JP6160169B2 - Suspension board, suspension, suspension with element, and hard disk drive - Google Patents

Description

  The present invention relates to a suspension substrate that can perform a precise tracking operation and has little damage to piezoelectric elements.

  In recent years, due to the spread of the Internet and the like, there has been a demand for an increase in the amount of information processing of personal computers and an increase in information processing speed, and along with this, the capacity of hard disk drives (HDD) incorporated in personal computers has increased. Increasing information transmission speed is required.

  A hard disk drive is a magnetic disk that is a magnetic recording medium, a spindle motor that rotates the magnetic disk at high speed, a magnetic head that reads or writes information on the magnetic disk, and each component that moves it while holding it with high precision. Drive control circuit and signal processing circuit.

  In addition, a component called a magnetic head suspension that supports the magnetic head used in this hard disk drive also has a signal line such as a copper wiring directly formed on a stainless steel spring from a conventional type in which a signal line such as a gold wire is connected. The so-called wireless suspension is now integrated into a wiring integrated type (flexure). The suspension having such a configuration has at least a flexure (hereinafter, may be referred to as a suspension substrate), and is usually connected to or integrated with a load beam formed of a stainless steel leaf spring material. And a metal thin plate including a base plate having a boss portion used for connection with the actuator arm.

  Further, as the capacity of a hard disk drive (HDD) increases, that is, the recording density of the magnetic disk increases, the recording track on the magnetic disk becomes finer. Therefore, in order to keep the magnetic head on the desired recording track. Therefore, a tracking operation that can be finely adjusted is required.

In response to such demands, a method has been proposed in which the piezoelectric element, which is a fine movement actuator, is mounted on the tail side of the suspension substrate plate, and only the tip of the load beam is moved by this fine movement actuator (patent) Reference 1).
A piezoelectric element is an element that expands and contracts when a voltage is applied. By applying a voltage to this piezoelectric element, a magnetic head slider mounted on the tip is moved minutely to perform a precise tracking operation. It is.

JP 2002-251853 A

  However, there is a problem that even if such a suspension substrate is used, a sufficiently precise tracking operation cannot be performed.

The main object of the present invention is to provide a suspension substrate that can perform a precise tracking operation and that has little damage to piezoelectric elements.

  As a result of repeated studies to solve the above problems, the present inventors have arranged a piezoelectric element so as to sandwich the tongue portion on which the magnetic head slider of the suspension substrate is mounted in the width direction. Since the tracking operation can be performed, and when the tongue portion of the suspension substrate is arranged so as to be sandwiched in the width direction, it has been found that the piezoelectric element tends to break, and the present invention has been completed. is there.

  That is, the present invention is a suspension substrate having a metal support substrate, an insulating layer formed on the metal support substrate, and a wiring layer formed on the insulating layer, wherein the metal support substrate is A tongue portion, a support arm portion that supports the tongue portion, an outrigger portion disposed through a first opening region formed on the head side of the tongue portion, and a tail side of the tongue portion. A rear arm portion disposed through a second opening region and connected to the support arm portion and the outrigger portion, and the tongue portion is sandwiched in the width direction of the suspension substrate. A connected piezoelectric element connecting portion is formed, and the piezoelectric element connecting portion includes a head side connecting portion and a tail side connecting portion to which both ends of the piezoelectric element are fixed on the head side and the tail side. A first limiter for connecting the head side connecting portion and the outrigger portion via the first opening region is formed, and the rear member disposed closer to the tail side than the tail side connecting portion and the tail side connecting portion is provided. A suspension substrate, characterized in that a second limiter connected through the second opening region is formed.

According to the present invention, since the piezoelectric element connecting portion is formed so as to sandwich the tongue portion in the width direction, a precise tracking operation can be performed.
In addition, since the first limiter and the second limiter are formed, the stress on the piezoelectric element can be reduced and the piezoelectric element can be less damaged.

  The present invention provides a suspension including the above-described suspension substrate.

  According to the present invention, by using the above-described suspension substrate, a precise tracking operation can be performed, and the piezoelectric element can be less damaged.

  The present invention also provides an element-equipped suspension comprising the above-described suspension and an element mounted in an element mounting region of the suspension.

  According to the present invention, by using the above-described suspension, a precise tracking operation can be performed and the piezoelectric element can be hardly damaged.

  The present invention also provides a hard disk drive having the above-described suspension with an element.

  According to the present invention, by using the above-described suspension with an element, a precise tracking operation can be performed, and the piezoelectric element can be hardly damaged.

In the present invention, there is an effect that it is possible to perform a precise tracking operation and to provide a suspension substrate in which a piezoelectric element is less damaged.

It is a schematic plan view which shows an example of the board | substrate for suspensions of this invention. It is a schematic plan view which shows the other example of the board | substrate for suspensions of this invention. FIG. 3 is a sectional view taken along line B-B in FIG. 2. It is explanatory drawing explaining the piezoelectric element connection part in this invention. It is explanatory drawing explaining the piezoelectric element connection part in this invention. It is explanatory drawing explaining the piezoelectric element connection part in this invention. It is the XX sectional view taken on the line of FIG. It is explanatory drawing explaining the 1st limiter in this invention. It is explanatory drawing explaining the 1st limiter in this invention. It is explanatory drawing explaining the 1st limiter in this invention. It is explanatory drawing explaining the 1st limiter in this invention. It is explanatory drawing explaining the 1st limiter in this invention. It is explanatory drawing explaining the 1st limiter in this invention. It is explanatory drawing explaining the 1st limiter in this invention. It is explanatory drawing explaining the metal support substrate in this invention. It is process drawing which shows an example of the manufacturing method of the board | substrate for suspensions of this invention. It is a schematic plan view which shows an example of the suspension using the board | substrate for suspensions of this invention. It is a schematic plan view which shows an example of the suspension with an element using the suspension of this invention. It is a schematic plan view which shows an example of the hard disk drive using the suspension with an element of this invention.

The present invention relates to a suspension board, a suspension using the same, a suspension with an element, and a hard disk drive.
The suspension substrate, suspension, suspension with element, and hard disk drive of the present invention will be described in detail below.

A. First, the suspension substrate of the present invention will be described.
The suspension substrate of the present invention is a suspension substrate having a metal support substrate, an insulating layer formed on the metal support substrate, and a wiring layer formed on the insulating layer, wherein the metal support The substrate is formed on a tongue portion, a support arm portion that supports the tongue portion, an outrigger portion disposed through a first opening region formed on a head side of the tongue portion, and a tail side of the tongue portion. A rear arm connected to the support arm portion and the outrigger portion, and the tongue so as to sandwich the tongue portion in the width direction of the suspension substrate. The piezoelectric element connecting portion is connected to the head portion, and the piezoelectric element connecting portion is connected to the head side and the tail side. A first limiter is formed to connect the head side connection portion and the outrigger portion via the first opening region, and is disposed closer to the tail side than the tail side connection portion and the tail side connection portion. A second limiter for connecting the rear member thus formed through the second opening region is formed.

  Such a suspension substrate of the present invention will be described with reference to the drawings. FIG. 1 is a schematic view showing an example of a general suspension substrate. FIG. 1A is a schematic plan view of a suspension substrate, and FIG. 1B is a cross-sectional view taken along line AA in FIG. In FIG. 1A, illustration of the insulating layer and the cover layer is omitted for convenience. A suspension substrate 100 shown in FIG. 1A includes a recording / reproducing element mounting region 101 formed at one tip portion, an external circuit board connection region 102 formed at the other tip portion, and a recording / playback device. A plurality of wiring layers 103a to 103d for electrically connecting the element mounting region 101 and the external circuit board connection region 102 are provided. The wiring layer 103a and the wiring layer 103b are a pair of wiring layers. Similarly, the wiring layer 103c and the wiring layer 103d are also a pair of wiring layers. One of these two wiring layers is a wiring layer for writing (for recording and writing), and the other is a wiring layer for reading (for reproduction and reading). On the other hand, as shown in FIG. 1B, the suspension substrate 100 includes a metal support substrate 1, an insulating layer 2 formed on the metal support substrate 1, and a wiring layer 3 formed on the insulating layer 2. And a cover layer 4 formed on the wiring layer 3.

FIG. 2 is a schematic plan view illustrating the head portion in the suspension substrate of the present invention, and FIG. 3 is a cross-sectional view taken along the line BB of FIG.
As illustrated in FIGS. 2 and 3, the suspension substrate 10 of the present invention is formed on the metal support substrate 1, the insulating layer 2 formed on the metal support substrate 1, and the insulating layer 2. A suspension substrate 10 having a wiring layer 3, wherein the metal support substrate 1 includes a tongue portion 1a, a support arm portion 1b that supports the tongue portion 1a, and the suspension substrate 10 of the tongue portion 1a. An outrigger portion 1c disposed through a first opening region formed on the head side of the head portion, and a second opening region formed on the tail side of the suspension substrate 10 of the tongue portion 1a, A support arm portion 1b and a rear arm portion 1d connected to the outrigger portion 1c, and the tongue portion 1a is sandwiched in the width direction of the suspension substrate 10. The piezoelectric element connecting portion 11 connected to the tongue portion 1a is formed on the head side and the tail side of the suspension substrate 10 so that both ends of the piezoelectric element are fixed to the head side connection. A first limiter 12a is formed to connect the head side connection portion 11a and the outrigger portion 1c through the first opening region, and the tail side connection portion 11b and the tail side connection portion 11b. A second limiter 12b that connects the rear member via the second opening region is formed.
In this example, the rear member is the rear arm portion 1d.

According to the present invention, since the piezoelectric element connecting portion is formed so as to sandwich the tongue portion in the width direction, when the piezoelectric element is arranged, a precise tracking operation is performed by the expansion and contraction operation of the piezoelectric element. Can be.
A first limiter for connecting the head-side connection portion and the outrigger portion via the first opening region; and a rear member disposed on the tail side from the tail-side connection portion and the tail-side connection portion. When the second limiter to be connected through the second opening region is formed, that is, when the limiter is disposed at both ends in the longitudinal direction of the piezoelectric element, the piezoelectric element connecting portion and its surrounding members greatly vary. Even so, the positional relationship between the head-side connection portion and the tail-side connection portion that fixes both ends of the piezoelectric element, for example, the distance in the longitudinal direction between the two connection portions and the distance in the thickness direction between the two connection portions is predetermined. It can suppress within the range.
For this reason, the stress to the piezoelectric element can be effectively reduced, and the piezoelectric element can be less damaged.
Furthermore, it can suppress that the said tongue part fluctuates excessively by having the said 1st limiter.

The suspension substrate of the present invention includes at least the metal support substrate, the insulating layer, the wiring layer, the piezoelectric element connection portion, and the limiter.
Hereinafter, each structure of the suspension substrate of the present invention will be described.

1. Piezoelectric Element Connection Portion The piezoelectric element connection portion in the present invention is connected to the tongue portion so as to sandwich the tongue portion in the width direction of the suspension substrate.
The piezoelectric element connecting portion has a head side connecting portion and a tail side connecting portion to which both ends of the piezoelectric element are fixed on the head side and the tail side. By transmitting the expansion / contraction operation of the piezoelectric element with both ends fixed to the tongue portion, the position and orientation of the tongue portion are finely adjusted.

Here, the head side is one tip side on which an element such as a magnetic head slider is mounted, and the tail side is the other tip side where the external circuit board connection region is formed.
In addition, sandwiching the tongue portion in the width direction of the suspension substrate means that two piezoelectric element connecting portions are formed so as to sandwich the tongue portion in the width direction, that is, in the width direction of the suspension substrate. The piezoelectric element connecting portion, the tongue portion, and the piezoelectric element connecting portion are arranged in this order.
The width direction (short direction) of the suspension substrate means a direction orthogonal to the longitudinal direction of the suspension substrate.
The longitudinal direction (longitudinal direction) of the suspension substrate refers to a direction connecting the head side and the tail side, and is parallel to, for example, a center line connecting a plurality of reference holes at the center of the suspension substrate. Usually, the direction perpendicular to the direction of rotation of the disk when writing to or reading from the hard disk.

The term “connected to the tongue portion” refers to a state in which the expansion and contraction operation of the piezoelectric element can be transmitted to the tongue portion by arranging the piezoelectric element. Is not limited to a mode of being directly connected so as to be in direct contact with the tongue portion, but includes a mode of being indirectly connected through a wiring layer having a wiring layer and an insulating layer that supports the wiring layer.
FIG. 2 already described shows an example in which the piezoelectric element connecting portion is connected to the tongue portion via the wiring portion connected to the tongue portion.

The positions where the head-side connection portion and the tail-side connection portion are formed in the longitudinal direction of the suspension substrate are different from those arranged on the head side and tail side of the piezoelectric element connection portion, that is, in the longitudinal direction of the suspension substrate. It will not specifically limit if it is arrange | positioned in a position.
In the present invention, it is preferable that the tongue portion is included between the head side connection portion and the tail side connection portion, and in particular, it is a portion including all of the longitudinal direction of the tongue portion. preferable.
In addition, the distance between the head side connecting portion and the tail side connecting portion specifically refers to a distance from the head side end of the head side connecting portion to the tail side end of the tail side connecting portion in FIG. It is.
FIG. 2 which has already been described shows an example in which all the tongue portions are formed so as to be included between the head side connection portion and the tail side connection portion. FIG. 4 shows an example in which only a part of the tongue portion in the longitudinal direction is included between the head side connection portion and the tail side connection portion.
Moreover, since the reference numerals in FIG. 4 indicate the same members as those in FIG. 2, the description thereof is omitted here.

The direction of formation of the suspension substrate between the head-side connecting portion and the tail-side connecting portion with respect to the longitudinal direction is not particularly limited as long as the expansion / contraction operation of the piezoelectric element fixed to both connecting portions can be transmitted to the tongue portion. It is not limited. In the present invention, the angle with respect to the longitudinal direction of the suspension substrate is preferably a direction that is within a range of ± 45 °, and is particularly preferably a direction that is within a range of ± 30 °. The direction is ± 0 °, that is, the direction parallel to the longitudinal direction. This is because the expansion and contraction operation of the piezoelectric element fixed to both connection portions can be efficiently transmitted to the tongue portion by being at the above angle.
Further, the two connection portions formed via the tongue portions are usually formed so as to be parallel.
In addition, the angle with respect to the longitudinal direction in the present invention specifically refers to an angle α formed by the longitudinal direction and the center of gravity of both connection portions, as shown in FIG.
Also, the reference numerals in FIG. 5 indicate the same members as in FIG.

  The formation position in the width direction of the head side connection portion and the tail side connection portion is outside in the width direction from the outer edge portion of the tongue portion, and the expansion and contraction operation of the piezoelectric element fixed to both connection portions is transmitted to the tongue portion. Although it is not particularly limited as long as it can be used, it is usually between the outrigger portion and the rear arm portion and the tongue portion in plan view.

  The shape of the head-side connection portion and the tail-side connection portion in plan view is not particularly limited as long as the piezoelectric element can be stably fixed, and can be a quadrangular shape or a circular shape. The area in plan view is appropriately set according to the size of the suspension substrate and the piezoelectric element of the present invention.

The material constituting the piezoelectric element connecting portion is not particularly limited as long as it can transmit the expansion and contraction operation of the piezoelectric element to the tongue portion. Even a conductive material may be an insulating material. Even if it exists, the material which combined both may be sufficient.
In the present invention, it is preferable that at least one member constituting the suspension substrate of the present invention is included, and in particular, the member is selected from the members constituting the suspension substrate of the present invention. Is preferred.
This is because it can be formed at the same time as the above-described members are formed, and can be easily formed at low cost.
Here, as a member constituting the suspension substrate of the present invention, specifically, at least the metal support substrate, the insulating layer, and the wiring layer can be mentioned, and a cover layer, a protective plating layer, and the like can also be used. .
In the present invention, among them, the insulating layer and / or the cover layer is preferably included, and the insulating layer is preferably included. This is because the expansion / contraction operation of the piezoelectric element can be effectively transmitted to the tongue portion.
FIG. 6 is a schematic plan view showing the periphery of the first limiter, and FIG. 7 is a sectional view taken along line XX of FIG. 6 and 7 show an example in which the piezoelectric element connecting portion is made of an insulating layer.
6 and 7 indicate the same members as those in FIG. 2, and thus the description thereof is omitted here.

The shape of the piezoelectric element connecting portion in plan view is such that an opening is formed between the head side connecting portion and the outrigger portion connected by the first limiter and the second limiter, and between the tail side connecting portion and the rear member. There is no particular limitation as long as it has a portion (outer edge portion) and can arrange a piezoelectric element, but the tail side end of the head side connecting portion and the head side of the tail side connecting portion are not limited. It is preferable that an opening is provided between the end portions, and in particular, the opening is an opening including all of the piezoelectric elements arranged in a plan view, that is, the head side connection portion and the tail. Except for the side connection portion, it is preferable that the piezoelectric element does not overlap in plan view. This is because the operation of the piezoelectric element can be effectively transmitted.
In addition, the piezoelectric element connecting portion sandwiching the tongue portion may be one in which both piezoelectric element connecting portions are connected at locations other than the tongue portion in plan view, and are connected at locations other than the tongue portion. It may not be.
Note that FIG. 2 already described shows an example in which the piezoelectric element connecting portion has an opening including all of the piezoelectric elements arranged in a plan view. Moreover, both the piezoelectric element connection parts which pinch | interpose a tongue part are connected on the said 1st opening area | region on planar view, and the example connected at locations other than the said tongue part is shown.

2. Limiter The limiter in the present invention has a first limiter and a second limiter.

(1) 1st limiter The 1st limiter in this invention connects the said head side connection part and the said outrigger part via the said 1st opening area | region.

Here, to connect the head side connecting portion and the outrigger portion is formed continuously between the head side connecting portion and the outrigger portion, and the head side connecting portion This refers to a portion of the head side from the tail side end.
In FIG. 6 and FIG. 7 which have already been described, the first limiter includes a region including only the insulating layer 2 and a region including the insulating layer 2 and the cover layer 4 laminated on the insulating layer 2 in plan view. The example which has is shown. In addition, an example in which the first limiter 12a and the piezoelectric element connecting portion 11 partially overlap is shown.
Further, the connection through the first opening region means that the connection portion with the head side connection portion which is the tail side end portion of the first limiter sandwiched by the first opening region is the tail of the head side connection portion. That is, it is the head side from the side end.
Specifically, the connection location is a location indicated by b in FIG.
FIG. 8 shows an example in which the connection location b of the first limiter with the head side connection portion is closer to the head side than the tail side end portion c of the head side connection portion.
FIG. 9 shows an example in which the connection point b of the first limiter is on the tail side with respect to the tail side end portion c of the head side connection portion.
Also, the reference numerals in FIGS. 8 and 9 indicate the same members as those in FIG.

The constituent material of the first limiter is not particularly limited as long as the relative positional relationship between the head side connecting portion and the outrigger portion can be suppressed within a predetermined range, and has conductivity. It may be a material, an insulating material, or a combination of both, and may be the same as the constituent material of the piezoelectric element connecting portion.
In the present invention, it is preferable that at least one member constituting the suspension substrate of the present invention is included, and in particular, the member is selected from the members constituting the suspension substrate of the present invention. Is preferred.
This is because it can be formed at the same time as the above-described members are formed, and can be easily formed at low cost.
Moreover, in this invention, it is preferable that the same material as the said piezoelectric element connection part is included. The constituent material of the first limiter includes the above material and is formed continuously with the piezoelectric element connection portion (head side connection portion), so that the stability of the connection with the head side connection portion is excellent. Because it can.

As the constituent material of the first limiter, specifically, a laminated structure including the insulating layer 2 and the cover layer 4 as shown in FIGS. 6 and 7 already described, and an insulating layer as shown in FIG. 11, a cover layer 4 as illustrated in FIG. 11, a laminated structure including the insulating layer 2 and the wiring layer 3 as illustrated in FIG. 12, the surface being covered with a protective plating layer 5, As illustrated in FIG. 13, a stacked structure including the insulating layer 2, the wiring layer 3, and the cover layer 4 may be included.
As shown in FIGS. 12 and 13, the wiring layer 3 used as the first limiter is preferably a dummy wiring that is not electrically connected to another wiring layer.
Further, when a plurality of the first limiters are formed, each first limiter may be made of the same material, but may be made of different materials.
10 to 13 show other examples of the sectional view taken along the line XX of FIG. 6, and the reference numerals in FIGS. 10 to 13 show the same members as those in FIG. Therefore, explanation here is omitted.
7 and 10 to 13 show examples including the same member as the piezoelectric element connecting portion.

  The plan view shape of the first limiter is not particularly limited as long as the relative positional relationship between the head-side connecting portion and the outrigger portion can be suppressed within a predetermined range even by expansion and contraction of the piezoelectric element. It is not a thing but it can be set as arbitrary shapes, such as curvilinear form and bending shape.

The total length of the first limiter is not particularly limited as long as the relative positional relationship between the head side connecting portion and the outrigger portion can be suppressed within a predetermined range even by expansion and contraction movement of the piezoelectric element. In general, it is longer than the longest straight distance between the head side connecting portion and the fixed portion to the outrigger portion. The total length of the first limiter is preferably such a length that tension is applied before the positional relationship of the head-side connecting portion with respect to the outrigger portion exceeds the desired range, and specifically, the longest straight line. It is preferably within a range of 110% to 130% with respect to the distance.
The width of the first limiter is preferably in the range of 50 μm to 400 μm, more preferably in the range of 50 μm to 300 μm, and still more preferably in the range of 50 μm to 200 μm.

  The thickness of the first limiter is not particularly limited as long as the relative positional relationship between the head side connecting portion and the outrigger portion can be suppressed within a predetermined range even by expansion and contraction of the piezoelectric element. Rather, it is appropriately set according to the material constituting the first limiter, for example, preferably in the range of 5 μm to 30 μm, more preferably in the range of 5 μm to 18 μm, More preferably, it is in the range of 5 μm to 12 μm. When the first limiter is made of a member selected from the members constituting the suspension substrate of the present invention, the total thickness of the members constituting the first limiter is obtained.

The position in the longitudinal direction of the connecting portion with the head side connecting portion of the first limiter is not particularly limited as long as it is on the head side from the tail side end portion of the head side connecting portion.
In the present invention, it is particularly preferable that the connection portion is included on the head side from the center in the longitudinal direction of the head side connection portion, and in particular, included on the head side from the head side end portion of the head side connection portion. It is preferable.
In addition, as the position in the width direction of the connection portion of the first limiter with the head-side connection portion, the relative positional relationship between the head-side connection portion and the outrigger portion is also determined by a predetermined expansion / contraction movement of the piezoelectric element. It is not particularly limited as long as it can be suppressed within the range, and is appropriately set depending on the size of the piezoelectric element.

It is preferable that a distance in a longitudinal direction of a connection portion between the first limiter and the head side connection portion and a connection portion between the first limiter and the outrigger portion is in a range of 0.030 mm to 0.200 mm. Especially, it is preferable that it exists in the range of 0.040 mm-0.120 mm, and it is especially preferable that it exists in the range of 0.060 mm-0.100 mm. This is because the expansion and contraction operation of the piezoelectric element can be facilitated by the distance.
In addition, the connection location with the said outrigger part of the said 1st limiter means the head side edge part of the 1st limiter clamped by the said 1st opening area | region.
Further, the distance in the longitudinal direction between the two connection points is specifically the distance indicated by f in FIG.

The formation angle with respect to the longitudinal direction of the suspension substrate between the connection portion with the head side connection portion and the connection portion with the outrigger portion is preferably within a range of ± 60 °, and more preferably within a range of ± 30 °. In particular, it is preferable that ± 0 °, that is, the formation direction between the head-side connection portion and the outrigger portion is parallel to the longitudinal direction. This is because the relative positional relationship between the head side connecting portion and the outrigger portion can be effectively suppressed within a predetermined range by being the connecting portion.
The formation angle of the suspension substrate between the connection portion with the head-side connection portion and the connection portion with the outrigger portion with respect to the longitudinal direction of the suspension substrate is between the centers in the width direction of both connection portions with respect to the longitudinal direction of the suspension substrate. This is the angle formed by the connecting direction. Specifically, it refers to the angle indicated by β in FIG. 8 already described.

  The number of the first limiters, that is, the number of connection points of the first limiter provided for one head side connection portion may be one or more for one head side connection portion, and two or more. Usually, it is one.

(2) Second Limiter The second limiter according to the present invention connects the tail side connecting portion and the rear member disposed on the tail side of the suspension board from the tail side connecting portion via the second opening region. Is.

Here, connecting the tail side connecting portion and the rear member means that the tail side connecting portion and the rear member are continuously formed, and the tail side connecting portion is connected to the tail side connecting portion. This means a portion on the tail side from the head side end.
Further, the connection through the second opening region means that the connection portion with the tail side connecting portion which is the head side end portion of the second limiter sandwiched by the second opening region is the head of the tail side connecting portion. It means that it is on the tail side from the side end.

The rear member is not particularly limited as long as it is a portion disposed on the tail side of the tail side connection portion, more specifically, a portion disposed on the tail side from the head side end portion of the tail side connection portion. Although not intended, for example, a wiring portion that has the rear arm portion, the wiring layer, and an insulating layer that supports the wiring layer, and passes between the piezoelectric element connecting portions sandwiching the tongue portion in a plan view. In particular, in the present invention, it is preferable to be connected to the rear arm portion. It is because the fluctuation | variation with respect to the said rear member of the said tail side connection part can be suppressed effectively.
FIG. 2 already described shows an example in which the rear member is a rear arm portion.
FIG. 14 shows an example in which the rear member is the wiring portion.
In addition, about the code | symbol in FIG. 14, since it shows the member same as FIG. 2, description here is abbreviate | omitted.

The position in the longitudinal direction of the connecting portion of the second limiter with the tail side connecting portion is not particularly limited as long as it is on the tail side from the head side end of the tail side connecting portion.
In the present invention, it is particularly preferable that the piezoelectric element connection portion is located on the tail side from the longitudinal center of the tail side connection portion, and in particular, the tail side end of the tail side connection portion of the piezoelectric element connection portion. It is preferable that it is a tail side from a part. It is because the relative positional relationship between the tail side connecting portion and the rear member can be effectively suppressed within a predetermined range by being the connecting portion.

  The constituent material of the second limiter, the shape in plan view, the total length, the width, the thickness, the position in the width direction of the connection part with the tail side connection part, the connection part with the tail side connection part and the connection part with the rear member The distance in the longitudinal direction, the formation angle and the number of the suspension substrate between the connection portion with the tail side connection portion and the connection portion with the rear member with respect to the longitudinal direction can be the same as those of the first limiter. Therefore, explanation here is omitted.

3. Metal support board The metal support board in the present invention has a tongue part, a support arm part, an outrigger part, and a rear arm part.

  The tongue part is a part for mounting an element such as a magnetic head slider.

  The support arm portion supports the tongue portion, and more specifically, supports the tongue portion by connecting to the tongue portion so as to be sandwiched from the width direction.

As a method of supporting the tongue portion of the support arm portion, the support arm portion may be formed integrally with the tongue portion and directly supported, or connected to the tongue portion via a connecting member. Therefore, a method of supporting indirectly may be used.
In the present invention, in particular, it is preferable to be connected to the tongue portion via the connection member, and it is particularly preferable that the connection member is the piezoelectric element connection portion. This is because it is easy to finely adjust the position and the like of the tongue by the expansion and contraction operation of the piezoelectric element.
FIG. 2 described above shows an example in which the support arm portion is connected on the head side of the piezoelectric element connection portion and indirectly supports the tongue portion via the piezoelectric element connection portion. FIG. 15 shows an example in which the support arm portion is connected on the tail side of the piezoelectric element connection portion and indirectly supports the tongue portion via the piezoelectric element connection portion.
In addition, about the code | symbol in FIG. 15, since it shows the member same as FIG. 2, description here is abbreviate | omitted.

The support path of the support arm portion with the tongue portion is not particularly limited as long as it can stably support the tongue portion, but the distance between the support arm portion and the tongue portion is the shortest. The path does not intersect with the piezoelectric element arranged at the piezoelectric element connecting portion in plan view, that is, between the tail side end portion of the head side connecting portion and the head side end portion of the tail side connecting portion in plan view. It is preferable not to.
Specifically, the longitudinally formed portion of the support arm portion is at least a head from the head side connection portion in the longitudinal direction between the tail side end portion of the head side connection portion and the head side end portion of the tail side connection portion. It is preferable to be on the tail side with respect to the side or tail side connection portion, and in particular, it is preferable to be on the head side with respect to the head side connection portion. This is because the expansion and contraction operation of the piezoelectric element is easy.
In addition, when the support arm portion supports the tongue portion via the connection member, the connection portion with the connection member is on the head side from the head side connection portion or on the tail side from the tail side connection portion. In particular, the head side is more preferable than the head side connecting portion. This is because the expansion and contraction operation of the piezoelectric element is easy.
The phrase “formed on the head side from the head side connection portion” means that all of the support arm portions are on the head side from the head side connection portion.
Moreover, the connection location with the said connection member of the said support arm part means the location where the path | route with the said tongue part becomes the shortest among the site | parts which overlap with the said connection member of the said support arm part in planar view. .

  The outrigger portion is disposed through a first opening region formed on the head side of the tongue portion. By disposing the outrigger portion with respect to the tongue portion via the first opening region, the followability of the element to the disk can be improved.

  The rear arm portion is disposed via an opening region (second opening region) formed on the tail side of the tongue portion, and is connected to the support arm portion and the outrigger portion.

  The metal support substrate in the present invention functions as a support for the suspension substrate. The material of the metal support substrate is preferably a metal having spring properties, and specific examples include SUS. Moreover, although the thickness of a metal support substrate changes with kinds of the material, it exists in the range of 10 micrometers-20 micrometers, for example.

4 . Insulating layer The insulating layer in this invention is formed on a metal support substrate. The material of the insulating layer is not particularly limited as long as it has insulating properties, and examples thereof include a resin. Examples of the resin include polyimide resin, polybenzoxazole resin, polybenzimidazole resin, acrylic resin, polyether nitrile resin, polyether sulfone resin, polyethylene terephthalate resin, polyethylene naphthalate resin, and polyvinyl chloride resin. Of these, polyimide resin is preferred. It is because it is excellent in insulation, heat resistance and chemical resistance. In addition, the material of the insulating layer may be a photosensitive material or a non-photosensitive material. The thickness of the insulating layer is, for example, preferably in the range of 5 μm to 30 μm, more preferably in the range of 5 μm to 18 μm, and still more preferably in the range of 5 μm to 12 μm.

5 . Wiring layer The wiring layer in the present invention is formed on an insulating layer. The material of the wiring layer is not particularly limited as long as it has conductivity, but for example, a metal can be cited, and copper (Cu) is particularly preferable. Moreover, the material of the wiring layer may be rolled copper or electrolytic copper. The thickness of the wiring layer is preferably in the range of 5 μm to 18 μm, for example, and more preferably in the range of 9 μm to 12 μm. Moreover, it is preferable that the wiring plating part is formed in the one part surface of a wiring layer. This is because the wiring layer can be prevented from being deteriorated (corrosion or the like) by providing the wiring plating portion. Among them, in the present invention, it is preferable that a wiring plating part is formed in a terminal part for connection with an element or an external circuit board. Although the kind of wiring plating part is not specifically limited, For example, Au plating, Ni plating, Ag plating etc. can be mentioned. Especially, in this invention, it is preferable that Ni plating and Au plating are formed from the surface side of the wiring layer. The thickness of the wiring plating portion is, for example, in the range of 0.1 μm to 4 μm.
In addition, the wiring layer in the present invention usually has a write wiring layer, a read wiring layer, and an actuator wiring layer connected to the piezoelectric element, and if necessary, a noise shielding wiring layer and a crosstalk preventing layer. A wiring layer, a power supply wiring layer, a ground wiring layer, a flight height control wiring layer, a sensor wiring layer, and a heat assist wiring layer may be provided.

  The suspension substrate of the present invention may have a cover layer formed so as to cover the wiring layer. By providing the cover layer, deterioration (corrosion etc.) of the wiring layer can be prevented. Examples of the material for the cover layer include the resins described as the material for the insulating layer described above, and among them, a polyimide resin is preferable. The material of the cover layer may be a photosensitive material or a non-photosensitive material. The thickness of the cover layer on the wiring layer (on the upper surface of the wiring layer) is, for example, in the range of 2 μm to 30 μm, preferably in the range of 2 μm to 20 μm, and in the range of 2 μm to 15 μm. Is more preferable.

6 . Suspension Substrate The suspension substrate of the present invention has at least the metal support substrate, the insulating layer, the wiring layer, the piezoelectric element connection portion, and the limiter, but may have other members as necessary. good.

The method for producing the suspension substrate of the present invention is not particularly limited as long as it is a method capable of obtaining the suspension substrate having the above-described configurations, and a known method can be used.
FIG. 16 is a schematic cross-sectional view showing an example of a method for manufacturing a suspension substrate according to the present invention.
FIG. 16 shows a mode in which the material of the first limiter is the same as the material of the insulating layer and the cover layer.
Further, the left column in FIG. 16 is a cross-sectional view corresponding to the cross-sectional view along the line BB and the DD line (first limiter and second limiter) in FIG. 2, and the right column in FIG. It is sectional drawing equivalent to a line sectional view. In FIG. 17, first, a laminated member in which the metal support member 1X, the insulating member 2X, and the conductor member 3X are laminated in this order is prepared (FIG. 16A).
Next, the conductive member 3X is patterned by wet etching to form the wiring layer 3 (FIG. 16B). Next, the cover layer 4 is formed so as to cover the wiring layer 3 (FIG. 16C).

  Next, when the etching rate of the cover layer 4 is sufficiently smaller than the etching rate of the insulating member 2X, the insulating member 2X can be etched using the cover layer 4 as a resist layer. Thereby, the insulating layer 2 is formed in the place where the first limiter and the second limiter are formed (FIG. 16D). When the etching rate of the cover layer 4 is not sufficiently lower than the etching rate of the insulating member 2X, it is preferable to etch the insulating member 2X through a patterned DFR (dry film resist) layer. .

  Finally, the metal support member 1X is wet etched. Thereby, the metal support member 1X existing under the first limiter 12a and the second limiter 12b is removed, and at the same time, the metal support substrate 1 having the tongue portion, the support arm portion, the outrigger portion, and the rear arm portion is formed, and the suspension support A substrate is obtained (FIG. 16 (e)).

B. Suspension Next, the suspension of the present invention will be described. The suspension of the present invention includes the above-described suspension substrate.

  This will be described with reference to a schematic plan view showing an example of the suspension of the present invention. FIG. 17 is a schematic plan view showing an example of the suspension of the present invention. A suspension 20 shown in FIG. 17 includes the suspension substrate 10 described above and a load beam 21 provided on the surface of the suspension substrate 10 on the metal support substrate side. In FIG. 17, illustration of piezoelectric element connection and limiter is omitted for convenience. The piezoelectric element connection portion and the like are the same as those described in FIG.

  According to the present invention, by using the above-described suspension substrate, a precise tracking operation can be performed, and the piezoelectric element can be less damaged.

  The suspension of the present invention has at least a suspension substrate, and usually further has a load beam. The suspension substrate is the same as the content described in “A. Suspension substrate”, and therefore, the description thereof is omitted here. The load beam can be the same as the load beam used for a general suspension.

C. Next, the suspension with an element of the present invention will be described. A suspension with an element of the present invention includes the above-described suspension and an element mounted in an element mounting region of the suspension.

  This will be described with reference to a schematic plan view showing an example of the suspension with an element of the present invention. FIG. 18 is a schematic plan view showing an example of the suspension with an element of the present invention. The element-mounted suspension 30 shown in FIG. 18 includes the suspension 20 described above, and elements (recording / reproducing element 31 and piezoelectric element (not shown)) mounted on the suspension 20 (the element mounting region of the suspension substrate 20). It is what has. In FIG. 18, for the sake of convenience, descriptions of the piezoelectric element connection portion, the limiter, and the like are omitted. The piezoelectric element connection portion and the like are the same as those described in FIG.

  According to the present invention, by using the above-described suspension, a precise tracking operation can be performed and the piezoelectric element can be hardly damaged.

The suspension with an element of the present invention has at least a suspension and an element. The suspension is the same as that described in “B. Suspension” above, and is not described here. In addition, examples of the element mounted in the element mounting area include a recording / reproducing element and a piezoelectric element.
The recording / reproducing element is not particularly limited, but an element having a magnetic generating element is preferable. Specifically, a magnetic head slider can be mentioned.
In addition, examples of the piezoelectric element include a microactuator and a miniactuator. An example of the piezoelectric element is a piezo element. As the piezo element, for example, one made of PZT can be cited. By using the expansion / contraction response of the piezo element, positioning can be performed in submicron units. In addition, the piezoelectric element has advantages such as high energy efficiency, large load resistance, fast response, no wear deterioration, and no magnetic field.

D. Next, the hard disk drive of the present invention will be described. The hard disk drive of the present invention is characterized by including the above-described suspension with an element.

  According to the present invention, by using the above-described suspension with an element, a precise tracking operation can be performed, and the piezoelectric element can be hardly damaged.

  FIG. 19 is a schematic plan view showing an example of the hard disk drive of the present invention. A hard disk drive 40 shown in FIG. 19 includes the above-described suspension 30 with an element, a disk 41 on which the element suspension 30 writes and reads data, a spindle motor 42 that rotates the disk 41, and the elements of the suspension 30 with an element. Actuator arm 43 and voice coil motor 44 for moving the above, and a case 45 for sealing the above members.

  The hard disk drive of the present invention has at least a suspension with an element, and usually further includes a disk, a spindle motor, an actuator arm, and a voice coil motor. Since the suspension with an element is the same as the content described in “C. Suspension with an element”, description thereof is omitted here. As other members, the same members as those used in a general hard disk drive can be used.

  The present invention is not limited to the above embodiment. The above-described embodiment is an exemplification, and the technical idea described in the claims of the present invention has substantially the same configuration and exhibits the same function and effect regardless of the case. It is included in the technical scope of the invention.

  Hereinafter, the present invention will be described more specifically with reference to examples.

[Example 1]
First, a laminated member having SUS304 (metal support member) having a thickness of 18 μm, a polyimide resin layer (insulating member) having a thickness of 10 μm, and an electrolytic copper layer (conductor member) having a thickness of 9 μm was prepared (FIG. 16A). . Next, a dry film resist was laminated on both surfaces of the laminated member to form a resist pattern. Next, etching was performed using a ferric chloride solution, and a resist film was removed after the etching. As a result, the wiring layer was formed from the conductor member, and at the same time, the conductor member on the insulating member at the positions serving as the first limiter and the second limiter was removed (FIG. 16B). Although not shown, a jig hole was formed in the metal support member.

  Thereafter, the polyimide precursor solution was coated with a die coater so as to cover the patterned wiring layer. After drying, resist engraving was performed and the polyimide precursor film was etched simultaneously with development, and then cured (imidized) by heating in a nitrogen atmosphere to form a cover layer (FIG. 16C). Next, in order to pattern the insulating member, resist plate-making was performed, and the exposed polyimide resin was removed by wet etching to form an insulating layer (FIG. 16D).

  Then, the wiring plating part (Au plating part) was formed in the terminal part of the wiring layer by the electrolytic plating method. Finally, wet etching is performed on the metal support member to remove the metal support member existing under the portions where the first limiter and the second limiter are formed, and at the same time, a metal support substrate having a tongue portion, a support arm portion, and an outrigger portion The first limiter and the second limiter having a stacked structure in which the insulating layer and the cover layer are stacked are formed (FIG. 16E). As a result, a suspension substrate was obtained.

  In addition, the width | variety on the 1st opening area | region and the 2nd opening area | region of the 1st limiter and the 2nd limiter was 0.040 mm, respectively.

[Example 2]
The suspension is the same as in Example 1 except that the cover layer is not formed at the place where the first limiter and the second limiter are formed, that is, the first limiter and the second limiter are made of only the insulating layer. A substrate was obtained.

[Comparative Example 1]
A suspension substrate was obtained in the same manner as in Example 1 except that the first limiter and the second limiter were not formed on the first opening region and the second opening region.

[Comparative Example 2]
A suspension substrate was obtained in the same manner as in Example 1 except that the first limiter was formed on the first opening region and the second limiter was not formed on the second opening region.
[Comparative Example 3]
A suspension substrate was obtained in the same manner as in Example 1 except that the second limiter was formed on the second opening region and the first limiter was not formed on the first opening region.

[Evaluation]
A hard disk was manufactured by fixing piezoelectric elements to the head side connection part and tail side connection part of the suspension substrates obtained in the examples and comparative examples. Next, a precision tracking test was performed in which the magnetic head slider was moved minutely by the piezoelectric element while the hard disk was rotated.
As a result, in the example, there was no problem that the piezoelectric element cracked even when the piezoelectric element was expanded and contracted.
On the other hand, in the comparative example, a problem that the piezoelectric element broke occurred.

DESCRIPTION OF SYMBOLS 1 ... Metal support board 2 ... Insulating layer 3 ... Wiring layer 4 ... Cover layer 5 ... Protective plating layer 10 ... Suspension board 11 ... Piezoelectric element connection part 11a ... Head side connection part 11b ... Tail side connection part 12a ... 1st limiter 12b ... second limiter 20 ... suspension 21 ... load beam 30 ... suspension with element 40 ... hard disk drive

Claims (6)

A suspension substrate having a metal support substrate, an insulating layer formed on the metal support substrate, and a wiring layer formed on the insulating layer,
The metal support board includes a tongue portion, a support arm portion that supports the tongue portion, an outrigger portion disposed through a first opening region formed on a head side of the tongue portion, and a tail of the tongue portion. A rear arm portion disposed through a second opening region formed on the side and connected to the support arm portion and the outrigger portion;
A piezoelectric element connection portion connected to the tongue portion so as to sandwich the tongue portion in the width direction of the suspension substrate is formed,
The piezoelectric element connecting portion has a head side connecting portion and a tail side connecting portion to which both ends of the piezoelectric element are fixed on the head side and the tail side,
A first limiter is formed for connecting the head-side connecting portion and the outrigger portion via the first opening region;
A second limiter is formed for connecting the tail side connecting portion and a rear member disposed on the tail side from the tail side connecting portion via the second opening region ;
The suspension substrate, wherein the head-side connection portion and the tail-side connection portion are formed on the outer side in the width direction from the outer edge portion of the tongue portion .   2. The suspension substrate according to claim 1, wherein both of the first limiter and the second limiter have a laminated structure including only one or both of the insulating layer and the cover layer.   At least one of the first limiter and the second limiter is a stacked structure including the insulating layer, the wiring layer, and a protective plating layer, or a stacked structure including the insulating layer, the wiring layer, and a cover layer. Yes,
  The suspension substrate according to claim 1, wherein the wiring layer included in the stacked structure is a dummy wiring layer. A suspension comprising the suspension substrate according to any one of claims 1 to 3 . A suspension with an element, comprising: the suspension according to claim 4; and an element mounted in an element mounting region of the suspension. A hard disk drive comprising the element-mounted suspension according to claim 5 .

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