JP6196191B2 - measuring device - Google Patents

Description

  The present invention relates to a measuring apparatus for measuring a sample by dielectric spectroscopy.

  With the aging of society, dealing with adult diseases is becoming a major issue. In blood glucose level and other tests, blood collection is necessary, which places a heavy burden on the patient. Therefore, a non-invasive component concentration measurement apparatus that does not collect blood has attracted attention.

  Dielectric spectroscopy has been proposed as a noninvasive component concentration measuring apparatus. Dielectric spectroscopy irradiates the skin with electromagnetic waves, absorbs electromagnetic waves according to the interaction of blood components to be measured, for example, glucose molecules and water, and observes the amplitude and phase of the electromagnetic waves. However, the interaction between glucose and electromagnetic waves is small, and there is a limit to the intensity of electromagnetic waves that can be safely irradiated on a living body, so that it has not been sufficiently effective in measuring blood sugar levels in living bodies.

  As a conventional measurement method, there is dielectric spectroscopic measurement by reflection measurement using a coaxial probe connected to a vector network analyzer (hereinafter referred to as VNA) in a microwave to millimeter wave band (for example, Patent Document 1). reference).

  FIG. 12 and FIG. 13 are configuration examples showing a conventional component concentration measuring apparatus using dielectric spectroscopy. The dielectric measurement coaxial probe performs measurement by contacting an electric field distribution generated from the probe with a measurement sample. The measurement sample is a solution in which a background component and a target component are mixed. The dielectric measurement coaxial probe is formed of three conductors serving as GSG. As described in Non-Patent Document 1, it is a general method for measuring a complex dielectric constant using a coaxial probe, and an open-ended coaxial line is suitable for liquid measurement.

  From the open end, the complex permittivity is calculated from the reflected signal on the premise of an infinite boundary. A signal is applied to the sample, and the reflection coefficient and phase are measured in the frequency domain. The frequency of the applied signal is swept to obtain the reflection coefficient / phase spectrum. From the measured spectrum, the complex dielectric constant can be calculated by the following equation (1).

ここで、ε^*は未知試料の誘電率、ε_i ^*(i=A,B,C)は標準試料の誘電率である。ρ^*は、複素反射係数であって、測定で得られた反射係数をΓ_i、位相をφ_iとするとき、以下の式（２）のように記述できる。

Here, ε ^* is the dielectric constant of the unknown sample, and ε _i ^* (i = A, B, C) is the dielectric constant of the standard sample. ρ ^* is a complex reflection coefficient, and can be described as the following equation (2), where Γ _{i is} the reflection coefficient obtained by measurement and φ _i is the phase.

ρ_iはそれぞれ標準試料の測定結果に対応し、ρ^*は未知試料の測定結果を表す。キャリブレーション測定では、標準試料Aとして空気中での開放、標準試料Bとして短絡、標準試料Cとして誘電率のわかっている純水を用いる。短絡するときは終端部分で不要なインダクタンスを生じないように特殊な治具を用いて固定／終端する必要がある。

ρ _i corresponds to the measurement result of the standard sample, and ρ ^* represents the measurement result of the unknown sample. In the calibration measurement, the standard sample A is opened in the air, the standard sample B is short-circuited, and the standard sample C is pure water having a known dielectric constant. When short-circuiting, it is necessary to fix / terminate by using a special jig so as not to generate unnecessary inductance at the termination portion.

  In the frequency band from microwave to millimeter wave or more, there is a dielectric spectroscopic device in the THz band (see, for example, Patent Document 2). The conventional example shown in FIG. 14 shows a homodyne detection electromagnetic wave spectroscopic measurement system using a continuously oscillating light source. The system includes a first continuous wave light source 901a and a second continuous wave light source 901b, a first splitter 902a and a second splitter 902b, a first coupler 903a and a second coupler 903b, an optical phase modulator 904, It is mainly configured by a photomixer 905a and a third photomixer 905c in which both functions of the photomixer and the THz mixer are integrated. In the conventional example shown in FIG. 14, the third photomixer 905 c receives the THz wave oscillated from the first photomixer 905 a by transmitting or reflecting it on the sample 100 using the lens 908, and at the optical phase modulator 904. Phase-modulated continuous light waves are received and homodyne mixed.

  In the THz band, it is common to measure a complex dielectric constant of a measurement object by a free space method using a pseudo optical system using a lens. The free space method is also used in the millimeter wave band as described in Non-Patent Document 1.

  As described above, the dielectric relaxation spectrum is calculated from the amplitude and phase of the signal corresponding to the frequency of the observed radio wave. Generally, it is expressed as a linear combination of relaxation curves based on the Cole-Cole equation, and the complex permittivity is calculated. In the measurement of biological components, for example, the amount of blood components such as glucose and cholesterol contained in blood has a complex dielectric constant, and is measured as an electrical signal (amplitude, phase) corresponding to the change. A calibration model is constructed by measuring in advance the phase between the complex permittivity change and the component concentration, and the component concentration is calibrated from the measured change in the dielectric relaxation spectrum.

JP 2005-69779 A JP 2013-32933 A

Andrew P. Gregory, and Robert N. Clarke, “A Review of RF and Microwave Techniques for Dielectric Measurements on Polar Liquids”, IEEE Transactions on Dielectrics and Electrical Insulation Vol.13, No.4 Aug. 2006.

  However, in the conventional measuring apparatus, it may be difficult to measure a wide frequency band from microwave to millimeter wave band, THz band and the like. For example, when measurement is performed in the measurement apparatus using dielectric spectroscopy shown in FIGS. 12 and 13, the measurement frequency is limited by the ground of the coaxial probe and the signal line dimension (GSG electrode interval), so that the frequency range is up to the THz band. It is difficult to obtain a high frequency band with a single coaxial probe. In addition, different VNAs may be set for measuring each frequency band. On the other hand, when the measurement system using dielectric spectroscopy in the THz band shown in FIG. 14 is used in the microwave band, there is a problem that it is difficult to generate microwaves because it is difficult to widen the antenna band.

  Therefore, in order to acquire broadband spectrum data, a plurality of measurements are required by changing different probes in the measurement apparatus in FIGS. 12 and 13 or mounting a sample on the measurement system using dielectric spectroscopy in FIG. there were. Accordingly, since it takes time to measure the sample, there has been a problem that measurement reproducibility and measurement accuracy cannot be obtained due to changes in temperature and pressure of the sample and drying.

  Accordingly, an object of the present invention is to provide a measuring apparatus capable of measuring the same sample simultaneously in a wide band by dielectric spectroscopy.

  In order to solve the above-mentioned problem, a first feature of the present invention relates to a measuring apparatus for measuring a sample by dielectric spectroscopy. That is, the measuring apparatus according to the first feature of the present invention is provided with an opening for installing a sample, and is formed on a dielectric constant measurement substrate formed of a dielectric layer and on the periphery of the opening of the dielectric constant measurement substrate. And a detection unit that detects dielectric spectroscopy of the sample. A vector network analyzer is connected to the coaxial probe wiring, and the THz wave output from the THz wave oscillator is focused or collimated at the opening, and the THz wave after being focused or collimated is received by the THz wave receiver. .

  Here, a window plate through which the THz wave is transmitted may be provided in the opening. The window plate may include an antireflection portion that prevents reflection of THz waves.

  The detection unit may be a plurality of coaxial probe wires having different characteristic impedances, and each of the plurality of coaxial probe wires may be connected to a vector network analyzer. Each of the coaxial probe wires may be connected to the vector network analyzer via a strip line that matches the characteristic impedance of the coaxial probe wire.

The second feature of the present invention relates to a measuring apparatus for measuring a sample by dielectric spectroscopy. That is, the measuring apparatus according to the second feature of the present invention is provided with an opening for placing a sample, and is formed on a dielectric constant measurement substrate formed of a dielectric layer and on a peripheral portion of the dielectric constant measurement substrate opening. A plurality of coaxial probe wirings, including a detection unit that detects dielectric spectroscopy in the millimeter wave band from the microwave of the sample. The plurality of coaxial probe wires have different characteristic impedances and are connected to the vector network analyzer.

  Here, the coaxial probe wiring may be connected to the vector network analyzer via a strip line that matches the characteristic impedance of the coaxial probe wiring.

  ADVANTAGE OF THE INVENTION According to this invention, the measuring apparatus which can measure the same sample simultaneously in a wide band by dielectric spectroscopy can be provided.

It is a figure explaining the external appearance of the measuring apparatus which concerns on embodiment of this invention. It is a figure explaining the cross section of the measuring apparatus which concerns on embodiment of this invention. It is a figure explaining the measurement system of the microwave zone | band or millimeter wave band of the measuring apparatus which concerns on embodiment of this invention. It is a figure explaining the signal wire | line of the measuring apparatus which concerns on embodiment of this invention. It is a figure explaining the measurement system of the THz wave band of the measuring device concerning an embodiment of the invention. It is an enlarged view of the measurement system of the THz wave band of the measuring device concerning an embodiment of the invention. It is a figure explaining an example of the measurement result by the measuring device concerning an embodiment of the invention. It is a figure explaining the measurement system of the THz wave band of the measuring device concerning the 1st modification of the present invention. It is a figure explaining the external appearance of the measuring apparatus which concerns on the 2nd modification of this invention. It is a figure explaining the cross section of the measuring apparatus which concerns on the 2nd modification of this invention. It is a figure explaining the measurement system of the microwave zone | band or millimeter wave band of the measuring apparatus which concerns on the 2nd modification of this invention. It is a figure explaining the measuring apparatus by the dielectric spectroscopy in the conventional microwave to millimeter wave band. It is a figure explaining the electric field distribution which arises from a probe in the measuring device by the dielectric spectroscopy in the conventional microwave to millimeter wave band. It is a figure explaining the measurement system by the dielectric spectroscopy in the conventional THz band.

  Next, embodiments of the present invention will be described with reference to the drawings. In the following description of the drawings, the same or similar parts are denoted by the same or similar reference numerals.

(Embodiment)
With reference to FIG. 1 thru | or FIG. 3, the measuring apparatus 1 which concerns on embodiment of this invention is demonstrated. The measuring device 1 measures a sample by dielectric spectroscopy. Specifically, the measuring apparatus 1 can measure the component concentration of the target component using dielectric spectroscopy, particularly the non-invasive component concentration in which the object to be measured is a human or an animal.

  As shown in FIGS. 1 to 3, the measuring apparatus 1 includes a substrate 10, a dielectric constant measurement substrate 11, a sample opening 12, a window plate 13, and a detection unit 14. As shown in FIG. 2, a dielectric constant measurement substrate 11 is provided on the substrate 10, and a window plate 13 is provided below the substrate 10 and on the dielectric constant measurement substrate 11. Further, a sample opening 12 penetrating the substrate 10 and the dielectric constant measurement substrate 11 is provided in the vicinity of the center of the substrate 10 and the dielectric constant measurement substrate 11, and the window plate 13 covers the sample opening 12. Is provided. As shown in FIG. 3, the detection unit 14 is provided around the sample opening 12 of the dielectric constant measurement substrate 11.

  In the example shown in FIG. 1, a case will be described in which the substrate 10, the dielectric constant measurement substrate 11, the sample opening 12 and the window plate 13 are each rectangular and are laminated so that the centers of the respective members coincide. Not limited to this.

  A first connector C1, a second connector C2, a third connector C3, and a fourth connector C4 are provided on each side of the substrate 10, and each connector includes a first cable K1, a second cable K2, Connect to the third cable K3 and the fourth cable K4.

  The first connector C1, the second connector C2, the third connector C3, and the fourth connector C4 are adjusted to different coaxial sizes, respectively, and can measure a predetermined frequency. The first connector C1, the second connector C2, the third connector C3, and the fourth connector C4 are SMA connectors and K connectors, and are connected to the dielectric constant measurement substrate 11 and GSG as shown in FIG. To do.

  The first connector C1, the second connector C2, the third connector C3, and the fourth connector C4 may be collectively referred to as a connector C. In addition, the first cable K1, the second cable K2, the third cable K3, and the fourth cable K4 may be collectively referred to as a cable K. In the example shown in FIG. 1, the case where there are four connectors C and four cables K will be described, but the present invention is not limited to this.

  The dielectric constant measurement substrate 11 is provided with a sample opening 12 (opening) for installing a sample, and is formed of a dielectric layer. The dielectric constant measurement substrate 11 is several centimeters × several centimeters square. PCB or the like is used as the material for the dielectric constant measurement substrate 11. The dielectric constant measurement substrate 11 is formed in multiple layers using, for example, LTCC (Low Temperature Confired Ceramics) material which is a kind of ceramic material. In addition to LTCC, the dielectric layer material may be ceramics, a ceramic mixed material in which ceramics and glass filler are mixed, or a polymer material such as polyimide.

  As shown in FIG. 2, the dielectric constant measurement substrate 11 may be connected to the substrate and the connector C through a signal output unit 15 made of metal. Thereby, the dielectric constant measurement substrate 11 can output the signal from the connector C to the detection unit 14 and the signal of the detection unit 14 to the connector C via the signal output unit 15.

  The sample opening 12 is provided so as to penetrate through the center of the substrate 10 and the dielectric constant measurement substrate 11, and has a structure that allows THz waves to pass through the sample opening 12. As shown in FIG. 5, the THz wave output from the THz wave oscillator 21 is focused or collimated in the sample opening 12, and the THz wave after being focused or collimated is received by the THz wave receiver 22. Become. The sample opening 12 needs to be equal to or larger than the size of the focused beam of the THz wave, and the shape thereof may be a square, a rectangle, a polygon, or a circle.

  The window plate 13 includes a window plate 13a in contact with the substrate 10 on the incident side (left side of the screen in FIG. 2) and a window plate 13b in contact with the dielectric constant measurement substrate 11 on the emission side (right side of the screen in FIG. 2). The sample opening 12 is covered. The window plate 13 is capable of transmitting a THz wave and enclosing a liquid or gas measurement sample in the sample opening 12. The window plate 13 is not necessary in the case of a solid sample. The size of the window plate 13 is several millimeters × several millimeters square and several millimeters thick. As the material of the window plate 13, a material having a high transmittance is selected according to the measurement frequency, such as a high resistance Si, Z cut crystal, HDPE, TPX, Tsurupica.

  The detection unit 14 is a coaxial probe wiring P formed around the sample opening 12 of the dielectric constant measurement substrate 11 and detects dielectric spectroscopy of the sample. The detection unit 14 is provided at a position where the electric field distribution generated from the probe can be measured by contacting the measurement sample. In the example shown in FIG. 3, the detection unit 14 includes four coaxial probe wires P made of GSG corresponding to each connector. In the embodiment of the present invention, an example in which four coaxial probe wires P are provided has been described, but the number is not limited to four.

  The detection unit 14 is a plurality of coaxial probe wires P having different characteristic impedances. The plurality of coaxial probe wirings P are connected to a first VNA (Vector Network Analyzer) V1, a second VNA V2, a third VNA V3, and a fourth VNA V4, respectively. At this time, the coaxial probe wiring P of the detecting unit 14 is connected to the first VNA V1, the second VNA V2, and the third VNA V2 via the strip line R that matches the characteristic impedance of the coaxial probe wiring P, respectively. Connected to VNA V3 and fourth VNA V4.

  As shown in FIG. 2, in the embodiment of the present invention, the detection unit 14 is provided in the dielectric constant measurement substrate 11. In another embodiment, the detection unit 14 may be provided on the surface of the dielectric constant measurement substrate 11.

  The connection from the connector C to the coaxial probe wiring P will be described with reference to FIG. A connector C is installed on the substrate 10, and the connector C is connected to the dielectric constant measurement substrate 11 via the connector connecting portion CC. The dielectric constant measurement substrate 11 is provided with a strip line R and a coaxial probe wiring P, and the coaxial probe wiring P detects the electric field distribution generated from the coaxial probe wiring P by contacting the sample. Form.

  The connector C and the connector connection part CC form a GSG. The coaxial probe wiring P has a predetermined electrode interval in order to measure a given frequency band. In each of the four coaxial probe wirings P provided in the measuring apparatus 1, each coaxial probe wiring P has a different electrode interval so that different frequency bands can be measured. A complex dielectric constant is derived from a reflection signal from the coaxial probe wiring P (detection unit 14) assuming a model in which a measurement sample exists up to infinity. Accordingly, the design of the peripheral portion of the GSG coaxial probe wiring P and the size of the sample opening 12 are appropriately changed depending on the measurement frequency.

  The strip line R connects the connector connecting portion CC and the coaxial probe wiring P and matches the characteristic impedance of the coaxial probe wiring P. The strip line R has an impedance of 50Ω so as to match the VNA. The strip line R is designed so as to reduce the loss according to the frequency band of the coaxial probe wiring P to which the strip line R is connected. The strip line R has, for example, a conductor width of 100-300 μm and an interval of 50 μm, and the conductor material of the strip line R is Au, Cu, Al or the like.

  The measurement apparatus 1 according to the embodiment of the present invention enables wideband measurement by connecting four VNAs as shown in FIG. 3 and changing the frequency band corresponding to each VNA. A GSG wiring serving as the detection unit 14 is formed on the dielectric constant measurement substrate 11, and the electric field distribution generated from the probe can be detected by contacting the measurement sample.

  Next, an example in which the measuring apparatus 1 according to the embodiment of the present invention is introduced into a THz band free space spectroscopic optical system will be described with reference to FIGS. 5 and 6. When introduced into a THz band free space spectroscopic optical system, the measuring apparatus 1 is further used in a measuring system having a THz wave oscillator 21, a THz wave receiver 22, a low noise amplifier 23, and a lock-in amplifier 24.

  The THz wave oscillator 21 irradiates the THz wave through the lens L1 so that the THz wave is focused or collimated in the sample opening 12. The THz wave receiver 22 receives the THz wave after being focused or collimated through the lens L2. The THz wave oscillator 21 corresponds to the first photomixer 905a shown in FIG. 14, and the THz wave receiver 22 corresponds to the third photomixer 905c. The low noise amplifier 23 amplifies the signal received by the THz wave while suppressing noise. The lock-in amplifier 24 detects a repetitive signal in the signal output from the low noise amplifier 23.

  As shown in FIG. 6, an antireflection portion Q is provided on the surface of the window plate 13. The antireflection part Q is formed with wedges and irregularities and prevents multiple reflection of THz waves. In the example shown in FIG. 5, the case where the antireflection portion Q is provided on the incident side and the emission side of the THz wave in each of the incident side window plate 13a and the emission side window plate 13b will be described. Absent. For example, the antireflection part Q is provided on the incident side of the incident side window plate 13a and the emission side of the emission side window plate 13b, and the incident side of the incident side window plate 13a and the incidence side of the emission side window plate 13b are provided. A structure not provided on the side may be used.

  With the configuration as described above, the measuring apparatus 1 according to the embodiment of the present invention detects a THz wave while detecting each coaxial probe wiring P of the detection unit 14 after the sample is placed in the sample opening 12. Is focused or collimated on the sample opening 12. Thus, the same sample can be measured by generating dielectric spectroscopy of a wide frequency in a short time before temperature or pressure change or drying occurs.

  With reference to FIG. 7, the measurement result of the measuring apparatus 1 which concerns on embodiment of this invention is demonstrated. FIG. 7 shows the measurement results of three types of glucose water at different glucose concentrations. As shown in FIG. 7, by setting the frequency band of each VNA so as to cover the μ wave to the millimeter wave band, a plurality of VNAs are used in the μ wave to millimeter wave band, and a free space system is used in the THz band. The complex permittivity can be measured using the spectroscopic system.

  Such a measuring apparatus 1 according to the embodiment of the present invention performs dielectric spectroscopy measurement from the microwave band to the THz band of the same sample at the same time. Specifically, by providing a sample opening 12 penetrating through the dielectric constant measurement substrate 11 at the center of the dielectric constant measurement substrate 11, THz waves are transmitted through the sample opening 12, and the THz band is transmitted. Realize dielectric spectroscopy measurement. In addition, a detection portion 14 is formed by a coaxial probe wiring P around the sample opening 12 on the dielectric constant measurement substrate 11. Realize dielectric spectroscopic measurement from wave band to millimeter wave band.

  Thus, since the same sample is subjected to broadband dielectric spectroscopy at the same time, it is possible to obtain broadband data with little change in the state of the sample over time.

(First modification)
With reference to FIG. 8, the measuring apparatus 1a which concerns on a 1st modification is demonstrated. In the example shown in FIG. 5, the case where the THz wave passes through the dielectric constant measurement substrate 11 through the window plate 13 has been described. On the other hand, in the measurement apparatus 1a shown in FIG. 8, instead of the window plate 13 of the dielectric constant measurement substrate 11, for example, a silicon ATR prism Z is brought into contact to measure the THz band.

  In the example shown in FIG. 8, the THz wave irradiated by the THz wave oscillator 21 is focused or collimated at the sample opening 12 via the lens L1 and the ATR prism Z. Further, the converged or collimated THz wave is received by the THz wave receiver 22 via the ATR prism Z and the lens L2.

  A sealing window 16 may be provided in the sample opening 12 on the opposite side where the ATR prism Z is provided. The sealing window 16 can enclose a liquid or gas measurement sample in the sample opening 12.

(Second modification)
With reference to FIG. 9 and FIG. 11, the measuring apparatus 1b which concerns on a 2nd modification is demonstrated. In the second modification, in the microwave to THz wave band that can be measured by the measuring apparatus 1 according to the embodiment of the present invention described with reference to FIGS. Measure dielectric spectroscopy.

  Since the second modification does not measure the THz wave band, the substrate 10 and the sample opening 12 do not need to penetrate, and the sample opening 12 may be provided inside the dielectric constant measurement substrate 11. Good. Compared to the embodiment of the present invention, the window plate 13 may not be provided, but from the viewpoint of ease of installation of the sample, the sample opening 12 is penetrated to form a sealing window (FIG. (Not shown).

  The dielectric constant measurement substrate 11 is provided with a sample opening 12 for installing a sample, and is formed of a dielectric layer.

  The detection unit 14 is a plurality of coaxial probe wires P formed in the periphery of the sample opening 12 of the dielectric constant measurement substrate 11 and detects dielectric spectroscopy of the sample. Here, the plurality of coaxial probe wires P have different characteristic impedances and are connected to the vector network analyzer. The coaxial probe wiring P is connected to a vector network analyzer via a strip line that matches the characteristic impedance of the coaxial probe wiring P, respectively.

  The measuring apparatus 1b according to the second modified example performs dielectric spectroscopy measurement of the same sample from the microwave band to the millimeter band at the same time. Specifically, the detection part 14 by the coaxial probe wiring P is formed in the periphery of the sample opening 12 on the dielectric constant measurement substrate 11, and this coaxial probe wiring P has different electrode intervals of GSG. This enables dielectric spectroscopy measurement from the microwave band to the millimeter wave band.

  Thus, since the same sample is subjected to broadband dielectric spectroscopy at the same time, it is possible to obtain broadband data with little change in the state of the sample over time.

(Other embodiments)
As described above, the embodiment of the present invention and the modifications 1 and 2 thereof have been described. However, it should not be understood that the description and drawings constituting a part of this disclosure limit the present invention. From this disclosure, various alternative embodiments, examples, and operational techniques will be apparent to those skilled in the art.

  It goes without saying that the present invention includes various embodiments not described herein. Therefore, the technical scope of the present invention is defined only by the invention specifying matters according to the scope of claims reasonable from the above description.

DESCRIPTION OF SYMBOLS 1 Measuring apparatus 10 Board | substrate 11 Dielectric constant measurement board | substrate 12 Sample opening part 13 Window board 14 Detection part 15 Signal output part 16 Sealing window 21 THz wave oscillator 22 THz wave receiver C, C1, C2, C3, C4 Connector CC Connector connection part K, K1, K2, K3, K4 Cable L1, L2 Lens P Coaxial probe wiring Q Antireflection part R Strip line V1, V2, V3, V4 Vector network analyzer (VNA)
Z ATR prism

Claims (7)

A measuring device for measuring a sample by dielectric spectroscopy,
An opening for installing the sample is provided, and a dielectric constant measurement substrate formed of a dielectric layer;
A coaxial probe wiring formed in a peripheral portion of the opening of the dielectric constant measurement substrate, comprising a detection unit for detecting dielectric spectroscopy of a sample,
A vector network analyzer is connected to the coaxial probe wiring,
A THz wave output from a THz wave oscillator is focused or collimated at the opening, and the THz wave after being focused or collimated is received by a THz wave receiver. The measurement apparatus according to claim 1, wherein a window plate through which the THz wave is transmitted is provided in the opening. The measurement apparatus according to claim 2, wherein the window plate includes an antireflection portion that prevents reflection of the THz wave. The detection unit is a plurality of coaxial probe wires having different characteristic impedances, and each of the plurality of coaxial probe wires is connected to the vector network analyzer. The measuring device according to claim 1. The measurement apparatus according to claim 4, wherein the coaxial probe wiring is connected to the vector network analyzer via a strip line that matches a characteristic impedance of the coaxial probe wiring. A measuring device for measuring a sample by dielectric spectroscopy,
An opening for installing the sample is provided, and a dielectric constant measurement substrate formed of a dielectric layer;
A plurality of coaxial probe wirings formed in the periphery of the opening of the dielectric constant measurement substrate, comprising a detection unit for detecting dielectric spectroscopy in the millimeter wave band from the microwave of the sample,
The plurality of coaxial probe wires have different characteristic impedances, and are connected to a vector network analyzer, respectively. The measuring apparatus according to claim 6, wherein the coaxial probe wiring is connected to the vector network analyzer via a strip line that matches the characteristic impedance of the coaxial probe wiring.

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