JP6201655B2 - Method for manufacturing liquid jet head - Google Patents

Description

  The present invention relates to a method for manufacturing a liquid jet head, and more particularly to a method for manufacturing an ink jet recording head that discharges ink as a liquid.

  An ink jet recording head which is an example of a liquid ejecting head is formed by joining a plurality of members with an adhesive or the like. A plurality of members constituting such an ink jet recording head are aligned and joined.

  Here, a method of assembling at least a part of an ink jet recording head by a robot has been proposed (for example, see Patent Document 1).

Japanese Patent Laid-Open No. 10-258512

  However, there are robots with high and low operational accuracy, but it is difficult to assemble robots with low operational accuracy while aligning with high accuracy. On the other hand, it is difficult for a robot with high operation accuracy to move a member at a distance.

  In addition, it is difficult to directly move a member from a robot with low operation accuracy to a high robot. In particular, when the adhesive is applied to the member, or when the surface to be held is limited because it is processed and scratches or breakage, dust adhesion, dirt adhesion, etc., it is between two robots Therefore, it is difficult to change the member directly.

  Such a problem is not limited to the method of manufacturing an ink jet recording head, and similarly exists in a method of manufacturing a liquid ejecting head that ejects liquid other than ink.

  In view of such circumstances, it is an object of the present invention to provide a method of manufacturing a liquid ejecting head that can be transported at a remote position and can be assembled by high-precision alignment.

  According to an aspect of the present invention for solving the above-described problem, an adhesive is applied in a manufacturing method of a liquid ejecting head in which a first member and a second member constituting a liquid ejecting head that ejects a liquid are bonded while being aligned with an adhesive. The first member is transported to the first point by the first robot, and is transported to the first point by the first robot by the second robot having higher operation accuracy than the first robot. When the first member is bonded to the second member while aligning the first member with the second member, the adhesive is applied to one surface of the first member, and the first robot and The second robot holds the other surface of the first member opposite to the one surface to which the adhesive is applied, and the non-application area where the adhesive is not applied to the one surface of the first member. Less At least three places are provided, and the first robot places the first member on a placing table so that the non-application area of the first member becomes a contact at the first point, and the second robot In the method of manufacturing a liquid ejecting head, the first member mounted on the mounting table is held at the first point.

  In such an embodiment, the first member held by the first robot is not directly transferred to the second robot, but the first member is placed on the mounting table and transferred, whereby the first robot and the second robot are moved to the first member. It is possible to easily hold the surface opposite to the surface to which the adhesive is applied. In addition, by using the first robot and the second robot, the first member located at a distant place can be transported to the second member, and the first member and the second member are aligned and joined with high accuracy. can do.

  Here, it is preferable that the second robot presses the entire surface of the other surface of the first member toward the second member when the first member is bonded to the second member. According to this, by pressing the entire surface on the side opposite to the bonding surface, pressure can be applied evenly and adhesion failure can be suppressed.

  The direction in which the second robot can move is preferably smaller than the direction in which the first robot can move. According to this, the operation accuracy can be further improved and the positioning accuracy can be improved by using the second robot having a small movement direction.

  The distance that the second robot transports the first member is preferably shorter than the distance that the first robot transports the first member. According to this, the operation accuracy can be further improved by using the second robot having a short moving distance, and the positioning accuracy can be improved. Further, the first member and the second member can be arranged at a distance.

FIG. 2 is an exploded perspective view of a recording head according to Embodiment 1 of the invention. FIG. 3 is a cross-sectional view of the recording head according to Embodiment 1 of the invention. FIG. 3 is a perspective view illustrating a recording head manufacturing method according to Embodiment 1 of the invention. FIG. 5 is a cross-sectional view illustrating the method for manufacturing the recording head according to the first embodiment of the invention.

Hereinafter, the present invention will be described in detail based on embodiments.
(Embodiment 1)
FIG. 1 is an exploded perspective view of an ink jet recording head that is an example of a liquid jet head according to Embodiment 1 of the present invention, and FIG. 2 is a cross-sectional view of the ink jet recording head.

  As shown in the figure, the ink jet recording head 1 of the present embodiment includes a plurality of members such as a head main body 11 and a case member 40, and the plurality of members are joined by an adhesive or the like. In the present embodiment, the head body 11 includes a flow path forming substrate 10, a communication plate 15, a nozzle plate 20, a protective substrate 30, and a compliance substrate 45.

  The flow path forming substrate 10 constituting the head main body 11 is provided with a plurality of nozzle openings 21 through which pressure generation chambers 12 partitioned by a plurality of partition walls discharge ink by anisotropic etching from one side. It is arranged side by side along the direction of installation. Hereinafter, this direction is referred to as a direction in which the pressure generating chambers 12 are arranged side by side or a first direction X. Further, the flow path forming substrate 10 is provided with a plurality of rows in which the pressure generation chambers 12 are arranged in parallel in the first direction X, and in this embodiment, two rows. An arrangement direction in which a plurality of rows of the pressure generation chambers 12 in which the pressure generation chambers 12 are formed along the first direction X is provided is hereinafter referred to as a second direction Y. Furthermore, the direction in which the flow path forming substrate 10, the communication plate 15, the nozzle plate 20, and the protective substrate 30 are stacked is hereinafter referred to as a third direction Z.

  Further, the flow path forming substrate 10 has an opening area narrower than that of the pressure generation chamber 12 on one end portion side in the second direction Y of the pressure generation chamber 12, and the flow path resistance of ink flowing into the pressure generation chamber 12. A supply path or the like for providing the above may be provided.

  A communication plate 15 is bonded to one surface side of the flow path forming substrate 10. The communication plate 15 is joined to a nozzle plate 20 having a plurality of nozzle openings 21 communicating with the pressure generating chambers 12.

  The communication plate 15 is provided with a nozzle communication path 16 that communicates the pressure generation chamber 12 and the nozzle opening 21. The communication plate 15 has a larger area than the flow path forming substrate 10, and the nozzle plate 20 has a smaller area than the flow path forming substrate 10. Thus, cost reduction can be achieved by making the area of the nozzle plate 20 relatively small.

  Further, the communication plate 15 is provided with a first manifold portion 17 and a second manifold portion 18 that constitute a part of the manifold 90.

  The first manifold portion 17 is provided through the communication plate 15 in the thickness direction (the stacking direction of the communication plate 15 and the flow path forming substrate 10).

  Further, the second manifold portion 18 is provided to open to the nozzle plate 20 side of the communication plate 15 without penetrating the communication plate 15 in the thickness direction.

  Further, the communication plate 15 is provided with a supply communication passage 19 that communicates with one end portion of the pressure generation chamber 12 in the second direction Y independently for each pressure generation chamber 12. The supply communication path 19 communicates the second manifold portion 18 and the pressure generation chamber 12.

  In the present embodiment, the flow path forming substrate 10 and the communication plate 15 are bonded via the adhesive 25.

  The nozzle plate 20 is formed with nozzle openings 21 communicating with the pressure generation chambers 12 via the nozzle communication passages 16. That is, nozzle openings 21 that eject the same type of liquid (ink) are juxtaposed in the first direction X, and the rows of nozzle openings 21 juxtaposed in the first direction X are in the second direction. Two rows are formed in Y.

  In the present embodiment, the communication plate 15 and the nozzle plate 20 are bonded via the adhesive 26.

  On the other hand, a diaphragm is formed on the surface of the flow path forming substrate 10 opposite to the communication plate 15. Moreover, the piezoelectric actuator 300 which is a pressure generation means of this embodiment is comprised by laminating | stacking a 1st electrode, a piezoelectric material layer, and a 2nd electrode in order on a diaphragm. In general, one of the electrodes of the piezoelectric actuator 300 is used as a common electrode, and the other electrode and the piezoelectric layer are patterned for each pressure generating chamber 12.

  A protective substrate 30 having substantially the same size as the flow path forming substrate 10 is bonded to the surface of the flow path forming substrate 10 on the piezoelectric actuator 300 side. The protective substrate 30 has a holding portion 31 that is a space for protecting the piezoelectric actuator 300. The protective substrate 30 is provided with a through-hole 32 that penetrates in the thickness direction (the stacking direction of the flow path forming substrate 10 and the protective substrate 30). The end portion of the lead electrode drawn out from the second electrode is extended so as to be exposed in the through hole 32, and the lead electrode and the wiring substrate 96 on which the driving circuit 95 such as a driving IC is mounted are connected to the through hole 32. Is electrically connected within.

  In the present embodiment, a joined body in which the flow path forming substrate 10 and the protective substrate 30 are joined is referred to as an actuator unit 200.

  In addition, a case member 40 is fixed to the head main body 11 having such a configuration, which defines a manifold 90 communicating with the plurality of pressure generating chambers 12 together with the head main body 11. The case member 40 has substantially the same shape as the communication plate 15 described above in a plan view, and is bonded to the protective substrate 30 and is also bonded to the communication plate 15 described above. Specifically, the case member 40 has a recess 41 having a depth in which the flow path forming substrate 10 and the protective substrate 30 are accommodated on the protective substrate 30 side. The concave portion 41 has an opening area larger than the surface of the protective substrate 30 bonded to the flow path forming substrate 10. The opening surface on the nozzle plate 20 side of the recess 41 is sealed by the communication plate 15 in a state where the flow path forming substrate 10 and the like are accommodated in the recess 41. As a result, a third manifold portion 42 is defined by the case member 40 and the head body 11 on the outer peripheral portion of the flow path forming substrate 10. The manifold 90 of this embodiment is configured by the first manifold portion 17 and the second manifold portion 18 provided on the communication plate 15 and the third manifold portion 42 defined by the case member 40 and the head body 11. It is configured.

  A compliance substrate 45 is provided on the surface of the communication plate 15 where the first manifold portion 17 and the second manifold portion 18 open. The compliance substrate 45 seals the openings of the first manifold portion 17 and the second manifold portion 18.

  In this embodiment, the compliance substrate 45 includes a sealing film 46 and a fixed substrate 47. The sealing film 46 is formed of a flexible thin film (for example, polyphenylene sulfide (PPS), stainless steel (SUS), etc. Further, the fixed substrate 47 is made of metal such as stainless steel (SUS), etc. The region of the fixed substrate 47 that faces the manifold 90 is an opening 48 that is completely removed in the thickness direction, so that one surface of the manifold 90 has flexibility. It is a compliance part which is a flexible part sealed only with the sealing film 46.

  The case member 40 is provided with an introduction path 44 that communicates with the manifold 90 and supplies ink to each manifold 90. The case member 40 is provided with a connection port 43 that communicates with the through hole 32 of the protective substrate 30 and through which the wiring substrate 96 is inserted.

  In the ink jet recording head 1 having such a configuration, when ink is ejected, the ink is taken in from the storage means such as an ink cartridge through the introduction path 44, and the inside of the flow path is extended from the manifold 90 to the nozzle opening 21. Fill with. Thereafter, in accordance with a signal from the drive circuit 95, a voltage is applied to each piezoelectric actuator 300 corresponding to the pressure generating chamber 12 to bend and deform the diaphragm together with the piezoelectric actuator 300. As a result, the pressure in the pressure generating chamber 12 is increased and ink droplets are ejected from the predetermined nozzle openings 21. In the ink jet recording head 1 of the present embodiment, the area from the connection port 43 to the nozzle opening 21 is referred to as a liquid channel. That is, the liquid flow path includes the connection port 43, the manifold 90, the supply communication path 19, the pressure generation chamber 12, the nozzle communication path 16, and the nozzle opening 21.

  A method for manufacturing such an ink jet recording head will be described with reference to FIGS. FIG. 3 is a perspective view showing a method for manufacturing an ink jet recording head which is an example of the liquid jet head of the present invention, and FIG. 4 is a cross-sectional view showing the method for manufacturing the ink jet recording head.

  In this embodiment, the actuator unit 200 in which the flow path forming substrate 10 provided with the pressure generating chamber 12 and the piezoelectric actuator 300 and the protective substrate 30 are joined is used as the first member, and the communication provided with the first manifold 17 and the like. The plate 15 is used as a second member, and the flow path forming substrate 10 constituting the first member and the communication plate 15 as the second member are bonded with an adhesive 25 while being aligned.

  Specifically, as shown in FIG. 3, the first robot 100 that transports the actuator unit 200 from the point A to the point B corresponding to the first point, and the actuator unit 200 from the point B to the point C And a second robot 110 for bonding the actuator unit 200 and the communication plate 15 at a point. The robot of this embodiment is a machine that can convey and position a member by a program or a command from a computer, that is, a so-called industrial robot.

  As shown in FIG. 4A, at the point A, a plurality of actuator units 200 are held on the tray 120, and one side of the actuator unit 200, that is, a flow path forming substrate, is held on the tray 120. An adhesive 25 is applied to the surface to be bonded to the ten communication plates 15. Such an actuator unit 200 is held on the tray 120 so that the surface opposite to the surface to which the adhesive 25 is applied is the tray 120 side. Note that the opening 120 is provided in the tray 120, and the first robot 100 inserts the first robot holding portion 105 at the tip into the opening 121 and the surface held on the tray 120 of the actuator unit 200. Hold.

  As shown in FIG. 3, the first robot 100 is provided with an actuator unit 200 held at the tip, and the tip holding the actuator unit 200 is movable in four directions.

  Here, the first robot 100 according to the present embodiment includes a first robot base 101, a first arm unit 102 provided to be rotatable in the θ1 direction with respect to the first robot base 101, and a first arm unit. The second arm portion 103 provided so as to be rotatable in the θ2 direction with respect to 102, the third arm portion 104 provided so as to be rotatable in the θ3 direction with respect to the second arm portion 103, and the third arm portion 104 On the other hand, the first robot holding unit 105 is provided so as to be rotatable in the θ4 direction, and the first robot 100 is a so-called articulated robot. As described above, the first robot 100 is held at the tip of the first robot holding portion 105 by providing the arm portions 102 to 104 and the first robot holding portion 105 so as to be rotatable in the θ1 direction to the θ4 direction. The actuator unit 200 can be translated in the first direction X, the second direction Y, and the third direction Z, and can be rotated in the rotational direction θ. That is, the first robot 100 can move the actuator unit 200 in four directions. Incidentally, the first direction X, the second direction Y, and the third direction Z shown in FIG. 3 are the first direction X, the second direction Y, and the third direction Z in the ink jet recording head 1 described above. May be in the same direction as the ink jet recording head 1 or in a different direction from the ink jet recording head 1. Further, in the present embodiment, the first robot 100 has axes that can rotate in four directions from the θ1 direction to the θ4 direction, that is, four axes, but is not particularly limited to this. It may have an axis.

  The first robot holding portion 105 at the tip of the first robot 100 holds the actuator unit 200. Here, the method of holding the actuator unit 200 by the first robot holding unit 105 is not particularly limited, and examples thereof include vacuum suction and adhesion. Incidentally, in the actuator unit 200, the flow path forming substrate 10 and the protective substrate 30 are joined, and since the thickness in the third direction Z, which is the stacking direction, is thin, it is difficult to sandwich the side surface. . For this reason, the first robot holding unit 105 needs to hold the surface of the actuator unit 200 opposite to the surface on which the adhesive 25 is applied.

  The first robot 100 holds the actuator unit 200 to which the adhesive 25 held on the tray 120 is applied. However, the present invention is not limited to this, and the actuator unit 200 held on the first robot 100 is not limited thereto. Alternatively, the adhesive 25 may be applied. That is, the first robot 100 may apply the adhesive 25 to the actuator unit 200. That is, the actuator unit 200 may be applied with the adhesive 25 before reaching the point B, and the timing for applying the adhesive 25 is not particularly limited.

  The second robot 110 holds the actuator unit 200 at the tip, and the tip holding the actuator unit 200 is provided to be movable in three directions. Specifically, the second robot 110 includes a second robot base 111, a first member 112 provided to be movable in the first direction X with respect to the second robot base 111, A second member 113 provided to be movable in the second direction Y with respect to the member 112, and a second robot holding portion provided to be movable in the third direction Z with respect to the second member 113. 114. Accordingly, the second robot 110 is provided so that the actuator unit 200 can be moved in the first direction X, the second direction Y, and the third direction Z. Note that the second robot 110 of the present embodiment is a so-called orthogonal robot.

  As described above, the second robot 110 is less movable than the first robot 100. That is, the first robot 100 can move in four directions of the first direction X, the second direction Y, the third direction Z, and the rotation direction θ, while the second robot 110 The movement is possible in three directions: a direction X, a second direction Y, and a third direction Z. Therefore, the second robot 110 can position the actuator unit 200 with higher accuracy than the first robot 100. That is, the moving direction of the tip of the robot is determined by the number of rotatable rotating shafts, but since there is a clearance for enabling rotation between the rotating shaft and the bearing, the number of rotating shafts increases. There is a possibility that the error of the stop position becomes large. For this reason, the actuator unit 200 is positioned with respect to the communication plate 15 using the second robot 110 having a smaller moving direction than the first robot 100, which is higher than the case where the first robot 100 is used for positioning. It can be positioned with high accuracy.

  Further, the moving direction of the second robot 110 of the present embodiment in the first direction X is shorter than the moving direction of the first robot 100 in the first direction X. Also by this, the second robot 110 can be positioned with higher accuracy than the first robot 100. That is, in general, a robot with a long conveyance distance has low operation accuracy, and a robot with a short conveyance distance can increase the operation accuracy although it cannot carry a long distance. For this reason, as the second robot 110, it is possible to use a robot having a short operation distance and high operation accuracy and high positioning accuracy.

  As shown in FIGS. 3 and 4B, the mounting table 130 provided at the point B is temporarily moved by the actuator unit 200 when the actuator unit 200 is transferred from the first robot 100 to the second robot 110. It is to be placed. Such a mounting table 130 includes a base plate 131 and three mounting pins 132 provided to protrude from the surface of the base plate 131. The mounting pins 132 may be provided in a number that can support the actuator unit 200, that is, three or more. Further, the three placement pins 132 are arranged in an arrangement capable of supporting the actuator unit 200. That is, if the three placement pins 132 are arranged on a straight line, the actuator unit 200 cannot be supported, and therefore, it is only necessary to have an arrangement other than the straight line.

  Further, as shown in FIGS. 3 and 4C, the communication plate 15 as the second member is held by the holding member 140 at the point C. Although not particularly illustrated, the point C is provided with an apparatus necessary for alignment between the actuator unit 200 and the communication plate 15, for example, an imaging means for imaging an alignment mark provided on each member. Based on the image acquired by the means, the actuator unit 200 and the communication plate 15 can be aligned.

  First, as shown in FIG. 4A, at the point A, the first robot 100 conveys the actuator unit 200 placed on the tray 120 to the point B. At this time, the first robot 100 reverses the actuator unit 200 in the rotation direction θ during conveyance in the first direction X so that one surface of the actuator unit 200 to which the adhesive 25 is attached faces downward in the vertical direction. .

  Then, as shown in FIG. 4B, the first robot 100 has a surface to which the adhesive 25 of the actuator unit 200 is applied at the point B, that is, a surface to which the adhesive 25 of the flow path forming substrate 10 is applied. Is mounted on the mounting pin 132 of the mounting table 130. As a result, the actuator unit 200 is supported at the tip of the placement pin 132.

  Here, the non-application area | region where the adhesive agent 25 is not apply | coated is provided in the surface side adhere | attached on the communicating plate 15 of the flow-path formation board | substrate 10 which comprises the actuator unit 200. FIG. In the present embodiment, in the non-application region, the flow path forming substrate 10 is provided with the concave portion 201 that opens on the adhesive surface side with the communication plate 15 so that the adhesive 25 is not applied in the concave portion 201.

  Incidentally, the application of the adhesive 25 to the flow path forming substrate 10 can use a dispenser method, a screen printing method, a transfer method, or the like. In the flow path forming substrate 10 constituting the actuator unit 200 of the ink jet recording head 1 of the present embodiment, the pressure generating chambers 12 and the like that are fine processing are formed with high density and high accuracy. Since the nozzle communication passage 16 and the like, which are fine processing, are formed with high density and high precision, the adhesive 25 for bonding them needs to be applied with high precision and a uniform thickness. For this reason, as a method for applying the adhesive 25 to the flow path forming substrate 10, a transfer method is preferable. In addition, the application of the adhesive by the transfer method is performed, for example, by applying the adhesive to a coated substrate provided with an adhesive reservoir in a predetermined shape, and transferring the adhesive other than the adhesive reservoir of the coated substrate to the transfer substrate. To do. As a result, the adhesive is stored only in the adhesive reservoir of the coated substrate, and the adhesive stored in the adhesive reservoir is transferred to the member to be bonded. As a result, the adhesive is transferred and applied to the adherend in the same shape as the adhesive reservoir.

  In the present embodiment, the concave portion 201 formed in the flow path forming substrate 10 has a pointed shape whose width is gradually narrowed in the depth direction. For this reason, the mounting pin 132 supports the actuator unit 200 by leading the tip into the recess 201 and making point contact with the bottom surface of the recess 201.

  Next, the second robot 110 moves to the point C while holding the surface of the actuator unit 200 where the adhesive 25 is not applied. That is, the second robot 110 holds the surface of the protective substrate 30 opposite to the flow path forming substrate 10.

  At this time, since the actuator unit 200 is mounted on the mounting table 130 so that the bonding surface side is supported, the second robot 110 does not touch the adhesive 25 applied to the actuator unit 200, and the actuator unit 200 does not touch the actuator unit 200. The surface opposite to the adhesive surface can be easily held. Further, since the actuator unit 200 is mounted on the mounting table 130 with the bonding surface side supported, the second robot 110 can hold the entire surface on the opposite side of the bonding surface of the actuator unit 200. .

  Incidentally, although it may be possible to apply the adhesive 25 while the second robot 110 holds the actuator unit 200, the actuator unit 200 may be moved in the rotational direction θ in some cases when the adhesive 25 is applied. Therefore, a robot that can move in the rotational direction θ has one more movement direction, which decreases the operation accuracy, and the positioning accuracy with the communication plate 15 decreases. Further, the second robot 110 has a limited operation range in order to increase the operation accuracy, and can move between the device for applying the adhesive 25 and the point C that is positioned and bonded to the communication plate 15. It is difficult.

  Then, the second robot holding the actuator unit 200 moves the actuator unit 200 in the first direction X, the second direction Y, and the third direction Z as shown in FIG. The actuator unit 200 is positioned with respect to the communication plate 15 at a point C, and the actuator unit 200 and the communication plate 15 are bonded via the adhesive 25. At this time, since the second robot 110 holds the entire surface of the actuator unit 200 opposite to the surface to which the adhesive 25 is applied, the second robot 110 is different from the surface to which the adhesive 25 of the actuator unit 200 is applied. The entire surface of the opposite side can be pressed toward the communication plate 15 side. As a result, an equal load can be applied to the actuator unit 200, and the yield of the adhesive 25 can be suppressed by preventing the adhesive 25 from sticking out or causing poor adhesion. That is, the second robot 110 of the present embodiment holds the entire surface of the actuator unit 200 opposite to the surface on which the adhesive 25 is applied, so that the first robot 100 is applied with the adhesive 25 of the actuator unit 200. The second robot 110 cannot receive the actuator unit 200 directly from the first robot 100 while holding the surface opposite to the surface. However, at point B, the actuator unit 200 is provided with a recess 201 and a non-application area where the adhesive 25 is not applied is provided, so that the actuator unit 200 is moved from the first robot 100 to the second robot 110 via the mounting table 130. By transferring, the first robot 100 holding the surface opposite to the bonding surface of the actuator unit 200 can be transferred to the second robot 110 holding the entire surface opposite to the bonding surface of the actuator unit 200.

  As described above, the first robot 100 transports the actuator unit 200 from the point A to the point B, and after placing the actuator unit 200 on the mounting table 130 at the point B, the first robot 100 changes to the second robot 110. The second robot 110 carries the actuator unit 200 from the point B to the point C, and the second robot 110 positions the actuator unit 200 with respect to the communication plate 15 at the point C and joins them together. Even at a distant place such as point A and point C, it is possible to carry the actuator unit 200 and to join the actuator unit 200 and the communication plate 15 by high-precision positioning. Further, the ink jet recording head 1 can be automatically assembled by the first robot 100 and the second robot 110, and the manufacturing cost can be reduced.

(Other embodiments)
As mentioned above, although one Embodiment of this invention was described, the basic composition of this invention is not limited to what was mentioned above.

  For example, in the first embodiment described above, the actuator unit 200 is provided with the recess 201 to provide the non-application area where the adhesive 25 is not applied. However, the present invention is not particularly limited thereto, and the recess 201 is provided. Alternatively, a non-application area may be provided. However, it is possible to easily support the actuator unit 200 by the placement pin 132 when the concave portion 201 is provided.

  In the first embodiment described above, the second robot 110 presses the entire surface of the actuator unit 200 opposite to the surface on which the adhesive 25 is applied to the communication plate 15 side. Instead, only a part of the surface of the actuator unit 200 opposite to the surface to which the adhesive 25 is applied may be pressed. However, the place where the second robot 110 presses the actuator unit 200 needs to be considered so that the pressure is evenly applied. Therefore, the actuator unit 200 is directly transferred from the first robot 100 to the second robot 110. It is difficult.

  Furthermore, in the first embodiment described above, the second robot 110 moves the actuator unit 200 from the B point to the C point compared to the distance that the first robot 100 transports the actuator unit 200 from the A point to the B point in the first direction X. Although the thing with the short distance conveyed in the 1st direction X to the point was illustrated, it is not limited to this in particular, The distance from B point to C point may be below the distance from A point to B point . Moreover, in Embodiment 1 mentioned above, although the point A, B point, and C point illustrated the structure arrange | positioned along with the 1st direction X, in this invention, between the 1st robot 100 and the 2nd robot 110, it was illustrated. Since two robots are used, the point A, the point B, and the point C may not be arranged side by side in one direction depending on the installation space and handling of the apparatus.

  Moreover, in Embodiment 1 mentioned above, although the actuator unit 200 was illustrated as a 1st member and the communication board 15 was illustrated as a 2nd member, it is not specifically limited to this. For example, in the case of the ink jet recording head 1 of the first embodiment described above, the first member may be the flow path forming substrate 10 and the second member may be the protective substrate 30. Alternatively, the first member may be the nozzle plate 20 and the second member may be a joined body of the actuator unit 200 and the communication plate 15. Of course, the ink jet recording head 1 is not limited to the above-described configuration, and the communication plate 15 is not provided, and the nozzle plate 20 is directly joined to the flow path forming substrate 10. Good.

  In the first embodiment described above, the thin film piezoelectric actuator 300 has been described as the pressure generating means for causing a pressure change in the pressure generating chamber 12, but the present invention is not particularly limited thereto. For example, a green sheet is attached. It is possible to use a thick film type piezoelectric actuator formed by such a method, a longitudinal vibration type piezoelectric actuator in which piezoelectric materials and electrode forming materials are alternately stacked and expanded and contracted in the axial direction. Also, as a pressure generating means, a heating element is arranged in the pressure generating chamber, and droplets are discharged from the nozzle opening by bubbles generated by the heat generated by the heating element, or static electricity is generated between the diaphragm and the electrode. Thus, a so-called electrostatic actuator that discharges liquid droplets from the nozzle openings by deforming the diaphragm by electrostatic force can be used.

  Furthermore, the present invention is intended for a wide range of liquid jet heads in general, for example, for manufacturing recording heads such as various ink jet recording heads used in image recording apparatuses such as printers, and color filters such as liquid crystal displays. The present invention can also be applied to methods for producing a coloring material ejecting head, an organic EL display, an electrode material ejecting head used for forming an electrode such as an FED (field emission display), and a bioorganic matter ejecting head used for biochip production. .

  DESCRIPTION OF SYMBOLS 1 Liquid ejecting head (inkjet recording head), 10 Flow path forming substrate, 12 Pressure generating chamber, 15 Communication plate (second member), 20 Nozzle plate, 21 Nozzle opening, 25, 26 Adhesive, 30 Protective substrate, 40 Case member, 90 manifold, 100 first robot, 110 second robot, 120 tray, 130 mounting table, 140 holding member, 200 actuator unit (first member), 300 piezoelectric actuator

Claims (4)

In a method of manufacturing a liquid ejecting head in which a first member and a second member constituting a liquid ejecting head that ejects liquid are bonded while being aligned with an adhesive,
Transporting the first member coated with adhesive to a first point by a first robot;
The second robot having higher operation accuracy than the first robot transports the first member transported to the first point by the first robot to the second member, and moves the first member to the second member. When bonding while aligning to the member,
Applying the adhesive to one surface of the first member;
The first robot and the second robot hold the other surface of the first member opposite to the one surface on which the adhesive is applied,
At least three non-application areas where the adhesive is not applied are provided on the one surface of the first member, and the first robot is configured such that the non-application area of the first member serves as a contact at the first point. The first member is mounted on a mounting table, and the second robot holds the first member mounted on the mounting table at the first point. .   The said 2nd robot presses the whole surface of the said other surface of the said 1st member toward the said 2nd member, when adhere | attaching the said 1st member to the said 2nd member. Manufacturing method of liquid jet head of   The method of manufacturing a liquid jet head according to claim 1, wherein the movable direction of the second robot is less than the movable direction of the first robot.   4. The liquid according to claim 1, wherein a distance that the second robot transports the first member is shorter than a distance that the first robot transports the first member. 5. Manufacturing method of ejection head.

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