present invention.

  In the present embodiment, the liquid spray device 1 applies a liquid repellent 3 as a functional liquid to a spray target substrate 2 that is a component of an LED light source light emitting module, for example, and forms a liquid repellent film as a functional film. To do. For this purpose, as shown in FIG. 1, the liquid spray device 1 includes a work transfer device 11, a droplet discharge head (liquid spray means) 12, a liquid supply unit 13, a compressor 14, a pressure reducing valve 15, an electromagnetic valve 16, and a camera. (Imaging means) 17 and a spray pattern measuring device 18 are provided.

(Description of each part of the liquid spray device)
The work transport device 11 transports the work placed on the stage 19, that is, the spray target substrate 2 together with the stage 19 in one direction. The spray target substrate 2 and the droplet discharge head 12 may be moved relative to each other, and at least one of them may be moved in one direction.

  The droplet discharge head 12 sprays a liquid repellent as a functional liquid and applies it to the surface of the spray target substrate 2 on the stage 19. As a result, a liquid repellent film is formed on the surface of the spray target substrate 2. The liquid supply unit 13 stores the liquid repellent and supplies the liquid repellent to the droplet discharge head 12.

  The compressor 14 supplies compressed liquid to the liquid supply unit 13 via the first air path 20 so that the liquid repellent is supplied from the liquid supply unit 13 to the droplet discharge head 12 and is ejected from the droplet discharge head 12. Supply. Further, the compressor 14 supplies compressed air for controlling the spray pattern of the liquid repellent agent to the droplet discharge head 12 via the second air path 21.

  The pressure reducing valve 15 is for adjusting the pressure of the compressed air supplied from the compressor 14 to the first air path 20 and the second air path 21. The electromagnetic valve 16 is provided in the second air path 21 and opens and closes the second air path 21.

  The camera 17 is an image pickup device including an image pickup device such as a CCD, for example, and reads the entire spray pattern on the spray target substrate 2 by the liquid spray device 1 to obtain image data. The camera 17 is preferably disposed at the center position in the width direction of the spray target substrate 2 above the spray target substrate 2. This also applies to the droplet discharge head 12. The width direction is a direction orthogonal to the transport direction of the spray target substrate 2 by the work transport device 11.

(Spray pattern measuring device)
The spray pattern measuring device 18 measures the spray pattern on the surface of the spray target substrate 2 based on the spray pattern image data acquired by the camera 17. For this purpose, as shown in FIG. 2, the spray pattern measuring device 18 includes a control unit 31, a binarization processing unit 32, a calculation unit 33, a determination unit 34, a storage device 35, a display device 36, and a warning device (warning means). 37). FIG. 2 is a block diagram showing the configuration of the spray pattern measuring device 18.

  The control unit 31 controls the operation of each unit of the spray pattern measuring device 18. The binarization processing unit 32 converts the image data of the spray pattern on the spray target substrate 2 obtained from the camera 17 into binarized data (binary data).

  The calculation unit 33 sets a plurality of divided regions having the same size in the width direction (direction orthogonal to the transport direction) of the spray target substrate 2 in the binary image data obtained from the binarization processing unit 32, For each segmented region, the droplet density is obtained from the area (number of pixels) of the segmented region and the droplet area of the liquid repellent film 4 (liquid repellent 3) occupying the area of the segmented region (number of pixels in which the droplet exists). .

  The determination unit 34 compares the droplet density in the segmented area with a predetermined upper limit threshold and lower limit threshold, and determines whether or not the droplet density of the liquid repellent film 4 on the spray target substrate 2 is appropriate. The control unit 31 operates the warning device 37 when the determination unit 34 determines that the droplet density of the liquid repellent film 4 is not possible.

  The storage device 35 appropriately stores image data input from the camera 17, binarized data, a calculation result by the calculation unit 33, a determination result by the determination unit 34, and the like. The display device 36 includes a liquid crystal display, for example, and displays various types of information under the control of the control unit 31. The warning device 37 emits a warning sound or a voice, for example. The warning device 37 operates under the control of the control unit 31, and when the liquid density of the liquid repellent film 4 formed on the spray target substrate 2 is not possible, Tell the worker.

(Operation of liquid spray device)
In the above configuration, in the liquid spray device 1, as shown in FIGS. 1 and 3, the liquid repellent 3 is applied from the droplet discharge head 12 to the spray target substrate 2 disposed on the stage 19 of the work transfer device 11. The liquid repellent film 4 is formed on the upper surface of the spray target substrate 2 by spraying. FIG. 3 is a perspective view showing the operation of forming the liquid repellent film 4 on the spray target substrate 2 by the droplet discharge head 12.

  In this case, the liquid repellent 3 is sent from the liquid supply unit 13 to the droplet discharge head 12 by the compressed air supplied from the compressor 14 to the liquid supply unit 13 via the first air path 20, and from the droplet discharge head 12. The liquid repellent 3 is sprayed. Further, the shape (spray pattern) of the liquid repellent 3 sprayed from the droplet discharge head 12 by the compressed air is appropriately supplied from the compressor 14 via the second air path 21 to the droplet discharge head 12. Adjusted.

  In the present embodiment, the spray target substrate 2 is a mounting substrate used for the LED light source light emitting module. Therefore, as shown in FIG. 4, in the liquid repellent film 4 on the spray target substrate 2, the region that becomes the bottom surface of the phosphor resin layer is removed by etching using the etching mask 5. In this case, if the liquid density of the liquid repellent film 4 is unnecessarily high (the liquid repellent is wet on the entire surface of the spray target substrate 2), the liquid repellent film in the etching region 4b is also shown in FIG. 4 is not completely removed and a residue 4a is produced.

  FIG. 4 is a longitudinal sectional view showing a state in which the residue 4a is generated in the etching region 4b after etching the liquid repellent film 4 in the spray target substrate 2. FIG. FIG. 5 is a plan view of the same. In FIG. 5, 6 is a wire connection terminal.

  Next, the operation of the spray pattern measuring device 18 will be described. The spray pattern measurement device 18 performs a droplet density measurement operation and a spray pattern deviation measurement operation.

(Droplet density measurement operation of spray pattern measuring device)
The droplet density measurement operation is performed according to the following procedure. The binarization processing unit 32 binarizes the image data acquired from the camera 17 on the upper surface of the spray target substrate 2 (image data including the entire area in the width direction of the spray target substrate 2 (luminance data)). Data. This binarized data is two-dimensional data, and from the binarized data, it is possible to know a pixel where a droplet exists and a pixel where a droplet does not exist.

  Therefore, the calculation unit 33 obtains the droplet density of the liquid repellent film 4 from the binarized data. Next, the determination unit 34 determines that the liquid droplet density of the liquid repellent film 4 is within a predetermined threshold value, but determines that the liquid droplet density of the liquid repellent film 4 exceeds a predetermined threshold value. When the determination by the determination unit 34 becomes impossible, the warning device 37 performs a warning operation under the control of the control unit 31.

(Specific example of droplet density measurement operation)
Next, a specific example of the spray pattern deviation measuring operation will be described. FIG. 6 is a flowchart showing a droplet density measuring operation in the spray pattern measuring device 18.

  The state of the upper surface of the spray target substrate 2 on which the liquid repellent film 4 is formed by the droplet discharge head 12 is read by the camera 17. In this case, the camera 17 acquires image data (luminance data) of the entire area in the width direction of the spray target substrate 2 on the upper surface of the spray target substrate 2. In addition, when the camera 17 reads the upper surface of the spray object board | substrate 2, it is preferable to irradiate light to the upper surface of the spray object board | substrate 2 from a light source.

  The control unit 31 acquires the image data (S11), and the binarization processing unit 32 binarizes the image data (S12).

  The calculation unit 33 divides the binarized image data into a plurality of divided areas having the same size in the width direction of the spray target substrate 2 (S13). In this case, a segment area as a central area is set directly below the droplet discharge head 12. Therefore, in this case, there are the same number of segmented regions on the left and right of the central region (segmented region), and the number of segmented regions including the central region is an odd number.

  Next, for each segmented area, the calculation unit 33 determines the area of the segmented area (number of pixels) and the droplet area of the liquid repellent film 4 (liquid repellent 3) occupying the area of the segmented area (number of pixels in which droplets exist). From this, the droplet density is obtained (S14).

  Here, an example of the droplet density in each divided region will be described. FIG. 7 is an explanatory diagram showing a change in droplet density between the divided regions in the binarized data. FIG. 8 is a graph showing a change in droplet density between the divided regions shown in FIG. In FIG. 7, five square areas set in the binarized data indicate areas set in the five partitioned areas, respectively.

  When the liquid-repellent film 4 is formed on the spray target substrate 2 by spraying the liquid-repellent agent 3 from the droplet discharge head 12, the droplet density of the liquid-repellent film 4 is usually divided into the central section as shown in FIG. The region is the highest, and decreases in the order of left segmented region, right segmented region, left edge segmented region, and right edge segmented region.

  The determination unit 34 obtains, for example, the average droplet density of each segmented region and sets it as the droplet density of the segmented region (the entire liquid repellent film 4). Next, the obtained droplet density is compared with predetermined upper and lower thresholds (S15), and it is determined whether or not the droplet density of the liquid repellent film 4 is appropriate (S16). The upper limit threshold is, for example, the upper limit droplet density at which no residue 4a occurs after etching, and the lower limit threshold is the lower limit droplet density at which the liquid repellent film 4 can function as a liquid repellent film.

  In the above determination, when the droplet density is equal to or lower than the upper threshold (first condition) and equal to or higher than the lower threshold (second condition), the determination unit 34 allows the droplet density of the liquid repellent film 4 to be appropriate (appropriate). ) Is determined (S17). In this case, the warning operation by the warning device 37 is not performed. On the other hand, in the above determination, when the droplet density is higher than the upper threshold or lower than the lower threshold, it is determined that the droplet density of the liquid repellent film 4 is not possible (not appropriate) (S18). In this case, a warning operation by the warning device 37 is performed (S19). In addition to the operation of the warning device 37, the warning content may be displayed on the display device 36.

  When the warning device 37 receives a warning, the operator, for example, discharge time from the droplet discharge head 12 (movement of the spray target substrate 2 (stage 19)) so that the droplet density of the liquid repellent film 4 is appropriate. Adjust discharge conditions such as speed) and discharge pressure. In this case, the calculation unit 33 may obtain the discharge conditions to be adjusted and display them on the display device 36. Further, the adjustment of the discharge conditions may be automatically performed in the liquid spray apparatus 1.

  9A is an explanatory view showing a case where the liquid repellent film 4 has a high droplet density (in the case of A) on the substrate 2 to be sprayed, and FIG. 9B is a liquid droplet of the liquid repellent film 4. FIG. 9C is an explanatory diagram showing a case where the density is low (in the case of B), and FIG. 9C shows a relative relationship between the case of A and the case of B in the XX ′ cross-sectional position in FIGS. It is a graph which shows the height of typical droplet density.

  In the adjustment of the ejection amount of the liquid repellent 3 from the liquid droplet ejection head 12 described above, the liquid droplet density of the liquid repellent film 4 is as low as possible under the condition that the liquid droplet density is equal to or higher than the lower limit threshold (second condition). It is preferable to set as follows. For example, when A shown in FIG. 9C satisfies the first condition and B satisfies the second condition, the droplet density of the liquid repellent film 4 is higher than that of A. The case of B is preferred.

  As described above, when the droplet density of the liquid repellent film 4 formed on the spray target substrate 2 is not appropriate, a warning is issued from the warning device 37, and the liquid repellent film 4 is determined to be appropriate based on this warning. Can be adjusted. Thereby, when the liquid repellent film 4 is etched, it is possible to prevent the residue 4a from remaining in the etching region 4b.

(Spray pattern deviation measuring operation of spray pattern measuring device)
Next, the spray pattern deviation measuring operation of the spray pattern measuring device 18 will be described. The spray pattern deviation measuring operation is performed in the following procedure. The binarization processing unit 32 binarizes the image data (image data including the entire area in the width direction of the spray target substrate 2) acquired from the camera 17 on the upper surface of the spray target substrate 2 into binarized data. This binarized data is two-dimensional data, and from the binarized data, it is possible to know a pixel where a droplet exists and a pixel where a droplet does not exist.

Therefore, the calculation unit 33 obtains both edges (first edge and second edge) of the spray pattern by the droplet discharge head 12 in the width direction of the spray target substrate 2 from the binarized data. . Next, the calculation unit 33 calculates the first distance from the center position, which is the position immediately below the droplet discharge head 12 of the spray pattern, to the first edge and the second distance to the second edge. Ask for. Next, for example, the determination unit 34 determines that the difference between the first distance and the second distance (spray pattern deviation) is within a predetermined threshold, while the difference exceeds the predetermined threshold. It is impossible. When the determination by the determination unit 34 becomes impossible, the warning device 37 performs a warning operation under the control of the control unit 31.

(Specific example of spray pattern deviation measurement operation)
Next, a specific example of the spray pattern deviation measuring operation will be described. FIG. 10 is a flowchart showing a spray pattern deviation measuring operation in the spray pattern measuring apparatus 18.

  The operation from S31 to S33 is the same as the operation from S11 to S13 shown in FIG.

  The calculation unit 33 detects the edge of the spray pattern in the divided areas located at both ends in the arrangement direction of the divided areas (S34). In this edge detection operation, an approximate line is obtained by linearly complementing two or more droplets existing at the outermost portion in the width direction of the spray target substrate 2 with respect to the center position, which is a position immediately below the droplet discharge head 12. And the position of the approximate line is determined as the edge. If the edge cannot be detected in the divided areas located at both ends, the edge is similarly detected in the inner divided area.

  Next, the calculation unit 33 obtains a difference between the first distance from the center position to the first edge and the second distance from the center position to the second edge, and the difference is predetermined. It is determined whether it is within the allowable range. This determination is to determine whether the deviation of the spray pattern in the width direction of the spray target substrate 2 is within an allowable range, that is, whether the spray pattern is appropriate (S35).

  As a result of the above determination, when the spray pattern is appropriate (S36), the warning operation by the warning device 37 is not performed, and the process ends. On the other hand, if the spray pattern is not appropriate as a result of the above (S37), a warning is issued by the warning device 37 (S38).

  When receiving a warning from the warning device 37, the operator adjusts the liquid spray device 1 so that the spray pattern is appropriate. Here, in the spray pattern, the relationship between the spray width and the height of the droplet discharge head 12 is as shown in FIG. Therefore, the operator adjusts the height position of the droplet discharge head 12 with respect to the spray target substrate 2. Further, the spray pattern shift occurs due to a difference in spray angle between one side (first edge side) and the opposite side (second edge side) with respect to the center of the droplet discharge head 12. Therefore, the operator adjusts the air pressure supplied from the compressor 14 to the droplet discharge head 12 via the second air path 21 (see FIG. 1) to repel the droplet discharge head 12 that was initially conical. The spray shape of the liquid agent 3 is deformed into, for example, a fan shape and adjusted so that the spray pattern is appropriate. In this case, the calculation unit 33 may obtain these adjustment items and adjustment contents and display them on the display device 36. The spray pattern may be adjusted automatically in the liquid spray device 1.

  As described above, when the spray pattern of the liquid repellent film 4 formed on the spray target substrate 2 is not appropriate, that is, the spray pattern is biased to one side in the width direction of the spray target substrate 2 with respect to the center of the spray target substrate 2. In the case of a warning, the warning device 37 issues a warning. Therefore, based on this warning, the operator can adjust the liquid repellent film 4 to be appropriate. As a result, it is possible to prevent the liquid repellent film 4 from being formed with a liquid droplet density that is biased in the width direction on the spray target substrate 2.

  In the above embodiment, the droplet density measurement operation and the spray pattern deviation measurement operation are described independently, but both of these operations may be performed as a series of operations.

[Embodiment 2]
Another embodiment of the present invention will be described below. Here, another example of the droplet density measuring operation will be described with reference to FIG. Note that the operations from S11 to S14 in FIG. 6 are the same as those described above, and thus the description thereof is omitted.

  As described above, the calculation unit 33 includes a plurality of sections having the same size in the width direction (direction orthogonal to the transport direction) of the spray target substrate 2 in the binary image data obtained from the binarization processing unit 32. An area is set, and for each divided area, from the area (number of pixels) of the divided area and the droplet area of the liquid repellent film 4 (liquid repellent 3) occupying the area of the divided area (number of pixels in which the droplet exists), Determine droplet density.

  The determination unit 34 includes a region having the highest droplet density, that is, the highest density segmented region (center segmented region) and a segment region having the lowest droplet density, that is, the lowest density segmented region (left edge segmented region and right edge segmented region). Is compared with a predetermined threshold, that is, an upper limit threshold and a lower limit threshold (S15), and it is determined whether or not the droplet density of the liquid repellent film 4 is appropriate (S16). As described above, the upper limit threshold is, for example, the upper limit droplet density at which the residue 4a does not occur after etching, and the lower limit threshold is the upper limit droplet density at which the liquid repellent film 4 can function as a liquid repellent film. is there.

  In the determination, the determination unit 34 determines that the droplet density in the highest density segmented area is equal to or lower than the upper limit threshold (first condition) and the droplet density in the lowest density segmented area is equal to or higher than the lower limit threshold (second condition). Next, it is determined that the droplet density of the liquid repellent film 4 is acceptable (appropriate) (S17). In this case, warning by the warning device 37 is not performed. On the other hand, in the above determination, when the droplet density in the highest density segmented area is higher than the upper limit threshold or the droplet density in the lowest density segmented area is lower than the lower limit threshold, the droplet density of the liquid repellent film 4 is not allowed. It is determined that it is not appropriate (S18). In this case, a warning is issued by the warning device 37 (S19). Other operations are as described above.

[Embodiment 3]
The control blocks (particularly the control unit 31, the binarization processing unit 32, the calculation unit 33, and the determination unit 34) of the spray pattern measuring apparatus 18 are realized by a logic circuit (hardware) formed in an integrated circuit (IC chip) or the like. Alternatively, it may be realized by software using a CPU (Central Processing Unit).

  In the latter case, the spray pattern measuring device 18 includes a CPU that executes instructions of a program that is software for realizing each function, and a ROM (Read Only Memory) in which the program and various data are recorded so as to be readable by the computer (or CPU). ) Or a storage device (these are referred to as “recording media”), a RAM (Random Access Memory) for expanding the program, and the like. And the objective of this invention is achieved when a computer (or CPU) reads the said program from the said recording medium and runs it. As the recording medium, a “non-temporary tangible medium” such as a tape, a disk, a card, a semiconductor memory, a programmable logic circuit, or the like can be used. The program may be supplied to the computer via an arbitrary transmission medium (such as a communication network or a broadcast wave) that can transmit the program. The present invention can also be realized in the form of a data signal embedded in a carrier wave in which the program is embodied by electronic transmission.

[Summary]
The spray pattern measuring apparatus according to the first aspect of the present invention is obtained by reading a spray pattern of a functional film (liquid repellent film 4) formed by spraying a functional liquid (liquid repellent 3) on a substrate 2 to be sprayed. From the obtained image data, a first edge portion of the spray pattern and a second edge portion on the opposite side to the center position which is a position immediately below the droplet discharge head 12 on the spray target substrate 2 are obtained, and the center A calculation unit 33 that compares a first distance from a position to the first edge and a second distance from the center position to the second edge to determine a bias of the spray pattern; And a determination unit 34 for determining whether or not the deviation of the spray pattern obtained by the calculation unit 33 is within an allowable range.

In the spray pattern measuring method according to the fifth aspect of the present invention, the liquid on the spray target substrate is obtained from the image data obtained by reading the spray pattern of the functional film formed by spraying the functional liquid on the spray target substrate. A first edge of the spray pattern and a second edge on the opposite side to the center position, which is a position immediately below the droplet discharge head, are obtained, and a first distance from the center position to the first edge And the second distance from the center position to the second edge to determine the deviation of the spray pattern, and the deviation of the spray pattern obtained in the deviation measurement step is within an allowable range. It is the structure provided with the bias suitability determination process which determines whether it is inside.

According to the above configuration, the computing unit 33 (in the bias measurement step) uses the first spray pattern for the center position, which is the position immediately below the droplet discharge head 12 on the spray target substrate 2, from the image data of the spray pattern. And the second edge on the opposite side. The image data is obtained by reading a spray pattern of a functional film formed by spraying a functional liquid on a spray target substrate. Further, the calculation unit 33 compares the first distance from the center position to the first edge and the second distance from the center position to the second edge to determine the spray pattern bias. .

  The determination unit 34 (in the suitability determination step) determines whether or not the spray pattern bias obtained in the calculation unit 33 (bias measurement step) is within an allowable range.

  This makes it possible to accurately measure the presence or absence of the spray pattern of the functional film formed on the substrate 2 to be sprayed, and to adjust the spray pattern to be accurate based on the measurement result. it can.

  In the spray pattern measuring device according to aspect 2 of the present invention, in the above aspect 1, the calculation unit 33 obtains the droplet density of the spray pattern from the image data, and the determination unit 34 uses the calculation unit 33. The obtained droplet density may be compared with a predetermined threshold value to determine the suitability of the droplet density.

  According to the above configuration, the calculation unit further obtains the droplet density of the spray pattern from the image data, and the determination unit further compares the droplet density obtained by the calculation unit 33 with a predetermined threshold value. The suitability of the droplet density is determined. Thereby, based on the determination result of the suitability of the droplet density, it is possible to adjust the droplet density to be appropriate when the droplet density is not appropriate. Therefore, when the functional film is the liquid repellent film 4 to be etched, for example, the liquid droplet density of the liquid repellent film 4 can be set to a droplet density that does not cause a residue after etching.

  In the spray pattern measuring apparatus according to aspect 3 of the present invention, in the above aspect 1 or 2, the calculation unit 33 is configured to calculate the bias of the spray pattern, and the first 33 of the spray target substrate 2 in the image data. A plurality of segmented regions are set between the edge in the edge direction and the edge in the second edge direction, and the processing for obtaining the first edge and the second edge is performed in the plurality of areas. It is good also as a structure performed in the division area of the both ends in a division area.

  According to said structure, the process which calculates | requires the 1st edge part and 2nd edge part of a spray pattern is the edge part of the 2nd edge direction from the edge part of the 1st edge direction of the spray object board | substrate 2 Since the processing is performed in the partitioned regions at both ends of the plurality of partitioned regions set up to this time, this processing can be efficiently performed for a narrow range.

  The spray pattern measurement device according to aspect 4 of the present invention is the spray pattern measurement device according to any one of aspects 1 to 3, in which the determination result for the spray pattern by the determination unit 33 does not approve the current spray pattern. Further, it may be configured to include warning means (warning device 37) for issuing a warning.

  According to said structure, based on the warning of a warning means, it can adjust so that a spray pattern may become an appropriate thing.

  The liquid spray apparatus according to the sixth aspect of the present invention includes the spray pattern measuring device 18 according to any one of the first to fourth aspects and the liquid droplet ejection head 12, and the liquid droplet ejection head 12 is placed on the spray target substrate 2. Liquid spray means (liquid spray device 1) for spraying a functional liquid to form a spray pattern of a functional film on the upper surface of the spray target substrate 2, and reading the spray pattern on the spray target substrate to obtain image data It is the structure provided with the imaging means (camera 17) to acquire.

  According to the above configuration, the state of the functional film formed on the spray target substrate 2 can be accurately measured by the spray pattern measuring device 18, and the spray pattern is made accurate based on the measurement result. Can be adjusted.

  The spray pattern measuring apparatus according to each aspect of the present invention may be realized by a computer. In this case, the spray pattern measuring apparatus is operated on each computer by causing the computer to operate as each unit included in the spray pattern measuring apparatus. The spray pattern measuring apparatus program realized by the above and a computer-readable recording medium on which the program is recorded also fall within the scope of the present invention.

  The present invention is not limited to the above-described embodiments, and various modifications are possible within the scope shown in the claims, and embodiments obtained by appropriately combining technical means disclosed in different embodiments. Is also included in the technical scope of the present invention. Furthermore, a new technical feature can be formed by combining the technical means disclosed in each embodiment.

  The present invention relates to a semiconductor device such as an LED light source light emitting module, which includes a step of forming a liquid repellent film by spraying a liquid repellent on the mounting substrate in order to form a resin mold layer on the mounting substrate, for example. Can be used for manufacturing.

DESCRIPTION OF SYMBOLS 1 Liquid spray apparatus 2 Board | substrate to be sprayed 3 Liquid repellent agent 4 Liquid repellent film 4a Residue 4b Etching area 11 Work conveyance apparatus 12 Droplet discharge head (liquid spray means)
13 Liquid supply unit 14 Compressor 15 Pressure reducing valve 16 Solenoid valve 17 Camera (imaging means)
18 spray pattern measuring device 19 stage 20 first air path 21 second air path 31 control unit 32 binarization processing unit 33 calculation unit 34 determination unit 35 storage device 36 display device 37 warning device (warning means)

Claims (5)

Spray from the image data obtained by reading the spray pattern of the functional film formed by spraying the functional liquid on the spray target substrate to the center position which is the position immediately below the droplet discharge head on the spray target substrate Determining a first edge of the pattern and a second edge opposite to the first edge; a first distance from the center position to the first edge; and a distance from the center position to the second edge. A calculation unit for comparing the second distance and determining the bias of the spray pattern;
A spray pattern measuring apparatus, comprising: a determination unit that determines whether or not the deviation of the spray pattern obtained by the calculation unit is within an allowable range. The calculation unit obtains a droplet density of the spray pattern from the image data,
The spray pattern measuring apparatus according to claim 1, wherein the determination unit determines the suitability of the droplet density by comparing the droplet density obtained by the calculation unit with a predetermined threshold value.   In the processing for obtaining the deviation of the spray pattern, the calculation unit includes a portion between the end in the first edge direction and the end in the second edge direction of the substrate to be sprayed in the image data. 3. The process according to claim 1, wherein a plurality of segmented areas are set, and the process of obtaining the first end and the second end is performed in the segmented areas at both ends of the plurality of segmented areas. Spray pattern measuring device.   The warning means which issues a warning when the determination result with respect to the said spray pattern by the said determination part is what does not approve the present spray pattern, The any one of Claim 1 to 3 characterized by the above-mentioned. The spray pattern measuring apparatus as described. Spray from the image data obtained by reading the spray pattern of the functional film formed by spraying the functional liquid on the spray target substrate to the center position which is the position immediately below the droplet discharge head on the spray target substrate Determining a first edge of the pattern and a second edge opposite to the first edge; a first distance from the center position to the first edge; and a distance from the center position to the second edge. A bias measurement step for comparing the second distance to determine the spray pattern bias;
A spray pattern measuring method, comprising: a bias suitability determining step of determining whether or not the spray pattern bias determined in the bias measuring step is within an allowable range.